JP2011155776A - Ultrasonic vibrator - Google Patents

Ultrasonic vibrator Download PDF

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JP2011155776A
JP2011155776A JP2010016101A JP2010016101A JP2011155776A JP 2011155776 A JP2011155776 A JP 2011155776A JP 2010016101 A JP2010016101 A JP 2010016101A JP 2010016101 A JP2010016101 A JP 2010016101A JP 2011155776 A JP2011155776 A JP 2011155776A
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thickness
ultrasonic
piezoelectric body
ultrasonic transducer
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Hajime Matsumura
元 松村
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JAPAN GIYARUZU KK
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Abstract

<P>PROBLEM TO BE SOLVED: To generate a plurality of peak frequencies with a single ultrasonic vibrator. <P>SOLUTION: A plurality of peak frequencies can be generated with a single ultrasonic vibrator 1 by providing a part whose thickness varies in a single piezoelectric body 2. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本願発明は、超音波を発生する各種機器（例えば各種の超音波美容器）に使用される超音波振動子に関するものである。尚、この種の超音波振動子は、上記した超音波美容器のほかに、例えば、超音波洗浄機、超音波測深機、超音波音響装置、超音波診断装置等の超音波発生源として使用し得るものである。   The present invention relates to an ultrasonic transducer used in various devices (for example, various ultrasonic cosmetic devices) that generate ultrasonic waves. In addition to the above-described ultrasonic cosmetic device, this type of ultrasonic transducer is used as an ultrasonic generation source, for example, an ultrasonic cleaning machine, an ultrasonic sounding instrument, an ultrasonic acoustic device, an ultrasonic diagnostic device, etc. It is possible.

超音波振動子を用いた超音波発生機器として、近年、各種の超音波美容器が普及しているが、この種の超音波美容器は、使用目的（例えば、肌の皺や弛み取り、肌の引き締め、肌のシミ取り等）や使用場所（例えばフェイス、ボディ）に応じた各種のものが市販されている（例えば、超音波美顔器、超音波マッサージ器等として市販されている）。   In recent years, various types of ultrasonic cosmetic devices have become widespread as ultrasonic generators using ultrasonic vibrators. This type of ultrasonic cosmetic device is intended for use (for example, removing skin wrinkles and slack, skin Various types of products are commercially available (for example, commercially available as an ultrasonic facial device, ultrasonic massage device, etc.) according to the place of use (for example, face, body).

ところで、超音波を用いて肌を美容するのに、用途（上記使用目的や使用場所）に適したそれぞれの超音波周波数があるが、例えば、肌の美容に使用する超音波周波数としては、０.５ＭＨｚ〜７ＭＨｚ程度の範囲のものが採用されている。尚、この種の超音波美容器では、用途に応じて使用される各種周波数として、例えば０.５ＭＨｚ、１ＭＨｚ、３ＭＨｚ、５ＭＨｚ、７ＭＨｚ等の複数種類がある。   By the way, in order to beautify the skin using ultrasonic waves, there are respective ultrasonic frequencies suitable for applications (the above-mentioned purpose of use and place of use). For example, the ultrasonic frequency used for skin beautification is 0. Those in the range of about 5 MHz to 7 MHz are employed. In this type of ultrasonic cosmetic device, there are a plurality of types such as 0.5 MHz, 1 MHz, 3 MHz, 5 MHz, and 7 MHz as various frequencies used in accordance with the application.

この種の超音波美容器に使用されている従来の超音波振動子は、図９に示すように、所定面積を有した板状の圧電体（例えば圧電セラミックス）１２の表裏各面にそれぞれ極薄の電極１３，１４を設けたものである。そして、図９の超音波振動子１１は、その表裏の各電極１３，１４に交流電流（交流電源１５）を流すと、圧電体１２が超音波振動するようになっている。   As shown in FIG. 9, a conventional ultrasonic transducer used in this type of ultrasonic cosmetic device has poles on the front and back surfaces of a plate-like piezoelectric body (for example, piezoelectric ceramic) 12 having a predetermined area. Thin electrodes 13 and 14 are provided. The ultrasonic vibrator 11 shown in FIG. 9 is configured such that the piezoelectric body 12 is ultrasonically vibrated when an alternating current (alternating current power supply 15) is passed through the electrodes 13 and 14 on the front and back sides.

従来（図９）の超音波振動子１１は、その全面積に亘って同一厚さＴの平面形状としたものである。尚、この種の超音波振動子１１は、図９に示す四角形のほかに円形のものも汎用されている。   The conventional ultrasonic transducer 11 (FIG. 9) has a planar shape with the same thickness T over the entire area. In addition to the quadrangle shown in FIG. 9, this type of ultrasonic transducer 11 is generally used in a circular shape.

ところで、この種の超音波振動子１１は、圧電体１２の厚さＴによって、効率よく発生する周波数が変化する性質がある。即ち、特定厚さの圧電体であっても、異なる周波数を発生させることができるが、特定厚さの圧電体では効率よく発生する周波数域はごく限られた範囲のものである。尚、以下の説明において、効率よく発生する周波数のことをピーク周波数という。   By the way, this type of ultrasonic transducer 11 has the property that the frequency generated efficiently varies depending on the thickness T of the piezoelectric body 12. That is, even if the piezoelectric material has a specific thickness, different frequencies can be generated. However, the frequency region in which the specific thickness piezoelectric material is efficiently generated is in a very limited range. In the following description, a frequency that is efficiently generated is referred to as a peak frequency.

因に、超音波美容器に使用される超音波振動子を例にすると、図１０の（Ａ）〜（Ｅ）に示すように、０.５ＭＨｚでのピーク周波数発生用では厚さが３mm、１ＭＨｚでの同発生用では厚さが２mm、３ＭＨｚでの同発生用では厚さが０.６９mm、５ＭＨｚでの同発生用では厚さが０.４mm、７ＭＨｚでの同発生用では厚さが０.２８mm、のものがそれぞれ最適であるが、所望するピーク周波数を得るためには、それぞれのピーク周波数を発生させる厚さの圧電体１２を採用する必要がある。つまり、所望するピーク周波数を発生させるには、その所望ピーク周波数に対応する厚さの超音波振動子１１を使用する必要があり、所望するピーク周波数に対応しない厚さの超音波振動子１１では、所望するピーク周波数が得られない。   For example, when an ultrasonic transducer used in an ultrasonic cosmetic device is taken as an example, as shown in FIGS. 10A to 10E, the thickness is 3 mm for generating a peak frequency at 0.5 MHz. For the same generation at 1 MHz, the thickness is 2 mm. For the same generation at 3 MHz, the thickness is 0.69 mm. For the same generation at 5 MHz, the thickness is 0.4 mm. For the same generation at 7 MHz, the thickness is 0.28 mm is optimal, but in order to obtain a desired peak frequency, it is necessary to employ a piezoelectric body 12 having a thickness that generates each peak frequency. That is, in order to generate a desired peak frequency, it is necessary to use the ultrasonic transducer 11 having a thickness corresponding to the desired peak frequency. In the ultrasonic transducer 11 having a thickness not corresponding to the desired peak frequency, The desired peak frequency cannot be obtained.

そして、図９の超音波振動子１１のように、厚さＴが全面積に亘って同一であると、その超音波振動子１１からは該厚さＴに対応する単一のピーク周波数しか発生しないので、用途に応じた各種ピーク周波数を発生させるためには、それぞれのピーク周波数を発生させ得る各種厚さの超音波振動子１１をそれぞれ用意しておくとともに、それらの超音波振動子１１をそれぞれ組み込んだ複数種類の超音波発生機器（例えばフェイス用の超音波美顔器やボディ用の超音波マッサージ器等）を製作する必要がある。   If the thickness T is the same over the entire area as in the ultrasonic transducer 11 in FIG. 9, only a single peak frequency corresponding to the thickness T is generated from the ultrasonic transducer 11. Therefore, in order to generate various peak frequencies according to the application, the ultrasonic transducers 11 having various thicknesses capable of generating the respective peak frequencies are prepared, and the ultrasonic transducers 11 are prepared. It is necessary to manufacture a plurality of types of ultrasonic generators (for example, an ultrasonic facial device for a face and an ultrasonic massage device for a body) incorporated therein.

ところが、上記のように、従来（図９）の超音波振動子１１では、全面積に亘って同一厚さであるので、１つの超音波振動子については単一のピーク周波数しか発生しない。従って、用途に応じた複数種類の周波数を必要とする各種の超音波発生機器（例えば各種の超音波美容器）を製作するには、それぞれ所望のピーク周波数を発生する複数種類の超音波振動子を用意しておく必要があるとともに、それらの超音波振動子を個別に組み込んだ複数種類の超音波発生機器を製作する必要があった。   However, as described above, since the conventional ultrasonic transducer 11 (FIG. 9) has the same thickness over the entire area, only a single peak frequency is generated for one ultrasonic transducer. Accordingly, in order to manufacture various types of ultrasonic generators (for example, various types of ultrasonic cosmetics) that require a plurality of types of frequencies depending on the application, a plurality of types of ultrasonic transducers that generate desired peak frequencies, respectively. It was necessary to prepare a plurality of types of ultrasonic generators incorporating these ultrasonic vibrators individually.

又、全面積が単一厚さの超音波振動子１１では、発生するピーク周波数が１つ（極めて狭い範囲）しかないので、この超音波振動子１１を使用した超音波発生機器で、異なる周波数出力に切換えて使用する場合には、所望するピーク周波数は得られない（対応厚さ以外の周波数指定ではそれぞれ低効率の周波数しか発生しない）、という問題がある。   Further, since the ultrasonic vibrator 11 having the entire area having a single thickness has only one peak frequency (very narrow range), the ultrasonic generator using the ultrasonic vibrator 11 has different frequencies. When switching to the output, there is a problem that a desired peak frequency cannot be obtained (only a low-efficiency frequency is generated when a frequency other than the corresponding thickness is specified).

そこで、本願発明は、単一の圧電体で複数のピーク周波数を発生させ得るようにすることにより、異なる周波数出力に切換えてもそれぞれピーク周波数を発生させ得るようにした超音波振動子を提供することを目的としている。   Accordingly, the present invention provides an ultrasonic transducer capable of generating a plurality of peak frequencies with a single piezoelectric body so that each peak frequency can be generated even when switching to a different frequency output. The purpose is that.

本願発明は、上記課題を解決するための手段として次の構成を有している。尚、本願発明は、通電により超音波を発生させ得る超音波振動子を対象にしている。   The present invention has the following configuration as means for solving the above problems. The present invention is directed to an ultrasonic transducer that can generate an ultrasonic wave when energized.

［本願請求項１の発明］
本願請求項１の発明の超音波振動子は、単一の圧電体（例えば圧電セラミックス）に厚さを変化させた部分を設けていることを特徴としている。 [Invention of Claim 1 of the Present Application]
The ultrasonic vibrator according to the first aspect of the present invention is characterized in that a single piezoelectric body (for example, piezoelectric ceramic) is provided with a portion whose thickness is changed.

この超音波振動子は、所定面積を有する板状の圧電体の表裏各面にそれぞれ極薄の電極を設けたもので、各電極に通電することにより、圧電体部分が超音波振動するものである。尚、この超音波振動子は、外形形状として四角形や円形のものが多用されるが、その他の適宜の形状のもの採用できる。   This ultrasonic vibrator is provided with ultra-thin electrodes on the front and back surfaces of a plate-like piezoelectric body having a predetermined area, and the piezoelectric body portion is ultrasonically vibrated by energizing each electrode. is there. This ultrasonic transducer is frequently used in the form of a square or a circle as its outer shape, but other appropriate shapes can be adopted.

この種の超音波振動子では、圧電体の厚さに比例して発生するピーク周波数（効率よく発生する周波数）が変化する性質を有し、該圧電体厚さが薄くなるほど、発生するピーク周波数が高くなる性質がある。そして、本願の超音波振動子では、圧電体に厚さを変化させた部分を設けていることにより、単一のもので複数のピーク周波数を発生させ得るようにしている。   This type of ultrasonic transducer has the property that the peak frequency (frequency that is generated efficiently) changes in proportion to the thickness of the piezoelectric body, and the peak frequency that occurs as the piezoelectric body thickness decreases. Has the property of becoming higher. In the ultrasonic transducer of the present application, the piezoelectric body is provided with a portion whose thickness is changed, so that a plurality of peak frequencies can be generated by a single unit.

因に、超音波美容器には一般に０.５ＭＨｚ〜７ＭＨｚの範囲の超音波を発生する超音波振動子が使用されるが、０.５ＭＨｚでのピーク周波数発生用では厚さが３mm、１ＭＨｚでの同発生用では厚さが２mm、３ＭＨｚでの同発生用では厚さが０.６９mm、５ＭＨｚでの同発生用では厚さが０.４mm、７ＭＨｚでの同発生用では厚さが０.２８mm、のものがそれぞれ最適である。   Incidentally, an ultrasonic vibrator that generates ultrasonic waves in the range of 0.5 MHz to 7 MHz is generally used for an ultrasonic cosmetic device, but for generating a peak frequency at 0.5 MHz, the thickness is 3 mm and 1 MHz. For the same generation, the thickness is 2 mm, for the same generation at 3 MHz, the thickness is 0.69 mm, for the same generation at 5 MHz, the thickness is 0.4 mm, and for the same generation at 7 MHz, the thickness is 0.0 mm. 28mm is optimal for each.

そして、本願請求項１の超音波振動子では、圧電体の厚さ変化の形態として、該圧電体の表裏片面（両面でもよい）を傾斜面にして、圧電体の厚さを平面方向に無段階的に変化させたものを採用できる。この場合、超音波美容器に使用する超音波振動子では、圧電体の厚さを、最小厚さ部分が０.２８mm以上で最大厚さ部分が３mm以下となる範囲で、適宜に変化させることができる。   In the ultrasonic vibrator according to claim 1 of the present application, as a form of change in the thickness of the piezoelectric body, the front and back surfaces (or both surfaces) of the piezoelectric body may be inclined, and the thickness of the piezoelectric body may be set in the plane direction. What was changed in stages can be adopted. In this case, in the ultrasonic vibrator used in the ultrasonic cosmetic device, the thickness of the piezoelectric body is appropriately changed within the range where the minimum thickness portion is 0.28 mm or more and the maximum thickness portion is 3 mm or less. Can do.

この請求項１の超音波振動子は、圧電体の厚さが薄い部分で比較的高い周波数（例えば７ＭＨｚ）でのピーク周波数を発生させることができる一方、圧電体の厚さが厚い部分で比較的低い周波数（例えば０.５ＭＨｚ）でのピーク周波数を発生させることができる。   The ultrasonic transducer according to claim 1 can generate a peak frequency at a relatively high frequency (for example, 7 MHz) in a portion where the thickness of the piezoelectric material is thin, while comparing it in a portion where the thickness of the piezoelectric material is thick. A peak frequency at a low frequency (for example, 0.5 MHz) can be generated.

従って、この請求項１の超音波振動子では、単一のものであっても複数のピーク周波数発生用の厚さ部分が存在するので、複数の周波数部分でそれぞれピーク周波数の超音波を発生させることができる。   Therefore, in the ultrasonic transducer according to the first aspect, since there are a plurality of thickness portions for generating the peak frequency even if it is a single element, ultrasonic waves having peak frequencies are generated at the plurality of frequency portions, respectively. be able to.

［本願請求項２の発明］
本願請求項２の発明は、上記請求項１の超音波振動子において、圧電体の厚さを複数の段状に変化させたものを使用している。 [Invention of claim 2 of the present application]
The invention of claim 2 of the present application uses the ultrasonic transducer of claim 1 in which the thickness of the piezoelectric body is changed into a plurality of steps.

この請求項２の超音波振動子では、圧電体の厚さが段状に変化しているので、各厚さ変化部分はそれぞれ平面状の所定面積を有している。従って、圧電体の各厚さ部分で発生する異なる周波数の超音波出力を、厚さを無段階的に変化させたものよりそれぞれ大きくできる。   In the ultrasonic transducer according to the second aspect, since the thickness of the piezoelectric body changes stepwise, each thickness changing portion has a predetermined planar area. Therefore, the ultrasonic outputs of different frequencies generated at the respective thickness portions of the piezoelectric body can be made larger than those obtained by changing the thickness steplessly.

尚、圧電体における複数の厚さ部分に区画する数は、少なくとも２つ以上であればよいが、その区画数を少なくするほど（発生させるピーク周波数の数は少なくなる）、１区画当たりの面積が大きくなるので、各厚さ部分での超音波出力の低下を極力小さくできる。   The number of sections divided into a plurality of thickness portions in the piezoelectric body may be at least two or more. However, as the number of sections decreases (the number of generated peak frequencies decreases), the area per section Therefore, the decrease in ultrasonic output at each thickness portion can be minimized.

本願請求項１の超音波振動子は、単一の圧電体に厚さを変化させた部分を設けているので、単一の超音波振動子で異なる複数のピーク超音波を発生させることができる。換言すると、複数の周波数でのピーク周波数を発生させることができる。   Since the ultrasonic transducer according to claim 1 of the present invention is provided with a portion where the thickness is changed in a single piezoelectric body, a plurality of different peak ultrasonic waves can be generated by the single ultrasonic transducer. . In other words, peak frequencies at a plurality of frequencies can be generated.

従って、この請求項１の超音波振動子を超音波発生機器に使用すると、異なる周波数に切換えても各周波数でのピーク周波数を発生させることができ、単一の超音波振動子であっても、それぞれのピーク周波数の超音波を発生できるという効果がある。   Therefore, when the ultrasonic vibrator according to claim 1 is used for an ultrasonic generator, the peak frequency at each frequency can be generated even if the frequency is switched to a different frequency. There is an effect that ultrasonic waves having respective peak frequencies can be generated.

又、このように、単一の超音波振動子で複数のピーク周波数を発生させ得るようにしたものでは、ピーク周波数が異なる複数機種の超音波発生機器に共用できるので、準備しておく超音波振動子の種類を少なくできるという効果もある。   In addition, in the case where a plurality of peak frequencies can be generated by a single ultrasonic transducer in this way, it can be shared by a plurality of types of ultrasonic generators having different peak frequencies. There is also an effect that the number of types of vibrators can be reduced.

又、本願請求項２の超音波振動子では、圧電体の厚さを複数の段状に変化させたものを使用しているので、同一厚さ部分にそれぞれ所定面積を確保でき、各厚さ部分における超音波出力の低下を極力小さくできる、という効果がある。   Further, in the ultrasonic vibrator according to claim 2 of the present invention, since the piezoelectric body having a plurality of stepped thicknesses is used, a predetermined area can be secured in the same thickness portion. There is an effect that the decrease in the ultrasonic output in the portion can be minimized.

本願請求項１に対応する第１実施例の超音波振動子の斜視図である。1 is a perspective view of an ultrasonic transducer according to a first embodiment corresponding to claim 1 of the present application. FIG. 図１の超音波振動子の側面図である。It is a side view of the ultrasonic transducer | vibrator of FIG. 本願請求項１に対応する第２実施例の超音波振動子の斜視図である。It is a perspective view of the ultrasonic transducer | vibrator of 2nd Example corresponding to Claim 1 of this application. 本願請求項１に対応する第３実施例の超音波振動子の斜視図である。It is a perspective view of the ultrasonic transducer | vibrator of 3rd Example corresponding to Claim 1 of this application. 本願請求項１に対応する第４実施例の超音波振動子であって、（Ａ）はその平面図で（Ｂ）はその側面図である。It is an ultrasonic transducer | vibrator of 4th Example corresponding to this-application Claim 1, Comprising: (A) is the top view, (B) is the side view. 本願請求項２に対応する第５実施例の超音波振動子の斜視図である。FIG. 10 is a perspective view of an ultrasonic transducer according to a fifth embodiment corresponding to claim 2 of the present application. 本願請求項２に対応する第６実施例の超音波振動子の斜視図である。It is a perspective view of the ultrasonic transducer | vibrator of 6th Example corresponding to Claim 2 of this application. 本願請求項２に対応する第７実施例の超音波振動子であって、（Ａ）はその平面図で（Ｂ）はその側面図である。It is an ultrasonic transducer | vibrator of 7th Example corresponding to this-application Claim 2, Comprising: (A) is the top view, (B) is the side view. 従来の一般的な超音波振動子の斜視図である。It is a perspective view of the conventional common ultrasonic transducer | vibrator. 従来の超音波振動子における圧電体厚さと発生周波数との関係を示す説明図である。It is explanatory drawing which shows the relationship between the piezoelectric material thickness and generation frequency in the conventional ultrasonic transducer | vibrator.

［実施例］
図１〜図８を参照して本願のいくつかの実施例を説明すると、図１〜図２の第１実施例と、図３の第２実施例と、図４の第３実施例と、図５（Ａ），（Ｂ）の第４実施例は、それぞれ本願請求項１に対応する超音波振動子であり、図６の第５実施例と、図７の第６実施例と、図８（Ａ），（Ｂ）の第７実施例は、それぞれ本願請求項２に対応する超音波振動子である。 [Example]
Several embodiments of the present application will be described with reference to FIGS. 1 to 8. The first embodiment of FIGS. 1 to 2, the second embodiment of FIG. 3, the third embodiment of FIG. 4, The fourth embodiment shown in FIGS. 5A and 5B is an ultrasonic transducer corresponding to claim 1 of the present application. The fifth embodiment shown in FIG. 6, the sixth embodiment shown in FIG. The seventh embodiment of 8 (A) and (B) is an ultrasonic transducer corresponding to claim 2 of the present application.

これらの実施例（第１〜第７実施例）の各超音波振動子１は、所定面積を有した板状の圧電体（例えば圧電セラミックス）２の表裏各面に極薄の電極３，４を設けたものである。尚、圧電体表裏の各電極３，４は、それぞれ圧電体２の表裏各面積の全面に設けられている。そして、これらの超音波振動子１は、図１に示すように、各電極３，４に交流電流（交流電源５）を流すと、圧電体２が超音波振動するものである。   Each of the ultrasonic transducers 1 of these embodiments (first to seventh embodiments) has ultrathin electrodes 3 and 4 on the front and back surfaces of a plate-like piezoelectric body (for example, piezoelectric ceramic) 2 having a predetermined area. Is provided. The electrodes 3 and 4 on the front and back sides of the piezoelectric body are respectively provided on the entire surface of the front and back surfaces of the piezoelectric body 2. As shown in FIG. 1, these ultrasonic vibrators 1 are those in which the piezoelectric body 2 vibrates ultrasonically when an AC current (AC power supply 5) is passed through the electrodes 3 and 4.

ところで、この種の超音波振動子１では、圧電体２の厚さに比例して発生するピーク周波数（効率よく発生する周波数）が変化する性質を有し、該圧電体厚さが薄くなるほど、周波数が高くなる性質がある。


因に、超音波美容器には一般に０.５ＭＨｚ〜７ＭＨｚの範囲の超音波を発生する超音波振動子が使用されるが、０.５ＭＨｚでのピーク周波数発生用では厚さが３mm、１ＭＨｚでの同発生用では厚さが２mm、３ＭＨｚでの同発生用では厚さが０.６９mm、５ＭＨｚでの同発生用では厚さが０.４mm、７ＭＨｚでの同発生用では厚さが０.２８mm、のものがそれぞれ最適である。 By the way, this type of ultrasonic vibrator 1 has a property that the peak frequency (frequency that is efficiently generated) generated in proportion to the thickness of the piezoelectric body 2 changes, and the thinner the piezoelectric body thickness, There is a property of increasing the frequency.


Incidentally, an ultrasonic vibrator that generates ultrasonic waves in the range of 0.5 MHz to 7 MHz is generally used for an ultrasonic cosmetic device, but for generating a peak frequency at 0.5 MHz, the thickness is 3 mm and 1 MHz. For the same generation, the thickness is 2 mm, for the same generation at 3 MHz, the thickness is 0.69 mm, for the same generation at 5 MHz, the thickness is 0.4 mm, and for the same generation at 7 MHz, the thickness is 0.0 mm. 28mm is optimal for each.

そして、本願各実施例（第１〜第７実施例）の超音波振動子１では、圧電体２に厚さを変化させた部分を設けることにより、単一のもので複数のピーク周波数を発生させ得るしている。   In the ultrasonic vibrator 1 of each embodiment (first to seventh embodiments) of the present application, a plurality of peak frequencies are generated by a single unit by providing the piezoelectric body 2 with a portion whose thickness is changed. Have you let me.

以下、個別の実施例について説明する。   Hereinafter, individual embodiments will be described.

［図１〜図２の第１実施例］
この第１実施例の超音波振動子１では、平面視四角形の圧電体２の上面を一つの側縁からその対向側縁に向けて無段階状に傾斜させることによって、該圧電体２が図２に示す側面方向から見て一方（左側）から他方（右側）に向けて厚さが漸次厚くなるようにしている。 [First Example of FIGS. 1-2]
In the ultrasonic transducer 1 according to the first embodiment, the upper surface of the piezoelectric body 2 having a square shape in plan view is steplessly inclined from one side edge toward the opposite side edge, whereby the piezoelectric body 2 is shown in FIG. The thickness is gradually increased from one side (left side) to the other side (right side) as viewed from the side direction shown in FIG.

この第１実施例の超音波振動子１では、最小厚さＴ1部分が０.２８mmで、最大厚さＴ2部分が３mmであり、図２の側面方向から見て厚さを漸次無段階的に変化させている。尚、この第１実施例では、圧電体２の片面（上面）のみを傾斜させているが、表裏各面を相互を逆側に傾斜させてもよい。   In the ultrasonic transducer 1 of the first embodiment, the minimum thickness T1 portion is 0.28 mm and the maximum thickness T2 portion is 3 mm, and the thickness is gradually stepless as viewed from the side direction in FIG. It is changing. In the first embodiment, only one surface (upper surface) of the piezoelectric body 2 is inclined. However, the front and back surfaces may be inclined opposite to each other.

この第１実施例の超音波振動子１は、圧電体表裏の各電極３，４に通電すると該圧電体２部分が超音波振動するが、圧電体２の厚さが薄い部分（Ｔ1）ではその小厚さＴ1に対応した比較的高い周波数（例えば７ＭＨｚ）でのピーク周波数を発生させることができる一方、圧電体２の厚さが厚い部分（Ｔ2）ではその大厚さＴ2に対応した比較的低い周波数（例えば０.５ＭＨｚ）でのピーク周波数の超音波を発生させることができる。   In the ultrasonic vibrator 1 of the first embodiment, when the electrodes 3 and 4 on the front and back sides of the piezoelectric body are energized, the piezoelectric body 2 portion is ultrasonically vibrated, but the piezoelectric body 2 is thin (T1). While a peak frequency at a relatively high frequency (for example, 7 MHz) corresponding to the small thickness T1 can be generated, a portion corresponding to the large thickness T2 is compared in a portion where the piezoelectric body 2 is thick (T2). An ultrasonic wave having a peak frequency at a low frequency (for example, 0.5 MHz) can be generated.

従って、この第１実施例の超音波振動子では、単一のものであっても複数（無段階）のピーク周波数を発生させ得る複数（無段階）の厚さ部分が存在するので、複数（無段階）の周波数でのそれぞれのピーク周波数の超音波を発生させることができる。   Therefore, in the ultrasonic transducer of the first embodiment, there are a plurality of (stepless) thickness portions that can generate a plurality of (stepless) peak frequencies even if it is a single one. It is possible to generate ultrasonic waves having respective peak frequencies at non-step frequency.

尚、この超音波振動子１は、圧電体厚さの変化率を大きくするほど（例えば最小厚さＴ1部分が０.２８mmで最大厚さＴ2部分が３mm）、発生させるピーク周波数領域を広くできるが、その反面、必要とする所望の周波数での出力面積が小さくなる。そこで、この第１実施例の超音波振動子１では、圧電体厚さの変化率を、最小厚さＴ1部分が０.２８mm以上で最大厚さＴ2部分が３mm以下となる範囲で、適宜に変化させることができる。例えば、７ＭＨｚ〜３ＭＨｚでのピーク周波数発生用では、最小厚さＴ1部分が０.２８mmで最大厚さＴ2部分が０.６９mmであるものを採用し、５ＭＨｚ〜１ＭＨｚでのピーク周波数発生用では、最小厚さＴ1部分が０.４mmで最大厚さＴ2部分が２mmであるものを採用し、３ＭＨｚ〜０.５ＭＨｚでのピーク周波数発生用では、最小厚さＴ1部分が０.６９mmで最大厚さＴ2部分が３mmであるものを採用することができる。   The ultrasonic transducer 1 can increase the peak frequency region to be generated as the rate of change of the piezoelectric thickness is increased (for example, the minimum thickness T1 portion is 0.28 mm and the maximum thickness T2 portion is 3 mm). However, on the other hand, the output area at the required desired frequency is reduced. Therefore, in the ultrasonic transducer 1 of the first embodiment, the rate of change of the piezoelectric thickness is appropriately set within a range where the minimum thickness T1 portion is 0.28 mm or more and the maximum thickness T2 portion is 3 mm or less. Can be changed. For example, for peak frequency generation at 7 MHz to 3 MHz, the one having a minimum thickness T1 portion of 0.28 mm and a maximum thickness T2 portion of 0.69 mm is adopted, and for peak frequency generation at 5 MHz to 1 MHz, The minimum thickness T1 part is 0.4mm and the maximum thickness T2 part is 2mm. For peak frequency generation from 3MHz to 0.5MHz, the minimum thickness T1 part is 0.69mm and the maximum thickness. A T2 portion with 3 mm can be employed.

［図３の第２実施例］
この第２実施例の超音波振動子１は、圧電体２の上面を、その一辺方向の中間位置に大厚さＴ2の山形屈曲部６を設け、該山形屈曲部６から対向する各端縁に向けてそれぞれ所定小厚さＴ1まで下り傾斜させることによって、圧電体２の厚さを無段階状に変化させている。 [Second Embodiment of FIG. 3]
In the ultrasonic transducer 1 of the second embodiment, an upper surface of the piezoelectric body 2 is provided with a mountain-shaped bent portion 6 having a large thickness T2 at an intermediate position in one side direction, and each end edge facing the mountain-shaped bent portion 6 is provided. The thickness of the piezoelectric body 2 is changed steplessly by inclining downward to a predetermined small thickness T1.

尚、この第２実施例でも、最大厚さＴ2部分を３mm（０.５ＭＨｚでのピーク周波数発生用）とし、各下降傾斜側端縁部分の最小厚さＴ1部分を０.２８mm（７ＭＨｚでのピーク周波数発生用）としているが、この最大厚さＴ2部分から最小厚さＴ1部分までの厚さ変化率は上記第１実施例の場合と同様に適宜に変更できる。   Also in this second embodiment, the maximum thickness T2 portion is 3 mm (for generating a peak frequency at 0.5 MHz), and the minimum thickness T1 portion of each descending slope side edge portion is 0.28 mm (at 7 MHz). However, the rate of change in thickness from the maximum thickness T2 portion to the minimum thickness T1 portion can be appropriately changed as in the case of the first embodiment.

［図４の第３実施例］
この第３実施例の超音波振動子１は、上記第２実施例とは逆に、圧電体２の上面を、その一辺方向の中間位置に小厚さＴ1（０.２８mm）の谷形屈曲部７を設け、該谷形屈曲部７から対向する各端縁に向けてそれぞれ所定大厚さＴ2（３mm）まで上り傾斜させることによって、圧電体２の厚さを無段階状に変化させている。 [Third Example of FIG. 4]
In contrast to the second embodiment, the ultrasonic transducer 1 of the third embodiment has a valley-shaped bending with a small thickness T1 (0.28 mm) at the middle position in the one side of the piezoelectric body 2. The thickness of the piezoelectric body 2 is changed steplessly by providing the portion 7 and inclining up to a predetermined large thickness T2 (3 mm) from the valley-shaped bent portion 7 toward each facing edge. Yes.

［図５の第４実施例］
この第４実施例の超音波振動子１は、図５（Ａ）に示すように平面視で円形に形成されたものを採用している。そして、この第４実施例の超音波振動子１では、圧電体２の上面を、図５（Ｂ）に示すように上面側の中心部８を頂点にして緩やかな円錐形に下降傾斜させている。尚、この第４実施例の超音波振動子１では、上面側の中心部８が最大厚さＴ2（３mm）となり、外周に寄るほど漸次小厚さとなって外周縁部分では最小厚さＴ1（０.２８mm）となっている。 [Fourth embodiment of FIG. 5]
As the ultrasonic transducer 1 according to the fourth embodiment, one formed in a circular shape in plan view as shown in FIG. 5A is adopted. In the ultrasonic transducer 1 of the fourth embodiment, the upper surface of the piezoelectric body 2 is inclined downwardly into a gentle conical shape with the center portion 8 on the upper surface side as the apex as shown in FIG. Yes. In the ultrasonic transducer 1 of the fourth embodiment, the central portion 8 on the upper surface side has a maximum thickness T2 (3 mm), and gradually decreases toward the outer periphery, and the outer peripheral portion has a minimum thickness T1 ( 0.28 mm).

［図６の第５実施例］
この第５実施例の超音波振動子１は、板状で四角形の圧電体２を、その一辺方向の中間位置の上面に段部９を設けて、それぞれ１／２の面積範囲に小厚さＴ3の薄板部１ａと大厚さＴ4の厚板部１ｂとを形成している。薄板部１ａの全面積及び厚板部１ｂの全面積は、それぞれ同一厚さの平面板状となっている。 [Fifth embodiment of FIG. 6]
The ultrasonic transducer 1 of this fifth embodiment has a plate-like rectangular piezoelectric body 2 and a step 9 provided on the upper surface at an intermediate position in one side direction, each having a small thickness in an area range of ½. A thin plate portion 1a of T3 and a thick plate portion 1b of large thickness T4 are formed. The entire area of the thin plate portion 1a and the entire area of the thick plate portion 1b are flat plate shapes having the same thickness.

この第５実施例の場合は、厚さ変化部分が２つ（薄板部１ａと厚板部１ｂ）であるので、単一の超音波振動子１で２種類のピーク周波数しか発生できないが、それでも１つの超音波振動子１で異なる周波数を用いる２種類の超音波発生機器に共用できる。尚、この第５実施例の超音波振動子１としては、薄板部１ａの厚さＴ3が０.２８mm（７ＭＨｚでのピーク周波数発生用）で厚板部１ｂの厚さＴ4が０.４mm（５ＭＨｚでのピーク周波数発生用）のもの、薄板部１ａの厚さＴ3が０.４mmで厚板部１ｂの厚さＴ4が０.６９mm（３ＭＨｚでのピーク周波数発生用）のもの、薄板部１ａの厚さＴ3が０.６９mmで厚板部１ｂの厚さＴ4が２mm（１ＭＨｚでのピーク周波数発生用）のもの、薄板部１ａの厚さＴ3が２mmで厚板部１ｂの厚さＴ4が３mm（０.５ＭＨｚでのピーク周波数発生用）のもの、等の数種類用意しておくとよいが、それらのいずれのものでも２種類の超音波発生機器に適用できる。   In the case of this fifth embodiment, since there are two thickness changing portions (thin plate portion 1a and thick plate portion 1b), only two types of peak frequencies can be generated by a single ultrasonic transducer 1, but still One ultrasonic transducer 1 can be shared by two types of ultrasonic generators using different frequencies. In the ultrasonic transducer 1 of the fifth embodiment, the thickness T3 of the thin plate portion 1a is 0.28 mm (for generating a peak frequency at 7 MHz) and the thickness T4 of the thick plate portion 1b is 0.4 mm ( For a peak frequency generation at 5 MHz), for a thin plate portion 1a having a thickness T3 of 0.4 mm and for a thick plate portion 1b having a thickness T4 of 0.69 mm (for generating a peak frequency at 3 MHz), a thin plate portion 1a Thickness T3 of 0.69 mm and thickness T4 of thick plate portion 1b is 2 mm (for generating peak frequency at 1 MHz), thickness T3 of thin plate portion 1a is 2 mm and thickness T4 of thick plate portion 1b is Several types such as 3 mm (for generating a peak frequency at 0.5 MHz) may be prepared, but any of them can be applied to two types of ultrasonic generators.

この第５実施例のように、単一の超音波振動子１に厚さを複数（２つ）の段状に変化させたものを使用すると、各厚さ部分（１ａ，１ｂ）にそれぞれ所定面積があるので、上記第１〜第４の各実施例のように圧電体厚さを無段階的に変化させたものに比して、各厚さ部分（１ａ，１ｂ）における超音波出力の低下を極力小さくできる。   As in the fifth embodiment, when a single ultrasonic transducer 1 having a plurality of (two) thicknesses is used, each thickness portion (1a, 1b) is predetermined. Since there is an area, the ultrasonic output of each thickness portion (1a, 1b) is smaller than that in which the thickness of the piezoelectric body is changed steplessly as in the first to fourth embodiments. The decrease can be minimized.

［図７の第６実施例］
この第６実施例の超音波振動子１は、四角形の圧電体２の外周部に厚さＴ3の薄板部１ａを設けている一方、その中央部の所定面積範囲に厚さＴ4の厚板部１ｂを設けて、該圧電体２に２つの厚さ変化部分を形成している。又、この超音波振動子１では、外周部の薄板部１ａの面積と中央部の厚板部１ｂの面積とが同じで、各部分での超音波出力に差が出ないようにしている。 [Sixth embodiment of FIG. 7]
In the ultrasonic transducer 1 of the sixth embodiment, a thin plate portion 1a having a thickness T3 is provided on the outer peripheral portion of a rectangular piezoelectric body 2, while a thick plate portion having a thickness T4 is provided in a predetermined area range at the center portion thereof. 1 b is provided, and two thickness changing portions are formed in the piezoelectric body 2. Further, in this ultrasonic vibrator 1, the area of the thin plate portion 1a at the outer peripheral portion and the area of the thick plate portion 1b at the central portion are the same, so that there is no difference in the ultrasonic output at each portion.

［図８の第７実施例］
この第７実施例の超音波振動子１は、円形の圧電体２の外周部に厚さＴ3の薄板部１ａを設けている一方、その中央部の所定面積範囲に厚さＴ4の厚板部１ｂを設けて、該圧電体２に２つの厚さ変化部分を形成している。又、この第７実施例の超音波振動子１でも、外周部の薄板部１ａの面積と中央部の厚板部１ｂの面積とが同じで、各部分での超音波出力に差が出ないようにしている。 [Seventh Embodiment of FIG. 8]
In the ultrasonic transducer 1 of the seventh embodiment, a thin plate portion 1a having a thickness T3 is provided on the outer peripheral portion of a circular piezoelectric body 2, while a thick plate portion having a thickness T4 is provided in a predetermined area range at the center portion thereof. 1 b is provided, and two thickness changing portions are formed in the piezoelectric body 2. Also in the ultrasonic transducer 1 of the seventh embodiment, the area of the thin plate portion 1a at the outer peripheral portion and the area of the thick plate portion 1b at the central portion are the same, and there is no difference in ultrasonic output at each portion. I am doing so.

尚、上記第５〜第７の各実施例の超音波振動子１では、圧電体２の全面積を１／２に分けて厚さの異なる２つの面積部分（薄板部１ａ，厚板部１ｂ）を設けているが、厚さを変化させた各分割部分は、２〜５の範囲で適宜に設定できる。尚、厚さ変化部分を多くに分割するほど、単一のもので多種類のピーク周波数を発生させることができるが、その場合は１つ当たりの超音波出力が低下するので、強い超音波出力を必要とする超音波発生機器では、厚さ変化部分の分割数は２つ程度が好ましい。   In the ultrasonic transducers 1 according to the fifth to seventh embodiments, the entire area of the piezoelectric body 2 is divided into ½, and two area portions having different thicknesses (thin plate portion 1a and thick plate portion 1b). ) Is provided, but each of the divided portions with varying thicknesses can be appropriately set within a range of 2 to 5. In addition, the more the thickness change part is divided, the more various types of peak frequencies can be generated. However, in that case, the ultrasonic output per unit decreases, so strong ultrasonic output In an ultrasonic generator that requires the above, the number of divisions of the thickness changing portion is preferably about two.

１は超音波振動子、１ａは薄板部、１ｂは厚板部、２は圧電体、３，４は電極である。   1 is an ultrasonic transducer, 1a is a thin plate portion, 1b is a thick plate portion, 2 is a piezoelectric body, and 3 and 4 are electrodes.

Claims (2)

単一の圧電体（２）に厚さを変化させた部分を設けていることを特徴とする超音波振動子。   An ultrasonic vibrator characterized in that a single piezoelectric body (2) is provided with a portion whose thickness is changed. 請求項１において、圧電体（２）の厚さを複数の段状に変化させたものを使用していることを特徴とする超音波振動子。   2. The ultrasonic transducer according to claim 1, wherein a piezoelectric body (2) having a thickness changed into a plurality of steps is used.
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CN112958420A (en) * 2021-01-22 2021-06-15 深圳大学 High-bandwidth ultrasonic transducer and preparation method thereof

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CN112452694A (en) * 2020-09-23 2021-03-09 长江大学 Multi-frequency piezoelectric miniature ultrasonic transducer unit, array and method
CN112958420A (en) * 2021-01-22 2021-06-15 深圳大学 High-bandwidth ultrasonic transducer and preparation method thereof
CN112958420B (en) * 2021-01-22 2022-04-08 深圳大学 High-bandwidth ultrasonic transducer and preparation method thereof

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