JP2011048997A - Mold vacuum valve - Google Patents

Mold vacuum valve Download PDF

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JP2011048997A
JP2011048997A JP2009195816A JP2009195816A JP2011048997A JP 2011048997 A JP2011048997 A JP 2011048997A JP 2009195816 A JP2009195816 A JP 2009195816A JP 2009195816 A JP2009195816 A JP 2009195816A JP 2011048997 A JP2011048997 A JP 2011048997A
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fixed
electric field
movable
side sealing
vacuum
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JP5292225B2 (en
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Junichi Sato
純一 佐藤
Satoru Shioiri
哲 塩入
Osamu Sakaguchi
修 阪口
Osamu Tagaya
治 多賀谷
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Toshiba Corp
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Toshiba Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To disperse stress inside an insulating layer formed between an electric field relaxing shield and a vacuum insulating container to suppress generation of insulating defects. <P>SOLUTION: A valve includes a fixing-side sealing fitting 2 and a movable-side sealing fitting 3 sealed to both end openings in the vacuum insulating container 1; a fixing-side contact 5 and a movable-side contact 6, which are contained in the vacuum insulating container 1 and freely brought into contact/out of contact with each other; a fixing-side electric field relaxing shield 20, provided to cover an outer peripheral end of the fixing-side sealing fitting 2; a movable-side electric field relaxing shield 21 provided to cover an outer peripheral end of the movable-side sealing fitting 3; and the insulating layer 12, formed on the outer peripheries of the vacuum container 1 and the electric field relaxing shields 20, 21. The electric field relaxing shields 20, 21 are respectively constituted of radially expanding fixing parts 20a, 21a, and axially extending relaxing parts 20b, 21b, and inner peripheral surfaces of the relaxing parts 20b, 21b are provided with recessed curved surfaces. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

本発明は、接離自在の一対の接点を有する真空バルブをエポキシ樹脂のような絶縁材料でモールドし、外周に絶縁層を形成したモールド真空バルブに関する。   The present invention relates to a molded vacuum valve in which a vacuum valve having a pair of contactable and separable contacts is molded with an insulating material such as an epoxy resin, and an insulating layer is formed on the outer periphery.

従来、エポキシ樹脂でモールドした真空バルブにおいては、真空バルブを構成する封着金具端が鋭角であり、電界強度が上昇するため、これを覆うような電界緩和シールドを設けたものが知られている（例えば、特許文献１参照。）。   Conventionally, in a vacuum valve molded with an epoxy resin, since the end of a sealing fitting constituting the vacuum valve has an acute angle and the electric field strength is increased, an electric field relaxation shield that covers this is known. (For example, refer to Patent Document 1).

この種のモールド真空バルブを図６に示すが、筒状のセラミックスからなる真空絶縁容器１の両端開口部には、固定側封着金具２と可動側封着金具３が封着されている。固定側封着金具２には、固定側通電軸４が貫通固定され、端部に固定側接点５が固着されている。固定側接点５に対向して可動側接点６が可動側封着金具３を移動自在に貫通する可動側通電軸７の端部に固着されている。   A mold vacuum valve of this type is shown in FIG. 6, and a fixed-side sealing fitting 2 and a movable-side sealing fitting 3 are sealed at both end openings of a vacuum insulating container 1 made of cylindrical ceramics. A fixed-side energizing shaft 4 is fixed through the fixed-side sealing metal fitting 2, and a fixed-side contact 5 is fixed to the end. The movable contact 6 is fixed to the end of the movable energizing shaft 7 that movably penetrates the movable sealing fitting 3 so as to face the fixed contact 5.

可動側通電軸７の中間部には、伸縮自在のベローズ８の一方端が封着されている。他方端は、可動側封着金具３の開口部に封着されている。なお、接点５、６を包囲するように設けられた筒状のアークシールド９が真空絶縁容器１内面に固定されている。   One end of a telescopic bellows 8 is sealed at an intermediate portion of the movable energizing shaft 7. The other end is sealed in the opening of the movable side sealing fitting 3. A cylindrical arc shield 9 provided so as to surround the contacts 5 and 6 is fixed to the inner surface of the vacuum insulating container 1.

固定側封着金具２には、その外周端部を覆うような椀状の固定側電界緩和シールド１０が固定されている。固定側電界緩和シールド１０の端部は、真空絶縁容器１端部とラップするまで伸びている。また、可動側封着金具３にも、その外周端部を覆うような椀状の可動側電界緩和シールド１１が固定されている。可動側電界緩和シールド１１の端部も、真空絶縁容器１端部とラップするまで伸びている。電界緩和シールド１０、１１は、一般的に、加工性のよい銅材が用いられる。   A hook-shaped fixed-side electric field relaxation shield 10 is fixed to the fixed-side sealing fitting 2 so as to cover the outer peripheral end portion thereof. The end of the fixed-side electric field relaxation shield 10 extends until it wraps with the end of the vacuum insulating container 1. In addition, a hook-like movable-side electric field relaxation shield 11 is fixed to the movable-side sealing metal fitting 3 so as to cover the outer peripheral end portion thereof. The end of the movable-side electric field relaxation shield 11 also extends until it wraps with the end of the vacuum insulating container 1. The electric field relaxation shields 10 and 11 are generally made of a copper material having good workability.

真空絶縁容器１と電界緩和シールド１０、１１の外周には、エポキシ樹脂でモールドして形成した絶縁層１２が設けられている。絶縁層１２の外周には、導電性塗料を塗布して形成した接地層１３が設けられている。絶縁層１２の固定側の軸方向は凹状の界面接続部１４となっており、また、可動側は凸状の界面接続部１５となっており、他の電気機器と接続される。   An insulating layer 12 formed by molding with an epoxy resin is provided on the outer periphery of the vacuum insulating container 1 and the electric field relaxation shields 10 and 11. On the outer periphery of the insulating layer 12, a ground layer 13 formed by applying a conductive paint is provided. The axial direction on the fixed side of the insulating layer 12 is a concave interface connecting portion 14, and the movable side is a convex interface connecting portion 15, which is connected to other electrical devices.

特開２００５−２７６４７２号公報 （第４ページ、図１）JP 2005-276472 A (page 4, FIG. 1)

上記の従来のモールド真空バルブにおいては、次のような問題がある。固定側電界緩和シールド１０および可動側電界緩和シールド１１により、固定側封着金具２および可動側封着金具３の端部の電界緩和を図ることができる。電界緩和シールド１０、１１は、半径方向に広がった後、軸方向に略９０度曲折され、端部が真空絶縁容器１とラップするまで伸びている。即ち、電界緩和シールド１０、１１は、断面L字状であり、軸方向に伸びた部分が真空絶縁容器１と同軸状の配置となる。   The above-described conventional mold vacuum valve has the following problems. The fixed-side electric field relaxation shield 10 and the movable-side electric field relaxation shield 11 can reduce the electric field at the ends of the fixed-side sealing metal fitting 2 and the movable-side sealing metal fitting 3. The electric field relaxation shields 10 and 11 expand in the radial direction, then bend approximately 90 degrees in the axial direction, and extend until the end portion is overlapped with the vacuum insulating container 1. That is, the electric field relaxation shields 10 and 11 have an L-shaped cross section, and the portions extending in the axial direction are arranged coaxially with the vacuum insulating container 1.

このため、真空絶縁容器１と、電界緩和シールド１０、１１が軸方向に伸びた部分との間の絶縁層１２は、断面矩形状となり、内周面と外周面とが略平行であり、拘束されることになる。真空絶縁容器１と電界緩和シールド１０、１１および絶縁層１２は、いずれも異なった材料からなり、熱膨張率が異なる。このため、モールド時や使用環境などによって温度変化が生じると、拘束された絶縁層１２内で応力が発生し、絶縁層１２が真空絶縁容器１や電界緩和シールド１０、１１から剥離することがある。更には、絶縁層１２にクラックが生じることがある。   Therefore, the insulating layer 12 between the vacuum insulating container 1 and the portion where the electric field relaxation shields 10 and 11 extend in the axial direction has a rectangular cross section, and the inner peripheral surface and the outer peripheral surface are substantially parallel, Will be. The vacuum insulating container 1, the electric field relaxation shields 10, 11 and the insulating layer 12 are all made of different materials and have different thermal expansion coefficients. For this reason, when a temperature change occurs during molding or the usage environment, stress is generated in the constrained insulating layer 12, and the insulating layer 12 may be peeled off from the vacuum insulating container 1 or the electric field relaxation shields 10 and 11. . Furthermore, cracks may occur in the insulating layer 12.

絶縁層１２に剥離やクラックなどの絶縁欠陥が生じると、部分放電が発生し、絶縁劣化を起こす。特に、電界緩和シールド１０、１１先端から部分放電が発生するようになると、接地層１３間で絶縁劣化が進行し、絶縁破壊を招くことになる。   When an insulation defect such as peeling or cracking occurs in the insulating layer 12, partial discharge occurs, resulting in insulation deterioration. In particular, when a partial discharge is generated from the tips of the electric field relaxation shields 10 and 11, the deterioration of insulation progresses between the ground layers 13, leading to dielectric breakdown.

本発明は上記問題を解決するためになされたもので、封着金具の外周に設けられる電界緩和シールドと真空絶縁容器間に形成される絶縁層の応力分散を図り、絶縁欠陥の生じ難いモールド真空バルブを提供することを目的とする。   The present invention has been made to solve the above-mentioned problems, and is intended to spread the stress of the insulating layer formed between the electric field relaxation shield provided on the outer periphery of the sealing metal fitting and the vacuum insulating container, and to prevent mold defects from causing insulation defects. The object is to provide a valve.

上記目的を達成するために、本発明のモールド真空バルブは、筒状の真空絶縁容器と、前記真空絶縁容器の両端開口部に封着された固定側封着金具および可動側封着金具と、前記固定側封着金具に貫通固定された固定側通電軸と、前記固定側通電軸端に固着された固定側接点と、前記固定側接点と接離する可動側接点と、前記可動側接点を固着するとともに、前記可動側封着金具を気密のもとに貫通する可動側通電軸と、前記固定側封着金具の外周端部を覆うように設けられた固定側電界緩和シールドと、前記可動側封着金具の外周端部を覆うように設けられた可動側電界緩和シールドと、前記真空絶縁容器および前記電界緩和シールドの外周に絶縁材料をモールドして形成した絶縁層とを具備し、前記電界緩和シールドのそれぞれは、半径方向に広がる固定部と軸方向に伸びる緩和部とで構成され、前記緩和部の内周面に凹状の曲面を持たせたことを特徴とする。   In order to achieve the above object, the mold vacuum valve of the present invention includes a cylindrical vacuum insulation container, a fixed-side sealing metal fitting and a movable-side sealing metal fitting sealed at both ends of the vacuum insulation container, A fixed-side energizing shaft that is fixed through the fixed-side sealing metal fitting, a fixed-side contact that is fixed to the fixed-side energizing shaft end, a movable-side contact that is in contact with and away from the fixed-side contact; The movable-side energizing shaft that sticks and penetrates the movable-side sealing fitting in an airtight manner, the fixed-side electric field relaxation shield provided so as to cover the outer peripheral end of the fixed-side sealing fitting, and the movable A movable-side electric field relaxation shield provided so as to cover an outer peripheral end of the side sealing metal fitting, and an insulating layer formed by molding an insulating material on the outer periphery of the vacuum insulating container and the electric field relaxation shield, Each of the electric field relaxation shields has a radius It is composed of a relaxation portion extending the fixed part and axially extending direction, characterized in that to have a concave curved surface on the inner peripheral surface of the relaxed portion.

本発明によれば、電界緩和シールドの内周面を曲面としているので、真空絶縁容器と電界緩和シールド間に形成される絶縁層の応力分散を図ることができ、絶縁欠陥の生じ難いものとなる。   According to the present invention, since the inner peripheral surface of the electric field relaxation shield is a curved surface, the stress distribution of the insulating layer formed between the vacuum insulating container and the electric field relaxation shield can be achieved, and insulation defects are less likely to occur. .

本発明の実施例１に係るモールド真空バルブの構成を示す断面図。Sectional drawing which shows the structure of the mold vacuum valve which concerns on Example 1 of this invention. 本発明の実施例１に係る電界緩和シールドの構成を示す要部拡大断面図。The principal part expanded sectional view which shows the structure of the electric field relaxation shield which concerns on Example 1 of this invention. 本発明の実施例２に係るモールド真空バルブの構成を示す要部拡大断面図。The principal part expanded sectional view which shows the structure of the mold vacuum valve which concerns on Example 2 of this invention. 本発明の実施例３に係るモールド真空バルブの構成を示す要部拡大断面図。The principal part expanded sectional view which shows the structure of the mold vacuum valve which concerns on Example 3 of this invention. 本発明の実施例４に係るモールド真空バルブの構成を示す要部拡大断面図。The principal part expanded sectional view which shows the structure of the mold vacuum valve which concerns on Example 4 of this invention. 従来方法によるモールド真空バルブの構成を示す断面図。Sectional drawing which shows the structure of the mold vacuum valve by a conventional method.

封着金具の端部を覆う電界緩和シールドの内周面を凹状の曲面とし、真空絶縁容器との間に形成される絶縁層に曲面を持たせ、応力分散を図るものである。以下、図面を参照して本発明による実施例を説明する。   The inner peripheral surface of the electric field relaxation shield that covers the end portion of the sealing metal fitting is formed as a concave curved surface, and the insulating layer formed between the vacuum insulating container has a curved surface to distribute stress. Embodiments according to the present invention will be described below with reference to the drawings.

先ず、本発明の実施例１に係るモールド真空バルブを図１、図２を参照して説明する。図１は、本発明の実施例１に係るモールド真空バルブの構成を示す断面図、図２は、本発明の実施例１に係る電界緩和シールドの構成を示す要部拡大断面図である。なお、図１において、従来と同様の構成部分については、同一符号を付した。   First, a mold vacuum valve according to Example 1 of the present invention will be described with reference to FIGS. FIG. 1 is a cross-sectional view showing a configuration of a mold vacuum valve according to Embodiment 1 of the present invention, and FIG. 2 is an enlarged cross-sectional view of a main part showing a configuration of an electric field relaxation shield according to Embodiment 1 of the present invention. In FIG. 1, the same components as those in the prior art are denoted by the same reference numerals.

図１に示すように、筒状のセラミックスからなる真空絶縁容器１の両端開口部には、固定側封着金具２と可動側封着金具３が封着されている。固定側封着金具２には、固定側通電軸４が貫通固定され、端部に固定側接点５が固着されている。固定側接点５に対向して可動側接点６が可動側封着金具３を移動自在に貫通する可動側通電軸７の端部に固着されている。   As shown in FIG. 1, a fixed-side sealing metal fitting 2 and a movable-side sealing metal fitting 3 are sealed at both end openings of a vacuum insulating container 1 made of cylindrical ceramics. A fixed-side energizing shaft 4 is fixed through the fixed-side sealing metal fitting 2, and a fixed-side contact 5 is fixed to the end. The movable contact 6 is fixed to the end of the movable energizing shaft 7 that movably penetrates the movable sealing fitting 3 so as to face the fixed contact 5.

可動側通電軸７の中間部には、伸縮自在のベローズ８の一方端が封着されている。他方端は、可動側封着金具３の開口部に封着されている。これにより、真空絶縁容器１内の真空を保ちながら、可動側通電軸７を軸方向に移動させることができる。なお、接点５、６を包囲するように設けられた筒状のアークシールド９が真空絶縁容器１内面に固定されている。   One end of a telescopic bellows 8 is sealed at an intermediate portion of the movable energizing shaft 7. The other end is sealed in the opening of the movable side sealing fitting 3. Thereby, the movable energizing shaft 7 can be moved in the axial direction while maintaining the vacuum in the vacuum insulating container 1. A cylindrical arc shield 9 provided so as to surround the contacts 5 and 6 is fixed to the inner surface of the vacuum insulating container 1.

固定側封着金具２には、その外周端部を覆うような椀状の固定側電界緩和シールド２０が固定されている。固定側電界緩和シールド２０は、半径方向に広がった固定部２０ａと、固定部２０ａに連接され軸方向に曲折した緩和部２０ｂとで構成されている。緩和部２０ｂは、内周面が凹状の曲面となっており、先端が真空絶縁容器１端部とラップするまで伸びている。   A hook-shaped fixed-side electric field relaxation shield 20 is fixed to the fixed-side sealing fitting 2 so as to cover the outer peripheral end portion thereof. The fixed-side electric field relaxation shield 20 includes a fixed portion 20a that spreads in the radial direction and a relaxed portion 20b that is connected to the fixed portion 20a and bent in the axial direction. The relaxation portion 20b has a concave curved inner peripheral surface and extends until the tip wraps with the end portion of the vacuum insulating container 1.

可動側封着金具３にも、その外周端部を覆うような椀状の可動側電界緩和シールド２１が固定されている。可動側電界緩和シールド２１も半径方向に広がった固定部２１ａと、固定部２１ａに連接され軸方向に曲折した緩和部２１ｂとで構成されている。緩和部２１ｂも、内周面が凹状の曲面となっており、その先端が真空絶縁容器１端部とラップするまで伸びており、固定側の緩和部２０ｂの先端と所定の絶縁距離を保って離間している。   A hook-shaped movable-side electric field relaxation shield 21 is also fixed to the movable-side sealing fitting 3 so as to cover the outer peripheral end portion thereof. The movable-side electric field relaxation shield 21 is also composed of a fixed portion 21a that spreads in the radial direction and a relaxed portion 21b that is connected to the fixed portion 21a and bent in the axial direction. The relaxation portion 21b also has a concave curved inner peripheral surface, and extends until the tip of the relaxation portion 21b wraps with the end of the vacuum insulating container 1, maintaining a predetermined insulation distance from the tip of the relaxation portion 20b on the fixed side. It is separated.

電界緩和シールド２０、２１は、加工性のよい銅材やアルミナなどの金属材を用いている。緩和部２０ｂ、２１ｂは、薄板を曲折させる絞り加工などで形成し、固定部２０ａ、２１ａにろう付けなどで固定されている。また、緩和部２０ｂ、２１ｂは、図２に示すように、中間部が曲率半径Ｒ１の断面半円状であり、先端部が曲率半径Ｒ１よりも小さい曲率半径Ｒ２の断面半円状となっている。   The electric field relaxation shields 20 and 21 are made of a metal material such as copper material or alumina having good workability. The relaxation portions 20b and 21b are formed by drawing or the like that bends a thin plate, and are fixed to the fixing portions 20a and 21a by brazing or the like. Further, as shown in FIG. 2, each of the relaxing portions 20b and 21b has a semicircular cross section with a radius of curvature R1 at the intermediate portion and a semicircular cross section with a radius of curvature R2 that is smaller than the radius of curvature R1. Yes.

そして、これらの真空絶縁容器１と電界緩和シールド２０、２１の外周には、エポキシ樹脂でモールドして形成した絶縁層１２が設けられている。絶縁層１２の外周には、導電性塗料を塗布して形成した接地層１３が設けられている。絶縁層１２の固定側の軸方向は凹状の界面接続部１４となっており、また、可動側は凸状の界面接続部１５となっており、他の電気機器と接続される。   An insulating layer 12 formed by molding with an epoxy resin is provided on the outer periphery of the vacuum insulating container 1 and the electric field relaxation shields 20 and 21. On the outer periphery of the insulating layer 12, a ground layer 13 formed by applying a conductive paint is provided. The axial direction on the fixed side of the insulating layer 12 is a concave interface connecting portion 14, and the movable side is a convex interface connecting portion 15, which is connected to other electrical devices.

これにより、真空絶縁容器１と電界緩和シールド２０、２１の緩和部２０ｂ、２１ｂ間に形成される絶縁層１２は、真空絶縁容器１側が直線状であるものの、緩和部２０ｂ、２１ｂ側の中間部が曲率半径Ｒ１、先端部が曲率半径Ｒ１に連接された曲率半径Ｒ２による断面半円状の曲面を持ったものとなる。このように連続した曲面を有する円弧状の絶縁層１２においては、応力が特定個所に集中し難く、曲面の全体に分散し、剥離やクラックのような絶縁欠陥を生じ難くさせるものとなる。また、緩和部２０ｂ、２１ｂを薄板としているので、残留応力の吸収を図ることができる。   Thereby, although the insulating layer 12 formed between the vacuum insulation container 1 and the relaxation parts 20b and 21b of the electric field relaxation shields 20 and 21 is linear on the vacuum insulation container 1 side, an intermediate part on the relaxation parts 20b and 21b side. Has a curved surface with a semicircular cross section with a radius of curvature R1 and a radius of curvature R2 with the tip connected to the radius of curvature R1. In the arc-shaped insulating layer 12 having a continuous curved surface as described above, stress is not easily concentrated at a specific location, and is dispersed over the entire curved surface, so that insulation defects such as peeling and cracks are hardly generated. Moreover, since the relaxation parts 20b and 21b are thin plates, the residual stress can be absorbed.

なお、曲率半径Ｒ２は、大きいほどよいが、電界緩和シールド２０、２１が大型化する。逆に、曲率半径Ｒ２が小さいと、応力集中を起こし易くなる。このため、曲率半径Ｒ２は、曲率半径Ｒ１の１／５〜１／２０が好ましい。   In addition, although the curvature radius R2 is so good that it is large, the electric field relaxation shields 20 and 21 are enlarged. Conversely, when the radius of curvature R2 is small, stress concentration is likely to occur. For this reason, the curvature radius R2 is preferably 1/5 to 1/20 of the curvature radius R1.

更に、緩和部２０ｂ、２１ｂは、接地層１３との間で対地間絶縁を形成するが、最短絶縁距離個所が大きな曲率半径Ｒ１を持つ曲面の部分となり、電界緩和を図ることができる。なお、緩和部２０ｂ、２１ｂと接地層１３間に形成される絶縁層１２は、接地層１３側が解放されているので、大きな応力は発生し難い。   Furthermore, although the relaxation portions 20b and 21b form ground-to-ground insulation with the ground layer 13, the shortest insulation distance portion becomes a curved portion having a large curvature radius R1, and electric field relaxation can be achieved. The insulating layer 12 formed between the relaxing portions 20b and 21b and the ground layer 13 is free from large stress because the ground layer 13 side is released.

上記実施例１のモールド真空バルブによれば、封着金具２、３に固定される電界緩和シールド２０、２１の緩和部２０ｂ、２１ｂの内周面を凹状の曲面としているので、真空絶縁容器１と緩和部２０ｂ、２１ｂ間に形成される絶縁層１２が断面半円状の曲面を持った形状となり、応力分散を図ることができ、剥離やクラックなどの絶縁欠陥の生じ難いものとすることができる。   According to the mold vacuum valve of the first embodiment, the inner peripheral surfaces of the relaxation portions 20b and 21b of the electric field relaxation shields 20 and 21 fixed to the sealing fittings 2 and 3 are concave curved surfaces. And the insulating layer 12 formed between the relaxing portions 20b and 21b has a shape having a semicircular curved surface, can distribute stress, and is less likely to cause insulation defects such as peeling and cracking. it can.

次に、本発明の実施例２に係るモールド真空バルブを図３を参照して説明する。図３は、本発明の実施例２に係るモールド真空バルブの構成を示す要部拡大断面図である。なお、この実施例２が実施例１と異なる点は、電界緩和シールドの形状である。図３において、実施例１と同様の構成部分においては、同一符号を付し、その詳細な説明を省略する。なお、固定側と可動側とは同様形状であるので、固定側を用いて説明する。   Next, a mold vacuum valve according to a second embodiment of the present invention will be described with reference to FIG. FIG. 3 is an enlarged cross-sectional view showing a main part of the configuration of the mold vacuum valve according to the second embodiment of the present invention. The second embodiment is different from the first embodiment in the shape of the electric field relaxation shield. In FIG. 3, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. Since the fixed side and the movable side have the same shape, description will be made using the fixed side.

図３に示すように、固定側電界緩和シールド２０の緩和部２０ｃは、固定部２０ａ側にも先端部と同様の曲面を持たせている。即ち、断面Ｃ字状としている。   As shown in FIG. 3, the relaxation portion 20c of the fixed-side electric field relaxation shield 20 has a curved surface similar to the tip portion on the fixed portion 20a side. That is, it has a C-shaped cross section.

上記実施例２のモールド真空バルブによれば、真空絶縁容器１と緩和部２０ｂ間に形成される絶縁層１２の応力分散を更に図ることができる。   According to the mold vacuum valve of Example 2, the stress distribution of the insulating layer 12 formed between the vacuum insulating container 1 and the relaxing portion 20b can be further promoted.

次に、本発明の実施例３に係るモールド真空バルブを図４を参照して説明する。図４は、本発明の実施例３に係るモールド真空バルブの構成を示す要部拡大断面図である。なお、この実施例３が実施例１と異なる点は、電界緩和シールドの形状である。図４において、実施例１と同様の構成部分においては、同一符号を付し、その詳細な説明を省略する。なお、固定側電界緩和シールドを用いて説明する。   Next, a mold vacuum valve according to Example 3 of the present invention will be described with reference to FIG. FIG. 4 is an enlarged cross-sectional view of a main part showing the configuration of the mold vacuum valve according to Example 3 of the present invention. The third embodiment is different from the first embodiment in the shape of the electric field relaxation shield. In FIG. 4, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. In addition, it demonstrates using a fixed side electric field relaxation shield.

図４に示すように、固定側電界緩和シールド２０の緩和部２０ｄは、厚板の筒状の内周面を凹状の曲面に機械加工したものである。緩和部２０ｄは、固定部２０ａにろう付けなどで固定されている。なお、緩和部２０ｄは、固定部２０ａよりも厚板となる。   As shown in FIG. 4, the relaxation part 20d of the fixed-side electric field relaxation shield 20 is obtained by machining a cylindrical inner peripheral surface of a thick plate into a concave curved surface. The relaxing part 20d is fixed to the fixing part 20a by brazing or the like. The relaxing portion 20d is a thicker plate than the fixed portion 20a.

上記実施例３のモールド真空バルブによれば、実施例１による効果のほかに、緩和部２０ｄの板厚が大きくなるので、熱容量が増し、モールド時などにおける絶縁層１２内の残留応力を抑制することができる。   According to the mold vacuum valve of the third embodiment, in addition to the effect of the first embodiment, since the plate thickness of the relaxing portion 20d is increased, the heat capacity is increased and the residual stress in the insulating layer 12 during molding is suppressed. be able to.

次に、本発明の実施例４に係るモールド真空バルブを図５を参照して説明する。図５は、本発明の実施例４に係るモールド真空バルブの構成を示す要部拡大断面図である。なお、この実施例４が実施例１と異なる点は、電界緩和シールドの形状である。図５において、実施例１と同様の構成部分においては、同一符号を付し、その詳細な説明を省略する。なお、固定側電界緩和シールド用いて説明する。   Next, a mold vacuum valve according to Example 4 of the present invention will be described with reference to FIG. FIG. 5 is an enlarged cross-sectional view of a main part showing the configuration of a mold vacuum valve according to Example 4 of the present invention. The fourth embodiment is different from the first embodiment in the shape of the electric field relaxation shield. In FIG. 5, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. In addition, it demonstrates using a fixed side electric field relaxation shield.

図５に示すように、固定側電界緩和シールド２０の緩和部２０ｅは、薄板を絞り加工などで、特に半径方向に弾力性を有する渦巻状に形成している。緩和部２０ｅは、固定部２０ａにろう付けなどで固定されている。   As shown in FIG. 5, the relaxation portion 20 e of the fixed-side electric field relaxation shield 20 is formed in a spiral shape having elasticity in the radial direction, for example, by drawing a thin plate. The relaxing part 20e is fixed to the fixing part 20a by brazing or the like.

上記実施例４のモールド真空バルブによれば、実施例１による効果のほかに、緩和部２０ｅに弾力性を持たせているので、モールド時などにおける絶縁層１２内の残留応力を抑制することができる。   According to the mold vacuum valve of the fourth embodiment, in addition to the effect of the first embodiment, the relaxation portion 20e is made elastic so that the residual stress in the insulating layer 12 during molding can be suppressed. it can.

１ 真空絶縁容器
２ 固定側封着金具
３ 可動側封着金具
４ 固定側通電軸
５ 固定側接点
６ 可動側接点
７ 可動側通電軸
８ ベローズ
９ アークシールド
１０、２０ 固定側電界緩和シールド
１１、２１ 可動側電界緩和シールド
１２ 絶縁層
１３ 接地層
１４、１５ 界面接続部
２０ａ、２１ａ 固定部
２０ｂ、２０ｃ、２０ｄ、２０ｅ、２１ｂ 緩和部 DESCRIPTION OF SYMBOLS 1 Vacuum insulating container 2 Fixed side sealing metal fitting 3 Movable side sealing metal fitting 4 Fixed side energizing shaft 5 Fixed side contact 6 Movable side contact 7 Movable side energizing shaft 8 Bellows 9 Arc shield 10, 20 Fixed side electric field relaxation shield 11, 21 Movable-side electric field relaxation shield 12 Insulating layer 13 Ground layers 14, 15 Interface connection portions 20a, 21a Fixed portions 20b, 20c, 20d, 20e, 21b Relaxation portions

Claims (5)

筒状の真空絶縁容器と、
前記真空絶縁容器の両端開口部に封着された固定側封着金具および可動側封着金具と、
前記固定側封着金具に貫通固定された固定側通電軸と、
前記固定側通電軸端に固着された固定側接点と、
前記固定側接点と接離する可動側接点と、
前記可動側接点を固着するとともに、前記可動側封着金具を気密のもとに貫通する可動側通電軸と、
前記固定側封着金具の外周端部を覆うように設けられた固定側電界緩和シールドと、
前記可動側封着金具の外周端部を覆うように設けられた可動側電界緩和シールドと、
前記真空絶縁容器および前記電界緩和シールドの外周に絶縁材料をモールドして形成した絶縁層とを具備し、
前記電界緩和シールドのそれぞれは、半径方向に広がる固定部と軸方向に伸びる緩和部とで構成され、前記緩和部の内周面に凹状の曲面を持たせたことを特徴とするモールド真空バルブ。 A tubular vacuum insulated container;
A fixed-side sealing metal fitting and a movable-side sealing metal fitting sealed at both ends of the vacuum insulating container; and
A fixed-side energizing shaft that is fixedly penetrated to the fixed-side sealing fitting;
A fixed-side contact fixed to the fixed-side energizing shaft end;
A movable contact that contacts and separates from the fixed contact;
A movable side energizing shaft that sticks the movable side contact and penetrates the movable side sealing fitting in an airtight manner,
A fixed-side electric field relaxation shield provided to cover an outer peripheral end of the fixed-side sealing metal fitting,
A movable-side electric field relaxation shield provided so as to cover an outer peripheral end of the movable-side sealing metal fitting,
Comprising an insulating layer formed by molding an insulating material on the outer periphery of the vacuum insulating container and the electric field relaxation shield,
Each of the electric field relaxation shields is composed of a fixed portion extending in the radial direction and a relaxation portion extending in the axial direction, and a concave vacuum surface is provided on the inner peripheral surface of the relaxation portion. 前記緩和部を断面Ｃ状としたことを特徴とする請求項１に記載のモールド真空バルブ。   The mold vacuum valve according to claim 1, wherein the relaxation portion has a C-shaped cross section. 前記緩和部を断面渦巻状としたことを特徴とする請求項１に記載のモールド真空バルブ。   The mold vacuum valve according to claim 1, wherein the relaxation portion has a spiral cross section. 前記緩和部を絞り加工で形成したことを特徴とする請求項１乃至請求項３にいずれか１項に記載のモールド真空バルブ。   The mold vacuum valve according to any one of claims 1 to 3, wherein the relaxation portion is formed by drawing. 前記緩和部を前記固定部よりも厚板とするとともに、前記緩和部の内周面に凹状の曲面を形成したことを特徴とする請求項１に記載のモールド真空バルブ。   2. The mold vacuum valve according to claim 1, wherein the relaxation portion is made thicker than the fixed portion, and a concave curved surface is formed on an inner peripheral surface of the relaxation portion.
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JP2011048998A (en) * 2009-08-26 2011-03-10 Toshiba Corp Mold vacuum valve
JP2012243581A (en) * 2011-05-19 2012-12-10 Toshiba Corp Resin-molded vacuum valve
JP2015015155A (en) * 2013-07-05 2015-01-22 株式会社東芝 Resin insulation vacuum valve
JP2019110010A (en) * 2017-12-18 2019-07-04 株式会社東芝 Vacuum valve

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JP2009093922A (en) * 2007-10-09 2009-04-30 Toshiba Corp Vacuum bulb

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011048998A (en) * 2009-08-26 2011-03-10 Toshiba Corp Mold vacuum valve
JP2012243581A (en) * 2011-05-19 2012-12-10 Toshiba Corp Resin-molded vacuum valve
JP2015015155A (en) * 2013-07-05 2015-01-22 株式会社東芝 Resin insulation vacuum valve
JP2019110010A (en) * 2017-12-18 2019-07-04 株式会社東芝 Vacuum valve
JP7109911B2 (en) 2017-12-18 2022-08-01 株式会社東芝 vacuum valve

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