JP2009054951A - 不揮発性半導体記憶素子及びその製造方法 - Google Patents
不揮発性半導体記憶素子及びその製造方法 Download PDFInfo
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- JP2009054951A JP2009054951A JP2007222690A JP2007222690A JP2009054951A JP 2009054951 A JP2009054951 A JP 2009054951A JP 2007222690 A JP2007222690 A JP 2007222690A JP 2007222690 A JP2007222690 A JP 2007222690A JP 2009054951 A JP2009054951 A JP 2009054951A
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- lanthanum aluminate
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- aluminum oxide
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- 238000003860 storage Methods 0.000 title claims abstract description 81
- 239000004065 semiconductor Substances 0.000 title claims abstract description 59
- 238000000034 method Methods 0.000 title claims description 32
- 238000004519 manufacturing process Methods 0.000 title claims description 29
- 229910052746 lanthanum Inorganic materials 0.000 claims abstract description 146
- -1 lanthanum aluminate Chemical class 0.000 claims abstract description 132
- 239000000758 substrate Substances 0.000 claims abstract description 53
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 64
- 238000010438 heat treatment Methods 0.000 claims description 39
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 27
- 229910052710 silicon Inorganic materials 0.000 claims description 27
- 239000010703 silicon Substances 0.000 claims description 27
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 19
- 229910052782 aluminium Inorganic materials 0.000 claims description 17
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 17
- 239000000203 mixture Substances 0.000 claims description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 11
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 10
- 229910052735 hafnium Inorganic materials 0.000 claims description 8
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 8
- 239000010936 titanium Substances 0.000 claims description 8
- 239000012535 impurity Substances 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 238000009413 insulation Methods 0.000 abstract description 7
- 238000009825 accumulation Methods 0.000 abstract description 4
- 239000010410 layer Substances 0.000 description 369
- 238000005468 ion implantation Methods 0.000 description 15
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 15
- 238000006243 chemical reaction Methods 0.000 description 14
- 238000005229 chemical vapour deposition Methods 0.000 description 10
- 239000003989 dielectric material Substances 0.000 description 10
- 239000011229 interlayer Substances 0.000 description 10
- 238000001451 molecular beam epitaxy Methods 0.000 description 8
- 238000002425 crystallisation Methods 0.000 description 7
- 230000008025 crystallization Effects 0.000 description 7
- 230000002542 deteriorative effect Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
- 230000008878 coupling Effects 0.000 description 6
- 238000010168 coupling process Methods 0.000 description 6
- 238000005859 coupling reaction Methods 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 239000002356 single layer Substances 0.000 description 6
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 5
- 230000003213 activating effect Effects 0.000 description 5
- 230000006870 function Effects 0.000 description 5
- 229910052698 phosphorus Inorganic materials 0.000 description 5
- 239000011574 phosphorus Substances 0.000 description 5
- 239000010931 gold Substances 0.000 description 4
- 239000011572 manganese Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
- 239000010948 rhodium Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 239000001569 carbon dioxide Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- 229910003468 tantalcarbide Inorganic materials 0.000 description 3
- 229910052691 Erbium Inorganic materials 0.000 description 2
- 229910017569 La2(CO3)3 Inorganic materials 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910000449 hafnium oxide Inorganic materials 0.000 description 2
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- NZPIUJUFIFZSPW-UHFFFAOYSA-H lanthanum carbonate Chemical compound [La+3].[La+3].[O-]C([O-])=O.[O-]C([O-])=O.[O-]C([O-])=O NZPIUJUFIFZSPW-UHFFFAOYSA-H 0.000 description 2
- 229960001633 lanthanum carbonate Drugs 0.000 description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
- RLDBHKUGRPXFBF-UHFFFAOYSA-N lanthanum;hydrate Chemical compound O.[La] RLDBHKUGRPXFBF-UHFFFAOYSA-N 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 150000001247 metal acetylides Chemical class 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910052702 rhenium Inorganic materials 0.000 description 2
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 2
- 229910052714 tellurium Inorganic materials 0.000 description 2
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 2
- 238000003949 trap density measurement Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 2
- LZIAMMQBHJIZAG-UHFFFAOYSA-N 2-[di(propan-2-yl)amino]ethyl carbamimidothioate Chemical compound CC(C)N(C(C)C)CCSC(N)=N LZIAMMQBHJIZAG-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 150000004645 aluminates Chemical class 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 238000002524 electron diffraction data Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
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Abstract
【解決手段】不揮発性半導体記憶素子は、半導体基板11と、半導体基板11内に離間して設けられたソース領域16A及びドレイン領域16Bと、ソース領域16A及びドレイン領域16B間で半導体基板11上に設けられたトンネル絶縁層12と、トンネル絶縁層12上に設けられた電荷蓄積層13と、電荷蓄積層13上に設けられ、かつ結晶化したアルミン酸ランタン層を含むブロック絶縁層14と、ブロック絶縁層14上に設けられた制御ゲート電極15とを含む。
【選択図】 図1
Description
図1は、本発明の第1の実施形態に係るメモリセルトランジスタ(不揮発性半導体記憶素子)の構成を示す断面図である。
第2の実施形態は、電荷蓄積層とブロック絶縁層の一部としてのアルミン酸ランタン層との間に安定化した酸化アルミニウムを挿入することで、電荷蓄積層とアルミン酸ランタン層との反応をより抑制するようにしている。図9は、本発明の第2の実施形態に係るメモリセルトランジスタの構成を示す断面図である。
第3の実施形態は、電荷蓄積層とブロック絶縁層の一部としてのアルミン酸ランタン層との間に安定化した酸化アルミニウムを挿入することで、電荷蓄積層とアルミン酸ランタン層との反応をより抑制するようにしている。さらに、制御ゲート電極とアルミン酸ランタン層との間に安定化した酸化アルミニウムを挿入することで、制御ゲート電極とアルミン酸ランタン層との反応をより抑制するようにしている。図16は、本発明の第3の実施形態に係るメモリセルトランジスタの構成を示す断面図である。
第1乃至第3の実施形態で示したメモリセルトランジスタを形成した後、層間絶縁層を各素子間に埋め込む工程を施すことが一般的である。通常、層間絶縁層には酸化シリコンが用いられる。しかしながら、アルミン酸ランタン中のランタンは高温にて拡散し易いため、層間絶縁層に酸化シリコンを用いるとランタンが酸化シリコン層中に拡散する恐れがある。この結果、アルミン酸ランタン層の特性が劣化するとともに、層間絶縁層の誘電率が大きくなるため、メモリセルトランジスタの特性が劣化してしまう。
以下に、第1の実施形態で示したメモリセルトランジスタに対する比較例について説明する。
Claims (12)
- 半導体基板と、
前記半導体基板内に離間して設けられたソース領域及びドレイン領域と、
前記ソース領域及び前記ドレイン領域間で前記半導体基板上に設けられたトンネル絶縁層と、
前記トンネル絶縁層上に設けられた電荷蓄積層と、
前記電荷蓄積層上に設けられ、かつ結晶化したアルミン酸ランタン層を含むブロック絶縁層と、
前記ブロック絶縁層上に設けられた制御ゲート電極と
を具備することを特徴とする不揮発性半導体記憶素子。 - 前記ブロック絶縁層は、前記電荷蓄積層及び前記アルミン酸ランタン層間に設けられた酸化アルミニウム層を含むことを特徴とする請求項1に記載の不揮発性半導体記憶素子。
- 前記ブロック絶縁層は、前記アルミン酸ランタン層及び前記制御ゲート電極間に設けられた酸化アルミニウム層を含むことを特徴とする請求項1に記載の不揮発性半導体記憶素子。
- 前記ブロック絶縁層は、
前記電荷蓄積層及び前記アルミン酸ランタン層間に設けられた第1の酸化アルミニウム層と、
前記アルミン酸ランタン層及び前記制御ゲート電極間に設けられた第2の酸化アルミニウム層と
を含むことを特徴とする請求項1に記載の不揮発性半導体記憶素子。 - 前記アルミン酸ランタン層の両側面に設けられた酸化アルミニウム膜をさらに具備することを特徴とする請求項1乃至4のいずれかに記載の不揮発性半導体記憶素子。
- 前記アルミン酸ランタン層は、アルミニウム(Al)とランタン(La)との組成比Al/Laが、1≦Al/La≦4であることを特徴とする請求項1乃至5のいずれかに記載の不揮発性半導体記憶素子。
- 前記トンネル絶縁層は、酸化シリコン、窒化シリコン、又は酸窒化シリコンからなることを特徴とする請求項1乃至6のいずれかに記載の不揮発性半導体記憶素子。
- 前記電荷蓄積層は、シリコン(Si)、アルミニウム(Al)、チタン(Ti)、ジルコニウム(Zr)、及びハフニウム(Hf)のうちの少なくとも一つの元素を含む酸化物又は酸窒化物からなることを特徴とする請求項1乃至7のいずれかに記載の不揮発性半導体記憶素子。
- 前記電荷蓄積層は、導電体からなることを特徴とする請求項1乃至7のいずれかに記載の不揮発性半導体記憶素子。
- 半導体基板上に、トンネル絶縁層を形成する工程と、
前記トンネル絶縁層上に、電荷蓄積層を形成する工程と、
前記電荷蓄積層上に、アルミン酸ランタン層を含むブロック絶縁層を形成する工程と、
前記ブロック絶縁層上に、制御ゲート電極を形成する工程と、
前記半導体基板に不純物を導入して、前記半導体基板内に第1及び第2の不純物領域を形成する工程と、
熱処理を行い、前記アルミン酸ランタン層を結晶化する工程と
を具備することを特徴とする不揮発性半導体記憶素子の製造方法。 - 前記熱処理は、前記第1及び第2の不純物領域を活性化するために行われることを特徴とする請求項10に記載の不揮発性半導体記憶素子の製造方法。
- 前記ブロック絶縁層を形成する工程は、
前記電荷蓄積層上に、酸化アルミニウム層を形成する工程と、
前記酸化アルミニウム層を加熱する工程と、
前記酸化アルミニウム層上に、前記アルミン酸ランタン層を形成する工程と
を含むことを特徴とする請求項10に記載の不揮発性半導体記憶素子の製造方法。
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JP2007222690A JP2009054951A (ja) | 2007-08-29 | 2007-08-29 | 不揮発性半導体記憶素子及びその製造方法 |
US12/049,875 US20090057750A1 (en) | 2007-08-29 | 2008-03-17 | Nonvolatile semiconductor memory element and manufacturing method thereof |
CNA2008101463626A CN101378084A (zh) | 2007-08-29 | 2008-08-27 | 非易失性半导体存储元件及其制造方法 |
KR1020080084451A KR20090023217A (ko) | 2007-08-29 | 2008-08-28 | 불휘발성 반도체 기억 소자 및 그 제조 방법 |
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US8679962B2 (en) * | 2008-08-21 | 2014-03-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated circuit metal gate structure and method of fabrication |
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JP2013055131A (ja) * | 2011-09-01 | 2013-03-21 | Toshiba Corp | 不揮発性半導体記憶装置 |
US8822283B2 (en) | 2011-09-02 | 2014-09-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Self-aligned insulated film for high-k metal gate device |
TWI506735B (zh) * | 2012-10-30 | 2015-11-01 | Ememory Technology Inc | 非揮發性記憶體的製造方法 |
JP7002899B2 (ja) * | 2017-09-22 | 2022-01-20 | キオクシア株式会社 | 記憶装置 |
JP7089967B2 (ja) * | 2018-07-17 | 2022-06-23 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
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