JP2010279106A - Electrostatic induction power generation device - Google Patents

Electrostatic induction power generation device Download PDF

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JP2010279106A
JP2010279106A JP2009127052A JP2009127052A JP2010279106A JP 2010279106 A JP2010279106 A JP 2010279106A JP 2009127052 A JP2009127052 A JP 2009127052A JP 2009127052 A JP2009127052 A JP 2009127052A JP 2010279106 A JP2010279106 A JP 2010279106A
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movable structure
substrate
protrusion
fixed frame
electrode
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Daisuke Wakabayashi
大介 若林
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Panasonic Electric Works Co Ltd
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Panasonic Electric Works Co Ltd
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/06—Influence generators
    • H02N1/08—Influence generators with conductive charge carrier, i.e. capacitor machines

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Micromachines (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electrostatic induction power generation device wherein breakage can be prevented even when excessive vibration or impact is applied. <P>SOLUTION: First and second fixed electrodes 12, 13 are fixed on the principal surface 1a of a printed circuit board 1. A conductive substrate 2 jointed to the principal surface 1a of the printed circuit board 1 is configured by integrally forming: a rectangular frame-like fixed frame portion 7 whose bottom is fixed on the printed circuit board 1; a movable structure 8 placed within the fixed frame portion 7; and an elastic support that supports the movable structure 8 on the fixed frame portion 7 so that the movable structure 8 is movable along the principal surface 1a. The movable structure 8 is provided with a movable electrode 11 and an electret electrode 10 in positions where they are opposed to the respective fixed electrodes 12, 13 on the printed circuit board 1. An arresting means that limits the movement of the movable structure 8 in the direction along the principal surface 1a of the printed circuit board 1 is constructed of a projection 19 protruded in a position where it is opposed to the movable structure 8 on the internal surface of the fixed frame portion 7. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、静電誘導型発電装置に関するものである。   The present invention relates to an electrostatic induction power generating device.

この種の静電誘導型発電装置として例えば特許文献１に開示されるものが従来提案されている。特許文献１に開示された発電装置では、複数のエレクトレット電極を表面に有する不動基板と、複数の可動電極を表面に有し、不動基板と平行な方向において弾性移動可能な状態で弾性部材により支持された可動基板とが、所定の間隔を開けて配置されている。ここで、発電装置に加わった振動によって可動基板が弾性移動すると、エレクトレット電極と可動電極との重なり面積が変化することで、可動電極に誘導される電荷が変化するので、この電荷の変化を電気エネルギーとして取り出すことで発電が行われる。   As this type of electrostatic induction generator, for example, one disclosed in Patent Document 1 has been proposed. In the power generation device disclosed in Patent Document 1, a stationary substrate having a plurality of electret electrodes on its surface, and a plurality of movable electrodes on its surface, supported by an elastic member in a state of being elastically movable in a direction parallel to the stationary substrate. The movable substrate thus arranged is arranged at a predetermined interval. Here, if the movable substrate elastically moves due to vibration applied to the power generation device, the overlapping area between the electret electrode and the movable electrode changes, and the charge induced in the movable electrode changes. Electricity is generated by extracting it as energy.

特開２００８−８６１９０号公報（段落［００１１］〜［００１８］、及び、図１〜図２）JP 2008-86190 A (paragraphs [0011] to [0018] and FIGS. 1 to 2)

上述した従来の発電装置では、外部から発電装置に加えられた振動によって可動基板が振動することで、発電が行われるのであるが、この発電装置には可動基板の移動量を規制する手段が設けられていないため、過大な振動や衝撃が加わった場合に可動基板を弾性支持する弾性部材が破損する虞があった。   In the conventional power generation apparatus described above, the movable substrate vibrates due to vibration applied to the power generation apparatus from the outside, and power generation is performed. The power generation apparatus is provided with means for regulating the movement amount of the movable substrate. Therefore, the elastic member that elastically supports the movable substrate may be damaged when excessive vibration or impact is applied.

本発明は上記問題点に鑑みて為されたものであり、その目的とするところは、過大な振動や衝撃が加わった場合の破損を防止した静電誘導型発電装置を提供することにある。   The present invention has been made in view of the above problems, and an object of the present invention is to provide an electrostatic induction power generation device that prevents damage when excessive vibration or impact is applied.

上記目的を達成するために、請求項１の発明は、第１電極が主表面に配置される第１基板と、第１電極と対向する部位に第１電極と離間して第２電極が配置された可動構造体と、主平面に沿って移動自在に可動構造体を支持する弾性支持部とを備え、対向配置される第１、第２電極のうちの何れか一方は、電荷を帯電させたエレクトレット電極からなり、可動構造体の移動量を制限する規制手段を備えたことを特徴とする。   In order to achieve the above object, according to the first aspect of the present invention, there is provided a first substrate on which the first electrode is disposed on the main surface, and a second electrode disposed at a position facing the first electrode so as to be separated from the first electrode. One of the first and second electrodes arranged opposite to each other is charged with a charge. The movable structure is configured to be movable along the main plane and to be movable along the main plane. And a restricting means for limiting the amount of movement of the movable structure.

請求項２の発明は、請求項１の発明において、第１基板の主表面に接合される第２基板を備え、当該第２基板は、第１基板に底面が固定される四角枠状の固定枠部と、固定枠部の枠内に配置される可動構造体と、可動構造体が移動可能な状態で可動構造体を固定枠部に支持させる弾性支持部とが一体に形成されて構成されたことを特徴とする。   According to a second aspect of the present invention, in the first aspect of the invention, the second substrate is bonded to the main surface of the first substrate, and the second substrate is fixed in a square frame shape whose bottom surface is fixed to the first substrate. A frame part, a movable structure disposed within the frame of the fixed frame part, and an elastic support part that supports the movable structure on the fixed frame part in a state where the movable structure is movable are integrally formed. It is characterized by that.

請求項３の発明は、請求項２の発明において、規制手段として、固定枠部の内側面において可動構造体と対向する部位に突設された突起を備えることを特徴とする。   According to a third aspect of the present invention, in the second aspect of the present invention, the restricting means includes a protrusion projecting at a portion facing the movable structure on the inner side surface of the fixed frame portion.

請求項４の発明は、請求項２又は３の何れか１つの発明において、規制手段として、第１基板の主表面において可動構造体と対向する部位から可動構造体側に突出する突起を備えることを特徴とする。   According to a fourth aspect of the present invention, in any one of the second and third aspects of the present invention, the restricting means includes a protrusion protruding toward the movable structure from a portion facing the movable structure on the main surface of the first substrate. Features.

請求項５の発明は、請求項２乃至４の何れか１つの発明において、規制手段として、第１基板の主表面において弾性支持部と対向する部位から弾性支持部側に突出する突起を備えることを特徴とする。   According to a fifth aspect of the present invention, in any one of the second to fourth aspects of the present invention, as the restricting means, a protrusion projecting toward the elastic support portion from a portion facing the elastic support portion on the main surface of the first substrate is provided. It is characterized by.

請求項６の発明は、請求項２乃至５の何れか１つの発明において、規制手段として、固定枠部における第１基板と反対側の面に接合され、可動構造体に対して第１基板と反対側に配置されるキャップ基板を備えたことを特徴とする。   According to a sixth aspect of the invention, in any one of the second to fifth aspects of the invention, the restricting means is joined to a surface of the fixed frame portion opposite to the first substrate, and the first substrate is connected to the movable structure. A cap substrate is provided on the opposite side.

請求項７の発明は、請求項６の発明において、キャップ基板には、可動構造体と対向する部位に、可動構造体に向かって突出する突起が設けられたことを特徴とする。   The invention according to claim 7 is the invention according to claim 6, wherein the cap substrate is provided with a protrusion protruding toward the movable structure at a portion facing the movable structure.

請求項８の発明は、請求項６又は７の何れか１つの発明において、キャップ基板には、弾性支持部と対向する部位に、弾性支持部側に突出する突起が設けられたことを特徴とする。   The invention of claim 8 is characterized in that, in any one of the inventions of claim 6 or 7, the cap substrate is provided with a protrusion protruding toward the elastic support part at a portion facing the elastic support part. To do.

請求項９の発明は、請求項２乃至８の何れか１つの発明において、規制手段として、可動構造体において固定枠部の内側面と対向する部位から、固定枠部の内側面に向かって突出する突起を備えることを特徴とする。   The invention of claim 9 is the invention according to any one of claims 2 to 8, wherein, as the restricting means, the movable structure protrudes from a portion facing the inner surface of the fixed frame portion toward the inner surface of the fixed frame portion. It is characterized by comprising a projection that does.

請求項１０の発明は、請求項２乃至９の何れか１つの発明において、規制手段として、可動構造体において第１基板の主表面と対向する部位から、主表面に向かって突出する突起を備えることを特徴とする。   A tenth aspect of the invention according to any one of the second to ninth aspects includes, as the restricting means, a protrusion protruding toward the main surface from a portion of the movable structure that faces the main surface of the first substrate. It is characterized by that.

請求項１１の発明は、請求項２乃至１０の何れか１つの発明において、固定枠部における第１基板と反対側の面に接合され、可動構造体に対して第１基板と反対側に配置されるキャップ基板を備え、規制手段として、可動構造体においてキャップ基板と対向する部位から、キャップ基板に向かって突出する突起を備えることを特徴とする。   The invention of claim 11 is the invention according to any one of claims 2 to 10, wherein the fixed frame portion is bonded to a surface opposite to the first substrate, and is disposed on the opposite side of the first substrate with respect to the movable structure. And a protrusion that protrudes toward the cap substrate from a portion facing the cap substrate in the movable structure.

請求項１の発明によれば、過大な振動や衝撃が加わった場合でも、規制手段によって可動構造体の移動量が規制されるので弾性支持部に過大な力が加わって、弾性支持部が破損するのを防止できるという効果がある。   According to the first aspect of the present invention, even when excessive vibration or impact is applied, the amount of movement of the movable structure is restricted by the restricting means, so that an excessive force is applied to the elastic support portion and the elastic support portion is damaged. There is an effect that can be prevented.

請求項２の発明によれば、請求項１の発明と同様、過大な振動や衝撃が加わった場合でも、規制手段によって可動構造体の移動量が規制されるので弾性支持部に過大な力が加わって、弾性支持部が破損するのを防止できるという効果がある。   According to the invention of claim 2, as in the invention of claim 1, even when excessive vibration or impact is applied, the movement amount of the movable structure is regulated by the regulating means, so that excessive force is applied to the elastic support portion. In addition, the elastic support portion can be prevented from being damaged.

請求項３の発明によれば、固定枠部の内側面に突設された突起に可動構造体が当接することによって、第１基板の主表面に沿う方向において可動構造体の移動量を制限することができる。   According to the third aspect of the present invention, the movable structure is limited in the direction along the main surface of the first substrate by contacting the movable structure with the protrusion protruding from the inner surface of the fixed frame portion. be able to.

請求項４の発明によれば、第１基板の主表面に突設された突起に可動構造体が当接することによって、可動構造体が第１基板側へ移動する移動量を制限することができる。   According to the fourth aspect of the present invention, the amount of movement of the movable structure to the first substrate side can be limited by the movable structure coming into contact with the protrusion protruding from the main surface of the first substrate. .

請求項５の発明によれば、第１基板の主表面に突設された突起に弾性支持部が当接することによって、弾性支持部、すなわち弾性支持部に支持された可動構造体が第１基板側へ移動する移動量を制限することができる。   According to the invention of claim 5, the elastic support portion abuts on the protrusion protruding from the main surface of the first substrate, so that the elastic support portion, that is, the movable structure supported by the elastic support portion is the first substrate. The amount of movement to the side can be limited.

請求項６の発明によれば、キャップ基板に可動構造体が当接することによって、可動構造体がキャップ基板側へ移動する移動量を制限することができる。   According to the sixth aspect of the present invention, the amount of movement of the movable structure to the cap substrate side can be limited by the movable structure coming into contact with the cap substrate.

請求項７の発明によれば、キャップ基板に設けた突起に可動構造体が当接することによって、可動構造体がキャップ基板側へ移動する移動量を制限することができる。   According to the seventh aspect of the present invention, the amount of movement of the movable structure to the cap substrate side can be limited by the movable structure contacting the protrusion provided on the cap substrate.

請求項８の発明によれば、キャップ基板に設けた突起に弾性支持部が当接することによって、弾性支持部、すなわち弾性支持部に支持された可動構造体が第１基板側へ移動する移動量を制限することができる。   According to the eighth aspect of the present invention, the amount of movement of the elastic support portion, that is, the movable structure supported by the elastic support portion, moves to the first substrate side when the elastic support portion comes into contact with the protrusion provided on the cap substrate. Can be limited.

請求項９の発明によれば、可動構造体に設けた突起が、固定枠部の内側面に当接することによって、第１基板の主表面に沿う方向において可動構造体の移動量を制限することができる。   According to the invention of claim 9, the protrusion provided on the movable structure abuts on the inner surface of the fixed frame portion, thereby limiting the amount of movement of the movable structure in the direction along the main surface of the first substrate. Can do.

請求項１０の発明によれば、可動構造体に設けた突起が、第１基板の主表面に当接することによって、可動構造体が、第１基板の主表面側へ移動する移動量を制限することができる。   According to the tenth aspect of the present invention, the protrusion provided on the movable structure abuts on the main surface of the first substrate, so that the amount of movement of the movable structure on the main surface side of the first substrate is limited. be able to.

請求項１１の発明によれば、可動構造体に設けた突起がキャップ基板に当接することによって、可動構造体が、キャップ基板側（すなわち第１基板と反対側）へ移動する移動量を制限することができる。   According to the eleventh aspect of the present invention, the protrusion provided on the movable structure abuts against the cap substrate, thereby limiting the amount of movement of the movable structure toward the cap substrate (that is, the side opposite to the first substrate). be able to.

（ａ）は本実施形態の静電誘導型発電装置の断面図、（ｂ）は同上を構成する導電基板の下面図である。(A) is sectional drawing of the electrostatic induction type electric power generating apparatus of this embodiment, (b) is a bottom view of the conductive substrate which comprises the same. 同上を構成するプリント配線板の平面図である。It is a top view of the printed wiring board which comprises the same as the above. （ａ）〜（ｆ）は同上の発電動作を説明する説明図である。(A)-(f) is explanatory drawing explaining the electric power generation operation same as the above. （ａ）（ｂ）は同上の別の形態を示す概略断面図である。(A) (b) is a schematic sectional drawing which shows another form same as the above. （ａ）〜（ｃ）は同上のまた別の形態を示す概略断面図である。(A)-(c) is a schematic sectional drawing which shows another form same as the above. （ａ）〜（ｄ）は同上のさらに別の形態を示す概略断面図である。(A)-(d) is a schematic sectional drawing which shows another form same as the above.

以下に、本発明に係る静電誘導型発電装置の実施形態を図１〜図６に基づいて説明する。尚、以下の説明では特に断りがないかぎり、図１（ａ）に示す向きにおいて上下左右の方向を規定し、図１（ａ）の紙面に垂直な方向を前後方向として説明を行う。   Hereinafter, an embodiment of an electrostatic induction power generating device according to the present invention will be described with reference to FIGS. In the following description, unless otherwise specified, the vertical and horizontal directions are defined in the direction shown in FIG. 1A, and the direction perpendicular to the paper surface of FIG.

本実施形態の静電誘導型発電装置は、プリント配線板１と導電基板２とキャップ基板３からなる発電モジュール４と、ダイオードブリッジからなり発電モジュール４の出力を全波整流して負荷６に供給する全波整流回路５とを備えている。   The electrostatic induction power generation device according to the present embodiment is a power generation module 4 including a printed wiring board 1, a conductive substrate 2, and a cap substrate 3, and a diode bridge. The output of the power generation module 4 is full-wave rectified and supplied to a load 6. The full-wave rectifier circuit 5 is provided.

第１基板たるプリント配線板１は例えば負荷６の器体内部に固定される。プリント配線板１は、導電基板２に比べて十分広い面積を有しており、導電基板２に設けられた後述の電気接続パッド７ｂに電気的に接続される配線パターン１４が主表面（図１（ａ）の上面）１ａに設けられている。そして、この配線パターン１４に電気接続パッド７ｂを電気的に接続させた状態で、導電基板２がプリント配線板１の主表面１ａに接合される。   The printed wiring board 1 as the first substrate is fixed inside the container of the load 6, for example. The printed wiring board 1 has a sufficiently large area compared to the conductive substrate 2, and a wiring pattern 14 electrically connected to an electrical connection pad 7 b described later provided on the conductive substrate 2 is a main surface (FIG. 1). (Upper surface of (a)) 1a. The conductive substrate 2 is bonded to the main surface 1 a of the printed wiring board 1 in a state where the electrical connection pads 7 b are electrically connected to the wiring pattern 14.

第２基板たる導電基板２は例えばシリコン基板を加工して形成され、プリント配線板１の主表面１ａに接合される矩形枠状の固定枠部７と、固定枠部７の枠内に配置され、プリント配線板１の主表面１ａに沿う方向（主表面１ａの法線と直交する方向）において移動自在な状態で固定枠部７に支持される可動構造体８と、固定枠部７及び可動構造体８の間を連結するビーム（弾性支持部）９とが一体に形成されて構成される。   The conductive substrate 2 as the second substrate is formed by processing a silicon substrate, for example, and is disposed in the frame of the rectangular frame-shaped fixed frame portion 7 joined to the main surface 1a of the printed wiring board 1 and the fixed frame portion 7. The movable structure 8 supported by the fixed frame portion 7 in a movable state in the direction along the main surface 1a of the printed wiring board 1 (the direction perpendicular to the normal line of the main surface 1a), the fixed frame portion 7 and the movable frame A beam (elastic support portion) 9 for connecting the structures 8 is integrally formed.

可動構造体８は、図１（ａ）に示すように厚み寸法が固定枠部７に比べて小さい矩形板状に形成され、プリント配線板１およびキャップ基板３との間にそれぞれ隙間が設けられている。可動構造体８の四方の側面の一端側にはビーム９の一端が連結されている。各々のビーム９は、一端側が可動構造体８の各側面の一端部に連結される連結片９ａと、連結片９ａの他端部に一端が接続される平面視略Ｌ形の撓み片９ｂとが一体に形成されることで、平面視の形状が略Ｊ形に形成されている。撓み片９ｂは、連結片９ａの他端部から連結片９ａと直交する方向に延出し、さらにその先端が直交方向に延出することによって、可動構造体８の２つの側面に沿って配置され、撓み片９ｂの先端が固定枠部７の内側面に連結されている。このように可動構造体８は４本のビーム９によって固定枠部７に支持されることで、プリント配線板１の主表面１ａに沿う方向において移動自在となっており、プリント配線板１に外部から振動が加わっていない状態では図１及び図３（ａ）に示す中立位置に移動している。   As shown in FIG. 1A, the movable structure 8 is formed in a rectangular plate shape having a thickness dimension smaller than that of the fixed frame portion 7, and a gap is provided between the printed wiring board 1 and the cap substrate 3. ing. One end of the beam 9 is connected to one end side of the four side surfaces of the movable structure 8. Each beam 9 has a connecting piece 9a whose one end is connected to one end of each side surface of the movable structure 8, and a substantially L-shaped bending piece 9b whose one end is connected to the other end of the connecting piece 9a. Are formed integrally, and the shape in plan view is formed in a substantially J shape. The bending piece 9b extends along the two side surfaces of the movable structure 8 by extending from the other end of the connecting piece 9a in a direction orthogonal to the connecting piece 9a and further extending its tip in the orthogonal direction. The tip of the bending piece 9b is connected to the inner surface of the fixed frame portion 7. As described above, the movable structure 8 is supported by the fixed frame portion 7 by the four beams 9, so that it can move in the direction along the main surface 1 a of the printed wiring board 1. In the state where no vibration is applied, the actuator moves to the neutral position shown in FIGS. 1 and 3A.

可動構造体８におけるプリント配線板１との対向面（下側面）には、図１（ｂ）に示すように、平面視の形状が正方形に形成された複数個の第２電極１０，１１が互い違いにマトリクス状（例えば６行６列）に配列されている。   On the surface (lower side) of the movable structure 8 facing the printed wiring board 1, as shown in FIG. 1B, a plurality of second electrodes 10 and 11 having a square shape in plan view are formed. They are arranged alternately in a matrix (for example, 6 rows and 6 columns).

２種類の電極１０，１１のうち、電極１０は、例えばＳｉＯ２のような絶縁膜に電荷が注入されることによって、負の電荷が帯電させられたエレクトレット電極からなり、絶縁膜を介して可動構造体８の表面に形成されている。複数のエレクトレット電極１０は各々の列において１つおきに配置され、さらに隣り合う列同士でエレクトレット電極１０の配置が互い違いとなるように配置されている。 Of the two types of electrodes 10 and 11, the electrode 10 is composed of an electret electrode charged with a negative charge by injecting a charge into an insulating film such as SiO 2 , and is movable through the insulating film. It is formed on the surface of the structure 8. The plurality of electret electrodes 10 are arranged every other row in each row, and the electret electrodes 10 are arranged alternately in adjacent rows.

一方、可動電極１１は、可動構造体８の表面に導電膜を積層して形成され、後述の半田２７を介してグランドに接地された配線パターン１４に電気的に接続されている。なお、可動電極１１は、エレクトレット電極１０と後述する第１、第２固定電極１２，１３（第１電極）との間のギャップ量と、エレクトレット電極１０が設けられていない可動構造体８の部位と第１、第２固定電極１２，１３との間のギャップ量とを合わせるために設けられており、それぞれの対向部のバランスが良くなって、発電効率が向上するという利点がある。   On the other hand, the movable electrode 11 is formed by laminating a conductive film on the surface of the movable structure 8, and is electrically connected to the wiring pattern 14 that is grounded via a solder 27 described later. The movable electrode 11 includes a gap amount between the electret electrode 10 and first and second fixed electrodes 12 and 13 (first electrodes) described later, and a portion of the movable structure 8 where the electret electrode 10 is not provided. And the first and second fixed electrodes 12 and 13 are matched to each other, and there is an advantage that the power generation efficiency is improved because the balance between the opposing portions is improved.

固定枠部７の下側部の外周縁には段差部７ａが全周に亘って設けられており、この段差部７ａの下面には導電膜が積層されて電気接続パッド７ｂが形成されている。また固定枠部７の下面には、段差部７ａよりも下方への突出量が大きい脚部７ｃが設けられており、固定枠部７は、脚部７ｃの底面をプリント配線板１の主表面１ａに当接させた状態で、プリント配線板１上に載置される。   A stepped portion 7a is provided on the entire outer periphery of the lower side portion of the fixed frame portion 7, and a conductive film is laminated on the lower surface of the stepped portion 7a to form an electrical connection pad 7b. . Further, the lower surface of the fixed frame portion 7 is provided with a leg portion 7c having a protruding amount larger than the stepped portion 7a. The fixed frame portion 7 has the bottom surface of the leg portion 7c on the main surface of the printed wiring board 1. The printed circuit board 1 is placed on the printed wiring board 1 while being in contact with 1a.

固定枠部７の下側部の外周面には段差部７ａが設けられており、この段差部７ａの下面には、可動構造体８に設けられた可動電極１１に電気的に接続される電気接続パッド７ｂが設けられている。また固定枠部７の下面には、段差部７ａよりも下方への突出量が大きい脚部７ｃが設けられており、この脚部７ｃの底面がプリント配線板１の主表面１ａに当接する。   A step portion 7 a is provided on the outer peripheral surface of the lower side portion of the fixed frame portion 7, and the lower surface of the step portion 7 a is electrically connected to the movable electrode 11 provided on the movable structure 8. A connection pad 7b is provided. Further, a leg portion 7c having a larger downward projection than the stepped portion 7a is provided on the lower surface of the fixed frame portion 7, and the bottom surface of the leg portion 7c contacts the main surface 1a of the printed wiring board 1.

ここにおいて、固定枠部７の内側面には、可動構造体８の側面に対向する部位から、可動構造体８側に向かって突起１９が突設されている。突起１９は、可動構造体８の側面との間に所定の間隔を開けて対向しており、可動構造体８が許容範囲を超えて移動しようとすると可動構造体８が突起１９の先端に当接することで、可動構造体８の移動量が許容範囲内に制限されている。突起１９は、可動構造体８の四方の側面にそれぞれ対向して設けられているので、図１（ｂ）に示す向きにおいて可動構造体８の左右方向および上下方向の移動範囲が制限されることになり、過大な振動や衝撃が本発電装置に加えられた際に可動構造体８を支持するビーム９に無理な力が加わって、ビーム９などが破損するのを防止することができる。   Here, on the inner side surface of the fixed frame portion 7, a projection 19 protrudes from a portion facing the side surface of the movable structure 8 toward the movable structure 8 side. The protrusion 19 is opposed to the side surface of the movable structure 8 with a predetermined gap. When the movable structure 8 attempts to move beyond the allowable range, the movable structure 8 contacts the tip of the protrusion 19. By contacting, the moving amount of the movable structure 8 is limited within an allowable range. Since the protrusions 19 are provided so as to face the four side surfaces of the movable structure 8, respectively, the range of movement of the movable structure 8 in the horizontal direction and the vertical direction is limited in the direction shown in FIG. Thus, it is possible to prevent the beam 9 and the like from being damaged by applying an excessive force to the beam 9 that supports the movable structure 8 when an excessive vibration or impact is applied to the power generation device.

キャップ基板３は例えばガラス基板からなり、導電基板２と左右方向および前後方向の寸法が略同じ寸法に形成されている。キャップ基板３は、固定枠部７の上面に接合されて、固定枠部７の上側開口を塞いでおり、可動構造体８の上側面に対向して配置される。   The cap substrate 3 is made of, for example, a glass substrate, and is formed to have substantially the same dimensions as the conductive substrate 2 in the left-right direction and the front-rear direction. The cap substrate 3 is bonded to the upper surface of the fixed frame portion 7 to close the upper opening of the fixed frame portion 7 and is disposed to face the upper side surface of the movable structure 8.

プリント配線板１は例えばガラスエポキシ基板からなり、図２に示すようにプリント配線板１の主表面（上面）１ａには、導電基板２の電気接続パッド７ｂに電気的に接続される四角枠状の配線パターン１４が形成されている。また主表面１ａにおける配線パターン１４の内側領域には、図１及び図３（ａ）に示すように、可動構造体８が中立位置に存在する状態で可動電極１１に対向する部位に第１固定電極１２が形成されるとともに、可動構造体８が中立位置に存在する状態でエレクトレット電極１０に対向する部位に第２固定電極１３が形成されている。ここで、第１及び第２固定電極１２，１３も互い違いにマトリックス状（６行×６列）に配列されることになり、複数（例えば１８個）の第１固定電極１２が導体パターン１５を介して電極パッド１６に電気的に接続されるとともに、複数（例えば１８個）の第２固定電極１３が導体パターン１７を介して電極パッド１８に電気的に接続されている。尚、電極パッド１６，１８はそれぞれ図示しない導電路を介して全波整流回路５の入力端子５ａ，５ｂに電気的に接続されている。   The printed wiring board 1 is made of, for example, a glass epoxy board. As shown in FIG. 2, the main surface (upper surface) 1 a of the printed wiring board 1 has a rectangular frame shape that is electrically connected to the electrical connection pads 7 b of the conductive substrate 2. The wiring pattern 14 is formed. Further, in the inner region of the wiring pattern 14 on the main surface 1a, as shown in FIG. 1 and FIG. 3A, the first fixing is performed at a portion facing the movable electrode 11 in a state where the movable structure 8 exists in the neutral position. The electrode 12 is formed, and the second fixed electrode 13 is formed at a portion facing the electret electrode 10 in a state where the movable structure 8 exists at the neutral position. Here, the first and second fixed electrodes 12 and 13 are also alternately arranged in a matrix (6 rows × 6 columns), and a plurality of (for example, 18) first fixed electrodes 12 form the conductor pattern 15. The plurality of (for example, 18) second fixed electrodes 13 are electrically connected to the electrode pad 18 via the conductor pattern 17. The electrode pads 16 and 18 are electrically connected to the input terminals 5a and 5b of the full-wave rectifier circuit 5 through conductive paths (not shown), respectively.

ここで、プリント配線板１に外部から加えられた振動によって可動構造体８がプリント配線板１の主表面１ａと平行な方向に移動すると、第１固定電極１２及び第２固定電極１３がそれぞれエレクトレット電極１０と対向する部分の面積が変化するようになっており、これらの電極１２，１３から集電電極が構成されている。   Here, when the movable structure 8 moves in a direction parallel to the main surface 1a of the printed wiring board 1 by vibration applied to the printed wiring board 1 from the outside, the first fixed electrode 12 and the second fixed electrode 13 are respectively electrets. The area of the portion facing the electrode 10 changes, and the electrodes 12 and 13 constitute a collecting electrode.

次に本発電装置による発電動作を図３（ａ）〜（ｆ）に基づいて説明する。図３（ａ）（ｂ）に示すように可動構造体８が中立位置に位置する状態では、エレクトレット電極１０に第２固定電極１３が対向しており、静電誘導によって各々の第２固定電極１３にエレクトレット電極１０と逆極性の電荷（正の電荷）が誘導される。   Next, the power generation operation by this power generation device will be described with reference to FIGS. As shown in FIGS. 3A and 3B, in a state where the movable structure 8 is located at the neutral position, the second fixed electrode 13 is opposed to the electret electrode 10, and each second fixed electrode is caused by electrostatic induction. 13, a charge (positive charge) having a polarity opposite to that of the electret electrode 10 is induced.

発電装置に外部から加えられた振動に応じて可動構造体８が図３中の左方向に移動し、図３（ｃ）（ｄ）に示すように、エレクトレット電極１０が第１固定電極１２に対向する位置まで可動構造体８が変位すると、静電誘導によって各々の第１固定電極１２に、エレクトレット電極１０と逆極性の電荷（正の電荷）が誘導される。また第２固定電極１３は、エレクトレット電極１０に対向しなくなるので、初期状態や復位状態（図３（ａ）（ｅ）に示す状態）で第２固定電極１３に誘導されていた正の電荷が開放されて全波整流回路５に移動し、全波整流回路５により整流されて、電荷の移動に応じた電流が負荷６に流れる。   The movable structure 8 moves in the left direction in FIG. 3 according to the vibration applied to the power generation device from the outside, and the electret electrode 10 becomes the first fixed electrode 12 as shown in FIGS. When the movable structure 8 is displaced to the opposite position, a charge (positive charge) having a polarity opposite to that of the electret electrode 10 is induced in each first fixed electrode 12 by electrostatic induction. In addition, since the second fixed electrode 13 does not face the electret electrode 10, the positive charge induced in the second fixed electrode 13 in the initial state or the repositioning state (the state shown in FIGS. 3A and 3E) The full-wave rectifier circuit 5 is opened and rectified by the full-wave rectifier circuit 5, and a current corresponding to the movement of the charge flows to the load 6.

その後、図３（ｅ）（ｆ）に示すようにエレクトレット電極１０が第２固定電極１３に対向する位置に可動構造体８が復位すると、第２固定電極１３にエレクトレット電極１０と逆極性の電荷（正の電荷）が再び誘導される。また第１固定電極１２は、エレクトレット電極１０に対向しなくなるので、可動構造体８が図３（ｃ）（ｄ）に示す位置に変位した状態で、第１固定電極１２に誘導されていた正の電荷が開放されて全波整流回路５に移動し、全波整流回路５により整流されて、電荷の移動に応じた電流が負荷６に流れる。   After that, as shown in FIGS. 3E and 3F, when the movable structure 8 is restored to the position where the electret electrode 10 faces the second fixed electrode 13, the second fixed electrode 13 has a charge having a polarity opposite to that of the electret electrode 10. (Positive charge) is induced again. Further, since the first fixed electrode 12 does not face the electret electrode 10, the positive electrode that has been guided to the first fixed electrode 12 in a state where the movable structure 8 is displaced to the position shown in FIGS. Are released and moved to the full-wave rectifier circuit 5 and rectified by the full-wave rectifier circuit 5, and a current corresponding to the movement of the charge flows to the load 6.

以上のように本発明装置に外部から加わった振動によって、可動構造体８がプリント配線板１の主表面１ａに沿って振動すると、第１固定電極１２及び第２固定電極１３の両方で、それぞれエレクトレット電極１０と対向する部位の面積が変化するので、静電誘導により第１、第２固定電極１２，１３に誘導される電荷が変化して、発電が行われるのである。尚、図３では可動構造体８が中立位置から左方向へ変位する場合を例に説明を行ったが、主表面１ａと平行な平面内で可動構造体８が任意の方向に変位したとしても、第１固定電極１２及び第２固定電極１３の両方で、それぞれエレクトレット電極１０と対向する部位の面積が変化するので、静電誘導により第１、第２固定電極１２，１３に誘導される電荷が変化して、発電を行うことができる。また本実施形態では可動構造体８にエレクトレット電極１０を複数個設けるとともに、プリント配線板１に各々のエレクトレット電極１０に対応して同数の第１及び第２固定電極１２，１３を設けているので、可動構造体８の移動によって発生する電荷の変化量を大きくでき、それによって発電量を増やすことができる。   As described above, when the movable structure 8 vibrates along the main surface 1a of the printed wiring board 1 due to vibration applied from the outside to the device of the present invention, both the first fixed electrode 12 and the second fixed electrode 13 respectively. Since the area of the part facing the electret electrode 10 changes, the electric charges induced in the first and second fixed electrodes 12 and 13 by electrostatic induction change and power generation is performed. In FIG. 3, the case where the movable structure 8 is displaced leftward from the neutral position has been described as an example. However, even if the movable structure 8 is displaced in an arbitrary direction within a plane parallel to the main surface 1a. In both the first fixed electrode 12 and the second fixed electrode 13, the areas of the portions facing the electret electrode 10 change, so that the charges induced in the first and second fixed electrodes 12 and 13 by electrostatic induction. Can be changed to generate electricity. In the present embodiment, a plurality of electret electrodes 10 are provided on the movable structure 8, and the same number of first and second fixed electrodes 12 and 13 are provided on the printed wiring board 1 corresponding to each electret electrode 10. The amount of change in charge generated by the movement of the movable structure 8 can be increased, thereby increasing the amount of power generation.

本実施形態の静電誘導型の発電装置は以上説明したような構成を有しており、可動構造体８の移動量を制限する規制手段として、固定枠部７の内側面において可動構造体８と対向する部位に突設された突起１９を備えているので、この突起１９に可動構造体８が当接することによって、プリント配線板１の主表面に沿う方向において可動構造体８の移動量を制限することができる。したがって、本発電装置に過大な振動や衝撃が加わった場合でも、可動構造物８の移動量が許容範囲内に収まり、ビーム９に無理な力が加わって破損するのを防止することができる。   The electrostatic induction power generation device according to the present embodiment has the above-described configuration, and the movable structure 8 is provided on the inner surface of the fixed frame portion 7 as a restricting unit that restricts the amount of movement of the movable structure 8. Since the protrusion 19 is provided so as to protrude from a portion opposed to the protrusion 19, the movable structure 8 abuts the protrusion 19 so that the amount of movement of the movable structure 8 in the direction along the main surface of the printed wiring board 1 is reduced. Can be limited. Therefore, even when an excessive vibration or impact is applied to the power generation device, the moving amount of the movable structure 8 is within the allowable range, and it is possible to prevent the beam 9 from being damaged by applying an excessive force.

なお、図１〜図３に示した発電装置は、規制手段として固定枠部７の内側面に突設された突起１９を備えているが、規制手段を固定枠部７に設けた突起１９に限定する趣旨のものではなく、規制手段の他の形態を図４〜図６に基づいて説明する。尚、図４〜図６は発電装置を模式的に示した図であり、また図示を簡単にするため、プリント配線板１及び導電基板２にそれぞれ電極が３個ずつしか配置されていないが、規制手段以外は上述した図１〜図３の発電装置と同様の構成を有しているので、共通する構成要素には同一の符号を付して、その説明は省略する。   The power generator shown in FIGS. 1 to 3 is provided with a protrusion 19 projecting from the inner surface of the fixed frame portion 7 as the restricting means, but the restricting means is provided on the protrusion 19 provided on the fixed frame portion 7. Other forms of the restricting means will be described with reference to FIGS. 4 to 6 are diagrams schematically showing the power generation apparatus, and for simplicity of illustration, only three electrodes are arranged on the printed wiring board 1 and the conductive substrate 2, respectively. Since it has the structure similar to the electric power generating apparatus of FIGS. 1-3 mentioned above except a control means, the same code | symbol is attached | subjected to a common component and the description is abbreviate | omitted.

図４（ａ）（ｂ）はプリント配線板１に規制手段が設けられた形態を示し、図４（ａ）の発電装置では、プリント配線板１の主表面において可動構造体８と対向する部位に、可動構造体８側に突出する突起２０が設けられ、この突起２０で、可動構造体８の移動量を制限する規制手段を構成している。ここで、突起２０は、可動構造体８の下面との間に所定の間隔を開けて対向しており、可動構造体８が許容範囲を超えて下方に移動しようとすると可動構造体８が突起２０の先端に当接することによって、可動構造体８がプリント配線板１側へ移動する移動量を許容範囲内に制限できるから、ビーム９の破損を防止できるとともに、可動構造体８に設けられたエレクトレット電極１０及び可動電極１１とプリント配線板１に設けられた第１、第２固定電極１２，１３が電気的に接触するのを防止できる。尚、図４（ａ）に示す発電装置は、規制手段として突起２０のみを備えているが、図１、図５及び図６に示す発電装置が備える１乃至複数種類の規制手段と組み合わせてもよい。   4 (a) and 4 (b) show a form in which the restricting means is provided on the printed wiring board 1, and in the power generation device of FIG. 4 (a), a portion facing the movable structure 8 on the main surface of the printed wiring board 1. In addition, a protrusion 20 protruding toward the movable structure 8 is provided, and the protrusion 20 constitutes a restricting means for limiting the movement amount of the movable structure 8. Here, the protrusion 20 is opposed to the lower surface of the movable structure 8 with a predetermined gap, and the movable structure 8 protrudes when the movable structure 8 attempts to move downward beyond an allowable range. The amount of movement of the movable structure 8 to the printed wiring board 1 side can be limited within an allowable range by contacting the tip of 20, so that damage to the beam 9 can be prevented and the movable structure 8 is provided on the movable structure 8. It is possible to prevent the electret electrode 10 and the movable electrode 11 from electrically contacting the first and second fixed electrodes 12 and 13 provided on the printed wiring board 1. The power generation device shown in FIG. 4 (a) includes only the protrusion 20 as the restricting means. However, the power generation device shown in FIG. 4A may be combined with one or more types of restricting means included in the power generation device shown in FIGS. Good.

また図４（ｂ）に示す発電装置では、プリント配線板１の主表面において、可動構造体８と対向する部位に可動構造体８側に突出する突起２０が設けられるとともに、ビーム９と対向する部位にビーム９側に突出する突起２１が設けられ、これらの突起２０，２１から可動構造体８の移動量を制限する規制手段を構成している。ここで、突起２０が可動構造体８の下面との間に所定の間隔を開けて対向し、突起２１もビーム９との間に所定の間隔を開けて対向しており、可動構造体８が許容範囲を超えて下方へ移動しようとすると、突起２０に可動構造体８が当接するとともに、突起２１にビーム９が当接することによって、可動構造体８がプリント配線板１側（下側）へ移動する移動量を許容範囲内に制限できるから、ビーム９の破損を防止できるとともに、可動構造体８に設けられたエレクトレット電極１０及び可動電極１１とプリント配線板１に設けられた第１、第２固定電極１２，１３が電気的に接触するのを防止できる。尚、図４（ｂ）に示す発電装置では、ビーム９に対向配置される突起２１を、可動構造体８に対向配置される突起２０と共に備えているが、規制手段として突起２１のみを備えるようにしてもよく、また図１、図５及び図６に示す発電装置が備える１乃至複数種類の規制手段と組み合わせてもよい。   4B, the main surface of the printed wiring board 1 is provided with a protrusion 20 projecting toward the movable structure 8 at a portion facing the movable structure 8 and opposed to the beam 9. Protrusions 21 projecting toward the beam 9 are provided at the site, and restricting means for restricting the amount of movement of the movable structure 8 from these protrusions 20, 21 is configured. Here, the projection 20 is opposed to the lower surface of the movable structure 8 with a predetermined gap, and the projection 21 is also opposed to the beam 9 with a predetermined gap. When moving downward beyond the allowable range, the movable structure 8 comes into contact with the protrusion 20 and the beam 9 comes into contact with the protrusion 21, so that the movable structure 8 moves to the printed wiring board 1 side (lower side). Since the amount of movement can be limited within an allowable range, damage to the beam 9 can be prevented, and the electret electrode 10 and the movable electrode 11 provided on the movable structure 8 and the first and second electrodes provided on the printed wiring board 1 can be prevented. 2 It is possible to prevent the fixed electrodes 12 and 13 from being in electrical contact. 4B includes the protrusions 21 that are arranged to face the beam 9 together with the protrusions 20 that are arranged to face the movable structure 8, but only the protrusions 21 are provided as the restricting means. Alternatively, it may be combined with one or a plurality of types of regulating means provided in the power generator shown in FIGS. 1, 5, and 6.

次に、図５（ａ）〜（ｃ）を参照してキャップ基板３に規制手段が設けられた実施形態を説明する。図５（ａ）に示す発電装置では、固定枠部７におけるプリント配線板１と反対側の面（図５中の上面）に接合され、可動構造体８に対してプリント配線板１と反対側に配置されるキャップ基板３を備え、このキャップ基板３で規制手段を構成している。ここで、キャップ基板３は可動構造体８の上面との間に所定の間隔を開けて対向しており、可動構造体８が許容範囲を超えて上方に移動しようとすると、可動構造体８がキャップ基板３に当接することによって、可動構造体８の上方への移動量を許容範囲内に制限することができ、ビーム９に無理な力が加わって破損するのを防止することができる。尚、図５（ａ）に示す発電装置は、規制手段としてキャップ基板３を備えているが、図１、図４及び図６に示す発電装置が備える１乃至複数の規制手段と組み合わせてもよい。   Next, with reference to FIGS. 5A to 5C, an embodiment in which the cap substrate 3 is provided with a restricting means will be described. In the power generator shown in FIG. 5A, the fixed frame portion 7 is bonded to the surface opposite to the printed wiring board 1 (upper surface in FIG. 5), and is opposite to the printed wiring board 1 with respect to the movable structure 8. The cap substrate 3 is disposed on the cap substrate 3, and the cap substrate 3 constitutes a regulating means. Here, the cap substrate 3 is opposed to the upper surface of the movable structure 8 with a predetermined gap, and when the movable structure 8 attempts to move upward beyond the allowable range, the movable structure 8 By contacting the cap substrate 3, the amount of upward movement of the movable structure 8 can be limited within an allowable range, and it is possible to prevent the beam 9 from being damaged due to an excessive force. 5A includes the cap substrate 3 as the restricting means, but may be combined with one or a plurality of restricting means included in the power generating apparatus shown in FIGS. 1, 4, and 6. .

また図５（ｂ）に示す発電装置では、キャップ基板３において可動構造体８と対向する部位に、可動構造体８側に向かって突出する突起２２が設けられ、この突起２２で規制手段が構成されている。ここで、キャップ基板３の突起２２は可動構造体８の上面との間に所定の間隔を開けて対向しており、可動構造体８が許容範囲を超えて上方に移動しようとすると、可動構造体８が突起２２に当接することによって、可動構造体８の上方への移動量を許容範囲内に制限することができ、ビーム９に無理な力が加わって破損するのを防止することができる。尚、図５（ｂ）に示す発電装置は、規制手段としてキャップ基板３に設けられた突起２２を備えているが、図１、図４及び図６に示す発電装置が備える１乃至複数の規制手段と組み合わせてもよい。   Further, in the power generation device shown in FIG. 5B, a protrusion 22 that protrudes toward the movable structure 8 is provided at a portion of the cap substrate 3 that faces the movable structure 8, and the protrusion 22 constitutes a restricting unit. Has been. Here, the protrusion 22 of the cap substrate 3 is opposed to the upper surface of the movable structure 8 with a predetermined gap, and when the movable structure 8 tries to move upward beyond an allowable range, the movable structure 8 When the body 8 abuts against the protrusion 22, the amount of upward movement of the movable structure 8 can be limited within an allowable range, and the beam 9 can be prevented from being damaged due to an excessive force. . Note that the power generation device shown in FIG. 5B includes the protrusion 22 provided on the cap substrate 3 as the restriction means, but one or more restriction devices included in the power generation device shown in FIGS. 1, 4, and 6. You may combine with a means.

また更に図５（ｃ）に示す発電装置では、キャップ基板３において可動構造体８と対向する部位に可動構造体８側に向かって突出する突起２２が設けられるとともに、ビーム９と対向する部位にビーム９側に向かって突出する突起２３が設けられ、これらの突起２２，２３で規制手段が構成されている。ここで、キャップ基板３の突起２２は可動構造体８の上面との間に所定の間隔を開けて対向するとともに、突起２３はビーム９との間に所定の間隔を開けて対向しており、可動構造体８が許容範囲を超えて上方に移動しようとすると、可動構造体８又はビーム９が突起２２，２３に当接することで、可動構造体８の上方への移動量を許容範囲内に制限することができ、ビーム９に無理な力が加わって破損するのを防止することができる。尚、図５（ｃ）に示す発電装置は、ビーム９に対向配置される突起２３を、可動構造体８に対向配置される突起２２と共に備えているが、規制手段として突起２３のみを備えるようにしてもよいし、図１、図４及び図６に示す発電装置が備える１乃至複数の規制手段と組み合わせてもよい。   Further, in the power generation device shown in FIG. 5C, the cap substrate 3 is provided with a protrusion 22 projecting toward the movable structure 8 at a portion facing the movable structure 8 and at a portion facing the beam 9. Projections 23 projecting toward the beam 9 are provided, and these projections 22 and 23 constitute a restricting means. Here, the protrusion 22 of the cap substrate 3 is opposed to the upper surface of the movable structure 8 with a predetermined gap, and the protrusion 23 is opposed to the beam 9 with a predetermined gap. When the movable structure 8 tries to move upward beyond the allowable range, the movable structure 8 or the beam 9 comes into contact with the protrusions 22 and 23 so that the amount of upward movement of the movable structure 8 falls within the allowable range. Therefore, it is possible to prevent the beam 9 from being damaged by applying an excessive force. 5C includes the projections 23 arranged to face the beam 9 together with the projections 22 arranged to face the movable structure 8, but only the projections 23 are provided as restricting means. Alternatively, it may be combined with one or a plurality of regulating means provided in the power generator shown in FIGS. 1, 4, and 6.

次に、図６（ａ）〜（ｄ）を参照して、可動構造体８自体に規制手段が設けられた実施形態を説明する。図６（ａ）に示す発電装置では、可動構造体８において固定枠部７の内側面と対向する部位、すなわち四方の側面に、固定枠部７の内側面に向かって突出する突起２４がそれぞれ設けられており、この突起２４で規制手段が構成されている。突起２４は固定枠部７の内側面との間に所定の間隔を開けて対向しており、プリント配線板１の主表面１ａに沿う方向において可動構造体８が許容範囲を超えて移動しようとすると、突起２４が固定枠部７の内側面に当接することで、可動構造体８の移動量が許容範囲内に制限されるから、ビーム９無理な力が加わって破損するのを防止することができる。尚、図６（ａ）に示す発電装置は規制手段として突起２４のみを備えているが、図１、図４、図５及び図６（ｂ）（ｃ）に示す発電装置が備える１乃至複数の規制手段と組み合わせてもよい。   Next, with reference to FIGS. 6A to 6D, an embodiment in which the movable structure 8 itself is provided with a restricting means will be described. In the power generation device shown in FIG. 6A, the protrusions 24 projecting toward the inner side surface of the fixed frame portion 7 are respectively provided on the movable structure 8 at portions facing the inner side surface of the fixed frame portion 7, that is, the four side surfaces. The restricting means is constituted by the protrusion 24. The protrusion 24 is opposed to the inner side surface of the fixed frame portion 7 with a predetermined gap, and the movable structure 8 tries to move beyond the allowable range in the direction along the main surface 1a of the printed wiring board 1. Then, since the protrusion 24 abuts on the inner surface of the fixed frame portion 7, the moving amount of the movable structure 8 is limited within an allowable range, so that the beam 9 is prevented from being damaged due to excessive force. Can do. The power generator shown in FIG. 6A includes only the protrusion 24 as the restricting means. However, one or more power generators shown in FIGS. 1, 4, 5, and 6B and 6C are provided. You may combine with the regulation means.

また図６（ｂ）に示す発電装置では、可動構造体８においてプリント配線板１の主表面１ａと対向する部位に、プリント配線板１側に向かって突出する突起２５が設けられ、この突起２５で規制手段が構成されている。突起２５は、プリント配線板１の主表面１ａとの間に所定の間隔を開けて対向しており、可動構造体８が許容範囲を超えて下側へ移動しようとすると、突起２５がプリント配線板１の主表面１ａに当接することで、可動構造体８の下側への移動量が許容範囲内に制限されるので、ビーム９に無理な力が加わって破損するのを防止することができる。尚、図６（ｂ）に示す発電装置は規制手段として突起２５のみを備えているが、図１、図４、図５及び図６（ａ）（ｃ）に示す発電装置が備える１乃至複数の規制手段と組み合わせてもよい。   Further, in the power generation device shown in FIG. 6B, a protrusion 25 that protrudes toward the printed wiring board 1 is provided at a portion of the movable structure 8 that faces the main surface 1 a of the printed wiring board 1. The restriction means is configured. The protrusion 25 is opposed to the main surface 1a of the printed wiring board 1 with a predetermined gap, and when the movable structure 8 attempts to move downward beyond the allowable range, the protrusion 25 is Since the amount of downward movement of the movable structure 8 is limited within an allowable range by contacting the main surface 1a of the plate 1, it is possible to prevent the beam 9 from being damaged due to an excessive force. it can. The power generation device shown in FIG. 6 (b) includes only the protrusion 25 as the restricting means. However, the power generation device shown in FIGS. 1, 4, 5, and 6 (a) and 6 (c) includes one or more power generation devices. You may combine with the regulation means.

また図６（ｃ）に示す発電装置では、可動構造体８においてキャップ基板３と対向する部位に、キャップ基板３側に向かって突出する突起２６が設けられ、この突起２６で規制手段が構成されている。突起２６は、キャップ基板３との間に所定の間隔を開けて対向しており、可動構造体８が許容範囲を超えて上側へ移動しようとすると、突起２６がキャップ基板３に当接することで、可動構造体８の上側への移動量が許容範囲内に制限されるので、ビーム９に無理な力が加わって破損するのを防止することができる。尚、図６（ｃ）に示す発電装置は規制手段として突起２６のみを備えているが、図１、図４、図５及び図６（ａ）（ｂ）に示す発電装置が備える１乃至複数の規制手段と組み合わせてもよい。   Further, in the power generation device shown in FIG. 6C, a protrusion 26 that protrudes toward the cap substrate 3 is provided at a portion of the movable structure 8 that faces the cap substrate 3, and the protrusion 26 constitutes a restricting means. ing. The protrusion 26 is opposed to the cap substrate 3 with a predetermined gap. When the movable structure 8 tries to move upward beyond the allowable range, the protrusion 26 comes into contact with the cap substrate 3. Since the amount of movement of the movable structure 8 to the upper side is limited within an allowable range, it is possible to prevent the beam 9 from being damaged by applying an excessive force. The power generator shown in FIG. 6 (c) includes only the protrusion 26 as the restricting means. However, the power generator shown in FIGS. 1, 4, 5, and 6 (a) and 6 (b) includes one or more power generators. You may combine with the regulation means.

また図６（ｄ）に示す発電装置では、図６（ａ）〜（ｃ）で説明した突起２４，２５，２６が可動構造体８に全て設けられており、これらの突起２４，２５，２６で規制手段が構成されている。ここで、突起２４，２５，２６によって、プリント配線板１の主表面１ａに沿う方向、プリント配線板１側（下側）に移動する方向、キャップ基板３側（上側）に移動する方向の各々について移動量が許容範囲内に制限されるから、それによってビーム９の撓み量も制限され、ビーム９などの破損を防止することができる。   Further, in the power generation apparatus shown in FIG. 6D, the protrusions 24, 25, and 26 described in FIGS. 6A to 6C are all provided on the movable structure 8, and these protrusions 24, 25, and 26 are provided. The restriction means is configured. Here, by the projections 24, 25, and 26, the direction along the main surface 1a of the printed wiring board 1, the direction moving to the printed wiring board 1 side (lower side), and the direction moving to the cap substrate 3 side (upper side), respectively. Since the amount of movement of the beam 9 is limited within an allowable range, the amount of deflection of the beam 9 is thereby limited, and damage to the beam 9 and the like can be prevented.

尚、図６（ｄ）に示す発電装置は規制手段として突起２４，２５，２６を備えているが、図１、図４及び図５に示す発電装置が備える１乃至複数の規制手段と組み合わせてもよい。   The power generation device shown in FIG. 6 (d) includes protrusions 24, 25, and 26 as restricting means, but is combined with one or more restricting means provided in the power generation device shown in FIGS. Also good.

また、上述の各実施形態では、第２基板たる導電基板２に設けた第２電極をエレクトレット電極としているが、対向配置される第１、第２電極のうち、第１基板たるプリント配線板１に設けた第１電極をエレクトレット電極としてもよい。またエレクトレット電極１０には負電荷が蓄積されているが、正電荷を蓄積させるようにしてもよい。   In each of the above-described embodiments, the second electrode provided on the conductive substrate 2 as the second substrate is an electret electrode. Of the first and second electrodes arranged to face each other, the printed wiring board 1 as the first substrate. It is good also considering the 1st electrode provided in as an electret electrode. Further, although negative charges are accumulated in the electret electrode 10, positive charges may be accumulated.

１ プリント配線板（第１基板）
１ａ 主表面
２ 導電基板（第２基板）
３ キャップ基板
７ 固定枠部
８ 可動構造体
９ ビーム（弾性支持部）
１０ エレクトレット電極（第２電極）
１１ 可動電極（第２電極）
１２ 第１固定電極（第１電極）
１３ 第２固定電極（第１電極）
１９ 突起 1 Printed wiring board (first board)
1a Main surface 2 Conductive substrate (second substrate)
3 Cap substrate 7 Fixed frame part 8 Movable structure 9 Beam (elastic support part)
10 Electret electrode (second electrode)
11 Movable electrode (second electrode)
12 First fixed electrode (first electrode)
13 Second fixed electrode (first electrode)
19 Protrusions

Claims (11)

第１電極が主表面に配置される第１基板と、前記第１電極と対向する部位に前記第１電極と離間して第２電極が配置された可動構造体と、前記主平面に沿って移動自在に前記可動構造体を支持する弾性支持部とを備え、対向配置される第１、第２電極のうちの何れか一方は、電荷を帯電させたエレクトレット電極からなり、前記可動構造体の移動量を制限する規制手段を備えたことを特徴とする静電誘導型発電装置。   A first substrate on which the first electrode is disposed on the main surface, a movable structure in which the second electrode is disposed at a position facing the first electrode and spaced apart from the first electrode, and along the main plane An elastic support portion that supports the movable structure so as to be movable, and one of the first and second electrodes arranged opposite to each other includes an electret electrode charged with an electric charge, An electrostatic induction power generating apparatus comprising a restricting means for limiting a movement amount. 前記第１基板の主表面に接合される第２基板を備え、当該第２基板は、第１基板に底面が固定される四角枠状の固定枠部と、固定枠部の枠内に配置される前記可動構造体と、前記可動構造体が移動可能な状態で前記可動構造体を固定枠部に支持させる前記弾性支持部とが一体に形成されて構成されたことを特徴とする請求項１記載の静電誘導型発電装置。   A second substrate bonded to the main surface of the first substrate, the second substrate being disposed within a frame of the fixed frame portion and a rectangular frame-like fixed frame portion whose bottom surface is fixed to the first substrate; 2. The movable structure according to claim 1, wherein the movable structure is integrally formed with the elastic support portion that supports the movable structure on a fixed frame portion in a state in which the movable structure is movable. The electrostatic induction power generating device described. 前記規制手段として、前記固定枠部の内側面において前記可動構造体と対向する部位に突設された突起を備えることを特徴とする請求項２記載の静電誘導型発電装置。   The electrostatic induction power generating device according to claim 2, further comprising: a protrusion projecting at a portion facing the movable structure on the inner surface of the fixed frame portion as the restricting means. 前記規制手段として、前記第１基板の主表面において前記可動構造体と対向する部位から前記可動構造体側に突出する突起を備えることを特徴とする請求項２又は３の何れか１項に記載の静電誘導型発電装置。   4. The protrusion according to claim 2, further comprising: a protrusion protruding toward the movable structure from a portion facing the movable structure on the main surface of the first substrate as the restricting unit. 5. Static induction generator. 前記規制手段として、前記第１基板の主表面において前記弾性支持部と対向する部位から前記弾性支持部側に突出する突起を備えることを特徴とする請求項２乃至４の何れか１項に記載の静電誘導型発電装置。   5. The protrusion according to claim 2, further comprising a protrusion protruding toward the elastic support portion from a portion facing the elastic support portion on the main surface of the first substrate. Electrostatic induction generator. 前記規制手段として、前記固定枠部における前記第１基板と反対側の面に接合され、前記可動構造体に対して第１基板と反対側に配置されるキャップ基板を備えたことを特徴とする請求項２乃至５の何れか１項に記載の静電誘導型発電装置。   The regulating means includes a cap substrate that is bonded to a surface of the fixed frame portion opposite to the first substrate and is disposed on the opposite side of the first substrate with respect to the movable structure. The electrostatic induction power generating device according to any one of claims 2 to 5. 前記キャップ基板には、前記可動構造体と対向する部位に、前記可動構造体に向かって突出する突起が設けられたことを特徴とする請求項６記載の静電誘導型発電装置。   The electrostatic induction power generating device according to claim 6, wherein the cap substrate is provided with a protrusion that protrudes toward the movable structure at a portion facing the movable structure. 前記キャップ基板には、前記弾性支持部と対向する部位に、前記弾性支持部側に突出する突起が設けられたことを特徴とする請求項６又は７の何れか１項に記載の静電誘導型発電装置。   The electrostatic induction according to claim 6, wherein the cap substrate is provided with a protrusion that protrudes toward the elastic support portion at a portion facing the elastic support portion. Type generator. 前記規制手段として、前記可動構造体において前記固定枠部の内側面と対向する部位から、前記固定枠部の内側面に向かって突出する突起を備えることを特徴とする請求項２乃至８の何れか１項に記載の静電誘導型発電装置。   9. The projection according to claim 2, further comprising: a protrusion projecting from a portion of the movable structure facing the inner surface of the fixed frame portion toward the inner surface of the fixed frame portion. The electrostatic induction power generating device according to claim 1. 前記規制手段として、前記可動構造体において前記第１基板の主表面と対向する部位から、前記主表面に向かって突出する突起を備えることを特徴とする請求項２乃至９の何れか１項に記載の静電誘導型発電装置。   10. The method according to claim 2, further comprising: a protrusion protruding toward the main surface from a portion of the movable structure facing the main surface of the first substrate as the restricting unit. The electrostatic induction power generating device described. 前記固定枠部における前記第１基板と反対側の面に接合され、前記可動構造体に対して第１基板と反対側に配置されるキャップ基板を備え、前記規制手段として、前記可動構造体において前記キャップ基板と対向する部位から、前記キャップ基板に向かって突出する突起を備えることを特徴とする請求項２乃至１０の何れか１項に記載の静電誘導型発電装置。   A cap substrate that is bonded to a surface of the fixed frame portion opposite to the first substrate and is disposed on the opposite side of the first substrate with respect to the movable structure. 11. The electrostatic induction power generating device according to claim 2, further comprising a protrusion protruding toward the cap substrate from a portion facing the cap substrate.
JP2009127052A 2009-05-26 2009-05-26 Electrostatic induction power generation device Withdrawn JP2010279106A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
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WO2013057897A1 (en) * 2011-10-19 2013-04-25 パナソニック株式会社 Oscillation generator, rotor, and communication device
US20140339954A1 (en) * 2013-05-17 2014-11-20 Panasonic Corporation Vibration power generator
CN104412502A (en) * 2012-07-10 2015-03-11 欧姆龙株式会社 Vibration electrical power generation device
JP2018183049A (en) * 2017-04-05 2018-11-15 株式会社トライフォース・マネジメント Power generation element and power generation device
US20190131890A1 (en) * 2017-04-05 2019-05-02 Tri-Force Management Corporation Power generating element and power generating device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013057897A1 (en) * 2011-10-19 2013-04-25 パナソニック株式会社 Oscillation generator, rotor, and communication device
CN104412502A (en) * 2012-07-10 2015-03-11 欧姆龙株式会社 Vibration electrical power generation device
US20140339954A1 (en) * 2013-05-17 2014-11-20 Panasonic Corporation Vibration power generator
JP2018183049A (en) * 2017-04-05 2018-11-15 株式会社トライフォース・マネジメント Power generation element and power generation device
US20190131890A1 (en) * 2017-04-05 2019-05-02 Tri-Force Management Corporation Power generating element and power generating device
US10734922B2 (en) * 2017-04-05 2020-08-04 Tri-Force Management Corporation Power generating element and power generating device

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