JP2009175079A

JP2009175079A - Angular velocity sensor

Info

Publication number: JP2009175079A
Application number: JP2008016238A
Authority: JP
Inventors: Fumihito Kato; 史仁加藤; Takuya Sunada; 卓也砂田; Yuichi Niimura; 雄一新村
Original assignee: Panasonic Electric Works Co Ltd
Current assignee: Panasonic Electric Works Co Ltd
Priority date: 2008-01-28
Filing date: 2008-01-28
Publication date: 2009-08-06

Abstract

<P>PROBLEM TO BE SOLVED: To increase the vibration amplitude of a detection electrode without limited by the gap length between comb electrodes and to cancel the influence of external force from a detection direction. <P>SOLUTION: Mechanisms 7a to 7d for amplifying vibration are connected to a glass substrate which holds the upper and lower surfaces of the angular velocity sensor 1 at the positions on the movable member 4b side apart from the longitudinal central position through beams 11a to 11d and beams 12a to 12d. According to this structure, when vibration with an amplitude of Asin(ωt+α) is applied to the movable member 4b, the vibration amplitude B of the longitudinal end part on the movable side detection electrode 2 side is amplified by the ratio (L2/L1) of the x-axis distance L1 between the longitudinal end part on the movable member 4b side and the beams 11c, 12c and the x-axis distance L2 (>L1) between the longitudinal end part on the movable side detection electrode 2 side and the beams 11c, 12c. A movable side detection electrode 2 thereby vibrates with an amplitude of -(L2/L1)×Asin(ωt+α). <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、検出電極と駆動電極間に発生する静電力を利用して検出電極を振動させることにより角速度を検出する角速度センサに関する。 The present invention relates to an angular velocity sensor that detects an angular velocity by vibrating a detection electrode using an electrostatic force generated between the detection electrode and a drive electrode.

従来より、駆動電極により検出電極をＹ軸方向に振動させ、Ｘ軸回りの角速度ωが与えられるのに応じて検出電極が受ける振動方向（Ｙ軸方向）に対し垂直方向（Ｚ軸方向）のコリオリ力を検出することにより角速度を検出する振動型の角速度センサが知られている。このような角速度センサの中には、MEMS(Micro Electro Mechanical Systems)技術を利用することにより、検出電極と駆動電極の対向面に櫛歯電極を形成したものがある。この角速度センサでは、櫛歯電極間に電圧を印加し、電圧の印加に伴い櫛歯電極間に発生する静電力を利用して検出電極を駆動する。
特開2002-13932号公報 Conventionally, the drive electrode vibrates the detection electrode in the Y-axis direction, and the vertical direction (Z-axis direction) is perpendicular to the vibration direction (Y-axis direction) received by the detection electrode when an angular velocity ω around the X-axis is given. A vibration-type angular velocity sensor that detects angular velocity by detecting Coriolis force is known. Among such angular velocity sensors, there is a sensor in which comb electrodes are formed on the opposing surfaces of the detection electrode and the drive electrode by utilizing MEMS (Micro Electro Mechanical Systems) technology. In this angular velocity sensor, a voltage is applied between the comb electrodes, and the detection electrode is driven using an electrostatic force generated between the comb electrodes as the voltage is applied.
JP 2002-13932 A

櫛歯電極間に発生する静電力を利用した角速度センサでは、検出電極を振動させるために大きな静電力が必要になることから櫛歯電極間は数μｍ以下に近接配置されている。このため、従来の角速度センサでは、櫛歯電極同士が接触することを抑制するために検出電極の振動振幅が櫛歯電極間のギャップ長に制限され、検出電極の振動振幅を大きくすることが困難であった。また検出電極を振動させることにより角速度を検出する角速度センサでは、センサ自体に検出方向からの外力（加速度）が加えられた場合、あたかもコリオリ力を検出したかのように検出電極が振動してしまう。こうした誤動作は、センサ精度の劣化を招くため、検出方向の力による影響を低減する構造、例えば力による影響を受けづらい構造（例：剛性を高める）設計が必要であった。これはコリオリ力を検出する感度も低下させてしまい、その結果、センサ特性の低下を招いていた。 In the angular velocity sensor using the electrostatic force generated between the comb-tooth electrodes, a large electrostatic force is required to vibrate the detection electrode. For this reason, in the conventional angular velocity sensor, the vibration amplitude of the detection electrode is limited to the gap length between the comb electrodes in order to suppress contact between the comb electrodes, and it is difficult to increase the vibration amplitude of the detection electrode. Met. Further, in an angular velocity sensor that detects an angular velocity by vibrating the detection electrode, when an external force (acceleration) from the detection direction is applied to the sensor itself, the detection electrode vibrates as if the Coriolis force was detected. . Such a malfunction causes deterioration in sensor accuracy, and thus a structure that reduces the influence of the force in the detection direction, for example, a structure that is not easily affected by the force (eg, increases rigidity) is required. This also decreases the sensitivity for detecting the Coriolis force, resulting in a decrease in sensor characteristics.

本発明は上記課題を解決するためになされたものであり、櫛歯電極間のギャップ長に制限されることなく検出電極の振動振幅を大きくすることが可能、且つ、検出方向からの外力による影響を無効にできる角速度センサを提供することにある。 The present invention has been made to solve the above-described problems, and can increase the vibration amplitude of the detection electrode without being limited by the gap length between the comb-teeth electrodes, and can be influenced by an external force from the detection direction. It is an object of the present invention to provide an angular velocity sensor that can invalidate the above.

本発明に係る角速度センサは、検出電極と駆動電極とを有し、駆動電極により検出電極を振動させ、角速度が与えられるのに伴い検出電極に加わる力を検出することにより角速度を検出する角速度センサにおいて、駆動電極は、検出電極の振動量を増幅する振動量増幅機構を介して検出電極を揺動自在に支持する可動部材と、可動部材に対向する対向面を有する固定部材と、可動部材と固定部材の対向面に互いに噛み合うように形成された櫛歯電極とを有し、可動部材と固定部材の櫛歯電極間に電圧を印加することにより櫛歯電極間に発生する静電力を利用して検出電極を振動させ、振動量増幅機構は、長手方向端部が梁を介して検出電極及び可動部材に接続された本体部と、本体部の長手方向中心位置よりも可動部材側の位置において本体部を固定する固定部とを有する。 An angular velocity sensor according to the present invention has a detection electrode and a drive electrode, vibrates the detection electrode by the drive electrode, and detects an angular velocity by detecting a force applied to the detection electrode as the angular velocity is applied. The drive electrode includes a movable member that swingably supports the detection electrode via a vibration amount amplification mechanism that amplifies the vibration amount of the detection electrode, a fixed member that has a facing surface facing the movable member, and a movable member. Comb electrodes formed so as to mesh with each other on the opposing surface of the fixed member, and the electrostatic force generated between the comb electrodes is applied by applying a voltage between the movable member and the comb electrodes of the fixed member. The vibration amount amplifying mechanism is configured such that the longitudinal end portion is connected to the detection electrode and the movable member via the beam, and the position closer to the movable member than the longitudinal center position of the main body portion. Body And a fixing unit for fixing the.

本発明に係る角速度センサによれば、櫛歯電極間のギャップ長に制限されることなく検出電極の振動振幅を大きくすることができると共に検出方向からの外力による影響を無効にできる。 According to the angular velocity sensor of the present invention, the vibration amplitude of the detection electrode can be increased without being limited by the gap length between the comb electrodes, and the influence of the external force from the detection direction can be nullified.

以下、図面を参照して、本発明の実施形態となる角速度センサについて説明する。 Hereinafter, an angular velocity sensor according to an embodiment of the present invention will be described with reference to the drawings.

〔第１の実施形態〕
本発明の第１の実施形態となる角速度センサ１は、図1(a),(b)に示すように、矩形形状の可動側検出電極２と、Ｚ軸方向（紙面垂直方向）において可動側検出電極２に対向する矩形形状の固定側検出電極３と、固定部材４ａと可動部材４ｂとからなる駆動電極とを有し、駆動電極により可動側検出電極２をＹ軸方向に振動させ、Ｘ軸方向回りの角速度ωが与えられるのに伴う検出電極２のＺ軸方向の変位を可動電極検出電極２と固定側検出電極３間の静電容量の変化として検出することにより、Ｘ軸方向回りの角速度ωを検出する。可動側検出電極２のＸ軸方向側面部は梁５ａ〜５ｄを介して角速度センサ１の上下面を挟持する図示しないガラス基板に接合されている。可動側検出電極２のＹ軸方向側面部には梁６ａ〜６ｄを介してＸ軸方向に伸びる板形状の振動量増幅機構（本体部）７ａ〜７ｄの長手方向一方端が接合され、振動量増幅機構７ａ〜７ｄの長手方向他方端は梁１０ａ〜１０ｄを介して可動部材４ｂに接合されている。 [First Embodiment]
As shown in FIGS. 1A and 1B, the angular velocity sensor 1 according to the first embodiment of the present invention includes a rectangular movable side detection electrode 2 and a movable side in the Z-axis direction (perpendicular to the paper surface). It has a rectangular fixed-side detection electrode 3 facing the detection electrode 2, and a drive electrode composed of a fixed member 4a and a movable member 4b. The drive electrode vibrates the movable-side detection electrode 2 in the Y-axis direction, and X By detecting the displacement of the detection electrode 2 in the Z-axis direction as the angular velocity ω about the axial direction is given as a change in capacitance between the movable electrode detection electrode 2 and the fixed-side detection electrode 3, Is detected. The side surface portion in the X-axis direction of the movable detection electrode 2 is joined to a glass substrate (not shown) that sandwiches the upper and lower surfaces of the angular velocity sensor 1 via beams 5a to 5d. One end in the longitudinal direction of plate-shaped vibration amount amplifying mechanisms (main body portions) 7a to 7d extending in the X-axis direction via the beams 6a to 6d is joined to the side surface portion in the Y-axis direction of the movable side detection electrode 2, and the vibration amount The other ends in the longitudinal direction of the amplification mechanisms 7a to 7d are joined to the movable member 4b via beams 10a to 10d.

固定部材４ａは、可動部材４ｂと対向する対向面に櫛歯電極８ａを備える。可動部材４ｂは、固定部材４ａ側に設けられた櫛歯電極８ａと噛み合うように形成された櫛歯電極８ｂを有する。本実施形態において可動部材４ｂは、枠体形状を有し、梁１０ａ〜１０ｄ，振動量増幅機構７ａ〜７ｄ，及び梁６ａ〜６ｄを介して可動側検出電極２を枠体内において揺動自在に支持する。可動部材４ｂのＸ軸方向側面部は梁９ａ〜９ｄを介して角速度センサ１の上下面を挟持する図示しないガラス基板に接合されている。駆動電極は、固定部材４ａと可動部材４ｂの櫛歯電極８ａ，８ｂ間に電圧を印加することにより櫛歯電極８ａ，８ｂ間に発生する静電力を利用して可動部材４ａを介して可動側検出電極２を振動させる。 The fixed member 4a includes a comb electrode 8a on an opposing surface facing the movable member 4b. The movable member 4b includes a comb electrode 8b formed so as to mesh with a comb electrode 8a provided on the fixed member 4a side. In the present embodiment, the movable member 4b has a frame shape, and the movable-side detection electrode 2 can swing within the frame body via the beams 10a to 10d, the vibration amount amplification mechanisms 7a to 7d, and the beams 6a to 6d. To support. Side surfaces of the movable member 4b in the X-axis direction are joined to a glass substrate (not shown) that sandwiches the upper and lower surfaces of the angular velocity sensor 1 via beams 9a to 9d. The driving electrode is movable on the movable side via the movable member 4a by using the electrostatic force generated between the comb-shaped electrodes 8a and 8b by applying a voltage between the comb-shaped electrodes 8a and 8b of the fixed member 4a and the movable member 4b. The detection electrode 2 is vibrated.

振動量増幅機構７ａ〜７ｄは、長手方向中心位置よりも可動部材４ｂ側の位置において梁１１ａ〜１１ｄ及び梁１２ａ〜１２ｄ（固定部）を介して角速度センサ１の上下面を挟持する図示しないガラス基板に接合されている。このような構成によれば、可動部材４ｂに振幅Ａｓｉｎ（ωｔ＋α）の振動が与えられた場合、可動側検出電極２側の長手方向端部の振動振幅Ｂは図２に示すように可動部材４ｂ側の長手方向端部と梁１１ｃ，１２ｃ間のＸ軸方向距離Ｌ１と可動側検出電極２側の長手方向端部と梁１１ｃ，１２ｃ間のｘ軸方向距離Ｌ２（＞Ｌ１）の比（Ｌ２／Ｌ１）だけ増幅される。これにより、可動側検出電極２は−（Ｌ２／Ｌ１）×Ａｓｉｎ（ωｔ＋α）の振幅で振動するようになる。従って本発明の第１の実施形態となる角速度センサ１によれば、櫛歯電極８ａ，８ｂ間のギャップ長に制限されることなく可動側検出電極２の振動振幅を大きくできる。 The vibration amount amplifying mechanisms 7a to 7d are glasses (not shown) that sandwich the upper and lower surfaces of the angular velocity sensor 1 via the beams 11a to 11d and the beams 12a to 12d (fixed portions) at positions closer to the movable member 4b than the center position in the longitudinal direction. Bonded to the substrate. According to such a configuration, when the vibration of the amplitude Asin (ωt + α) is given to the movable member 4b, the vibration amplitude B at the longitudinal end on the movable side detection electrode 2 side is as shown in FIG. The ratio of the X-axis direction distance L1 between the longitudinal end portion on the side and the beams 11c and 12c and the x-axis direction distance L2 (> L1) between the longitudinal end portion on the movable side detection electrode 2 side and the beams 11c and 12c (L2) / L1) is amplified. As a result, the movable detection electrode 2 vibrates with an amplitude of − (L2 / L1) × Asin (ωt + α). Therefore, according to the angular velocity sensor 1 according to the first embodiment of the present invention, the vibration amplitude of the movable detection electrode 2 can be increased without being limited to the gap length between the comb electrodes 8a and 8b.

また本発明の第１の実施形態となる角速度センサ１によれば、可動部材４ｂと可動側検出電極２は、振動方向が逆位相となるため、センサ自体が角速度を受けた場合、可動部４ｂと可動側検出電極２は、それぞれ逆方向にコリオリ力を受け、それぞれ逆方向へ振動する。一方、センサ自体に検出方向からの外力（加速度）を受けた場合には、可動部４ｂと可動側検出電極２は、同方向に力を受けるため、同方向へ振動する。従ってこの振動の違いを検出し、信号処理回路により無効とすることで、検出方向からの外力（加速度）による影響を無効にすることができる。また本実施形態では、振動量増幅機構７ａ〜７ｄは枠体である可動部材４ｂにより連結されているので、駆動電極を駆動する際に生じる振動量増幅機構７ａ〜７ｄにおける同期誤差（偏心動作）を改善できる。 Further, according to the angular velocity sensor 1 according to the first embodiment of the present invention, the movable member 4b and the movable detection electrode 2 have the vibration directions in opposite phases. Therefore, when the sensor itself receives the angular velocity, the movable portion 4b The movable side detection electrodes 2 receive Coriolis forces in the opposite directions and vibrate in the opposite directions. On the other hand, when the sensor itself receives an external force (acceleration) from the detection direction, the movable portion 4b and the movable-side detection electrode 2 vibrate in the same direction because they receive the force in the same direction. Therefore, by detecting this difference in vibration and invalidating it by the signal processing circuit, it is possible to invalidate the influence of the external force (acceleration) from the detection direction. In the present embodiment, since the vibration amount amplifying mechanisms 7a to 7d are connected by the movable member 4b that is a frame, a synchronization error (eccentric operation) in the vibration amount amplifying mechanisms 7a to 7d that occurs when the drive electrode is driven. Can be improved.

〔第２の実施形態〕
次に、図３を参照して、本発明の第２の実施形態となる角速度センサの構成について説明する。 [Second Embodiment]
Next, the configuration of the angular velocity sensor according to the second embodiment of the present invention will be described with reference to FIG.

本実施形態では、可動部材４ｂは、枠体形状ではなく、図３に示すようにＸ軸方向側面部を除去することによりを２つの部材４ｂａ，４ｂｂにより構成され、部材４ｂａ，４ｂｂの固定部材４ａに対向する対向面に櫛歯電極８ｂが形成されている。また同位相で振動する振動増幅機構７ａ，７ｂは部材４ｂａを介して連結され、同様に同位相で振動する振動増幅機構７ｃ，７ｄは部材４ｂｂを介して連結されている。このような構成によれば、同位相での加振における振動増幅機構７ａと振動増幅機構７ｂ間及び振動増幅機構７ｃと振動増幅機構７ｄ間の同期誤差（偏心動作）を低減することができる。 In this embodiment, the movable member 4b is not a frame shape, but is constituted by two members 4ba and 4bb by removing the side surface in the X-axis direction as shown in FIG. 3, and is a fixing member for the members 4ba and 4bb. A comb-tooth electrode 8b is formed on the facing surface facing 4a. The vibration amplifying mechanisms 7a and 7b that vibrate in the same phase are connected via a member 4ba. Similarly, the vibration amplifying mechanisms 7c and 7d that vibrate in the same phase are connected via a member 4bb. According to such a configuration, it is possible to reduce synchronization errors (eccentric operation) between the vibration amplification mechanism 7a and the vibration amplification mechanism 7b and between the vibration amplification mechanism 7c and the vibration amplification mechanism 7d during excitation in the same phase.

〔第３の実施形態〕
最後に、図４を参照して、本発明の第３の実施形態となる角速度センサの構成について説明する。 [Third Embodiment]
Finally, with reference to FIG. 4, the configuration of an angular velocity sensor according to the third embodiment of the present invention will be described.

本実施形態では、梁６ａ〜６ｄと可動側検出電極２間にそれぞれ振動量増幅機構７ｅ〜７ｈ及び梁６ｅ〜６ｆを挿入することにより振動量増幅機構が２段により構成されている。このような構成によれば、１段目の振動量増幅機構７ａ〜７ｄにより増幅された振動量が振動量増幅機構７ｅ〜７ｈにおいてさらに増幅されるので、検出感度を飛躍的に向上させることができる。なお本実施形態では振動量増幅機構は２段構成であったが３段以上の構成としてもよい。 In the present embodiment, the vibration amount amplifying mechanism is configured in two stages by inserting vibration amount amplifying mechanisms 7e to 7h and beams 6e to 6f between the beams 6a to 6d and the movable side detection electrode 2, respectively. According to such a configuration, the vibration amounts amplified by the first-stage vibration amount amplification mechanisms 7a to 7d are further amplified by the vibration amount amplification mechanisms 7e to 7h, so that the detection sensitivity can be dramatically improved. it can. In this embodiment, the vibration amount amplifying mechanism has a two-stage configuration, but may have a three-stage or more configuration.

以上、本発明者らによってなされた発明を適用した実施の形態について説明したが、この実施の形態による本発明の開示の一部をなす記述及び図面により本発明は限定されることはない。例えば可動側検出電極２，振動量増幅機構７ａ〜７ｄ，及び可動部材４ｂを含む構造体の振動方向（Ｙ軸方向）及び検出方向（Ｚ軸方向）共振周波数を一致又は近づけることにより、コリオリ力の検出感度を高めるようにしてもよい。このように、上記実施の形態に基づいて当業者等によりなされる他の実施の形態、実施例及び運用技術等は全て本発明の範疇に含まれることは勿論である。 As mentioned above, although embodiment which applied the invention made by the present inventors was described, this invention is not limited by description and drawing which make a part of indication of this invention by this embodiment. For example, the Coriolis force is obtained by making the vibration frequency (Y-axis direction) and detection direction (Z-axis direction) resonance frequency of the structure including the movable-side detection electrode 2, the vibration amount amplification mechanisms 7a to 7d, and the movable member 4b coincide with each other. The detection sensitivity may be increased. As described above, it is needless to say that other embodiments, examples, operation techniques, and the like made by those skilled in the art based on the above-described embodiments are all included in the scope of the present invention.

本発明の第１の実施形態となる角速度センサの(a)上面図及び(b)部分拡大図である。It is (a) top view and (b) partial enlarged view of the angular velocity sensor which becomes the 1st Embodiment of this invention. 図１に示す角速度センサにおける検出電極の振動原理を説明するための模式図である。It is a schematic diagram for demonstrating the vibration principle of the detection electrode in the angular velocity sensor shown in FIG. 本発明の第２の実施形態となる角速度センサの(a)上面図及び(b)部分拡大図である。It is (a) top view and (b) partial enlarged view of the angular velocity sensor which becomes the 2nd Embodiment of this invention. 本発明の第３の実施形態となる角速度センサの(a)上面図及び(b)部分拡大図である。It is the (a) top view and (b) partial enlarged view of the angular velocity sensor which becomes the 3rd Embodiment of this invention.

符号の説明Explanation of symbols

１：角速度センサ
２：可動側検出電極
３：固定側検出電極
４ａ：固定部材
４ｂ：可動部材
５ａ〜５ｄ，６ａ〜６ｄ，９ａ〜９ｄ，１１ａ〜１１ｈ，１２ａ〜１２ｈ：梁
７ａ〜７ｄ：振動量増幅機構
８ａ，８ｂ：櫛歯電極 1: Angular velocity sensor 2: Movable detection electrode 3: Fixed detection electrode 4a: Fixed member 4b: Movable members 5a to 5d, 6a to 6d, 9a to 9d, 11a to 11h, 12a to 12h: Beams 7a to 7d: Vibration Quantity amplification mechanism 8a, 8b: Comb electrode

Claims

検出電極と駆動電極とを有し、駆動電極により検出電極を振動させ、角速度が与えられるのに伴い検出電極に加わる力を検出することにより角速度を検出する角速度センサにおいて、前記駆動電極は、前記検出電極の振動量を増幅する振動量増幅機構を介して前記検出電極を揺動自在に支持する可動部材と、前記可動部材に対向する対向面を有する固定部材と、前記可動部材と前記固定部材の対向面に互いに噛み合うように形成された櫛歯電極とを有し、前記可動部材と前記固定部材の櫛歯電極間に電圧を印加することにより前記櫛歯電極間に発生する静電力を利用して検出電極を振動させ、前記振動量増幅機構は、長手方向端部が梁を介して検出電極及び可動部材に接続された本体部と、前記本体部の長手方向中心位置よりも可動部材側の位置において本体部を固定する固定部とを有することを特徴とする角速度センサ。 In an angular velocity sensor that has a detection electrode and a drive electrode, detects the angular velocity by vibrating the detection electrode with the drive electrode, and detecting the force applied to the detection electrode as the angular velocity is applied, the drive electrode includes: A movable member that swingably supports the detection electrode via a vibration amount amplification mechanism that amplifies the vibration amount of the detection electrode, a fixed member that has a facing surface facing the movable member, the movable member, and the fixed member Comb electrodes formed so as to mesh with each other on the opposite surfaces of the movable member, and utilizing the electrostatic force generated between the comb electrodes by applying a voltage between the movable members and the comb electrodes of the fixed member The vibration amount amplifying mechanism includes a main body portion whose longitudinal end is connected to the detection electrode and the movable member via a beam, and a movable member side from the longitudinal center position of the main body portion. of An angular velocity sensor characterized by having a fixing portion for fixing the main body portion in location.

請求項１に記載の角速度センサにおいて、前記振動量増幅機構を含む前記駆動電極の振動方向及び検出方向の共振周波数が略一致していることを特徴とする角速度センサ。 2. The angular velocity sensor according to claim 1, wherein a resonance frequency in a vibration direction and a detection direction of the drive electrode including the vibration amount amplifying mechanism are substantially the same.

請求項１又は請求項２に記載の角速度センサにおいて、前記可動部材は、複数の前記振動量増幅機構を介して前記検出電極を揺動自在に支持し、複数の前記振動量増幅機構のうち、同位相で振動する前記振動量増幅機構同士が連結していることを特徴とする角速度センサ。 The angular velocity sensor according to claim 1 or 2, wherein the movable member supports the detection electrode so as to be swingable via the plurality of vibration amount amplifying mechanisms, and among the plurality of vibration amount amplifying mechanisms, An angular velocity sensor, wherein the vibration amount amplifying mechanisms that vibrate in the same phase are connected to each other.

請求項３に記載の角速度センサにおいて、前記可動部材は前記検出電極を内包する枠体により構成され、複数の前記振動量増幅機構は前記枠体により連結していることを特徴とする角速度センサ。 The angular velocity sensor according to claim 3, wherein the movable member is configured by a frame body including the detection electrode, and the plurality of vibration amount amplifying mechanisms are connected by the frame body.

請求項１乃至請求項４のうち、いずれか１項に記載の角速度センサにおいて、前記振動量増幅機構は、長手方向に連結された複数の前記本体部と、各本体部に設けられた前記固定部により構成されていることを特徴とする角速度センサ。 5. The angular velocity sensor according to claim 1, wherein the vibration amount amplifying mechanism includes a plurality of the main body portions connected in a longitudinal direction and the fixed portions provided in the main body portions. An angular velocity sensor characterized by comprising a portion.