JP2011075480A - Inspection method of vacuum pump, and vacuum pressure measuring device - Google Patents

Inspection method of vacuum pump, and vacuum pressure measuring device Download PDF

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JP2011075480A
JP2011075480A JP2009229341A JP2009229341A JP2011075480A JP 2011075480 A JP2011075480 A JP 2011075480A JP 2009229341 A JP2009229341 A JP 2009229341A JP 2009229341 A JP2009229341 A JP 2009229341A JP 2011075480 A JP2011075480 A JP 2011075480A
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vacuum
vacuum pump
inspection
tank
vacuum pressure
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JP5108852B2 (en
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Seito Kumamoto
誠人 隈元
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Yachiyo Industry Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection method of a vacuum pump and a vacuum pressure measuring device, acquiring highly-reliable measurement data of a vacuum pressure, when inspecting the vacuum pump. <P>SOLUTION: In the inspection method of the vacuum pump for determining the quality of the vacuum pump P, the vacuum pump P is connected to an inspection dedicated tank 5 in place of a vacuum work comprising a mass production article, a vacuum pressure data of the inspection dedicated tank 5 are measured, and the quality of the vacuum pump P is determined from the vacuum pressure data of the inspection dedicated tank 5, based on a correlation determined beforehand between vacuum pressure reference data of the vacuum work and vacuum pressure reference data of the inspection dedicated tank 5. The inspection dedicated tank 5 has: a tank body 6 on which a sensor 2a of a vacuum gage 2 is mounted, subjected to vacuum processing in place of the vacuum work; and a hose 7 with one end integrally mounted on the tank body 6, and the other end connected to the vacuum pump P detachably. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、真空ポンプの検査方法および真空圧測定装置に関する。   The present invention relates to a vacuum pump inspection method and a vacuum pressure measuring device.

自動車の製造ラインにおいて油圧ブレーキ配管に作動油を注入する工程では、エア噛みの防止や注入効率の向上等の目的から、ドレン口等を介し真空ポンプにより配管内を真空にしてから作動油を注入するという作業形態を採ることが多い。   In the process of injecting hydraulic oil into the hydraulic brake pipe in the automobile production line, the hydraulic oil is injected after evacuating the pipe with a vacuum pump via a drain port etc. for the purpose of preventing air biting and improving injection efficiency. In many cases, the work form is taken.

前記真空ポンプが正常に機能しているか否かを検査する方法として、従来では図３に示すように、製造ライン上にある作動油注入前の自動車を利用しており、その油圧ブレーキ配管３１に検査対象の真空ポンプＰを接続する。油圧ブレーキ配管３１と真空ポンプＰとの接続にはホース３２が用いられ、作業者はホース３２の先端口を油圧ブレーキ配管３１の作動油注入口３３に接続させる。ホース３２の先端口には、作動油注入口３３との隙間を塞ぐためのゴム材３４が取り付けられている。   As a method for inspecting whether or not the vacuum pump is functioning normally, as shown in FIG. 3, conventionally, an automobile before injection of hydraulic oil on the production line is used, and the hydraulic brake pipe 31 is connected to the vehicle. A vacuum pump P to be inspected is connected. A hose 32 is used to connect the hydraulic brake pipe 31 and the vacuum pump P, and the operator connects the tip end of the hose 32 to the hydraulic oil inlet 33 of the hydraulic brake pipe 31. A rubber material 34 for closing a gap with the hydraulic oil injection port 33 is attached to the distal end port of the hose 32.

そして、真空ポンプＰを作動させて真空圧を経時的に測定し、そのデータから真空ポンプＰの良否を判断する。符合３５は真空計、符号３６はホース３２の途中に設置される真空計のセンサ、符号３７は真空圧表示用のディスプレイ、符号３８は真空圧の経時データを示すメモリハイコーダである。なお、データの信頼性を高めるためにデータの測定は数回〜十数回程度繰り返し行われ、その際、測定終了毎に油圧ブレーキ配管３１を大気開放させる必要があるので、測定毎にホース３２の着脱も行われる。   Then, the vacuum pump P is operated, the vacuum pressure is measured over time, and the quality of the vacuum pump P is judged from the data. Reference numeral 35 is a vacuum gauge, reference numeral 36 is a sensor of a vacuum gauge installed in the middle of the hose 32, reference numeral 37 is a display for displaying a vacuum pressure, and reference numeral 38 is a memory high coder indicating time-dependent data of the vacuum pressure. In order to improve the reliability of the data, the measurement of the data is repeated several times to about a dozen times. At this time, it is necessary to open the hydraulic brake pipe 31 to the atmosphere every time the measurement is completed. The attachment and detachment is also performed.

真空圧のデータを得るにあたり油圧ブレーキ配管３１を利用する理由は、製品である油圧ブレーキ配管３１そのものに対する真空圧状態の良否を容易に解析・把握しやすくするためである。また、単に所定の真空圧まで達するか否かのみで真空ポンプＰの良否を判断するのではなく、所定の真空圧に達するまでの経時データを見ることで、真空ポンプＰ内のパッキンの消耗状態等を一層把握しやすくしている。なお、真空圧測定装置の従来技術としては特許文献１に記載のものが挙げられる。   The reason for using the hydraulic brake pipe 31 in obtaining the vacuum pressure data is to make it easy to analyze and grasp the quality of the vacuum pressure state with respect to the product hydraulic brake pipe 31 itself. In addition, whether or not the vacuum pump P is good or bad is determined only by whether or not the vacuum pressure reaches a predetermined vacuum pressure. And so on. In addition, the thing of patent document 1 is mentioned as a prior art of a vacuum pressure measuring apparatus.

特開昭５０−２３２７５号公報Japanese Patent Laid-Open No. 50-23275

しかしながら、ホース３２を油圧ブレーキ配管３１に接続する従来の検査方法では、たとえホース３２の先端口に密閉用のゴム材３４が取り付けられていても、ホース３２のセット時の向きによってはホース３２と作動油注入口３３との間に隙間が生じ、真空圧のデータに影響が出るという問題があった。真空ポンプＰの吸気口についてはホース類との接続を考慮した設計であり、また密閉性を考慮したＪＩＳ規格に準じていることから、同規格に準じた接続具等を用いることで真空ポンプＰの吸気口とホース３２の基端との接続については安定した密閉性が確保される。対して、油圧ブレーキ配管３１の作動油注入口３３はホース類との接続を考慮した形状とはなっていないために、ホース３２と作動油注入口３３との間に隙間が生じやすくなる。勿論、作動油注入口３３をホース類との接続を考慮した形状に変更すれば当該問題は解消されるが、量産品に対して希の検査のための形状を施すことは実際的ではない。   However, in the conventional inspection method in which the hose 32 is connected to the hydraulic brake pipe 31, even if the sealing rubber material 34 is attached to the tip end of the hose 32, There was a problem that a gap was generated between the hydraulic oil inlet 33 and the vacuum pressure data was affected. The intake port of the vacuum pump P is designed in consideration of the connection with hoses, and conforms to the JIS standard in consideration of hermeticity, so the vacuum pump P can be used by using a connector or the like conforming to the standard. As for the connection between the air inlet and the base end of the hose 32, a stable sealing property is secured. On the other hand, since the hydraulic oil inlet 33 of the hydraulic brake pipe 31 does not have a shape considering the connection with hoses, a gap is easily generated between the hose 32 and the hydraulic oil inlet 33. Of course, if the hydraulic oil injection port 33 is changed to a shape that takes into account the connection with the hoses, the problem is solved, but it is not practical to give the mass-produced product a shape for rare inspection.

本発明は、このような問題を解決するために創作されたものであり、真空ポンプを検査するにあたり、信頼性の高い真空圧の測定データが得られる真空ポンプの検査方法および真空圧測定装置を提供することを目的としている。   The present invention was created in order to solve such problems. A vacuum pump inspection method and a vacuum pressure measurement device capable of obtaining highly reliable vacuum pressure measurement data when inspecting a vacuum pump are provided. It is intended to provide.

本発明は、前記課題を解決するため、真空ポンプの良否を判断する真空ポンプの検査方法であって、前記真空ポンプを量産品からなる真空ワークの代わりに検査専用タンクに接続して該検査専用タンクの真空圧データを測定し、予め求めた前記真空ワークの真空圧基準データと前記検査専用タンクの真空圧基準データとの相関関係に基づき、前記検査専用タンクの真空圧データから前記真空ポンプの良否を判断することを特徴とする。   In order to solve the above-mentioned problem, the present invention is a vacuum pump inspection method for judging whether a vacuum pump is good or bad, and the vacuum pump is connected to a tank dedicated for inspection instead of a vacuum workpiece made of a mass-produced product. Measure the vacuum pressure data of the tank, and based on the correlation between the vacuum pressure reference data of the vacuum work and the vacuum pressure reference data of the inspection dedicated tank obtained in advance, from the vacuum pressure data of the inspection dedicated tank, It is characterized by judging pass / fail.

従来では、真空ポンプを量産品からなる真空ワークに接続して検査しており、この接続部での真空密閉性が安定せず、量産品ゆえに接続口に対して真空密閉性を考慮した形状を施すことも困難であるため、真空圧の測定データの信頼性が低くなりやすいところ、本発明の検査方法は、検査専用として設けた検査専用タンクに接続して検査する構成であり、検査専用タンク単体に真空密閉性を考慮した形状を施すことは極めて容易であることから、信頼性の高い真空圧の測定データを得ることができる。   Conventionally, a vacuum pump is connected to a mass-produced vacuum workpiece for inspection, and the vacuum sealing performance at this connection is not stable. Since it is difficult to apply, the reliability of the vacuum pressure measurement data tends to be low. The inspection method of the present invention is configured to inspect by connecting to an inspection dedicated tank provided exclusively for inspection. Since it is very easy to form a single unit in consideration of the vacuum hermeticity, highly reliable measurement data of vacuum pressure can be obtained.

また、本発明は、前記真空ワークは、自動車の油圧ブレーキ配管であることを特徴とする。   Moreover, the present invention is characterized in that the vacuum workpiece is a hydraulic brake pipe of an automobile.

本発明によれば、自動車の油圧ブレーキ配管に対する信頼性の高い真空圧の測定データを得ることができる。   ADVANTAGE OF THE INVENTION According to this invention, the measurement data of the reliable vacuum pressure with respect to the hydraulic brake piping of a motor vehicle can be obtained.

また、本発明は、真空計のセンサが取り付けられ、量産品からなる真空ワークの代わりとして真空処理されるタンク本体と、一端が前記タンク本体に一体に取り付けられ、他端が真空ポンプに着脱自在に接続されるホースと、を有する検査専用タンクを備えたことを特徴とする。   In addition, the present invention provides a tank body to which a vacuum gauge sensor is attached and vacuum-processed as a substitute for a mass-produced vacuum workpiece, one end is integrally attached to the tank body, and the other end is detachable from the vacuum pump. And a hose connected to the tank.

本発明によれば、真空ワークに対する真空圧測定装置として、コンパクト化および低コスト化が図れる。   ADVANTAGE OF THE INVENTION According to this invention, as a vacuum pressure measuring apparatus with respect to a vacuum workpiece, size reduction and cost reduction can be achieved.

また、本発明は、前記検査専用タンクは、前記タンク本体と前記真空ポンプとのエア流路を開閉する第１開閉弁と、前記タンク本体の内部を大気開放する第２開閉弁と、をさらに有することを特徴とする。   The inspection tank may further include a first on-off valve that opens and closes an air flow path between the tank body and the vacuum pump, and a second on-off valve that opens the inside of the tank body to the atmosphere. It is characterized by having.

本発明によれば、これら開閉弁を制御することで、真空圧測定を容易に繰り返し行うことができる。   According to the present invention, the vacuum pressure measurement can be easily and repeatedly performed by controlling these on-off valves.

本発明は、検査専用として設けた検査専用タンクに接続して検査する構成であり、検査専用タンク単体に真空密閉性を考慮した形状を施すことは極めて容易であることから、信頼性の高い真空圧の測定データを得ることができる。   The present invention is configured to inspect by connecting to an inspection dedicated tank provided exclusively for inspection, and it is extremely easy to give the inspection dedicated tank a shape that takes vacuum sealing into consideration, so a highly reliable vacuum Pressure measurement data can be obtained.

本発明に係る真空圧測定装置の構成図である。It is a block diagram of the vacuum pressure measuring apparatus which concerns on this invention. メモリハイコーダで得られる真空圧の測定データのグラフであり、縦軸が真空圧、横軸が時間である。It is a graph of the measurement data of the vacuum pressure obtained with a memory high coder, a vertical axis is vacuum pressure and a horizontal axis is time. 従来の真空ポンプの検査方法を示す説明図である。It is explanatory drawing which shows the test | inspection method of the conventional vacuum pump.

図１において、真空ポンプＰは、通常の作業工程においては量産品からなる真空ワークにその都度接続されて使用されるものである。真空ワークは例えば図３で示した油圧ブレーキ配管３１であり、前記したように油圧ブレーキ配管３１に作動油を注入する際、真空ポンプＰで配管内を真空にしてから作動油を注入する。   In FIG. 1, a vacuum pump P is used by being connected to a vacuum workpiece made of a mass-produced product each time in a normal work process. The vacuum work is, for example, the hydraulic brake pipe 31 shown in FIG. 3. When the hydraulic oil is injected into the hydraulic brake pipe 31 as described above, the hydraulic oil is injected after the inside of the pipe is evacuated by the vacuum pump P.

真空ポンプＰの検査として用いる本発明の真空圧測定装置１は、真空計２と、それぞれ真空計２に接続されるメモリハイコーダ３、ディスプレイ４と、検査専用タンク５と、を主な構成要素とする。   The vacuum pressure measuring device 1 of the present invention used for the inspection of the vacuum pump P includes a vacuum gauge 2, a memory high coder 3 connected to the vacuum gauge 2, a display 4, and an inspection dedicated tank 5. And

真空計２としては例えばピラニ真空計など公知の真空計が用いられる。メモリハイコーダ３は真空計２の出力信号を入力して真空圧の経時データを記憶するとともに、その表示部に経時データを表示する。また、ディスプレイ４には真空圧値がリアルタイムでデジタル表示される。   As the vacuum gauge 2, for example, a known vacuum gauge such as a Pirani vacuum gauge is used. The memory high coder 3 inputs the output signal of the vacuum gauge 2 and stores the time-lapse data of the vacuum pressure, and displays the time-lapse data on the display unit. In addition, the vacuum pressure value is digitally displayed on the display 4 in real time.

検査専用タンク５は、真空計２のセンサ２ａが取り付けられ、油圧ブレーキ配管３１の代わりとして真空処理されるタンク本体６と、一端がタンク本体６に一体に取り付けられ、他端が真空ポンプＰに着脱自在に接続されるホース７と、タンク本体６と真空ポンプＰとのエア流路を開閉する第１開閉弁８と、タンク本体６の内部を大気開放する第２開閉弁９と、を有した構成からなる。   The inspection-dedicated tank 5 is provided with a sensor 2 a of the vacuum gauge 2, a tank body 6 to be vacuum-processed instead of the hydraulic brake pipe 31, one end integrally attached to the tank body 6, and the other end to the vacuum pump P. A hose 7 that is detachably connected, a first on-off valve 8 that opens and closes an air flow path between the tank body 6 and the vacuum pump P, and a second on-off valve 9 that opens the inside of the tank body 6 to the atmosphere. Consisting of

タンク本体６は例えば横置きの筒状筐体として構成されており、中央上部にはセンサ２ａが内部に臨むように取り付けられている。タンク本体６の一端側は第１開閉弁８およびホース７を介して真空ポンプＰの吸気口と連通する。また、タンク本体６の他端側に前記第２開閉弁９が取り付けられている。第１開閉弁８および第２開閉弁９は例えば電磁弁から構成され、図示しない制御装置によりそれぞれ開閉制御される。   The tank body 6 is configured, for example, as a horizontal cylindrical housing, and is attached to the center upper portion so that the sensor 2a faces the inside. One end side of the tank body 6 communicates with the intake port of the vacuum pump P through the first on-off valve 8 and the hose 7. The second on-off valve 9 is attached to the other end side of the tank body 6. The first on-off valve 8 and the second on-off valve 9 are composed of, for example, electromagnetic valves, and are controlled to open and close by a control device (not shown).

ホース７の一端は、従来の検査方法のように、検査毎に真空ワークに対して着脱自在に取り付けられるものではなく、ホース７やタンク本体６のメンテナンス等の目的で外すときを除けば、常にタンク本体６に一体に取り付けられている。図１ではホース７を第１開閉弁８に取り付けた場合を示している。なお、ホース７に対するタンク本体６の接続口、本実施形態では第１開閉弁８の接続口は、真空ポンプＰの吸気口と同様に、ホース７との接続を考慮した形状、例えばＪＩＳ規格に準じた形状とすることが容易であり、汎用の接続具等を用いることで安定した密閉性を確保できる。したがって、メンテナンス等によりホース７をタンク本体６側から一旦外して再度装着した場合であっても、所定の密閉性が維持される。   One end of the hose 7 is not detachably attached to the vacuum workpiece for each inspection as in the conventional inspection method, but always except when removed for the purpose of maintenance of the hose 7 or the tank body 6. The tank body 6 is integrally attached. FIG. 1 shows a case where the hose 7 is attached to the first on-off valve 8. Note that the connection port of the tank body 6 to the hose 7 and the connection port of the first on-off valve 8 in this embodiment have a shape that considers the connection with the hose 7 in the same manner as the intake port of the vacuum pump P, for example, JIS standard. It is easy to obtain a conforming shape, and stable sealing can be secured by using a general-purpose connector or the like. Therefore, even when the hose 7 is once removed from the tank body 6 side and reattached due to maintenance or the like, a predetermined hermeticity is maintained.

以上の真空圧測定装置１を用いた検査方法では、第１開閉弁８が開、第２開閉弁９が閉の状態で真空ポンプＰが作動すると、タンク本体６内の真空圧が真空計２のセンサ２ａにより測定され、ディスプレイ４には真空圧値がリアルタイムでデジタル表示され、メモリハイコーダ３には真空圧値が経時データとして記憶・表示される。これを繰り返し行う場合は、第１開閉弁８を閉、第２開閉弁９を開の状態としてタンク本体６を大気開放し、タンク本体６の内部を初期条件に戻してから同様の測定を行う。第１開閉弁８、第２開閉弁９の開閉制御は図示しない制御装置により全て自動で行われる。   In the inspection method using the vacuum pressure measuring apparatus 1 described above, when the vacuum pump P is operated with the first on-off valve 8 open and the second on-off valve 9 closed, the vacuum pressure in the tank body 6 is reduced to the vacuum gauge 2. The vacuum pressure value is digitally displayed in real time on the display 4, and the vacuum pressure value is stored and displayed as time-lapse data on the memory high coder 3. When this is repeated, the first on-off valve 8 is closed, the second on-off valve 9 is opened, the tank body 6 is opened to the atmosphere, and the inside of the tank body 6 is returned to the initial conditions, and the same measurement is performed. . Opening / closing control of the first opening / closing valve 8 and the second opening / closing valve 9 is automatically performed by a control device (not shown).

油圧ブレーキ配管３１を真空にする場合とタンク本体６を真空にする場合とでは、たとえ両容積を同じ値にしても空間形状の違いから図２に示すような経時データのグラフ形状が互いに異なることがある。そこで、予め、油圧ブレーキ配管３１を真空にしたときの正常な経時データ（真空圧基準データ）の範囲と、タンク本体６を真空にしたときの正常な経時データ（真空圧基準データ）の範囲とを測定し、両真空圧基準データのグラフの相関関係を求めておく。そして、この相関関係から、タンク本体６を用いて測定した経時データを、油圧ブレーキ配管３１を用いて測定した経時データとみなし、真空ポンプＰの良否を判断する。   When the hydraulic brake pipe 31 is evacuated and when the tank body 6 is evacuated, the graph shape of the time-dependent data as shown in FIG. There is. Therefore, the range of normal time-lapse data (vacuum pressure reference data) when the hydraulic brake pipe 31 is evacuated in advance, and the range of normal time-lapse data (vacuum pressure reference data) when the tank body 6 is evacuated in advance. Is measured, and the correlation between the two vacuum pressure reference data graphs is obtained. From this correlation, the time-lapse data measured using the tank main body 6 is regarded as the time-lapse data measured using the hydraulic brake pipe 31, and the quality of the vacuum pump P is judged.

タンク本体６の容積、形状は本来であれば真空ワークのそれと略同等であることが望ましいのであるが、前記相関関係から真空ワークに対する真空ポンプＰの良否を判断できるため、真空ワークの容積、形状に比してタンク本体６の容積の小型化や形状の簡素化が可能となる。   Although it is desirable that the volume and shape of the tank body 6 are originally substantially the same as that of the vacuum workpiece, it is possible to determine the quality of the vacuum pump P with respect to the vacuum workpiece from the above correlation, the volume and shape of the vacuum workpiece. Compared to the above, it is possible to reduce the volume of the tank body 6 and simplify the shape thereof.

従来では、真空ポンプＰを油圧ブレーキ配管３１の作動油注入口３３に接続しており、この接続部での真空密閉性が安定せず、量産品ゆえに作動油注入口３３に真空密閉性を考慮した形状を施すことも困難であるため、真空圧の測定データの信頼性が低くなりやすいところ、本発明の検査方法は、検査専用として設けた検査専用タンク５に接続して検査する構成であり、検査専用タンク５単体に真空密閉性を考慮した形状を施すことは極めて容易であることから、信頼性の高い真空圧の測定データを得ることができる。   Conventionally, the vacuum pump P is connected to the hydraulic oil inlet 33 of the hydraulic brake pipe 31, and the vacuum sealing performance at this connection is not stable. Since it is difficult to apply the shape, the reliability of the measurement data of the vacuum pressure is likely to be low. Therefore, the inspection method of the present invention is configured to inspect by connecting to the inspection dedicated tank 5 provided exclusively for inspection. Since it is very easy to give the inspection dedicated tank 5 a shape that takes vacuum sealing into consideration, highly reliable measurement data of the vacuum pressure can be obtained.

また、検査専用タンク５として、真空計２のセンサ２ａが取り付けられ、真空ワークの代わりに真空処理されるタンク本体６と、一端がタンク本体６に一体に取り付けられ、他端が真空ポンプＰに着脱自在に接続されるホース７と、を有する構成とすることにより、本発明の検査方法を実施する装置として、コンパクト化および低コスト化が図れる。   Further, as the inspection dedicated tank 5, the sensor 2a of the vacuum gauge 2 is attached, a tank body 6 to be vacuum-processed instead of the vacuum workpiece, one end is integrally attached to the tank body 6, and the other end is attached to the vacuum pump P. By adopting a structure having the hose 7 that is detachably connected, the apparatus for carrying out the inspection method of the present invention can be made compact and low in cost.

図２はメモリハイコーダ３で得られる経時データのグラフであり、（ａ）は本発明の検査専用タンク５を用いて測定した場合、（ｂ）は図３で示した従来の検査方法で測定した場合を示しており、それぞれ３回繰り返し測定してグラフのばらつき具合を表したものである。（ｂ）の従来の検査方法では、ホース３２を作動油注入口３３にセットするたびに姿勢が異なるためにグラフにばらつきが生じているのに対し、本発明によれば３本のグラフがほぼ一致しており、真空圧の測定データが信頼性の高いデータであることが判る。   FIG. 2 is a graph of time-dependent data obtained by the memory high coder 3. FIG. 2A shows a case where measurement is performed using the inspection tank 5 of the present invention, and FIG. 2B shows a case where measurement is performed using the conventional inspection method shown in FIG. The graph shows the degree of variation in the graph by repeatedly measuring three times each. In the conventional inspection method of (b), since the posture changes every time the hose 32 is set in the hydraulic oil inlet 33, the graphs vary. It can be seen that the measurement data of the vacuum pressure is highly reliable data.

１ 真空圧測定装置
２ 真空計
２ａ センサ
５ 検査専用タンク
６ タンク本体
７ ホース
８ 第１開閉弁
９ 第２開閉弁
３１ 油圧ブレーキ配管（真空ワーク）
Ｐ 真空ポンプ DESCRIPTION OF SYMBOLS 1 Vacuum pressure measuring device 2 Vacuum gauge 2a Sensor 5 Inspection exclusive tank 6 Tank main body 7 Hose 8 First on-off valve 9 Second on-off valve 31 Hydraulic brake piping (vacuum work)
P Vacuum pump

Claims (4)

真空ポンプの良否を判断する真空ポンプの検査方法であって、
前記真空ポンプを量産品からなる真空ワークの代わりに検査専用タンクに接続して該検査専用タンクの真空圧データを測定し、
予め求めた前記真空ワークの真空圧基準データと前記検査専用タンクの真空圧基準データとの相関関係に基づき、前記検査専用タンクの真空圧データから前記真空ポンプの良否を判断することを特徴とする真空ポンプの検査方法。 An inspection method for a vacuum pump for judging whether the vacuum pump is good or bad,
The vacuum pump is connected to a tank dedicated to inspection instead of a vacuum workpiece made of mass-produced products, and vacuum pressure data of the tank dedicated to inspection is measured,
Based on the correlation between the vacuum pressure reference data of the vacuum workpiece obtained in advance and the vacuum pressure reference data of the inspection dedicated tank, the quality of the vacuum pump is determined from the vacuum pressure data of the inspection dedicated tank. Inspection method of vacuum pump. 前記真空ワークは、自動車の油圧ブレーキ配管であることを特徴とする請求項１に記載の真空ポンプの検査方法。   The vacuum pump inspection method according to claim 1, wherein the vacuum workpiece is a hydraulic brake pipe of an automobile. 真空計のセンサが取り付けられ、量産品からなる真空ワークの代わりとして真空処理されるタンク本体と、
一端が前記タンク本体に一体に取り付けられ、他端が真空ポンプに着脱自在に接続されるホースと、
を有する検査専用タンクを備えたことを特徴とする真空圧測定装置。 A tank body to which a vacuum gauge sensor is attached and vacuum-treated as a substitute for a mass-produced vacuum workpiece,
One end is integrally attached to the tank body, and the other end is detachably connected to the vacuum pump;
A vacuum pressure measuring device comprising a tank dedicated to inspection. 前記検査専用タンクは、前記タンク本体と前記真空ポンプとのエア流路を開閉する第１開閉弁と、前記タンク本体の内部を大気開放する第２開閉弁と、をさらに有することを特徴とする請求項３に記載の真空圧測定装置。   The inspection-dedicated tank further includes a first on-off valve that opens and closes an air flow path between the tank body and the vacuum pump, and a second on-off valve that opens the inside of the tank body to the atmosphere. The vacuum pressure measuring apparatus according to claim 3.
JP2009229341A 2009-10-01 2009-10-01 Vacuum pump inspection method and vacuum pressure measuring device Expired - Fee Related JP5108852B2 (en)

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CN111365219A (en) * 2018-12-26 2020-07-03 东北大学 Multifunctional vacuum pump test cover

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