JP2008224630A - Angular velocity sensor, its manufacturing method, and electronic device - Google Patents

Angular velocity sensor, its manufacturing method, and electronic device Download PDF

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JP2008224630A
JP2008224630A JP2007067641A JP2007067641A JP2008224630A JP 2008224630 A JP2008224630 A JP 2008224630A JP 2007067641 A JP2007067641 A JP 2007067641A JP 2007067641 A JP2007067641 A JP 2007067641A JP 2008224630 A JP2008224630 A JP 2008224630A
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JP5050590B2 (en
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Junichi Honda
順一 本多
Kazuo Takahashi
和夫 高橋
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Sony Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor having satisfactory noise characteristics without leaking vibration to the outside with simple constitution. <P>SOLUTION: In the angular velocity sensor 100, S1:S2(=S3)=2:1 is satisfied, where S1 is an area of the substantial first drive area by an upper layer electrode 141 for first driving, a lower layer electrode 121 for first driving, and a piezoelectric thin film 131 held therebetween, and S2, S3 are areas of second substantial drive areas by upper layer electrodes 142, 143 for second driving, lower layer electrodes 122, 123 for second driving, and piezoelectric thin films 132, 133 held therebetween. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、例えば、ビデオカメラの手振れ検知や、バーチャルリアリティ装置における動作検知や、カーナビゲーションシステムにおける方向検知などに用いられる角速度センサに関し、詳しくは、音叉型の振動アームを有する小型の角速度センサ、角速度センサの製造方法及び電子機器に関する。   The present invention relates to an angular velocity sensor used for, for example, a camera shake detection of a video camera, an operation detection in a virtual reality device, a direction detection in a car navigation system, and more specifically, a small angular velocity sensor having a tuning fork type vibration arm, The present invention relates to a method for manufacturing an angular velocity sensor and an electronic apparatus.

従来より、民生用の角速度センサとしては、片持ちや両持ちの振動音片型振動子や、音叉型振動子を所定の共振周波数で振動させておき、角速度の影響によって生じるコリオリ力を圧電素子などで検出することによって角速度を検出する、いわゆる振動型のジャイロセンサ（以下、振動型ジャイロセンサと呼ぶ。）が、広く使用されている。   Conventionally, as an angular velocity sensor for consumer use, a Coriolis force generated by the influence of an angular velocity is obtained by vibrating a cantilever type vibrator or a tuning fork type vibrator with a predetermined resonance frequency as a piezoelectric element. A so-called vibration-type gyro sensor (hereinafter referred to as a vibration-type gyro sensor) that detects an angular velocity by, for example, the detection by a method or the like is widely used.

振動型ジャイロセンサは、単純な機構、短い起動時間、安価で製造可能といった利点を有しており、例えば、ビデオカメラ、バーチャルリアリティ装置、カーナビゲーションシステムなどの電子機器に搭載され、それぞれ手振れ検知、動作検知、方向検知などをする際のセンサとして活用されている。   The vibration-type gyro sensor has advantages such as a simple mechanism, a short start-up time, and low-cost manufacturing. For example, it is mounted on electronic devices such as a video camera, a virtual reality device, and a car navigation system. It is used as a sensor for motion detection and direction detection.

振動型ジャイロセンサは、搭載される電子機器の小型化、高性能化に伴い、小型化、高性能化が要求されている。例えば、電子機器の多機能化のため、他の用途で用いる各種センサと組み合わせて、振動型ジャイロセンサを一基板上に搭載させ、小型化を図るといった要請がある。   The vibration type gyro sensor is required to be downsized and improved in accordance with downsizing and high performance of electronic devices to be mounted. For example, in order to increase the functionality of electronic devices, there is a demand to reduce the size by mounting a vibration gyro sensor on one substrate in combination with various sensors used for other purposes.

従来は、振動子としてＰＺＴなどの圧電材料を機械加工による薄片状に加工し、バネなどで保持し、電気信号を加えて振動させる構成のジャイロセンサが一般的であったが、小型化が難しかった。そこで、例えば基板にＳｉを使い、ＰＺＴをスパッタやゾルゲルなどで基板上に薄膜として形成し、さらに基板の所定部分に対するエッチングを行い、断面が方形状の４角柱の振動子を薄膜技術により一枚の基板から同時に多数個形成する技術が開発されている。   Conventionally, a gyro sensor has been generally used in which a piezoelectric material such as PZT is processed into a thin piece by machining, held by a spring, and vibrated by applying an electrical signal as a vibrator. However, downsizing is difficult. It was. Therefore, for example, Si is used for the substrate, PZT is formed as a thin film on the substrate by sputtering or sol-gel, etc., a predetermined portion of the substrate is etched, and a quadrangular prism vibrator having a rectangular cross section is formed by thin film technology. A technique for forming a large number of substrates simultaneously has been developed.

角速度を検出する振動子の形状としては、片持ち振動子、両持ち振動子などがあるが、ジャイロセンサはコリオリ力による微小な歪を検出する必要があるため、外部振動などに干渉を受けない構成が有利であり、片持ち振動子を並べた音叉型が開発されてきている（例えば特許文献１参照）。
特開平７−８３６７１号公報（図２参照） The shape of the vibrator that detects the angular velocity includes a cantilever vibrator and a double-handed vibrator, but the gyro sensor needs to detect minute distortions due to the Coriolis force, so it is not affected by external vibration. A configuration is advantageous, and a tuning fork type in which cantilever vibrators are arranged has been developed (for example, see Patent Document 1).
Japanese Patent Laid-Open No. 7-83671 (see FIG. 2)

特許文献１に示されたジャイロのように、３本の振動子の駆動に供する電極にそれぞれ電圧を印加する際、３本の振動子の駆動電極が仮に同じ面積で同じ位置に配置されているとすると、中央の振動子に対して、両側の振動子も同等の動作をする虞があり、振動のバランスがくずれ、振動子３本間でのモーメントのバランスが吊り合わず、３本の振動子から外部に振動の漏れが発生したり、ノイズ特性などが劣化する場合がある。   As in the gyro shown in Patent Document 1, when voltages are respectively applied to the electrodes used for driving the three vibrators, the drive electrodes of the three vibrators are arranged at the same position with the same area. Then, there is a possibility that the vibrators on both sides perform the same operation with respect to the central vibrator, the vibration balance is lost, and the balance of moments between the three vibrators is not suspended. There is a case where vibration leaks from the outside to the outside or noise characteristics are deteriorated.

更に、駆動電極を供する電源に対しても、振動量と電極面積のバランスがくずれ、例えば駆動電力を与えた以上に共鳴動作により振動子の振動量が増えるような場合は振動子の振動により発生する電荷が電源に戻ってしまいノイズを発生することもある。   Furthermore, the balance between the amount of vibration and the electrode area is also lost for the power supply that provides the drive electrode. For example, if the vibration amount of the vibrator increases due to the resonance operation more than the drive power is applied, the vibration is caused by the vibrator The generated charge may return to the power source and generate noise.

以上のような事情に鑑み、本発明の目的は、簡単な構成で外部に対して振動が漏れることがなく、ノイズ特性が良好な角速度センサ、角速度センサの製造方法及び電子機器を提供することにある。   In view of the circumstances as described above, an object of the present invention is to provide an angular velocity sensor, a manufacturing method of the angular velocity sensor, and an electronic device that have a simple configuration and vibrations do not leak to the outside and have good noise characteristics. is there.

上記目的を達成するため、本発明に係る角速度センサは、第１のアーム領域及び前記第１のアーム領域に隣接するように第２のアーム領域が設けられた非圧電材料からなる基板と、前記基板上の前記第１のアーム領域に形成された第１の駆動用下層電極と、前記基板上の前記第２のアーム領域に形成された第２の駆動用下層電極と、前記第１の及び第２の駆動用下層電極上に形成された圧電薄膜と、前記圧電薄膜を挟んで第１の駆動用下層電極と対向するように前記圧電膜薄膜上に形成された第１の駆動用上層電極と、前記圧電薄膜を挟んで第２の駆動用下層電極と対向するように前記圧電膜薄膜上に形成された第２の駆動用上層電極と、前記第１の駆動用上層電極を両側から挟むように前記圧電薄膜上に形成された一対の検出電極とを具備し、前記第１の駆動用上層電極、前記第１の駆動用下層電極及びこれらに挟まれる圧電薄膜による実質的な第１の駆動領域の面積及び位置に対して、前記第２の駆動用上層電極、前記第２の駆動用下層電極及びこれらに挟まれる圧電薄膜による実質的な第２の駆動領域の面積及び形成位置のうち少なくとも一方が前記第１のアーム領域の振動を打ち消すように規定されていることを特徴とする。   In order to achieve the above object, an angular velocity sensor according to the present invention includes a first arm region and a substrate made of a non-piezoelectric material provided with a second arm region so as to be adjacent to the first arm region, A first driving lower layer electrode formed in the first arm region on the substrate; a second driving lower layer electrode formed in the second arm region on the substrate; A piezoelectric thin film formed on the second driving lower layer electrode, and a first driving upper layer electrode formed on the piezoelectric thin film so as to face the first driving lower layer electrode with the piezoelectric thin film interposed therebetween A second driving upper layer electrode formed on the piezoelectric film thin film so as to face the second driving lower layer electrode with the piezoelectric thin film interposed therebetween, and the first driving upper layer electrode sandwiched from both sides And a pair of detection electrodes formed on the piezoelectric thin film The second driving upper layer electrode with respect to the substantial area and position of the first driving upper layer electrode, the first driving lower layer electrode, and the piezoelectric thin film sandwiched between them. In addition, at least one of the area and the formation position of the second driving region substantially defined by the second driving lower layer electrode and the piezoelectric thin film sandwiched between the second driving lower layer electrode is defined so as to cancel the vibration of the first arm region. It is characterized by being.

本発明では、第１の駆動用上層電極、第１の駆動用下層電極及びこれらに挟まれる圧電薄膜による実質的な第１の駆動領域の面積及び位置に対して、第２の駆動用上層電極、第２の駆動用下層電極及びこれらに挟まれる圧電薄膜による実質的な第２の駆動領域の面積及び形成位置のうち少なくとも一方が第１のアーム領域の振動を打ち消すように規定されているので、つまり実質的な第２の駆動領域の面積や形成位置を第１のアーム領域の振動を打ち消すように規定するように構成しさえすればよいので、簡単な構成で外部に対して振動が漏れることがなく、ノイズ特性も良好となる。   In the present invention, the second driving upper layer electrode, the first driving lower layer electrode, and the second driving upper layer electrode with respect to the substantial area and position of the first driving region formed by the piezoelectric thin film sandwiched between them. Since at least one of the area and the formation position of the second driving region by the second driving lower layer electrode and the piezoelectric thin film sandwiched between them is defined so as to cancel the vibration of the first arm region. That is, it is only necessary to define the area and formation position of the substantial second drive region so as to cancel the vibration of the first arm region, so that vibration leaks to the outside with a simple configuration. And noise characteristics are also improved.

前記第２のアーム領域は、前記第１のアーム領域を挟むように２つ設けられ、それぞれの前記第２のアーム領域に前記第２の駆動用上層電極、前記第２の駆動用下層電極及びこれらに挟まれる圧電薄膜による第２の駆動領域が形成されていることがより好ましい。   Two second arm regions are provided so as to sandwich the first arm region, and each of the second arm regions includes the second driving upper layer electrode, the second driving lower layer electrode, and More preferably, a second drive region is formed by a piezoelectric thin film sandwiched between these.

本発明では、第２のアーム領域が第１のアーム領域を挟むように２つ設けられ、第１のアーム領域に対してこの２つの第２のアーム領域によって第１のアーム領域の振動を打ち消しているので、これらのアーム領域の振動によって回転モーメントが発生するようなことはなくなり、より正確な角速度の検出が可能となる。つまりアームを２本として一方を角速度を検出するためのアームとし、他方をそのアームの振動を打ち消すためのアームにする構成も本発明の範囲に含まれるものであるが、その場合には振動時にアーム間のバランスが悪く、回転モーメントが生じるおそれがある。これに対して、第２のアーム領域を第１のアーム領域を挟むように２つ設けられることで、このような回転モーメントが発生するようなことはなくなる。   In the present invention, two second arm regions are provided so as to sandwich the first arm region, and the vibration of the first arm region is canceled by the two second arm regions with respect to the first arm region. Therefore, no rotation moment is generated by the vibration of these arm regions, and the angular velocity can be detected more accurately. In other words, a configuration in which two arms are used and one is an arm for detecting angular velocity and the other is an arm for canceling the vibration of the arm is also included in the scope of the present invention. There is a risk that the balance between the arms is poor and a rotational moment is generated. In contrast, by providing two second arm regions so as to sandwich the first arm region, such a rotational moment is not generated.

その場合には、以下の形態が好ましい。
（１）第１の駆動領域とそれぞれの第２の駆動領域の形成位置をほぼ等しくして、第１の駆動領域とそれぞれの第２の駆動領域の面積比をほぼ２：１とする。
（２）第１の駆動領域とそれぞれの第２の駆動領域の面積をほぼ等しくして、それぞれの第２の駆動領域の形成位置を第１の駆動領域の形成位置よりも第１及び第２のアーム領域の基部からほぼ２倍離れさせる。
（３）第１及び第２のアーム領域の基部から先端部までを三等分し、第１のアーム領域の基部から先端部まで三等分したそれぞれの第１の駆動領域の面積を基部から順番にＳｃａ、Ｓｃｂ、Ｓｃｃとし、第２のアーム領域の基部から先端部まで三等分したそれぞれの第２の駆動領域の面積を基部から順番にＳｓａ、Ｓｓｂ、Ｓｓｃとし、更にＳｃ＝４×Ｓｃａ＋２×Ｓｃｂ＋１×Ｓｃｃ、Ｓｓ＝４×Ｓｓａ＋２×Ｓｓｂ＋１×Ｓｓｃとしたとき、ＳｃとＳｓとの比をほぼ２：１とする。 In that case, the following forms are preferable.
(1) The formation positions of the first drive region and the respective second drive regions are substantially equal, and the area ratio between the first drive region and each of the second drive regions is approximately 2: 1.
(2) The areas of the first drive region and the respective second drive regions are made substantially equal, and the formation position of each of the second drive regions is more than the first and second formation positions than the formation position of the first drive region. The base of the arm region is about twice as far away.
(3) The first and second arm regions are divided into three equal parts from the base part to the tip part, and the areas of the respective first drive areas divided into three parts from the base part to the tip part of the first arm area from the base part. Sca, Scb, Scc in order, the area of each second drive region divided into three equal parts from the base part to the tip part of the second arm region, Ssa, Ssb, Ssc in order from the base part, and Sc = 4 × When Sca + 2 × Scb + 1 × Scc and Ss = 4 × Ssa + 2 × Ssb + 1 × Ssc, the ratio of Sc to Ss is approximately 2: 1.

本発明の別の観点に係る角速度センサの製造方法は、第１のアーム領域及び前記第１のアーム領域に隣接するように第２のアーム領域が設けられた非圧電材料からなる基板を形成する工程と、前記基板上の前記第１のアーム領域に第１の駆動用下層電極及び前記第２のアーム領域に第２の駆動用下層電極をそれぞれ形成する工程と、前記第１の及び第２の駆動用下層電極上に圧電薄膜を形成する工程と、前記圧電薄膜を挟んで第１の駆動用下層電極と対向するように第１の駆動用上層電極、前記圧電薄膜を挟んで第２の駆動用下層電極と対向するように第２の駆動用上層電極及び前記第１の駆動用上層電極を両側から挟むように一対の検出電極を前記圧電薄膜上に形成する工程とを具備し、前記第１の駆動用上層電極、前記第１の駆動用下層電極及びこれらに挟まれる圧電薄膜による実質的な第１の駆動領域の面積及び位置に対して、前記第２の駆動用上層電極、前記第２の駆動用下層電極及びこれらに挟まれる圧電薄膜による実質的な第２の駆動領域の面積及び形成位置のうち少なくとも一方が前記第１のアーム領域の振動を打ち消すように規定されているを具備する。   In a method of manufacturing an angular velocity sensor according to another aspect of the present invention, a substrate made of a non-piezoelectric material provided with a first arm region and a second arm region so as to be adjacent to the first arm region is formed. Forming a first driving lower layer electrode in the first arm region and a second driving lower layer electrode in the second arm region on the substrate, and the first and second steps, respectively. Forming a piezoelectric thin film on the driving lower electrode, and a second driving upper electrode and the piezoelectric thin film so as to face the first driving lower electrode across the piezoelectric thin film. Forming a pair of detection electrodes on the piezoelectric thin film so as to sandwich the second driving upper layer electrode and the first driving upper layer electrode from both sides so as to face the driving lower layer electrode, First driving upper layer electrode, first driving lower layer The second driving upper layer electrode, the second driving lower layer electrode, and the piezoelectric thin film sandwiched between the second driving upper layer electrode and the area and position of the substantial first driving region by the pole and the piezoelectric thin film sandwiched therebetween At least one of the substantial area and the formation position of the second drive region is defined so as to cancel the vibration of the first arm region.

本発明の更に別の観点に係る電子機器は、第１のアーム領域及び前記第１のアーム領域に隣接するように第２のアーム領域が設けられた非圧電材料からなる基板と、前記基板上の前記第１のアーム領域に形成された第１の駆動用下層電極と、前記基板上の前記第２のアーム領域に形成された第２の駆動用下層電極と、前記第１の及び第２の駆動用下層電極上に形成された圧電薄膜と、前記圧電薄膜を挟んで第１の駆動用下層電極と対向するように前記圧電膜薄膜上に形成された第１の駆動用上層電極と、前記圧電薄膜を挟んで第２の駆動用下層電極と対向するように前記圧電膜薄膜上に形成された第２の駆動用上層電極と、前記第１の駆動用上層電極を両側から挟むように前記圧電薄膜上に形成された一対の検出電極とを具備し、前記第１の駆動用上層電極、前記第１の駆動用下層電極及びこれらに挟まれる圧電薄膜による実質的な第１の駆動領域の面積及び位置に対して、前記第２の駆動用上層電極、前記第２の駆動用下層電極及びこれらに挟まれる圧電薄膜による実質的な第２の駆動領域の面積及び形成位置のうち少なくとも一方が前記第１のアーム領域の振動を打ち消すように規定されている角速度センサと、前記角速度センサを搭載する機器本体とを具備する。   An electronic device according to still another aspect of the present invention includes a first arm region, a substrate made of a non-piezoelectric material provided with a second arm region adjacent to the first arm region, and the substrate. A first driving lower layer electrode formed in the first arm region, a second driving lower layer electrode formed in the second arm region on the substrate, the first and second A piezoelectric thin film formed on the driving lower layer electrode, and a first driving upper layer electrode formed on the piezoelectric thin film so as to face the first driving lower layer electrode with the piezoelectric thin film interposed therebetween, A second driving upper layer electrode formed on the piezoelectric film thin film so as to face the second driving lower layer electrode with the piezoelectric thin film interposed therebetween, and the first driving upper layer electrode sandwiched from both sides A pair of detection electrodes formed on the piezoelectric thin film, the first electrode The second driving upper layer electrode, the second driving, with respect to the area and position of the substantial first driving region by the moving upper layer electrode, the first driving lower layer electrode, and the piezoelectric thin film sandwiched between them An angular velocity sensor in which at least one of the area and the formation position of the substantial second driving region by the lower layer electrode for use and the piezoelectric thin film sandwiched therebetween is defined to cancel the vibration of the first arm region; And a device main body on which the angular velocity sensor is mounted.

以上のように、本発明によれば、簡単な構成で外部に対して振動が漏れることがなく、簡単な構成で外部に対して振動が漏れることがなく、ノイズ特性も良好になる。   As described above, according to the present invention, vibrations do not leak to the outside with a simple configuration, vibrations do not leak to the outside with a simple configuration, and noise characteristics are improved.

以下、本発明の実施の形態を図面に基づき説明する。
（第１の実施の形態）
図１は本発明の一実施形態に係る角速度センサの構成を示す平面図、図２はその概略側面図、図３は図１のＡ−Ａ断面図である。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(First embodiment)
1 is a plan view showing a configuration of an angular velocity sensor according to an embodiment of the present invention, FIG. 2 is a schematic side view thereof, and FIG. 3 is a cross-sectional view taken along line AA of FIG.

これらの図に示すように、角速度センサ１００は、第１のアーム領域１１１及び第１のアーム領域１１１の両側に隣接するように第２のアーム領域１１２、１１３が設けられた非圧電材料（例えばＳｉ）からなる基板１１０と、基板１１０上の第１のアーム領域１１１に形成された第１の駆動用下層電極１２１と、基板１１０上の各第２のアーム領域１１２、１１３に形成された第２の駆動用下層電極１２２、１２３と、第１の及び第２の駆動用下層電極１２１、１２２、１２３上にそれぞれ形成された圧電薄膜１３１、１３２、１３３と、圧電薄膜１３１を挟んで第１の駆動用下層電極１２１と対向するように圧電膜薄膜１３１上に形成された第１の駆動用上層電極１４１と、各圧電薄膜１３２、１３３を挟んで各第２の駆動用下層電極１２２、１２３と対向するように圧電膜薄膜１３２、１３３上に形成された第２の駆動用上層電極１４２、１４３と、第１の駆動用上層電極１４１を両側から挟むように前記圧電薄膜上に形成された一対の検出電極１５１、１５２とからその主要部が構成される。   As shown in these drawings, the angular velocity sensor 100 includes a non-piezoelectric material (for example, a first arm region 111 and a non-piezoelectric material provided with second arm regions 112 and 113 adjacent to both sides of the first arm region 111 (for example, Si), a first driving lower layer electrode 121 formed in the first arm region 111 on the substrate 110, and a second arm region 112, 113 formed on each of the second arm regions 112, 113 on the substrate 110. Two driving lower-layer electrodes 122 and 123, piezoelectric thin films 131, 132, and 133 formed on the first and second driving lower-layer electrodes 121, 122, and 123, respectively, and the piezoelectric thin film 131 sandwiching the first The first driving upper layer electrode 141 formed on the piezoelectric thin film 131 so as to face the driving lower layer electrode 121 and the second driving lower layer electrode 1 with the piezoelectric thin films 132 and 133 interposed therebetween. 2 and 123, the second driving upper layer electrodes 142 and 143 formed on the piezoelectric thin film 132 and 133 so as to face the first driving upper layer electrode 141 and the first driving upper layer electrode 141 are sandwiched from both sides. The main part is composed of the pair of detection electrodes 151 and 152 formed.

基板１１０は、図中Ｘ方向に幅広でＺ方向が厚い固定部１１４と、この固定部１１４の一辺に配設されたＸ方向に幅狭でＺ方向が薄い駆動部保持部１１５と、この駆動部保持部１１５の先端側に配設され、駆動部保持部１１５より幅広で固定部１１４より幅狭で駆動部保持部１１５と同厚の駆動部１１６とを有する。   The substrate 110 includes a fixing portion 114 that is wide in the X direction and thick in the Z direction in the drawing, a driving portion holding portion 115 that is disposed on one side of the fixing portion 114 and that is narrow in the X direction and thin in the Z direction, The driving unit 116 is disposed on the distal end side of the unit holding unit 115 and has a driving unit 116 that is wider than the driving unit holding unit 115 and narrower than the fixed unit 114 and has the same thickness as the driving unit holding unit 115.

駆動部１１６は、駆動部本体と１１７と、駆動部本体１１７の先端側から突出した３本の上記第１のアーム領域１１１及び第２のアーム領域１１２、１１３とを有する。第１のアーム領域１１１及び第２のアーム領域１１２、１１３は、例えば長さと幅と厚さが等しく、例えば第１のアーム領域１１１と第２のアーム領域１１２との間隔と、第１のアーム領域１１１と第２のアーム領域１１３との間隔は、等しくされている。   The drive unit 116 includes a drive unit main body 117, and the three first arm regions 111 and the second arm regions 112 113 that protrude from the distal end side of the drive unit main body 117. The first arm region 111 and the second arm regions 112 and 113 are, for example, equal in length, width, and thickness. For example, the distance between the first arm region 111 and the second arm region 112 and the first arm region. The distance between the region 111 and the second arm region 113 is equal.

各第１のアーム領域１１１及び第２のアーム領域１１２、１１３の基部（駆動部本体と１１７と連結した部分）において、上記の各電極１２１、１２２、１２３、１４１、１４２、１４３、１５１、１５２は、それぞれ別個のリード線１６１〜１６８に接続されている。これらのリード線１６１〜１６８は、駆動部保持部１１５表面を通り固定部１１４表面に設けられた各リード端子１７１〜１７８に接続されている。リード端子１７１〜１７８は、固定部１１４表面のＸ方向両端にそれぞれ４個づつ設けられている。   At the base of each first arm region 111 and second arm region 112, 113 (portion connected to the drive unit main body and 117), each of the electrodes 121, 122, 123, 141, 142, 143, 151, 152 Are connected to separate leads 161-168, respectively. These lead wires 161 to 168 pass through the surface of the driving unit holding unit 115 and are connected to lead terminals 171 to 178 provided on the surface of the fixing unit 114. Four lead terminals 171 to 178 are provided at both ends in the X direction on the surface of the fixing portion 114.

この実施形態では、第１の駆動用上層電極１４１、第１の駆動用下層電極１２１及びこれらに挟まれる圧電薄膜１３１による実質的な第１の駆動領域の面積Ｓ１とし、第２の駆動用上層電極１４２、１４３、第２の駆動用下層電極１２２、１２３及びこれらに挟まれる圧電薄膜１３２、１３３による実質的な第２の駆動領域の面積Ｓ２、Ｓ３としたとき、
Ｓ１：Ｓ２（＝Ｓ３）＝２：１
とされている。 In this embodiment, the first driving upper layer electrode 141, the first driving lower layer electrode 121, and the area S1 of the first driving region formed by the piezoelectric thin film 131 sandwiched therebetween are used as the second driving upper layer. When the electrodes 142 and 143, the second driving lower layer electrodes 122 and 123 and the piezoelectric thin films 132 and 133 sandwiched between them are defined as the substantial second driving region areas S2 and S3,
S1: S2 (= S3) = 2: 1
It is said that.

ここで、「実質的な駆動面積」とは、図４に示すように、例えば第１の駆動用上層電極１４１の面積が圧電薄膜１３１の面積及び第１の駆動用下層電極１２１の面積よりも狭い場合には、第１の駆動用上層電極１４１の面積が「実質的な駆動面積」となる。また、図５に示すように、例えば圧電薄膜１３１の面積が第１の駆動用上層電極１４１の面積及び第１の駆動用下層電極１２１の面積よりも狭い場合には、圧電薄膜１３１の面積が「実質的な駆動面積」となる。図４に示すように、例えば第１の駆動用下層電極１２１の面積が圧電薄膜１３１の面積及び第１の駆動用上層電極１４１の面積よりも狭い場合には、第１の駆動用下層電極１２１の面積が「実質的な駆動面積」となる。なお、図５及び図６に示したような構成の場合には、面積が狭い部位にはスペーサ１８１を配置して平坦性を保つようにした方がより好ましい。   Here, the “substantially driving area” means, for example, that the area of the first driving upper layer electrode 141 is larger than the area of the piezoelectric thin film 131 and the area of the first driving lower layer electrode 121 as shown in FIG. If it is narrow, the area of the first driving upper layer electrode 141 becomes a “substantially driving area”. As shown in FIG. 5, for example, when the area of the piezoelectric thin film 131 is smaller than the area of the first driving upper layer electrode 141 and the area of the first driving lower layer electrode 121, the area of the piezoelectric thin film 131 is smaller. “Substantial driving area”. As shown in FIG. 4, for example, when the area of the first driving lower layer electrode 121 is smaller than the area of the piezoelectric thin film 131 and the area of the first driving upper layer electrode 141, the first driving lower layer electrode 121. Is the “substantial driving area”. In the case of the configuration shown in FIG. 5 and FIG. 6, it is more preferable to arrange the spacer 181 in a portion having a small area so as to keep the flatness.

この実施形態では、上記の図４に示した構成を採用している。すなわち、図７に示すように、第１の駆動用上層電極１４１の幅W１と第２の駆動用上層電極１４２、１４３の幅W2とを等しくして、第１の駆動用上層電極１４１の長さL1を第２の駆動用上層電極１４２、１４３の長さL２の２倍とすることで、Ｓ１：Ｓ２（＝Ｓ３）＝２：１を実現していいる。   In this embodiment, the configuration shown in FIG. 4 is adopted. That is, as shown in FIG. 7, the width W1 of the first driving upper layer electrode 141 is made equal to the width W2 of the second driving upper layer electrodes 142, 143, and the length of the first driving upper layer electrode 141 is increased. By setting the length L1 to twice the length L2 of the second driving upper layer electrodes 142 and 143, S1: S2 (= S3) = 2: 1 is realized.

このように構成された角速度センサ１００では、中央の第１のアーム領域１１１がコリオリ力を検出するための振動子として機能し、両側の第２のアーム領域１１２、１１３は第１のアーム領域１１１の振動を抑制する振動子として機能する。つまり、３本の振動子を使って、コリオリ力を検出しつつ、振動を抑制し、振動漏れが発生しないようにしている。より具体的には、中央の振動子と両側の振動子を位相を逆に動作させる。   In the angular velocity sensor 100 configured as above, the central first arm region 111 functions as a vibrator for detecting the Coriolis force, and the second arm regions 112 and 113 on both sides are the first arm region 111. It functions as a vibrator that suppresses vibrations. That is, using three vibrators, while detecting the Coriolis force, the vibration is suppressed and vibration leakage does not occur. More specifically, the central vibrator and the vibrators on both sides are operated in reverse phases.

ここで、中央の振動子を両側２本の振動子の２倍の振動量になるように動作させると３本の振動子内で動作モーメントが吊り合い、外部に対して振動が漏れることがなくなり、その効果として振動が外部環境などに対して安定化する動作が可能となる。   Here, if the center vibrator is operated so that the amount of vibration is twice that of the two vibrators on both sides, the operating moment is suspended in the three vibrators, and the vibration does not leak to the outside. As an effect, it is possible to stabilize the vibration against the external environment.

しかし、例えば３本の振動子の駆動に供する電極にそれぞれ電圧を印加する際、３本の振動子が類似の形状を持つ振動子である場合で同じ面積で駆動電極の配置を行うときには、中央の振動子に対して、両側の振動子も同等の動作をする虞があり、振動のバランスがくずれ、振動子３本間でのモーメントのバランスが吊り合わず、３本の振動子から外部に振動が漏れ、ノイズ特性などが劣化する場合がある。更に、駆動電源を供する電源に対しても、振動量と電極面積のバランスがくずれ、例えば駆動電力を与えた以上に共鳴動作により振動子の振動量が増えるような場合は振動子の振動により発生する電荷が電源に戻ってしまいノイズを発生することもある。   However, for example, when applying voltages to the electrodes for driving the three vibrators, when the three vibrators are vibrators having similar shapes and the drive electrodes are arranged with the same area, There is a possibility that the vibrators on both sides may perform the same operation with respect to this vibrator, the balance of vibration is lost, and the balance of moments between the three vibrators is not balanced. May leak and noise characteristics may deteriorate. Furthermore, the balance between the amount of vibration and the electrode area is also lost for the power supply that supplies the drive power. For example, if the amount of vibration of the vibrator increases due to the resonance operation more than when the drive power is applied, the vibration is generated The generated charge may return to the power source and generate noise.

そこで、本実施形態に係る角速度センサ１００では、図８に示すように、３本の振動子Ａ、Ｂ、Ｃの駆動量を両側の振動子Ｂ、Ｃが中央の振動子Ａの半分の振幅となるよう、それぞれの振動子Ａ、Ｂ、Ｃに配置する駆動電極（駆動領域）の面積を最適化するものである。すなわち、本実施形態に係る角速度センサ１００では、既に説明したとおり図７に示した構成としている。このような構成では、図９に示すように、コリオリ力Ｆ１、Ｆ２、Ｆ３が加わった場合にも、動作モーメントは横方向、縦方向どうしは相殺され、さらに３本の振動子Ａ、Ｂ、Ｃの中心を軸として発生する回転モーメントも図９では楕円運動の横方向を強調して描いているが、実質使用する際の角速度領域では横方向の力は小さいため、両側の振動子Ｂ、Ｃにより発生する回転モーメントは殆ど相殺し合うが、図９の場合では右回りのモーメントが若干発生し、さらに中央の振動子からのモーメントも中心からの距離が小さいのでモーメントとしてはやはり小さいが右回りのモーメントを発生し、若干モーメントは残る。ただし、例えば横方向に振動を励起した場合に比べると回転モーメント量は小さい。   Therefore, in the angular velocity sensor 100 according to the present embodiment, as shown in FIG. 8, the driving amounts of the three vibrators A, B, and C are set to half the amplitude of the vibrator A at the center. Thus, the area of the drive electrode (drive region) disposed in each of the vibrators A, B, and C is optimized. That is, the angular velocity sensor 100 according to the present embodiment has the configuration shown in FIG. 7 as already described. In such a configuration, as shown in FIG. 9, even when the Coriolis forces F1, F2, and F3 are applied, the operating moment is canceled in the horizontal and vertical directions, and the three vibrators A, B, The rotational moment generated around the center of C is also drawn with emphasis on the lateral direction of the elliptical motion in FIG. 9, but since the lateral force is small in the angular velocity region when actually used, the vibrator B on both sides, Although the rotational moments generated by C almost cancel each other, in the case of FIG. 9, a slight clockwise moment occurs, and the moment from the center vibrator is also small because the distance from the center is small, but the moment is still small, A rotating moment is generated and a little moment remains. However, for example, the amount of rotational moment is small compared to the case where vibration is excited in the lateral direction.

なお、このような角度センサ１００は例えば以下の工程を経て製造される。
まず、基板１１０の全面に下層電極を形成する。次に、その上部に圧電薄膜をスパッタ（またはゾルゲル）により全面に形成する。次に、上層電極もその上に全面に形成する。その後上層電極をエッチングし、各振動子の駆動電極と中央の振動子には検出電極となるよう形状形成する。更に、不要な圧電薄膜もエッチングで除去し、下層電極も不要部を除去した後、各駆動、検出電極に対する上層と下層電極をそれぞれ信号取り出しを行うためのランドまで配線を形成する。その後振動子の外形を決めるための基板１１０のエッチングを行って振動子を形成する。 In addition, such an angle sensor 100 is manufactured through the following processes, for example.
First, a lower layer electrode is formed on the entire surface of the substrate 110. Next, a piezoelectric thin film is formed on the entire surface by sputtering (or sol-gel). Next, an upper layer electrode is also formed on the entire surface. Thereafter, the upper layer electrode is etched, and the drive electrode of each vibrator and the center vibrator are formed to be detection electrodes. Further, unnecessary piezoelectric thin films are also removed by etching, and unnecessary portions of the lower layer electrodes are removed, and then wirings are formed up to lands for extracting signals from the upper and lower electrodes for each drive and detection electrode. Thereafter, the substrate 110 for determining the outer shape of the vibrator is etched to form the vibrator.

（第２の実施の形態）
角速度センサにおける振動子の駆動の効果は、駆動電極の場所により振動子駆動に寄与する効率が異なる。図１０に示すように、振動子Ｄ、Ｅ、Ｆを長手方向に根元部エリアＺａと中央エリアＺｂと先端エリアＺｃとに３等分した場合、駆動電極Ｇの場所が根元部エリアＺａと中央エリアＺｂと先端エリアＺｃとでは、図１１に示すように、Ｚａ：Ｚｂ：Ｚｃは４：２：１の寄与となる。図１１において、その寄与として、各振動子Ｄ、Ｅ、Ｆの先端の振動量で表している。 (Second Embodiment)
The effect of driving the vibrator in the angular velocity sensor differs in efficiency that contributes to vibrator driving depending on the location of the drive electrode. As shown in FIG. 10, when the vibrators D, E, and F are equally divided into the root part area Za, the central area Zb, and the tip area Zc in the longitudinal direction, the drive electrode G is located at the center and the root part area Za. In the area Zb and the tip area Zc, as shown in FIG. 11, Za: Zb: Zc contributes 4: 2: 1. In FIG. 11, the contribution is represented by the vibration amount at the tip of each transducer D, E, F.

図１２はこの点を着目した第２の実施形態に係る角度センサにおける駆動部の構成を示す図である。
図１２に示すように、この駆動部１１６においては、３本の振動子Ａ、Ｂ、Ｃの駆動電極Ｇの面積を等しくして、それぞれの振動子Ｂ、Ｃの駆動電極Ｇの形成位置を振動子Ａの電極Ｇの形成位置よりも振動子Ａ、Ｂ、Ｃの基部から２倍離れさせている。なお、図１２において、上記の第１の実施形態に係る角速度センサと同一の要素には同一の符号を付してある。また、図１２においては、駆動部１１６について記載しているが、他の部位については上記の第１の実施形態に係る角速度センサと同一の構成とすることができる。 FIG. 12 is a diagram showing the configuration of the drive unit in the angle sensor according to the second embodiment focusing on this point.
As shown in FIG. 12, in the drive unit 116, the areas of the drive electrodes G of the three vibrators A, B, and C are made equal, and the formation positions of the drive electrodes G of the vibrators B and C are set. The position where the electrodes G of the vibrator A are formed is separated from the bases of the vibrators A, B, and C twice. In FIG. 12, the same elements as those in the angular velocity sensor according to the first embodiment are denoted by the same reference numerals. In FIG. 12, the drive unit 116 is described, but the other parts can have the same configuration as the angular velocity sensor according to the first embodiment.

この実施形態に係る角速度センサにおいても、３本の振動子Ａ、Ｂ、Ｃの駆動量を両側の振動子Ｂ、Ｃが中央の振動子Ａの半分の振幅となるようにしているので、コリオリ力を検出しつつ、振動を抑制し、振動漏れが発生することはない。   Also in the angular velocity sensor according to this embodiment, the driving amounts of the three vibrators A, B, and C are set so that the vibrators B and C on both sides have half the amplitude of the central vibrator A. While detecting force, vibration is suppressed and vibration leakage does not occur.

（第３の実施の形態）
３本の振動子Ａ、Ｂ、Ｃに対して同じ幅で駆動電極Ｇの形成を行い、長さを同じにした角速度センサＨ、中央振動子Ａの駆動電極Ｇの長さに対して両側の振動子Ｂ、Ｃの電極Ｇの長さを半分にした角速度センサＩを作成した。 (Third embodiment)
The drive electrodes G are formed with the same width for the three vibrators A, B, and C, the angular velocity sensor H having the same length, and the lengths of the drive electrodes G of the central vibrator A are on both sides. An angular velocity sensor I in which the length of the electrode G of the vibrators B and C was halved was created.

その結果、図１３に示すように、ＨではＩに比べ振動子を保持する固定部１１４（図１参照）での振動が大きくなっており、角速度センサの拘束状態の変動により出力の変動が見られた。また、図１４に示すように、ノイズ、応答性についてもバラツキが大きくなり、振動が不安定となっている結果となった。さらに、中央の振動子Ａの検出電極１５１、１５２の形状を根元側に配置する割合を増やすために根元側の幅を広げ、その代わりに駆動電極Ｇについては、根元部の幅を狭くした構成を持つ振動子を作成したところ、３本の振動子間の振動バランスがずれたことが確認された。   As a result, as shown in FIG. 13, in H, the vibration in the fixing portion 114 (see FIG. 1) that holds the vibrator is larger than in I, and the fluctuation in output is observed due to the fluctuation in the restrained state of the angular velocity sensor. It was. Further, as shown in FIG. 14, the noise and responsiveness also vary widely, resulting in unstable vibration. Furthermore, in order to increase the ratio of the shape of the detection electrodes 151 and 152 of the central vibrator A arranged on the root side, the width on the root side is widened, and instead the width of the root portion of the drive electrode G is narrowed. It was confirmed that the vibration balance between the three vibrators was shifted.

そこで、駆動電極Ｇの位置を振動子の固定端と自由端を結ぶ長さ方向に沿って３分割し、その各部に駆動部を配置して振動量を確認したところ、根元部に配置した際の振動量を１とした場合に、中央部は１／２、自由端に近い先端部は１／４の振動量となることが判明し、さらに幅方向については幅に単に比例して振幅が大きくなることが判明した。   Therefore, when the position of the drive electrode G is divided into three along the length direction connecting the fixed end and the free end of the vibrator, and the amount of vibration is confirmed by arranging the drive unit in each part, When the amount of vibration is set to 1, it has been found that the center portion has a vibration amount of 1/2 and the tip portion near the free end has a vibration amount of 1/4, and the amplitude in the width direction is simply proportional to the width. It turned out to be bigger.

ここで、各部の振動寄与効率分を考慮して、各振動子Ａ、Ｂ、Ｃに配置する駆動電極Ｇの面積を３分割し、その３分割した範囲内の面積に、先端は１、中央は２、根元は４の係数を掛けた面積の和の中央と両端の比率が２：１になるような構成としたところ、各振動子Ａ、Ｂ、Ｃで駆動電極Ｇの幅が異なる場合や、３角形や台形など長方形以外の各種駆動電極Ｇの形状で形成せざるを得ない場合にも中央の振動子Ａと両端の振動子Ｂ、Ｃが２：１となる振動が形成され、振動が振動子内で収まり、外部の振動に対しても影響を受けにくい角速度センサが構成できた。   Here, in consideration of the vibration contribution efficiency of each part, the area of the drive electrode G arranged in each vibrator A, B, C is divided into three, and the tip is centered on the area within the divided range. When the ratio of the center and both ends of the sum of the areas multiplied by a factor of 2 is 2: 1, the width of the drive electrode G is different for each transducer A, B, and C. In addition, even when it is necessary to form various drive electrodes G other than a rectangle, such as a triangle or a trapezoid, a vibration in which the central vibrator A and the vibrators B and C at both ends are 2: 1 is formed. An angular velocity sensor was constructed in which vibrations were confined within the vibrator and were not easily affected by external vibrations.

図１５はこの点に着目した第３の実施形態に係る角度センサにおける駆動部の構成を示す図である。
図１５に示すように、この駆動部１１６においては、それぞれの振動子Ａ、Ｂ、Ｃの基部から先端部までを三等分し、振動子Ａの基部から先端部まで三等分したそれぞれの駆動電極Ｇの面積を基部から順番にＳｃａ、Ｓｃｂ、Ｓｃｃとし、振動子Ｂ、Ｃの基部から先端部まで三等分したそれぞれの駆動電極Ｇの面積を基部から順番にＳｓａ、Ｓｓｂ、Ｓｓｃ（ここではＳｓｃは存在しない）とし、更にＳｃ＝４×Ｓｃａ＋２×Ｓｃｂ＋１×Ｓｃｃ、Ｓｓ＝４×Ｓｓａ＋２×Ｓｓｂ＋１×Ｓｓｃとしたとき、ＳｃとＳｓとの比を２：１としている。 FIG. 15 is a diagram showing the configuration of the drive unit in the angle sensor according to the third embodiment, paying attention to this point.
As shown in FIG. 15, in this drive unit 116, each of the vibrators A, B, and C is divided into three equal parts from the base part to the tip part, and divided into three equal parts from the base part to the tip part of the vibrator A The area of the drive electrode G is Sca, Scb, Scc in order from the base, and the area of each drive electrode G divided into three equal parts from the base to the tip of the vibrators B, C is sequentially Ssa, Ssb, Ssc ( Here, Ssc does not exist), and when Sc = 4 × Sca + 2 × Scb + 1 × Scc and Ss = 4 × Ssa + 2 × Ssb + 1 × Ssc, the ratio of Sc to Ss is 2: 1.

この実施形態に係る角速度センサにおいても、同様に３本の振動子Ａ、Ｂ、Ｃの駆動量を両側の振動子Ｂ、Ｃが中央の振動子Ａの半分の振幅となるようにしているので、コリオリ力を検出しつつ、振動を抑制し、振動漏れが発生することや外部からの振動の影響をうけることはない。   Also in the angular velocity sensor according to this embodiment, the driving amounts of the three vibrators A, B, and C are similarly set so that the vibrators B and C on both sides have half the amplitude of the central vibrator A. While detecting the Coriolis force, the vibration is suppressed and vibration leakage does not occur or the influence of external vibration is not received.

（第４の実施の形態）
図１６はこの実施形態に係る駆動部１１６の構成を示す図である。
図１６に示すように、この駆動部１１６では、各振動子Ａ、Ｂ、Ｃの長手方向の長さ（アームの長さ）Ｌ４（全て等しい）に対して、各振動子Ａ、Ｂ、Ｃの駆動電極Ｇの長手方向の長さＬ５（全て等しい）が０．２〜０．４、より好ましくは０．２５とされている。 (Fourth embodiment)
FIG. 16 is a diagram showing the configuration of the drive unit 116 according to this embodiment.
As shown in FIG. 16, in this drive unit 116, each vibrator A, B, C has a length (arm length) L4 (all equal) in the longitudinal direction of each vibrator A, B, C. The drive electrode G has a length L5 in the longitudinal direction (all equal) of 0.2 to 0.4, more preferably 0.25.

ここで、図１７に示すように、駆動電極Ｇが長い場合ドライブ電流が増え、短すぎる場合振幅を増やすために交流電圧が増加する。これは、駆動電極の長さに対してインピーダンスは反比例する。つまり駆動用の交流電圧が一定の場合流れる電流値は電極の長さと比例関係がある。一方検出信号と電極の長さは比例関係にならずある長さ以上になると検出信号は飽和してゆく。これは振動子の先端部についた圧電膜に交流信号を印加しても振動への変換効率が悪いためである。   Here, as shown in FIG. 17, when the drive electrode G is long, the drive current increases, and when it is too short, the AC voltage increases to increase the amplitude. This is because the impedance is inversely proportional to the length of the drive electrode. That is, the value of the current that flows when the driving AC voltage is constant is proportional to the length of the electrode. On the other hand, the length of the detection signal and the electrode is not proportional to each other, and the detection signal is saturated when the length exceeds a certain length. This is because even if an AC signal is applied to the piezoelectric film attached to the tip of the vibrator, the conversion efficiency into vibration is poor.

そこで、図１８に示すように、最適点を電圧×電流の電力の観点で注目すると、振動子の長さに対して０．２５程度が最適になる駆動電極の長さであることがわかる。これは図の検出信号の傾きが調度１になるポイントである。振動子の長さに対しての比が０．２〜０．４になるように駆動電極長さに設計すると、アーム全面に電極をつけた場合の電力的に半分以下になることがわかる。例えば、この例では、振動子の長さが１９００μmであるが、一般に片持ち梁や音叉型振動子が共振しで振動する場合のモードは一定であるため、動作電力を最小にする電極長さの全長に対しての比は同じになる。   Therefore, as shown in FIG. 18, when the optimum point is noted from the viewpoint of voltage × current power, it can be seen that about 0.25 is the optimum drive electrode length with respect to the length of the vibrator. This is the point at which the slope of the detection signal in the figure becomes the unity. It can be seen that when the drive electrode length is designed so that the ratio to the length of the vibrator is 0.2 to 0.4, the power is less than half when the electrode is attached to the entire arm surface. For example, in this example, the length of the vibrator is 1900 μm. However, since the mode in which the cantilever or tuning fork vibrator vibrates by resonance is constant, the electrode length that minimizes the operating power is used. The ratio to the total length is the same.

すなわち、駆動電極の面積が増大するにしたがってインピーダンスが低下し駆動電極を通ってＩＣの端子に流れ込む電流が増加する。そのためにＩＣの設計として電流能力が十分に保てるように設計する必要が発生しＩＣに負担が掛かる。そこで、本実施形態によれば、振動子を動作させるためのＩＣ消費電力を低減する効率のよい振動子を提供することが可能となる。   That is, as the area of the drive electrode increases, the impedance decreases and the current flowing through the drive electrode into the IC terminal increases. Therefore, it is necessary to design the IC so that the current capability can be sufficiently maintained, which places a burden on the IC. Therefore, according to the present embodiment, it is possible to provide an efficient vibrator that reduces IC power consumption for operating the vibrator.

（第５の実施の形態）
次に、上記実施形態の角速度センサ１００を備えたセンサモジュールを具備する電子機器について説明する。
図１９は第５の実施の形態に係る電子機器の斜視図、図２０は図１９の電子機器のブロック図である。
この電子機器は、例えばデジタルカメラ４００である。図１９に示すように、デジタルカメラ４００は、角速度センサ１００を備えたセンサモジュール５００と、センサモジュール５００を搭載する機器本体５０１とを備えている。機器本体５０１は、例えば、金属製、樹脂製などのフレームまたは筐体である。 (Fifth embodiment)
Next, an electronic apparatus including a sensor module including the angular velocity sensor 100 of the above embodiment will be described.
FIG. 19 is a perspective view of an electronic device according to the fifth embodiment, and FIG. 20 is a block diagram of the electronic device of FIG.
This electronic device is a digital camera 400, for example. As shown in FIG. 19, the digital camera 400 includes a sensor module 500 including the angular velocity sensor 100 and a device main body 501 on which the sensor module 500 is mounted. The device body 501 is, for example, a metal or resin frame or housing.

図２０に示すように、デジタルカメラ４００は、センサモジュール５００と、制御部５１０と、レンズなどを備える光学系５２０と、ＣＣＤ５３０、光学系５２０に対して手振れ補正を実行する手振れ補正機構５４０とを有する。   As shown in FIG. 20, the digital camera 400 includes a sensor module 500, a control unit 510, an optical system 520 including a lens, and a camera shake correction mechanism 540 that performs camera shake correction on the CCD 530 and the optical system 520. Have.

センサモジュール５００によって、Ｘ方向及びＹ方向のコリオリ力が検出される。制御部５１０は、この検出されたコリオリ力に基づき手振れ補正機構５４０を使って光学系５２０で手振れの補正を行う。   The sensor module 500 detects Coriolis forces in the X direction and the Y direction. Based on the detected Coriolis force, control unit 510 corrects camera shake with optical system 520 using camera shake correction mechanism 540.

図２１は図１９のセンサモジュール５００の分解斜視図である。
図２１に示すように、このセンサモジュール５００は、基板２０１と、上蓋３０１とを有する。
基板２０１は、小型化による微細パターンへの対応と、熱膨張に対する形状安定性の観点から、例えばアルミナ（Ａｌ２Ｏ３）などのセラミック材料が用いられる。 FIG. 21 is an exploded perspective view of the sensor module 500 of FIG.
As shown in FIG. 21, the sensor module 500 includes a substrate 201 and an upper lid 301.
For the substrate 201, for example, a ceramic material such as alumina (Al 2 O 3 ) is used from the viewpoint of adapting to a fine pattern due to miniaturization and shape stability against thermal expansion.

基板２０１には、角速度センサ１００と、駆動検出用ベアチップＩＣ２１４と、チップＣＲ部品２１５等が実装されている。角速度センサ１００は、基板２０１のＸ方向に沿った辺に沿うように配置されている。このＸ軸の角速度センサ１００の近傍に駆動検出用ベアチップＩＣ２１４が配置されている。角速度センサ１００は、基板２０１のＹ方向に沿った辺に沿うように配置されている。駆動検出用ベアチップＩＣ２１４は、基板２０１のほぼ中央に配置されている。   On the substrate 201, the angular velocity sensor 100, a drive detection bare chip IC 214, a chip CR component 215, and the like are mounted. The angular velocity sensor 100 is arranged along the side of the substrate 201 along the X direction. A drive detection bare chip IC 214 is disposed in the vicinity of the X-axis angular velocity sensor 100. The angular velocity sensor 100 is arranged along the side of the substrate 201 along the Y direction. The drive detection bare chip IC 214 is disposed substantially at the center of the substrate 201.

センサモジュール５００では、ＸＹの２軸に対する角速度センサを同一パッケージ内に実装している。この実施形態では、Ｘ軸検出用の角速度センサ１は、例えば３６ｋＨｚ付近、Ｙ軸検出用の角速度センサ１は、例えば３９ｋＨｚ付近の共振周波数でそれぞれ振動するように構成されている。これにより、デジタルカメラ４００がＸ軸、Ｙ軸の周りに回転するときの角速度を正確に検出することができる。   In the sensor module 500, angular velocity sensors for two axes of XY are mounted in the same package. In this embodiment, the angular velocity sensor 1 for X-axis detection is configured to vibrate at a resonance frequency of, for example, around 36 kHz, and the angular velocity sensor 1 for Y-axis detection, for example, at a resonance frequency of, for example, around 39 kHz. Thereby, the angular velocity when the digital camera 400 rotates around the X axis and the Y axis can be accurately detected.

例えば、上記各実施の形態に係る角速度センサを搭載する電子機器としては、デジタルカメラの他に、例えば、ラップトップ型のコンピュータ、ＰＤＡ（Personal Digital Assistance）、電子辞書、オーディオ／ビジュアル機器、プロジェクタ、携帯電話、ゲーム機器、カーナビゲーション機器、ロボット機器、その他の電化製品等が挙げられる。   For example, as an electronic device equipped with the angular velocity sensor according to each of the above embodiments, in addition to a digital camera, for example, a laptop computer, a PDA (Personal Digital Assistance), an electronic dictionary, an audio / visual device, a projector, Examples include mobile phones, game devices, car navigation devices, robot devices, and other electrical appliances.

本発明の一実施形態に係る角速度センサの構成を示す平面図である。It is a top view which shows the structure of the angular velocity sensor which concerns on one Embodiment of this invention. 図１に示した角速度センサの概略側面図である。It is a schematic side view of the angular velocity sensor shown in FIG. 図１のＡ−Ａ断面図である。It is AA sectional drawing of FIG. 実質的な駆動面積を説明するための図である（その１）。It is a figure for demonstrating a substantial drive area (the 1). 実質的な駆動面積を説明するための図である（その２）。It is a figure for demonstrating a substantial drive area (the 2). 実質的な駆動面積を説明するための図である（その３）。It is a figure for demonstrating a substantial drive area (the 3). 図１に示した駆動部の拡大平面図である。FIG. 2 is an enlarged plan view of a drive unit illustrated in FIG. 1. 図１に示した角速度センサの作用効果を説明するための３本の振動子の概略的斜視図である（その１）。FIG. 3 is a schematic perspective view of three vibrators for explaining the operational effect of the angular velocity sensor shown in FIG. 1 (No. 1). 図１に示した角速度センサの作用効果を説明するための３本の振動子の概略的斜視図である（その２）。FIG. 3 is a schematic perspective view of three vibrators for explaining the function and effect of the angular velocity sensor shown in FIG. 1 (No. 2). 第２の実施の形態に係る原理を説明するための振動子の概略的平面図である。It is a schematic plan view of the vibrator for explaining the principle according to the second embodiment. 第２の実施の形態に係る原理を説明するためのグラフである。It is a graph for demonstrating the principle which concerns on 2nd Embodiment. 第２の実施の形態に係る駆動部の概略的平面図である。It is a schematic plan view of the drive part which concerns on 2nd Embodiment. 第３の実施の形態に係る原理を説明するためのグラフである（その１）。It is a graph for demonstrating the principle which concerns on 3rd Embodiment (the 1). 第３の実施の形態に係る原理を説明するためのグラフである（その２）。It is a graph for demonstrating the principle which concerns on 3rd Embodiment (the 2). 第３の実施の形態に係る駆動部の概略的平面図である。It is a schematic plan view of the drive part which concerns on 3rd Embodiment. 第４の実施の形態に係る駆動部の概略的平面図である。It is a schematic plan view of the drive part which concerns on 4th Embodiment. 第４の実施の形態に係る原理を説明するためのグラフである。It is a graph for demonstrating the principle which concerns on 4th Embodiment. 第４の実施の形態に係る効果を説明するためのグラフである。It is a graph for demonstrating the effect which concerns on 4th Embodiment. 第５の実施の形態の電子機器の斜視図である。It is a perspective view of the electronic device of 5th Embodiment. 図１９の電子機器のブロック図である。FIG. 20 is a block diagram of the electronic device in FIG. 19. 図１９のセンサモジュールの分解斜視図である。FIG. 20 is an exploded perspective view of the sensor module of FIG. 19.

符号の説明Explanation of symbols

１００ 角速度センサ
１１０ 基板
１１１ 第１のアーム領域
１１２、１１３ 第２のアーム領域
１２１ 第１の駆動用下層電極
１２２、１２３ 第２の駆動用下層電極
１３１、１３２、１３３ 圧電薄膜
１４１ 第１の駆動用上層電極
１４２、１４３ 第２の駆動用上層電極
１５１、１５２ 検出電極 100 Angular velocity sensor 110 Substrate 111 First arm region 112, 113 Second arm region 121 First driving lower layer electrode 122, 123 Second driving lower layer electrode 131, 132, 133 Piezoelectric thin film 141 First driving Upper electrode 142, 143 Second driving upper electrode 151, 152 Detection electrode

Claims (7)

第１のアーム領域及び前記第１のアーム領域に隣接するように第２のアーム領域が設けられた基板と、
前記基板上の前記第１のアーム領域に形成された第１の駆動用下層電極と、
前記基板上の前記第２のアーム領域に形成された第２の駆動用下層電極と、
前記第１の及び第２の駆動用下層電極上に形成された圧電薄膜と、
前記圧電薄膜を挟んで第１の駆動用下層電極と対向するように前記圧電膜薄膜上に形成された第１の駆動用上層電極と、
前記圧電薄膜を挟んで第２の駆動用下層電極と対向するように前記圧電膜薄膜上に形成された第２の駆動用上層電極と、
前記第１の駆動用上層電極を両側から挟むように前記圧電薄膜上に形成された一対の検出電極とを具備し、
前記第１の駆動用上層電極、前記第１の駆動用下層電極及びこれらに挟まれる圧電薄膜による実質的な第１の駆動領域の面積及び位置に対して、前記第２の駆動用上層電極、前記第２の駆動用下層電極及びこれらに挟まれる圧電薄膜による実質的な第２の駆動領域の面積及び形成位置のうち少なくとも一方が前記第１のアーム領域の振動を打ち消すように規定されている
ことを特徴とする角速度センサ。 A substrate provided with a second arm region so as to be adjacent to the first arm region and the first arm region;
A first driving lower layer electrode formed in the first arm region on the substrate;
A second driving lower layer electrode formed in the second arm region on the substrate;
A piezoelectric thin film formed on the first and second driving lower electrodes;
A first driving upper layer electrode formed on the piezoelectric film thin film so as to face the first driving lower electrode across the piezoelectric thin film;
A second driving upper layer electrode formed on the piezoelectric film thin film so as to face the second driving lower electrode across the piezoelectric thin film;
A pair of detection electrodes formed on the piezoelectric thin film so as to sandwich the first driving upper layer electrode from both sides;
The second driving upper layer electrode, the first driving lower layer electrode, and the second driving upper layer electrode with respect to the substantial area and position of the first driving region by the piezoelectric thin film sandwiched between the first driving upper layer electrode, the first driving lower layer electrode, At least one of the area and the formation position of the substantial second driving region by the second driving lower layer electrode and the piezoelectric thin film sandwiched between them is defined so as to cancel the vibration of the first arm region. An angular velocity sensor. 請求項１に記載の角速度センサであって、
前記第２のアーム領域は、前記第１のアーム領域を挟むように２つ設けられ、
それぞれの前記第２のアーム領域に前記第２の駆動用上層電極、前記第２の駆動用下層電極及びこれらに挟まれる圧電薄膜による第２の駆動領域が形成されている
ことを特徴とする角速度センサ。 The angular velocity sensor according to claim 1,
Two of the second arm regions are provided so as to sandwich the first arm region,
An angular velocity characterized in that a second driving region is formed by the second driving upper layer electrode, the second driving lower layer electrode, and a piezoelectric thin film sandwiched between the second driving upper layer electrode and the second driving region. Sensor. 請求項２に記載の角速度センサであって、
前記第１の駆動領域とそれぞれの前記第２の駆動領域の形成位置はほぼ等しく、
前記第１の駆動領域とそれぞれの前記第２の駆動領域の面積比がほぼ２：１である
ことを特徴とする角速度センサ。 The angular velocity sensor according to claim 2,
The formation positions of the first drive region and the respective second drive regions are substantially equal,
The angular velocity sensor, wherein an area ratio between the first drive region and each of the second drive regions is approximately 2: 1. 請求項２に記載の角速度センサであって、
前記第１の駆動領域とそれぞれの前記第２の駆動領域の面積はほぼ等しく、
それぞれの前記第２の駆動領域の形成位置が前記第１の駆動領域の形成位置よりも前記第１及び第２のアーム領域の基部からほぼ２倍離れている
ことを特徴とする角速度センサ。 The angular velocity sensor according to claim 2,
The areas of the first drive region and each of the second drive regions are approximately equal,
The angular velocity sensor characterized in that the formation position of each of the second drive areas is approximately twice as far from the base of the first and second arm areas as the formation position of the first drive area. 請求項２に記載の角速度センサであって、
前記第１及び第２のアーム領域の基部から先端部までを三等分し、前記第１のアーム領域の基部から先端部まで三等分したそれぞれの前記第１の駆動領域の面積を基部から順番にＳｃａ、Ｓｃｂ、Ｓｃｃとし、前記第２のアーム領域の基部から先端部まで三等分したそれぞれの前記第２の駆動領域の面積を基部から順番にＳｓａ、Ｓｓｂ、Ｓｓｃとし、更にＳｃ＝４×Ｓｃａ＋２×Ｓｃｂ＋１×Ｓｃｃ、Ｓｓ＝４×Ｓｓａ＋２×Ｓｓｂ＋１×Ｓｓｃ
としたとき、
ＳｃとＳｓとの比がほぼ２：１である
ことを特徴とする角速度センサ。 The angular velocity sensor according to claim 2,
The first and second arm regions are divided into three equal parts from the base part to the tip part, and the areas of the first drive areas divided into three parts from the base part to the tip part of the first arm area are divided from the base part. Sca, Scb, Scc in order, the area of each of the second drive regions divided into three equal parts from the base to the tip of the second arm region is Ssa, Ssb, Ssc in order from the base, and Sc = 4 × Sca + 2 × Scb + 1 × Scc, Ss = 4 × Ssa + 2 × Ssb + 1 × Ssc
When
An angular velocity sensor characterized in that the ratio of Sc and Ss is approximately 2: 1. 第１のアーム領域及び前記第１のアーム領域に隣接するように第２のアーム領域が設けられた基板を形成する工程と、
前記基板上の前記第１のアーム領域に第１の駆動用下層電極及び前記第２のアーム領域に第２の駆動用下層電極をそれぞれ形成する工程と、
前記第１の及び第２の駆動用下層電極上に圧電薄膜を形成する工程と、
前記圧電薄膜を挟んで第１の駆動用下層電極と対向するように第１の駆動用上層電極、前記圧電薄膜を挟んで第２の駆動用下層電極と対向するように第２の駆動用上層電極及び前記第１の駆動用上層電極を両側から挟むように一対の検出電極を前記圧電薄膜上に形成する工程とを具備し、
前記第１の駆動用上層電極、前記第１の駆動用下層電極及びこれらに挟まれる圧電薄膜による実質的な第１の駆動領域の面積及び位置に対して、前記第２の駆動用上層電極、前記第２の駆動用下層電極及びこれらに挟まれる圧電薄膜による実質的な第２の駆動領域の面積及び形成位置のうち少なくとも一方が前記第１のアーム領域の振動を打ち消すように規定されている
ことを特徴とする角速度センサの製造方法。 Forming a substrate provided with a second arm region adjacent to the first arm region and the first arm region;
Forming a first driving lower layer electrode in the first arm region on the substrate and a second driving lower layer electrode in the second arm region;
Forming a piezoelectric thin film on the first and second driving lower electrodes;
A first driving upper layer electrode facing the first driving lower layer electrode across the piezoelectric thin film, and a second driving upper layer facing the second driving lower layer electrode across the piezoelectric thin film Forming a pair of detection electrodes on the piezoelectric thin film so as to sandwich the electrode and the first driving upper layer electrode from both sides,
The second driving upper layer electrode, the first driving lower layer electrode, and the second driving upper layer electrode with respect to the substantial area and position of the first driving region by the piezoelectric thin film sandwiched between the first driving upper layer electrode, the first driving lower layer electrode, At least one of the area and the formation position of the substantial second driving region by the second driving lower layer electrode and the piezoelectric thin film sandwiched between them is defined so as to cancel the vibration of the first arm region. A manufacturing method of an angular velocity sensor characterized by the above. 第１のアーム領域及び前記第１のアーム領域に隣接するように第２のアーム領域が設けられた基板と、前記基板上の前記第１のアーム領域に形成された第１の駆動用下層電極と、前記基板上の前記第２のアーム領域に形成された第２の駆動用下層電極と、前記第１の及び第２の駆動用下層電極上に形成された圧電薄膜と、前記圧電薄膜を挟んで第１の駆動用下層電極と対向するように前記圧電膜薄膜上に形成された第１の駆動用上層電極と、前記圧電薄膜を挟んで第２の駆動用下層電極と対向するように前記圧電膜薄膜上に形成された第２の駆動用上層電極と、前記第１の駆動用上層電極を両側から挟むように前記圧電薄膜上に形成された一対の検出電極とを具備し、前記第１の駆動用上層電極、前記第１の駆動用下層電極及びこれらに挟まれる圧電薄膜による実質的な第１の駆動領域の面積及び位置に対して、前記第２の駆動用上層電極、前記第２の駆動用下層電極及びこれらに挟まれる圧電薄膜による実質的な第２の駆動領域の面積及び形成位置のうち少なくとも一方が前記第１のアーム領域の振動を打ち消すように規定されている角速度センサと、
前記角速度センサを搭載する機器本体と
を具備することを特徴とする電子機器。 A substrate provided with a second arm region so as to be adjacent to the first arm region and the first arm region, and a first driving lower layer electrode formed in the first arm region on the substrate A second driving lower layer electrode formed in the second arm region on the substrate, a piezoelectric thin film formed on the first and second driving lower electrodes, and the piezoelectric thin film A first driving upper layer electrode formed on the piezoelectric thin film so as to face the first driving lower layer electrode, and a second driving lower electrode sandwiched between the piezoelectric thin film. A second driving upper layer electrode formed on the piezoelectric thin film; and a pair of detection electrodes formed on the piezoelectric thin film so as to sandwich the first driving upper layer electrode from both sides, First driving upper layer electrode, first driving lower layer electrode, and sandwiched between them The second driving upper layer electrode, the second driving lower layer electrode, and the substantially second piezoelectric thin film sandwiched between the second driving upper layer electrode and the area and position of the first driving region by the piezoelectric thin film. An angular velocity sensor in which at least one of the area and the formation position of the drive region is defined so as to cancel the vibration of the first arm region;
An electronic device comprising: a device main body on which the angular velocity sensor is mounted.
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