JP2010536583A - 研磨パッド - Google Patents
研磨パッド Download PDFInfo
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- JP2010536583A JP2010536583A JP2010521026A JP2010521026A JP2010536583A JP 2010536583 A JP2010536583 A JP 2010536583A JP 2010521026 A JP2010521026 A JP 2010521026A JP 2010521026 A JP2010521026 A JP 2010521026A JP 2010536583 A JP2010536583 A JP 2010536583A
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- polishing
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- 238000005498 polishing Methods 0.000 title claims abstract description 176
- 230000004888 barrier function Effects 0.000 claims abstract description 37
- 238000000034 method Methods 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 16
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- 229920002635 polyurethane Polymers 0.000 claims description 7
- 239000004814 polyurethane Substances 0.000 claims description 7
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- 239000004433 Thermoplastic polyurethane Substances 0.000 claims description 5
- 238000011065 in-situ storage Methods 0.000 claims description 5
- 229920002803 thermoplastic polyurethane Polymers 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 48
- 239000000463 material Substances 0.000 description 16
- 239000002245 particle Substances 0.000 description 14
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- 239000004065 semiconductor Substances 0.000 description 10
- 238000007517 polishing process Methods 0.000 description 8
- 239000007787 solid Substances 0.000 description 7
- 239000002952 polymeric resin Substances 0.000 description 6
- 229920003002 synthetic resin Polymers 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 230000033001 locomotion Effects 0.000 description 4
- 239000002905 metal composite material Substances 0.000 description 4
- 238000004377 microelectronic Methods 0.000 description 4
- -1 polyethylenes Polymers 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910000927 Ge alloy Inorganic materials 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000005380 borophosphosilicate glass Substances 0.000 description 2
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 2
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 2
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- 239000011242 organic-inorganic particle Substances 0.000 description 2
- 239000005360 phosphosilicate glass Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
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- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001339 C alloy Inorganic materials 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229920005830 Polyurethane Foam Polymers 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910000323 aluminium silicate Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 239000008365 aqueous carrier Substances 0.000 description 1
- 229920003235 aromatic polyamide Polymers 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000004581 coalescence Methods 0.000 description 1
- 239000008139 complexing agent Substances 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 229920006037 cross link polymer Polymers 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
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- 239000012530 fluid Substances 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 238000010102 injection blow moulding Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 230000005055 memory storage Effects 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000007783 nanoporous material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 description 1
- 239000003002 pH adjusting agent Substances 0.000 description 1
- 239000006179 pH buffering agent Substances 0.000 description 1
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 1
- 229910052615 phyllosilicate Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
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- 239000011496 polyurethane foam Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 235000019422 polyvinyl alcohol Nutrition 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 238000003856 thermoforming Methods 0.000 description 1
- 229920002725 thermoplastic elastomer Polymers 0.000 description 1
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- 239000004634 thermosetting polymer Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
【選択図】図1
Description
Claims (20)
- (a)研磨表面を有する研磨層であって、該研磨表面は、
(1)研磨表面から測定可能な深さで研磨層内に配置された複数の溝と、
(2)溝のないバリア域とを含む、
当該研磨層と、
(b)前記バリア域内に、該バリア域に囲まれて配置される透明ウインドウと、
を備える、研磨パッド。 - 前記バリア域付近で、前記深さが最大値から零へ推移することを特徴とする、請求項1に記載の研磨パッド。
- 前記深さは徐々に推移することを特徴とする、請求項2に記載の研磨パッド。
- 前記研磨パッドは円形状であり、溝は同心状であることを特徴とする、請求項3に記載の研磨パッド。
- 1以上の前記同心溝は、第一端及び第二端を有する非連続溝であり、前記バリア域は第一端と第二端との間に配置されることを特徴とする、請求項4に記載の研磨パッド。
- 前記透明ウインドウのウインドウ最上面は、実質的に前記研磨表面と同一平面上にあることを特徴とする、請求項1に記載の研磨パッド。
- 前記研磨層はポリウレタンからなることを特徴とする、請求項1に記載の研磨パッド。
- 前記透明ウインドウは熱可塑性ポリウレタンからなることを特徴とする、請求項1に記載の研磨パッド。
- 前記研磨パッドは更に副層を含むことを特徴とする、請求項1に記載の研磨パッド。
- (i)研磨すべき被加工物を供給するステップと、
(ii)被加工物を請求項1に記載の研磨パッドと接触させるステップと、
(iii)被加工物の表面の少なくとも一部を研磨パッドで研磨して被加工物を研磨するステップと、
を含む、基板研磨方法。 - 原位置で(in-situ)研磨終点を検出することを更に含む、請求項10に記載の方法。
- 前記被加工物は、前記被加工物と前記研磨パッドの間に位置する化学的機械的研磨組成物と接触することを特徴とする、請求項10に記載の方法。
- 前記バリア域付近で、深さが最大値から零へ推移することを特徴とする請求項10に記載の方法。
- 前記深さは徐々に推移することを特徴とする、請求項13に記載の方法。
- 前記研磨パッドは円形状であり、溝は同心状であることを特徴とする、請求項14に記載の方法。
- 1以上の前記同心溝は、第一端及び第二端を有する非連続溝であり、前記バリア域は第一端と第二端との間に配置されることを特徴とする、請求項15に記載の方法。
- 前記透明ウインドウのウインドウ最上面は、実質的に研磨表面と同一平面上にあることを特徴とする、請求項10に記載の方法。
- 前記研磨層はポリウレタンからなることを特徴とする、請求項10に記載の方法。
- 前記透明ウインドウは熱可塑性ポリウレタンからなることを特徴とする、請求項10に記載の方法。
- 前記研磨パッドは更に副層を含むことを特徴とする、請求項10に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US95629307P | 2007-08-16 | 2007-08-16 | |
US60/956,293 | 2007-08-16 | ||
PCT/US2008/009687 WO2009025748A1 (en) | 2007-08-16 | 2008-08-13 | Polishing pad |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2010536583A true JP2010536583A (ja) | 2010-12-02 |
JP2010536583A5 JP2010536583A5 (ja) | 2011-01-27 |
JP5307815B2 JP5307815B2 (ja) | 2013-10-02 |
Family
ID=40378437
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010521026A Active JP5307815B2 (ja) | 2007-08-16 | 2008-08-13 | 研磨パッド |
Country Status (10)
Country | Link |
---|---|
US (1) | US20110183579A1 (ja) |
EP (1) | EP2193010B1 (ja) |
JP (1) | JP5307815B2 (ja) |
KR (1) | KR101203789B1 (ja) |
CN (1) | CN101778701B (ja) |
IL (1) | IL203461A (ja) |
MY (1) | MY154071A (ja) |
SG (1) | SG183738A1 (ja) |
TW (1) | TWI411495B (ja) |
WO (1) | WO2009025748A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014080729A1 (ja) * | 2012-11-26 | 2014-05-30 | 東洋ゴム工業株式会社 | 研磨パッド |
WO2022202008A1 (ja) * | 2021-03-26 | 2022-09-29 | 富士紡ホールディングス株式会社 | 研磨パッド |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8047899B2 (en) * | 2007-07-26 | 2011-11-01 | Macronix International Co., Ltd. | Pad and method for chemical mechanical polishing |
WO2011008499A2 (en) * | 2009-06-30 | 2011-01-20 | Applied Materials, Inc. | Leak proof pad for cmp endpoint detection |
JP5426469B2 (ja) * | 2010-05-10 | 2014-02-26 | 東洋ゴム工業株式会社 | 研磨パッドおよびガラス基板の製造方法 |
US8628384B2 (en) | 2010-09-30 | 2014-01-14 | Nexplanar Corporation | Polishing pad for eddy current end-point detection |
US8657653B2 (en) * | 2010-09-30 | 2014-02-25 | Nexplanar Corporation | Homogeneous polishing pad for eddy current end-point detection |
CN102501187A (zh) * | 2011-11-04 | 2012-06-20 | 厦门大学 | 区域压力调整抛光盘 |
US9067299B2 (en) * | 2012-04-25 | 2015-06-30 | Applied Materials, Inc. | Printed chemical mechanical polishing pad |
US9649742B2 (en) | 2013-01-22 | 2017-05-16 | Nexplanar Corporation | Polishing pad having polishing surface with continuous protrusions |
CN104044087B (zh) * | 2014-06-18 | 2016-09-07 | 蓝思科技股份有限公司 | 一种蓝宝石抛光用铜盘及其修盘方法 |
CN106607749B (zh) * | 2015-10-22 | 2019-01-22 | 中芯国际集成电路制造(上海)有限公司 | 一种阻挡型化学机械研磨垫及研磨装置 |
JP6940495B2 (ja) * | 2015-10-30 | 2021-09-29 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 所望のゼータ電位を有する研磨用物品を形成するための装置及び方法 |
US9925637B2 (en) * | 2016-08-04 | 2018-03-27 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Tapered poromeric polishing pad |
TWI595968B (zh) * | 2016-08-11 | 2017-08-21 | 宋建宏 | 研磨墊及其製造方法 |
TWI650202B (zh) * | 2017-08-22 | 2019-02-11 | 智勝科技股份有限公司 | 研磨墊、研磨墊的製造方法及研磨方法 |
US11685013B2 (en) * | 2018-01-24 | 2023-06-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Polishing pad for chemical mechanical planarization |
KR20210094024A (ko) * | 2018-11-27 | 2021-07-28 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 폴리싱 패드 및 시스템과 이의 제조 및 사용 방법 |
CN113246015B (zh) * | 2021-05-25 | 2022-09-20 | 万华化学集团电子材料有限公司 | 具有终点检测窗的抛光垫及其应用 |
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2008
- 2008-07-22 TW TW097127831A patent/TWI411495B/zh active
- 2008-08-13 MY MYPI2010000193A patent/MY154071A/en unknown
- 2008-08-13 WO PCT/US2008/009687 patent/WO2009025748A1/en active Application Filing
- 2008-08-13 EP EP08795288.3A patent/EP2193010B1/en active Active
- 2008-08-13 US US12/673,057 patent/US20110183579A1/en not_active Abandoned
- 2008-08-13 JP JP2010521026A patent/JP5307815B2/ja active Active
- 2008-08-13 KR KR1020107005681A patent/KR101203789B1/ko active IP Right Grant
- 2008-08-13 CN CN2008801027610A patent/CN101778701B/zh active Active
- 2008-08-13 SG SG2012060802A patent/SG183738A1/en unknown
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2010
- 2010-01-24 IL IL203461A patent/IL203461A/en active IP Right Grant
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WO2014080729A1 (ja) * | 2012-11-26 | 2014-05-30 | 東洋ゴム工業株式会社 | 研磨パッド |
WO2022202008A1 (ja) * | 2021-03-26 | 2022-09-29 | 富士紡ホールディングス株式会社 | 研磨パッド |
Also Published As
Publication number | Publication date |
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KR101203789B1 (ko) | 2012-11-21 |
JP5307815B2 (ja) | 2013-10-02 |
EP2193010A4 (en) | 2013-10-16 |
SG183738A1 (en) | 2012-09-27 |
TWI411495B (zh) | 2013-10-11 |
US20110183579A1 (en) | 2011-07-28 |
WO2009025748A1 (en) | 2009-02-26 |
IL203461A (en) | 2014-11-30 |
CN101778701A (zh) | 2010-07-14 |
EP2193010A1 (en) | 2010-06-09 |
MY154071A (en) | 2015-04-30 |
KR20100068255A (ko) | 2010-06-22 |
CN101778701B (zh) | 2012-06-27 |
TW200922748A (en) | 2009-06-01 |
EP2193010B1 (en) | 2020-01-08 |
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