JP2008153264A - Polarizing apparatus for pressure sensor and polarizing method thereof - Google Patents
Polarizing apparatus for pressure sensor and polarizing method thereof Download PDFInfo
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Abstract
Description
本発明は圧力センサの分極装置および分極方法に関するものである。 The present invention relates to a polarization device and a polarization method for a pressure sensor.
従来、この種の圧力センサは図１０示すようなものがある（例えば特許文献１参照）。図１０示すように、芯電極１の周囲に可撓性感圧体２を配置し、その周囲に外側電極３と外皮４を順次被覆して構成されている。可撓性感圧体２としては合成ゴムや合成樹脂の中にチタン酸鉛、チタン酸ジルコン酸鉛のセラミック圧電体粉末を添加した複合体が用いられ、外側電極３は可撓性感圧体２の表面に銀系ゴム塗料などの導電塗料を塗着したものが用いられている。上記ケーブル状圧力センサの一部あるいは全面に圧力が印加されたとき、その部分の圧力センサが歪む結果、芯電極１と外側電極３の間に電圧が誘起され、この誘起電圧を利用して圧力を検出している。 Conventionally, there is such a pressure sensor as shown in FIG. 10 (see, for example, Patent Document 1). As shown in FIG. 10, a flexible pressure sensitive body 2 is arranged around the core electrode 1, and an outer electrode 3 and an outer skin 4 are sequentially covered around the flexible pressure sensitive body 2. As the flexible pressure-sensitive body 2, a composite in which ceramic piezoelectric powder of lead titanate and lead zirconate titanate is added to synthetic rubber or synthetic resin is used, and the outer electrode 3 is made of the flexible pressure-sensitive body 2. The surface is coated with a conductive paint such as silver rubber paint. When a pressure is applied to a part or the entire surface of the cable-shaped pressure sensor, a voltage is induced between the core electrode 1 and the outer electrode 3 as a result of distortion of the pressure sensor of the part. Is detected.
分極方法は、芯電極１と外側電極３の間に高電圧を印加して、可撓性感圧体２を分極している（例えば非特許文献１参照）。また図１１示すように、可撓性感圧体２をブロック状導電体５の通路に配設させ、ブロック状導電体５と芯電極１間に電圧を印加させることにより、ブロック状導電体５に配設された部分の可撓性感圧体２を分極している（例えば特許文献２参照）。この分極により、セラミック粒子の自発分極の方向が電界方向に揃うので、可撓性感圧体２に圧電性が付与される。
しかしながら、従来の圧力センサの分極方法では、芯電極１と外側電極３の間に高電圧を印加したときに、可撓性感圧体２中に微小なクラックや空孔などの欠陥が存在すると、その欠陥部で微小放電が生じる。この微小放電により、可撓性感圧体２の構成材料が熱的に蒸発、飛散して芯電極１と外側電極３間が短絡し、芯電極１と外側電極３間に高電圧を印加できなくなるので可撓性感圧体２を分極できないという課題を有していた。また、ブロック状導電体５に可撓性感圧体２を配設し、可撓性感圧体２を移動手段７によって移動させながら分極する場合においては、可撓性感圧体２はケーブル状をなしているので、ブロック状導電体５に接する部分と接さない部分が生じてしまい、分極の度合に差が生じ、特性ばらつきが発生するという課題があった。さらに、ブロック状導電体５を加熱手段６によって加熱することによって、可撓性感圧体２を加熱する場合においても、可撓性感圧体２には加熱される部分とされない部分が存在し、温度分布が生じることによる、特性ばらつきが発生するという課題があった。さらに、分極の際に芯電極と導電体との間に引力が発生するため、分極しながら可撓性感圧体を移動させると可撓性感圧体に過剰な張力が加わってしまうので、例えばプーリーやロール等を介して可撓性感圧体を移動させると
可撓性感圧体がプーリー等に接した際に張力等によって可撓性感圧体が変形するという課題があった。
However, in the conventional pressure sensor polarization method, when a high voltage is applied between the core electrode 1 and the outer electrode 3, there is a defect such as a minute crack or a hole in the flexible pressure-sensitive body 2. A minute discharge occurs at the defective portion. Due to this minute discharge, the constituent material of the flexible pressure-sensitive body 2 is thermally evaporated and scattered, the core electrode 1 and the outer electrode 3 are short-circuited, and a high voltage cannot be applied between the core electrode 1 and the outer electrode 3. Therefore, there was a problem that the flexible pressure-sensitive body 2 could not be polarized. In the case where the flexible pressure-sensitive body 2 is disposed on the block-shaped conductor 5 and is polarized while being moved by the moving means 7, the flexible pressure-sensitive body 2 has a cable shape. Therefore, there is a problem that a portion that contacts the block-like conductor 5 and a portion that does not contact are generated, a difference occurs in the degree of polarization, and characteristic variation occurs. Furthermore, even when the flexible pressure-sensitive body 2 is heated by heating the block-shaped conductor 5 by the heating means 6, the flexible pressure-sensitive body 2 has a portion that is not heated, and the temperature There has been a problem that characteristic variations occur due to the distribution. Furthermore, since an attractive force is generated between the core electrode and the conductor during polarization, if the flexible pressure sensitive body is moved while being polarized, excessive tension is applied to the flexible pressure sensitive body. When the flexible pressure sensitive body is moved via a roll or the like, there is a problem that the flexible pressure sensitive body is deformed by tension or the like when the flexible pressure sensitive body comes into contact with a pulley or the like.
本発明は、前記従来の課題を解決するもので、欠陥部が存在しても全体の可撓性感圧体が分極できなくなることを防ぐ。さらに、複数の玉鎖で構成された導電体を可撓性感圧体の全周で接触させ、導電体を移動させることで可撓性感圧体を分極する構成にすることで、可撓性感圧体に余剰な張力を印加させることなく均一に満遍なく分極させることで、特
性ばらつきのない安定した特性を得ることを目的とする。
The present invention solves the above-described conventional problems, and prevents the entire flexible pressure-sensitive body from being unable to polarize even if a defect exists. Furthermore, a flexible pressure-sensitive body is configured to polarize the flexible pressure-sensitive body by bringing a conductor composed of a plurality of ball chains into contact with the entire circumference of the flexible pressure-sensitive body and moving the conductor. The object is to obtain stable characteristics without characteristic variation by uniformly and uniformly polarizing without applying excessive tension to the body.
前記従来の課題を解決するために、本発明のケーブル状圧力センサの分極装置は、芯電極に周設された可撓性感圧体と、前記可撓性感圧体の全周で接触するように複数の玉鎖で構成された導電体と、前記芯電極と前記導電体に接続された電圧印加手段と、前記可撓性感圧体を加熱する加熱手段と、前記導電体を前記可撓性感圧体に接触しながら移動させる移動手段とを設けることによって、可撓性感圧体に均一に導電体を接触させることができるので全周囲から均一に満遍なく分極することが可能となる。このため、分極できていない部分がなく、特性ばらつきのない安定した特性を得ることができる。さらに、導電体を移動させて可撓性感圧体を分極するため、分極時に可撓性感圧体を移動させる必要が無く、過剰な張力などが可撓性感圧体に印加されるのを抑制することが出来るので、例えば可撓性感圧体がプーリーやロール等に接した際などによって生じる変形などを抑制することができる。 In order to solve the above-described conventional problems, the polarization device for a cable-shaped pressure sensor according to the present invention is in contact with the flexible pressure-sensitive body provided around the core electrode on the entire circumference of the flexible pressure-sensitive body. A conductor composed of a plurality of ball chains, a voltage applying means connected to the core electrode and the conductor, a heating means for heating the flexible pressure sensitive body, and the conductor to the flexible pressure sensitive By providing the moving means for moving while contacting the body, the conductor can be uniformly contacted with the flexible pressure-sensitive body, so that it is possible to uniformly polarize the entire circumference. For this reason, there are no unpolarized portions, and stable characteristics without characteristic variations can be obtained. Further, since the flexible pressure sensitive body is polarized by moving the conductor, it is not necessary to move the flexible pressure sensitive body during polarization, and excessive tension is not applied to the flexible pressure sensitive body. Therefore, for example, deformation caused when the flexible pressure-sensitive body comes into contact with a pulley, a roll, or the like can be suppressed.
本発明のケーブル状圧力センサは、欠陥部が存在しても長尺状のケーブル全体の可撓性感圧体が分極できなくなることを防ぐことができる。さらに、複数の玉鎖で構成された導電体を可撓性感圧体の全周で接触するように構成にすることで、均一に満遍なく分極し、特性ばらつきのない安定した特性を得ることができる。さらに、導電体を移動させて可撓性感圧体を分極するため、分極時に可撓性感圧体を移動させる必要が無く、過剰な張力などが可撓性感圧体に印加されるのを抑制することが出来るので、例えば可撓性感圧体がプーリーやロール等に接した際などによって生じる変形などを抑制することができる。 The cable-shaped pressure sensor of the present invention can prevent the flexible pressure-sensitive body of the entire long cable from being unable to polarize even if a defect exists. Furthermore, by configuring the conductor composed of a plurality of ball chains so as to be in contact with the entire circumference of the flexible pressure-sensitive body, it is possible to uniformly polarize evenly and obtain stable characteristics without characteristic variation. . Further, since the flexible pressure sensitive body is polarized by moving the conductor, it is not necessary to move the flexible pressure sensitive body during polarization, and excessive tension is not applied to the flexible pressure sensitive body. Therefore, for example, deformation caused when the flexible pressure-sensitive body comes into contact with a pulley, a roll, or the like can be suppressed.
第１の発明は、芯電極に周設された可撓性感圧体と、前記可撓性感圧体の全周で接触するように複数の玉鎖で構成された導電体と、前記芯電極と前記導電体に接続された電圧印加手段と、前記可撓性感圧体を加熱する加熱手段と、前記可撓性感圧体を前記導電体に接触しながら移動させる移動手段とを設け、可撓性感圧体に均一に導電体を接触させることができるので全周囲から均一に満遍なく分極することが可能となる。このため、分極できていない部分がなく、特性ばらつきのない安定した特性を得ることができる。さらに、導電体を移動させて可撓性感圧体を分極するため、分極時に可撓性感圧体を移動させる必要が無く、過剰な張力などが可撓性感圧体に印加されるのを抑制することが出来るので、例えば可撓性感圧体がプーリーやロール等に接した際などによって生じる変形などを抑制することができる。 According to a first aspect of the present invention, there is provided a flexible pressure-sensitive body provided around a core electrode, a conductor composed of a plurality of ball chains so as to be in contact with the entire circumference of the flexible pressure-sensitive body, and the core electrode. A voltage applying means connected to the conductor, a heating means for heating the flexible pressure sensitive body, and a moving means for moving the flexible pressure sensitive body in contact with the conductor are provided. Since the conductor can be brought into contact with the pressure body uniformly, it becomes possible to uniformly polarize the entire circumference. For this reason, there are no unpolarized portions, and stable characteristics without characteristic variations can be obtained. Furthermore, since the flexible pressure sensitive body is polarized by moving the conductor, it is not necessary to move the flexible pressure sensitive body during polarization, and excessive tension is not applied to the flexible pressure sensitive body. Therefore, for example, deformation caused when the flexible pressure-sensitive body comes into contact with a pulley, a roll, or the like can be suppressed.
第２の発明は、特に第１の発明において、可撓性感圧体を移動させる第二の移動手段を設け、第二の移動手段は電圧印加手段が停止している時に動作する構成にすることによって、分極時に生じる導電体と芯電極間の引力の影響も受けないので過剰な張力などが可撓性感圧体に印加されるのを抑制しながら、長尺の可撓性感圧体を分極することが可能になる。つまり、分極装置内に配設されている可撓性感圧体は導電体を移動させることで分極し、分極終了時点で第二の移動手段によって分極された可撓性感圧体を移動させるとともに、分極されていない可撓性感圧体を分極装置内に配設させることができるため、長尺の可撓性感圧体を分極することが可能となる。さらに、第二の移動手段は電圧印加手段の出力が停止している時に行うので、分極時に生じる導電体と芯電極間の引力の影響も受けないので、過剰な張力などが可撓性感圧体に印加されるのを抑制することも可能となる。 In the second invention, particularly in the first invention, a second moving means for moving the flexible pressure sensitive body is provided, and the second moving means is configured to operate when the voltage applying means is stopped. Is not affected by the attractive force between the conductor and the core electrode generated during polarization, and polarizes a long flexible pressure sensitive body while suppressing application of excessive tension to the flexible pressure sensitive body. It becomes possible. In other words, the flexible pressure sensitive body disposed in the polarization device is polarized by moving the conductor, and the flexible pressure sensitive body polarized by the second moving means is moved at the end of polarization, Since a non-polarized flexible pressure sensitive body can be disposed in the polarization device, a long flexible pressure sensitive body can be polarized. Further, since the second moving means is performed when the output of the voltage applying means is stopped, it is not affected by the attractive force between the conductor and the core electrode generated at the time of polarization. It is also possible to suppress the application to.
第３の発明は、特に第１または第２の発明において、導電体を導電性材料で構成した支持部材に固定させることによって、電圧印加手段をひとつの導電体に接続するだけで各々の導電体に電圧を印加することができるため、電圧印加手段からの接続を簡素化できる。 In the third invention, particularly in the first or second invention, each conductor can be obtained by simply connecting the voltage applying means to one conductor by fixing the conductor to a support member made of a conductive material. Since a voltage can be applied to the connection, the connection from the voltage application means can be simplified.
第４の発明は、特に、第１〜３の発明において、玉鎖で構成された導電体の直径は、少なくとも可撓性感圧体の直径より小さい径で構成することによって、可撓性感圧体と導電体との接触面積を多くすることができるため、全周囲から均一に満遍なく分極することが可能となる。このため、分極できていない部分がなく、特性ばらつきのない安定した特性を得ることができる。 According to a fourth aspect of the invention, in particular, in the first to third aspects of the invention, the diameter of the conductor constituted by the ball chain is configured to be at least smaller than the diameter of the flexible pressure sensitive body. Since the contact area between the conductor and the conductor can be increased, it becomes possible to uniformly and uniformly polarize the entire periphery. For this reason, there are no unpolarized portions, and stable characteristics without characteristic variations can be obtained.
第５の発明は、特に第１〜３の発明において、導電体の直径は少なくとも２種類以上で構成することによって、導電体の直径を１種類で構成するよりも可撓性感圧体と導電体との接触面積を多くすることができるため、全周囲から均一に満遍なく分極することが可能となる。例えば、１つの直径の導電体が接触することによって生じる隙間を、他の直径の導電体で埋めることができるので、分極できていない部分がなく、特性ばらつきのない安定した特性を得ることができる。 According to a fifth aspect of the invention, in particular, in the first to third aspects of the invention, the diameter of the conductor is composed of at least two types, so that the flexible pressure-sensitive body and the conductor are composed of one type of diameter of the conductor. Therefore, it is possible to uniformly and uniformly polarize from the entire periphery. For example, since a gap generated by contact of a conductor having one diameter can be filled with a conductor having another diameter, there is no portion that is not polarized, and stable characteristics without characteristic variation can be obtained. .
第６の発明は、特に第１〜５の発明において、導電体が、加熱手段を兼ねる構成にすることによって、可撓性感圧体の周囲から均一に電圧印加と加熱を同時に行うので、分極装置を簡素化できるとともに、均熱性が向上することによって、分極効率を向上させることができる。 In the sixth aspect of the invention, in particular, in the first to fifth aspects of the invention, since the conductor serves as the heating means, voltage application and heating are simultaneously performed uniformly from the periphery of the flexible pressure sensitive body. The polarization efficiency can be improved by improving the soaking property.
第７の発明は、特に第１〜６の発明において、支持部材に固定された複数の導電体を空隙を介して複数設けることによって、可撓性感圧体に欠陥部が存在すると、欠陥部を一部に含む一連の可撓性感圧体の分極はできなくなっていたものが、複数の分極電極を断続して設けることで、一定の長さで分極がし得なかった部分があったとしても、分極出来なかった部分を最小単位にとどめて、再度分極することが可能となる。よって、一連の可撓性感圧体の外側電極を形成する前に、微小な欠陥が一定長さ範囲内に存在することを検知することができ、これを加工して圧電ケーブルとして製造する際の歩留まりを向上することができる。 In a seventh invention, in particular, in the first to sixth inventions, when a plurality of conductors fixed to the support member are provided via a gap, if there is a defect in the flexible pressure sensitive body, the defect is Even though some of the series of flexible pressure-sensitive bodies could not be polarized, even if there was a part that could not be polarized with a certain length by intermittently providing multiple polarization electrodes It becomes possible to polarize again by keeping the portion that could not be polarized to the minimum unit. Therefore, before forming the outer electrode of a series of flexible pressure-sensitive bodies, it can be detected that a minute defect exists within a certain length range, and when this is processed to produce a piezoelectric cable Yield can be improved.
第８の発明は、特に第３〜７の発明において、複数の導電体を導電性材料で構成した支持部材に固定させることによって、電圧印加手段を支持部材に接続するだけで各々の導電体に電圧を印加することができるため、電圧印加手段からの接続を簡素化できる。 According to an eighth invention, in particular, in the third to seventh inventions, by fixing a plurality of conductors to a support member made of a conductive material, each voltage conductor is simply connected to the support member. Since a voltage can be applied, the connection from the voltage applying means can be simplified.
第９の発明は、芯電極に可撓性感圧体を周設するステップと、前記可撓性感圧体を分極する複数の玉鎖で構成された導電体と前記芯電極に接続された電圧印加手段により電圧を印加するステップと、分極中に前記可撓性感圧体を加熱するステップとからなるケーブル状圧力センサの分極方法である。そしてこの分極方法により、電圧印加がケーブルの全周囲に印加されるので、均質な分極特性を有するケーブル状圧力センサを製造することができる。 According to a ninth aspect of the present invention, there is provided a step of arranging a flexible pressure sensitive body around the core electrode, a conductor composed of a plurality of ball chains for polarizing the flexible pressure sensitive body, and voltage application connected to the core electrode. A polarization method for a cable-shaped pressure sensor comprising a step of applying a voltage by means and a step of heating the flexible pressure sensitive body during polarization. And by this polarization method, voltage application is applied to the entire circumference of the cable, so that a cable-shaped pressure sensor having uniform polarization characteristics can be manufactured.
以下、本発明の実施の形態について、図面を参照しながら説明する。なお、この実施の形態によって本発明が限定されるものではない。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the present invention is not limited to the embodiments.
（実施の形態１）
図１は本発明の実施の形態１におけるケーブル状圧力センサの分極装置の構成を示す外観斜視図である。
(Embodiment 1)
FIG. 1 is an external perspective view showing a configuration of a polarization device for a cable-shaped pressure sensor according to Embodiment 1 of the present invention.
図１においてケーブル状圧力センサは芯電極１１に周設された可撓性感圧体１２が形成される。芯電極１１として、コイル状金属線や金属細線を束ねた線などが用いられる。可撓性感圧体１２として、エポキシ樹脂、ウレタン樹脂、クロロプレン樹脂、塩素化ポリエチレン、シリコン樹脂等の高分子母材に、チタン酸ジルコン酸鉛などの圧電材料を複合化
した高分子材料が用いられる。この可撓性感圧体１２は、複数の玉鎖で構成された導電体１３に全周で接触するように配設される。導電体１３として、鉄、ステンレス、銅、黄銅、アルミニウム等を用いる。本実施の形態において、導電体１３はφ１．５のアルミニウムの球を縦方向に１０個配設した物を縦に３０個、横に１０個配設する構成とした。なお、このときの可撓性感圧体１２の径は１．６ｍｍであった。さらに、導電体１３を加熱するために分導電体１３の上部に加熱手段１４を設けた。可撓性感圧体１２を加熱しながら導電体１３によって分極することで、効率良く分極を行うことができる。
In FIG. 1, the cable-shaped pressure sensor is formed with a flexible pressure-sensitive body 12 that is provided around the core electrode 11. As the core electrode 11, a coiled metal wire, a wire bundled with fine metal wires, or the like is used. As the flexible pressure-sensitive body 12, a polymer material in which a piezoelectric base material such as lead zirconate titanate is combined with a polymer base material such as epoxy resin, urethane resin, chloroprene resin, chlorinated polyethylene, or silicon resin is used. . The flexible pressure-sensitive body 12 is disposed so as to contact the conductor 13 composed of a plurality of ball chains on the entire circumference. As the conductor 13, iron, stainless steel, copper, brass, aluminum or the like is used. In the present embodiment, the conductor 13 has a structure in which 30 pieces of φ1.5 aluminum balls arranged in the vertical direction are arranged vertically and 10 pieces are arranged horizontally. In addition, the diameter of the flexible pressure sensitive body 12 at this time was 1.6 mm. Further, a heating means 14 is provided on the top of the split conductor 13 in order to heat the conductor 13. Polarization can be efficiently performed by polarizing the conductor 13 while heating the flexible pressure sensitive body 12.
さらに、導電体１３を移動させる移動手段１５を設けている。本実施例において移動手段１５は、導電体１３上にレールと一体になったモータを設けることで、導電体１３が可動する構成としており、この移動手段１５によって導電体１３を可撓性感圧体１２に接しながら移動させることが可能になる。移動手段１５であるモータのスピードを変化させることによって、導電体１３が可撓性感圧体１２に接触する時間、言い換えれば分極時間を容易に調整することが可能となる。また、移動手段１５を設けることによって、自動化することができるため、歩留まりを向上することができる。 Furthermore, moving means 15 for moving the conductor 13 is provided. In the present embodiment, the moving means 15 is configured such that the electric conductor 13 is movable by providing a motor integrated with the rail on the electric conductor 13, and the electric conductor 13 is moved by the moving means 15 to the flexible pressure sensitive body. 12 can be moved while touching. By changing the speed of the motor, which is the moving means 15, it is possible to easily adjust the time for which the conductor 13 is in contact with the flexible pressure sensitive body 12, in other words, the polarization time. In addition, since the moving means 15 can be automated, the yield can be improved.
また、導電体１３はリード線１６ｂによって電気的に接続される。リード線１６ａは電気的に電圧印加手段１７の正極または負極に接続され、芯電極１１はリード線１６ａを介して電気的に電圧印加手段１７の他の極に接続される。このように接続して、電圧印加手段１７により、芯電極１１と導電体１３間に高電圧が印加されるので、可撓性感圧体１２が分極される。本実施の形態において印加電圧は５ｋＶ／ｍｍで分極を行った。可撓性感圧体１２の中に微少な欠陥が含まれ、その部分が導電体１３に配設されているとき、欠陥部で生じる微少な放電により導電体１３と芯電極１１間に高電流が流れ、短絡するために分極できなくなるが、欠陥部が導電体１３から脱離し、導電体１３に配設されている可撓性感圧体１２中に欠陥がなければ、導電体１３と芯電極１１間の絶縁性は再び回復するので、分極が可能となる。このように本発明の分極装置によれば、欠陥を含む部分が導電体１３に配設されているときのみ、分極はできないがそれ以外の場合は分極可能となる。従って、欠陥の存在により可撓性感圧体１２が全体にわたって分極できなくなることはない。また、本実施の形態１において、可撓性感圧体１２の芯電極１１をアース電位にして、芯電極１１と導電体１３の間に直流電圧を印加した。このように接続することで、人体に危険な直流高電圧部分を導電体１３に限定でき、人体への安全を確保できる。 The conductor 13 is electrically connected by the lead wire 16b. The lead wire 16a is electrically connected to the positive electrode or the negative electrode of the voltage applying means 17, and the core electrode 11 is electrically connected to the other pole of the voltage applying means 17 via the lead wire 16a. By connecting in this way, a high voltage is applied between the core electrode 11 and the conductor 13 by the voltage applying means 17, so that the flexible pressure sensitive body 12 is polarized. In the present embodiment, polarization was performed at an applied voltage of 5 kV / mm. When the flexible pressure-sensitive body 12 includes a minute defect and the portion is disposed on the conductor 13, a high current is generated between the conductor 13 and the core electrode 11 due to a minute discharge generated in the defect portion. Although it cannot be polarized because it flows and is short-circuited, if the defective part is detached from the conductor 13 and there is no defect in the flexible pressure-sensitive body 12 disposed on the conductor 13, the conductor 13 and the core electrode 11 Since the insulation between them is restored again, polarization becomes possible. As described above, according to the polarization device of the present invention, polarization cannot be performed only when a portion including a defect is disposed on the conductor 13, but polarization is possible in other cases. Therefore, the flexible pressure-sensitive body 12 cannot be polarized as a whole due to the presence of defects. In the first embodiment, the core electrode 11 of the flexible pressure sensitive body 12 is set to the ground potential, and a DC voltage is applied between the core electrode 11 and the conductor 13. By connecting in this way, the direct current high voltage part dangerous to the human body can be limited to the conductor 13, and safety to the human body can be secured.
本構成にすることによって、可撓性感圧体１２の全周囲を導電体１３で接触しながら分極することができるので、可撓性感圧体１２の全周囲から均一に満遍なく分極することが可能となるため、分極できていない部分がなく、特性ばらつきのない安定した特性を得ることができる。また、可撓性感圧体１２の全周囲を導電体１３で密着するよりも、可撓性感圧体１２との接触抵抗を低減した状態で導電体１３と接触しながら移動をさせることができるので、生産性が向上するとともに、接触抵抗によって生じる可撓性感圧体１２の傷を防ぐこともできる。 By adopting this configuration, the entire circumference of the flexible pressure sensitive body 12 can be polarized while being in contact with the conductor 13, so that it is possible to uniformly and evenly polarize from the entire circumference of the flexible pressure sensitive body 12. Therefore, there is no portion that is not polarized, and stable characteristics without characteristic variations can be obtained. In addition, since the contact with the flexible pressure-sensitive body 12 is reduced, it can be moved while being in contact with the flexible pressure-sensitive body 12 as compared with the case where the entire circumference of the flexible pressure-sensitive body 12 is in close contact with the conductor 13. In addition to improving productivity, it is also possible to prevent damage to the flexible pressure-sensitive body 12 caused by contact resistance.
さらに、分極しながら導電体１３を移動させることによって、可撓性感圧体１３に過剰な張力などが可撓性感圧体１２に印加されるのを抑制することが出来るので、例えば可撓性感圧体１２がプーリーやローラー等に接した際などによって生じる変形などを抑制することができる。つまり、電圧印加手段１７を動作中に可撓性感圧体１２を移動させる場合、芯電極１１と導電体１３間の引力と可撓性感圧体１２と導電体１３の摩擦の両方の力が必要になるため、大きな力が必要になる。例えば長尺の可撓性感圧体１３を分極する場合には、可撓性感圧体１２を蛇行させて配設することが分極装置のスペースとして有効であるが、その際には可撓性感圧体１２の進行方向を変更させるプーリーやローラー等が必要となる。図２にプーリー１８を介した本発明の分極装置を示す。本実施例において２０ｍの可撓性感圧体１２を分極するため、５ｍの可撓性感圧体１２を１列に配設し、プーリー
１８を３個用いることで４列配設する構成とした。通常、プーリー１８を介して可撓性感圧体１２を移動させる場合、大きな張力で可撓性感圧体１２を引っ張るためにプーリーによって可撓性感圧体１２が押しつけられてしまい、変形するなどの課題があったが、本実施例のように導電体１３が移動することで可撓性感圧体１２を連続的に分極することができるため、直接可撓性感圧体１３がプーリー等によって変形することがないため、信頼性を向上することができる。
Furthermore, by moving the conductor 13 while being polarized, it is possible to suppress an excessive tension or the like from being applied to the flexible pressure sensitive body 12. The deformation | transformation etc. which arise when the body 12 contacts a pulley, a roller, etc. can be suppressed. That is, when the flexible pressure sensitive body 12 is moved while the voltage application means 17 is operating, both the attractive force between the core electrode 11 and the conductor 13 and the friction between the flexible pressure sensitive body 12 and the conductor 13 are required. Therefore, great power is required. For example, when the long flexible pressure sensitive body 13 is polarized, it is effective as a space for the polarization device to arrange the flexible pressure sensitive body 12 in a meandering manner. A pulley, a roller, etc. which change the advancing direction of the body 12 are needed. FIG. 2 shows the polarization device of the present invention via a pulley 18. In this embodiment, in order to polarize the 20 m flexible pressure sensitive bodies 12, the 5 m flexible pressure sensitive bodies 12 are arranged in one row, and three pulleys 18 are used so that four rows are arranged. Usually, when the flexible pressure sensitive body 12 is moved via the pulley 18, the flexible pressure sensitive body 12 is pressed by the pulley in order to pull the flexible pressure sensitive body 12 with a large tension, so that the deformation is caused. However, since the flexible pressure sensitive body 12 can be continuously polarized by moving the conductor 13 as in this embodiment, the flexible pressure sensitive body 13 is directly deformed by a pulley or the like. Therefore, reliability can be improved.
また、図１１示す従来の分極装置では、ブロック状導電体５に接さない部分と接する部分の各々に振動を印加し、その時に発生する電圧を測定した結果、ブロック状導電体５に接さない部分と接する部分とでは出力電圧に約１．６倍もの差を生じた。しかし、本発明の分極装置を使用し、可撓性感圧体１２の同軸方向に対して９０°角度を変えた４方向で加振した結果、最も出力電圧が高かったものと小さかったものの比は１．１２倍以下に抑えられた。よって、電圧印加手段１７による電圧印加中に可撓性感圧体１２が複数の玉鎖で構成された導電体１３によって、可撓性感圧体１２の全周から満遍なく周囲から電圧を印加でき、均一な分極を実現することができる。 Further, in the conventional polarization device shown in FIG. 11, the vibration is applied to each of the portions that are not in contact with the block-like conductor 5 and the voltage that is generated at that time is measured. There was a difference of about 1.6 times in output voltage between the non-contact portion and the contact portion. However, when the polarization device of the present invention was used and the vibration was applied in four directions with a 90 ° angle changed with respect to the coaxial direction of the flexible pressure sensitive body 12, the ratio of the highest output voltage to the smallest one was as follows. 1.12 times or less. Therefore, the voltage can be uniformly applied from the entire circumference of the flexible pressure sensitive body 12 by the conductor 13 in which the flexible pressure sensitive body 12 is composed of a plurality of ball chains during the voltage application by the voltage applying means 17. Can be realized.
また、本実施例において導電体１３である玉鎖のアルミニウム球の直径をφ１．５で構成したが、この径は小さいほど可撓性感圧体１２と点あるいは面接触接触するため、より効率よく高電圧を印加することができるため分極の効率が向上する。特に導電体の玉鎖の直径は可撓性感圧体１２の直径よりも小さいほうが可撓性感圧体に接触する箇所が多くなるので望ましい。 Further, in this embodiment, the diameter of the ball sphere aluminum sphere which is the conductor 13 is configured to be φ1.5. Since a high voltage can be applied, the efficiency of polarization is improved. In particular, it is desirable that the diameter of the ball chain of the conductor is smaller than the diameter of the flexible pressure-sensitive body 12 because there are more locations where the flexible pressure-sensitive body comes into contact.
さらに、導電体１３の直径は少なくとも２種類以上で構成することによって、導電体１３の直径を１種類で構成するよりも可撓性感圧体と導電体との接触面積を多くすることができるため、全周囲から均一に満遍なく分極することが可能となる。例えば、図３に示すように、φ１．５とφ１．０の大きさの異なる２類の玉鎖で構成された導電体１３で構成した分極装置を使用した場合、１つの直径の導電体が接触することによって生じる隙間を、他の直径の導電体で埋めることができるので、分極できていない部分がなく、特性ばらつきのない安定した特性を得ることができる。本実施例において可撓性感圧体１２の同軸方向に対して９０°角度を変えた４方向で加振した結果、最も出力電圧が高かったものと小さかったものの比は１．０４倍以下に抑えられた。よって、電圧印加手段１７による電圧印加中に可撓性感圧体１２が複数の玉鎖で構成された導電体１３によって、可撓性感圧体１２の全周から満遍なく周囲から電圧を印加でき、均一な分極を実現することができる。 Furthermore, since the diameter of the conductor 13 is composed of at least two kinds, the contact area between the flexible pressure sensitive body and the conductor can be increased as compared with the case where the diameter of the conductor 13 is composed of one kind. It becomes possible to uniformly and evenly polarize from the entire circumference. For example, as shown in FIG. 3, when using a polarization device composed of a conductor 13 composed of two types of ball chains having different sizes of φ1.5 and φ1.0, a conductor having one diameter is Since the gap generated by the contact can be filled with a conductor having another diameter, there is no portion that is not polarized, and stable characteristics without characteristic variation can be obtained. In this embodiment, as a result of applying vibration in four directions with the 90 ° angle changed with respect to the coaxial direction of the flexible pressure sensitive body 12, the ratio of the highest output voltage to the smallest output voltage is suppressed to 1.04 times or less. It was. Therefore, the voltage can be uniformly applied from the entire circumference of the flexible pressure sensitive body 12 by the conductor 13 in which the flexible pressure sensitive body 12 is composed of a plurality of ball chains during the voltage application by the voltage applying means 17. Can be realized.
また、電圧印加手段１７による電圧印加中に可撓性感圧体１２が導電体１３に接触しながら少なくとも１回転するように回転させることによって、可撓性感圧体１２と導電体１３とが接触しない箇所を低減でき、満遍なく導電体と接触させることでより均一な分極を行うことが可能となる。可撓性感圧体１２の同軸方向に対して９０°角度を変えた４方向で加振した結果、最も出力電圧が高かったものと小さかったもの比は１．０２倍以下に抑えることができた。 Further, the flexible pressure sensitive body 12 and the conductor 13 do not come into contact with each other by rotating the flexible pressure sensitive body 12 so as to make at least one rotation while being in contact with the conductor 13 during voltage application by the voltage applying means 17. The number of locations can be reduced, and uniform contact with the conductor can be performed evenly. As a result of vibration in four directions with the 90 ° angle changed with respect to the coaxial direction of the flexible pressure-sensitive body 12, the ratio of the highest output voltage to the smallest one could be suppressed to 1.02 times or less. .
（実施の形態２）
図４は、本発明の実施の形態２におけるケーブル状圧力センサの外観斜視図である。図４において実施の形態１と異なるところは、長尺の可撓性感圧体１２を連続的に分極するため、可撓性感圧体１３を移動させる第二の移動手段１９を設けている点である。
(Embodiment 2)
FIG. 4 is an external perspective view of the cable-shaped pressure sensor according to Embodiment 2 of the present invention. 4 differs from the first embodiment in that a second moving means 19 for moving the flexible pressure sensitive body 13 is provided in order to continuously polarize the long flexible pressure sensitive body 12. is there.
本実施の形態において、第二の移動手段１９は電圧印加手段１７が停止している時に動作する構成となっている。本構成にすることによって、分極時に生じる導電体１３と芯電極１１間の引力の影響も受けないので過剰な張力などが可撓性感圧体１２に印加されるこ
となく、長尺の可撓性感圧体１２を連続して分極することが可能になる。つまり、分極装置内に配設されている可撓性感圧体１２は導電体１３を移動させることで分極し、分極終了時点で第二の移動手段１９によって分極された可撓性感圧体１２を移動させるとともに、分極されていない可撓性感圧体１２を分極装置内に配設させることができるため、長尺の可撓性感圧体１２を分極することが可能となる。さらに、第二の移動手段１９は電圧印加手段１７の出力が停止している時に行うので、分極時に生じる導電体１３と芯電極１１間の引力の影響も受けないので、過剰な張力などが可撓性感圧体に印加されるのを抑制することも可能となる。
In the present embodiment, the second moving means 19 is configured to operate when the voltage applying means 17 is stopped. By adopting this configuration, since it is not affected by the attractive force between the conductor 13 and the core electrode 11 generated at the time of polarization, an excessive tension or the like is not applied to the flexible pressure-sensitive body 12, and a long flexible feeling The pressure body 12 can be continuously polarized. That is, the flexible pressure-sensitive body 12 disposed in the polarization device is polarized by moving the conductor 13, and the flexible pressure-sensitive body 12 polarized by the second moving means 19 at the end of the polarization is moved. Since the non-polarized flexible pressure sensitive body 12 can be disposed in the polarization device while being moved, the long flexible pressure sensitive body 12 can be polarized. Further, since the second moving means 19 is performed when the output of the voltage applying means 17 is stopped, it is not affected by the attractive force between the conductor 13 and the core electrode 11 generated at the time of polarization. It is also possible to suppress application to the flexible pressure sensitive body.
（実施の形態３）
図５は、本発明の実施の形態３におけるケーブル状圧力センサの外観斜視図である。図５において実施の形態１と異なるところは、複数の導電体１３を導電性材料で構成した支持部材２０で固定している点である。本実施の形態において、支持部材２０は縦が５０ｍｍ、横２０ｍｍのアルミニウムのブロックで構成し、このアルミニウムのブロックにφ１．５のアルミニウムの球を縦方向に１０個配設した物を縦に３０個、横に１０個配設し、垂下状態で固定する構成とした。本構成にすることによって、電圧印加手段１７の出力を支持部材２０に配設された複数の導電体１３のうち、１つに接続するだけで、支持部材２０に固定された複数の導電体１３のすべてに電圧印加手段１７の出力を接続した状態と同様となる。そのため、複数の導電体１３に電圧印加手段１７の出力を接続する必要がなく、構成を簡素化することが可能となる。
(Embodiment 3)
FIG. 5 is an external perspective view of a cable-shaped pressure sensor according to Embodiment 3 of the present invention. In FIG. 5, the difference from Embodiment 1 is that a plurality of conductors 13 are fixed by a support member 20 made of a conductive material. In the present embodiment, the support member 20 is made of an aluminum block having a length of 50 mm and a width of 20 mm, and 10 pieces of aluminum balls having a diameter of 1.5 mm are vertically arranged on the aluminum block. 10 pieces are arranged horizontally and fixed in a suspended state. With this configuration, the plurality of conductors 13 fixed to the support member 20 can be simply connected to one of the plurality of conductors 13 disposed on the support member 20 by connecting the output of the voltage application means 17. This is the same as the state where the output of the voltage applying means 17 is connected to all of the above. Therefore, it is not necessary to connect the output of the voltage applying means 17 to the plurality of conductors 13, and the configuration can be simplified.
また、同様に１つの導電体１３に電圧印加手段１７の出力を接続するのではなく、図６に示すように支持部材２０に接続しても同様の効果を得ることができる。 Similarly, the same effect can be obtained by connecting to the support member 20 as shown in FIG. 6 instead of connecting the output of the voltage applying means 17 to one conductor 13.
また、図７に示すように、導電体１３が加熱手段１４を兼ねる加熱手段兼用分極電極１３ａという構成にした場合においては可撓性感圧体１２を同軸方向から素早く加熱しながら分極するので、均一に可撓性感圧体１２を加熱することが可能となる。この結果、可撓性感圧体１２の温度分布を抑制でき、効率良く分極することができ、特性ばらつきも抑制することができる。本構成の玉鎖状の導電体１３は図８に示すように、発熱体２１の外周に設けられた絶縁体２２と絶縁体２２の外周に設けられた導電体２３とで構成することによって、発熱体２１の外周を同軸状に絶縁体２２及び導電体２３が覆っている構成とした。 In addition, as shown in FIG. 7, when the conductor 13 is configured as a heating means / polarizing electrode 13a that also serves as the heating means 14, the flexible pressure sensitive body 12 is polarized while being heated quickly from the coaxial direction. The flexible pressure sensitive body 12 can be heated. As a result, the temperature distribution of the flexible pressure sensitive body 12 can be suppressed, polarization can be performed efficiently, and characteristic variations can also be suppressed. As shown in FIG. 8, the ball chain-shaped conductor 13 of this configuration is configured by an insulator 22 provided on the outer periphery of the heating element 21 and a conductor 23 provided on the outer periphery of the insulator 22. The outer periphery of the heating element 21 is coaxially covered with the insulator 22 and the conductor 23.
本実施の形態の分極装置は、図１１示す従来の分極装置のように一方向のみの加熱ではないので、可撓性感圧体１２の一部が加熱しすぎる、あるいは加熱が不十分ということがない。さらに、加熱手段１４が玉鎖形状をなすことによって可撓性感圧体１２の外周方向から均一に加熱することができるため、温度制御も容易になる。 Since the polarization device according to the present embodiment is not heated in only one direction as in the conventional polarization device shown in FIG. 11, a part of the flexible pressure-sensitive body 12 is heated too much or the heating is insufficient. Absent. Furthermore, since the heating means 14 has a ball chain shape, it can be heated uniformly from the outer peripheral direction of the flexible pressure-sensitive body 12, so that temperature control is also facilitated.
本実施の形態において、発熱体２１としてステンレス箔、絶縁体２２として酸化マグネシウム、導電体２３としてステンレスを使用したが、それに限るものではない。 In the present embodiment, stainless steel foil is used as the heating element 21, magnesium oxide is used as the insulator 22, and stainless steel is used as the conductor 23. However, the present invention is not limited to this.
（実施の形態４）
図９は、本発明の実施の形態３におけるケーブル状圧力センサの外観斜視図である。図９において実施の形態１および２と異なるところは、支持部材２０に固定された玉鎖の複数の導電体１３を空隙を介して複数設け、可撓性感圧体１２が連続して導電体１３と接触するように構成している点である。なお、実施の形態１および２と同一部材は同じ符号を付けている。
(Embodiment 4)
FIG. 9 is an external perspective view of a cable-shaped pressure sensor according to Embodiment 3 of the present invention. 9 differs from the first and second embodiments in that a plurality of ball-chain conductors 13 fixed to the support member 20 are provided via gaps, and the flexible pressure-sensitive body 12 is continuously provided in the conductors 13. It is the point comprised so that it may contact. The same members as those in the first and second embodiments are given the same reference numerals.
本実施の形態において電圧印加手段１７の出力は、芯電極１１と複数個設けた支持部材２０の各々に電圧印加手段１７の出力を接続し、この支持部材２０は並列接続している。
こうすることで、各々の支持部材２０に固定された複数の玉鎖の導電体１３に効率良く電圧印加手段１７の出力が印加されることとなる。
In the present embodiment, the output of the voltage applying means 17 is connected to the output of the voltage applying means 17 to each of the core electrode 11 and a plurality of supporting members 20, and the supporting members 20 are connected in parallel.
By doing so, the output of the voltage applying means 17 is efficiently applied to the plurality of ball chain conductors 13 fixed to the respective support members 20.
例えば、導電体１３が固定された支持部材２０の長さを２ｍで構成した場合、可撓性感圧体１２の欠陥箇所の前後２ｍ（計４ｍ）は分極時間が所定時間より短い、もしくは分極できていない不良箇所となる。しかし、０．５ｍの支持部材２０に固定された導電体１３を４個設けた場合では、欠陥箇所の前後０．５ｍ（計１ｍ）が不良箇所となり、不良箇所を１／４に低減できるため歩留まりを向上することができる。 For example, when the length of the support member 20 to which the conductor 13 is fixed is 2 m, the polarization time is 2 m before and after the defective portion of the flexible pressure sensitive body 12 (total 4 m) is shorter than a predetermined time or can be polarized. Not a defective part. However, when four conductors 13 fixed to the 0.5 m support member 20 are provided, 0.5 m before and after the defective portion (1 m in total) becomes a defective portion, and the defective portion can be reduced to ¼. Yield can be improved.
また、支持部材２０を複数設け、各々の分支持部材２０と芯電極１１間に印加される電圧あるいは電流値を測定することによって、どの支持部材２０内に欠陥箇所があるかを検知することができ、可撓性感圧体１２の欠陥箇所の判定にも寄与できる。 Further, by providing a plurality of support members 20 and measuring the voltage or current value applied between the support member 20 and the core electrode 11, it is possible to detect which support member 20 has a defective portion. It is possible to contribute to the determination of a defective portion of the flexible pressure sensitive body 12.
また、支持部材２０の長さ、連続個数を、移動手段１５による移動速度とともに調整して、分極時間の調節を行うことが可能であり、可撓性圧電体１２の使用目的に合致する条件での分極条件を選択できるように構成することも可能である。 In addition, it is possible to adjust the polarization time by adjusting the length and the continuous number of the support members 20 together with the moving speed by the moving means 15, under conditions that match the purpose of use of the flexible piezoelectric body 12. It is also possible to configure so that the polarization conditions can be selected.
以上のように、本発明にかかる圧力センサの分極装置およびその分極方法は、欠陥部が存在しても全体の可撓性感圧体が分極できなくなることを防ぐとともに、可撓性感圧体が複数の玉鎖で構成された導電体を可撓性感圧体の全周で接触するように構成するとともに、導電体を移動させて可撓性感圧体を分極することで、過剰な張力を可撓性感圧体に印可させることなく均一に満遍なく分極することができる。そのため、可撓性感圧体の変形などが無く、特性ばらつきのない安定した特性を得ることができるので、圧電体等の分極装置に利用できるものである。 As described above, the polarization device for a pressure sensor and the polarization method thereof according to the present invention prevent the entire flexible pressure sensing body from being polarized even if a defect exists, and a plurality of flexible pressure sensing bodies. The conductor composed of the ball chain is configured to come into contact with the entire circumference of the flexible pressure-sensitive body, and the flexible pressure-sensitive body is polarized by moving the conductor, thereby flexing excess tension. It can be uniformly and uniformly polarized without being applied to the pressure sensitive body. For this reason, there is no deformation of the flexible pressure-sensitive body, and stable characteristics without variation in characteristics can be obtained, so that it can be used for a polarization device such as a piezoelectric body.
１１ 芯電極
１２ 可撓性感圧体
１３ 導電体
１４ 加熱手段
１５ 移動手段
１６ リード線
１７ 直流電圧発生手段
１８ プーリー
１９ 第二の移動手段
２０ 支持部材
２１ 発熱体
２２ 絶縁体
２３ 導電体
DESCRIPTION OF SYMBOLS 11 Core electrode 12 Flexible pressure sensitive body 13 Conductor 14 Heating means 15 Moving means 16 Lead wire 17 DC voltage generating means 18 Pulley 19 Second moving means 20 Support member 21 Heating element 22 Insulator 23 Conductor
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| JP2006336816A JP2008153264A (en) | 2006-12-14 | 2006-12-14 | Polarizing apparatus for pressure sensor and polarizing method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011035378A (en) * | 2009-08-04 | 2011-02-17 | Seagate Technology Llc | System for poling piezoelectric element, method for poling array of ferroelectric element, and slider |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011035378A (en) * | 2009-08-04 | 2011-02-17 | Seagate Technology Llc | System for poling piezoelectric element, method for poling array of ferroelectric element, and slider |
| US8937790B2 (en) | 2009-08-04 | 2015-01-20 | Seagate Technology Llc | Commonly-poled piezoelectric device |
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