JP2010103951A - Saw resonance piece - Google Patents

Saw resonance piece Download PDF

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JP2010103951A
JP2010103951A JP2008275937A JP2008275937A JP2010103951A JP 2010103951 A JP2010103951 A JP 2010103951A JP 2008275937 A JP2008275937 A JP 2008275937A JP 2008275937 A JP2008275937 A JP 2008275937A JP 2010103951 A JP2010103951 A JP 2010103951A
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saw
electrode
saw element
idt
surface acoustic
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Takuya Owaki
卓弥 大脇
Yoshiaki Matsumoto
好明 松本
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Miyazaki Epson Corp
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Miyazaki Epson Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a SAW resonance piece that can be miniaturized and suppresses abnormal oscillation of a SAW element. <P>SOLUTION: The SAW resonance piece 10 includes: a piezoelectric substrate 12; a pair of I/O electrodes 16 that is formed on the piezoelectric substrate 12 and composed of a pair of IDT electrodes, where electrode fingers 20, 24 cross; reflectors 26 that are formed on the piezoelectric substrate 12 and are positioned at both the sides while the pair of I/O electrodes 16 is being sandwiched; and first and second SAW elements 14, 30 oscillating surface acoustic waves. The space between an electrode finger 36 of the second SAW element 30 and that 37 of a reflector 35 is narrower than that of the first SAW element 14. One of the input and output sides of the I/O electrode 16 and one of the input and output sides of an I/O electrode 31 are connected mutually in each SAW element. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、ＳＡＷ共振片に関し、特に一枚の圧電基板に複数のＳＡＷ素子を搭載したＳＡＷ共振片の技術に関する。   The present invention relates to a SAW resonator element, and more particularly to a technique of a SAW resonator element in which a plurality of SAW elements are mounted on a single piezoelectric substrate.

近年、通信環境の過密化や複雑化に伴い、不要波除去を目的とした表面弾性波（Ｓｕｒｆａｃｅ Ａｃｏｕｓｔｉｃ Ｗａｖｅ：ＳＡＷ）フィルタにも多機能化や高機能化が求められている。代表例として、マルチバンドＳＡＷフィルタや、ＳＡＷデュープレクサがある。この場合、複数のＳＡＷ素子を用いたＳＡＷデバイスの小型化を図るため、一枚の圧電基板上に複数のＳＡＷ素子を配設することが行われる。特許文献１において圧電基板上にＳＡＷフィルタが複数、互いに中心周波数を異ならせて設けられ、前記複数のＳＡＷフィルタの入力端及び出力端の少なくとも一方が共通化されているＳＡＷフィルタが開示されている。
特開２００３−２８９２３４号公報 In recent years, as the communication environment becomes dense and complicated, a surface acoustic wave (SAW) filter for removing unnecessary waves is required to have multiple functions and high functions. Typical examples include multiband SAW filters and SAW duplexers. In this case, in order to reduce the size of a SAW device using a plurality of SAW elements, a plurality of SAW elements are disposed on one piezoelectric substrate. Patent Document 1 discloses a SAW filter in which a plurality of SAW filters are provided on a piezoelectric substrate with different center frequencies, and at least one of the input end and the output end of the plurality of SAW filters is shared. .
JP 2003-289234 A

一方で、発振を目的としたＳＡＷ共振子等のＳＡＷデバイスについても、その小型化を目的として、近い共振周波数を持った互いに並列に接続されたＳＡＷ素子を一枚の圧電基板上に形成するとともにＳＡＷ素子の入力側もしくは出力側を接続して共通化する場合がある。   On the other hand, SAW devices such as SAW resonators intended for oscillation are formed on a single piezoelectric substrate with SAW elements connected in parallel and having similar resonance frequencies for the purpose of miniaturization. In some cases, the input side or output side of the SAW element is connected to be shared.

しかし、この場合各ＳＡＷ素子は独立した周波数特性を有するのではなく、他のＳＡＷ素子の周波数特性の影響を受ける場合がある。特に、発振を目的としたＳＡＷ共振子の場合、ＳＡＷフィルタとは異なり、わずかなスプリアス応答がその周波数配置によっては異常発振につながる虞がある。   However, in this case, each SAW element does not have independent frequency characteristics but may be affected by the frequency characteristics of other SAW elements. In particular, in the case of a SAW resonator intended for oscillation, unlike a SAW filter, a slight spurious response may lead to abnormal oscillation depending on the frequency arrangement.

図６にＳＡＷ素子の共振モードのイメージ図を示す。ＳＡＷ素子２００は図６に示すように、反射器２０６との間で、電極指２０４を互いに交差させた態様の一対の入出力電極２０２により弾性表面波を発生させているが、入出力電極の交差幅を大きくすると、弾性表面波の伝播方向と垂直にエネルギーが分布するモード（横モード）の共振が発生し、この横モードの共振によりスプリアスが発生する。即ち図６に示す構造では入出力電極２０２の電極指２０４の交差幅ａの方向（ｘ方向）に１次の横モードのみならず、２次以上の高次横モードの振動エネルギーが閉じ込められている（図６の波形参照）。ここで、１次の横モードは主応答となるのに対し、２次以上はスプリアスとなる。そして、高次横モードの中で２次の横モードにおける振動エネルギーは、入出力電極２０２で電気的に相殺されるが、３次の横モードによる振動エネルギーは電気的に相殺されることはなく、すなわち、偶数次の横モードは相殺され、奇数次の横モードはスプリアスとして表れる。   FIG. 6 shows an image diagram of the resonance mode of the SAW element. As shown in FIG. 6, the SAW element 200 generates surface acoustic waves with a pair of input / output electrodes 202 having electrode fingers 204 intersecting each other with a reflector 206. When the crossing width is increased, resonance occurs in a mode (transverse mode) in which energy is distributed perpendicularly to the propagation direction of the surface acoustic wave, and spurious is generated by the resonance in the transverse mode. That is, in the structure shown in FIG. 6, not only the primary transverse mode but also the secondary or higher order transverse mode vibration energy is confined in the direction of the intersection width a (x direction) of the electrode finger 204 of the input / output electrode 202. (Refer to the waveform in FIG. 6). Here, the primary transverse mode is the main response, while the secondary and higher are spurious. In the higher-order transverse mode, vibration energy in the second-order transverse mode is electrically canceled by the input / output electrode 202, but vibration energy caused by the third-order transverse mode is not electrically canceled. That is, even-order transverse modes cancel out, and odd-order transverse modes appear as spurious.

よって、一方のＳＡＷ素子の基本波の周波数が、他方のＳＡＷ素子のスプリアスの周波数より若干高い程度の周波数を有する場合は、前記一方のＳＡＷ素子は前記スプリアスの周波数で発振するいわゆる異常発振を起こす虞がある。   Therefore, when the frequency of the fundamental wave of one SAW element has a frequency that is slightly higher than the spurious frequency of the other SAW element, the one SAW element causes so-called abnormal oscillation that oscillates at the spurious frequency. There is a fear.

そこで本発明は上記問題に着目し、同一基板に配置して互いに接続された複数のＳＡＷ素子を有するＳＡＷ共振片において、小型化が可能であるとともにＳＡＷ素子の異常発振を抑制するＳＡＷ共振片を提供することを目的とする。   Therefore, the present invention pays attention to the above problem, and in the SAW resonator element having a plurality of SAW elements connected to each other arranged on the same substrate, the SAW resonator element that can be downsized and suppresses abnormal oscillation of the SAW element is provided. The purpose is to provide.

本発明は、上述の課題の少なくとも一部を解決するためになされたものであり、以下の適用例として実現することが可能である。
［適用例１］圧電基板と、前記圧電基板上に形成され、電極指を交差させた一対のＩＤＴ電極からなる入出力電極と、前記圧電基板上に形成され、前記一対の入出力電極を挟んで両側に位置する反射器と、を備え、弾性表面波を発振する第１ＳＡＷ素子及び第２ＳＡＷ素子を有するＳＡＷ共振片であって、前記第２ＳＡＷ素子の前記電極指の間隔は、前記第１ＳＡＷ素子のそれより狭くするとともに、各ＳＡＷ素子の入出力電極の入力側または出力側のうち一方が互いに接続されたことを特徴とするＳＡＷ共振片。 SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following application examples.
Application Example 1 A piezoelectric substrate, an input / output electrode including a pair of IDT electrodes formed on the piezoelectric substrate and having electrode fingers crossed, and formed on the piezoelectric substrate and sandwiching the pair of input / output electrodes And a reflector located on both sides of the first SAW element that oscillates a surface acoustic wave and includes a first SAW element and a second SAW element, wherein an interval between the electrode fingers of the second SAW element is the first SAW element. The SAW resonator element is characterized in that one of the input side and the output side of the input / output electrodes of each SAW element is connected to each other.

上記構成により、弾性表面波を発振する第１ＳＡＷ素子及び第２ＳＡＷ素子が、一つの圧電基板上に配置されるとともに、各ＳＡＷ素子が並列の接続され、小型化されたＳＡＷ共振片となる。さらに、第２ＳＡＷ素子の共振周波数は他方の弾性表面波素子の共振周波数よりも高い周波数を有するととともに、前記間隔を適切に設計することにより、第２ＳＡＷ素子の基本波が、第１ＳＡＷ素子のスプリアスの周波数に近づけることを回避し、第２ＳＡＷ素子の異常発振を回避することができる。   With the above configuration, the first SAW element and the second SAW element that oscillate the surface acoustic wave are arranged on one piezoelectric substrate, and the SAW elements are connected in parallel to form a miniaturized SAW resonance piece. Furthermore, the resonance frequency of the second SAW element has a higher frequency than the resonance frequency of the other surface acoustic wave element, and the spacing is appropriately designed, so that the fundamental wave of the second SAW element is spurious of the first SAW element. It is possible to prevent the second SAW element from oscillating abnormally.

［適用例２］前記第１ＳＡＷ素子の基本波の周波数が、前記第２ＳＡＷ素子の高次横モードに起因するスプリアスの周波数より低いことを特徴とする適用例１に記載のＳＡＷ共振片。
これにより、第１ＳＡＷ素子の基本波は、第２ＳＡＷ素子のスプリアスの影響を受けることがなく、安定した周波数特性を得ることができる。 Application Example 2 The SAW resonator element according to Application Example 1, wherein the frequency of the fundamental wave of the first SAW element is lower than the frequency of spurious due to the higher-order transverse mode of the second SAW element.
Thereby, the fundamental wave of the first SAW element is not affected by the spurious of the second SAW element, and a stable frequency characteristic can be obtained.

［適用例３］前記第１ＳＡＷ素子、または前記第１ＳＡＷ素子及び前記第２ＳＡＷ素子のＩＤＴ電極において、ＩＤＴ電極の電極指の端部に対向する位置にダミー電極を接続したことを特徴とする適用例１または２に記載のＳＡＷ共振片。   [Application Example 3] An application example in which, in the IDT electrodes of the first SAW element or the first SAW element and the second SAW element, a dummy electrode is connected to a position facing an end of an electrode finger of the IDT electrode. The SAW resonance piece according to 1 or 2.

ダミー電極を配置することによって配置位置の振動を抑制することができるが、ダミー電極を配置する領域において、基本波の振動エネルギーの割合より、スプリアスの振動エネルギーの割合のほうが大きい。したがって、ダミー電極を配置することによって基本波よりもスプリアスの方が割合的に多く振動エネルギーを低減させることができるので、異常発振の原因となるスプリアスの発生を抑制することができる。   By arranging the dummy electrode, the vibration at the arrangement position can be suppressed, but in the region where the dummy electrode is arranged, the ratio of the vibration energy of the spurious is larger than the ratio of the vibration energy of the fundamental wave. Therefore, by arranging dummy electrodes, vibration energy can be reduced in proportion to spuriously more than the fundamental wave, so that spurious generation that causes abnormal oscillation can be suppressed.

［適用例４］前記第１ＳＡＷ素子、または前記第１ＳＡＷ素子及び前記第２ＳＡＷ素子のＩＤＴ電極において、ＩＤＴ電極の電極指の端部に対向する位置にダミー電極を接続したことを特徴とする適用例１または２に記載のＳＡＷ共振片。
これにより、ＩＤＴ電極が、基本波の振動領域の外部で振動するスプリアスを励振することを防止し、第２ＳＡＷ素子の異常発振を抑制することができる。 [Application Example 4] An application example in which, in the IDT electrodes of the first SAW element or the first SAW element and the second SAW element, a dummy electrode is connected to a position facing an end of an electrode finger of the IDT electrode. The SAW resonance piece according to 1 or 2.
As a result, the IDT electrode can be prevented from exciting spurious vibrations that oscillate outside the vibration region of the fundamental wave, and abnormal oscillation of the second SAW element can be suppressed.

［適用例５］前記第１ＳＡＷ素子、または前記第１ＳＡＷ素子及び前記第２ＳＡＷ素子の前記ＩＤＴ電極の前記電極指および前記反射器の電極指は、それぞれその一部が斜めに折り曲げられ、前記弾性表面波の伝播方向に対して互いに前記弾性表面波の半波長分だけ離れた２つの直線部を有することを特徴とする適用例１または２に記載のＳＡＷ共振片。   Application Example 5 The electrode finger of the IDT electrode and the electrode finger of the reflector of the first SAW element, or the first SAW element and the second SAW element, respectively, are partially bent, and the elastic surface 3. The SAW resonator element according to application example 1 or 2, wherein the SAW resonator element includes two straight portions separated from each other by a half wavelength of the surface acoustic wave with respect to a wave propagation direction.

これにより、第１ＳＡＷ素子、または第１ＳＡＷ素子及び第２ＳＡＷ素子は１次を含む奇数次の横モードが相殺され、２次の横モードを基本波として発振することになる。よって４次の横モードから表れるスプリアスは相殺された３次の横モードより高周波に位置するため、前記スプリアスによる第２ＳＡＷ素子の異常発振を回避することができる。   As a result, the first SAW element, or the first SAW element and the second SAW element, oscillate with the second-order transverse mode as the fundamental wave, with the odd-order transverse modes including the first-order canceled. Therefore, since the spurious appearing from the fourth-order transverse mode is located at a higher frequency than the canceled third-order transverse mode, abnormal oscillation of the second SAW element due to the spurious can be avoided.

以下、本発明に係るＳＡＷ共振片を図に示した実施形態を用いて詳細に説明する。但し、この実施形態に記載される構成要素、種類、組み合わせ、形状、その相対配置などは特定的な記載がない限り、この発明の範囲をそれのみに限定する主旨ではなく単なる説明例に過ぎない。   Hereinafter, a SAW resonator element according to the present invention will be described in detail with reference to embodiments shown in the drawings. However, the components, types, combinations, shapes, relative arrangements, and the like described in this embodiment are merely illustrative examples and not intended to limit the scope of the present invention only unless otherwise specified. .

第１実施形態に係るＳＡＷ共振片１０の平面図を図１に示す。
ＳＡＷ共振片１０は水晶、ニオブ酸リチウム、タンタル酸リチウム等で形成された矩形状の圧電基板１２により外形を有し、圧電基板１２上にＡｌ又はＡｌを主成分とした合金の金属膜を蒸着、スパッタ等によりＳＡＷ素子を形成するようにパターニングしたものである。さらにＳＡＷ共振片１０においては入力端子２８、出力端子３２（３３）等がパターニングされている。 A plan view of the SAW resonator element 10 according to the first embodiment is shown in FIG.
The SAW resonator element 10 has an outer shape by a rectangular piezoelectric substrate 12 made of quartz, lithium niobate, lithium tantalate, or the like, and a metal film of Al or an alloy mainly composed of Al is deposited on the piezoelectric substrate 12. Then, patterning is performed so as to form a SAW element by sputtering or the like. Further, in the SAW resonator element 10, the input terminal 28, the output terminal 32 (33) and the like are patterned.

第１ＳＡＷ素子１４は、弾性表面波を発生する入出力電極と、弾性表面波を反射する反射器２６とから構成されている。入出力電極は、等間隔に並べられた複数の電極指２０、２４からそれぞれ形成される第１ＩＤＴ（Ｉｎｔｅｒ Ｄｉｇｉｔａｌ Ｔｒａｎｓｄｕｃｅｒ）電極１８、第２ＩＤＴ電極２２により構成される。及び弾性表面波を反射する反射器２６は電極指２０、２４と同一の間隔で並べられた電極指２８から構成されている。   The first SAW element 14 includes an input / output electrode that generates a surface acoustic wave and a reflector 26 that reflects the surface acoustic wave. The input / output electrodes are composed of a first IDT (Inter Digital Transducer) electrode 18 and a second IDT electrode 22 formed from a plurality of electrode fingers 20 and 24 arranged at equal intervals. The reflector 26 that reflects the surface acoustic wave includes electrode fingers 28 arranged at the same intervals as the electrode fingers 20 and 24.

第１ＳＡＷ素子１４において、グレーティング型の反射器２６は、互いに対向するように圧電基板１２上の長辺１２ａ方向に並べられて一対で配設されている。そして反射器２６との間に音響的に共振空洞が形成され、この空洞内に弾性表面波の定在波が発生する。この定在波と結合するように櫛型の第１ＩＤＴ電極１８、第２ＩＤＴ電極２２を配置すると第１ＳＡＷ素子１４となる。第１ＩＤＴ電極１８と第２ＩＤＴ電極２２は互いに電極指２０、２２を交差するような態様で、対向して配設されている。ここで、第１ＳＡＷ素子１４の共振周波数をｆ０その波長をλ０、弾性表面波の速度をＶとすると、λ０＝Ｖ／ｆ０となる。このため、反射器２６の電極指２８の間隔はλ０／２、各ＩＤＴ電極の電極指２０、２４の間隔はλ０としている。よって第１ＩＤＴ電極１８から抽出可能な表面弾性波の基本波と、第２ＩＤＴ電極２２から抽出可能な表面弾性波の基本波とは、互いに位相が反転した関係（位相差がπ）を有する。 In the first SAW element 14, the grating type reflectors 26 are arranged in pairs in the direction of the long side 12 a on the piezoelectric substrate 12 so as to face each other. An acoustically resonant cavity is formed between the reflector 26 and a standing surface acoustic wave is generated in the cavity. When the comb-shaped first IDT electrode 18 and the second IDT electrode 22 are arranged so as to be coupled to the standing wave, the first SAW element 14 is obtained. The first IDT electrode 18 and the second IDT electrode 22 are arranged to face each other in such a manner that the electrode fingers 20 and 22 intersect each other. Here, if the resonance frequency of the first SAW element 14 is f 0, its wavelength is λ 0 , and the surface acoustic wave velocity is V, then λ 0 = V / f 0 . Therefore, the interval of the electrode fingers 28 of the reflector 26 is lambda 0/2, the interval of electrode fingers 20 and 24 of each IDT electrode is set to lambda 0. Therefore, the fundamental wave of the surface acoustic wave that can be extracted from the first IDT electrode 18 and the fundamental wave of the surface acoustic wave that can be extracted from the second IDT electrode 22 have a relationship in which the phases are inverted (phase difference is π).

第２ＳＡＷ素子３０は第１ＳＡＷ素子１４と同様の構成を有しており、図１においては第１ＳＡＷ素子１４の電極指２０、２４と、第２ＳＡＷ素子３０の電極指３６、３７（反射器３５の電極指）の間隔が同じ大きさに描かれているが、電極指３６、３７の間隔が第１ＳＡＷ素子１４の電極指２０、２４の間隔λ０より狭く設計されており、これは後述の実施形態においても同様である。よって第２ＳＡＷ素子３０の共振周波数ｆ１はｆ０より高くなっている。 The second SAW element 30 has the same configuration as that of the first SAW element 14, and in FIG. 1, the electrode fingers 20 and 24 of the first SAW element 14 and the electrode fingers 36 and 37 of the second SAW element 30 (of the reflector 35). The distance between the electrode fingers 36 and 37 is designed to be smaller than the distance λ 0 between the electrode fingers 20 and 24 of the first SAW element 14, which will be described later. The same applies to the form. Therefore, the resonance frequency f 1 of the second SAW element 30 is higher than f 0 .

そして第１ＳＡＷ素子１４の第１ＩＤＴ電極１８は第２ＳＡＷ素子３０の第１ＩＤＴ電極３２と対向しつつＴ型の接続電極３８を介して互いに接続されている。また第１ＳＡＷ素子１４の第２ＩＤＴ電極２２は接続電極４８を介して出力端子４０に接続され、第２ＳＡＷ素子３０の第２ＩＤＴ電極３４は接続電極５０を介して出力端子４２に接続されている。よって本実施形態においては第１ＳＡＷ素子１４の入出力電極１６と、第２ＳＡＷ素子３０の入出力電極３１とは、第１ＩＤＴ電極１８及び第１ＩＤＴ電極３２を介して互いに接続されている。   The first IDT electrodes 18 of the first SAW element 14 are connected to each other via a T-type connection electrode 38 while facing the first IDT electrode 32 of the second SAW element 30. The second IDT electrode 22 of the first SAW element 14 is connected to the output terminal 40 via the connection electrode 48, and the second IDT electrode 34 of the second SAW element 30 is connected to the output terminal 42 via the connection electrode 50. Therefore, in the present embodiment, the input / output electrode 16 of the first SAW element 14 and the input / output electrode 31 of the second SAW element 30 are connected to each other via the first IDT electrode 18 and the first IDT electrode 32.

接続電極３８は、圧電基板１２の短辺１２ｂ方向で線対称となる位置に配置され、圧電基板１２の短辺方向１２ｂに延びる部分の端部がそれぞれ第１ＩＤＴ電極１８、第１ＩＤＴ電極３２に接続されている。一方圧電基板１２の長辺１２ａ方向に延びる接続電極３８の部分は、前記線対称となる位置に形成され、その端部に入力端子４６が配設されている。   The connection electrode 38 is disposed at a position that is line-symmetric in the direction of the short side 12b of the piezoelectric substrate 12, and ends of portions extending in the short side direction 12b of the piezoelectric substrate 12 are connected to the first IDT electrode 18 and the first IDT electrode 32, respectively. Has been. On the other hand, a portion of the connection electrode 38 extending in the direction of the long side 12a of the piezoelectric substrate 12 is formed at the line-symmetrical position, and an input terminal 46 is disposed at the end thereof.

上記構成によるＳＡＷ共振片１０の第１ＳＡＷ素子１４及び第２ＳＡＷ素子３０において、従来技術で説明したように（図６参照）基本波となる１次の横モードのほかに高周波側に奇数次モードに係るスプリアスが発生する。よって第１ＳＡＷ素子１４より高周波側に基本波をもつ第２ＳＡＷ素子３０は第１ＳＡＷ素子１４のスプリアスと周波数的に重なり得る。そして本実施形態のように第１ＳＡＷ素子１４と第２ＳＡＷ素子３０とが接続された場合は各ＳＡＷ素子は互いに周波数特性に影響を与える関係になるが、第１ＳＡＷ素子１４のスプリアスが、第２ＳＡＷ素子３０の基本波より低周波側であって近接する場合には本来の基本波の周波数のみならず前記スプリアスの周波数で発振を起こすいわゆる異常発振を起こす虞がある。   In the first SAW element 14 and the second SAW element 30 of the SAW resonator element 10 having the above-described configuration, as described in the prior art (see FIG. 6), in addition to the primary transverse mode serving as the fundamental wave, the odd-order mode is set on the high frequency side. Such spurious is generated. Therefore, the second SAW element 30 having a fundamental wave on the higher frequency side than the first SAW element 14 can overlap with the spurious of the first SAW element 14 in terms of frequency. When the first SAW element 14 and the second SAW element 30 are connected as in the present embodiment, the SAW elements have a relationship that affects the frequency characteristics of each other, but the spurious of the first SAW element 14 is the second SAW element. When the frequency is closer to the lower frequency side than 30 fundamental waves, there is a risk of causing so-called abnormal oscillation that causes oscillation not only at the original fundamental frequency but also at the spurious frequency.

特に最も振幅の大きいスプリアスである３次の横モードが、第２ＳＡＷ素子３０の基本波より低周波側であって近接する場合は、異常発振を起こす虞が強くなる。ＳＡＷ素子の基本波の波長は入出力電極１６および反射器２６の電極指２０、２４、２８の間隔により決定されるため、この間隔を狭くするほど波長は短くなり共振周波数は高くなる。よって第２ＳＡＷ素子３０の基本波の共振周波数が第１ＳＡＷ素子１４の３次の横モードの周波数より低周波となるように調整すれば、第２ＳＡＷ素子３０は第１ＳＡＷ素子１４の３次の横モードに起因する異常発振を回避することができる。   In particular, when the third-order transverse mode, which is a spurious signal having the largest amplitude, is closer to the lower frequency side than the fundamental wave of the second SAW element 30, there is a strong possibility of abnormal oscillation. Since the wavelength of the fundamental wave of the SAW element is determined by the distance between the input / output electrode 16 and the electrode fingers 20, 24, and 28 of the reflector 26, the wavelength becomes shorter and the resonance frequency becomes higher as the distance is reduced. Therefore, if the resonance frequency of the fundamental wave of the second SAW element 30 is adjusted to be lower than the frequency of the third-order transverse mode of the first SAW element 14, the second SAW element 30 becomes the third-order transverse mode of the first SAW element 14. Abnormal oscillation caused by the can be avoided.

なお、第１ＳＡＷ素子１４の基本波の周波数が、第２ＳＡＷ素子３０の高次横モード（３次の横モード）に起因するスプリアスの周波数より低い設計とすることにより、第１ＳＡＷ素子１４の基本波は、第２ＳＡＷ素子３０のスプリアスの影響を受けることがなく、安定した周波数特性を得ることができる。
以下において他の実施形態により異常発振を抑制する構成について述べる。 The fundamental wave of the first SAW element 14 is designed so that the frequency of the fundamental wave of the first SAW element 14 is lower than the spurious frequency caused by the higher order transverse mode (third order transverse mode) of the second SAW element 30. Is not affected by the spurious of the second SAW element 30, and a stable frequency characteristic can be obtained.
Hereinafter, a configuration for suppressing abnormal oscillation according to another embodiment will be described.

第２実施形態に係るＳＡＷ共振片７０、７０ａを図２、図３にそれぞれ示す。第２実施形態に係るＳＡＷ共振片７０は第１ＳＡＷ素子７２及び第２ＳＡＷ素子８８において、図２に示すように入出力電極７４にダミー電極が形成されている。即ち第１ＳＡＷ素子７２において第１ＩＤＴ電極７６の第２ＩＤＴ電極８２の電極指８４の端部と対向する位置にダミー電極８０が接続され、第２ＩＤＴ電極８２の第１ＩＤＴ電極７６の電極指７８と対向する位置にダミー電極８６が接続されている。なおダミー電極８０（ダミー電極８６）と電極指８４（電極指７８）との間に隙間８０ａ（隙間８６ａ）が形成されている。   SAW resonance pieces 70 and 70a according to the second embodiment are shown in FIGS. 2 and 3, respectively. In the SAW resonator element 70 according to the second embodiment, in the first SAW element 72 and the second SAW element 88, dummy electrodes are formed on the input / output electrodes 74 as shown in FIG. That is, in the first SAW element 72, the dummy electrode 80 is connected to a position of the first IDT electrode 76 that faces the end of the electrode finger 84 of the second IDT electrode 82, and faces the electrode finger 78 of the first IDT electrode 76 of the second IDT electrode 82. A dummy electrode 86 is connected to the position. A gap 80a (gap 86a) is formed between the dummy electrode 80 (dummy electrode 86) and the electrode finger 84 (electrode finger 78).

ダミー電極８０（ダミー電極８６）は第１ＩＤＴ電極７６（第２ＩＤＴ電極８２）と接続されるため、その電位は常に第１ＩＤＴ電極７６（第２ＩＤＴ電極８２）と同じである。よってダミー電極８０、８６が配置された位置においては電位の変動は起こらないため、結果的に弾性表面波が発生する領域は、電極指７８、８４が交差した領域８７に制限される。ところで、図６に示すように、入出力電極において１次の横モード、及び３次の横モードの縦方向の電荷分布において３次の横モードの方が１次の横モードより電荷が大きくなる領域が存在する。よってダミー電極８０、８６の長さはこの領域８７の電極指の長手方向の長さに合わせて調整することにより、１次の横モードについて若干削減されるが、３次の横モードはさらに大きく削減することができる。したがって第１ＳＡＷ素子７２の３次の横モードに係るスプリアスにより、第２ＳＡＷ素子８８の異常発振を抑制することができる。   Since the dummy electrode 80 (dummy electrode 86) is connected to the first IDT electrode 76 (second IDT electrode 82), the potential thereof is always the same as that of the first IDT electrode 76 (second IDT electrode 82). Therefore, since the potential does not fluctuate at the position where the dummy electrodes 80 and 86 are disposed, the region where the surface acoustic wave is generated as a result is limited to the region 87 where the electrode fingers 78 and 84 intersect. By the way, as shown in FIG. 6, in the charge distribution in the longitudinal direction of the primary transverse mode and the tertiary transverse mode in the input / output electrodes, the charge in the tertiary transverse mode is larger than that in the primary transverse mode. An area exists. Therefore, by adjusting the length of the dummy electrodes 80 and 86 according to the length of the electrode fingers in the region 87 in the longitudinal direction, the primary transverse mode is slightly reduced, but the tertiary transverse mode is larger. Can be reduced. Therefore, the abnormal oscillation of the second SAW element 88 can be suppressed by the spurious related to the third transverse mode of the first SAW element 72.

さらに第２実施形態においては、ダミー電極８０ｂ、８６ｂ及び電極指７８ｂ、８４ｂの長さを図３に示すように、電極指７８ｂ、８４ｂの交差幅を弾性表面波の伝播方向に沿って連続的に変化させ、第１ＳＡＷ素子７２ｂ、第２ＳＡＷ素子８８ａの基本波（１次の横モード）の振動領域８７ａの境界に合わせて調整したアポダイズ電極を形成したＳＡＷ共振片７０ａとすることができる。これにより電極指７８ｂ、８４ｂが交差する領域以外の部分は上述同様の理由により電位の変動は起きない。また１次の横モードは第１実施形態の場合においてもＩＤＴ電極全体で振動するのではなく、図３に示すように楕円状の振動領域８７ａで振動することが知られている。よってこの振動領域８７ａより外部において電極指を交差させても１次の横モードの振動エネルギーが大きくなることはなく、また本実施形態のようにアポダイズ電極を形成しても１次の横モードの振動エネルギーの損失が起きることはない。一方、３次の横モードはこの１次の横モードの振動領域８７ａより外側の領域で振動する成分を有するので、アポダイズ電極とすることにより３次の横モードに係るスプリアスの振動エネルギーを低下させ、スプリアスを効果的に削減することができる。   Furthermore, in the second embodiment, the lengths of the dummy electrodes 80b and 86b and the electrode fingers 78b and 84b are shown in FIG. 3, and the intersection width of the electrode fingers 78b and 84b is continuously set along the propagation direction of the surface acoustic wave. Thus, the SAW resonator element 70a can be obtained in which an apodized electrode adjusted in accordance with the boundary of the vibration region 87a of the fundamental wave (primary transverse mode) of the first SAW element 72b and the second SAW element 88a is formed. As a result, the potential does not fluctuate in the portion other than the region where the electrode fingers 78b and 84b intersect for the same reason as described above. Further, it is known that the primary transverse mode does not vibrate in the IDT electrode as a whole in the case of the first embodiment, but vibrates in an elliptical vibration region 87a as shown in FIG. Therefore, even if the electrode fingers are crossed outside the vibration region 87a, the vibration energy of the primary transverse mode does not increase, and even if the apodized electrode is formed as in this embodiment, the primary transverse mode is not affected. There is no loss of vibration energy. On the other hand, since the third-order transverse mode has a component that vibrates in a region outside the vibration region 87a of the first-order transverse mode, the apodized electrode reduces the vibration energy of spurious related to the third-order transverse mode. , Spurious can be effectively reduced.

第３実施形態に係るＳＡＷ共振片９０を図４に示す。第３実施形態に係るＳＡＷ共振片９０は第１ＳＡＷ素子９２において（第２ＳＡＷ素子１０８も同様）図６に示すように、入出力電極９４、及び反射器１０４が波型の形状をしていることである（ＷＡＶＥ電極）。より具体的には、第１ＳＡＷ素子９２において、第１ＩＤＴ電極９６の電極指９８、第２ＩＤＴ電極１００の電極指１０２および反射器１０４の電極指１０６は、それぞれその一部が斜めに折り曲げられ、弾性表面波の伝播方向に対して互いに弾性表面波の基本波の半波長分だけ離れた２つの直線部を有している。   FIG. 4 shows a SAW resonance piece 90 according to the third embodiment. In the SAW resonator element 90 according to the third embodiment, in the first SAW element 92 (the same applies to the second SAW element 108), as shown in FIG. 6, the input / output electrodes 94 and the reflector 104 have a wave shape. (WAVE electrode). More specifically, in the first SAW element 92, the electrode finger 98 of the first IDT electrode 96, the electrode finger 102 of the second IDT electrode 100, and the electrode finger 106 of the reflector 104 are each bent at an angle, and elastic It has two straight portions separated from each other by the half wavelength of the fundamental wave of the surface acoustic wave with respect to the propagation direction of the surface wave.

第１ＩＤＴ電極９６の電極指９８、及び第２ＩＤＴ電極１００の電極指１０２は、それぞれその一部が折り曲げられ、弾性表面波の伝播方向と直行する方向に分割して配置される直線部９８ａ、９８ｂ、１０２ａ、１０２ｂと、その両者を接続する接続部９８ｃ、１０２ｃからなる。直線部９８ａ（１０２ａ）と直線部９８ｂ（１０２ｂ）とは、弾性表面波の伝播方向に対して、弾性表面波の基本波の半波長分だけ離れた位置に配置されている。接続部９８ｃ、１０２ｃは、その長さができるだけ短いほうが良い。反射器１０４の電極指１０６は同様に、直線部１０６ａ、１０６ｂとその両者を接続する傾斜状の接続部１０６ｃとからなる。   The electrode fingers 98 of the first IDT electrode 96 and the electrode fingers 102 of the second IDT electrode 100 are respectively bent, and straight portions 98a and 98b are arranged separately in a direction perpendicular to the propagation direction of the surface acoustic wave. , 102a and 102b, and connection portions 98c and 102c for connecting the two. The straight line portion 98a (102a) and the straight line portion 98b (102b) are disposed at positions separated by a half wavelength of the fundamental wave of the surface acoustic wave with respect to the propagation direction of the surface acoustic wave. The connecting portions 98c and 102c are preferably as short as possible. Similarly, the electrode finger 106 of the reflector 104 includes straight portions 106a and 106b and an inclined connecting portion 106c that connects both of them.

従って電極指９８と電極指１０２との交差幅ａは直線部９８ａと直線部１０２ｂとが対向する部分に係る交差幅ｂ１と直線部９８ｂと直線部１０２ａとが対向する部分に係る交差幅ｂ２との和になる。   Accordingly, the intersection width a between the electrode finger 98 and the electrode finger 102 is defined as an intersection width b1 relating to a portion where the straight portion 98a and the straight portion 102b face each other, and an intersection width b2 relating to a portion where the straight portion 98b and the straight portion 102a face each other. The sum of

上記構成による第１ＳＡＷ素子９２の動作について説明する。例えば入力端子４６を介して第１ＩＤＴ電極９６に交流電圧が印加されると、圧電効果により圧電基板１２上で弾性表面波に変換される。この弾性表面波は各ＩＤＴ電極の電極指９８、１０２の長手方向に対して直交する方向に伝播され、第２ＩＤＴ電極１００まで伝播される。このように生じた弾性表面波は、反射器１０４で振動が外部に漏れずに閉じ込められることになる。そして第２ＩＤＴ電極１００に弾性表面波が入射されると、その弾性表面波の振幅に比例した電圧が電極指１０２に発生し、所定の周波数特性に応じた信号が抽出されて出力端子４０から出力される。なお、第２ＳＡＷ素子１０８についても第１ＳＡＷ素子９２と同様の動作をするので説明を省略する。ここで電極指１０２は直線部１０２ａ、１０２ｂを有し、この両者は弾性表面波の伝播方向に弾性表面波の基本波（１次の横モード）の半波長分だけ離れた位置に配置されている。このため、入出力電極９４では、電極指９８の直線部９８ａと電極指１０２の直線部１０２ａとは、図４に示すように弾性表面波の伝播方向と直交する方向において、同一直線上に位置するようになり、電極指９８と電極指１０２には正負の異なる電圧を有することになる。   The operation of the first SAW element 92 having the above configuration will be described. For example, when an AC voltage is applied to the first IDT electrode 96 via the input terminal 46, it is converted into a surface acoustic wave on the piezoelectric substrate 12 by the piezoelectric effect. This surface acoustic wave propagates in a direction orthogonal to the longitudinal direction of the electrode fingers 98 and 102 of each IDT electrode, and propagates to the second IDT electrode 100. The surface acoustic wave generated in this way is confined by the reflector 104 without vibrations leaking outside. When a surface acoustic wave is incident on the second IDT electrode 100, a voltage proportional to the amplitude of the surface acoustic wave is generated on the electrode finger 102, and a signal corresponding to a predetermined frequency characteristic is extracted and output from the output terminal 40. Is done. Note that the second SAW element 108 operates in the same manner as the first SAW element 92, and thus the description thereof is omitted. Here, the electrode finger 102 has straight portions 102a and 102b, both of which are arranged at positions separated by a half wavelength of the fundamental wave (first-order transverse mode) of the surface acoustic wave in the propagation direction of the surface acoustic wave. Yes. Therefore, in the input / output electrode 94, the linear portion 98a of the electrode finger 98 and the linear portion 102a of the electrode finger 102 are positioned on the same straight line in a direction orthogonal to the propagation direction of the surface acoustic wave as shown in FIG. Thus, the electrode finger 98 and the electrode finger 102 have different positive and negative voltages.

したがって、上記の動作の場合に、弾性表面波の伝播方向と垂直にエネルギーが分布する横モードは図５に示すようになると考えられる。図５に第３実施形態を構成するＳＡＷ素子の１次〜４次の横モードの共振モードのイメージ図を示す。この場合、直線部１０２ａと直線部１０２ｂにおいて、弾性表面波の１次及び３次の横モードについては互いに逆位相の関係になるため、その振動エネルギーの正負の成分が互いに相殺され、振動エネルギーは相殺される。そして２次の横モードについては同位相となるため直線部１０２ａと直線部１０２ｂで表れた振動エネルギーが相殺されることはなく、これが主応答となる。   Therefore, in the case of the above operation, it is considered that the transverse mode in which energy is distributed perpendicularly to the propagation direction of the surface acoustic wave is as shown in FIG. FIG. 5 shows an image diagram of the resonance modes of the first to fourth order transverse modes of the SAW element constituting the third embodiment. In this case, in the linear portion 102a and the linear portion 102b, the first-order and third-order transverse modes of the surface acoustic wave are in an opposite phase relationship, so the positive and negative components of the vibration energy cancel each other, and the vibration energy is Offset. Since the second-order transverse mode has the same phase, the vibration energy appearing at the straight portion 102a and the straight portion 102b is not canceled out, and this becomes the main response.

一方、４次の横モードは直線部１０２ａと直線部１０２ｂにおいて表れた振動エネルギーは同位相となるため相殺されることなく、これがスプリアスとなる。よって第３実施形態においては奇数次の横モードについては相殺され、偶数次の横モードについては相殺されないことになる。このような挙動は入力側である第１ＩＤＴ電極９６においても同様に発生する。また第１実施形態に示されるＳＡＷ共振片１０における１次の横モードと３次の横モードとの周波数差よりも、本実施形態における２次の横モードと４次の横モードとの周波数差が大きいため、本実施形態においてはスプリアスを第１実施形態の場合より主応答の周波数から遠ざけることが可能であり、このため第２ＳＡＷ素子１０８が第１ＳＡＷ素子９２が発するスプリアスの影響を回避することができる。   On the other hand, in the fourth-order transverse mode, the vibration energy appearing at the straight line portion 102a and the straight line portion 102b has the same phase, so that they are not canceled out and become spurious. Therefore, in the third embodiment, the odd-order transverse mode is canceled and the even-order transverse mode is not canceled. Such a behavior also occurs in the first IDT electrode 96 on the input side. Further, the frequency difference between the second-order transverse mode and the fourth-order transverse mode in the present embodiment is higher than the frequency difference between the first-order transverse mode and the third-order transverse mode in the SAW resonator element 10 shown in the first embodiment. Therefore, in this embodiment, it is possible to move the spurious farther from the main response frequency than in the first embodiment. For this reason, the second SAW element 108 avoids the influence of the spurious generated by the first SAW element 92. Can do.

第２実施形態及び第３実施形態において、ダミー電極、アポダイズ電極、ＷＡＶＥ電極を第１ＳＡＷ素子、第２ＳＡＷ素子ともに適用してきたが、少なくとも周波数の低い側の第１ＳＡＷ素子にこれらを適用すればよい。またいずれの実施形態においても入力側を互いに接続しているが、出力側を互いに接続してもよい。   In the second embodiment and the third embodiment, the dummy electrode, the apodized electrode, and the WAVE electrode are applied to both the first SAW element and the second SAW element. However, these may be applied to at least the first SAW element on the low frequency side. In any of the embodiments, the input sides are connected to each other, but the output sides may be connected to each other.

第１実施形態に係るＳＡＷ共振片を示す模式図である。It is a schematic diagram which shows the SAW resonance piece which concerns on 1st Embodiment. 第２実施形態に係るＳＡＷ共振片（ダミー電極型）を示す模式図である。It is a schematic diagram which shows the SAW resonance piece (dummy electrode type) which concerns on 2nd Embodiment. 第２実施形態に係るＳＡＷ共振片（アポダイズ電極型）を示す模式図である。It is a schematic diagram which shows the SAW resonance piece (apodized electrode type) which concerns on 2nd Embodiment. 第３実施形態に係るＳＡＷ共振片を示す模式図である。It is a schematic diagram which shows the SAW resonance piece which concerns on 3rd Embodiment. 第３実施形態を構成するＳＡＷ素子の共振モードのイメージ図である。It is an image figure of the resonance mode of the SAW element which constitutes a 3rd embodiment. 従来技術に係るＳＡＷ素子の共振モードのイメージ図である。It is an image figure of the resonance mode of the SAW element concerning a prior art.

符号の説明Explanation of symbols

１０………ＳＡＷ共振片、１２………圧電基板、１４………第１ＳＡＷ素子、１６………入出力電極、１８………第１ＩＤＴ電極、２０………電極指、２２………第２ＩＤＴ電極、２４………電極指、２６………反射器、２８………電極指、３０………第２ＳＡＷ素子、３２………第１ＩＤＴ電極、３４………第２ＩＤＴ電極、３６………電極指、３８………接続電極、４０………出力端子、４２………出力端子、４６………入力端子、４８………接続電極、５０………接続電極、７０………ＳＡＷ共振片、７２………第１ＳＡＷ素子、７４………入出力電極、７６………第１ＩＤＴ電極、７８………電極指、８０………ダミー電極、８２………第２ＩＤＴ電極、８４………電極指、８６………ダミー電極、８７………領域、８８………第２ＳＡＷ素子、９０………ＳＡＷ共振片、９２………第１ＳＡＷ素子、９４………入出力電極、９６………第１ＩＤＴ電極、９８………電極指、１００………第２ＩＤＴ電極、１０２………電極指、１０４………反射器、１０６………電極指、１０８………第２ＳＡＷ素子。 DESCRIPTION OF SYMBOLS 10 ......... SAW resonance piece, 12 ......... Piezoelectric substrate, 14 ......... First SAW element, 16 ......... Input / output electrode, 18 ......... First IDT electrode, 20 ......... Electrode finger, 22 ......... Second IDT electrode, 24 ......... Electrode finger, 26 ......... Reflector, 28 ......... Electrode finger, 30 ......... Second SAW element, 32 ......... First IDT electrode, 34 ......... Second IDT electrode, 36 ......... Electrode finger, 38 ......... Connection electrode, 40 ......... Output terminal, 42 ......... Output terminal, 46 ......... Input terminal, 48 ......... Connection electrode, 50 ...... Connection electrode, 70 ... ...... SAW resonator element 72 ......... First SAW element 74 ......... Input / output electrode 76 ......... First IDT electrode 78 ......... Electrode finger 80 ......... Dummy electrode 82 ......... Second IDT Electrode, 84... Electrode finger, 86... Dummy electrode, 87. AW element, 90... SAW resonator element, 92... First SAW element, 94... I / O electrode, 96... First IDT electrode, 98. 102... Electrode finger 104... Reflector 106... Electrode finger 108.

Claims (5)

圧電基板と、
前記圧電基板上に形成され、電極指を交差させた一対のＩＤＴ電極からなる入出力電極と、
前記圧電基板上に形成され、前記一対の入出力電極を挟んで両側に位置する反射器と、を備え、弾性表面波を発振する第１ＳＡＷ素子及び第２ＳＡＷ素子を有するＳＡＷ共振片であって、
前記第２ＳＡＷ素子の前記電極指の間隔は、前記第１ＳＡＷ素子のそれより狭くするとともに、
各ＳＡＷ素子の入出力電極の入力側または出力側のうち一方が互いに接続されたことを特徴とするＳＡＷ共振片。 A piezoelectric substrate;
An input / output electrode comprising a pair of IDT electrodes formed on the piezoelectric substrate and having electrode fingers crossed;
A SAW resonance piece having a first SAW element and a second SAW element that oscillate a surface acoustic wave, the reflector being formed on the piezoelectric substrate and positioned on both sides of the pair of input / output electrodes.
The distance between the electrode fingers of the second SAW element is narrower than that of the first SAW element,
One of the input side or the output side of the input / output electrodes of each SAW element is connected to each other. 前記第１ＳＡＷ素子の基本波の周波数が、前記第２ＳＡＷ素子の高次横モードに起因するスプリアスの周波数より低いことを特徴とする請求項１に記載のＳＡＷ共振片。   2. The SAW resonator element according to claim 1, wherein a frequency of a fundamental wave of the first SAW element is lower than a frequency of a spurious attributed to a higher-order transverse mode of the second SAW element. 前記第１ＳＡＷ素子、または前記第１ＳＡＷ素子及び前記第２ＳＡＷ素子のＩＤＴ電極において、ＩＤＴ電極の電極指の端部に対向する位置にダミー電極を接続したことを特徴とする請求項１または２に記載のＳＡＷ共振片。   3. The dummy electrode is connected to the IDT electrode of the first SAW element or the first SAW element and the second SAW element at a position facing an end of an electrode finger of the IDT electrode. SAW resonance piece. 前記第１ＳＡＷ素子、または前記第１ＳＡＷ素子及び前記第２ＳＡＷ素子のＩＤＴ電極において、前記一対のＩＤＴ電極の前記電極指の交差幅を弾性表面波の伝播方向に沿って連続的に変化させたことを特徴とする請求項１または２に記載のＳＡＷ共振片。   In the IDT electrodes of the first SAW element or the first SAW element and the second SAW element, the crossing width of the electrode fingers of the pair of IDT electrodes is continuously changed along the propagation direction of the surface acoustic wave. The SAW resonance piece according to claim 1 or 2, characterized in that 前記第１ＳＡＷ素子、または前記第１ＳＡＷ素子及び前記第２ＳＡＷ素子の前記ＩＤＴ電極の前記電極指および前記反射器の電極指は、それぞれその一部が斜めに折り曲げられ、前記弾性表面波の伝播方向に対して互いに前記弾性表面波の半波長分だけ離れた２つの直線部を有することを特徴とする請求項１または２に記載のＳＡＷ共振片。   The electrode finger of the IDT electrode and the electrode finger of the reflector of the first SAW element, or the first SAW element and the second SAW element, respectively, are partially bent in the propagation direction of the surface acoustic wave. 3. The SAW resonator element according to claim 1, wherein the SAW resonator element has two straight portions separated from each other by a half wavelength of the surface acoustic wave.
JP2008275937A 2008-10-27 2008-10-27 Saw resonance piece Pending JP2010103951A (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017118587A (en) * 2013-02-27 2017-06-29 京セラ株式会社 Acoustic wave element, splitter, and communication module

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017118587A (en) * 2013-02-27 2017-06-29 京セラ株式会社 Acoustic wave element, splitter, and communication module
US10541672B2 (en) 2013-02-27 2020-01-21 Kyocera Corporation Acoustic wave element, duplexer, and communication module

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