JP2010121503A - Turbo molecular pump and method for adjusting position of center of gravity of rotation body - Google Patents

Turbo molecular pump and method for adjusting position of center of gravity of rotation body Download PDF

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JP2010121503A
JP2010121503A JP2008295257A JP2008295257A JP2010121503A JP 2010121503 A JP2010121503 A JP 2010121503A JP 2008295257 A JP2008295257 A JP 2008295257A JP 2008295257 A JP2008295257 A JP 2008295257A JP 2010121503 A JP2010121503 A JP 2010121503A
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center
rotor
gravity
gravity position
molecular pump
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JP5157842B2 (en
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Toshiki Yamaguchi
俊樹 山口
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Shimadzu Corp
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Shimadzu Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a turbo molecular pump miniaturizing a rotation body and facilitating adjustment of position of a center of gravity of the rotation body. <P>SOLUTION: The turbo molecular pump 1 includes the rotation body 100 composed by fastening a shaft 3 and a rotor 2 having a rotor blade 8 formed thereon. In the turbo molecular pump 1, a gravity center position adjusting member 101 made of material having specific gravity higher than that of the rotor 2 and having a shape symmetrical with rotation about a shaft of the rotation body 100 is provided on the rotation body 100. As a result, the rotation body 100 is miniaturized and a position of the center of gravity of the rotation body 100 is easily adjusted by adjusting radial direction dimension and thickness dimensions of the gravity center position adjusting member 101. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、ターボ分子ポンプ、およびターボ分子ポンプに用いられる回転体の重心位置調整方法に関する。   The present invention relates to a turbo molecular pump and a method for adjusting the center of gravity of a rotating body used in the turbo molecular pump.

磁気軸受式ターボ分子ポンプの回転体は、回転翼が形成されたロータと、モータや磁気軸受の構成部品が装着されたシャフトとから構成されている（例えば、特許文献１参照）。回転体は高速回転するため、良好な回転特性を得るためには重心位置を最適な位置に設定する必要がある。   A rotating body of a magnetic bearing type turbo molecular pump is composed of a rotor on which rotor blades are formed and a shaft on which components of a motor and a magnetic bearing are mounted (for example, see Patent Document 1). Since the rotating body rotates at a high speed, it is necessary to set the center of gravity position to an optimum position in order to obtain good rotation characteristics.

特開２００８−３８８４４号公報JP 2008-38844 A

従来、回転体重心は、ロータやシャフトの形状により調整を行っている。近年は、ターボ分子ポンプの小型化および高性能化に対する要望が大きく、ターボ分子ポンプは高速回転化する傾向にある。高速回転化すると、ロータの内径や外径およびシャフトの外径は、遠心応力による強度上の条件によりほぼ決定されるようになる。また、小型化のために厚さや長さを大きくすることができないため、ロータおよびシャフトによる重心調整が複雑になると共に、調整が困難になるという問題があった。   Conventionally, the center of gravity of the rotating body is adjusted by the shape of the rotor and the shaft. In recent years, there has been a great demand for miniaturization and high performance of turbomolecular pumps, and turbomolecular pumps tend to rotate at high speed. When the rotation speed is increased, the inner diameter and outer diameter of the rotor and the outer diameter of the shaft are substantially determined by the strength condition due to centrifugal stress. Further, since the thickness and length cannot be increased due to the miniaturization, there is a problem that the center of gravity adjustment by the rotor and the shaft is complicated and the adjustment is difficult.

本発明は、回転翼が形成されたロータと回転軸とを締結して成る回転体を備えるターボ分子ポンプに適用され、ロータの比重よりも大きな比重の材料で形成され、回転体の軸に関して回転対称な形状を有する重心位置調整部材を、回転体に設けたことを特徴とする。
重心位置調整部材は、ロータの軸方向最大寸法を規定する両端面と最大外径を規定する円筒面とで囲まれたロータ領域に設けるのが好ましい。例えば、ロータの軸方向端面に凹部を形成し、該凹部内に重心位置調整部材を設ける。
さらに、重心位置調整部材が、回転体の動バランス調整をするためのバランス調整部材を兼ねるようにしても良い。
本発明による回転体の重心位置調整方法は、回転翼が形成されたロータと回転軸とを締結して成る回転体の軸方向重心位置を計算し、軸方向重心位置を所定重心位置へと移動させるための重心位置調整部材を形成し、回転体に重心位置調整部材を固定することを特徴とする。 The present invention is applied to a turbo molecular pump including a rotating body formed by fastening a rotor on which a rotor blade is formed and a rotating shaft, and is formed of a material having a specific gravity larger than the specific gravity of the rotor, and rotates about the axis of the rotating body. The center of gravity position adjusting member having a symmetrical shape is provided on the rotating body.
The center-of-gravity position adjusting member is preferably provided in a rotor region surrounded by both end faces that define the maximum axial dimension of the rotor and a cylindrical surface that defines the maximum outer diameter. For example, a recess is formed in the axial end surface of the rotor, and a center of gravity position adjusting member is provided in the recess.
Furthermore, the gravity center position adjusting member may also serve as a balance adjusting member for adjusting the dynamic balance of the rotating body.
The method of adjusting the center of gravity position of a rotating body according to the present invention calculates the axial center of gravity position of a rotating body formed by fastening a rotor on which a rotor blade is formed and a rotating shaft, and moves the axial center of gravity position to a predetermined center of gravity position. The center-of-gravity position adjustment member is formed, and the center-of-gravity position adjustment member is fixed to the rotating body.

本発明によれば、重心位置調整部材を設けたことにより、回転体の小型化を図りつつ、回転体の重心位置調整を容易に行うことができる。   According to the present invention, by providing the center of gravity position adjusting member, it is possible to easily adjust the center of gravity of the rotating body while reducing the size of the rotating body.

以下、図を参照して本発明を実施するための最良の形態について説明する。図１は磁気軸受式ターボ分子ポンプ１の概略構成を示す断面図である。ターボ分子ポンプ１のケーシング１３内には、回転翼８および円筒部１２が形成されたロータ２と、固定翼９およびネジステータ１１，２３とが設けられている。   Hereinafter, the best mode for carrying out the present invention will be described with reference to the drawings. FIG. 1 is a cross-sectional view showing a schematic configuration of a magnetic bearing type turbo molecular pump 1. In the casing 13 of the turbo molecular pump 1, a rotor 2 in which a rotary blade 8 and a cylindrical portion 12 are formed, a fixed blade 9 and screw stators 11 and 23 are provided.

回転翼８はロータ２の回転軸方向に沿って複数段形成されており、各固定翼９は上下に並んだ回転翼８の間にそれぞれ配設されている。各固定翼９は、スペーサ１０によって上下に挟持されるように保持されている。スペーサ１０は、固定翼９の保持機能とともに、固定翼９間のギャップを所定間隔に維持する機能を有している。これらの回転翼８と固定翼９とにより、ターボ分子ポンプ１のタービン翼段が構成される。   The rotor blades 8 are formed in a plurality of stages along the rotation axis direction of the rotor 2, and the fixed blades 9 are respectively disposed between the rotor blades 8 arranged vertically. Each fixed wing 9 is held by a spacer 10 so as to be sandwiched up and down. The spacer 10 has a function of maintaining a gap between the fixed wings 9 at a predetermined interval as well as a function of holding the fixed wings 9. These rotor blades 8 and fixed blades 9 constitute a turbine blade stage of the turbo molecular pump 1.

一方、タービン翼段の後段（図示下方）には、ロータ２の円筒部１２と、円筒部１２の外周側および内周側に設けられたネジステータ１１，２３とにより構成されるドラッグポンプ段が設けられている。吸気口１３ａから吸入されたガスは、タービン翼段およびドラッグポンプ段の順に送られ、ベース４に形成された排気口４ａからポンプ外へと排出される。排気口４ａには油回転ポンプ等の補助ポンプが接続される。   On the other hand, a drag pump stage composed of a cylindrical portion 12 of the rotor 2 and screw stators 11 and 23 provided on the outer peripheral side and the inner peripheral side of the cylindrical portion 12 is provided in the subsequent stage (downward in the drawing) of the turbine blade stage. It has been. The gas sucked from the intake port 13a is sent in the order of the turbine blade stage and the drag pump stage, and is discharged from the exhaust port 4a formed in the base 4 to the outside of the pump. An auxiliary pump such as an oil rotary pump is connected to the exhaust port 4a.

ロータ２はボルト２７によってシャフト３の上端に形成されたフランジ部３ａに締結されている。シャフト３は、ベース４に設けられたラジアル電磁石５１，５２およびスラスト電磁石５３によって非接触支持されている。スラスト電磁石５３は、シャフト３の下部に設けられたロータディスク７６を隙間を介して上下から挟むように配置されている。シャフト３の浮上位置は、ベース４に設けられたラジアル変位センサ７１，７２およびスラスト変位センサ７３によって検出される。ベース４には、ロータ２を回転駆動するモータ６、保護ベアリング２８が設けられている。保護ベアリング２８にはメカニカルベアリングが用いられ、電磁石５１〜５３によるシャフト３の磁気浮上がオフされたときにシャフト３を支持する。   The rotor 2 is fastened to a flange portion 3 a formed at the upper end of the shaft 3 by a bolt 27. The shaft 3 is supported in a non-contact manner by radial electromagnets 51 and 52 and a thrust electromagnet 53 provided on the base 4. The thrust electromagnet 53 is disposed so as to sandwich the rotor disk 76 provided at the lower portion of the shaft 3 from above and below via a gap. The flying position of the shaft 3 is detected by radial displacement sensors 71 and 72 and a thrust displacement sensor 73 provided on the base 4. The base 4 is provided with a motor 6 for rotating the rotor 2 and a protective bearing 28. A mechanical bearing is used as the protective bearing 28 and supports the shaft 3 when the magnetic levitation of the shaft 3 by the electromagnets 51 to 53 is turned off.

図２は、回転体１００を示す断面図である。回転体１００は、ロータ２，シャフト３，重心位置調整部材１０１，ロータディスク７６およびターゲット７５により構成される。ロータ２の上端（吸気側の端部）には凹部２０が形成され、凹部２０内には、重心位置調整部材１０１がボルト１０２により固定されている。重心位置調整部材１０１は、円柱形状のように、回転体１０１の軸に対して回転対称な形状を有している。ロータ２の材料には一般的にアルミニウム合金が用いられるが、重心位置調整部材１０１にはロータ部材よりも比重の大きな材料、例えば、ステンレス材（ＳＵＳ３０４）や鉄系（Ｓ４５ＣやＳＣＭ４３５）などが用いられる。鉄系の材料を用いる場合には、腐食防止のためにニッケルメッキ等のメッキ処理が施される。   FIG. 2 is a cross-sectional view showing the rotating body 100. The rotating body 100 includes a rotor 2, a shaft 3, a center of gravity position adjusting member 101, a rotor disk 76 and a target 75. A recess 20 is formed at the upper end (end on the intake side) of the rotor 2, and the center of gravity position adjusting member 101 is fixed in the recess 20 by a bolt 102. The center-of-gravity position adjustment member 101 has a rotationally symmetric shape with respect to the axis of the rotating body 101, such as a cylindrical shape. Generally, an aluminum alloy is used as the material of the rotor 2, but a material having a specific gravity larger than that of the rotor member, such as stainless steel (SUS304) or iron (S45C or SCM435), is used for the gravity center position adjusting member 101. It is done. When an iron-based material is used, a plating process such as nickel plating is performed to prevent corrosion.

本実施の形態における重心位置調整部材１０１は、回転体１００の軸方向の重心位置を調整するために設けられたものである。前述したように、近年はターボ分子ポンプの小型化および高性能化に対する要望が大きく、ターボ分子ポンプは高速回転化する傾向にある。高速回転化に対応するためにシャフト３は短くなり、回転体１００の重心が下がる傾向になる。そのため、ロータ２の形状を決定する際には、回転体１００の重心を上側（ポンプ吸気口側）に上げるように設計される。   The center-of-gravity position adjusting member 101 in the present embodiment is provided to adjust the center-of-gravity position of the rotating body 100 in the axial direction. As described above, in recent years, there is a great demand for miniaturization and high performance of the turbo molecular pump, and the turbo molecular pump tends to rotate at high speed. In order to cope with the high speed rotation, the shaft 3 is shortened, and the center of gravity of the rotating body 100 tends to be lowered. Therefore, when determining the shape of the rotor 2, the rotor 100 is designed to raise the center of gravity of the rotating body 100 upward (pump intake port side).

従来は、締結フランジ部２ａやシャフト３のフランジ部３ａの厚みを調整したり、ロータ２の内径・外径やフランジ部３ａの外径を調整したり、シャフト３の長さを調整したりして、回転体１００の重心位置を調整していた。しかし、回転翼８および円筒部１２の形状は排気設計によって決まってしまうため、回転体１００が大型化しないように、ロータ２やシャフト３の各寸法を調整して重心位置の調整を行う必要があり、調整が複雑になるという問題があった。また、そのような複雑さを避ける方法としては、従来の場合、ロータ２の締結フランジ部２ａを厚くする程度しか方法がなかった。そのため、重心位置調整の余裕代が小さく、重心位置調整が困難な場合も生じる。   Conventionally, the thickness of the fastening flange portion 2a and the flange portion 3a of the shaft 3 is adjusted, the inner diameter / outer diameter of the rotor 2 and the outer diameter of the flange portion 3a are adjusted, and the length of the shaft 3 is adjusted. Thus, the position of the center of gravity of the rotating body 100 is adjusted. However, since the shapes of the rotor blades 8 and the cylindrical portion 12 are determined by the exhaust design, it is necessary to adjust the position of the center of gravity by adjusting the dimensions of the rotor 2 and the shaft 3 so that the rotating body 100 is not enlarged. There was a problem that adjustment was complicated. In addition, as a method for avoiding such complexity, there has been only a method for thickening the fastening flange portion 2a of the rotor 2 in the conventional case. For this reason, there is a case where the margin for adjusting the center of gravity position is small and it is difficult to adjust the center of gravity position.

そのような問題を解消するために、本実施形態では、ロータ２の大きさを規定する外形面、すなわち、図２に示すロータ２の上端面Ｐ１，下端面Ｐ２および側面（回転翼８の先端を含む円筒面）Ｐ３で囲まれた空間内に、ロータ２に用いられている材料の比重よりも大きな比重を有する重心位置調整部材１０１を設けた。図２に示す例では、重心位置調整部材１０１はロータ２の凹部２０内に固定されており、重心位置調整部材１０１を設けない場合に比べて、回転体１００の重心位置が軸方向上側に移動している。図２では、ボルト１０２のボルト頭が重心位置調整部材１０１の上面に突出しているが、座グリを形成してボルト頭が重心位置調整部材１０１内に沈み込むようにすることもできる。そうすることで、ロータ２の上端面ぎりぎりまで重心位置調整部材１０１を大きくすることができ、重心位置調整の幅が広がる。   In order to solve such a problem, in the present embodiment, the outer surface that defines the size of the rotor 2, that is, the upper end surface P1, the lower end surface P2, and the side surfaces of the rotor 2 shown in FIG. The center-of-gravity position adjusting member 101 having a specific gravity greater than the specific gravity of the material used for the rotor 2 is provided in a space surrounded by P3. In the example shown in FIG. 2, the center-of-gravity position adjustment member 101 is fixed in the recess 20 of the rotor 2, and the center-of-gravity position of the rotating body 100 moves upward in the axial direction compared to the case where the center-of-gravity position adjustment member 101 is not provided. is doing. In FIG. 2, the bolt head of the bolt 102 protrudes from the upper surface of the center-of-gravity position adjustment member 101, but a counterbore can be formed so that the bolt head sinks into the center-of-gravity position adjustment member 101. By doing so, the center-of-gravity position adjusting member 101 can be enlarged to the limit of the upper end surface of the rotor 2, and the range of center-of-gravity position adjustment is widened.

図３は、重心位置調整部材１０１の他の例を示す図である。重心位置調整部材１０１ａはリング形状をしており、凹部２０内に圧入にて固定する。また、重心位置調整部材１０１ｂの場合には、ロータ２の外周に巻き付けるように設けられている。いずれの場合も回転軸に関して回転対称な形状を有しており、回転体１００の外形寸法を大きくすることなく、回転体１００の重心位置を軸方向上側に調整することができる。   FIG. 3 is a diagram illustrating another example of the gravity center position adjusting member 101. The center-of-gravity position adjusting member 101a has a ring shape and is fixed in the recess 20 by press fitting. Further, in the case of the gravity center position adjusting member 101b, it is provided so as to be wound around the outer periphery of the rotor 2. In any case, it has a rotationally symmetric shape with respect to the rotation axis, and the center of gravity position of the rotator 100 can be adjusted upward in the axial direction without increasing the outer dimensions of the rotator 100.

重心位置調整部材１０１の形状の設定は、次のような手順で行われる。ポンプとしての排気性能、および、回転体１００としての機械的な性能を満足するように、ロータ２およびシャフト３が設計される。ここでは、回転体１００として最適な重心位置に関しては、最終的に重心位置調整部材１０１で調整することを前提とし、排気性能および小型化を優先して設計を行う。この場合、ロータ２の締結フランジ部２ａに凹部２０を設けず、ロータ上端面が平面となるように設計しても良いし、重心位置調整部材１０１の調整を前提として、最初から凹部２０を設けた形状としても良い。   The shape of the gravity center position adjusting member 101 is set in the following procedure. The rotor 2 and the shaft 3 are designed so as to satisfy the exhaust performance as a pump and the mechanical performance as the rotating body 100. Here, the optimum center-of-gravity position as the rotating body 100 is designed on the assumption that the center-of-gravity position adjustment member 101 is finally adjusted, and exhaust performance and downsizing are prioritized. In this case, the concave portion 20 may not be provided in the fastening flange portion 2 a of the rotor 2, and the upper end surface of the rotor may be designed to be flat, or the concave portion 20 is provided from the beginning on the assumption that the center of gravity position adjusting member 101 is adjusted. Also good shape.

第２に、ロータ２とシャフト３とを締結した状態における重心位置を求め、その重心位置を目標とする所定重心位置へ移動させるのに必要な重心位置調整部材１０１を設計する。重心位置調整部材１０１の径寸法および厚さ寸法は、使用する材料の比重に応じて設定される。また、ロータ上端面が平面となるようにロータ２が設計されている場合には、ロータ２の上端中央部のアルミ材を重心位置調整部材１０１に用いるステンレス材に置き換えた場合に、どれだけの体積（径寸法および厚さ寸法）を置き換えれば必要な重心位置移動量となるかを計算する。その結果、重心位置調整部材１０１の形状が決定される。   Secondly, the center-of-gravity position in a state in which the rotor 2 and the shaft 3 are fastened is obtained, and the center-of-gravity position adjusting member 101 necessary for moving the center-of-gravity position to a target predetermined center-of-gravity position is designed. The diameter dimension and thickness dimension of the gravity center position adjusting member 101 are set according to the specific gravity of the material to be used. Further, in the case where the rotor 2 is designed so that the upper end surface of the rotor is a flat surface, how much the aluminum material at the center of the upper end of the rotor 2 is replaced with the stainless steel material used for the gravity center position adjusting member 101. If the volume (diameter dimension and thickness dimension) is replaced, it is calculated whether the required center-of-gravity position movement amount is obtained. As a result, the shape of the gravity center position adjusting member 101 is determined.

そして、実際に、図２に示すように回転体１００を組み立てたならば、従来の場合と同様に回転体１００の動バランス調整を行う。なお、この動バランス調整作業では、バランス調整のためにロータ２の一部を削除するが、重心位置調整部材１０１の一部を削除するようしにても良い。重心位置調整部材１０１の比重はロータ部材に比べて大きいので、より少ない削除量でバランス調整を行うことができる。   When the rotating body 100 is actually assembled as shown in FIG. 2, the dynamic balance of the rotating body 100 is adjusted as in the conventional case. In this dynamic balance adjustment work, a part of the rotor 2 is deleted for balance adjustment, but a part of the gravity center position adjustment member 101 may be deleted. Since the specific gravity of the gravity center position adjustment member 101 is larger than that of the rotor member, balance adjustment can be performed with a smaller amount of deletion.

以上説明したように、本実施の形態では、ロータ材よりも比重の大きな材料で形成された重心位置調整部材１０１，１０１ａ，１０１ｂをロータ２に設け、それらの径方向寸法や厚さ寸法を調整することで、回転体１００を小型化しつつ、回転体１００の重心位置を簡単に調整することができる。   As described above, in this embodiment, the rotor 2 is provided with the center-of-gravity position adjusting members 101, 101a, 101b made of a material having a specific gravity larger than that of the rotor material, and the radial dimension and thickness dimension thereof are adjusted. By doing so, it is possible to easily adjust the position of the center of gravity of the rotating body 100 while reducing the size of the rotating body 100.

その場合、図２に示すように、ロータ２の軸方向最大寸法を規定する両端面Ｐ１，Ｐ２と最大外径を規定する円筒面Ｐ３とで囲まれたロータ領域に、重心位置調整部材１０１を設けるのが好ましい。例えば、ロータ２の軸方向端面に凹部２０を形成し、その凹部２０内に重心位置調整部材１０１を設けることで、ロータ外形を小さく抑えることができる。   In that case, as shown in FIG. 2, the center of gravity position adjusting member 101 is placed in the rotor region surrounded by both end faces P1 and P2 defining the maximum axial dimension of the rotor 2 and the cylindrical surface P3 defining the maximum outer diameter. It is preferable to provide it. For example, by forming the recess 20 in the axial end surface of the rotor 2 and providing the center-of-gravity position adjusting member 101 in the recess 20, the outer shape of the rotor can be suppressed small.

なお、以上の説明はあくまでも一例であり、本発明の特徴を損なわない限り、本発明は上記実施の形態に何ら限定されるものではない。例えば、上述した実施形態では、磁気軸受式のターボ分子ポンプを例に説明したが、磁気軸受式に限らず適用可能であり、また、ドラッグポンプ段を有しないタービン翼段のみのターボ分子ポンプにも適用することができる。さらに、重心位置調整部材１０１，１０１ａ，１０１ｂを組み合わせて用いても良い。   In addition, the above description is an example to the last, and this invention is not limited to the said embodiment at all unless the characteristic of this invention is impaired. For example, in the above-described embodiment, a magnetic bearing type turbo molecular pump has been described as an example. However, the present invention is not limited to a magnetic bearing type, and can be applied to a turbo molecular pump having only a turbine blade stage without a drag pump stage. Can also be applied. Furthermore, the center-of-gravity position adjusting members 101, 101a, 101b may be used in combination.

磁気軸受式ターボ分子ポンプ１の概略構成を示す断面図である。1 is a cross-sectional view showing a schematic configuration of a magnetic bearing type turbo molecular pump 1. 回転体１００を示す断面図である。2 is a cross-sectional view showing a rotating body 100. FIG. 重心位置調整部材１０１の他の例を示す図である。It is a figure which shows the other example of the gravity center position adjustment member.

符号の説明Explanation of symbols

１：ターボ分子ポンプ、２：ロータ、２ａ：締結フランジ部、３：シャフト、８：回転翼、９：固定翼、２０：凹部、１００：回転体、１０１，１０１ａ，１０１ｂ：重心位置調整部材、
1: turbo molecular pump, 2: rotor, 2a: fastening flange portion, 3: shaft, 8: rotating blade, 9: fixed blade, 20: recessed portion, 100: rotating body, 101, 101a, 101b: gravity center position adjusting member,

Claims (5)

回転翼が形成されたロータと回転軸とを締結して成る回転体を備えるターボ分子ポンプにおいて、
前記ロータの比重よりも大きな比重の材料で形成され、前記回転体の軸に関して回転対称な形状を有する重心位置調整部材を、前記回転体に設けたことを特徴とするターボ分子ポンプ。 In a turbo molecular pump comprising a rotor formed by fastening a rotor formed with rotor blades and a rotating shaft,
A turbo-molecular pump, characterized in that a centroid position adjusting member formed of a material having a specific gravity larger than that of the rotor and having a rotationally symmetric shape with respect to the axis of the rotator is provided on the rotator. 請求項１に記載のターボ分子ポンプにおいて、
前記ロータの軸方向最大寸法を規定する両端面と最大外径を規定する円筒面とで囲まれたロータ領域に、前記重心位置調整部材を設けたことを特徴とするターボ分子ポンプ。 The turbo-molecular pump according to claim 1,
A turbo-molecular pump characterized in that the center-of-gravity position adjusting member is provided in a rotor region surrounded by both end faces defining the maximum axial dimension of the rotor and a cylindrical surface defining a maximum outer diameter. 請求項２に記載のターボ分子ポンプにおいて、
前記ロータの軸方向端面に凹部を形成し、該凹部内に前記重心位置調整部材を設けたことを特徴とするターボ分子ポンプ。 The turbo-molecular pump according to claim 2,
A turbo-molecular pump, wherein a concave portion is formed on an end surface in the axial direction of the rotor, and the center-of-gravity position adjusting member is provided in the concave portion. 請求項１〜３のいずれか一項に記載のターボ分子ポンプにおいて、
前記重心位置調整部材は、前記回転体の動バランス調整をするためのバランス調整部材を兼ねることを特徴とするターボ分子ポンプ。 In the turbomolecular pump according to any one of claims 1 to 3,
The turbo molecular pump, wherein the center-of-gravity position adjusting member also serves as a balance adjusting member for adjusting a dynamic balance of the rotating body. 回転翼が形成されたロータと回転軸とを締結して成る回転体の軸方向重心位置を計算し、
前記軸方向重心位置を所定重心位置へと移動させるための重心位置調整部材を形成し、
前記回転体に前記重心位置調整部材を固定することを特徴とする回転体の重心位置調整方法。 Calculate the axial center-of-gravity position of the rotating body formed by fastening the rotor on which the rotor blades are formed and the rotating shaft,
Forming a center-of-gravity position adjusting member for moving the axial center-of-gravity position to a predetermined center-of-gravity position;
A center-of-gravity position adjustment method for a rotating body, wherein the center-of-gravity position adjusting member is fixed to the rotating body.
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108412786A (en) * 2018-02-26 2018-08-17 北京海斯德电机技术有限公司 A kind of composite molecular pump
CN108412785A (en) * 2018-02-26 2018-08-17 北京海斯德电机技术有限公司 A kind of composite molecular pump
JP2019138258A (en) * 2018-02-14 2019-08-22 株式会社島津製作所 Vacuum pump and balance adjustment method
WO2022112212A1 (en) * 2020-11-25 2022-06-02 Edwards s.r.o. Rotor assembly for a turbomolecular pump

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Publication number Priority date Publication date Assignee Title
JP2000073986A (en) * 1998-08-28 2000-03-07 Jeol Ltd Vibration restraining unit for turbo-molecular pump
JP2003148389A (en) * 2001-11-16 2003-05-21 Boc Edwards Technologies Ltd Vacuum pump

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JP2000073986A (en) * 1998-08-28 2000-03-07 Jeol Ltd Vibration restraining unit for turbo-molecular pump
JP2003148389A (en) * 2001-11-16 2003-05-21 Boc Edwards Technologies Ltd Vacuum pump

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019138258A (en) * 2018-02-14 2019-08-22 株式会社島津製作所 Vacuum pump and balance adjustment method
JP6992569B2 (en) 2018-02-14 2022-01-13 株式会社島津製作所 Vacuum pump and balance adjustment method
CN108412786A (en) * 2018-02-26 2018-08-17 北京海斯德电机技术有限公司 A kind of composite molecular pump
CN108412785A (en) * 2018-02-26 2018-08-17 北京海斯德电机技术有限公司 A kind of composite molecular pump
WO2022112212A1 (en) * 2020-11-25 2022-06-02 Edwards s.r.o. Rotor assembly for a turbomolecular pump

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