JP2009002771A - Shape measurement method of article and measuring instrument - Google Patents

Shape measurement method of article and measuring instrument Download PDF

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JP2009002771A
JP2009002771A JP2007163467A JP2007163467A JP2009002771A JP 2009002771 A JP2009002771 A JP 2009002771A JP 2007163467 A JP2007163467 A JP 2007163467A JP 2007163467 A JP2007163467 A JP 2007163467A JP 2009002771 A JP2009002771 A JP 2009002771A
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measured
shape
support plate
sample support
measurement
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JP5286699B2 (en
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Hitoshi Sannomiya
仁志 三宮
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NSK Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a measuring method and a measuring instrument capable of sufficiently securing measurement precision as a whole even when connecting a plurality of data indicating a part of an outer shape of an object to be measured such as an intermediate raw material 14. <P>SOLUTION: The intermediate raw material 14 is supported on a specimen support plate 19 providing measurement reference parts 27a, 27b on a part capable of being measured by a gage head 24. A part of a surface shape of the intermediate raw material 14 and the surface shapes of the measurement reference parts 27a, 27b are measured while changing an inclined angle of the specimen support plate 19. Thereafter, a plurality of measured data are connected through the measured data of the surface shapes of the measurement reference parts 27a, 27b. Highly reliable measurement result can be obtained concerning the outer shape of the object to be measured regardless of shape precision of the object to be measured such as the intermediate raw material 14. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

この発明に係る物品の形状測定方法及び測定装置は、例えばラジアルニードル軸受用の籠型保持器を構成する為の中間素材の如く、比較的小型の物品の外形を精度良く測定する為に利用する。   The method and apparatus for measuring the shape of an article according to the present invention is used to accurately measure the outer shape of a relatively small article such as an intermediate material for constructing a saddle type cage for a radial needle bearing. .

自動車用変速機や各種機械装置の回転支持部のうち、大きなラジアル荷重が加わる部分にラジアルニードル軸受が組み込まれている。例えば自動車の自動変速装置を構成する遊星歯車式変速機は、特許文献１等に記載されて周知の様に、遊星歯車をキャリアに対し、ラジアルニードル軸受により回転自在に支持している。図６は、この様なキャリアに対し遊星歯車を回転自在に支持する、遊星歯車の回転支持装置の１例を示している。この図６に示した構造の場合、キャリア１を構成する互いに平行な１対の支持板２ａ、２ｂの円周方向複数個所に、支持軸３の両端部を支持固定している。そして、この支持軸３の中間部周囲に遊星歯車４を、ラジアルニードル軸受５により、回転自在に支持している。   A radial needle bearing is incorporated in a portion to which a large radial load is applied among rotation support portions of a transmission for automobiles and various mechanical devices. For example, a planetary gear type transmission that constitutes an automatic transmission of an automobile supports a planetary gear rotatably with respect to a carrier by a radial needle bearing as described in Patent Document 1 and the like. FIG. 6 shows an example of a planetary gear rotation support device that rotatably supports the planetary gear with respect to such a carrier. In the case of the structure shown in FIG. 6, both end portions of the support shaft 3 are supported and fixed at a plurality of locations in the circumferential direction of a pair of support plates 2 a and 2 b that are parallel to each other constituting the carrier 1. A planetary gear 4 is rotatably supported by a radial needle bearing 5 around an intermediate portion of the support shaft 3.

このラジアルニードル軸受５は、複数本のニードル６、６を保持器７により転動自在に保持すると共に、上記支持軸３の中間部外周面を凸円筒面状の内輪軌道８とし、上記遊星歯車４の内周面を凹円筒面状の外輪軌道９として、上記各ニードル６、６の転動面を、これら内輪軌道８及び外輪軌道９に転がり接触させている。又、上記遊星歯車４の軸方向両端面と上記両支持板２ａ、２ｂの内側面との間に、それぞれフローティングワッシャ１０ａ、１０ｂを配置して、上記遊星歯車４の軸方向両端面と上記両支持板２ａ、２ｂの内側面との間に作用する摩擦力の低減を図っている。   The radial needle bearing 5 holds a plurality of needles 6 and 6 by a cage 7 so that the needles 6 and 6 can roll, and the outer peripheral surface of the intermediate portion of the support shaft 3 is a convex cylindrical surface-shaped inner ring raceway 8. The inner peripheral surface 4 is a concave cylindrical outer ring raceway 9, and the rolling surfaces of the needles 6 and 6 are in rolling contact with the inner ring raceway 8 and the outer ring raceway 9. Further, floating washers 10a and 10b are disposed between the both axial end surfaces of the planetary gear 4 and the inner side surfaces of the two support plates 2a and 2b, respectively. The frictional force acting between the inner surfaces of the support plates 2a and 2b is reduced.

上記ラジアルニードル軸受５を構成する上記保持器７は、例えば図７〜８に詳示する様に、軸方向（図７〜８の左右方向）に互いに間隔をあけて配置した、それぞれが円環状（円筒状又は円輪状）である１対のリム部１１、１１と、複数本の柱部１２、１２とを備える。これら各柱部１２、１２は、円周方向に亙って間欠的に配置され、それぞれの両端部を上記両リム部１１、１１の互いに対向する内側面の外径寄り部分に連続させている。又、上記各柱部１２、１２は、軸方向中間部が径方向内方に向け台形状に折れ曲がった形状を有する。そして、円周方向に隣り合うこれら各柱部１２、１２の円周方向両側縁と上記両リム部１１、１１の互いに対向する内側面とにより四辺を囲まれる空間部分を、それぞれポケット１３、１３とし、これら各ポケット１３、１３に上記各ニードル６、６を、転動自在に保持している。   The cage 7 constituting the radial needle bearing 5 is arranged in an axial direction (left-right direction in FIGS. 7 to 8) with a space between each other, as shown in detail in FIGS. A pair of rim portions 11, 11 that are (cylindrical or annular) and a plurality of column portions 12, 12 are provided. These column parts 12 and 12 are intermittently arranged in the circumferential direction, and both end parts thereof are made to be continuous with the outer diameter portions of the inner side surfaces of the rim parts 11 and 11 facing each other. . Moreover, each said pillar part 12 and 12 has the shape where the axial direction intermediate part bent in the trapezoid shape toward radial inside. And the space part surrounded by four sides by the circumferential direction both-sides edge of each of these pillar parts 12 and 12 adjacent to the circumferential direction and the mutually opposing inner side surfaces of the said rim | limb parts 11 and 11 is made into pockets 13 and 13, respectively. The needles 6 and 6 are held in the pockets 13 and 13 so as to roll freely.

この様に構成する上記保持器７は、特許文献２等に記載されて従来から周知の様に、帯状の金属板（一般的には鋼板若しくはステンレス鋼板）を円筒状に丸めて成る。即ち、帯状の金属板にプレス加工、ロール成形等の塑性加工を施す事により、保持器として基本的な断面形状を有する第一段階の中間素材とした後、この第一段階の中間素材に剪断加工を施す事により、上記各ニードル６、６を転動自在に保持する為のポケット１３、１３を打ち抜き成形し、第二段階の中間素材とする。更に、この第二段階の中間素材を所定長さに切断し、図９に示す様な第三段階の中間素材１４とする。   The cage 7 configured as described above is formed by rolling a strip-shaped metal plate (generally, a steel plate or a stainless steel plate) into a cylindrical shape as described in Patent Document 2 and the like, as is conventionally known. That is, by applying plastic working such as press forming and roll forming to the band-shaped metal plate, it becomes a first stage intermediate material having a basic cross-sectional shape as a cage, and then the first stage intermediate material is sheared. By performing the processing, the pockets 13 and 13 for holding the needles 6 and 6 so as to freely roll are punched and formed as an intermediate material in the second stage. Further, the second stage intermediate material is cut into a predetermined length to obtain a third stage intermediate material 14 as shown in FIG.

そして、この第三段階の中間素材１４を円筒状に丸め、両端部を突き合わせ溶接して、図６〜８に示す様な保持器７とする。尚、図示の例の場合、上記保持器７の径方向位置を規制する為に、この保持器７の外周面を前記外輪軌道９（図６参照）に近接対向させている。そして、運転時には、この様に近接対向させた保持器７の外周面を上記外輪軌道９に案内（外輪案内）させる事で、この保持器７の径方向に関する位置決めを図り、振動や異音が発生する事を防止する様にしている。   And this intermediate | middle raw material 14 of a 3rd step is rounded cylindrically, both ends are butt-welded and it is set as the holder | retainer 7 as shown to FIGS. In the case of the illustrated example, in order to regulate the radial position of the retainer 7, the outer peripheral surface of the retainer 7 is brought close to and opposed to the outer ring raceway 9 (see FIG. 6). During operation, the outer circumferential surface of the cage 7 that is closely opposed in this way is guided to the outer ring raceway 9 (outer ring guidance), thereby positioning the cage 7 in the radial direction, and vibration and noise are generated. I try to prevent it from occurring.

又、上記保持器７は、上記各柱部１２、１２の両端部両側縁のうちの円周方向に関して互いに整合する位置に係止突部１５、１５を、これら各側面から円周方向に突出する状態で設けている。これら各係止突部１５、１５は、上記各ポケット１３、１３内に転動自在に保持する上記各ニードル６、６が、当該ポケット１３、１３から径方向外方に抜け出る事を防止する為のものである。即ち、上記各ニードル６、６を上記保持器７と共に、前記内輪軌道８及び外輪軌道９（図６参照）の間に組み付ける際に、これら各ニードル６、６を上記各ポケット１３、１３内に、径方向に抜け出るのを阻止した状態で保持する必要がある。   Further, the cage 7 protrudes the locking projections 15 and 15 in the circumferential direction from the respective side surfaces at positions aligned with each other in the circumferential direction of both side edges of the pillars 12 and 12. It is provided in the state to do. These locking projections 15 and 15 prevent the needles 6 and 6 held in the pockets 13 and 13 from rolling out from the pockets 13 and 13 from coming out radially outward. belongs to. That is, when assembling the needles 6 and 6 together with the cage 7 between the inner ring raceway 8 and the outer ring raceway 9 (see FIG. 6), the needles 6 and 6 are placed in the pockets 13 and 13, respectively. It is necessary to hold in a state in which it is prevented from coming out in the radial direction.

この為に、上記各ポケット１３、１３の開口部で上記各ニードル６、６のピッチ円よりも外径側部分に上記各係止突部１５、１５を、互いに対向する状態で設けると共に、これら各係止突部１５、１５の先端縁同士の間隔Ｄ15（図７参照）を、上記各ニードル６、６の外径Ｄ6 （図６参照）よりも小さくしている（Ｄ6 ＞Ｄ15）。又、これと共に、上記各柱部１２、１２の中間部で上記各ニードル６、６のピッチ円よりも内径側に位置する内径側係止部１６、１６の互いに対向する側縁同士の間隔Ｄ16（図７参照）も、上記各ニードル６、６の外径Ｄ6 よりも小さくしている（Ｄ6 ＞Ｄ16）。 For this purpose, the locking projections 15 and 15 are provided on the outer diameter side of the pitch circle of the needles 6 and 6 at the openings of the pockets 13 and 13 so as to face each other. The distance D 15 (see FIG. 7) between the leading edges of the locking projections 15 and 15 is made smaller than the outer diameter D 6 (see FIG. 6) of the needles 6 and 6 (D 6 > D). 15 ). At the same time, the distance D between the side edges facing each other of the inner diameter side locking portions 16, 16 located on the inner diameter side of the pitch circle of the needles 6, 6 at the intermediate portion of the column parts 12, 12. 16 (see FIG. 7) also outside is smaller than the diameter D 6 (D 6> D 16 ) of the needles 6.

上記各ニードル６、６を上記各ポケット１３、１３に保持するには、これら各ニードル６、６をこれら各ポケット１３、１３に、上記保持器７の内径側から押し込む。この際、上記各ニードル６、６により上記内径側係止部１６、１６の側縁同士の間隔Ｄ16を弾性的に広げて、これら各ニードル６、６をこれら側縁同士の間を通過させる。この様にしてこれら各ニードル６、６を上記各ポケット１３、１３に保持した状態で、これら各ニードル６、６は、上記各係止突部１５、１５により前記保持器７の径方向外方に、上記各柱部１２、１２の内径側係止部１６、１６の側縁により同じく径方向内方に、それぞれ抜け出る事を防止される。尚、図示は省略するが、各ニードルを各ポケットに、保持器の外径側から組み込む場合もある。又、上記各係止突部１５、１５や上記各内径側係止部１６、１６を持たない保持器もある。 In order to hold the needles 6 and 6 in the pockets 13 and 13, the needles 6 and 6 are pushed into the pockets 13 and 13 from the inner diameter side of the cage 7. At this time, the interval D 16 between the side edges of the inner diameter side locking portions 16, 16 is elastically expanded by the needles 6, 6, and the needles 6, 6 are passed between the side edges. . In the state where the needles 6 and 6 are held in the pockets 13 and 13 in this way, the needles 6 and 6 are respectively connected to the outer sides of the cage 7 by the locking protrusions 15 and 15. In addition, the side edges of the inner diameter side locking portions 16 and 16 of the column portions 12 and 12 are prevented from coming out in the same radial inward direction. Although not shown, each needle may be incorporated into each pocket from the outer diameter side of the cage. There are also cages that do not have the locking projections 15 and 15 and the inner diameter side locking portions 16 and 16.

上述の様に構成し造られる保持器７に所期の性能を発揮させる為には、各部の寸法及び形状を設計値通り正確に仕上げる事が必要である。又、保持器７の各部の寸法及び形状を正確に仕上げる為には、前記図９に記載した中間素材１４等、この保持器７の製造過程で造られる中間素材の寸法及び形状が正確である事が必要である。更に、この中間素材の寸法及び形状を正確にする為には、この中間素材をプレス加工する為の金型、或いはロール成形する為のロールの形状が良好である事が必要である。但し、金型を利用したプレス加工により、或いはロール成形により、素材となる金属板から上記中間素材を造る場合、金属板のスプリングバック等の影響で、金型の形状がそのまま中間素材の形状になるとは限らない。この為、上記保持器７の量産化に先立って、金型を使用して上記中間素材をプレス加工してから、或いはロール成形してから、得られた中間素材の寸法及び形状を測定し、この金型或いはロールの形状に手直しを加える作業が必要になる。   In order for the cage 7 constructed and constructed as described above to exhibit the desired performance, it is necessary to finish the dimensions and shapes of each part accurately as designed. In addition, in order to accurately finish the size and shape of each part of the cage 7, the size and shape of the intermediate material 14 produced in the manufacturing process of the cage 7 such as the intermediate material 14 described in FIG. 9 are accurate. Things are necessary. Further, in order to make the size and shape of the intermediate material accurate, it is necessary that the mold for pressing the intermediate material or the shape of the roll for roll forming be good. However, when the intermediate material is made from a metal plate as a raw material by press working using a die or roll forming, the shape of the die is directly changed to the shape of the intermediate material due to the influence of the spring back of the metal plate. Not necessarily. For this reason, prior to mass production of the cage 7, after measuring the intermediate material using a mold or roll forming, measure the size and shape of the obtained intermediate material, It is necessary to rework the shape of the mold or roll.

この為従来から、触針式等の接触式の、或いはレーザ光等を使用した非接触式の測定器を使用して、上記中間素材１４等の形状を測定しつつ、この中間素材１４等を加工する為の金型の形状を仕上げる事が行なわれている。例えばこの中間素材１４の形状を測定する場合には、被測定物である、この中間素材１４の長さ方向（図９の上下方向）複数部分で、図８に表れた断面形状を、これら各部分毎に、それぞれ全周に亙り測定する。但し、接触式にしても、非接触式にしても、一般的な測定装置の場合には、測定子の形状やレーザ光の反射角限界等による制約から、一度に測定できる範囲が限られる。即ち、一度の測定作業により、断面形状を全周に亙り測定する事はできない。全周に亙る断面形状を得る為には、上記中間素材１４等の被測定物の角度を変えつつ、この被測定物の外形を部分的に測定して、それぞれがこの外形の一部を表した複数のデータを得た後、これら各データ同士を繋ぎ合わせる必要がある。この場合に、上記被測定物の折れ曲がり部等、特定し易い個所で、これら各データ同士を繋ぎ合わせる。   For this reason, conventionally, the intermediate material 14 or the like is measured while measuring the shape of the intermediate material 14 or the like using a contact-type measuring device such as a stylus type or a non-contact type measuring device using a laser beam or the like. Finishing the shape of the mold for processing. For example, when the shape of the intermediate material 14 is measured, the cross-sectional shape shown in FIG. Each part is measured over the entire circumference. However, in the case of a general measurement apparatus, whether it is a contact type or a non-contact type, the range that can be measured at a time is limited due to restrictions due to the shape of the probe or the reflection angle limit of the laser beam. In other words, the cross-sectional shape cannot be measured over the entire circumference by a single measurement operation. In order to obtain a cross-sectional shape over the entire circumference, the outer shape of the object to be measured such as the intermediate material 14 is changed while partially measuring the outer shape of the object to be measured, and each represents a part of the outer shape. After obtaining a plurality of data, it is necessary to connect the data. In this case, these pieces of data are connected to each other at an easily specified portion such as a bent portion of the object to be measured.

但し、上記折れ曲がり部等の形状精度が十分でない場合には、上記それぞれが被測定物の外形の一部を表した複数のデータを繋ぎ合わせても、全体としての測定精度を十分に確保できない。即ち、別々に測定したデータ同士を繋ぎ合わせる場合に、繋ぎ合わせ部の形状が不安定であると、繋ぎ合わせるべきデータ同士の方向性の特定が難しくなる等、繋ぎ合わされたデータが、被測定物の形状を正確に表さなくなり易い。特に、被測定物の外形を全周に亙って測定する場合、測定作業を３回以上に分けて行ない、３個以上のデータを繋ぎ合わせる必要が生じる為、繋ぎ合わせに伴う誤差が積算される等により、被測定物の外形に関する測定精度を確保する事が難しくなる。又、上記中間素材１４の断面形状を求める為に、この中間素材１４を断面形状を求めるべき部分で切断してからこの切断部分の形状を撮影し、画像処理によりこの断面形状を求める事も考えられる。但し、この様な方法では、切断時に発生するバリやダレにより、切断面の形状が実際の断面形状からずれ易く、この断面形状を精度良く求める事は難しい。   However, when the shape accuracy of the bent portion or the like is not sufficient, the overall measurement accuracy cannot be ensured even if a plurality of pieces of data each representing a part of the outer shape of the device under test are connected. That is, when connecting data measured separately, if the shape of the connecting part is unstable, it is difficult to specify the direction of the data to be connected, and the connected data is not measured. It is easy to accurately represent the shape. In particular, when measuring the outer shape of the object to be measured over the entire circumference, it is necessary to divide the measurement work into three or more times, and it is necessary to connect three or more pieces of data. As a result, it becomes difficult to ensure measurement accuracy regarding the outer shape of the object to be measured. Further, in order to obtain the cross-sectional shape of the intermediate material 14, it is considered that the intermediate material 14 is cut at a portion where the cross-sectional shape is to be obtained, and then the shape of the cut portion is photographed to obtain the cross-sectional shape by image processing. It is done. However, with such a method, the shape of the cut surface tends to deviate from the actual cross-sectional shape due to burrs or sagging that occur during cutting, and it is difficult to accurately obtain the cross-sectional shape.

特開２００２−２３５８４１号公報JP 2002-235841 A 特開平８−２７０６５８号公報JP-A-8-270658

本発明は、上述の様な事情に鑑みて、それぞれが被測定物の外形の一部を表した複数のデータを繋ぎ合わせた場合にも、全体としての測定精度を十分に確保できる、物品の形状測定方法及び測定装置を実現すべく発明したものである。   In view of the circumstances as described above, the present invention can ensure sufficient measurement accuracy as a whole even when a plurality of pieces of data each representing a part of the outer shape of the object to be measured are connected. The present invention was invented to realize a shape measuring method and a measuring apparatus.

本発明の物品の形状測定方法及び測定装置のうち、請求項１に記載した物品の形状測定方法は、先ず、測定器により測定可能な部分に測定基準部を設けた試料支持板に被測定物品を、この試料支持板に対し動かない様に支持する。そして、この様に支持した状態で、上記測定器により、上記被測定物品の表面形状の一部及び上記測定基準部の表面形状を、被測定物品の姿勢を変えず、一挙に測定する。その後、上記試料支持板と上記測定器との相対角度を変更してから、上記測定器により、この測定基準部の表面形状及び上記被測定物品の表面形状の他部を測定する。そして、この被測定物品の表面形状の一部の測定データと他部の測定データとを、上記測定基準部の表面形状の測定データを介して繋ぎ合わせる。   Of the article shape measuring method and measuring apparatus according to the present invention, the article shape measuring method according to claim 1 is such that first, an article to be measured is provided on a sample support plate provided with a measurement reference portion in a portion measurable by a measuring instrument. Is supported so as not to move with respect to the sample support plate. And in the state supported in this way, the measuring instrument measures a part of the surface shape of the article to be measured and the surface shape of the measurement reference part at once without changing the posture of the article to be measured. Thereafter, the relative angle between the sample support plate and the measuring instrument is changed, and the surface shape of the measurement reference part and the other part of the surface shape of the article to be measured are measured by the measuring instrument. Then, a part of the measurement data of the surface shape of the article to be measured and the measurement data of the other part are connected via the measurement data of the surface shape of the measurement reference part.

又、請求項２に記載した物品の形状測定装置は、基台と、この基台の一部上面に支持された測定器と、この基台の他部上面に支持された、被測定物を支持する試料支持板とを備える。そして、この試料支持板のうちで上記被測定物を支持した面に、測定基準部を設けると共に、上記測定器と上記試料支持板との相対角度の調節を可能としている。この様な測定基準部の外形は、精度良く造れる形状であれば特に問わない（角柱等でも良い）が、それぞれがピン（円柱）、球等の、断面形状が円形の部分を有する１対の測定基準部の組み合わせが、この測定基準部自体を精度良く造り易く、又、各方向から（異なる角度から）この測定基準部を測定する事ができ、しかも複数の測定データ同士の繋ぎ合わせ部分の方向性を明確に表せる事から好ましい。   According to a second aspect of the present invention, there is provided an apparatus for measuring a shape of an article, comprising: a base; a measuring instrument supported on a part of the upper surface of the base; and an object to be measured supported on the upper surface of the other part of the base. A sample support plate to be supported. A measurement reference portion is provided on the surface of the sample support plate that supports the object to be measured, and the relative angle between the measuring instrument and the sample support plate can be adjusted. The outer shape of such a measurement reference portion is not particularly limited as long as it is a shape that can be made with high precision (or a prism or the like), but each of the pair has a circular section such as a pin (cylinder) or a sphere. The combination of measurement reference parts makes it easy to build the measurement reference part itself with high accuracy, and can measure this measurement reference part from each direction (from different angles). This is preferable because the directionality can be clearly expressed.

上述の様な、請求項２に記載した物品の形状測定装置の発明を実施する場合に好ましくは、請求項３に記載した様に、上記試料支持板のうちで上記被測定物を支持する部分に、上記測定器によりこの被測定物を測定する方向の寸法以上の長さ寸法を有する透孔を設ける。そして、この透孔を通じて、上記被測定物のうちで上記試料支持板に対向する面側の外形を測定自在とする。
或いは、請求項４に記載した様に、上記試料支持板に被測定物の一部を、この試料支持板の端縁よりも突出した状態で支持可能とする。そして、この試料支持板の端縁よりも突出した部分で、この被測定物のうちでこの試料支持板に対向する面側の外形を測定自在とする。
又、何れの場合でも、本発明の物品の形状測定装置の発明を実施する場合に好ましくは、請求項５に記載した様に、それぞれの断面形状が円形である、複数の測定基準部を備える。 When carrying out the invention of the article shape measuring apparatus according to claim 2 as described above, preferably the part of the sample support plate that supports the object to be measured as described in claim 3 In addition, a through hole having a length dimension that is equal to or larger than the dimension in the direction in which the object to be measured is measured by the measuring instrument is provided. And, through this through hole, the outer shape of the surface of the object to be measured facing the sample support plate can be measured.
Alternatively, as described in claim 4, a part of the object to be measured can be supported on the sample support plate in a state protruding from the edge of the sample support plate. Then, at the portion protruding from the edge of the sample support plate, the outer shape of the surface of the object to be measured facing the sample support plate can be measured.
In any case, when the invention of the shape measuring apparatus for an article of the present invention is implemented, preferably, as described in claim 5, a plurality of measurement reference portions each having a circular cross section are provided. .

上述の様に構成する本発明の物品の形状測定方法及び測定装置によれば、被測定物の外形の一部を表した複数のデータを繋ぎ合わせた場合にも、全体としての測定精度を十分に確保できる。
即ち、被測定物品を動かない様に支持する試料支持板に設けた測定基準部をこの被測定物品と共に測定する事で、複数回に分けて測定した測定データ同士を正確に繋ぎ合わせられる。この結果、上述の様に、全体としての測定精度を十分に確保できる。 According to the shape measuring method and measuring apparatus of the article of the present invention configured as described above, even when a plurality of data representing a part of the outer shape of the object to be measured are connected, the overall measurement accuracy is sufficient. Can be secured.
That is, by measuring the measurement reference portion provided on the sample support plate that supports the measured article so as not to move together with the measured article, the measurement data measured in a plurality of times can be accurately connected. As a result, the measurement accuracy as a whole can be sufficiently ensured as described above.

［実施の形態の第１例］
図１〜４は、請求項１〜３、５に対応する、本発明の実施の形態の第１例を示している。先ず、形状測定装置の構造に就いて、図１〜３により説明する。この形状測定装置は、基台１７と、測定器１８と、試料支持板１９とを備える。このうちの基台１７は、作業台の上面等に安定した状態で載置できる様に、上下両面が平坦で、且つ、安定性を保つ為に十分な重量を有する。又、上記測定器１８は、上記基台１７の一部（図１の右上部）上面に設置されている。 [First example of embodiment]
1-4 show a first example of an embodiment of the present invention corresponding to claims 1 to 5. First, the structure of the shape measuring apparatus will be described with reference to FIGS. This shape measuring apparatus includes a base 17, a measuring instrument 18, and a sample support plate 19. Of these, the base 17 is flat on both the upper and lower surfaces and has a weight sufficient to maintain stability so that the base 17 can be stably placed on the upper surface of the work table. The measuring device 18 is installed on the upper surface of a part of the base 17 (upper right portion in FIG. 1).

本例の場合、上記測定器１８は接触式のもので、支柱２０と、昇降ブロック２１と、水平移動ブロック２２と、旋回腕２３と、測定子２４とを備える。このうちの支柱２０は、上記基台１７の上面片隅部（図１の右上隅部）に、鉛直方向に固定されている。又、上記昇降ブロック２１は、上記支柱２０のうちで上記基台１７の中央側の側面に、精密直動軸受等により、図１に矢印Ｚで示す上下方向の移動（昇降）可能に組み付けられている。又、上記水平移動ブロック２２は、上記昇降ブロック２１の下面に、図１の矢印Ｘで示す様に、上記試料支持板１９に対し遠近動する方向に、水平移動自在に設けられている。   In the case of this example, the measuring device 18 is a contact type, and includes a support column 20, a lifting block 21, a horizontal movement block 22, a swivel arm 23, and a measuring element 24. Of these, the support column 20 is fixed in the vertical direction to one corner of the upper surface of the base 17 (upper right corner in FIG. 1). Further, the elevating block 21 is assembled to the side surface on the center side of the base 17 in the support column 20 by a precision linear motion bearing or the like so that it can move (elevate) in the vertical direction indicated by an arrow Z in FIG. ing. Further, the horizontal movement block 22 is provided on the lower surface of the elevating block 21 so as to be horizontally movable in a direction in which the horizontal movement block 22 moves far and away relative to the sample support plate 19 as indicated by an arrow X in FIG.

又、上記旋回腕２３はその中間部を上記水平移動ブロック２２に対し、水平方向に配置された枢軸２９を中心とする揺動変位を自在に支持されている。更に、上記測定子２４は、上記旋回腕２３の先端部に、下方に向け鉛直方向に突出する状態で固定されている。従って上記測定子２４は、上記枢軸２９を中心とする上記旋回腕２３の揺動変位に伴って、図１の矢印Ｈに示す様に、上下方向に移動（昇降）する。外力が作用しない状態で上記測定子２４は、上記旋回腕２３が旋回できる範囲で下方に変位し、上記試料支持板１９の上面に設置した、中間素材１４等の試料の上面に当接する。この様にして当接する、上記測定子２４の先端と試料の上面との当接圧を適正にする為に、上記旋回腕２３の基端部に重錘３０を設置し、この旋回腕２３に対し、上記測定子２４を下降させる方向に加わるモーメントを調節している。又、上記各ブロック２１、２２の上記各矢印Ｘ、Ｚ方向の移動は、図示しない送りねじ機構、或いはリニアモータ等により可能としており、その移動量は、この送りねじ機構やリニアモータ等に、内蔵若しくは付属させた、光学式スケール若しくはコンパレータ等により、精密に（例えばμｍ単位で）測定可能としている。又、上記旋回腕２３の揺動角度に就いても、光学式スケール、又は、高精度エンコーダ等により測定して、この揺動に基づく、上記測定子２４の昇降量を精度良く求められる様にしている。   Further, the revolving arm 23 is supported at its intermediate portion with respect to the horizontal moving block 22 so as to be able to swing and displace around a pivot 29 arranged in the horizontal direction. Further, the measuring element 24 is fixed to the tip of the swivel arm 23 so as to protrude downward in the vertical direction. Accordingly, the measuring element 24 moves (up and down) in the vertical direction as shown by the arrow H in FIG. 1 in accordance with the swinging displacement of the swivel arm 23 around the pivot 29. In a state where no external force is applied, the measuring element 24 is displaced downward within a range in which the swivel arm 23 can be swung, and comes into contact with the upper surface of a sample such as the intermediate material 14 installed on the upper surface of the sample support plate 19. In order to make the contact pressure between the distal end of the probe 24 and the upper surface of the sample in contact with each other in this way, a weight 30 is installed at the base end portion of the swivel arm 23, and In contrast, the moment applied in the direction in which the probe 24 is lowered is adjusted. The blocks 21 and 22 can be moved in the directions indicated by the arrows X and Z by a feed screw mechanism or a linear motor (not shown). A built-in or attached optical scale, comparator, or the like enables precise measurement (for example, in units of μm). Further, the swing angle of the swivel arm 23 is also measured by an optical scale or a high-precision encoder, so that the amount of elevation of the probe 24 based on this swing can be obtained with high accuracy. ing.

一方、前記試料支持板１９は上記基台１７の上面他隅部（図１の左上隅部）に、精密ロータリアクチュエータ２５により、角度の調節を可能に支持している。又、この精密ロータリアクチュエータ２５はブレーキ機構を備え、上記試料支持板１９を所定方向に向けた状態のまま、保持可能としている。この試料支持板１９の幅方向（図２の上下方向）中央部には、スリット状の透孔２６を、長さ方向に亙り形成している。この透孔２６の方向は、上記水平移動ブロック２２の移動方向である、矢印Ｘ方向としている。又、この透孔２６は、前記枢軸２９を中心として上記旋回腕２３が揺動変位する仮想鉛直面上に位置する。又、上記透孔２６の長さ寸法Ｌ26は、上記試料支持板１９の長さ寸法Ｌ19よりも少しだけ短い（Ｌ26＜Ｌ19）。更に、この試料支持板１９の表面の長さ方向両端寄り部分に、それぞれが円柱状である１対の測定基準部２７ａ、２７ｂを、上記透孔２６を直角に横切る様に、上記枢軸２９と平行に固定している。本例の場合、円柱状のピンゲージを上記測定基準部として利用（ピンゲージを上記試料支持板１９の上面に接着固定）している。この為に、この試料支持板１９の上面長さ方向両端寄り部分に、Ｖ溝状の凹部２８、２８を形成し、これら両凹部２８、２８にそれぞれ上記ピンゲージを嵌合し更に接着して、上記両測定基準部２７ａ、２７ｂとしている。 On the other hand, the sample support plate 19 is supported at the other corner (upper left corner in FIG. 1) of the upper surface of the base 17 by a precision rotary actuator 25 so that the angle can be adjusted. The precision rotary actuator 25 includes a brake mechanism that can hold the sample support plate 19 with the sample support plate 19 facing in a predetermined direction. A slit-shaped through-hole 26 is formed in the lengthwise direction at the center of the sample support plate 19 in the width direction (vertical direction in FIG. 2). The direction of the through hole 26 is the arrow X direction, which is the moving direction of the horizontal moving block 22. The through hole 26 is located on a virtual vertical plane on which the revolving arm 23 swings and displaces around the pivot 29. The length L 26 of the through hole 26 is slightly shorter than the length L 19 of the sample support plate 19 (L 26 <L 19 ). Further, a pair of measurement reference portions 27a and 27b each having a cylindrical shape are provided on both ends of the surface of the sample support plate 19 in the longitudinal direction so as to cross the through hole 26 at right angles with the pivot 29 and They are fixed in parallel. In the case of this example, a cylindrical pin gauge is used as the measurement reference portion (the pin gauge is bonded and fixed to the upper surface of the sample support plate 19). For this purpose, V-groove-shaped recesses 28, 28 are formed on both ends of the sample support plate 19 in the longitudinal direction of the upper surface, and the pin gauges are fitted and bonded to the recesses 28, 28, respectively. Both the measurement reference parts 27a and 27b are used.

次に、上述の様な形状測定装置を使用して、前述の図９に示した様な、ラジアルニードル軸受上に組み込む保持器を構成する為の中間素材１４の断面形状を測定する手順に就いて、図４を参照しつつ説明する。尚、以下の説明は図４の（Ａ）→（Ｂ）→（Ｃ）→（Ｄ）の順番で測定作業を進める場合に就いて行なうが、この測定の順序は特に問わない。
測定作業に先立って、上記試料支持板１９の表面の長さ方向中央部に、被測定物である上記中間素材１４を、磁気吸着力により、或いは両面テープ等の測定後に剥せる接着手段により、上記試料支持板１９に対し動かない様に支持する。 Next, the procedure for measuring the cross-sectional shape of the intermediate material 14 for constituting the cage incorporated on the radial needle bearing as shown in FIG. The description will be made with reference to FIG. The following description will be made in the case where the measurement operation is performed in the order of (A) → (B) → (C) → (D) in FIG. 4, but this measurement order is not particularly limited.
Prior to the measurement work, the intermediate material 14 as the object to be measured is attached to the center portion in the longitudinal direction of the surface of the sample support plate 19 by a magnetic adsorption force or by an adhesive means that can be peeled after the measurement such as a double-sided tape The sample support plate 19 is supported so as not to move.

この様に、上記試料支持板１９の表面に上記中間素材１４を支持した後、先ず、図４の（Ａ）に示す様に、この試料支持板１９の表面を上に向け、且つ、この表面を水平方向に対し所定方向に傾斜させた状態で、この試料支持板１９を停止保持する。そして、前記測定器１８の昇降ブロック２１を、上記中間素材１４の高さ位置が前記旋回腕２３の先端部に設けた測定子２４による測定可能範囲に入る様に、図１の矢印Ｚ方向に移動させつつ、前記水平移動ブロック２２を同矢印Ｘ方向に移動させて、上記旋回腕２３の先端部に設けた測定子２４の先端（下端）により、上記中間素材１４及び上記両測定基準部２７ａ、２７ｂのうちで上方に向いた部分である、図１の（Ａ）の太線部分をなぞる。そして、この太線部分の形状を、上記測定器１８のメモリに記憶させる。   In this way, after the intermediate material 14 is supported on the surface of the sample support plate 19, first, as shown in FIG. 4A, the surface of the sample support plate 19 faces upward and the surface The sample support plate 19 is stopped and held in a state where is tilted in a predetermined direction with respect to the horizontal direction. Then, the elevating block 21 of the measuring instrument 18 is moved in the direction of the arrow Z in FIG. 1 so that the height position of the intermediate material 14 falls within the measurable range by the measuring element 24 provided at the tip of the swivel arm 23. The horizontal moving block 22 is moved in the direction of the arrow X while being moved, and the intermediate material 14 and the two measurement reference portions 27a are moved by the distal end (lower end) of the measuring element 24 provided at the distal end portion of the swivel arm 23. , 27b, which is a portion facing upward, traces the thick line portion in FIG. Then, the shape of the thick line portion is stored in the memory of the measuring device 18.

上記図４の（Ａ）の太線部分の形状を上記メモリ中に取り込んだ後、図４の（Ｂ）に示す様に、上記試料支持板１９を、上記所定方向と逆方向に傾斜させる。そして、上記測定子２４を上記矢印Ｘ、Ｈ方向に変位させる事で、上記図４の（Ｂ）の太線部分の形状を上記メモリ中に取り込む。
次いで、図４の（Ｃ）に示す様に、上記試料支持板１９の裏面を上に向けた状態で、この試料支持板１９を所定方向に傾斜させる。そして、上記測定子２４の先端部を前記透孔２６内に進入させた状態で、この測定子２４を上記矢印Ｘ、Ｈ方向に変位させる事により、上記図４の（Ｃ）の太線部分の形状を上記メモリ中に取り込む。尚、上記透孔２６は、前述した様に、上記測定子２４が揺動変位する仮想鉛直面上に位置している。
その後、図４の（Ｄ）に示す様に、上記試料支持板１９を、裏面を上方に向けた状態のまま、上記所定方向と逆方向に傾斜させる。そして、上記測定子２４の先端部を上記透孔２６内に進入させた状態で、この測定子２４を上記矢印Ｘ、Ｈ方向に変位させる事で、上記図４の（Ｄ）の太線部分の形状を上記メモリ中に取り込む。 After taking the shape of the thick line portion in FIG. 4A into the memory, as shown in FIG. 4B, the sample support plate 19 is inclined in the direction opposite to the predetermined direction. Then, by displacing the measuring element 24 in the directions of the arrows X and H, the shape of the thick line portion in FIG. 4B is taken into the memory.
Next, as shown in FIG. 4C, the sample support plate 19 is inclined in a predetermined direction with the back surface of the sample support plate 19 facing up. Then, with the leading end of the measuring element 24 inserted into the through-hole 26, the measuring element 24 is displaced in the directions of the arrows X and H, so that the thick line portion in FIG. Capture the shape into the memory. Note that, as described above, the through hole 26 is located on a virtual vertical plane on which the probe 24 swings and displaces.
Thereafter, as shown in FIG. 4D, the sample support plate 19 is tilted in the direction opposite to the predetermined direction with the back surface facing upward. Then, in a state where the tip of the measuring element 24 is inserted into the through hole 26, the measuring element 24 is displaced in the directions of the arrows X and H, so that the thick line portion in FIG. Capture the shape into the memory.

この様に、上記試料支持板１９の傾斜方向を４通りに変化させつつ、上記測定子２４の先端部で前記中間素材１４の外面をなぞる事により、この中間素材１４の外面形状（断面形状）を、全周に亙って捉える事ができる。そこで、図４の（Ａ）→（Ｂ）→（Ｃ）→（Ｄ）の各行程で別々に取り入れられた、上記中間素材１４の外面形状に関するデータを繋ぎ合わせて、図４の（Ｅ）に示す様な、この中間素材１４の外面形状を表すデータを得る。   In this way, by tracing the outer surface of the intermediate material 14 at the tip of the measuring element 24 while changing the inclination direction of the sample support plate 19 in four ways, the outer surface shape (cross-sectional shape) of the intermediate material 14 is measured. Can be caught all around. Therefore, the data on the outer surface shape of the intermediate material 14 taken separately in the steps (A) → (B) → (C) → (D) in FIG. Data representing the outer surface shape of the intermediate material 14 as shown in FIG.

この繋ぎ合わせ作業は、別々に取り入れられた４種類の測定データのうち、前記両測定基準部２７ａ、２７ｂに関するデータを重ね合わせる事により行なう。具体的には、前記両測定基準部２７ａ、２７ｂの中心を演算により求めてから、これら両中心を結ぶ直線（線分）を求め、この直線を基準として、上記４種類の測定データを重ね合わせる。この場合に、上記両測定基準部２７ａ、２７ｂの断面形状は高精度の円形であるので、これら両測定基準部２７ａ、２７ｂの中心は精度良く求める事ができ、上記４種類の測定データを精度良く重ね合わせる事ができる。従って、上記４種類の測定データを互いに同心に重ね合わせれば、上記中間素材１４の外面形状を表す、図４の（Ｅ）に示す様な、この中間素材１４の外面形状を正確に表すデータを得られる。この結果、各種物品の製造誤差を少なくする為のデータ等を効率良く得られる。   This joining operation is performed by superimposing data on the two measurement reference portions 27a and 27b among four types of measurement data taken separately. Specifically, after calculating the centers of the two measurement reference parts 27a and 27b, a straight line (line segment) connecting the two centers is obtained, and the four types of measurement data are overlaid on the basis of the straight lines. . In this case, since the cross-sectional shapes of both the measurement reference parts 27a and 27b are high-precision circles, the centers of both measurement reference parts 27a and 27b can be obtained with high accuracy, and the above four types of measurement data are obtained with high accuracy. You can superimpose well. Therefore, when the four types of measurement data are concentrically overlapped with each other, data representing the outer surface shape of the intermediate material 14 as shown in FIG. can get. As a result, data for reducing manufacturing errors of various articles can be obtained efficiently.

［実施の形態の第２例］
図５は、請求項１、２、４〜５に対応する、本発明の実施の形態の第２例を示している。本例の場合、試料支持板１９に被測定物である中間素材１４の一部を、この試料支持板１９の端縁よりも（図５の下方に）突出する状態で支持している。又、両測定基準部２７ａ、２７ｂの一部も、上記試料支持板１９の端縁よりも突出する状態で示している。そして、この試料支持板１９の端縁よりも突出した部分で、上記実施の形態の第１例と同様の手順により、上記中間素材１４の外面形状の測定を行なう。この場合、上記図４の（Ｃ）〜（Ｄ）で示した手順に就いても、上記突出した部分で行なうことができる。この為、試料支持板１９に透孔２６（図２参照）を形成する必要がない。その他の部分の構成及び作用に就いては、上述した実施の形態の第１例と同様であるから、重複する説明は省略する。 [Second Example of Embodiment]
FIG. 5 shows a second example of an embodiment of the present invention corresponding to claims 1, 2, 4-5. In the case of this example, a part of the intermediate material 14 that is the object to be measured is supported on the sample support plate 19 so as to protrude from the edge of the sample support plate 19 (downward in FIG. 5). In addition, a part of both measurement reference portions 27a and 27b is also shown in a state protruding from the edge of the sample support plate 19. Then, the outer surface shape of the intermediate material 14 is measured at the portion protruding from the edge of the sample support plate 19 by the same procedure as in the first example of the above embodiment. In this case, the procedure shown in FIGS. 4C to 4D can be carried out at the protruding portion. For this reason, it is not necessary to form the through holes 26 (see FIG. 2) in the sample support plate 19. Since the configuration and operation of the other parts are the same as those in the first example of the above-described embodiment, redundant description is omitted.

図示の例の場合には、被測定物の外面形状を全周に亙って測定する必要上、試料支持板１９に、測定子２４を進入させる為の透孔２６を設けている。これに対して、被測定物の外面形状を全周に亙り測定する必要がなければ、試料支持板に透孔を設けなくても良い。この場合も、測定基準部の測定データにより、上記被測定物の外面形状のそれぞれ一部ずつを表す、複数のデータの重ね合わせを行なう。
又、上述した実施の形態の第１〜２例に於ける、測定基準部２７ａ、２７ｂは、試料支持板１９と別体で設けたピンゲージを利用しているが、この試料支持板１９と一体に設けた部分を測定基準部とする事もできる。 In the case of the illustrated example, since it is necessary to measure the outer surface shape of the object to be measured over the entire circumference, a through hole 26 for allowing the probe 24 to enter is provided in the sample support plate 19. On the other hand, if it is not necessary to measure the outer surface shape of the object to be measured over the entire circumference, it is not necessary to provide a through hole in the sample support plate. Also in this case, a plurality of pieces of data representing a part of the outer surface shape of the object to be measured are overlapped by the measurement data of the measurement reference portion.
In the first and second examples of the above-described embodiment, the measurement reference portions 27a and 27b use a pin gauge provided separately from the sample support plate 19, but are integrated with the sample support plate 19. The part provided in can be used as a measurement reference part.

本発明の実施の形態の第１例を示す、物品の形状測定装置の斜視図。The perspective view of the shape measuring apparatus of articles | goods which shows the 1st example of embodiment of this invention. 図１のａ矢視図。FIG. 図２のｂ−ｂ断面図。Bb sectional drawing of FIG. 被測定物であるラジアルニードル軸受用保持器の中間素材の外形を測定する手順を順番に示す、図３と同方向から見た図。The figure seen from the same direction as FIG. 3 which shows the procedure which measures the external shape of the intermediate material of the radial needle bearing retainer which is a to-be-measured object in order. 本発明の実施の形態の第２例を示す、図２と同様の図。The figure similar to FIG. 2 which shows the 2nd example of embodiment of this invention. 従来から知られている遊星歯車の回転支持装置の１例を示す部分断面図。The fragmentary sectional view which shows one example of the rotation support apparatus of the planetary gear conventionally known. 同じくラジアルニードル軸受用保持器の１例を示す斜視図。The perspective view which similarly shows one example of the retainer for radial needle bearings. 図７のＣ−Ｃ断面図。CC sectional drawing of FIG. 円筒状に形成する前の中間素材を、円筒状とした場合に外周面となる側から見た図。The figure seen from the side used as an outer peripheral surface, when the intermediate material before forming in a cylindrical shape is made into a cylindrical shape.

符号の説明Explanation of symbols

１ キャリア
２ａ、２ｂ 支持板
３ 支持軸
４ 遊星歯車
５ ラジアルニードル軸受
６ ニードル
７ 保持器
８ 内輪軌道
９ 外輪軌道
１０ａ、１０ｂ フローティングワッシャ
１１ リム部
１２ 柱部
１３ ポケット
１４ 中間素材
１５ 係止突部
１６ 内径側係止部
１７ 基台
１８ 測定器
１９ 試料支持板
２０ 支柱
２１ 昇降ブロック
２２ 水平移動ブロック
２３ 旋回腕
２４ 測定子
２５ 精密ロータリアクチュエータ
２６ 透孔
２７ａ、２７ｂ 測定基準部
２８ 凹部
２９ 枢軸
３０ 重錘 DESCRIPTION OF SYMBOLS 1 Carrier 2a, 2b Support plate 3 Support shaft 4 Planetary gear 5 Radial needle bearing 6 Needle 7 Cage 8 Inner ring track 9 Outer ring track 10a, 10b Floating washer 11 Rim part 12 Column part 13 Pocket 14 Intermediate material 15 Locking protrusion 16 Inner diameter side locking part 17 Base 18 Measuring instrument 19 Sample support plate 20 Column 21 Elevating block 22 Horizontal movement block 23 Turning arm 24 Measuring element 25 Precision rotary actuator 26 Through hole 27a, 27b Measurement reference part 28 Recess 29 Pivot 30 Weight

Claims (5)

測定器により測定可能な部分に測定基準部を設けた試料支持板に被測定物品を、この試料支持板に対し動かない様に支持した状態で、上記測定器により、この被測定物品の表面形状の一部及び上記測定基準部の表面形状を測定した後、上記試料支持板と上記測定器との相対角度を変更してから、上記測定器により、この測定基準部の表面形状及び上記被測定物品の表面形状の他部を測定し、この被測定物品の表面形状の一部の測定データと他部の測定データとを、上記測定基準部の表面形状の測定データを介して繋ぎ合わせる、物品の形状測定方法。   The surface shape of the article to be measured is measured by the measuring instrument in a state where the article to be measured is supported on the sample supporting plate provided with a measurement reference portion in a portion measurable by the measuring instrument so as not to move with respect to the sample supporting plate. After measuring the surface shape of a part of the measurement reference portion and the measurement reference portion, the relative angle between the sample support plate and the measurement device is changed, and then the surface shape of the measurement reference portion and the measurement target are measured by the measurement device. An article in which the other part of the surface shape of the article is measured, and the measurement data of a part of the surface shape of the article to be measured and the measurement data of the other part are connected via the measurement data of the surface shape of the measurement reference part. Shape measurement method. 基台と、この基台の一部上面に支持された測定器と、この基台の他部上面に支持された、被測定物を支持する試料支持板とを備え、この試料支持板のうちで上記被測定物を支持した面に測定基準部を設けると共に、上記測定器と上記試料支持板との相対角度の調節を可能とした、物品の形状測定装置。   A base, a measuring instrument supported on the upper surface of a part of the base, and a sample support plate for supporting an object to be measured supported on the upper surface of the other part of the base. A shape measuring device for an article, in which a measurement reference portion is provided on a surface supporting the object to be measured and the relative angle between the measuring device and the sample support plate can be adjusted. 試料支持板のうちで被測定物を支持する部分に、測定器によりこの被測定物を測定する方向の寸法以上の長さ寸法を有する透孔を設け、この透孔を通じて、この被測定物のうちで上記試料支持板に対向する面側の外形を測定自在とした、請求項２に記載した物品の形状測定装置。   A portion of the sample support plate that supports the object to be measured is provided with a through hole having a length that is equal to or larger than the dimension in the direction in which the object to be measured is measured by a measuring instrument. The shape measuring apparatus for an article according to claim 2, wherein the outer shape of the surface facing the sample support plate can be measured. 試料支持板に被測定物の一部を、この試料支持板の端縁よりも突出した状態で支持可能とし、この試料支持板の端縁よりも突出した部分で、この被測定物のうちでこの試料支持板に対向する面側の外形を測定自在とした、請求項２に記載した物品の形状測定装置。   A part of the object to be measured can be supported on the sample support plate in a state of protruding from the edge of the sample support plate, and the portion of the object to be measured is protruded from the edge of the sample support plate. The shape measuring apparatus for an article according to claim 2, wherein the outer shape of the surface facing the sample support plate can be measured. それぞれの断面形状が円形である複数の測定基準部を備える、請求項２〜４のうちの何れか１項に記載した物品の形状測定装置。   The shape measuring apparatus for an article according to any one of claims 2 to 4, comprising a plurality of measurement reference parts each having a circular cross-sectional shape.
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