JP2009174999A - Ultrasonic flaw detector - Google Patents

Ultrasonic flaw detector Download PDF

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JP2009174999A
JP2009174999A JP2008013829A JP2008013829A JP2009174999A JP 2009174999 A JP2009174999 A JP 2009174999A JP 2008013829 A JP2008013829 A JP 2008013829A JP 2008013829 A JP2008013829 A JP 2008013829A JP 2009174999 A JP2009174999 A JP 2009174999A
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ultrasonic
ultrasonic transducers
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JP4909916B2 (en
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Tomohiro Umino
友洋 海野
Kenji Tayama
賢治 田山
Kaoru Kitami
薫 北見
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Hitachi Engineering and Services Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To dispense with operation to set a level to the surface echo signal, when setting surface standard, and to make the operability improved. <P>SOLUTION: The detector includes an array probe 16, in which a plurality of ultrasonic transducers 14 is aligned in line to transmit and receive an ultrasonic wave between an analyte 12 immersed into water 11 via the water; interface setting means 32, 34, 36 setting the surface standard, based on the surface echo signal reflected at the surface of array probe side of the analyte among reflected echo signals, in which the respective received wave signals of the plurality of ultrasonic transducers are delay-treated; and a PC 24 generating an image based on a detected signal of an evaluation gate set by an evaluation setting circuit 30, at a position delayed by a prescribed time from the surface standard among synthesis signals summed by a waveform combining circuit 28; in which the interface setting means set the surface standard, based on a surface echo signal of an ultrasonic transducer at line center among the plurality of ultrasonic transducers. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、超音波探傷装置に係り、具体的には、水などの液体に浸漬された被検体との間で液体を介して超音波を送受信し、被検体表面で反射した表面エコーを基準として表面から所定の深さ位置の反射エコーを検出し画像化する超音波探傷装置に関する。   The present invention relates to an ultrasonic flaw detector, and more specifically, transmits and receives ultrasonic waves via a liquid immersed in a liquid such as water and uses a surface echo reflected from the surface of the object as a reference. The present invention relates to an ultrasonic flaw detector that detects and images a reflected echo at a predetermined depth position from the surface.

超音波探傷装置は、アレイプローブを用いて被検体との間で超音波を送受信して得られた反射エコー信号に基づいて被検体内部の画像を生成し、非破壊で被検体内部の傷・欠陥などの有無を検査するものである。   The ultrasonic flaw detector generates an image inside the subject based on a reflected echo signal obtained by transmitting and receiving ultrasonic waves to and from the subject using an array probe, and non-destructively This is to inspect for the presence or absence of defects.

アレイプローブは、列状に配列された複数の超音波振動子を有し、その内のいくつかの連接する複数の振動子群で1つの超音波パルスビームを送受信するよう構成されている。この振動子群を構成する各振動子に与える送波信号(励振信号)、及び各振動子で受信した受波信号(エコーの受信信号)に時間的ずれ(遅延パタン)を与えて、いわゆるフェーズドアレイとして機能させることにより、超音波ビームを集束させて、焦点を持った超音波エコーを得ることができる。なお、各振動子の振動子配列方向に直交する方向に曲率をつけることにより、この直交方向についても焦点を持たせることができる。   The array probe has a plurality of ultrasonic transducers arranged in a row, and is configured to transmit / receive one ultrasonic pulse beam by using a plurality of groups of transducers connected to each other. A phase shift (delay pattern) is given to the transmission signal (excitation signal) given to each transducer constituting this transducer group and the received signal (echo received signal) received by each transducer, so-called phased. By functioning as an array, the ultrasound beam can be focused and a focused ultrasound echo can be obtained. In addition, by giving a curvature in a direction orthogonal to the transducer arrangement direction of each transducer, the orthogonal direction can be focused.

また、振動子群を構成する振動子の組合せを1振動子ずつ配列方向にずらしながら電子走査することにより、配列方向に沿った複数の画像を得ることができる。   Also, a plurality of images along the arrangement direction can be obtained by performing electronic scanning while shifting the combination of the vibrators constituting the vibrator group one by one in the arrangement direction.

ところで、このような超音波探傷装置として、特許文献1に記載されているように、被検体とアレイプローブの間に水を介在させて、水を介して超音波を送受信する水浸用の超音波探傷装置が知られている。また、被検体のアレイプローブ側の表面から反射する表面エコー信号に基づいて表面基準を設定するとともに、表面基準から所定時間遅れた位置に欠陥検査用の評価ゲートを設定し、評価ゲート位置の反射エコー信号を検出することにより、被検体の表面から所定の深さ位置における欠陥検出を行うことが知られている。   By the way, as such an ultrasonic flaw detection apparatus, as described in Patent Document 1, water is interposed between a subject and an array probe, and an ultrasonic wave immersion apparatus that transmits and receives ultrasonic waves through water is used. An acoustic flaw detector is known. In addition, the surface reference is set based on the surface echo signal reflected from the surface of the subject on the array probe side, and an evaluation gate for defect inspection is set at a position delayed by a predetermined time from the surface reference, and the evaluation gate position is reflected. It is known to detect a defect at a predetermined depth position from the surface of the subject by detecting an echo signal.

特開2005−37407号公報JP-A-2005-37407

しかしながら、特許文献1に記載されている技術では、表面基準の位置を安定させるために、表面エコー信号に対する例えば閾値などの設定レベルについて注意を払う必要があり、作業性を向上させることについて改善の余地が残されている。   However, in the technique described in Patent Document 1, it is necessary to pay attention to a setting level such as a threshold value for the surface echo signal in order to stabilize the position of the surface reference, and improvement in improving workability. There is room for it.

すなわち、複数の振動子により超音波パルスビームを生成する場合、送信エコーが被検体内部の所定の焦点位置で同時に合成されるように遅延パタンが設定されるため、焦点位置で反射して各振動子が受信する反射エコー信号は相互に位相が揃っており、これらを加算した合成波形は安定する。   That is, when an ultrasonic pulse beam is generated by a plurality of transducers, the delay pattern is set so that transmission echoes are simultaneously synthesized at a predetermined focal position inside the subject. The reflected echo signals received by the child are in phase with each other, and the combined waveform obtained by adding them is stable.

一方、表面エコー信号は、焦点位置より手前に位置している被検体表面で反射して各振動子で受信されるため、必ずしも相互に位相が一致せず、これら表面エコー信号を加算した信号に基づいて設定される表面基準の位置は、走査場所によってまちまちとなり安定しない。   On the other hand, since the surface echo signal is reflected by the surface of the subject located in front of the focal position and received by each transducer, the phases do not necessarily match each other. The position of the surface reference set based on this varies depending on the scanning location and is not stable.

したがって、走査場所によらず表面基準の位置を揃えるためには、表面エコー信号に対する例えば閾値などのレベルを適切に設定することに注意を払う必要があり、作業性の面で好ましくない。   Therefore, in order to align the position of the surface reference regardless of the scanning location, it is necessary to pay attention to appropriately setting a level such as a threshold for the surface echo signal, which is not preferable in terms of workability.

そこで、本発明は、表面基準を設定する際の表面エコー信号に対するレベル設定の作業性を向上させた超音波探傷装置を実現することを課題とする。   Therefore, an object of the present invention is to realize an ultrasonic flaw detector that improves the level setting workability for the surface echo signal when setting the surface reference.

本発明の超音波探傷装置は、液体に浸漬された被検体との間で液体を介して超音波を送受信する複数の超音波振動子を列状に配列してなるアレイプローブと、複数の超音波振動子のそれぞれの受波信号に遅延処理を行った反射エコー信号のうち、被検体の前記アレイプローブ側の表面で反射した表面エコー信号に基づいて表面基準を設定するインターフェース設定手段と、反射エコー信号を加算した合成信号のうち、表面基準から所定時間遅れた位置に設定された評価ゲート位置で検出された信号に基づいて、被検体の表面から所定深さ位置の画像を生成する画像生成手段とを備えることを基本構成とする。   An ultrasonic flaw detector according to the present invention includes an array probe in which a plurality of ultrasonic transducers that transmit and receive ultrasonic waves to and from a subject immersed in a liquid are arranged in a row, and a plurality of ultrasonic probes An interface setting means for setting a surface reference based on a surface echo signal reflected from the surface of the subject on the array probe side of the reflected echo signal obtained by delaying each received signal of the acoustic wave transducer; Image generation that generates an image at a predetermined depth position from the surface of the subject based on a signal detected at an evaluation gate position set at a position delayed by a predetermined time from the surface reference among the combined signals obtained by adding the echo signals Providing a means.

そして、上記課題を解決するため、インターフェース設定手段は、複数の超音波振動子のうち、列の中央部の超音波振動子の表面エコー信号に基づいて表面基準を設定することを特徴とする。   And in order to solve the said subject, an interface setting means sets the surface reference | standard based on the surface echo signal of the ultrasonic transducer | vibrator of the center part of a row | line | column among several ultrasonic transducer | vibrators.

すなわち、走査場所によって評価ゲート位置がばらつくのは、各振動子で受信した表面エコー信号の位相の不整合によるものであるところ、本発明では、表面基準を設定する際には、列の中央部の超音波振動子の表面エコー信号のみを採用している。列の中央部の超音波振動子の表面エコー信号は、列全体の表面エコー信号に比べて、振動子相互の表面エコー信号の位相のばらつきが小さいため、ある程度位相が揃った表面エコー信号のみに基づいて表面基準を設定することにより、走査場所によらず表面基準の位置が安定する。その結果、表面基準から所定時間遅れた位置に設定される評価ゲート位置、言い換えれば表面からの深さ位置も安定するため、走査場所によって表面エコー信号に対するレベル設定に特段の注意が不要であり、作業性を向上させることができる。   That is, the evaluation gate position varies depending on the scanning location because of the phase mismatch of the surface echo signals received by each transducer. In the present invention, when setting the surface reference, the central portion of the column Only the surface echo signal of the ultrasonic transducer is adopted. The surface echo signal of the ultrasonic transducers in the center of the column is smaller than the surface echo signal of the entire column, so the variation in the phase of the surface echo signal between the transducers is small. By setting the surface reference based on this, the position of the surface reference is stabilized regardless of the scanning location. As a result, the evaluation gate position set at a position delayed by a predetermined time from the surface reference, in other words, the depth position from the surface is also stable, so no special attention is required for setting the level for the surface echo signal depending on the scanning location, Workability can be improved.

この場合において、インターフェース設定手段を、複数の超音波振動子のうち、列の中央部の複数の超音波振動子の表面エコー信号を加算し、加算した信号に基づいて表面基準を設定するよう構成することができる。   In this case, the interface setting means is configured to add the surface echo signals of the plurality of ultrasonic transducers at the center of the row among the plurality of ultrasonic transducers and set the surface reference based on the added signal can do.

また、インターフェース設定手段を、列の中央部の複数の超音波振動子の数を変更可能に設けることができる。つまり、列の中央部の超音波振動子の数は、上述のように、多くすればするほど表面エコー信号の相互の位相の不整合が顕著になる一方、少なすぎると、表面エコー信号を加算した信号強度が小さすぎて表面基準を設定できない場合がある。そこで、確実に表面基準を設定できる信号強度を確保しつつ、表面エコー信号相互の位相不整合を極力抑制できるような振動子数を、適宜選択可能とすることが望ましい。   Further, the interface setting means can be provided so that the number of the plurality of ultrasonic transducers at the center of the row can be changed. In other words, as the number of ultrasonic transducers in the central portion of the row increases, as the number of ultrasonic transducers increases, the mutual phase mismatch of the surface echo signals becomes more pronounced. On the other hand, if the number is too small, the surface echo signals are added. In some cases, the signal reference is too small to set the surface reference. Therefore, it is desirable that the number of vibrators that can suppress the phase mismatch between the surface echo signals as much as possible can be appropriately selected while ensuring the signal intensity that can reliably set the surface reference.

本発明によれば、表面基準を設定する際の表面エコー信号に対するレベル設定の作業性を向上させた超音波探傷装置を実現することができる。   ADVANTAGE OF THE INVENTION According to this invention, the ultrasonic flaw detector which improved the workability of the level setting with respect to the surface echo signal at the time of setting a surface reference | standard is realizable.

以下、本発明を適用してなる超音波探傷装置の実施形態を、図1〜図3を用いて説明する。なお、以下の説明では、同一機能部品については同一符号を付して重複説明を省略する。   Hereinafter, an embodiment of an ultrasonic flaw detector to which the present invention is applied will be described with reference to FIGS. In the following description, the same functional parts are denoted by the same reference numerals, and redundant description is omitted.

図1は、本発明の超音波探傷装置の全体構成を示す図である。図1に示すように、超音波探傷装置10は、水11に浸漬された被検体12との間で水11を介して超音波を送受信する複数の超音波振動子14(以下、適宜単に振動子14という)を、列状に配列してなるアレイプローブ16を備えている。なお、被検体12としては、例えばアレイプローブ16の振動子列に対して略平行な表面を有するICチップなどが挙げられる。ただし、被検体は、ICチップに限らず振動子列に対して略平行な表面を有するものであればよい。   FIG. 1 is a diagram showing an overall configuration of an ultrasonic flaw detector according to the present invention. As shown in FIG. 1, an ultrasonic flaw detector 10 includes a plurality of ultrasonic transducers 14 (hereinafter simply referred to as “vibration” as appropriate) that transmit and receive ultrasonic waves to and from a subject 12 immersed in water 11 via water 11. An array probe 16 is provided which is arranged in a row. Examples of the subject 12 include an IC chip having a surface substantially parallel to the transducer array of the array probe 16. However, the subject is not limited to the IC chip, and any object having a surface substantially parallel to the transducer array may be used.

また、超音波探傷装置は、複数の振動子14のそれぞれに対応して設けられ、各振動子14に送波信号を与える複数の送信器18と、各振動子14のそれぞれに対応して設けられ、各振動子14からの受波信号を受信する複数の受信器20と、送波信号及び受波信号の制御及び処理を行うFPGA(Field Programmable Gate Array)22と、FPGA22から出力される信号に基づいて被検体内部の画像を生成するPC24などを備えて構成されている。なお、FPGA22からの出力信号を画像化する画像生成回路を備えていれば、必ずしもPC24を備えている必要はない。   In addition, the ultrasonic flaw detector is provided corresponding to each of the plurality of transducers 14, provided in correspondence to each of the plurality of transmitters 18 that give a transmission signal to each transducer 14, and each of the transducers 14. A plurality of receivers 20 that receive the received signals from each transducer 14, an FPGA (Field Programmable Gate Array) 22 that controls and processes the transmitted signals and received signals, and signals output from the FPGA 22. And a PC 24 for generating an image inside the subject based on the above. Note that the PC 24 is not necessarily provided as long as the image generation circuit that images the output signal from the FPGA 22 is provided.

FPGA22は、送信器18に対して送波信号の遅延処理を行うとともに、受信器20で受信された受波信号に遅延処理を行う遅延時間制御回路26と、遅延時間制御回路26から出力された反射エコー信号を加算する波形合成回路28と、波形合成回路28から出力された合成信号から、被検体内の所定深さ位置の信号を検出するために用いられる評価ゲートを設定する評価ゲート設定回路30とを備えている。   The FPGA 22 delays the transmission signal to the transmitter 18 and also outputs a delay time control circuit 26 that delays the received signal received by the receiver 20 and the delay time control circuit 26. A waveform synthesis circuit 28 for adding the reflected echo signals, and an evaluation gate setting circuit for setting an evaluation gate used for detecting a signal at a predetermined depth in the subject from the synthesized signal output from the waveform synthesis circuit 28 30.

また、評価ゲート設定回路30において評価ゲートを設定するために、被検体の表面から反射した表面エコー信号に基づいて表面基準を設定するIF(インターフェース)ゲート設定回路32を備えている。   Further, in order to set an evaluation gate in the evaluation gate setting circuit 30, an IF (interface) gate setting circuit 32 is provided for setting a surface reference based on a surface echo signal reflected from the surface of the subject.

さらに、本実施形態の特徴部として、複数の振動子のうち、IFゲート設定回路32で表面基準を設定する際に用いる振動子を指定する表面エコー受信振動子指定回路34と、遅延時間制御回路26から出力された反射エコー信号のうち、表面エコー受信振動子指定回路34で指定された振動子の表面で反射した表面エコー信号を加算する表面エコー合成回路36とを備えている。なお、IFゲート設定回路32,表面エコー受信振動子指定回路34,表面エコー合成回路36などによって、インターフェース設定手段が構成される。   Further, as a characteristic part of the present embodiment, a surface echo receiving transducer designating circuit 34 for designating a transducer to be used when setting a surface reference by the IF gate setting circuit 32 among a plurality of transducers, and a delay time control circuit And a surface echo synthesis circuit 36 for adding the surface echo signals reflected from the surface of the transducer designated by the surface echo receiving transducer designation circuit 34 among the reflected echo signals output from 26. The IF gate setting circuit 32, the surface echo receiving transducer designating circuit 34, the surface echo synthesis circuit 36, etc. constitute an interface setting means.

続いて、本実施形態の超音波探傷装置の全体の動作を説明する。PC24からのトリガ信号38によって、遅延時間制御回路26から、遅延時間が調整された励振パルス40が各送信器18を介して各振動子14に対して供給される。これにより、各振動子14から遅延時間が調整された送信エコー42が水11を介して被検体12に伝達され、被検体12のアレイプローブ16側の表面,内部或いは底面から反射エコー44が、各振動子14を励起して受波信号が受信器20で受信される。   Next, the overall operation of the ultrasonic flaw detector according to this embodiment will be described. In response to a trigger signal 38 from the PC 24, an excitation pulse 40 whose delay time is adjusted is supplied from the delay time control circuit 26 to each transducer 14 via each transmitter 18. Thereby, the transmission echo 42 in which the delay time is adjusted is transmitted from each transducer 14 to the subject 12 through the water 11, and the reflected echo 44 is transmitted from the surface, the inside, or the bottom surface of the subject 12 on the array probe 16 side. Each transducer 14 is excited and a received signal is received by the receiver 20.

受信器20から出力された受波信号46は、遅延時間制御回路26で送信時に調整された遅延時間分だけ元に戻す処理が行われて反射エコー信号が生成される。ここで、反射エコー信号のうち、被検体12のアレイプローブ16側の表面で反射した表面エコー信号が表面エコー受信振動子指定回路34に送られ、表面エコー受信振動子指定回路34において指定された振動子14の表面エコー信号のみが、表面エコー合成回路36に送られる。表面エコー合成回路36において、表面エコー信号が加算され、加算された信号はIFゲート設定回路32に送られる。そして、IFゲート設定回路32において、加算された信号に基づいて表面基準が設定される。   The received signal 46 output from the receiver 20 is returned to the original amount by the delay time adjusted at the time of transmission by the delay time control circuit 26 to generate a reflected echo signal. Here, of the reflected echo signals, the surface echo signal reflected by the surface of the subject 12 on the array probe 16 side is sent to the surface echo receiving transducer designating circuit 34 and designated by the surface echo receiving transducer designating circuit 34. Only the surface echo signal of the transducer 14 is sent to the surface echo synthesis circuit 36. In the surface echo synthesis circuit 36, the surface echo signal is added, and the added signal is sent to the IF gate setting circuit 32. Then, the IF gate setting circuit 32 sets the surface reference based on the added signal.

一方、遅延時間制御回路26で生成された反射エコー信号のうち、表面エコー信号以降の他の反射エコー信号は、波形合成回路28に送られ、加算されて合成信号48が生成される。そして、合成信号48のうち、評価ゲート設定回路30において表面基準から所定時間遅れた位置に設定された評価ゲート位置の信号のみが、内部エコー信号として検出され、PC24に送られる。PC24において、内部エコー信号に基づいて階調化された画像が生成される。   On the other hand, of the reflected echo signals generated by the delay time control circuit 26, the other reflected echo signals after the surface echo signal are sent to the waveform synthesis circuit 28 and added to generate a synthesized signal 48. Of the synthesized signal 48, only the signal at the evaluation gate position set in the evaluation gate setting circuit 30 at a position delayed by a predetermined time from the surface reference is detected as an internal echo signal and sent to the PC 24. In the PC 24, a gradation image is generated based on the internal echo signal.

以上の一連の動作を、超音波パルスビームを形成する複数振動子の組合せを1振動子ずつ配列方向にずらしながら電子走査するとともに、配列方向に直交する方向に例えば機械的に走査しながら繰り返すことにより、被検体12の表面から所定深さ位置の画像が生成される。   The above series of operations is repeated while electronically scanning a combination of a plurality of transducers forming an ultrasonic pulse beam one by one in the arrangement direction and mechanically scanning in a direction orthogonal to the arrangement direction, for example. Thus, an image at a predetermined depth position is generated from the surface of the subject 12.

以下、本実施形態の特徴構成による効果について説明する。まず、図2を用いて従来技術による評価ゲートの設定について説明する。例えば、初めにNo.1からNo.16の振動子14を第1振動子群50とすると、遅延時間52がそれぞれ調整された励振パルス40により振動子14から送信エコー42が送信される。送信エコー42は、被検体12の表面54、及び内部の反射源56で反射される。なお、反射源56とは、被検体内部の欠陥・傷などの音響インピーダンスが被検体内部の音響インピーダンスと異なる部位のことである。   Hereinafter, the effect by the characteristic structure of this embodiment is demonstrated. First, the setting of the evaluation gate according to the prior art will be described with reference to FIG. For example, first, No. 1 to No. When the 16 transducers 14 are the first transducer group 50, the transmission echo 42 is transmitted from the transducer 14 by the excitation pulse 40 whose delay time 52 is adjusted. The transmission echo 42 is reflected by the surface 54 of the subject 12 and the internal reflection source 56. The reflection source 56 is a part where the acoustic impedance such as a defect or a scratch inside the subject is different from the acoustic impedance inside the subject.

ここで、アレイプローブ16と被検体12との水距離60などを考慮して超音波の焦点58が反射源56の位置付近になるように遅延パタンを設定した場合、超音波の焦点58に位相が揃った超音波が収束し、超音波エコーの強度が増す。被検体12の表面54又は内部の反射源56からの反射エコー44は、送信エコー42の経路を逆に戻り、再び第1振動子群50で受信される。   Here, when the delay pattern is set so that the ultrasonic focus 58 is near the position of the reflection source 56 in consideration of the water distance 60 between the array probe 16 and the subject 12, the phase is set to the ultrasonic focus 58. The ultrasonic waves having the same are converged, and the intensity of the ultrasonic echo is increased. The reflected echo 44 from the surface 54 of the subject 12 or the internal reflection source 56 returns to the reverse path of the transmission echo 42 and is received by the first transducer group 50 again.

ここで、第1振動子群50によるAスコープ62に示すように、IFゲート設定回路32及び評価ゲート設定回路30により、No.1からNo.16の振動子14の表面エコー信号を加算した表面エコー合成信号64の設定閾値(IFゲート65)以上となる箇所に表面基準66が設定され、表面基準に対して一定時間遅れて一定位置を保つ評価ゲート68が設定される。そして、被検体12の内部の反射エコー信号を加算した合成信号のうち、評価ゲート位置の信号70が内部エコー信号として検出される。   Here, as shown in the A scope 62 by the first vibrator group 50, the IF gate setting circuit 32 and the evaluation gate setting circuit 30 cause No. 1 to No. The surface reference 66 is set at a location that is equal to or greater than the set threshold (IF gate 65) of the surface echo composite signal 64 obtained by adding the surface echo signals of the 16 transducers 14, and the constant position is maintained with a certain time delay from the surface reference. An evaluation gate 68 is set. Then, out of the combined signal obtained by adding the reflected echo signals inside the subject 12, the signal 70 at the evaluation gate position is detected as the internal echo signal.

また、次に振動子14の組合せを1個電子走査方向72にずらしてNo.2からNo.17の振動子14を第2振動子群50aとし、第1振動子群50と同様に被検体12の内部の反射源56を検出する。第2振動子群50aによるAスコープ75に示すように、No.2からNo.17の振動子14の表面エコー信号を加算した表面エコー合成信号76に対して設定閾値(IFゲート65)以上となる箇所に表面基準78が設定され、表面基準78に対して一定時間遅れて一定位置を保つ評価ゲート80が設定される。   Next, the combination of the transducers 14 is shifted by one in the electronic scanning direction 72 and No. 2 to No. The 17 transducers 14 are defined as the second transducer group 50 a, and the reflection source 56 inside the subject 12 is detected in the same manner as the first transducer group 50. As shown in the A scope 75 by the second vibrator group 50a, 2 to No. A surface reference 78 is set at a position that is equal to or greater than a set threshold (IF gate 65) with respect to the surface echo composite signal 76 obtained by adding the surface echo signals of the 17 transducers 14, and is constant with a certain time delay from the surface reference 78. An evaluation gate 80 that maintains the position is set.

そして、被検体12の内部の反射エコー信号を加算した合成信号のうち、評価ゲート位置の信号が内部エコー信号として検出される。この例では、評価ゲート80の位置に、所望とする信号が対応していない場合を示している。   And the signal of an evaluation gate position is detected as an internal echo signal among the synthetic | combination signals which added the reflective echo signal inside the test object 12. FIG. In this example, a case where a desired signal does not correspond to the position of the evaluation gate 80 is shown.

電子走査方向72に同様に振動子14の組合せをずらすことにより、アレイプローブ16の幅での検出範囲74が確保され、被検体12に平行かつ電子走査方向72に直交する方向にアレイプローブ16を動作させることにより、被検体12内部の表面から所定の深さの画像を生成することができる。   Similarly, by shifting the combination of the transducers 14 in the electronic scanning direction 72, a detection range 74 in the width of the array probe 16 is secured, and the array probe 16 is placed in a direction parallel to the subject 12 and perpendicular to the electronic scanning direction 72. By operating, an image having a predetermined depth can be generated from the surface inside the subject 12.

ここで、例えば、第1振動子群のAスコープ62と第2振動子群のAスコープ75に示すように、第1振動子群50による表面エコー合成信号64と第2振動子群50aによる表面エコー合成信号76は、互いに波形が揃っていない。これは、焦点58の手前の表面54で反射した反射エコー信号は各振動子相互で必ずしも位相が一致していないため、これらを加算した合成信号の波形が不安定になるためである。   Here, for example, as shown in the A scope 62 of the first transducer group and the A scope 75 of the second transducer group, the surface echo composite signal 64 by the first transducer group 50 and the surface by the second transducer group 50a. The echo synthesis signals 76 do not have the same waveform. This is because the reflected echo signals reflected by the surface 54 in front of the focal point 58 do not necessarily have the same phase among the transducers, so that the waveform of the combined signal obtained by adding them becomes unstable.

このため、それぞれに設定した表面基準66,78の位置が異なり、評価ゲート68,80が表面54から同一な深さ位置を確保できない。したがって、評価ゲート68,80を表面54から同一深さにするためには、例えば、IFゲート65のレベルを走査場所ごとに適宜変更しながら設定するなどの作業が必要となるため、作業性の面で好ましくない。   For this reason, the positions of the surface references 66 and 78 set for each are different, and the evaluation gates 68 and 80 cannot secure the same depth position from the surface 54. Therefore, in order to set the evaluation gates 68 and 80 to the same depth from the surface 54, for example, it is necessary to set the IF gate 65 while changing the level of the IF gate 65 appropriately for each scanning location. It is not preferable in terms of the aspect.

これに対して、本実施形態の超音波探傷装置では、上述のように、表面エコー受信振動子指定回路34において指定された振動子14の表面エコー信号のみが表面エコー合成回路36に送られ、表面エコー合成回路36において加算される。この構成による動作、及び作用について、図3を用いて説明する。   On the other hand, in the ultrasonic flaw detector of the present embodiment, as described above, only the surface echo signal of the transducer 14 designated by the surface echo receiving transducer designation circuit 34 is sent to the surface echo synthesis circuit 36, It is added in the surface echo synthesis circuit 36. The operation and effect of this configuration will be described with reference to FIG.

上述の従来技術と同様に、例えば初めにNo.1からNo.16の振動子14を第1振動子群50とすると、遅延時間52がそれぞれ調整された励振パルス40により各振動子14から送信エコー42が送信される。送信エコー42は、被検体12の表面54及び内部の反射源56で反射され、反射エコー44は、送信エコー42の経路を逆に戻り、再び第1振動子群50で受信される。   Similar to the above-mentioned prior art, first, for example, No. 1 to No. When the 16 transducers 14 are the first transducer group 50, the transmission echo 42 is transmitted from each transducer 14 by the excitation pulse 40 in which the delay time 52 is adjusted. The transmission echo 42 is reflected by the surface 54 of the subject 12 and the internal reflection source 56, and the reflection echo 44 returns back along the path of the transmission echo 42 and is received by the first transducer group 50 again.

ここで、第1振動子群50によるAスコープ62に示す表面エコー合成信号64は、受信時に位相がほぼ同一の第1振動子群50の振動子列の中央部(No.7からNo.10)の振動子による表面エコー信号82を加算した合成されたものである。また、表面エコー合成信号64の設定閾値(IFゲート65)以上となる箇所に表面基準66が設定され、表面基準に対して一定時間遅れて一定位置を保つ評価ゲート68が設定される。そして、被検体12の内部の反射エコー信号を加算した合成信号のうち、評価ゲート位置の信号70が内部エコー信号として検出される。   Here, the surface echo composite signal 64 shown in the A scope 62 by the first transducer group 50 is received at the center of the transducer array of the first transducer group 50 (No. 7 to No. 10) having substantially the same phase when received. ) And the surface echo signal 82 by the vibrator is added and synthesized. In addition, a surface reference 66 is set at a location that is equal to or greater than a set threshold value (IF gate 65) of the surface echo synthesis signal 64, and an evaluation gate 68 that maintains a fixed position with a delay of a certain time with respect to the surface reference is set. Then, out of the combined signal obtained by adding the reflected echo signals inside the subject 12, the signal 70 at the evaluation gate position is detected as the internal echo signal.

次に、振動子14の組合せを1個電子走査方向72にずらしてNo.2からNo.17の振動子14を第2振動子群50aとすると、第1振動子群50と同様に被検体12の内部の反射源56を検出する。   Next, the combination of the vibrators 14 is shifted by one in the electronic scanning direction 72 and No. 2 to No. When the 17 transducers 14 are the second transducer group 50 a, the reflection source 56 inside the subject 12 is detected as in the first transducer group 50.

第2振動子群50aによるAスコープ75に示す表面エコー合成信号76は、受信時に位相がほぼ同一の振動子列の中央部の振動子(No.8からNo.11)による表面エコー信号84を加算して合成したものである。また、表面エコー合成信号76の設定閾値(IFゲート65)以上となる箇所に表面基準78が設定され、表面基準78に対して一定時間遅れて一定位置を保つ評価ゲート80が設定される。そして、被検体12の内部の反射エコー信号を加算した合成信号のうち、評価ゲート位置の信号86が内部エコー信号として検出される。   The surface echo composite signal 76 shown in the A scope 75 by the second transducer group 50a is the surface echo signal 84 by the transducers (No. 8 to No. 11) in the central portion of the transducer array having substantially the same phase at the time of reception. The result is a composition obtained by adding. In addition, a surface reference 78 is set at a location that is equal to or greater than a set threshold value (IF gate 65) of the surface echo synthesis signal 76, and an evaluation gate 80 that maintains a fixed position with a delay of a certain time with respect to the surface reference 78 is set. Then, the signal 86 at the evaluation gate position is detected as the internal echo signal among the combined signals obtained by adding the reflected echo signals inside the subject 12.

続いて、電子走査方向72に同様に振動素子14の組合せをずらすことにより、アレイプローブ16の幅での検出範囲74が確保され、被検体12に平行かつ電子走査方向72に直交する方向にアレイプローブ16を動作させることにより被検体12内部の表面から所定の深さの画像を生成することができる。   Subsequently, by similarly shifting the combination of the vibrating elements 14 in the electronic scanning direction 72, a detection range 74 with the width of the array probe 16 is secured, and the array is arranged in a direction parallel to the subject 12 and perpendicular to the electronic scanning direction 72. By operating the probe 16, an image having a predetermined depth can be generated from the surface inside the subject 12.

本実施形態によれば、例えば第1振動子群50による表面エコー合成信号64と第2振動子群50aによる表面エコー合成信号76は、焦点58の手前の表面で反射した表面エコー信号を加算したものではあるが、受信時に位相がほぼ同一となる振動子群の中央付近の振動子を選定しているため、振動子群間でも位相が揃い同形状となる。   According to the present embodiment, for example, the surface echo composite signal 64 by the first transducer group 50 and the surface echo composite signal 76 by the second transducer group 50a are obtained by adding the surface echo signals reflected by the surface in front of the focal point 58. However, since the transducers near the center of the transducer groups having substantially the same phase at the time of reception are selected, the phases are uniform and have the same shape between the transducer groups.

したがって、それぞれに設定した表面基準66,78が同じ位置になり、評価ゲート68,80が表面54から同一な深さ位置を確保でるため、同一深さのデータを採取することができる。このようなことが、アレイプローブ16の検出範囲74で同様に発生するため、走査場所ごとにIFゲートのレベル設定に注意を払いながら適宜変更するなどの作業が不要となり、作業性を向上することができる。   Accordingly, the surface references 66 and 78 set for each are at the same position, and the evaluation gates 68 and 80 can secure the same depth position from the surface 54, so that data of the same depth can be collected. Since this occurs in the detection range 74 of the array probe 16 in the same manner, an operation such as changing the IF gate level appropriately while paying attention to each scanning location becomes unnecessary, and workability is improved. Can do.

なお、列の中央部の超音波振動子の数は、上述のように、多くすればするほど表面エコー信号の相互の位相の不整合が顕著になる一方、少なすぎると、表面エコー信号を加算した信号強度が小さすぎて表面基準を設定できない場合がある。そこで、確実に表面基準を設定できる信号強度を確保しつつ、表面エコー信号相互の位相不整合を極力抑制できるような振動子数を、適宜選択可能とすることができる。   As described above, the number of ultrasonic transducers in the center of the row increases as the number of the ultrasonic echoes increases. As the number of ultrasonic transducers increases, the phase mismatch between the surface echo signals becomes more pronounced. In some cases, the signal reference is too small to set the surface reference. Therefore, it is possible to appropriately select the number of vibrators that can suppress the phase mismatch between the surface echo signals as much as possible while ensuring the signal intensity that can reliably set the surface reference.

本発明の超音波探傷装置の全体構成を示す図である。It is a figure which shows the whole structure of the ultrasonic flaw detector of this invention. 従来技術による評価ゲートの設定態様について説明する図である。It is a figure explaining the setting aspect of the evaluation gate by a prior art. 本発明の超音波探傷装置による評価ゲートの設定態様について説明する図である。It is a figure explaining the setting aspect of the evaluation gate by the ultrasonic flaw detector of the present invention.

符号の説明Explanation of symbols

10 超音波探傷装置
11 水
12 被検体
14 超音波振動子
16 アレイプローブ
18 送信器
20 受信器
24 PC
26 遅延時間制御回路
28 波形合成回路
30 評価ゲート設定回路
32 IFゲート設定回路
34 表面エコー受信振動子指定回路
36 表面エコー合成回路
66,78 表面基準
68,80 評価ゲート
DESCRIPTION OF SYMBOLS 10 Ultrasonic flaw detector 11 Water 12 Subject 14 Ultrasonic transducer 16 Array probe 18 Transmitter 20 Receiver 24 PC
26 Delay time control circuit 28 Waveform synthesis circuit 30 Evaluation gate setting circuit 32 IF gate setting circuit 34 Surface echo receiving transducer designating circuit 36 Surface echo synthesis circuits 66 and 78 Surface reference 68 and 80 Evaluation gate

Claims (4)

液体に浸漬された被検体との間で前記液体を介して超音波を送受信する複数の超音波振動子を列状に配列してなるアレイプローブと、前記複数の超音波振動子のそれぞれの受波信号に遅延処理を行った反射エコー信号のうち、前記被検体の前記アレイプローブ側の表面で反射した表面エコー信号に基づいて表面基準を設定するインターフェース設定手段と、前記反射エコー信号を加算した合成信号のうち、前記表面基準から所定時間遅れた位置に設定された評価ゲート位置で検出された信号に基づいて、前記被検体の表面から所定深さ位置の画像を生成する画像生成手段とを備えてなる超音波探傷装置において、
前記インターフェース設定手段は、前記複数の超音波振動子のうち、列の中央部の超音波振動子の表面エコー信号に基づいて前記表面基準を設定することを特徴とする超音波探傷装置。
An array probe in which a plurality of ultrasonic transducers that transmit and receive ultrasonic waves to and from a subject immersed in a liquid are arranged in a row, and each of the plurality of ultrasonic transducers is received. Interface setting means for setting a surface reference based on the surface echo signal reflected from the surface of the subject on the array probe side among the reflected echo signals obtained by delaying the wave signal, and the reflected echo signal added Image generating means for generating an image of a predetermined depth position from the surface of the subject based on a signal detected at an evaluation gate position set at a position delayed by a predetermined time from the surface reference among the synthesized signals; In the ultrasonic flaw detector provided,
The interface setting means sets the surface reference based on a surface echo signal of an ultrasonic transducer at a central portion of a row among the plurality of ultrasonic transducers.
前記インターフェース設定手段は、前記複数の超音波振動子のうち、列の中央部の複数の超音波振動子の表面エコー信号を加算し、加算した信号に基づいて前記表面基準を設定する請求項1の超音波探傷装置。   The interface setting means adds the surface echo signals of a plurality of ultrasonic transducers at the center of the row among the plurality of ultrasonic transducers, and sets the surface reference based on the added signals. Ultrasonic flaw detector. 前記インターフェース設定手段は、前記列の中央部の複数の超音波振動子の数を変更可能に設けられてなる請求項2の超音波探傷装置。   The ultrasonic flaw detection apparatus according to claim 2, wherein the interface setting means is provided so as to be able to change the number of a plurality of ultrasonic transducers at the center of the row. 水に浸漬された被検体との間で前記水を介して超音波を送受信する複数の超音波振動子を列状に配列してなるアレイプローブと、前記複数の超音波振動子のそれぞれに送波信号を与える送信器と、前記複数の超音波振動子のそれぞれからの受波信号を受信する受信器と、前記送信器に対して送波信号の遅延処理を行うとともに、前記受信器で受信された受波信号に遅延処理を行う遅延時間制御回路と、前記遅延時間制御回路から出力された反射エコー信号のうち、前記被検体の前記アレイプローブ側の表面で反射した表面エコー信号を加算する表面エコー合成回路と、該表面エコー合成回路で加算された信号に基づいて表面基準を設定するインターフェースゲート設定回路と、前記表面基準から所定時間遅れた位置に評価ゲートを設定する評価ゲート設定回路と、前記遅延時間制御回路から出力された反射エコー信号を加算する波形合成回路と、該波形合成回路から出力された合成信号のうち、前記評価ゲート位置の信号を検出して内部エコー信号とし、該内部エコー信号に基づいて前記被検体の表面から所定深さ位置の画像を生成する画像生成回路とを備えてなる超音波探傷装置において、
前記表面エコー合成回路での加算対象として、前記複数の超音波振動子のうち、列の両端部を除いた中央部の複数の超音波振動子を指定する表面エコー受信振動子指定回路を有し、前記表面エコー合成回路は、指定された超音波振動子の前記表面エコー信号を加算することを特徴とする超音波探傷装置。
An array probe in which a plurality of ultrasonic transducers that transmit and receive ultrasonic waves to and from a subject immersed in water via the water are arranged in a row, and is sent to each of the plurality of ultrasonic transducers. A transmitter for supplying a wave signal, a receiver for receiving a received signal from each of the plurality of ultrasonic transducers, and performing a delay process on the transmitted signal to the transmitter and receiving the signal by the receiver A delay time control circuit for performing delay processing on the received signal, and a surface echo signal reflected from the surface of the subject on the array probe side among the reflected echo signals output from the delay time control circuit is added A surface echo synthesis circuit; an interface gate setting circuit for setting a surface reference based on a signal added by the surface echo synthesis circuit; and an evaluation gate for setting an evaluation gate at a position delayed by a predetermined time from the surface reference. A gate setting circuit; a waveform synthesis circuit for adding the reflected echo signals output from the delay time control circuit; and an internal echo by detecting a signal at the evaluation gate position among the synthesized signals output from the waveform synthesis circuit An ultrasonic flaw detector comprising: an image generation circuit configured to generate an image at a predetermined depth position from the surface of the subject based on the internal echo signal as a signal;
As an addition target in the surface echo synthesis circuit, a surface echo reception transducer designating circuit for designating a plurality of ultrasonic transducers in a central portion excluding both ends of the row among the plurality of ultrasonic transducers is provided. The surface echo synthesis circuit adds the surface echo signals of a designated ultrasonic transducer, and an ultrasonic flaw detector.
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Publication number Priority date Publication date Assignee Title
JP2012029715A (en) * 2010-07-28 2012-02-16 Canon Inc Photoacoustic diagnostic apparatus
JP2019113320A (en) * 2017-12-21 2019-07-11 大同特殊鋼株式会社 Flaw detection range determination method of ultrasonic flaw detection device
JP7102726B2 (en) 2017-12-21 2022-07-20 大同特殊鋼株式会社 How to determine the flaw detection range of an ultrasonic flaw detector

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