JP2010047820A - Surface treatment method and sliding member - Google Patents

Surface treatment method and sliding member Download PDF

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JP2010047820A
JP2010047820A JP2008215387A JP2008215387A JP2010047820A JP 2010047820 A JP2010047820 A JP 2010047820A JP 2008215387 A JP2008215387 A JP 2008215387A JP 2008215387 A JP2008215387 A JP 2008215387A JP 2010047820 A JP2010047820 A JP 2010047820A
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surface treatment
discharge
film
coating
electrode
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Masao Akiyoshi
雅夫 秋吉
Hideto Nakao
英人 中尾
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface treatment method easily and quickly forming a film having small friction coefficient and excellent wear resistance. <P>SOLUTION: The surface treatment method includes a first discharge surface treatment step of generating the pulse-like discharge between an electrode and a workpiece in oil and forming a film of an electrode material or a reaction product of the electrode material on a surface of the workpiece by the discharge energy with a formed body of metal powder or powder of metal compound, or the formed body subjected to the heating as the electrode, a second discharge surface treatment step of forming a film of an electrode material or a reaction product of the electrode material on the surface of the film formed in the first discharge surface treatment step by the discharge energy smaller than that in the first discharge surface treatment step, and a solid lubrication film forming step of forming a solid lubrication film on the surface of the film formed in the first and second discharge surface treatment steps. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、表面処理方法、及びその表面処理方法により形成された被膜を有する摺動部材に関するものである。   The present invention relates to a surface treatment method and a sliding member having a coating formed by the surface treatment method.

従来の表面処理方法として、固体潤滑剤を４０質量％以下含有した圧粉体の電極を用い、加工液中又は気中において、電極と被加工物の間にパルス状の放電を発生させ、その放電エネルギーによって固体潤滑剤を含有する被膜を形成する放電表面処理方法が知られている（例えば、特許文献１参照）。この放電表面処理方法によれば、固体潤滑剤を被膜に含有させることができるので、固体潤滑剤が有する固体潤滑作用を被膜に付与することができる。さらに、この放電表面処理方法によれば、高硬度の被膜を形成することもできる。
一方、固体潤滑剤を含有した樹脂組成物を被加工物の表面に塗布することによって、固体潤滑作用のある被膜を形成することも知られている。
特開２００６−３２２０３４号公報 As a conventional surface treatment method, a green compact electrode containing 40% by mass or less of a solid lubricant is used, and a pulsed discharge is generated between the electrode and the workpiece in the machining liquid or in the air. There is known a discharge surface treatment method for forming a coating film containing a solid lubricant by discharge energy (see, for example, Patent Document 1). According to this discharge surface treatment method, since the solid lubricant can be contained in the film, the solid lubricating action of the solid lubricant can be imparted to the film. Furthermore, according to this discharge surface treatment method, a high-hardness film can be formed.
On the other hand, it is also known to form a film having a solid lubricating action by applying a resin composition containing a solid lubricant to the surface of a workpiece.
JP 2006-320204 A

しかしながら、上記の放電表面処理方法では、固体潤滑剤からなる部分と、それ以外の成分からなる部分とが被膜に分布するため、固体潤滑剤以外の成分からなる部分が被膜の表面に露出した場合には、その露出部の摩擦係数が大きくなり、被膜全体の摩擦係数を十分に低下させることができない。さらに、放電表面処理方法によって形成された被膜は、高硬度であるものの、脆いため、熱による引張や圧縮等の繰返し応力が作用する環境下では剥離してしまう。また、このような高硬度の被膜を有する摺動部材では、相手側部材の硬度が低いと、その相手側部材を摩耗させてしまうこともある。
一方、固体潤滑剤を含有した樹脂組成物を塗布する方法では、被加工物と被膜との接合強度を確保するために、樹脂組成物の塗布前に被加工物の表面をショットブラスト等の機械的加工によって荒らして接合面積を増大させる必要がある。そのため、ショットブラストを行うにあたってマスキング等の工程が増加し、コストアップや生産性が低下してしまう。さらに、この方法では、高硬度の被膜を形成することができないので、低硬度のＡｌやＣｕ等を被加工物として使用することが難しい。 However, in the above discharge surface treatment method, the portion consisting of the solid lubricant and the portion consisting of the other components are distributed in the coating, and therefore the portion consisting of components other than the solid lubricant is exposed on the surface of the coating. In this case, the friction coefficient of the exposed portion becomes large, and the friction coefficient of the entire coating cannot be sufficiently reduced. Furthermore, although the film formed by the discharge surface treatment method has high hardness, it is fragile and therefore peels off in an environment where repeated stress such as tension or compression by heat acts. Moreover, in the sliding member having such a high-hardness film, if the mating member has a low hardness, the mating member may be worn.
On the other hand, in the method of applying a resin composition containing a solid lubricant, in order to ensure the bonding strength between the workpiece and the film, the surface of the workpiece is coated with a machine such as shot blast before applying the resin composition. It is necessary to increase the bonding area by roughing by mechanical processing. For this reason, a process such as masking is increased in performing shot blasting, resulting in an increase in cost and productivity. Furthermore, this method cannot form a high-hardness film, so that it is difficult to use low-hardness Al or Cu as a workpiece.

本発明は、上記のような問題を解消するためになされたものであり、摩擦係数が小さく、且つ耐摩耗性に優れた被膜を容易且つ迅速に形成することができる表面処理方法を提供することを目的とする。また、本発明は、摺動部材の相手側部材の摩耗を抑制することができる摺動部材を提供することを目的とする。   The present invention has been made to solve the above-described problems, and provides a surface treatment method capable of easily and quickly forming a coating film having a small friction coefficient and excellent wear resistance. With the goal. Moreover, an object of this invention is to provide the sliding member which can suppress abrasion of the other party member of a sliding member.

本発明者等は、上記のような問題を解決すべく鋭意研究した結果、放電表面処理を第１の放電表面処理工程及び第２の放電表面処理工程の２段階に分け、第２の放電表面処理工程の放電エネルギーを第１の放電表面処理工程の放電エネルギーよりも小さくして放電表面処理することにより、低硬度のＡｌやＣｕ等を被加工物として使用する場合であっても高硬度の被膜を形成して耐磨耗性を確保することができると共に、ショットブラスト等の機械的加工を行わなくても表面粗度（Ｒｙ）が数μｍ〜数十μｍの凹凸を有する被膜を迅速且つ容易に形成し、その被膜表面に形成される固体潤滑被膜との接合強度を増大させることができることを見出した。さらに、上記放電表面処理によって形成された被膜の表面に固体潤滑被膜を形成することにより、低硬度のＡｌやＣｕ等を被加工物として使用する場合であっても、摩擦係数が小さく、且つ耐摩耗性に優れた被膜を形成することができることを見出した。   As a result of diligent research to solve the above problems, the inventors of the present invention divided the discharge surface treatment into two stages, a first discharge surface treatment step and a second discharge surface treatment step. Even when a low hardness Al, Cu, or the like is used as a workpiece by performing a discharge surface treatment by making the discharge energy of the treatment step smaller than the discharge energy of the first discharge surface treatment step, A film can be formed to ensure wear resistance, and a film having irregularities with a surface roughness (Ry) of several μm to several tens of μm can be obtained quickly and without mechanical processing such as shot blasting. It was found that it can be easily formed and the bonding strength with the solid lubricating coating formed on the coating surface can be increased. Further, by forming a solid lubricating film on the surface of the film formed by the above discharge surface treatment, even when using low hardness Al, Cu, or the like as a workpiece, the friction coefficient is small, and the It has been found that a film having excellent wear can be formed.

すなわち、本発明は、金属粉末若しくは金属化合物の粉末を成形した成形体、又は前記成形体を加熱処理した成形体を電極とし、油中において前記電極と被加工物との間にパルス状の放電を発生させ、その放電エネルギーによって電極材料又は電極材料の反応生成物の被膜を前記被加工物の表面に形成する第１の放電表面処理工程と、前記第１の放電表面処理工程において形成された被膜の表面に、前記第１の放電表面処理工程における放電エネルギーよりも小さな放電エネルギーによって電極材料又は電極材料の反応生成物の被膜を形成する第２の放電表面処理工程と、前記第１及び第２の放電表面処理工程において形成された被膜の表面に固体潤滑被膜を形成する固体潤滑被膜形成工程とを含むことを特徴とする表面処理方法である。
また、本発明は、上記表面処理方法により形成された被膜を有することを特徴とする摺動部材である。 That is, the present invention uses, as an electrode, a molded body obtained by molding a metal powder or a metal compound powder, or a molded body obtained by heat-treating the molded body, and a pulsed discharge between the electrode and the workpiece in oil. Are formed in the first discharge surface treatment step and the first discharge surface treatment step of forming a coating of the electrode material or a reaction product of the electrode material on the surface of the workpiece by the discharge energy. A second discharge surface treatment step of forming a coating of an electrode material or a reaction product of the electrode material on the surface of the coating with a discharge energy smaller than the discharge energy in the first discharge surface treatment step; And a solid lubricant film forming step of forming a solid lubricant film on the surface of the film formed in the discharge surface treatment step.
Moreover, this invention is a sliding member characterized by having the film formed by the said surface treatment method.

本発明によれば、摩擦係数が小さく、且つ耐摩耗性に優れた被膜を容易且つ迅速に形成することができる表面処理方法を提供することができる。また、本発明によれば、摺動部材の相手側部材の摩耗を抑制することができる摺動部材を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, the surface treatment method which can form easily and rapidly the coating film with a small friction coefficient and excellent abrasion resistance can be provided. Moreover, according to this invention, the sliding member which can suppress abrasion of the other party member of a sliding member can be provided.

実施の形態１．
まず、放電表面処理の原理について図１を用いて説明する。図１は、放電表面処理に用いる放電表面処理装置の断面模式図である。
放電表面処理では、金属粉末若しくは金属化合物の粉末を成形した成形体、又はこの成形体を加熱処理した成形体を電極１として用い、その電極１を、主軸３と連結された電極支持具２で固定し、石油系の加工液７で満たされた加工槽８に設置した被加工物（母材）９と所定間隙離間して配置する。そして、電極１を陰極、被加工物９を陽極とし、両者が接触しないように主軸３はボールネジ４とモータ５でサーボを取りつつ、両者間に放電電源６で電圧を印加し、放電を発生させる。
放電の熱により被加工物９及び電極１は溶融・気化され、気化により発生する爆風や静電気力によって、溶融した電極１の一部（溶融粒子）を被加工物９の表面に輸送する。そして、溶融した電極１の一部が被加工物９の表面に到達すると、再凝固し被膜となる。 Embodiment 1 FIG.
First, the principle of the discharge surface treatment will be described with reference to FIG. FIG. 1 is a schematic cross-sectional view of a discharge surface treatment apparatus used for discharge surface treatment.
In the discharge surface treatment, a molded body obtained by molding a metal powder or metal compound powder, or a molded body obtained by heat-treating this molded body is used as the electrode 1, and the electrode 1 is connected to the main shaft 3 with an electrode support 2. The workpiece (base material) 9 is fixed and spaced apart from the workpiece (base material) 9 installed in the processing tank 8 filled with the petroleum-based processing liquid 7. Then, the electrode 1 is a cathode and the workpiece 9 is an anode, and the spindle 3 is servoed by a ball screw 4 and a motor 5 so that they do not come into contact with each other. Let
The workpiece 9 and the electrode 1 are melted and vaporized by the heat of discharge, and a part of the melted electrode 1 (molten particles) is transported to the surface of the workpiece 9 by a blast or electrostatic force generated by the vaporization. When a part of the melted electrode 1 reaches the surface of the workpiece 9, it resolidifies and becomes a film.

次に、本実施の形態の表面処理方法について図２〜４を用いて説明する。図２は、本実施の形態の表面処理方法によって被加工物９の表面に形成される被膜を説明するための断面模式図である。図３及び図４は、本実施の形態の放電表面処理工程において被加工物９の表面に形成される被膜を説明するための放電処理装置の電極１及び形成される被膜の一部の断面模式図である。
本実施の形態の表面処理方法では、放電表面処理工程を行った後に、固体潤滑被膜形成工程を行う。
本実施の形態の放電表面処理工程は、軸受、軸、エンジンのシリンダ内壁等の摺動部材である被加工物９の耐摩耗性（硬度）を向上させるために行う。そのため、硬度が低いＡｌやＣｕ等を被加工物９として使用することが可能となる。また、本実施の形態の放電表面処理工程により得られる被膜１０は、下記で詳述する固体潤滑被膜形成工程による固体潤滑被膜１２との接合強度に優れているので、硬度が比較的高い材料を被加工物９として使用する場合にも有効である。 Next, the surface treatment method of this Embodiment is demonstrated using FIGS. FIG. 2 is a schematic cross-sectional view for explaining a film formed on the surface of the workpiece 9 by the surface treatment method of the present embodiment. FIGS. 3 and 4 are schematic cross-sectional views of a part of the electrode 1 of the discharge treatment apparatus and the formed coating for explaining the coating formed on the surface of the workpiece 9 in the discharge surface treatment step of the present embodiment. FIG.
In the surface treatment method of the present embodiment, the solid lubricant film forming step is performed after the discharge surface treatment step.
The discharge surface treatment process of the present embodiment is performed in order to improve the wear resistance (hardness) of the workpiece 9 which is a sliding member such as a bearing, a shaft, and an engine cylinder inner wall. Therefore, it is possible to use Al, Cu or the like having a low hardness as the workpiece 9. In addition, the film 10 obtained by the discharge surface treatment process of the present embodiment is excellent in bonding strength with the solid lubricating film 12 by the solid lubricating film forming process described in detail below, so a material having a relatively high hardness is used. It is also effective when used as the workpiece 9.

被膜１０としては、特に限定されることはなく、被膜１０に要求される耐摩耗性に応じて適宜選択すればよい。この被膜１０の耐摩耗性は、放電表面処理装置に用いる電極１の種類を変えることによって調整することができる。また、被膜１０の厚さは、使用環境や用途等に応じて適宜設定すればよく、一般に０．１〜０．３ｍｍである。
耐摩耗性を有する被膜１０を与える電極１は、金属粉末若しくは金属化合物の粉末を成形した成形体、又はこの成形体を加熱処理した成形体であり、当該技術分野において公知である。具体的には、電極１に用いられる金属若しくは金属化合物として、Ｃｏ、Ｃｒ、Ｆｅ、Ｍｏ、Ｎｉ、Ａｇ、又は前記金属を主成分とする合金等が挙げられる。 The coating 10 is not particularly limited and may be appropriately selected according to the wear resistance required for the coating 10. The wear resistance of the coating 10 can be adjusted by changing the type of the electrode 1 used in the discharge surface treatment apparatus. Moreover, what is necessary is just to set the thickness of the film 10 suitably according to a use environment, a use, etc., and is generally 0.1-0.3 mm.
The electrode 1 that provides the wear-resistant coating 10 is a molded body obtained by molding a metal powder or a metal compound powder, or a molded body obtained by heat-treating this molded body, and is known in the art. Specifically, examples of the metal or metal compound used for the electrode 1 include Co, Cr, Fe, Mo, Ni, Ag, and alloys containing the metal as a main component.

例えば、Ｃｏ粉末及びＦｅ粉末を含む成形体を電極１として用いた場合、放電表面処理によってＣｏ及びＦｅを含む被膜１０を被加工物９の表面に形成することができる。この被膜１０は、放電表面処理工程中に加工液７が分解されて生じたＣとＣｏやＦｅとが反応して生成した金属間化合物や、Ｃを含有する合金から構成される膜であり、Ｃｏ単独の被膜やＦｅ単独の被膜に比べて高硬度である。この被膜１０のビッカース硬度は、３００ＨＶ〜８００ＨＶであり、鉄鋼材料と同程度の硬度を有する。この被膜１０を有する摺動部材とすれば、摺動部材の相手側部材が鉄鋼材料である場合に、摺動部材が鉄鋼材料と同程度の硬度を有するので、相手側部材の摩耗も抑制できることとなる。   For example, when a molded body containing Co powder and Fe powder is used as the electrode 1, the coating 10 containing Co and Fe can be formed on the surface of the workpiece 9 by discharge surface treatment. This coating 10 is a film composed of an intermetallic compound produced by the reaction of C and Co or Fe produced by decomposition of the working fluid 7 during the discharge surface treatment step, or an alloy containing C. High hardness compared to Co-only coating or Fe-only coating. The coating 10 has a Vickers hardness of 300 HV to 800 HV, which is comparable to that of steel materials. If the sliding member having this coating 10 is used, when the mating member of the sliding member is a steel material, the sliding member has the same degree of hardness as the steel material, so that the wear of the mating member can also be suppressed. It becomes.

低硬度のＡｌやＣｕ等を被加工物９として使用する場合、高硬度の被膜１０の厚さは、摩擦による剪断力のピークが被膜１０の内部に位置するように決定される。例えば、弾性変形領域における剪断力のピークは、表面から深さｚｍに位置し、以下の式で見積もられる。
ｚｍ＝０．４７ａ
式中、ａは摺動面の接触半径である。
一般的な使用環境においては、剪断力のピークが、表面から深さ０．１ｍｍ〜０．３ｍｍであれば十分である。仮に摩擦による剪断力のピークが被加工物９中に位置すると、被膜１０が剥離せずとも、低硬度の被加工物９から剥離してしまう。摩擦による剪断力のピークを被膜１０中に位置させることで、高硬度の被膜１０で剪断力を保持できるようになる。 When low hardness Al, Cu, or the like is used as the workpiece 9, the thickness of the high hardness coating 10 is determined so that the peak of the shearing force due to friction is located inside the coating 10. For example, the peak of the shear force in the elastic deformation region is located at a depth zm from the surface, and is estimated by the following equation.
zm = 0.47a
In the formula, a is a contact radius of the sliding surface.
In a general use environment, it is sufficient if the peak of the shearing force is 0.1 mm to 0.3 mm deep from the surface. If the peak of the shearing force due to friction is located in the workpiece 9, the coating 10 is peeled off from the low-hardness workpiece 9 without being peeled off. By positioning the peak of the shearing force due to friction in the coating 10, it becomes possible to maintain the shearing force with the coating 10 having a high hardness.

放電表面処理工程において形成される被膜１０の表面には凹凸１１が形成される。この表面の凹凸１１のＲｙが大きすぎると、摩擦係数が大きくなり、この被膜１０を形成した摺動部材の相手側部材の摩耗が増大する等の問題が生じる。一方、表面の凹凸１１のＲｙが小さすぎると、下記で詳述する固体潤滑被膜形成工程によって得られる固体潤滑被膜１２と被膜１０との結合力が小さくなり、固体潤滑被膜１２が簡単に剥離する等の問題が生じる。従って、これらの問題を防止すべく、放電表面処理工程において形成される被膜１０の表面の凹凸１１のＲｙを数μｍ〜数十μｍ、具体的には５μｍ〜２０μｍの範囲とする必要がある。   Concavities and convexities 11 are formed on the surface of the film 10 formed in the discharge surface treatment step. When the Ry of the unevenness 11 on the surface is too large, the coefficient of friction becomes large, causing problems such as increased wear of the mating member of the sliding member on which the coating film 10 is formed. On the other hand, if Ry of the surface irregularities 11 is too small, the bonding force between the solid lubricating film 12 and the film 10 obtained by the solid lubricating film forming step described in detail below becomes small, and the solid lubricating film 12 is easily peeled off. Such problems arise. Therefore, in order to prevent these problems, it is necessary to set the Ry of the irregularities 11 on the surface of the coating film 10 formed in the discharge surface treatment step to a range of several μm to several tens of μm, specifically 5 μm to 20 μm.

本実施の形態の放電表面処理工程では、Ｒｙが数μｍ〜数十μｍの範囲の凹凸１１を有する被膜１０を形成させるために、２段階の放電表面処理工程を行う。Ｒｙが数μｍ〜数十μｍの範囲の凹凸１１を有する被膜１０を１段階の放電表面処理工程によって形成しようとすると、処理時間が長くなることがあるためである。
ここで、第２の放電表面処理工程では、第１の放電表面処理工程における放電エネルギーよりも小さな放電エネルギーによって処理を行う。放電エネルギーは、放電電流［Ａ］、放電電圧［Ｖ］及び放電時間［ｓ］によって定まるが、これらの積（［Ａ］×［Ｖ］×［ｓ］）が、第１の放電表面処理工程よりも第２の放電表面処理工程の方が小さい条件下にて処理を行う。具体的には、第１の放電表面処理工程における放電エネルギーの条件は、放電電流が８〜２０Ａ、放電電圧が２０〜４０Ｖ、放電時間が４〜６４μｓであり、第２の放電表面処理工程における放電エネルギーの条件は、放電電流が２〜８Ａ、放電電圧が２０〜４０Ｖ、放電時間が１〜８μｓである。各放電表面処理工程では、所望の厚さの被膜を得るために、上記条件下での放電を１，０００〜３０，０００Ｈｚで繰返すことによって行う。 In the discharge surface treatment step of the present embodiment, a two-step discharge surface treatment step is performed in order to form the coating film 10 having the irregularities 11 with Ry in the range of several μm to several tens of μm. This is because if the coating film 10 having the irregularities 11 with Ry in the range of several μm to several tens of μm is formed by a one-step discharge surface treatment process, the treatment time may be long.
Here, in the second discharge surface treatment step, the treatment is performed with discharge energy smaller than the discharge energy in the first discharge surface treatment step. The discharge energy is determined by the discharge current [A], the discharge voltage [V] and the discharge time [s], and the product of these ([A] × [V] × [s]) is the first discharge surface treatment step. In the second discharge surface treatment step, the treatment is performed under a smaller condition. Specifically, the discharge energy conditions in the first discharge surface treatment step are as follows: the discharge current is 8 to 20 A, the discharge voltage is 20 to 40 V, the discharge time is 4 to 64 μs. The conditions for the discharge energy are a discharge current of 2 to 8 A, a discharge voltage of 20 to 40 V, and a discharge time of 1 to 8 μs. In each discharge surface treatment step, in order to obtain a film having a desired thickness, the discharge under the above conditions is repeated at 1,000 to 30,000 Hz.

第１の放電表面処理工程を行うと、図３に示すように、Ｒｙが数十μｍを超える大きな凹凸１１を表面に有する被膜１０ａが形成される。この被膜１０ａの表面上に固体潤滑被膜１２を形成すると、固体潤滑被膜１２の表面にも凹凸形状が残り、摩擦係数を十分に低減することができない。
そこで、第１の放電表面処理工程後に、第１の放電表面処理工程における放電エネルギーよりも小さな放電エネルギー下にて第２放電表面処理工程を行い、被膜１０ａ上にＲｙが小さな被膜１０ｂを形成し、被膜１０の表面の凹凸１１のＲｙを調整する。 When the first discharge surface treatment step is performed, as shown in FIG. 3, a film 10a having large irregularities 11 with Ry exceeding several tens of μm on the surface is formed. When the solid lubricant film 12 is formed on the surface of the film 10a, the uneven shape remains on the surface of the solid lubricant film 12, and the friction coefficient cannot be sufficiently reduced.
Therefore, after the first discharge surface treatment step, the second discharge surface treatment step is performed under a discharge energy smaller than the discharge energy in the first discharge surface treatment step to form the coating 10b having a small Ry on the coating 10a. The Ry of the irregularities 11 on the surface of the coating 10 is adjusted.

より詳細に説明すると、第１の放電表面処理工程を行った場合、図３に示すように、被膜１０ａ表面の凸部と電極１表面の凹部との距離が長く、被膜１０ａ表面の凹部と電極１表面の凸部との距離が短くなる。放電は、距離が短い場所で生じ易いため、第２の放電表面処理工程において、第１の放電表面処理工程における放電エネルギーよりも小さな放電エネルギーを用いて放電を行うと、図４に示すように、被膜１０ａ表面の凹部に被膜１０ｂが形成され、被膜１０ａの凸部と同程度の高さになるまで処理を続けると、Ｒｙが数μｍ〜数十μｍの範囲の凹凸１１を有する被膜１０を形成することができる。
上記のような２段階の放電表面処理工程を行えば、所望のＲｙを有する被膜１０を容易且つ迅速に形成することができるので、固体潤滑被膜形成工程の前に、被膜１０を研磨や放電加工、ショットブラスト等する必要がなく、コスト削減や生産性の向上にもつながる。 More specifically, when the first discharge surface treatment step is performed, as shown in FIG. 3, the distance between the convex portion on the surface of the coating 10a and the concave portion on the surface of the electrode 1 is long, and the concave portion and the electrode on the surface of the coating 10a. The distance with the convex part of 1 surface becomes short. Since discharge is likely to occur at a short distance, in the second discharge surface treatment step, when discharge is performed using discharge energy smaller than the discharge energy in the first discharge surface treatment step, as shown in FIG. When the coating 10b is formed in the concave portion on the surface of the coating 10a and the process is continued until the height is about the same as the convex portion of the coating 10a, the coating 10 having the irregularities 11 with Ry in the range of several μm to several tens of μm is obtained. Can be formed.
If the two-step discharge surface treatment process as described above is performed, the coating film 10 having a desired Ry can be easily and quickly formed. Therefore, the coating film 10 is polished or discharged by electrical discharge machining before the solid lubricant coating forming process. This eliminates the need for shot blasting, leading to cost reduction and productivity improvement.

本実施の形態の固体潤滑被膜形成工程は、上記放電表面処理工程で形成された被膜１０の表面に固体潤滑被膜１２を形成することができる方法であれば特に限定されない。固体潤滑被膜１２の形成方法としては、例えば、はけ塗りやスプレー塗布等が挙げられるが、容易性の観点からスプレー塗布が好ましい。これらの方法では、塗布後、樹脂組成物を加熱すること等によって樹脂組成物を硬化することができる。加熱温度は、使用する樹脂の種類にあわせて適宜設定すればよい。
具体的には、液状の樹脂と固体潤滑剤とを混合して樹脂組成物を調製し、その樹脂組成物をスプレーで被膜１０の表面に吹きつけた後、２００℃程度で１時間〜４時間保持して上記樹脂組成物を被膜１０に馴染ませ、次に冷却することで固体潤滑被膜１２を形成することができる。
上記方法により形成される固体潤滑被膜１２の厚さは、使用環境や用途等に応じて適宜設定すればよく、一般に数十μｍ程度である The solid lubricant film forming step of the present embodiment is not particularly limited as long as the solid lubricant film 12 can be formed on the surface of the film 10 formed in the discharge surface treatment step. Examples of the method for forming the solid lubricating coating 12 include brush coating and spray coating, but spray coating is preferable from the viewpoint of ease. In these methods, the resin composition can be cured by heating the resin composition after coating. What is necessary is just to set heating temperature suitably according to the kind of resin to be used.
Specifically, a liquid resin and a solid lubricant are mixed to prepare a resin composition, and the resin composition is sprayed on the surface of the film 10 by spraying, and then at about 200 ° C. for 1 hour to 4 hours. The solid lubricating coating 12 can be formed by holding and fitting the resin composition into the coating 10 and then cooling.
The thickness of the solid lubricating coating 12 formed by the above method may be set as appropriate according to the use environment, application, etc., and is generally about several tens of μm.

。
本実施の形態の固体潤滑被膜形成工程では、固体潤滑剤を含む樹脂組成物が使用される。
ここで、固体潤滑剤としては、特に限定されることはなく、当該技術分野において公知のものを使用することができる。固体潤滑剤の例としては、例えば、ＭｏＳ２、グラファイト、フッ素樹脂等が挙げられ、これらは単独又は組み合わせて使用することができる。
樹脂組成物における固体潤滑剤の含有量は、使用環境や用途等に応じて適宜設定すればよいが、一般に１０〜５０質量％である。 .
In the solid lubricant film forming step of the present embodiment, a resin composition containing a solid lubricant is used.
Here, it does not specifically limit as a solid lubricant, A well-known thing can be used in the said technical field. Examples of solid lubricants include, for example, MoS 2 , graphite, fluororesin, etc., and these can be used alone or in combination.
The content of the solid lubricant in the resin composition may be appropriately set according to the use environment, application, etc., but is generally 10 to 50% by mass.

固体潤滑性剤として、複数の固体潤滑剤を組み合わせて使用する場合、これらの混合割合は、使用環境や用途等に応じて適宜調整すればよい。例えば、摺動部材の使用環境が真空中又は真空に近い状態であり、且つ耐荷重性が要求される場合は、ＭｏＳ２の割合を増加させればよい。一方、摺動部材の使用環境が空気中であり、且つ耐荷重性が要求されると共にコストを抑えたい場合には、グラファイトの割合を増加させればよい。また、大きな耐荷重性が要求されず、摩擦係数を低下させたい場合には、フッ素樹脂の割合を増加させればよい。 When a plurality of solid lubricants are used in combination as the solid lubricant, the mixing ratio thereof may be adjusted as appropriate according to the use environment, application, and the like. For example, when the usage environment of the sliding member is in a vacuum or a state close to vacuum and load resistance is required, the ratio of MoS 2 may be increased. On the other hand, when the use environment of the sliding member is in the air and load resistance is required and the cost is to be suppressed, the ratio of graphite may be increased. Further, when a large load resistance is not required and the friction coefficient is desired to be reduced, the ratio of the fluororesin may be increased.

樹脂組成物は、上記固体潤滑剤に加えて、固体潤滑剤を被膜１０に固着させるバインダを含む。バインダとしては、特に限定されることはなく、当該技術分野において公知のものを使用することができる。バインダの例としては、ポリアミドイミド、エポキシ樹脂、フェノール樹脂等が挙げられ、これらは単独又は組み合わせて使用することができる。この中でも、ポリアミドイミドは、耐熱性及び機械的強度に優れ、幅広い使用環境に対応できるため好ましい。
樹脂組成物におけるバインダの含有量は、使用環境や用途等に応じて適宜設定すればよいが、一般に４０〜９０質量％である。
なお、固体潤滑被膜１２の特性を変化させることがなければ、固体潤滑被膜１２に他の特性を付与するために、他の成分を加えることも可能である。 In addition to the solid lubricant, the resin composition includes a binder that fixes the solid lubricant to the coating 10. The binder is not particularly limited, and those known in the technical field can be used. Examples of the binder include polyamide imide, epoxy resin, phenol resin and the like, and these can be used alone or in combination. Among these, polyamideimide is preferable because it is excellent in heat resistance and mechanical strength and can cope with a wide range of usage environments.
The content of the binder in the resin composition may be appropriately set according to the use environment, application, etc., but is generally 40 to 90% by mass.
If the characteristics of the solid lubricant film 12 are not changed, other components can be added to impart other characteristics to the solid lubricant film 12.

上記成分を含有する樹脂組成物を使用して被膜１０の表面に固体潤滑被膜１２を形成すると、被膜１０の表面の凹凸１１にバインダが侵入し、被膜１０と固体潤滑被膜１２との接合面積が増加することに起因して接合強度が増大する。特に、本発明によれば、上記の放電表面処理によって適度に粗い凹凸１１を形成することができるので、固体潤滑被膜形成工程の前にショットブラスト等で表面を荒らす必要もない。そのため、ショットブラストを行うために必要となるマスキング等の工程を加える必要もなく、コストアップや生産性の低下を抑制することもできる。   When the solid lubricating coating 12 is formed on the surface of the coating 10 using the resin composition containing the above components, the binder enters the irregularities 11 on the surface of the coating 10, and the bonding area between the coating 10 and the solid lubricating coating 12 is increased. The bonding strength increases due to the increase. In particular, according to the present invention, moderately rough irregularities 11 can be formed by the above-described discharge surface treatment, so that it is not necessary to roughen the surface by shot blasting or the like before the solid lubricant film forming step. Therefore, it is not necessary to add a process such as masking necessary for performing shot blasting, and it is possible to suppress an increase in cost and a decrease in productivity.

上記表面処理方法によれば、摩擦係数が小さく、且つ耐摩耗性に優れた被膜を容易且つ迅速に形成することができるので、この被膜を有する部材を摺動部材として用いることが可能となる。特に、上記表面処理方法によって耐摩耗性の低いＡｌやＣｕに被膜を形成すれば、Ａｌの軽量性及び高熱伝導性や、Ｃｕの高熱伝導性を損なうことなく、低摩擦性及び耐摩耗性を付与することができる。   According to the above surface treatment method, a coating having a small friction coefficient and excellent wear resistance can be formed easily and quickly, so that a member having this coating can be used as a sliding member. In particular, if a film is formed on Al or Cu having low wear resistance by the above surface treatment method, low friction and wear resistance can be achieved without impairing the lightness and high thermal conductivity of Al and the high thermal conductivity of Cu. Can be granted.

以下、本発明を実施例によって具体的に説明するが、本発明はこれらによって限定されない。
アルミ合金（Ａ１０５０）を被加工物、Ｃｏ粉末を成形した成形体を電極としてそれぞれ用いて第１の放電表面処理を行った。ここで、放電は、放電電流１１Ａ、放電電圧２５Ｖ、放電時間８μｓの条件にて、数十ｋＨｚで繰り返し行い、厚さが０．２ｍｍのＣｏ被膜をアルミ合金の表面に形成した。
次に、放電電流４Ａ、放電電圧２５Ｖ、放電時間２μｓの条件にて、数十ｋＨｚで繰り返し放電を行い、上記のＣｏ被膜の表面にＣｏ被膜をさらに形成して被膜全体としてＲｙが２０μｍの凹凸を有するＣｏ被膜を形成した。
次に、１０質量％のＭｏＳ２、１０質量％のグラファイト、及び８０質量％のポリアミドイミドからなる樹脂組成物を上記Ｃｏ被膜の表面にスプレー塗布した後、１９０℃に加熱し、厚さが５０μｍの固体潤滑被膜を形成した。 EXAMPLES Hereinafter, although an Example demonstrates this invention concretely, this invention is not limited by these.
A first discharge surface treatment was performed using an aluminum alloy (A1050) as a workpiece and a molded body obtained by molding Co powder as an electrode. Here, the discharge was repeated at several tens of kHz under the conditions of a discharge current of 11 A, a discharge voltage of 25 V, and a discharge time of 8 μs, and a Co film having a thickness of 0.2 mm was formed on the surface of the aluminum alloy.
Next, discharge is repeatedly performed at several tens of kHz under the conditions of a discharge current of 4 A, a discharge voltage of 25 V, and a discharge time of 2 μs. A Co film having
Next, a resin composition comprising 10% by mass of MoS 2 , 10% by mass of graphite, and 80% by mass of polyamideimide was spray-coated on the surface of the Co film, and then heated to 190 ° C. to a thickness of 50 μm. A solid lubricating film was formed.

上記表面処理によってＣｏ被膜及び固体潤滑被膜を形成したアルミ合金について、鉄鋼材料（ＦＣ２５０）からなる先端半径１０ｍｍのピンを使用する摺動試験を行った。この摺動試験は、滑り速度：０．１ｍ／ｓ、加圧力：４Ｎ、摺動距離：７００ｍとし、潤滑油環境下で行った。また、比較のために、上記のアルミ合金及びＣｏ被膜のみを形成したアルミ合金についても同じ摺動試験を行った。
上記摺動試験の結果、Ｃｏ被膜及び固体潤滑被膜を形成したアルミ合金では、摩擦係数は０．１と低く、ピンやディスク（被膜）のいずれにおいても摩耗が確認されなかった。
これに対し、Ｃｏ被膜のみを形成したアルミ合金では、摩擦係数が０．１７と高く、ピンの先端も磨耗していた。また、アルミニウム合金では、ディスク（アルミニウム合金）が０．３μｍ程度削られていた。 A sliding test using a pin having a tip radius of 10 mm made of a steel material (FC250) was performed on the aluminum alloy in which the Co coating and the solid lubricating coating were formed by the surface treatment. This sliding test was performed in a lubricating oil environment at a sliding speed of 0.1 m / s, a pressing force of 4 N, and a sliding distance of 700 m. For comparison, the same sliding test was performed on the aluminum alloy and the aluminum alloy on which only the Co film was formed.
As a result of the sliding test, the friction coefficient of the aluminum alloy on which the Co coating and the solid lubricating coating were formed was as low as 0.1, and no wear was observed in any of the pins and the disc (coating).
On the other hand, in the aluminum alloy in which only the Co film was formed, the friction coefficient was as high as 0.17, and the tip of the pin was also worn. In the case of an aluminum alloy, the disk (aluminum alloy) has been cut by about 0.3 μm.

以上の結果からわかるように、本発明の表面処理方法は、摩擦係数が小さく、且つ耐摩耗性に優れた被膜を容易且つ迅速に形成することができる。   As can be seen from the above results, the surface treatment method of the present invention can easily and quickly form a film having a small friction coefficient and excellent wear resistance.

放電表面処理に用いる放電表面処理装置の断面模式図である。It is a cross-sectional schematic diagram of the discharge surface treatment apparatus used for discharge surface treatment. 本発明の表面処理方法によって被加工物の表面に形成された被膜の断面模式図である。It is a cross-sectional schematic diagram of the film formed on the surface of the workpiece by the surface treatment method of the present invention. 第１の放電表面処理工程において被加工物の表面に形成される被膜を説明するための放電処理装置の電極及び形成される被膜の一部の断面模式図である。It is a cross-sectional schematic diagram of a part of the electrode of the discharge treatment apparatus and the coating film for explaining the coating film formed on the surface of the workpiece in the first discharge surface treatment process. 第２の放電表面処理工程において被加工物の表面に形成される被膜を説明するための放電処理装置の電極及び形成される被膜の一部の断面模式図である。It is a cross-sectional schematic diagram of a part of the electrode of the discharge treatment apparatus for explaining the coating film formed on the surface of the workpiece in the second discharge surface treatment step and the coating film to be formed.

符号の説明Explanation of symbols

１ 電極、２ 電極支持具、３ 主軸、４ ボールネジ、５ モータ、６ 放電電源、７ 加工液、８ 加工槽、９ 被加工物、１０、１０ａ、１０ｂ 被膜、１１ 凹凸、１２ 固体潤滑被膜。   DESCRIPTION OF SYMBOLS 1 Electrode, 2 Electrode support tool, 3 Main axis | shaft, 4 Ball screw, 5 Motor, 6 Discharge power supply, 7 Processing liquid, 8 Processing tank, 9 Workpiece 10, 10a, 10b Coating, 11 Concavity and convexity, 12 Solid lubricating coating.

Claims (4)

金属粉末若しくは金属化合物の粉末を成形した成形体、又は前記成形体を加熱処理した成形体を電極とし、油中において前記電極と被加工物との間にパルス状の放電を発生させ、その放電エネルギーによって電極材料又は電極材料の反応生成物の被膜を前記被加工物の表面に形成する第１の放電表面処理工程と、
前記第１の放電表面処理工程において形成された被膜の表面に、前記第１の放電表面処理工程における放電エネルギーよりも小さな放電エネルギーによって電極材料又は電極材料の反応生成物の被膜を形成する第２の放電表面処理工程と、
前記第１及び第２の放電表面処理工程において形成された被膜の表面に固体潤滑被膜を形成する固体潤滑被膜形成工程と
を含むことを特徴とする表面処理方法。 A molded body obtained by molding a metal powder or a metal compound powder, or a molded body obtained by heat-treating the molded body is used as an electrode, and a pulsed discharge is generated between the electrode and the workpiece in oil, and the discharge A first discharge surface treatment step of forming a film of an electrode material or a reaction product of the electrode material on the surface of the workpiece by energy; and
A second electrode film or a reaction product film of the electrode material is formed on the surface of the coating film formed in the first discharge surface treatment step with a discharge energy smaller than the discharge energy in the first discharge surface treatment step. A discharge surface treatment process,
And a solid lubricant film forming step of forming a solid lubricant film on the surface of the film formed in the first and second discharge surface treatment steps. 前記固体潤滑被膜は、前記第１及び第２の放電表面処理工程において形成された被膜の表面に、固体潤滑剤を含む樹脂組成物をスプレー塗布することによって形成されることを特徴とする請求項１に記載の表面処理方法。   The solid lubricant film is formed by spray-coating a resin composition containing a solid lubricant on the surface of the film formed in the first and second discharge surface treatment steps. 2. The surface treatment method according to 1. 前記固体潤滑剤が、ＭｏＳ２、グラファイト及びフッ素樹脂からなる群から選択される少なくとも１種であることを特徴とする請求項２に記載の表面処理方法。 The solid lubricant, MoS 2, the surface treatment method according to claim 2, characterized in that at least one member selected from the group consisting of graphite and fluororesin. 請求項１〜３のいずれか一項に記載の表面処理方法により形成された被膜を有することを特徴とする摺動部材。   A sliding member comprising a coating film formed by the surface treatment method according to claim 1.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013173979A (en) * 2012-02-24 2013-09-05 Jfe Steel Corp Method for manufacturing surface treated steel sheet

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013173979A (en) * 2012-02-24 2013-09-05 Jfe Steel Corp Method for manufacturing surface treated steel sheet

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