JP2010132460A

JP2010132460A - Carrying device of plate-like member and carrying method of plate-like member

Info

Publication number: JP2010132460A
Application number: JP2010004977A
Authority: JP
Inventors: Hisaki Tanigawa; 央樹谷川; Mitsuyoshi Ozaki; 充佳尾崎; Seiki Mori; 誠樹森
Original assignee: Toray Engineering Co Ltd
Current assignee: Toray Engineering Co Ltd
Priority date: 2010-01-13
Filing date: 2010-01-13
Publication date: 2010-06-17

Abstract

PROBLEM TO BE SOLVED: To provide a carrying device of a plate-like member and a carrying method of the plate-like member, capable of shortening a cycle time even when rotating the plate-like member around a line in the thickness direction. SOLUTION: This carrying device 10 has a floating means 20 having a floating member 21 for floating a glass substrate 11 by injecting gas from a plurality of injection ports upward, and a carrying means 30 for holding the glass substrate 11 in a state of floating the glass substrate 11 from the floating member 21 by the floating means 20 and carrying the glass substrate 11 toward the downstream side in the carrying direction. The carrying means 30 has a sucking pad 34 movable in the carrying direction and axially rotatable around the line in the thickness direction of the glass substrate 11. The pad 34 sucks to a plane central part of the glass substrate 11. COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、例えばディスプレイに用いられるガラス基板等の板状部材を搬送するための板状部材の搬送装置および板状部材の搬送方法に関するものである。 The present invention relates to a plate-shaped member conveyance device and a plate-shaped member conveyance method for conveying a plate-shaped member such as a glass substrate used in a display, for example.

従来より、ディスプレイに用いられるガラス基板等の板状部材を搬送するために、基板搬送装置が知られている（例えば特許文献１参照）。
特許文献１は、複数の空気孔が形成された浮上ブロックによりガラス基板を浮上させ、浮上させたガラス基板の搬送方向に沿った下流側の裏面を吸着パッドにより吸着することにより保持し、引っ張りながら搬送する。 2. Description of the Related Art Conventionally, a substrate transfer device is known for transferring a plate-like member such as a glass substrate used for a display (see, for example, Patent Document 1).
In Patent Document 1, a glass substrate is levitated by a levitating block in which a plurality of air holes are formed, and a rear surface on the downstream side along the conveying direction of the levitated glass substrate is held by being sucked by a suction pad while being pulled. Transport.

特表２００３−８６９１７号公報Special table 2003-86917 gazette

ところで、通常、矩形状のガラス基板の周部に沿って枠状に露光処理を行う場合、まず互いに平行な一対の縁部に対して露光処理を行った後、厚み方向に沿った線を中心としてガラス基板を所定角度回動させ、残りの一対の縁部に対して露光処理を行うことが多い。すなわち、矩形状のガラス基板の周部に沿って枠状に露光処理を行う場合、ガラス基板を所定角度回動させる工程が必須となる。 By the way, normally, when performing exposure processing in a frame shape along the periphery of a rectangular glass substrate, first, after performing exposure processing on a pair of edges that are parallel to each other, the line along the thickness direction is centered. In many cases, the glass substrate is rotated by a predetermined angle, and exposure processing is performed on the remaining pair of edges. That is, when the exposure process is performed in a frame shape along the periphery of the rectangular glass substrate, a step of rotating the glass substrate by a predetermined angle is essential.

しかしながら、前述した特許文献１では、ガラス基板の搬送方向に沿った下流側の裏面を吸着パッドにより吸着して支持するため、ガラス基板を所定角度回動させる工程の前に、一時的に吸着パッドをガラス基板から離反させ、ガラス基板を所定角度回動させる工程の後に再び吸着パッドをガラス基板に吸着させる必要があり、タクトを短縮できないという問題がある。 However, in Patent Document 1 described above, since the downstream back surface along the conveyance direction of the glass substrate is adsorbed and supported by the adsorption pad, the adsorption pad is temporarily used before the step of rotating the glass substrate by a predetermined angle. After the step of moving the glass substrate away from the glass substrate and rotating the glass substrate by a predetermined angle, it is necessary to adsorb the suction pad to the glass substrate again, and there is a problem that tact cannot be shortened.

以上のような問題は、ディスプレイに用いられるガラス基板を搬送するにあたって露光処理を行う場合にのみ生ずるものではなく、板状部材を搬送するにあたって、搬送経路の途中において生ずるものである。 The above problems do not occur only when the exposure process is performed when the glass substrate used in the display is transported, but occurs when the plate-shaped member is transported.

本発明は、前述した問題を解決するためになされたもので、板状部材を厚み方向に沿った線を中心として回動させる場合にタクトを短縮できる板状部材の搬送装置および板状部材の搬送方法を提供することを目的とする。 The present invention has been made in order to solve the above-described problem. When the plate-like member is rotated around a line along the thickness direction, the plate-like member conveying device and the plate-like member capable of shortening the tact time are provided. An object is to provide a transport method.

本発明の板状部材の搬送装置は、上方に向かって複数の噴射口から気体を噴射することにより板状部材を浮上させる浮上部材を有する浮上手段と、前記浮上手段により前記板状部材が前記浮上部材から浮上した状態で前記板状部材を保持するとともに前記搬送方向に沿って下流側に向かって前記板状部材を搬送する搬送手段とを備える板状部材の搬送装置であって、前記搬送手段が、前記搬送方向に沿って移動可能であるとともに前記板状部材の厚み方向に沿った線を中心として軸回転可能な吸着パッドを有し、前記吸着パッドが前記板状部材の平面中央部に吸着することを特徴とする。 The plate-like member conveying apparatus according to the present invention includes a levitation unit having a levitation member that levitates the plate-like member by injecting gas upward from a plurality of injection ports, and the plate-like member is A plate-like member conveying apparatus, comprising: conveying means for holding the plate-like member in a state of being levitated from a levitation member and conveying the plate-like member toward the downstream side along the conveying direction, The means has a suction pad that is movable along the transport direction and is rotatable about a line along the thickness direction of the plate-like member, and the suction pad is a flat central portion of the plate-like member It is adsorbed on the surface.

ここで、平面中央部としては、板状部材が矩形状である場合、対角線の交点を中心として所定の半径で描いた円内を指す。
そして、所定の半径とは、厚み方向に沿った線を中心として板状部材を所定角度回動させる工程を行う回動工程領域において、板状部材の角部が他の構造物に干渉しない半径としている。 Here, when the plate-like member has a rectangular shape, the plane center portion indicates the inside of a circle drawn with a predetermined radius around the intersection of diagonal lines.
The predetermined radius is a radius at which the corners of the plate member do not interfere with other structures in a rotation process region in which the plate member is rotated by a predetermined angle around a line along the thickness direction. It is said.

このような本発明においては、吸着パッドが板状部材の平面中央部に吸着するため、板状部材の搬送方向に沿った下流側の裏面を吸着パッドにより吸着する場合に比較して、厚み方向に沿った線を中心として板状部材を所定角度回動させる工程を行うにあたって、一時的に吸着パッドを板状部材から離反させ、再び吸着パッドを板状部材に吸着させる必要がなく、これによりタクトを短縮できることになる。 In the present invention, since the suction pad is attracted to the center of the flat surface of the plate member, the thickness direction is compared with the case where the downstream back surface along the transport direction of the plate member is sucked by the suction pad. When performing the step of rotating the plate-like member by a predetermined angle around the line along the line, it is not necessary to temporarily separate the suction pad from the plate-like member and again suck the suction pad to the plate-like member. Tact can be shortened.

また、本発明の板状部材の搬送装置は、前記搬送手段が前記搬送方向に沿って移動可能な回転軸を有し、前記吸着パッドが前記回転軸に連結されていることを特徴とする。 In the plate-shaped member conveying apparatus according to the present invention, the conveying means has a rotating shaft movable along the conveying direction, and the suction pad is connected to the rotating shaft.

このような本発明においては、搬送方向に沿って移動可能な回転軸に吸着パッドが連結されているため、搬送方向上流側に供給された板状部材に吸着パッドを吸着させれば、搬送方向下流側から板状部材を搬出するまで吸着パッドを離反、再吸着させる必要がなく、これによりタクトを短縮できることになる。 In the present invention, since the suction pad is connected to the rotation shaft movable along the transport direction, if the suction pad is sucked to the plate-like member supplied upstream in the transport direction, the transport direction There is no need to separate and re-adsorb the suction pad until the plate-like member is carried out from the downstream side, thereby reducing the tact.

さらに、本発明の板状部材の搬送装置は、板状部材を水平に維持する維持手段と、前記板状部材を保持するとともに搬送方向上流側から搬送方向下流側に搬送する搬送手段とを備える板状部材の搬送装置であって、前記搬送手段が、前記搬送方向に沿って移動可能であるとともに前記板状部材に吸着可能な吸着パッドと、前記吸着パッドに連動して前記板状部材を支持する支持部材とを有していることを特徴とする。 Furthermore, the plate-like member conveying apparatus of the present invention includes a maintaining unit that maintains the plate-like member horizontally, and a conveying unit that holds the plate-like member and conveys the plate-shaped member from the upstream side in the conveying direction to the downstream side in the conveying direction. A plate-like member conveying apparatus, wherein the conveying means is movable along the conveying direction and can be adsorbed to the plate-like member, and the plate-like member is linked to the adsorption pad. It has the supporting member to support, It is characterized by the above-mentioned.

このような本発明においては、吸着パッドを移動させるために維持手段を配設できない領域があっても、吸着パッドに連動する支持部材により、板状部材を確実に支持させた状態で搬送できることになる。 In the present invention, even if there is a region where the maintaining means cannot be provided for moving the suction pad, the support can be transported in a state where the plate-like member is reliably supported by the support member interlocked with the suction pad. Become.

そして、本発明の板状部材の搬送装置は、前記支持手段が、上方に向かって複数の噴射口から気体を噴射することにより前記板状部材を浮上させる浮上部材を有し、前記支持部材が、前記浮上部材と同等機能を備える移動浮上部材であることを特徴とする。 And the conveying apparatus of the plate-shaped member of this invention has a levitation | floating member which the said support means raises the said plate-shaped member by injecting gas from a some injection port toward upper direction, The said support member is The moving levitation member has the same function as the levitation member.

このような本発明においては、支持部材を移動浮上部材とすることで、板状部材を確実に浮上させた状態で搬送できることになる。 In the present invention, by using the support member as a moving levitation member, the plate-like member can be conveyed in a state of being reliably levitated.

また、本発明の板状部材の搬送装置は、前記支持部材が、前記板状部材に対して接触するとともに回動可能な転動体を備えていることを特徴とする。 In the plate-shaped member conveying apparatus according to the present invention, the support member includes a rolling element that is rotatable while being in contact with the plate-shaped member.

このような本発明においては、支持部材に回動可能な転動体を備えることで、板状部材に対して転動体を接触させ、板状部材を確実に支持させた状態で搬送できることになる。 In such this invention, by providing the rolling member which can be rotated in a support member, a rolling member is made to contact with a plate-shaped member, and it can convey in the state which supported the plate-shaped member reliably.

さらに、本発明の板状部材の搬送装置は、前記支持部材が前記搬送方向に沿うとともに前記吸着パッドを挟んで搬送方向上流側および搬送方向下流側に設けられていることを特徴とする。 Further, the plate-like member conveying apparatus of the present invention is characterized in that the support member is provided along the conveying direction and on the upstream side in the conveying direction and the downstream side in the conveying direction with the suction pad interposed therebetween.

このような本発明においては、吸着パッドを挟んで支持部材が搬送方向上流側および搬送方向下流側に設けられているため、吸着パッドを板状部材の平面中央部に吸着させた場合にも、板状部材を均等に支持させることができることになる。 In the present invention, since the support member is provided on the upstream side in the transport direction and the downstream side in the transport direction with the suction pad interposed therebetween, even when the suction pad is sucked to the plane center portion of the plate-like member, The plate member can be evenly supported.

また、本発明の板状部材の搬送方法は、上方に向かって複数の噴射口から気体を噴射する浮上部材が搬送方向に沿って平行、かつ、前記搬送方向に対して直交する方向に沿って所定間隔で複数配列された浮上手段における搬送方向上流側に板状部材を投入し、前記浮上手段により前記板状部材が前記浮上部材から浮上した状態で、前記各浮上部材間において吸着パッドを前記板状部材の下面における中央部に吸着させることにより保持し、次いで、前記吸着パッドと、前記吸着パッドを挟んで搬送方向上流側および搬送方向下流側に設けられた移動浮上部材とを前記搬送方向上流側から前記搬送方向下流側に移動させることにより前記板状部材を搬送し、前記搬送手段における搬送経路の途中において前記板状部材の表面平坦度向上手段を設けた領域により、前記板状部材の表面を平坦化させながら処理部により前記板状部材の表面に所定の処理を行い、前記処理部を通過させた後に前記搬送手段の前記吸着パッドを回動させることにより前記板状部材を回動させることを特徴とする。 In the plate member conveying method of the present invention, the levitation member that injects the gas from the plurality of injection ports upward is parallel along the conveying direction and along the direction orthogonal to the conveying direction. A plate-like member is inserted upstream in the conveying direction of the levitation means arranged in a plurality at predetermined intervals, and the suction pads are placed between the levitation members in a state where the plate-like member is levitated from the levitation member by the levitation means. The suction pad and the movable levitation member provided on the upstream side and the downstream side in the transport direction across the suction pad are then transported in the transport direction. The plate-like member is conveyed by moving from the upstream side to the downstream side in the conveyance direction, and means for improving the surface flatness of the plate-like member is provided in the middle of the conveyance path of the conveyance means. The processing unit performs a predetermined process on the surface of the plate-like member while flattening the surface of the plate-like member according to the region, and rotates the suction pad of the transport unit after passing through the processing unit. Thus, the plate-like member is rotated.

このような本発明においては、吸着パッドが板状部材の平面中央部に吸着するため、厚み方向に沿った線を中心として板状部材を所定角度回動させる工程を行うにあたって、一時的に吸着パッドを板状部材から離反させ、再び吸着パッドを板状部材に吸着させる工程を不要にできる。 In the present invention, since the suction pad is sucked to the center of the flat surface of the plate-like member, when the step of rotating the plate-like member by a predetermined angle about the line along the thickness direction is temporarily sucked. A step of separating the pad from the plate member and adsorbing the suction pad to the plate member again can be eliminated.

さらに、本発明の板状部材の搬送方法は、前記吸着パッドを前記搬送方向下流側に移動させている間に、前記搬送方向上流側に次の板状部材を投入することを特徴とする。 Further, the plate-like member conveyance method of the present invention is characterized in that the next plate-like member is thrown into the conveyance direction upstream side while the suction pad is moved to the conveyance direction downstream side.

このような本発明においては、吸着パッドを移動させている間に次の板状部材を投入することで、連続した作業が可能になり、工程タクトの短縮が図れることになる。 In the present invention, by inserting the next plate member while moving the suction pad, it is possible to perform continuous work and shorten the process tact.

本発明は、吸着パッドが板状部材の平面中央部に吸着するため、厚み方向に沿った線を中心として板状部材を所定角度回動させる工程を行うにあたって、一時的に吸着パッドを板状部材から離反させ、再び吸着パッドを板状部材に吸着させる必要がなく、これによりタクトを短縮できるものである。 In the present invention, since the suction pad is attracted to the flat central portion of the plate-like member, the suction pad is temporarily formed into a plate-like shape when performing the step of rotating the plate-like member by a predetermined angle about the line along the thickness direction. There is no need to separate the member from the member and cause the suction pad to be sucked again by the plate-like member, thereby shortening the tact.

本発明に係る第１実施形態の搬送装置を示す平面図The top view which shows the conveying apparatus of 1st Embodiment which concerns on this invention. 第１実施形態の搬送手段を示す要部斜視図The principal part perspective view which shows the conveyance means of 1st Embodiment. 第１実施形態の処理部を示す側面図The side view which shows the process part of 1st Embodiment. 板状部材の中央部の概念を示す模式平面図Schematic plan view showing the concept of the central part of the plate-like member （Ａ）は第１実施形態のモータに代えて変形例１の回転機構を示す斜視図、（Ｂ）は変形例２の回転機構を示す斜視図、（Ｃ）は変形例３の回転機構を示す斜視図(A) It is a perspective view which shows the rotation mechanism of the modification 1 instead of the motor of 1st Embodiment, (B) is a perspective view which shows the rotation mechanism of the modification 2, (C) is a rotation mechanism of the modification 3. Perspective view 第１実施形態の移動浮上部材に代えて変形例４の移動浮上部材を示す斜視図The perspective view which shows the movement floating member of the modification 4 instead of the movement floating member of 1st Embodiment. 第１実施形態の移動浮上部材に代えて変形例５の支持部材を示す斜視図The perspective view which shows the support member of the modification 5 instead of the movement levitation member of 1st Embodiment. 本発明に係る第２実施形態の表面平坦度向上手段を示す平面図The top view which shows the surface flatness improvement means of 2nd Embodiment which concerns on this invention 第２実施形態の処理部を示す側面図Side view showing the processing unit of the second embodiment 第３実施形態の処理部を示す側面図Side view showing the processing unit of the third embodiment 第３実施形態の表面平坦度向上手段を示す斜視図The perspective view which shows the surface flatness improvement means of 3rd Embodiment. 第４実施形態の処理部を示す側面図Side view showing the processing unit of the fourth embodiment 第４実施形態の表面平坦度向上手段による気体の流れを説明する断面図Sectional drawing explaining the flow of the gas by the surface flatness improvement means of 4th Embodiment 第５実施形態の処理部を示す側面図Side view showing the processing unit of the fifth embodiment 第５実施形態の表面平坦度向上手段による気体の流れを説明する断面図Sectional drawing explaining the flow of the gas by the surface flatness improvement means of 5th Embodiment

以下、本発明に係る板状部材の搬送装置および板状部材の搬送方法の実施形態を図面に基づいて説明する。
図１に示す第１実施形態の搬送装置１０は、ディスプレイに用いられる板状部材であるガラス基板１１を図１中左方から右方に向かって搬送するためのものである。
この搬送装置１０は、ガラス基板１１を浮上させるための浮上手段２０と、ガラス基板１１を搬送するための搬送手段３０と、搬送手段３０における搬送経路の途中に設けられた処理部４０とを備える。 DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of a plate-shaped member conveying apparatus and a plate-shaped member conveying method according to the present invention will be described with reference to the drawings.
A transport apparatus 10 according to the first embodiment shown in FIG. 1 is for transporting a glass substrate 11 that is a plate-like member used for a display from left to right in FIG.
The transport device 10 includes a levitation unit 20 for levitating the glass substrate 11, a transport unit 30 for transporting the glass substrate 11, and a processing unit 40 provided in the middle of the transport path in the transport unit 30. .

浮上手段２０は、上方に向かって複数の噴射口から気体を噴射することによりガラス基板１１を浮上させる浮上部材２１を複数有する。
浮上部材２１は、略扁平角筒状とされ、上面に複数の噴射口が規則的な等間隔で設けられている。これらのような浮上部材２１は、搬送方向（図１中、左右方向）に沿って平行、かつ、搬送方向に対して直交する方向に沿って所定間隔で複数配列されている。
なお、このような浮上手段２０は、搬送手段３０と干渉しないように、中央部に空隙２２が設けられている。 The levitation means 20 has a plurality of levitation members 21 that levitate the glass substrate 11 by injecting gas upward from a plurality of injection ports.
The levitation member 21 has a substantially flat rectangular tube shape, and a plurality of injection holes are provided at regular intervals on the upper surface. A plurality of such levitation members 21 are arranged at predetermined intervals along a direction parallel to the conveyance direction (left and right direction in FIG. 1) and perpendicular to the conveyance direction.
The levitation means 20 is provided with a gap 22 at the center so as not to interfere with the conveyance means 30.

図２にも示すように、搬送手段３０は、前述した空隙２２の直下に設けられたレール３１と、レール３１に沿って移動可能な案内部材３２と、案内部材３２に支持されているとともに、回転軸３６（図３参照）が垂直に配向されたモータ３３と、モータ３３の回転軸３６に連結された吸着パッド３４と、案内部材３２に支持された一対の移動浮上部材（支持部材）３５，３５とを有している。 As shown in FIG. 2, the conveying means 30 is supported by the rail 31 provided immediately below the gap 22, the guide member 32 movable along the rail 31, and the guide member 32. A motor 33 having a rotating shaft 36 (see FIG. 3) oriented vertically, a suction pad 34 connected to the rotating shaft 36 of the motor 33, and a pair of moving levitation members (supporting members) 35 supported by the guide member 32. , 35.

移動浮上部材３５，３５は、前述した浮上部材と同様に略扁平角筒状とされ、上面に複数の噴射口が規則的な等間隔で設けられている。これらの移動浮上部材３５，３５は、搬送方向に沿うとともに吸着パッド３４を挟んで設けられ、吸着パッド３４に連動して搬送方向に沿って移動可能となっている。
図１に戻って、このような搬送手段３０は、吸着パッドがガラス基板１１の平面中央部に吸着可能に配置されている。 The moving levitation members 35 and 35 are formed in a substantially flat rectangular tube shape like the above-described levitation member, and a plurality of injection ports are provided at regular intervals on the upper surface. These movable levitation members 35 and 35 are provided along the transport direction and sandwiching the suction pad 34, and are movable along the transport direction in conjunction with the suction pad 34.
Returning to FIG. 1, in such a conveying means 30, the suction pad is disposed so as to be suckable at the center of the plane of the glass substrate 11.

図３にも示すように、処理部４０は、ガラス基板１１の全表面（上向き全面）に露光処理を行うために、搬送方向に対して直交する方向に沿う門型の支持部材４１と、支持部材４１に沿って移動可能な露光装置４２とを備える。
このような処理部４０は、ガラス基板１１の表面平坦度が求められる処理を行うために、搬送方向に対して交差する方向に沿って噴射口の密集度を均一としている。
具体的には、処理部４０は、支持部材４１に沿って、すなわち搬送方向に対して交差する方向に沿って、空隙２２を避けて一対の横置浮上部材（表面平坦度向上手段）４３，４３が設けられている。 As shown also in FIG. 3, the processing unit 40 includes a gate-shaped support member 41 along the direction orthogonal to the transport direction, and a support in order to perform an exposure process on the entire surface (the entire upward surface) of the glass substrate 11. And an exposure device 42 that is movable along the member 41.
In order to perform the process for which the surface flatness of the glass substrate 11 is required, such a processing unit 40 makes the density of the injection ports uniform along the direction intersecting the transport direction.
Specifically, the processing unit 40 includes a pair of laterally levitating members (surface flatness improving means) 43, avoiding the gap 22, along the support member 41, that is, along the direction intersecting the transport direction. 43 is provided.

次に、以上のような搬送装置１０における搬送手順を説明する。
図１に示すように、あらかじめ浮上部材２１の噴射口から空気を噴射させた状態で、図１中、左上方から下方に向けて浮上手段２０における搬送方向上流側（図１中、左方）にガラス基板１１を投入し、浮上手段２０によりガラス基板１１が浮上部材２１から浮上した状態で、空隙２２に配置された吸着パッド３４をガラス基板１１の下面における中央部に吸着させることにより保持させる。 Next, the conveyance procedure in the above conveying apparatus 10 is demonstrated.
As shown in FIG. 1, in the state where air is previously jetted from the jet port of the floating member 21, the conveyance direction upstream side of the floating means 20 from the upper left to the lower side in FIG. 1 (left side in FIG. 1). The glass substrate 11 is put into the glass substrate 11, and the glass substrate 11 is lifted from the floating member 21 by the levitation means 20, and the suction pad 34 disposed in the gap 22 is held by being attracted to the central portion of the lower surface of the glass substrate 11. .

図４に示すように、吸着パッドをガラス基板の下面における中央部とは、対角線の交点を中心として所定の半径で描いた円Ａ内を指す。
図４における円Ｂは、吸着パッドをガラス基板の中心、すなわち、対角線の交点に吸着させて回動させた場合のガラス基板の角部の軌跡を示し、図４における円Ｃは、安全を見込んで、他の構造物にガラス基板が干渉しない半径である。
そして、図４における円Ａの半径は、ガラス基板の中心に対してずれた位置に吸着パッドが吸着しても、ガラス基板の角部の軌跡が図４における円Ｃから突出しない距離に設定されている（図４中、円Ｄ参照）。 As shown in FIG. 4, the central portion of the suction pad on the lower surface of the glass substrate refers to the inside of a circle A drawn with a predetermined radius around the intersection of diagonal lines.
Circle B in FIG. 4 shows the locus of the corner of the glass substrate when the suction pad is rotated at the center of the glass substrate, that is, at the intersection of the diagonal lines, and circle C in FIG. Thus, the radius is such that the glass substrate does not interfere with other structures.
The radius of the circle A in FIG. 4 is set to a distance at which the locus of the corner of the glass substrate does not protrude from the circle C in FIG. 4 even if the suction pad is sucked at a position shifted from the center of the glass substrate. (See circle D in FIG. 4).

再び図１に戻って、搬送手段３０の吸着パッド３４を回動させることによりガラス基板１１を所定角度回動させた後、吸着パッド３４と、吸着パッド３４を挟んで搬送方向の上流側および下流側に設けられた移動浮上部材３５，３５とを搬送方向に沿って上流側から下流側に移動させることによりガラス基板１１を搬送し、処理部４０の支持部材４１に沿って設けられた横置浮上部材４３，４３によりガラス基板１１の表面を平坦化させながら処理部４０により露光処理を行う。 Returning to FIG. 1 again, after rotating the suction pad 34 of the transport means 30 to rotate the glass substrate 11 by a predetermined angle, the suction pad 34 and the suction pad 34 are sandwiched between the upstream side and the downstream side in the transport direction. The glass substrate 11 is conveyed by moving the movable levitation members 35, 35 provided on the side from the upstream side to the downstream side in the conveyance direction, and is disposed horizontally along the support member 41 of the processing unit 40. Exposure processing is performed by the processing unit 40 while the surface of the glass substrate 11 is flattened by the floating members 43 and 43.

その後、搬送手段３０の吸着パッド３４を回動させることによりガラス基板１１を回動させ、次工程に搬出する。
なお、搬送手段３０が搬送方向下流側に移動している間、搬送方向上流側に次のガラス基板１１を投入し、浮上手段２０によりガラス基板１１が浮上部材２１から浮上した状態で、搬送手段３０が初期位置（上流側）に復帰するまで待機させる。 Then, the glass substrate 11 is rotated by rotating the suction pad 34 of the conveying means 30 and carried out to the next process.
While the transport unit 30 is moving downstream in the transport direction, the next glass substrate 11 is loaded on the upstream side in the transport direction, and the transport unit 30 is in a state where the glass substrate 11 is levitated from the levitation member 21 by the levitation unit 20. Wait until 30 returns to the initial position (upstream side).

以上のような第１実施形態によれば、ガラス基板１１の表面平坦度が求められる処理を行う処理部４０おいて、搬送方向に対して交差する方向に沿って噴射口の密集度を均一としたため、従来に比較して処理部４０においてガラス基板１１の表面が波打つ虞が少なく、露光処理等を高精度に行える。
特に、搬送方向に対して交差する方向に沿って横置浮上部材４３，４３を配設することにより噴射口の密集度を均一としたため、処理部４０においてガラス基板１１の表面が波打つ虞を確実に少なくできる。 According to the first embodiment as described above, in the processing unit 40 that performs processing for which the surface flatness of the glass substrate 11 is required, the density of the injection ports is made uniform along the direction intersecting the transport direction. Therefore, there is less possibility that the surface of the glass substrate 11 is undulated in the processing unit 40 as compared with the conventional case, and exposure processing and the like can be performed with high accuracy.
In particular, by arranging the horizontal floating members 43, 43 along the direction intersecting the transport direction, the density of the injection ports is made uniform, so that the surface of the glass substrate 11 in the processing unit 40 can be reliably corrugated. Can be less.

また、吸着パッド３４がガラス基板１１の平面中央部に吸着するため、厚み方向に沿った線を中心としてガラス基板１１を所定角度回動させる工程を行うにあたって、一時的に吸着パッド３４をガラス基板１１から離反させ、再び吸着パッド３４をガラス基板１１に吸着させる必要がなく、これによりタクトを短縮できる。 Further, since the suction pad 34 is attracted to the center of the flat surface of the glass substrate 11, when performing the step of rotating the glass substrate 11 by a predetermined angle about the line along the thickness direction, the suction pad 34 is temporarily placed on the glass substrate. 11, it is not necessary to separate the suction pad 34 from the glass substrate 11 again, thereby reducing the tact time.

特に、搬送方向に沿って移動可能なモータ３３の回転軸３６（図３参照）に吸着パッド３４が連結されているため、搬送方向上流側に供給されたガラス基板１１を搬送方向下流側から搬出するまで吸着パッド３４を離反、再吸着させる必要がなく、これにより更にタクトを短縮できる。
さらに、搬送手段３０が搬送方向下流側に移動している間、搬送方向上流側に次のガラス基板１１を投入することで、連続した作業が可能になり、タクトを一層短縮できる。 In particular, since the suction pad 34 is connected to the rotation shaft 36 (see FIG. 3) of the motor 33 that can move along the transport direction, the glass substrate 11 supplied to the upstream side in the transport direction is unloaded from the downstream side in the transport direction. Thus, the suction pad 34 does not need to be separated and re-sucked until the tact time is reduced.
Furthermore, while the transport means 30 is moving downstream in the transport direction, by inserting the next glass substrate 11 on the upstream side in the transport direction, continuous work can be performed, and the tact can be further shortened.

また、搬送手段３０が、吸着パッド３４に連動して搬送方向に沿って移動可能な移動浮上部材３５，３５を有しているため、搬送経路に空隙２２があっても、ガラス基板１１を確実に浮上させた状態で搬送できる。
特に、吸着パッド３４を挟んで移動浮上部材３５，３５が一対設けられているため、吸着パッド３４をガラス基板１１の平面中央部に吸着させ場合にも、ガラス基板１１を均等に浮上させることができる。 In addition, since the transport means 30 includes the movable levitation members 35 and 35 that can move in the transport direction in conjunction with the suction pad 34, the glass substrate 11 can be reliably secured even if there is a gap 22 in the transport path. It can be transported in a state where it is levitated.
In particular, since a pair of moving levitation members 35 and 35 are provided across the suction pad 34, even when the suction pad 34 is attracted to the center of the plane of the glass substrate 11, the glass substrate 11 can be evenly levitated. it can.

つぎに、第１実施形態の搬送装置１０に対する変形例１〜変形例５を図５〜図７に基づいて説明する。なお、変形例１〜変形例５において、搬送装置１０と同一・類似部材については同じ符号を付して説明を省略する。
（変形例１）
第１実施形態の搬送装置１０は、回転軸３６を回転させる手段としてモータ３３で回転軸３６を直接回転させるダイレクトドライブモータ構成について説明したが、図５（Ａ）に示す回転機構５０を用いることも可能である。
回転機構５０は、モータ５１およびギヤ５２を組み合わせたものである。回転機構５０によれば、モータ５１を回転することでギヤ５２が回転し、ギヤ５２が回転することで回転軸３６とともに吸着パッド３４が回転する。
変形例１の回転機構５０によれば、ダイレクトドライブモータを使用する必要がないため、搬送装置１０の製造コストを低くできるという効果が得られる。 Next, Modifications 1 to 5 with respect to the transport apparatus 10 according to the first embodiment will be described with reference to FIGS. Note that, in the first to fifth modifications, the same or similar members as those of the transport device 10 are denoted by the same reference numerals and description thereof is omitted.
(Modification 1)
The transport device 10 according to the first embodiment has described the direct drive motor configuration in which the rotation shaft 36 is directly rotated by the motor 33 as a means for rotating the rotation shaft 36. However, the rotation mechanism 50 shown in FIG. Is also possible.
The rotation mechanism 50 is a combination of a motor 51 and a gear 52. According to the rotating mechanism 50, the gear 52 rotates by rotating the motor 51, and the suction pad 34 rotates together with the rotating shaft 36 by rotating the gear 52.
According to the rotation mechanism 50 of the first modification, since it is not necessary to use a direct drive motor, an effect that the manufacturing cost of the transport apparatus 10 can be reduced is obtained.

（変形例２）
また、第１実施形態の搬送装置１０に用いたダイレクトドライブモータ構成に代えて、図５（Ｂ）に示す回転機構５５を用いることも可能である。
回転機構５５は、エア駆動源５６およびギヤ５７を組み合わせたものである。回転機構５５によれば、エア駆動源５６を駆動することでギヤ５７が回転し、ギヤ５７が回転することで回転軸３６とともに吸着パッド３４が回転する。
変形例２の回転機構５５によれば、ダイレクトドライブモータを使用する必要がないため、搬送装置１０の製造コストを低くできるという効果が得られる。 (Modification 2)
Further, instead of the direct drive motor configuration used in the transport apparatus 10 of the first embodiment, a rotation mechanism 55 shown in FIG. 5B can be used.
The rotation mechanism 55 is a combination of an air drive source 56 and a gear 57. According to the rotation mechanism 55, the gear 57 rotates by driving the air drive source 56, and the suction pad 34 rotates together with the rotating shaft 36 by rotating the gear 57.
According to the rotation mechanism 55 of the second modification, since it is not necessary to use a direct drive motor, an effect that the manufacturing cost of the transport apparatus 10 can be reduced is obtained.

（変形例３）
さらに、第１実施形態の搬送装置１０に用いたダイレクトドライブモータ構成に代えて、図５（Ｃ）に示す回転機構６０を用いることも可能である。
回転機構６０は、モータ６１および無端状ベルト６２を組み合わせたものである。回転機構６０によれば、モータ６１を回転することで無端状ベルト６２が回転し、無端状ベルト６２が回転することで回転軸３６とともに吸着パッド３４が回転する。
変形例３の回転機構６０によれば、ダイレクトドライブモータを使用する必要がないため、搬送装置１０の製造コストを低くできるという効果が得られる。 (Modification 3)
Furthermore, instead of the direct drive motor configuration used in the transport apparatus 10 of the first embodiment, a rotation mechanism 60 shown in FIG. 5C can be used.
The rotation mechanism 60 is a combination of a motor 61 and an endless belt 62. According to the rotating mechanism 60, the endless belt 62 rotates by rotating the motor 61, and the suction pad 34 rotates together with the rotating shaft 36 by rotating the endless belt 62.
According to the rotation mechanism 60 of the third modification, since it is not necessary to use a direct drive motor, an effect that the manufacturing cost of the transport apparatus 10 can be reduced is obtained.

（変形例４）
第１実施形態の搬送装置１０は、吸着パッド３４を挟んで搬送方向上流側および搬送方向下流側に一対の移動浮上部材３５，３５を設けたが、これに限らないで、例えば、図６に示すように、搬送方向上流側に移動浮上部材３５，３５を並列に複数本配置し、かつ、搬送方向下流側に移動浮上部材３５，３５を並列に複数本配置することも可能である。
変形例４によれば、搬送方向上流側および搬送方向下流側にそれぞれ移動浮上部材３５，３５が並列に複数本配置されているため、浮上部材２１間の隙間を広く確保でき、その結果、吸着パッド３４を大きくでき、ガラス基板１１に対する吸着力をあげることができる。
また、これらにより、より大きなガラス基板１１も回転させることが可能となる。 (Modification 4)
The transport apparatus 10 according to the first embodiment has the pair of movable levitation members 35 and 35 provided upstream in the transport direction and downstream in the transport direction with the suction pad 34 interposed therebetween. As shown, a plurality of moving levitation members 35, 35 can be arranged in parallel on the upstream side in the transport direction, and a plurality of moving levitation members 35, 35 can be arranged in parallel on the downstream side in the transport direction.
According to the modified example 4, since a plurality of the movable levitation members 35 and 35 are arranged in parallel on the upstream side in the transport direction and the downstream side in the transport direction, a wide gap between the levitation members 21 can be secured, and as a result, the adsorption The pad 34 can be enlarged, and the adsorption power to the glass substrate 11 can be increased.
Moreover, the larger glass substrate 11 can also be rotated by these.

（変形例５）
また、第１実施形態の搬送装置１０の移動浮上部材３５，３５に代えて、図７（Ａ），（Ｂ）に示すように、支持部材６５を用いることも可能である。
支持部材６５は、ガラス基板１１に対して接触するとともに回動可能な複数の転動体６６と、複数の転動体６６を回転可能に支持するベース６７とを備えている。
変形例５によれば、浮上部材を用いないため、部材コストを低減できるとともに、エア消費量を抑えることができる。 (Modification 5)
Further, instead of the moving levitation members 35 and 35 of the transport apparatus 10 of the first embodiment, as shown in FIGS. 7A and 7B, a support member 65 can be used.
The support member 65 includes a plurality of rolling elements 66 that can rotate while being in contact with the glass substrate 11 and a base 67 that rotatably supports the plurality of rolling elements 66.
According to the modified example 5, since the floating member is not used, the member cost can be reduced and the air consumption can be suppressed.

つぎに、第２実施形態〜第５実施形態の板状部材の搬送装置および板状部材の搬送方法を図８〜図１５に基づいて説明する。なお、第２実施形態〜第５実施形態において、第１実施形態の搬送装置１０と同一・類似部材については同じ符号を付して説明を省略する。 Next, a plate-like member conveying apparatus and a plate-like member conveying method according to the second to fifth embodiments will be described with reference to FIGS. In the second embodiment to the fifth embodiment, the same or similar members as those of the transport apparatus 10 of the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

（第２実施形態）
図８、図９に示す第２実施形態の搬送装置７０は、第１実施形態の横置浮上部材４３，４３に代えて、表面平坦度向上手段７１を備えたものであり、その他の構成は第１実施形態の搬送装置１０と同じである。
表面平坦度向上手段７１は、処理部４０において、浮上部材２１が搬送方向に対して直交する方向に沿って所定間隔で連続的に複数配列され、浮上部材２１間に区間浮上部材７２が備えられている。 (Second Embodiment)
The transport device 70 of the second embodiment shown in FIGS. 8 and 9 is provided with a surface flatness improving means 71 in place of the laterally levitating members 43 and 43 of the first embodiment, and other configurations are as follows. This is the same as the transport apparatus 10 of the first embodiment.
In the processing unit 40, the surface flatness improving means 71 includes a plurality of floating members 21 that are continuously arranged at predetermined intervals along a direction orthogonal to the transport direction, and a section floating member 72 is provided between the floating members 21. ing.

区間浮上部材７２は、図９に示すように、処理部４０の領域４０Ａのみに配置されるように長さ寸法がＬと短く形成されている。
この区間浮上部材７２は、第１実施形態の横置浮上部材４３，４３と同様に、上面７２Ａの複数の噴射口から上方に向かって気体を噴射することによりガラス基板１１を浮上させる機能を備えている。
よって、浮上部材２１間に区間浮上部材７２を備えることで、第１実施形態の横置浮上部材４３，４３と同様に、噴射口の密集度を均一として処理部４０においてガラス基板１１の表面が波打つ虞を確実に少なくできる。 As shown in FIG. 9, the section floating member 72 is formed to have a short length L so that it is disposed only in the region 40 A of the processing unit 40.
The section floating member 72 has a function of floating the glass substrate 11 by injecting gas upward from a plurality of injection ports on the upper surface 72A, similarly to the horizontal floating members 43 and 43 of the first embodiment. ing.
Therefore, by providing the section levitation member 72 between the levitation members 21, the surface of the glass substrate 11 is made uniform in the processing unit 40 with the density of the injection ports made uniform, similarly to the horizontal levitation members 43 and 43 of the first embodiment. The risk of undulation can be reliably reduced.

これにより、第２実施形態の搬送装置７０によれば、第１実施形態と同様に、ガラス基板１１の表面平坦度が求められる処理を行う処理部４０おいて、ガラス基板１１の表面が波打つ虞が少なく、露光処理等を高精度に行える。 Thereby, according to the conveyance apparatus 70 of 2nd Embodiment, similarly to 1st Embodiment, in the process part 40 which performs the process for which the surface flatness of the glass substrate 11 is calculated | required, there exists a possibility that the surface of the glass substrate 11 may wave. The exposure process and the like can be performed with high accuracy.

（第３実施形態）
図１０、図１１に示す第３実施形態の搬送装置８０は、第１実施形態の横置浮上部材４３，４３に代えて、表面平坦度向上手段８１を備えたものであり、その他の構成は第１実施形態の搬送装置１０と同じである。
表面平坦度向上手段８１は、処理部４０において、浮上部材２１が搬送方向に対して直交する方向に沿って所定間隔で連続的に複数配列されるとともに、上方に向かって複数の噴射口から気体を噴射するサポートパッド８２を複数有し、各サポートパッド８２が各浮上部材２１間に敷設されている。 (Third embodiment)
The transport apparatus 80 of the third embodiment shown in FIGS. 10 and 11 is provided with a surface flatness improving means 81 in place of the horizontal levitation members 43 and 43 of the first embodiment, and other configurations are as follows. This is the same as the transport apparatus 10 of the first embodiment.
In the processing unit 40, the surface flatness improving means 81 is configured such that a plurality of the floating members 21 are continuously arranged at predetermined intervals along a direction orthogonal to the transport direction, and gas is emitted upward from the plurality of injection ports. A plurality of support pads 82 for injecting water are provided, and each support pad 82 is laid between the floating members 21.

各サポートパッド８２は、処理部４０の領域４０Ａ（図８参照）のみに配置されている。
このサポートパッド８２は、第１実施形態の横置浮上部材４３，４３と同様に、上面８２Ａの複数の噴射口から上方に向かって気体を噴射することによりガラス基板１１を浮上させる機能を備えている。
よって、浮上部材２１間にサポートパッド８２を複数敷設することで、第１実施形態の横置浮上部材４３，４３と同様に、噴射口の密集度を均一として処理部４０においてガラス基板１１の表面が波打つ虞を確実に少なくできる。 Each support pad 82 is disposed only in the region 40A (see FIG. 8) of the processing unit 40.
The support pad 82 has a function of floating the glass substrate 11 by injecting gas upward from a plurality of injection ports on the upper surface 82A, similarly to the horizontal floating members 43 and 43 of the first embodiment. Yes.
Therefore, by laying a plurality of support pads 82 between the levitation members 21, the surface of the glass substrate 11 in the processing unit 40 can be made uniform in the same manner as in the horizontal levitation members 43 and 43 of the first embodiment. It is possible to reliably reduce the risk of undulation.

これにより、第３実施形態の搬送装置８０によれば、第１実施形態と同様に、ガラス基板１１の表面平坦度が求められる処理を行う処理部４０おいて、ガラス基板１１の表面が波打つ虞が少なく、露光処理等を高精度に行える。 Thereby, according to the conveyance apparatus 80 of 3rd Embodiment, similarly to 1st Embodiment, in the process part 40 which performs the process for which the surface flatness of the glass substrate 11 is calculated | required, there exists a possibility that the surface of the glass substrate 11 may wave. The exposure process and the like can be performed with high accuracy.

（第４実施形態）
図１２、図１３に示す第４実施形態の搬送装置９０は、第１実施形態の横置浮上部材４３，４３に代えて、表面平坦度向上手段９１を備えたものであり、その他の構成は第１実施形態の搬送装置１０と同じである。
表面平坦度向上手段９１は、浮上手段２０における処理部４０に対応する領域４０Ａ（図８参照）において、上面９２Ａに、気体を上方に噴射する噴射口と、外気を吸引する吸引口とをそれぞれ備える噴射吸引部材９２を有している。
噴射吸引部材９２に外気を吸引する吸引口を備えることで、ガラス基板１１の下方の気体を適正に保ち、領域４０Ａにおいてガラス基板１１の表面が波打つ虞を確実に少なくできる。 (Fourth embodiment)
The transport device 90 of the fourth embodiment shown in FIGS. 12 and 13 is provided with a surface flatness improving means 91 in place of the laterally levitating members 43 and 43 of the first embodiment, and other configurations are as follows. This is the same as the transport apparatus 10 of the first embodiment.
The surface flatness improving unit 91 includes an injection port for injecting gas upward and a suction port for sucking outside air on the upper surface 92A in the region 40A (see FIG. 8) corresponding to the processing unit 40 in the levitation unit 20. An injection suction member 92 is provided.
By providing the jetting suction member 92 with a suction port for sucking outside air, the gas below the glass substrate 11 can be maintained appropriately, and the risk of the surface of the glass substrate 11 undulating in the region 40A can be reliably reduced.

これにより、第４実施形態の搬送装置９０によれば、第１実施形態と同様に、ガラス基板１１の表面平坦度が求められる処理を行う処理部４０おいて、ガラス基板１１の表面が波打つ虞が少なく、露光処理等を高精度に行える。 Thereby, according to the transfer apparatus 90 of 4th Embodiment, similarly to 1st Embodiment, in the process part 40 which performs the process for which the surface flatness of the glass substrate 11 is calculated | required, there exists a possibility that the surface of the glass substrate 11 may wave. The exposure process and the like can be performed with high accuracy.

（第５実施形態）
図１４、図１５に示す第５実施形態の搬送装置１００は、第１実施形態の横置浮上部材４３，４３に代えて、表面平坦度向上手段１０１を備えたものであり、その他の構成は第１実施形態の搬送装置１０と同じである。
表面平坦度向上手段１０１は、浮上手段２０における処理部４０に対応する領域４０Ａ（図８参照）において、浮上部材２１が、搬送方向に対して直交する方向に沿って所定間隔で複数配列されているとともに、各浮上部材２１間の隙間を覆う被覆部材１０２を有している。
各浮上部材２１間の隙間を覆う被覆部材１０２を備えることで、ガラス基板１１の下方の気体を適正に保ち、領域４０Ａにおいてガラス基板１１の表面が波打つ虞を確実に少なくできる。 (Fifth embodiment)
The transport apparatus 100 of the fifth embodiment shown in FIGS. 14 and 15 is provided with a surface flatness improving means 101 in place of the horizontal levitation members 43 and 43 of the first embodiment, and other configurations are as follows. This is the same as the transport apparatus 10 of the first embodiment.
In the surface flatness improving means 101, a plurality of floating members 21 are arranged at predetermined intervals along a direction orthogonal to the transport direction in a region 40 A (see FIG. 8) corresponding to the processing unit 40 in the floating means 20. And a covering member 102 that covers the gaps between the floating members 21.
By providing the covering member 102 that covers the gaps between the floating members 21, the gas below the glass substrate 11 can be appropriately maintained, and the risk of the surface of the glass substrate 11 undulating in the region 40A can be reliably reduced.

これにより、第４実施形態の搬送装置１０１によれば、第１実施形態と同様に、ガラス基板１１の表面平坦度が求められる処理を行う処理部４０おいて、ガラス基板１１の表面が波打つ虞が少なく、露光処理等を高精度に行える。 Thereby, according to the conveyance apparatus 101 of 4th Embodiment, similarly to 1st Embodiment, in the process part 40 which performs the process for which the surface flatness of the glass substrate 11 is calculated | required, there exists a possibility that the surface of the glass substrate 11 may wave. The exposure process and the like can be performed with high accuracy.

なお、本発明は、前述した実施形態に限定されるものでなく、前述した実施形態において例示した板状部材，浮上部材，浮上手段，搬送手段，処理部，吸着パッド，モータ，移動浮上部材，回転機構，支持部材，表面平坦度向上手段等の適宜な変形，改良等が可能である。 The present invention is not limited to the above-described embodiment, and the plate-like member, the floating member, the floating means, the conveying means, the processing unit, the suction pad, the motor, the moving floating member exemplified in the above-described embodiment, Appropriate deformation and improvement of the rotation mechanism, the support member, the surface flatness improving means, etc. are possible.

１０，７０，８０，９０，１００搬送装置
１１ガラス基板（板状部材）
２０浮上手段
２１浮上部材
３０搬送手段
４０処理部
３３モータ
３４吸着パッド
３５移動浮上部材（支持部材）
４３横置浮上部材（表面平坦度向上手段）
６５支持部材
７１，８１，９１，１０１表面平坦度向上手段 10, 70, 80, 90, 100 Conveying device 11 Glass substrate (plate-like member)
DESCRIPTION OF SYMBOLS 20 Floating means 21 Floating member 30 Conveying means 40 Processing part 33 Motor 34 Suction pad 35 Moving floating member (supporting member)
43 Horizontally levitating member (surface flatness improving means)
65 Support members 71, 81, 91, 101 Surface flatness improving means

Claims

上方に向かって複数の噴射口から気体を噴射することにより板状部材を浮上させる浮上部材を有する浮上手段と、
前記浮上手段により前記板状部材が前記浮上部材から浮上した状態で前記板状部材を保持するとともに前記搬送方向に沿って下流側に向かって前記板状部材を搬送する搬送手段とを備える板状部材の搬送装置であって、
前記搬送手段が、前記搬送方向に沿って移動可能であるとともに前記板状部材の厚み方向に沿った線を中心として軸回転可能な吸着パッドを有し、
前記吸着パッドが前記板状部材の平面中央部に吸着することを特徴とする板状部材の搬送装置。 Levitation means having a levitation member that levitates the plate-like member by injecting gas upward from a plurality of injection ports;
The plate-like member includes a conveying unit that holds the plate-like member in a state where the plate-like member is levitated from the levitating member by the levitating unit and conveys the plate-like member toward the downstream side along the conveying direction. A member conveying device comprising:
The transport means has a suction pad that is movable along the transport direction and rotatable about a line along the thickness direction of the plate-shaped member,
The plate-like member conveying apparatus, wherein the suction pad is sucked to a flat central portion of the plate-like member.

前記搬送手段が前記搬送方向に沿って移動可能な回転軸を有し、
前記吸着パッドが前記回転軸に連結されていることを特徴とする請求項１に記載した板状部材の搬送装置。 The transport means has a rotation shaft movable along the transport direction;
The plate-like member conveying apparatus according to claim 1, wherein the suction pad is connected to the rotating shaft.

板状部材を水平に維持する維持手段と、
前記板状部材を保持するとともに搬送方向上流側から搬送方向下流側に搬送する搬送手段とを備える板状部材の搬送装置であって、
前記搬送手段が、前記搬送方向に沿って移動可能であるとともに前記板状部材に吸着可能な吸着パッドと、
前記吸着パッドに連動して前記板状部材を支持する支持部材とを有していることを特徴とする板状部材の搬送装置。 Maintenance means for maintaining the plate-like member horizontally;
A plate-like member conveying apparatus comprising a conveying means that holds the plate-like member and conveys the plate-shaped member from the upstream side in the conveying direction to the downstream side in the conveying direction,
A suction pad that is movable along the transport direction and can be sucked by the plate member;
A plate-shaped member conveying apparatus comprising: a support member that supports the plate-shaped member in conjunction with the suction pad.

前記支持手段が、上方に向かって複数の噴射口から気体を噴射することにより前記板状部材を浮上させる浮上部材を有し、
前記支持部材が、前記浮上部材と同等機能を備える移動浮上部材であることを特徴とする請求項３に記載した板状部材の搬送装置。 The support means has a levitation member that levitates the plate member by injecting gas from a plurality of injection ports upward.
The said supporting member is a moving levitation member provided with the function equivalent to the said levitation member, The conveying apparatus of the plate-shaped member described in Claim 3 characterized by the above-mentioned.

前記支持部材が、前記板状部材に対して接触するとともに回動可能な転動体を備えていることを特徴とする請求項３に記載した板状部材の搬送装置。 The said supporting member is provided with the rolling body which can rotate while contacting with respect to the said plate-shaped member, The conveying apparatus of the plate-shaped member described in Claim 3 characterized by the above-mentioned.

前記支持部材が前記搬送方向に沿うとともに前記吸着パッドを挟んで搬送方向上流側および搬送方向下流側に設けられていることを特徴とする請求項３に記載した板状部材の搬送装置。 4. The plate-shaped member conveying apparatus according to claim 3, wherein the support member is provided along the conveying direction and on the upstream side in the conveying direction and the downstream side in the conveying direction with the suction pad interposed therebetween.

上方に向かって複数の噴射口から気体を噴射する浮上部材が搬送方向に沿って平行、かつ、前記搬送方向に対して直交する方向に沿って所定間隔で複数配列された浮上手段における搬送方向上流側に板状部材を投入し、
前記浮上手段により前記板状部材が前記浮上部材から浮上した状態で、前記各浮上部材間において吸着パッドを前記板状部材の下面における中央部に吸着させることにより保持し、
次いで、前記吸着パッドと、前記吸着パッドを挟んで搬送方向上流側および搬送方向下流側に設けられた移動浮上部材とを前記搬送方向上流側から前記搬送方向下流側に移動させることにより前記板状部材を搬送し、
前記搬送手段における搬送経路の途中において前記板状部材の表面平坦度向上手段を設けた領域により、前記板状部材の表面を平坦化させながら処理部により前記板状部材の表面に所定の処理を行い、
前記処理部を通過させた後に前記搬送手段の前記吸着パッドを回動させることにより前記板状部材を回動させることを特徴とする板状部材の搬送方法。 Upstream in the conveying direction in the levitation means in which a plurality of levitation members for injecting gas upward from the plurality of injection ports are arranged in parallel along the conveying direction and at a predetermined interval along a direction orthogonal to the conveying direction I put a plate-like member on the side,
In a state where the plate-like member is levitated from the levitation member by the levitation means, the suction pad is held between the levitation members by being adsorbed to the central portion of the lower surface of the plate-like member,
Next, by moving the suction pad and a moving levitation member provided on the upstream side in the transport direction and the downstream side in the transport direction across the suction pad from the upstream side in the transport direction to the downstream side in the transport direction, the plate shape Transport the parts,
A predetermined treatment is performed on the surface of the plate-like member by the processing unit while the surface of the plate-like member is flattened by an area provided with means for improving the surface flatness of the plate-like member in the middle of the conveyance path in the conveyance means. Done
A plate-shaped member conveying method, wherein the plate-shaped member is rotated by rotating the suction pad of the conveying means after passing through the processing section.

前記吸着パッドを前記搬送方向下流側に移動させている間に、前記搬送方向上流側に次の板状部材を投入することを特徴とする請求項７に記載の板状部材の搬送方法。 The method for transporting a plate-shaped member according to claim 7, wherein a next plate-shaped member is introduced upstream of the transport direction while the suction pad is moved downstream in the transport direction.