JP2009068725A - Induction heating device for strip-shaped body - Google Patents

Induction heating device for strip-shaped body Download PDF

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JP2009068725A
JP2009068725A JP2007234248A JP2007234248A JP2009068725A JP 2009068725 A JP2009068725 A JP 2009068725A JP 2007234248 A JP2007234248 A JP 2007234248A JP 2007234248 A JP2007234248 A JP 2007234248A JP 2009068725 A JP2009068725 A JP 2009068725A
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layer
induction heating
heat
belt
strip
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JP5148216B2 (en
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Hisatoshi Wakabayashi
久幹 若林
Hirohisa Kawamura
浩久 川村
Junji Yamada
淳二 山田
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Nippon Steel Corp
Nippon Steel Engineering Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an induction heating device for a strip-shaped body capable of improving efficiency of induction heating by reducing a thickness of a heat insulating material surrounding the strip-shaped body. <P>SOLUTION: In this device for induction-heating the strip-shaped body by disposing a protective structure inside of an induction heating coil 19, and passing through the strip-shaped body composed of ferrous or non-ferrous metal inside of the protective structure, the protective structure has a cylindrical three-layered structure, and has a first layer 12 composed of a low heat conductive heat insulating material, a second layer 13 composed of a heat-resistant board having mechanical strength, and a third layer 14 for sealing an atmospheric gas, from a strip-shaped body side toward the induction heating coil 19. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、例えば、鉄鋼製造ライン等で鋼帯を閉鎖された空間内を挿通させながら高周波誘導加熱で加熱する場合に使用される帯状体の誘導加熱装置に関する。 The present invention relates to an induction heating device for a belt-like body that is used, for example, when heating by high-frequency induction heating while passing through a closed space in a steel production line or the like.

例えば、薄鋼板(鋼帯)等は、冷間圧延、冷間引き抜き又は冷延伸されると加工硬化するので、それらを再結晶させるために、加熱して焼きなます必要がある。このため、特許文献1や特許文献2に記載のように、鋼帯を非酸化性雰囲気で筒状体(一般に「スロート」、「ダクト」と称される)内を通過させ、筒状体の周囲に巻かれたコイルに高周波電流を流し、加熱している。
この場合、鋼帯からの輻射熱でコイルが加熱されるのを防止し、内部を空気から遮断するため、非導体で筒状物を形成し、その内側に断熱材及び耐火材を配置し、筒状体及びその外側に巻かれたコイルの保護を行っている。
For example, thin steel plates (steel strips) work harden when cold-rolled, cold-drawn, or cold-drawn, and therefore need to be heated and annealed to recrystallize them. For this reason, as described in Patent Document 1 and Patent Document 2, the steel strip is passed through a cylindrical body (generally referred to as “throat” or “duct”) in a non-oxidizing atmosphere, A high-frequency current is passed through the coil wound around and heated.
In this case, in order to prevent the coil from being heated by the radiant heat from the steel strip, and to cut off the interior from the air, a non-conductor cylindrical member is formed, and a heat insulating material and a refractory material are disposed inside the tube, It protects the coil and the coil wound around it.

特開平04−59931号公報Japanese Patent Laid-Open No. 04-59931 特表2002−538310号公報Special Table 2002-538310 Publication

しかしながら、従来の耐火材や断熱材を使って鋼帯からの熱を遮断しようとすると、断熱材等の厚みが厚くなり、誘導加熱によって鋼帯に供給される電力は、コイルから鋼帯への距離が大きくなると効率が低下し、結果として鋼帯への誘導加熱の効率が落ちるという問題があった。 However, when trying to cut off the heat from the steel strip using conventional refractory materials and heat insulating materials, the thickness of the heat insulating material etc. becomes thick, and the power supplied to the steel strip by induction heating is from the coil to the steel strip. As the distance increases, the efficiency decreases, and as a result, there is a problem that the efficiency of induction heating to the steel strip decreases.

本発明はかかる事情に鑑みてなされたもので、帯状体を囲む断熱材の厚みを薄くし、誘導加熱の効率を向上させた帯状体の誘導加熱装置を提供することを目的とする。 This invention is made | formed in view of this situation, and it aims at providing the induction heating apparatus of the strip | belt-shaped body which made the thickness of the heat insulating material surrounding a strip | belt-shaped body thin, and improved the efficiency of induction heating.

前記目的に沿う本発明に係る帯状体の誘導加熱装置は、誘導加熱コイルの内側に保護構造体を配置し、該保護構造体の内側に鉄(鉄鋼薄板、ステンレス箔、ステンレス薄板、合金鋼薄板を含む)又は非鉄金属(例えば、銅箔、銅薄板、アルミ箔、アルミ薄板等を含む)からなる帯状体を通過させて、該帯状体を誘導加熱する装置において、
前記保護構造体は筒状の3層構造を有し、各層を前記帯状体側から前記誘導加熱コイルに向かって第1層、第2層、第3層とするとき、前記第1層から前記第3層が以下の構造となっている。
第1層:平均粒径1〜100nmの超微粉末の圧粉体からなり、800℃における熱伝導率が0.02W/m・K以上、0.1W/m・K以下の低熱伝導断熱材。
第2層:耐熱温度400℃以上、常温における圧縮強度400MPa以上、常温における曲げ強度100MPa以上の機械的強度を有する耐熱ボード。
第3層:セラミック繊維の織布に耐熱温度200℃以上の樹脂又はゴムが融着されたシール材。
なお、第1層〜第3層は絶縁体から構成され、電磁誘導を受けない材質であることは当然である。
The induction heating device for a belt-like body according to the present invention that meets the above object includes a protective structure disposed inside an induction heating coil, and iron (steel sheet, stainless foil, stainless sheet, alloy steel sheet) inside the protection structure. In a device for inductively heating the band by passing a band made of a non-ferrous metal (including copper foil, copper thin plate, aluminum foil, aluminum thin plate, etc.),
The protective structure has a cylindrical three-layer structure, and when each layer is a first layer, a second layer, and a third layer from the strip side toward the induction heating coil, the first layer to the first layer The three layers have the following structure.
First layer: a low thermal conductive heat insulating material consisting of an ultra-fine powder compact having an average particle size of 1 to 100 nm and having a thermal conductivity at 800 ° C. of 0.02 W / m · K or more and 0.1 W / m · K or less. .
Second layer: a heat-resistant board having a mechanical strength of a heat-resistant temperature of 400 ° C. or higher, a compressive strength of 400 MPa or higher at normal temperature, and a bending strength of 100 MPa or higher at normal temperature.
Third layer: a sealing material in which a resin or rubber having a heat resistant temperature of 200 ° C. or higher is fused to a woven fabric of ceramic fibers.
Of course, the first to third layers are made of an insulator and are not subjected to electromagnetic induction.

ここで、前記第1層は平均粒径1〜100nmの超微粉末の圧粉体からなり、少なくとも、シリカの超微粉末60質量%以上、酸化チタンの超微粉末30質量%以上からなる前記低熱伝導断熱材とすることができる。
また、前記第1層を平均粒径1〜100nmの超微粉末の圧粉体からなり、少なくとも、シリカの超微粉末52質量%以上、ジルコニアの超微粉末25質量%以上、アルミナの超微粉末20質量%以上からなる前記低熱伝導断熱材とすることもできる。
そして、前記第1層の厚みは6〜15mm、前記第2層の厚みは20〜40mm、前記第3層の厚みは1〜5mmとするのが好ましい。また、第2層は筒状体の形状を保持するための材料であって、強度を有する材料を使用するが、第1層で断熱されているので、高い耐熱性は必要としない。また、第3層はこの筒状体のシールを行うもので、最外部であるので、耐熱性は問題ではない。
Here, the first layer is made of an ultra-fine powder compact having an average particle diameter of 1 to 100 nm, and is made of at least 60% by mass of ultra-fine powder of silica and 30% by mass or more of ultra-fine powder of titanium oxide. It can be a low thermal conductive insulation.
The first layer is made of an ultra-fine powder compact having an average particle diameter of 1 to 100 nm, and includes at least 52 mass% or more of silica ultra-fine powder, 25 mass% or more of zirconia ultra-fine powder, and ultra-fine alumina. It can also be set as the said low heat conductive heat insulating material which consists of 20 mass% or more of powders.
The thickness of the first layer is preferably 6 to 15 mm, the thickness of the second layer is 20 to 40 mm, and the thickness of the third layer is preferably 1 to 5 mm. The second layer is a material for maintaining the shape of the cylindrical body, and a material having strength is used. However, since the second layer is thermally insulated by the first layer, high heat resistance is not required. Further, the third layer seals this cylindrical body and is the outermost part, so heat resistance is not a problem.

本発明に係る帯状体の誘導加熱装置において、前記第1層の更に内側(前記誘導加熱コイルから前記帯状体側に向かう側)に最高使用温度(耐熱温度)が1000℃以上(厚みは、例えば10〜50mm)のセラミックファイバーブランケットからなる層を設けることができる。これは、本発明においては、第1層に極めて断熱性のよい材料を使用し、第1層によって熱遮断を行うが、このような材料は1000℃を超える高温での耐熱性がない。そこで、最高使用温度が1000℃を超える場合には、前記第1層の内側に耐熱性を有するセラミックファイバーブランケットを配置し、第1層を保護する。すなわち、セラミックファイバーブランケットを内張りすることによって、第1層の低熱伝導断熱材が高温度に加熱されるのを防止し、最高使用温度以下に保持できる。なお、このセラミックファイバーブランケットの層は炉温によって厚みが異なる。 In the induction heating apparatus for a strip according to the present invention, the maximum use temperature (heat-resistant temperature) is 1000 ° C. or more (thickness is, for example, 10) on the further inner side (side toward the strip from the induction heating coil) of the first layer. ~ 50 mm) ceramic fiber blanket layer can be provided. This is because, in the present invention, a material having a very good heat insulating property is used for the first layer, and the first layer performs heat insulation, but such a material has no heat resistance at a high temperature exceeding 1000 ° C. Therefore, when the maximum use temperature exceeds 1000 ° C., a ceramic fiber blanket having heat resistance is disposed inside the first layer to protect the first layer. That is, by lining the ceramic fiber blanket, it is possible to prevent the first layer of the low thermal conductive heat insulating material from being heated to a high temperature and to keep it below the maximum operating temperature. The thickness of the ceramic fiber blanket layer varies depending on the furnace temperature.

また、本発明に係る帯状体の誘導加熱装置において、セラミックファイバーブランケットの層の更に内層(最内層)にセラミック繊維の織布の層(厚みは、例えば0.5〜2mm)を設けることもできる。これによって、セラミックファイバーブランケットから発生する粉塵の飛散を防止できる。 In addition, in the induction heating apparatus for a belt-like body according to the present invention, a ceramic fiber woven fabric layer (thickness is, for example, 0.5 to 2 mm) can be further provided on the inner layer (innermost layer) of the ceramic fiber blanket layer. . Thereby, scattering of the dust generated from the ceramic fiber blanket can be prevented.

請求項1〜6記載の帯状体の誘導加熱装置においては、機能を分担した第1層〜第3層で筒状体を構成しているので、従来の耐火材を用いて構成された筒状体よりその厚みが減少でき、筒状体の厚みを薄くすることで誘導加熱の効率を向上できる。
また、全体として筒状体が軽量、薄型化するので、機器の取付けやメンテンナンスが容易となる。
In the induction heating apparatus for the belt-like body according to claims 1 to 6, since the cylindrical body is constituted by the first layer to the third layer that share the function, the cylindrical shape constituted by using a conventional refractory material The thickness can be reduced from the body, and the efficiency of induction heating can be improved by reducing the thickness of the cylindrical body.
Moreover, since the cylindrical body is light and thin as a whole, it is easy to attach and maintain the equipment.

更に、請求項1〜6記載の帯状体の誘導加熱装置においては、以下の効果を有する。
第3層をセラミック繊維の織布に耐熱温度200℃以上の樹脂又はゴムが融着されたシール材とすることで、雰囲気ガスの漏洩を防止できるとともに、炉休止時に室温までの冷却及び炉温への加熱に伴う熱膨張と収縮が抑えられ、筒状体を破損する恐れがない。
第1層に低熱伝導断熱材を用いることによって、断熱材の全体的厚み(即ち、筒状体の総厚み)を小さくできる。
第2層に支持部材として耐熱ボードを用いることによって、形状の保持が可能であり、機械的強度を保つことができる。
Furthermore, in the induction heating apparatus of the strip | belt-shaped body of Claims 1-6, it has the following effects.
By making the third layer a sealing material in which a resin or rubber having a heat resistant temperature of 200 ° C. or higher is fused to a woven fabric of ceramic fibers, it is possible to prevent leakage of atmospheric gas, and to cool down to the room temperature when the furnace is stopped. The thermal expansion and contraction associated with heating is suppressed, and there is no possibility of damaging the cylindrical body.
By using a low thermal conductive heat insulating material for the first layer, the overall thickness of the heat insulating material (that is, the total thickness of the cylindrical body) can be reduced.
By using a heat resistant board as a supporting member for the second layer, the shape can be maintained and the mechanical strength can be maintained.

特に、請求項5記載の帯状体の誘導加熱装置においては、低熱伝導断熱材の内側(誘導加熱コイルから帯状体側に向かう側)に、セラミックファイバーブランケットを用いることによって、第1層の低熱伝導断熱材が高温度に加熱されるのを防止し、最高使用温度以下に保持できる。
また、請求項6記載の帯状体の誘導加熱装置においては、最内層にセラミック繊維の織布の層を設けることによって、セラミックファイバーブランケットからの粉塵の飛散を防止できる。
In particular, in the induction heating apparatus for a strip-like body according to claim 5, by using a ceramic fiber blanket on the inner side of the low-thermal-conduction heat insulating material (side facing the strip-like body from the induction heating coil), the first layer of low-heat conduction thermal insulation. The material can be prevented from being heated to a high temperature and kept below the maximum operating temperature.
In addition, in the induction heating apparatus for a belt-like body according to claim 6, the scattering of dust from the ceramic fiber blanket can be prevented by providing the ceramic fiber woven fabric layer as the innermost layer.

続いて、添付した図面を参照しつつ、本発明を具体化した実施の形態につき説明し、本発明の理解に供する。
ここで、図1(A)は最高使用温度が1000℃以下の場合の本発明の一実施の形態に係る帯状体の誘導加熱装置の部分断面図、図1(B)は最高使用温度が1000℃を超える場合の本発明の一実施の形態に係る帯状体の誘導加熱装置の部分断面図、図2は同保護構造に使用する第2層の側断面図である。
Next, embodiments of the present invention will be described with reference to the accompanying drawings for understanding of the present invention.
Here, FIG. 1A is a partial cross-sectional view of an induction heating apparatus for a strip according to an embodiment of the present invention when the maximum use temperature is 1000 ° C. or less, and FIG. FIG. 2 is a side sectional view of a second layer used in the protective structure, and FIG. 2 is a partial sectional view of a strip-shaped induction heating apparatus according to an embodiment of the present invention when the temperature exceeds ° C.

図1(A)、図1(B)、図2に示すように、本発明の一実施の形態に係る帯状体の誘導加熱装置10は、誘導加熱コイル19の内側に保護構造体を配置して構成され、この保護構造体は、誘導加熱コイル19を保護するための筒状体(筒状の3層構造)を有し、3層には、雰囲気ガス中を通過する鉄(又は非鉄金属)からなる帯状体の一例である鋼帯側から誘導加熱コイル19に向かって、第1層12に平均粒径1〜100nmの超微粉末の圧粉体からなって、800℃における熱伝導率が0.02W/m・K以上、0.1W/m・K以下の低熱伝導断熱材、第2層13に耐熱温度が400℃以上、常温における圧縮強度が400MPa以上、常温における曲げ強度が100MPa以上の機械的強度を有する耐熱ボードからなる支持部材、及び第3層14に雰囲気ガスをシールするセラミック繊維の織布に耐熱温度200℃以上の樹脂又はゴムが融着されたシール材が用いられている。 As shown in FIG. 1 (A), FIG. 1 (B), and FIG. 2, the strip-shaped induction heating apparatus 10 according to one embodiment of the present invention has a protective structure disposed inside the induction heating coil 19. This protective structure has a cylindrical body (cylindrical three-layer structure) for protecting the induction heating coil 19, and the three layers include iron (or non-ferrous metal) that passes through the atmosphere gas. The first layer 12 is made of an ultra fine powder compact having an average particle diameter of 1 to 100 nm from the steel strip side, which is an example of a belt-like body, to the induction heating coil 19, and has a thermal conductivity at 800 ° C. Is a low thermal conductive heat insulating material of 0.02 W / m · K or more and 0.1 W / m · K or less, the heat resistance temperature of the second layer 13 is 400 ° C. or more, the compressive strength at room temperature is 400 MPa or more, and the bending strength at room temperature is 100 MPa. A support member made of a heat-resistant board having the above mechanical strength, Beauty sealant heat resistance temperature 200 ° C. or more resins or rubber woven ceramic fibers are fused to seal the atmospheric gas in the third layer 14 is used.

この帯状体の誘導加熱装置10において、例えば、第1層は平均粒径1〜100nmの超微粉末の圧粉体からなり、少なくとも、シリカの超微粉末60質量%以上、酸化チタンの超微粉末30質量%以上からなる低熱伝導断熱材とすることができる。また、第1層を平均粒径1〜100nmの超微粉末の圧粉体からなり、少なくとも、シリカの超微粉末52質量%以上、ジルコニアの超微粉末25質量%以上、アルミナの超微粉末20質量%以上からなる低熱伝導断熱材とすることもできる。また、第1層12の厚みは6〜15mm(より好ましくは6〜10mm)、第2層13の厚みは20〜40mm(より好ましくは20〜35mm)、第3層14の厚みは1〜5mm(より好ましくは1〜3mm)であるが、本発明はこの具体的数字に限定されるものではなく、本発明の要旨を変更しない範囲で変更可能である。
なお、最高使用温度が1000℃を超える場合には、図1(B)に示すように、第1層12の更に内側に、最高使用温度(耐熱温度)が1000℃以上で、厚みが10〜50mm(このセラミックファイバーブランケットの層11は炉温によって厚みが異なる)の耐高温性のセラミックファイバーブランケット(例えば、SCブランケット、イソウールブランケット、ファインフレックスブランケット)の層11を設けることができる。セラミックファイバーブランケットの層11を内張りすることによって、第1層12の低熱伝導断熱材が高温度に加熱されるのを防止し、低熱伝導断熱材を最高使用温度以下に保持できる。また、セラミックファイバーブランケットの層11の更に内層に0.5〜2mm厚みのセラミック繊維の織布(例えばアルミナクロス)15を設けることもでき、これによって、セラミックファイバーブランケットの層11からの粉塵の飛散防止を図ることができる。
In this belt-shaped induction heating apparatus 10, for example, the first layer is made of a green compact powder having an average particle diameter of 1 to 100 nm, and is composed of at least 60% by mass of ultrafine powder of silica and ultrafine titanium oxide. It can be set as the low heat conductive heat insulating material which consists of 30 mass% or more of powders. Further, the first layer is made of a green compact powder having an average particle diameter of 1 to 100 nm, at least 52 mass% or more of silica ultra fine powder, 25 mass% or more of zirconia ultra fine powder, and ultra fine powder of alumina. It can also be set as the low heat conductive heat insulating material which consists of 20 mass% or more. The thickness of the first layer 12 is 6 to 15 mm (more preferably 6 to 10 mm), the thickness of the second layer 13 is 20 to 40 mm (more preferably 20 to 35 mm), and the thickness of the third layer 14 is 1 to 5 mm. (More preferably, 1 to 3 mm), but the present invention is not limited to these specific numbers, and can be changed without changing the gist of the present invention.
When the maximum use temperature exceeds 1000 ° C., as shown in FIG. 1B, the maximum use temperature (heat-resistant temperature) is 1000 ° C. or more and the thickness is 10 to 10 mm. A layer 11 of high temperature resistant ceramic fiber blanket (for example, SC blanket, iso-wool blanket, fine flex blanket) of 50 mm (the thickness 11 of this ceramic fiber blanket varies depending on the furnace temperature) can be provided. By lining the ceramic fiber blanket layer 11, the low heat conductive heat insulating material of the first layer 12 can be prevented from being heated to a high temperature, and the low heat conductive heat insulating material can be kept below the maximum use temperature. Further, a ceramic fiber woven fabric (for example, alumina cloth) 15 having a thickness of 0.5 to 2 mm may be provided on the inner layer of the ceramic fiber blanket layer 11, thereby scattering dust from the ceramic fiber blanket layer 11. Prevention can be achieved.

最高使用温度が1000℃以上で、セラミックファイバーブランケットの層11の厚みが10mmより薄い場合には、第1層12の内側温度が高くなり、熱絶縁性のよい第1層12が使用温度範囲を超える場合があり、セラミックファイバーブランケットの層11の厚みが50mmより厚い場合には、誘導加熱コイル19が加熱対象物である鋼帯から遠くなり、加熱効率が下がる。
また、第1層12の低熱伝導断熱材としては、例えば、厚みは6〜15mm(より好ましくは6〜10mmとするのがよい)であって、熱伝導率は前述のように小さいものを使用する。この第1層12の表裏は薄い(例えば、厚さ0.5〜1mm程度の)セラミック繊維の織布(例えばアルミナクロス)で覆っておくのがよい。
When the maximum use temperature is 1000 ° C. or more and the thickness of the ceramic fiber blanket layer 11 is less than 10 mm, the inner temperature of the first layer 12 becomes high, and the first layer 12 having good thermal insulation has a use temperature range. When the thickness of the ceramic fiber blanket layer 11 is greater than 50 mm, the induction heating coil 19 is far from the steel strip that is the object to be heated, and the heating efficiency is lowered.
In addition, as the low thermal conductive heat insulating material of the first layer 12, for example, a thickness of 6 to 15 mm (more preferably 6 to 10 mm is preferable) and the thermal conductivity is small as described above. To do. The front and back surfaces of the first layer 12 are preferably covered with a thin (for example, about 0.5 to 1 mm thick) ceramic fiber woven fabric (for example, alumina cloth).

第2層13は耐熱ボードで、厚みが20〜40mmで、耐熱温度は400℃程度、圧縮強度は420〜480MPaで、熱伝導率が0.2〜0.3W/m・Kであり、曲げ強さは120〜150MPaのもの(例えば、ガラス繊維の積層板、石膏ボード、セラミックボード)を使用した。この耐熱ボードは機械的強度に優れるため、図2に示すように適当な大きさの耐熱ボードから矩形板を切断して、両側部にフランジ16、17を有する筒状体枠(スロート枠)18を支持部材とすることができる。そして、本実施の形態に係る帯状体の誘導加熱装置10では、第2層13の耐熱ボードの内外層を図1(A)、図1(B)に示す構成としている。 The second layer 13 is a heat resistant board having a thickness of 20 to 40 mm, a heat resistant temperature of about 400 ° C., a compressive strength of 420 to 480 MPa, a thermal conductivity of 0.2 to 0.3 W / m · K, and bending. The strength was 120 to 150 MPa (for example, glass fiber laminate, gypsum board, ceramic board). Since this heat-resistant board is excellent in mechanical strength, a rectangular body frame (throat frame) 18 having flanges 16 and 17 on both sides is obtained by cutting a rectangular plate from a heat-resistant board having an appropriate size as shown in FIG. Can be used as a support member. And in the strip | belt-shaped induction heating apparatus 10 which concerns on this Embodiment, the inner and outer layers of the heat-resistant board of the 2nd layer 13 are set as the structure shown to FIG. 1 (A) and FIG. 1 (B).

筒状体枠18の組み立てにあっては、非導電体のボルト、ナット等を使用する。例えば、耐火物製(例えば、アルミナ、窒化珪素)のボルト、ナットを使ってもよい。また、セラミックファイバーブランケットの層11、第1層12を、耐熱ボードからなる筒状体枠18に固定する場合はアルミナ製の紐状物、耐火物製のボルト、ナットなどを使用するのがよい。紐状物又はボルト、ナットで固定する場合はセラミックファイバーブランケットの層11、第1層12、第2層13を貫通する孔を設けて固定するのがよい。また、必要に応じて耐熱性を有する接着剤を併用してもよい。 In assembling the cylindrical body frame 18, non-conductive bolts, nuts, and the like are used. For example, bolts and nuts made of refractory (for example, alumina, silicon nitride) may be used. Further, when the ceramic fiber blanket layer 11 and the first layer 12 are fixed to a cylindrical body frame 18 made of a heat-resistant board, it is preferable to use an alumina string, a refractory bolt, a nut, or the like. . When fixing with a string-like object, a bolt, or a nut, it is preferable to provide a hole penetrating the ceramic fiber blanket layer 11, the first layer 12, and the second layer 13 for fixing. Moreover, you may use together the adhesive which has heat resistance as needed.

第3層14はセラミック繊維の織布(例えばアルミナクロス)に、耐熱温度200℃以上の樹脂又はゴム(例えば、フッ素樹脂、シリコンゴム、カルレッツ)が融着されたシール材(例えば、アルミナクロス)が使用され、筒状体全体のシールを図っている。
そして、この表面に保持される誘導加熱コイル19は、銅板のままであってもよいが、発熱による温度上昇を防止するため、銅パイプを使用し内部に冷却水を流してもよい。
The third layer 14 is a sealing material (for example, alumina cloth) in which a resin or rubber (for example, fluororesin, silicon rubber, Kalrez) having a heat resistant temperature of 200 ° C. or higher is fused to a woven fabric of ceramic fibers (for example, alumina cloth). Is used to seal the entire cylindrical body.
And although the induction heating coil 19 hold | maintained on this surface may be a copper plate, in order to prevent the temperature rise by heat_generation | fever, you may flow a cooling water inside using a copper pipe.

前記実施の形態においては具体的数字を用いて説明したが、本発明はこの数字に限定されるものではない。
なお、第2層13、第3層14が更に耐熱性、熱絶縁性を有するものを使用する場合は、第1層12、セラミックファイバーブランケットの層11の厚みを更に薄くしてもよい。
また、前記実施の形態においては、材料を特定して説明したが、本件発明の要旨を逸脱しない範囲での材料変更は当然あり得る。
Although the embodiment has been described using specific numbers, the present invention is not limited to these numbers.
When the second layer 13 and the third layer 14 are further heat resistant and thermally insulating, the thickness of the first layer 12 and the ceramic fiber blanket layer 11 may be further reduced.
In the above-described embodiment, the material has been specified and described. However, the material may naturally be changed without departing from the gist of the present invention.

(A)は最高使用温度が1000℃以下の場合の本発明の一実施の形態に係る帯状体の誘導加熱装置の部分断面図、(B)は最高使用温度が1000℃を超える場合の本発明の一実施の形態に係る帯状体の誘導加熱装置の部分断面図である。(A) is a partial cross-sectional view of a strip induction heating apparatus according to an embodiment of the present invention when the maximum use temperature is 1000 ° C. or less, and (B) is the present invention when the maximum use temperature exceeds 1000 ° C. It is a fragmentary sectional view of the induction heating apparatus of the strip | belt-shaped body which concerns on one embodiment. 同保護構造に使用する第2層の側断面図である。It is a sectional side view of the 2nd layer used for the protection structure.

符号の説明Explanation of symbols

10:帯状体の誘導加熱装置、11:セラミックファイバーブランケットの層、12:第1層、13:第2層、14:第3層、15:セラミック繊維の織布、16、17:フランジ、18:筒状体枠、19:誘導加熱コイル DESCRIPTION OF SYMBOLS 10: Strip | belt-shaped induction heating apparatus, 11: Layer of ceramic fiber blanket, 12: 1st layer, 13: 2nd layer, 14: 3rd layer, 15: Woven fabric of ceramic fiber, 16, 17: Flange, 18 : Cylindrical body frame, 19: induction heating coil

Claims (6)

誘導加熱コイルの内側に保護構造体を配置し、該保護構造体の内側に鉄又は非鉄金属からなる帯状体を通過させて、該帯状体を誘導加熱する装置において、前記保護構造体は筒状の3層構造を有し、各層を前記帯状体側から前記誘導加熱コイルに向かって第1層、第2層、第3層とするとき、前記第1層から前記第3層が以下の構造となっていることを特徴とする帯状体の誘導加熱装置。
第1層:平均粒径1〜100nmの超微粉末の圧粉体からなり、800℃における熱伝導率が0.02W/m・K以上、0.1W/m・K以下の低熱伝導断熱材
第2層:耐熱温度400℃以上、常温における圧縮強度400MPa以上、常温における曲げ強度100MPa以上の機械的強度を有する耐熱ボード
第3層:セラミック繊維の織布に耐熱温度200℃以上の樹脂又はゴムが融着されたシール材
A protective structure is disposed inside the induction heating coil, and a belt-shaped body made of iron or a non-ferrous metal is passed inside the protective structure to heat the belt-shaped body. The protective structure is cylindrical. When each layer is a first layer, a second layer, and a third layer from the strip side toward the induction heating coil, the first layer to the third layer have the following structure: An inductive heating device for a belt-like body, characterized in that
First layer: a low thermal conductive heat insulating material consisting of an ultra-fine powder compact having an average particle size of 1 to 100 nm and having a thermal conductivity at 800 ° C. of 0.02 W / m · K or more and 0.1 W / m · K or less. Second layer: heat-resistant board having mechanical strength of heat-resistant temperature of 400 ° C. or higher, compressive strength at normal temperature of 400 MPa or higher, and bending strength of 100 MPa or higher at normal temperature Third layer: resin or rubber having a heat-resistant temperature of 200 ° C. or higher on a woven fabric of ceramic fibers Seal material with fused
前記第1層は平均粒径1〜100nmの超微粉末の圧粉体からなり、少なくとも、シリカの超微粉末60質量%以上、酸化チタンの超微粉末30質量%以上からなる前記低熱伝導断熱材であることを特徴とする請求項1に記載の帯状体の誘導加熱装置。 The first layer is made of an ultra fine powder compact having an average particle diameter of 1 to 100 nm, and includes at least 60% by mass of ultrafine powder of silica and 30% by mass or more of ultrafine powder of titanium oxide. The induction heating apparatus for a band according to claim 1, wherein the apparatus is a material. 前記第1層は平均粒径1〜100nmの超微粉末の圧粉体からなり、少なくとも、シリカの超微粉末52質量%以上、ジルコニアの超微粉末25質量%以上、アルミナの超微粉末20質量%以上からなる前記低熱伝導断熱材であることを特徴とする請求項1に記載の帯状体の誘導加熱装置。 The first layer is formed of a green compact powder having an average particle diameter of 1 to 100 nm, and includes at least 52% by mass of ultrafine powder of silica, 25% by mass or more of ultrafine powder of zirconia, and ultrafine powder 20 of alumina. The induction heating apparatus for a belt-like body according to claim 1, wherein the heat insulating material is low in thermal conductivity and consists of mass% or more. 前記第1層の厚みは6〜15mm、前記第2層の厚みは20〜40mm、前記第3層の厚みは1〜5mmであることを特徴とする請求項1〜3のいずれか1項に記載の帯状体の誘導加熱装置。 The thickness of the first layer is 6 to 15 mm, the thickness of the second layer is 20 to 40 mm, and the thickness of the third layer is 1 to 5 mm. The induction heating apparatus of the strip | belt shaped object of description. 前記第1層の更に内側に、耐熱温度が1000℃以上のセラミックファイバーブランケットからなる層を設けたことを特徴とする請求項1〜4のいずれか1項に記載の帯状体の誘導加熱装置。 5. The belt-shaped induction heating apparatus according to claim 1, wherein a layer made of a ceramic fiber blanket having a heat-resistant temperature of 1000 ° C. or more is provided further inside the first layer. 最内層にセラミック繊維の織布の層を設けたことを特徴とする請求項5に記載の帯状体の誘導加熱装置。 6. The induction heating apparatus for a belt-like body according to claim 5, wherein a layer of a woven fabric of ceramic fibers is provided in the innermost layer.
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US8957352B2 (en) 2011-06-27 2015-02-17 Tokyo Electron Limited Heat treatment furnace and heat treatment apparatus
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