JP2011190146A - Piezoelectric ceramic material - Google Patents
Piezoelectric ceramic material Download PDFInfo
- Publication number
- JP2011190146A JP2011190146A JP2010057734A JP2010057734A JP2011190146A JP 2011190146 A JP2011190146 A JP 2011190146A JP 2010057734 A JP2010057734 A JP 2010057734A JP 2010057734 A JP2010057734 A JP 2010057734A JP 2011190146 A JP2011190146 A JP 2011190146A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- piezoelectric material
- compound
- knn
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910010293 ceramic material Inorganic materials 0.000 title abstract 3
- 239000011521 glass Substances 0.000 claims abstract description 129
- 239000000463 material Substances 0.000 claims abstract description 94
- 150000001875 compounds Chemical class 0.000 claims abstract description 33
- 239000013078 crystal Substances 0.000 claims abstract description 10
- 238000002425 crystallisation Methods 0.000 claims abstract description 3
- 230000008025 crystallization Effects 0.000 claims abstract description 3
- 239000002245 particle Substances 0.000 claims description 30
- 239000002994 raw material Substances 0.000 claims description 22
- 239000000203 mixture Substances 0.000 claims description 17
- 239000000843 powder Substances 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 15
- 238000002156 mixing Methods 0.000 claims description 13
- 238000010298 pulverizing process Methods 0.000 claims description 10
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 9
- 239000011230 binding agent Substances 0.000 claims description 9
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 claims description 4
- 229910018068 Li 2 O Inorganic materials 0.000 claims description 4
- 239000002904 solvent Substances 0.000 claims description 3
- 229940126062 Compound A Drugs 0.000 claims 1
- NLDMNSXOCDLTTB-UHFFFAOYSA-N Heterophylliin A Natural products O1C2COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC2C(OC(=O)C=2C=C(O)C(O)=C(O)C=2)C(O)C1OC(=O)C1=CC(O)=C(O)C(O)=C1 NLDMNSXOCDLTTB-UHFFFAOYSA-N 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 31
- 238000010521 absorption reaction Methods 0.000 description 28
- 239000000654 additive Substances 0.000 description 27
- 230000000996 additive effect Effects 0.000 description 21
- 238000011156 evaluation Methods 0.000 description 11
- 238000012360 testing method Methods 0.000 description 9
- 238000005245 sintering Methods 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 238000005469 granulation Methods 0.000 description 3
- 230000003179 granulation Effects 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000003746 solid phase reaction Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
本発明は、圧電材料に関し、具体的には、鉛を含まない圧電材料の改良技術に関する。 The present invention relates to a piezoelectric material, and more specifically, to an improved technique for a piezoelectric material not containing lead.
圧電材料としては、ＰＺＴ（ＰｂＴｉＯ３−ＰｂＺｒＯ３）組成系セラミックスがよく知られている。ＰＺＴは、電気機械結合係数や圧電定数などの圧電特性に優れ、このＰＺＴは、センサ、超音波モータ、フィルターなどの圧電素子に広く使用されている。 As a piezoelectric material, PZT (PbTiO 3 —PbZrO 3 ) composition ceramics are well known. PZT is excellent in piezoelectric characteristics such as an electromechanical coupling coefficient and a piezoelectric constant, and this PZT is widely used in piezoelectric elements such as sensors, ultrasonic motors, and filters.
ところで、近年では、環境に対する要請から工業製品の「鉛フリー」化が急務となっている。当然、ＰＺＴも最終的に工業製品に使用されるため、圧電材料も、鉛（Ｐｂ）が含まれているＰＺＴから、鉛を含まない他の圧電材料に置換していく必要がある。 By the way, in recent years, there is an urgent need to make industrial products “lead-free” due to environmental demands. Naturally, since PZT is finally used for industrial products, it is necessary to replace the piezoelectric material from PZT containing lead (Pb) with another piezoelectric material not containing lead.
そして、鉛を含まない圧電材料（非鉛圧電材料）としては、以下の特許文献１に記載されているような、ＫｘＮａ（１−ｘ）ＮｂＯ３の化学式で表される化合物（ＫＮＮ）にＣｏを含む添加物を添加したものがある。具体的にはＣｏ２Ｏ３を添加したＫＮＮ−Ｃｏ２Ｏ３系圧電材料であり、この圧電材料は、焼結性が高く、非鉛圧電材料として注目されている。また、圧電材料に関する一般的な技術については、以下の非特許文献１に詳しく記載されている。 Then, as the piezoelectric material not containing lead (lead-free piezoelectric material), the following patents, such as described in the literature 1, K x Na (1- x) NbO 3 chemical compound represented by formula (KNN) To which an additive containing Co is added. Specifically, it is a KNN-Co 2 O 3 based piezoelectric material to which Co 2 O 3 is added, and this piezoelectric material has high sinterability and has attracted attention as a lead-free piezoelectric material. Further, general techniques related to piezoelectric materials are described in detail in Non-Patent Document 1 below.
非鉛圧電材料として期待されている上記のＫＮＮ−Ｃｏ２Ｏ３系圧電材料は、緻密化が図られ生産性には優れているが、耐湿性に乏しい、ということが本発明者らによって明らかにされた。すなわち、高湿度環境下に晒されると圧電特性が劣化することが明らかになった。そのため、例えば、吸水した水分による抵抗値の低下に起因して、その圧電材料を使用した圧電素子の消費電力を増大させる可能性を含め、吸水性に由来する様々な弊害が予想される。 The above-mentioned KNN-Co 2 O 3 piezoelectric material, which is expected as a lead-free piezoelectric material, has been densified and is excellent in productivity, but it is clear by the present inventors that it has poor moisture resistance. It was made. That is, it has been clarified that the piezoelectric characteristics deteriorate when exposed to a high humidity environment. Therefore, for example, various adverse effects due to water absorption are expected, including the possibility of increasing the power consumption of the piezoelectric element using the piezoelectric material due to the decrease in the resistance value due to the absorbed water.
したがって、本発明は、環境に優しく、圧電特性に優れるとともに、緻密性と耐湿性を向上させて、高い信頼性を有するＫＮＮ系圧電材料を提供することを目的としている。 Accordingly, an object of the present invention is to provide a KNN piezoelectric material that is environmentally friendly, excellent in piezoelectric characteristics, improved in denseness and moisture resistance, and has high reliability.
そして、上記目的を達成するための本発明は、一般式ＫｘＮａ（１−ｘ）Ｎｂ０３で表される化合物を主成分として含んだ圧電材料であって、０．１≦ｘ≦０．７であるとともに、ガラスが前記化合物の結晶粒の粒界に存在してなる構造を有していることを特徴としている。また、前記ガラスの軟化点温度が、前記化合物の結晶化温度よりも低い圧電材料とすればより好ましい。 In order to achieve the above object, the present invention provides a piezoelectric material containing a compound represented by the general formula K x Na (1-x) Nb0 3 as a main component, wherein 0.1 ≦ x ≦ 0. 7 and the glass has a structure formed by existing at the grain boundaries of the crystal grains of the compound. In addition, it is more preferable that the glass has a softening point temperature lower than the crystallization temperature of the compound.
そして、前記ガラスは、Ｂｉ２Ｏ３を主成分として含むＢｉ系ガラス、ＳｉＯ２を主成分としてＬｉ２Ｏを含むＬｉ系ガラス、ＺｎＯを主成分として含むＺｎ系ガラス、ＳｉＯ２を主成分として含むＳｉ系ガラスから少なくとも１種以上選ばれる圧電材料も本発明の範囲としている。 The glass is Bi-based glass containing Bi 2 O 3 as a main component, Li-based glass containing SiO 2 as a main component and Li 2 O, Zn-based glass containing ZnO as a main component, and SiO 2 as a main component. A piezoelectric material selected from at least one of Si-containing glasses is also included in the scope of the present invention.
また、前記ガラスが、前記Ｌｉ系ガラスである場合、当該Ｌｉ系ガラスの添加量は、前記化合物に対し０．１ｗｔ％よりも多く、１０．０ｗｔ％以下であることがより好ましい。前記ガラスが、前記Ｂｉ系ガラスである場合は、その添加量が、前記化合物に対し０．０８ｗｔ％よりも多く、１２．４ｗｔ％以下であることがより好ましい。前記ガラスが、前記Ｚｎ系ガラスである場合は、その添加量が、前記化合物に対し０．０７ｗｔ％よりも多く、１３．３ｗｔ％以下であることがより好ましい。前記ガラスが、前記Ｓｉ系ガラスである場合は、その添加量が、前記化合物に対し０．０８ｗｔ％よりも多く、１４．８ｗｔ％以下であることがより好ましい。さらには、前記ガラスの粒子径が前記化合物の粒子径の２倍以下であることがより好ましい。 Moreover, when the said glass is the said Li-type glass, it is more preferable that the addition amount of the said Li-type glass is more than 0.1 wt% with respect to the said compound, and is 10.0 wt% or less. When the glass is the Bi-based glass, it is more preferable that the addition amount is more than 0.08 wt% and 12.4 wt% or less with respect to the compound. When the glass is the Zn-based glass, it is more preferable that the addition amount is more than 0.07 wt% and not more than 13.3 wt% with respect to the compound. When the glass is the Si-based glass, the addition amount is more preferably greater than 0.08 wt% and not greater than 14.8 wt% with respect to the compound. Furthermore, it is more preferable that the particle diameter of the glass is not more than twice the particle diameter of the compound.
また、本発明は、圧電材料の製造方法にも及んでおり、当該製造方法に係る発明は、
溶媒にＫｘＮａ（１−ｘ）Ｎｂ０３で表される化合物の原料を０．１≦ｘ≦０．７となるように混合し、当該化合物の原料混合物を粉砕する第１混合粉砕ステップと、
当該粉砕された前記化合物の原料混合物を仮焼成して前記化合物の粉体を生成する仮焼成ステップと、
前記化合物の粉体とガラスの原材料を粉砕するとともに、当該粉砕した前記化合物の粉体とガラスの原材料とを混合する第２混合粉砕ステップと、
前記第２混合粉砕ステップにより得た前記粉末にバインダーを添加するとともに、当該バインダーが添加された粉末を成形した上で焼成させる焼成ステップと、
を含んでいる。
The present invention also extends to a method for manufacturing a piezoelectric material, and the invention related to the manufacturing method includes:
A first mixing and pulverizing step of mixing a raw material of a compound represented by K x Na (1-x) Nb0 3 in a solvent so that 0.1 ≦ x ≦ 0.7, and pulverizing the raw material mixture of the compound; ,
A pre-baking step of pre-baking the pulverized raw material mixture of the compound to produce a powder of the compound;
A second mixing and pulverizing step of pulverizing the compound powder and glass raw material, and mixing the pulverized compound powder and glass raw material;
A baking step of adding a binder to the powder obtained by the second mixing and pulverizing step, and baking the powder after the binder is added;
Is included.
本発明によれば、環境に優しく、圧電特性に優れるとともに、高い信頼性を有する圧電材料を提供することができる。 According to the present invention, it is possible to provide a piezoelectric material that is environmentally friendly, excellent in piezoelectric characteristics, and highly reliable.
＝＝＝圧電材料＝＝＝
圧電材料は、図１（Ａ）に示したように、母材となる化合物の結晶粒１０同士がモザイク状につなぎ合わされた構造を有している。上述したように、一般式ＫｘＮａ（１−ｘ）Ｎｂ０３（以下、ＫＮＮ）で表される化合物は、鉛を含まず、環境性能に優れた圧電材料の母材として期待されているが、図１（Ｂ）の円２０内に拡大して示したように、その結晶粒１０同士の結合構造が粗であり、隣接する結晶粒１０間の境界（粒界）１１から水分が吸収されてしまう可能性がある。また、ＫＮＮにＣｏ２Ｏ３を添加した従来の圧電材料では、緻密化が図られ生産性には優れているが、高湿度環境下に晒されると圧電特性が劣化する、ということが判明した。
=== Piezoelectric material ===
As shown in FIG. 1A, the piezoelectric material has a structure in which crystal grains 10 of a compound serving as a base material are connected in a mosaic pattern. As described above, the compound represented by the general formula K x Na (1-x) Nb0 3 (hereinafter referred to as KNN) does not contain lead and is expected as a base material of a piezoelectric material excellent in environmental performance. As shown in an enlarged circle 20 in FIG. 1B, the bonding structure between the crystal grains 10 is rough, and moisture is absorbed from the boundary (grain boundary) 11 between the adjacent crystal grains 10. There is a possibility that. In addition, the conventional piezoelectric material in which Co 2 O 3 is added to KNN is densified and excellent in productivity, but it has been found that the piezoelectric characteristics deteriorate when exposed to a high humidity environment. .
しかし、母材、すなわちＫＮＮの構造自体を安易に稠密にしようとすれば、ＫＮＮ本来の圧電特性が損なわれる可能性もある。そこで、本発明者は、圧電物質であるＫＮＮ自体ではなく、圧電素子に組み込まれる状態の圧電材料、すなわち、圧電物質の原料に添加物を混合して焼結させてなる最終生成物が、吸水しにくい（非吸水）性能や耐湿性能を向上させるための構造を有していれば、ＫＮＮ本来の圧電性能を維持できると考えた。本発明は、このような考察に基づいて鋭意研究した結果得られたものである。 However, if the base material, that is, the structure of the KNN itself is easily made dense, the original piezoelectric characteristics of the KNN may be impaired. Therefore, the present inventor has not absorbed the piezoelectric material KNN itself, but the piezoelectric material in a state of being incorporated in the piezoelectric element, that is, the final product obtained by mixing and sintering the additive to the raw material of the piezoelectric material. It was thought that KNN's original piezoelectric performance could be maintained if it had a structure to improve performance (non-water absorption) and moisture resistance. The present invention has been obtained as a result of extensive research based on such considerations.
＝＝＝圧電材料の作製手順＝＝＝
本発明の実施例における圧電材料は、ＫＮＮを主成分として含み、この圧電物質であるＫＮＮに添加物を加えて焼結することで得られる。そして、ＫＮＮにおけるＫとＮａの組成比、添加物の種類、添加物の重量比などの作製条件が異なる複数の圧電材料をサンプルとして作製した。また、作製条件が同じサンプルを複数作製し、同じ作製条件のサンプルで吸水試験や耐湿試験を行い、その試験結果の平均値で非吸水性能や耐湿性能を評価した。そして、本発明の実施例となる圧電材料について、ＫＮＮにおけるｘの値や、添加物の添加量などを、その評価結果に基づいて規定した。
=== Procedure for Manufacturing Piezoelectric Material ===
The piezoelectric material according to the embodiment of the present invention includes KNN as a main component, and is obtained by adding an additive to KNN which is the piezoelectric material and sintering. A plurality of piezoelectric materials having different production conditions such as the composition ratio of K and Na in KNN, the kind of additive, and the weight ratio of the additive were produced as samples. Further, a plurality of samples having the same production conditions were produced, a water absorption test and a moisture resistance test were performed on the samples having the same production conditions, and the non-water absorption performance and the moisture resistance performance were evaluated based on the average values of the test results. And about the piezoelectric material used as the Example of this invention, the value of x in KNN, the addition amount of an additive, etc. were prescribed | regulated based on the evaluation result.
図２に、サンプルとなる圧電材料の作製手順を示した。まず、圧電材料の母材となるＫＮＮの原料を所定量秤量して配合し（ｓ１）、ボールミル中に、その原料と溶媒となるアルコール（エタノールなど）を入れて湿式混合する（ｓ２）。それによって、ＫＮＮの原料が混合されるとともに粉体状に粉砕される。そして、この混合物を大気中にて８００℃〜１０００℃の温度で１時間（ｈ）〜３ｈ仮焼成し（ｓ３）、ＫＮＮを固相反応によって生成する。すなわち、この製造手順では、添加物を含めた圧電材料の原料を全て混合するのではなく、母材だけの粉体をまず生成している。 FIG. 2 shows a procedure for manufacturing a piezoelectric material as a sample. First, a predetermined amount of KNN raw material to be used as a base material of the piezoelectric material is weighed and blended (s1), and the raw material and an alcohol (ethanol or the like) as a solvent are placed in a ball mill and wet mixed (s2). Thereby, the raw material of KNN is mixed and pulverized into a powder. The mixture is then calcined in the atmosphere at a temperature of 800 ° C. to 1000 ° C. for 1 hour (h) to 3 h (s3) to produce KNN by a solid phase reaction. That is, in this manufacturing procedure, not all the raw materials of the piezoelectric material including the additive are mixed, but first a powder of only the base material is generated.
つぎに、添加物の原料を所定量秤量するとともに、先に仮焼成によって得たＫＮＮの粉末に添加物としてガラスを加える（ｓ４）。この添加物となるガラスは、最終的に、非吸水性能や耐湿性能に優れた構造を有する圧電材料に得るための最も重要な要素である。そして、この時点で、圧電材料を構成する全原料が混合された状態となる。なお、ガラスを添加しないサンプルについては、この手順（ｓ４）をスキップさせる。 Next, a predetermined amount of the raw material of the additive is weighed, and glass is added as an additive to the KNN powder previously obtained by preliminary firing (s4). The glass as this additive is the most important element for finally obtaining a piezoelectric material having a structure excellent in non-water absorption performance and moisture resistance performance. At this point, all the raw materials constituting the piezoelectric material are mixed. Note that this step (s4) is skipped for samples to which no glass is added.
この全原料の混合物にバインダーとしてＰＶＡ水溶液を加えて混合することで、適宜な大きさの粒子径の粉末に造粒し（ｓ５）、その造粒された粉末を目的とする形状に成形する（ｓ６）。そして、上記成形物を所定温度下（例えば、３００℃〜５００℃程度）に置いて、バインダーを除去したのち、大気中で９００℃〜１２００℃の温度で１ｈ焼成し（ｓ７，ｓ８）圧電セラミックスを得る。 By adding and mixing a PVA aqueous solution as a binder to the mixture of all raw materials, the mixture is granulated into a powder having an appropriate particle size (s5), and the granulated powder is formed into a desired shape ( s6). The molded product is placed under a predetermined temperature (for example, about 300 ° C. to 500 ° C.) to remove the binder, and then fired in the atmosphere at a temperature of 900 ° C. to 1200 ° C. for 1 h (s7, s8). Get.
なお、上記手順では、仮焼成によって得たＫＮＮの粉末に添加物としてガラスを加え（ｓ４）、その上で造粒（ｓ５）していたが、仮焼成後のＫＮＮの粉末とガラスの原材料とを個別に粉砕して異なる粒子径にした上で、バインダーを加えて混合してもよい。それによって、焼成前におけるＫＮＮとガラスの原材料とが異なる粒子径で造粒することができる。いずれにしても、仮焼成後のＫＮＮの粉末とガラスの原材料とを粉砕して、これらを混合しバインダーを加えて焼成すればよい。 In the above procedure, glass was added as an additive to the KNN powder obtained by pre-baking (s4), and granulation was performed thereon (s5). May be individually pulverized to have different particle sizes, and a binder may be added and mixed. Thereby, granulation can be performed with different particle sizes between the KNN and the raw material of the glass before firing. In any case, the pre-baked KNN powder and the glass raw material may be pulverized, mixed, added with a binder, and fired.
最後に、その圧電セラミックスを、直径Φ≧１５ｍｍ、厚さｔ＝１．０ｍｍとなる円板状に加工するとともに、その円板の両面にＡｇ電極を焼き付けたのち（ｓ９，ｓ１０）、１２０℃のシリコンオイル中において、４Ｋｖ／ｍｍの電界で分極処理を施し、圧電材料とした（ｓ１１）。 Finally, the piezoelectric ceramic is processed into a disk shape having a diameter Φ ≧ 15 mm and a thickness t = 1.0 mm, and Ag electrodes are baked on both sides of the disk (s9, s10), and then 120 ° C. Was subjected to polarization treatment with an electric field of 4 Kv / mm to obtain a piezoelectric material (s11).
また、圧電セラミックスの加工（ｓ９）後、同じ条件で製造した複数のサンプルの一部は、非吸水性能の評価用として、電極の焼き付け（ｓ１０）を行わず、１２０℃の温度で１ｈ乾燥させ（ｓ１２）、重量を測定した後、煮沸した水の中に投入して１ｈ放置して、吸水させた（ｓ１３，ｓ１４）。 In addition, after processing the piezoelectric ceramic (s9), some of the plurality of samples manufactured under the same conditions were dried for 1 hour at a temperature of 120 ° C. without performing electrode baking (s10) for evaluation of non-water absorption performance. (S12) After measuring the weight, it was poured into boiled water and left for 1 h to absorb water (s13, s14).
ところで、圧電材料の作製手順としては、上記非特許文献１の第１５頁に記載されている通常の圧電材料の作製手順（上記非特許文献１、第１５頁参照）と同様に、最初に全ての原料を配合する手順もある。実際に、この手順で圧電材料を作製したが、上記手順で作製した圧電材料と比較すると、圧電特性に若干のバラツキがあった。したがった、より安定した特性を得るためには、上記手順で圧電材料を作製する方が望ましい。 By the way, as the manufacturing procedure of the piezoelectric material, first, as in the normal manufacturing procedure of the piezoelectric material described on page 15 of Non-Patent Document 1 (see Non-Patent Document 1, page 15), There are also procedures for blending the raw materials. Actually, the piezoelectric material was produced by this procedure, but there was some variation in the piezoelectric characteristics as compared with the piezoelectric material produced by the above procedure. Therefore, in order to obtain more stable characteristics, it is desirable to manufacture the piezoelectric material by the above procedure.
＝＝＝圧電材料の種類＝＝＝
上述した手順により作製した圧電材料は、ＫＮＮにおけるＫとＮａの組成比、添加物の有無、添加物の種類、添加物の添加量など応じて複数種類用意した。また、添加物としては、従来の圧電材料に使用されているＣｏ２Ｏ３と、本発明の実施例の圧電材料に使用した各種ガラスがある。以下に、そのガラスの組成と各サンプルの作製条件を示した。
=== Types of piezoelectric material ===
A plurality of types of piezoelectric materials prepared by the above-described procedure were prepared according to the composition ratio of K and Na in KNN, the presence or absence of additives, the type of additives, the amount of additives added, and the like. Additives include Co 2 O 3 used in conventional piezoelectric materials and various glasses used in the piezoelectric materials of the examples of the present invention. The composition of the glass and the production conditions for each sample are shown below.
＜ガラスの組成＞
作製したサンプルの一部には、Ｃｏ２Ｏ３ではなくガラスが添加されている。サンプルに用いたガラスは、工業用途として一般に市販されているものであり、ここでは、Ｂｉ２Ｏ３主成分として含むガラス（以下、Ｂｉ系ガラス）、ＳｉＯ２を主成分としてＬｉ２Ｏを含むガラス（以下、Ｌｉ系ガラス）、ＺｎＯを主成分として含むガラス（以下、Ｚｎ系ガラス）、およびＳｉＯ２を主成分として含むガラス（以下、Ｓｉ系ガラス）のいずれかである。参考までに、以下に、各ガラスの組成を示した。
・Ｂｉ系ガラス
Ｂｉ２Ｏ３：６０ｍｏｌ％、Ｂ２Ｏ３：３０ｍｏｌ％、ＣｕＯ：７ｍｏｌ％、ＳｉＯ２：３ｍｏｌ％
・Ｌｉ系ガラス
ＳｉＯ２：５０ｍｏｌ％、Ｌｉ２Ｏ：２０ｍｏｌ％、Ｂ２Ｏ３：２０ｍｏｌ％、ＣａＯ：５ ＢａＯ：５ｍｏｌ％
・Ｚｎ系ガラス
ＺｎＯ：４５ｍｏｌ％、ＭｇＯ：２７ｍｏｌ％、Ｂ２Ｏ３：２５ｍｏｌ％、ＳｉＯ２：３ｍｏｌ％
・Ｓｉ系ガラス
ＳｉＯ２：８０ｍｏｌ％、Ｂ２Ｏ３：１８ｍｏｌ％、Ａｌ２Ｏ３：２ｍｏｌ％
<Composition of glass>
Glass is added to a part of the manufactured sample instead of Co 2 O 3 . The glass used for the sample is generally commercially available for industrial use, and here, glass containing Bi 2 O 3 as a main component (hereinafter referred to as Bi-based glass), Li 2 O containing SiO 2 as a main component. One of glass (hereinafter referred to as Li-based glass), glass containing ZnO as a main component (hereinafter referred to as Zn-based glass), and glass including SiO 2 as a main component (hereinafter referred to as Si-based glass). For reference, the composition of each glass is shown below.
Bi-based glass Bi 2 O 3 : 60 mol%, B 2 O 3 : 30 mol%, CuO: 7 mol%, SiO 2 : 3 mol%
· Li based glass SiO 2: 50mol%, Li 2 O: 20mol%, B 2 O 3: 20mol%, CaO: 5 BaO: 5mol%
· Zn-based glass ZnO: 45mol%, MgO: 27mol %, B 2 O 3: 25mol%, SiO 2: 3mol%
· Si based glass SiO 2: 80mol%, B 2 O 3: 18mol%, Al 2 O 3: 2mol%
＜サンプル条件＞
上述したように、ＫＮＮは、ＫｘＮａ（１−ｘ）Ｎｂ０３の組成式で表され、ＫＮＮの原材料の配分に応じてｘの値が変わる。そこで、本実施例では、ｘの値が異なる各種ＫＮＮに対し、添加物の有無、添加物の種類、および添加物の添加量を変えたサンプルを７４種類作製した。以下の表１〜３に、当該７４種類のサンプルのｘおよび添加物の種類とその添加量を示した。また、各サンプルの初期特性として、電気機械結合係数Ｋｒ、機械的品質係数Ｑｍ、および誘電率ε３３の初期値を示した。なお、表中では、添加物となるＢｉ系ガラス、Ｌｉ系ガラス、Ｚｎ系ガラス、およびＳｉ系ガラスを、それぞれＢｉ、Ｌｉ、Ｚｎ、およびＳｉで示している。
<Sample conditions>
As described above, KNN is represented by the composition formula of K x Na (1-x) Nb 0 3 , and the value of x changes according to the distribution of the raw material of KNN. Therefore, in this example, 74 types of samples were prepared in which the presence / absence of the additive, the type of additive, and the amount of additive added were changed for various KNNs having different values of x. Tables 1 to 3 below show x and additive types and their addition amounts of the 74 types of samples. Also, shown as the initial characteristics of each sample, the electromechanical coupling coefficient Kr, the mechanical quality factor Qm, and the initial value of the dielectric epsilon 33. In the table, Bi-based glass, Li-based glass, Zn-based glass, and Si-based glass as additives are indicated by Bi, Li, Zn, and Si, respectively.
表１にサンプル１〜２８についての組成や初期特性を示した。
表２にサンプル２９〜５２についての組成や初期特性を示した。
表３にサンプル５３〜７４についての組成や初期特性を示した。
上記表１〜３において、サンプル１、２９，５３がＫＮＮ自体の性能を評価するためのサンプルであり、サンプル２がＫＮＮを母材としてＣｏ２Ｏ３を添加した従来の圧電材料である。そして、それ以外のサンプルが添加物としてガラスを採用した新規な圧電材料である。 In Tables 1 to 3, Samples 1, 29, and 53 are samples for evaluating the performance of KNN itself, and Sample 2 is a conventional piezoelectric material in which K 2 O 3 is added as a base material. Other samples are novel piezoelectric materials that employ glass as an additive.
なお、圧電材料の作製に際し、上記造粒の手順では、ＫＮＮの平均粒子径が０．８μｍとなるように調整した。また、ガラスについては、平均粒子径１．５μｍとなるように調整した。また、以下では、粒子径は平均粒子径を示すものとする。 In the production of the piezoelectric material, in the above granulation procedure, the average particle diameter of KNN was adjusted to 0.8 μm. Moreover, about glass, it adjusted so that it might become an average particle diameter of 1.5 micrometers. In the following, the particle diameter indicates the average particle diameter.
＝＝＝非吸水性能・耐湿性能の評価＝＝＝
上記表１〜３に示した各サンプルを恒温槽にて８５℃、８５％ＲＨの環境下に１００ｈ放置して耐湿放置試験を行い、恒温槽から取り出して４ｈ後に、上記Ｋｒ、Ｑｍ、およびε３３を測定し、初期値との比{（耐湿放置試験後測定値−耐湿試験前測定値）／耐湿試験前測定値}に基づいて耐湿性能を評価した。また、吸水処理（ｓ１４）の前後における重量比（吸水後重量／吸水前重量）を吸水率とし、その吸水率によって非吸水性能を評価した。
=== Evaluation of non-water absorption performance / moisture resistance performance ===
The samples shown in Tables 1 to 3 were left in a constant temperature bath in an environment of 85 ° C. and 85% RH for 100 hours to perform a moisture resistance test, and after 4 hours after being taken out of the constant temperature bath, the Kr, Qm, and ε 33 was measured, and the moisture resistance performance was evaluated based on the ratio {(measured value after moisture resistance test-measured value before moisture resistance test) / measured value before moisture resistance test} with respect to the initial value. Further, the weight ratio before and after the water absorption treatment (s14) (weight after water absorption / weight before water absorption) was defined as the water absorption rate, and the non-water absorption performance was evaluated based on the water absorption rate.
以下の表４〜６に各サンプルについて、吸水率と各種圧電特性における初期値との比を示した。また、吸水率や圧電特性の変化に応じて非吸水性能や耐湿性能の合否判定を行った。ここでは、吸水前後の重量比の絶対値が１％未満、かつ、耐湿放置試験前後のＫｒ、Ｑｍ、およびε３３の比が、それぞれ３％未満、２０％未満、および１０％未満であれば合格とした。なお、以下の表４〜６では、耐湿放置試験前後で測定値が減少したサンプルについては、数値の前にマイナス「−」符号を付記している。 Tables 4 to 6 below show the ratio of the water absorption rate to the initial values of various piezoelectric characteristics for each sample. Moreover, the pass / fail determination of the non-water absorption performance and the moisture resistance performance was performed according to the change in the water absorption rate and the piezoelectric characteristics. Here, the absolute value is less than 1% of the weight before and after water absorption, and, before and after the humidity resistance storage test Kr, Qm, and the ratio of epsilon 33 are each less than 3%, is less than less than 20%, and 10% Passed. In Tables 4 to 6 below, minus “−” signs are added to the front of the numerical values for samples whose measured values have decreased before and after the moisture resistance test.
表４にサンプル１〜２８についての評価結果を示した。
表５にサンプル２９〜５２についての評価結果を示した。
表６にサンプル５３〜７４についての評価結果を示した。
上記表４〜６において、ＫＮＮ単体のサンプル１、２９、５３では、予想通り、不合格判定となった。とくに、耐湿性能の劣化が顕著であった。これら全てのサンプル１、２９、５３では、とくにＱｍとε３３のいずれか、あるいは両方が劣化して不合格となった。しかし、非吸水性能に限って見れば、いずれも不合格であったものの、ｘの値を０．５、すなわちＫＮＮにおけるＫとＮａが１：１の割合としたサンプル１では、合格基準に僅かに届かなかっただけであった。このことから、ｘの値は、とくに非吸水性能を左右する可能性がある、ということが分かった。 In Tables 4 to 6 above, the samples 1, 29 and 53 of the KNN alone were judged as rejected as expected. In particular, the deterioration of moisture resistance was significant. In all these samples 1,29,53, especially Qm and epsilon 33 either, or both had failed deteriorated. However, in terms of the non-water-absorbing performance, all of the samples were unacceptable. However, in the sample 1 in which the value of x was 0.5, that is, the ratio of K and Na in KNN was 1: 1, the acceptance criteria was a little. Just didn't reach. From this, it was found that the value of x may influence the non-water absorption performance.
また、従来の圧電材料である、Ｃｏ２Ｏ３を添加したサンプル２では、吸水率が０％であり、非吸水性能については優れた性能を示したものの、ＫｒとＱｍがともに劣化し不合格判定となった。これは、Ｃｏ２Ｏ３が焼結助剤として上手く機能してＫＮＮの緻密度が上がって非吸水性能は向上したものの、Ｃｏ２Ｏ３を添加剤と使用することで、例えば、Ｃｏ２Ｏ３自体が高湿度環境下で変性し、圧電特性を劣化させてしまった、など、根本的に耐湿性能を劣化させる何らかの原因があるものと推測される。以上のことから、ｘの値や添加物を慎重に選択する必要性があることが分かる。 Sample 2 to which Co 2 O 3 is added, which is a conventional piezoelectric material, has a water absorption rate of 0% and exhibits excellent non-water absorption performance, but both Kr and Qm deteriorate and fail. It became a judgment. This is because Co 2 O 3 functions well as a sintering aid and the density of KNN is increased and the non-water absorption performance is improved. However, by using Co 2 O 3 as an additive, for example, Co 2 O 3 It is presumed that there is some cause for fundamentally deteriorating the moisture resistance performance, such as that 3 itself has been denatured in a high humidity environment and has deteriorated the piezoelectric characteristics. From the above, it can be seen that there is a need to carefully select the value of x and additives.
一方、本発明の実施例を含むガラスを添加したサンプルでは、その多くが合格判定となった。周知のごとく、圧電材料における添加物は、焼結助剤として粒界に充填されて、結晶粒同士を結着させる。そして、本発明の目的は、換言すれば、ガラスが結着剤として粒界に充填された構造を実現するための条件を規定することである。図３（Ａ）に、圧電材料の結晶粒構造を模式的に示した。また、本発明の実施例に係る圧電材料として、Ｚｎ系ガラスを添加した圧電材料の顕微鏡写真を図３（Ｂ）に示した。そして、当該写真中に番号「６」〜「１０」で記されている箇所を対象にエネルギー分散型Ｘ線分析装置（ＥＤＸ）を用いて分析を行った結果を図３（Ｃ）に示した。図３（Ｃ）より、粒界の部分（番号１０）でガラスを構成するＺｎの量がきわめて多く、本実施例に係る圧電材料は、高湿度環境下にあっても変性しにくいガラスを添加剤とし、その添加剤１２が、圧電体であるＫＮＮの結晶粒１０間の粒界１１に充填されている構造を有していることが確認できた。 On the other hand, many of the samples to which the glass including the examples of the present invention was added were acceptable. As is well known, the additive in the piezoelectric material is filled in the grain boundary as a sintering aid and binds the crystal grains together. In other words, the object of the present invention is to define conditions for realizing a structure in which glass is filled in grain boundaries as a binder. FIG. 3A schematically shows the crystal grain structure of the piezoelectric material. FIG. 3B shows a micrograph of a piezoelectric material to which Zn-based glass is added as the piezoelectric material according to the example of the present invention. And the result of having analyzed using the energy dispersion | distribution type | mold X-ray analyzer (EDX) for the location described with the numbers "6"-"10" in the said photograph was shown in FIG.3 (C). . From FIG. 3C, the amount of Zn constituting the glass at the grain boundary portion (number 10) is extremely large, and the piezoelectric material according to this example is added with glass that is not easily denatured even in a high humidity environment. It was confirmed that the additive 12 had a structure filled in the grain boundaries 11 between the crystal grains 10 of the KNN as the piezoelectric material.
そこで、この条件を規定するにあたって、ここで試用した４種類のガラスを添加した各サンプルについて検討すると、全てのガラスにおいて、ＫＮＮにおけるｘの値に依存性があることが分かった。例えば、Ｌｉ系ガラスについては、添加量が同じ０．１ｗｔ％でもｘ＜１．０としたサンプル３０と３４とでは合否が分かれた。 Therefore, in order to define this condition, each sample added with the four types of glasses used here was examined, and it was found that all glasses had a dependency on the value of x in KNN. For example, with respect to Li-based glass, acceptance was divided between Samples 30 and 34 in which x <1.0 even when the addition amount was the same 0.1 wt%.
さらに、例えばＬｉ系ガラスを添加したサンプル５４、６６、７４では、ともにｘ＝０．７であるが、その添加量によって、合否が分かれた、しかし、Ｌｉ系ガラスを添加したサンプルにおいて、不合格となったサンプル３８、４６、６１，７４は、いずれも、合格基準に僅かに及ばなかっただけであり、ＫＮＮ単体のサンプル１、２９、５３や従来のＫＮＮ系圧電材料であるサンプル２における性能劣化の度合いと比較すると実用上は問題ない程度である。 Further, for example, in Samples 54, 66, and 74 to which Li-based glass was added, x = 0.7, but the pass / fail was divided depending on the amount of addition, but in the sample to which Li-based glass was added, it was rejected. Samples 38, 46, 61, and 74, which were all, did not meet the acceptance criteria, and the performance of samples 1, 29, and 53 of KNN alone and sample 2 that is a conventional KNN piezoelectric material. Compared with the degree of deterioration, there is no practical problem.
実施例に記載されたその他ガラスであるＢｉ系ガラス、Ｚｎ系ガラス、Ｓｉ系ガラスに関しても、同様の結果が得られた。また、ここには記載していないが、その他の一般のガラスに関しても同様の結果が得られた。 Similar results were obtained for Bi glass, Zn glass, and Si glass, which are other glasses described in the examples. Although not described here, similar results were obtained with other general glasses.
そして、ガラスを添加したサンプルにおける非吸水性能や耐湿性能が、ｘの値に対して多少不安定であることが確認されたため、本発明の実施例に係る圧電材料では、ＫＮＮにおけるｘの値を０．１≦ｘ≦０．７に規定した。さらに、Ｌｉガラスを添加した圧電材料については、その添加量を０．１ｗｔ％より多く、１０．０ｗｔ％以下を条件とすることがより望ましいことも判明した。 And since it was confirmed that the non-water absorption performance and moisture resistance performance in the sample to which glass was added were somewhat unstable with respect to the value of x, in the piezoelectric material according to the example of the present invention, the value of x in KNN was changed. It was defined as 0.1 ≦ x ≦ 0.7. Furthermore, it has been found that it is more desirable for the piezoelectric material to which Li glass is added to have the addition amount of more than 0.1 wt% and 10.0 wt% or less.
同様に、Ｂｉガラスを添加した圧電材料に関しては、その添加量を０．０８ｗｔ％よりも多く、１２．４ｗｔ％以下を条件とすることがより望ましい。また、Znガラスを添加した圧電材料に関しては、その添加量を０．０７wt%よりも多く、１３．３ｗｔ％以下を条件とすることがより望ましい。また、Ｓｉガラスを添加した圧電材料に関しては、その添加量を０．０８ｗｔ％よりも多く、１４．８ｗｔ％以下を条件とすることがより望ましい。 Similarly, regarding the piezoelectric material to which Bi glass is added, it is more desirable that the amount of addition be more than 0.08 wt% and not more than 12.4 wt%. In addition, regarding the piezoelectric material to which Zn glass is added, it is more preferable that the addition amount is more than 0.07 wt% and not more than 13.3 wt%. In addition, regarding the piezoelectric material to which Si glass is added, it is more desirable that the amount of addition be more than 0.08 wt% and 14.8 wt% or less.
＝＝＝粒子径依存性＝＝＝
上記サンプルでは、圧電物質であるＫＮＮの粒子径と添加物であるガラスの粒子径が一定となるように調整していた。そこで、非吸水性能や耐湿性能において、ＫＮＮやガラスの粒子径依存性があるか否かを検討した。ここでは、上記４種類のガラスの内、ＫＮＮにおけるｘや添加量に対する特性変化が最も大きかったＬｉガラスを添加したサンプルで、かつ、ｘの値が望ましいと考えられる上限の０．７で合格判定となったサンプル６６を基準として粒子径依存性を検討した。
=== Dependence on particle size ===
In the above sample, the particle diameter of the piezoelectric material KNN and the glass particle diameter of the additive were adjusted to be constant. Therefore, it was examined whether or not there is a particle size dependency of KNN or glass in non-water absorption performance or moisture resistance performance. Here, among the above four types of glass, a sample added with Li glass having the largest characteristic change with respect to x and the addition amount in KNN, and an acceptance determination at an upper limit of 0.7 where the value of x is considered desirable. The particle size dependency was examined using the obtained sample 66 as a reference.
以下の表７に当該評価結果を示した。また、図４に当該評価結果をグラフにして示した。図４では合格を「○」、不合格を「●」で示している。
表７より、不合格となったサンプル６６ｇ、６６ｈ、６６ｊは、いずれも、圧電特性については合格基準を満たしていたが、吸水率が合格基準に僅かながら及ばず、不合格判定となった。そして、これらの不合格判定となったサンプル６６ｇ、６６ｈ、６６ｊは、粒子径の大小よりも、ＫＮＮの粒子径とガラスの粒子径の比に相関性が見受けられた。例えば、図４からは、ガラスの粒子径がＫＮＮの粒子径の２倍となる直線１３を境界にして、合否が分かれており、ガラスの粒子径がＫＮＮの粒子径に対して２倍より大きいときに不合格判定となっている。したがって、ＫＮＮにＬｉ系ガラスを添加した圧電材料では、さらに、ガラスの粒子径がＫＮＮの粒子径の２倍以下であれば、確実に非吸水性能も合格判定となることが分かった。 As shown in Table 7, the samples 66g, 66h, and 66j that were rejected all satisfied the acceptance criteria for the piezoelectric characteristics, but the water absorption rate did not reach the acceptance criteria, but was rejected. In the samples 66g, 66h, and 66j that were judged as rejected, there was a correlation in the ratio of the particle diameter of KNN to the particle diameter of glass rather than the size of the particle diameter. For example, from FIG. 4, the pass / fail is separated at a straight line 13 where the particle diameter of the glass is twice the particle diameter of KNN, and the particle diameter of the glass is larger than twice the particle diameter of KNN. Sometimes it is rejected. Therefore, it has been found that in the piezoelectric material in which Li-based glass is added to KNN, the non-water absorption performance is reliably determined to be acceptable if the particle diameter of the glass is not more than twice the particle diameter of KNN.
なお、Ｌｉ以外のガラスにおける粒子径依存性について、その評価結果を以下の表８〜表１０に示した。
上記表８〜１０からも分かるように、その他のガラスに関しても、ＫＮＮの粒子径がガラスの粒子径の１／２以下であれば、確実に非吸水性能も合格判定となることが分かった。 As can be seen from the above Tables 8 to 10, it was found that the non-water absorption performance was also acceptable as long as the particle size of KNN was 1/2 or less of the particle size of the glass.
＝＝＝考察＝＝＝
上記各サンプルに対する非吸水性能や圧電性能の評価結果から、ある種のガラスではＫＮＮのｘの値や添加量に依存性が見受けられた。その理由として、添加量が少ないとＫＮＮの粒界にガラスが十分に充填されず、多い場合では、ＫＮＮの粒界に充填されたガラスが発泡し、ガラスの充填部分の一部が欠損したためと考えられる。
=== Discussion ===
From the evaluation results of the non-water-absorbing performance and the piezoelectric performance for each of the above samples, dependence was observed on the value of x of KNN and the amount of addition in certain types of glass. The reason is that if the addition amount is small, the glass at the grain boundary of KNN is not sufficiently filled, and if it is large, the glass filled at the grain boundary of KNN foams and a part of the glass filling portion is lost. Conceivable.
また、粒界にガラスを効率よく充填させるためには、焼結時に昇温させていく途中でガラスの方が先に軟化し、ＫＮＮの粒子同士が結合されていく途上で、その軟化したガラスが流動しながら粒界に徐々に充填されていく、というプロセスで圧電材料が焼結することが望ましい。そして、上記各ガラスは、その軟化点がＫＮＮの１１００℃〜１２００℃に対し、Ｂｉ系ガラスで４５０℃、Ｌｉ系ガラスで５５０℃、Ｚｎ系ガラスで５８０℃、そしてＳｉ系ガラスで７９０℃であった。したがって、ＫＮＮに添加するガラスは、ＫＮＮよりも軟化点が低いものを採用することがより望ましい。 Also, in order to efficiently fill the grain boundaries with glass, the glass is softened first while the temperature is raised during sintering, and the softened glass is bonded while the KNN particles are bonded together. It is desirable that the piezoelectric material be sintered by a process of gradually filling the grain boundaries while flowing. Each glass has a softening point of 1100 ° C to 1200 ° C of KNN, 450 ° C for Bi glass, 550 ° C for Li glass, 580 ° C for Zn glass, and 790 ° C for Si glass. there were. Therefore, it is more desirable to employ a glass having a softening point lower than that of KNN.
ガラスをＫＮＮに添加した圧電材料は、従来のＫＮＮ系圧電材料と比較すると、非吸水性能と耐湿性能が大きく優れていた。唯一、不合格判定となったサンプルが存在したＬｉ系ガラスを添加した圧電材料であっても、合格基準に僅かに至らなかっただけで、従来の圧電材料と比較すると優れた非吸水性能と耐湿性能を備えている、と言える。そして、不合格とは言っても実用上大きな問題がないＬｉ系ガラスを添加した圧電材料を基準にしてＫＮＮにおけるｘの値を規定し、そのｘの値が規定されたＫＮＮにガラスを添加した圧電材料を本発明の実施例とした。したがって、ＫＮＮのｘの値が規定の範囲にあれば、上記４種類のガラスに限らず、ＫＮＮにガラスを添加することで、粒界にガラスが充填された構造を有して非吸水性能や圧電性能に優れ、環境にも優しい圧電材料が得られる可能性が極めて高い、と言える。 The piezoelectric material in which glass is added to KNN is greatly superior in non-water absorption performance and moisture resistance performance as compared with the conventional KNN piezoelectric material. The only piezoelectric material added with Li-based glass for which there was a sample that was judged to be rejected was only slightly below the acceptance criteria, and superior non-water absorption performance and moisture resistance compared to conventional piezoelectric materials. It can be said that it has performance. Then, the value of x in KNN is defined with reference to a piezoelectric material added with Li-based glass, which is not a problem in practice even though it is rejected, and glass is added to KNN in which the value of x is defined. A piezoelectric material was used as an example of the present invention. Accordingly, if the value of x of KNN is within a specified range, not only the above four types of glass, but also by adding glass to KNN, it has a structure in which glass is filled at the grain boundary, It can be said that there is an extremely high possibility that a piezoelectric material having excellent piezoelectric performance and environmentally friendly will be obtained.
この発明は、超音波モータやフィルターなどの圧電性を利用した機器や素子に利用することができる。 The present invention can be used for devices and elements using piezoelectricity such as ultrasonic motors and filters.
１ 圧電材料
１０ ＫＮＮの結晶粒
１１ 粒界
１２ ガラス
1 Piezoelectric material 10 KNN crystal grains 11 Grain boundary 12 Glass
Claims (9)
溶媒にＫｘＮａ（１−ｘ）Ｎｂ０３で表わされる化合物の原料を０．１≦x≦０．７となるように混合し、当該化合物の原料混合物を粉砕する第１混合粉砕ステップと、
当該粉砕された前記化合物の原料混合物を仮焼成して前記化合物の粉体を生成する仮焼成ステップと、
前記化合物の粉体とガラスの原材料を粉砕するとともに、当該粉砕した前記化合物の粉体とガラスの原材料とを混合する第２混合粉砕ステップと、
前記第２混合粉砕ステップにより得た前記粉末にバインダーを添加するとともに、当該バインダーが添加された粉末を成形した上で焼成させる焼成ステップと、
を含むことを特徴とする圧電素子の製造方法。 A method for manufacturing a piezoelectric material, comprising:
A first mixing and pulverizing step of mixing a raw material of a compound represented by K x Na (1-x) Nb0 3 in a solvent so that 0.1 ≦ x ≦ 0.7, and pulverizing the raw material mixture of the compound;
A pre-baking step of pre-baking the pulverized raw material mixture of the compound to produce a powder of the compound;
A second mixing and pulverizing step of pulverizing the compound powder and glass raw material, and mixing the pulverized compound powder and glass raw material;
A baking step of adding a binder to the powder obtained by the second mixing and pulverizing step, and baking the powder after the binder is added;
The manufacturing method of the piezoelectric element characterized by the above-mentioned.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010057734A JP5677756B2 (en) | 2010-03-15 | 2010-03-15 | Piezoelectric ceramic material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010057734A JP5677756B2 (en) | 2010-03-15 | 2010-03-15 | Piezoelectric ceramic material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011190146A true JP2011190146A (en) | 2011-09-29 |
| JP5677756B2 JP5677756B2 (en) | 2015-02-25 |
Family
ID=44795456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010057734A Active JP5677756B2 (en) | 2010-03-15 | 2010-03-15 | Piezoelectric ceramic material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5677756B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9871187B2 (en) | 2014-04-11 | 2018-01-16 | Ngk Spark Plug Co., Ltd. | Lead-free piezo-electric porcelain composition, piezo-electric element using the same, and method for producing lead-free piezo-electric porcelain composition |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6287456A (en) * | 1985-10-11 | 1987-04-21 | 日本碍子株式会社 | Ceramic composition for dielectric ceramics |
| JP2000313664A (en) * | 1999-02-24 | 2000-11-14 | Toyota Central Res & Dev Lab Inc | Piezoelectric material composition of alkali metal- containing niobium oxide |
| JP2005247619A (en) * | 2004-03-03 | 2005-09-15 | Ngk Insulators Ltd | Piezoelectric/electrostrictive ceramic composition, piezoelectric/electrostrictive substance, and piezoelectric/electrostrictive membrane type element |
| JP2006093476A (en) * | 2004-09-24 | 2006-04-06 | Ngk Insulators Ltd | Cell-driven piezoelectric actuator and its manufacturing method |
-
2010
- 2010-03-15 JP JP2010057734A patent/JP5677756B2/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6287456A (en) * | 1985-10-11 | 1987-04-21 | 日本碍子株式会社 | Ceramic composition for dielectric ceramics |
| JP2000313664A (en) * | 1999-02-24 | 2000-11-14 | Toyota Central Res & Dev Lab Inc | Piezoelectric material composition of alkali metal- containing niobium oxide |
| JP2005247619A (en) * | 2004-03-03 | 2005-09-15 | Ngk Insulators Ltd | Piezoelectric/electrostrictive ceramic composition, piezoelectric/electrostrictive substance, and piezoelectric/electrostrictive membrane type element |
| JP2006093476A (en) * | 2004-09-24 | 2006-04-06 | Ngk Insulators Ltd | Cell-driven piezoelectric actuator and its manufacturing method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9871187B2 (en) | 2014-04-11 | 2018-01-16 | Ngk Spark Plug Co., Ltd. | Lead-free piezo-electric porcelain composition, piezo-electric element using the same, and method for producing lead-free piezo-electric porcelain composition |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5677756B2 (en) | 2015-02-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9105845B2 (en) | Piezoelectric ceramic comprising an oxide and piezoelectric device | |
| JP5588771B2 (en) | Piezoelectric material and method for manufacturing piezoelectric material | |
| JP2004244300A (en) | Piezoelectric ceramic composition, its production method, piezoelectric element, and dielectric element | |
| JP2009227535A (en) | Piezoelectric ceramic composition | |
| JP5707047B2 (en) | Piezoelectric material and method for manufacturing piezoelectric material | |
| JP2004244301A (en) | Piezoelectric ceramic composition, its production method, piezoelectric element, and dielectric element | |
| US7494601B2 (en) | Piezoelectric ceramic composition and the method for preparing the same | |
| JP6744378B2 (en) | Piezoceramic material with reduced lead content | |
| JP4995412B2 (en) | Piezoelectric ceramic composition and piezoelectric element using the same | |
| JP3686382B2 (en) | Piezoelectric ceramic composition and piezoelectric device using the same | |
| JP5677756B2 (en) | Piezoelectric ceramic material | |
| KR20160064969A (en) | Lead-free piezoelectric ceramic composition, preparation method thereof and piezoelectric element comprising the same | |
| JPWO2007039971A1 (en) | Piezoelectric ceramic composition and piezoelectric component | |
| JP2009096668A (en) | Piezoelectric ceramic | |
| JP5914081B2 (en) | Piezoelectric material and method for manufacturing piezoelectric material | |
| JP2012162408A (en) | Piezoelectric material | |
| JP5830252B2 (en) | Piezoelectric material | |
| JP6438755B2 (en) | Piezoelectric ceramic composition and method for producing the piezoelectric ceramic composition | |
| JP5662731B2 (en) | Piezoelectric ceramic composition | |
| JP6326198B2 (en) | Piezoelectric material | |
| JP3482954B2 (en) | Piezoelectric ceramic composition | |
| JP6310775B2 (en) | Piezoelectric ceramic composition and method for producing the piezoelectric ceramic composition | |
| JP5933335B2 (en) | Piezoelectric material and method for manufacturing piezoelectric material | |
| JP6913547B2 (en) | Piezoelectric composition and method for manufacturing the piezoelectric composition | |
| JP2007217233A (en) | Piezoelectric ceramic |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130220 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130717 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130820 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131017 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140520 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140710 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20141209 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150105 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5677756 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |