JP2011088216A - Ultrasonic tool holder - Google Patents

Ultrasonic tool holder Download PDF

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JP2011088216A
JP2011088216A JP2008060215A JP2008060215A JP2011088216A JP 2011088216 A JP2011088216 A JP 2011088216A JP 2008060215 A JP2008060215 A JP 2008060215A JP 2008060215 A JP2008060215 A JP 2008060215A JP 2011088216 A JP2011088216 A JP 2011088216A
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ultrasonic
holder
tool
tool holder
vibration
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JP2008060215A
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Kazumasa Onishi
一正 大西
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UWAVE KK
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UWAVE KK
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Priority to JP2008060215A priority Critical patent/JP2011088216A/en
Priority to PCT/JP2009/052326 priority patent/WO2009101987A1/en
Publication of JP2011088216A publication Critical patent/JP2011088216A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
    • B23B31/02—Chucks
    • B23B31/10—Chucks characterised by the retaining or gripping devices or their immediate operating means
    • B23B31/117—Retention by friction only, e.g. using springs, resilient sleeves, tapers
    • B23B31/1179—Retention by friction only, e.g. using springs, resilient sleeves, tapers using heating and cooling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B37/00—Boring by making use of ultrasonic energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2250/00—Compensating adverse effects during turning, boring or drilling
    • B23B2250/16—Damping of vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2260/00—Details of constructional elements
    • B23B2260/066—Electrostrictive elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2260/00—Details of constructional elements
    • B23B2260/102—Magnetostrictive elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2260/00—Details of constructional elements
    • B23B2260/108—Piezoelectric elements

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a tool holder for ultrasonic machining capable of achieving high machining accuracy and high reliability. <P>SOLUTION: The ultrasonic tool holder 1 has a tapered steel holder 2 mounted on a rotating shaft, and the holder 2 has a jaw 5 and a groove 6 for holding a manipulator. A plurality of through-slits 24 are arranged at the rear mass 11 of the part having the cylindrical space 23 of the holder 2. A ferrite rotary transformer 8 at a rotating side is arranged between the jaws 5 of the holder 2 as in the tapered part of the holder 2. The rotary transformer 8 at the rotating side is tightened and fixed by a steel fixing ring 7 having a female screw. The holder 2, the rear mass 11, and the chuck cylinder 3 of the ultrasonic tool holder 1 are made of steel integrally. Piezoelectric ceramics 12a, 12b are interposed between the rear mass 11 and a steel front mass 13 and are tightened and integrated. An end mill to be a cemented carbide tool 4 is joined to the chuck cylinder 3 by shrink fitting. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、回転する工具を保持する超音波工具ホルダに関するものである。  The present invention relates to an ultrasonic tool holder for holding a rotating tool.

最近、いわゆる難加工材料を加工するために超音波振動を工具または、ワークに与え加工する方法が多用されるようになってきた。このような加工方法は、超音波切削加工と呼ばれて、例えば、非特許文献１に詳しく記載されている。また、本発明者の出願特許２００６−３０８４２３に記載の切断装置において、毎分１万回転を超えるブレードに超音波振動を印加することにより従来切断が困難であったサファイア基板を切断することも可能となった。  Recently, in order to process a so-called difficult-to-process material, a method of applying ultrasonic vibration to a tool or a workpiece and processing has been frequently used. Such a processing method is called ultrasonic cutting, and is described in detail in Non-Patent Document 1, for example. In the cutting apparatus described in the present inventor's application 2006-308423, it is also possible to cut a sapphire substrate, which has been difficult to cut by applying ultrasonic vibration to a blade exceeding 10,000 revolutions per minute. It became.

超音波研削装置は、非特許文献２に詳しく記載されている。図１に示す超音波研削装置は回転軸を回転させるためのモータがあり、その回転軸にスリップリング、超音波振動子が備えられている。さらに、回転軸にはブースタ、ホーンそして研削工具であるダイヤモンド砥石が接続されている。また回転自在に支持するための軸受が配置されている。また超音波交流電圧を超音波振動子に印加するための超音波発振器とブラシを備えている。  The ultrasonic grinding apparatus is described in detail in Non-Patent Document 2. The ultrasonic grinding apparatus shown in FIG. 1 has a motor for rotating a rotary shaft, and the rotary shaft is provided with a slip ring and an ultrasonic vibrator. Further, a booster, a horn, and a diamond grindstone as a grinding tool are connected to the rotating shaft. In addition, a bearing for rotatably supporting is arranged. An ultrasonic oscillator and a brush for applying an ultrasonic alternating voltage to the ultrasonic vibrator are provided.

上記の超音波研削装置の概略の運転方法は以下の通りである。まずモータを動作させるとほぼ同時に超音波発振器からブラシを介して回転するスリップリングに超音波交流電圧を印加する。スリップリングに与えられた交流電圧は超音波振動子に印加され、超音波振動子は超音波振動する。この超音波振動が、ブースタそしてホーンを伝播し、そして研削工具であるダイヤモンド砥石に伝播する。
超音波便覧編集委員会、「超音波便覧」、丸善株式会社、平成１１年８月、ｐ６７９−６８４ 日本電子機械工業会、「超音波工学」、株式会社コロナ社、１９９３年、ｐ２１８−２２９ The general operation method of the above ultrasonic grinding apparatus is as follows. First, when the motor is operated, an ultrasonic alternating voltage is applied from an ultrasonic oscillator to a slip ring that rotates through a brush almost simultaneously. The AC voltage applied to the slip ring is applied to the ultrasonic vibrator, and the ultrasonic vibrator vibrates ultrasonically. This ultrasonic vibration propagates through the booster and horn, and then propagates to the grinding wheel, which is a grinding tool.
Ultrasonic Handbook Editorial Committee, “Ultrasonic Handbook”, Maruzen Co., Ltd., August 1999, p679-684 Japan Electromechanical Industry Association, "Ultrasonic Engineering", Corona Co., Ltd., 1993, p218-229

図１の超音波研削装置は、回転軸に超音波振動子を取り付けているため、回転軸も超音波振動するので軸受を通して装置全体に不要な振動を発生させる。この不要な振動は、加工精度を低下させる。また回転軸および軸受に異常な磨耗が発生する恐れがある。  In the ultrasonic grinding apparatus of FIG. 1, since the ultrasonic vibrator is attached to the rotating shaft, the rotating shaft also vibrates ultrasonically, so that unnecessary vibration is generated throughout the apparatus through the bearing. This unnecessary vibration reduces processing accuracy. In addition, abnormal wear may occur on the rotating shaft and the bearing.

さらに、工具を効率的に振動させるためには工具を保持する装置より先の工具の長さにより駆動周波数を変化させなければならないが、工具に比較してランジュバン型超音波振動子、回転軸及びホーンの質量が大きいため、主に前記ランジュバン型超音波振動子などの固有振動数でしか効率的に振動を励起することができない。したがって、工具に最適な振動を励起することができないという問題点もある。  Furthermore, in order to vibrate the tool efficiently, the drive frequency must be changed depending on the length of the tool ahead of the device that holds the tool, but compared with the tool, the Langevin type ultrasonic vibrator, the rotating shaft and Since the mass of the horn is large, vibration can be efficiently excited mainly only at the natural frequency of the Langevin type ultrasonic vibrator. Therefore, there is also a problem that it is impossible to excite vibrations optimal for the tool.

本発明の目的は、高効率、高精度および高い信頼性をもつ超音波加工法を提供するものである。  An object of the present invention is to provide an ultrasonic processing method having high efficiency, high accuracy, and high reliability.

本発明は、回転加工装置の工具を保持する超音波工具ホルダにおいて、工具と超音波振動子部の間のホルダ部に複数の空間部を有するものである。  The present invention is an ultrasonic tool holder for holding a tool of a rotary machining apparatus, and has a plurality of space portions in a holder portion between a tool and an ultrasonic transducer portion.

本発明はまた、前記超音波工具ホルダに保持固定される工具が、エンドミル、ドリル、リーマそしてタップであるものとすることである。  According to the present invention, the tool held and fixed to the ultrasonic tool holder is an end mill, a drill, a reamer, and a tap.

本発明の超音波工具ホルダを使用して、旋盤、フライス盤、ミリング装置などの機械加工機に用いて超音波加工を行うことにより高精度かつ高速加工を可能となる。  By using the ultrasonic tool holder of the present invention and performing ultrasonic machining on a machining machine such as a lathe, a milling machine, or a milling device, high-precision and high-speed machining becomes possible.

図２は、本発明の第１の実施の形態の超音波工具ホルダ１の基本的な構成を示す斜視図である。焼嵌め式の超音波工具ホルダ１は、回転軸に取り付けるテーパー状の鋼製のホルダ部２があり、そのホルダ部２の中に顎５そしてマニピュレータ把持用溝６がある。ホルダ部２のテーパー状の部分と同じくホルダ部２の顎５の間に回転側のフェライト製のロータリートランス８を配置する。そしてその回転側のロータリートランス８を固定するためにメネジを持つ鋼製の固定リング７により締め付け固定する。  FIG. 2 is a perspective view showing a basic configuration of the ultrasonic tool holder 1 according to the first embodiment of the present invention. The shrink-fit ultrasonic tool holder 1 has a tapered steel holder portion 2 attached to a rotating shaft, and a jaw 5 and a manipulator gripping groove 6 are provided in the holder portion 2. The rotary transformer 8 made of ferrite on the rotating side is arranged between the jaws 5 of the holder part 2 in the same manner as the tapered part of the holder part 2. Then, in order to fix the rotary transformer 8 on the rotating side, the steel fixing ring 7 having a female screw is fastened and fixed.

超音波工具ホルダ１のホルダ部２、リアマス１１、そしてチャック筒３は一体の鋼材で作成する。そしてリアマス１１と鋼製のフロントマス１３の間に圧電セラミック１２ａ、１２ｂ入れ、締め付け一体化する。このようにしてランジュバン型の超音波振動子部９を作成する。そして、チャック筒３に焼嵌めにより超硬製の工具４であるエンドミルを接合する。  The holder part 2, the rear mass 11, and the chuck cylinder 3 of the ultrasonic tool holder 1 are made of an integral steel material. Then, the piezoelectric ceramics 12a and 12b are put between the rear mass 11 and the steel front mass 13, and are tightened and integrated. In this way, the Langevin type ultrasonic transducer section 9 is created. Then, an end mill which is a cemented carbide tool 4 is joined to the chuck cylinder 3 by shrink fitting.

ここで、図２の断面を示す図３を用いてさらに説明する。焼嵌め式の超音波工具ホルダ１の回転軸側には鋼製のプルスタッド１０をネジにより接続している。  Here, it demonstrates further using FIG. 3 which shows the cross section of FIG. A steel pull stud 10 is connected to the rotary shaft side of the shrink-fit ultrasonic tool holder 1 with screws.

ホルダ部２の円筒形状の空間２３を持つ部分のリアマス１１に複数の貫通するスリット２４を設ける。これらのスリット２４は、軸方向に２段となっており、かつ上下のスリット２４は必ず円周方向に重なる。このようにすることで超音波振動子部９の超音波振動はスリット２４の空間と円筒形状の空間２３で、超音波振動は反射し、ホルダ部２には伝達しない。したがって超音波振動子部９の超音波振動は、チャック筒３そして工具４だけ伝達する。そして、スリット２４の間隔により機械的強度も調整する。  A plurality of slits 24 penetrating through the rear mass 11 of the holder portion 2 having the cylindrical space 23 are provided. These slits 24 have two stages in the axial direction, and the upper and lower slits 24 always overlap in the circumferential direction. By doing so, the ultrasonic vibration of the ultrasonic transducer unit 9 is reflected by the space of the slit 24 and the cylindrical space 23 and is not transmitted to the holder unit 2. Therefore, the ultrasonic vibration of the ultrasonic transducer unit 9 is transmitted only by the chuck cylinder 3 and the tool 4. The mechanical strength is also adjusted by the interval of the slits 24.

ここでスリット２４の中に図示しない発泡ポリウレタンを充填する。この発泡ポリウレタンは非常に多くの空間を持つので、スリット２４の空間はそれほど減少しないので超音波反射性能をそれほど低下させない。スリット２４に発泡ポリウレタンを充填しているので回転軸が回転し、超音波工具ホルダ１が回転しても騒音を発生させない。また、切削液がスリット２４の中に入るのを防ぐことができる。ここでは、発泡ポリウレタンを用いたが、シリコンスポンジなど気孔を多く含む材料でもよい。  Here, foamed polyurethane (not shown) is filled into the slit 24. Since this foamed polyurethane has a very large space, the space of the slit 24 does not decrease so much, so that the ultrasonic reflection performance does not deteriorate so much. Since the slit 24 is filled with foamed polyurethane, the rotating shaft rotates and no noise is generated even if the ultrasonic tool holder 1 rotates. Further, the cutting fluid can be prevented from entering the slit 24. Here, foamed polyurethane is used, but a material having many pores such as silicon sponge may be used.

チャック筒３には、焼嵌めにより工具４を固定保持する。誘導加熱装置の加熱コイルの中にチャック筒３を挿入し、スイッチを入れ電磁誘導によりチャック筒３を誘導加熱する。そしてチャック筒３は、加熱されることにより、膨張する。そして膨張したチャック筒３に工具４のシャンク部を挿入して焼き嵌めする。工具４の焼嵌めについては、例えば特許文献１および特許文献２に詳しく記述してある。
特開２００２−３５５７２７公報 特開２００２−１２０１１５公報 The tool 4 is fixedly held on the chuck cylinder 3 by shrink fitting. The chuck cylinder 3 is inserted into the heating coil of the induction heating device, the switch is turned on, and the chuck cylinder 3 is induction heated by electromagnetic induction. The chuck cylinder 3 expands when heated. Then, the shank portion of the tool 4 is inserted into the expanded chuck cylinder 3 and shrink-fitted. The shrink fitting of the tool 4 is described in detail in Patent Document 1 and Patent Document 2, for example.
JP 2002-355727 A JP 2002-120115 A

次に焼嵌め式の超音波工具ホルダ１を回転軸１９に取り付けた構成について断面図４を用いて説明する。焼嵌め式の超音波工具ホルダ１のホルダ部２のテーパー部を回転軸１９のテーパー穴２０に挿入し、プルスタッド１０を引き具１４により引き込み取付ける。回転軸１９は回転軸ハウジング１５の軸受け２２で回転自在に支持されている。軸受け２２は、転がり軸受けだけでなく、エア軸受け、流体静圧軸受けなど任意である。  Next, a configuration in which the shrink-fit ultrasonic tool holder 1 is attached to the rotary shaft 19 will be described with reference to a sectional view 4. The taper portion of the holder portion 2 of the shrink-fit ultrasonic tool holder 1 is inserted into the taper hole 20 of the rotating shaft 19, and the pull stud 10 is pulled in and attached by the pulling tool 14. The rotating shaft 19 is rotatably supported by a bearing 22 of the rotating shaft housing 15. The bearing 22 is not limited to a rolling bearing, but is optional such as an air bearing or a hydrostatic bearing.

さらに本発明の焼嵌め式の超音波工具ホルダ１を用いた超音波加工装置の運転方法を、同じく図４を用いて説明する。まず図示しないモータの電源を入れ回転軸１９を回転させる。これとほぼ同時に超音波発振器２１のスイッチを入れ固定側のロータリートランス８ａ、回転側のロータリートランス８ｂを介して圧電セラミック１２ａ、１２ｂに約４０ＫＨｚの交流電圧を印加すると、超音波振動子部９そしてチャック筒３を超音波振動が伝播し、工具先端に約１５μｍの縦振動が励起される。図４の中では、超音波発振器２１の位置を図の下方に位置させているが、実際は図示しないコントロールボックスの中に収められている。  Furthermore, the operating method of the ultrasonic processing apparatus using the shrink-fit ultrasonic tool holder 1 of the present invention will be described with reference to FIG. First, a motor (not shown) is turned on to rotate the rotary shaft 19. At almost the same time, when the ultrasonic oscillator 21 is switched on and an AC voltage of about 40 KHz is applied to the piezoelectric ceramics 12a and 12b via the fixed-side rotary transformer 8a and the rotary-side rotary transformer 8b, the ultrasonic transducer unit 9 and Ultrasonic vibration propagates through the chuck cylinder 3, and longitudinal vibration of about 15 μm is excited at the tip of the tool. In FIG. 4, although the position of the ultrasonic oscillator 21 is positioned below the figure, it is actually housed in a control box (not shown).

ここで回転側のロータリートランス８ｂから圧電セラミック１２ａ、１２ｂへの電力の供給経路を詳しく説明する。ホルダ部２にリード線１８ａ、１８ｂを通すリード線穴１７ａ、１７ｂを設ける。リード線穴１７は回転バランスを維持するためにさらに追加してもよい。回転側のロータリートランス８ｂと電極板１６ａ、１６ｂをリード線穴１７ａ、１７ｂを通したリード線１８ａ、１８ｂにより電気的に接続する。  Here, a power supply path from the rotary transformer 8b to the piezoelectric ceramics 12a and 12b will be described in detail. The holder portion 2 is provided with lead wire holes 17a and 17b through which the lead wires 18a and 18b pass. The lead wire hole 17 may be further added to maintain the rotational balance. The rotary transformer 8b on the rotation side and the electrode plates 16a and 16b are electrically connected by lead wires 18a and 18b through lead wire holes 17a and 17b.

この構成において工具４を焼嵌めによりチャック筒３に固定するので、工具４とチャック筒３は機械的に一体化できる。コレットチャックと比較すると、コレットチャックは、コレットとコレット締め付け手段により工具を保持する構成であるので、超音波振動の伝播経路、振動モードが複雑になる。そして、各接触部で振動エネルギーが熱に変換されてしまう。また、超音波振動によりコレットの締め付け力が変化する虞がある。  In this configuration, since the tool 4 is fixed to the chuck cylinder 3 by shrink fitting, the tool 4 and the chuck cylinder 3 can be mechanically integrated. Compared with the collet chuck, the collet chuck is configured to hold the tool by the collet and the collet tightening means, so that the propagation path and vibration mode of ultrasonic vibration are complicated. And vibration energy will be converted into heat in each contact part. In addition, the tightening force of the collet may change due to ultrasonic vibration.

焼嵌めによる工具のチャックは、コレットチャックに比較して把握力、精度、剛性、回転バランス等の性能を高めることが可能である。高速回転対応するためには、同転バランスと遠心力により低下する把握力が重要であり、焼嵌め式工具ホルダは、コレットチャックの２〜４倍の把握力を持ち、回転バランスについても締め付け用の部品が無いので、工具の着脱に伴う回転バランスのばらつきが発生しないのである。  The tool chuck by shrink fitting can improve the performance such as grasping force, accuracy, rigidity, rotation balance and the like as compared with the collet chuck. In order to support high-speed rotation, the gripping force that decreases due to the balance of rotation and centrifugal force is important. The shrink-fit tool holder has a gripping force that is 2 to 4 times that of the collet chuck. Since there are no parts, there is no variation in rotational balance due to the attachment / detachment of the tool.

さらに、焼嵌め式工具ホルダの利点としては、加工に耐えうる最小限の工具把持部の肉厚と把持長を持つことであり、他の方式の工具ホルダと異なってチャック部の外形形状をある程度自由に設計できることである。そして、加工時の工具ホルダと加工物や治具との干渉を防ぐ最適形状を採用することで他の工具ホルダと比較して剛性が高まり、加工時間の短縮や加工精度の向上を図ることができる。    Furthermore, the advantage of the shrink-fit tool holder is that it has the minimum thickness and gripping length of the tool gripping part that can withstand machining, and the outer shape of the chuck part is somewhat different from other types of tool holders. It can be designed freely. And, by adopting the optimal shape that prevents interference between the tool holder and workpieces and jigs at the time of machining, rigidity can be increased compared to other tool holders, so that machining time can be shortened and machining accuracy can be improved. it can.

超音波振動子部９が軸受け２２より先端部にあるため、軸受け２２には超音波振動による損傷の虞はない。  Since the ultrasonic transducer unit 9 is located at the tip of the bearing 22, there is no possibility of damage to the bearing 22 due to ultrasonic vibration.

またこの構成において超音波振動子部９の超音波振動が、チャック筒３そして工具４だけ伝達することにより、約４０ＫＨｚで１０μｍ以上の振動を工具の先端に励起できるので、従来の超音波加工機のように振動を拡大するためのホーンが不要になる。  Further, in this configuration, the ultrasonic vibration of the ultrasonic transducer unit 9 is transmitted only to the chuck cylinder 3 and the tool 4, so that a vibration of 10 μm or more can be excited at the tip of the tool at about 40 KHz. Thus, the horn for expanding the vibration becomes unnecessary.

このことにより装置は小型化ができる。また、ホーンなどの大型部品を振動させる必要がないので省電力かできる。  This can reduce the size of the apparatus. In addition, since it is not necessary to vibrate large parts such as a horn, power can be saved.

さらに、超音波振動子部、チャック筒および工具だけがほぼ振動するモードの固有振動数を超音波発振回路により追尾することにより、工具の長さが変化しても、最適な周波数の電圧を印加できる。そして、工具の長さが変化しても安定した振動を工具に与えることができる。  Furthermore, by tracking the natural frequency of the mode in which only the ultrasonic transducer, chuck cylinder, and tool vibrate substantially using the ultrasonic oscillation circuit, a voltage with the optimum frequency is applied even if the tool length changes. it can. And even if the length of a tool changes, the stable vibration can be given to a tool.

上記の加工は超音波切削加工であり、ワークと工具との摩擦抵抗が小さくなるため、加工面の熱歪みが低減され加工精度が高くなり、そして工具の寿命が長くなるなどの利点を有している。  The above processing is ultrasonic cutting, and since the frictional resistance between the workpiece and the tool is reduced, there are advantages such as reduced thermal distortion of the processed surface, higher processing accuracy, and longer tool life. ing.

上記の同様な超音波切削加工の効果については、非特許文献２の２２６ページから２２９ページに詳しく記述されている。  The effect of the same ultrasonic cutting described above is described in detail on pages 226 to 229 of Non-Patent Document 2.

また、当然回転軸にもほとんど振動が伝播しないので軸受または回転軸の振動による損傷の恐れはほとんどない。  Of course, since vibration hardly propagates to the rotating shaft, there is almost no risk of damage due to vibration of the bearing or the rotating shaft.

上記のように、超音波振動子部、チャック筒および工具にだけ振動を励起することができることにより加工精度の高い、信頼性の高い超音波加工を提供できる。  As described above, it is possible to provide ultrasonic processing with high processing accuracy and high reliability by being able to excite vibration only in the ultrasonic transducer section, the chuck cylinder and the tool.

図５は、本発明の第２の実施の形態の超音波工具ホルダ１の基本的な構成を示す断面図である。図４の断面図の超音波工具ホルダ１と異なるところは、超音波工具ホルダ１のスリット２４の配置であり、スリット２４は超音波振動子部９とホルダ部２の間に有り、径方向に２重になっている。また円周方向は必ず重なっている。そのスリット２４の詳細を図６の平面図そして図６のＡ−Ａ線での断面図７により示す。  FIG. 5 is a cross-sectional view showing a basic configuration of the ultrasonic tool holder 1 according to the second embodiment of the present invention. 4 differs from the ultrasonic tool holder 1 in the cross-sectional view of FIG. 4 in the arrangement of the slits 24 of the ultrasonic tool holder 1, and the slits 24 are located between the ultrasonic transducer unit 9 and the holder unit 2 and are arranged in the radial direction. It is doubled. In addition, the circumferential direction always overlaps. Details of the slit 24 are shown in a plan view of FIG. 6 and a sectional view taken along line AA of FIG.

これらのスリット２４の空間により超音波振動部９の振動はスリット２４で反射して、超音波振動子部９、チャック筒３および工具４にだけ振動を励起することができる。その効果は、第１の実施の形態で述べたものと同様であるので省略する。  Due to the space of the slits 24, the vibration of the ultrasonic vibration unit 9 is reflected by the slits 24, and the vibration can be excited only in the ultrasonic transducer unit 9, the chuck cylinder 3 and the tool 4. Since the effect is the same as that described in the first embodiment, a description thereof will be omitted.

図８は、本発明の第３の実施の形態の超音波工具ホルダ１の基本的な構成を示す断面図である。図３で示した超音波工具ホルダ１と異なるところは、超音波振動を反射するための空間の形状の構成であり、スリット２４でなく多数の貫通する孔２５を用いたものである。効果は第１の実施の形態の述べたものと同様であるので省略した。また超音波を反射するための空間の形状として、スリット、孔の他、材料内に多くの空間部を持つ発泡金属、多孔質金属でもよい。  FIG. 8 is a cross-sectional view showing a basic configuration of an ultrasonic tool holder 1 according to the third embodiment of the present invention. The difference from the ultrasonic tool holder 1 shown in FIG. 3 is the configuration of the shape of the space for reflecting ultrasonic vibration, and uses a large number of through holes 25 instead of the slits 24. Since the effect is the same as that described in the first embodiment, it is omitted. In addition to slits and holes, the shape of the space for reflecting ultrasonic waves may be a foam metal or a porous metal having many spaces in the material.

本発明の超音波工具ホルダは、多様な機械加工装置に用いて超音波加工することができる。  The ultrasonic tool holder of the present invention can be ultrasonically used in various machining apparatuses.

従来の超音波研磨装置を示す概略説明図である。It is a schematic explanatory drawing which shows the conventional ultrasonic polishing apparatus. 本発明の第１の実施の形態の超音波工具ホルダを示す斜視図である。It is a perspective view which shows the ultrasonic tool holder of the 1st Embodiment of this invention. 図２の側面断面図である。FIG. 3 is a side sectional view of FIG. 2. 回転軸に第１の実施の形態の超音波工具ホルダをつりつけた断面図である。It is sectional drawing which suspended the ultrasonic tool holder of 1st Embodiment on the rotating shaft. 回転軸に第２の実施の形態の超音波工具ホルダをつりつけた断面図である。It is sectional drawing which suspended the ultrasonic tool holder of 2nd Embodiment on the rotating shaft. 図５の超音波工具ホルダのスリットの詳細を示す平面図である。It is a top view which shows the detail of the slit of the ultrasonic tool holder of FIG. 図６のＡ−Ａ線での側面断面図である。It is side surface sectional drawing in the AA of FIG. 本発明の第３の実施の形態の超音波工具ホルダを示す断面図である。It is sectional drawing which shows the ultrasonic tool holder of the 3rd Embodiment of this invention.

符号の説明Explanation of symbols

１ 超音波工具ホルダ
２ ホルダ部
３ チャック筒
４ 工具
５ 顎
６ マニピュレータ把持用溝
７ 固定リング
８ ロータリートランス
９ 超音波振動子部
１０ プルスタッド
１１ リアマス
１２ 圧電セラミック
１３ フロントマス
１４ 引き具
１５ 回転軸ハウジング
１６ 電極板
１７ リード線穴
１８ リード線
１９ 回転軸
２０ テーパー穴
２１ 超音波発振器
２２ 軸受け
２３ 円筒形状の空間
２４ スリット
２５ 孔DESCRIPTION OF SYMBOLS 1 Ultrasonic tool holder 2 Holder part 3 Chuck cylinder 4 Tool 5 Jaw 6 Manipulator gripping groove 7 Fixing ring 8 Rotary transformer 9 Ultrasonic vibrator part 10 Pull stud 11 Rear mass 12 Piezoelectric ceramic 13 Front mass 14 Pull tool 15 Rotating shaft housing 16 Electrode plate 17 Lead wire hole 18 Lead wire 19 Rotating shaft 20 Tapered hole 21 Ultrasonic oscillator 22 Bearing 23 Cylindrical space 24 Slit 25 Hole

Claims (2)

回転加工装置の工具を保持する超音波工具ホルダにおいて、工具と超音波振動子部の間のホルダ部に複数の空間部を有することを特徴とする。  An ultrasonic tool holder for holding a tool of a rotary machining apparatus has a plurality of space portions in a holder portion between the tool and the ultrasonic transducer portion. 工具ホルダに保持固定される工具が、エンドミル、ドリル、リーマそしてタップであることを特徴とする請求項１に記載の回転加工装置である。  The rotary processing apparatus according to claim 1, wherein the tools held and fixed to the tool holder are an end mill, a drill, a reamer, and a tap.
JP2008060215A 2008-02-12 2008-02-12 Ultrasonic tool holder Withdrawn JP2011088216A (en)

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PCT/JP2009/052326 WO2009101987A1 (en) 2008-02-12 2009-02-12 Cutting or grinding apparatus

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