JP2008267428A - Connection structure for seal connection part, fluid equipment unit, and press-in tool - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a connection structure for a seal connection part, suitable for mounting a seal member. <P>SOLUTION: In the connection structure 9 for the seal connection part, the seal member 10 is arranged between a first connection part 17A and a second connection part 17B and a connection member 3 is used for connecting connection portions thereof to each other. The first and second connection parts 17A, 17B have fitting recessed grooves 73A, 73B on the outer peripheries of the end faces. On the end face side inner walls of the fitting recessed grooves 73A, 73B, connection part side tapers 74A, 74B are provided which are inclined to the end face sides toward opening portions of the fitting recessed grooves 73A, 73B. The connection member 3 has a first connection block 41 and a second connection block 42 to be fixed to each other with a fixing member 45. On the first and second connection blocks 41, 42, fitted protruded portions 49A, 49B, 50A, 50B are provided to be fitted to the fitting recessed grooves 73A, 73B. The fitted protruded portions 49A, 49B, 50A, 50B have connection side tapers 51A, 51B, 52A, 52B corresponding to the connection part side tapers 74A, 74B. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、シール接続部の連結構造、流体機器ユニット及び圧入治具に関する。   The present invention relates to a connection structure of a seal connection portion, a fluid device unit, and a press-fitting jig.

従来より、半導体製造工程や液晶製造工程などの薬液制御には、流量制御弁や開閉弁などのバルブ類や、フィルタ、圧力センサや流量センサなどのセンサ類、継手ブロックや流路ブロックなどの配管ブロック類など、流体機器が使用される。近年、装置のコンパクト化のため、これら流体機器の接続部同士を連結部材を用いて直接連結し、ユニット化することが行われている。図２９は、従来のシール接続部の連結構造を使用した流体機器ユニット１１００の断面図である。   Conventionally, for chemical control in semiconductor manufacturing processes and liquid crystal manufacturing processes, valves such as flow control valves and on-off valves, sensors such as filters, pressure sensors and flow sensors, piping such as joint blocks and flow path blocks Fluid devices such as blocks are used. In recent years, in order to make the apparatus compact, connecting portions of these fluid devices are directly connected using a connecting member to form a unit. FIG. 29 is a cross-sectional view of a fluid device unit 1100 using a conventional connecting structure of seal connecting portions.

従来の流体機器ユニット１１００は、第１バルブ１１０１Ａと第２バルブ１１０１Ｂの接続部をシール部材１１０２を介して突き合わせ、第１及び第２バルブ１１０１Ａ，１１０１Ｂの接続部分を連結部材１１０３を用いて連結したシール接続部の連結構造を使用し、第１及び第２バルブ１１０１Ａ，１１０１Ｂを連結している。   In the conventional fluid device unit 1100, the connecting portion of the first valve 1101A and the second valve 1101B is abutted through the seal member 1102, and the connecting portion of the first and second valves 1101A and 1101B is connected using the connecting member 1103. The first and second valves 1101A and 1101B are connected using a connecting structure of the seal connecting portion.

第１及び第２バルブ１１０１Ａ，１１０１Ｂは、樹脂製のバルブボディ１１０４Ａ，１１０４Ｂに駆動部１１０５Ａ，１１０５Ｂを図示しないボルトで固定したものである。バルブボディ１１０４Ａ，１１０４Ｂは、流路１１０６Ａ，１１０６Ｂが側面に開口し、各開口部の周りにフランジ部１１０７Ａ，１１０７Ｂが突設されている。各フランジ部１１０７Ａ，１１０７Ｂの端面には、第１及び第２環状突起１１０９Ａ，１１０９Ｂを備える凸凹条の装着溝１１０８Ａ，１１０８Ｂが流路１１０６Ａ，１１０６Ｂの開口部の周りに沿って形成されている。そして、シール部材１１０２の両端面には、第１及び第２環状突起１１０９Ａ，１１０９Ｂが圧入される第１及び第２環状溝１１０２ａ，１１０２ｂが形成されている。   The first and second valves 1101A and 1101B are obtained by fixing drive portions 1105A and 1105B to resin valve bodies 1104A and 1104B with bolts (not shown). In the valve bodies 1104A and 1104B, the flow paths 1106A and 1106B are opened on the side surfaces, and flange portions 1107A and 1107B are projected around the respective openings. Convex and concave mounting grooves 1108A and 1108B having first and second annular protrusions 1109A and 1109B are formed around the openings of the flow paths 1106A and 1106B on the end faces of the flange portions 1107A and 1107B. First and second annular grooves 1102a and 1102b into which the first and second annular protrusions 1109A and 1109B are press-fitted are formed on both end surfaces of the seal member 1102.

連結部材１１０３は、樹脂製の第１連結ブロック１１１０と第２連結ブロック１１１１とに上下分割され、上方から図示しないボルトによって第１及び第２連結ブロック１１１０，１１１１を一体化している。第１及び第２連結ブロック１１１０，１１１１は、シール部材１１０２の第１及び第２環状溝１１０２ａ，１１０２ｂに第１及び第２環状突起１１０９Ａ，１１０９Ｂを圧入したフランジ部１１０７Ａ，１１０７Ｂを保持するため、フランジ部１１０７Ａ，１１０７Ｂが嵌合する第１及び第２保持溝１１１３，１１１４がそれぞれ内周面に沿って断面コの字状に形成されている。   The connecting member 1103 is vertically divided into a first connecting block 1110 and a second connecting block 1111 made of resin, and the first and second connecting blocks 1110 and 1111 are integrated by bolts (not shown) from above. The first and second connection blocks 1110 and 1111 hold the flange portions 1107A and 1107B in which the first and second annular protrusions 1109A and 1109B are press-fitted into the first and second annular grooves 1102a and 1102b of the seal member 1102, respectively. First and second holding grooves 1113 and 1114 into which the flange portions 1107A and 1107B are fitted are respectively formed in a U-shaped cross section along the inner peripheral surface.

かかる従来のシール接続部の連結構造によれば、第１及び第２バルブ１１０１Ａ，１１０１Ｂの接続部分を連結部材１１０３のみで連結するので、流体機器の組立性を良好にできる。   According to such a conventional seal connecting portion connecting structure, the connecting portions of the first and second valves 1101A and 1101B are connected only by the connecting member 1103, so that the assemblability of the fluid device can be improved.

特開２００７−２９０２号公報JP 2007-2902 A

しかしながら、従来のシール接続部の連結構造は、第１及び第２連結ブロック１１１０，１１１１をフランジ部１１０７Ａ，１１０７Ｂの外周面に装着して図示しないボルトをしめつけて、フランジ部１１０７Ａ，１１０７Ｂの間にシール部材１１０２の装着するときに、シール部材１１０２がフランジ部１１０７Ａ，１１０７Ｂとの嵌め合い部分に反発力を生じることがあった。この反発力が大きい場合には、反発力に抗して図示しないボルトを締め付けるため、フランジ部１１０７Ａ，１１０７Ｂは、第１及び第２連結ブロック１１１０，１１１１の間で反発力に耐えきれずに変形し、シール部材１１０２を適切に装着することができなかった。   However, the conventional connecting structure of the seal connecting portion is such that the first and second connecting blocks 1110 and 1111 are attached to the outer peripheral surfaces of the flange portions 1107A and 1107B, and bolts (not shown) are fastened to be interposed between the flange portions 1107A and 1107B. When the seal member 1102 is attached, the seal member 1102 sometimes generates a repulsive force at the fitting portion with the flange portions 1107A and 1107B. When the repulsive force is large, the bolts (not shown) are tightened against the repulsive force, so that the flange portions 1107A and 1107B are deformed without being able to withstand the repulsive force between the first and second connecting blocks 1110 and 1111. However, the seal member 1102 could not be properly attached.

本発明は、上記問題点を解決するためになされたものであり、シール部材の反発力に抗してシール部材を第１及び第２接続部の間に適切に装着できるシール接続部の連結構造、流体機器ユニット及び圧入治具を提供することを目的とする。   The present invention has been made in order to solve the above-mentioned problems, and is a seal connecting portion connecting structure that can appropriately mount the seal member between the first and second connecting portions against the repulsive force of the seal member. An object of the present invention is to provide a fluid device unit and a press-fitting jig.

本発明に係るシール接続部の連結構造は、次のような構成を有している。
（１）第１の部品の第１接続部と第２の部品の第２接続部との間にシール部材を配置し、連結部材によって接続部分を連結するシール接続部の連結構造において、前記第１及び前記第２接続部は、嵌合凹溝が端面外周に複数設けられ、前記連結部材は、固定部材によって固定される第１連結ブロックと第２連結ブロックとを有し、前記第１及び前記第２連結ブロックに前記嵌合凹溝に嵌合する嵌合凸部が複数設けられている。 The coupling structure of the seal connecting part according to the present invention has the following configuration.
(1) In the connecting structure of the seal connecting portion in which the sealing member is disposed between the first connecting portion of the first component and the second connecting portion of the second component, and the connecting portion is connected by the connecting member. 1 and the second connecting portion are provided with a plurality of fitting concave grooves on the outer periphery of the end surface, and the connecting member includes a first connecting block and a second connecting block fixed by a fixing member. A plurality of fitting protrusions that fit into the fitting grooves are provided on the second connecting block.

（２）（１）に記載の発明において、前記嵌合凹溝は、端面側内壁に、前記嵌合凹溝の開口部に向かって前記端面側に傾斜する接続部側テーパを有し、前記嵌合凸部は、前記接続部側テーパに対応する連結側テーパを有する。 (2) In the invention described in (1), the fitting groove has a connecting portion side taper that is inclined toward the end surface toward the opening of the fitting groove on the inner wall of the end surface. The fitting convex part has a connection side taper corresponding to the connection part side taper.

（３）（１）又は（２）に記載の発明において、前記連結部材は、前記第１及び前記第２の部品に対する回転を阻止する廻り止めが設けられている。 (3) In the invention described in (1) or (2), the connection member is provided with a detent that prevents rotation with respect to the first and second parts.

（４）（１）乃至（３）の何れか一つに記載の発明において、前記第１及び前記第２接続部は、前記シール部材が装着される環状の装着溝を有し、前記シール部材は、一端面に前記装着溝に嵌合してシールするシール部が形成され、他端面が閉鎖されており、前記他端面外周に前記第１及び前記第２接続部に設けた前記嵌合凹溝及び前記接続部側テーパと同じ嵌合凹溝及び接続部側テーパが設けられている。 (4) In the invention according to any one of (1) to (3), the first and second connection portions include an annular mounting groove in which the seal member is mounted, and the seal member Is formed with a seal portion that fits and seals in the mounting groove on one end surface, the other end surface is closed, and the fitting recess provided on the first and second connection portions on the outer periphery of the other end surface. The same fitting concave groove and connection part side taper as the groove and the connection part side taper are provided.

（５）（４）に記載の発明において、前記連結部材は、前記第１及び前記第２連結ブロックの取付方向、及び、前記第１及び前記第２接続部の接続方向に対して直交する方向から、前記第１及び前記第２連結ブロックが前記端面接続部分を保持する保持部分を挟んで前記第１及び前記第２連結ブロックに取り付けられ、前記第１及び前記第２連結ブロックを保持する第３連結ブロックと第４連結ブロックとを有する。 (5) In the invention described in (4), the connection member is orthogonal to the attachment direction of the first and second connection blocks and the connection direction of the first and second connection portions. From the above, the first and second connection blocks are attached to the first and second connection blocks with a holding part holding the end face connection part interposed therebetween, and hold the first and second connection blocks. It has 3 connection blocks and a 4th connection block.

（６）（１）乃至（５）の何れか一つに記載の発明において、前記第１及び前記第２連結ブロックは、前記第３及び前記第４連結ブロックを取り付けられる面から、前記端面接続部分を保持する保持部が設けられた側面と反対側に向かって傾斜する被加圧側テーパを有し、前記第３及び前記第４連結ブロックは、前記第１及び前記第２連結ブロックに取り付けられる面に前記被加圧側テーパに対応する加圧側テーパを有する。 (6) In the invention according to any one of (1) to (5), the first and second connection blocks are connected to the end face from a surface to which the third and fourth connection blocks are attached. A pressure-receiving-side taper that inclines toward a side opposite to the side surface on which the holding portion that holds the portion is provided, and the third and fourth connection blocks are attached to the first and second connection blocks. The surface has a pressure side taper corresponding to the pressure side taper.

（７）（１）乃至（６）の何れか一つに記載の発明において、前記シール部材は、圧入代を有する第１凹凸条と第２凹凸条を有し、前記第１及び前記第２接続部は、前記第１凹凸条と前記第２凹凸条に対応する第１凸凹条と第２凸凹条とを有し、前記第１及び前記第２凸凹条を前記第１及び前記第２凹凸条の圧入代にそれぞれ圧入してシールする。 (7) In the invention according to any one of (1) to (6), the seal member includes a first ridge and a second ridge having a press-fitting allowance, and the first and second The connecting portion has a first ridge and a second ridge corresponding to the first ridge and the second ridge, and the first and second ridges are connected to the first and second ridges. Each of the strips is press-fitted and sealed.

（８）（１）乃至（７）の何れか一つに記載の発明において、前記第１の部品と、前記第２の部品と、前記シール部材と、前記第１連結ブロックと、前記第２連結ブロックは、樹脂を材質とする。 (8) In the invention according to any one of (1) to (7), the first part, the second part, the sealing member, the first connection block, and the second part. The connecting block is made of resin.

本発明に係る圧入治具は、次のような構成を有している。
（９）（１）乃至（８）の何れか一つに記載の発明に用いられ、前記シール部材を前記第１及び前記第２接続部に圧入する圧入治具であって、前記第１の部品を固定する固定部と、前記固定部が前記第第１の部品を固定する固定位置に向かって直線往復運動する可動部と、前記可動部に駆動力を与える駆動部とを有する。 The press-fitting jig according to the present invention has the following configuration.
(9) A press-fitting jig which is used in the invention according to any one of (1) to (8) and press-fits the seal member into the first and second connection portions, A fixing unit that fixes a component; a movable unit that linearly reciprocates toward a fixing position where the fixing unit fixes the first component; and a driving unit that applies a driving force to the movable unit.

本発明に係る流体機器ユニットは、次のような構成を有している。
（１０）（１）乃至（８）の何れか一つに記載の発明を用いて、第１流体機器と第２流体機器とを連結している。 The fluid device unit according to the present invention has the following configuration.
(10) The first fluid device and the second fluid device are coupled using the invention according to any one of (1) to (8).

本発明のシール接続部の連結構造は、第１及び第２接続部が嵌合凹溝を複数有し、連結部材を構成する第１及び第２連結ブロックが嵌合凹溝に対応する嵌合凸部を複数有しており、第１及び第２連結ブロックと第１及び第２接続部との接触面積が大きい。そのため、シール部材を第１及び第２接続部の間に装着するときに、シール部材の反発力が大きい場合でも、第１及び第２連結ブロックと第１及び第２接続部に面圧が分散するため、第１及び第２接続部が、変形しにくく、シール部材を十分な力で押し潰すことが可能である。よって、本発明のシール接続部の連結構造によれば、シール部材を第１及び第２接続部の間に適切に装着することができる。   In the connecting structure of the seal connecting portion of the present invention, the first and second connecting portions have a plurality of fitting grooves, and the first and second connecting blocks constituting the connecting member are fitted to the fitting grooves. A plurality of convex portions are provided, and a contact area between the first and second connection blocks and the first and second connection portions is large. Therefore, when the sealing member is mounted between the first and second connecting portions, even if the repulsive force of the sealing member is large, the surface pressure is distributed to the first and second connecting blocks and the first and second connecting portions. For this reason, the first and second connection portions are not easily deformed, and the seal member can be crushed with a sufficient force. Therefore, according to the connection structure of the seal connection portion of the present invention, the seal member can be appropriately mounted between the first and second connection portions.

本発明のシール接続部の連結構造は、第１及び第２接続部に設けた嵌合凹溝の端面側内壁に、嵌合凹溝の開口部に向かって端面側に傾斜する接続部側テーパを有し、第１及び第２連結ブロックに設けた嵌合凸部が接続部側テーパに対応する連結側テーパを有し、接続部側テーパと連結側テーパとを接触させた状態で、第１及び第２連結ブロックが第１及び第２接続部を連結する。これにより、本発明のシール接続部の連結構造は、第１及び第２連結ブロックから第１及び第２接続部に端面接続部分側への力を作用させるので、シール部材の反発力に抗してシール接続部の接続状態を維持することができる。   The connecting structure of the seal connecting part of the present invention is a connecting part side taper that is inclined toward the end face side toward the opening of the fitting groove on the inner wall of the fitting groove provided in the first and second connecting parts. The fitting convex portions provided on the first and second connecting blocks have a connecting side taper corresponding to the connecting portion side taper, and the connecting portion side taper and the connecting side taper are in contact with each other, The first and second connection blocks connect the first and second connection portions. As a result, the connecting structure of the seal connecting portion of the present invention applies a force from the first and second connecting blocks to the first and second connecting portions toward the end face connecting portion side, thus resisting the repulsive force of the seal member. Thus, the connection state of the seal connecting portion can be maintained.

本発明のシール接続部の連結構造は、第１及び第２連結ブロックが第１及び第２の部品に対して回転することを連結部材の廻り止めが阻止するので、第１及び第２連結ブロックを第１及び第２接続部に取り付けるときに、嵌合凸部と嵌合凹溝との位置関係がずれにくい。   In the connecting structure of the seal connecting portion of the present invention, the first and second connecting blocks prevent the first and second connecting blocks from rotating with respect to the first and second parts by preventing the connecting member from rotating. Is attached to the first and second connecting portions, the positional relationship between the fitting convex portion and the fitting concave groove is difficult to shift.

本発明のシール接続部の連結構造は、シール部材が、第１及び第２接続部の環状突起が圧入される環状溝が一端面に形成され、他端面が閉鎖され、他端面外周に第１及び第２接続部に設けた嵌合凹溝及び接続部側テーパと同じ嵌合凹溝及び接続部側テーパが設けられているので、シール部材を第１又は第２接続部に装着して第１及び第２連結ブロックをそのまま取り付ければ、流路を簡単に遮断できる。   In the connecting structure of the seal connecting portion of the present invention, the sealing member is formed with an annular groove on one end surface into which the annular protrusions of the first and second connecting portions are press-fitted, the other end surface is closed, and the first end on the outer periphery of the other end surface. Since the fitting groove and the connecting portion side taper are the same as the fitting groove and the connecting portion side taper provided in the second connecting portion, the seal member is attached to the first or second connecting portion and If the first and second connection blocks are attached as they are, the flow path can be easily blocked.

本発明のシール接続部の連結構造は、第１及び第２連結ブロックが、第１及び第２連結ブロックの取付方向、及び、第１及び第２接続部の接続方向に対して直交する方向から、第１及び第２連結ブロックが第１及び第２接続部の端面接続部を保持する保持部を挟むように、第３及び第４連結ブロックを取り付けられて保持されるので、第１及び第２連結ブロックが第１及び第２接続部の連結状態を保持する保持力が低下しにくい。   In the connecting structure of the seal connecting portion of the present invention, the first and second connecting blocks are from the direction orthogonal to the attaching direction of the first and second connecting blocks and the connecting direction of the first and second connecting portions. The first and second connecting blocks are attached and held so that the holding parts holding the end face connecting parts of the first and second connecting parts are sandwiched between the first and second connecting blocks. The holding force for holding the connected state of the first and second connecting portions by the two connecting blocks is unlikely to decrease.

本発明のシール接続部の連結構造は、第１及び第２連結ブロックが、第３及び第４連結ブロックを取り付けられる面から、第１及び第２接続部の端面接続部分を保持する保持部が設けられた側面と反対側に向かって傾斜する被加圧側テーパを有し、 第３及び第４連結ブロックが、第１及び第２連結ブロックに取り付けられる面に被加圧側テーパに対応する加圧側テーパを有しており、被加圧側テーパに加圧側テーパを接触させた状態で第３及び第４連結ブロックを第１及び第２連結ブロックに取り付ける。そのため、本発明のシール接続部の連結構造によれば、第１及び第２連結ブロックが第１及び第２接続部に与える端面接続部側への力を増大させることができる。   In the connecting structure of the seal connecting portion of the present invention, the first and second connecting blocks have a holding portion that holds the end surface connecting portions of the first and second connecting portions from the surface to which the third and fourth connecting blocks are attached. A pressure-side taper that is inclined toward the side opposite to the provided side surface, and the third and fourth connection blocks correspond to the pressure-side taper on the surface attached to the first and second connection blocks The third and fourth connection blocks are attached to the first and second connection blocks in a state where the pressure side taper is in contact with the pressure-receiving side taper. Therefore, according to the connection structure of the seal connection part of this invention, the force to the end surface connection part side which a 1st and 2nd connection block gives to a 1st and 2nd connection part can be increased.

本発明のシール接続部の連結構造は、シール部材に設けた第１及び第２凹凸条の圧入代に対して、第１及び第２接続部に設けた第１及び第２凸凹条を圧入するときに、過大な荷重を要するが、第１及び第２接続部に設けた複数の嵌合凹溝と、第１及び第２連結ブロックに設けた複数の嵌合凸部との各接触面に面圧が分散するので、第１及び第２接続部の変形を抑制できる。   The connection structure of the seal connection part of this invention press-fits the 1st and 2nd unevenness | corrugation provided in the 1st and 2nd connection part with respect to the press-fitting allowance of the 1st and 2nd uneven | corrugation provided in the sealing member. Sometimes, an excessive load is required, but each contact surface of the plurality of fitting concave grooves provided in the first and second connecting portions and the plurality of fitting convex portions provided in the first and second connecting blocks Since the surface pressure is dispersed, deformation of the first and second connection portions can be suppressed.

本発明のシール接続部の連結構造は、第１の部品と第２の部品とシール部材と第１連結ブロックと第２連結ブロックが樹脂を材質とし、クリープしやすいが、第１及び第２連結ブロックが樹脂を材質とする第１及び第２接続部を個別に連結し、樹脂を挟み込む量が少ないため、クリープの影響を小さくできる。   According to the connecting structure of the seal connecting portion of the present invention, the first part, the second part, the seal member, the first connecting block, and the second connecting block are made of resin and are easy to creep. Since the block connects the first and second connecting portions made of resin individually and the amount of the resin sandwiched is small, the influence of creep can be reduced.

また、シール部材を第１及び第２接続部に圧入する場合には、圧入治具の固定部によって第１の部品を固定した後、第２接続部が第１接続部に対向するように第２の部品を圧入治具の可動部にセットし、その後、駆動部によって可動部を駆動して第２の部品を第１の部品側に移動させて、第２接続部を第１接続部に押し付け、シール部材を第１及び第２接続部に圧入する。その後、駆動部によって可動部を後退させ、第１の部品を固定部から開放する。それから、第１及び第２連結ブロックを第１及び第２接続部に取り付ける。よって、本発明の圧入治具によれば、シール部材を第１及び第２接続部に圧入する圧入荷重が大きく、第１及び第２連結ブロックを第１及び第２接続部に取り付けるときの力のみではシール部材を第１及び第２接続部に装着できない場合でも、シール部材を第１及び第２接続部に簡単に装着できる。   Further, when the sealing member is press-fitted into the first and second connection portions, the first component is fixed by the fixing portion of the press-fitting jig, and then the second connection portion is opposed to the first connection portion. 2 parts are set on the movable part of the press-fitting jig, and then the movable part is driven by the drive part to move the second part to the first part side, so that the second connection part becomes the first connection part. The seal member is pressed into the first and second connection portions. Thereafter, the movable part is moved backward by the drive part, and the first part is released from the fixed part. Then, the first and second connection blocks are attached to the first and second connection portions. Therefore, according to the press-fitting jig of the present invention, the press-fitting load for press-fitting the seal member into the first and second connecting portions is large, and the force when attaching the first and second connecting blocks to the first and second connecting portions. Even if the seal member cannot be attached to the first and second connection portions only by using only the seal member, the seal member can be easily attached to the first and second connection portions.

上記本発明のシール接続部の連結構造を用いて第１流体機器と第２流体機器とを連結した流体機器ユニットによれば、シール部材を第１及び第２流体機器の間に適切に装着することができる。   According to the fluid device unit in which the first fluid device and the second fluid device are connected using the connecting structure of the seal connecting portion of the present invention, the seal member is appropriately mounted between the first and second fluid devices. be able to.

次に、本発明に係るシール接続部の連結構造、流体機器ユニット及び圧入治具の一実施形態について図面を参照して説明する。   Next, an embodiment of a seal connecting portion connecting structure, a fluid device unit, and a press-fitting jig according to the present invention will be described with reference to the drawings.

（第１実施形態）
＜流体機器ユニットの全体構成＞
図１は、本発明の第１実施形態に係る流体機器ユニット１の外観斜視図である。
流体機器ユニット１は、「第１流体機器」及び「第２流体機器」の一例である継手ブロック４，４と第１バルブ２Ａと第２バルブ２Ｂとを連結し、ユニット全体の剛性を確保するために、それらをレール部材５に取り付けて構成されている。継手ブロック４と第１バルブ２Ａと第２バルブ２Ｂは、シール接続部の連結構造９を使用して連結されている。シール接続部の連結構造９は、継手ブロック４と第１バルブ２Ａとの接続部分、及び、第１バルブ２Ａと第２バルブ２Ｂとの接続部分、第２バルブ２Ｂと継手ブロック４との接続部分に、シール部材１０をそれぞれ配置し、各接続部分を連結部材３を用いて個別に連結している。第１実施形態では、第１及び第２バルブ２Ａ，２Ｂに設けた接続部１７Ａ，１７Ｂと、連結部材３を構成する第１及び第２連結ブロック４１，４２の形状に特徴を有する。 (First embodiment)
<Overall configuration of fluid equipment unit>
FIG. 1 is an external perspective view of a fluid device unit 1 according to the first embodiment of the present invention.
The fluid device unit 1 connects the joint blocks 4 and 4, which are examples of the “first fluid device” and the “second fluid device”, the first valve 2 </ b> A, and the second valve 2 </ b> B, and ensures the rigidity of the entire unit. Therefore, they are configured by attaching them to the rail member 5. The joint block 4, the first valve 2 </ b> A, and the second valve 2 </ b> B are coupled using a coupling structure 9 of a seal connection portion. The connecting structure 9 of the seal connecting portion includes a connecting portion between the joint block 4 and the first valve 2A, a connecting portion between the first valve 2A and the second valve 2B, and a connecting portion between the second valve 2B and the joint block 4. In addition, the seal members 10 are respectively arranged, and the connecting portions are individually connected using the connecting members 3. In 1st Embodiment, it has the characteristics in the shape of the connection parts 17A and 17B provided in 1st and 2nd valve | bulb 2A, 2B, and the 1st and 2nd connection blocks 41 and 42 which comprise the connection member 3. FIG.

＜第１バルブ及び第２バルブの構成＞
第１及び第２バルブ２Ａ，２Ｂは、同一構造をなす。第１及び第２バルブ２Ａ，２Ｂは、バルブボディ１１Ａ，１１Ｂに駆動部１２Ａ，１２Ｂが取り付けられている。駆動部１２Ａ，１２Ｂは、耐腐食性を確保するために、樹脂を材質とする部品を構成部品に使用する（但し、例えば、駆動部１２Ａ，１２Ｂがエアオペレイトタイプである場合の付勢バネのように、樹脂では機能を発揮できない構成部品を除く。）。 <Configuration of first valve and second valve>
The first and second valves 2A and 2B have the same structure. In the first and second valves 2A and 2B, drive parts 12A and 12B are attached to the valve bodies 11A and 11B. In order to ensure corrosion resistance, the drive parts 12A and 12B use components made of resin as the constituent parts (however, for example, biasing springs when the drive parts 12A and 12B are air operated types) This excludes components that cannot function with resin.

「第１の部品」及び「第２の部品」の一例であるバルブボディ１１Ａ，１１Ｂは、ＰＴＦＥ（ポリテトラフルオロエチレン）やＰＦＡ（四フッ化エチレンパーフルオロアルキルビニルエーテル共重合体）、ＰＰＳ（ポリフェニレンサルファイド）などの樹脂を略直方体形状にしたものであり、「第１流路」の一例である一次側ポート１３Ａ，１３Ｂと、「第２流路」の一例である二次側ポート１４Ａ，１４Ｂとが弁座１５Ａ，１５Ｂを介して連通している。弁座１５Ａ，１５Ｂには、駆動部１２Ａ，１２Ｂの駆動力によって往復直線運動する樹脂製のダイアフラム１６Ａ，１６Ｂが当接又は離間して弁の開閉を行う。バルブボディ１１Ａ，１１Ｂは、対向する側面に、一次側ポート１３Ａ，１３Ｂと二次側ポート１４Ａ，１４Ｂがそれぞれ開口し、各ポート１３Ａ，１３Ｂ，１４Ａ，１４Ｂの開口部外周に沿って接続部１７Ａ，１７Ｂが筒状に突設されている。   Valve bodies 11A and 11B, which are examples of “first part” and “second part”, are PTFE (polytetrafluoroethylene), PFA (tetrafluoroethylene perfluoroalkyl vinyl ether copolymer), PPS (polyphenylene). A resin such as sulfide) is formed in a substantially rectangular parallelepiped shape, and primary ports 13A and 13B, which are examples of “first flow paths”, and secondary ports 14A, 14B, which are examples of “second flow paths”. Are communicated via the valve seats 15A and 15B. Resin diaphragms 16A and 16B that reciprocate linearly by the driving force of the drive units 12A and 12B contact or separate from the valve seats 15A and 15B to open and close the valves. The valve bodies 11A and 11B have primary side ports 13A and 13B and secondary side ports 14A and 14B opened on opposite side surfaces, respectively, and a connecting portion 17A along the outer periphery of each port 13A, 13B, 14A and 14B. , 17B project in a cylindrical shape.

バルブボディ１１Ａ，１１Ｂの下面には、耐腐食性の観点からＰＦＡやＰＰＳなどの樹脂を略直方体形状に成形した取付ブロック１９Ａ，１９Ｂが取り付けられている。取付ブロック１９Ａ，１９Ｂの下面には、レール部材５のレール溝６にスライド可能に係合する係合部２０Ａ，２０Ｂが設けられている。   Mounting blocks 19A and 19B formed by molding a resin such as PFA or PPS into a substantially rectangular parallelepiped shape from the viewpoint of corrosion resistance are attached to the lower surfaces of the valve bodies 11A and 11B. Engagement portions 20A and 20B that are slidably engaged with the rail grooves 6 of the rail member 5 are provided on the lower surfaces of the mounting blocks 19A and 19B.

図２は、図１に示す第１バルブ２Ａとレール部材５との関係を説明する図であり、（ａ）は第１バルブ２Ａの側面図を示し、（ｂ）はレール部材５の断面図を示す。図３は、図１に示す第１バルブ２Ａの下面図である。ここでは、第１及び第２バルブ２Ａ，２Ｂが同一構造であるので、第１バルブ２Ａを例に挙げて係合部２０Ａの構成を説明する。
図２（ａ）に示すように、係合部２０Ａは、取付ブロック１９Ａの下面から下方に突き出す脚部２１Ａと、脚部２１Ａの先端部に一体成形された本体部２２Ａとからなる。 2A and 2B are views for explaining the relationship between the first valve 2A and the rail member 5 shown in FIG. 1, wherein FIG. 2A is a side view of the first valve 2A, and FIG. 2B is a cross-sectional view of the rail member 5. Indicates. FIG. 3 is a bottom view of the first valve 2A shown in FIG. Here, since the first and second valves 2A and 2B have the same structure, the configuration of the engaging portion 20A will be described by taking the first valve 2A as an example.
As shown in FIG. 2A, the engaging portion 20A includes a leg portion 21A that protrudes downward from the lower surface of the mounting block 19A, and a main body portion 22A that is integrally formed at the distal end portion of the leg portion 21A.

図２（ｂ）に示すように、レール部材５は、一対の突出片７，７が上面開口部の両側内壁から内向きに突出し、一対の突出片７，７の間に形成される間隙８の幅寸法Ｘがレール溝６の幅寸法Ｙより狭くされている。   As shown in FIG. 2B, the rail member 5 has a pair of projecting pieces 7 and 7 projecting inward from the inner walls on both sides of the upper surface opening, and a gap 8 formed between the pair of projecting pieces 7 and 7. Is made narrower than the width dimension Y of the rail groove 6.

図２の（ａ）及び（ｂ）に示すように、脚部２１Ａは、外径寸法Ｘ’が間隙８の幅寸法Ｘより小さく、一対の突出片７，７の間に形成される間隙８内で回転しうる大きさ形状で形成されている。   As shown in FIGS. 2A and 2B, the leg portion 21 </ b> A has an outer diameter dimension X ′ smaller than the width dimension X of the gap 8, and the gap 8 formed between the pair of protruding pieces 7, 7. It is formed in a size that can rotate inside.

図３に示すように、本体部２２Ａは、底面が略菱形をなす。本体部２２Ａは、一対の突出片７，７の間を通過できるように、短手方向の幅寸法Ｙ’’が脚部２１Ａの幅寸法Ｘ’と同一であって、間隙８の寸法Ｘより小さくされている。本体部２２Ａは、レール溝６内に配置された後にレール溝６内で向きを変えることにより、両端がレール部材５の突出片７，７に掛止されるように、本体部２２Ａの長手方向の幅寸法Ｙ’を、短手方向の幅寸法Ｙ’’及び間隙８の幅寸法Ｘより大きく、レール溝６の幅寸法Ｙより小さくしている。本体部２２Ａの外周縁には、一対の係止面２３Ａが脚部２１Ａを挟んで平行に形成され、レール溝６を構成する側壁に突き当てられて係止されるようになっている。本体部２２Ａは、レール溝６の内壁と突出片７，７に摺接するように厚さが設定されている。   As shown in FIG. 3, the bottom surface of the main body portion 22A has a substantially rhombus shape. The main body portion 22A has a width dimension Y ″ in the short direction that is the same as the width dimension X ′ of the leg portion 21A so that it can pass between the pair of projecting pieces 7 and 7, and from the dimension X of the gap 8. It has been made smaller. The main body portion 22A is arranged in the rail groove 6 and then changed in its direction in the rail groove 6 so that both ends are hooked on the protruding pieces 7 and 7 of the rail member 5 in the longitudinal direction of the main body portion 22A. The width dimension Y ′ is larger than the width dimension Y ″ in the lateral direction and the width dimension X of the gap 8, and smaller than the width dimension Y of the rail groove 6. A pair of locking surfaces 23A are formed in parallel on the outer peripheral edge of the main body portion 22A with the leg portion 21A interposed therebetween, and are abutted against and locked by the side walls constituting the rail groove 6. The main body 22A is set to have a thickness so as to be in sliding contact with the inner wall of the rail groove 6 and the protruding pieces 7 and 7.

従って、第１バルブ２Ａは、係合部２０Ａの本体部２２Ａをレール部材５の間隙８からレール溝６内に挿入した後、一対の係止面２３Ａ，２３Ａがレール溝６を構成する側壁に当接して係止されるまで回転されると、本体部２２Ａの両端が突出片７，７に引っかかってレール溝６から抜けなくなり、レール部材５にスライド可能に取り付けられる。よって、第１バルブ２Ａは、レール部材５に単体で着脱できる。   Accordingly, in the first valve 2A, after the body portion 22A of the engaging portion 20A is inserted into the rail groove 6 from the gap 8 of the rail member 5, the pair of locking surfaces 23A, 23A are formed on the side walls constituting the rail groove 6. When it is rotated until it comes into contact and is locked, both ends of the main body portion 22A are caught by the protruding pieces 7 and 7 and cannot be removed from the rail groove 6, and are slidably attached to the rail member 5. Therefore, the first valve 2A can be attached to and detached from the rail member 5 alone.

＜継手ブロックの構成＞
図１に示す継手ブロック４は、ＰＦＡやＰＰＳなどの樹脂でブロック状に成形されている。継手ブロック４は、一方の側面に配管が接続される配管ポート２４が設けられ、他方の側面に配管ポート２４に連通する流路２５が開口している。流路２５の開口部には、第１及び第２バルブ２Ａ，２Ｂの接続部１７Ａ，１７Ｂと同様の形状を有する接続部２６が設けられている。継手ブロック４は、取付ブロック１９Ａの係合部２０Ａと同一形状の係合部２８が下面に突設された取付ブロック２７に保持されている。よって、継手ブロック４は、第１バルブ２Ａと同様、レール部材５に単体で着脱できる。 <Combination block configuration>
The joint block 4 shown in FIG. 1 is formed into a block shape using a resin such as PFA or PPS. The joint block 4 is provided with a piping port 24 to which piping is connected on one side surface, and a flow path 25 communicating with the piping port 24 is opened on the other side surface. A connection portion 26 having the same shape as the connection portions 17A and 17B of the first and second valves 2A and 2B is provided at the opening of the flow path 25. The joint block 4 is held by an attachment block 27 in which an engagement portion 28 having the same shape as the engagement portion 20A of the attachment block 19A protrudes from the lower surface. Therefore, the joint block 4 can be attached to and detached from the rail member 5 alone, like the first valve 2A.

＜レール部材の構成＞
図４は、図１に示す流体機器ユニット１の部分分解斜視図である。
レール部材５は、ＰＦＡやＰＰＳなどの樹脂をストレート形状に成形した複数のＳ型レール部品３１をボルト３０（図１参照）で連結し、その両端部にレールエンド部品３２をボルト３０で連結して構成されており、流体機器のレイアウトに応じて全長が調整できるようになっている。レール部品３１，３２には、ゴムや樹脂を材質とするキャップ２９が、ボルト３０の頭部を覆うように装着され、ボルト３０が腐食性雰囲気にさらされることを防止している。尚、レールエンド部品３２には、取付孔３９が形成された取付部３８を一体成形され、レール部材５を介して第１バルブ２Ａ等を半導体製造装置や液晶製造装置などの外部装置に組み付けるようになっている。 <Configuration of rail member>
4 is a partially exploded perspective view of the fluid device unit 1 shown in FIG.
The rail member 5 is formed by connecting a plurality of S-shaped rail parts 31 formed of a resin such as PFA or PPS in a straight shape with bolts 30 (see FIG. 1) and connecting rail end parts 32 with bolts 30 at both ends thereof. The overall length can be adjusted according to the layout of the fluid device. A cap 29 made of rubber or resin is attached to the rail parts 31 and 32 so as to cover the head of the bolt 30 to prevent the bolt 30 from being exposed to a corrosive atmosphere. The rail end component 32 is integrally formed with a mounting portion 38 in which a mounting hole 39 is formed, and the first valve 2A and the like are assembled to an external device such as a semiconductor manufacturing device or a liquid crystal manufacturing device via the rail member 5. It has become.

レール部材５には、位置決め部材３３がスライド可能に取り付けられている。位置決め部材３３は、ＰＦＡやＰＰＳなどの樹脂をコの字状に成形したものであり、レール部材５のレール溝６に摺動可能に嵌め合わされるＴ字形のガイド部３４が内面に突設されている。位置決め部材３３の両側面には、固定ねじ３６をねじ込むためのねじ孔３５が形成されている。位置決め部材３３は、固定ねじ３６の先端部をレール部材５に押し付けることにより、レール部材５の任意の位置に固定され、相互に連結された継手ブロック４や第１及び第２バルブ２Ａ，２Ｂをレール部材５に対して位置決めする。尚、ねじ孔３５には、樹脂やゴムなどを材質とするキャップ３７が装着され、固定ねじ３６が腐食性雰囲気にさらされることを防止する。   A positioning member 33 is slidably attached to the rail member 5. The positioning member 33 is formed by molding a resin such as PFA or PPS into a U-shape, and a T-shaped guide portion 34 slidably fitted in the rail groove 6 of the rail member 5 is provided on the inner surface. ing. On both side surfaces of the positioning member 33, screw holes 35 for screwing the fixing screws 36 are formed. The positioning member 33 fixes the joint block 4 and the first and second valves 2A and 2B, which are fixed to each other on the rail member 5 by pressing the tip of the fixing screw 36 against the rail member 5 and connected to each other. Positioning is performed with respect to the rail member 5. Note that a cap 37 made of resin, rubber, or the like is attached to the screw hole 35 to prevent the fixing screw 36 from being exposed to a corrosive atmosphere.

＜シール接続部の連結構造＞
次に、シール接続部の連結構造９について説明する。ここでは、第１及び第２バルブ２Ａ，２Ｂの接続部分を例に挙げて説明する。
図４に示すように、連結部材３は、第１連結ブロック４１と第２連結ブロック４２とに上下２分割されている。第１及び第２連結ブロック４１，４２は、ＰＦＡやＰＰＳなどの樹脂をブロック状に成形したものである。第１及び第２連結ブロック４１，４２は、例えば、第１及び第２バルブ２Ａ，２Ｂの接続部１７Ａ，１７Ｂを上下方向から挟み込んで保持するために、互いに当接する面に保持面４３，４４が半円状に形成されている。第１及び第２連結ブロック４１，４２は、「固定部材」の一例であるボルト４５，４５を上方から締結されて固定される。 <Connecting structure of seal connection part>
Next, the connecting structure 9 for the seal connecting portion will be described. Here, the connection part of 1st and 2nd valve | bulb 2A, 2B is mentioned as an example, and is demonstrated.
As shown in FIG. 4, the connecting member 3 is divided into a first connecting block 41 and a second connecting block 42 in the upper and lower parts. The first and second connection blocks 41 and 42 are formed by molding a resin such as PFA or PPS into a block shape. The first and second connecting blocks 41, 42 are, for example, holding surfaces 43, 44 on surfaces that abut each other in order to sandwich and hold the connecting portions 17A, 17B of the first and second valves 2A, 2B from above and below. Is formed in a semicircular shape. The first and second connection blocks 41 and 42 are fixed by fastening bolts 45 and 45 which are an example of “fixing members” from above.

図５は、図１に示す第１バルブ２Ａと第２バルブ２Ｂのシール構造を示す分解拡大断面図である。
第１及び第２バルブ２Ａ，２Ｂは、接続部１７Ａ，１７Ｂの端面に第１及び第２装着溝７１Ａ，７１Ｂが射出成形又は切削加工により形成されている。第１及び第２装着溝７１Ａ，７１Ｂは、ポート開口部の外側に沿って環状に設けられている。第１及び第２装着溝７１Ａ，７１Ｂは、シール部材１０の取付方向を制限しないために同一形状にされている。第１及び第２装着溝７１Ａ，７１Ｂは、第１及び第２環状突起７２Ａ，７２Ｂを備える凸凹条をなす。 FIG. 5 is an exploded enlarged sectional view showing a seal structure of the first valve 2A and the second valve 2B shown in FIG.
In the first and second valves 2A and 2B, first and second mounting grooves 71A and 71B are formed on the end surfaces of the connecting portions 17A and 17B by injection molding or cutting. The first and second mounting grooves 71A and 71B are annularly provided along the outside of the port opening. The first and second mounting grooves 71 </ b> A and 71 </ b> B have the same shape so as not to limit the mounting direction of the seal member 10. The first and second mounting grooves 71A and 71B form an uneven line including the first and second annular protrusions 72A and 72B.

図６は、図５に示す接続部に使用するシール部材１０の平面図である。図７は、図６に示すシール部材１０のＡ−Ａ断面図である。
シール部材１０は、ＰＦＡやＰＰＳなどの樹脂を環状に成形したものである。シール部材１０は、接続部１７Ａ，１７Ｂへの取付方向を限定しないために、両端面が同一形状をなす。 FIG. 6 is a plan view of the seal member 10 used in the connecting portion shown in FIG. FIG. 7 is a cross-sectional view of the seal member 10 shown in FIG.
The seal member 10 is formed by annularly molding a resin such as PFA or PPS. Since the sealing member 10 does not limit the mounting direction to the connecting portions 17A and 17B, both end surfaces have the same shape.

シール部材１０は、環状に形成されたシール本体部６１の両端面に、第１及び第２環状突起７２Ａ，７２Ｂに嵌合する第１及び第２環状溝６２，６３がそれぞれ形成されている。第１及び第２環状溝６２，６３は、幅寸法Ｗ３が、第１及び第２環状突起７２Ａ，７２Ｂの幅Ｗ１（図５参照）と同一に設定されている。第１及び第２環状溝６２，６３は、開口部より奥側の内周壁と外周壁が、肉厚方向Ｘにそれぞれ肉厚にされている。そのため、第１及び第２環状溝６２，６３は、開口部より奥側の幅Ｗ２が、開口部の幅Ｗ３より小さくされ、開口部に段差が設けられている。よって、シール部材１０は、第１及び第２シール部材６２，６３の開口部に、第１及び第２環状突起７２Ａ，７２Ｂをガイドするガイド部６５，６６が設けられている。   The seal member 10 is formed with first and second annular grooves 62 and 63 that fit into the first and second annular protrusions 72A and 72B, respectively, on both end surfaces of the annular seal main body 61. The first and second annular grooves 62 and 63 have the same width dimension W3 as the width W1 (see FIG. 5) of the first and second annular protrusions 72A and 72B. As for the 1st and 2nd annular grooves 62 and 63, the inner peripheral wall and outer peripheral wall of the back side from an opening are made thick in the thickness direction X, respectively. Therefore, in the first and second annular grooves 62 and 63, the width W2 on the back side from the opening is made smaller than the width W3 of the opening, and a step is provided in the opening. Therefore, the seal member 10 is provided with guide portions 65 and 66 for guiding the first and second annular protrusions 72A and 72B at the openings of the first and second seal members 62 and 63.

図５に示すように、第１及び第２環状溝６２，６３の開口部より奥側の幅Ｗ２は、第１及び第２環状突起７２Ａ，７２Ｂの幅Ｗ１より小さく、第１及び第２環状溝６２，６３の内周壁と外周壁には、厚さｔ，ｔ’の圧入代６４がそれぞれ設けられている。尚、ｔ，ｔ’は、均一なシール力を考慮すれば理想的には同一であることが望ましいが、寸法公差などを考慮して、ｔ，ｔ’とする。   As shown in FIG. 5, the width W2 on the back side from the openings of the first and second annular grooves 62, 63 is smaller than the width W1 of the first and second annular protrusions 72A, 72B, and the first and second annular grooves A press-fitting allowance 64 having thicknesses t and t ′ is provided on the inner and outer peripheral walls of the grooves 62 and 63, respectively. It should be noted that t and t 'are ideally the same in view of uniform sealing force, but are set to t and t' in consideration of dimensional tolerances and the like.

図６及び図７に示すように、シール部材１０は、シール本体部６１の外周面に沿って、張出部６７が一体的に設けられている。張出部６７は、外径が接続部１７Ａ，１７Ｂの直径より大きく、外縁端が接続部１７Ａ，１７Ｂの端面より外側に出るようになっている。張出部６７は、任意の方向に変更できるように膜状に形成されている。張出部６７は、外縁端に沿って、把持部６８が設けられている。把持部６８は、シール本体部６１と同心円状に設けられ、全長Ｗ１２がシール本体部６１の軸線方向の全長Ｗ１１より大きくされ、両端がシール本体部６１の端面よりも軸線方向に突き出している。張出部６７の両端面には、溝６９が把持部６８にかけて放射線状に形成され、接続部１７Ａ，１７Ｂの端面に接触したときに、接続部１７Ａ，１７Ｂに密着してシールしないようにしている。   As shown in FIGS. 6 and 7, the seal member 10 is integrally provided with a protruding portion 67 along the outer peripheral surface of the seal main body 61. The overhanging portion 67 has an outer diameter larger than the diameter of the connection portions 17A and 17B, and an outer edge end protrudes outside the end surfaces of the connection portions 17A and 17B. The overhanging portion 67 is formed in a film shape so that it can be changed in any direction. The overhanging portion 67 is provided with a gripping portion 68 along the outer edge. The gripping portion 68 is provided concentrically with the seal main body portion 61, has a total length W <b> 12 larger than the total length W <b> 11 in the axial direction of the seal main body portion 61, and both ends protrude in the axial direction from the end surface of the seal main body portion 61. Grooves 69 are formed radially on both end surfaces of the overhanging portion 67 over the gripping portion 68 so that the contact portions 17A and 17B are not in close contact with the end surfaces of the connection portions 17A and 17B so as not to be sealed. Yes.

図５に示すように、接続部１７Ａ，１７Ｂの外周面には、嵌合凹溝７３Ａ，７３Ｂが環状に形成されている。嵌合凹溝７３Ａ，７３Ｂは、接続部１７Ａ，１７Ｂの端面と平行に２本ずつ形成されている。接続部１７Ａ，１７Ｂは、嵌合凹溝７３Ａ，７３Ｂの端面側内壁に、嵌合凹溝７３Ａ，７３Ｂの開口部に向かって端面側に傾斜する接続部側テーパ７４Ａ，７４Ｂが形成されている。   As shown in FIG. 5, fitting concave grooves 73A and 73B are formed in an annular shape on the outer peripheral surfaces of the connecting portions 17A and 17B. Two fitting grooves 73A and 73B are formed in parallel to the end faces of the connecting portions 17A and 17B. The connecting portions 17A and 17B are formed with connecting portion side tapers 74A and 74B that are inclined toward the end surface toward the opening of the fitting grooves 73A and 73B on the inner surfaces of the fitting grooves 73A and 73B. .

図８は、図１に示すシール接続部の連結構造９の拡大断面図である。
シール接続部の連結構造９は、連結部材３を構成する第１及び第２連結ブロック４１，４２が、接続部１７Ａ，１７Ｂの端面接続部分から外側に出ている把持部３８を収納するために、保持面４３，４４の中央部分に沿って凹溝４７，４８を環状に形成されている。保持面４３，４４は、接続部１７Ａ，１７Ｂの嵌合凹溝７３Ａ，７３Ｂに嵌合する嵌合凸部４９Ａ，４９Ｂ，５０Ａ，５０Ｂが環状に突設されている。嵌合凸部４９Ａ，４９Ｂ，５０Ａ，５０Ｂは、凹溝４７の両側に２本ずつ凹溝４７と平行に設けられている。嵌合凸部４９Ａ，４９Ｂ，５０Ａ，５０Ｂの内周壁（凹溝４７側の側壁）には、嵌合凹溝７３Ａ，７３Ｂの接続部側テーパ７４Ａ，７４Ｂに対応する連結側テーパ５１Ａ，５１Ｂ，５２Ａ，５２Ｂが設けられている。連結側テーパ５１Ａ，５１Ｂ，５２Ａ，５２Ｂは、接続部側テーパ７４Ａ，７４Ｂと同一の傾斜角度で、先端部へ行くにつれて外側（凹溝４７，４８と反対側）へ傾斜している。 FIG. 8 is an enlarged cross-sectional view of the connecting structure 9 of the seal connecting portion shown in FIG.
The connecting structure 9 of the seal connecting portion is provided so that the first and second connecting blocks 41 and 42 constituting the connecting member 3 accommodate the grip portion 38 protruding outward from the end surface connecting portions of the connecting portions 17A and 17B. The concave grooves 47 and 48 are formed annularly along the central portions of the holding surfaces 43 and 44. On the holding surfaces 43 and 44, fitting convex portions 49A, 49B, 50A, and 50B that fit into the fitting concave grooves 73A and 73B of the connecting portions 17A and 17B are provided in a ring shape. Two fitting protrusions 49 </ b> A, 49 </ b> B, 50 </ b> A, 50 </ b> B are provided in parallel with the groove 47 on each side of the groove 47. On the inner peripheral walls (side walls on the concave groove 47 side) of the fitting convex portions 49A, 49B, 50A, 50B, connecting side tapers 51A, 51B corresponding to the connecting portion side tapers 74A, 74B of the fitting concave grooves 73A, 73B, 52A and 52B are provided. The connecting side taper 51A, 51B, 52A, 52B is inclined to the outside (opposite to the concave grooves 47, 48) at the same inclination angle as that of the connecting portion side taper 74A, 74B.

図９は、図１に示す連結部材３の断面図である。
第１連結ブロック４１は、ボルト４５を挿通する挿通孔５３，５３が、保持面４３の両側に上下方向に貫通して形成されている。第１連結ブロック４１は、第２連結ブロック４２と対向する面（図中下面）に、円筒部５４，５４が挿通孔５３，５３と同軸上に突設されている。一方、第２連結ブロック４２は、第１連結ブロック４１と対向する面（図中上面）の挿通孔５３，５３に対応する位置からボルト孔５５，５５が穿設されている。第２連結ブロック４２は、ボルト孔５５，５５の開口部に、円筒部５４，５４が隙間無く嵌め込まれる嵌込孔５６，５６が開設されている。 FIG. 9 is a cross-sectional view of the connecting member 3 shown in FIG.
In the first connection block 41, insertion holes 53 and 53 through which the bolts 45 are inserted are formed through both sides of the holding surface 43 in the vertical direction. In the first connection block 41, cylindrical portions 54 and 54 are provided so as to protrude coaxially with the insertion holes 53 and 53 on the surface (lower surface in the drawing) facing the second connection block 42. On the other hand, the second connection block 42 is formed with bolt holes 55 and 55 from positions corresponding to the insertion holes 53 and 53 on the surface (upper surface in the drawing) facing the first connection block 41. In the second connection block 42, fitting holes 56, 56 into which the cylindrical portions 54, 54 are fitted without gaps are opened in the openings of the bolt holes 55, 55.

尚、第１連結ブロック４１の挿通孔５３，５３には、ゴムや樹脂を材質とするキャップ４６，４６が装着される。従って、第１及び第２連結ブロック４１，４２を固定するボルト４５，４５は、円筒部５４とキャップ４６によって外気から遮断され、腐食性雰囲気にさらされない。また、ボルト４５で固定された第１及び第２連結ブロック４１，４２の間に隙間があっても、円筒部５４，５４を嵌込孔５６，５６に嵌め込んでボルト４５，４５が外部から見えないので、ボルト４５，４５が腐食しない。   In addition, caps 46, 46 made of rubber or resin are attached to the insertion holes 53, 53 of the first connection block 41. Therefore, the bolts 45 and 45 for fixing the first and second connection blocks 41 and 42 are blocked from the outside air by the cylindrical portion 54 and the cap 46 and are not exposed to the corrosive atmosphere. Even if there is a gap between the first and second connection blocks 41 and 42 fixed by the bolt 45, the cylindrical portions 54 and 54 are fitted into the fitting holes 56 and 56 so that the bolts 45 and 45 are externally attached. Since it is not visible, the bolts 45 and 45 do not corrode.

＜流体機器の連結方法＞
次に、流体機器の連結方法について説明する。ここでは、第１及び第２バルブ２Ａ，２Ｂの連結を例に挙げて説明する。図１０〜図１２は、図１に示す第１及び第２バルブ２Ａ，２Ｂの連結手順を説明する図である。 <Method for connecting fluid devices>
Next, a method for connecting fluid devices will be described. Here, the connection of the first and second valves 2A and 2B will be described as an example. 10-12 is a figure explaining the connection procedure of 1st and 2nd valve | bulb 2A, 2B shown in FIG.

先ず、図１０（ａ）に示すように、把持部６８を手指で掴み、第１バルブ２Ａの接続部１７Ａの外周に沿わせるように把持部６８の一端を接続部１７Ａに嵌め合わせ、第１環状溝６２のガイド部６５に第１環状突起７２Ａの先端を挿入する。
そして、図１０（ｂ）に示すように、シール部材１０に設けた把持部６８の他端に第２バルブ２Ｂの接続部１７Ｂを嵌め合わせ、第２バルブ２Ｂの第２環状突起７２Ｂの先端を第２環状溝６３のガイド部６６に挿入する。
これにより、接続部１７Ａ，１７Ｂがシール部材１０によって位置合わせされる。 First, as shown in FIG. 10A, the gripping portion 68 is gripped with fingers, and one end of the gripping portion 68 is fitted to the connecting portion 17A so as to be along the outer periphery of the connecting portion 17A of the first valve 2A. The tip of the first annular protrusion 72A is inserted into the guide portion 65 of the annular groove 62.
Then, as shown in FIG. 10B, the connecting portion 17B of the second valve 2B is fitted to the other end of the grip portion 68 provided on the seal member 10, and the tip of the second annular protrusion 72B of the second valve 2B is fitted. It is inserted into the guide portion 66 of the second annular groove 63.
Thereby, the connecting portions 17A and 17B are aligned by the seal member 10.

次に、図１１（ａ）に示すように、接続部１７Ａ，１７Ｂを上下方向から挟むように、第１及び第２連結ブロック４１，４２を接続部１７Ａ，１７Ｂに装着する。すると、第１及び第２連結ブロック４１，４２の嵌合凸部４９Ａ，４９Ｂ，５０Ａ，５０Ｂに設けた連結側テーパ５１Ａ，５１Ｂ，５２Ａ，５２Ｂが、接続部１７Ａ，１７Ｂに形成した嵌合凹溝７３Ａ，７３Ｂの接続部側テーパ７４Ａ，７４Ｂの端に接触する。   Next, as shown to Fig.11 (a), the 1st and 2nd connection blocks 41 and 42 are mounted | worn to connection part 17A, 17B so that connection part 17A, 17B may be pinched | interposed from an up-down direction. Then, the connection side taper 51A, 51B, 52A, 52B provided in the fitting convex portions 49A, 49B, 50A, 50B of the first and second connecting blocks 41, 42 is the fitting recess formed in the connecting portions 17A, 17B. It contacts the ends of the connecting portion side tapers 74A and 74B of the grooves 73A and 73B.

そこで、ボルト４５，４５（図４参照）を第１連結ブロック４１から第２連結ブロック４２に挿通して、第２連結ブロック４２のボルト孔５５にねじ込み、第１及び第２連結ブロック４１，４２に図中上下方向の推力を与える。第１連結ブロック４１，４２は、連結側テーパ５１Ａ，５１Ｂ，５２Ａ，５２Ｂを、接続部１７Ａ，１７Ｂの接続部側テーパ７４Ａ，７４Ｂに接触させながら、徐々に近づく。このとき、ボルト４５，４５が第１及び第２連結ブロック４１，４２に与える図中上下方向の推力が、連結側テーパ５１Ａ，５１Ｂ，５２Ａ，５２Ｂと接続部側テーパ７４Ａ，７４Ｂの接触面において横方向の力に変換され、接続部１７Ａ，１７Ｂに端面側への力を作用させる。この力によって、接続部１７Ａ，１７Ｂは、第１及び第２環状突起７２Ａ，７２Ｂをシール部材１０のガイド部６５，６６から圧入代６４に圧入する。   Therefore, the bolts 45, 45 (see FIG. 4) are inserted from the first connection block 41 into the second connection block 42 and screwed into the bolt holes 55 of the second connection block 42, and the first and second connection blocks 41, 42 are inserted. Is given a vertical thrust in the figure. The first connection blocks 41 and 42 gradually approach the connection side taper 51A, 51B, 52A and 52B while contacting the connection part side taper 74A and 74B of the connection part 17A and 17B. At this time, the thrust in the vertical direction in the figure given by the bolts 45, 45 to the first and second connecting blocks 41, 42 is caused at the contact surface between the connecting side taper 51A, 51B, 52A, 52B and the connecting portion side taper 74A, 74B. It is converted into a lateral force, and a force toward the end face is applied to the connecting portions 17A and 17B. By this force, the connecting portions 17A and 17B press-fit the first and second annular protrusions 72A and 72B from the guide portions 65 and 66 of the seal member 10 into the press-fitting allowance 64.

図１１（ｂ）に示すように、接続部１７Ａ，１７Ｂの端面がシール部材１０の張出部６７を挟み込むように突き合わされると、ボルト４５，４５の回転トルクが大きくなるので、ボルト４５、４５の回転を停止する。この初期状態では、第１及び第２連結ブロック４１，４２は、嵌合凸部４９Ａ，４９Ｂ，５０Ａ，５０Ｂの先端部が接続部１７Ａ，１７Ｂの嵌合凹溝７３Ａ，７３Ｂとの間に隙間Ｓを形成している。   As shown in FIG. 11B, when the end faces of the connecting portions 17A and 17B are abutted so as to sandwich the protruding portion 67 of the seal member 10, the rotational torque of the bolts 45 and 45 increases. The rotation of 45 is stopped. In this initial state, the first and second connecting blocks 41, 42 are spaced from the front ends of the fitting convex portions 49A, 49B, 50A, 50B with the fitting concave grooves 73A, 73B of the connecting portions 17A, 17B. S is formed.

このように連結された第１及び第２バルブ２Ａ，２Ｂは、バルブボディ１１Ａ，１１Ｂ及びシール部材１０が樹脂を材質とし、圧入部に発生する反発力によって、接続部１７Ａ，１７Ｂに離間する方向の力が作用する。しかし、接続部１７Ａ，１７Ｂは、複数の嵌合凹溝７３Ａ，７３Ｂに面圧が分散する。しかも、連結部材３は、連結側テーパ５１Ａ，５１Ｂ，５２Ａ，５２Ｂが接続部１７Ａ，１７Ｂの接続部側テーパ７４Ａ，７４Ｂに当接して、ボルト４５，４５の図中上下方向の締結力を水平方向の力に変換して接続部１７Ａ，１７Ｂに伝達し、図１１（ｂ）の図中矢印方向に示すように、接続部１７Ａ，１７Ｂを端面接続部分側へ押圧する。このため、接続部１７Ａ，１７Ｂは、圧入部に発生する反発力を連結部材３から受ける力によって打ち消し、初期のシール荷重を維持できる。   The first and second valves 2A and 2B connected in this manner are directions in which the valve bodies 11A and 11B and the seal member 10 are made of resin, and are separated from the connection portions 17A and 17B by a repulsive force generated in the press-fit portion. The force of acts. However, in the connection portions 17A and 17B, the surface pressure is dispersed in the plurality of fitting concave grooves 73A and 73B. Moreover, in the connecting member 3, the connecting side taper 51A, 51B, 52A, 52B abuts on the connecting part side taper 74A, 74B of the connecting part 17A, 17B, and the fastening force in the vertical direction of the bolts 45, 45 in the figure is horizontal. The force is converted into a directional force and transmitted to the connecting portions 17A and 17B, and the connecting portions 17A and 17B are pressed toward the end face connecting portion as shown by the arrow direction in FIG. For this reason, the connecting portions 17A and 17B can cancel the repulsive force generated in the press-fitting portion by the force received from the connecting member 3, and maintain the initial seal load.

もっとも、例えば、流体機器ユニット１に高温薬液を流す場合や、流体機器ユニット１を長年使用する場合には、第１及び第２連結ブロック４１，４２やバルブボディ１１Ａ，１１Ｂにクリープが生じ、ボルト４５，４５が緩むことがある。この場合には、嵌合凸部４９Ａ，４９Ｂ，５０Ａ，５０Ｂの先端部と接続部１７Ａ，１７Ｂの嵌合凹溝７３Ａ，７３Ｂとの間に隙間Ｓを形成しているので、ボルト４５，４５を増し締めして、接続部１７Ａ，１７Ｂに与える水平方向の推力を大きくすることができる。   However, for example, when a high temperature chemical solution is allowed to flow through the fluid device unit 1 or when the fluid device unit 1 has been used for many years, creep occurs in the first and second connection blocks 41 and 42 and the valve bodies 11A and 11B. 45, 45 may loosen. In this case, since the clearance S is formed between the tip end portions of the fitting convex portions 49A, 49B, 50A, 50B and the fitting concave grooves 73A, 73B of the connecting portions 17A, 17B, the bolts 45, 45 Can be tightened to increase the thrust in the horizontal direction applied to the connecting portions 17A and 17B.

尚、増し締めは、図１２に示すように、第１及び第２連結ブロック４１，４２の嵌合凸部４９Ａ，４９Ｂ，５０Ａ，５０Ｂの先端部が、接続部１７Ａ，１７Ｂの嵌合凹溝７３Ａ，７３Ｂの底壁に突き当たるまで行うことができる。   In addition, as shown in FIG. 12, the tightening is performed such that the leading end portions of the fitting convex portions 49A, 49B, 50A, 50B of the first and second connecting blocks 41, 42 are fitted into the fitting concave grooves of the connecting portions 17A, 17B. It can be performed until it hits the bottom wall of 73A, 73B.

＜作用効果＞
第１実施形態のシール接続部の連結構造９は、接続部１７Ａ，１７Ｂが嵌合凹溝７３Ａ，７３Ｂを複数有し、連結部材３を構成する第１及び第２連結ブロック４１，４２が嵌合凹溝７３Ａ，７３Ｂに対応する嵌合凸部４９Ａ，４９Ｂ，５０Ａ，５０Ｂを複数有しており、第１及び第２連結ブロック４１，４２と第１及び第２接続部１７Ａ，１７Ｂとの接触面積が大きい。そのため、シール部材１０を第１及び第２接続部１７Ａ，１７Ｂの間に装着するときに、シール部材１０の反発力が大きい場合でも、第１及び第２連結ブロック４１，４２と第１及び第２接続部１７ＡＡ，１７Ｂに面圧が分散するため、第１及び第２接続部１７Ａ，１７Ｂが、変形しにくく、シール部材１０を十分な力で押し潰して設定されたシール力を得ることが可能である。よって、第１実施形態のシール接続部の連結構造９によれば、シール部材１０を第１及び第２接続部１７Ａ，１７Ｂの間に適切に装着することができる。 <Effect>
In the connecting structure 9 of the seal connecting portion of the first embodiment, the connecting portions 17A, 17B have a plurality of fitting concave grooves 73A, 73B, and the first and second connecting blocks 41, 42 constituting the connecting member 3 are fitted. A plurality of fitting protrusions 49A, 49B, 50A, 50B corresponding to the mating grooves 73A, 73B are provided, and the first and second connection blocks 41, 42 and the first and second connection parts 17A, 17B Large contact area. Therefore, when the seal member 10 is mounted between the first and second connection portions 17A and 17B, even if the repulsive force of the seal member 10 is large, the first and second connection blocks 41 and 42 and the first and second connection blocks Since the surface pressure is distributed to the two connecting portions 17AA and 17B, the first and second connecting portions 17A and 17B are not easily deformed, and a sealing force set by crushing the seal member 10 with a sufficient force can be obtained. Is possible. Therefore, according to the connection structure 9 of the seal connection part of 1st Embodiment, the sealing member 10 can be suitably mounted | worn between 1st and 2nd connection part 17A, 17B.

第１実施形態のシール接続部の連結構造９は、接続部１７Ａ，１７Ｂに設けた嵌合凹溝７３Ａ，７３Ｂの端面側内壁に接続部側テーパ７４Ａ，７４Ｂを設けるとともに、第１及び第２連結ブロック４１，４２に設けた嵌合凸部４９Ａ，４９Ｂ，５０Ａ，５０Ｂに接続部側テーパ７４Ａ，７４Ｂに対応する連結側テーパ５１Ａ，５１Ｂ，５２Ａ，５２Ｂを設け、接続部側テーパ７４Ａ，７４Ｂと連結側テーパ５１Ａ，５１Ｂ，５２Ａ，５２Ｂとを接触させた状態で、第１及び第２連結ブロック４１，４２が接続部１７Ａ，１７Ｂを連結する。これにより、第１実施形態のシール接続部の連結構造９は、第１及び第２連結ブロック４１，４２から接続部１７Ａ，１７Ｂに、接続部１７Ａ，１７Ｂの端面接続部分側への力を作用させるので（図１１（ｂ）参照）、シール部材１０の反発力に抗してシール接続部の接続状態を維持することができる。
The seal connecting portion connecting structure 9 according to the first embodiment is provided with connecting portion side tapers 74A and 74B on the end face side inner walls of the fitting concave grooves 73A and 73B provided in the connecting portions 17A and 17B. The fitting convex portions 49A, 49B, 50A, 50B provided in the connecting blocks 41, 42 are provided with connecting side tapers 51A, 51B, 52A, 52B corresponding to the connecting portion side tapers 74A, 74B, and the connecting portion side tapers 74A, 74B. The first and second connection blocks 41 and 42 connect the connection portions 17A and 17B in a state where the connection side tapers 51A, 51B, 52A and 52B are in contact with each other. Thereby, the connecting structure 9 of the seal connecting part of the first embodiment applies a force from the first and second connecting blocks 41, 42 to the connecting parts 17A, 17B toward the end face connecting part side of the connecting parts 17A, 17B. Therefore, the connection state of the seal connecting portion can be maintained against the repulsive force of the seal member 10 (see FIG. 11B).

第１実施形態のシール接続部の連結構造９は、シール部材１０に設けた第１及び第２環状溝６２，６３の圧入代６４に対して、第１及び第２接続部１７Ａ，１７Ｂに設けた第１及び第２環状突起７２Ａ，７２Ｂを圧入するときに、過大な荷重を要するが、第１及び第２接続部１７Ａ，１７Ｂに設けた複数の嵌合凹溝７３Ａ，７３Ｂと、第１及び第２連結ブロック４１，４２に設けた複数の嵌合凸部４９Ａ，４９Ｂ，５０Ａ，５０Ｂとの各接触面に面圧が分散するので、接続部１７Ａ，１７Ｂの変形を抑制できる。   The connecting structure 9 of the seal connecting portion of the first embodiment is provided in the first and second connecting portions 17A and 17B with respect to the press-fitting allowance 64 of the first and second annular grooves 62 and 63 provided in the seal member 10. When the first and second annular protrusions 72A and 72B are press-fitted, an excessive load is required, but a plurality of fitting grooves 73A and 73B provided in the first and second connection portions 17A and 17B, In addition, since the surface pressure is dispersed on each contact surface with the plurality of fitting convex portions 49A, 49B, 50A, 50B provided on the second connection blocks 41, 42, deformation of the connection portions 17A, 17B can be suppressed.

第１実施形態のシール接続部の連結構造９は、バルブボディ１１Ａ，１１Ｂと、シール部材１０と、第１及び第２連結ブロック４１，４２が樹脂を材質とし、クリープしやすい。例えば、第１及び第２バルブ２Ａ，２Ｂの第１及び第２接続部１７Ａ，１７Ｂをシール部材１０を介して対向配置し、バルブボディ１１Ａの側面からバルブボディ１１Ａ，１１Ｂにボルトを貫き通し、バルブボディ１１Ｂの側面に装着したナットにボルトを締め付けることにより、バルブボディ１１Ａ，１１Ｂの第１及び第２接続部１７Ａ，１７Ｂを連結した場合には、ボルトとナットが樹脂を挟み込む量が多くなるため、第１及び第２接続部１７Ａ，１７Ｂの連結にクリープが影響しやすい。クリープによってボルトの締結力が低下すると、第１及び第２接続部１７Ａ，１７Ｂの連結荷重が減るため、シール力が低下する問題がある。しかし、第１実施形態のシール接続部の連結構造９は、バルブボディ１１Ａ，１１Ｂ第１及び第２連結ブロック４１、４２が樹脂を材質とする第１及び第２接続部を個別に連結し、樹脂を挟み込む量が少ないため、第１及び第２接続部１７Ａ，１７Ｂにクリープが影響しにくい。これにより、第１実施形態のシール接続部の連結構造９は、第１及び第２接続部１７Ａ，１７Ｂの連結荷重が減りにくく、組立時のシール力を長期間維持することができる。   In the connecting structure 9 of the seal connecting portion of the first embodiment, the valve bodies 11A and 11B, the seal member 10, and the first and second connecting blocks 41 and 42 are made of resin and are easy to creep. For example, the first and second connection portions 17A and 17B of the first and second valves 2A and 2B are arranged to face each other with the seal member 10 interposed therebetween, and bolts are passed through the valve bodies 11A and 11B from the side surfaces of the valve body 11A. When the first and second connecting portions 17A and 17B of the valve bodies 11A and 11B are connected by tightening the bolts on the nuts attached to the side surfaces of the body 11B, the amount of the bolts and nuts sandwiching the resin increases. Further, creep tends to affect the connection between the first and second connecting portions 17A and 17B. When the fastening force of the bolt is reduced due to creep, the connection load of the first and second connecting portions 17A and 17B is reduced, which causes a problem that the sealing force is reduced. However, in the connection structure 9 of the seal connection part of the first embodiment, the valve body 11A, 11B first and second connection blocks 41, 42 individually connect the first and second connection parts made of resin, Since the amount of resin sandwiched is small, creep hardly affects the first and second connection portions 17A and 17B. Thereby, the connection structure 9 of the seal connection part of 1st Embodiment cannot reduce the connection load of 1st and 2nd connection part 17A, 17B easily, and can maintain the sealing force at the time of an assembly for a long period of time.

しかも、樹脂は柔らかく変形しやすい。そのため、上記のように樹脂製のバルブボディ１１Ａ，１１Ｂにボルトを貫き通してナットに締め付けることにより第１及び第２接続部１７Ａ，１７Ｂを連結すると、ボルトを締め付けるときに、バルブボディ１１Ａ，１１Ｂに一体的に設けた弁座１５Ａ，１５Ｂや第１及び第２接続部１７Ａ，１７Ｂが変形し、第１及び第２バルブ２Ａ，２Ｂの性能に支障を来す恐れがある。しかし、第１実施形態のシール接続部の連結構造９は、第１及び第２接続部１７Ａ，１７Ｂを第１及び第２連結ブロック４１，４２で上下２方向から挟み込んで連結するため、第１及び第２連結ブロック４１，４２を第１及び第２接続部１７Ａ，１７Ｂの外周に装着してボルト４５を締め付けるときに、弁座１５Ａ，１５Ｂや第１及び第２接続部１７Ａ，１７Ｂなどが変形せず、第１及び第２バルブ２Ａ，２Ｂの性能に支障を来さない。   Moreover, the resin is soft and easily deformed. Therefore, if the first and second connecting portions 17A and 17B are coupled by passing the bolts through the resin valve bodies 11A and 11B and tightening the nuts as described above, the valve bodies 11A and 11B are connected to the valve bodies 11A and 11B when the bolts are tightened. The integrally provided valve seats 15A and 15B and the first and second connecting portions 17A and 17B may be deformed, thereby impairing the performance of the first and second valves 2A and 2B. However, the connecting structure 9 for the seal connecting portion according to the first embodiment has the first and second connecting portions 17A and 17B sandwiched between the first and second connecting blocks 41 and 42 from the upper and lower directions and connected. When the second connecting blocks 41 and 42 are mounted on the outer circumferences of the first and second connection portions 17A and 17B and the bolts 45 are tightened, the valve seats 15A and 15B, the first and second connection portions 17A and 17B, etc. It does not deform and does not hinder the performance of the first and second valves 2A, 2B.

第１実施形態の流体機器ユニット１は、シール接続部の連結構造９を用いて、例えば第１バルブ２Ａと第２バルブ２Ｂとを連結しているので、シール部材１０の第１及び第２環状溝６２，６３の圧入代６４に第１及び第２接続部１７Ａ，１７Ｂの第１及び第２環状突起７２Ａ，７２Ｂを圧入した圧入部分が、設定されたシール力を発生するように、第１及び第２バルブ２Ａ，２Ｂの間にシール部材１０を適切に装着することができる。   In the fluid device unit 1 of the first embodiment, for example, the first valve 2A and the second valve 2B are connected using the connecting structure 9 of the seal connecting portion, and therefore the first and second annular members of the seal member 10 are connected. The first and second annular protrusions 72A and 72B of the first and second connection portions 17A and 17B are press-fitted into the press-fitting allowance 64 of the grooves 62 and 63 so that the first sealing force is generated. And the sealing member 10 can be appropriately mounted between the second valves 2A and 2B.

第１実施形態の流体機器ユニット１は、連結部材３によって第１及び第２バルブ２Ａ，２Ｂと継手ブロック４とを個別に連結するので、例えば、第２バルブ２Ｂの交換や、流体機器の追加変更などを簡単に行うことができる。すなわち、例えば、第２バルブ２Ｂから連結部材３，３を取り外して第１バルブ２Ａと継手ブロック４との連結を解除した後、第２バルブ２Ａをレール部材５から取り外し、その後、新しいバルブ２をレール部材５に取り付けてから、連結部材３によって新しいバルブ２に第１バルブ２Ａと継手ブロック４を連結すれば、交換が必要な第２バルブ２Ｂのみをレール部材５に着脱して交換できる。また、例えば、第２バルブ２Ｂと継手ブロック４とを連結する連結部材３を取り外した後、レール部材５に沿って継手ブロック４を第２バルブ２Ｂから離す方向へ移動させて継手ブロック４と第２バルブ２Ｂとの間に隙間を設け、その隙間にバルブ２等の流体機器を配置し、連結ブロック３を用いて追加した流体機器に第２バルブ２Ｂと継手ブロック４とを連結すれば、流体機器ユニット１に流体機器を追加できる。   In the fluid device unit 1 of the first embodiment, the first and second valves 2A and 2B and the joint block 4 are individually connected by the connecting member 3, so that, for example, replacement of the second valve 2B or addition of fluid devices is performed. Changes can be made easily. That is, for example, after the connecting members 3 and 3 are removed from the second valve 2B to release the connection between the first valve 2A and the joint block 4, the second valve 2A is removed from the rail member 5, and then the new valve 2 is installed. If the first valve 2 </ b> A and the joint block 4 are connected to the new valve 2 by the connecting member 3 after being attached to the rail member 5, only the second valve 2 </ b> B that needs to be replaced can be attached to and detached from the rail member 5. Further, for example, after removing the connecting member 3 that connects the second valve 2B and the joint block 4, the joint block 4 is moved along the rail member 5 in a direction away from the second valve 2B, and the joint block 4 If a fluid device such as the valve 2 is provided in the clearance between the two valves 2B and the fluid device such as the valve 2 is arranged in the clearance, and the second valve 2B and the joint block 4 are connected to the fluid device added using the connection block 3, A fluid device can be added to the device unit 1.

（第２実施形態）
続いて、本発明の第２実施形態について説明する。図１３は、本発明の第２実施形態に係る流体機器ユニット及びシール接続部の連結構造に使用される第１バルブ２Ａに装着された連結部材８０を示す外観斜視図である。図１４は、図１３に示す連結部材８０を分解した斜視図である。
第２実施形態の流体機器ユニット及びシール接続部の連結構造は、連結部材８０が４個の部材で構成されている点が、連結部材３を２個の部品で構成した第１実施形態と相違する。よって、ここでは、第１実施形態と相違する点を中心に説明し、共通する点は図面に第１実施形態と同一符号を付し、説明を適宜省略する。 (Second Embodiment)
Subsequently, a second embodiment of the present invention will be described. FIG. 13 is an external perspective view showing the connecting member 80 attached to the first valve 2A used in the connecting structure of the fluid device unit and the seal connecting portion according to the second embodiment of the present invention. 14 is an exploded perspective view of the connecting member 80 shown in FIG.
The connecting structure of the fluid device unit and the seal connecting portion of the second embodiment is different from the first embodiment in which the connecting member 80 is configured by four members, in that the connecting member 80 is configured by four members. To do. Therefore, here, it demonstrates centering on a different point from 1st Embodiment, and a common point attaches | subjects the same code | symbol as 1st Embodiment to drawing, and abbreviate | omits description suitably.

＜連結部材の構成＞
連結部材８０は、横方向から接続部１７Ａ，１７Ｂを挟み込むように接続部１７Ａ，１７Ｂに取り付けられる第１及び第２連結ブロック８１，８２と、第１及び第２連結ブロック８１，８２に上下方向から取り付けられる第３及び第４連結ブロック８３，８４とを備える。すなわち、第３及び第４連結ブロック８３，８４は、第１及び第２連結ブロック８１，８２の取付方向、及び、接続部１７Ａ，１７Ｂの接続方向に対して直交する方向から、第１及び第２連結ブロック８１，８２の保持面４３，４４を挟んで第１及び第２連結ブロック８１，８２に取り付けられる。第１〜第４連結ブロック８１〜８４は、何れもＰＦＡやＰＰＳなどの樹脂を材質とする。 <Configuration of connecting member>
The connecting member 80 is vertically connected to the first and second connecting blocks 81 and 82 and the first and second connecting blocks 81 and 82 attached to the connecting parts 17A and 17B so as to sandwich the connecting parts 17A and 17B from the lateral direction. The third and fourth connection blocks 83 and 84 are attached. That is, the third and fourth connection blocks 83 and 84 are arranged in the first and second directions from the direction orthogonal to the attachment direction of the first and second connection blocks 81 and 82 and the connection direction of the connection portions 17A and 17B. The two connecting blocks 81 and 82 are attached to the first and second connecting blocks 81 and 82 with the holding surfaces 43 and 44 therebetween. Each of the first to fourth connection blocks 81 to 84 is made of a resin such as PFA or PPS.

第１及び第２連結ブロック８１，８２は、互いに当接する当接面に第１実施形態と同様の保持面４３，４４が形成されている。保持面４３，４４には、第１実施形態と同様に、凹溝４７，４８と嵌合凸部４９Ａ，４９Ｂ，５０Ａ，５０Ｂと連結側テーパ５１Ａ，５１Ｂ，５２Ａ，５２Ｂが設けられている。第１及び第２連結ブロック８１，８２は、保持面４３，４４の側方に長孔８５，８５が上下に貫通して形成されている。長孔８５，８５は、第１及び第２連結ブロック８１，８２を接続部１７Ａ，１７Ｂに取り付ける取付方向に沿って長く形成されている。第１及び第２連結ブロック８１，８２の上下端面には、長孔８５，８５より内側に被加圧側テーパ８６がそれぞれ形成されている。被加圧側テーパ８６は、第３及び第４連結ブロック８３，８４が取り付けられる上下端面から、保持面４３，４４が設けられた側面と反対側に向かって傾斜している。   The first and second connection blocks 81 and 82 are formed with holding surfaces 43 and 44 similar to those of the first embodiment on contact surfaces that contact each other. Similar to the first embodiment, the holding surfaces 43 and 44 are provided with concave grooves 47 and 48, fitting convex portions 49A, 49B, 50A and 50B, and connecting side tapers 51A, 51B, 52A and 52B. The first and second connection blocks 81 and 82 are formed with long holes 85 and 85 penetrating vertically on the sides of the holding surfaces 43 and 44. The long holes 85 and 85 are formed long along the attaching direction in which the first and second connecting blocks 81 and 82 are attached to the connecting portions 17A and 17B. Pressurized side tapers 86 are formed on the upper and lower end surfaces of the first and second connection blocks 81, 82 inside the long holes 85, 85, respectively. The pressurized taper 86 is inclined from the upper and lower end surfaces to which the third and fourth connection blocks 83 and 84 are attached toward the side opposite to the side surface on which the holding surfaces 43 and 44 are provided.

第３及び第４連結ブロック８３，８４は、第１及び第２連結ブロック８１，８２の上下端面に取り付けられる面に、被加圧側テーパ８６に対応する加圧側テーパ８８が形成されている。第３連結ブロック８３は、加圧側テーパ８８の外側にボルト４５，４５が挿通される挿通孔８７，８７が形成されている。第４連結ブロック８４は、加圧側テーパ８８の外側に、図示しないボルト孔が形成されている。   The third and fourth connection blocks 83 and 84 are formed with a pressure side taper 88 corresponding to the pressure-receiving side taper 86 on the surfaces attached to the upper and lower end surfaces of the first and second connection blocks 81 and 82. The third connection block 83 has insertion holes 87 and 87 through which the bolts 45 and 45 are inserted outside the pressure side taper 88. The fourth connection block 84 has a bolt hole (not shown) formed outside the pressure side taper 88.

＜流体機器の連結方法＞
次に、連結部材８０を使用した流体機器の連結方法について説明する。ここでは、第１及び第２バルブ２Ａ，２Ｂの連結を例に挙げて説明する。
第１及び第２バルブ２Ａ，２Ｂの第１及び第２環状突起７２Ａ，７２Ｂをシール部材１０に設けた第１及び第２環状溝６２，６３のガイド部６５，６６に挿入するように、シール部材１０を接続部１７Ａ，１７Ｂの間に装着する。そして、第１及び第２連結ブロック８１，８２に設けた嵌合凸部４９Ａ，４９Ｂ，５０Ａ，５０Ｂの連結側テーパ５１Ａ，５１Ｂ，５２Ａ，５２Ｂを接続部１７Ａ，１７Ｂに設けた嵌合凹溝７３Ａ，７３Ｂの接続部側テーパ７４Ａ，７４Ｂに接触させるように、第１及び第２連結ブロック８１，８２を対して水平方向（横方向）から取り付ける。 <Method for connecting fluid devices>
Next, a fluid device connection method using the connection member 80 will be described. Here, the connection of the first and second valves 2A and 2B will be described as an example.
The first and second annular protrusions 72A, 72B of the first and second valves 2A, 2B are sealed so as to be inserted into the guide portions 65, 66 of the first and second annular grooves 62, 63 provided in the seal member 10. The member 10 is mounted between the connecting portions 17A and 17B. And the fitting concave part which provided the connection side taper 51A, 51B, 52A, 52B of the fitting convex part 49A, 49B, 50A, 50B provided in the 1st and 2nd connection block 81, 82 in the connection part 17A, 17B. The first and second connecting blocks 81 and 82 are attached to the first and second connecting blocks 81 and 82 from the horizontal direction (lateral direction) so as to be in contact with the connecting portion side tapers 74A and 74B of 73A and 73B.

そして、加圧側テーパ８８を被加圧側テーパ８６に接触させるように、第３及び第４連結ブロック８３，８４を第１及び第２連結ブロック８１，８２の上下に配置する。第３連結ブロック８３の挿通孔８７，８７と第１及び第２連結ブロック８１，８２の長孔８５，８５と第４連結ブロック８４の図示しないボルト孔とが連通するように位置合わせし、ボルト４５，４５を挿通孔８７，８７から図示しないボルト孔へと挿通して締め付け、第３及び第４連結ブロック８３，８４に上下方向の力を加える。すると、第３及び第４連結ブロック８３，８４に加えた上下方向の力が、加圧側テーパ８８と被加圧側テーパ８６との接触面によって水平方向の力に変換され、第１及び第２連結ブロック８１，８２を互いに近づける。このとき、第１及び第２連結ブロック８１，８２の長孔８５，８５が第１及び第２連結ブロック８１，８２の取付方向に長く形成されるため、第１及び第２連結ブロック８１，８２の移動を阻害しない。   Then, the third and fourth connection blocks 83 and 84 are arranged above and below the first and second connection blocks 81 and 82 so that the pressure-side taper 88 contacts the pressure-side taper 86. The insertion holes 87, 87 of the third connection block 83, the long holes 85, 85 of the first and second connection blocks 81, 82, and the bolt holes (not shown) of the fourth connection block 84 are aligned and bolted. 45 and 45 are inserted from the insertion holes 87 and 87 into bolt holes (not shown) and tightened, and a vertical force is applied to the third and fourth connection blocks 83 and 84. Then, the vertical force applied to the third and fourth connection blocks 83 and 84 is converted into a horizontal force by the contact surface between the pressure-side taper 88 and the pressure-side taper 86, and the first and second connections The blocks 81 and 82 are brought close to each other. At this time, since the long holes 85, 85 of the first and second connection blocks 81, 82 are formed long in the mounting direction of the first and second connection blocks 81, 82, the first and second connection blocks 81, 82 are formed. Does not hinder movement.

第１及び第２連結ブロック８１，８２は、互いに近づきながら、嵌合凸部４９Ａ，４９Ｂ，５０Ａ，５０Ｂを接続部１７Ａ，１７Ｂの嵌合凹溝７３Ａ，７３Ｂに嵌合させる。このとき、第１及び第２連結ブロック８１，８２の連結側テーパ５１Ａ，５１Ｂ，５２Ａ，５２Ｂと接続部１７Ａ，１７Ｂの接続部側テーパ７４Ａ，７４Ｂとを接触面が、第１及び第２連結ブロック８１，８２の取付方向に作用する力を、接続部１７Ａ，１７Ｂの端面方向の力に変換し、接続部１７Ａ，１７Ｂに互いに近づく方向の力を作用させる。   The first and second connecting blocks 81 and 82 fit the fitting convex portions 49A, 49B, 50A, and 50B into the fitting concave grooves 73A and 73B of the connecting portions 17A and 17B while approaching each other. At this time, the contact surfaces of the connection side tapers 51A, 51B, 52A, 52B of the first and second connection blocks 81, 82 and the connection portion side tapers 74A, 74B of the connection portions 17A, 17B are the first and second connection blocks. The force acting in the mounting direction of the blocks 81 and 82 is converted into the force in the end face direction of the connecting portions 17A and 17B, and the forces in the directions approaching the connecting portions 17A and 17B are applied.

よって、シール部材１０は、ボルト４５，４５を図示しないボルト孔に締結する締結力によって接続部１７Ａ，１７Ｂの第１及び第２環状突起７２Ａ，７２Ｂを第１及び第２環状溝６２，６３の圧入代６４に圧入する。   Therefore, the seal member 10 causes the first and second annular projections 72A and 72B of the connection portions 17A and 17B to be connected to the first and second annular grooves 62 and 63 by a fastening force that fastens the bolts 45 and 45 to bolt holes (not shown). Press fit into the press allowance 64.

＜作用効果＞
第２実施形態の流体機器ユニット及びシール接続部の連結構造は、第１実施形態の作用効果に加え、以下の作用効果を奏する。
第２実施形態の流体機器ユニット及びシール接続部の連結構造は、第１及び第２連結ブロック８１，８２が、第１及び第２連結ブロック８１，８２の取付方向、及び、接続部１７Ａ，１７Ｂの接続方向に対して直交する方向から、第１及び第２連結ブロック８１，８２の保持面４３，４４挟むように、第３及び第４連結ブロック８３，８４を取り付けられて保持されるので、ボルト４５，４５が緩みにくく、第１及び第２連結ブロック８１，８２が接続部１７Ａ，１７Ｂの連結状態を保持する保持力が低下しにくい。 <Effect>
The coupling structure of the fluid device unit and the seal connecting portion of the second embodiment has the following effects in addition to the effects of the first embodiment.
In the fluid device unit and the seal connecting portion according to the second embodiment, the first and second connecting blocks 81 and 82 are attached in the mounting direction of the first and second connecting blocks 81 and 82 and the connecting portions 17A and 17B. Since the third and fourth connection blocks 83 and 84 are attached and held so as to sandwich the holding surfaces 43 and 44 of the first and second connection blocks 81 and 82 from the direction orthogonal to the connection direction of The bolts 45 and 45 are not easily loosened, and the holding force for the first and second connection blocks 81 and 82 to hold the connection state of the connection portions 17A and 17B is difficult to decrease.

第２実施形態の流体機器ユニット及びシール接続部の連結構造は、第１及び第２連結ブロック８１，８２が、第３及び第４連結ブロック８３，８４を取り付けられる面から、接続部１７Ａ，１７Ｂの保持面４３，４４が設けられた側面と反対側に向かって傾斜する被加圧側テーパ８６，８６を有し、 第３及び第４連結ブロック８３，８４が、第１及び第２連結ブロック８１，８２に取り付けられる面に被加圧側テーパ８６，８６に対応する加圧側テーパ８８，８８を有しており、被加圧側テーパ８６，８６に加圧側テーパ８８，８８を接触させた状態で第３及び第４連結ブロック８３，８４を第１及び第２連結ブロック８１，８２に取り付ける。そのため、第２実施形態のシール接続部の連結構造によれば、第１及び第２連結ブロック８１，８２が接続部１７Ａ，１７Ｂに与える端面接続部側への力を増大させることができる。また、２本のボルト４５，４５のみで第１〜第４連結ブロック８１〜８４を固定し、接続部１７，１７Ｂを連結することができる。   The connecting structure of the fluid device unit and the seal connecting portion of the second embodiment is such that the first and second connecting blocks 81 and 82 are connected to the connecting portions 17A and 17B from the surface to which the third and fourth connecting blocks 83 and 84 are attached. Pressure-side tapers 86 and 86 that incline toward the opposite side of the side surface on which the holding surfaces 43 and 44 are provided, and the third and fourth connection blocks 83 and 84 are the first and second connection blocks 81. , 82 is provided with pressure-side tapers 88, 88 corresponding to the pressure-side tapers 86, 86, and the pressure-side tapers 88, 88 are in contact with the pressure-side tapers 86, 86, respectively. The third and fourth connection blocks 83 and 84 are attached to the first and second connection blocks 81 and 82. Therefore, according to the connection structure of the seal connection part of 2nd Embodiment, the force to the end surface connection part side which the 1st and 2nd connection blocks 81 and 82 give to connection part 17A, 17B can be increased. Moreover, the 1st-4th connection blocks 81-84 can be fixed only with two volt | bolts 45 and 45, and the connection parts 17 and 17B can be connected.

しかも、第１及び第２連結ブロック８１，８２を接続部１７Ａ，１７Ｂに対して水平方向から取り付け、第３及び第４ブロック８３，８４を上下方向から第１及び第２連結ブロック８１，８２に取り付けており、ボルト４５，４５によって第１〜第４連結ブロック８１〜８４を上方から固定するときに、第１及び第２連結ブロック８１，８２に作用する上下方向の力が水平方向に変換されて接続部１７Ａ，１７Ｂに伝達される。そのため、連結部の剛性の向上を図りつつ、連結部材８０の取付性を良好にすることができる。   In addition, the first and second connecting blocks 81 and 82 are attached to the connecting portions 17A and 17B from the horizontal direction, and the third and fourth blocks 83 and 84 are connected to the first and second connecting blocks 81 and 82 from the vertical direction. When the first to fourth connection blocks 81 to 84 are fixed from above by the bolts 45 and 45, the vertical force acting on the first and second connection blocks 81 and 82 is converted into the horizontal direction. Are transmitted to the connecting portions 17A and 17B. Therefore, the attachment property of the connecting member 80 can be improved while improving the rigidity of the connecting portion.

（第３実施形態）
続いて、本発明の第３実施形態について図面を参照して説明する。図１５は、本発明の第３実施形態に係る流体機器ユニット９０の外観斜視図である。
第３実施形態の流体機器ユニット９０は、連結部材９３に廻り止め９４を設けたシール接続部の連結構造９９を使用する点が、第１実施形態と主に相違する。よって、ここでは、第１実施形態と相違する点を中心に説明し、共通する点は図面に第１実施形態と同一符号を付し、説明を適宜省略する。 (Third embodiment)
Next, a third embodiment of the present invention will be described with reference to the drawings. FIG. 15 is an external perspective view of a fluid device unit 90 according to the third embodiment of the present invention.
The fluid device unit 90 of the third embodiment is mainly different from the first embodiment in that a seal connecting portion connecting structure 99 in which a rotation stop 94 is provided on the connecting member 93 is used. Therefore, here, it demonstrates centering on a different point from 1st Embodiment, and a common point attaches | subjects the same code | symbol as 1st Embodiment to drawing, and abbreviate | omits description suitably.

＜流体機器ユニット＞
第３実施形態の流体機器ユニット９０は、第１及び第２バルブ２Ａ，２Ｂと継手９７とを連結部材９３を用いて連結した第１ラインＬ１と、第３〜第５バルブ２Ｃ，２Ｄ，２Ｅと継手９７とを連結部材９３を用いて連結した第２ラインＬ２とを備える。継手９７は、取付ブロック２７を備えない点が第１実施形態の継手ブロック４と相違する。分岐管９１とエルボ管９２は、「第１又は第２の部品」、「流体機器」の一例であって、樹脂を材質する。分岐管９１とエルボ管９２の各端面には、接続部９１ｃ，９２ｃが設けられている。接続部９１ｃ，９２ｃには、第１バルブ２Ａの接続部１７Ａの装着溝７１、環状突起７２、嵌合凹溝７３、接続部側テーパ７４と同様な装着溝９１ｄ，９２ｄ、環状突起９１ｅ，９２ｅ、嵌合凹溝９１ａ，９２ａ、接続部側テーパ９１ｂ，９２ｂが設けられている。分岐管９１は、連結部材９３を用いて第３及び第４バルブ２Ｃ，２Ｄに連結され、更に、連結部材９３を用いてエルボ管９２の一端に連結されている。エルボ管９２の他端は、連結部材９３を用いて第１バルブ２Ａに連結されている。 <Fluid equipment unit>
The fluid device unit 90 of the third embodiment includes a first line L1 in which the first and second valves 2A, 2B and the joint 97 are connected using a connecting member 93, and third to fifth valves 2C, 2D, 2E. And a joint 97 using a connecting member 93. The joint 97 is different from the joint block 4 of the first embodiment in that the mounting block 27 is not provided. The branch pipe 91 and the elbow pipe 92 are examples of “first or second part” and “fluid device”, and are made of resin. Connection portions 91 c and 92 c are provided on the end faces of the branch pipe 91 and the elbow pipe 92. The connecting portions 91c and 92c include mounting grooves 71d, an annular protrusion 72, a fitting groove 73, and mounting grooves 91d and 92d similar to the connecting portion side taper 74, and annular protrusions 91e and 92e. , Fitting concave grooves 91a and 92a, and connecting portion side tapers 91b and 92b are provided. The branch pipe 91 is connected to the third and fourth valves 2 </ b> C and 2 </ b> D using a connecting member 93, and further connected to one end of the elbow pipe 92 using the connecting member 93. The other end of the elbow pipe 92 is connected to the first valve 2 </ b> A using a connecting member 93.

＜連結部材＞
図１８は、図１５に示す連結部材９３とレール部材５の断面図である。
連結部材９３は、第１及び第２連結ブロック４１，９８を備える。第２連結ブロック９８は、下面に廻り止め９４が突設されていることを除き、第１実施形態の第２連結ブロック４２と同様に構成されている。廻り止め９４は、レール部材５に設けた一対の突出片７，７の間隙８に挿入され、一対の突出片７，７に係止されて第２連結ブロック４２が第１及び第２バルブ２Ａ，２Ｂ（バルブボディ１１Ａ，１１Ｂ）に対して回転することを阻止する。 <Connecting member>
18 is a cross-sectional view of the connecting member 93 and the rail member 5 shown in FIG.
The connecting member 93 includes first and second connecting blocks 41 and 98. The second connection block 98 is configured in the same manner as the second connection block 42 of the first embodiment, except that a detent 94 is projected on the lower surface. The detent 94 is inserted into the gap 8 between the pair of projecting pieces 7, 7 provided on the rail member 5, and is locked to the pair of projecting pieces 7, 7 so that the second connecting block 42 is the first and second valves 2 </ b> A. , 2B (valve bodies 11A, 11B) are prevented from rotating.

尚、廻り止め９４はレール部材５の間隙８に挿入するものに限らない。
例えば、図１９に示す第１変形例のように、レール部材５の両側面に摺接するように、第２連結ブロック９８の下面に廻り止め９５，９５を設けてもよい。尚、廻り止め９５は、レール部材５の一方の側面に摺接するように、第２連結ブロック９８の下面に１個設けてもよい。
また、例えば、図２０に示す第２変形例のように、例えば第１及び第２バルブ２Ａ，２Ｂ（バルブボディ１１Ａ，１１Ｂ）の両側面に当接するように、第１及び第２連結ブロック４１，９８に廻り止め９６，９６，９６，９６を設けてもよい。廻り止め９６は、第１及び第２連結ブロック４１，９８の何れか一方に設けてもよい。また、廻り止め９６は、４箇所に設けなくても、少なくとも１箇所で第１又は第２バルブ２Ａ，２Ｂに当接するようにしてもよい。 The rotation stopper 94 is not limited to being inserted into the gap 8 of the rail member 5.
For example, as in the first modification shown in FIG. 19, rotation stoppers 95, 95 may be provided on the lower surface of the second connection block 98 so as to be in sliding contact with both side surfaces of the rail member 5. One rotation stopper 95 may be provided on the lower surface of the second connection block 98 so as to be in sliding contact with one side surface of the rail member 5.
Further, for example, as in the second modification shown in FIG. 20, the first and second connection blocks 41 are in contact with both side surfaces of the first and second valves 2A, 2B (valve bodies 11A, 11B), for example. , 98 may be provided with detents 96, 96, 96, 96. The detent 96 may be provided on one of the first and second connection blocks 41 and 98. Further, the rotation stopper 96 may not be provided at four places, but may be brought into contact with the first or second valve 2A, 2B at at least one place.

＜作用効果＞
第３実施形態の流体機器ユニット９０及びシール接続部の連結構造９９は、第１実施形態のシール接続部の連結構造９の作用効果に加え、第１及び第２連結ブロック４１，９８がバルブボディ１１Ａ，１１Ｂに対して回転することを廻り止め９４（９５，９６）が阻止するので、第１及び第２連結ブロック４１，９８を接続部１７Ａ，１７Ｂに取り付けるときに、嵌合凸部４９Ａ，４９Ｂ，５０Ａ，５０Ｂと嵌合凹溝７３Ａ，７３Ｂとの位置関係がずれにくい。そのため、第１及び第２連結ブロック４１，９８を接続部１７Ａ，１７Ｂに取り付けるときに、嵌合凸部４９Ａ，４９Ｂ，５０Ａ，５０Ｂや嵌合溝７３Ａ，７３Ｂが損傷しにくい。 <Effect>
In the fluid device unit 90 and the seal connecting portion connecting structure 99 of the third embodiment, the first and second connecting blocks 41 and 98 include the valve body in addition to the operational effects of the seal connecting portion connecting structure 9 of the first embodiment. Since the rotation stoppers 94 (95, 96) prevent rotation with respect to 11A, 11B, when attaching the first and second connecting blocks 41, 98 to the connecting portions 17A, 17B, the fitting convex portions 49A, The positional relationship between 49B, 50A, 50B and the fitting grooves 73A, 73B is difficult to shift. Therefore, when attaching the 1st and 2nd connection blocks 41 and 98 to connection part 17A, 17B, fitting convex part 49A, 49B, 50A, 50B and fitting groove 73A, 73B are hard to be damaged.

また、第３実施形態の流体機器ユニット９０及びシール接続部の連結構造９９は、連結部材９３が、接続部１７Ａ，１７Ｂの端面に対して傾かないので、嵌合凸部４９Ａ，４９Ｂ，５０Ａ，５０Ｂを接続部１７Ａ，１７Ｂの嵌合凹溝７３Ａ，７３Ｂに対して円周方向に均一な力で嵌合することができる。そのため、接続部１７Ａ，１７Ｂの第１及び第２環状突起７２Ａ，７２Ｂをシール部材１０の第１及び第２環状溝６２，６３の圧入代６４に円周方向にほぼ均一な力で圧入することができ、シール荷重を円周方向に均一にすることができる。   Further, in the fluid device unit 90 and the seal connecting portion connecting structure 99 of the third embodiment, since the connecting member 93 is not inclined with respect to the end surfaces of the connecting portions 17A, 17B, the fitting convex portions 49A, 49B, 50A, 50B can be fitted to the fitting grooves 73A and 73B of the connecting portions 17A and 17B with a uniform force in the circumferential direction. Therefore, the first and second annular protrusions 72A and 72B of the connecting portions 17A and 17B are press-fitted into the press-fitting margin 64 of the first and second annular grooves 62 and 63 of the seal member 10 with a substantially uniform force in the circumferential direction. The seal load can be made uniform in the circumferential direction.

更に、第３実施形態の流体機器ユニット９０及びシール接続部の連結構造９９は、「流体機器」の一例である分岐管９１とエルボ管９２の端面に接続部９１ｃ，９２ｃを設け、その接続部９１ｃ，９２ｃに複数の嵌合凹溝９１ａ，９２ａを形成しているので、シール部材１０を装着溝９１ｄ，９２ｄに装着して、連結部材９３を用いて他の配管や第１バルブ２Ａなどの流体機器に分岐管９１やエルボ管９２を個別に連結したときに、面圧が分散し、シール部材１０を適切に装着することができる。   Furthermore, the fluid device unit 90 and the seal connecting portion connecting structure 99 of the third embodiment are provided with connecting portions 91c and 92c on the end surfaces of the branch pipe 91 and the elbow pipe 92 which are examples of the “fluid device”. Since a plurality of fitting grooves 91a and 92a are formed in 91c and 92c, the seal member 10 is mounted in the mounting grooves 91d and 92d, and other pipes, the first valve 2A, etc. When the branch pipe 91 and the elbow pipe 92 are individually connected to the fluid device, the surface pressure is dispersed, and the seal member 10 can be appropriately attached.

（第４実施形態）
続いて、本発明の第４実施形態について説明する。図２１は、本発明の第４実施形態に係る流体機器ユニット１００の外観斜視図である。
第４実施形態の流体機器ユニット１００及びシール接続部の連結構造１０５は、遮蔽シール部材１０１を使用する点が第３実施形態と相違する。よって、ここでは、第３実施形態と相違する点を中心に説明し、共通する点は第３実施形態と同一符号を図面に付し、説明を適宜省略する。 (Fourth embodiment)
Subsequently, a fourth embodiment of the present invention will be described. FIG. 21 is an external perspective view of a fluid device unit 100 according to the fourth embodiment of the present invention.
The connecting structure 105 of the fluid device unit 100 and the seal connecting portion of the fourth embodiment is different from the third embodiment in that a shielding seal member 101 is used. Therefore, here, it demonstrates centering on the point which is different from 3rd Embodiment, attaches | subjects the same code | symbol as 3rd Embodiment to a drawing, and abbreviate | omits description suitably.

＜流体機器ユニットの構成＞
流体機器ユニット１００は、ラインを増設しやすいように、第３及び第４バルブ２Ｃ，２Ｄに連結される第１分岐管９１を、第１バルブ２Ａに連結される第２分岐管９１に連結部材９３を用いて連結している。第２分岐管９１は、第１分岐管９１と第１バルブ２Ａに接続しないポートが、遮蔽シール部材１０１によって閉鎖されている。 <Configuration of fluid equipment unit>
In the fluid device unit 100, the first branch pipe 91 connected to the third and fourth valves 2C and 2D is connected to the second branch pipe 91 connected to the first valve 2A so that the number of lines can be easily increased. 93 is used for connection. In the second branch pipe 91, a port that is not connected to the first branch pipe 91 and the first valve 2 </ b> A is closed by a shielding seal member 101.

＜遮蔽シール部材の構成＞
図２２は、図２１に示す遮蔽シール部材１０１の外観斜視図である。図２３は、図６に示す遮蔽シール部材１０１の断面図である。
遮蔽シール部材１０１は、ＰＦＡやＰＰＳなどの樹脂を略円柱状に成形した遮蔽本体部１１１の一端面に、シール部材１０と同様に環状溝６２と圧入代６４とガイド部６５と把持部６８と溝６９とが形成されている。遮蔽シール部材１０１は、例えば第２分岐管９１の端面に形成された装着溝９１ｄの環状突起９１ｅを環状溝６２の圧入代６４に圧入されてシールする。この意味で、遮蔽シール部材１０１の一端面に設けた環状溝６２と圧入代６４は、「シール部」の一例になり得る。遮蔽シール部材１０１の他端面は、遮蔽本体部１０２によって閉鎖されている。遮蔽本体部１０２の外周面には、接続部１７Ａの嵌合凹溝７３Ａと同一形状の嵌合凹溝１０３が２本平行に形成され、嵌合凹溝１０３の内周壁には、接続部１７Ａの接続部側テーパ７４Ａと同一形状の接続部側テーパ１０４が設けられている。 <Configuration of shielding seal member>
22 is an external perspective view of the shielding seal member 101 shown in FIG. 23 is a cross-sectional view of the shielding seal member 101 shown in FIG.
The shielding seal member 101 has an annular groove 62, a press-fitting allowance 64, a guide portion 65, and a gripping portion 68 on one end surface of the shielding main body 111 formed of a resin such as PFA or PPS in a substantially cylindrical shape. A groove 69 is formed. For example, the shielding seal member 101 seals the annular protrusion 91e of the mounting groove 91d formed on the end surface of the second branch pipe 91 by being press-fitted into the press-fitting allowance 64 of the annular groove 62. In this sense, the annular groove 62 and the press-fitting allowance 64 provided on one end surface of the shielding seal member 101 can be an example of a “seal portion”. The other end surface of the shielding seal member 101 is closed by the shielding main body 102. Two fitting concave grooves 103 having the same shape as the fitting concave groove 73A of the connecting portion 17A are formed in parallel on the outer peripheral surface of the shielding main body 102, and the connecting portion 17A is provided on the inner peripheral wall of the fitting concave groove 103. The connecting portion side taper 104 having the same shape as the connecting portion side taper 74A is provided.

＜流路遮蔽方法＞
次に、遮蔽シール部材１０１を用いて流路を遮蔽する方法を説明する。
遮蔽シール部材１０１は、第２分岐管９１の端面に設けた環状突起９１ｅを環状溝６２のガイド部６５に挿入した状態で、第２分岐管９１に取り付けられる。連結部材９３は、第２分岐管９１と遮蔽シール部材１０１の端面接続部分を上下方向から挟むように第２分岐管９１と遮蔽シール部材１０１との接続部に取り付けられる。そして、ボルト４５，４５を第１及び第２連結ブロック４１，９８に締め付けると、第１及び第２連結ブロック４１，９８の連結側テーパ５１Ａ，５１Ｂ，５２Ａ，５２Ｂが、第２分岐管９１の接続部側テーパ９１ｂと、遮蔽シール部材１０１の接続部側テーパ１０４に摺接し、第２分岐管９１と遮蔽シール部材１０１に互いに近づく方向の力を付与する。これにより、第２分岐管９１の環状突起９１ｅが遮蔽シール部材１０１の環状溝６２に設けた圧入代６４に圧入される。よって、第２分岐管９１は、遮蔽シール部材１０１との圧入部分でシールされた状態で、遮蔽シール部材１０１に流路を遮蔽される。 <Flow path shielding method>
Next, a method for shielding the flow path using the shielding seal member 101 will be described.
The shielding seal member 101 is attached to the second branch pipe 91 in a state where an annular protrusion 91e provided on the end surface of the second branch pipe 91 is inserted into the guide portion 65 of the annular groove 62. The connecting member 93 is attached to the connection portion between the second branch pipe 91 and the shielding seal member 101 so as to sandwich the end face connection portion between the second branch pipe 91 and the shielding seal member 101 from the vertical direction. When the bolts 45, 45 are tightened to the first and second connection blocks 41, 98, the connection side tapers 51 A, 51 B, 52 A, 52 B of the first and second connection blocks 41, 98 are connected to the second branch pipe 91. The connecting portion side taper 91b and the connecting portion side taper 104 of the shielding seal member 101 are slidably contacted, and a force in a direction approaching the second branch pipe 91 and the shielding seal member 101 is applied. Thereby, the annular protrusion 91e of the second branch pipe 91 is press-fitted into the press-fitting allowance 64 provided in the annular groove 62 of the shielding seal member 101. Therefore, the flow path is shielded by the shielding seal member 101 in a state where the second branch pipe 91 is sealed at the press-fitted portion with the shielding seal member 101.

＜作用効果＞
従って、第４実施形態の流体機器ユニット１００及びシール接続部の連結構造１０５は、第３実施形態の作用効果に加え、以下の作用効果を奏する。
遮蔽シール部材１０１が、第２配管９１の環状突起９１を圧入される環状溝６２が一端面に形成され、他端面が閉鎖され、他端面外周に接続部１７Ａ，１７Ｂに設けた嵌合凹溝７３Ａ，７３Ｂ及び接続部側テーパ７４Ａ，７４Ｂと同じ嵌合凹溝１０３及び接続部側テーパ１０４が設けられているので、例えば、遮蔽シール部材１０１を第２分岐管９１の接続部９１ｃに装着して第１及び第２連結ブロック４１，９８をそのまま取り付ければ、第２分岐管９１の一端開口部を遮蔽して、流路を簡単に遮断できる。しかも、遮蔽シール部材１０１は、第１及び第２連結ブロック４１，９８の間に収まるため、流路遮断構造がコンパクトである。 <Effect>
Accordingly, the fluid device unit 100 and the connecting structure 105 of the seal connecting portion according to the fourth embodiment have the following effects in addition to the effects of the third embodiment.
An annular groove 62 into which the shielding seal member 101 is press-fitted into the annular protrusion 91 of the second pipe 91 is formed on one end face, the other end face is closed, and a fitting groove provided on the outer periphery of the other end face in the connecting portions 17A and 17B. 73A, 73B and the connecting portion side taper 74A, 74B are provided with the same fitting concave groove 103 and the connecting portion side taper 104. For example, the shielding seal member 101 is attached to the connecting portion 91c of the second branch pipe 91. If the first and second connection blocks 41 and 98 are attached as they are, the one end opening of the second branch pipe 91 is shielded, and the flow path can be easily blocked. In addition, since the shielding seal member 101 fits between the first and second connection blocks 41 and 98, the flow path blocking structure is compact.

また、第４実施形態の流体機器ユニット１００及びシール接続部の連結構造１０５は、ライン増設時には、連結部材９３の第１及び第２連結ブロック４１，９８を取り外して遮蔽シール部材１０１を第２分岐管９１の端面から取り外し、第２分岐管９１と増設する配管との接続部分にシール部材１０を介在させ、連結部材９３で接続部分を連結する。よって、第４実施形態の流体機器ユニット１００及びシール接続部の連結構造１０５によれば、ラインエンドに遮蔽シール部材１０１を配置することにより、既存の分岐管９１や連結部材９３などを用いてライン増設を簡単に行うことができる。   Further, in the fluid device unit 100 and the seal connecting portion connecting structure 105 of the fourth embodiment, when the line is added, the first and second connecting blocks 41 and 98 of the connecting member 93 are removed and the shielding seal member 101 is second branched. It is removed from the end face of the pipe 91, the seal member 10 is interposed at the connection portion between the second branch pipe 91 and the pipe to be added, and the connection portion is connected by the connecting member 93. Therefore, according to the fluid device unit 100 and the connection structure 105 of the seal connecting portion of the fourth embodiment, the shielding seal member 101 is arranged at the line end, so that the line is made using the existing branch pipe 91 and the connection member 93. Expansion can be done easily.

（第５実施形態）
続いて、本発明の第５実施形態について説明する。図２４は、本発明の第５実施形態に係る圧入治具１１０の外観斜視図であって、流体機器をセットされた状態を示す。
第１実施形態では、シール部材１０の第１及び第２環状溝６２，６３に設けた圧入代６４に、流体機器に設けた第１及び第２環状突起７２Ａ，７２Ｂを圧入してシールを行っている。圧入荷重は、例えば４０００Ｎにもなることがあった。この場合、手作業でシール部材１０の圧入代６４に第１及び第２環状突起７２Ａ，７２Ｂを圧入できないことはもちろん、第１及び第２連結ブロック４１，４２を接続部１７Ａ，１７Ｂに取り付ける際に発生する推力のみで、シール部材１０の圧入代６４に第１及び第２環状突起７２Ａ，７２Ｂを圧入できないこともあった。そこで、第５実施形態では、圧入治具１１０を使用してシール部材１０の装着を行う。 (Fifth embodiment)
Subsequently, a fifth embodiment of the present invention will be described. FIG. 24 is an external perspective view of the press-fitting jig 110 according to the fifth embodiment of the present invention, and shows a state in which a fluid device is set.
In the first embodiment, the first and second annular protrusions 72A and 72B provided in the fluid device are press-fitted into the press-fit allowance 64 provided in the first and second annular grooves 62 and 63 of the seal member 10 to perform sealing. ing. The press-fit load may be as high as 4000 N, for example. In this case, the first and second annular protrusions 72A and 72B cannot be press-fitted into the press-fitting allowance 64 of the seal member 10 manually, and when the first and second connection blocks 41 and 42 are attached to the connecting portions 17A and 17B. In some cases, the first and second annular protrusions 72A and 72B cannot be press-fitted into the press-fitting allowance 64 of the seal member 10 only by the thrust generated in the step. Therefore, in the fifth embodiment, the sealing member 10 is mounted using the press-fitting jig 110.

圧入治具１１０は、治具本体部１１１の下面に、レール部材５に設けた一対の突出片７，７の間に挿入されて回転を阻止する廻り止め１１９が突設されている。治具本体部１１１の両側面には、例えば、第２バルブ２Ａを治具本体部１１１に対して固定する「固定部」の一例であるアーム１１２，１１３が設けられている。アーム１１２，１１３は、治具本体部１１１の両側に幅寸法を設定変更できるように保持されており、保持具１１４，１１５が固定されている。   The press-fitting jig 110 is provided with a rotation stopper 119 that is inserted between a pair of projecting pieces 7 and 7 provided on the rail member 5 and prevents rotation on the lower surface of the jig main body 111. On both side surfaces of the jig main body 111, for example, arms 112 and 113, which are examples of “fixing parts” for fixing the second valve 2A to the jig main body 111, are provided. The arms 112 and 113 are held on both sides of the jig main body 111 so that the width dimension can be changed, and the holders 114 and 115 are fixed.

治具本体部１１１には、ガイド棒１１７が、アーム１１２，１１３の間を水平方向（図中Ｐ１，Ｐ２方向）に直線往復運動するように保持されている。ガイド棒１１７の先端部には、押圧ブロック１１６が固定されている。押圧ブロック１１６は、内径が接続部１７Ｂの外径より大きい円筒状をなす。ガイド棒１１７と押圧ブロック１１６は、アーム１１２，１１３が第１バルブ２Ａを固定する固定位置に向かって直線往復運動することから、「可動部」の一例になり得る。   A guide rod 117 is held on the jig main body 111 so as to linearly reciprocate between the arms 112 and 113 in the horizontal direction (P1 and P2 directions in the figure). A pressing block 116 is fixed to the distal end portion of the guide rod 117. The pressing block 116 has a cylindrical shape whose inner diameter is larger than the outer diameter of the connecting portion 17B. The guide rod 117 and the pressing block 116 can be an example of a “movable part” because the arms 112 and 113 linearly reciprocate toward a fixed position where the first valve 2A is fixed.

治具本体部１１１の側面には、ハンドル１１８が図中Ｒ１，Ｒ２方向にできるように設けられている。ハンドル１１８は、治具本体部１１１内に設けた図示しないカム機構や歯車機構などの回転力を推進力に変換して動力を伝達する動力伝達機構を介してガイド棒１１７に連結し、ハンドル１１８を図中Ｒ１方向に回転させたときには、押圧ブロック１１６を突出させるようにガイド棒１１７が図中Ｐ１方向へ移動する一方、ハンドル１１８を図中Ｒ２方向に回転させたときには、押圧ブロック１１６を退避させるようにガイド棒１１７が図中Ｐ２方向へ移動する。よって、ハンドル１１８と図示しない動力伝達機構は、ガイド棒１１７に駆動力を与えることから、「駆動部」の一例になり得る。   A handle 118 is provided on the side surface of the jig main body 111 so as to be in the R1 and R2 directions in the drawing. The handle 118 is connected to the guide rod 117 via a power transmission mechanism that converts a rotational force such as a cam mechanism or a gear mechanism (not shown) provided in the jig main body 111 into a propulsive force and transmits the power. Is rotated in the direction R1 in the drawing, the guide rod 117 moves in the direction P1 in the drawing so that the pressing block 116 protrudes, while the pressure block 116 is retracted when the handle 118 is rotated in the direction R2 in the drawing. The guide rod 117 is moved in the direction P2 in the figure so as to cause it to move. Therefore, the handle 118 and a power transmission mechanism (not shown) give a driving force to the guide rod 117, and thus can be an example of a “driving unit”.

＜治具によるシール部材の装着手順＞
図２５〜図２７は、圧入治具１１０によるシール部材１０の圧入手順を示す図である。ここでは、第２バルブ２Ｂを第１バルブ２Ａに連結する場合を例に挙げて説明する。
図２５に示すように、レール部材５には、継手ブロック４と第１バルブ２Ａと第２バルブ２Ｂとが取り付けられている。第１バルブ２Ａの第１環状突起７２Ａをシール部材１０のガイド部６５に挿入するように、シール部材１０を接続部１７Ａに取り付ける。そして、圧入治具１１０の廻り止め１１９をレール部材５に設けた一対の突出片７，７の間に挿入するように、圧入治具１１０をレール部材５にセットし、圧入治具１１０が圧入時に第１バルブ２Ａ等に対して回転することを防止する。この時点で、第１バルブ２Ａと第２バルブ２Ｂと圧入治具１１０は、レール部材５によって同一直線上に位置合わせされる。 <Installation procedure of seal member with jig>
FIGS. 25 to 27 are diagrams illustrating a press-fitting procedure of the seal member 10 by the press-fitting jig 110. Here, a case where the second valve 2B is connected to the first valve 2A will be described as an example.
As shown in FIG. 25, the rail member 5 is provided with a joint block 4, a first valve 2A, and a second valve 2B. The seal member 10 is attached to the connecting portion 17A so that the first annular protrusion 72A of the first valve 2A is inserted into the guide portion 65 of the seal member 10. Then, the press-fitting jig 110 is set on the rail member 5 so that the detent 119 of the press-fitting jig 110 is inserted between the pair of protruding pieces 7, 7 provided on the rail member 5, and the press-fitting jig 110 is press-fitted. Sometimes it is prevented from rotating with respect to the first valve 2A or the like. At this time, the first valve 2A, the second valve 2B, and the press-fitting jig 110 are aligned on the same straight line by the rail member 5.

それから、圧入治具１１０をレール部材５に沿ってスライドさせ、保持具１１４，１１５を第１バルブ２Ａの接続部１７Ａに位置合わせする。そして、保持具１１４，１１５が接続部１７Ａを両側から保持するようにアーム１１２，１１３の幅を調節し、アーム１１２，１１３を固定する。   Then, the press-fitting jig 110 is slid along the rail member 5, and the holders 114 and 115 are aligned with the connecting portion 17A of the first valve 2A. Then, the widths of the arms 112 and 113 are adjusted so that the holding tools 114 and 115 hold the connection portion 17A from both sides, and the arms 112 and 113 are fixed.

その後、図２６に示すように、圧入治具１１０を動かないように押さえながら、ハンドル１１８を図中Ｒ１方向に回転させ、ガイド棒１１７を図中Ｐ１方向へ移動させる。押圧ブロック１１６は、第２バルブ２Ｂを第１バルブ２Ａ側に押圧し、第２バルブ２Ｂをレール部材５に沿ってスライドさせる。やがて、第２バルブ２Ｂの接続部１７Ｂがシール部材１０の把持部６８に挿入され、さらに、第２環状突起７２Ｂをシール部材１０の第２環状溝６３のガイド部６６に挿入する。このとき、第１バルブ２Ａは、接続部１７Ａを保持具１１４，１１５に保持されているため、動かない。   Thereafter, as shown in FIG. 26, while pressing the press-fitting jig 110 so as not to move, the handle 118 is rotated in the R1 direction in the drawing, and the guide rod 117 is moved in the P1 direction in the drawing. The pressing block 116 presses the second valve 2 </ b> B toward the first valve 2 </ b> A, and slides the second valve 2 </ b> B along the rail member 5. Eventually, the connection portion 17B of the second valve 2B is inserted into the gripping portion 68 of the seal member 10, and the second annular protrusion 72B is inserted into the guide portion 66 of the second annular groove 63 of the seal member 10. At this time, the first valve 2A does not move because the connecting portion 17A is held by the holders 114 and 115.

さらに、ハンドル１１８を図中Ｒ１方向に回転させると、第２バルブ２Ｂが第１バルブ２Ａ側へ移動し、第１及び第２バルブ２Ａ，２Ｂの第１及び第２環状突起７２Ａ，７２Ｂがシール部材１０に設けた第１及び第２環状溝６２，６３の圧入代６４に圧入される。このとき、第１及び第２バルブ２Ａ，２Ｂは係合部２０Ａ，２０Ｂによって、圧入治具１１０は廻り止め１１９によって、それぞれ回転止めされているので、第２バルブ２Ｂの接続部１７Ｂは第１バルブ２Ａの接続部１７Ａに対して水平方向に真っ直ぐ押し付けられ、第１及び第２環状突起７２Ａ，７２Ｂを第１及び第２環状溝６２，６３に円周方向にほぼ均一な圧力で圧入することができる。   When the handle 118 is further rotated in the direction R1 in the drawing, the second valve 2B moves to the first valve 2A side, and the first and second annular protrusions 72A and 72B of the first and second valves 2A and 2B are sealed. The first and second annular grooves 62 and 63 provided in the member 10 are press-fitted into a press-fitting allowance 64. At this time, since the first and second valves 2A and 2B are rotationally stopped by the engaging portions 20A and 20B, and the press-fitting jig 110 is stopped by the anti-rotation 119, the connecting portion 17B of the second valve 2B is the first. The first and second annular protrusions 72A and 72B are pressed into the first and second annular grooves 62 and 63 with substantially uniform pressure in the circumferential direction by being pressed straight in the horizontal direction against the connecting portion 17A of the valve 2A. Can do.

ハンドル１１８が動かなくなったら、図２７に示すように、ハンドル１１８を図中Ｒ２方向へ回転させ、ガイド棒１１７を図中Ｐ２方向へ後退させる。すると、押圧ブロック１１６が第２バルブ２Ｂの側面から離間する。その後、アーム１１２，１１３の固定を解除して第１バルブ２Ａの接続部１７Ａを保持具１１４，１１５から開放する。   When the handle 118 stops moving, as shown in FIG. 27, the handle 118 is rotated in the direction R2 in the drawing, and the guide rod 117 is moved back in the direction P2 in the drawing. Then, the pressing block 116 is separated from the side surface of the second valve 2B. Thereafter, the fixing of the arms 112 and 113 is released, and the connecting portion 17A of the first valve 2A is released from the holders 114 and 115.

上記のようにして接続部１７Ａ，１７Ｂの間にシール部材１０を圧入保持したら、連結部材３を接続部１７Ａ，１７Ｂに取り付ける。   When the sealing member 10 is press-fitted and held between the connecting portions 17A and 17B as described above, the connecting member 3 is attached to the connecting portions 17A and 17B.

＜作用効果＞
よって、第５実施形態の圧入治具１１０によれば、シール部材１０の第１及び第２環状溝６２，６３の圧入代６４に接続部１７Ａ，１７Ｂの第１及び第２環状突起７２Ａ，７２Ｂを圧入する圧入荷重が大きく、第１及び第２連結ブロック４１，４２を接続部１７Ａ，１７Ｂに取り付ける場合の推力のみではシール部材１０を接続部１７Ａ，１７Ｂに装着できない場合でも、例えば、第１及び第２バルブ２Ａ，２Ｂを圧入治具１１０にセットしてハンドル１１８を回転させるだけで、シール部材１０の圧入代６４に接続部１７Ａ，１７Ｂの第１及び第２環状突起７２Ａ，，７２Ｂを圧入することができ、シール部材１０を接続部１７Ａ，１７Ｂに簡単に装着できる。 <Effect>
Therefore, according to the press-fitting jig 110 of the fifth embodiment, the first and second annular protrusions 72A and 72B of the connecting portions 17A and 17B are inserted into the press-fitting allowance 64 of the first and second annular grooves 62 and 63 of the seal member 10. Even if the press-fitting load for press-fitting is large and the seal member 10 cannot be attached to the connecting portions 17A and 17B only by the thrust when the first and second connecting blocks 41 and 42 are attached to the connecting portions 17A and 17B, for example, the first The first and second annular protrusions 72A, 72B of the connecting portions 17A, 17B are connected to the press-fitting allowance 64 of the seal member 10 simply by setting the second valves 2A, 2B on the press-fitting jig 110 and rotating the handle 118. It is possible to press-fit, and the seal member 10 can be easily attached to the connecting portions 17A and 17B.

尚、圧入荷重が大きいほど、接続部１７Ａ，１７Ｂやシール部材１０が発生する反発力が大きくなるが、圧入後は、第１及び第２連結ブロック４１，４２を用いて接続部１７Ａ，１７Ｂの面圧を分散するので、接続部１７Ａ，１７Ｂが変形しにくく、シール荷重が低下しにくい。   Note that the greater the press-fit load, the greater the repulsive force generated by the connecting portions 17A, 17B and the seal member 10, but after press-fitting, the connection portions 17A, 17B are connected using the first and second connecting blocks 41, 42. Since the surface pressure is dispersed, the connecting portions 17A and 17B are not easily deformed, and the seal load is hardly reduced.

また、第５実施形態の圧入治具１１０は、流体機器ユニット１のレール部材５を利用して、第１及び第２バルブ２Ａ，２Ｂと圧入治具１１０とを一直線上に配置し、第２バルブ２Ｂの接続部１７Ｂを第１バルブ２Ａの１７Ａに対して水平方向に真っ直ぐ押し付けてシール部材１０を装着できるので、圧入時における接続部１７Ａ，１７Ｂの位置合わせが容易である。よって、第５実施形態の圧入治具１１０によれば、圧入式のシール部材１１０を接続部１７Ａ，１７Ｂに簡単に装着できる。   Further, the press-fitting jig 110 of the fifth embodiment uses the rail member 5 of the fluid device unit 1 to arrange the first and second valves 2A, 2B and the press-fitting jig 110 in a straight line, and the second Since the seal member 10 can be attached by pressing the connecting portion 17B of the valve 2B straightly against the 17A of the first valve 2A in the horizontal direction, it is easy to align the connecting portions 17A and 17B during press-fitting. Therefore, according to the press-fitting jig 110 of the fifth embodiment, the press-fit seal member 110 can be easily attached to the connecting portions 17A and 17B.

また、第５実施形態の圧入治具１１０は、ハンドル１１８の回転力を図示しない動力伝達機構によってガイド棒１１７に伝達し、第２バルブ２Ｂに圧入に必要な推力を与えるので、小さな力でシール部材１０の圧入代６４に接続部１７Ａ，１７Ｂの第１及び第２環状突起７２Ａ，７２Ｂを圧入できる。   Further, the press-fitting jig 110 of the fifth embodiment transmits the rotational force of the handle 118 to the guide rod 117 by a power transmission mechanism (not shown), and gives the second valve 2B thrust necessary for press-fitting, so that the seal is made with a small force. The first and second annular protrusions 72A and 72B of the connecting portions 17A and 17B can be press-fitted into the press-fitting allowance 64 of the member 10.

尚、圧入治具１１０の構成部品を樹脂で形成すれば、摩耗粉などのゴミの発生を抑制し、圧入治具１１０の使用時にゴミがシール面に付着することを防止できる。   If the components of the press-fitting jig 110 are made of resin, the generation of dust such as wear powder can be suppressed, and dust can be prevented from adhering to the seal surface when the press-fitting jig 110 is used.

（第６実施形態）
次に、本発明の第６実施形態について図面を参照して説明する。図２８本発明の第６実施形態に係り、分岐管９１とエルボ管９２の接続部分に取り付けられた圧入治具１２０の外観斜視図である。
第６実施形態の圧入治具１２０は、レール部材５に取り付けられない点が第５実施形態の圧入治具１１０と相違する。よって、ここでは、第５実施形態と相違する点を中心に説明し、共通する点は図面に第５実施形態と同じ符号を付し、説明を適宜省略する。 (Sixth embodiment)
Next, a sixth embodiment of the present invention will be described with reference to the drawings. FIG. 28 is an external perspective view of a press-fitting jig 120 attached to a connecting portion between a branch pipe 91 and an elbow pipe 92 according to a sixth embodiment of the present invention.
The press-fit jig 120 of the sixth embodiment is different from the press-fit jig 110 of the fifth embodiment in that it is not attached to the rail member 5. Therefore, here, it demonstrates centering on a different point from 5th Embodiment, and a common point attaches | subjects the same code | symbol as 5th Embodiment to drawing, and abbreviate | omits description suitably.

＜圧入治具の全体構成＞
圧入治具１２０は、使用時に摩耗粉などのゴミを発生しないために、樹脂を材質としている。圧入治具１２０は、治具本体部１２１に一対のアーム１１２，１１３が離間距離を調整できるように保持され、アーム１１２，１１３に保持具１１４，１１５が保持されている。治具本体部１２１は、中空円筒状をなし、内周面に雌ねじが形成されている。治具本体部１２１には、外周面に雄ねじが形成された作動棒１２２が螺入されている。作動棒１２２は、一端に押圧ブロック１１６が固設され、他端にハンドル１２３が固設されており、ハンドル１２３を図中矢印Ｒ３，Ｒ４方向に回転させることにより押圧ブロック１１６を図中Ｐ３，Ｐ４方向に直線往復運動させるようになっている。 <Overall configuration of press-fit jig>
The press-fitting jig 120 is made of resin so as not to generate dust such as wear powder during use. The press-fitting jig 120 is held by the jig main body 121 so that the pair of arms 112 and 113 can adjust the separation distance, and the holding tools 114 and 115 are held by the arms 112 and 113. The jig main body 121 has a hollow cylindrical shape, and an internal thread is formed on the inner peripheral surface. An operating rod 122 having a male screw formed on the outer peripheral surface is screwed into the jig main body 121. The actuating rod 122 has a pressing block 116 fixed at one end and a handle 123 fixed at the other end. By rotating the handle 123 in the directions of arrows R3 and R4 in the figure, the pressing block 116 is moved to P3 in the figure. It is designed to reciprocate linearly in the P4 direction.

尚、第６実施形態では、ハンドル１２３と治具本体部１２１の雌ねじと作動棒１２２の雄ネジによって「駆動部」の一例を構成し、作動棒１２２と押圧ブロック１１６とにより「可動部」の一例を構成する。   In the sixth embodiment, an example of the “driving unit” is configured by the handle 123, the internal thread of the jig main body 121 and the external thread of the operating rod 122, and the operating rod 122 and the pressing block 116 form the “movable portion”. Configure an example.

＜治具によるシール部材の装着手順＞
次に、圧入治具１２０を使用して分岐管９１とエルボ管９２との間にシール部材１０を圧入する方法について説明する。
分岐管９１の環状突起９１ｅとエルボ管９２の環状突起９２ｅをシール部材１０の第１及び第２環状溝６２，６３のガイド部６５に挿入する。押圧ブロック１１６を後退させた状態で、保持具１１４，１１５でエルボ管９２を挟むようにアーム１１２，１１３の位置を調整して固定する。その後、ハンドル１２３を図中Ｒ３方向へ回転させて、押圧ブロック１１６を図中Ｐ３方向へ突出させ、分岐管９１をエルボ管９１側に押圧して、分岐管９１の環状突起９１ｅとエルボ管９２の環状突起９２ｅをシール部材１０の第１及び第２環状溝６２，６３の圧入代６４に圧入する。それから、ハンドル１２３を図中Ｒ４方向に回転させて押圧ブロック１１６を図中Ｐ４方向へ後退させた後、アーム１１２，１１３を広げて保持具１１４，１１５をエルボ管９２から取り外す。 <Installation procedure of seal member with jig>
Next, a method for press-fitting the seal member 10 between the branch pipe 91 and the elbow pipe 92 using the press-fitting jig 120 will be described.
The annular protrusion 91e of the branch pipe 91 and the annular protrusion 92e of the elbow pipe 92 are inserted into the guide portions 65 of the first and second annular grooves 62, 63 of the seal member 10. With the pressing block 116 retracted, the positions of the arms 112 and 113 are adjusted and fixed so that the elbow pipe 92 is sandwiched between the holders 114 and 115. Thereafter, the handle 123 is rotated in the direction R3 in the drawing, the pressing block 116 is projected in the direction P3 in the drawing, the branch pipe 91 is pressed toward the elbow pipe 91, and the annular projection 91e of the branch pipe 91 and the elbow pipe 92 are pressed. The annular protrusion 92e is press-fitted into the press-fitting allowance 64 of the first and second annular grooves 62, 63 of the seal member 10. Then, the handle 123 is rotated in the direction R4 in the figure to retract the pressing block 116 in the direction P4 in the figure, and then the arms 112 and 113 are spread out to remove the holders 114 and 115 from the elbow pipe 92.

＜作用効果＞
従って、第６実施形態の圧入治具１２０は、第５実施形態の作用効果に加え、レール部材５に取り付けずに、シール部材１０の圧入代６４に分岐管９１とエルボ管９２の環状突起９１ｅ，９２ｅを圧入し、シール部材１０を分岐管９１とエルボ管９２の接続部分に装着することが可能である。そのため、第６実施形態の圧入治具１２０は、使用場所が限定されない。
尚、第６実施形態では、分岐管９１とエルボ管９２の連結に圧入治具１２０を使用したが、第５実施形態と同様、レール部材５に取り付けられた第１及び第２バルブ２Ａ，２Ｂの連結に圧入治具１２０を使用しても良い。 <Effect>
Therefore, the press-fitting jig 120 of the sixth embodiment is not attached to the rail member 5 in addition to the effects of the fifth embodiment, and the annular protrusion 91e of the branch pipe 91 and the elbow pipe 92 is added to the press-fitting allowance 64 of the seal member 10. 92e and the seal member 10 can be attached to the connecting portion of the branch pipe 91 and the elbow pipe 92. Therefore, the place of use of the press-fitting jig 120 of the sixth embodiment is not limited.
In the sixth embodiment, the press-fitting jig 120 is used to connect the branch pipe 91 and the elbow pipe 92. However, as in the fifth embodiment, the first and second valves 2A and 2B attached to the rail member 5 are used. For this connection, a press-fitting jig 120 may be used.

尚、本発明は、上記実施形態に限定されることなく、色々な応用が可能である。
（１）例えば、上記実施形態では、嵌合凹溝７３と嵌合凸部４９，５０を２本ずつ設けたが、１本ずつ設けてもよいし、３本以上設けてもよい。
（２）例えば、上記実施形態では、第１及び第２バルブ２Ａ，２Ｂの連結を中心に説明したが、バルブ類やセンサ類の連結や、配管ブロック同士の連結や、配管の連結など、各種流体機器の連結に上記シール接続部の連結構造を適用できる。
（３）例えば、上記第２実施形態では、第１及び第２連結ブロック８１，８２を横方向、第３及び第４連結ブロック８３，８４を上下方向から取り付けたが、これらの取付方向はこれに限定されず、例えば、第１及び第２連結ブロック８１，８２を上下方向、第３及び第４連結ブロック８３，８４を横方向から取り付けてもよい。
（４）例えば、上記第５実施形態では、圧入治具１１０が第１バルブ２Ａを左右から挟むように固定したが、例えば、Ｌ字形のアームを治具本体部１１１の上面に設け、上方から第１バルブ２Ａにアームを引っ掛けるようにして第１バルブ２Ａを固定してもよい。
（５）例えば、上記実施形態ではレール部材５を複数のレール部品３１，３２で構成したが、１個の部品で構成してもよい。 In addition, this invention is not limited to the said embodiment, Various application is possible.
(1) For example, in the above-described embodiment, two fitting grooves 73 and two fitting protrusions 49 and 50 are provided, but one may be provided, or three or more may be provided.
(2) For example, in the said embodiment, although demonstrated centering on the connection of 1st and 2nd valve 2A, 2B, various connections, such as connection of valves and sensors, connection of piping blocks, connection of piping, etc. The connection structure of the seal connecting portion can be applied to the connection of fluid devices.
(3) For example, in the second embodiment, the first and second connection blocks 81 and 82 are attached in the horizontal direction, and the third and fourth connection blocks 83 and 84 are attached in the vertical direction. For example, the first and second connection blocks 81 and 82 may be attached in the vertical direction, and the third and fourth connection blocks 83 and 84 may be attached in the lateral direction.
(4) For example, in the fifth embodiment, the press-fitting jig 110 is fixed so as to sandwich the first valve 2A from the left and right. However, for example, an L-shaped arm is provided on the upper surface of the jig main body 111, and from above. The first valve 2A may be fixed by hooking an arm on the first valve 2A.
(5) For example, in the above embodiment, the rail member 5 is configured by the plurality of rail components 31 and 32, but may be configured by one component.

本発明の第１実施形態に係る流体機器ユニットの外観斜視図である。It is an external appearance perspective view of the fluid apparatus unit which concerns on 1st Embodiment of this invention. 図１に示す第１バルブとレール部材との関係を説明する図であり、（ａ）は第１バルブの側面図を示し、（ｂ）はレール部材の断面図を示す。It is a figure explaining the relationship between the 1st valve | bulb shown in FIG. 1, and a rail member, (a) shows the side view of a 1st valve | bulb, (b) shows sectional drawing of a rail member. 図１に示す第１バルブの下面図である。It is a bottom view of the 1st valve | bulb shown in FIG. 図１に示す流体機器ユニットの部分分解斜視図である。FIG. 2 is a partially exploded perspective view of the fluid device unit shown in FIG. 1. 図１に示す第１バルブと第２バルブのシール構造を示す分解拡大断面図である。FIG. 2 is an exploded cross-sectional view showing a seal structure of a first valve and a second valve shown in FIG. 1. 図５に示す接続部に使用するシール部材の平面図である。It is a top view of the sealing member used for the connection part shown in FIG. 図６に示すシール部材のＡ−Ａ断面図である。It is AA sectional drawing of the sealing member shown in FIG. 図１に示すシール接続部の連結構造の拡大断面図である。It is an expanded sectional view of the connection structure of the seal | sticker connection part shown in FIG. 図１に示す連結部材の断面図である。It is sectional drawing of the connection member shown in FIG. 図１に示す流体機器の連結手順を説明する図である。（ａ）は一方の流体機器にシール部材を仮装着した状態を示す。（ｂ）は、他方のシール部材にシール部材を仮装着した状態を示す。It is a figure explaining the connection procedure of the fluid apparatus shown in FIG. (A) shows the state which temporarily attached the sealing member to one fluid apparatus. (B) shows the state which temporarily attached the seal member to the other seal member. 図１に示す流体機器の連結手順を説明する図である。（ａ）は、連結部材装着前の状態を示す。（ｂ）は、連結部材装着後の初期状態を示す。It is a figure explaining the connection procedure of the fluid apparatus shown in FIG. (A) shows the state before connecting member mounting | wearing. (B) shows the initial state after mounting the connecting member. 図１に示す流体機器の連結手順を説明する図であり、増し締め後の状態を示す図である。It is a figure explaining the connection procedure of the fluid apparatus shown in FIG. 1, and is a figure which shows the state after retightening. 本発明の第２実施形態に係る流体機器ユニット及びシール接続部の連結構造に使用される流体機器に装着された連結部材を示す外観斜視図である。It is an external appearance perspective view which shows the connection member with which the fluid apparatus used for the connection structure of the fluid apparatus unit and seal | sticker connection part which concern on 2nd Embodiment of this invention was mounted | worn. 図１３に示す連結部材を分解した斜視図である。It is the perspective view which decomposed | disassembled the connection member shown in FIG. 本発明の第３実施形態に係る流体機器ユニットの外観斜視図である。It is an external appearance perspective view of the fluid apparatus unit which concerns on 3rd Embodiment of this invention. 図５に示す第１ラインの断面図である。It is sectional drawing of the 1st line shown in FIG. 図５に示す第２ラインの断面図である。It is sectional drawing of the 2nd line shown in FIG. 図１５に示す連結部材とレール部材の断面図である。It is sectional drawing of a connection member and a rail member shown in FIG. 図１８に示す連結部材の第１変形例を示す図である。It is a figure which shows the 1st modification of the connection member shown in FIG. 図１８に示す連結部材の第２変形例を示す図である。It is a figure which shows the 2nd modification of the connection member shown in FIG. 本発明の第４実施形態に係る流体機器ユニットの外観斜視図である。It is an external appearance perspective view of the fluid apparatus unit which concerns on 4th Embodiment of this invention. 図２１に示す遮蔽シール部材の外観斜視図である。It is an external appearance perspective view of the shielding seal member shown in FIG. 図６に示す遮蔽シール部材の断面図である。It is sectional drawing of the shielding seal member shown in FIG. 本発明の第５実施形態に係る圧入治具の外観斜視図であって、流体機器をセットされた状態を示す。It is an external appearance perspective view of the press-fitting jig which concerns on 5th Embodiment of this invention, Comprising: The state by which the fluid apparatus was set is shown. 図２４に示す圧入治具によるシール部材の圧入手順を示す側面図であって、圧入前の状態を示す。It is a side view which shows the press injection procedure of the sealing member by the press injection jig shown in FIG. 24, Comprising: The state before press injection is shown. 図２４に示す圧入治具によるシール部材の圧入手順を示す側面図であって、加圧時の状態を示す。It is a side view which shows the press-fitting procedure of the sealing member by the press-fitting jig shown in FIG. 24, Comprising: The state at the time of pressurization is shown. 図２４に示す圧入治具によるシール部材の圧入手順を示す側面図であって、圧入後の状態を示す。It is a side view which shows the press-fitting procedure of the sealing member by the press-fitting jig shown in FIG. 24, Comprising: The state after press-fitting is shown. 本発明の第６実施形態に係り、第１及び第２の部品の接続部分に取り付けられた圧入治具の外観斜視図である。It is an external appearance perspective view of the press-fit jig | tool attached to the connection part of 1st and 2nd components concerning 6th Embodiment of this invention. 従来のシール接続部の連結構造を使用した流体機器ユニットの断面図である。It is sectional drawing of the fluid apparatus unit using the connection structure of the conventional seal | sticker connection part.

符号の説明Explanation of symbols

１，９０，１００ 流体機器ユニット
２Ａ、２Ｂ バルブ（流体機器）
４ 継手ブロック（流体機器）
３，８０，９３ 連結部材
９ シール接続部の連結構造
１０ シール部材
１１Ａ，１１Ｂ バルブボディ（第１の部品、第２の部品）
１３Ａ 二次側ポート（第２の流路）
１４Ｂ 一次側ポート（第１の流路）
１７Ａ，１７Ｂ 接続部（第１接続部、第２接続部）
２５ 流路
２６ 接続部
４１ 第１連結ブロック
４２ 第２連結ブロック
４５ ボルト（固定部材）
４９Ａ，４９Ｂ，５９Ａ，５０Ｂ 嵌合凸部
５１Ａ，５１Ｂ，５２Ａ，５２Ｂ 連結側テーパ
６２ 環状溝（シール部）
６４ 圧入代（シール部）
７３Ａ，７３Ｂ 嵌合凹溝
７４Ａ，７４Ｂ 接続部側テーパ
８１ 第１連結ブロック
８２ 第２連結ブロック
８３ 第３連結ブロック
８４ 第４連結ブロック
８６ 被加圧側テーパ
８８ 加圧側テーパ
９１ 分岐管（第１又は第２の部品、流体機器）
９１ａ 嵌合凹溝
９１ｂ 接続部側テーパ
９１ｃ 接続部
９２ エルボ管（第１又は第２の部品、流体機器）
９２ａ 嵌合凹溝
９２ｂ 接続部側テーパ
９２ｃ 接続部
９３ 連結部材
９４，９５，９６ 廻り止め
９８ 第２連結ブロック
９９ シール接続部の連結構造
１０１ 遮蔽シール部材（シール部材）
１０３ 嵌合凹溝
１０４ 接続部側テーパ
１０５ シール接続部の連結構造
１１０ 圧入治具
１１２，１１３ アーム（固定部）
１１７ ガイド棒（可動部）
１１８ ハンドル（駆動部）
１２０ 圧入治具
１２２ ガイド棒（可動部）
１２３ ハンドル（駆動部） 1,90,100 Fluid equipment unit 2A, 2B Valve (fluid equipment)
4 Joint block (fluid equipment)
3, 80, 93 Connecting member 9 Seal connecting portion connecting structure 10 Seal member 11A, 11B Valve body (first component, second component)
13A Secondary port (second flow path)
14B Primary port (first flow path)
17A, 17B connection part (first connection part, second connection part)
25 flow path 26 connection part 41 1st connection block 42 2nd connection block 45 Bolt (fixing member)
49A, 49B, 59A, 50B Fitting convex part 51A, 51B, 52A, 52B Connection side taper 62 Annular groove (seal part)
64 Press-fit allowance (seal part)
73A, 73B Fitting grooves 74A, 74B Connection side taper 81 First connection block 82 Second connection block 83 Third connection block 84 Fourth connection block 86 Pressurized side taper 88 Pressure side taper 91 Branch pipe (first or Second part, fluid equipment)
91a Fitting groove 91b Connection portion side taper 91c Connection portion 92 Elbow pipe (first or second component, fluid device)
92a fitting concave groove 92b connecting portion side taper 92c connecting portion 93 connecting members 94, 95, 96 detent 98 second connecting block 99 connecting structure 101 of seal connecting portion shielding seal member (seal member)
103 fitting concave groove 104 connecting portion side taper 105 seal connecting portion connecting structure 110 press fitting jig 112, 113 arm (fixed portion)
117 Guide rod (movable part)
118 Handle (drive unit)
120 Press-fitting jig 122 Guide rod (movable part)
123 Handle (drive unit)

Claims (10)

第１の部品の第１接続部と第２の部品の第２接続部との間にシール部材を配置し、連結部材によって接続部分を連結するシール接続部の連結構造において、
前記第１及び前記第２接続部は、嵌合凹溝が端面外周に複数設けられ、
前記連結部材は、
固定部材によって固定される第１連結ブロックと第２連結ブロックとを有し、
前記第１及び前記第２連結ブロックに前記嵌合凹溝に嵌合する嵌合凸部が複数設けられている
ことを特徴とするシール接続部の連結構造。 In the connecting structure of the seal connecting portion in which the sealing member is arranged between the first connecting portion of the first component and the second connecting portion of the second component, and the connecting portion is connected by the connecting member,
The first and second connection portions are provided with a plurality of fitting grooves on the outer periphery of the end surface,
The connecting member is
A first connection block and a second connection block fixed by a fixing member;
A coupling structure of seal connecting portions, wherein the first and second coupling blocks are provided with a plurality of fitting convex portions that fit into the fitting concave grooves. 請求項１に記載するシール接続部の連結構造において、
前記嵌合凹溝は、端面側内壁に、前記嵌合凹溝の開口部に向かって前記端面側に傾斜する接続部側テーパを有し、
前記嵌合凸部は、前記接続部側テーパに対応する連結側テーパを有する
ことを特徴とするシール接続部の連結構造。 In the connection structure of the seal | sticker connection part described in Claim 1,
The fitting groove has a connecting portion side taper that is inclined toward the end surface toward the opening of the fitting groove on the end surface side inner wall,
The fitting convex portion has a coupling side taper corresponding to the connection side taper. 請求項１又は請求項２に記載するシール接続部の連結構造において、
前記連結部材は、前記第１及び前記第２の部品に対する回転を阻止する廻り止めが設けられている
ことを特徴とするシール接続部の連結構造。 In the connecting structure of the seal connecting part according to claim 1 or claim 2,
The connecting structure of the seal connecting portion, wherein the connecting member is provided with a detent that prevents rotation with respect to the first and second parts. 請求項１乃至請求項３の何れか一つに記載するシール接続部の連結構造において、
前記第１及び前記第２接続部は、前記シール部材が装着される環状の装着溝を有し、
前記シール部材は、一端面に前記装着溝に嵌合してシールするシール部が形成され、他端面が閉鎖されており、前記他端面外周に前記第１及び前記第２接続部に設けた前記嵌合凹溝及び前記接続部側テーパと同じ嵌合凹溝及び接続部側テーパが設けられている
ことを特徴とするシール接続部の連結構造。 In the connection structure of the seal | sticker connection part as described in any one of Claims 1 thru | or 3,
The first and second connection portions have an annular mounting groove in which the seal member is mounted,
The seal member has a seal portion that is fitted and sealed in the mounting groove on one end surface, the other end surface is closed, and the first and second connection portions are provided on the outer periphery of the other end surface. The coupling structure of the seal connecting portion, wherein the fitting concave groove and the connecting portion side taper are the same as the fitting concave groove and the connecting portion side taper. 請求項１乃至請求項４の何れか一つに記載するシール接続部の連結構造において、
前記連結部材は、前記第１及び前記第２連結ブロックの取付方向、及び、前記第１及び前記第２接続部の接続方向に対して直交する方向から、前記第１及び前記第２連結ブロックが前記端面接続部分を保持する保持部分を挟んで前記第１及び前記第２連結ブロックに取り付けられ、前記第１及び前記第２連結ブロックを保持する第３連結ブロックと第４連結ブロックとを有する
ことを特徴とするシール接続部の連結構造。 In the connection structure of the seal | sticker connection part as described in any one of Claims 1 thru | or 4,
The connecting member includes the first and second connecting blocks in a direction orthogonal to the attaching direction of the first and second connecting blocks and the connecting direction of the first and second connecting portions. It has a third connection block and a fourth connection block, which are attached to the first and second connection blocks with a holding part holding the end face connection part therebetween, and hold the first and second connection blocks. A connecting structure of the seal connecting portion characterized by the above. 請求項５に記載するシール接続部の連結構造において、
前記第１及び前記第２連結ブロックは、前記第３及び前記第４連結ブロックを取り付けられる面から、前記端面接続部分を保持する保持部が設けられた側面と反対側に向かって傾斜する被加圧側テーパを有し、
前記第３及び前記第４連結ブロックは、前記第１及び前記第２連結ブロックに取り付けられる面に前記被加圧側テーパに対応する加圧側テーパを有する
ことを特徴とするシール接続部の連結構造。 In the connection structure of the seal connection part according to claim 5,
The first and second connection blocks are inclined to the side opposite to the side surface on which the holding portion for holding the end surface connection portion is provided from the surface to which the third and fourth connection blocks are attached. Has a compression taper,
The third and fourth connection blocks have a pressure-side taper corresponding to the pressure-side taper on the surfaces attached to the first and second connection blocks. 請求項１乃至請求項６の何れか一つに記載するシール接続部の連結構造において、
前記シール部材は、圧入代を有する第１凹凸条と第２凹凸条を有し、
前記第１及び前記第２接続部は、前記第１凹凸条と前記第２凹凸条に対応する第１凸凹条と第２凸凹条とを有し、
前記第１及び前記第２凸凹条を前記第１及び前記第２凹凸条の圧入代にそれぞれ圧入してシールする
ことを特徴とするシール接続部の連結構造。 In the connection structure of the seal | sticker connection part as described in any one of Claims 1 thru | or 6,
The seal member has a first concavo-convex ridge and a second concavo-convex ridge having a press-fitting allowance,
The first and second connecting portions have a first ridge and a second ridge corresponding to the first ridge and the second ridge,
The connecting structure of the seal connecting portion, wherein the first and second uneven strips are sealed by press-fitting into the press-fitting margins of the first and second uneven strips, respectively. 請求項１乃至請求項７の何れか一つに記載するシール接続部の連結構造において、
前記第１の部品と、前記第２の部品と、前記シール部材と、前記第１連結ブロックと、前記第２連結ブロックは、樹脂を材質とする
ことを特徴とするシール接続部の連結構造。 In the connection structure of the seal | sticker connection part as described in any one of Claim 1 thru | or 7,
The connecting structure of the seal connecting portion, wherein the first part, the second part, the sealing member, the first connecting block, and the second connecting block are made of resin. 請求項１乃至請求項８の何れか一つに記載するシール接続部の連結構造に用いられ、前記シール部材を前記第１及び前記第２接続部に圧入する圧入治具であって、
前記第１の部品を固定する固定部と、
前記固定部が前記第第１の部品を固定する固定位置に向かって直線往復運動する可動部と、
前記可動部に駆動力を与える駆動部とを有する
ことを特徴とする圧入治具。 A press-fitting jig that is used in the connection structure of the seal connection portion according to any one of claims 1 to 8, and that press-fits the seal member into the first and second connection portions,
A fixing portion for fixing the first component;
A movable part that linearly reciprocates toward a fixed position where the fixed part fixes the first part;
A press-fitting jig comprising a driving unit that applies a driving force to the movable unit. 請求項１乃至請求項８の何れか一つに記載するシール接続部の連結構造を用いて、第１流体機器と第２流体機器とを連結していることを特徴とする流体機器ユニット。   A fluid device unit, wherein the first fluid device and the second fluid device are connected using the seal connecting portion connecting structure according to any one of claims 1 to 8.

Images