JP2008151604A - Foreign matter detection device of plate material - Google Patents

Foreign matter detection device of plate material Download PDF

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JP2008151604A
JP2008151604A JP2006338953A JP2006338953A JP2008151604A JP 2008151604 A JP2008151604 A JP 2008151604A JP 2006338953 A JP2006338953 A JP 2006338953A JP 2006338953 A JP2006338953 A JP 2006338953A JP 2008151604 A JP2008151604 A JP 2008151604A
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plate material
plate
foreign matter
flat surface
received light
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Yasunori Okamoto
恭典 岡本
Masaki Yokoyama
雅樹 横山
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Chugai Ro Co Ltd
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Chugai Ro Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a foreign matter detection device of a plate material capable of detecting properly and surely a foreign matter at a starting part and a terminal part of the plate material with a simple constitution, when moving relatively the plate material and a CCD sensor by using the plate material having a flat surface as an object, and detecting a foreign matter from a change of a reference light receiving quantity and a detection light receiving quantity on two spots at a distance in the relative moving direction. <P>SOLUTION: In this foreign matter detection device of the plate material wherein the plate material 1 having the flat surface and the CCD sensor 2 are moved relatively, and the CCD sensor is allowed to scan over a range from the furthermore front side than the starting part 1a to the furthermore rear side than the terminal part 1b of the plate material along the relative moving direction, and a foreign matter is detected from a change of the reference light receiving quantity and the detection light receiving quantity on two spots at a distance in the relative moving direction over the whole flat surface of the plate member, extension members 3a, 3b are disposed, for extending the flat surface of the plate material longer than a distance simultatively toward the furthermore front side and the furthermore rear side in the relative moving direction than the starting part position and the terminal part position of the plate material, repectively. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、平坦面を有する板材を対象とし、板材とＣＣＤセンサとを相対移動させ、相対移動方向に距離を隔てた２箇所の参照受光量と検出受光量の差から異物を検出する場合に、簡易な構成で、板材の始端部や終端部における異物検出を適切かつ確実に行うことが可能な板材の異物検出装置に関する。   The present invention targets a plate material having a flat surface, moves the plate material and the CCD sensor relative to each other, and detects foreign matter from the difference between the reference received light amount and the detected received light amount at a distance in the relative movement direction. The present invention relates to a foreign material detection device for a plate material that can detect foreign matter at the start and end portions of the plate material appropriately and reliably with a simple configuration.

液晶ディスプレイ用パネル等の板状のガラス基板に塗装を行うテーブルコータなどに適用される異物検出装置としては、例えば特許文献１が知られている。この特許文献１は、スリットノズルに接触する対象物の検出精度の低下を防止することを目的として、スリットノズルと接触する対象物を検出する３台の検出センサーを設け、各検出センサーのレーザー光をＹ軸方向にずらした位置で絞るように設定し、これにより、各検出センサーの有効検出範囲が、スリットノズルの走査範囲を分担して検査するというものであり、各検出センサーの検出結果に基づいて、いずれかの検出センサーにおいて対象物が検出された場合に、スリットノズルの移動を停止して、警告を表示するようにしている。
特開２００５−８５７７３号公報 For example, Patent Document 1 is known as a foreign object detection device applied to a table coater that coats a plate-like glass substrate such as a liquid crystal display panel. This patent document 1 is provided with three detection sensors for detecting an object in contact with the slit nozzle for the purpose of preventing a decrease in detection accuracy of the object in contact with the slit nozzle, and the laser beam of each detection sensor. The effective detection range of each detection sensor is inspected by sharing the scanning range of the slit nozzle, and the detection result of each detection sensor Based on this, when an object is detected by any of the detection sensors, the movement of the slit nozzle is stopped and a warning is displayed.
JP 2005-85773 A

ところで、スリットノズルに接触し得る異物を含め、基板における異物の検出は、基板の始端部から終端部にわたって当該基板全面に対して行う必要がある。また異物検出の仕方として、平坦面を有する板材を対象とする場合に、板材の幅方向に投光器が照射した平行レーザー光を受光器で受光するＣＣＤセンサを採用し、板材とＣＣＤセンサとを一方向に相対移動させ、相対移動方向に沿う板材の始端部よりも前方から終端部よりも後方にわたってＣＣＤセンサを走査させるようにして、板材全体にわたり、相対移動方向に距離を隔てた２箇所の受光量の差から異物を検出することが考えられる。この相対移動方向に距離を隔てた２箇所の受光量を比較する方法では、板材の平坦面に異物がない場合には２箇所における受光量は一致し、異物がある場合には当該異物に平行レーザー光が遮られて、２箇所の受光量に差が生じることに基づいて、異物の有無の判定を行う。   By the way, it is necessary to detect the foreign matter on the substrate including the foreign matter that can come into contact with the slit nozzle over the entire surface of the substrate from the starting end portion to the terminal end portion. As a method for detecting foreign matter, a CCD sensor that receives parallel laser light irradiated by a projector in the width direction of the plate material with a light receiver when the plate material having a flat surface is used as a target is integrated. The CCD sensor scans from the front end to the rear end of the plate along the relative movement direction, and the light is received at two locations spaced apart in the relative movement direction over the entire plate. It is conceivable to detect foreign matter from the difference in amount. In this method of comparing the received light amounts at two locations separated in the relative movement direction, the received light amounts at the two locations match when there is no foreign object on the flat surface of the plate, and parallel to the foreign object when there is a foreign object. The presence / absence of a foreign object is determined based on the fact that the laser light is blocked and a difference occurs in the amount of light received at two locations.

この相対移動方向に距離を隔てた２箇所の受光量の差から異物を検出する方法にあっては、板材の始端部周辺に異物が存在しているか否かを検出するには、始端部とそれよりも前方位置もしくは後方位置との２箇所における受光量の比較が必要になる。この場合、始端部周辺における２箇所の受光量は、板材の始端を検知すること自体で差を生じることとなり、異物検出と誤ってしまうことになる。このような事態を考慮して、始端部周辺ではＣＣＤセンサによる検出を行わない、あるいは受光量データをキャンセルするようにすると、実際には始端部周辺に異物があっても、当該異物を検出できないという不具合が生じる。このような不具合は、板材の終端部周辺においても同様である。また、これに加えて、板材の始端部や終端部では、平行レーザー光が乱反射や回折を起こし、そのために正確な検出ができないという不具合もあった。   In the method of detecting foreign matter from the difference in the amount of received light at two locations separated in the relative movement direction, in order to detect whether or not foreign matter is present around the starting end portion of the plate, It is necessary to compare the amount of light received at two positions, the front position and the rear position. In this case, the amount of received light at the two locations around the start end portion is different from the detection of the start end of the plate itself, which is mistaken for foreign object detection. Considering such a situation, if the detection by the CCD sensor is not performed around the start end portion or the received light amount data is canceled, even if there is actually a foreign matter around the start end portion, the foreign matter cannot be detected. The problem that occurs. Such a problem is also the same in the vicinity of the end portion of the plate. In addition to this, the parallel laser beam causes irregular reflection and diffraction at the start and end portions of the plate material, and there is a problem that accurate detection cannot be performed.

本発明は上記従来の課題に鑑みて創案されたものであって、平坦面を有する板材を対象とし、板材とＣＣＤセンサとを相対移動させ、相対移動方向に距離を隔てた２箇所の参照受光量と検出受光量の差から異物を検出する場合に、簡易な構成で、板材の始端部や終端部における異物検出を適切かつ確実に行うことが可能な板材の異物検出装置を提供することを目的とする。   The present invention was devised in view of the above-described conventional problems, and is intended for a plate having a flat surface, and the plate and the CCD sensor are moved relative to each other, and the reference light reception at two locations separated by a distance in the relative movement direction. To provide a foreign material detection device for a plate material capable of appropriately and reliably detecting a foreign material at the start and end portions of the plate material with a simple configuration when detecting the foreign material from the difference between the amount of light and the detected light reception amount. Objective.

本発明にかかる板材の異物検出装置は、平坦面を有する板材と、投光器が板材の幅方向に照射したレーザー光を受光器で受光するＣＣＤセンサとを相対移動させ、相対移動方向に沿う該板材の始端部よりも前方から終端部よりも後方にわたって該ＣＣＤセンサを走査させるようにして、該板材の平坦面全体にわたり、相対移動方向に距離を隔てた２箇所の参照受光量と検出受光量との差から異物を検出するようにした板材の異物検出装置であって、上記板材の始端部位置からそれよりも相対移動方向前方へ向かって、模擬的に該板材の平坦面を、上記距離よりも拡張する拡張部材を配設したことを特徴とする。   The foreign material detection device for a plate material according to the present invention includes a plate material having a flat surface, and a CCD sensor that receives a laser beam irradiated by the projector in the width direction of the plate material with a light receiver, and moves along the relative movement direction. The CCD sensor is scanned from the front end to the rear end rather than the starting end of the plate, and the reference received light amount and the detected received light amount are separated at a distance in the relative movement direction over the entire flat surface of the plate member. A foreign material detection device for a plate material that detects a foreign material from the difference between the plate material, the flat surface of the plate material from the starting position of the plate material forward in the relative movement direction more than the distance from the distance Also, an expansion member that expands is disposed.

前記板材の終端部位置からそれよりも相対移動方向後方へ向かって、模擬的に該板材の平坦面を、前記距離よりも拡張する拡張部材を配設したことを特徴とする。   An extension member that extends the flat surface of the plate material from the end position of the plate material to the rear in the relative movement direction more than the distance is arranged in a simulated manner.

前記拡張部材は、前記板材の平坦面と面一となるように、上下方向に位置調整自在であることを特徴とする。   The expansion member is adjustable in the vertical direction so as to be flush with the flat surface of the plate member.

前記拡張部材は、前記板材の平坦面と面一となるように、交換自在であることを特徴とする。   The expansion member is replaceable so as to be flush with the flat surface of the plate member.

本発明にかかる板材の異物検出装置にあっては、平坦面を有する板材を対象とし、板材とＣＣＤセンサとを相対移動させ、相対移動方向に距離を隔てた２箇所の参照受光量と検出受光量の差から異物を検出する場合に、簡易な構成で、板材の始端部や終端部における異物検出を適切かつ確実に行うことができる。   In the foreign material detection device for a plate material according to the present invention, a reference light reception amount and a detection light reception at two locations which are separated from each other by moving the plate material and the CCD sensor relative to each other and moving the plate material and the CCD sensor relative to each other. When detecting foreign matter from the difference in amount, it is possible to appropriately and reliably detect foreign matter at the start and end portions of the plate with a simple configuration.

以下に、本発明にかかる板材の異物検出装置の好適な一実施形態を、添付図面を参照して詳細に説明する。本実施形態にかかる板材の異物検出装置は基本的には、図１および図２（ａ）に示すように、平坦面を有する板材１と、投光器２ａが板材１の幅方向に照射した平行レーザー光Ｌを受光器２ｂで受光するＣＣＤセンサ２とを相対移動させ、相対移動方向に沿う板材１の始端部１ａよりも前方から終端部１ｂよりも後方にわたってＣＣＤセンサ２の平行レーザー光Ｌを走査させるようにして、板材１の平坦面全体にわたり、相対移動方向に距離を隔てた２箇所Ｐ1，Ｐ2の参照受光量Ｒと検出受光量Ｄとの差から異物を検出するようにした板材の異物検出装置であって、板材１の始端部１ａ位置および終端部１ｂ位置それぞれからこれらよりも相対移動方向前方および後方へ向かって、模擬的に板材１の平坦面を、上記距離よりも拡張する拡張部材３ａ，３ｂを配設して構成される。 Hereinafter, a preferred embodiment of a foreign material detection apparatus for a plate material according to the present invention will be described in detail with reference to the accompanying drawings. As shown in FIG. 1 and FIG. 2A, the plate material foreign matter detection apparatus according to the present embodiment is basically a parallel plate laser 1 irradiated with a flat plate 1 and a projector 2 a in the width direction of the plate 1. The CCD sensor 2 that receives the light L by the light receiver 2b is relatively moved, and the parallel laser light L of the CCD sensor 2 is scanned from the front end portion 1a to the rear end portion 1b of the plate 1 along the relative movement direction. In this way, the plate material is configured to detect foreign matter from the difference between the reference received light amount R and the detected received light amount D at two locations P 1 and P 2 that are spaced apart in the relative movement direction over the entire flat surface of the plate material 1. In this foreign matter detection device, the flat surface of the plate material 1 is expanded from the position of the start end 1a and the end portion 1b of the plate 1 in a relative direction in the forward and backward directions relative to the above-mentioned distance. Expansion Wood 3a, constituted by disposing a 3b.

異物検出を行う板材１としては、例えばテーブルコータなどで塗装される、平面四角形状の液晶ディスプレイパネル用ガラス基板などがある。この種の板材１は、上下面が平坦面であって、御影石で作製された定盤４上に吸着作用によって固定される。近年、この種の板材１として、２ｍ四方に及ぶものも使用されるようになってきている。テーブルコータで板材１を塗装する際には、板材１を搭載した定盤４に対し、塗装ノズルを相対移動させることで、相対移動方向に沿う板材１の始端部１ａから終端部１ｂにわたって板材１の平坦面、具体的には上面１ｃに塗工液を塗布するようになっている。   Examples of the plate material 1 that performs foreign object detection include a flat quadrangular glass substrate for a liquid crystal display panel that is coated with a table coater or the like. This type of plate material 1 has flat upper and lower surfaces and is fixed on a surface plate 4 made of granite by an adsorption action. In recent years, as this kind of plate material 1, a plate having a length of 2 m square has been used. When the plate material 1 is painted with the table coater, the plate material 1 is moved from the start end 1a to the end portion 1b of the plate material 1 along the relative movement direction by moving the coating nozzle relative to the surface plate 4 on which the plate material 1 is mounted. The coating liquid is applied to the flat surface, specifically, the upper surface 1c.

ＣＣＤセンサ２について説明すると、ＣＣＤセンサ２は、平行レーザー光Ｌを照射する投光器２ａと、投光器２ａから照射された平行レーザー光Ｌを受光する受光器２ｂとを備える。受光器２ｂは、いわゆるＣＣＤカメラである。ＣＣＤセンサ２は、板材１の異物を検出する際、板材１を幅方向に横切るように平行レーザー光Ｌを照射するために、投光器２ａおよび受光器２ｂが、板材１を左右方向から挟む配置で、互いに向かい合うように設けられる。本実施形態にあっては、投光器２ａおよび受光器２ｂは、定盤４の外方に設けられた走行手段に搭載され、これら投光器２ａと受光器２ｂの間で板材１が相対移動されるようになっている。ＣＣＤセンサ２を移動させる代わりに、板材１を搭載した定盤４を相対移動させるようにしてもよい。   The CCD sensor 2 will be described. The CCD sensor 2 includes a projector 2a that irradiates the parallel laser light L, and a light receiver 2b that receives the parallel laser light L emitted from the projector 2a. The light receiver 2b is a so-called CCD camera. When the CCD sensor 2 detects foreign matter on the plate 1, the projector 2 a and the light receiver 2 b sandwich the plate 1 from the left and right in order to irradiate the parallel laser light L across the plate 1 in the width direction. , Provided to face each other. In the present embodiment, the projector 2a and the light receiver 2b are mounted on traveling means provided outside the surface plate 4, so that the plate 1 is relatively moved between the projector 2a and the light receiver 2b. It has become. Instead of moving the CCD sensor 2, the surface plate 4 on which the plate material 1 is mounted may be relatively moved.

投光器２ａは、縦長のスリット状の投光窓から幅広なレーザー光（いわゆる平行レーザー光）Ｌを出射するようになっており、板材１の平坦な上面１ｃに対し、水平方向に平行レーザー光Ｌを照射する。その際、板材１に対しＣＣＤセンサ２を相対移動させることで、ＣＣＤセンサ２の平行レーザー光Ｌが板材１の上面１ｃを走査するようになっている。受光器２ｂは、板材１の平坦な上面１ｃを経過してきた平行レーザー光Ｌを受光する。受光器２ｂは図２（ａ）に示すように、各画素列の平行レーザー光Ｌを受光した素子数と、平行レーザー光Ｌを受光しなかった素子数に従って、受光量を出力する。このときの受光感度は、想定される被測定物（板材１，拡張部材３ａ，３ｂおよび板材１上の異物）を検知できるように調節されている。   The projector 2a emits a wide laser beam (so-called parallel laser beam) L from a vertically long slit-shaped projection window, and the laser beam L parallel to the flat upper surface 1c of the plate 1 in the horizontal direction. Irradiate. At that time, the parallel laser light L of the CCD sensor 2 scans the upper surface 1 c of the plate 1 by moving the CCD sensor 2 relative to the plate 1. The light receiver 2 b receives the parallel laser light L that has passed through the flat upper surface 1 c of the plate 1. As shown in FIG. 2A, the light receiver 2b outputs the amount of received light according to the number of elements that have received the parallel laser light L of each pixel row and the number of elements that have not received the parallel laser light L. The light receiving sensitivity at this time is adjusted so as to detect an object to be measured (foreign material on the plate member 1, the expansion members 3a and 3b and the plate member 1).

特に、本実施形態にかかるＣＣＤセンサ２は図２（ａ）に示すように、板材１との相対移動時、継続して連続的に投光器２ａから平行レーザー光Ｌを照射し、受光器２ｂで受光しながら、板材１の相対移動方向に距離を隔てた２箇所（画素Ｐ1位置、画素Ｐ2位置）の各画素列での受光量を逐次比較する。相対移動方向前方の画素Ｐ1位置で受光した受光量は参照受光量Ｒとされ、相対移動方向後方の画素Ｐ2位置で受光した受光量が検出受光量Ｄとされる。これら受光量Ｒ，Ｄが一致していれば、板材１の上面１ｃに、平行レーザー光Ｌを遮る異物はなく、これら受光量Ｒ，Ｄに差があれば、平行レーザー光Ｌを遮る異物があることから、ＣＣＤセンサ２は、これら２箇所Ｐ1，Ｐ2の参照受光量Ｒと検出受光量Ｄとに差が生じたことに基づいて、板材１の上面１ｃにおける異物を検出するように構成されている。 In particular, as shown in FIG. 2A, the CCD sensor 2 according to the present embodiment continuously irradiates the parallel laser light L from the projector 2a continuously during the relative movement with the plate member 1, and the light receiver 2b. While receiving light, the received light amounts at each pixel row at two locations (pixel P 1 position and pixel P 2 position) spaced apart in the relative movement direction of the plate 1 are sequentially compared. The received light amount received at the pixel P 1 position in the front of the relative movement direction is the reference received light amount R, and the received light amount received at the pixel P 2 position behind the relative movement direction is the detected received light amount D. If these received light amounts R and D match, there is no foreign matter blocking the parallel laser light L on the upper surface 1c of the plate member 1, and if there is a difference between the received light amounts R and D, there is no foreign matter blocking the parallel laser light L. For this reason, the CCD sensor 2 detects foreign matter on the upper surface 1c of the plate 1 based on the difference between the reference received light amount R and the detected received light amount D at these two locations P 1 and P 2. It is configured.

相対移動方向の２箇所Ｐ1，Ｐ2の距離は、適宜な距離Ｔとして設定され、当該２箇所Ｐ1，Ｐ2における参照受光量Ｒと検出受光量Ｄとが比較されて、異物の有無が検出される。このことから、板材１の始端部１ａにおける異物検出のためには、相対移動方向に沿う板材１の始端部１ａよりも距離Ｔ以上前方から、ＣＣＤセンサ２の平行レーザー光Ｌによる走査を行って参照受光量Ｒを得る必要がある。また、板材１の終端部１ｂについても、相対移動方向に沿う板材１の終端部１ｂよりも距離Ｔ以上後方まで、平行レーザー光Ｌによる走査を行って参照受光量Ｒと比較する検出受光量Ｄを得ることが好ましい。 The distance between the two locations P 1 and P 2 in the relative movement direction is set as an appropriate distance T, and the reference received light amount R and the detected received light amount D at the two locations P 1 and P 2 are compared to determine the presence or absence of foreign matter. Is detected. For this reason, in order to detect foreign matter at the starting end 1a of the plate 1, the scanning with the parallel laser light L of the CCD sensor 2 is performed from the front of the starting end 1a of the plate 1 along the relative movement direction by a distance T or more. It is necessary to obtain the reference received light amount R. Further, the detected light receiving amount D that is compared with the reference received light amount R by scanning with the parallel laser light L from the terminal end 1b of the plate member 1 to the rear of the end portion 1b of the plate member 1 along the relative movement direction by a distance T or more. It is preferable to obtain

このようにして板材上面１ｃの異物を検出するようにした装置構成において、本実施形態にあっては、板材１の始端部１ａ位置および終端部１ｂ位置それぞれに、平行レーザー光Ｌによる走査を受ける板材１の平坦な上面１ａを模擬的に拡張する拡張部材３ａ，３ｂが、定盤４上に固定して配設される。拡張部材３ａ，３ｂは、板材１と同質の素材で、図示例にあっては直方体状ブロックとして形成されている。拡張部材３ａ，３ｂは、本実施形態にあっては、板材１の相対移動方向の始端部１ａ両側および終端部１ｂ両側それぞれに、これら始・終端部１ａ，１ｂを挟んで一対配設される。拡張部材３ａ，３ｂは図３に示すように、板材１の始端部１ａ周りおよび終端部１ｂ周りをそれぞれ個別に取り囲む平面コ字状に形成したり、図４に示すように板材１の全周を取り囲む平面ロ字状に、これら拡張部材３ａ，３ｂを一体化した構成の拡張部材３として形成しても良い。また、拡張部材３ａ，３ｂは、板材１の平面外形輪郭に合わせることができるように、定盤４上で移動自在とし、位置決め後、吸着作用などで定盤４に固定するようにしても良い。拡張部材３ａ，３ｂを平面コ字状や平面ロ字状とした場合には、図中破線で示したように、当該拡張部材３ａ，３ｂを複数のピースで構成し、これらピースを相互に移動させることで、板材１の平面外形輪郭に合致させるようにすることもできる。   In the apparatus configuration in which the foreign material on the upper surface 1c of the plate material is detected in this way, in the present embodiment, the start position 1a position and the end position 1b position of the plate material 1 are scanned by the parallel laser beam L, respectively. Expansion members 3a and 3b for expanding the flat upper surface 1a of the plate 1 in a simulated manner are fixedly disposed on the surface plate 4. The expansion members 3a and 3b are made of the same material as the plate 1 and are formed as rectangular parallelepiped blocks in the illustrated example. In the present embodiment, a pair of expansion members 3a and 3b are disposed on both sides of the start end 1a and the end end 1b in the relative movement direction of the plate 1 with the start and end ends 1a and 1b interposed therebetween. . As shown in FIG. 3, the expansion members 3 a and 3 b are formed in a plane U shape surrounding each of the start end 1 a and the end end 1 b of the plate 1 individually, or as shown in FIG. 4, the entire circumference of the plate 1 The expansion members 3a and 3b may be formed as an expansion member 3 having a configuration in which the expansion members 3a and 3b are integrated. Further, the expansion members 3a and 3b may be movable on the surface plate 4 so as to match the planar outer contour of the plate member 1, and after positioning, may be fixed to the surface plate 4 by an adsorption action or the like. . When the expansion members 3a and 3b are formed in a U-shape or a flat square shape, the expansion members 3a and 3b are constituted by a plurality of pieces as shown by broken lines in the figure, and these pieces are moved relative to each other. By doing so, it is possible to match the planar outline of the plate 1.

拡張部材３ａ，３ｂは、その上面が板材１の上面１ｃと面一となるように寸法設定される。拡張部材３ａ，３ｂは、その平面外形寸法が、板材１の始端部１ａの始端縁１ｄ位置および終端部１ｂの終端縁１ｅ位置からそれぞれこれらよりも相対移動方向前方および後方へ向かって、板材１を擬似的に上記２箇所Ｐ1，Ｐ2間の距離Ｔよりも拡張する寸法で形成される。さらに、板材１の位置ズレ、始端部１ａや終端部１ｂにおける平行レーザー光Ｌの乱反射や回折の影響を考慮して、マージンＭ（図１参照）を見た寸法設定とすることが好ましい。 The expansion members 3 a and 3 b are dimensioned so that the upper surfaces thereof are flush with the upper surface 1 c of the plate 1. The expansion members 3a and 3b have plate-like outer dimensions such that the plate material 1 has a starting edge 1d position of the starting end portion 1a of the plate member 1 and a terminal edge 1e position of the terminal end portion 1b from the front and rear in the relative movement direction, respectively. Is dimensioned so as to extend more than the distance T between the two locations P 1 and P 2 . Furthermore, it is preferable to set the dimensions in consideration of the margin M (see FIG. 1) in consideration of the positional deviation of the plate material 1 and the influence of irregular reflection and diffraction of the parallel laser light L at the start end 1a and the end 1b.

本実施形態にかかる板材の異物検出装置の作用について説明すると、板材１の異物検出工程では、まず、定盤４上に、板材１の始端部１ａ位置および終端部１ｂ位置に位置させて拡張部材３ａ，３ｂを配設しておき、図示しない昇降ピンや搬送ロボット等の手段を用いて、板材１を定盤４上の定位置に配置し、定盤４に組み込まれた吸引手段によって板材１を定盤４の表面に吸着固定する。また、ＣＣＤセンサ２の投光器２ａから継続して連続的に平行レーザー光Ｌを受光器２ｂに向かって照射する。次いで、平行レーザー光Ｌと始端部１ａ側の拡張部材３ａとの間の距離が受光量を比較する２箇所Ｐ1，Ｐ2間の距離Ｔよりも遠い位置からＣＣＤセンサ２をスタートさせ、その投光器２ａおよび受光器２ｂを順次、始端部１ａ側の拡張部材３ａから、板材１、並びに終端部１ｂ側の拡張部材３ｂにわたって通過させ、さらに平行レーザー光Ｌと終端部１ｂ側の拡張部材３ｂとの距離が同様に、２箇所Ｐ1，Ｐ2間の距離Ｔよりも遠くなる位置で停止させるようにして、これにより平行レーザー光Ｌを板材１の始端部１ａよりも前方から終端部１ｂよりも後方にわたって走査させる。 Explaining the operation of the foreign material detection device for a plate material according to the present embodiment, in the foreign material detection step for the plate material 1, first, the expansion member is positioned on the surface plate 4 at the position of the start end 1 a and the end portion 1 b of the plate material 1. 3a and 3b are arranged, the plate 1 is placed at a fixed position on the surface plate 4 using means such as a lifting pin and a transport robot (not shown), and the plate 1 is drawn by the suction means incorporated in the surface plate 4. Is adsorbed and fixed to the surface of the surface plate 4. Further, the parallel laser light L is continuously emitted from the light projector 2a of the CCD sensor 2 toward the light receiver 2b. Next, the CCD sensor 2 is started from a position where the distance between the parallel laser beam L and the expansion member 3a on the start end 1a side is farther than the distance T between the two locations P 1 and P 2 where the received light amounts are compared. The light projector 2a and the light receiver 2b are sequentially passed from the expansion member 3a on the start end 1a side through the plate member 1 and the expansion member 3b on the end portion 1b side, and further, the parallel laser beam L and the expansion member 3b on the end portion 1b side, Is also stopped at a position farther than the distance T between the two locations P 1 and P 2 , whereby the parallel laser light L is transmitted from the front end portion 1 b of the plate 1 from the front end portion 1 b. Is also scanned across the back.

このようにすると、定盤４とＣＣＤセンサ２との相対移動当初にあっては、受光器２ｂは、始端部１ａ側の拡張部材３ａも板材１もない状態で投光器２ａからの平行レーザー光Ｌを受光するので、画素Ｐ1位置の参照受光量Ｒと画素Ｐ2位置の検出受光量Ｄは一致している（図中、(I)参照）。その後、始端部１ａ側の拡張部材３ａが平行レーザー光Ｌの照射位置に達すると、画素Ｐ1位置の参照受光量Ｒは、依然として拡張部材３ａも板材１もない状態であって受光量が変化しないのに対し、画素Ｐ2位置では当該始端部１ａ側の拡張部材３ａの通過によって受光量が変化し、これら参照受光量Ｒと検出受光量Ｄに差が生じる（図中、(II)参照）。図１中、２箇所Ｐ1，Ｐ2の受光量に差が生じるにあたり、傾きＺが現れるのは、平行レーザー光Ｌが拡張部材３ａ，３ｂの端縁で乱反射や回折を起こす影響である。その後、始端部１ａ側の拡張部材３ａが画素Ｐ1位置を通過すると、当該画素Ｐ1位置の参照受光量Ｒが変化して、画素Ｐ2位置の検出受光量Ｄと一致する（図中、(III)参照）。 In this way, at the beginning of the relative movement between the surface plate 4 and the CCD sensor 2, the light receiver 2b receives the parallel laser light L from the projector 2a without the expansion member 3a or the plate member 1 on the start end 1a side. Therefore, the reference received light amount R at the pixel P 1 position matches the detected received light amount D at the pixel P 2 position (see (I) in the figure). Thereafter, when the expansion member 3a of the starting end 1a side reaches the irradiation position of the collimated laser light L, the reference received light amount R of the pixel P 1 position, the amount of light received variation still expanding member 3a even plate 1 nor absence On the other hand, at the pixel P 2 position, the amount of received light changes due to the passage of the expansion member 3a on the start end 1a side, and a difference occurs between the reference received light amount R and the detected received light amount D (see (II) in the figure). ). In FIG. 1, the inclination Z appears when the difference between the received light amounts at the two points P 1 and P 2 is due to the influence of the parallel laser light L causing irregular reflection and diffraction at the edges of the expansion members 3 a and 3 b. Thereafter, when the expansion member 3a of the starting end 1a side passes through the pixel P 1 position, the reference received light amount R of the pixel P 1 position is changed, matching the detected amount D of the pixel P 2 position (in the figure, (See (III)).

その後、平行レーザー光Ｌは拡張部材３ａから板材１の上面１ｃの走査に移行し、この際、異物がない限り、参照受光量Ｒと検出受光量Ｄは一致した状態を維持する。板材１の終端部１ｂに達しても、終端部１ｂ側の拡張部材３ｂを平行レーザー光Ｌが走査している間は、受光量Ｒ，Ｄの変化は生じない。終端部１ｂ側の拡張部材３ｂが画素Ｐ2位置を通過し終えると、当該画素Ｐ2位置での受光量は変化し、他方、拡張部材３ｂが通過中の画素Ｐ1位置の受光量は変化しないので、これら参照受光量Ｒと検出受光量Ｄに差が生じる（図中、(IV)参照）。最後に、終端部１ｂ側の拡張部材３ｂが画素Ｐ1位置を通過することで、平行レーザー光Ｌによる拡張部材３ｂの走査が終わると、当該画素Ｐ1位置の参照受光量Ｒが変化して、画素Ｐ2位置の検出受光量Ｄと一致する（図中、(V)参照）。 After that, the parallel laser beam L shifts from the expansion member 3a to the scanning of the upper surface 1c of the plate 1 and, at this time, the reference received light amount R and the detected received light amount D are kept in agreement unless there is a foreign object. Even when the terminal portion 1b of the plate 1 is reached, the received light amounts R and D do not change while the parallel laser light L scans the expansion member 3b on the terminal portion 1b side. When extension member 3b of the end portion 1b side passing completely through the pixel P 2 position, the amount of light received in the pixel P 2 position changes, while the received light amount of the pixel P 1 position in the extended member 3b is passed changes Therefore, there is a difference between the reference received light amount R and the detected received light amount D (see (IV) in the figure). Finally, when the expansion member 3b on the terminal end 1b side passes through the pixel P 1 position, when the scanning of the expansion member 3b by the parallel laser light L is finished, the reference received light amount R at the pixel P 1 position changes. Coincides with the detected light reception amount D at the position of the pixel P 2 (see (V) in the figure).

また、板材１の上面１ｃだけでなく、板材１の下面に異物がある場合も、同様に板材上面１ｃの受光量が減少し、これに応じて上述したと同様に、参照受光量Ｒと検出受光量ｄとの間に差が生じるので、これにより板材１下面の異物も検出することができる。   Further, not only the upper surface 1c of the plate material 1 but also the foreign material on the lower surface of the plate material 1, the amount of received light on the plate material upper surface 1c is reduced in the same manner, and the reference received light amount R is detected in the same manner as described above. Since a difference arises between the received light amount d, foreign matter on the lower surface of the plate 1 can also be detected.

以上説明した本実施形態にかかる板材の異物検出装置にあっては、相対移動方向に距離Ｔを隔てた２箇所Ｐ1，Ｐ2の参照受光量Ｒと検出受光量Ｄの差から異物を検出する場合に、板材１の始端部１ａ位置および終端部１ｂ位置に、板材１の上面１ｃを模擬的に拡張する拡張部材３ａ，３ｂを備えたので、異物の検出対象である板材１の始端部１ａおよび終端部１ｂで、当該板材１の形態によって参照受光量Ｒと検出受光量Ｄとが変化することを防止でき、これにより正常な検出範囲Ｓを拡張することができて、板材１の始端部１ａおよび終端部１ｂであっても、適切かつ確実に異物の検出を行うことができる。また、拡張部材３ａ，３ｂは、板材１の上面１ｃと面一で、２箇所Ｐ1，Ｐ2間の距離Ｔ以上の寸法を有するように形成すれば良くて簡単な構成であるとともに、定盤４に固定するだけで良く、容易に配設することができる。拡張部材３ａ，３ｂを、マージンＭを見込んで形成すれば、平行レーザー光Ｌの乱反射や回折による影響を受けることなく、安定した検出結果を得ることができる。 In the plate material foreign matter detection apparatus according to the present embodiment described above, foreign matter is detected from the difference between the reference received light amount R and the detected received light amount D at two locations P 1 and P 2 separated by a distance T in the relative movement direction. In this case, since the expansion members 3a and 3b for simulating expansion of the upper surface 1c of the plate 1 are provided at the positions of the starting end 1a and the terminal end 1b of the plate 1, the starting end of the plate 1 that is a target for detecting foreign matter is provided. It is possible to prevent the reference light receiving amount R and the detected light receiving amount D from changing depending on the form of the plate member 1 at 1a and the end portion 1b, thereby extending the normal detection range S, and the starting end of the plate member 1 Even the part 1a and the terminal part 1b can detect foreign matter appropriately and reliably. The expansion members 3a and 3b may be formed so as to be flush with the upper surface 1c of the plate member 1 and have a dimension equal to or greater than the distance T between the two locations P 1 and P 2. It only needs to be fixed to the board 4 and can be easily arranged. If the expansion members 3a and 3b are formed with a margin M in mind, a stable detection result can be obtained without being affected by irregular reflection or diffraction of the parallel laser light L.

上記実施形態にあっては、拡張部材３ａ，３ｂは、板材１の厚さに一致する厚さ寸法のものを、定盤４上に配置固定するものであったが、これに代えて、定盤４にボールネジ機構などの昇降手段５を備え、これに拡張部材３ａ，３ｂを取り付けて、上下方向に位置調整自在としてもよい。このようにすれば、板材１の厚みが変更になっても、拡張部材３ａ，３ｂの上面を板材１の上面１ｃに容易かつ確実に一致させることができる。また、拡張部材３ａ，３ｂを、定盤４の吸着作用や、ボルトによる固定などで交換自在に配設するようにし、拡張部材３ａ，３ｂとしては、板材１の厚さに合わせて、複数種類を用意しておいて、図１中矢印Ｐで示すように、板材１に合わせて交換するようにしても良い。これによっても、拡張部材３ａ，３ｂの上面を板材１の上面１ｃに容易かつ確実に一致させることができる。   In the above-described embodiment, the expansion members 3a and 3b are arranged and fixed on the surface plate 4 with a thickness dimension that matches the thickness of the plate member 1. The board 4 may be provided with lifting means 5 such as a ball screw mechanism, and expansion members 3a and 3b may be attached thereto so that the position can be adjusted in the vertical direction. In this way, even if the thickness of the plate member 1 is changed, the upper surfaces of the expansion members 3a and 3b can be easily and reliably aligned with the upper surface 1c of the plate member 1. Further, the expansion members 3a and 3b are arranged so as to be exchangeable by adsorbing the surface plate 4 or being fixed by bolts. As the expansion members 3a and 3b, there are a plurality of types according to the thickness of the plate member 1. 1 may be prepared and exchanged in accordance with the plate 1 as indicated by an arrow P in FIG. Also by this, the upper surfaces of the expansion members 3a and 3b can be easily and reliably aligned with the upper surface 1c of the plate 1.

図２（ｂ）には、ＣＣＤセンサ２による検出方法の他の例が示されている。図２（ｂ）では、１画素列に相当する受光部２ｂと、受光量を記憶するメモリと、メモリからの読み出し制御部とを備える。受光部２ｂで受光された受光量は、受光時には検出受光量Ｄとして用いられるとともに、その後、距離Ｔを移動する経過時間Ｑのタイミングで当該検出受光量Ｄがメモリから読み出されて、その際には参照受光量Ｒとして用いられ、これにより、板材１で上記２箇所Ｐ1，Ｐ2に相当する距離Ｔを隔てた位置の２つの受光量Ｒ，Ｄの比較を行って、異物を検出できるようになっている。 FIG. 2B shows another example of the detection method using the CCD sensor 2. In FIG. 2B, a light receiving unit 2b corresponding to one pixel column, a memory for storing the amount of received light, and a control unit for reading from the memory are provided. The received light amount received by the light receiving unit 2b is used as the detected received light amount D at the time of receiving light, and then the detected received light amount D is read from the memory at the timing of the elapsed time Q moving the distance T. Is used as a reference received light amount R, thereby comparing the two received light amounts R and D at positions separated by a distance T corresponding to the two locations P 1 and P 2 on the plate 1 to detect foreign matter. It can be done.

上記実施形態では、異物検出を行う板材１として、テーブルコータ等で塗装される液晶ディスプレイ用ガラスパネルを例示して説明したが、異物の検出を行う必要があるその他の板材、例えば、フィルムなどの表面にペーストやカラーフィルター、レジストなどの高・低粘度塗工液を塗工するダイコータなどにも採用できることはもちろんである。また、板材１の平面形状は、四角形に限らず、その他の多角形や円形であっても良い。   In the above-described embodiment, the liquid crystal display glass panel painted with a table coater or the like has been described as an example of the plate material 1 that performs foreign object detection. However, other plate materials that need to detect foreign materials, such as films, can be used. Of course, it can also be used for die coaters that coat high and low viscosity coating liquids such as paste, color filters and resist on the surface. Further, the planar shape of the plate 1 is not limited to a quadrangle, and may be other polygons or circles.

本発明にかかる板材の異物検出装置の好適な一実施形態を説明する概略説明図である。It is a schematic explanatory drawing explaining one suitable embodiment of the foreign material detection apparatus of the board | plate material concerning this invention. 図１に示した板材の異物検出装置における、相対移動方向に距離を隔てた２箇所の参照受光量と検出受光量の検出状態を説明する説明図である。FIG. 2 is an explanatory diagram illustrating detection states of two reference received light amounts and detected received light amounts separated by a distance in the relative movement direction in the foreign material detection device for a plate material illustrated in FIG. 1. 図１に示した異物検出装置に適用可能な拡張部材の変形例を示す斜視図である。It is a perspective view which shows the modification of the expansion member applicable to the foreign material detection apparatus shown in FIG. 図１に示した異物検出装置に適用可能な拡張部材の他の変形例を示す斜視図である。It is a perspective view which shows the other modification of the expansion member applicable to the foreign material detection apparatus shown in FIG.

符号の説明Explanation of symbols

１ 板材
１ａ 板材の始端部
１ｂ 板材の終端部
１ｃ 板材の上面
２ ＣＣＤセンサ
２ａ 投光器
２ｂ 受光器
３，３ａ，３ｂ 拡張部材
４ 定盤
Ｄ 検出受光量
Ｌ 平行レーザー光
Ｑ 経過時間
Ｒ 参照受光量
Ｔ 距離
Ｐ1，Ｐ2 ２箇所 DESCRIPTION OF SYMBOLS 1 Board | plate material 1a The starting edge part of a board | plate material 1b The termination | terminus part of a board | plate material 1c The upper surface of a board | plate material 2 CCD sensor 2a Light projector 2b Light receiver 3, 3a, 3b Expansion member 4 Surface plate D Detection received light quantity L Parallel laser beam Q Elapsed time R Reference received light quantity T Distance P 1 , P 2 2 places

Claims (4)

平坦面を有する板材と、投光器が板材の幅方向に照射したレーザー光を受光器で受光するＣＣＤセンサとを相対移動させ、相対移動方向に沿う該板材の始端部よりも前方から終端部よりも後方にわたって該ＣＣＤセンサを走査させるようにして、該板材の平坦面全体にわたり、相対移動方向に距離を隔てた２箇所の参照受光量と検出受光量との差から異物を検出するようにした板材の異物検出装置であって、
上記板材の始端部位置からそれよりも相対移動方向前方へ向かって、模擬的に該板材の平坦面を、上記距離よりも拡張する拡張部材を配設したことを特徴とする板材の異物検出装置。 The plate material having a flat surface and the CCD sensor that receives the laser beam irradiated by the projector in the width direction of the plate material are moved relative to each other, and from the front end to the end portion of the plate material along the relative movement direction. A plate material that scans the CCD sensor across the back, and detects foreign matter from the difference between the reference received light amount and the detected received light amount at two locations separated in the relative movement direction over the entire flat surface of the plate material. A foreign matter detection device,
An apparatus for detecting a foreign material of a plate material, wherein an expansion member is provided for extending the flat surface of the plate material from the start end position of the plate material to the front in the relative movement direction more than the distance. . 前記板材の終端部位置からそれよりも相対移動方向後方へ向かって、模擬的に該板材の平坦面を、前記距離よりも拡張する拡張部材を配設したことを特徴とする請求項１に記載の板材の異物検出装置。   The expansion member that extends the flat surface of the plate material from the end position of the plate material toward the rear in the relative movement direction more than the distance is arranged in a simulated manner. Foreign material detection device for plate materials. 前記拡張部材は、前記板材の平坦面と面一となるように、上下方向に位置調整自在であることを特徴とする請求項１または２に記載の板材の異物検出装置。   The plate material foreign matter detection device according to claim 1, wherein the expansion member is vertically adjustable so as to be flush with a flat surface of the plate material. 前記拡張部材は、前記板材の平坦面と面一となるように、交換自在であることを特徴とする請求項１または２に記載の板材の異物検出装置。   3. The plate material foreign matter detection device according to claim 1, wherein the expansion member is replaceable so as to be flush with a flat surface of the plate material.
JP2006338953A 2006-12-15 2006-12-15 Foreign matter detection device of plate material Pending JP2008151604A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008279388A (en) * 2007-05-11 2008-11-20 Tatsumo Kk Substrate processing apparatus and substrate manufacturing method
JP2010078644A (en) * 2008-09-24 2010-04-08 Toppan Printing Co Ltd Inspection method of color filter
JP2012154976A (en) * 2011-01-21 2012-08-16 Hoya Corp Manufacturing method of mask blank glass substrate, manufacturing method of mask blank, manufacturing method of transfer mask and manufacturing method of semiconductor device
JP2013200456A (en) * 2012-03-26 2013-10-03 Hoya Corp Method of manufacturing substrate for mask blank, method of manufacturing mask blank, method of manufacturing transfer mask, and method of manufacturing semiconductor device
US10020234B2 (en) 2015-11-10 2018-07-10 Samsung Electronics Co., Ltd. Method of inspecting device using first measurement and second measurement lights
JP2022129528A (en) * 2021-02-25 2022-09-06 株式会社日本選別化工 Apparatus for detecting foreign matter in dried sheet laver and device for classifying non-defective product

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008279388A (en) * 2007-05-11 2008-11-20 Tatsumo Kk Substrate processing apparatus and substrate manufacturing method
JP2010078644A (en) * 2008-09-24 2010-04-08 Toppan Printing Co Ltd Inspection method of color filter
JP2012154976A (en) * 2011-01-21 2012-08-16 Hoya Corp Manufacturing method of mask blank glass substrate, manufacturing method of mask blank, manufacturing method of transfer mask and manufacturing method of semiconductor device
JP2013200456A (en) * 2012-03-26 2013-10-03 Hoya Corp Method of manufacturing substrate for mask blank, method of manufacturing mask blank, method of manufacturing transfer mask, and method of manufacturing semiconductor device
US10020234B2 (en) 2015-11-10 2018-07-10 Samsung Electronics Co., Ltd. Method of inspecting device using first measurement and second measurement lights
JP2022129528A (en) * 2021-02-25 2022-09-06 株式会社日本選別化工 Apparatus for detecting foreign matter in dried sheet laver and device for classifying non-defective product

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