JP2010122118A - Measuring device - Google Patents

Measuring device Download PDF

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JP2010122118A
JP2010122118A JP2008297118A JP2008297118A JP2010122118A JP 2010122118 A JP2010122118 A JP 2010122118A JP 2008297118 A JP2008297118 A JP 2008297118A JP 2008297118 A JP2008297118 A JP 2008297118A JP 2010122118 A JP2010122118 A JP 2010122118A
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Japan
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guide
vibration
unit
mounting table
measuring machine
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Sadayuki Matsumiya
貞行 松宮
Koji Suzuki
浩二 鈴木
Masanori Arai
雅典 新井
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Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
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Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
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  • Vibration Prevention Devices (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a measuring device that overcomes the problems of a transportation limit and lowering of accuracy. <P>SOLUTION: A guide 2 and a placement table 5 are detachably coupled with a vibration transmission member 6, so that an image measuring device can be disassembled into the guide 2, a movable section 3 and the placement table 5, thereby each of the members 2, 3, 5 can be disassembly transported. Accordingly, the image measuring device can be increased in size without exceeding the transportation limit. In addition, a vibration generated at a guide 2 side and a vibration generated at a placement table 5 side can be transmitted to the other via the vibration transmission member 6, so that it is possible to suppress a relative vibration between a measuring section and an object to be measured "m" respectively provided at the members 2, 5, thereby suppressing lowering of a degree of precision due to the relative vibration. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

本発明は、測定機に関する。   The present invention relates to a measuring machine.

従来、ガイド部に沿って所定の方向に移動可能に設けられた測定部により被測定物を測定する測定機として、例えば画像測定機が知られている（例えば、特許文献１参照）。   2. Description of the Related Art Conventionally, for example, an image measuring machine is known as a measuring machine that measures an object to be measured by a measuring unit provided so as to be movable in a predetermined direction along a guide unit (see, for example, Patent Document 1).

特許文献１に記載の画像測定機は、ベース部と、ベース部上にＹ軸方向に沿って平行に設置された一対のガイド部と、ベース部上かつガイド部間に亘って設けられて被測定物が載置されるとともに、内部に被測定物を下から透過照明する照明手段が設けられた載置テーブル部と、ガイド部に跨って設けられ、ガイド部に沿ってＹ軸方向に移動可能な門型のＹ軸スライダ、およびＹ軸スライダに沿ってＸ軸方向に移動可能なＸ軸スライダからなる可動部と、Ｘ軸スライダに設けられ、被測定物を撮像する測定部と、を備えている。このような従来の画像測定機は、ガイド部および載置テーブル部がベース部上で一体に設けられた一体構造となっており、ユーザへ納品される際には、分割されることなく全体が梱包されて輸送される。   The image measuring machine described in Patent Document 1 is provided with a base part, a pair of guide parts installed on the base part in parallel along the Y-axis direction, and provided on the base part and between the guide parts. A measurement object is placed, and a placement table part provided with illumination means for transmitting and illuminating the object to be measured from below and a guide part are provided and moved in the Y-axis direction along the guide part. A portal-shaped Y-axis slider that can be moved, a movable part that is movable in the X-axis direction along the Y-axis slider, and a measurement part that is provided on the X-axis slider and images the object to be measured. I have. Such a conventional image measuring machine has an integral structure in which the guide portion and the mounting table portion are integrally provided on the base portion, and when delivered to the user, the whole is not divided. Packaged and transported.

また、ガイド部に沿って所定の方向に移動可能に設けられた測定部により被測定物を測定する測定機において、各部が分割可能な測定機としては、ガイド部が側面視門型に形成されたガントリー型の三次元測定機が知られている。ガントリー型の三次元測定機は、側面視門型の一対のガイド部と、ガイド部に跨って設けられてＹ軸方向に移動可能なＹ軸スライダ、Ｙ軸スライダに沿ってＸ軸方向に移動可能なＸ軸スライダ、およびＸ軸スライダに設けられてＺ軸方向に移動可能なＺ軸スライダからなる可動部と、Ｚ軸スライダの下端に取り付けられたタッチセンサプローブ等の測定部と、を備えている。被測定物は、ガイド部間において床上に設けられる。   Further, in a measuring instrument that measures an object to be measured by a measuring unit that is movably provided in a predetermined direction along the guide unit, the guide unit is formed in a side-view portal type as a measuring machine that can divide each unit. Gantry-type three-dimensional measuring machines are known. The gantry-type CMM is a pair of side-view guide units, a Y-axis slider that is provided across the guide units and can move in the Y-axis direction, and moves in the X-axis direction along the Y-axis slider. An X-axis slider that can be moved, a movable part that is provided on the X-axis slider and is movable in the Z-axis direction, and a measurement unit such as a touch sensor probe attached to the lower end of the Z-axis slider. ing. The object to be measured is provided on the floor between the guide portions.

このような三次元測定機は、被測定物を下から透過照明する必要がないため、照明手段が内部に設けられる載置テーブル部や、載置テーブル部をガイド部と一体にするためのベース部が存在しない。そのため、このような三次元測定機は、分割することが可能となっており、ユーザへ納品される際には分割輸送される。   Such a coordinate measuring machine does not need to illuminate the object to be measured from below, so that the mounting table portion in which the illumination means is provided and the base for integrating the mounting table portion with the guide portion There is no part. Therefore, such a three-dimensional measuring machine can be divided and is transported by division when delivered to the user.

特開２００６−２６６７４８号公報JP 2006-266748 A

ところで、画像測定機では、測定対象であるフラットディスプレイパネルの大型化に伴い、大型化が要望されている。しかしながら、従来の画像測定機は、一体構造であり、分割できないため、トレーラ等の輸送制限により、所定の寸法（幅３．５ｍ）以上には大きくできないという問題がある。   By the way, in the image measuring machine, with the increase in the size of the flat display panel which is a measurement target, an increase in size is desired. However, since the conventional image measuring machine has an integral structure and cannot be divided, there is a problem that it cannot be increased beyond a predetermined dimension (width 3.5 m) due to transportation restrictions such as a trailer.

一方、ガントリー型の三次元測定機では、各部を分割することができ、分割輸送することができるため、大型化が可能となっている。しかしながら、ガントリー型の三次元測定機では、被測定物が床上に設けられ、三次元測定機とは別個に設けられるため、床振動によって被測定物側にのみ大きく振動が伝達されたり、三次元測定機の駆動系によって三次元測定機の測定部側にのみ大きく振動が伝達されたりすることにより、測定部と被測定物との間に相対振動が生じ、精度、特に繰り返し精度が低下してしまうおそれがある。   On the other hand, in a gantry-type coordinate measuring machine, each part can be divided and can be divided and transported, so that the size can be increased. However, in a gantry type CMM, the object to be measured is provided on the floor and is provided separately from the CMM, so that vibration is greatly transmitted only to the object to be measured due to floor vibration, or three-dimensional If vibration is transmitted only to the measuring unit side of the CMM by the driving system of the measuring machine, relative vibration will occur between the measuring unit and the object to be measured, and the accuracy, especially the repeatability will decrease. There is a risk that.

本発明の目的は、輸送制限の問題および精度低下の問題を解決できる測定機を提供することにある。   An object of the present invention is to provide a measuring machine that can solve the problems of transportation restriction and accuracy reduction.

本発明の測定機は、床上に平行に設置された一対のガイド部と、前記一対のガイド部に跨って設けられ、前記ガイド部に沿って移動可能な可動部と、前記可動部に設けられ、被測定物を測定する測定部と、前記床上、かつ前記ガイド部間に設けられ、前記被測定物が載置される載置テーブル部とを備え、前記載置テーブル部と前記ガイド部とは、一方に生じた振動を他方に伝達する振動伝達部材により着脱可能に連結されていることを特徴とする。   The measuring instrument of the present invention is provided in a pair of guide portions installed in parallel on the floor, a movable portion provided across the pair of guide portions and movable along the guide portions, and the movable portion. A measuring unit for measuring an object to be measured, and a mounting table unit provided on the floor and between the guide units, on which the object to be measured is mounted, the mounting table unit and the guide unit described above Is characterized in that it is detachably connected by a vibration transmitting member that transmits vibration generated in one to the other.

本発明によれば、ガイド部と載置テーブル部とが振動伝達部材によって着脱可能に連結されるので、画像測定機をガイド部、可動部、および載置テーブル部等に分割することが可能となり、各部材を分割輸送することができる。そのため、輸送制限にかかることなく画像測定機を大型化することが可能となる。
また、ガイド部と載置テーブル部とが、一方に生じた振動を他方に伝達する振動伝達部材によって連結されるので、ガイド部側で生じた振動も載置テーブル部側で生じた振動も、振動伝達部材を介して他方に伝達されることとなる。そのため、各側に設けられた測定部と被測定物との間の相対振動を抑えることができ、相対振動による精度低下を抑えることができる。 According to the present invention, since the guide unit and the mounting table unit are detachably connected by the vibration transmitting member, the image measuring machine can be divided into a guide unit, a movable unit, a mounting table unit, and the like. Each member can be divided and transported. Therefore, it is possible to increase the size of the image measuring machine without being restricted in transportation.
Further, since the guide portion and the mounting table portion are connected by a vibration transmission member that transmits the vibration generated in one to the other, the vibration generated on the guide portion side and the vibration generated on the mounting table portion side are It is transmitted to the other through the vibration transmitting member. Therefore, it is possible to suppress relative vibration between the measurement unit provided on each side and the object to be measured, and it is possible to suppress deterioration in accuracy due to relative vibration.

本発明の測定機では、前記ガイド部は、前記可動部を移動可能に支持するガイド部本体と、前記ガイド部本体下に設けられ、前記ガイド部本体を支持する支持台とを備え、前記支持台に前記振動伝達部材の一端が連結されていることが好ましい。   In the measuring instrument according to the aspect of the invention, the guide unit includes a guide unit main body that movably supports the movable unit, and a support base that is provided below the guide unit main body and supports the guide unit main body. It is preferable that one end of the vibration transmission member is connected to the base.

本発明によれば、支持台に、振動伝達部材の一端が連結されるので、ガイド部本体に、振動伝達部材から力が加えられることがない。そのため、ガイド部本体の真直精度を良好に維持することができる。   According to the present invention, since one end of the vibration transmission member is connected to the support base, no force is applied to the guide body from the vibration transmission member. Therefore, the straightness accuracy of the guide part main body can be maintained satisfactorily.

本発明の測定機では、前記載置テーブル部には、鉛直面が形成され、前記ガイド部には、鉛直面と水平面とを備えた段差部が形成され、前記振動伝達部材の一端には、前記ガイド部の前記水平面に連結される水平な第１連結部が形成され、他端には、前記載置テーブル部の前記鉛直面に連結される鉛直な第２連結部が形成されていることが好ましい。   In the measuring machine of the present invention, the mounting table portion is formed with a vertical surface, the guide portion is formed with a step portion having a vertical surface and a horizontal surface, and one end of the vibration transmitting member is A horizontal first connecting portion connected to the horizontal surface of the guide portion is formed, and a vertical second connecting portion connected to the vertical surface of the mounting table portion is formed at the other end. Is preferred.

本発明によれば、振動伝達部材の一端に水平な第１連結部が形成されているので、第１連結部をガイド部の水平面の適宜の位置に連結することができ、ガイド部および載置テーブル部の水平方向の相対位置に誤差が生じても、第１連結部をガイド部に連結することができる。また、振動伝達部材の他端に鉛直な第２連結部が形成されているので、第２連結部を載置テーブル部の鉛直面の適宜の位置に連結することができる。そのため、第１連結部をガイド部の水平面に連結することによって決められる第２連結部の高さ位置で、第２連結部を載置テーブル部の鉛直面に連結することができる。従って、振動伝達部材は、ガイド部および載置テーブル部の相対位置に誤差が生じても、各部材を確実に連結することができる。   According to the present invention, since the first horizontal connecting portion is formed at one end of the vibration transmitting member, the first connecting portion can be connected to an appropriate position on the horizontal surface of the guide portion. Even if an error occurs in the horizontal relative position of the table portion, the first connecting portion can be connected to the guide portion. Moreover, since the 2nd perpendicular | vertical connection part is formed in the other end of a vibration transmission member, a 2nd connection part can be connected to the appropriate position of the vertical surface of a mounting table part. Therefore, the second connecting portion can be connected to the vertical surface of the mounting table portion at the height position of the second connecting portion determined by connecting the first connecting portion to the horizontal surface of the guide portion. Therefore, the vibration transmitting member can reliably connect the members even if an error occurs in the relative positions of the guide portion and the placement table portion.

〔第１実施形態〕
以下、本発明の第１実施形態を図面に基づいて説明する。
図１は、本実施形態に係る画像測定機１を示す正面図、図２は、画像測定機１を示す側面図である。
画像測定機１は、図１および図２に示すように、床上にＹ軸方向に沿って平行に設置された一対のガイド部２と、ガイド部２に跨って設けられ、Ｙ軸方向にスライド移動可能な可動部３と、可動部３の下端に設けられ、被測定物ｍを測定する測定部４と、床上かつガイド部２間に設けられ、被測定物ｍが載置される載置テーブル部５とを備えている。 [First Embodiment]
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a first embodiment of the invention will be described with reference to the drawings.
FIG. 1 is a front view showing an image measuring machine 1 according to this embodiment, and FIG. 2 is a side view showing the image measuring machine 1.
As shown in FIG. 1 and FIG. 2, the image measuring machine 1 is provided on the floor in parallel with the Y-axis direction along a pair of guide parts 2 and the guide part 2, and slides in the Y-axis direction. A movable part 3 that can be moved, a measurement part 4 that is provided at the lower end of the movable part 3 and that measures the measurement object m, and a placement that is provided on the floor and between the guide parts 2 and on which the measurement object m is placed. And a table portion 5.

ガイド部２は、可動部３をスライド移動可能に支持するガイド部本体２１と、ガイド部本体２１下に設けられ、ガイド部本体２１を支持する支持台２２とを備えている。支持台２２は、ガイド部本体２１より大きな幅に形成されており、これにより、ガイド部本体２１と支持台２２との間には段差部２３が形成されている。段差部２３は、ガイド部本体２１の壁面である鉛直面２３１と、支持台２２の上面である水平面２３２とから構成されている。   The guide unit 2 includes a guide unit main body 21 that supports the movable unit 3 so as to be slidable, and a support base 22 that is provided below the guide unit main body 21 and supports the guide unit main body 21. The support base 22 is formed to have a larger width than the guide part main body 21, whereby a stepped part 23 is formed between the guide part main body 21 and the support base 22. The step portion 23 includes a vertical surface 231 that is a wall surface of the guide portion main body 21 and a horizontal surface 232 that is an upper surface of the support base 22.

可動部３は、ガイド部２に跨って設けられ、ガイド部２に沿ってＹ軸方向にスライド移動可能な門型のＹ軸スライダ３１と、Ｙ軸スライダ３１に沿ってＸ軸方向にスライド移動可能に設けられたＸ軸スライダ３２とを備えている。また、可動部３は、ガイド部２と分割可能に設けられている。   The movable portion 3 is provided across the guide portion 2 and is slidably moved in the X-axis direction along the Y-axis slider 31 and a portal-type Y-axis slider 31 that is slidable in the Y-axis direction along the guide portion 2. And an X-axis slider 32 provided as possible. The movable part 3 is provided so as to be separable from the guide part 2.

測定部４は、Ｘ軸スライダ３２の下端に設けられている。測定部４は、ＣＣＤ（Charge Coupled Device）カメラを備え、載置テーブル部５上の被測定物ｍを撮像する。撮像された被測定物ｍの画像データは、図示しないコンピュータに出力され、このコンピュータにより、被測定物ｍの形状および寸法等が解析される。   The measurement unit 4 is provided at the lower end of the X-axis slider 32. The measuring unit 4 includes a CCD (Charge Coupled Device) camera and images the object m to be measured on the mounting table unit 5. The imaged image data of the measured object m is output to a computer (not shown), and the computer analyzes the shape, dimensions, and the like of the measured object m.

載置テーブル部５は、直方体状に形成され、上部には、被測定物ｍが載置される図示しないガラス板が設けられている。また、載置テーブル部５の内部には、被測定物ｍを下からガラス板を介して透過照明する図示しない照明手段が設けられている。このような載置テーブル部５のガイド部２との各対向面には、鉛直面５１が形成されている。   The placing table unit 5 is formed in a rectangular parallelepiped shape, and a glass plate (not shown) on which the object to be measured m is placed is provided on the upper part. In addition, an illuminating unit (not shown) that illuminates the object to be measured m from below through a glass plate is provided inside the placing table unit 5. A vertical surface 51 is formed on each surface of the mounting table unit 5 facing the guide unit 2.

図３は、振動伝達部材６を示す拡大図である。
このような載置テーブル部５は、図３に示すように、ガイド部２と振動伝達部材６によって連結されている。具体的には、載置テーブル部５は、各側面がガイド部２とそれぞれ２つの振動伝達部材６（図２）によって連結される。 FIG. 3 is an enlarged view showing the vibration transmitting member 6.
As shown in FIG. 3, such a mounting table unit 5 is connected by a guide unit 2 and a vibration transmission member 6. Specifically, each side of the mounting table unit 5 is connected to the guide unit 2 by two vibration transmission members 6 (FIG. 2).

振動伝達部材６は、ガイド部２および振動伝達部材６間に介装される伝達部材本体６１と、伝達部材本体６１の一端に形成された水平な第１連結部６２と、伝達部材本体６１の他端に形成された鉛直な第２連結部６３（フランジ）とを備えている。第１連結部６２は、ガイド部２の水平面２３２の適宜の場所にボルトにより連結される。第２連結部６３は、載置テーブル部５の鉛直面５１の適宜の場所にボルトにより連結される。   The vibration transmission member 6 includes a transmission member main body 61 interposed between the guide portion 2 and the vibration transmission member 6, a horizontal first connecting portion 62 formed at one end of the transmission member main body 61, and the transmission member main body 61. And a vertical second connecting portion 63 (flange) formed at the other end. The first connecting part 62 is connected to an appropriate place on the horizontal surface 232 of the guide part 2 by a bolt. The second connecting portion 63 is connected to an appropriate place on the vertical surface 51 of the mounting table portion 5 with a bolt.

このように、本実施形態では、ガイド部２と載置テーブル部５とが振動伝達部材６によって着脱可能に連結されるので、各部材２，３，５（測定部４は可動部３と一体に設けられている）が分割可能となる。そのため、本実施形態では、各部材２，３，５を現場に分割輸送することができ、輸送制限にかかることなく画像測定機１を大型化することが可能となる。   Thus, in this embodiment, since the guide part 2 and the mounting table part 5 are detachably connected by the vibration transmitting member 6, each member 2, 3, 5 (the measuring part 4 is integrated with the movable part 3). Can be divided). Therefore, in this embodiment, the members 2, 3, and 5 can be divided and transported to the site, and the image measuring machine 1 can be enlarged without being restricted in transportation.

また、振動伝達部材６は、ガイド部２および載置テーブル部５の一方に生じた振動を他方に伝達する。そのため、本実施形態では、例えば可動部３によって振動が生じ、その振動が測定部４に伝達されても、当該振動を、ガイド部２から振動伝達部材６を介して載置テーブル部５、ひいては被測定物ｍに伝達させることができる。また、載置テーブル部５側に振動が生じ、その振動が被測定物ｍに伝達されても、当該振動を、振動伝達部材６を介してガイド部２、ひいては被測定物ｍに伝達させることができる。従って、本実施形態は、測定部４と被測定物ｍとの間に生じる相対振動を抑えることができ、相対振動による精度低下を抑えることができる。   Further, the vibration transmission member 6 transmits vibration generated in one of the guide portion 2 and the placement table portion 5 to the other. Therefore, in this embodiment, for example, even if vibration is generated by the movable unit 3 and the vibration is transmitted to the measurement unit 4, the vibration is transmitted from the guide unit 2 via the vibration transmission member 6, and by extension. It can be transmitted to the object m to be measured. Further, even if vibration is generated on the mounting table portion 5 side and the vibration is transmitted to the object to be measured m, the vibration is transmitted to the guide portion 2 and thus to the object to be measured m via the vibration transmitting member 6. Can do. Therefore, the present embodiment can suppress the relative vibration generated between the measurement unit 4 and the object to be measured m, and can suppress a decrease in accuracy due to the relative vibration.

以下、画像測定機１の組立方法について説明する。
まず、載置テーブル部５を現場に輸送し、載置テーブル部５を床上の所定の位置に位置決め固定する（工程１）。 Hereinafter, a method for assembling the image measuring machine 1 will be described.
First, the mounting table unit 5 is transported to the site, and the mounting table unit 5 is positioned and fixed at a predetermined position on the floor (Step 1).

工程１の後、一対のガイド部２をそれぞれ現場に輸送し、床上の所定の位置にそれぞれ位置決めする（工程２）。なお、以上のいずれかの工程１、２において、振動伝達部材６をいずれかの部材２，５と共に現場に輸送しておく。   After step 1, each of the pair of guide portions 2 is transported to the site and positioned at a predetermined position on the floor (step 2). In any one of the above-described steps 1 and 2, the vibration transmitting member 6 is transported to the site together with any of the members 2 and 5.

工程２の後、ガイド部２と載置テーブル部５との間、４箇所に振動伝達部材６をそれぞれ介装する。そして、各振動伝達部材６の第１連結部６２をガイド部２の水平面２３２上に載置するとともに、第２連結部６３を載置テーブル部５の鉛直面５１に突き当て、第１連結部６２の水平方向の位置決めを行った後に、第１連結部６２を水平面２３２にボルトによって連結する（工程３）。この工程３により、第２連結部６３の高さ位置が、ガイド部２の水平面２３２の高さ位置に応じた高さ位置に位置決めされる。   After step 2, vibration transmission members 6 are interposed at four locations between the guide portion 2 and the placing table portion 5, respectively. And while mounting the 1st connection part 62 of each vibration transmission member 6 on the horizontal surface 232 of the guide part 2, the 2nd connection part 63 abuts on the vertical surface 51 of the mounting table part 5, and a 1st connection part After positioning 62 in the horizontal direction, the first connecting portion 62 is connected to the horizontal plane 232 with a bolt (step 3). By this step 3, the height position of the second connecting portion 63 is positioned at a height position corresponding to the height position of the horizontal surface 232 of the guide portion 2.

工程３の後、高さ位置が位置決めされた各振動伝達部材６の第２連結部６３を、載置テーブル部５の鉛直面５１にボルトによって連結する（工程４）。この工程４により、ガイド部２が、振動伝達部材６を介して載置テーブル部５に連結されるとともに、載置テーブル部５を基準に床面に対して位置決めされる。
工程４の後、床面に対して位置決めされたガイド部２を当該床面に対して固定する（工程５）。 After the step 3, the second connecting portion 63 of each vibration transmitting member 6 whose height position is positioned is connected to the vertical surface 51 of the mounting table portion 5 by a bolt (step 4). By this step 4, the guide portion 2 is connected to the placement table portion 5 via the vibration transmission member 6 and is positioned with respect to the floor surface with the placement table portion 5 as a reference.
After the step 4, the guide part 2 positioned with respect to the floor surface is fixed to the floor surface (step 5).

工程５の後、測定部４が取り付けられた可動部３を現場に輸送し、ガイド部２に組み付ける（工程６）。なお、測定部４と可動部３とは分割可能に設けられていてもよく、その場合、可動部３をガイド部２に組み付けた後に、測定部４を現場に送り、可動部３に組み付ける。
以上の各工程１〜６により、画像測定機１が組み立てられる。 After the step 5, the movable part 3 to which the measuring part 4 is attached is transported to the site and assembled to the guide part 2 (step 6). Note that the measurement unit 4 and the movable unit 3 may be provided so as to be separable. In this case, after the movable unit 3 is assembled to the guide unit 2, the measurement unit 4 is sent to the site and assembled to the movable unit 3.
The image measuring machine 1 is assembled by the above steps 1 to 6.

以上のような本実施形態によれば、以下の効果を奏することができる。
ガイド部２と載置テーブル部５とが振動伝達部材６によって着脱可能に連結されるので、各部材２，３，５が分割可能となり、各部材２，３，５を現場に分割輸送することができる。そのため、輸送制限にかかることなく画像測定機１を大型化することが可能となる。
また、ガイド部２と載置テーブル部５とが、一方に生じた振動を他方に伝達する振動伝達部材６によって連結されるので、ガイド部２側で生じた振動も載置テーブル部５側で生じた振動も、振動伝達部材６を介して他方に伝達させることができる。そのため、各側２，５に設けられた測定部４と被測定物ｍとの間に生じる相対振動を抑えることができ、相対振動による精度低下を抑えることができる。 According to the present embodiment as described above, the following effects can be obtained.
Since the guide part 2 and the mounting table part 5 are detachably connected by the vibration transmitting member 6, the members 2, 3, and 5 can be divided, and the members 2, 3, and 5 are divided and transported to the site. Can do. Therefore, the image measuring machine 1 can be increased in size without being restricted in transportation.
Moreover, since the guide part 2 and the mounting table part 5 are connected by the vibration transmission member 6 which transmits the vibration produced in one side to the other, the vibration produced in the guide part 2 side is also in the mounting table part 5 side. The generated vibration can also be transmitted to the other through the vibration transmitting member 6. For this reason, it is possible to suppress the relative vibration generated between the measurement unit 4 provided on each side 2 and 5 and the object m to be measured, and it is possible to suppress a decrease in accuracy due to the relative vibration.

ガイド部２は、可動部３を移動可能に支持するガイド部本体２１と、ガイド部本体２１下に設けられた支持台２２とを備え、支持台２２に、振動伝達部材６の一端６２が連結される。従って、ガイド部本体２１に、振動伝達部材６から力が加えられることがないので、ガイド部本体２１の真直精度を良好に維持することができる。   The guide unit 2 includes a guide unit main body 21 that movably supports the movable unit 3 and a support base 22 provided below the guide unit main body 21, and one end 62 of the vibration transmission member 6 is connected to the support base 22. Is done. Therefore, since no force is applied to the guide body 21 from the vibration transmission member 6, the straightness accuracy of the guide body 21 can be maintained well.

振動伝達部材６の一端に水平な第１連結部６２が形成されているので、第１連結部６２をガイド部２の水平面２３２の適宜の位置に連結することができ、ガイド部２および載置テーブル部５の水平方向の相対位置に誤差が生じても、第１連結部６２をガイド部２に連結することができる。また、振動伝達部材６の他端に鉛直な第２連結部６３が形成されているので、第２連結部６３を載置テーブル部５の鉛直面５１の適宜の位置に連結することができる。そのため、第１連結部６２をガイド部２の水平面２３２に連結することによって決められる第２連結部６３の高さ位置で、第２連結部６３を載置テーブル部５の鉛直面５１に連結することができる。従って、振動伝達部材６は、ガイド部２および載置テーブル部５の相対位置に誤差が生じても、各部材２，５を確実に連結することができる。   Since the horizontal first connecting portion 62 is formed at one end of the vibration transmitting member 6, the first connecting portion 62 can be connected to an appropriate position on the horizontal surface 232 of the guide portion 2. Even if an error occurs in the relative position of the table portion 5 in the horizontal direction, the first connecting portion 62 can be connected to the guide portion 2. Further, since the vertical second connecting portion 63 is formed at the other end of the vibration transmitting member 6, the second connecting portion 63 can be connected to an appropriate position on the vertical surface 51 of the mounting table portion 5. Therefore, the second connecting portion 63 is connected to the vertical surface 51 of the mounting table portion 5 at the height position of the second connecting portion 63 determined by connecting the first connecting portion 62 to the horizontal surface 232 of the guide portion 2. be able to. Therefore, the vibration transmitting member 6 can reliably connect the members 2 and 5 even if an error occurs in the relative positions of the guide portion 2 and the placement table portion 5.

〔第２実施形態〕
図４は、本実施形態に係る三次元測定機１Ａを示す正面図、図５は、三次元測定機１Ａを示す側面図である。以下、前記第１実施形態と同一機能部位には同一符号を付し、その説明を省略若しくは簡略化する。 [Second Embodiment]
4 is a front view showing the coordinate measuring machine 1A according to the present embodiment, and FIG. 5 is a side view showing the coordinate measuring machine 1A. Hereinafter, the same functional parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted or simplified.

前記第１実施形態では、ガイド部２が直線状に形成され、測定部４が設けられるＸ軸スライダ３２が低い位置で移動する構成となっていたが、本実施形態では、図４および図５に示すように、ガイド部２が門型に形成され、測定部４が設けられるＸ軸スライダ３２が高い位置で移動可能なガントリー型に当該測定機１Ａが構成されている点が特徴である。   In the first embodiment, the guide portion 2 is formed in a linear shape, and the X-axis slider 32 provided with the measurement portion 4 is configured to move at a low position. However, in this embodiment, FIGS. 4 and 5 are used. As shown in FIG. 4, the measuring device 1A is characterized in that the guide unit 2 is formed in a gate shape, and the X-axis slider 32 provided with the measuring unit 4 is configured to be movable at a high position.

なお、ガイド部２は、図４および図５に示すように、門型のガイド部本体２１と、ガイド部本体２１下に設けられた支持台２２とを備えている。ガイド部本体２１は、一対のコラム部２１１と、コラム部２１１を跨ぐように設けられ、可動部３をスライド移動可能に支持するレール部２１２とを備えている。可動部３は、Ｙ，Ｘ軸スライダ３１，３２の他、Ｘ軸スライダ３２に設けられてＺ軸方向にスライド移動可能なＺ軸スライダ３３を備えている。このＺ軸スライダ３３の下端に、タッチセンサプローブからなる測定部４が取り付けられている。本実施形態のその他の構成は、前記第１実施形態と同様である。   As shown in FIGS. 4 and 5, the guide unit 2 includes a gate-shaped guide unit main body 21 and a support base 22 provided below the guide unit main body 21. The guide part main body 21 includes a pair of column parts 211 and a rail part 212 that is provided so as to straddle the column part 211 and supports the movable part 3 so as to be slidable. In addition to the Y and X axis sliders 31 and 32, the movable portion 3 includes a Z axis slider 33 that is provided on the X axis slider 32 and is slidable in the Z axis direction. At the lower end of the Z-axis slider 33, the measuring unit 4 composed of a touch sensor probe is attached. Other configurations of the present embodiment are the same as those of the first embodiment.

従って、本実施形態の三次元測定機１Ａでも、前記第１実施形態と同様に、ガイド部２に振動伝達部材６によって連結された載置テーブル部５上に被測定物ｍが載置されるので、測定部４と被測定物ｍとの間に生じる相対振動を抑えることができ、相対振動による精度低下を抑えることができる。また、本実施形態は、前記第１実施形態と同様の構成を備えることにより、前記第１実施形態と同様の効果を奏することができる。   Therefore, also in the coordinate measuring machine 1A of the present embodiment, the object to be measured m is placed on the placing table portion 5 connected to the guide portion 2 by the vibration transmitting member 6 as in the first embodiment. Therefore, it is possible to suppress the relative vibration generated between the measuring unit 4 and the object to be measured m, and it is possible to suppress a decrease in accuracy due to the relative vibration. Moreover, this embodiment can have the same effects as those of the first embodiment by including the same configuration as that of the first embodiment.

〔実施形態の変形〕
なお、本発明は前述の各実施形態に限定されるものではなく、本発明の目的を達成できる範囲での変形、改良等は本発明に含まれるものである。
図６は、変形例の振動伝達部材６Ａを示す図である。
前記各実施形態では、振動伝達部材６の第１連結部６２は水平に形成されていたが、図６に示すように、振動伝達部材６Ａの第１連結部６２Ａは、鉛直（フランジ状）に形成されていてもよい。このように形成されていても、第１連結部６２Ａを、ガイド部２の鉛直面２３１の適宜の位置に連結させることができ、振動伝達部材６Ａを、鉛直方向において適宜の位置で各部材２，５に取り付けることができる。 [Modification of Embodiment]
The present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
FIG. 6 is a diagram illustrating a vibration transmission member 6A according to a modification.
In each of the above-described embodiments, the first connecting portion 62 of the vibration transmitting member 6 is formed horizontally. However, as shown in FIG. 6, the first connecting portion 62A of the vibration transmitting member 6A is vertically (flange-shaped). It may be formed. Even if formed in this way, the first connecting part 62A can be connected to an appropriate position on the vertical surface 231 of the guide part 2, and the vibration transmitting member 6A can be connected to each member 2 at an appropriate position in the vertical direction. , 5 can be attached.

前記各実施形態では、ガイド部２は、ガイド部本体２１と支持台２２とを備え、ガイド部本体２１の鉛直面２３１および支持台２２の水平面２３２から段差部２３が形成されていた。しかしながら、ガイド部２がガイド部本体２１のみから構成され、このガイド部本体２１に段差部２３が形成されていてもよい。この場合、支持台２２を不要にできる分、部品点数を低減することができる。   In each of the above embodiments, the guide unit 2 includes the guide unit main body 21 and the support base 22, and the stepped portion 23 is formed from the vertical surface 231 of the guide unit main body 21 and the horizontal plane 232 of the support base 22. However, the guide part 2 may be composed only of the guide part main body 21, and the step part 23 may be formed in the guide part main body 21. In this case, the number of parts can be reduced as much as the support base 22 can be omitted.

本発明は、画像測定機や三次元測定機等の測定機に利用することができる。   The present invention can be used for a measuring machine such as an image measuring machine or a three-dimensional measuring machine.

本発明の第１実施形態に係る画像測定機を示す正面図。1 is a front view showing an image measuring machine according to a first embodiment of the present invention. 画像測定機を示す側面図。The side view which shows an image measuring machine. 振動伝達部材を示す拡大図。The enlarged view which shows a vibration transmission member. 本発明の第２実施形態に係る三次元測定機を示す正面図。The front view which shows the coordinate measuring machine which concerns on 2nd Embodiment of this invention. 三次元測定機を示す側面図。The side view which shows a three-dimensional measuring machine. 変形例の振動伝達部材を示す図。The figure which shows the vibration transmission member of a modification.

符号の説明Explanation of symbols

１ 画像測定機（測定機）
１Ａ 三次元測定機（測定機）
２ ガイド部
３ 可動部
４ 測定部
５ 載置テーブル部
６，６Ａ 振動伝達部材
２１ ガイド部本体
２２ 支持台
２３ 段差部
５１ 鉛直面
６２ 第１連結部
６３ 第２連結部
２３１ 鉛直面
２３２ 水平面
ｍ 被測定物 1 Image measuring machine (measuring machine)
1A CMM (measuring machine)
2 Guide part 3 Movable part 4 Measuring part 5 Placement table part 6, 6A Vibration transmission member 21 Guide part main body 22 Support base 23 Step part 51 Vertical surface 62 First connection part 63 Second connection part 231 Vertical surface 232 Horizontal surface m Covered Measured object

Claims (3)

床上に平行に設置された一対のガイド部と、
前記一対のガイド部に跨って設けられ、前記ガイド部に沿って移動可能な可動部と、
前記可動部に設けられ、被測定物を測定する測定部と、
前記床上、かつ前記ガイド部間に設けられ、前記被測定物が載置される載置テーブル部とを備え、
前記載置テーブル部と前記ガイド部とは、一方に生じた振動を他方に伝達する振動伝達部材により着脱可能に連結されている
ことを特徴とする測定機。 A pair of guides installed in parallel on the floor;
A movable part that is provided across the pair of guide parts and is movable along the guide parts;
A measurement unit that is provided in the movable unit and measures an object to be measured;
A mounting table unit provided on the floor and between the guide units, on which the object to be measured is mounted;
The mounting table section and the guide section are detachably connected by a vibration transmission member that transmits vibration generated in one to the other. 請求項１に記載の測定機において、
前記ガイド部は、前記可動部を移動可能に支持するガイド部本体と、
前記ガイド部本体下に設けられ、前記ガイド部本体を支持する支持台とを備え、
前記支持台に前記振動伝達部材の一端が連結されている
ことを特徴とする測定機。 The measuring machine according to claim 1,
The guide portion is a guide portion main body that movably supports the movable portion;
Provided below the guide body, and a support base for supporting the guide body.
One end of the vibration transmission member is connected to the support base. 請求項１または請求項２に記載の測定機において、
前記載置テーブル部には、鉛直面が形成され、
前記ガイド部には、鉛直面と水平面とを備えた段差部が形成され、
前記振動伝達部材の一端には、前記ガイド部の前記水平面に連結される水平な第１連結部が形成され、他端には、前記載置テーブル部の前記鉛直面に連結される鉛直な第２連結部が形成されている
ことを特徴とする測定機。 In the measuring machine according to claim 1 or 2,
A vertical surface is formed on the mounting table portion,
The guide portion is formed with a step portion having a vertical surface and a horizontal surface,
One end of the vibration transmitting member is formed with a horizontal first connecting portion that is connected to the horizontal surface of the guide portion, and the other end is a vertical first connecting portion that is connected to the vertical surface of the mounting table portion. A measuring machine, wherein two connecting portions are formed.
JP2008297118A 2008-11-20 2008-11-20 Measuring device Pending JP2010122118A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018200019A1 (en) 2017-01-06 2018-07-12 Mitutoyo Corporation Profile measuring machine and movement mechanism

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5890109A (en) * 1981-11-25 1983-05-28 Mitsutoyo Mfg Co Ltd Multi-dimensional measuring apparatus
JP2003065746A (en) * 2001-08-29 2003-03-05 Japan Em Co Ltd Device and method for coordinate measurement
JP2006266748A (en) * 2005-03-22 2006-10-05 Mitsutoyo Corp Image measurement device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5890109A (en) * 1981-11-25 1983-05-28 Mitsutoyo Mfg Co Ltd Multi-dimensional measuring apparatus
JP2003065746A (en) * 2001-08-29 2003-03-05 Japan Em Co Ltd Device and method for coordinate measurement
JP2006266748A (en) * 2005-03-22 2006-10-05 Mitsutoyo Corp Image measurement device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018200019A1 (en) 2017-01-06 2018-07-12 Mitutoyo Corporation Profile measuring machine and movement mechanism
US10663273B2 (en) 2017-01-06 2020-05-26 Mitutoyo Corporation Profile measuring machine and movement mechanism

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