JP2008288328A - Magnetic shield device - Google Patents

Magnetic shield device Download PDF

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JP2008288328A
JP2008288328A JP2007130815A JP2007130815A JP2008288328A JP 2008288328 A JP2008288328 A JP 2008288328A JP 2007130815 A JP2007130815 A JP 2007130815A JP 2007130815 A JP2007130815 A JP 2007130815A JP 2008288328 A JP2008288328 A JP 2008288328A
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magnetic
shield
highly conductive
conductive material
material layer
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JP5104024B2 (en
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Toshiyuki Miyazawa
俊行 宮澤
Kunio Kazami
邦夫 風見
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Yokogawa Electric Corp
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Yokogawa Electric Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a magnetic shield device having a wall structure whose shield performance is improved. <P>SOLUTION: The magnetic shield device shields an inner space surrounded by a wall 500 consisting of high-conductive material layers 521, 522 and 523 and magnetic material layers 531, 532 and 533. In the wall 500, the outer high-conductive material layers 521, 522 and 523 and the inner magnetic material layers 531, 532 and 533 respectively form pairs. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、内部で微弱な磁場を計測する磁気シールドルームなどに適用する磁気シールド装置に関し、特に磁気シールド装置の壁構造に関する。   The present invention relates to a magnetic shield device applied to a magnetic shield room or the like for measuring a weak magnetic field inside, and more particularly to a wall structure of the magnetic shield device.

従来から、例えば微弱な脳磁場を計測する脳磁計システムのように、微弱な磁場を計測する必要がある生体磁気計測システムなどは、磁気シールドルーム内で測定が行われていた。 Conventionally, for example, a biomagnetic measurement system that needs to measure a weak magnetic field, such as a magnetoencephalograph system that measures a weak brain magnetic field, has been measured in a magnetic shield room.

図６は従来の磁気シールドルームで施工される壁の構造を示す構成説明図である。磁気シールドルーム１は、磁気シールドの壁構造により外部の磁気を遮蔽し、壁で囲まれた内側の空間を電磁シールドすることにより、内部で微弱な磁場の計測を可能にするものである。磁気シールドルーム１の、角の部位Ａの壁構造は、円の中に断面構造を図示するように、高導電材料層２１が磁性材料層３１、３２に挟まれた構造となっている。高導電材料層２１は電磁シールドの役割をしており、例えばアルミや銅などからなる。磁性体材料層３１、３２は磁気シールドの役割をしており、例えばパーマロイなどからなっている。 FIG. 6 is an explanatory diagram showing the structure of a wall constructed in a conventional magnetic shield room. The magnetic shield room 1 shields external magnetism by the wall structure of the magnetic shield and electromagnetically shields the inner space surrounded by the wall, thereby enabling measurement of a weak magnetic field inside. The wall structure of the corner portion A of the magnetic shield room 1 has a structure in which a highly conductive material layer 21 is sandwiched between magnetic material layers 31 and 32 so as to illustrate a cross-sectional structure in a circle. The highly conductive material layer 21 serves as an electromagnetic shield, and is made of, for example, aluminum or copper. The magnetic material layers 31 and 32 serve as a magnetic shield, and are made of, for example, permalloy.

磁気シールドルームに関連する先行技術文献としては次のようなものがある。   Prior art documents related to the magnetic shield room include the following.

特開２００４−３５６４０６号公報JP 2004-356406 A

従来技術では、磁気シールドルームの壁の構造において、高導電材料を用いた電磁シールド層がありながら、その電磁シールド性能を十分に発揮しておらず、結果的に磁気シールドルームのシールド性能が不十分であった（詳細は本発明との比較で後述する）。 In the prior art, although there is an electromagnetic shield layer using a highly conductive material in the wall structure of the magnetic shield room, the electromagnetic shield performance is not fully exhibited, resulting in poor shield performance in the magnetic shield room. It was sufficient (details will be described later in comparison with the present invention).

本発明はこのような課題を解決しようとするもので、シールド性能が向上した壁構造を有する磁気シールド装置を提供することを目的とする。   An object of the present invention is to provide a magnetic shield device having a wall structure with improved shielding performance.

このような課題を達成するために、本発明のうち請求項１記載の発明は、
高導電材料層と磁性材料層からなる壁で囲まれた内側の空間をシールドする磁気シールド装置において、
前記壁は外側の高導電材料層と内側の磁性材料層とが対をなして形成されている
ことを特徴とする。 In order to achieve such a problem, the invention according to claim 1 of the present invention is:
In a magnetic shield device that shields an inner space surrounded by a wall made of a highly conductive material layer and a magnetic material layer,
The wall is formed by pairing an outer highly conductive material layer and an inner magnetic material layer.

請求項２記載の発明は、
請求項１記載の磁気シールド装置において、
前記高導電材料層と前記磁性材料層の対からなる層を複数形成して多層構造とした
ことを特徴とする。 The invention according to claim 2
The magnetic shield device according to claim 1,
A multilayer structure is formed by forming a plurality of layers composed of pairs of the highly conductive material layer and the magnetic material layer.

請求項３記載の発明は、
請求項１乃至請求項２のいずれかに記載の磁気シールド装置において、
任意の一方向の前記高導電材料層を他の方向の前記高導電材料層より厚くする
ことを特徴とする。 The invention described in claim 3
The magnetic shield device according to any one of claims 1 to 2,
The highly conductive material layer in any one direction is made thicker than the highly conductive material layer in the other direction.

以上説明したことから明らかなように、本発明によれば、高導電材料層と磁性材料層からなる壁で囲まれた内側の空間をシールドする磁気シールド装置において、前記壁は外側の高導電材料層と内側の磁性材料層とが対をなして形成されていることにより、シールド性能が向上した壁構造を有する磁気シールド装置を提供することができる。   As is apparent from the above description, according to the present invention, in the magnetic shield device that shields the inner space surrounded by the wall made of the highly conductive material layer and the magnetic material layer, the wall is the outer highly conductive material. By forming the layer and the inner magnetic material layer in pairs, a magnetic shield device having a wall structure with improved shielding performance can be provided.

以下本発明の実施の形態について図面を用いて詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

図１は、本発明の基本となる、高導電材料に関する電磁シールドの原理を説明するための円筒シールド体の構成を示す構成説明図である。図１（ａ）（ｂ）において、円筒シールド体は、例えばパーマロイのような磁性円筒シールド体１３０，２３０と、例えばアルミや銅のような高導電円筒シールド体１２０，２２０からなっている。図１に示すように、（ａ）と（ｂ）では、磁性円筒シールド体と高導電円筒シールド体の位置が異なっており、（ａ）では、高導電円筒シールド体１２０が磁性円筒シールド体１３０の外側に配置され、（ｂ）では高導電円筒シールド体２２０が磁性円筒シールド体２３０の内側に配置されている。 FIG. 1 is a configuration explanatory view showing the configuration of a cylindrical shield body for explaining the principle of an electromagnetic shield relating to a highly conductive material, which is the basis of the present invention. 1A and 1B, the cylindrical shield body includes magnetic cylindrical shield bodies 130 and 230 such as permalloy, and highly conductive cylindrical shield bodies 120 and 220 such as aluminum and copper. As shown in FIG. 1, the positions of the magnetic cylindrical shield body and the highly conductive cylindrical shield body are different in (a) and (b). In (a), the high conductive cylindrical shield body 120 is the magnetic cylindrical shield body 130. In (b), the highly conductive cylindrical shield body 220 is disposed inside the magnetic cylindrical shield body 230.

図２（ａ）、（ｂ）は、それぞれ図１（ａ）、（ｂ）に示した円筒シールド体に、外部磁束ΔΦを印加したときの状態を示す動作説明図である。図２（ａ）の円筒シールド体に外部磁場ΔΦ（＝ｄΦ／ｄｔ）が印加されると、磁性円筒シールド体１３０に外部磁束ΔΦが集められる。すると、高導電円筒シールド体１２０には外部磁束の時間変化ΔΦを打ち消すように遮蔽電流Ｉが流れる。その結果、高導電円筒シールド体１２０が電磁シールド効果を発揮し、図２（ａ）の点１４０でシールド率を測定すると、磁性円筒シールド体１３０による磁気シールド効果と高導電円筒シールド体１２０による電磁シールド効果が共に検出される。この動作は、外部磁場が印加された場合の有芯コイルと同じである。   FIGS. 2A and 2B are operation explanatory views showing a state when an external magnetic flux ΔΦ is applied to the cylindrical shield body shown in FIGS. 1A and 1B, respectively. When an external magnetic field ΔΦ (= dΦ / dt) is applied to the cylindrical shield body of FIG. 2A, the external magnetic flux ΔΦ is collected on the magnetic cylindrical shield body 130. Then, a shielding current I flows through the high-conductivity cylindrical shield body 120 so as to cancel the time change ΔΦ of the external magnetic flux. As a result, when the shield ratio is measured at point 140 in FIG. 2A, the high-conductivity cylindrical shield body 120 exhibits an electromagnetic shield effect, and the magnetic shield effect by the magnetic cylinder shield body 130 and the electromagnetic shield effect by the high-conductivity cylindrical shield body 120 are obtained. Both shield effects are detected. This operation is the same as the cored coil when an external magnetic field is applied.

一方、図２（ｂ）では、外部磁束ΔΦが印加されると、磁性円筒シールド体２３０に外部磁束ΔΦが集められる。しかし、磁性円筒シールド体２３０で囲まれた空間は磁気的にシールドされるため、磁性円筒シールド体２３０の内側にある高導電円筒シールド体２２０と鎖交する磁束変化量は小さくなり、遮蔽電流は発生しにくくなる。したがって、図２（ｂ）の測定ポイント２４０においてシールド率を測定すると、磁性円筒シールド体２３０による磁気シールド効果が主として観測され、高導電円筒シールド体２２０の電磁シールド効果はあまり観測されない。 On the other hand, in FIG. 2B, when the external magnetic flux ΔΦ is applied, the external magnetic flux ΔΦ is collected in the magnetic cylindrical shield body 230. However, since the space surrounded by the magnetic cylindrical shield body 230 is magnetically shielded, the amount of change in magnetic flux interlinking with the highly conductive cylindrical shield body 220 inside the magnetic cylindrical shield body 230 is reduced, and the shielding current is Less likely to occur. Therefore, when the shield rate is measured at the measurement point 240 in FIG. 2B, the magnetic shield effect by the magnetic cylindrical shield body 230 is mainly observed, and the electromagnetic shield effect of the highly conductive cylindrical shield body 220 is not observed so much.

図３は、上記シールド率の周波数特性を示すチャートである。太実線は円筒シールド体の構成が図２（ｂ）の場合のシールド効果を示し、グラフ線３０２は高導電円筒シールド体２２０の電磁シールド効果を示し、グラフ線３０１は磁性円筒シールド体２３０のシールド効果を示す。このときのグラフ線３０２とグラフ線３０１のコーナー周波数はｆ０である。これに対し円筒シールド体の構成が図２（ａ）の場合は、コーナー周波数ｆ０が図３のｆ１に移動するとともに、高導電円筒シールド体（１２０）の電磁シールド効果は３０２から太点線のグラフ線３０３にシフトする。以上示したように、高導電円筒シールド体が磁性円筒シールド体の外側にある場合のほうが、電磁シールド効果がより強調されることがグラフから明らかである。 FIG. 3 is a chart showing frequency characteristics of the shield rate. The thick solid line indicates the shielding effect when the configuration of the cylindrical shield body is as shown in FIG. 2B, the graph line 302 indicates the electromagnetic shielding effect of the highly conductive cylindrical shield body 220, and the graph line 301 indicates the shield of the magnetic cylindrical shield body 230. Show the effect. The corner frequency of the graph line 302 and the graph line 301 at this time is f0. On the other hand, when the configuration of the cylindrical shield body is shown in FIG. 2A, the corner frequency f0 moves to f1 in FIG. 3, and the electromagnetic shielding effect of the high-conductivity cylindrical shield body (120) is a graph from 302 to a thick dotted line. Shift to line 303. As shown above, it is clear from the graph that the electromagnetic shielding effect is more emphasized when the highly conductive cylindrical shield is outside the magnetic cylindrical shield.

図４は、高導電円筒シールド体が磁性円筒シールド体の外側にある構造のものを対とし、それを多層構造にした場合のシールド特性を示すチャートである。グラフ線４０１は１対（１層）の場合で、電磁シールド特性は１次特性を示す。グラフ線４０２は２対（２層）の場合で、電磁シールド特性は２次特性を示す。グラフ線４０３は３対（３層）の場合で、電磁シールド特性は３次特性を示す。ｆ１はこれらのコーナー周波数を示している。 FIG. 4 is a chart showing the shield characteristics when a pair of high-conductivity cylindrical shield bodies outside the magnetic cylindrical shield body is paired to form a multilayer structure. The graph line 401 is a pair (one layer), and the electromagnetic shield characteristic indicates a primary characteristic. A graph line 402 is a case of two pairs (two layers), and the electromagnetic shield characteristic indicates a secondary characteristic. A graph line 403 is a case of three pairs (three layers), and the electromagnetic shield characteristic indicates a tertiary characteristic. f1 indicates these corner frequencies.

このように、高導電円筒シールド体が磁性円筒シールド体の外側にある構造のものを対とし、それを多層にすることによって、電磁シールド効果が更に強調されることになる。   In this way, the electromagnetic shielding effect is further emphasized by making a pair of structures in which the high-conductivity cylindrical shield body is outside the magnetic cylindrical shield body and making it a multilayer.

また、高導電円筒シールド体の厚さを厚くすると遮蔽電流が流れやすくなるため、電磁シールド効果は太点線のグラフ線４０４のように低域にシフトし、コーナー周波数が低域（ｆ２）にずれ、シールド効果が更に増加する。 In addition, if the thickness of the high-conductivity cylindrical shield body is increased, the shielding current easily flows. Therefore, the electromagnetic shielding effect shifts to a low frequency as indicated by the bold dotted line 404, and the corner frequency shifts to the low frequency (f2). , The shielding effect is further increased.

以上の検討結果から、磁気シールドルームにおいて高導電材料の電磁シールド効果を十分発揮させるには、生体磁気計測システムなどが配置されたシールドルーム内の空間に対し、高導電材料が磁性材料の外側となるように施工すればよいことが明らかになった。 From the above examination results, in order to fully demonstrate the electromagnetic shielding effect of the highly conductive material in the magnetic shield room, the highly conductive material is placed on the outside of the magnetic material with respect to the space in the shield room where the biomagnetic measurement system is arranged. It became clear that it should be constructed so that.

図５は、本発明の実施の形態に係る磁気シールド装置の一実施例で、図１〜図４の検討結果を踏まえて施工した磁気シールドルームを示す構成説明図である。磁気シールドルーム１１は、磁気シールドの壁構造により外部の磁気を遮蔽し、壁５００で囲まれた内側の空間を電磁シールドすることにより、内部で微弱な磁場の計測を可能にするものである。磁気シールドルーム１１の、角（かど）の部位Ｂの壁構造は、円の中に断面構造を図示するように、壁５００は、最外層５１１、中間層５１２、最内層５１３なる３層（多層）の多層構造を持っている。最外層５１１は、高導電材料層５２１と磁性体材料層５３１の対から構成され、中間層５１２は、高導電材料層５２２と磁性体材料層５３２の対から構成され、最内層５１３は、高導電材料層５２３と磁性体材料層５３３の対から構成される。各層では、高導電材料層５２１，５２２，５２３がそれぞれ磁性体材料層５３１，５３２，５３３の外側となるように配設され、それらが対になって磁気シールドルームの壁構造の１つの層を形成しており、さらに、それらが３層（多層）構造となっている。高導電材料層５２１，５２２，５２３は電磁シールドとして働き、例えばアルミや銅などからなる。磁性体材料層５３１，５３２，５３３は磁気シールドとして働き、例えばパーマロイなどからなる。また、上記３層５１１、５１２、５１３の間には、電磁シールド効果を高めるために、空気層その他の、高導電材料や磁性体材料以外からなる層が設けられている。 FIG. 5 is an example of a magnetic shield device according to an embodiment of the present invention, and is a configuration explanatory view showing a magnetic shield room constructed based on the examination results of FIGS. The magnetic shield room 11 shields external magnetism by the wall structure of the magnetic shield, and electromagnetically shields the inner space surrounded by the wall 500, thereby enabling measurement of a weak magnetic field inside. The wall structure of the corner portion B of the magnetic shield room 11 has three layers (multilayers) including an outermost layer 511, an intermediate layer 512, and an innermost layer 513, as shown in a cross-sectional structure in a circle. ) Has a multilayer structure. The outermost layer 511 is composed of a pair of a highly conductive material layer 521 and a magnetic material layer 531, the intermediate layer 512 is composed of a pair of a highly conductive material layer 522 and a magnetic material layer 532, and the innermost layer 513 is a high layer. A pair of a conductive material layer 523 and a magnetic material layer 533 is formed. In each layer, the highly conductive material layers 521, 522, and 523 are disposed so as to be outside the magnetic material layers 531, 532, and 533, respectively, and they are paired to form one layer of the wall structure of the magnetic shield room. In addition, they have a three-layer (multilayer) structure. The highly conductive material layers 521, 522, and 523 function as electromagnetic shields and are made of, for example, aluminum or copper. The magnetic material layers 531, 532, and 533 function as magnetic shields and are made of, for example, permalloy. Between the three layers 511, 512, and 513, an air layer and other layers other than a highly conductive material and a magnetic material are provided in order to enhance the electromagnetic shielding effect.

上記のような構成の磁気シールド装置によれば、磁気シールドルームの壁内に施工されている、例えばアルミや銅などの高導電材料が磁性材料の外側となるように配置することにより、その高導電材料が持っている、特に電磁シールド性能を向上させ、結果的に磁気シールドルームのシールド性能を向上させることができる。   According to the magnetic shield device having the above-described configuration, the high-conductivity material, such as aluminum or copper, which is constructed in the wall of the magnetic shield room, is arranged so as to be outside the magnetic material. In particular, the electromagnetic shielding performance of the conductive material can be improved, and as a result, the shielding performance of the magnetic shield room can be improved.

また、高導電材料と磁性材料が対となって磁気シールドルームの１つの層を形成し、それを多層構造とすることにより、電磁シールド性能をより向上させ、磁気シールドルームのシールド性能もより向上させることができる。 In addition, a highly conductive material and a magnetic material are paired to form one layer of a magnetic shield room, which is made into a multilayer structure, thereby improving the electromagnetic shield performance and further improving the shield performance of the magnetic shield room. Can be made.

なお、上記の実施例で、高導電材料の厚さを厚くすれば、遮蔽電流が流れやすくなりシールド効果を増加することができる。この原理を利用して、例えば、任意の一方向の高導電材料層を他の方向の高導電材料層より厚くすることにより、その一方向（厚くした高導電材料層と並行な方向）のみのシールド効果を大きくしてもよい。都市部では上下方向の磁気雑音が大きいことが多く、シールドルームの側壁の高導電材料パネルを厚くすることにより、経済的に効果の高い磁気シールドルームを形成することができる。 In the above embodiment, if the thickness of the highly conductive material is increased, the shielding current can easily flow and the shielding effect can be increased. By utilizing this principle, for example, by making a highly conductive material layer in any one direction thicker than a highly conductive material layer in another direction, only in that one direction (direction parallel to the thickened highly conductive material layer) The shielding effect may be increased. In urban areas, the magnetic noise in the vertical direction is often large, and by increasing the thickness of the highly conductive material panel on the side wall of the shield room, an economically effective magnetic shield room can be formed.

また、上記の実施例では３層の場合の壁構造を示したが、これに限定されず、１層（対）以上の任意の層数とすることができる。   Moreover, although the wall structure in the case of three layers is shown in the above embodiment, the present invention is not limited to this, and the number of layers can be any number of one layer (pair) or more.

また、上記の実施例では磁気シールド装置として磁気シールドルームを構成する場合を示したが、これに限られず、回路素子の電磁シールドなど、内部空間を電磁シールドする必要がある各種の装置に適用することができる。   Moreover, although the case where the magnetic shield room is configured as the magnetic shield device is shown in the above embodiment, the present invention is not limited to this, and the present invention is applied to various devices that need to electromagnetically shield the internal space, such as an electromagnetic shield of a circuit element. be able to.

また、上記実施例に示した壁構造は、シールドルームなどの壁に取り付けられるシールドパネルによって実現してもよい。   The wall structure shown in the above embodiment may be realized by a shield panel attached to a wall such as a shield room.

本発明の電磁シールドの原理を説明するための円筒シールド体の構成説明図である。It is composition explanatory drawing of the cylindrical shield body for demonstrating the principle of the electromagnetic shield of this invention. 図１の円筒シールド体の電磁シールド作用を説明するための動作説明図である。It is operation | movement explanatory drawing for demonstrating the electromagnetic shielding effect | action of the cylindrical shield body of FIG. 図１の円筒シールド体の、シールド率の周波数特性を示すチャートである。It is a chart which shows the frequency characteristic of the shield rate of the cylindrical shield body of FIG. 図１の円筒シールド体を多層構造にした場合のシールド特性を示すチャートである。It is a chart which shows the shield characteristic at the time of making the cylindrical shield body of FIG. 1 into a multilayer structure. 本発明の実施の形態に係る磁気シールド装置の一実施例を示す構成説明図である。It is a structure explanatory view showing one example of a magnetic shield device concerning an embodiment of the invention. 従来の磁気シールドルームで施工される壁の構造例を示す構成説明図である。It is composition explanatory drawing which shows the structural example of the wall constructed in the conventional magnetic shield room.

符号の説明Explanation of symbols

１１ 磁気シールドルーム
５００ 壁
５２１，５２２，５２３ 高導電材料層
５３１，５３２，５３３ 磁性材料層 11 Magnetic shield room 500 Wall 521,522,523 High conductive material layer 531,532,533 Magnetic material layer

Claims (3)

高導電材料層と磁性材料層からなる壁で囲まれた内側の空間をシールドする磁気シールド装置において、
前記壁は外側の高導電材料層と内側の磁性材料層とが対をなして形成されている
ことを特徴とする磁気シールド装置。 In a magnetic shield device that shields an inner space surrounded by a wall composed of a highly conductive material layer and a magnetic material layer,
The magnetic shield device according to claim 1, wherein the wall is formed by pairing an outer highly conductive material layer and an inner magnetic material layer. 前記高導電材料層と前記磁性材料層の対からなる層を複数形成して多層構造とした
ことを特徴とする請求項１記載の磁気シールド装置。 2. The magnetic shield device according to claim 1, wherein a plurality of layers composed of a pair of the highly conductive material layer and the magnetic material layer are formed to have a multilayer structure. 任意の一方向の前記高導電材料層を他の方向の前記高導電材料層より厚くする
ことを特徴とする請求項１乃至請求項２のいずれかに記載の磁気シールド装置。 3. The magnetic shield device according to claim 1, wherein the highly conductive material layer in any one direction is made thicker than the highly conductive material layer in the other direction.
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CN111504858A (en) * 2020-04-09 2020-08-07 中北大学 Metal abrasive particle magnetic field anti-interference device

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