JP2008103184A - Sealing method of pdp panel - Google Patents

Sealing method of pdp panel Download PDF

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Publication number
JP2008103184A
JP2008103184A JP2006284458A JP2006284458A JP2008103184A JP 2008103184 A JP2008103184 A JP 2008103184A JP 2006284458 A JP2006284458 A JP 2006284458A JP 2006284458 A JP2006284458 A JP 2006284458A JP 2008103184 A JP2008103184 A JP 2008103184A
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panels
sealing
panel
sealing material
vent hole
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JP2006284458A
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Tsutae Shinoda
傳 篠田
Hiroshi Kajiyama
博司 梶山
Seiji Miyazaki
誠司 宮崎
Kazuya Uchida
一也 内田
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University of Tokyo NUC
Ulvac Inc
AGC Inc
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Asahi Glass Co Ltd
University of Tokyo NUC
Ulvac Inc
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Priority to JP2006284458A priority Critical patent/JP2008103184A/en
Publication of JP2008103184A publication Critical patent/JP2008103184A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a sealing technology with short vacuum evacuation time. <P>SOLUTION: The outer peripheral vicinity of panels 11, 12 is sealed down with a seal member 14 beforehand, residual gas between the panels 11, 12 is put under vacuum evacuation from a vent 17 formed of a notch of the seal member 14, and discharge gas is introduced for substitution. A sealing material 15 is arranged in the vent 17, is melted by irradiating a laser beam from a side direction, and is introduced into a gap between the panels 11, 12 by a capillary phenomenon to solidify it and form a sealing part. The vent 17 is closed by the sealing part, the panels 11, 12 are sealed by the seal member 14 and the seal-down part. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明はＰＤＰパネルの封着技術にかかり、特に、短時間でＰＤＰパネル間に放電ガスを充満した状態にできる技術に関する。   The present invention relates to a sealing technique for a PDP panel, and more particularly, to a technique capable of filling a discharge gas between PDP panels in a short time.

従来より、ＰＤＰ(Plasma Display Panel)やＦＥＤ(Field Emission Display)のような表示装置の製造には、フロントパネルとリアパネルを封着材料で固定する方法が採用されている。   Conventionally, a method of fixing a front panel and a rear panel with a sealing material has been adopted for manufacturing a display device such as a plasma display panel (PDP) or a field emission display (FED).

封止工程を説明すると、図１３に示すように、リアパネル１１１上にリング状の封着材料１１５を置き、その上に、図１４に示すように、フロントパネル１１２を乗せる。
図１５(ａ)は、その状態を示す内部断面図であり、リアパネル１１１には隔壁１１３が形成されているが、隔壁１１３の高さよりも厚みのある封着材料１１５を用いることで、フロントパネル１１２が封着材料１１５上に乗るようにしておく。 Explaining the sealing process, as shown in FIG. 13, a ring-shaped sealing material 115 is placed on the rear panel 111, and a front panel 112 is placed thereon as shown in FIG.
FIG. 15A is an internal cross-sectional view showing the state. A partition wall 113 is formed on the rear panel 111. By using a sealing material 115 that is thicker than the height of the partition wall 113, a front panel is formed. 112 is placed on the sealing material 115.

そして、リアパネル１１１とフロントパネル１１２を重ね合わせた状態で、全体を加熱しながら押圧すると、封着材料１１５が溶融し、押しつぶされ、図１５(ｂ)に示すように、フロントパネル１１２とリアパネル１１１とは、固化したシール部材１１６によって固定される。フロントパネル１１２は隔壁１１３と密着している。   Then, when the rear panel 111 and the front panel 112 are overlapped and pressed while being heated, the sealing material 115 is melted and crushed, and as shown in FIG. 15B, the front panel 112 and the rear panel 111. Is fixed by the solidified seal member 116. The front panel 112 is in close contact with the partition wall 113.

シール部材１１６の一部や、フロント又はリアパネル１１２、１１１の一部には、通気管が挿通されており、この通気間からフロントパネル１１２とリアパネル１１１の間のシール部材１１６で囲まれた空間内の気体を真空排気し、代わりに放電ガスを導入した後、通気管を閉塞させ、フロントパネル１１２とリアパネル１１１の間の、シール部材１１６で囲まれた空間を、放電ガスで充満した状態でシール部材１１６の外部の空間と分離する。   A vent pipe is inserted into a part of the seal member 116 and a part of the front or rear panels 112 and 111, and in a space surrounded by the seal member 116 between the front panel 112 and the rear panel 111 from between the vents. After evacuating the gas and introducing the discharge gas instead, the vent pipe is closed, and the space surrounded by the seal member 116 between the front panel 112 and the rear panel 111 is sealed with the discharge gas. Separated from the space outside the member 116.

しかし、二枚のパネル１１１、１１２の全体を加熱させると、熱膨張による歪みが生じ、内部回路が破損したり、封着材料１１５が固化するときに、パネルにクラックが入ったり、封着材料１１５を溶融するときに、上側のパネル１１２が傾くという問題があった。   However, when the entire two panels 111 and 112 are heated, distortion due to thermal expansion occurs, the internal circuit is damaged, and when the sealing material 115 is solidified, the panel is cracked, or the sealing material When melting 115, there was a problem that the upper panel 112 tilted.

従って、加熱と冷却をゆっくり行なう必要があり、製造時間が長くなる。
また、パネル１１１、１１２の間の空間は小孔から真空排気し、放電ガスを封入した後、小孔を閉塞させるために、真空排気に長時間を要するという問題がある。
従来の封止技術は下記文献に記載されている。
特開２０００−５１０２８１号公報 特開２００２−０７５１９７号公報 特開２００２−２６５２３７号公報 Therefore, it is necessary to perform heating and cooling slowly, and the manufacturing time becomes long.
Further, the space between the panels 111 and 112 is evacuated from the small holes, and after the discharge gas is sealed, there is a problem that it takes a long time to evacuate the holes to close the small holes.
Conventional sealing techniques are described in the following documents.
JP 2000-510281 A JP 2002-075197 JP 2002-265237 A

パネルのクラックや回路損傷を発生させずに短時間で封止できる技術を提供する。   Provided is a technology capable of sealing in a short time without causing cracks in the panel or circuit damage.

上記課題を解決するため、本発明は、所定間隔で配置された二枚のパネル間に放電ガスを充満させた状態で、前記パネル間の空間を気密に封止する封着方法であって、前記二枚のパネルが、前記二枚のパネル間に、切り欠きから成る通気孔を有するリング状のシール部材を配置し、前記シール部材によって前記二枚のパネルを接着して積層パネルを形成し、前記通気孔を通じて前記パネル間の気体を真空排気した後、前記パネル間に放電ガスを導入し、前記パネル間が放電ガスで充満された状態で、前記通気孔に配置された封着材料にレーザ光を照射して前記封着材料を溶融させ、固化した前記封着材料によって前記通気孔を閉塞させるＰＤＰパネルの封着方法である。
また、本発明は、前記積層パネルは封着室に配置し、前記封着室を真空排気し、前記通気孔を通じて前記パネル間の気体を真空排気するＰＤＰパネルの封着方法である。
また、本発明は、前記封着室内に前記放電ガスを導入し、前記通気孔を通じて前記パネル間に前記放電ガスを導入するＰＤＰパネルの封着方法である。 In order to solve the above problems, the present invention is a sealing method in which a space between the panels is hermetically sealed in a state in which a discharge gas is filled between two panels arranged at predetermined intervals. The two panels are arranged with a ring-shaped seal member having a vent hole made of a notch between the two panels, and the two panels are bonded to form a laminated panel. After the gas between the panels is evacuated through the vent hole, a discharge gas is introduced between the panels, and the sealing material disposed in the vent hole is filled with the discharge gas between the panels. This is a method of sealing a PDP panel in which the sealing material is melted by irradiating laser light, and the air holes are closed by the solidified sealing material.
The present invention is also a sealing method for a PDP panel in which the laminated panel is disposed in a sealing chamber, the sealing chamber is evacuated, and the gas between the panels is evacuated through the vent holes.
The present invention is also a sealing method for a PDP panel in which the discharge gas is introduced into the sealing chamber and the discharge gas is introduced between the panels through the vent holes.

パネル間の隙間と、パネルの外部との間のコンダクタンスが大きいので、パネル間の真空排気や、放電ガスの封入が容易である。
更に、封着材料にレーザ光が横方向から照射された場合は、パネルは昇温せず、歪みが生じない。 Since the conductance between the gap between the panels and the outside of the panel is large, it is easy to evacuate between the panels and enclose the discharge gas.
Further, when the sealing material is irradiated with laser light from the lateral direction, the panel does not rise in temperature and no distortion occurs.

図７の符号９は、本発明の封着対象である積層パネルを示している。
この積層パネル９は、二枚のパネル１１、１２が略リング状のシール部材１４によって貼り合わされて構成されている。
図２は、図７のＡ−Ａ線截断断面図、図３はＢ−Ｂ線截断断面図である。 The code | symbol 9 of FIG. 7 has shown the laminated panel which is the sealing object of this invention.
The laminated panel 9 is configured by bonding two panels 11 and 12 with a substantially ring-shaped seal member 14.
2 is a cross-sectional view taken along line AA in FIG. 7, and FIG. 3 is a cross-sectional view taken along line BB.

二枚のパネル１１、１２はプラズマディスプレイ装置のフロントパネルとリアパネルであり、一方のパネル１１には隔壁１３が形成され、他方のパネル１２は隔壁１３の上端に密着されており、パネル１１、１２間は隔壁１３の高さだけ離間されている。パネル１１、１２間に配置された配線や蛍光体は省略してある。   The two panels 11 and 12 are a front panel and a rear panel of the plasma display device. A partition wall 13 is formed on one panel 11, and the other panel 12 is in close contact with the upper end of the partition wall 13. The space is separated by the height of the partition wall 13. Wirings and phosphors arranged between the panels 11 and 12 are omitted.

シール部材１４は低融点ガラスの溶融固化物であり、そのリングの一部には数ｃｍ〜数十ｃｍ程度が切り欠きが設けられ、切り欠き部分によって、二枚のパネル１１、１２の間の空間とパネル１１、１２の外部の空間とを接続する通気孔１７が形成されている。シール部材１４は、二枚のパネル１１、１２と密着しており、シール部材１４とパネル１１、１２の間は気体がリークしないようになっている。
二枚のパネル１１、１２は略四角形であり、一方が他方よりもはみ出るように配置されている。 The sealing member 14 is a melted and solidified material of low-melting glass, and a part of the ring is provided with a notch of about several centimeters to several tens of centimeters. A vent hole 17 that connects the space and the space outside the panels 11 and 12 is formed. The seal member 14 is in close contact with the two panels 11 and 12 so that gas does not leak between the seal member 14 and the panels 11 and 12.
The two panels 11 and 12 are substantially quadrangular and are arranged so that one protrudes beyond the other.

この積層パネル９を水平にし、図８に示すように、通気孔１７が位置する辺からはみ出たパネル１１上に、通気孔１７を閉塞するように、棒状の封着材料１５を配置する。その状態のＣ−Ｃ線截断断面図を図４に示す。   The laminated panel 9 is leveled, and as shown in FIG. 8, a rod-shaped sealing material 15 is disposed on the panel 11 protruding from the side where the vent hole 17 is located so as to close the vent hole 17. FIG. 4 shows a cross-sectional view taken along the line C-C in this state.

図１の符号１は、本発明に用いることができる封着装置を示している。
この封着装置１は封着室３１を有しており、該封着室３１の内部には台３２が配置されている。封着材料１５が配置された積層パネル９は、封着材料１５が落下しないように、封着材料１５が配置された面を上向きにして封着室３１内に搬入され、台３２上に水平に配置される。 Reference numeral 1 in FIG. 1 indicates a sealing device that can be used in the present invention.
The sealing device 1 has a sealing chamber 31, and a table 32 is disposed inside the sealing chamber 31. The laminated panel 9 on which the sealing material 15 is disposed is carried into the sealing chamber 31 with the surface on which the sealing material 15 is disposed facing upward so that the sealing material 15 does not fall, and is horizontally placed on the table 32. Placed in.

封着室３１には、真空排気装置３３とガス導入系３４が接続されている。真空排気装置３３により、封着室３１内を真空排気すると、封着材料１５とパネル１１、１２の隙間から、パネル１１、１２間の隙間の気体は、通気孔１７を通って真空排気される。通気孔１７は大面積でありコンダクタンスは大きく、封着材料１５とパネル１１、１２間の隙間も大きいので、短時間で真空排気される。   A vacuum exhaust device 33 and a gas introduction system 34 are connected to the sealing chamber 31. When the inside of the sealing chamber 31 is evacuated by the vacuum exhaust device 33, the gas in the gap between the panels 11 and 12 is evacuated through the vent hole 17 from the gap between the sealing material 15 and the panels 11 and 12. . The vent hole 17 has a large area, a large conductance, and a large gap between the sealing material 15 and the panels 11 and 12, so that the air is evacuated in a short time.

封着室３１及びパネル１１、１２が所定圧力まで真空排気された後、ガス導入系３４から封着室３１内にＰＤＰパネルの放電ガスを導入すると、放電ガスは、通気孔１７からパネル１１、１２間の隙間に進入し、パネル１１、１２間が放電ガスによって充満される。放電ガスには、キセノンガスや、キセノンガスとネオンガスの混合ガス等が用いられる。   When the discharge gas of the PDP panel is introduced into the sealing chamber 31 from the gas introduction system 34 after the sealing chamber 31 and the panels 11 and 12 are evacuated to a predetermined pressure, the discharge gas is supplied from the vent hole 17 to the panel 11, 12 enters the gap between the panels 12, and the space between the panels 11 and 12 is filled with the discharge gas. As the discharge gas, xenon gas, a mixed gas of xenon gas and neon gas, or the like is used.

封着室３１の外部には、レーザ照射装置２０が配置されている。封着室３１の壁面には、一部に透光性を有する窓１９が設けられており、レーザ照射装置２０が射出するレーザ光は、窓１９を通って封着室３１内部に照射されるように構成されている。ここでは、窓１９は、封着室３１の壁面であって、窓１９から封着材料１５の側面が見える位置に配置されており、レーザ照射装置２０からレーザ光を射出すると、レーザ光は窓１９を透過し、封着材料１５に照射される。照射された部分は溶融する。   A laser irradiation device 20 is disposed outside the sealing chamber 31. The wall 19 of the sealing chamber 31 is partially provided with a light-transmitting window 19, and the laser beam emitted from the laser irradiation device 20 is irradiated through the window 19 into the sealing chamber 31. It is configured as follows. Here, the window 19 is a wall surface of the sealing chamber 31 and is disposed at a position where the side surface of the sealing material 15 can be seen from the window 19. When the laser light is emitted from the laser irradiation device 20, the laser light is 19 is transmitted to the sealing material 15. The irradiated part melts.

図５の符号２１は封着材料１５に照射されるレーザ光を示している。
レーザ光２１が照射される範囲は封着材料１５の長さよりも小さいので、封着材料１５の一端から他端までレーザ光２１の照射範囲を移動させ、封着材料１５を長さ方向全部溶融させる。 Reference numeral 21 in FIG. 5 indicates laser light applied to the sealing material 15.
Since the range irradiated with the laser beam 21 is smaller than the length of the sealing material 15, the irradiation range of the laser beam 21 is moved from one end to the other end of the sealing material 15 to melt the entire sealing material 15 in the length direction. Let

封着材料１５は、パネル１１、１２の間の隙間よりも厚いものが用いられており、封着材料１５は、その下部と上部はそれぞれ下側のパネル１１の表面と上側のパネル１２の縁に接触するように配置されている。その結果、封着材料１５の溶融物は、毛管現象によってパネル１１、１２の間に引き込まれる。   The sealing material 15 is thicker than the gap between the panels 11 and 12, and the lower and upper portions of the sealing material 15 are the surface of the lower panel 11 and the edge of the upper panel 12, respectively. It is arrange | positioned so that it may contact. As a result, the melt of the sealing material 15 is drawn between the panels 11 and 12 by capillary action.

封着材料１５の長さは通気孔１７の長さと等しいか、通気孔１７よりも長くされており、溶融物の両端がリング状のシール部材１４の端部とそれぞれ接触し、その状態で固化すると、図９に示すように、通気孔１７を塞ぐ封止部１６が形成される。同図符号１０は封止部１６によって通気孔が塞がれたＰＤＰパネルを示している。図６は、図９のＤ−Ｄ線截断断面図である。図１０に、封止部１６とシール材１４の位置関係を示す。   The length of the sealing material 15 is equal to or longer than the vent hole 17, and both ends of the melt come into contact with the end portions of the ring-shaped seal member 14, and solidify in that state. Then, as shown in FIG. 9, a sealing portion 16 that closes the vent hole 17 is formed. Reference numeral 10 in the figure shows a PDP panel in which a vent hole is closed by a sealing portion 16. 6 is a cross-sectional view taken along the line DD of FIG. FIG. 10 shows the positional relationship between the sealing portion 16 and the sealing material 14.

以上は、二枚のパネル１０、１１を積層させて積層パネル９を構成する際、一方のパネル１１、１２を他方のパネル１１、１２からはみ出させたが、本発明はそれに限定されるものではない。   As described above, when the laminated panel 9 is formed by laminating the two panels 10 and 11, one panel 11 and 12 protrudes from the other panel 11 and 12, but the present invention is not limited thereto. Absent.

例えば、二枚のパネルを、一部が切りかけられ、通気孔が形成されたリング状のシール部材によって互いに固定する際、通気孔が面する辺を揃えることもできる。
この場合、パネル上に封着材料を配置することはできないが、通気孔を跨ぐように、シール部材上に配置したり、パネルの縁上に配置することができる。 For example, when the two panels are fixed to each other by a ring-shaped sealing member in which a part of the panel is cut and a vent hole is formed, the sides facing the vent hole can be aligned.
In this case, the sealing material cannot be disposed on the panel, but can be disposed on the seal member or on the edge of the panel so as to straddle the vent hole.

図１１はその積層パネル９’を説明するための図面であり、上記積層パネル９と同じ部材には同じ符号を付してある。パネル１１、１２は、通気孔１７を上方に向けて略鉛直に配置されており、封着材料１５は通気孔１７の長さよりも長く、通気孔１７上の位置で、通気孔１７を塞ぐように配置されており、パネル１１、１２間を真空排気し、パネル１１、１２間を放電ガスで充満させた後、封着材料１５の側面であって封着材料１５の上方向を向く面に、上方からレーザ光を照射し、封着材料１５を溶融、固化させ、封止部１６によって通気孔１７を塞ぐと、図１２に示すＰＤＰパネル１０’が得られる。   FIG. 11 is a diagram for explaining the laminated panel 9 ′, and the same members as those in the laminated panel 9 are denoted by the same reference numerals. The panels 11 and 12 are arranged substantially vertically with the vent hole 17 facing upward, and the sealing material 15 is longer than the vent hole 17 so as to block the vent hole 17 at a position on the vent hole 17. After evacuating between the panels 11 and 12 and filling the space between the panels 11 and 12 with the discharge gas, the side surface of the sealing material 15 and the surface facing upward of the sealing material 15 When the sealing material 15 is melted and solidified by irradiating the laser beam from above and the air hole 17 is closed by the sealing portion 16, the PDP panel 10 ′ shown in FIG. 12 is obtained.

なお、上記いずれの場合に於いても、シール部材１４で接着されたパネル１１、１２の通気孔１７に封着材料１５を配置せずに封着室３１内を真空排気し、パネル１１、１２間の気体を通気孔１７から真空排気し、封着室３１内に放電ガスを導入してパネル１１、１２間を放電ガスで充満させた後、封着材料１５を通気孔１７に配置し、レーザ光を側面に照射して溶融、固化させ、封止部１６を形成して通気孔１７を閉塞させてもよい。   In any of the above cases, the inside of the sealing chamber 31 is evacuated without disposing the sealing material 15 in the vent holes 17 of the panels 11 and 12 bonded by the sealing member 14, and the panels 11 and 12 are evacuated. The gas between them is evacuated from the vent hole 17, the discharge gas is introduced into the sealing chamber 31, and the space between the panels 11 and 12 is filled with the discharge gas, and then the sealing material 15 is disposed in the vent hole 17, The side surface may be irradiated with a laser beam to melt and solidify, and the sealing portion 16 may be formed to close the vent hole 17.

本発明の封着方法に用いることができる装置の例Examples of apparatuses that can be used in the sealing method of the present invention 図７のＡ−Ａ線截断断面図Sectional view along line AA in FIG. 図７のＢ−Ｂ線截断断面図Sectional view taken along line BB in FIG. 図８のＣ−Ｃ線截断断面図CC sectional view taken along the line CC in FIG. レーザ照射を説明するための図Diagram for explaining laser irradiation 図９のＤ−Ｄ線截断断面図Sectional view taken along line D-D in FIG. 封着対象である積層パネルの平面図Plan view of laminated panel to be sealed 積層パネルに封着材料を配置した状態を説明するための平面図The top view for demonstrating the state which has arrange | positioned the sealing material to the laminated panel 積層パネルが封止された状態を説明するための平面図The top view for demonstrating the state by which the laminated panel was sealed 封止部とシール部の位置関係を説明するための図面Drawing for explaining the positional relationship between the sealing part and the sealing part 本発明を適用できる他の積層パネルの例Examples of other laminated panels to which the present invention can be applied その積層パネルから得たＰＤＰパネルPDP panel obtained from the laminated panel 従来技術の封着方法を説明するための平面図(１)Plan view for explaining a conventional sealing method (1) 従来技術の封着方法を説明するための平面図(２)Plan view for explaining the conventional sealing method (2) (ａ)：従来技術の封着方法を説明するための断面図(１) (ｂ)：従来技術の封着方法を説明するための断面図(２)(a): Cross-sectional view for explaining a conventional sealing method (1) (b): Cross-sectional view for explaining a conventional sealing method (2)

符号の説明Explanation of symbols

９、９’……積層パネル
１０、１０’……ＰＤＰパネル
１１、１２ ……パネル
１５……封着材料
１６……封止部
２１、２２……レーザ光 9, 9 '... laminated panel 10, 10' ... PDP panel 11, 12 ... panel 15 ... sealing material 16 ... sealing part 21, 22 ... laser beam

Claims (3)

所定間隔で配置された二枚のパネル間に放電ガスを充満させた状態で、前記パネル間の空間を気密に封止する封着方法であって、
前記二枚のパネルが、前記二枚のパネル間に、切り欠きから成る通気孔を有するリング状のシール部材を配置し、前記シール部材によって前記二枚のパネルを接着して積層パネルを形成し、
前記通気孔を通じて前記パネル間の気体を真空排気した後、前記パネル間に放電ガスを導入し、
前記パネル間が放電ガスで充満された状態で、前記通気孔に配置された封着材料にレーザ光を照射して前記封着材料を溶融させ、固化した前記封着材料によって前記通気孔を閉塞させるＰＤＰパネルの封着方法。 In a state where a discharge gas is filled between two panels arranged at a predetermined interval, a sealing method for hermetically sealing a space between the panels,
The two panels are arranged with a ring-shaped seal member having a vent hole made of a notch between the two panels, and the two panels are bonded to form a laminated panel. ,
After evacuating the gas between the panels through the vents, introducing a discharge gas between the panels,
In a state where the space between the panels is filled with the discharge gas, the sealing material disposed in the vent hole is irradiated with laser light to melt the sealing material, and the vent hole is closed by the solidified sealing material. A method for sealing a PDP panel. 前記積層パネルは封着室に配置し、前記封着室を真空排気し、前記通気孔を通じて前記パネル間の気体を真空排気する請求項１記載のＰＤＰパネルの封着方法。   The method for sealing a PDP panel according to claim 1, wherein the laminated panel is disposed in a sealing chamber, the sealing chamber is evacuated, and a gas between the panels is evacuated through the vent hole. 前記封着室内に前記放電ガスを導入し、前記通気孔を通じて前記パネル間に前記放電ガスを導入する請求項２記載のＰＤＰパネルの封着方法。   The method for sealing a PDP panel according to claim 2, wherein the discharge gas is introduced into the sealing chamber, and the discharge gas is introduced between the panels through the vent hole.
JP2006284458A 2006-10-19 2006-10-19 Sealing method of pdp panel Pending JP2008103184A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8904627B2 (en) 2011-08-29 2014-12-09 Seiko Epson Corporation Method for sealing package

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US4009407A (en) * 1974-07-30 1977-02-22 Panel Technology, Inc. Segmented electrode type gas discharge display panel with mercury giver means
JPS5650032A (en) * 1979-09-28 1981-05-07 Beckman Instruments Inc Method of sealing gas discharge display
JPH042030A (en) * 1990-04-11 1992-01-07 Mitsubishi Electric Corp Plasma display panel and manufacture thereof
JP2000156160A (en) * 1998-11-19 2000-06-06 Ulvac Japan Ltd Vacuum device, and manufacture of plasma display unit
JP2000215791A (en) * 1999-01-22 2000-08-04 Sony Corp Sealing panel device and its manufacture
JP2001313343A (en) * 2000-05-01 2001-11-09 Futaba Corp Airtight container and its manufacturing method
JP2003068185A (en) * 2001-08-28 2003-03-07 Nippon Hoso Kyokai <Nhk> Method for manufacturing cold cathode element, cold cathode element and sealing device of cold cathode element
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Publication number Priority date Publication date Assignee Title
US8904627B2 (en) 2011-08-29 2014-12-09 Seiko Epson Corporation Method for sealing package

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