JP2008272911A - Surface plate for measurement - Google Patents

Surface plate for measurement Download PDF

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JP2008272911A
JP2008272911A JP2007122463A JP2007122463A JP2008272911A JP 2008272911 A JP2008272911 A JP 2008272911A JP 2007122463 A JP2007122463 A JP 2007122463A JP 2007122463 A JP2007122463 A JP 2007122463A JP 2008272911 A JP2008272911 A JP 2008272911A
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pin
substrate
measurement
measuring
pin insertion
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Hiroyoshi Tsukahara
原 宥 誼 塚
Takashi Tsukahara
原 隆 塚
Yuichi Suzuki
木 裕 一 鈴
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JOHOKU KOHAN SEISAKUSHO KK
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JOHOKU KOHAN SEISAKUSHO KK
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface plate for measurement with a simple structure not requiring a grid and pocket processing of a surface, capable of performing easy and quick finishing of the surface, reducing production and repairing cost, preventing biting of dusts and foreign matters between an object to be measured and it, performing continuous high speed measurement inspection and excellent in freedom to meet the object to be measured. <P>SOLUTION: The surface plate for measurement is constituted by a substrate 1 comprising a plate-like hard member and bored with a plurality of pin insertion holes 1a; and a plurality of pins 2 comprising a hard member pressure-fitted into the pin insertion holes 1a of the substrate 1. Upper ends of the pins 2 are finished such that they become on the same plane, and become an object to be measured mounting surface. Further, an air flow passage hole 2c is bored on the pin 2, and compression air is jetted from the upper end of the pin 2 via the pin insertion hole 1a of the substrate 1 or is vacuum-sucked. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、生産現場において加工物測定用等に使用する測定用定盤に関し、特に素材及び加工コスト低減を含む経済性及び測定物との接触形態の自由度に優れた測定用定盤に関する。   The present invention relates to a measurement surface plate used for measurement of a workpiece at a production site, and more particularly to a measurement surface plate excellent in economic efficiency including reduction of raw materials and processing costs and freedom of contact form with a measurement object.

従来、測定用定盤として単一素材の金属板が一般的に用いられていた（例えば、特許文献１）。特許文献１には、図７に示すように、反りを有する平板１０２を載置する測定用定盤１００と、加圧された平板１０２を一様に加圧する加圧ブロック１０５を有する加圧手段と、加圧された平板１０２に接触する測定子１１２及び測定ゲージ１１３を有する測定手段とを備えた平板厚さ測定装置が例示されている。   Conventionally, a single metal plate is generally used as a measuring platen (for example, Patent Document 1). In Patent Document 1, as shown in FIG. 7, a pressurizing means having a measuring platen 100 on which a flat plate 102 having warpage is placed, and a pressurizing block 105 for uniformly pressurizing the pressed flat plate 102. And a flat plate thickness measuring device including a measuring element 112 and a measuring gauge 113 that are in contact with the pressed flat plate 102.

また、従来、測定物と測定用定盤との間へのゴミや異物などの噛込みを防いだり、測定物の表面をラッピングしたりするために、測定用定盤の表面に升目（グリット状の溝）あるいは所定パターンの多数のポケットを穿設するのが主流となっていた（例えば、特許文献２、３）。   Conventionally, in order to prevent dust and foreign matter from getting caught between the measurement object and the surface plate for measurement, or to wrap the surface of the measurement object, a grid (grit-like shape) is formed on the surface of the measurement surface plate. No. grooves) or a large number of pockets having a predetermined pattern has been the mainstream (for example, Patent Documents 2 and 3).

特許文献２には、測定用定盤そのものではないが、図８に示すように、表面にグリット状の溝２４が穿設され加工作用面となる球状黒鉛鋳鉄層２１が低熱膨張鋳鉄合金層ベースプレート２２上に締結ボルト２３により固着された２層構造のラッピング定盤が開示されている。このラッピング定盤は、測定用定盤に適用可能な構造である。   In Patent Document 2, although it is not a measuring platen itself, as shown in FIG. 8, a spheroidal graphite cast iron layer 21 having a grit-like groove 24 formed on the surface and serving as a working surface is a low thermal expansion cast iron alloy layer base plate. A wrapping surface plate having a two-layer structure, which is fixed to a base plate 22 with fastening bolts 23, is disclosed. This lapping surface plate has a structure applicable to a measurement surface plate.

特許文献３には、図９（ａ）及び（ｂ）に示すように、測定用定盤３１の測定面部分３１ａを平面研削盤により平面研削加工を行なって所定平面度を有する面に形成した後、刃部の曲率半径が大きなボールエンドミル３２を備えたＮＣ機をプログラム制御して測定用定盤３１の測定面部分３１ａに０．０３〜０．０５ｍｍの深さを有する多数のポケット３３を平面格子状等のパターンで形成する測定用定盤の加工方法が開示されている。   In Patent Document 3, as shown in FIGS. 9A and 9B, the measurement surface portion 31 a of the measurement surface plate 31 is subjected to surface grinding using a surface grinder to form a surface having a predetermined flatness. Thereafter, an NC machine having a ball end mill 32 having a large radius of curvature of the blade portion is program-controlled to form a large number of pockets 33 having a depth of 0.03 to 0.05 mm in the measurement surface portion 31a of the measurement surface plate 31. A method of processing a measuring platen formed with a pattern such as a planar lattice is disclosed.

また、図１０（ａ）及び（ｂ）に示すように、製作が容易でかつ被研磨物にスクラッチなどが発生するのを防止し得ることを意図して、円形状の取付板体４１の表面に穿設された凹部４１ａに取付板体４１とは別体の円柱形状の研磨用ビット４２を取付ボルト４３により多数取付けた研磨定盤が提案されている（例えば、特許文献４）。この研磨定盤も、測定用定盤に適用可能な構造である。
実開昭６１−４８３０２号公報 特開２０００−１５８３２６号公報 特開平５−６９２１５号公報 特開平１１−２９１１６０号公報 Further, as shown in FIGS. 10A and 10B, the surface of the circular mounting plate 41 is intended to be easy to manufacture and to prevent generation of scratches on the object to be polished. There has been proposed a polishing surface plate in which a number of cylindrical polishing bits 42 that are separate from the mounting plate 41 are attached to a recess 41a formed by a mounting bolt 43 (for example, Patent Document 4). This polishing platen is also a structure applicable to a measurement platen.
Japanese Utility Model Publication No. 61-48302 JP 2000-158326 A JP-A-5-69215 Japanese Patent Laid-Open No. 11-291160

しかしながら、特許文献１の測定用定盤１００は、単一素材であるため所望の硬質材料を使用した定盤を製作する場合、使用するのに必要な大きさ以上の高価な硬質材料の素材寸法を要するとともに、精度を確保するために時間をかけてその表面全体を仕上げる必要があるなど製作あるいは補修のコストアップとなるという問題点があった。   However, since the measurement surface plate 100 of Patent Document 1 is a single material, when manufacturing a surface plate using a desired hard material, the material dimensions of an expensive hard material larger than the size required for use are used. In addition, there is a problem that the cost of manufacturing or repairing is increased such that it is necessary to finish the entire surface over time to ensure accuracy.

また、特許文献２のラッピング定盤の構造は、低熱膨張鋳鉄合金層ベースプレート２２上に加工作用面となる球状黒鉛鋳鉄層２１を配した２層構造とすることにより素材コストを抑えるという上記特許文献１における問題点を改善してはいるものの、定盤の表面に升目（グリット状の溝）を穿設する必要があるとともに升目（グリット状の溝）の間の表面平坦部にゴミや異物などが付着して測定物との間に噛込み易い上、表面の仕上げ加工を含む加工コストも嵩む等の問題点が依然として残されている。   Moreover, the structure of the lapping surface plate of patent document 2 is the above-mentioned patent document that suppresses material costs by adopting a two-layer structure in which a spheroidal graphite cast iron layer 21 serving as a working surface is disposed on a low thermal expansion cast iron alloy layer base plate 22. Although the problem in 1 is improved, it is necessary to drill a grid (grit-shaped groove) on the surface of the surface plate, and dust or foreign matter on the surface flat part between the grid (grit-shaped groove) However, there are still problems such as that it is easy to bite into the measured object and the processing cost including finishing of the surface is increased.

一方、特許文献３の測定用定盤は、その表面にＮＣ制御加工方法により効率よく多数のポケット３３を穿設することができるようになっているが、測定用定盤の硬質材料の素材、ＮＣ機及びその制御プログラム等が高価であり製作及び補修コストが嵩む上、ポケット３３の間の表面平坦部にゴミや異物などが付着して測定物との間に噛込み易い等の問題点が依然として残されている。   On the other hand, the measurement surface plate of Patent Document 3 is designed so that a large number of pockets 33 can be efficiently drilled on its surface by an NC control processing method. The NC machine and its control program are expensive, resulting in high manufacturing and repair costs. In addition, there are problems such as dust and foreign matter adhering to the flat surface between the pockets 33 and being easily caught between objects. Still left.

また、特許文献４の研磨定盤の構造は、取付板体４１の表面に加工作用面となる多数の円柱形研磨用ビット４２を配した２層構造とすることにより、前記特許文献２、３のような板状体の表面に升目あるいはポケットなどの溝部を加工するものに比べてバリの発生がないため被研磨物にスクラッチが発生するのを防止することができるとともに、高価な硬質材料の素材コストを抑えるという上記特許文献１及び３における問題点等を改善してはいるものの、研磨用ビット４２の表面平坦部にゴミや異物などが付着して測定物との間に噛込み易い上、多数の研磨用ビット４２表面の仕上げ加工を含む加工コストも嵩む等の問題点が依然として残されている。   Further, the structure of the polishing surface plate of Patent Document 4 is a two-layer structure in which a large number of cylindrical polishing bits 42 serving as processing surfaces are arranged on the surface of the mounting plate 41, whereby the Patent Documents 2 and 3 are used. As compared with the case where the surface of the plate-like body is processed with a groove such as a mesh or a pocket, it is possible to prevent the occurrence of scratches on the object to be polished and to prevent expensive hard materials from being produced. Although the problems in the above-mentioned Patent Documents 1 and 3 for suppressing the material cost are improved, dust or foreign matter adheres to the flat portion of the surface of the polishing bit 42 and is easily caught between the measurement objects. However, there are still problems such as an increase in processing cost including finishing of the surface of many polishing bits 42.

本発明は、このような問題点を解決するためになされたものであり、簡潔な構造で、表面の升目（グリット状の溝）又は多数のポケット加工が不要で測定物との間にゴミや異物などの噛込みを防止することができ、表面の仕上げ加工が簡単に素早く可能であるとともに、連続的に素早く測定する高速測定検査が可能であり、製作及び補修コスト低減を含む経済性に優れるとともに測定物との接触形態の自由度に優れた測定用定盤を提供することを目的とする。   The present invention has been made to solve such problems, and has a simple structure, does not require surface meshes (grit-like grooves) or a large number of pockets, and does not require dust or dirt between the objects to be measured. It can prevent biting of foreign matter, etc., and finish processing of the surface can be done easily and quickly, and high-speed measurement inspection that measures continuously and quickly is possible, and it is excellent in economic efficiency including manufacturing and repair cost reduction Another object of the present invention is to provide a measuring platen that is excellent in the degree of freedom of contact form with a measured object.

上記目的を達成するため、請求項１の発明の測定用定盤は、板状の硬質部材からなり、複数のピン挿入孔が開孔された基板と、該基板のピン挿入孔に圧入された硬質部材からなる複数のピンとから構成され、これらピンの上端部が同一平面上になるように仕上げられて測定物搭載面となることを特徴とする。   In order to achieve the above object, the measuring surface plate of the invention of claim 1 is made of a plate-like hard member, and has a board in which a plurality of pin insertion holes are opened, and is press-fitted into the pin insertion holes of the board. It is composed of a plurality of pins made of a hard member, and the upper ends of these pins are finished so as to be on the same plane to form a measurement object mounting surface.

請求項２の発明は、請求項１記載の測定用定盤であって、前記複数のピンが、前記基板上で２種類以上の異種部材に区分され配置されていることを特徴とする。   A second aspect of the present invention is the measuring platen according to the first aspect, wherein the plurality of pins are divided and arranged into two or more kinds of different members on the substrate.

請求項３の発明は、請求項１又は請求項２記載の測定用定盤であって、前記ピンが測定物の測定箇所に合せて、該測定物を３点で支持するように前記基板上に配置されていることを特徴とする。   The invention according to claim 3 is the measuring platen according to claim 1 or 2, wherein the pin supports the measurement object at three points according to the measurement location of the measurement object. It is characterized by being arranged in.

請求項４の発明は、請求項１乃至請求項３のいずれか１項記載の測定用定盤であって、前記基板が金属板であり、前記ピンが、硬質セラミックス又は／及び超硬合金製であることを特徴とする。   Invention of Claim 4 is the surface plate for a measurement of any one of Claim 1 thru | or 3, Comprising: The said board | substrate is a metal plate, The said pin is made from a hard ceramic or / and a cemented carbide alloy. It is characterized by being.

請求項５の発明は、請求項１乃至請求項４のいずれか１項記載の測定用定盤であって、前記ピンは、少なくとも前記ピン挿入孔に挿入される部分が挿入方向に先細りテーパ状に形成されたテーパピンであり、前記基板のピン挿入孔に圧入されてテーパロックされることを特徴とする。   A fifth aspect of the present invention is the measuring platen according to any one of the first to fourth aspects, wherein at least a portion of the pin inserted into the pin insertion hole is tapered in the insertion direction. The taper pin is formed by pressing into a pin insertion hole of the substrate and is taper-locked.

請求項６の発明は、請求項１乃至請求項４のいずれか１項記載の測定用定盤であって、前記ピンは、前記ピン挿入孔に挿入される挿入部が細くストレート状又は挿入方向に先細りテーパ状に形成された段付きピンであり、前記基板のピン挿入孔に圧入されて固定されることを特徴とする。   A sixth aspect of the present invention is the measurement surface plate according to any one of the first to fourth aspects, wherein the pin has a thin insertion portion to be inserted into the pin insertion hole, or has a straight shape or an insertion direction. The stepped pin is formed in a tapered shape, and is press-fitted into a pin insertion hole of the substrate to be fixed.

請求項７の発明は、請求項１乃至請求項６のいずれか１項記載の測定用定盤であって、前記ピンの上端面は、平面に対して略点又は線接触する凸曲面状に形成されていることを特徴とする。   A seventh aspect of the present invention is the measurement surface plate according to any one of the first to sixth aspects, wherein the upper end surface of the pin is formed in a convex curved surface that is substantially in point or line contact with the plane. It is formed.

請求項８の発明は、請求項１乃至請求項７のいずれか１項記載の測定用定盤であって、前記ピンには、エア流路孔が開孔され、ピンの上端から前記基板のピン挿入孔を経由して圧縮空気が噴出されるか、又は真空吸引されることを特徴とする。   The invention according to an eighth aspect is the measurement surface plate according to any one of the first to seventh aspects, wherein an air flow path hole is formed in the pin, and an upper end of the substrate is formed from an upper end of the pin. Compressed air is ejected through a pin insertion hole or vacuum suction is performed.

請求項９の発明は、請求項８記載の測定用定盤であって、前記基板の下面に、圧縮空気源及び真空源に連結された流路を切り替える切替弁を備えたエアチャンバが、前記複数のピン挿入孔を覆い密閉状態で設けられていることを特徴とする。   The invention according to claim 9 is the measuring platen according to claim 8, wherein an air chamber having a switching valve for switching a flow path connected to a compressed air source and a vacuum source is provided on the lower surface of the substrate. A plurality of pin insertion holes are covered and provided in a sealed state.

請求項１の発明によれば、基板の表面に複数配置された硬質部材からなるピンの上端部を測定物搭載面とすることにより、従来の測定用定盤に比べて次のような効果がある。   According to the first aspect of the present invention, the following effects can be obtained as compared with the conventional measuring platen by using the upper end portion of the pin made of a hard member arranged on the surface of the substrate as the measurement object mounting surface. is there.

（１）測定物に適したピンの素材選択及び配置とすることができることから測定定盤の形態の自由度が向上する。   (1) Since the pin material suitable for the measurement object can be selected and arranged, the degree of freedom in the form of the measurement surface plate is improved.

（２）ピンの上端部の研磨、ラッピングなどによる仕上げ加工が容易で、加工時間を大幅に短縮することができる。   (2) Finishing by polishing, lapping or the like of the upper end of the pin is easy, and the processing time can be greatly shortened.

（３）測定用定盤の表面に升目（グリット状の溝）あるいは多数のポケットを設ける必要がなく、ピンの上端部面積及び測定物との接触面積が僅少であるためゴミや異物などが付着し難く、測定物との間へのゴミや異物などの噛込み防止が大幅に向上する。したがって、測定結果にゴミや異物などによる影響を及ぼすことがない。   (3) There is no need to provide grids (grit-shaped grooves) or many pockets on the surface of the measuring platen, and the top end area of the pin and the contact area with the measurement object are very small, so dirt and foreign matter adhere to it. Therefore, the prevention of biting of dust and foreign matters into the measured object is greatly improved. Therefore, the measurement result is not affected by dust or foreign matter.

（４）ピンが基板のピン挿入孔に圧入されているので、摩耗など損傷したピンだけを前記ピン挿入孔の下側から力を加えて容易に抜き取り新しいピンと交換できるので、補修時間を大幅に低減することができる。   (4) Since the pins are press-fitted into the pin insertion holes on the board, only damaged pins such as wear can be easily removed from the lower side of the pin insertion holes and replaced with new pins, greatly increasing the repair time. Can be reduced.

このように、簡潔な構造で、測定物搭載面となるピンが小容積であることから、ピンの高価な硬質素材を含む製作及び補修等のコスト低減が可能で、経済性及び測定物との接触形態の自由度に優れた測定用定盤を提供することができる。   In this way, with a simple structure and a small pin for the measurement object mounting surface, it is possible to reduce the cost of manufacturing and repairing including expensive hard material of the pin, economical efficiency and measurement object It is possible to provide a measuring platen having excellent degree of freedom of contact form.

請求項２の発明によれば、請求項１の発明と同様な効果を有するのに加えて、前記複数のピンが、前記基板上で２種類以上の異種部材に区分され配置された構成であるため、測定物に適したピンの素材選択及び配置とすることが容易になることから測定定盤の形態の自由度が一層向上するという効果がある。   According to the invention of claim 2, in addition to having the same effect as that of the invention of claim 1, the plurality of pins are divided and arranged into two or more kinds of different members on the substrate. Therefore, since it becomes easy to select and arrange the material of the pins suitable for the measurement object, there is an effect that the degree of freedom of the form of the measurement surface plate is further improved.

請求項３の発明によれば、請求項１又は請求項２の発明と同様な効果を有するのに加えて、ピンが測定物の測定箇所に合せて測定物を３点で支持するように基板上に配置された構成であることから、測定物の測定箇所以外の面に測定用定盤が接触することがないため測定物の平面度が測定物の厚みなどの測定結果に影響を及ぼすことがなく、測定結果の正確性を確保することができるという効果がある。すなわち、従来の平坦な測定用定盤での測定における、測定用定盤表面と接触する測定物の平面度が測定結果に影響を及ぼし易いという問題点を改善するものである。   According to the invention of claim 3, in addition to having the same effect as that of the invention of claim 1 or claim 2, the substrate is such that the pin supports the measurement object at three points according to the measurement location of the measurement object. Since the measurement platen does not come into contact with the surface other than the measurement location of the measurement object, the flatness of the measurement object affects the measurement results such as the thickness of the measurement object. There is an effect that the accuracy of the measurement result can be ensured. That is, in the measurement with the conventional flat measuring surface plate, the problem that the flatness of the measurement object in contact with the surface of the measuring surface plate tends to affect the measurement result is improved.

請求項４の発明によれば、請求項１乃至請求項３のいずれか１項の発明と同様な効果を有するのに加えて、小容積のピンを大容積の基板の金属とは異質の硬質セラミックス又は／及び超硬合金製とすることにより、高価な硬質セラミックスや超硬合金等の素材コストを大幅に削減することができるとともに、測定用定盤の補修時にはピン上端のみを研磨、ラッピングなどによる再仕上げ加工するか又は損耗したピンのみを調整した新品と交換すればよいので、測定用定盤の製作及び補修コスト共大幅に削減することができるという効果がある。   According to the invention of claim 4, in addition to having the same effect as that of any one of the inventions of claims 1 to 3, the small-volume pin is made of a hard material different from the metal of the large-volume substrate. By using ceramics and / or cemented carbide, material costs such as expensive hard ceramics and cemented carbides can be greatly reduced, and only the top of the pin is polished and lapped when repairing the measuring platen. Therefore, there is an effect that both the production and repair costs of the measuring platen can be greatly reduced because it is only necessary to refinish or replace the worn pins with new ones that have been worn out.

請求項５の発明によれば、請求項１乃至請求項４のいずれか１項の発明と同様な効果を有するのに加えて、前記ピンは、少なくとも前記ピン挿入孔に挿入される部分が挿入方向に先細りテーパ状に形成され、ピン挿入孔に圧入されてテーパロックされるので、ピンの取付け固定がワンタッチででき、かつピン取付けの信頼性が向上するとともに、損傷したピンをピン挿入孔の下側から力を加えて一層容易に抜き取り新しいピンと交換できるので、測定用定盤の製作及び補修コスト共さらに大幅に削減することができるという効果がある。   According to the invention of claim 5, in addition to having the same effect as the invention of any one of claims 1 to 4, the pin is inserted at least at a portion to be inserted into the pin insertion hole. Since the taper is tapered in the direction and is press-fitted into the pin insertion hole to lock the taper, pin mounting and fixing can be done with a single touch, and the reliability of pin mounting is improved. Since a force can be applied from the lower side and it can be more easily removed and replaced with a new pin, both the production and repair costs of the measuring surface plate can be further greatly reduced.

請求項６の発明によれば、請求項１乃至請求項４のいずれか１項の発明と同様な効果を有するのに加えて、ピンをピン挿入孔に挿入部が細くストレート状又は挿入方向に先細りテーパ状に形成された段部まで圧入して固定することにより、基板からのピン突出長さが均一化され、基板へのピン装着の信頼性が一層向上する。これにより、ピンの上端部からなる測定物搭載面の平面仕上げ時間が大幅に短縮され、測定用定盤の製作及び補修コスト共一層削減することができるという効果がある。   According to the invention of claim 6, in addition to having the same effect as the invention of any one of claims 1 to 4, the pin is inserted into the pin insertion hole with a thin insertion portion in a straight shape or in the insertion direction. By press-fitting and fixing the stepped portion formed in a tapered shape, the length of the protruding pin from the substrate is made uniform, and the reliability of pin mounting on the substrate is further improved. Thereby, the planar finishing time of the workpiece mounting surface consisting of the upper end portion of the pin is greatly shortened, and there is an effect that the manufacturing and repair costs of the measurement surface plate can be further reduced.

請求項７の発明によれば、請求項１乃至請求項６のいずれか１項の発明と同様な効果を有するのに加えて、ピンの上端面が平面に対して略点又は線接触する凸曲面状に形成されているので、ピンの上端部面積及び測定物との接触面積が僅少であるためゴミや異物などが一層付着し難く、測定物との間へのゴミや異物などの噛込み防止がさらに大幅に向上し、測定結果にゴミや異物などによる影響を及ぼすことがないという効果がある。   According to the invention of claim 7, in addition to having the same effect as that of any one of the inventions of claims 1 to 6, the upper end surface of the pin is a convex or substantially line-contact with the plane. Because it is formed in a curved surface, the top end area of the pin and the contact area with the measurement object are very small, making it difficult for dirt and foreign matter to adhere to the measurement object. The prevention is further improved and the measurement result is not affected by dust or foreign matter.

請求項８の発明によれば、請求項１乃至請求項７のいずれか１項の発明と同様な効果を有するのに加えて、エア流路孔が開孔されたピンの上端から噴出される圧縮空気により、測定物に対するゴミなどの付着物が除去されるので測定結果にゴミや異物などによる影響を及ぼすことが一層改善されるとともに、例えば各種メディアディスクなどの測定物を浮上させて移動を容易にすることができるので摺り傷の発生や高精度な平面同士で発生し易いリンキング（吸付き）を防止することができる。   According to the invention of claim 8, in addition to having the same effect as the invention of any one of claims 1 to 7, the air flow path hole is ejected from the upper end of the opened pin. Compressed air removes dust and other deposits on the measurement object, further improving the influence of dust and foreign matter on the measurement result, and moving the measurement object such as various media discs Since it can make it easy, the generation | occurrence | production of a scratch and the linking (sucking) which is easy to generate | occur | produce between highly accurate planes can be prevented.

また、これとは反対に、ピンの上端のエア流路孔から真空吸引することにより、例えば各種メディアディスクなどの測定物をピン上端に容易に定着することができるので、測定効率を上げることができるなどの効果がある。   On the other hand, by vacuum suction from the air channel hole at the upper end of the pin, for example, a measurement object such as various media disks can be easily fixed on the upper end of the pin, so that the measurement efficiency can be improved. There are effects such as being able to.

請求項９の発明によれば、請求項８の発明と同様な効果を有するのに加えて、基板の下面のエアチャンバに設けられた切替弁によりピン上端からの圧縮空気噴出と真空吸引とを交互に切替えることができるので、測定物の除塵、浮遊移動、定着、及び測定の一連の作業を連続的に行う高速測定検査が容易に可能になる。これにより、測定検査の経済性が一層向上するという効果がある。   According to the ninth aspect of the invention, in addition to having the same effect as that of the eighth aspect of the invention, the switching valve provided in the air chamber on the lower surface of the substrate allows the compressed air ejection and vacuum suction from the upper end of the pin. Since they can be switched alternately, high-speed measurement inspection that continuously performs a series of operations of dust removal, floating movement, fixation, and measurement of a measurement object can be easily performed. Thereby, there is an effect that the economic efficiency of the measurement inspection is further improved.

以下、本発明の測定用定盤を実施するための最良の形態の具体例を、添付図面を参照しながら詳細に説明する。   Hereinafter, a specific example of the best mode for carrying out the measuring platen of the present invention will be described in detail with reference to the accompanying drawings.

図１は本発明の実施例１の測定用定盤の平面図、図２はその縦断面図である。   FIG. 1 is a plan view of a measuring platen according to Example 1 of the present invention, and FIG. 2 is a longitudinal sectional view thereof.

実施例１の測定用定盤は、板状の硬質部材からなる基板１と、基板１の表面に複数配置された硬質部材からなるピン２とから構成されている。   The measurement surface plate of Example 1 includes a substrate 1 made of a plate-like hard member and pins 2 made of a hard member arranged on the surface of the substrate 1.

図２に示すように、基板１には複数のピン挿入孔１ａが開孔されており、ピン２は、基板１上からピン挿入孔１ａに圧入され固定されており、ピン２の上端部が同一平面上になるように、研磨、ラッピングなどにより例えば平面度０．０００１ｍｍオーダーの精度で仕上げられて測定物１０の搭載面となる。   As shown in FIG. 2, a plurality of pin insertion holes 1 a are opened in the substrate 1, and the pins 2 are press-fitted and fixed into the pin insertion holes 1 a from above the substrate 1. The surface to be measured 10 is finished by polishing, lapping, or the like so as to be on the same plane, for example, with a flatness of the order of 0.0001 mm.

この例では、少なくともピン挿入孔１ａに挿入される部分が挿入方向に先細りテーパ状に形成されたテーパピンであり、ピン挿入孔１ａに所定の一定の力で圧入されテーパロックされている。ピン径は、異物付着防止、平面度仕上げ加工の容易性、コスト等の面から細い方がよいが、研削力に対して変形せずテーパ加工精度が保持できる例えば１０ｍｍ前後程度が最適である。一方、ピン挿入孔１ａは、ピンを圧入可能なピン径より若干細めのストレート孔で、あるいはピンより緩傾斜のテーパ孔としてもよい。   In this example, at least a portion to be inserted into the pin insertion hole 1a is a tapered pin that is tapered in the insertion direction and formed into a tapered shape, and is press-fitted into the pin insertion hole 1a with a predetermined constant force and is taper-locked. The pin diameter is preferably thin in terms of prevention of foreign matter adhesion, ease of flatness finishing, cost, etc., but about 10 mm, for example, that can maintain the taper machining accuracy without being deformed by the grinding force is optimal. On the other hand, the pin insertion hole 1a may be a straight hole that is slightly narrower than the diameter of the pin into which the pin can be press-fitted, or a taper hole that is more gently inclined than the pin.

ピン２の上端面は、角部が欠損防止のため丸み加工（図示しない）されるとともに、例えば球面状など平面に対して略点又は線接触する凸曲面状に形成することが望ましい。   It is desirable that the upper end surface of the pin 2 be rounded (not shown) in order to prevent the corners from being broken, and formed into a convex curved surface that is substantially point or line-contacted with a flat surface such as a spherical surface.

このように、基板１の表面に複数配置されたピン２の上端部を測定物搭載面とすることにより、従来の測定用定盤に比べて、ピン２の上端面の研磨、ラッピングなどによる仕上げ加工が容易で、加工時間が大幅に短縮することができる。また、従来のように測定用定盤の表面に升目（グリット状の溝）あるいは多数のポケットを設ける必要がなく、ピン２の上端部面積及び測定物１０との接触面積が僅少であるため測定物１０と測定用定盤のピン２との間にゴミや異物などが噛込み難く、測定結果にゴミや異物などによる影響を及ぼすことがない。   In this way, the upper end portion of the pin 2 arranged on the surface of the substrate 1 is used as a measurement object mounting surface, so that the upper end surface of the pin 2 is finished by polishing, lapping, etc. as compared with the conventional measuring platen. Processing is easy and the processing time can be greatly reduced. In addition, it is not necessary to provide grids (grit-like grooves) or a large number of pockets on the surface of the measurement surface plate as in the prior art, and the area of the upper end portion of the pin 2 and the contact area with the measurement object 10 are very small. It is difficult for dust or foreign matter to get caught between the object 10 and the pin 2 of the measurement surface plate, and the measurement result is not affected by dust or foreign matter.

また、ピン２は、図１の例では基板１上で硬質セラミックス製ピン２ａと超硬合金製ピン２ｂとの２種類の異種部材に区分され配置されている。従来の鋳物や天然石の定盤では、摩耗し易く、特に後者は材質的に不均一であるという欠点があるが、例えばＳｉＣ、ＳｉＮ、ジルコニア（酸化ジルコニウム：ＺｒＯ２）などの硬質セラミックス製及びＷＣ系超硬、サーメットなどの超硬合金製のものは、実績的にも摩耗がなく安定した定盤とすることができる。   Further, in the example of FIG. 1, the pins 2 are divided and arranged on the substrate 1 into two kinds of different members, that is, a hard ceramic pin 2a and a cemented carbide pin 2b. Conventional castings and natural stone surface plates are prone to wear, and in particular, the latter is not uniform in material. For example, SiC, SiN, zirconia (zirconium oxide: ZrO2) and other hard ceramics and WC-based Those made of cemented carbide such as cemented carbide and cermet can be used as a stable surface plate without any wear even in actual results.

ピン２が２種類の異種部材に区分され配置されることにより、測定物に適したピン２の素材選択及び配置とすることが容易になるため、測定定盤の形態の自由度を一層向上させることができる。   Since the pin 2 is divided into two kinds of different members and arranged, it becomes easy to select and arrange the material of the pin 2 suitable for the object to be measured, so the degree of freedom of the form of the measurement surface plate is further improved. be able to.

基板１は、ピン２がピン挿入孔１ａに圧入されテーパロックされ、測定物の重量にも十分耐えられる比較的硬質の鋳鋼その他各種材料の金属板あるいは非金属部材により適宜形成することができる。特に、屋外における防錆さらには食品関係用など衛生性が要求される場合には、Ａｌ合金、ＳＵＳなど又はこれらを鉄鋼材料と合せた合板などが用いられる。   The substrate 1 can be appropriately formed of a metal plate or non-metallic member made of relatively hard cast steel or other various materials that are pinned into the pin insertion hole 1a and taper-locked, and can sufficiently withstand the weight of the object to be measured. In particular, when sanitation is required, such as for outdoor rust prevention and food-related purposes, Al alloy, SUS, etc., or a plywood that combines these with a steel material is used.

ピン２の上端面としては、平面に対して略点接触する球面状などの他に、図示しないが、線接触する円筒曲面状あるいは小面積の小円形平面状などとすることもできる。球面状の方が先端部の面積が小さく表面にゴミや異物などが付着し難い点では最も優れているが、特に、大きな重量の測定物に対しては後者の方が線接触あるいは面接触により接触応力（ヘルツ接触応力又はヘルツ応力）を低く抑えることができる点で有利といえる。   The upper end surface of the pin 2 may be a cylindrical curved surface that makes line contact or a small circular planar shape with a small area, although not shown, in addition to a spherical shape that makes point contact with the plane. The spherical shape is the best in that it has a small tip area and is less likely to have dirt or foreign objects attached to the surface. This is advantageous in that the contact stress (Hertz contact stress or Hertz stress) can be kept low.

以上のように、小容積のピン２を大容積の基板１の金属とは異質の硬質セラミックス又は／及び超硬合金製とすることにより高価な硬質セラミックスや超硬合金等の素材コストを大幅に削減することができる。また、測定用定盤の補修時にはピン２の上端のみを研磨、ラッピングなどによる再仕上げ加工するか又は損耗したピンのみを調整した新品と交換すればよい。ピン２は、ピン挿入孔１ａに圧入されテーパロックされるので、ピンの取付け固定が信頼性高くワンタッチでできるとともに、損傷したピン２をピン挿入孔１ａの下側から力を加えて容易に抜き取り新しいピンと交換できるので、測定用定盤の製作及び補修コスト共大幅に削減することができる。   As described above, by making the small volume pin 2 made of hard ceramic or / and cemented carbide different from the metal of the large volume substrate 1, the material cost of expensive hard ceramic or cemented carbide is greatly increased. Can be reduced. Further, when repairing the measuring platen, only the upper end of the pin 2 may be refinished by polishing, lapping or the like, or may be replaced with a new one that has only the worn pin adjusted. Since the pin 2 is press-fitted into the pin insertion hole 1a and is taper-locked, the pin can be fixed and fixed with a single touch, and the damaged pin 2 can be easily pulled out by applying force from the lower side of the pin insertion hole 1a. Since it can be replaced with a new pin, both the production of the measurement surface plate and the repair cost can be greatly reduced.

図３は本発明の実施例２の測定用定盤の平面図、図４はその側面（要部縦断面）図である。ここで分かり易くするため、実施例２においても、実施例１に対して部分的に形状が異なっていても同一の機能を有する部材には同一の符号を付して対応させてある。   FIG. 3 is a plan view of a measuring platen according to the second embodiment of the present invention, and FIG. 4 is a side view (main part longitudinal section) thereof. Here, in order to make it easy to understand, even in the second embodiment, members having the same function are associated with the same reference numerals even if the shapes are partially different from those of the first embodiment.

実施例２の測定用定盤は、ピン２が測定物１０の測定箇所に合せて、測定物１０を３点で支持するように基板１上に配置されている構成である。   The measurement surface plate of Example 2 has a configuration in which the pin 2 is arranged on the substrate 1 so as to support the measurement object 10 at three points in accordance with the measurement location of the measurement object 10.

この例においては、図３、４に示すように、測定物１０を基板１上の３個のピン２による３点で支持するように移動させながら、そのピン２の１点上で順次ダイヤルゲージ２０やインジケータ（図示しない）などにより測定物１０の厚みを測定することができる。   In this example, as shown in FIGS. 3 and 4, the dial 10 is sequentially moved on one point of the pin 2 while moving the measurement object 10 so as to be supported by the three points 2 by the three pins 2 on the substrate 1. The thickness of the measurement object 10 can be measured by 20 or an indicator (not shown).

したがって、実施例２においては、測定物１０の測定箇所以外の面に測定用定盤が接触することがないため、従来の平坦な測定用定盤におけるような測定物１０の平面度が測定物１０の厚みなどの測定結果に影響を及ぼすことがなく、測定結果の正確性を確保することができる。   Therefore, in Example 2, since the measurement surface plate does not come into contact with the surface other than the measurement location of the measurement object 10, the flatness of the measurement object 10 as in the conventional flat measurement surface plate is measured. The accuracy of the measurement result can be ensured without affecting the measurement result such as the thickness of 10.

図５は、本発明の実施例３の測定用定盤の要部縦断面図である。ここで分かり易くするため、実施例３においても、実施例１又は２に対して部分的に形状が異なっていても同一の機能を有する部材には同一の符号を付して対応させてある。   FIG. 5 is a longitudinal sectional view of an essential part of a measuring platen according to Example 3 of the present invention. Here, in order to make it easy to understand, in the third embodiment, members having the same function are associated with the same reference numerals even if the shapes are partially different from those of the first or second embodiment.

実施例３の測定用定盤は、ピン２の軸心に沿ってエア流路孔２ｃが開孔され、ピン２の上端から基板１のピン挿入孔１ａを経由して圧縮空気が噴出されるか、又は真空吸引される構成である。   In the measurement platen of Example 3, the air flow path hole 2 c is opened along the axis of the pin 2, and compressed air is ejected from the upper end of the pin 2 through the pin insertion hole 1 a of the substrate 1. Or vacuum suction.

エア流路孔２ｃが開孔されたピン２の上端から噴出される圧縮空気により、測定物１０に対するゴミなどの付着物が除去されるので測定結果にゴミや異物などによる影響を及ぼすことが一層改善される。また、例えば各種メディアディスクなどの測定物を浮上させて移動を容易にすることができるので、摺り傷の発生や高精度な平面同士で発生し易いリンキング（吸付き）を防止することができる。   The compressed air ejected from the upper end of the pin 2 in which the air flow path hole 2c is opened removes the deposits such as dust on the measurement object 10, so that the measurement result is further affected by dust and foreign matter. Improved. In addition, since it is possible to easily move a measurement object such as various media disks, it is possible to prevent the occurrence of scratches and linking (sucking) that is likely to occur between high-precision planes.

これとは反対に、ピン２の上端のエア流路孔２ｃから真空吸引することにより、例えば各種メディアディスクなどの測定物をピン２の上端に容易に定着することができ、測定効率を上げることができる   On the contrary, by vacuum suction from the air flow path hole 2c at the upper end of the pin 2, for example, a measured object such as various media disks can be easily fixed on the upper end of the pin 2, and the measurement efficiency is increased. Can

さらに、基板１の下面には、圧縮空気源連結管６及び真空源連結管７に連結された流路を切り替える切替弁５が連結管４により連結されたエアチャンバ３が、複数のピン挿入孔１ａを覆い密閉状態で設けられている。   Further, an air chamber 3 in which a switching valve 5 for switching a flow path connected to the compressed air source connecting pipe 6 and the vacuum source connecting pipe 7 is connected to the lower surface of the substrate 1 by the connecting pipe 4 has a plurality of pin insertion holes. 1a is covered and sealed.

したがって、実施例３においては、前記実施例と同様な優れた利点を有するのに加えて、基板１の下面のエアチャンバ３に設けられた切替弁５によりピン２上端からの圧縮空気噴出と真空吸引とを交互に切替えることができるので、測定物１０の除塵、浮遊移動、定着、及び測定の一連の作業を連続的に行う高速検査が容易に可能になり、測定検査の経済性が一層向上する。   Therefore, in the third embodiment, in addition to having the same excellent advantages as the first embodiment, compressed air is ejected from the upper end of the pin 2 and vacuumed by the switching valve 5 provided in the air chamber 3 on the lower surface of the substrate 1. Since suction can be switched alternately, high-speed inspection that continuously performs a series of operations of dust removal, floating movement, fixation, and measurement of the measured object 10 can be easily performed, and the economics of the measurement inspection can be further improved. To do.

図６は、本発明の実施例４の測定用定盤の要部縦断図である。   FIG. 6 is a longitudinal sectional view of a main part of the measuring platen according to the fourth embodiment of the present invention.

実施例４の測定用定盤においては、ピン２００が、ピン挿入孔１ａに挿入される挿入部２０１が若干細くストレート状又は挿入方向に先細りテーパ状に形成された段２０２付きピンとなっている構成である。   In the measurement surface plate of the fourth embodiment, the pin 200 is a pin with a step 202 in which the insertion portion 201 inserted into the pin insertion hole 1a is slightly thin and straight or tapered in the insertion direction. It is.

この例では、ピン２００は、段２０２部が基板１の上面に当接するまでピン挿入孔１ａに挿入部２０１が圧入されて固定される。   In this example, the pin 200 is fixed by inserting the insertion portion 201 into the pin insertion hole 1a until the step 202 portion comes into contact with the upper surface of the substrate 1.

このため、基板１からのピン２００の突出長さが均一化され、基板１へのピン２００装着の信頼性が向上し、ピン２００の上端部からなる測定物搭載面の平面仕上げ時間が大幅に短縮され、測定用定盤の製作及び補修コスト共一層削減することができる   For this reason, the protrusion length of the pin 200 from the board | substrate 1 is equalized, the reliability of the pin 200 mounting | wearing to the board | substrate 1 improves, and the planar finishing time of the measurement object mounting surface which consists of the upper end part of the pin 200 is large. It can be shortened, and the manufacturing and repair costs of the measurement surface plate can be further reduced.

以上のように、本発明によれば、基板１の表面に複数配置された硬質部材からなるピン２の上端部を測定物搭載面とする簡潔な構造で、測定物搭載面となるピン２が小容積であることから、ピン２の高価な硬質素材を含む製作及び補修等のコスト低減が可能で、経済性及び測定物１０との接触形態の自由度に優れた測定用定盤を提供することができる。   As described above, according to the present invention, the pin 2 serving as the measurement object mounting surface has a simple structure in which the upper end portion of the pin 2 made of a plurality of hard members arranged on the surface of the substrate 1 is the measurement object mounting surface. Since it has a small volume, it is possible to reduce the cost of manufacturing and repairing the pin 2 including an expensive hard material, and to provide a measuring platen that is excellent in economic efficiency and freedom of contact form with the measurement object 10. be able to.

なお、本発明の測定用定盤１は、図１〜６等に示した実施例以外にも例えばピンの形状や配置形態あるいはその他の部材を含む材質等を任意に変更した構成とすることができる。例えば、ピンの材質として、硬質セラミックス、超硬合金の他に、ダイヤやその他の硬質部材を測定物の特性に合せて任意に単独又は組合せて用いることができる。   In addition, the measuring platen 1 of the present invention may have a configuration in which, for example, the shape or arrangement of the pins or the materials including other members are arbitrarily changed in addition to the embodiments shown in FIGS. it can. For example, as a material of the pin, diamond or other hard members can be used alone or in combination arbitrarily according to the characteristics of the measurement object in addition to hard ceramics and cemented carbide.

本発明の実施例１の測定用定盤の平面図である。It is a top view of the surface plate for a measurement of Example 1 of this invention. 図１の測定用定盤の縦断面図である。It is a longitudinal cross-sectional view of the surface plate for measurement of FIG. 本発明の実施例２の測定用定盤の平面図である。It is a top view of the surface plate for a measurement of Example 2 of this invention. 図３の測定用定盤の側面（要部縦断面）図である。FIG. 4 is a side view (main part longitudinal section) of the measurement surface plate of FIG. 3. 本発明の実施例３の測定用定盤の側面（要部縦断面）図である。It is a side surface (main part longitudinal cross-section) figure of the surface plate for a measurement of Example 3 of this invention. 本発明の実施例４の測定用定盤の要部縦断面図である。It is a principal part longitudinal cross-sectional view of the surface plate for a measurement of Example 4 of this invention. 従来の特許文献１の測定用定盤の側面図である。It is a side view of the conventional surface plate for measurement of patent document 1. 従来の特許文献２のラッピング定盤の構造を示す説明図（断面図）である。It is explanatory drawing (sectional drawing) which shows the structure of the lapping surface plate of the conventional patent document 2. FIG. （ａ）は従来の特許文献３の測定用定盤の加工方法の実施例を示す説明図、（ｂ）は（ａ）の加工方法により形成された定盤測定面の平面図である。(A) is explanatory drawing which shows the Example of the processing method of the conventional surface plate of patent document 3, (b) is a top view of the surface plate measurement surface formed by the processing method of (a). （ａ）は従来の特許文献４の測定用定盤の平面図、（ｂ）は（ａ）の要部断面図である。(A) is a top view of the surface plate for a measurement of the conventional patent document 4, (b) is principal part sectional drawing of (a).

符号の説明Explanation of symbols

１ 基板
２、２００ ピン
２ａ セラミック製ピン
２ｂ 超硬合金製ピン
２ｃ エア流路孔
３ エアチャンバ
４ 連結管
５ 切替弁
６ 圧縮空気源連結管
７ 真空源連結管
１０ 測定物
２０ ダイヤルゲージ
２０１ 挿入部
２０２ 段部 DESCRIPTION OF SYMBOLS 1 Board | substrate 2,200 Pin 2a Ceramic pin 2b Cemented carbide pin 2c Air flow path hole 3 Air chamber 4 Connection pipe 5 Switching valve 6 Compressed air source connection pipe 7 Vacuum source connection pipe 10 Measurement object 20 Dial gauge 201 Insertion part 202 steps

Claims (9)

板状の硬質部材からなり、複数のピン挿入孔が開孔された基板と、
該基板のピン挿入孔に圧入された硬質部材からなる複数のピンとから構成され、
これらピンの上端部が、同一平面上になるように仕上げられて測定物搭載面となることを特徴とする測定用定盤。 A board made of a plate-like hard member and having a plurality of pin insertion holes, and
It is composed of a plurality of pins made of a hard member press-fitted into the pin insertion hole of the substrate,
A measuring surface plate characterized in that the upper end portions of these pins are finished so as to be on the same plane and become a workpiece mounting surface. 前記複数のピンが、前記基板上で２種類以上の異種部材に区分され配置されていることを特徴とする請求項１記載の測定用定盤。   2. The measuring platen according to claim 1, wherein the plurality of pins are divided and arranged into two or more kinds of different members on the substrate. 前記ピンが測定物の測定箇所に合せて、該測定物を３点で支持するように前記基板上に配置されていることを特徴とする請求項１又は請求項２記載の測定用定盤。   The measuring platen according to claim 1 or 2, wherein the pin is arranged on the substrate so as to support the measuring object at three points in accordance with a measurement location of the measuring object. 前記基板が金属板であり、
前記ピンが、硬質セラミックス又は／及び超硬合金製であることを特徴とする請求項１乃至請求項３のいずれか１項記載の測定用定盤。 The substrate is a metal plate;
The measuring plate according to any one of claims 1 to 3, wherein the pin is made of hard ceramics and / or cemented carbide. 前記ピンは、少なくとも前記ピン挿入孔に挿入される部分が挿入方向に先細りテーパ状に形成されたテーパピンであり、前記基板のピン挿入孔に圧入されてテーパロックされることを特徴とする請求項１乃至請求項４のいずれか１項記載の測定用定盤。   The pin is a taper pin in which at least a portion to be inserted into the pin insertion hole is tapered in an insertion direction and is tapered, and is press-fitted into the pin insertion hole of the substrate to be taper locked. The measuring platen according to any one of claims 1 to 4. 前記ピンは、前記ピン挿入孔に挿入される挿入部が細くストレート状又は挿入方向に先細りテーパ状に形成された段付きピンであり、前記基板のピン挿入孔に圧入されて固定されることを特徴とする請求項１乃至請求項４のいずれか１項記載の測定用定盤。   The pin is a stepped pin in which an insertion portion to be inserted into the pin insertion hole is thin and formed in a straight shape or a tapered shape tapered in the insertion direction, and is fixed by being press-fitted into the pin insertion hole of the substrate. The measuring platen according to any one of claims 1 to 4, characterized in that it is characterized in that: 前記ピンの上端面は、平面に対して略点又は線接触する凸曲面状に形成されていることを特徴とする請求項１乃至請求項６のいずれか１項記載の測定用定盤。   The measuring platen according to any one of claims 1 to 6, wherein an upper end surface of the pin is formed in a convex curved surface shape that is substantially in point or line contact with a flat surface. 前記ピンには、エア流路孔が開孔され、ピンの上端から前記基板のピン挿入孔を経由して圧縮空気が噴出されるか、又は真空吸引されることを特徴とする請求項１乃至請求項７のいずれか１項記載の測定用定盤。   The air flow hole is opened in the pin, and compressed air is ejected from the upper end of the pin via the pin insertion hole of the substrate, or vacuum suction is performed. The measuring platen according to claim 7. 前記基板の下面に、圧縮空気源及び真空源に連結された流路を切り替える切替弁を備えたエアチャンバが、前記複数のピン挿入孔を覆い密閉状態で設けられていることを特徴とする請求項８記載の測定用定盤。   An air chamber having a switching valve for switching a flow path connected to a compressed air source and a vacuum source is provided on a lower surface of the substrate so as to cover the plurality of pin insertion holes in a sealed state. Item 9. A measuring platen according to Item 8.
JP2007122463A 2007-05-07 2007-05-07 Surface plate for measurement Pending JP2008272911A (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11192587A (en) * 1997-12-26 1999-07-21 Tanaka Seisakusho Kk Base for cutting
JPH11321777A (en) * 1998-05-14 1999-11-24 Souki Kk Receive pin surface plate of bent outer plate
JP2006212729A (en) * 2005-02-02 2006-08-17 Taisei Corp Surface table and method of manufacturing surface table

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11192587A (en) * 1997-12-26 1999-07-21 Tanaka Seisakusho Kk Base for cutting
JPH11321777A (en) * 1998-05-14 1999-11-24 Souki Kk Receive pin surface plate of bent outer plate
JP2006212729A (en) * 2005-02-02 2006-08-17 Taisei Corp Surface table and method of manufacturing surface table

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