JP2008292103A5 - - Google Patents

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JP2008292103A5
JP2008292103A5 JP2007139920A JP2007139920A JP2008292103A5 JP 2008292103 A5 JP2008292103 A5 JP 2008292103A5 JP 2007139920 A JP2007139920 A JP 2007139920A JP 2007139920 A JP2007139920 A JP 2007139920A JP 2008292103 A5 JP2008292103 A5 JP 2008292103A5
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temperature
cooling stage
stage
temperature sensor
heating means
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JP2007139920A
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JP2008292103A (en
JP4927642B2 (en
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Claims (8)

第一冷却ステージ及び第二冷却ステージと、前記第一冷却ステージの温度を検出する第一温度センサと、前記第二冷却ステージの温度を検出する第二温度センサと、前記第一冷却ステージを加熱するための加熱手段とを有する二段式冷凍機の運転制御方法において、A first cooling stage, a second cooling stage, a first temperature sensor for detecting the temperature of the first cooling stage, a second temperature sensor for detecting the temperature of the second cooling stage, and heating the first cooling stage In an operation control method of a two-stage refrigerator having a heating means for
前記第一温度センサで検出した前記第一冷却ステージの温度が第一冷却ステージの目標温度を維持するように冷凍サイクル速度を制御すると共に、While controlling the refrigeration cycle speed so that the temperature of the first cooling stage detected by the first temperature sensor maintains the target temperature of the first cooling stage,
前記第二温度センサで検出した前記第二冷却ステージの温度に基づいて前記加熱手段をオン・オフすることにより、前記冷凍サイクル速度を変更させて前記第二冷却ステージの温度を制御することを特徴とする二段式冷凍機の運転制御方法。The temperature of the second cooling stage is controlled by changing the refrigeration cycle speed by turning the heating means on and off based on the temperature of the second cooling stage detected by the second temperature sensor. An operation control method for a two-stage refrigerator. 前記第二温度センサで検出した前記第二冷却ステージの温度が、第二冷却ステージの目標温度より低くなったときに前記加熱手段をオフにし、前記第二冷却ステージの目標温度より高くなったときに前記加熱手段をオンにすることを特徴とする請求項１に記載の二段式冷凍機の運転制御方法。When the temperature of the second cooling stage detected by the second temperature sensor is lower than the target temperature of the second cooling stage, the heating means is turned off and the temperature is higher than the target temperature of the second cooling stage The operation control method for a two-stage refrigerator according to claim 1, wherein the heating means is turned on. 前記加熱手段のオン・オフが、電気ヒータのオン・オフ、高温部との熱伝達と熱絶縁を切り替える熱スイッチのオン・オフ、ヘリウムガスの循環配管の設置による循環熱量の調整器のオン・オフ又は誘導加熱装置のオン・オフであることを特徴とする請求項１又は２に記載の二段式冷凍機の運転制御方法。ON / OFF of the heating means is ON / OFF of an electric heater, ON / OFF of a heat switch for switching between heat transfer and heat insulation with a high temperature part, ON / OFF of a circulating heat amount regulator by installation of a helium gas circulation pipe The operation control method for a two-stage refrigerator according to claim 1 or 2, wherein the operation control is off or on / off of an induction heating device. 第一冷却ステージ及び第二冷却ステージと、前記第一冷却ステージの温度を検出する第一温度センサと、前記第二冷却ステージの温度を検出する第二温度センサと、前記第一冷却ステージを加熱するための加熱手段とを有する二段式冷凍機を用いたクライオポンプの運転制御方法において、A first cooling stage, a second cooling stage, a first temperature sensor for detecting the temperature of the first cooling stage, a second temperature sensor for detecting the temperature of the second cooling stage, and heating the first cooling stage In a cryopump operation control method using a two-stage refrigerator having a heating means for
前記二段式冷凍機を請求項１〜３のいずれか１項に記載の運転制御方法で制御することでクライオポンプの運転を制御することを特徴とするクライオポンプの運転制御方法。The operation control method of a cryopump characterized by controlling operation of a cryopump by controlling the said two-stage refrigerator with the operation control method of any one of Claims 1-3. 二段式冷凍機であって、A two-stage refrigerator,
第一冷却ステージと、A first cooling stage;
第二冷却ステージと、A second cooling stage;
前記第一冷却ステージの温度を検出する第一温度センサと、A first temperature sensor for detecting the temperature of the first cooling stage;
前記第二冷却ステージの温度を検出する第二温度センサと、A second temperature sensor for detecting the temperature of the second cooling stage;
前記第一冷却ステージを加熱するための加熱手段と、Heating means for heating the first cooling stage;
前記第二温度センサにより検知された第二冷却ステージの温度に応じて前記加熱手段をオン・オフする加熱制御器とA heating controller for turning on / off the heating means in accordance with the temperature of the second cooling stage detected by the second temperature sensor;
を備えることを特徴とする二段式冷凍機。A two-stage refrigerator. 二段式冷凍機であって、A two-stage refrigerator,
それぞれ目標温度が設定された第一冷却ステージ及び第二冷却ステージと、A first cooling stage and a second cooling stage each having a target temperature set;
前記第一冷却ステージを加熱するための加熱手段と、Heating means for heating the first cooling stage;
二段式冷凍機の駆動電源周波数を制御するインバータと、An inverter for controlling the drive power frequency of the two-stage refrigerator,
前記第一冷却ステージの温度を検出する第一温度センサと、A first temperature sensor for detecting the temperature of the first cooling stage;
前記第二冷却ステージの温度を検出する第二温度センサとを備え、A second temperature sensor for detecting the temperature of the second cooling stage,
前記インバータは、前記第二温度センサで検出した前記第二冷却ステージの温度が前記第二冷却ステージの目標温度より高いときに、前記加熱手段がオンとされることで前記駆動電源周波数を増大させ、前記第二温度センサで検出した前記第二冷却ステージの温度が前記第二冷却ステージの目標温度より低いときに、前記加熱手段がオフとされることで前記駆動電源周波数を減少させることを特徴とする二段式冷凍機。The inverter increases the drive power supply frequency by turning on the heating means when the temperature of the second cooling stage detected by the second temperature sensor is higher than the target temperature of the second cooling stage. When the temperature of the second cooling stage detected by the second temperature sensor is lower than the target temperature of the second cooling stage, the driving power supply frequency is decreased by turning off the heating means. A two-stage refrigerator. 前記加熱手段が、電気ヒータ、高温部との熱伝達と熱絶縁を切り替える熱スイッチ、ヘリウムガスの循環配管の設置による循環熱量の調整器又は誘導加熱装置であることを特徴とする請求項５又は６に記載の二段式冷凍機。The heating means is an electric heater, a heat switch for switching between heat transfer and heat insulation with a high-temperature part, a regulator for circulating heat by installing a circulation pipe for helium gas, or an induction heating device. 6. A two-stage refrigerator as described in 6. 請求項５〜７のいずれか１項に記載の二段式冷凍機を有することを特徴とするクライオポンプ。A cryopump having the two-stage refrigerator according to any one of claims 5 to 7.
JP2007139920A 2007-05-28 2007-05-28 Operation control method for two-stage refrigerator, operation control method for cryopump using two-stage refrigerator, two-stage refrigerator and cryopump Active JP4927642B2 (en)

Priority Applications (1)

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JP2007139920A JP4927642B2 (en) 2007-05-28 2007-05-28 Operation control method for two-stage refrigerator, operation control method for cryopump using two-stage refrigerator, two-stage refrigerator and cryopump

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JP2007139920A JP4927642B2 (en) 2007-05-28 2007-05-28 Operation control method for two-stage refrigerator, operation control method for cryopump using two-stage refrigerator, two-stage refrigerator and cryopump

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JP2008292103A JP2008292103A (en) 2008-12-04
JP2008292103A5 true JP2008292103A5 (en) 2009-11-05
JP4927642B2 JP4927642B2 (en) 2012-05-09

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010097888A1 (en) * 2009-02-24 2010-09-02 キヤノンアネルバテクニクス株式会社 Method for controlling the operation of two-stage refrigerator, method for controlling the operation of cryo pump equipped with two-stage refrigerator, two-stage refrigerator, cryo pump, and vacuum substrate processing device
JP4912438B2 (en) * 2009-07-16 2012-04-11 住友重機械工業株式会社 Cryopump and cryopump monitoring method
CN103353184B (en) * 2013-07-29 2015-02-04 中国科学院理化技术研究所 Linear type double-acting refrigeration system
US10060655B2 (en) * 2014-08-11 2018-08-28 Raytheon Company Temperature control of multi-stage cryocooler with load shifting capabilities
JP6351525B2 (en) 2015-03-04 2018-07-04 住友重機械工業株式会社 Cryopump system, cryopump control device, and cryopump regeneration method
KR102536330B1 (en) * 2022-09-08 2023-05-26 크라이오에이치앤아이(주) Method for regenerating cryogenic pump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0338113B1 (en) * 1988-04-22 1992-01-29 Leybold Aktiengesellschaft Method for the adaptation of a 2-stage cryogenic pump to a specific gas
JPH0893643A (en) * 1994-09-27 1996-04-09 Ebara Corp Cryopump
JPH08232839A (en) * 1995-02-27 1996-09-10 Daikin Ind Ltd Extremely low temperature refrigerator
JP2000018158A (en) * 1998-06-30 2000-01-18 Daikin Ind Ltd Cryopump and condensation method of xenon gas by cryopump

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