JP2009002829A - Shape measurement method and shape measurement apparatus - Google Patents
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本発明は撮像手段と被検査体の距離を変えたときに、撮像した画像中の被検査体の位置が微妙にずれることによって、位相再生法による被検査体の元形状の再生像がぼやけたり擬似像が発生したりする現象に対処する方法および装置に関するものである。 In the present invention, when the distance between the imaging means and the object to be inspected is changed, the reproduced image of the original shape of the object to be inspected by the phase reproduction method is blurred because the position of the object to be inspected in the captured image is slightly shifted. The present invention relates to a method and an apparatus for dealing with a phenomenon in which a pseudo image is generated.
現代のハイテク製品と言われるものはそのほとんどがμmオーダー以下の微細構造を持っている。この微細構造を確認する手段として最も一般的なものは、干渉を利用した測定装置である。それらの測定装置は、測定条件を揃えることができればnmオーダーの精密測定を実現することが可能である。 Most of today's high-tech products have a fine structure of the order of μm or less. The most common means for confirming this fine structure is a measuring device using interference. These measurement apparatuses can realize precision measurement on the order of nm if the measurement conditions can be aligned.
しかしその測定条件の実現と維持は容易ではなく、特に工場など製造現場内部での実現はほとんど不可能である。その最も大きな理由は、空気の揺らぎと振動である。干渉を利用した測定の基本原理は、測定に使用した光の波の数を数えるものであるが、通常は何らかの基準波を用意して、基準波と測定対象からの光波との波数の差を数える。 However, it is not easy to realize and maintain the measurement conditions, and it is almost impossible to realize it inside a manufacturing site such as a factory. The most important reason is air fluctuation and vibration. The basic principle of measurement using interference is to count the number of light waves used in the measurement.Normally, some reference wave is prepared, and the difference in the wave number between the reference wave and the light wave from the measurement target is measured. count.
測定装置を構成する光源、測定対象、検出手段などの間にある空気の温度、密度、流速などが揺らぐことによる屈折率の変化や、測定装置全体または測定装置の各構成要素の機械振動などによって、基準波数の変化があった場合は正確に波数を数えることができない。従って、干渉を使った測定装置は工場でのインライン検査用としては、実運用が困難であるという問題があった。 Changes in refractive index due to fluctuations in the temperature, density, flow velocity, etc. of the air between the light source, measurement object, and detection means that make up the measurement device, and mechanical vibration of the entire measurement device or each component of the measurement device When the reference wave number changes, the wave number cannot be counted accurately. Therefore, there is a problem that a measuring apparatus using interference is difficult to actually operate for in-line inspection at a factory.
干渉ではなく回折を利用した計測方法が最近開発された。代表的なものはホログラム検査機である。しかしホログラムも基準光を使うことから、干渉同様に振動や空気揺らぎに弱い。 A measurement method using diffraction rather than interference has recently been developed. A typical one is a hologram inspection machine. However, since holograms also use reference light, they are vulnerable to vibrations and air fluctuations as well as interference.
そこで、最近進歩が著しいコンピュータの計算力でホログラムの基準光を省いてしまう計算手法が開発された。これが位相回復による形状計測法である。 Therefore, a calculation method has been developed that omits the reference light of the hologram with the computational power of computers that have made remarkable progress recently. This is the shape measurement method by phase recovery.
位相回復は発生した回折像から元形状を推測する手法であり、その主な原理はGerchbergが考案した(非特許文献1参照)。その後、Fienupらはこの手法に改良を加えた(非特許文献2参照)。これらの方法は、回折像に何らかの付加的束縛条件を加えることで元形状の再生を行おうとするものである。しかし、様々な形状の測定対象に対して普遍的に使用できるような付加的束縛条件を設定することは非常に困難で、結局は測定対象ごとに付加的束縛条件を用意せざるを得ず、実用には向かなかった。 Phase recovery is a method of estimating the original shape from the generated diffraction image, and its main principle was devised by Gerchberg (see Non-Patent Document 1). Subsequently, Fienup et al. Improved this technique (see Non-Patent Document 2). In these methods, the original shape is reproduced by adding some additional constraint condition to the diffraction image. However, it is very difficult to set additional constraint conditions that can be used universally for measurement objects of various shapes. Eventually, additional constraint conditions must be prepared for each measurement object. It was not suitable for practical use.
しかしPedriniらは、測定対象とカメラの距離を変えた複数の回折像より元画像を再生する方法を開発した(非特許文献3参照)。この方法は、付加的束縛条件を必要としないため上記2例に比べかなり現実的な方法である。 However, Pedrini et al. Developed a method for reproducing an original image from a plurality of diffraction images obtained by changing the distance between a measurement object and a camera (see Non-Patent Document 3). This method is considerably more realistic than the above two examples because it does not require additional constraint conditions.
Pedriniらは非特許文献3において、透過光学系により平面図形の元画像再生を行っている。これを反射光学系に応用すれば、理論的には3次元形状が再生できるはずであるが、実際には次のような2つの問題点があるため、反射光学系への応用は困難であった。 In Non-Patent Document 3, Pedrini et al. Reproduces an original image of a planar figure using a transmission optical system. If this is applied to a reflective optical system, a three-dimensional shape should theoretically be reproducible, but in reality, there are the following two problems, so that it is difficult to apply to a reflective optical system. It was.
生産ライン上で形状計測を行う場合、測定が終わったら被検査位置からその被検査体が取り去られ、新たな被検査体が載置されて測定される、ということを繰り返す。透過光学系の場合は、照明光源とカメラ(測定手段)の移動軸とを所定の位置関係に予め設定しておけば、被検査体を置き直しても回折像の位置はずれない。従って、カメラと被検査体の間の距離を変えた状態の回折像を複数得ることが出来る。 When performing shape measurement on the production line, when the measurement is completed, the inspection object is removed from the inspection position, and a new inspection object is placed and measured. In the case of a transmission optical system, if the illumination light source and the movement axis of the camera (measuring means) are set in a predetermined positional relationship in advance, the position of the diffracted image will not be shifted even if the object to be inspected is repositioned. Accordingly, it is possible to obtain a plurality of diffraction images in a state where the distance between the camera and the inspection object is changed.
しかし反射光学系の場合は、図5に示すように、被検査体51の置かれ方や表面状態の違いにより測定表面の傾きが微妙に異なることは多々ある。このため同じように被検査体に光を照射しても微妙な傾きの違いにより、反射光の光軸55とカメラの移動軸54を常に一致させることは困難である。反射光の光軸55とカメラの移動軸54が一致していない状態でカメラと被検査体の間の距離を変えると、カメラの撮像フレームに対して、被検査体による回折像の位置がだんだんずれていくことがあり得る。これが1つめの問題点である。 However, in the case of a reflective optical system, as shown in FIG. 5, the inclination of the measurement surface is often slightly different depending on how the object 51 is placed and the surface state. For this reason, it is difficult to always match the optical axis 55 of the reflected light with the moving axis 54 of the camera due to a slight difference in tilt even if the object is irradiated with light. If the distance between the camera and the object to be inspected is changed in a state where the optical axis 55 of the reflected light and the movement axis 54 of the camera do not match, the position of the diffraction image by the object to be inspected gradually with respect to the imaging frame of the camera It can be shifted. This is the first problem.
また元画像再生の計算は、複数回の高速フーリエ変換によって行われる。高速フーリエ変換は、データ数が2の累乗個でないと適用できない。これより、元画像再生の計算に使用できるのは、一辺の画素数が256、または512、または1024などの画像のみということになる。 The calculation of the original image reproduction is performed by a plurality of fast Fourier transforms. The fast Fourier transform can be applied only when the number of data is a power of two. Thus, only images having 256, 512, or 1024 pixels on one side can be used for calculation of the original image reproduction.
さらにサンプリング定理の制限によりカメラと被検査体の距離の限界は、扱う画像の一辺の画素数に比例する。従って画素数の多いカメラほど、被検査体との距離を大きく設定することができる。被検査体とカメラの間の距離を大きく出来れば、距離の値が異なる画像をより多く取得できるので、元画像再生精度を高くすることができる。 Further, due to the limitation of the sampling theorem, the limit of the distance between the camera and the object to be inspected is proportional to the number of pixels on one side of the handled image. Therefore, the larger the number of pixels, the larger the distance from the object to be inspected. If the distance between the object to be inspected and the camera can be increased, more images having different distance values can be acquired, so that the accuracy of reproducing the original image can be increased.
計算に使用できる画像は一辺の画素数が2の累乗個であること、被検査体とカメラの間の距離をできるだけ大きくするためには画素数の多い撮像素子のほうがよいこと、という制限より、取得画像の一部を取り出して使用することは非常に困難となってしまう。これが2つめの問題点である。何らかの方法でずれ量をはかることが出来たとしても、ずれがない部分の画像中だけ切り取りをしようとするとかなり大きなカメラが必要である。
The image that can be used for the calculation is a power of 2 pixels on one side, and in order to increase the distance between the object to be inspected and the camera as much as possible, an image sensor with a large number of pixels is better. It becomes very difficult to extract and use a part of the acquired image. This is the second problem. Even if the amount of displacement can be measured by some method, a considerably large camera is required if an attempt is made to cut out only the portion of the image where there is no displacement.
本発明は、上記のような、反射光学系において位相再生法による3次元形状の再生のための回折像を取得する時の、上記の問題点を解決する形状測定方法および形状測定装置を提供することを目的とする。 The present invention provides a shape measuring method and a shape measuring apparatus for solving the above-mentioned problems when acquiring a diffraction image for reproducing a three-dimensional shape by a phase reproduction method in a reflection optical system as described above. For the purpose.
本発明の請求項1に記載の発明は、被検査体の形状を光学的に測定する方法であって、
被検査体に照明光を照射する照明光照射段階と、
被検査体からの撮像手段の距離値を検知する距離検知段階と、
被検査体からの反射光を撮像手段により撮像する撮像段階と、
予め取得済み基準画像との比較により撮像した画像の面内方向のずれ量を算出する、ずれ量算出段階と、
そのずれ量相当だけ撮像手段の位置補正を行う位置補正段階と、
位置補正段階後に形状計測に使用する画像を取得する画像取得段階と、
被検査体からの前記撮像手段の距離を調節する距離調節段階と、
これら手順を所定回数繰り返すことにより画像群を取得する画像群取得段階と、
前記画像群から被検査体の元形状の画像を再生する計算を行う元形状再生段階と、
を備えることを特徴とする形状測定方法である。
The invention according to claim 1 of the present invention is a method for optically measuring the shape of an object to be inspected,
Illumination light irradiation stage for irradiating the object to be inspected with illumination light;
A distance detection stage for detecting the distance value of the imaging means from the object to be inspected;
An imaging stage in which reflected light from the object to be inspected is imaged by an imaging means;
A shift amount calculating step for calculating a shift amount in an in-plane direction of an image captured by comparison with a reference image acquired in advance;
A position correction stage for correcting the position of the imaging means by an amount corresponding to the deviation amount;
An image acquisition stage for acquiring an image used for shape measurement after the position correction stage;
A distance adjusting step for adjusting the distance of the imaging means from the object to be inspected;
An image group acquisition stage for acquiring an image group by repeating these steps a predetermined number of times;
An original shape reproduction stage for performing a calculation for reproducing an image of the original shape of the object to be inspected from the image group;
It is a shape measuring method characterized by comprising.
本発明の請求項2に記載の発明は、被検査体の形状を光学的に測定する装置であって、
被検査体に照明光を照射する照明光源と、
被検査体からの撮像手段の距離値を検知する距離検知手段と、
被検査体からの反射光を撮像する撮像手段と、
予め取得済み基準画像との比較により撮像した画像の面内方向のずれ量を算出する、ずれ量算出手段と、
そのずれ量相当だけ撮像手段の位置補正を行う位置補正手段と、
位置補正段階後に形状計測に使用する画像取得手段と、
被検査体からの前記撮像手段の距離を調節する距離調節手段と、
これらの手段により得られた所定枚数の、形状計測に使用する画像からなる画像群を取得および記憶する画像群取得手段と、
前記画像群から被検査体の元形状の画像を再生する計算を行う元形状再生手段と、
を備えることを特徴とする形状測定装置である。
Invention of Claim 2 of this invention is an apparatus which measures the shape of a to-be-inspected object optically,
An illumination light source for illuminating the object to be inspected, and
Distance detecting means for detecting a distance value of the imaging means from the object to be inspected;
Imaging means for imaging reflected light from the object to be inspected;
A deviation amount calculating means for calculating a deviation amount in an in-plane direction of an image captured by comparison with a reference image acquired in advance;
Position correction means for correcting the position of the image pickup means by an amount corresponding to the deviation amount;
Image acquisition means used for shape measurement after the position correction stage;
Distance adjusting means for adjusting the distance of the imaging means from the object to be inspected;
Image group acquisition means for acquiring and storing a predetermined number of images obtained by these means, consisting of images used for shape measurement,
Original shape reproducing means for performing calculation for reproducing an image of the original shape of the object to be inspected from the image group;
It is a shape measuring apparatus provided with these.
本発明の方法および装置によって、被検査体の元形状画像の像輪郭が明確になり、より精度の高い元形状画像が再生できるようになった。 With the method and apparatus of the present invention, the image contour of the original shape image of the object to be inspected is clarified, and the original shape image with higher accuracy can be reproduced.
以下、図面を参照しながら本発明の実施形態について説明する。図1は、本発明の形状測定装置の概略構成を示したものである。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows a schematic configuration of a shape measuring apparatus according to the present invention.
照明光源2からの照明光が、ハーフミラー3を介して被検査体1に照射された状態にしておく。次に、撮像手段6に取り付けられた距離調節手段7は被検査体1からの撮像手段6の距離を基準となる所定値に設定しそこで保持する。また図示せぬ距離検知手段はこのときの被検査体1からの撮像手段6の距離の値を検知する。この状態で、被検査体1からの反射光(回折光)を撮像手段6で受光して、基準回折像を得る。 The illumination light from the illumination light source 2 is in a state of being irradiated onto the object 1 via the half mirror 3. Next, the distance adjusting means 7 attached to the imaging means 6 sets the distance of the imaging means 6 from the subject 1 to a predetermined reference value and holds it there. Further, a distance detection means (not shown) detects the distance value of the imaging means 6 from the object 1 at this time. In this state, reflected light (diffracted light) from the object to be inspected 1 is received by the imaging means 6 to obtain a reference diffraction image.
撮像手段6により撮像された画像と、図示せぬ距離検知手段により検知された被検査体1からの撮像手段6の距離の値は、記録手段8で関連付けられた状態で記録される。 The image picked up by the image pickup means 6 and the value of the distance of the image pickup means 6 from the inspected object 1 detected by the distance detection means (not shown) are recorded in a state associated with the recording means 8.
次に距離調節手段7により、被検査体1からの撮像手段6の距離を、先ほどとは異なる値に設定しそこで保持する。ここで、第1のずれ量測定用回折像を撮像し、記録手段8への記録は前述の手順と同様に行う。 Next, the distance adjusting means 7 sets the distance of the imaging means 6 from the object to be inspected 1 to a value different from the previous one and holds it there. Here, the first diffraction image for measuring the deviation amount is picked up and recorded in the recording means 8 in the same manner as described above.
ここで基準回折像と第1のずれ量測定用回折像を解析し、それぞれの回折像のなかの代表点の抽出を行い、対応する代表点どうしの位置差を計算する。そして、この位置差に対応する量だけ、位置補正手段5により撮像手段の位置を補正し、次に元形状画像の再生の計算に使用する第1の回折像を取得する。これによりずれのない回折像で元形状再生の計算が可能となるため精度が期待できる。 Here, the reference diffraction image and the first deviation amount measurement diffraction image are analyzed, representative points in each diffraction image are extracted, and the position difference between the corresponding representative points is calculated. Then, the position of the image pickup means is corrected by the position correction means 5 by an amount corresponding to this position difference, and then a first diffraction image used for calculation of reproduction of the original shape image is acquired. As a result, it is possible to calculate the original shape with a diffraction image without any deviation, so that accuracy can be expected.
同様の手順で、第2〜第nの回折像を取得する(nは正整数)。以上の、回折像撮像の流れをまとめたフローチャートを図2に示す。 The second to n-th diffraction images are acquired by the same procedure (n is a positive integer). FIG. 2 shows a flowchart summarizing the flow of the above diffraction image imaging.
所定枚数の回折像を取得したら、この回折像群に対して、計算手段9により、複数回の高速フーリエ変換を行い元形状の画像を再生する計算を行い、被検査物の元形状画像を得る。 When a predetermined number of diffraction images have been acquired, the calculation unit 9 performs a plurality of fast Fourier transforms on the diffraction image group to perform a calculation for reproducing the original shape image, thereby obtaining an original shape image of the inspection object. .
以上、説明したように、本発明の形状測定方法および装置では、被検査体からの距離がそれぞれに異なる位置から撮像した複数の回折像が必要であり、被検査体や撮像条件にもよるが、実用的な元形状画像再生には10枚以上の回折像が必要である。したがって、撮像手段6を1mm刻みで移動させていく場合でも10mm以上動かす必要があり、距離調節手段7の可動距離は、10mm以上必要ということになる。 As described above, in the shape measuring method and apparatus of the present invention, a plurality of diffraction images captured from positions with different distances from the object to be inspected are required, depending on the object to be inspected and the imaging conditions. For practical original shape image reproduction, 10 or more diffraction images are required. Therefore, even when the image pickup means 6 is moved in 1 mm increments, it is necessary to move it by 10 mm or more, and the movable distance of the distance adjusting means 7 is required to be 10 mm or more.
また、撮像手段6の直進精度および被検査体1との距離の検知精度としては、撮像素子の1ピクセルと同程度の値(10μm程度)が必要であり、距離調節手段7および距離検知手段には、そのような精度を備えたものを使用する必要がある。これは、元形状の画像の再生計算には、被検査体と撮像手段との間の高精度な距離値が必要であるためである。 Further, the straightness accuracy of the image pickup means 6 and the detection accuracy of the distance to the object to be inspected 1 need to be the same value (about 10 μm) as one pixel of the image pickup device, and the distance adjustment means 7 and the distance detection means It is necessary to use one having such accuracy. This is because a highly accurate distance value between the object to be inspected and the imaging means is necessary for the reproduction calculation of the original shape image.
本発明の実施例について説明する。被検査体をフォトマスクのナンバー部とし、このナンバー部に対して撮像距離の異なる22枚の回折像を取得し、元形状画像の再生を行った。 Examples of the present invention will be described. The inspection object was the number part of the photomask, and 22 diffraction images with different imaging distances were acquired from the number part, and the original shape image was reproduced.
本発明の方法を使用しないときに得られる回折像を図3に示す。図3(a),(b)は、それぞれカメラ−被検査体距離が、最も近い場合と遠い場合に撮像した画像である。図3(a),(b)を比べると若干位置がずれていることがわかる。 A diffraction image obtained when the method of the present invention is not used is shown in FIG. 3A and 3B are images captured when the camera-inspected object distance is the shortest and the longest, respectively. Comparing FIGS. 3A and 3B, it can be seen that the positions are slightly shifted.
次にこれらの回折像より被検査体の元形状を再生した画像を図4に示す。図4(a)は本発明を使用しなかった場合、(b)は使用した場合である。画像中に多数の同心円状パターンがあるが、これは被検査体上に小さい異物(埃)が多数あり、この異物による回折像である。 Next, FIG. 4 shows an image obtained by reproducing the original shape of the inspection object from these diffraction images. FIG. 4A shows the case where the present invention is not used, and FIG. 4B shows the case where it is used. There are a large number of concentric patterns in the image. This is a diffracted image by a large number of small foreign matters (dust) on the object to be inspected.
本実施例で使用した被検査体の文字輪郭部は、ほとんど垂直の段差となっているので理想的には輪郭は出ないはずである。図4(a),(b)を比べると(a)の輪郭部が薄くなっているように見えるが、これは薄いのではなく濃い部分が非常に狭くなったためそう見えるのである。 Since the character outline portion of the object used in this example has almost vertical steps, the outline should ideally not come out. Comparing FIGS. 4A and 4B, it seems that the outline of FIG. 4A is thin, but this is not because it is thin, but because the dark part is very narrow.
本実施例では画像全体の重心位置を代表点として位置ずれの指標とし、位置補正を行ったが、代表点の設定方法はこれに限るものではない。
In this embodiment, the position of the center of gravity of the entire image is used as a representative point, and the position correction is performed. However, the method for setting the representative point is not limited to this.
1・・・・被検査体
2・・・・照明光源
3・・・・ハーフミラー
5・・・・撮像手段の位置補正手段
6・・・・撮像手段
7・・・・撮像手段の距離調節手段
8・・・・記録手段
9・・・・計算手段
51・・・被検査体
52・・・照明光源
53・・・ハーフミラー
54・・・カメラ移動軸
55・・・反射光の進行軸
56・・・カメラの撮像素子面
DESCRIPTION OF SYMBOLS 1 ... Object to be inspected 2 ... Illumination light source 3 ... Half mirror 5 ... Position correction means 6 of imaging means ... Imaging means 7 ... Adjustment of distance of imaging means Means 8 ... Recording means 9 ... Calculation means 51 ... Inspected object 52 ... Illumination light source 53 ... Half mirror 54 ... Camera movement axis 55 ... Advancing axis of reflected light 56 ... Image sensor surface of the camera
Claims (2)
被検査体に照明光を照射する照明光照射段階と、
被検査体からの撮像手段の距離値を検知する距離検知段階と、
被検査体からの反射光を撮像手段により撮像する撮像段階と、
予め取得済み基準画像との比較により撮像した画像の面内方向のずれ量を算出する、ずれ量算出段階と、
そのずれ量相当だけ撮像手段の位置補正を行う位置補正段階と、
位置補正段階後に形状計測に使用する画像を取得する画像取得段階と、
被検査体からの前記撮像手段の距離を調節する距離調節段階と、
これら手順を所定回数繰り返すことにより画像群を取得する画像群取得段階と、
前記画像群から被検査体の元形状の画像を再生する計算を行う元形状再生段階と、
を備えることを特徴とする形状測定方法。 A method for optically measuring the shape of a test object,
Illumination light irradiation stage for irradiating the object to be inspected with illumination light;
A distance detection stage for detecting the distance value of the imaging means from the object to be inspected;
An imaging stage in which reflected light from the object to be inspected is imaged by an imaging means;
A shift amount calculating step for calculating a shift amount in an in-plane direction of an image captured by comparison with a reference image acquired in advance;
A position correction stage for correcting the position of the imaging means by an amount corresponding to the deviation amount;
An image acquisition stage for acquiring an image used for shape measurement after the position correction stage;
A distance adjusting step for adjusting the distance of the imaging means from the object to be inspected;
An image group acquisition stage for acquiring an image group by repeating these steps a predetermined number of times;
An original shape reproduction stage for performing a calculation for reproducing an image of the original shape of the object to be inspected from the image group;
A shape measuring method comprising:
被検査体に照明光を照射する照明光源と、
被検査体からの撮像手段の距離値を検知する距離検知手段と、
被検査体からの反射光を撮像する撮像手段と、
予め取得済み基準画像との比較により撮像した画像の面内方向のずれ量を算出する、ずれ量算出手段と、
そのずれ量相当だけ撮像手段の位置補正を行う位置補正手段と、
位置補正段階後に形状計測に使用する画像取得手段と、
被検査体からの前記撮像手段の距離を調節する距離調節手段と、
これらの手段により得られた所定枚数の、形状計測に使用する画像からなる画像群を取得および記憶する画像群取得手段と、
前記画像群から被検査体の元形状の画像を再生する計算を行う元形状再生手段と、
を備えることを特徴とする形状測定装置。 An apparatus for optically measuring the shape of a test object,
An illumination light source for illuminating the object to be inspected, and
Distance detecting means for detecting a distance value of the imaging means from the object to be inspected;
Imaging means for imaging reflected light from the object to be inspected;
A deviation amount calculating means for calculating a deviation amount in an in-plane direction of an image captured by comparison with a reference image acquired in advance;
Position correction means for correcting the position of the image pickup means by an amount corresponding to the deviation amount;
Image acquisition means used for shape measurement after the position correction stage;
Distance adjusting means for adjusting the distance of the imaging means from the object to be inspected;
Image group acquisition means for acquiring and storing a predetermined number of images obtained by these means, consisting of images used for shape measurement,
Original shape reproducing means for performing calculation for reproducing an image of the original shape of the object to be inspected from the image group;
A shape measuring apparatus comprising:
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2011052693A1 (en) * | 2009-10-29 | 2011-05-05 | 富士機械製造株式会社 | Three-dimensional measurement device and three-dimensional measurement method |
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Publication number | Priority date | Publication date | Assignee | Title |
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WO2011052693A1 (en) * | 2009-10-29 | 2011-05-05 | 富士機械製造株式会社 | Three-dimensional measurement device and three-dimensional measurement method |
JP2011095093A (en) * | 2009-10-29 | 2011-05-12 | Myuu Skynet:Kk | Three-dimensional measuring device and method |
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