JP2009300414A - 分光器 - Google Patents
分光器 Download PDFInfo
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- JP2009300414A JP2009300414A JP2008311003A JP2008311003A JP2009300414A JP 2009300414 A JP2009300414 A JP 2009300414A JP 2008311003 A JP2008311003 A JP 2008311003A JP 2008311003 A JP2008311003 A JP 2008311003A JP 2009300414 A JP2009300414 A JP 2009300414A
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- 229910052737 gold Inorganic materials 0.000 description 3
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- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
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- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
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- 239000000945 filler Substances 0.000 description 1
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- 229910044991 metal oxide Inorganic materials 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/024—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using means for illuminating a slit efficiently (e.g. entrance slit of a spectrometer or entrance face of fiber)
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
- G01J3/0259—Monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
【解決手段】 分光器1は、パッケージ2内に入射した光L1を分光部3により分光して反射し、反射された光L2を光検出素子4により検出する分光器であって、光検出素子4を収容したパッケージ2を備えている。パッケージ2は、半球状の凹部10を有しており、凹部10の底面には、複数のグレーティング溝14が所定の方向に沿って配列された領域12とこの領域12を包囲する領域13とが形成されている。領域12と領域13とは、連続しており、同一の曲面上に形成されている。
【選択図】図1
Description
Claims (5)
- 光を分光部により分光して光検出素子によって検出する分光器であって、
前記光検出素子を収容するパッケージを備え、
前記パッケージの内壁面は、前記分光部のグレーティング溝が所定の方向に沿って複数配列されて形成される第1の領域と、該第1の領域を包囲する第2の領域と、を含み、
前記第1の領域と前記第2の領域とは、連続しており、同一の曲面上に形成されている、
ことを特徴とする分光器。 - 前記パッケージは、外形が直方体状であると共に、曲面の内壁面を含む凹部を有し、
前記第1の領域及び前記第2の領域は、前記凹部の前記曲面の内壁面に形成されている、
ことを特徴とする請求項1に記載の分光器。 - 前記パッケージの外面には、前記所定の方向において前記分光部の両側に位置し、且つ、前記所定の方向と直交する方向に沿って延在する一対の溝が設けられている、
ことを特徴とする請求項2に記載の分光器。 - 前記分光部と対向するように、前記パッケージに嵌め合わされた光透過基板をさらに備え、
前記光検出素子は、前記光透過基板上に取り付けられている、
ことを特徴とする請求項1〜3の何れか一項に記載の分光器。 - 前記所定の方向における前記パッケージと前記光透過基板との間の隙間は、前記所定の方向と直交する方向における前記パッケージと前記光透過基板との間の隙間に比べて狭い、
ことを特徴とする請求項4に記載の分光器。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008311003A JP5205239B2 (ja) | 2008-05-15 | 2008-12-05 | 分光器 |
PCT/JP2009/058669 WO2009139326A1 (ja) | 2008-05-15 | 2009-05-08 | 分光器 |
US12/992,412 US20110141469A1 (en) | 2008-05-15 | 2009-05-08 | Spectrometer |
EP09746533.0A EP2287578B1 (en) | 2008-05-15 | 2009-05-08 | Spectrometer |
CN2009801089043A CN101970994A (zh) | 2008-05-15 | 2009-05-08 | 分光器 |
KR1020107015312A KR101635649B1 (ko) | 2008-05-15 | 2009-05-08 | 분광기 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008128687 | 2008-05-15 | ||
JP2008128687 | 2008-05-15 | ||
JP2008311003A JP5205239B2 (ja) | 2008-05-15 | 2008-12-05 | 分光器 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009300414A true JP2009300414A (ja) | 2009-12-24 |
JP2009300414A5 JP2009300414A5 (ja) | 2010-02-12 |
JP5205239B2 JP5205239B2 (ja) | 2013-06-05 |
Family
ID=41318696
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008311003A Active JP5205239B2 (ja) | 2008-05-15 | 2008-12-05 | 分光器 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20110141469A1 (ja) |
EP (1) | EP2287578B1 (ja) |
JP (1) | JP5205239B2 (ja) |
KR (1) | KR101635649B1 (ja) |
CN (1) | CN101970994A (ja) |
WO (1) | WO2009139326A1 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102822647A (zh) * | 2010-04-01 | 2012-12-12 | 浜松光子学株式会社 | 分光模块 |
JP2013007707A (ja) * | 2011-06-27 | 2013-01-10 | Hamamatsu Photonics Kk | 分光モジュール |
JP2014032156A (ja) * | 2012-08-06 | 2014-02-20 | Hamamatsu Photonics Kk | 分光器 |
US9074933B2 (en) | 2010-04-01 | 2015-07-07 | Hamamatsu Photonics K.K. | Spectrometer module |
JP2017078722A (ja) * | 2016-12-22 | 2017-04-27 | 浜松ホトニクス株式会社 | 分光器 |
EP2674793A4 (en) * | 2011-02-08 | 2017-09-20 | Hamamatsu Photonics K.K. | Optical element and method of manufacturing same |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2009300422A (ja) * | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュール |
JP5205242B2 (ja) * | 2008-05-15 | 2013-06-05 | 浜松ホトニクス株式会社 | 分光器の製造方法 |
JP5415060B2 (ja) | 2008-05-15 | 2014-02-12 | 浜松ホトニクス株式会社 | 分光モジュール |
JP5205241B2 (ja) | 2008-05-15 | 2013-06-05 | 浜松ホトニクス株式会社 | 分光モジュール |
JP5207938B2 (ja) | 2008-05-15 | 2013-06-12 | 浜松ホトニクス株式会社 | 分光モジュール及び分光モジュールの製造方法 |
JP2009300417A (ja) * | 2008-05-15 | 2009-12-24 | Hamamatsu Photonics Kk | 分光モジュールの製造方法及び分光モジュール |
JP5767883B2 (ja) | 2011-07-26 | 2015-08-26 | 浜松ホトニクス株式会社 | 分光器 |
JP5767882B2 (ja) * | 2011-07-26 | 2015-08-26 | 浜松ホトニクス株式会社 | 分光器 |
JP6234667B2 (ja) * | 2012-08-06 | 2017-11-22 | 浜松ホトニクス株式会社 | 光学素子及びその製造方法 |
JP6061542B2 (ja) | 2012-08-06 | 2017-01-18 | 浜松ホトニクス株式会社 | 分光器 |
CN103017905B (zh) * | 2012-12-31 | 2016-04-20 | 深圳先进技术研究院 | 集成平面变栅距光栅和微狭缝的微型光谱仪及其制造方法 |
JP2015106106A (ja) | 2013-12-02 | 2015-06-08 | セイコーエプソン株式会社 | 電子デバイスおよび電子機器 |
JP6325268B2 (ja) * | 2014-02-05 | 2018-05-16 | 浜松ホトニクス株式会社 | 分光器、及び分光器の製造方法 |
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- 2009-05-08 EP EP09746533.0A patent/EP2287578B1/en active Active
- 2009-05-08 US US12/992,412 patent/US20110141469A1/en not_active Abandoned
- 2009-05-08 CN CN2009801089043A patent/CN101970994A/zh active Pending
- 2009-05-08 WO PCT/JP2009/058669 patent/WO2009139326A1/ja active Application Filing
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102822647A (zh) * | 2010-04-01 | 2012-12-12 | 浜松光子学株式会社 | 分光模块 |
CN102822647B (zh) * | 2010-04-01 | 2015-04-08 | 浜松光子学株式会社 | 分光模块 |
US9074933B2 (en) | 2010-04-01 | 2015-07-07 | Hamamatsu Photonics K.K. | Spectrometer module |
US9285270B2 (en) | 2010-04-01 | 2016-03-15 | Hamamatsu Photonics K.K. | Spectrometer module |
US9851247B2 (en) | 2010-04-01 | 2017-12-26 | Hamamatsu Photonics K.K. | Spectrometer module |
EP2674793A4 (en) * | 2011-02-08 | 2017-09-20 | Hamamatsu Photonics K.K. | Optical element and method of manufacturing same |
JP2013007707A (ja) * | 2011-06-27 | 2013-01-10 | Hamamatsu Photonics Kk | 分光モジュール |
JP2014032156A (ja) * | 2012-08-06 | 2014-02-20 | Hamamatsu Photonics Kk | 分光器 |
US9759604B2 (en) | 2012-08-06 | 2017-09-12 | Hamamatsu Photonics K.K. | Spectrometer |
JP2017078722A (ja) * | 2016-12-22 | 2017-04-27 | 浜松ホトニクス株式会社 | 分光器 |
Also Published As
Publication number | Publication date |
---|---|
KR20110008004A (ko) | 2011-01-25 |
EP2287578B1 (en) | 2016-09-21 |
KR101635649B1 (ko) | 2016-07-08 |
WO2009139326A1 (ja) | 2009-11-19 |
CN101970994A (zh) | 2011-02-09 |
US20110141469A1 (en) | 2011-06-16 |
JP5205239B2 (ja) | 2013-06-05 |
EP2287578A4 (en) | 2014-05-07 |
EP2287578A1 (en) | 2011-02-23 |
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