JP2008226806A - Light source for uv irradiation - Google Patents

Light source for uv irradiation Download PDF

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JP2008226806A
JP2008226806A JP2007106345A JP2007106345A JP2008226806A JP 2008226806 A JP2008226806 A JP 2008226806A JP 2007106345 A JP2007106345 A JP 2007106345A JP 2007106345 A JP2007106345 A JP 2007106345A JP 2008226806 A JP2008226806 A JP 2008226806A
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metal oxide
light source
ultraviolet irradiation
oxide film
tube
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Takashi Ueno
貴史 上野
Takeo Kato
剛雄 加藤
Toshiya Suzuki
俊也 鈴木
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Toshiba Lighting and Technology Corp
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Harison Toshiba Lighting Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a light source for UV irradiation which can prevent a UV irradiation lamp from becoming heated up to a high temperature. <P>SOLUTION: An outer surface of an outer tube 22 is coated by a metal oxide film 4 containing metal oxide composed of one ore more sorts out of TiO<SB>2</SB>, CeO<SB>2</SB>, ZnO<SB>2</SB>, SnO<SB>2</SB>, ZrO<SB>2</SB>. By coating the metal oxide film 4 on the outer tube 22, an area of the metal oxide film 4 becomes larger and a cooling effect of the metal oxide film 4 by a cooling liquid is raised, and, as a result, the UV irradiation lamp can be prevented from becoming heated up to a high temperature. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、紫外線照射ランプと熱線カットフィルターを二重管形の水冷ジャケットに保持した紫外線照射用光源に関するものである。   The present invention relates to a light source for ultraviolet irradiation in which an ultraviolet irradiation lamp and a heat ray cut filter are held in a double-tube water-cooled jacket.

光化学反応用光源は、例えば、樹脂の硬化に用いる。樹脂の硬化に有効な波長域は、一般的には３００〜４００ｎｍあるいは３００〜４３０ｎｍと考えられている。一方、それ以外の波長域の光は、樹脂の硬化に有効でないばかりか、樹脂の温度上昇と劣化をまねくことがある。よって、照射対象には所望の波長成分の紫外線だけを照射するのが望ましい。   The light source for photochemical reaction is used for hardening of resin, for example. The effective wavelength range for resin curing is generally considered to be 300 to 400 nm or 300 to 430 nm. On the other hand, light in other wavelength ranges is not only effective for curing the resin, but may cause a temperature rise and deterioration of the resin. Therefore, it is desirable to irradiate only an ultraviolet ray having a desired wavelength component to the irradiation target.

従来の紫外線照射用光源（以下、「従来光源」という）は、特許文献１にも記載されているように、紫外線照射ランプと紫外域選択波長透過フィルターが、二重管形の水冷ジャケット２において、内管の内表面に３００ｎｍ以下の波長成分を吸収するＴｉＯ２ ，Ｃｅ２Ｏ３ 等の金属酸化物膜を被着した石英ガラス管で構成している。 As described in Patent Document 1, a conventional ultraviolet irradiation light source (hereinafter referred to as “conventional light source”) includes an ultraviolet irradiation lamp and an ultraviolet selective wavelength transmission filter in a double-tube water-cooling jacket 2. constitutes at T i O 2, C e2 O quartz glass tube is deposited a metal oxide film such as 3 to absorb wavelengths below ingredients 300nm on the inner surface of the inner tube.

従来光源では、内管の内側の紫外線照射ランプから光が放射され、そのうちの３００ｎｍ以下の波長成分が金属酸化物膜で吸収される。これにより、３００ｎｍ以下の波長成分は照射対象には達せず、こうして、照射対象である樹脂の温度上昇と劣化を防止することができる。
特開平０６−２６７５０９号公報 In the conventional light source, light is emitted from the ultraviolet irradiation lamp inside the inner tube, and a wavelength component of 300 nm or less is absorbed by the metal oxide film. Thereby, the wavelength component of 300 nm or less does not reach the irradiation target, and thus the temperature rise and deterioration of the resin as the irradiation target can be prevented.
Japanese Patent Laid-Open No. 06-267509

また、従来光源では、水などの冷却液が、水冷ジャケット内を循環する。   In the conventional light source, a coolant such as water circulates in the water cooling jacket.

紫外線照射ランプの消費電力は数ｋＷと大きく、紫外線照射ランプが自身の温度上昇により損傷するのを防止すべく、こうして、冷却水により紫外線照射ランプが冷却される。また、冷却により紫外線照射ランプの出力特性を安定させることができる。   The power consumption of the ultraviolet irradiation lamp is as large as several kW, and the ultraviolet irradiation lamp is thus cooled by the cooling water in order to prevent the ultraviolet irradiation lamp from being damaged by its own temperature rise. Further, the output characteristics of the ultraviolet irradiation lamp can be stabilized by cooling.

しかしながら、従来光源では、３００ｎｍ以下の波長成分が金属酸化物膜で吸収されるので、内管の内表面に金属酸化物膜が被着されているために、ランプが収容された水冷ジャケット内の空間の内部に熱がこもる傾向がある。そのため、紫外線照射ランプが高温になり、紫外線照射ランプが損傷する虞がある。また、高温化により、紫外線照射ランプにおける紫外線の出力特性が不安定になる虞がある。   However, in the conventional light source, since the wavelength component of 300 nm or less is absorbed by the metal oxide film, the metal oxide film is deposited on the inner surface of the inner tube. There is a tendency for heat to accumulate inside the space. Therefore, there is a risk that the ultraviolet irradiation lamp becomes hot and the ultraviolet irradiation lamp is damaged. Moreover, there is a possibility that the output characteristics of the ultraviolet rays in the ultraviolet irradiation lamp become unstable due to the high temperature.

本発明は、上記の課題に鑑みてなされたものであり、その目的とするところは、紫外線照射ランプの高温化防止を図った紫外線照射用光源を提供することにある。   The present invention has been made in view of the above problems, and an object of the present invention is to provide an ultraviolet irradiation light source that prevents the ultraviolet irradiation lamp from being heated to a high temperature.

上記の課題を解決するために、本発明に係る紫外線照射用光源は、紫外線照射ランプと、前記紫外線照射ランプを内包する内管および該内管の外側に設けられた外管を備える二重管形の水冷ジャケットと、この水冷ジャケットの前記外管の内面或いはは外面または前記内管の外面に設けられ、前記紫外線照射ランプから放射される３００ｎｍ以下の波長成分を吸収する手段と、を備えることを特徴とする   In order to solve the above-described problems, a light source for ultraviolet irradiation according to the present invention is a double tube including an ultraviolet irradiation lamp, an inner tube containing the ultraviolet irradiation lamp, and an outer tube provided outside the inner tube. A water-cooling jacket having a shape, and means for absorbing a wavelength component of 300 nm or less emitted from the ultraviolet irradiation lamp, which is provided on the inner surface of the outer tube or the outer surface of the water-cooling jacket or the outer surface of the inner tube. Characterized by

本発明に係る紫外線照射用光源によれば、３００ｎｍ以下の波長成分を吸収する手段を二重管形の水冷ジャケットの外管の内面或いは外面または内管の外面に設けたことで、内管と外管の間に循環する冷却液による冷却効果が高まり、もって、紫外線照射ランプの高温化防止を図ることができる。   According to the light source for ultraviolet irradiation according to the present invention, a means for absorbing a wavelength component of 300 nm or less is provided on the inner surface or the outer surface of the double tube water-cooling jacket or the outer surface of the inner tube. The cooling effect by the coolant circulating between the outer tubes is enhanced, and thus the ultraviolet irradiation lamp can be prevented from being heated to a high temperature.

以下、本発明の実施の形態を図面を参照して説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

［第１の実施の形態］
図１は、第１の実施の形態に係る紫外線照射用光源（第１の実施の形態の説明においては「本光源」という）の概略側面図である。 [First Embodiment]
FIG. 1 is a schematic side view of a light source for ultraviolet irradiation according to the first embodiment (referred to as “main light source” in the description of the first embodiment).

本光源は、紫外線照射ランプ１と水冷ジャケット２と熱線カットフィルター３を備えている。紫外線照射ランプ１は直管状の石英ガラス製発光管の両端に一対の電極を封着し、管内に希ガスと水銀及びＦｅ，Ｓｎ，Ｃｏ，Ｍｇなど紫外域に有効な発光が得られる金属ハロゲン化物が一種以上封入されている。水冷ジャケット２は円筒状の石英ガラス等の透明な材料よりなり、内管２１とその外側に設けられた外管２２を備え、二重管構造となっている。紫外線照射ランプ１は、内管２１に内包されている。   The light source includes an ultraviolet irradiation lamp 1, a water cooling jacket 2, and a heat ray cut filter 3. The ultraviolet irradiation lamp 1 has a pair of electrodes sealed at both ends of a straight tubular quartz glass arc tube, and a metal halogen that can emit light effectively in the ultraviolet region such as rare gas, mercury, Fe, Sn, Co, and Mg. One or more chemical compounds are enclosed. The water cooling jacket 2 is made of a transparent material such as cylindrical quartz glass, and includes an inner tube 21 and an outer tube 22 provided outside thereof, and has a double tube structure. The ultraviolet irradiation lamp 1 is included in the inner tube 21.

ジャケットの外周端部に設けられた接続管２３ａ，２３ｂを通して外部から水などの冷却液が循環される。熱線カットフィルター３は管状の低軟化点ガラスからなり、ランプから放射される光のうち、例えば樹脂の硬化に有効な４３０ｎｍ以下の波長域の光を透過し、４３０ｎｍ以上の波長の可視光を吸収する特性があり、かつランプからの熱による温度上昇を最小限にとどめるため内管２１と外管２２の間に配置され冷却液中に浸漬される。   A coolant such as water is circulated from the outside through connection pipes 23a and 23b provided at the outer peripheral end of the jacket. The heat ray cut filter 3 is made of a tubular low-softening point glass, and transmits light having a wavelength range of 430 nm or less, which is effective for curing the resin, and absorbs visible light having a wavelength of 430 nm or more. In order to minimize the temperature rise due to heat from the lamp, it is disposed between the inner tube 21 and the outer tube 22 and immersed in the coolant.

外管２２の外面には、金属酸化物を含む金属酸化物膜４が被着されている。この金属酸化物は、ＴｉＯ２，ＣｅＯ２，ＺｎＯ２，ＳｎＯ２，ＺｒＯ２の少なくとも１種以上より構成される。 A metal oxide film 4 containing a metal oxide is deposited on the outer surface of the outer tube 22. The metal oxide, T i O 2, C e O 2, Z n O 2, S n O 2, composed of at least one kind of Z r O 2.

金属酸化物膜４は、紫外線照射ランプ１から放射される光のうちの３００ｎｍ以下の波長成分を吸収するように成分調整がなされている。   The metal oxide film 4 is component-adjusted so as to absorb a wavelength component of 300 nm or less of the light emitted from the ultraviolet irradiation lamp 1.

そして、紫外線照射ランプ１から光が放射されると、まず、熱線カットフィルター３が、４３０ｎｍ以上の波長成分を吸収する。次に、外管２２の外面に被着した金属酸化物膜４が３００ｎｍ以下の波長成分を吸収する。したがって、樹脂の硬化に有効な３００〜４３０ｎｍの波長域の紫外線が水冷ジャケット２を透過し、樹脂などの照射対象に照射される。   And when light is radiated | emitted from the ultraviolet irradiation lamp 1, the heat ray cut filter 3 will absorb a wavelength component more than 430 nm first. Next, the metal oxide film 4 deposited on the outer surface of the outer tube 22 absorbs a wavelength component of 300 nm or less. Therefore, ultraviolet rays having a wavelength range of 300 to 430 nm effective for curing the resin are transmitted through the water-cooling jacket 2 and irradiated to an irradiation target such as a resin.

図２は、紫外線照射ランプ１の管壁の温度（発光管管壁温度という）を本光源と従来光源とで比較した図である。   FIG. 2 is a diagram comparing the temperature of the tube wall of the ultraviolet irradiation lamp 1 (referred to as the arc tube tube temperature) between this light source and a conventional light source.

図２から明らかなように、本光源では、外管２２の外面に金属酸化物膜４を被着したことにより、その発光管管壁温度を、従来光源の発光管管壁温度より低くすることができる。   As is apparent from FIG. 2, in this light source, the metal tube 4 is deposited on the outer surface of the outer tube 22, so that the temperature of the arc tube tube wall is made lower than that of the conventional light source. Can do.

これは、金属酸化物膜４を外管２２に被着したことで、金属酸化物膜４の面積が広くなり、冷却液による金属酸化物膜４の冷却効果が高まったことによるものと考えることができる。   This is considered to be due to the fact that the metal oxide film 4 is deposited on the outer tube 22, thereby increasing the area of the metal oxide film 4 and increasing the cooling effect of the metal oxide film 4 by the cooling liquid. Can do.

したがって、本光源によれば、紫外線照射ランプ１の高温化を防止でき、よって、紫外線照射ランプ１の損傷を防止し、紫外線照射ランプ１における紫外線の出力特性を安定化させることができる。   Therefore, according to the present light source, it is possible to prevent the ultraviolet irradiation lamp 1 from being heated to a high temperature, thereby preventing the ultraviolet irradiation lamp 1 from being damaged and stabilizing the output characteristics of the ultraviolet light in the ultraviolet irradiation lamp 1.

［第２の実施の形態］
図３は、第２の実施の形態に係る紫外線照射用光源（第２の実施の形態の説明においては「本光源」という）の概略側面図である。 [Second Embodiment]
FIG. 3 is a schematic side view of a light source for ultraviolet irradiation according to the second embodiment (referred to as “main light source” in the description of the second embodiment).

本光源は、第１の実施の形態に係る紫外線照射用光源の構成要素と同様なものを備えるので、その要素には同一符号を付与して説明を簡略化し、相違点を中心に説明する。   Since this light source includes the same components as those of the light source for ultraviolet irradiation according to the first embodiment, the same reference numerals are given to the components to simplify the description, and differences will be mainly described.

本光源は、紫外線照射ランプ１と水冷ジャケット２と熱線カットフィルター３を備えている。   The light source includes an ultraviolet irradiation lamp 1, a water cooling jacket 2, and a heat ray cut filter 3.

内管２１の外面には、金属酸化物を含む金属酸化物膜４ａが被着されている。また、外管２２の内面には、同じ金属酸化物を含む金属酸化物膜４ａが被着されている。この金属酸化物は、ＴｉＯ２，ＣｅＯ２，ＺｎＯ２，ＳｎＯ２，ＺｒＯ２の少なくとも１種以上より構成される。 A metal oxide film 4 a containing a metal oxide is deposited on the outer surface of the inner tube 21. Further, a metal oxide film 4 a containing the same metal oxide is deposited on the inner surface of the outer tube 22. The metal oxide, T i O 2, C e O 2, Z n O 2, S n O 2, composed of at least one kind of Z r O 2.

金属酸化物膜４ａ、４ｂは共に、紫外線照射ランプ１から放射される光のうちの３００ｎｍ以下の波長成分を吸収するように成分調整がなされている。   Both the metal oxide films 4a and 4b are adjusted so as to absorb a wavelength component of 300 nm or less of the light emitted from the ultraviolet irradiation lamp 1.

しかも、その波長成分が外側の金属酸化物膜４ｂでも吸収されるように、内側の金属酸化物膜４ａは、その波長成分に対しての透過性を有する。   In addition, the inner metal oxide film 4a is transparent to the wavelength component so that the wavelength component is absorbed by the outer metal oxide film 4b.

そして、紫外線照射ランプ１から光が放射されると、まず、内管２１の外面に被着した金属酸化物膜４ａが３００ｎｍ以下の波長成分の一部を吸収する。次に、熱線カットフィルター３が、４３０ｎｍ以上の波長成分を吸収する。次に、外管２２の内面に被着した金属酸化物膜４ｂが、金属酸化物膜４ａを通過した３００ｎｍ以下の波長成分を吸収する。したがって、樹脂の硬化に有効な３００〜４３０ｎｍの波長域の紫外線が水冷ジャケット２を透過し、樹脂などの照射対象に照射される。   When light is emitted from the ultraviolet irradiation lamp 1, first, the metal oxide film 4a deposited on the outer surface of the inner tube 21 absorbs part of the wavelength component of 300 nm or less. Next, the heat ray cut filter 3 absorbs a wavelength component of 430 nm or more. Next, the metal oxide film 4b deposited on the inner surface of the outer tube 22 absorbs a wavelength component of 300 nm or less that has passed through the metal oxide film 4a. Therefore, ultraviolet rays having a wavelength range of 300 to 430 nm effective for curing the resin are transmitted through the water-cooling jacket 2 and irradiated to an irradiation target such as a resin.

図示しないが、本光源では、内管２１の外面と外管２２の内面に金属酸化物膜を被着したことにより、その発光管管壁温度が、従来光源の発光管管壁温度より低くなるという実験結果が得られた。   Although not shown in the drawings, in this light source, the metal tube is deposited on the outer surface of the inner tube 21 and the inner surface of the outer tube 22, so that the arc tube tube wall temperature becomes lower than the arc tube tube wall temperature of the conventional light source. The experimental results were obtained.

これは、内管２１の外面と外管２２の内面に金属酸化物膜を被着したことで、金属酸化物膜の面積が広くなり、冷却液による金属酸化物膜の冷却効果が高まったことによるものと考えることができる。   This is because the metal oxide film was deposited on the outer surface of the inner tube 21 and the inner surface of the outer tube 22, thereby increasing the area of the metal oxide film and increasing the cooling effect of the metal oxide film by the coolant. It can be considered that.

したがって、本光源によれば、紫外線照射ランプ１の高温化を防止でき、よって、紫外線照射ランプ１の損傷を防止し、紫外線照射ランプ１における紫外線の出力特性を安定化させることができる。   Therefore, according to the present light source, it is possible to prevent the ultraviolet irradiation lamp 1 from being heated to a high temperature, thereby preventing the ultraviolet irradiation lamp 1 from being damaged and stabilizing the output characteristics of the ultraviolet light in the ultraviolet irradiation lamp 1.

［第３の実施の形態］
図４は、第３の実施の形態に係る紫外線照射用光源（第３の実施の形態の説明においては「本光源」という）の概略側面図である。 [Third Embodiment]
FIG. 4 is a schematic side view of a light source for ultraviolet irradiation (referred to as “main light source” in the description of the third embodiment) according to the third embodiment.

本光源は、第２の実施の形態に係る紫外線照射用光源の構成要素と同様なものを備えるので、その要素には同一符号を付与して説明を簡略化し、相違点を中心に説明する。   Since the present light source includes the same components as those of the light source for ultraviolet irradiation according to the second embodiment, the same reference numerals are given to the components to simplify the description, and differences will be mainly described.

本光源は、紫外線照射ランプ１と水冷ジャケット２を備える一方、熱線カットフィルター３を備えない。   The light source includes an ultraviolet irradiation lamp 1 and a water cooling jacket 2, but does not include a heat ray cut filter 3.

内管２１の外面には、金属酸化物を含む金属酸化物膜４ｃが被着されている。また、外管２２の内面には、同じ金属酸化物を含む金属酸化物膜４ｄが被着されている。   A metal oxide film 4 c containing a metal oxide is deposited on the outer surface of the inner tube 21. A metal oxide film 4d containing the same metal oxide is deposited on the inner surface of the outer tube 22.

金属酸化物膜４ｃ、４ｄは共に、紫外線照射ランプ１から放射される光のうちの３００ｎｍ以下の波長成分を吸収するように少なくともＴｉＯ２，ＣｅＯ２，ＺｎＯ２，ＳｎＯ２，ＺｒＯ２の１種以上を含んで構成されるとともに４００ｎｍ以上の波長成分を吸収するようにニッケルを添加したリン酸塩とコバルトを添加したリン酸塩の少なくとも１種を含んで構成され成分調整がなされている。 Metal oxide film 4c, 4d are both at least T i O 2 to absorb 300nm or less wavelength components of the light emitted from the ultraviolet irradiation lamp 1, C e O 2, Z n O 2, S n Containing at least one of O 2 and Z r O 2 and including at least one of a phosphate added with nickel and a phosphate added with cobalt so as to absorb a wavelength component of 400 nm or longer. Consists of component adjustments.

しかも、その波長成分が外側の金属酸化物膜４ｄでも吸収されるように、内側の金属酸化物膜４ｃは、その波長成分に対しての透過性を有する。   Moreover, the inner metal oxide film 4c is transparent to the wavelength component so that the wavelength component is also absorbed by the outer metal oxide film 4d.

そして、紫外線照射ランプ１から光が放射されると、まず、内管２１の外面に被着した金属酸化物膜４ｃが３００ｎｍ以下の波長成分の一部と４００ｎｍ以上の波長成分の一部を吸収する。次に、外管２２の内面に被着した金属酸化物膜４ｄが、金属酸化物膜４ｃを通過した３００ｎｍ以下の波長成分と４００ｎｍ以上の波長成分を吸収する。したがって、樹脂の硬化に有効な３００〜４００ｎｍの波長域の紫外線が水冷ジャケット２を透過し、樹脂などの照射対象に照射される。   When light is emitted from the ultraviolet irradiation lamp 1, first, the metal oxide film 4c deposited on the outer surface of the inner tube 21 absorbs part of the wavelength component of 300 nm or less and part of the wavelength component of 400 nm or more. To do. Next, the metal oxide film 4d deposited on the inner surface of the outer tube 22 absorbs the wavelength component of 300 nm or less and the wavelength component of 400 nm or more that have passed through the metal oxide film 4c. Therefore, ultraviolet rays having a wavelength range of 300 to 400 nm effective for curing the resin are transmitted through the water-cooling jacket 2 and irradiated to an irradiation target such as a resin.

図示しないが、本光源では、内管２１の外面と外管２２の内面に金属酸化物膜を被着したことにより、その発光管管壁温度が、従来光源の発光管管壁温度より低くなるという実験結果が得られた。その理由は、第２の実施の形態と同様であると考えることができる。   Although not shown, in this light source, the metal tube is deposited on the outer surface of the inner tube 21 and the inner surface of the outer tube 22, so that the arc tube wall temperature becomes lower than the arc tube tube temperature of the conventional light source. The experimental results were obtained. The reason can be considered to be the same as in the second embodiment.

したがって、本光源によれば、紫外線照射ランプ１の高温化を防止でき、よって、紫外線照射ランプ１の損傷を防止し、紫外線照射ランプ１における紫外線の出力特性を安定化させることができる。   Therefore, according to the present light source, it is possible to prevent the ultraviolet irradiation lamp 1 from being heated to a high temperature, thereby preventing the ultraviolet irradiation lamp 1 from being damaged and stabilizing the output characteristics of the ultraviolet light in the ultraviolet irradiation lamp 1.

なお、冷却液による金属酸化物膜の冷却効果が高まることに鑑みれば、上記の実施の形態で用いた金属酸化物膜を外管の内面だけに設けてもよい。   In view of the fact that the cooling effect of the metal oxide film by the cooling liquid is increased, the metal oxide film used in the above embodiment may be provided only on the inner surface of the outer tube.

第１の実施の形態に係る紫外線照射用光源の概略側面図である。It is a schematic side view of the light source for ultraviolet irradiation which concerns on 1st Embodiment. 発光管管壁温度を本光源と従来光源とで比較した図である。It is the figure which compared the arc tube wall temperature with this light source and the conventional light source. 第２の実施の形態に係る紫外線照射用光源の概略側面図である。It is a schematic side view of the light source for ultraviolet irradiation which concerns on 2nd Embodiment. 第３の実施の形態に係る紫外線照射用光源の概略側面図である。It is a schematic side view of the light source for ultraviolet irradiation which concerns on 3rd Embodiment.

符号の説明Explanation of symbols

１…紫外線照射ランプ
２…水冷ジャケット
２１…水冷ジャケット２の内管
２２…水冷ジャケット２の外管
２３ａ、２３ｂ…接続管
３…熱線カットフィルター
４、４ａ、４ｂ、４ｃ、４ｄ…金属酸化物膜 DESCRIPTION OF SYMBOLS 1 ... Ultraviolet irradiation lamp 2 ... Water cooling jacket 21 ... Inner pipe | tube of the water cooling jacket 2 22 ... Outer pipe | tube 23a, 23b ... Connection pipe | tube 3 ... Heat ray cut filter 4, 4a, 4b, 4c, 4d ... Metal oxide film

Claims (3)

紫外線照射ランプと、
前記紫外線照射ランプを内包する内管および該内管の外側に設けられた外管を備える二重管形の水冷ジャケットと、
この水冷ジャケットの前記外管の内面或いは外面または前記内管の外面に設けられ、前記紫外線照射ランプから放射される３００ｎｍ以下の波長成分を吸収する手段と、
を備えることを特徴とする紫外線照射用光源。 An ultraviolet irradiation lamp,
A double-tubular water-cooling jacket comprising an inner tube containing the ultraviolet irradiation lamp and an outer tube provided outside the inner tube;
Means for absorbing a wavelength component of 300 nm or less emitted from the ultraviolet irradiation lamp, provided on the inner surface or outer surface of the outer tube or the outer surface of the inner tube of the water-cooling jacket;
An ultraviolet light source characterized by comprising: 前記３００ｎｍ以下の波長成分を吸収する手段は、金属酸化物を含む金属酸化物膜とすることを特徴とする請求項１記載の紫外線照射用光源。   2. The ultraviolet light source according to claim 1, wherein the means for absorbing a wavelength component of 300 nm or less is a metal oxide film containing a metal oxide. 前記金属酸化物は、ＴｉＯ２，ＣｅＯ２，ＺｎＯ２，ＳｎＯ２，ＺｒＯ２の少なくとも１種以上より構成されることを特徴とする請求項２記載の紫外線照射用光源。 The metal oxide, ultraviolet T i O 2, C e O 2, Z n O 2, S n O 2, according to claim 2, characterized in that it is composed of at least one kind of Z r O 2 Light source for irradiation.
JP2007106345A 2007-02-15 2007-04-13 Light source for uv irradiation Pending JP2008226806A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009151954A (en) * 2007-12-18 2009-07-09 Totsuken:Kk Water-cooled ultraviolet irradiating device
JP2011076892A (en) * 2009-09-30 2011-04-14 Harison Toshiba Lighting Corp Metal halide lamp, and ultraviolet irradiation device
JP2011245479A (en) * 2010-04-27 2011-12-08 Harison Toshiba Lighting Corp Ultraviolet irradiation apparatus, ultraviolet irradiation method, and method for manufacturing of ultraviolet irradiation apparatus
CN105353565A (en) * 2015-12-15 2016-02-24 深圳市华星光电技术有限公司 Irradiation machine for liquid crystal alignment

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009151954A (en) * 2007-12-18 2009-07-09 Totsuken:Kk Water-cooled ultraviolet irradiating device
JP2011076892A (en) * 2009-09-30 2011-04-14 Harison Toshiba Lighting Corp Metal halide lamp, and ultraviolet irradiation device
JP2011245479A (en) * 2010-04-27 2011-12-08 Harison Toshiba Lighting Corp Ultraviolet irradiation apparatus, ultraviolet irradiation method, and method for manufacturing of ultraviolet irradiation apparatus
CN102306609A (en) * 2010-04-27 2012-01-04 哈利盛东芝照明公司 Ultraviolet irradiation apparatus, ultraviolet irradiation method, and method for manufacturing ultraviolet irradiation apparatus
TWI497560B (en) * 2010-04-27 2015-08-21 Harison Toshiba Lighting Corp Ultraviolet ray irradiation apparatus, ultraviolet irradiation method, and ultraviolet ray irradiation apparatus
CN105353565A (en) * 2015-12-15 2016-02-24 深圳市华星光电技术有限公司 Irradiation machine for liquid crystal alignment

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