JP2010149265A5 - - Google Patents
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- JP2010149265A5 JP2010149265A5 JP2008332843A JP2008332843A JP2010149265A5 JP 2010149265 A5 JP2010149265 A5 JP 2010149265A5 JP 2008332843 A JP2008332843 A JP 2008332843A JP 2008332843 A JP2008332843 A JP 2008332843A JP 2010149265 A5 JP2010149265 A5 JP 2010149265A5
- Authority
- JP
- Japan
- Prior art keywords
- guide surface
- moving body
- recessed space
- disposed
- seal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Claims (10)
前記第１のガイド面に沿って移動する第１の移動体と、
前記第１の移動体に設けられた第２のガイド面に沿って移動する第２の移動体と、
前記固定部に対する前記第２の移動体の位置を測定するレーザ測長手段と、
前記第１の移動体に配置された、前記第１のガイド面に対向する開口を有する第１の凹空間部と、
前記第２の移動体に配置された、前記第２のガイド面に対向する開口を有する第２の凹空間部と、
前記第１の凹空間部を介して前記第２の凹空間部を減圧するための手段と、を有し、
前記第２の凹空間部に前記レーザ測長手段を配置したことを特徴とする位置決め装置。 A fixing portion having a first guide surface;
A first moving body that moves along the first guide surface;
A second moving body that moves along a second guide surface provided on the first moving body;
Laser length measuring means for measuring the position of the second moving body with respect to the fixed portion;
A first recessed space portion disposed in the first moving body and having an opening facing the first guide surface;
A second recessed space having an opening opposed to the second guide surface, disposed in the second moving body;
Means for depressurizing the second recessed space through the first recessed space,
A positioning apparatus, wherein the laser length measuring means is arranged in the second concave space.
前記第３の凹空間部を減圧する手段と、を有し、
前記第３の凹空間部及び前記第２の凹空間部に、前記レーザ測長手段を分置したことを特徴とする請求項１に記載の位置決め装置。 A third recessed space disposed on the first moving body, independent of the first recessed space, and having an opening facing the first guide surface;
Means for decompressing the third recessed space,
The positioning apparatus according to claim 1, wherein the laser length measuring unit is disposed in the third concave space portion and the second concave space portion.
前記シール部は、前記ガイド面との間に１μｍ以上１０μｍ以下の隙間を形成し、前記隙間によって前記凹空間部への空気の流入を抑制することを特徴とする請求項１ないし３のいずれかに記載の位置決め装置。 It has a seal part arranged around the opening of each concave space part,
The said seal part forms the clearance gap of 1 micrometer or more and 10 micrometers or less between the said guide surfaces, and suppresses the inflow of the air to the said recessed space part by the said clearance gap. The positioning device described in 1.
前記シール部は、接触型シールを前記凹空間部の外周部に配置することによって、前記凹空間部への空気の流入を抑制することを特徴とする請求項１ないし３のいずれかに記載の位置決め装置。 It has a seal part arranged around the opening of each concave space part,
The said seal | sticker part suppresses the inflow of the air to the said recessed space part by arrange | positioning a contact-type seal | sticker in the outer peripheral part of the said recessed space part, The Claim 1 thru | or 3 characterized by the above-mentioned. Positioning device.
工具と、
前記工具によって加工される被加工物を保持する保持具と、を有し、
前記工具と前記保持具の少なくとも一方を前記位置決め装置によって位置決めすることを特徴とする加工装置。 A positioning device according to any one of claims 1 to 8,
Tools,
Holding a workpiece to be processed by the tool,
A processing apparatus, wherein at least one of the tool and the holder is positioned by the positioning device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008332843A JP5473319B2 (en) | 2008-12-26 | 2008-12-26 | Positioning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008332843A JP5473319B2 (en) | 2008-12-26 | 2008-12-26 | Positioning device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010149265A JP2010149265A (en) | 2010-07-08 |
| JP2010149265A5 true JP2010149265A5 (en) | 2012-02-16 |
| JP5473319B2 JP5473319B2 (en) | 2014-04-16 |
Family
ID=42568929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008332843A Expired - Fee Related JP5473319B2 (en) | 2008-12-26 | 2008-12-26 | Positioning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5473319B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103831630B (en) * | 2014-03-27 | 2016-04-20 | 威海鲁海精密机械有限公司 | A kind of beam locking device |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0540011A (en) * | 1991-08-06 | 1993-02-19 | Olympus Optical Co Ltd | Gauge interferometer |
| JP2001052988A (en) * | 1999-08-11 | 2001-02-23 | Kyocera Corp | Slide device for evacuation and stage mechanism |
| JP4286460B2 (en) * | 2001-01-18 | 2009-07-01 | パイオニア株式会社 | Laser length measuring instrument and laser length measuring method |
| JP2005334981A (en) * | 2004-05-24 | 2005-12-08 | Toppan Printing Co Ltd | Cutting method and cutting device for metal mold for molding toric lens |
| JP2006177437A (en) * | 2004-12-22 | 2006-07-06 | Fanuc Ltd | Air balance structure |
| JP2008209272A (en) * | 2007-02-27 | 2008-09-11 | Ricoh Co Ltd | Laser interference length measuring apparatus |
-
2008
- 2008-12-26 JP JP2008332843A patent/JP5473319B2/en not_active Expired - Fee Related
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