JP2008181985A - Optical semiconductor device and its manufacturing method - Google Patents

Optical semiconductor device and its manufacturing method Download PDF

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JP2008181985A
JP2008181985A JP2007013207A JP2007013207A JP2008181985A JP 2008181985 A JP2008181985 A JP 2008181985A JP 2007013207 A JP2007013207 A JP 2007013207A JP 2007013207 A JP2007013207 A JP 2007013207A JP 2008181985 A JP2008181985 A JP 2008181985A
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molded body
resin molded
lead frame
resin
optical semiconductor
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Masanori Nishino
正紀 西野
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical semiconductor device that can prevent the formation of a hole in a resin package to which a heat slinger is fitted, and to provide its manufacturing method. <P>SOLUTION: An opening 8 is made to insert the synthetic resin of a second resin molding 4 into a first resin molding 3, so as to form a lead retaining part 7 after filling the backside of the conductive material joint face 6 of a lead frame 1 with the synthetic resin of the second resin molding 4. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、光半導体装置およびその製造方法に関し、放熱板付き樹脂パッケージに二回射出成形を利用する技術に係るものである。   The present invention relates to an optical semiconductor device and a method for manufacturing the same, and relates to a technique that uses two-time injection molding for a resin package with a heat sink.

従来、二回射出成形を利用した二回樹脂成形体品は、一回目の射出成形でリードフレームの一方側の主面に第一樹脂成形体を固着し、二回目の射出成形でリードフレームの他方側の主面に第二樹脂成形体を固着して得ている。CCD等の光半導体装置における二回樹脂成形体品は、例えば、特許文献1において公知である。   Conventionally, a two-resin molded product using the two-time injection molding has a first resin molding fixed to the main surface on one side of the lead frame in the first injection molding, and the lead frame of the lead frame in the second injection molding. The second resin molded body is fixed to the other main surface. For example, Patent Document 1 discloses a two-time resin molded product in an optical semiconductor device such as a CCD.

図4は従来の二回樹脂成形体品を示すものである。図4において、二回樹脂成形体品は、リードフレーム1の一方側の主面に筒状の第一樹脂成形体3が形成してあり、第一樹脂成形体3はリードフレーム1の主面から垂線方向へ突出している。リードフレーム1の他方側の主面にブロック状の第二樹脂成形体4が形成してあり、第二樹脂成形体4はリードフレーム1の他方側の主面から垂線方向へ突出している。   FIG. 4 shows a conventional two-time resin molded article. In FIG. 4, the twice-resin-molded product has a cylindrical first resin molded body 3 formed on one main surface of the lead frame 1, and the first resin molded body 3 is the main surface of the lead frame 1. It protrudes from the vertical direction. A block-shaped second resin molded body 4 is formed on the other main surface of the lead frame 1, and the second resin molded body 4 projects from the other main surface of the lead frame 1 in the perpendicular direction.

第二樹脂成形体4がリードフレーム1の他方側の主面を覆う領域は、リードフレーム1の一方側の主面上において第一樹脂成形体3が占める全領域、ここでは第一樹脂成形体3の外周より内側に含まれる全領域に相対している。   The area where the second resin molded body 4 covers the other main surface of the lead frame 1 is the entire area occupied by the first resin molded body 3 on the one main surface of the lead frame 1, here the first resin molded body 3 is opposed to the entire region included inside the outer periphery of 3.

この二回樹脂成形体品を製造する場合には、上下の成形型(図示省略)のパーティングライン面にリードフレーム1を固定し、リードフレーム1の一方側の主面における導電性材料接合面6の付近の外周をリング状に覆って第一樹脂成形体3を形成する。次に、リードフレーム1の他方側の主面に第一樹脂成形体3と相対する位置で第二樹脂成形体を形成する。
特開平10−209192号公報
In the case of manufacturing the resin molded product twice, the lead frame 1 is fixed to the parting line surfaces of the upper and lower molds (not shown), and the conductive material joint surface on one main surface of the lead frame 1 is used. The first resin molded body 3 is formed by covering the outer periphery in the vicinity of 6 in a ring shape. Next, a second resin molded body is formed on the other main surface of the lead frame 1 at a position facing the first resin molded body 3.
JP-A-10-209192

ところで、従来の二回樹脂成形体品には光半導体装置に放熱板を取付けたものがある。これは図3に示すようなものであり、リードフレーム1には放熱板2を囲んで第一樹脂成形体3が設けてあり、第一樹脂成形体3はリードフレーム1の導電性材料接合面6が露出する形状をなす。   By the way, there is a conventional two-time resin molded product in which a heat sink is attached to an optical semiconductor device. This is as shown in FIG. 3, and the lead frame 1 is provided with a first resin molded body 3 surrounding the heat sink 2, and the first resin molded body 3 is a conductive material joint surface of the lead frame 1. 6 is exposed.

このような放熱板2を取付けた光半導体装置は、その製造過程においてリードフレーム1を成形型に固定し、導電性材料接合面6と放熱板2の投入箇所とを確保しつつ、リードフレーム1に第一樹脂成形体3を形成する。   In such an optical semiconductor device with the heat sink 2 attached, the lead frame 1 is fixed to the mold during the manufacturing process, and the lead frame 1 is secured while securing the conductive material joint surface 6 and the place where the heat sink 2 is inserted. First resin molded body 3 is formed.

二回目の射出成形工程において、第一樹脂成形体3の内側に放熱板2をかしめるようにして配置し、第二樹脂成形体4を形成する。この際に、放熱板2は第一樹脂成形体3の端面に当接させて配置するので、第一樹脂成形体3とリードフレーム1と放熱板2とで密閉される部位に必ず空孔部5が形成される。   In the second injection molding step, the heat radiating plate 2 is arranged inside the first resin molded body 3 so as to be caulked to form the second resin molded body 4. At this time, since the heat radiating plate 2 is disposed in contact with the end surface of the first resin molded body 3, there is always a hole in the portion sealed by the first resin molded body 3, the lead frame 1 and the heat radiating plate 2. 5 is formed.

この空孔部5に気泡が溜まることで、第二樹脂成形体4の形成時に空孔部5への合成樹脂の流れが妨げられ、第二樹脂成形体4が所望の形状にならず、製造したパッケージに不具合が生じることがある。   Since the air bubbles are accumulated in the hole portion 5, the flow of the synthetic resin to the hole portion 5 is hindered when the second resin molded body 4 is formed, and the second resin molded body 4 does not have a desired shape and is manufactured. The package may fail.

その結果、半導体素子(図示せず)や導電性材料などの実装時にリードフレーム1の姿勢が不安定となるために、導電性材料を端子面に完全に接着できず、電気的接続ができないといった不具合が生じていた。   As a result, since the posture of the lead frame 1 becomes unstable when mounting a semiconductor element (not shown) or a conductive material, the conductive material cannot be completely adhered to the terminal surface, and electrical connection cannot be made. There was a bug.

また、光半導体装置自体においても、導電性材料接合面に発生する樹脂バリなどのために、良品状態の導電性材料接合面を確保出来なくなる。
更に、二回樹脂成形体品の成形時に生じた空孔部5に起因して、半導体素子の保護層となる封止樹脂を注入した時に放熱板2の隙間から気泡が発生するなどのアセンブリの際の不具合があった。
Also in the optical semiconductor device itself, a non-defective conductive material bonding surface cannot be secured due to resin burrs generated on the conductive material bonding surface.
Furthermore, due to the holes 5 generated during the molding of the resin molded product twice, bubbles are generated from the gap of the heat radiating plate 2 when a sealing resin serving as a protective layer of the semiconductor element is injected. There was a problem at the time.

本発明は上記した課題を解決するものであり、放熱板を取り付けた樹脂パッケージに空孔部が発生することを防止できる光半導体装置およびその製造方法を提供することを目的とする。   SUMMARY OF THE INVENTION An object of the present invention is to solve the above-described problems, and to provide an optical semiconductor device capable of preventing a hole portion from being generated in a resin package to which a heat sink is attached, and a method for manufacturing the same.

上記の課題を解決するために、本発明の光半導体装置は、第一樹脂成形体を介してリードフレームに配置した放熱板を、第二樹脂成形体で前記第一樹脂成形体とともに前記リードフレームに一体成形して、前記リードフレームの一方側の主面において前記第一樹脂成形体の周囲に導電性材料接合面を形成してなり、前記放熱板上に設けた光半導体素子を封止樹脂で封止した光半導体装置において、前記リードフレームの他方側の主面において前記導電性材料接合面に相応する位置にリード押え部を形成したことを特徴とする。   In order to solve the above problems, an optical semiconductor device according to the present invention includes a heat sink disposed on a lead frame via a first resin molded body, the second resin molded body and the first resin molded body together with the lead frame. The optical semiconductor element provided on the heat radiating plate is encapsulated with a conductive material bonding surface around the first resin molded body on one main surface of the lead frame. In the optical semiconductor device encapsulated in (2), a lead pressing portion is formed at a position corresponding to the conductive material bonding surface on the other main surface of the lead frame.

また、前記リード押え部が前記第二樹脂成形体からなることを特徴とする。
また、前記リード押え部は前記リードフレームと前記第一樹脂成形体とで囲まれた領域に形成し、前記第一樹脂成形体と前記放熱板との間に前記第二樹脂成形体の合成樹脂が通過する開口部を有することを特徴とする。
Further, the lead pressing portion is made of the second resin molded body.
The lead pressing portion is formed in a region surrounded by the lead frame and the first resin molded body, and the synthetic resin of the second resin molded body is between the first resin molded body and the heat radiating plate. It has the opening part which passes.

本発明の光半導体装置の製造方法は、射出成形によりリードフレームの一方側の主面に導電性材料接合面を囲む第一樹脂成形体を一体成形する第一の工程と、前記第一樹脂成形体を形成した前記リードフレームと放熱板とを射出成形用金型に位置決めし、前記第一樹脂成形体を介して前記リードフレームに前記放熱板を配置する第二の工程と、再度の射出成形により第二樹脂成形体で前記第一樹脂成形体とともに前記放熱板を前記リードフレームに一体成形し、前記リードフレームの他方側の主面において前記導電性材料接合面に対応する部位にリード押え部を形成する第三の工程とを含むことを特徴とする。   The method for manufacturing an optical semiconductor device of the present invention includes a first step of integrally forming a first resin molded body surrounding a conductive material joint surface on one main surface of a lead frame by injection molding, and the first resin molding A second step of positioning the heat sink on the lead frame through the first resin molding, and the injection molding again The second resin molded body integrally molds the heat sink together with the first resin molded body on the lead frame, and a lead presser portion on a portion corresponding to the conductive material joint surface on the other main surface of the lead frame. And a third step of forming.

以上のように、本発明によれば、リードフレームの他方側の主面において、一方側の主面の導電性材料接合面に対応する部位に第二樹脂成形体によりリード押え部を形成し、導電性材料接合面の機械的強度を確保して安定した導電性材料接合面を確保することができ、導電性材料が外れるといった課題や気泡の発生課題などが解決できる。   As described above, according to the present invention, in the main surface on the other side of the lead frame, the lead pressing portion is formed by the second resin molded body at a portion corresponding to the conductive material bonding surface of the main surface on one side, The mechanical strength of the conductive material joint surface can be ensured and a stable conductive material joint surface can be secured, and the problem that the conductive material is detached and the problem of bubble generation can be solved.

(実施の形態1)
以下に本発明の実施の形態1について図面を参照しながら説明する。図1は本発明の実施の形態1における光半導体装置の断面図である。
(Embodiment 1)
Embodiment 1 of the present invention will be described below with reference to the drawings. FIG. 1 is a cross-sectional view of an optical semiconductor device according to Embodiment 1 of the present invention.

図1において、光半導体装置の樹脂パッケージは、光半導体素子(図示省略)と電気的に接続されるリードフレーム1が銅あるいは銅合金を主材とする導電性金属配線からなり、導通性を高めるために銅あるいは銅合金に金属めっきを施している。   In FIG. 1, a resin package of an optical semiconductor device has a lead frame 1 electrically connected to an optical semiconductor element (not shown) made of conductive metal wiring mainly composed of copper or a copper alloy, thereby improving conductivity. Therefore, metal plating is applied to copper or copper alloy.

リードフレーム1の表裏面をなす一方側の主面および他方側の主面に合成樹脂で第一樹脂成形体3を一体成形しており、さらに第二樹脂成形体4により第一樹脂成形体3および放熱板2をリードフレーム1と一体成形してある。   The first resin molded body 3 is integrally formed of synthetic resin on one main surface and the other main surface forming the front and back surfaces of the lead frame 1, and the first resin molded body 3 is further formed by the second resin molded body 4. The heat sink 2 is integrally formed with the lead frame 1.

リードフレーム1の一方側の主面において、第一樹脂成形体3はリードフレーム1の導電性材料接合面6を囲んで形成しており、第一樹脂成形体3は内側部3aと外側部3bとの間に導電性材料接合面6が露出する形状をなす。リードフレーム1は放熱板2を配置するための孔部を有し、この孔部の開口内縁に沿って形成した第一樹脂成形体3の内側部3aが放熱板2を囲んでおり、放熱板2は一部が第一樹脂成形体3の内側部3aにかしめた状態に配置している。   On the main surface on one side of the lead frame 1, the first resin molded body 3 is formed so as to surround the conductive material bonding surface 6 of the lead frame 1, and the first resin molded body 3 includes the inner portion 3 a and the outer portion 3 b. The conductive material joint surface 6 is exposed between the two. The lead frame 1 has a hole portion for disposing the heat radiating plate 2, and an inner portion 3 a of the first resin molded body 3 formed along the opening inner edge of the hole portion surrounds the heat radiating plate 2. 2 is arranged in a state where a part thereof is caulked to the inner part 3 a of the first resin molded body 3.

光半導体装置は樹脂パッケージの放熱板2の上に搭載した光半導体素子(図示省略)を樹脂封止してなり、放熱板2を覆うように注入する封止樹脂により光半導体素子がリードフレーム1に第一樹脂成形体3および第二樹脂成形体4と共に一体成形される。   In the optical semiconductor device, an optical semiconductor element (not shown) mounted on a heat sink 2 of a resin package is resin-sealed, and the optical semiconductor element is connected to the lead frame 1 by a sealing resin injected so as to cover the heat sink 2. The first resin molded body 3 and the second resin molded body 4 are integrally molded.

ところで、リードフレーム1に一体成形した第一樹脂成形体3の内側部3aに囲まれた投入位置に放熱板2をかしめて配置することは、一回射出成形の成形加工においてはできず、二回射出成形の成形加工を必要とする。しかし、従来の二回射出成形で成形加工を行なう場合には、上述したように、第一樹脂成形体3とリードフレーム1と放熱板2とで密閉される部位に必ず空孔部5(図3参照)が生じ、後の製造工程で不具合が生じる要因となる。   By the way, the heat sink 2 can be caulked and disposed at the input position surrounded by the inner portion 3a of the first resin molded body 3 integrally molded with the lead frame 1 in a single injection molding process. It requires the molding process of double injection molding. However, when the molding process is performed by the conventional two-time injection molding, as described above, the hole portion 5 (see FIG. 5) is surely formed in the portion sealed by the first resin molded body 3, the lead frame 1, and the heat radiating plate 2. 3), which causes a problem in a later manufacturing process.

このため、図1に示すように、リードフレーム1の他方側の主面において第一樹脂成形体3の内側部3aと外側部3bとの間に囲まれた領域、つまりリードフレーム1の一方側の主面における導電性材料接合面6に相応する位置に第二樹脂成形体4の一部からなるリード押え部7を形成する。   Therefore, as shown in FIG. 1, the region surrounded by the inner side 3 a and the outer side 3 b of the first resin molded body 3 on the other main surface of the lead frame 1, that is, one side of the lead frame 1. A lead press portion 7 made of a part of the second resin molded body 4 is formed at a position corresponding to the conductive material bonding surface 6 on the main surface of the second resin molded body 4.

このリード押え部7を形成するために、第一樹脂成形体3の外側部3bと放熱板2との間に開口部8を設けており、この開口部8を通して第一樹脂成形体3の内側部3aと外側部3bとの間に囲まれた領域に第二樹脂成形体4の合成樹脂が円滑に流入し、この放熱板2の周囲に充填した第二樹脂成形体4が導電性材料接合面6の裏面にリード押え部7を形成する。   In order to form the lead pressing portion 7, an opening 8 is provided between the outer portion 3 b of the first resin molded body 3 and the heat radiating plate 2, and the inside of the first resin molded body 3 is passed through the opening 8. The synthetic resin of the second resin molded body 4 smoothly flows into the region surrounded by the portion 3a and the outer portion 3b, and the second resin molded body 4 filled around the heat sink 2 is joined to the conductive material. A lead presser 7 is formed on the back surface of the surface 6.

この結果、リード押え部7で導電性材料接合面6の機械的強度を確保できるので、光半導体素子との電気的接続を行う導電性ワイヤー(図示せず)を付設する際に、その外部応力に対してリードフレーム1を曲げることなく安定した状態に維持して信頼性の高い配線工程を実現できる。   As a result, the mechanical strength of the conductive material bonding surface 6 can be secured by the lead pressing portion 7, so that when the conductive wire (not shown) for electrical connection with the optical semiconductor element is attached, the external stress On the other hand, a reliable wiring process can be realized by maintaining the lead frame 1 in a stable state without bending.

さらに、従来のように空孔部5(図3参照)が無くなることで、アセンブリの際の不具合、つまり光半導体素子の保護層となる封止樹脂を注入する時に従来のように放熱板2の隙間から気泡が発生することなどを皆無にできる。   Further, since the holes 5 (see FIG. 3) are eliminated as in the prior art, there is a problem in assembly, that is, when the sealing resin serving as a protective layer for the optical semiconductor element is injected, It is possible to eliminate bubbles from the gap.

また、第一樹脂成形体3を形成した後に第一樹脂成形体3に放熱板2を挿入するので放熱板2の上面には樹脂バリが発生しない。このことは放熱板2の高さ寸法公差に関して厳しい管理をする必要がないことを意味し、合成樹脂からなる第一樹脂成形体3に対して放熱板2を投入することで放熱板2のダメージ(カジリ)も発生しない。
(実施の形態2)
図2は本発明の実施の形態2における光半導体装置の製造方法に関する断面図である。図2において、図1と同じ構成要素については同じ符号を用いてその説明を省略する。
Further, since the heat radiating plate 2 is inserted into the first resin molded body 3 after the first resin molded body 3 is formed, no resin burr is generated on the upper surface of the heat radiating plate 2. This means that it is not necessary to strictly control the height dimension tolerance of the heat radiating plate 2, and damage to the heat radiating plate 2 by inserting the heat radiating plate 2 into the first resin molded body 3 made of synthetic resin. There is no galling.
(Embodiment 2)
FIG. 2 is a cross-sectional view relating to a method of manufacturing an optical semiconductor device in the second embodiment of the present invention. In FIG. 2, the same components as those in FIG.

図2(a)に示すように、上下の射出成形用金型(図示省略)のパーティングライン面にリードフレーム1を固定して第一樹脂成形体3を一体成形する。第一樹脂成形体3は内側部3aと外側部3bとの間にリードフレーム1の導電性材料接合面6が露出する形状をなし、第一樹脂成形体3の内側部3aで囲む領域に次工程で配置する放熱板2を投入するための孔部を確保してある。   As shown in FIG. 2A, the lead frame 1 is fixed to the parting line surfaces of the upper and lower injection molds (not shown), and the first resin molded body 3 is integrally molded. The first resin molded body 3 has a shape in which the conductive material joint surface 6 of the lead frame 1 is exposed between the inner portion 3a and the outer portion 3b, and is next to the region surrounded by the inner portion 3a of the first resin molded body 3. A hole for inserting the heat sink 2 to be arranged in the process is secured.

次に、図2(b)に示すように、前記第一樹脂成形体3と放熱板2を射出成形用金型(図示省略)に位置決めするとともに、第一樹脂成形体3の内側部3aで囲む領域に放熱板2を配置し、放熱板2の一部を第一樹脂成形体3の内側部3aにかしめた状態とする。放熱板2を配置した状態において、第一樹脂成形体3の外側部3bと放熱板2との間に開口部8が存在する。   Next, as shown in FIG. 2 (b), the first resin molded body 3 and the heat radiating plate 2 are positioned in an injection mold (not shown), and at the inner portion 3 a of the first resin molded body 3. The heat radiating plate 2 is disposed in the surrounding region, and a part of the heat radiating plate 2 is caulked to the inner portion 3 a of the first resin molded body 3. In the state where the heat radiating plate 2 is disposed, an opening 8 exists between the outer portion 3 b of the first resin molded body 3 and the heat radiating plate 2.

次に、図2(c)に示すように、二回目の射出成形により第二樹脂成形体4を成形し、リードフレーム1と第一樹脂成形体3と第二樹脂成形体4とを一体成形する。このとき、第一樹脂成形体3の内側部3aと外側部3bとの間に、開口部8を通して第二樹脂成形体4の合成樹脂が円滑に流入し、この第二樹脂成形体4の合成樹脂が導電性材料接合面6の裏面に相応する放熱板2の周囲にリード押え部7を形成する。   Next, as shown in FIG. 2C, the second resin molded body 4 is molded by the second injection molding, and the lead frame 1, the first resin molded body 3 and the second resin molded body 4 are integrally molded. To do. At this time, the synthetic resin of the second resin molded body 4 smoothly flows through the opening 8 between the inner portion 3 a and the outer portion 3 b of the first resin molded body 3. Resin forms a lead pressing portion 7 around the heat sink 2 corresponding to the back surface of the conductive material bonding surface 6.

このように、本発明の実施の形態2の製造方法により、容易に放熱板2付き光半導体装置を提供することができる。また、本発明の光半導体装置の空孔部5を皆無にするという技術思想から逸脱しない限り、本発明の光半導体装置およびその製造方法は上述した実施の形態に示すものに限られない。   Thus, the optical semiconductor device with the heat sink 2 can be easily provided by the manufacturing method according to the second embodiment of the present invention. Further, the optical semiconductor device of the present invention and the manufacturing method thereof are not limited to those shown in the above-described embodiments unless departing from the technical idea of eliminating the hole portion 5 of the optical semiconductor device of the present invention.

上述したように、本発明は放熱板付き樹脂パッケージに二回射出成形を利用した光半導体装置に関して有用であり、特に高輝度及び高出力LED樹脂パッケージに適している。   As described above, the present invention is useful for an optical semiconductor device using two-injection molding for a resin package with a heat sink, and is particularly suitable for a high-luminance and high-power LED resin package.

本発明の実施の形態1における光半導体装置の断面図Sectional drawing of the optical semiconductor device in Embodiment 1 of this invention (a)、(b)、(c)は、本発明の実施の形態2における光半導体装置の製造方法の各工程を示す断面図(A), (b), (c) is sectional drawing which shows each process of the manufacturing method of the optical semiconductor device in Embodiment 2 of this invention. 従来の光半導体装置の断面図Sectional view of a conventional optical semiconductor device 従来の光半導体装置の断面図Sectional view of a conventional optical semiconductor device

符号の説明Explanation of symbols

1 リードフレーム
2 放熱板
3 第一樹脂成形体
3a 内側部
3b 外側部
4 第二樹脂成形体
5 空孔部
6 導電性材料接合面
7 リード押え部
8 開口部
DESCRIPTION OF SYMBOLS 1 Lead frame 2 Heat sink 3 1st resin molding 3a Inner part 3b Outer part 4 Second resin molding 5 Hole part 6 Conductive material joining surface 7 Lead holding part 8 Opening part

Claims (4)

第一樹脂成形体を介してリードフレームに配置した放熱板を、第二樹脂成形体で前記第一樹脂成形体とともに前記リードフレームに一体成形して、前記リードフレームの一方側の主面において前記第一樹脂成形体の周囲に導電性材料接合面を形成してなり、前記放熱板上に設けた光半導体素子を封止樹脂で封止した光半導体装置において、前記リードフレームの他方側の主面において前記導電性材料接合面に相応する位置にリード押え部を形成したことを特徴とする光半導体装置。 A heat radiating plate disposed on the lead frame via the first resin molded body is integrally molded with the lead frame together with the first resin molded body with the second resin molded body, and the main surface on one side of the lead frame is In an optical semiconductor device in which a conductive material bonding surface is formed around a first resin molded body and an optical semiconductor element provided on the heat sink is sealed with a sealing resin, An optical semiconductor device characterized in that a lead pressing portion is formed at a position corresponding to the conductive material bonding surface on the surface. 前記リード押え部が前記第二樹脂成形体からなることを特徴とする請求項1記載の光半導体装置。 The optical semiconductor device according to claim 1, wherein the lead pressing portion is made of the second resin molded body. 前記リード押え部は前記リードフレームと前記第一樹脂成形体とで囲まれた領域に形成し、前記第一樹脂成形体と前記放熱板との間に前記第二樹脂成形体の合成樹脂が通過する開口部を有することを特徴とする請求項2記載の光半導体装置。 The lead holding portion is formed in a region surrounded by the lead frame and the first resin molded body, and the synthetic resin of the second resin molded body passes between the first resin molded body and the heat radiating plate. The optical semiconductor device according to claim 2, further comprising: an opening to be formed. 射出成形によりリードフレームの一方側の主面に導電性材料接合面を囲む第一樹脂成形体を一体成形する第一の工程と、前記第一樹脂成形体を形成した前記リードフレームと放熱板とを射出成形用金型に位置決めし、前記第一樹脂成形体を介して前記リードフレームに前記放熱板を配置する第二の工程と、再度の射出成形により第二樹脂成形体で前記第一樹脂成形体とともに前記放熱板を前記リードフレームに一体成形し、前記リードフレームの他方側の主面において前記導電性材料接合面に対応する部位にリード押え部を形成する第三の工程とを含むことを特徴とする光半導体装置の製造方法。 A first step of integrally forming a first resin molded body surrounding the conductive material joint surface on one main surface of the lead frame by injection molding; and the lead frame and the heat sink formed with the first resin molded body. Is positioned on the injection mold, and the heat sink is disposed on the lead frame via the first resin molded body, and the second resin molded body is re-injected to form the first resin. And a third step of integrally forming the heat radiating plate with the molded body on the lead frame and forming a lead pressing portion at a portion corresponding to the conductive material joint surface on the other main surface of the lead frame. An optical semiconductor device manufacturing method characterized by
JP2007013207A 2007-01-24 2007-01-24 Optical semiconductor device and its manufacturing method Withdrawn JP2008181985A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014029996A (en) * 2012-07-04 2014-02-13 Nichia Chem Ind Ltd Package mold for light emitting device and light emitting device using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014029996A (en) * 2012-07-04 2014-02-13 Nichia Chem Ind Ltd Package mold for light emitting device and light emitting device using the same

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