JP2009127683A - Heat resistant vacuum heat insulation material - Google Patents

Heat resistant vacuum heat insulation material Download PDF

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JP2009127683A
JP2009127683A JP2007301350A JP2007301350A JP2009127683A JP 2009127683 A JP2009127683 A JP 2009127683A JP 2007301350 A JP2007301350 A JP 2007301350A JP 2007301350 A JP2007301350 A JP 2007301350A JP 2009127683 A JP2009127683 A JP 2009127683A
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heat
heat insulating
insulating material
resistant
resistant vacuum
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JP5301816B2 (en
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Yasushi Nagashima
靖 長嶋
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JTEKT Thermo Systems Corp
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Koyo Thermo Systems Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To maintain a heat insulation property of a heating chamber by composing an inner side face of an external packaging by a material with a small coefficient of linear expansion in comparison to an outer side face, and to prevent formation of a gap opened between an outer face of a wall surface and an inner side face of a heat resistant vacuum heat insulation material. <P>SOLUTION: A first member 11 arranged in a high temperature side is formed of a raw material with a small coefficient of linear expansion compared with a second member 12 arranged in a low temperature side, and after housing a core material 13 between the first member 11 and the second member 12, a vacuum state is provided in an interior. Deterioration of heat-insulating properties of the heating chamber 20 due to deformation of the heat resistant vacuum heat insulation material 1 in a thickness direction and separation from the heat resistant heat insulation material 21 is prevented by preventing occurrence of a large difference between a thermal deformation amount of the first member 11 and a thermal deformation amount of the second member 12. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

この発明は、加熱装置等の高温処理装置の外面に配置される断熱材に関し、特に、断熱体を収納した耐熱材料からなる密封外包体の内部を真空状態にした耐熱真空断熱材に関する。   The present invention relates to a heat insulating material disposed on the outer surface of a high temperature processing apparatus such as a heating device, and more particularly to a heat resistant vacuum heat insulating material in which a sealed outer package made of a heat resistant material containing a heat insulating body is evacuated.

一例として、フラットパネルディスプレイ用のガラス基板の製造工程には、処理物であるガラス基板を所定の温度（例えば、２２０℃〜２３０℃程度。）で加熱する熱処理が含まれる。このような熱処理には、壁面を耐熱断熱材で構成した加熱室を備え、処理物を収納した加熱室内を処理物の熱処理に適した温度に昇温する加熱装置が用いられる。   As an example, the manufacturing process of a glass substrate for a flat panel display includes a heat treatment for heating a glass substrate as a processed product at a predetermined temperature (for example, about 220 ° C. to 230 ° C.). For such heat treatment, a heating device is used that includes a heating chamber having a wall surface made of a heat-resistant heat insulating material and raises the temperature of the heating chamber containing the processed material to a temperature suitable for the heat treatment of the processed material.

加熱装置では、加熱室内の温度上昇に伴って耐熱断熱材の外面の温度も上昇し、加熱装置が設置されている室内の環境が悪化するだけでなく、加熱室の温度分布が不均一になるとともに熱損失が大きくなる。一方、加熱室の壁面に用いられるセラミックウールやロックウール等の一般的な耐熱断熱材は断熱性能が十分でなく、加熱室の壁面を厚くすることで外面の温度上昇を緩和しようとすると、加熱装置の大型化を招く。   In the heating device, as the temperature in the heating chamber rises, the temperature of the outer surface of the heat-resistant heat insulating material also rises, which not only deteriorates the environment in the room where the heating device is installed, but also makes the temperature distribution in the heating chamber uneven. At the same time, heat loss increases. On the other hand, general heat-resistant insulation materials such as ceramic wool and rock wool used for the wall surface of the heating chamber do not have sufficient heat insulation performance. Increases the size of the device.

そこで、加熱室の壁面を構成する耐熱断熱材の外側に、断熱性能に優れた真空断熱材を配置した加熱装置が提案されている（例えば、特許文献１参照。）。但し、民生用電気機器に使用される真空断熱材は、断熱材の成形体を収納した熱溶着性シートの袋状容器の内部を真空排気した後に密封したものであり、数１０〜１００℃程度まで昇温する熱処理用の加熱装置の外面に配置すると袋状容器が溶融して破断し、真空状態を維持できない。   Then, the heating apparatus which has arrange | positioned the vacuum heat insulating material excellent in heat insulation performance on the outer side of the heat-resistant heat insulating material which comprises the wall surface of a heating chamber is proposed (for example, refer patent document 1). However, the vacuum heat insulating material used for consumer electrical equipment is the one in which the inside of the bag-like container of the heat-weldable sheet containing the heat insulating material molded body is evacuated and sealed, and is about several tens to 100 ° C. If it is arranged on the outer surface of a heating apparatus for heat treatment that raises the temperature to a level, the bag-like container melts and breaks, and the vacuum state cannot be maintained.

このため、特許文献１に開示された加熱装置では、内部を真空状態にした袋状容器を、金属アルミニウム層を含む熱溶着性シートであって２〜６μｍの波長の赤外線の反射率が５０％以上、６〜１４μｍの波長の赤外線の反射率が２０％以下である熱溶着性シートで構成し、耐熱性及び断熱性を確保するとしている。
特開２００７−０９３１５７号公報 For this reason, in the heating apparatus disclosed in Patent Document 1, a bag-like container whose inside is in a vacuum state is a heat-weldable sheet including a metal aluminum layer and has an infrared reflectance of 2 to 6 μm and a reflectance of 50%. As mentioned above, it is supposed that the heat reflectivity and heat insulation properties are ensured by using a heat-weldable sheet having an infrared reflectance of 6 to 14 μm and a wavelength of 20% or less.
JP 2007-093157 A

しかしながら、特許文献１に開示された構成では、壁面の外側に配置される耐熱真空断熱材に熱溶着性シートの袋状容器を用いているため、壁面の外面温度が１００℃を超える加熱装置には適用できない。ところで、壁面の外側にこのような真空断熱材を配置すると、壁面と袋状容器との境界面の温度が著しく上昇し、その結果容易に１００℃を超えてしまうことも稀ではない。そこで、耐熱真空断熱材を金属製の外包体によって構成することが考えられる。   However, in the configuration disclosed in Patent Document 1, a bag-like container of a heat-weldable sheet is used for the heat-resistant vacuum heat insulating material disposed on the outside of the wall surface, so that the outer surface temperature of the wall surface exceeds 100 ° C. Is not applicable. By the way, when such a vacuum heat insulating material is arranged outside the wall surface, the temperature of the boundary surface between the wall surface and the bag-like container is remarkably increased, and as a result, it is not rare that it easily exceeds 100 ° C. Therefore, it can be considered that the heat-resistant vacuum heat insulating material is constituted by a metal outer package.

ところが、金属製の外包体を、特許文献1に開示された構成と同様に、内側面と外側面とを同一の材料で形成した場合、壁面の外面に接する内側面と外部に露出した外側面との温度差により、耐熱真空断熱材が内側に向かって凸となる熱変形を生じる。このため、壁面の外面と耐熱真空断熱材の内側面との間に外部に開放した間隙が形成され、加熱室の断熱性が低下する問題がある。   However, in the same manner as the configuration disclosed in Patent Document 1, when the outer surface made of metal is formed of the same material on the inner surface and the outer surface, the inner surface contacting the outer surface of the wall surface and the outer surface exposed to the outside Due to the temperature difference between the heat-resistant vacuum heat insulating material and the heat-resistant vacuum heat-insulating material, the heat deformation becomes convex toward the inside. For this reason, a gap opened to the outside is formed between the outer surface of the wall surface and the inner surface of the heat-resistant vacuum heat insulating material, and there is a problem that the heat insulating property of the heating chamber is lowered.

この発明の目的は、外包体の内側面を外側面の材料に比べて線膨張係数が小さい材料で構成し、内側面と外側面との熱変形量に大きな差が生じることを防ぎ、壁面の外面と耐熱真空断熱材の内側面との間に開放した間隙が形成されないようにして、加熱室の断熱性を維持することができる加熱装置用の耐熱真空断熱材を提供することにある。   The object of the present invention is to form the inner surface of the outer package from a material having a smaller linear expansion coefficient than the material of the outer surface, to prevent a large difference in the amount of thermal deformation between the inner surface and the outer surface, An object of the present invention is to provide a heat-resistant vacuum heat insulating material for a heating device that can maintain the heat insulating property of a heating chamber without forming an open gap between the outer surface and the inner surface of the heat-resistant vacuum heat insulating material.

この発明は、第１部材及び第２部材からなる外包体と芯材とを備えている。第１部材は、薄板状材料で構成され、高温側に配置される。第２部材は、薄板状材料で構成され、低温側に配置される。第１部材は、第２部材に比較して線膨張係数の小さい材料からなる。外包体は、第１部材及び第２部材の周囲を互いに接合し、内部を真空排気された後に密封される。芯材は、外包体の内部に収納される。   This invention is provided with the outer package body and core material which consist of a 1st member and a 2nd member. The first member is made of a thin plate material and is arranged on the high temperature side. The second member is made of a thin plate material and is disposed on the low temperature side. The first member is made of a material having a smaller linear expansion coefficient than the second member. The outer package is sealed after the periphery of the first member and the second member are joined together and the inside is evacuated. The core material is housed inside the outer package.

この構成では、高温側に配置される第１部材の線膨張係数が低温側に配置される第２部材の線膨張係数よりも小さいため、高温側と低温側との温度差によって生じる第１部材の熱変形量と第２部材の熱変形量との差は、第１部材と第２部材とが同じ材質からなる場合に比べて小さい。高温側と低温側との温度差に応じて第１部材及び第２部材の材質を適宜選択することで、温度上昇後における第１部材と第２部材との長さが略等しくなり、外包体が厚さ方向に変形することがない。   In this configuration, since the linear expansion coefficient of the first member arranged on the high temperature side is smaller than the linear expansion coefficient of the second member arranged on the low temperature side, the first member generated by the temperature difference between the high temperature side and the low temperature side. The difference between the amount of thermal deformation and the amount of thermal deformation of the second member is smaller than when the first member and the second member are made of the same material. By appropriately selecting the materials of the first member and the second member according to the temperature difference between the high temperature side and the low temperature side, the lengths of the first member and the second member after the temperature increase become substantially equal, and the envelope Does not deform in the thickness direction.

上記の構成において、第１部材及び第２部材を薄板状金属材料で構成してもよい。この場合には、第１部材及び第２部材の周囲を溶接して外包体を形成してもよい。これらによって、１００℃程度の温度で外包体が溶融することがなく、高い耐熱性を得ることができる。例えば、第１部材を線膨張係数が１１×１０-6／℃の金属材料で構成し、第２部材を線膨張係数が１７×１０-6／℃の金属材料で構成することができる。 In the above configuration, the first member and the second member may be formed of a thin plate metal material. In this case, the outer periphery may be formed by welding the periphery of the first member and the second member. By these, the outer package does not melt at a temperature of about 100 ° C., and high heat resistance can be obtained. For example, the first member can be made of a metal material having a linear expansion coefficient of 11 × 10 −6 / ° C., and the second member can be made of a metal material having a linear expansion coefficient of 17 × 10 −6 / ° C.

この発明によれば、高温側の内側面が低温側の外側面よりも大きく伸びることがなく、高温側に向かって凸となる熱変形を生じることを防止でき、断熱性を維持することができる。   According to the present invention, the inner surface on the high temperature side does not extend larger than the outer surface on the low temperature side, it is possible to prevent thermal deformation that becomes convex toward the high temperature side, and heat insulation can be maintained. .

図１は、この発明の実施形態に係る耐熱真空断熱材を適用した加熱装置の断面図である。加熱装置１０は、一例として、複数枚のガラス基板等の板状の処理物を例えば２２０℃〜２３０℃程度の処理温度に一定時間維持する熱処理を行う。このため、加熱装置１０は、耐熱断熱材２１〜２４及び耐熱真空断熱材１〜４を備えている。   FIG. 1 is a cross-sectional view of a heating apparatus to which a heat-resistant vacuum heat insulating material according to an embodiment of the present invention is applied. For example, the heating apparatus 10 performs a heat treatment for maintaining a plate-like processed material such as a plurality of glass substrates at a processing temperature of, for example, about 220 ° C. to 230 ° C. for a certain period of time. For this reason, the heating apparatus 10 is provided with the heat-resistant heat insulating materials 21-24 and the heat-resistant vacuum heat insulating materials 1-4.

耐熱断熱材２１〜２４は、加熱室２０を包囲する壁面を構成している。加熱室２０には、複数枚の処理物が収納される。加熱室２０は、図示しないヒータにより、処理温度を維持するように加熱される。耐熱断熱材２１〜２４は、例えば、グラスウール、ロックウール又はセラミックウール等の耐熱性に優れた断熱材である。耐熱断熱材２１〜２４は、内面が２２０℃〜２３０℃の加熱室２０に露出しているが、その断熱効果により外面の温度は５０℃前後となる。   The heat-resistant heat insulating materials 21 to 24 constitute a wall surface that surrounds the heating chamber 20. A plurality of processed products are stored in the heating chamber 20. The heating chamber 20 is heated by a heater (not shown) so as to maintain the processing temperature. The heat resistant heat insulating materials 21 to 24 are heat insulating materials having excellent heat resistance such as glass wool, rock wool, or ceramic wool. Although the inner surfaces of the heat-resistant heat insulating materials 21 to 24 are exposed to the heating chamber 20 having a temperature of 220 ° C. to 230 ° C., the temperature of the outer surface becomes approximately 50 ° C. due to the heat insulating effect.

耐熱真空断熱材１〜４は、同様の構成であるため、以下に耐熱真空断熱材１について説明する。耐熱真空断熱材１は、第１部材１１、第２部材１２及び芯材１３からなる。   Since the heat-resistant vacuum heat insulating materials 1 to 4 have the same configuration, the heat-resistant vacuum heat insulating material 1 will be described below. The heat-resistant vacuum heat insulating material 1 includes a first member 11, a second member 12, and a core material 13.

第１部材１１及び第２部材１２は、それぞれ金属製の矩形薄板材（例えば、板厚０．１ｍｍ以下。）の４辺を例えば溶接等によって接合したものであり、中空体としてのこの発明の外包体を構成している。耐熱真空断熱材１は、第１部材１１と第２部材１２との間の空間を真空状態とし、この空間に芯材１３を収納している。   Each of the first member 11 and the second member 12 is formed by joining four sides of a metallic rectangular thin plate material (for example, a plate thickness of 0.1 mm or less) by, for example, welding or the like. The outer package is configured. In the heat-resistant vacuum heat insulating material 1, the space between the first member 11 and the second member 12 is in a vacuum state, and the core material 13 is accommodated in this space.

一例として、第１部材１1は線膨張係数が１１×１０-6／℃であるＳＵＳ４３０を素材としており、第２部材１２は線膨張係数が１７×１０-6／℃であるＳＵＳ３０４を素材としている。 As an example, the first member 11 is made of SUS430 having a linear expansion coefficient of 11 × 10 −6 / ° C., and the second member 12 is made of SUS304 having a linear expansion coefficient of 17 × 10 −6 / ° C. .

芯材１３は、グラスウール、ロックウール若しくはセラミックウール等の耐熱性に優れた断熱材、発泡体等の多孔質体、又は微粉末で構成されており、第１部材１１と第２部材１２との間の空間の体積を確保している。   The core material 13 is made of a heat insulating material having excellent heat resistance such as glass wool, rock wool, or ceramic wool, a porous material such as a foam, or fine powder, and includes a first member 11 and a second member 12. The volume of the space between is secured.

耐熱真空断熱材１は、第１部材１１の外面を耐熱断熱材２１の外側面に接触させ、第２部材１２の外面を外部に露出して配置されている。したがって、第１部材１１が高温側に配置され、第２部材１２が低温側に配置されている。   The heat-resistant vacuum heat insulating material 1 is disposed such that the outer surface of the first member 11 is in contact with the outer surface of the heat-resistant heat insulating material 21 and the outer surface of the second member 12 is exposed to the outside. Accordingly, the first member 11 is disposed on the high temperature side, and the second member 12 is disposed on the low temperature side.

第１部材１１の温度は、耐熱断熱材２１との接触によって容易に１００℃を超える温度に上昇する。第１部材１１の熱は、互いに当接した周囲の端面を介して第２部材１２に伝導する。しかし、第１部材１１と第２部材１２とが接触していない外包体の中空部分は、真空状態であり、且つ芯材１３が収納されているため、第１部材１１の熱は対流や輻射によっては第２部材１２に伝播しない。したがって、第２部材１２の温度は、加熱装置１０が設置されている室内の温度よりも高いが第１部材１1の温度に比較して十分に低く、第１部材１１の温度との間に大きな差が生じる。   The temperature of the first member 11 easily rises to a temperature exceeding 100 ° C. due to contact with the heat resistant heat insulating material 21. The heat of the first member 11 is conducted to the second member 12 through the peripheral end surfaces in contact with each other. However, since the hollow portion of the outer package in which the first member 11 and the second member 12 are not in contact is in a vacuum state and the core material 13 is housed, the heat of the first member 11 is convection or radiation. Does not propagate to the second member 12. Therefore, the temperature of the second member 12 is higher than the temperature in the room where the heating device 10 is installed, but is sufficiently lower than the temperature of the first member 11, and is higher than the temperature of the first member 11. There is a difference.

第１部材１１及び第２部材１２は、寸法及び温度上昇に比例した熱変形量で伸びるが、第１部材１１は第２部材１２に比較して線膨張係数が小さい素材で構成されており、両者に大きな温度差が生じても、熱変形量には大きな差を生じない。このため、熱処理中に耐熱真空断熱材１が厚さ方向に変形することがなく、第１部材１１の内側面が耐熱断熱材２１の外側面から離間することによる加熱室２０の断熱性の低下を生じることがない。   The first member 11 and the second member 12 extend with a thermal deformation amount proportional to the increase in size and temperature, but the first member 11 is made of a material having a smaller linear expansion coefficient than the second member 12, Even if a large temperature difference occurs between the two, there is no significant difference in the amount of thermal deformation. For this reason, the heat resistant vacuum heat insulating material 1 is not deformed in the thickness direction during the heat treatment, and the heat insulating property of the heating chamber 20 is deteriorated due to the inner surface of the first member 11 being separated from the outer surface of the heat resistant heat insulating material 21. Will not occur.

これに対して、図２に示す比較例の加熱装置１００のように、第１部材１１１及び第２部材１１２が同一素材の耐熱真空断熱材１１０では、高温側の第１部材１１１の膨張量が低温側の第２部材１１２の膨張量よりも大きくなり、高温側に向かって凸となる熱変形を生じる。この熱変形によって耐熱真空断熱材１１０は、内側面の周縁部が耐熱断熱材２１〜２４の外側面から離間し、耐熱断熱材２１〜２４の外側面との間に外部に開放した間隙が形成され、加熱室２０の断熱性が低下する。   On the other hand, in the heat-resistant vacuum heat insulating material 110 in which the first member 111 and the second member 112 are the same material as in the heating device 100 of the comparative example shown in FIG. 2, the expansion amount of the first member 111 on the high temperature side is high. The amount of expansion of the second member 112 on the low temperature side is larger than the amount of expansion, causing thermal deformation that becomes convex toward the high temperature side. Due to this thermal deformation, the heat-resistant vacuum heat insulating material 110 has the inner peripheral surface spaced apart from the outer surface of the heat-resistant heat insulating materials 21 to 24, and an open gap is formed between the heat-resistant heat insulating materials 21 to 24 and the outer surface. As a result, the heat insulation of the heating chamber 20 decreases.

本願発明の実施形態の加熱装置１０では、耐熱真空断熱材１の変形による加熱室２０の断熱製の低下を生じないため、加熱装置１０の熱効率が低下することがない。また、加熱装置１０の設置場所の温度上昇による作業環境の悪化を抑えることができる。   In the heating device 10 according to the embodiment of the present invention, since the heat-resistant vacuum heat insulating material 1 is not deformed and the heat insulation of the heating chamber 20 is not lowered, the thermal efficiency of the heating device 10 is not lowered. In addition, it is possible to suppress the deterioration of the working environment due to the temperature rise at the installation location of the heating device 10.

図３（Ａ）〜（Ｄ）は、この発明の実施形態に係る耐熱真空断熱材の製造工程の一例を示す図である。耐熱真空断熱材１の製造時には、まず、図３（Ａ）に示すように、金属薄板である第１部材１１及び第２部材１２を同一形状の矩形に裁断後に重ね合わせ、３辺３０Ａ〜３０Ｃの周縁部を溶接等によって接合して袋体３０を形成する。   Drawing 3 (A)-(D) is a figure showing an example of a manufacturing process of a heat-resistant vacuum heat insulating material concerning an embodiment of this invention. At the time of manufacturing the heat-resistant vacuum heat insulating material 1, first, as shown in FIG. 3 (A), the first member 11 and the second member 12 that are thin metal plates are cut into a rectangular shape and overlapped, and then the three sides 30A to 30C. Are joined together by welding or the like to form the bag 30.

次いで、図３（Ｂ）に示すように、袋体３０の接合されていない辺３０Ｄを開口させて、袋体３０の内部に芯材１３を挿入する。   Next, as shown in FIG. 3B, the side 30 D that is not joined to the bag body 30 is opened, and the core member 13 is inserted into the bag body 30.

この後、図３（Ｃ）に示すように内部に芯材１３を収納した袋体３０を図示しない真空槽に収納して真空排気した後、図３（Ｄ）に示すように開放されている辺３０Ｄを溶接等によって封止することにより、耐熱真空断熱材１が完成する。   After that, as shown in FIG. 3 (C), the bag body 30 containing the core material 13 is housed in a vacuum tank (not shown) and evacuated, and then opened as shown in FIG. 3 (D). By sealing the side 30D by welding or the like, the heat-resistant vacuum heat insulating material 1 is completed.

なお、加熱装置１０において、耐熱真空断熱材２〜４は、それぞれ第１部材の外面を耐熱断熱材２２〜２４のそれぞれの外側面に接触させて配置されている。但し、耐熱真空断熱材１〜４の全てが必須ではなく、加熱装置１０の設置状態等に応じて耐熱真空断熱材１〜４のうちの少なくとも１つが配置されていればよい。   In addition, in the heating apparatus 10, the heat-resistant vacuum heat insulating materials 2-4 are arrange | positioned, respectively, making the outer surface of a 1st member contact each outer surface of the heat-resistant heat insulating materials 22-24. However, all of the heat-resistant vacuum heat insulating materials 1 to 4 are not essential, and at least one of the heat-resistant vacuum heat insulating materials 1 to 4 may be arranged depending on the installation state of the heating device 10 or the like.

また、第１部材１１及び第２部材１２の素材は、熱処理時における両者の上昇温度に応じて、熱変形量に大きな差を生じることのないように適宜選択することができ、耐熱性が満足されることを条件に非金属素材を用いることもでき、薄板状材料は平板に限るものでもない。   In addition, the materials of the first member 11 and the second member 12 can be selected as appropriate so as not to cause a large difference in the amount of thermal deformation according to the temperature rises during the heat treatment, and the heat resistance is satisfactory. However, a non-metallic material can also be used on condition that the thin plate material is not limited to a flat plate.

さらに、第１部材１１と第２部材１２との接合方法は、溶接に限るものではなく、内部の気密性が維持されることを条件に、接着等の他の接合方法を用いることもできる。   Furthermore, the joining method of the 1st member 11 and the 2nd member 12 is not restricted to welding, Other joining methods, such as adhesion | attachment, can also be used on the condition that internal airtightness is maintained.

加えて、加熱装置１０の使用温度によっては、耐熱断熱材２１を使用せず、耐熱真空断熱材１のみを断熱手段とすることできる。   In addition, depending on the operating temperature of the heating device 10, the heat-resistant heat insulating material 21 is not used, and only the heat-resistant vacuum heat insulating material 1 can be used as the heat insulating means.

上述の実施形態の説明は、すべての点で例示であって、制限的なものではないと考えるべきである。本発明の範囲は、上述の実施形態ではなく、特許請求の範囲によって示される。さらに、本発明の範囲には、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。   The description of the above-described embodiment is an example in all respects, and should be considered as not restrictive. The scope of the present invention is shown not by the above embodiments but by the claims. Furthermore, the scope of the present invention is intended to include all modifications within the meaning and scope equivalent to the scope of the claims.

この発明の実施形態に係る耐熱真空断熱材を適用した加熱装置の断面図である。It is sectional drawing of the heating apparatus to which the heat-resistant vacuum heat insulating material which concerns on embodiment of this invention is applied. 比較例の耐熱真空断熱材を適用した加熱装置の断面図である。It is sectional drawing of the heating apparatus to which the heat-resistant vacuum heat insulating material of a comparative example is applied. （Ａ）〜（Ｃ）は、この発明の実施形態に係る耐熱真空断熱材の製造工程の一例を示す図である。(A)-(C) are figures which show an example of the manufacturing process of the heat-resistant vacuum heat insulating material which concerns on embodiment of this invention.

符号の説明Explanation of symbols

１ 耐熱真空断熱材
１０ 加熱装置
１１ 第１部材
１２ 第２部材
１３ 芯材
２０ 加熱室
２１ 耐熱断熱材 DESCRIPTION OF SYMBOLS 1 Heat resistant vacuum heat insulating material 10 Heating apparatus 11 1st member 12 2nd member 13 Core material 20 Heating chamber 21 Heat resistant heat insulating material

Claims (4)

高温側に配置される薄板状材料の第１部材と、低温側に配置される薄板状材料の第２部材と、からなり、前記第１部材及び前記第２部材の周囲を互いに接合し、内部を真空排気された後に密封される外包体と、
前記外包体の内部に収納される芯材と、を備え、
前記第１部材は、前記第２部材に比較して線膨張係数の小さい材料からなる耐熱真空断熱材。 A first member made of a thin plate-like material arranged on the high temperature side and a second member made of a thin plate-like material arranged on the low temperature side, and the periphery of the first member and the second member are joined together, An envelope that is sealed after being evacuated,
A core material housed inside the outer package,
The first member is a heat-resistant vacuum heat insulating material made of a material having a smaller linear expansion coefficient than the second member. 前記第１部材及び前記第２部材は、薄板状金属材料からなる請求項１に記載の耐熱真空断熱材。   The heat-resistant vacuum heat insulating material according to claim 1, wherein the first member and the second member are made of a thin plate metal material. 前記外包体は、前記第１部材及び前記第２部材の周囲を溶接してなる請求項２に記載の耐熱真空断熱材。   The heat-resistant vacuum heat insulating material according to claim 2, wherein the outer package is formed by welding the periphery of the first member and the second member. 前記芯材は、耐熱断熱材料からなる請求項１乃至３の何れかに記載の耐熱真空断熱材。   The heat resistant vacuum heat insulating material according to any one of claims 1 to 3, wherein the core material is made of a heat resistant heat insulating material.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180008915A (en) * 2015-04-28 2018-01-24 파나소닉 아이피 매니지먼트 가부시키가이샤 Vacuum heat-insulating material, and heat-insulating container, dwelling wall, transport machine, hydrogen transport tanker, and lng transport tanker equipped with vacuum heat-insulating material
JP2019044864A (en) * 2017-09-01 2019-03-22 トヨタ自動車株式会社 Heat insulation panel

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5426445B2 (en) * 2010-03-25 2014-02-26 株式会社東芝 Vacuum insulation panel
WO2013065162A1 (en) * 2011-11-03 2013-05-10 三菱電機株式会社 Vacuum heat insulating material, method for manufacturing same, heat retaining tank using same, and heat pump water heater
DE102011087037A1 (en) * 2011-11-24 2013-05-29 BSH Bosch und Siemens Hausgeräte GmbH Heat insulation housing for a refrigeration device
DE102013104450A1 (en) * 2013-05-01 2014-12-24 Gregor Tsiaprakas External insulation for rotary kilns, special equipment for insulation

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10141864A (en) * 1996-11-05 1998-05-29 Kobe Steel Ltd Heat insulating device is not isotropic pressurizer
JP2001021094A (en) * 1999-07-06 2001-01-26 Dainippon Printing Co Ltd Heat-insulating composite sheet and heat-insulating member
JP2001277396A (en) * 2000-03-31 2001-10-09 Dainippon Printing Co Ltd Heat insulation decorative material and heat insulation decorative member
JP2002016784A (en) * 2000-06-30 2002-01-18 Sharp Corp Facsimile terminal
JP2002310383A (en) * 2001-04-16 2002-10-23 Matsushita Refrig Co Ltd Vacuum heat insulation material, vacuum heat insulation material manufacturing method, note type computer, refrigerating appliance, electric water heater, and over- range
JP2005127433A (en) * 2003-10-24 2005-05-19 Zojirushi Corp Vacuum insulating panel
JP2006017165A (en) * 2004-06-30 2006-01-19 Seven Seven:Kk Manufacturing method for vacuum heat insulating material and heat insulator
JP2007016835A (en) * 2005-07-06 2007-01-25 Matsushita Electric Ind Co Ltd Device applying vacuum heat insulating material
JP2007093157A (en) * 2005-09-30 2007-04-12 Matsushita Environment Airconditioning Eng Co Ltd High temperature treatment device
JP2007315707A (en) * 2006-05-26 2007-12-06 Koyo Thermo System Kk Heating device

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10141864A (en) * 1996-11-05 1998-05-29 Kobe Steel Ltd Heat insulating device is not isotropic pressurizer
JP2001021094A (en) * 1999-07-06 2001-01-26 Dainippon Printing Co Ltd Heat-insulating composite sheet and heat-insulating member
JP2001277396A (en) * 2000-03-31 2001-10-09 Dainippon Printing Co Ltd Heat insulation decorative material and heat insulation decorative member
JP2002016784A (en) * 2000-06-30 2002-01-18 Sharp Corp Facsimile terminal
JP2002310383A (en) * 2001-04-16 2002-10-23 Matsushita Refrig Co Ltd Vacuum heat insulation material, vacuum heat insulation material manufacturing method, note type computer, refrigerating appliance, electric water heater, and over- range
JP2005127433A (en) * 2003-10-24 2005-05-19 Zojirushi Corp Vacuum insulating panel
JP2006017165A (en) * 2004-06-30 2006-01-19 Seven Seven:Kk Manufacturing method for vacuum heat insulating material and heat insulator
JP2007016835A (en) * 2005-07-06 2007-01-25 Matsushita Electric Ind Co Ltd Device applying vacuum heat insulating material
JP2007093157A (en) * 2005-09-30 2007-04-12 Matsushita Environment Airconditioning Eng Co Ltd High temperature treatment device
JP2007315707A (en) * 2006-05-26 2007-12-06 Koyo Thermo System Kk Heating device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180008915A (en) * 2015-04-28 2018-01-24 파나소닉 아이피 매니지먼트 가부시키가이샤 Vacuum heat-insulating material, and heat-insulating container, dwelling wall, transport machine, hydrogen transport tanker, and lng transport tanker equipped with vacuum heat-insulating material
US10520135B2 (en) 2015-04-28 2019-12-31 Panasonic Intellectual Property Management Co., Ltd. Vacuum heat-insulating material, and heat-insulting container, dwelling wall, transport machine, hydrogen transport tanker, and LNG transport tanker equipped with vacuum heat-insulating material
KR102094158B1 (en) * 2015-04-28 2020-04-24 파나소닉 아이피 매니지먼트 가부시키가이샤 Vacuum heat-insulating material, and heat-insulating container, dwelling wall, transport machine, hydrogen transport tanker, and lng transport tanker equipped with vacuum heat-insulating material
JP2019044864A (en) * 2017-09-01 2019-03-22 トヨタ自動車株式会社 Heat insulation panel
JP7000747B2 (en) 2017-09-01 2022-01-19 トヨタ自動車株式会社 Insulation panel

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