JP2010171172A - Component holding tool, and negative pressure sucking device using the component holding tool - Google Patents

Component holding tool, and negative pressure sucking device using the component holding tool Download PDF

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JP2010171172A
JP2010171172A JP2009011750A JP2009011750A JP2010171172A JP 2010171172 A JP2010171172 A JP 2010171172A JP 2009011750 A JP2009011750 A JP 2009011750A JP 2009011750 A JP2009011750 A JP 2009011750A JP 2010171172 A JP2010171172 A JP 2010171172A
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component
porous body
planar
negative pressure
holding jig
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Eisaku Hibi
栄作 日比
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a structure of a component holding tool which is usable in common without being replaced even for components of various sizes in different shape. <P>SOLUTION: The component holding tool has a porous body 11 and an exhaust port 1b. The porous body 11 is fitted in a recessed portion formed in a surface where a plane type component is mounted. The exhaust port is provided so as to suck the component on the porous body 11 with negative pressure by discharging the air between the porous body 11 and the inner wall of the recessed portion. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、自動組立装置に使用され、負圧によって平面状の部品を保持する保持治具の構造と、該治具を用いた負圧吸着装置に関する。   The present invention relates to a structure of a holding jig that is used in an automatic assembling apparatus and holds a planar part with a negative pressure, and a negative pressure adsorption apparatus using the jig.

一般に負圧を利用して部品を保持する方法は負圧吸着と呼ばれている。平面状の部品を保持する場合は、治具本体の上面に穴が設けられ、負圧発生機構によって該穴から空気を吸い込むことで、治具上に置かれた該部品が吸着保持される。   In general, a method of holding a part using negative pressure is called negative pressure adsorption. When holding a planar part, a hole is provided in the upper surface of the jig body, and the part placed on the jig is sucked and held by sucking air from the hole by a negative pressure generating mechanism.

図５は負圧吸着を利用した従来の部品保持治具の構成部品を説明するための分解斜視図で、図６は図５の部品保持治具を備えた負圧吸着装置の斜視図である。   FIG. 5 is an exploded perspective view for explaining components of a conventional component holding jig using negative pressure adsorption, and FIG. 6 is a perspective view of a negative pressure adsorption device provided with the component holding jig of FIG. .

図５に示す従来の部品保持治具は、上面に凹状部１ａが形成された治具本体１と、凹状部１ａの開口を蓋する平面状の蓋部２とから構成される。蓋部２には、凹状部１ａの空間に通じる複数の吸引穴２ａが開けられている。また、治具本体１の側面には、蓋部２と凹状部１ａの内壁との間の空間の空気を排出するための排気口１ｂが設けられている。   The conventional component holding jig shown in FIG. 5 includes a jig body 1 having a concave portion 1a formed on the upper surface, and a flat lid portion 2 that covers the opening of the concave portion 1a. The lid portion 2 has a plurality of suction holes 2a leading to the space of the concave portion 1a. Further, on the side surface of the jig main body 1, an exhaust port 1 b for discharging air in the space between the lid portion 2 and the inner wall of the concave portion 1 a is provided.

図６に示すように、排気口１ｂには排気管３が接続されており、排気管３の末端３ａは、図示しない真空ポンプや工場内の真空源に接続される。また排気管３の途中には負圧ゲージ（負圧センサー）４が介在している。   As shown in FIG. 6, the exhaust pipe 1 is connected to the exhaust port 1b, and the end 3a of the exhaust pipe 3 is connected to a vacuum pump (not shown) or a vacuum source in the factory. A negative pressure gauge (negative pressure sensor) 4 is interposed in the middle of the exhaust pipe 3.

このように構成された負圧吸着装置では、部品保持治具の蓋部２の上に平面状の部品を載せ、真空ポンプ等により負圧を発生させると、吸引穴２ａでの空気吸引力により該部品を吸着保持することが出来る。このとき、負圧ゲージ４の出力値により、治具上に部品が載せられているか否かを判定できる。   In the negative pressure adsorption device configured as described above, when a flat part is placed on the lid 2 of the part holding jig and a negative pressure is generated by a vacuum pump or the like, the air suction force in the suction hole 2a causes The parts can be held by suction. At this time, it can be determined from the output value of the negative pressure gauge 4 whether or not a component is placed on the jig.

また、上記従来の治具において吸着保持すべき平面状部品の大きさや形状が変わる場合には、部品保持力を同じにするため、その部品形状に合わせて、治具上面に設けられた複数の吸引穴２ａの場所や存在領域も変える必要があった。   In addition, when the size and shape of a planar part to be sucked and held in the conventional jig changes, in order to make the part holding force the same, a plurality of pieces provided on the upper surface of the jig are matched to the part shape. It was also necessary to change the location and area of the suction hole 2a.

そのため、面積が異なる平面状部品ごとに、該部品の面積に対応する領域全体に複数の吸引穴２ａが存在する部品保持治具が用意されていた。例えば図７に示すように大型パネル５にはそれ専用の保持治具６が作られ、図８に示すように小型パネル７にはそれ専用の保持治具８が作られていた。   For this reason, a component holding jig in which a plurality of suction holes 2a exist in the entire region corresponding to the area of the component is prepared for each planar component having a different area. For example, as shown in FIG. 7, a holding jig 6 dedicated to the large panel 5 is made, and as shown in FIG. 8, a holding jig 8 dedicated to the large panel 5 is made.

尚、以上のような負圧吸着装置はよく知られているので、この装置に関する先願の公開番号については記載しない。   In addition, since the above negative pressure adsorption | suction apparatuses are known well, the publication number of the prior application regarding this apparatus is not described.

しかしながら、図５，６に示すような部品保持治具を使った負圧吸着による部品保持には、下記１）〜３）のような課題がある。   However, component holding by negative pressure adsorption using a component holding jig as shown in FIGS. 5 and 6 has the following problems 1) to 3).

１）負圧吸着による部品を保持する保持力は、部品の平面部に対して吸着力が働いている面積（吸着面積と呼ぶ。）に比例して大きくなる。つまり、真空ポンプの圧力を一定とすると、部品の平面部に対する吸着面積の割合が大きいほど、その保持力は大きくなる。逆を言えば、部品の平面部に対する吸着面積の割合が小さくなるほど、その保持力は低下する。   1) The holding force for holding a component by negative pressure adsorption increases in proportion to the area (referred to as the adsorption area) where the adsorption force is acting on the flat portion of the component. That is, when the pressure of the vacuum pump is constant, the holding force increases as the ratio of the suction area to the flat portion of the component increases. In other words, the holding force decreases as the ratio of the suction area to the flat portion of the component decreases.

また部品の平面部に比べて吸引穴が設けられた領域の面積が大きく、該部品の面で塞がれない吸引穴が多くできるほど、部品保持は困難になる。   Further, the area of the region where the suction holes are provided is larger than that of the flat part of the component, and the more the suction holes that are not blocked by the surface of the component, the more difficult it is to hold the component.

したがって、組立や加工等で部品保持に大きな力が必要である場合には、その部品の大きさに合った吸着面積を持つ部品保持治具を作製する必要があった。   Therefore, when a large force is required to hold a part in assembly or processing, it is necessary to manufacture a part holding jig having an adsorption area that matches the size of the part.

２）また、吸着保持すべき平面状部品の形状が大きく異なる場合には治具上の吸引穴が存在する領域の形状を変えなければならないので、形状が異なる平面状部品ごとに別の部品保持治具を用意する必要があった。   2) In addition, when the shape of the flat part to be sucked and held is greatly different, the shape of the area where the suction holes on the jig are present must be changed. It was necessary to prepare a jig.

３）吸着保持すべき部品の形状や大きさが変わると、その部品ごとに部品保持治具を用意する必要があるため、その都度新たな治具の設計費用や製作費用が生じ、経済的な負担が増える。また、異種の部品ごとに治具取り付けのための交換時間が発生し、生産効率も低下する。よって、負圧吸着を利用した従来の部品保持治具は多品種少量の部品を処理するには適さなかった。   3) When the shape and size of a part to be sucked and held changes, it is necessary to prepare a part holding jig for each part. Therefore, a new jig design cost and manufacturing cost arise each time. The burden increases. In addition, an exchange time for attaching the jig is generated for each different type of part, and the production efficiency is also lowered. Therefore, the conventional component holding jig using the negative pressure adsorption is not suitable for processing a small variety of components.

そこで本発明は、上記のような課題を解消することができる部品保持治具及び該治具を用いた部品吸着装置を提供することを目的とする。その目的の一例は、色々な大きさや形状の異なる部品であっても治具を交換することなく共通使用できる部品保持治具の構造を提供することである。   Then, an object of this invention is to provide the component adsorption | suction apparatus using the component holding jig which can eliminate the above subjects, and this jig | tool. An example of the purpose is to provide a structure of a component holding jig that can be used in common without changing the jig even if the components have various sizes and shapes.

本発明の一つの態様は、平面部面積が異なる複数の平面状部品に対して共通使用され、該平面状部品を負圧吸着によって保持する部品保持治具である。   One aspect of the present invention is a component holding jig that is used in common for a plurality of planar components having different plane part areas and holds the planar component by negative pressure adsorption.

この部品保持治具は、部品保持治具の平面状部品を載せる面に形成された凹状部に嵌め込まれた多孔質体を有する。そして、多孔質体と凹状部の内壁との間の空気を排出するための排出路が具備されている。   This component holding jig has a porous body fitted in a concave portion formed on a surface on which a planar component of the component holding jig is placed. And the discharge path for discharging | emitting the air between a porous body and the inner wall of a recessed part is comprised.

また本発明の他の態様は、上記のような部品保持治具を用いた負圧吸着装置であって、負圧を発生する負圧発生源と、上記排気路に接続された検出器とを備える。この検出器は、負圧発生源による到達真空度を検出して平面状部品の保持状態の良否を判定するものである。   According to another aspect of the present invention, there is provided a negative pressure adsorption device using the component holding jig as described above, comprising: a negative pressure generation source that generates a negative pressure; and a detector connected to the exhaust passage. Prepare. This detector detects the ultimate vacuum by the negative pressure generation source and determines whether the holding state of the planar component is good.

本発明によれば、色々な大きさや形状の異なる部品であっても治具を交換することなく共通使用できる。   According to the present invention, even parts having various sizes and shapes can be used in common without exchanging jigs.

本発明者は、負圧吸着式の部品保持治具の構造について検討を重ねた結果、多孔質体における連続した空孔を吸引穴に利用した部品保持治具であれば、大きさや形状が異なる平面状部品に対して共通使用できることを見い出した。   As a result of repeated studies on the structure of the negative pressure adsorption type component holding jig, the present inventor has different sizes and shapes as long as the component holding jig uses continuous holes in the porous body as suction holes. It was found that it can be commonly used for flat parts.

つまり、異種の平面状部品ごとに別の部品保持治具を用意しないでも、各種の平面状部品を一の部品保持治具で吸着保持できることが判明した。   That is, it has been found that various types of planar parts can be sucked and held with one component holding jig without preparing different parts holding jigs for different types of planar parts.

特に、治具上の部品吸着領域に空孔の平均孔径が十数μｍの多孔質体を使用すると、各種の平面状部品を吸着保持できた。   In particular, when a porous body having an average pore diameter of more than 10 μm was used in the component adsorption region on the jig, various planar components could be adsorbed and held.

しかし、多孔質体の連続した空孔による吸引穴は穴の大きさが十数マイクロメーターと非常に小さいため、多孔質領域に対する部品平面部の接触面積が大きくなければ部品の保持力は弱い。したがって、多孔質領域に比べて平面部の面積の小さな部品の保持を確実にする必要がある。   However, since the suction hole by the continuous void | hole of a porous body is as small as a dozen micrometer, the holding force of components is weak unless the contact area of the component plane part with respect to a porous area | region is large. Therefore, it is necessary to ensure the holding of a part having a smaller area in the plane portion than the porous region.

また、部品保持治具とこの上に保持される部品との間に異物が混入した場合には保持力が低下し、該部品への別部品の組付けや加工などの失敗に繋がる。そこで一般的には、部品保持治具に繋いだ真空ポンプによる到達真空度を負圧センサーによって検出することで、部品が確実に保持されているか否かが判断される。   Further, if foreign matter is mixed between the component holding jig and the component held on the component holding force, the holding force is reduced, leading to failure of assembling or processing another component on the component. Therefore, in general, it is determined whether or not the component is securely held by detecting the ultimate vacuum by the vacuum pump connected to the component holding jig with a negative pressure sensor.

ところが、多孔質体の連続した空孔による吸引穴では負圧の流路の管路抵抗が大きいため、治具上を覆う部品平面部の面積の大小では、その負圧経路の管路抵抗で到達真空度がほとんど変化しない。   However, since the pipe resistance of the negative pressure flow path is large in the suction hole due to the continuous pores of the porous body, the pipe resistance of the negative pressure path is large in the area of the flat part of the part covering the jig. The ultimate vacuum hardly changes.

したがって、部品吸着領域に多孔質体を使用した部品保持治具では部品保持状態の良否判断を負圧センサーでは行えない。このため、該部品保持治具を用いた負圧吸着装置では別の、例えば光学センサーやＣＣＤカメラ等を用いて部品保持状態の良否を判定せざるを得ないので費用や処理時間がかかる虞があった。   Therefore, the negative pressure sensor cannot determine whether or not the component is held in a component holding jig that uses a porous body in the component adsorption region. For this reason, in the negative pressure suction device using the component holding jig, it is necessary to determine whether the component holding state is good or not using another optical sensor, a CCD camera, etc. there were.

上記のような多孔質体を用いる場合の懸念を解消できる手段についても本発明者は検討して、本願発明に至っている。   The present inventor has also studied means that can eliminate the concern when using the porous body as described above, and has reached the present invention.

以下、図面を参照して本発明について具体的に説明する。下記の説明において図５〜８の従来例を構成する部品と同様な部品には同一符号を用いた。   Hereinafter, the present invention will be specifically described with reference to the drawings. In the following description, the same symbols are used for parts that are the same as the parts constituting the conventional example of FIGS.

図１は本発明の一実施形態による部品保持治具を示す斜視図である。この図に示す部品保持治具では、従来技術のような吸引穴が設けられた蓋部（図５の符号２参照）に多孔質体１１が使用されている。   FIG. 1 is a perspective view showing a component holding jig according to an embodiment of the present invention. In the component holding jig shown in this figure, a porous body 11 is used in a lid portion (see reference numeral 2 in FIG. 5) provided with a suction hole as in the prior art.

この多孔質体１１の蓋部は、この部品保持治具で保持したい複数種の平面パネルのうちの最大の大型パネル５の平面形状に合った形に多孔質セラミックス（アルミナ）を加工したものである。   The lid portion of the porous body 11 is obtained by processing porous ceramics (alumina) into a shape that matches the planar shape of the largest large panel 5 among a plurality of types of planar panels to be held by the component holding jig. is there.

該多孔質セラミックスとしては、内部に存在する多数の微小な空孔の平均孔径が１６μｍのものが平面部の面積が異なる各種の平面状パネル部品の吸着保持に好適であった。   As the porous ceramic, those having an average pore diameter of 16 μm of a large number of minute pores present inside are suitable for adsorbing and holding various flat panel components having different plane areas.

例えば、本実施形態の部品保持治具は液晶パネルにドライバーＩＣを実装する場合に使用される大型パネル５や小型パネル７の両方に適用できる。   For example, the component holding jig of this embodiment can be applied to both the large panel 5 and the small panel 7 that are used when a driver IC is mounted on a liquid crystal panel.

また本実施形態では、多孔質体１１の蓋部に、治具本体１の凹状部（図５の符号１ａ参照）の内壁と蓋部との間の空間に通じる複数の吸引穴１２が機械加工等で開けられている。   In the present embodiment, a plurality of suction holes 12 leading to the space between the inner wall of the concave portion (see reference numeral 1a in FIG. 5) of the jig body 1 and the lid are machined on the lid of the porous body 11. It is opened with etc.

それらの吸引穴１２は、多孔質体１１上において平面部面積が異なる小型パネル７と大型パネル５を交換して載せたときに両者がオーバーラップする領域（以下、部品共通接触面と呼ぶ）内に設けられている（図１参照）。各吸引穴１２は、多孔質体１１内の空孔の孔径によりも十分に大きな貫通穴である。   These suction holes 12 are located in a region (hereinafter referred to as a component common contact surface) where the small panel 7 and the large panel 5 having different planar area on the porous body 11 overlap each other when they are mounted. (See FIG. 1). Each suction hole 12 is a through hole that is sufficiently larger than the hole diameter of the pores in the porous body 11.

上記のように加工された多孔質体１１の蓋部は治具本体１の凹状部（図５の符号１ａ参照）内に嵌め込まれ、接着もしくはネジ止め等で固定されている。   The lid portion of the porous body 11 processed as described above is fitted into a concave portion (see reference numeral 1a in FIG. 5) of the jig body 1 and fixed by bonding or screwing.

そして、多孔質体１１の蓋部上に平面状の部品を載せ、排気口１ｂに接続された図示しない真空ポンプ等により負圧を発生させると、多孔質体１１における連続した空孔での空気吸引力により該部品を吸着保持することが出来る。   When a flat part is placed on the lid of the porous body 11 and a negative pressure is generated by a vacuum pump (not shown) connected to the exhaust port 1b, the air in the continuous pores in the porous body 11 is generated. The component can be sucked and held by a suction force.

また、本発明の治具構造は、多孔質体１１上の部品共通接触面内に複数の吸引穴１２が配置されているため、多孔質体１１の上面全体を覆う大型パネル５の吸着保持だけでなく、多孔質体１１の上面領域に比べて平面部面積の小さな小型パネル７の保持も確実に行うことができる。   Moreover, since the several suction hole 12 is arrange | positioned in the component common contact surface on the porous body 11, the jig | tool structure of this invention is only adsorption holding of the large sized panel 5 which covers the whole upper surface of the porous body 11. FIG. In addition, the small panel 7 having a smaller planar area than the upper surface region of the porous body 11 can be reliably held.

吸引穴１２の穴径を多孔質体１１の空孔径よりも大きくしたことで、負圧の流路の管路抵抗を下げることができるので、部品保持状態の良否を負圧センサーで判定することが可能となる。よって、多孔質構造の部品保持治具を用いた負圧吸着装置での部品状態の良否判定にかかる費用や処理時間の増加を抑制できる。   By making the diameter of the suction hole 12 larger than the hole diameter of the porous body 11, it is possible to reduce the pipe resistance of the negative pressure flow path. Is possible. Therefore, it is possible to suppress an increase in cost and processing time required for determining the quality of the component state in the negative pressure adsorption device using the component holding jig having a porous structure.

こうした効果は、上記のように複数の吸引穴１２を多孔質体１１の部品共通接触部に開けることで得られたが、別の構成によっても達成される。   Such an effect was obtained by opening the plurality of suction holes 12 in the component common contact portion of the porous body 11 as described above, but can also be achieved by another configuration.

例えば図２に示すように、多孔質体１１の部品共通接触面内の部分が、多孔質体１１内の空孔の孔径よりも大きな多数の空孔を持つ別の多孔質体１３で構成されていてもよい。   For example, as shown in FIG. 2, the part in the component common contact surface of the porous body 11 is constituted by another porous body 13 having a large number of pores larger than the pore diameter of the pores in the porous body 11. It may be.

以上のように本発明の好ましい実施形態を図面に示して説明したが、本願発明は図示した形や構造に限定されるものではなく、その技術思想を逸脱しない範囲で種々変更して実施可能であることは言うまでもない。   As described above, the preferred embodiments of the present invention have been described with reference to the drawings. However, the present invention is not limited to the illustrated shapes and structures, and various modifications can be made without departing from the technical concept thereof. Needless to say.

例えば、図３に示すように、治具本体１に複数の凹状部を溝加工で形成し、該凹状部の各々に多孔質体１１の蓋部を組み付けることで、一つの部品保持治具上に複数の平面状部品を同時に吸着保持できるようにしてもよい。   For example, as shown in FIG. 3, a plurality of concave portions are formed in the jig body 1 by grooving, and a lid portion of the porous body 11 is assembled to each of the concave portions, so that one component holding jig can be formed. Further, a plurality of planar parts may be sucked and held at the same time.

また別の変形例として、平面状部品を載せる治具上面において保持力が必要な領域のみに多孔質体が配置されていてもよい。   As another modification, the porous body may be disposed only in the region where the holding force is required on the upper surface of the jig on which the planar component is placed.

すなわち、四角形の大型の液晶パネルの場合、該液晶パネルの４辺の内の直交２辺のみにドライバーＩＣを実装することが多い。このようなドライバーＩＣの実装工程では、治具により前記液晶パネルの直交２辺を精度良く位置決めする必要がある。   That is, in the case of a large rectangular liquid crystal panel, a driver IC is often mounted only on two orthogonal sides among the four sides of the liquid crystal panel. In such a driver IC mounting process, it is necessary to accurately position two orthogonal sides of the liquid crystal panel with a jig.

そのため、図４に示すように、部品保持治具の上面には液晶パネルの直交２辺に沿った領域に対応して多孔質体１１が配置されている。   Therefore, as shown in FIG. 4, the porous body 11 is disposed on the upper surface of the component holding jig so as to correspond to regions along two orthogonal sides of the liquid crystal panel.

図４に示す部品保持治具は、治具本体１の上面に凹状部を平面視Ｌ字形になるように溝加工し、該凹状部に多孔質体１１の蓋部を組み付けてなる。治具本体１において多孔質体１１が配置されていない所には貫通孔１４を設けて治具の軽量化を図ると良い。   The component holding jig shown in FIG. 4 is formed by grooving a concave portion on the upper surface of the jig main body 1 so as to have an L shape in plan view, and a lid portion of the porous body 11 is assembled to the concave portion. The jig body 1 may be provided with through holes 14 where the porous body 11 is not disposed to reduce the weight of the jig.

また図３及び図４の例でも図１，２の構造と同様に、夫々の多孔質体１１の部品共通接触面内に複数の吸引穴１２を設けたり、該部品共通接触面内の部位を別の多孔質体１３で構成したりすることが好ましい。   3 and 4, similarly to the structure shown in FIGS. 1 and 2, a plurality of suction holes 12 are provided in the component common contact surface of each porous body 11, or portions in the component common contact surface are defined. It is preferable to use another porous body 13.

以上に各種の実施例を挙げて説明してきた本発明の部品保持治具及び該治具を用いた負圧吸着装置は、小型Panelから大型Panelまでの各種サイズの液晶パネルの組立工程での吸着保持に適用でき、また、液晶パネルだけでなく、平面状の部品であればどれにも適用できる。   The component holding jig of the present invention and the negative pressure adsorption device using the jig, which have been described above with reference to various embodiments, are adsorbed in the assembly process of liquid crystal panels of various sizes from a small panel to a large panel. It can be applied to holding, and can be applied not only to liquid crystal panels but also to flat parts.

本発明の一実施形態による部品保持治具を示す斜視図である。It is a perspective view which shows the components holding jig by one Embodiment of this invention. 本発明の他の実施形態による部品保持治具を示す分解斜視図である。It is a disassembled perspective view which shows the component holding jig by other embodiment of this invention. 本発明の他の実施形態による部品保持治具を示す上面図である。It is a top view which shows the components holding jig by other embodiment of this invention. 本発明の他の実施形態による部品保持治具を示す上面図である。It is a top view which shows the components holding jig by other embodiment of this invention. 負圧吸着を利用した従来の部品保持治具の分解図である。It is an exploded view of the conventional component holding jig using negative pressure adsorption. 従来の部品保持治具を用いた負圧発生装置の斜視図である。It is a perspective view of the negative pressure generator using the conventional component holding jig. 大型の平面状部品の保持に使用される従来の部品保持治具の斜視図である。It is a perspective view of the conventional component holding jig used for holding | maintenance of a large planar component. 小型の平面状部品の保持に使用される従来の部品保持治具の斜視図である。It is a perspective view of the conventional component holding jig used for holding | maintenance of a small planar component.

１ 治具本体
１ａ 凹状部
１ｂ 排気口
５ 大型パネル
７ 小型パネル
１１、１３ 多孔質体
１２ 吸引穴
１４ 貫通孔 DESCRIPTION OF SYMBOLS 1 Jig body 1a Concave part 1b Exhaust port 5 Large panel 7 Small panel 11, 13 Porous body 12 Suction hole 14 Through-hole

Claims (6)

平面部面積が異なる複数の平面状部品に対して共通使用され、該平面状部品を負圧吸着によって保持する部品保持治具であって、
前記部品保持治具の前記平面状部品を載せる面に形成された凹状部に嵌め込まれた多孔質体と、
前記多孔質体と前記凹状部の内壁との間の空気を排出するための排気路と、
を有する部品保持治具。 A component holding jig that is commonly used for a plurality of planar parts having different plane area, and holds the planar part by negative pressure adsorption,
A porous body fitted in a concave portion formed on a surface on which the planar component of the component holding jig is placed;
An exhaust path for discharging air between the porous body and the inner wall of the concave portion;
A component holding jig. 前記多孔質体は、平面部面積が異なる複数の前記平面状部品を交換して載せるときに共通する共通接触面を有し、
該共通接触面内に、前記多孔質体に内在する多数の空孔の平均孔径によりも大きい、前記凹状部の内部と通じる貫通穴が設けられている、請求項１に記載の部品保持治具。 The porous body has a common contact surface that is common when a plurality of the planar parts having different planar area are exchanged and mounted,
2. The component holding jig according to claim 1, wherein a through hole communicating with the inside of the concave portion is provided in the common contact surface, which is larger than an average hole diameter of a large number of holes existing in the porous body. . 前記多孔質体は、平面部面積が異なる複数の前記平面状部品を交換して載せるときに共通する共通接触面を有し、
前記多孔質体における前記共通接触面内の部位が、前記多孔質体に内在する多数の空孔の平均孔径によりも大きい空孔を持つ別の多孔質体により構成されている、請求項１に記載の部品保持治具。 The porous body has a common contact surface that is common when a plurality of the planar parts having different planar area are exchanged and mounted,
The part in the said common contact surface in the said porous body is comprised by another porous body with a void | hole larger than the average hole diameter of many void | holes in the said porous body. The component holding jig described. 前記多孔質体は、平面部面積が異なる複数の前記平面状部品のうちの最大の平面状部品の平面形状に合った形に作られている、請求項１から３のいずれか１項に記載の部品保持治具。   4. The porous body according to claim 1, wherein the porous body is formed in a shape that matches a planar shape of the largest planar component among the plurality of planar components having different planar area. Parts holding jig. 前記多孔質体は、前記平面状部品を載せる面において前記平面状部品に対して保持力が必要な領域のみに沿って配置されている、請求項１から３のいずれか１項に記載の部品保持治具。   The component according to any one of claims 1 to 3, wherein the porous body is disposed along only a region where a holding force is required for the planar component on a surface on which the planar component is placed. Holding jig. 請求項１から５のいずれか１項に記載の部品保持治具を用いた負圧吸着装置であって、
前記負圧を発生する負圧発生源と、
前記排気路に接続され、前記平面状部品の保持状態の良否を判定するために前記負圧発生源による到達真空度を検出する検出器と、
を備えた負圧吸着装置。 A negative pressure adsorption device using the component holding jig according to any one of claims 1 to 5,
A negative pressure generating source for generating the negative pressure;
A detector that is connected to the exhaust passage and detects the ultimate vacuum by the negative pressure generation source in order to determine whether the holding state of the planar component is good or not;
A negative pressure adsorption device.
JP2009011750A 2009-01-22 2009-01-22 Component holding tool, and negative pressure sucking device using the component holding tool Pending JP2010171172A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018064048A (en) * 2016-10-14 2018-04-19 株式会社日本製鋼所 Laser irradiation device, laser irradiation method, and method of manufacturing semiconductor device
JPWO2022038700A1 (en) * 2020-08-19 2022-02-24

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62238639A (en) * 1986-04-09 1987-10-19 Toto Ltd Sucking plate
JP2002177861A (en) * 2000-12-18 2002-06-25 Toray Ind Inc Coating liquid application apparatus and method and fabrication method and apparatus for member for plasma display
JP2008227125A (en) * 2007-03-13 2008-09-25 Kyocera Corp Vacuum suction device and suction method using the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62238639A (en) * 1986-04-09 1987-10-19 Toto Ltd Sucking plate
JP2002177861A (en) * 2000-12-18 2002-06-25 Toray Ind Inc Coating liquid application apparatus and method and fabrication method and apparatus for member for plasma display
JP2008227125A (en) * 2007-03-13 2008-09-25 Kyocera Corp Vacuum suction device and suction method using the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018064048A (en) * 2016-10-14 2018-04-19 株式会社日本製鋼所 Laser irradiation device, laser irradiation method, and method of manufacturing semiconductor device
JPWO2022038700A1 (en) * 2020-08-19 2022-02-24
WO2022038700A1 (en) * 2020-08-19 2022-02-24 株式会社新川 Substrate holder, bonding system, and bonding method
JP7296174B2 (en) 2020-08-19 2023-06-22 株式会社新川 SUBSTRATE HOLDER AND BONDING SYSTEM AND BONDING METHOD

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