JP2010133935A - ダルソンバル運動mems加速度計 - Google Patents
ダルソンバル運動mems加速度計 Download PDFInfo
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- JP2010133935A JP2010133935A JP2009232416A JP2009232416A JP2010133935A JP 2010133935 A JP2010133935 A JP 2010133935A JP 2009232416 A JP2009232416 A JP 2009232416A JP 2009232416 A JP2009232416 A JP 2009232416A JP 2010133935 A JP2010133935 A JP 2010133935A
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- proof mass
- pickoff
- coil
- accelerometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
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- Electromagnetism (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
Abstract
【解決手段】ハウジング44と、ねじれ屈曲部46、48、50、52によりハウジング44内に吊るされるプルーフマス42と、ねじれ磁気再平衡要素として、プルーフマス42上の平面コイル60および磁石66を有する。平面コイル60は、ねじれ屈曲部を中心とするプルーフマス42の回転軸の両側に延び、磁石66は、N−S軸がプルーフマスの42回転軸にほぼ垂直になるように方向付けられる。MEMS加速度計内のピックオフの容量の変化を検出し、平面コイルに電流を通じることでMEMS加速度計を再平衡させる。
【選択図】図2
Description
Claims (3)
- 微小電気機械(MEMS)加速度計(40)であって、
ハウジング(44)と、
少なくとも1つのねじれ屈曲部(46−52)により前記ハウジング内に吊るされるプルーフマス(42)と、
ねじれ磁気再平衡要素(60、66)と、を有し、前記ねじれ磁気再平衡要素は、
前記プルーフマス上の少なくとも1つのコイルと、
少なくとも1つの磁石(66)と、を有し、前記少なくとも1つのコイルは平面コイルであり、前記少なくとも1つの磁石は、
前記プルーフマスの第1側部近くに位置決めされる第1磁石と、
前記プルーフマスの第2側部近くに位置決めされる第2磁石と、を有し、前記第1磁石および前記第2磁石は前記ハウジングの外側に位置する、MEMS加速度計。 - 請求項1に記載のMEMS加速度計であって、さらに、
前記プルーフマスの第1側部側に、前記プルーフマスの第1端部に位置する第1容量性ピックオフと、
前記プルーフマスの第2側部側に、前記プルーフマスの第2端部に位置する第2容量性ピックオフと、を有し、
前記少なくとも1つのねじれ屈曲部は、前記第1容量性ピックオフと前記第2容量性ピックオフとの間にあり、前記第1ピックオフおよび前記第2ピックオフは電気的に接続され、
前記MEMS加速度計はさらに、前記第1ピックオフと同じ、前記少なくとも1つのねじれ屈曲部の側部側で、前記プルーフマスの前記第1側部に位置する第3容量性ピックオフと、
前記第2ピックオフと同じ、前記少なくとも1つのねじれ屈曲部の側部側で、前記プルーフマスの前記第2側部に位置する第4容量性ピックオフと、を有し、前記第1ピックオフおよび前記第2ピックオフは電気的に接続され、前記第3ピックオフおよび前記第4ピックオフは電気的に接続される、MEMS加速度計。 - 請求項2に記載のMEMS加速度計であって、さらに、
前記プルーフマス上に位置する第1側部、および前記ハウジングの内側部分に位置する第2側部を備える、少なくとも1つのピックオフと、
前記少なくとも1つのピックオフと信号連絡する検出電子機器要素とを有し、前記検出電子機器要素は、前記少なくとも1つのピックオフの少なくとも1つの容量値に基づく少なくとも1つの検出信号を発生させるように構成され、
前記MEMS加速度計はさらに、前記少なくとも1つのコイルと信号連絡する駆動電子機器要素と、
前記検出電子機器要素および前記駆動電子機器要素と信号連絡する制御装置と、を有し、
前記制御装置は、少なくとも1つの検出信号に基づいて前記少なくとも1つのコイルを通じて電流を送るように、前記駆動電子機器要素に指示する、ように構成され、前記制御装置は、前記加速度計に与えられた加速度を示す出力信号を提供するように構成され、前記出力は、前記少なくとも1つの電流および前記少なくとも1つの検出信号に基づく、MEMS加速度計。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/247,937 US8122767B2 (en) | 2008-10-08 | 2008-10-08 | D'arsonval movement mems accelerometer |
US12/247,937 | 2008-10-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010133935A true JP2010133935A (ja) | 2010-06-17 |
JP5635758B2 JP5635758B2 (ja) | 2014-12-03 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2009232416A Expired - Fee Related JP5635758B2 (ja) | 2008-10-08 | 2009-10-06 | ダルソンバル運動mems加速度計 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8122767B2 (ja) |
EP (1) | EP2175285B1 (ja) |
JP (1) | JP5635758B2 (ja) |
AT (1) | ATE547712T1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10802040B2 (en) | 2016-04-18 | 2020-10-13 | Hitachi, Ltd. | Acceleration sensor |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
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DE102007061096A1 (de) * | 2007-12-19 | 2009-06-25 | Robert Bosch Gmbh | Mikromechanisches Bauelement mit auslenkfähigem Element |
US20100180681A1 (en) * | 2009-01-22 | 2010-07-22 | Honeywell International Inc. | System and method for increased flux density d'arsonval mems accelerometer |
US8307710B2 (en) * | 2009-07-09 | 2012-11-13 | Honeywell International Inc. | Translational mass in-plane MEMS accelerometer |
US9121865B2 (en) * | 2012-12-12 | 2015-09-01 | Raytheon Company | Hung mass accelerometer with differential Eddy current sensing |
US9784759B2 (en) | 2015-11-16 | 2017-10-10 | Raytheon Company | Thermally insensitive open-loop hung mass accelerometer with differential Eddy current sensing |
US10024880B2 (en) | 2016-05-21 | 2018-07-17 | Raytheon Company | Athermal hung mass accelerometer with reduced sensitivity to longitudinal temperature gradients |
US10816568B2 (en) | 2017-12-26 | 2020-10-27 | Physical Logic Ltd. | Closed loop accelerometer |
CN109188023A (zh) * | 2018-08-30 | 2019-01-11 | 太原理工大学 | 悬臂式微加速度传感器自悬浮封装结构 |
CN110231662B (zh) * | 2019-06-21 | 2020-09-08 | 华中科技大学 | 一种基于抗磁体悬浮的mems惯性传感器的制备方法 |
CN111505338B (zh) * | 2020-05-03 | 2021-07-02 | 华中科技大学 | 一种磁反馈闭环加速度传感器及其温度补偿方法 |
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JP2002350459A (ja) * | 2001-05-23 | 2002-12-04 | Akashi Corp | 振動センサ、及び振動センサの製造方法 |
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-
2008
- 2008-10-08 US US12/247,937 patent/US8122767B2/en active Active
-
2009
- 2009-10-01 EP EP09172012A patent/EP2175285B1/en not_active Not-in-force
- 2009-10-01 AT AT09172012T patent/ATE547712T1/de active
- 2009-10-06 JP JP2009232416A patent/JP5635758B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5491284A (en) * | 1977-09-21 | 1979-07-19 | Honeywell Inc | Accelerometer |
JPH0843426A (ja) * | 1994-06-29 | 1996-02-16 | Texas Instr Inc <Ti> | 微小機械式ディジタル加速度計 |
JP2002350459A (ja) * | 2001-05-23 | 2002-12-04 | Akashi Corp | 振動センサ、及び振動センサの製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10802040B2 (en) | 2016-04-18 | 2020-10-13 | Hitachi, Ltd. | Acceleration sensor |
Also Published As
Publication number | Publication date |
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US8122767B2 (en) | 2012-02-28 |
EP2175285A1 (en) | 2010-04-14 |
JP5635758B2 (ja) | 2014-12-03 |
EP2175285B1 (en) | 2012-02-29 |
ATE547712T1 (de) | 2012-03-15 |
US20100083761A1 (en) | 2010-04-08 |
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