JP2010212649A - Image sensor - Google Patents

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JP2010212649A
JP2010212649A JP2009203482A JP2009203482A JP2010212649A JP 2010212649 A JP2010212649 A JP 2010212649A JP 2009203482 A JP2009203482 A JP 2009203482A JP 2009203482 A JP2009203482 A JP 2009203482A JP 2010212649 A JP2010212649 A JP 2010212649A
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focus detection
photoelectric conversion
conversion unit
microlens
light
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JP5532766B2 (en
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Satoshi Suzuki
智 鈴木
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Nikon Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an image sensor that outputs a high precision focus detection signal by eliminating noise component such as stray light and the like which is received by a non-light receiving region of a photoelectric conversion unit. <P>SOLUTION: The image sensor includes: a microlens; and a plurality of focus detection pixels having the photoelectric conversion unit that receives a luminous flux by which the microlens is transmitted so as to output a focus detection signal. In the image sensor, a light receiving region that receives the luminous flux by which the microlens is transmitted on a light receiving surface of the photoelectric conversion unit is elliptical. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、撮像素子に関する。   The present invention relates to an image sensor.

撮像素子の多数の撮像画素中に焦点検出画素を混在させて、撮像画素から撮像信号を得ると共に、焦点検出画素から焦点検出信号を得る撮像装置が知られている（例えば、特許文献１参照）。その撮像装置の有する撮像素子に配置された焦点検出画素においては、フォトダイオードが、撮影レンズの射出瞳の領域からの光束を選択的に受光し、光電変換を行う。   2. Description of the Related Art An imaging device is known in which a focus detection pixel is mixed in a large number of imaging pixels of an imaging element to obtain an imaging signal from the imaging pixel and obtain a focus detection signal from the focus detection pixel (see, for example, Patent Document 1). . In the focus detection pixel arranged in the image pickup element of the image pickup apparatus, the photodiode selectively receives the light beam from the exit pupil region of the photographing lens and performs photoelectric conversion.

特開２００８−３１２０７３号公報JP 2008-312073 A

しかし、焦点検出画素位置が撮影レンズの光軸から離間するにつれて、すなわち、撮影光学系のＦ値に依存して、フォトダイオードの受光領域は、射出瞳の形状と共に楕円形に変形する。その場合、フォトダイオードの受光領域も楕円形となる一方、従来のフォトダイオードの受光部の形状は円形、半円形、または矩形等であるため、非受光領域部分には迷光等のノイズ成分を受光することから、精度の高い焦点検出信号を得るためには、焦点検出画素出力に対する補正量が大きくなるという問題があった。   However, as the focus detection pixel position moves away from the optical axis of the photographing lens, that is, depending on the F value of the photographing optical system, the light receiving region of the photodiode is deformed into an ellipse together with the shape of the exit pupil. In that case, the light receiving area of the photodiode is also elliptical, while the light receiving portion of the conventional photodiode is circular, semicircular, or rectangular, so that noise components such as stray light are received in the non-light receiving area. Therefore, in order to obtain a focus detection signal with high accuracy, there has been a problem that a correction amount with respect to the focus detection pixel output becomes large.

請求項１に記載の発明による撮像素子は、マイクロレンズと、マイクロレンズを透過したマイクロレンズ透過光束を受光して焦点検出信号を出力する光電変換部を有する複数の焦点検出画素を備え、光電変換部の受光面上でマイクロレンズ透過光束を受光する受光領域が楕円形状であることを特徴とする。   An image pickup device according to a first aspect of the present invention includes a microlens and a plurality of focus detection pixels each having a photoelectric conversion unit that receives a microlens transmitted light beam that has passed through the microlens and outputs a focus detection signal. The light receiving area for receiving the light transmitted through the microlens on the light receiving surface of the part is elliptical.

本発明によれば、精度の高い焦点検出信号を出力することができる。   According to the present invention, it is possible to output a focus detection signal with high accuracy.

一実施の形態の撮像素子を搭載したレンズ交換式のデジタルスチルカメラの全体構成を示した断面図である。It is sectional drawing which showed the whole structure of the digital still camera of an interchangeable lens mounting the image pick-up element of one Embodiment. 本デジタルスチルカメラの撮影画面を模式的に示した正面図である。It is the front view which showed typically the imaging | photography screen of this digital still camera. 撮像素子の一部を示した正面図である。It is the front view which showed a part of imaging device. 図３に示した焦点検出画素の焦点検出光学系の要部を示した断面図である。It is sectional drawing which showed the principal part of the focus detection optical system of the focus detection pixel shown in FIG. 図３の撮像画素の構成を示した断面図である。It is sectional drawing which showed the structure of the imaging pixel of FIG. 図３の焦点検出画素の構成を示した断面図である。It is sectional drawing which showed the structure of the focus detection pixel of FIG. 焦点検出画素における遮光部材を有している光電変換部の正面図である。It is a front view of the photoelectric conversion part which has the light shielding member in a focus detection pixel. 焦点検出画素における遮光部材を有していない光電変換部の正面図である。It is a front view of the photoelectric conversion part which does not have the light shielding member in a focus detection pixel. 焦点検出画素列を形成する各焦点検出画素の光電変換部の形状の特徴を模式的に示した図である。It is the figure which showed typically the characteristic of the shape of the photoelectric conversion part of each focus detection pixel which forms a focus detection pixel row | line.

本発明の一実施の形態の撮像素子を説明する。図１は、一実施の形態の撮像素子を搭載したレンズ交換式のデジタルスチルカメラの全体構成を示した断面図である。図１におい
て、デジタルスチルカメラ１００は、交換式の撮影レンズ１１０とカメラボディ１２０と
を有し、この交換レンズ１１０はマウント部１３０を介して、カメラボディ１２０に着脱可能に装着される。 An image sensor according to an embodiment of the present invention will be described. FIG. 1 is a cross-sectional view showing the overall configuration of a lens interchangeable digital still camera equipped with an image sensor according to an embodiment. In FIG. 1, a digital still camera 100 has an interchangeable photographic lens 110 and a camera body 120, and the interchangeable lens 110 is detachably attached to the camera body 120 via a mount portion 130.

交換レンズ１１０は、ズームレンズとして構成された撮影光学系１１１と、この撮影光学系１１１内に配置された絞り装置１１２と、レンズ駆動制御装置１１３等とを備える。撮影光学系１１１は、ズーミング用レンズ１１１ａとフォーカシング用レンズ１１１ｂとを有する。レンズ駆動制御装置１１３は、不図示のマイクロコンピューターやメモリや駆動制御回路などから構成され、フォーカシング用レンズ１１１ｂの焦点調節の為の駆動制御と絞り装置１１２の開口径調節の為の駆動制御とを行うと共に、ズーミング用レンズ１１１ａの位置検出とフォーカシング用レンズ１１１ｂの位置検出と絞り装置１１２の開口径の検出などを行う。   The interchangeable lens 110 includes a photographing optical system 111 configured as a zoom lens, a diaphragm device 112 disposed in the photographing optical system 111, a lens drive control device 113, and the like. The photographing optical system 111 includes a zooming lens 111a and a focusing lens 111b. The lens drive control device 113 includes a microcomputer (not shown), a memory, a drive control circuit, and the like, and performs drive control for adjusting the focus of the focusing lens 111b and drive control for adjusting the aperture diameter of the aperture device 112. In addition, detection of the position of the zooming lens 111a, detection of the position of the focusing lens 111b, detection of the aperture diameter of the diaphragm 112, and the like are performed.

カメラボディ１２０は、本発明の一実施の形態の固体撮像素子１２１と、ボディ駆動制御装置１２２と、液晶表示素子駆動回路１２３と、駆動回路１２３によって駆動される液晶表示素子１２４と、この液晶表示素子１２４を観察する接眼レンズ１２５と、撮像素子１２１で撮像された画像データを記録するメモリカード１２６とを備える。   The camera body 120 includes a solid-state image sensor 121, a body drive control device 122, a liquid crystal display element drive circuit 123, a liquid crystal display element 124 driven by the drive circuit 123, and the liquid crystal display according to an embodiment of the present invention. An eyepiece 125 for observing the element 124 and a memory card 126 for recording image data captured by the image sensor 121 are provided.

撮像素子１２１は、後に詳述するように、撮像信号、即ち画像信号を出力する複数の撮像画素と、焦点検出信号を出力する複数の焦点検出画素とを有する。複数の焦点検出画素と複数の焦点検出画素とは、複数の焦点検出画素が複数の焦点検出画素中に散在又は混在するように、２次元的に配置されている。なお、焦点検出画素は、後に詳述するように、瞳分割位相差式の焦点検出装置用の焦点検出画素である。   As will be described in detail later, the imaging element 121 includes a plurality of imaging pixels that output an imaging signal, that is, an image signal, and a plurality of focus detection pixels that output a focus detection signal. The plurality of focus detection pixels and the plurality of focus detection pixels are two-dimensionally arranged such that the plurality of focus detection pixels are scattered or mixed in the plurality of focus detection pixels. The focus detection pixel is a focus detection pixel for a pupil division phase difference type focus detection device, as will be described in detail later.

液晶表示素子１２４と接眼レンズ１２５とは、電子ビューファインダーを構成し、撮影者は、接眼レンズ１２５を介して液晶表示素子１２４に表示される被写体のスルー画像を観察することができる。   The liquid crystal display element 124 and the eyepiece lens 125 constitute an electronic viewfinder, and the photographer can observe a through image of the subject displayed on the liquid crystal display element 124 via the eyepiece lens 125.

ボディ駆動制御装置１２２は、不図示のマイクロコンピューターやメモリや駆動制御回路などから構成され、撮像素子１２１の駆動制御と、撮像素子１２１の撮像信号や焦点検出信号の読み出しと、画像信号の画像処理及び記録と、焦点検出信号に基づく焦点検出演算と、露出制御などのカメラ全体の動作制御等とを行う。   The body drive control device 122 includes a microcomputer (not shown), a memory, a drive control circuit, and the like. And recording, focus detection calculation based on the focus detection signal, and overall camera operation control such as exposure control.

ボディ駆動制御装置１２２とレンズ駆動制御装置１１３とは、マウント部１３０に設けられた電気接点１３１を介して、カメラボディ１２０と交換レンズ１１０との間でのレンズ情報信号とカメラ情報信号との授受を行う。   The body drive control device 122 and the lens drive control device 113 exchange lens information signals and camera information signals between the camera body 120 and the interchangeable lens 110 via electrical contacts 131 provided on the mount unit 130. I do.

次に、このレンズ交換式デジタルスチルカメラの動作の概略を説明する。交換レンズ１１０の撮影光学系１１１は、被写体像を撮像素子１２１に形成し、撮像素子１２１は、撮像画素から撮像信号を出力すると共に焦点検出画素から焦点検出信号を出力して、これらの撮像信号と焦点検出信号とをボディ駆動制御装置１２２に送出する。ボディ駆動制御装置１２２は、焦点検出信号に基づきデフォーカス量を算出し、このデフォーカス量を、電気接点１３１を介してレンズ駆動制御装置１１３に送出する。レンズ駆動制御装置１１３は、このデフォーカス量に基づいてフォーカシング用レンズ１１１ｂのレンズ駆動量を算出して、このレンズ駆動量に応じてフォーカシング用レンズ１１１ｂを合焦位置に駆動する。   Next, an outline of the operation of the interchangeable lens digital still camera will be described. The imaging optical system 111 of the interchangeable lens 110 forms a subject image on the imaging device 121. The imaging device 121 outputs an imaging signal from the imaging pixel and outputs a focus detection signal from the focus detection pixel, and these imaging signals. And a focus detection signal are sent to the body drive control device 122. The body drive control device 122 calculates a defocus amount based on the focus detection signal, and sends this defocus amount to the lens drive control device 113 via the electrical contact 131. The lens drive control device 113 calculates the lens drive amount of the focusing lens 111b based on this defocus amount, and drives the focusing lens 111b to the in-focus position according to this lens drive amount.

ボディ駆動制御装置１２２は、更に撮像信号に基づいてスルー画像を作成して液晶表示素子駆動回路１２３を介して液晶表示素子１２４に表示させると共に、シャッターレリーズ信号に応じて撮像信号に所定の画像処理を施して画像データを作成し、これをメモリカード１２６に記録する。   The body drive control device 122 further creates a through image based on the imaging signal and displays it on the liquid crystal display element 124 via the liquid crystal display element driving circuit 123, and performs predetermined image processing on the imaging signal in accordance with the shutter release signal. To create image data and record it on the memory card 126.

図２は、本デジタルスチルカメラ１００の撮影画面を示したものである。図２において、撮影画面２００には全面に渡り複数の焦点検出エリアが形成されている。この例では１７個の焦点検出エリアが形成され、具体的には、焦点検出エリア２０１、２０１ａ、２０１ｂ、２０２、２０２ａ、２０２ｂ、２０６、２０６ａ、２０６ｂ、２０７、２０７ａ、２０７ｂが図２において横方向に延在し、焦点検出エリア２０３、２０３ａ、２０３ｂ、２０４、２０４ａ、２０４ｂ、２０５、２０５ａ、２０５ｂ、２０８、２０８ａ、２０８ｂ、２０９、２０９ａ、２０９ｂが縦方向に延在している。この撮影画面２００は撮像素子１２１の撮像面に対応しており、焦点検出エリア２０１〜２０７ｂの各々に対応する撮像素子１２１の領域には、複数の焦点検出画素が配列されている。   FIG. 2 shows a shooting screen of the digital still camera 100. In FIG. 2, a plurality of focus detection areas are formed over the entire surface of the shooting screen 200. In this example, 17 focus detection areas are formed. Specifically, the focus detection areas 201, 201a, 201b, 202, 202a, 202b, 206, 206a, 206b, 207, 207a, and 207b are horizontal in FIG. The focus detection areas 203, 203a, 203b, 204, 204a, 204b, 205, 205a, 205b, 208, 208a, 208b, 209, 209a, and 209b extend in the vertical direction. The photographing screen 200 corresponds to the imaging surface of the image sensor 121, and a plurality of focus detection pixels are arranged in the area of the image sensor 121 corresponding to each of the focus detection areas 201 to 207b.

図３は、撮像素子１２１の一部を示した正面図である。図３において、撮像素子１２１の一部１２１ａには、多数の撮像画素２１０が２次元状に配置されている。撮像画素２１０は、赤（Ｒ）画素と緑（Ｇ）画素と青（Ｂ）画素とを含み、これらの赤画素と緑画素と青画素とはベイヤー配列に従い規則的に配列されている。各撮像画素２１０は光電変換部２１０ａを有する。複数の焦点検出画素２２０は縦方向に配列され、焦点検出画素列２１５でを形成する。撮像素子１２１における焦点検出画素列２１５は、例えば図２に示した撮影画面２００の縦方向の焦点検出エリア２０５に対応する。この場合、焦点検出画素列２１５は、撮影レンズの光軸から離間した位置に配置されていることとなる。なお、複数の焦点検出画素２２０は、ベイヤー配列された撮像画素２１０の一部を焦点検出画素２２０によって置き換えたように、配置されている。   FIG. 3 is a front view showing a part of the image sensor 121. In FIG. 3, a large number of imaging pixels 210 are two-dimensionally arranged on a part 121 a of the imaging element 121. The imaging pixel 210 includes a red (R) pixel, a green (G) pixel, and a blue (B) pixel, and the red pixel, the green pixel, and the blue pixel are regularly arranged according to a Bayer arrangement. Each imaging pixel 210 has a photoelectric conversion unit 210a. The plurality of focus detection pixels 220 are arranged in the vertical direction and form a focus detection pixel row 215. The focus detection pixel column 215 in the image sensor 121 corresponds to, for example, the focus detection area 205 in the vertical direction of the shooting screen 200 illustrated in FIG. In this case, the focus detection pixel row 215 is arranged at a position separated from the optical axis of the photographing lens. The plurality of focus detection pixels 220 are arranged such that a part of the image pickup pixels 210 arranged in the Bayer array is replaced with the focus detection pixels 220.

複数の焦点検出画素２２０は、複数の焦点検出画素２２０Ａと複数の焦点検出画素２２０Ｂとから構成され、これらの焦点検出画素２２０Ａ、２２０Ｂは互いに、縦方向に交互に配置されている。焦点検出画素２２０Ａは、画素の上方位置に位置する小型の光電変換部２２０ａを有し、焦点検出画素２２０Ｂは画素の下方位置に位置する小型の光電変換部２２０ｂを有する。このように、焦点検出画素２２０Ａの光電変換部２２０ａ及び焦点検出画素２２０Ｂの光電変換部２２０ｂの大きさは、それぞれ撮像画素２１０の光電変換部２１０ａの大きさのほぼ半分程度に定められている。   The plurality of focus detection pixels 220 includes a plurality of focus detection pixels 220A and a plurality of focus detection pixels 220B, and these focus detection pixels 220A and 220B are alternately arranged in the vertical direction. The focus detection pixel 220A has a small photoelectric conversion unit 220a located above the pixel, and the focus detection pixel 220B has a small photoelectric conversion unit 220b located below the pixel. As described above, the size of the photoelectric conversion unit 220a of the focus detection pixel 220A and the size of the photoelectric conversion unit 220b of the focus detection pixel 220B are determined to be approximately half the size of the photoelectric conversion unit 210a of the imaging pixel 210, respectively.

なお、焦点検出画素列２１５が撮影レンズの光軸から離間しているため、光電変換部２２０ａの形状は楕円形となり、撮影レンズの光軸からの距離に依存した形状、すなわち、撮影光学系のＦ値に応じた形状となる。その楕円形の短径の延伸方向は、焦点検出画素列２１５の延伸方向、すなわち焦点検出画素列２１５を形成する焦点検出画素２２０の並び方向と一致する。また、撮像素子１２１は有限領域であるから、楕円の長径と短径との比の値は所定の範囲内の値であり、具体的には凡そ１〜４である。従来の光電変換部の形状は、円形、半円形、または矩形等であったが、非受光領域部分には迷光等のノイズ成分を受光することから、光電変換部２２０ａの形状を、後述する射出瞳の第１の部分または第２の部分の形状に合わせて楕円形とし、焦点検出画素出力の補正量を従来よりも低減している。   Since the focus detection pixel row 215 is separated from the optical axis of the photographing lens, the photoelectric conversion unit 220a has an elliptical shape, which depends on the distance from the optical axis of the photographing lens, that is, the photographing optical system. The shape corresponds to the F value. The extending direction of the elliptical minor axis coincides with the extending direction of the focus detection pixel column 215, that is, the alignment direction of the focus detection pixels 220 forming the focus detection pixel column 215. Further, since the imaging element 121 is a finite region, the value of the ratio between the major axis and the minor axis of the ellipse is a value within a predetermined range, specifically about 1 to 4. The shape of the conventional photoelectric conversion unit is circular, semi-circular, rectangular or the like, but noise components such as stray light are received in the non-light-receiving region portion, so that the shape of the photoelectric conversion unit 220a will be described later. An elliptical shape is formed in accordance with the shape of the first part or the second part of the pupil, and the correction amount of the focus detection pixel output is reduced as compared with the prior art.

図９は、撮像素子１２１における焦点検出画素列を形成する各焦点検出画素の光電変換部の形状の特徴を模式的に示した図である。説明の便宜上、図９は、各焦点検出画素列には４個ずつの焦点検出画素が配置される図とした。上述したように、焦点検出画素列が撮影レンズの光軸から離間するにつれて、光電変換部の受光領域は、射出瞳の形状と共に楕円形に変形する。そこで、図９に示すように、焦点検出画素の光電変換部の楕円形状を、焦点検出画素列が撮影レンズの光軸から離間するにつれて、受光領域に合わせて扁平率が高くなるように構成する。たとえば、撮影レンズの光軸付近の焦点検出画素列２１４においては、焦点検出画素の光電変換部の形状は略円形であるが、撮影レンズの光軸からやや離間した焦点検出画素列２１５においては、焦点検出画素２２０Ａ、２２０Ｂの光電変換部２２０ａ、２２０ｂの形状は扁平な楕円形である。   FIG. 9 is a diagram schematically illustrating the characteristics of the shape of the photoelectric conversion unit of each focus detection pixel forming the focus detection pixel row in the image sensor 121. For convenience of explanation, FIG. 9 is a diagram in which four focus detection pixels are arranged in each focus detection pixel column. As described above, as the focus detection pixel array is separated from the optical axis of the photographing lens, the light receiving region of the photoelectric conversion unit is deformed into an ellipse together with the shape of the exit pupil. Therefore, as shown in FIG. 9, the elliptical shape of the photoelectric conversion unit of the focus detection pixel is configured so that the flatness increases in accordance with the light receiving region as the focus detection pixel row is separated from the optical axis of the photographing lens. . For example, in the focus detection pixel row 214 near the optical axis of the photographing lens, the shape of the photoelectric conversion unit of the focus detection pixel is substantially circular, but in the focus detection pixel row 215 slightly separated from the optical axis of the photographing lens, The photoelectric conversion units 220a and 220b of the focus detection pixels 220A and 220B have a flat elliptical shape.

このように、同一の撮像素子における焦点検出画素の光電変換部の形状は、その焦点検出画素が配置される焦点検出画素列に応じて異なる。焦点検出画素列が撮影レンズの光軸から離間するにつれて扁平率が高くなる焦点検出画素の光電変換部の楕円形状の長径と短径の比の値は、通常のデジタルスチルカメラの撮像素子では凡そ２〜３であることが好ましい。   As described above, the shape of the photoelectric conversion unit of the focus detection pixel in the same image sensor varies depending on the focus detection pixel array in which the focus detection pixel is arranged. The ratio of the major axis to the minor axis of the elliptical shape of the photoelectric conversion unit of the focus detection pixel, in which the flatness increases as the focus detection pixel array moves away from the optical axis of the photographic lens, is approximately the value of an image sensor of a normal digital still camera. It is preferable that it is 2-3.

図４は、図３に示した焦点検出画素２２０の焦点検出光学系の要部を示した断面図である。図４において、焦点検出画素２２０ａの光電変換部２２０ａは、撮影光学系の射出瞳２４０の第１の部分２４０ａを透過した光束２４１をマイクロレンズアレイ２５０を介して受光し、焦点検出画素２２０ｂの光電変換部２２０ｂは、射出瞳２４０の第２の部分２４０ｂを透過した光束２４２をマイクロレンズアレイ２５０を介して受光する。こうして、複数の焦点検出画素２２０ａの光電変換部２２０ａの焦点検出信号列と複数の焦点検出画素２２０ｂの光電変換部２２０ｂの焦点検出信号列との位相差を測定することによって、デフォーカス量を算出することができる。   FIG. 4 is a cross-sectional view showing the main part of the focus detection optical system of the focus detection pixel 220 shown in FIG. In FIG. 4, the photoelectric conversion unit 220a of the focus detection pixel 220a receives the light beam 241 transmitted through the first portion 240a of the exit pupil 240 of the photographing optical system via the microlens array 250, and the photoelectric conversion of the focus detection pixel 220b. The conversion unit 220 b receives the light beam 242 transmitted through the second portion 240 b of the exit pupil 240 through the microlens array 250. In this way, the defocus amount is calculated by measuring the phase difference between the focus detection signal sequence of the photoelectric conversion unit 220a of the plurality of focus detection pixels 220a and the focus detection signal sequence of the photoelectric conversion unit 220b of the plurality of focus detection pixels 220b. can do.

次に、本発明に係る撮像素子の実施の形態を図５〜図７を用いて説明する。図５は図３の撮像画素の構成を示した断面図である。撮像画素２１０は、光電変換部２１０ａと遮光マスク２６１と平坦化層２６２と色フィルター２６３と平坦化層２６４とマイクロレンズ２６５とを有する。   Next, an embodiment of an image sensor according to the present invention will be described with reference to FIGS. FIG. 5 is a cross-sectional view showing the configuration of the imaging pixel of FIG. The imaging pixel 210 includes a photoelectric conversion unit 210a, a light shielding mask 261, a planarization layer 262, a color filter 263, a planarization layer 264, and a microlens 265.

この構成を詳述すると、半導体基板２６０には光電変換部２１０ａが形成され、この光電変換部２１０ａの直ぐ上には遮光マスク２６１が設けられている。この遮光マスク２６１は光電変換部２１０ａの外周囲を遮光して、光電変換部２１０ａの受光領域を規定する。こうして、遮光マスク２６１の開口部２６１ａは、光電変換部２１０ａの受光領域を規定するので、図３の撮像画素２１０の光電変換部２１０ａの大きさに相当している。遮光マスク２６１の上には平坦化層２６２が積層され、この平坦化層２６２の上には色フィルター２６３が形成されている。これらの色フィルター２６３は図３に示した赤（Ｒ）画素２１０、緑（Ｇ）画素２１０、青（Ｂ）画素２１０に応じた分光特性を有する。色フィルター２６３の上には平坦化層２６４が積層され、この平坦化層２６４の上には図４に示したマイクロレンズアレイ２５０の各マイクロレンズ２６５が配置されている。   More specifically, the photoelectric conversion unit 210a is formed on the semiconductor substrate 260, and a light shielding mask 261 is provided immediately above the photoelectric conversion unit 210a. The light shielding mask 261 shields the outer periphery of the photoelectric conversion unit 210a and defines a light receiving region of the photoelectric conversion unit 210a. Thus, the opening 261a of the light shielding mask 261 defines the light receiving area of the photoelectric conversion unit 210a and corresponds to the size of the photoelectric conversion unit 210a of the imaging pixel 210 in FIG. A planarizing layer 262 is stacked on the light shielding mask 261, and a color filter 263 is formed on the planarizing layer 262. These color filters 263 have spectral characteristics corresponding to the red (R) pixel 210, the green (G) pixel 210, and the blue (B) pixel 210 shown in FIG. A planarizing layer 264 is laminated on the color filter 263, and each microlens 265 of the microlens array 250 shown in FIG. 4 is disposed on the planarizing layer 264.

色フィルター２６３は、高屈折の無機材料と低屈折の無機材料とを多層積層したフォトニック結晶色フィルターである。高屈折の無機材料としてはＴｉＯ２が使用され、低屈折無機材料としてはＳｉＯ２が使用される。このフォトニック結晶色フィルターにあっては、多層構造の高屈折材料ＴｉＯ２と低屈折材料ＳｉＯ２とのそれぞれの膜厚を調整することによって、赤、緑及び青の分光特性を持った色フィクターを作成することができる。なお、高屈折の無機材料及び低屈折無機材料は、それぞれ、ＴｉＯ２及びＳｉＯ２が限るものではなく、その他の無機材料を使用することもできる。例えば、ＴｉＯ２の代わりにＳｉＮを使用することもできる。 The color filter 263 is a photonic crystal color filter in which a high refractive inorganic material and a low refractive inorganic material are laminated in multiple layers. TiO 2 is used as the high refractive inorganic material, and SiO 2 is used as the low refractive inorganic material. In this photonic crystal color filter, color fractors having spectral characteristics of red, green and blue are adjusted by adjusting the film thicknesses of the high refractive material TiO 2 and the low refractive material SiO 2 having a multilayer structure. Can be created. The high refractive inorganic material and the low refractive inorganic material are not limited to TiO 2 and SiO 2 , and other inorganic materials can be used. For example, SiN can be used instead of TiO 2 .

図６は図３の焦点検出画素の構成を示した断面図である。焦点検出画素２２０ａ、２２０ｂは、光電変換部２２０ａ、２２０ｂと遮光マスク２６１と平坦化層２６２と減光フィルター２６６と平坦化層２６４とマイクロレンズ２６５とを有する。   6 is a cross-sectional view showing the configuration of the focus detection pixel of FIG. The focus detection pixels 220a and 220b include photoelectric conversion units 220a and 220b, a light shielding mask 261, a planarization layer 262, a neutral density filter 266, a planarization layer 264, and a microlens 265.

この構成を詳述すると、半導体基板２６０には焦点検出画素２２０ａの光電変換部２２０ａと焦点検出画素２２０ｂの光電変換部２２０ｂがそれぞれ形成され、これらの光電変換部２２０ａ、２２０ｂの直ぐ上には遮光マスク２６１が設けられている。この遮光マスク２６１は光電変換部２２０ａのほぼ半分と光電変換部２２０ｂのほぼ半分とを遮光して、光電変換部２２０ａ、２２０ｂの受光領域を規定する。こうして、遮光マスク２６１の開口部２６１ａは、光電変換部２２０ａ、２２０ｂの受光領域を規定するので、図３の焦点検出画素２２０ａ、２２０ｂの光電変換部２２０ａ、２２０ｂの大きさに相当している。   More specifically, the photoelectric conversion unit 220a of the focus detection pixel 220a and the photoelectric conversion unit 220b of the focus detection pixel 220b are respectively formed on the semiconductor substrate 260, and light shielding is performed immediately above these photoelectric conversion units 220a and 220b. A mask 261 is provided. The light shielding mask 261 shields approximately half of the photoelectric conversion unit 220a and approximately half of the photoelectric conversion unit 220b, thereby defining the light receiving regions of the photoelectric conversion units 220a and 220b. Thus, the opening 261a of the light shielding mask 261 defines the light receiving area of the photoelectric conversion units 220a and 220b, and thus corresponds to the size of the photoelectric conversion units 220a and 220b of the focus detection pixels 220a and 220b in FIG.

遮光マスク２６１の上には平坦化層２６２が積層され、この平坦化層２６２の上には減光フィルター２６６が形成されている。この減光フィルター２６６は、撮像画素２１０の色フィルター２６３と同一の層に形成されている、即ち、色フィルター２６３の高さと同一の高さ位置に形成されている。この減光フィルター２６６もフォトニック結晶フィルターであり、色フィルター２６３と同一の無機材料の多層構造体である。即ち、減光フィルター２６６は高屈折の無機材料ＴｉＯ２と低屈折の無機材料ＳｉＯ２との多層積層体である。減光フィルター２６６は、可視光域の全体を透過する分光特性を有する、即ち、赤画素の色フィルターの分光特性と緑画素の色フィルターの分光特性と青画素の色フィルターの分光特性とを加算したような分光特性を有する。 A planarizing layer 262 is stacked on the light shielding mask 261, and a neutral density filter 266 is formed on the planarizing layer 262. The neutral density filter 266 is formed in the same layer as the color filter 263 of the imaging pixel 210, that is, is formed at the same height position as the height of the color filter 263. The neutral density filter 266 is also a photonic crystal filter, and is a multilayer structure of the same inorganic material as the color filter 263. That is, the neutral density filter 266 is a multilayer laminate of a high refractive inorganic material TiO 2 and a low refractive inorganic material SiO 2 . The neutral density filter 266 has spectral characteristics that transmit the entire visible light range, that is, adds the spectral characteristics of the color filter of the red pixel, the spectral characteristics of the color filter of the green pixel, and the spectral characteristics of the color filter of the blue pixel. Spectral characteristics as described above.

この減光フィルター２６６の働きは、次の通りである。即ち、撮像画素２１０は色フィルター２６３が存在するので、撮像画素２１０の光電変換部２１０ａへの入射光量がこの色フィルター２６３によって低減される。他方、焦点検出画素２２０ａ、２２０ｂには色フィルターが存在しない為に、焦点検出画素２２０ａ、２２０ｂの出力信号レベルが撮像画素２１０の出力信号レベルを上回り、撮像画素２１０に先立って飽和する虞がある。このような焦点検出画素２２０ａ、２２０ｂの出力信号レベルの飽和を防止する為に、減光フィルター２６６は、焦点検出画素２２０ａ、２２０ｂの光電変換部２２０ａ、２２０ｂへの入射光量が撮像画素２１０の光電変換部２１０ａへの入射光量以下になるように、光電変換部２２０ａ、２２０ｂへの入射光量を低減する。   The function of the neutral density filter 266 is as follows. That is, since the imaging pixel 210 has the color filter 263, the amount of light incident on the photoelectric conversion unit 210 a of the imaging pixel 210 is reduced by the color filter 263. On the other hand, since there is no color filter in the focus detection pixels 220a and 220b, the output signal level of the focus detection pixels 220a and 220b may exceed the output signal level of the imaging pixel 210 and may be saturated prior to the imaging pixel 210. . In order to prevent such saturation of the output signal level of the focus detection pixels 220 a and 220 b, the neutral density filter 266 has a light incident on the photoelectric conversion units 220 a and 220 b of the focus detection pixels 220 a and 220 b so The amount of incident light on the photoelectric conversion units 220a and 220b is reduced so as to be equal to or less than the amount of incident light on the converter 210a.

なお、撮像画素２１０と焦点検出画素２２０ａ、２２０ｂの製造は、以下の通りである。先ず、半導体基板２６０に光電変換部２１０ａ、２２０ａ、２２０ｂが同時に形成される。その後に遮光マスク２６１が形成され、更に平坦化層２６２が積層される。その後に、Ｒ、Ｇ、Ｂの色フィルター２６３が順次、高屈折無機材料と低屈折無機材料との積層によって作成される。その後に、減光フィルター２６６が色フィルター２６３と同一の無機材料の積層によって作成される。勿論、先に減光フィルター２６６を作成した後に、色フィルター２６３を作成することもできる。その後に、平坦化層２６４とマイクロレンズ２６５が作成される。このように、色フィルター２６３と減光フィルター２６６とを同一の無機材料で作成することができるので、撮像素子１２１の製造工程が単純化される。   The manufacturing of the imaging pixel 210 and the focus detection pixels 220a and 220b is as follows. First, the photoelectric conversion units 210 a, 220 a, and 220 b are simultaneously formed on the semiconductor substrate 260. Thereafter, a light shielding mask 261 is formed, and a planarization layer 262 is further laminated. Thereafter, R, G, and B color filters 263 are sequentially formed by stacking a high refractive inorganic material and a low refractive inorganic material. Thereafter, the neutral density filter 266 is formed by laminating the same inorganic material as the color filter 263. Of course, the color filter 263 can be created after the neutral density filter 266 is created first. Thereafter, a planarization layer 264 and a microlens 265 are formed. In this way, the color filter 263 and the neutral density filter 266 can be made of the same inorganic material, so that the manufacturing process of the image sensor 121 is simplified.

図７に示したように、焦点検出画素２２０Ａ、２２０Ｂの遮光マスク２６１は、射出瞳２４０の第１の部分２４０ａまたは第２の部分２４０ｂの形状に合わせた楕円形の開口２６１ａを有し、マイクロレンズ２６５を透過した光束２８４の外縁部を遮光している。したがって、光電変換部は、開口２６１ａからの入射光を受光すると、受光領域の形状が射出瞳２４０の第１の部分２４０ａまたは第２の部分２４０ｂの形状に合わせて楕円形となる。これにより、迷光を受光して焦点検出信号にノイズが重畳されることを防止する効果を奏する。   As shown in FIG. 7, the light-shielding mask 261 of the focus detection pixels 220A and 220B has an elliptical opening 261a that matches the shape of the first portion 240a or the second portion 240b of the exit pupil 240, and is microscopic. The outer edge of the light beam 284 that has passed through the lens 265 is shielded from light. Therefore, when the photoelectric conversion unit receives incident light from the opening 261a, the shape of the light receiving region becomes an elliptical shape in accordance with the shape of the first portion 240a or the second portion 240b of the exit pupil 240. This produces an effect of receiving stray light and preventing noise from being superimposed on the focus detection signal.

なお、焦点検出画素２２０Ａ、２２０Ｂの光電変換部２２０ａ、２２０ｂは、入射光を受光するに際して、受光領域の形状が射出瞳２４０の第１の部分２４０ａまたは第２の部分２４０ｂの形状に合わせて楕円形となれば良いので、図８（ａ）および（ｂ）に示したように、遮光マスク２６１を用いずに、光電変換部２２０ａ、２２０ｂの形状自体を楕円形としても良い。また、焦点検出画素２２０Ａについては、図８（ａ）に示した態様で構成する代わりに、図８（ｃ）に示したように、遮光マスク２６１によって下半分を被覆した態様で構成し、被覆されていない光電変換部２２０ａの形状自体を楕円形としても良い。同様に、焦点検出画素２２０Ｂについても、遮光マスク２６１によって上半分を被覆した態様で構成し、被覆されていない光電変換部２２０ｂの形状自体を楕円形としても良い。   Note that when the photoelectric conversion units 220a and 220b of the focus detection pixels 220A and 220B receive incident light, the shape of the light receiving region is elliptical according to the shape of the first portion 240a or the second portion 240b of the exit pupil 240. 8A and 8B, the photoelectric conversion units 220a and 220b may have an elliptical shape without using the light shielding mask 261. As shown in FIGS. Further, the focus detection pixel 220A is configured in a mode in which the lower half is covered with a light shielding mask 261, as shown in FIG. 8C, instead of being configured in the mode shown in FIG. The shape of the photoelectric conversion unit 220a that is not used may be an ellipse. Similarly, the focus detection pixel 220B may be configured in such a manner that the upper half is covered with the light shielding mask 261, and the shape of the photoelectric conversion unit 220b that is not covered may be an ellipse.

上述した実施の形態によると、焦点検出画素２２０Ａ、２２０Ｂの光電変換部２２０ａ、２２０ｂにおける受光領域の形状を射出瞳の第１の部分２４０ａ、第２の部分２４０ｂの形状に合わせたことにより、迷光等のノイズ成分を受光する非受光領域を排除したので、撮像素子１２１は精度の高い焦点検出信号を出力することができるという作用効果が得られる。   According to the above-described embodiment, stray light is obtained by matching the shape of the light receiving region in the photoelectric conversion units 220a and 220b of the focus detection pixels 220A and 220B with the shapes of the first portion 240a and the second portion 240b of the exit pupil. Since the non-light-receiving region that receives the noise component such as the above is excluded, the imaging element 121 can output a focus detection signal with high accuracy.

なお、上述した実施の形態においては、遮光マスクによって被覆された光電変換部の受光領域の形状、または被覆されていない光電変換部の形状自体を、円形を含む楕円形としたが、正多角形を含む多角形のような近似した形状としても良い。   In the above-described embodiment, the shape of the light receiving region of the photoelectric conversion unit covered by the light shielding mask or the shape of the photoelectric conversion unit not covered itself is an ellipse including a circle, but is a regular polygon. An approximate shape such as a polygon including

１２１ 撮像素子、２１０ 撮像画素、２１０ａ 光電変換部、２１４、２１５ 焦点検出画素列、２２０ 焦点検出画素、２２０ａ、２２０ｂ 光電変換部、２６０ 半導体基板、２６１ 遮光マスク、２６１ａ 開口、２６３ 色フィルター、２６５ マイクロレンズ、２６６ 減光フィルター
121 imaging element, 210 imaging pixel, 210a photoelectric conversion unit, 214, 215 focus detection pixel array, 220 focus detection pixel, 220a, 220b photoelectric conversion unit, 260 semiconductor substrate, 261 light shielding mask, 261a aperture, 263 color filter, 265 micro Lens, 266 neutral density filter

Claims (6)

マイクロレンズと、前記マイクロレンズを透過したマイクロレンズ透過光束を受光して焦点検出信号を出力する光電変換部を有する複数の焦点検出画素を備え、
前記光電変換部の受光面上で前記マイクロレンズ透過光束を受光する受光領域が楕円形状であることを特徴とする撮像素子。 A plurality of focus detection pixels having a microlens and a photoelectric conversion unit that receives a microlens transmission light beam that has passed through the microlens and outputs a focus detection signal;
An image pickup device, wherein a light receiving region for receiving the light beam transmitted through the microlens on the light receiving surface of the photoelectric conversion unit has an elliptical shape. 請求項１に記載の撮像素子において、
前記焦点検出画素は、前記マイクロレンズ及び前記光電変換部の間に配置された、楕円形上の開口を有する遮光部材をさらに有し、
前記遮光部材が前記マイクロレンズ透過光束の外縁部分を遮光することにより、前記受光領域が楕円形状であることを特徴とする撮像素子。 The imaging device according to claim 1,
The focus detection pixel further includes a light shielding member having an elliptical opening disposed between the microlens and the photoelectric conversion unit,
The imaging device, wherein the light-shielding member shields an outer edge portion of the light beam transmitted through the microlens so that the light-receiving region has an elliptical shape. 請求項１に記載の撮像素子において、
前記受光面の形状が楕円形状であることを特徴とする撮像素子。 The imaging device according to claim 1,
An image sensor, wherein the light receiving surface has an elliptical shape. 請求項１〜３のいずれか１項に記載の撮像素子において、
前記複数の焦点検出画素は、配置される位置に応じて前記楕円形状が異なることを特徴とする撮像素子。 The imaging device according to any one of claims 1 to 3,
The imaging device, wherein the plurality of focus detection pixels have different elliptical shapes depending on positions where they are arranged. 請求項４に記載の撮像素子において、
前記複数の焦点検出画素は、前記マイクロレンズ透過光束を射出する撮影光学系の光軸からの距離に応じて、前記楕円形状が扁平になることを特徴とする撮像素子。 The imaging device according to claim 4,
The imaging element, wherein the plurality of focus detection pixels are flattened according to a distance from an optical axis of an imaging optical system that emits the microlens transmitted light beam. 請求項５に記載の撮像素子において、
前記楕円形状の長径と短径との比の値が２以上３以下であることを特徴とする撮像素子。
The imaging device according to claim 5,
The ratio of a major axis to a minor axis of the elliptical shape is 2 or more and 3 or less.
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