JP2010164490A5

JP2010164490A5 -

Info

Publication number: JP2010164490A5
Application number: JP2009008181A
Authority: JP
Filing date: 2009-01-16
Publication date: 2012-01-26
Anticipated expiration: 2029-01-16

Claims

下面に接触端子が配置されたプローブ基板と、前記配線基板又は前記プローブ基板に配置された電力消費部材とを含むプローブカードと、
該プローブカードの上側に配置された板状部材と、
前記配線基板に配置された第１の接続部であって、前記電力消費部材に電気的に接続された第１の端子を有する第１の接続部と、
前記板状部材に配置された第２の接続部であって、第１の端子部に電気的に接続された第２の端子を有する第２の接続部と、
前記第１及び第２の端子を介して前記電力消費部材に電力を供給する、電力消費部材用電力源とを含み、
前記第１及び第２の端子は、互いに上下の関係に位置されている、集積回路の電気的試験装置。 A probe card including a probe board on which a contact terminal is arranged on the lower surface, and a power consuming member arranged on the wiring board or the probe board;
A plate-like member arranged on the upper side of the probe card;
A first connecting portion disposed on the wiring board, the first connecting portion having a first terminal electrically connected to the power consuming member;
A second connecting portion disposed on the plate-like member, the second connecting portion having a second terminal electrically connected to the first terminal portion;
A power source for a power consuming member that supplies power to the power consuming member via the first and second terminals,
The electrical test apparatus for an integrated circuit, wherein the first and second terminals are positioned in a vertical relationship with each other.

配線基板と、該配線基板の下側に配置されたプローブ基板と、前記配線基板又は前記プローブ基板に配置された電力消費部材とを含むプローブカードと、
該プローブカードを受けるカードホルダと、
前記配線基板に配置された第１の接続部であって、前記電力消費部材に電気的に接続された第１の端子を有する第１の接続部と、
前記カードホルダに配置された第２の接続部であって、第１の端子部に電気的に接続された第２の端子を有する第２の接続部と、
前記第１及び第２の端子を介して前記電力消費部材に電力を供給する、電力消費部材用電力源とを含み、
前記第１及び第２の端子は、互いに上下の関係に位置されている、集積回路の電気的試験装置。 A probe card including a wiring board, a probe board disposed on the lower side of the wiring board, and the power consumption member disposed on the wiring board or the probe board;
A card holder for receiving the probe card;
A first connecting portion disposed on the wiring board, the first connecting portion having a first terminal electrically connected to the power consuming member;
A second connecting portion disposed on the card holder, the second connecting portion having a second terminal electrically connected to the first terminal portion;
A power source for a power consuming member that supplies power to the power consuming member via the first and second terminals,
The electrical test apparatus for an integrated circuit, wherein the first and second terminals are positioned in a vertical relationship with each other.

さらに、試験信号を発生する試験信号処理部であって、試験信号用電力源を備える試験信号処理部を含み、
前記プローブカードは、さらに、前記セラミック基板の下側に配置された多層配線シートと、被検査体の電極に接触するように前記多層配線シートの下面に配置された複数の接触子とを備え、
前記配線基板は、前記試験信号用電力源から前記試験信号を受ける複数の第３の端子を有する第３の接続部を備え、
前記第３の端子は、前記配線基板、前記セラミック基板及び前記多層配線シートに設けられた内部配線を介して、前記接触子に電気的に接続されている、請求項１及び２のいずれか１項に記載の試験装置。 Furthermore, a test signal processing unit for generating a test signal, including a test signal processing unit including a test signal power source,
The probe card further includes a multilayer wiring sheet disposed on the lower side of the ceramic substrate, and a plurality of contacts disposed on the lower surface of the multilayer wiring sheet so as to contact the electrodes of the object to be inspected,
The wiring board includes a third connection portion having a plurality of third terminals for receiving the test signal from the test signal power source,
The said 3rd terminal is any one of Claim 1 and 2 electrically connected to the said contact via the internal wiring provided in the said wiring board, the said ceramic substrate, and the said multilayer wiring sheet. The test apparatus according to the item.

前記配線基板は前記第１の端子に電気的に接続された給電路を有する、請求項１から３のいずれか１項に記載の試験装置。 4. The test apparatus according to claim 1, wherein the wiring board has a power supply path electrically connected to the first terminal. 5.

前記第１の接続部は、分離可能に結合された雄型及び雌型のいずれか一方のコネクタを含み、前記第２の接続部は、前記雄型及び前記雌型の他方のコネクタを含む、請求項１から４のいずれか１項に記載の試験装置。 The first connection portion includes one of a male connector and a female connector that are detachably coupled, and the second connection portion includes the other connector of the male and female types, The test apparatus according to any one of claims 1 to 4.

複数の前記電力消費部材が前記配線基板又は前記プローブ基板に配置されており、
前記配線基板は複数の給電路を有し、
前記第１の接続部は複数の前記第１の端子を有し、
前記第２の接続部は複数の前記第２の端子を有し、
各給電路は前記電力消費部材及び前記第１の端子に電気的に接続されている、請求項１から５のいずれか１項に記載の試験装置。 A plurality of the power consuming members are disposed on the wiring board or the probe board;
The wiring board has a plurality of power supply paths,
The first connection portion has a plurality of the first terminals,
The second connection portion has a plurality of the second terminals,
6. The test apparatus according to claim 1, wherein each power supply path is electrically connected to the power consuming member and the first terminal.

前記第１及び第２の端子のいずれか一方はポゴピンを備え、前記第１及び第２の端子の他方は、前記ポゴピンがその一端部において接触する導電性部を備える、請求項１から６のいずれか１項に記載の試験装置。 Either one of the first and second terminals includes a pogo pin, and the other of the first and second terminals includes a conductive portion with which the pogo pin contacts at one end thereof. The test apparatus according to any one of claims.

前記第１及び第２の接続部は、それぞれ、前記導電性部及び前記ポゴピンを備え、
前記第１の接続部は、さらに、前記配線基板に支持された電気絶縁体であって、前記ポゴピンを該ポゴピンが該電気絶縁体の内部から該電気絶縁体の上方に突出する状態に支持する電気絶縁体を備え、
前記第２の接続部は、さらに、前記板状部材に配置された支持部であって、前記導電性部を支持する支持部と、前記導電性部に電気的に接続された配線路であって、前記支持部から上方に突出する状態に前記支持部又は前記導電性部に結合された配線路とを備え、
前記電気絶縁体は前記支持部を受け入れる凹所を有する、請求項７に記載の試験装置。 The first and second connection portions each include the conductive portion and the pogo pin,
The first connecting portion is further an electric insulator supported by the wiring board, and supports the pogo pin in a state in which the pogo pin protrudes above the electric insulator from the inside of the electric insulator. With electrical insulation,
The second connection part is a support part disposed on the plate-like member, and is a support part that supports the conductive part and a wiring path that is electrically connected to the conductive part. A wiring path coupled to the support part or the conductive part in a state protruding upward from the support part,
The test apparatus according to claim 7, wherein the electrical insulator has a recess for receiving the support.

前記プローカードは、さらに、前記配線基板の上に配置された補強部材であって、上下に開放する空間を有する補強部材を含み、前記第１及び第２の接続部は、少なくとも一部を前記空間に受け入れられている、請求項３から８のいずれか１項に記載の試験装置。 The probe card further includes a reinforcing member disposed on the wiring board, the reinforcing member having a space that opens up and down, and the first and second connecting portions are at least partially at least partially The test apparatus according to claim 3, wherein the test apparatus is received in a space.

前記第１及び第２の接続部は、それぞれ、前記導電性部及び前記ポゴピンを備え、
前記板状部材は、さらに、該板状部材を上下方向に貫通する配線路であって、前記ポゴピンに電気的に接続された配線路を備え、
前記第２の接続部は、さらに、前記板状部材に弾性体を介して配置された配線経路確保部材を備え、
前記ポゴピンは、前記配線経路確保部材を上下に貫通して伸びて、前記導電性部及び前記配線路に電気的に接続されている、請求項７に記載の試験装置。 The first and second connection portions each include the conductive portion and the pogo pin,
The plate-shaped member further includes a wiring path that penetrates the plate-shaped member in the vertical direction and is electrically connected to the pogo pin,
The second connection portion further includes a wiring path securing member disposed on the plate-like member via an elastic body,
The test apparatus according to claim 7, wherein the pogo pin extends vertically through the wiring path securing member and is electrically connected to the conductive portion and the wiring path.

前記配線経路確保部材は、前記第１の接続部の上端部を受け入れる凹所を有する、請求項１０に記載のプローブカード。 The probe card according to claim 10, wherein the wiring path securing member has a recess that receives an upper end portion of the first connection portion.

前記電力消費部材は、前記セラミック基板の内部に配置された発熱体、前記配線基板に配置された電子部品、前記プローブカードに配置されたメモリ、及び前記プローブカードに配置された機械器具を含むグループから選択された少なくとも１つを含む、請求項１から１１のいずれか１項に記載の試験装置。 The power consuming member includes a heating element disposed inside the ceramic substrate, an electronic component disposed on the wiring substrate, a memory disposed on the probe card, and a mechanical device disposed on the probe card. The test apparatus according to claim 1, comprising at least one selected from: