JP2008082569A - Dewatering drying device and method - Google Patents

Dewatering drying device and method Download PDF

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JP2008082569A
JP2008082569A JP2006260197A JP2006260197A JP2008082569A JP 2008082569 A JP2008082569 A JP 2008082569A JP 2006260197 A JP2006260197 A JP 2006260197A JP 2006260197 A JP2006260197 A JP 2006260197A JP 2008082569 A JP2008082569 A JP 2008082569A
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cleaned
cleaning liquid
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Kojiro Okawa
光治郎 大川
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/005—Drying solid materials or objects by processes not involving the application of heat by dipping them into or mixing them with a chemical liquid, e.g. organic; chemical, e.g. organic, dewatering aids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00—Drying solid materials or objects by processes involving the application of heat
    • F26B3/28—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun
    • F26B3/30—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun from infrared-emitting elements

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  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Microbiology (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Solid Materials (AREA)
  • Extraction Or Liquid Replacement (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dewatering drying device and a dewatering drying method capable of dewatering and drying a washed object after washing with water, in a state of separating/removing moisture. <P>SOLUTION: The washed object A after washing with water, is dipped into cleaning liquid B prepared by mixing fluorines solvent and alcohols solvent and stored in a dip tank 4 to separate/remove the moisture attached to the washed object A by dissolving the same into the alcohols solvent mixed in the cleaning liquid B. The washed object A taken out from the dip tank 4 after dip washing is moved to a steam layer 5 composed of the steam Ba of the cleaning liquid B, and heated to a temperature to promote vaporization of the cleaning liquid B. The washed object A taken out from the steam layer 5 after vapor washing is heated by far infrared ray radiated from far infrared ray heaters 6, 6, so that the alcohols solvent attached to the washed object A is vaporized for dewatering and drying the washed object A. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

この発明は、例えば硝子基板、液晶表示板、或いは、電子部品、光学部品、精密部品、金属部品等の水洗い処理された被洗浄物から水分を分離・除去する際に用いられる水切り乾燥装置及び水切り乾燥方法に関する。   The present invention relates to a draining and drying apparatus and a draining apparatus used for separating and removing moisture from, for example, a glass substrate, a liquid crystal display panel, or an object to be washed such as an electronic component, an optical component, a precision component, or a metal component. It relates to a drying method.

従来、上述の水切り洗浄する装置としては、例えば水分の付着したワークを、洗浄槽に貯液されたイソプロピルアルコール（ＩＰＡ）とハイドロフルオロエーテル（ＨＦＥ）を混合してなる混合液中に浸漬し、ワークに付着した水分をイソプロピルアルコールに吸着させて水切り洗浄する。ワークを洗浄槽から取り出す際に、洗浄槽上方に放出されたハイドロフルオロエーテルの蒸気層によりワークを乾燥処理する水切り乾燥装置がある。
特開平１０−２９０９０１号公報 Conventionally, as the above-mentioned apparatus for draining and cleaning, for example, a work with moisture attached is immersed in a mixed solution obtained by mixing isopropyl alcohol (IPA) and hydrofluoroether (HFE) stored in a cleaning tank, Moisture adhering to the work is adsorbed by isopropyl alcohol and washed with water. There is a draining and drying device for drying a work by a vapor layer of hydrofluoroether released above the cleaning tank when the work is taken out from the cleaning tank.
Japanese Patent Laid-Open No. 10-290901

しかし、上述の洗浄槽から取り出されたワークを、洗浄槽上方に放出された蒸気層により乾燥処理しても、混合液をワークから取り除くことが難しく、ワークに混合液が残着していることがある。ワークに、イソプロピルアルコールを混合した混合液が残着していると、ワークを蒸気層から取り出した直後に、蒸気層上方に存在するガスや空気等の雰囲気中に含まれる水分が、ワークに残着する混合液のイソプロピルアルコールに吸着されてしまい、水切り効果が損なわれてしまうという問題点を有している。   However, it is difficult to remove the liquid mixture from the work even if the work taken out from the above washing tank is dried by the vapor layer released above the washing tank, and the liquid mixture remains on the work. There is. If a mixed liquid containing isopropyl alcohol remains on the workpiece, immediately after the workpiece is removed from the vapor layer, moisture contained in the atmosphere such as gas or air existing above the vapor layer remains on the workpiece. It is adsorbed by the isopropyl alcohol of the liquid mixture to wear, and has the problem that the draining effect will be impaired.

また、ワークを乾燥する方法として、熱風によりベーキング処理する技術もあるが、ワークを約１２０℃以上に加熱する必要があるため、ワークの熱による変質が懸念される。且つ、熱風を送気・排気するため、微細なゴミ、塵埃等が洗浄済みのワークに付着することがあり、清浄度が要求されるクリーンルームでの使用ができない。   In addition, there is a technique of baking with hot air as a method for drying the workpiece, but since the workpiece needs to be heated to about 120 ° C. or more, there is a concern about the deterioration of the workpiece due to heat. Moreover, since hot air is supplied and exhausted, fine dust, dust, and the like may adhere to the cleaned workpiece, and cannot be used in a clean room where cleanliness is required.

この発明は上記問題に鑑み、水洗い処理後の被洗浄物を、水分が分離・除去された状態に水切り乾燥することができる水切り乾燥装置及び水切り乾燥方法の提供を目的とする。   In view of the above problems, an object of the present invention is to provide a draining and drying apparatus and a draining and drying method capable of draining and drying an object to be cleaned after being washed with water in a state where moisture is separated and removed.

請求項１に記載した発明の水切り乾燥装置は、水分が付着した被洗浄物を、浸漬槽に貯液されたフッ素系溶剤とアルコール系溶剤を混合してなる洗浄液中に浸漬し、被洗浄物に付着する水分をアルコール系溶剤に溶解させて、該被洗浄物から水分を分離・除去する水切り乾燥装置であって、上記浸漬槽に貯液された洗浄液の液面上に、該被洗浄物に付着する洗浄液の蒸発気化が促進される温度に加熱された洗浄液の蒸気からなる蒸気層を備え、上記蒸気層から取り出された被洗浄物に遠赤外線を照射して、該被洗浄物に付着するアルコール系溶剤が蒸発気化する温度に加熱する遠赤外線加熱手段を設けたことを特徴とする。   The draining and drying apparatus according to the first aspect of the present invention immerses an object to be cleaned, which has moisture attached thereto, into a cleaning liquid obtained by mixing a fluorine-based solvent and an alcohol-based solvent stored in an immersion tank. A water draining / drying device that dissolves water adhering to an alcohol-based solvent to separate and remove water from the object to be cleaned, on the surface of the cleaning liquid stored in the immersion tank. A vapor layer composed of the vapor of the cleaning liquid heated to a temperature at which evaporation of the cleaning liquid adhering to the surface is promoted, and the object to be cleaned taken out from the vapor layer is irradiated with far infrared rays to adhere to the object to be cleaned And a far infrared heating means for heating to a temperature at which the alcoholic solvent to be evaporated evaporates.

この発明によると、水分が付着した被洗浄物を、浸漬槽に貯液されたフッ素系溶剤とアルコール系溶剤を混合してなる洗浄液中に浸漬し、被洗浄物に付着する水分をアルコール系溶剤に溶解させて、被洗浄物から水分を分離・除去する。   According to this invention, the object to be cleaned attached to the object to be cleaned is immersed in a cleaning solution obtained by mixing a fluorine-based solvent and an alcohol-based solvent stored in the immersion tank, and the alcohol-based solvent To dissolve and remove water from the object to be cleaned.

洗浄液から取り出された浸漬洗浄後の被洗浄物を、洗浄液の液面上に形成された洗浄液の蒸気からなる蒸気層中に移動させ、洗浄液の蒸気により被洗浄物に付着する洗浄液の蒸発気化が促進される温度に加熱する。   The object to be cleaned after immersion cleaning taken out from the cleaning liquid is moved into a vapor layer composed of the vapor of the cleaning liquid formed on the surface of the cleaning liquid, and the evaporation of the cleaning liquid adhering to the object to be cleaned is caused by the vapor of the cleaning liquid. Heat to an accelerated temperature.

蒸気層から取り出された蒸気洗浄後の被洗浄物を、遠赤外線加熱手段から放射される遠赤外線により均一に加熱し、被洗浄物に付着するアルコール系溶剤や水分が含まれるアルコール系溶剤を蒸発気化させて水切り乾燥する。   The object to be cleaned after steam cleaning taken out from the vapor layer is uniformly heated by far infrared rays emitted from the far infrared heating means to evaporate alcohol solvent and moisture-containing alcohol solvent adhering to the object to be cleaned. Vaporize and drain.

上記被洗浄物は、例えば硝子基板、液晶表示板、或いは、電子部品、光学部品、精密部品、金属部品等で構成することができる。また、洗浄液を構成するフッ素系溶剤は、例えばハイドロフルオロエーテル（ＨＦＥ）、ハイドロフルオロカーボン（ＨＦＣ）、ハイドロクロロフルオロカーボン（ＨＣＦＣ）等を主成分とする単一溶剤又は複合溶剤で構成することができる。また、フッ素系溶剤に混合されるアルコール系溶剤は、例えば沸点＝７８．２３℃のエチルアルコール（別名エタノール）、沸点＝８２．４℃のイソプロピルアルコール（ＩＰＡ）等の水溶解度の高い溶剤で構成することができる。   The object to be cleaned can be composed of, for example, a glass substrate, a liquid crystal display plate, an electronic component, an optical component, a precision component, a metal component, or the like. Moreover, the fluorine-type solvent which comprises a washing | cleaning liquid can be comprised with the single solvent or composite solvent which has hydrofluoroether (HFE), hydrofluorocarbon (HFC), hydrochlorofluorocarbon (HCFC) etc. as a main component, for example. The alcohol solvent mixed with the fluorinated solvent is composed of a solvent having high water solubility such as ethyl alcohol (both ethanol) having a boiling point = 78.23 ° C. and isopropyl alcohol (IPA) having a boiling point = 82.4 ° C. can do.

実施例では、上記洗浄液の一例として、旭硝子株式会社製のアサヒクリンＡＥ−３１００Ｅ（商品名）を使用しているが、他社製の溶剤を洗浄液として使用してもよい。ＡＥ−３１００Ｅの主な物性は、沸点＝５３．７℃、比重（２５℃）＝１．４０、蒸発潜熱＝１６３ＫＪ/Ｋｇ、表面張力（２５℃）＝１６．１、水の溶解度＝５３００ｐｐｍである。なお、水分の蒸発潜熱=２２５９ＫＪ/Ｋｇである。   In the examples, Asahi Clin AE-3100E (trade name) manufactured by Asahi Glass Co., Ltd. is used as an example of the cleaning liquid, but a solvent manufactured by another company may be used as the cleaning liquid. The main physical properties of AE-3100E are as follows: boiling point = 53.7 ° C., specific gravity (25 ° C.) = 1.40, latent heat of vaporization = 163 KJ / Kg, surface tension (25 ° C.) = 16.1, water solubility = 5300 ppm. is there. Note that the latent heat of vaporization of moisture = 2259 KJ / Kg.

請求項２に記載した発明の水切り乾燥装置は、上記請求項１に記載の構成と併せて、上記浸漬槽に貯液された洗浄液の液面部分に浮上する水分が含まれる液を、該浸漬槽の全方向へオーバーフロー可能に構成したことを特徴とする。   According to a second aspect of the present invention, there is provided a draining and drying apparatus that combines the structure of the first aspect with a liquid containing water that floats on the liquid surface portion of the cleaning liquid stored in the immersion tank. It is characterized in that it can overflow in all directions of the tank.

この発明によると、被洗浄物に付着する水分を洗浄液に混入したアルコール系溶剤に溶解させ、その水分が含まれる液の比重を、水分が含まれない洗浄液の比重よりも軽くする。水分が含まれる液を浸漬槽に貯液された洗浄液の液面部分に浮上させ、浸漬槽外部の全方向へオーバーフローするので、浸漬槽内部の角隅部付近や周縁部付近にアルコール系溶剤が残留することがなく、被洗浄物を浸漬槽から取り出した際に、フッ素系溶剤の液面部分に浮遊する水分やアルコール系溶剤が被洗浄物外面に再付着するのを防止することができる。   According to the present invention, the water adhering to the object to be cleaned is dissolved in the alcohol solvent mixed in the cleaning liquid, and the specific gravity of the liquid containing the water is made lighter than the specific gravity of the cleaning liquid not containing the water. Since the liquid containing water floats up on the liquid level of the cleaning liquid stored in the immersion tank and overflows in all directions outside the immersion tank, alcohol-based solvents are present near the corners and the periphery of the immersion tank. When the object to be cleaned is taken out of the immersion tank without remaining, it is possible to prevent moisture and alcohol solvent floating on the liquid surface portion of the fluorine-based solvent from reattaching to the outer surface of the object to be cleaned.

請求項３に記載した発明の水切り乾燥装置は、上記請求項１に記載の構成と併せて、上記浸漬槽に、上記洗浄液のフッ素系溶剤よりも沸点温度が高いフッ素系溶剤を加熱媒体とする溶剤加熱手段を設けたことを特徴とする。   A draining and drying apparatus according to a third aspect of the present invention uses, in addition to the structure of the first aspect, a heating medium that is a fluorinated solvent having a boiling point higher than that of the fluorinated solvent of the cleaning liquid. A solvent heating means is provided.

この発明によると、浸漬槽に貯液された洗浄液のフッ素系溶剤を、その洗浄液のフッ素系溶剤よりも沸点温度が高いフッ素系溶剤を加熱媒体とする溶剤加熱手段により加熱して蒸発気化するので、他の溶剤を加熱媒体として用いるよりも、洗浄液の温度制御が容易に行える。   According to this invention, the fluorinated solvent of the cleaning liquid stored in the immersion tank is evaporated and evaporated by heating with a solvent heating means using a fluorinated solvent having a boiling point higher than that of the fluorinated solvent of the cleaning liquid as a heating medium. The temperature of the cleaning liquid can be controlled more easily than using another solvent as a heating medium.

請求項４に記載した発明の水切り乾燥装置は、上記請求項１に記載の構成と併せて、上記遠赤外線加熱手段を、プレート状の遠赤外線ヒータで構成したことを特徴とする。   The draining and drying apparatus of the invention described in claim 4 is characterized in that the far-infrared heating means is composed of a plate-like far-infrared heater in combination with the structure described in claim 1.

この発明によると、蒸気層から取り出された被洗浄物に対して遠赤外線ヒータから放射される遠赤外線が均一に照射されるので、乾燥速度に差が生じたり、乾燥ムラが発生することがない。   According to the present invention, the far-infrared radiation emitted from the far-infrared heater is uniformly irradiated to the object to be cleaned taken out from the vapor layer, so that there is no difference in drying speed or unevenness in drying. .

請求項５に記載した発明の水切り乾燥方法は、水分が付着した被洗浄物を、浸漬槽に貯液されたフッ素系溶剤とアルコール系溶剤を混合してなる洗浄液中に浸漬して、該被洗浄物に付着する水分をアルコール系溶剤に溶解させ、上記洗浄液から取り出された被洗浄物を、該洗浄液の液面上に形成された洗浄液の蒸気からなる蒸気層中に移動して、該被洗浄物に残着する洗浄液の蒸発気化が促進される温度に洗浄液の蒸気で加熱し、上記蒸気層から取り出された被洗浄物を、遠赤外線加熱手段から放射される遠赤外線により加熱して、該被洗浄物に残着するアルコール系溶剤を蒸発気化させて水切り乾燥することを特徴とする。   According to a fifth aspect of the present invention, the water draining and drying method includes immersing an object to be cleaned attached in a cleaning liquid obtained by mixing a fluorine-based solvent and an alcohol-based solvent stored in an immersion tank. Moisture adhering to the cleaning object is dissolved in an alcohol-based solvent, and the object to be cleaned taken out from the cleaning liquid is moved into a vapor layer made of the cleaning liquid vapor formed on the surface of the cleaning liquid, and the target object is removed. Heat the cleaning liquid vapor to a temperature at which evaporation of the cleaning liquid remaining on the cleaning object is promoted, and heat the object to be cleaned taken out from the vapor layer by far infrared radiation emitted from the far infrared heating means. The alcohol-based solvent remaining on the object to be cleaned is evaporated and then drained and dried.

この発明によると、水分が付着した被洗浄物を、浸漬槽に貯液されたフッ素系溶剤とアルコール系溶剤を混合してなる洗浄液中に浸漬し、被洗浄物に付着する水分をアルコール系溶剤に溶解させて、被洗浄物から水分を分離・除去する。   According to this invention, the object to be cleaned attached to the object to be cleaned is immersed in a cleaning solution obtained by mixing a fluorine-based solvent and an alcohol-based solvent stored in the immersion tank, and the alcohol-based solvent To dissolve and remove water from the object to be cleaned.

洗浄液から取り出した浸漬洗浄後の被洗浄物を、洗浄液の液面上に形成された洗浄液の蒸気からなる蒸気層中に移動させ、洗浄液の蒸気により被洗浄物に付着する洗浄液の蒸発気化が促進される温度に加熱する。   The object to be cleaned after immersion cleaning taken out from the cleaning liquid is moved into the vapor layer consisting of the vapor of the cleaning liquid formed on the surface of the cleaning liquid, and evaporation of the cleaning liquid adhering to the object to be cleaned is accelerated by the vapor of the cleaning liquid Heat to the temperature to be.

蒸気層から取り出した蒸気洗浄後の被洗浄物を、遠赤外線加熱手段から放射される遠赤外線により加熱して、被洗浄物に付着するアルコール系溶剤や水分が含まれるアルコール系溶剤を蒸発気化させて、水切り乾燥する。   The object to be cleaned after vapor cleaning taken out from the vapor layer is heated by far infrared rays emitted from the far infrared heating means to evaporate and vaporize alcoholic solvent adhering to the object to be cleaned and alcohol solvent containing moisture. Drain and dry.

なお、請求項１，５に記載した被洗浄物に残着するアルコール系溶剤とは、被洗浄物を蒸気層から取り出した際に、蒸気層上方に存在する雰囲気中の水分が吸着されたアルコール系溶剤を含むものである。   The alcohol solvent remaining on the object to be cleaned according to claims 1 and 5 is an alcohol in which moisture in the atmosphere existing above the vapor layer is adsorbed when the object to be cleaned is taken out of the vapor layer. It contains a system solvent.

この発明によれば、被洗浄物に付着する水分を浸漬槽の洗浄液に溶解させて分離・除去した後、浸漬洗浄後の被洗浄物を、蒸気層の洗浄液からなる蒸気と、遠赤外線加熱手段から放射される遠赤外線により均一に加熱して、被洗浄物に付着するアルコール系溶剤や水分が含まれるアルコール系溶剤を蒸発気化させるので、水洗い処理後の被洗浄物を、水分が分離・除去された状態に水切り乾燥することができる。また、被洗浄物から水溶解度の高いアルコール系溶剤が分離・除去されるため、蒸気層から取り出した際に、雰囲気中の水分が被洗浄物に再付着することがなく、水切り乾燥した状態を保つことができる。   According to the present invention, the water adhering to the object to be cleaned is dissolved in the cleaning liquid of the immersion tank, separated and removed, and then the object to be cleaned after immersion cleaning is converted to the vapor composed of the cleaning liquid of the vapor layer and the far infrared heating means. Evenly heated by far-infrared rays radiated from evaporate the alcoholic solvent adhering to the object to be cleaned and the alcoholic solvent containing water, so that the water can be separated and removed from the object to be cleaned after washing with water. The dried state can be drained and dried. In addition, since the alcoholic solvent with high water solubility is separated and removed from the object to be cleaned, the moisture in the atmosphere does not reattach to the object to be cleaned when it is taken out from the vapor layer. Can keep.

この発明は、水洗い処理後の被洗浄物を水分が分離・除去された状態に水切り乾燥することができるという目的を、被洗浄物に付着する水分を浸漬槽の洗浄液に溶解させた後、蒸気層の洗浄液からなる蒸気と、遠赤外線加熱手段から放射される遠赤外線により加熱することで達成した。   The object of the present invention is that the object to be cleaned after the water washing treatment can be drained and dried in a state where the water is separated and removed. After the water adhering to the object to be cleaned is dissolved in the cleaning liquid of the immersion tank, This was achieved by heating with vapor comprising the layer cleaning liquid and far infrared radiation emitted from the far infrared heating means.

この発明の一実施例を以下図面に基づいて詳述する。
図面は、水洗い処理後の被洗浄物に付着した水分を分離・除去する際に用いられる水切り乾燥装置及び水切り乾燥方法を示し、図１及び図２に於いて、この水切り乾燥装置１は、水洗い処理された被洗浄物Ａの搬入が許容される搬入口２ａを処理室２左側部に設け、水切り乾燥された被洗浄物Ａの搬出が許容される搬出口２ｂを処理室２右側部に設けている。 An embodiment of the present invention will be described in detail with reference to the drawings.
The drawings show a draining and drying apparatus and a draining and drying method used when separating and removing water adhering to an object to be cleaned after washing with water. In FIGS. 1 and 2, the draining and drying apparatus 1 is washed with water. An inlet 2a for allowing the treated object A to be carried in is provided on the left side of the processing chamber 2, and an outlet 2b for allowing the drained and dried object A to be carried out is provided on the right side of the processing chamber 2. ing.

処理室２内の中央部には、被洗浄物Ａから水分を分離・除去するための処理槽３を配置している。処理槽３内部には、被洗浄物Ａを浸漬するための洗浄液Ｂが貯液された浸漬槽４を配置している。浸漬槽４に貯液された洗浄液Ｂの液面上には、洗浄液Ｂの蒸気Ｂａからなる蒸気層５を備えている。処理槽３右側部には、蒸気層５から取り出された被洗浄物Ａを加熱するための遠赤外線ヒータ６，６を配置している。   A treatment tank 3 for separating and removing moisture from the object to be cleaned A is disposed in the center of the treatment chamber 2. An immersion tank 4 in which a cleaning liquid B for immersing the object A to be cleaned is stored inside the processing tank 3. On the liquid surface of the cleaning liquid B stored in the immersion tank 4, a vapor layer 5 made of the vapor Ba of the cleaning liquid B is provided. Far-infrared heaters 6 and 6 for heating the cleaning object A taken out from the vapor layer 5 are disposed on the right side of the processing tank 3.

搬入口２ａに配置した搬入コンベヤ７は、水洗い処理された被洗浄物Ａを処理室２左側内部に搬入する。搬出口２ｂに配置した搬出コンベヤ８は、水切り乾燥された被洗浄物Ａを処理室２右側外部へ搬出する。また、搬入口２ａ及び搬出口２ｂは、被洗浄物Ａが通過する直前に開放され、被洗浄物Ａが通過した直後に閉塞される。   The carry-in conveyor 7 arranged at the carry-in port 2a carries the object A to be washed into the left side of the processing chamber 2. The carry-out conveyor 8 arranged at the carry-out port 2b carries the object A, which has been drained and dried, to the outside on the right side of the processing chamber 2. In addition, the carry-in port 2a and the carry-out port 2b are opened immediately before the object to be cleaned A passes, and are closed immediately after the object A to be cleaned has passed.

処理槽３上方に配置した運搬装置９は、プレート状の被洗浄物Ａが個々に保持される左右一対の運搬体９ａ，９ｂを、モータ等により処理槽３の左側上方と右側上方へ水平移動可能に設けるとともに、処理槽３の左側上方と右側上方への水平移動が許容される上昇位置と、下記の動作が許容される降下位置とに垂直昇降可能に設けている。   The transporting device 9 disposed above the processing tank 3 horizontally moves a pair of left and right transporting bodies 9a and 9b that individually hold the plate-shaped object A to the left and upper right of the processing tank 3 by a motor or the like. In addition to being provided as possible, the processing tank 3 is provided so as to be vertically movable up and down at a rising position where horizontal movement to the upper left side and upper right side is allowed and a lowering position where the following operations are allowed.

つまり、運搬体９ａ，９ｂを処理槽３左側上方へ移動した際に垂直降下させ、処理槽３左側部の搬入コンベヤ７に載置された被洗浄物Ａを左側運搬体９ａで保持する動作と、浸漬槽４の洗浄液Ｂに浸漬された被洗浄物Ａを右側運搬体９ｂで保持する動作を行う。   That is, when the transport bodies 9a and 9b are moved vertically upward on the left side of the processing tank 3, the object to be cleaned A placed on the carry-in conveyor 7 on the left side of the processing tank 3 is held by the left transport body 9a. Then, an operation of holding the object to be cleaned A immersed in the cleaning liquid B of the immersion tank 4 by the right-side transport body 9b is performed.

運搬体９ａ，９ｂを処理槽３右側上方に移動した際に垂直降下させ、左側運搬体９ａで保持した被洗浄物Ａを浸漬槽４の洗浄液Ｂに浸漬する動作と、右側運搬体９ｂで保持した蒸気洗浄後の被洗浄物Ａを処理槽３右側部の搬出コンベヤ８に載置する動作を行う。また、運搬体９ａ，９ｂを独立して水平移動及び垂直昇降させてもよい。   When the transport bodies 9a and 9b are moved to the upper right side of the processing tank 3 and vertically lowered, the object A held by the left transport body 9a is immersed in the cleaning liquid B of the immersion tank 4, and held by the right transport body 9b. The operation | movement which mounts the to-be-washed | cleaned item A after the vapor | steam washing | cleaning on the carrying-out conveyor 8 of the process tank 3 right side part is performed. Further, the carriers 9a and 9b may be moved horizontally and vertically moved up and down independently.

処理室２内の中央部に配置した処理槽３は、被洗浄物Ａが載置された運搬体９ａの搬入及び搬出される出入口３ａを槽上部に設け、運搬体９ａに載置された被洗浄物Ａ全体が洗浄液Ｂに浸漬される浸漬槽４を処理槽３内の下部中央に設けている。   The processing tank 3 disposed at the center in the processing chamber 2 is provided with an inlet / outlet port 3a for carrying and unloading the carrier 9a on which the object A to be cleaned is placed at the upper part of the tank, and the object placed on the carrier 9a. An immersion tank 4 in which the entire cleaning object A is immersed in the cleaning liquid B is provided in the lower center of the processing tank 3.

浸漬槽４は、図３、図４にも示すように、運搬体９ａに載置された被洗浄物Ａの搬入及び搬出される出入口４ａを槽上部に設け、出入口４ａ周縁部を同一高さに設定して、洗浄液Ｂの液面部分に浮上する水分が溶解した水分溶解液Ｂｂを前後左右の全方向へオーバーフロー可能に構成している。   As shown in FIGS. 3 and 4, the immersion tank 4 is provided with an inlet / outlet port 4a for carrying in and out the object A to be cleaned placed on the carrier 9a at the upper part of the tank, and the peripheral edge of the inlet / outlet port 4a is at the same height. The water-dissolved liquid Bb in which the water floating on the liquid surface portion of the cleaning liquid B is dissolved can be overflowed in all directions, front, rear, left and right.

また、浸漬槽４を、処理槽３の前後内壁面及び左右内壁面に対して所定間隔に離間した状態に支持して、処理槽３と浸漬槽４の対向壁面間に、浸漬槽４からオーバーフローした水分溶解液Ｂｂの貯液が許容される貯液槽１０を設けている。   Moreover, the immersion tank 4 is supported in a state spaced from the front and rear inner wall surfaces and the left and right inner wall surfaces of the treatment tank 3 at a predetermined interval, and overflows from the immersion tank 4 between the opposing wall surfaces of the treatment tank 3 and the immersion tank 4. A liquid storage tank 10 is provided in which the stored water solution Bb is allowed.

浸漬槽４には、フッ素系溶剤の一例であるハイドロフルオロエーテルと、アルコール系溶剤の一例であるエチルアルコール（別名エタノール）を混合してなる洗浄液Ｂを、被洗浄物Ａ全体の浸漬が許容される貯液レベルに貯液している。実施例では、洗浄液Ｂの一例である旭硝子株式会社製のアサヒクリンＡＥ−３１００Ｅ（商品名）を使用している。洗浄液Ｂを構成するフッ素系溶剤とアルコール系溶剤の混合比率は、ハイドロフルオロエーテルを約９４．５ｗｔ％、エチルアルコールを約５．５ｗｔ％の割合で混合している。   The immersion tank 4 is allowed to immerse the entire cleaning object A with a cleaning liquid B obtained by mixing hydrofluoroether, which is an example of a fluorinated solvent, and ethyl alcohol (also known as ethanol), which is an example of an alcoholic solvent. The liquid is stored at the liquid storage level. In the embodiment, Asahi Clin AE-3100E (trade name) manufactured by Asahi Glass Co., Ltd., which is an example of the cleaning liquid B, is used. The mixing ratio of the fluorine-based solvent and the alcohol-based solvent constituting the cleaning liquid B is about 94.5 wt% of hydrofluoroether and about 5.5 wt% of ethyl alcohol.

また、アルコール系溶剤の混合比率は、例えば略５％〜略６％の範囲に含まれる含有量に設定するのが好ましいが、略５％以下又は略６％以上の混合比率に変更してもよい。   Further, the mixing ratio of the alcohol solvent is preferably set to a content included in a range of, for example, about 5% to about 6%, but may be changed to a mixing ratio of about 5% or less or about 6% or more. Good.

つまり、被洗浄物Ａ全体を浸漬槽４の洗浄液Ｂに浸漬した際に、被洗浄物Ａに付着する水分を、洗浄液Ｂのフッ素系溶剤に混入したアルコール系溶剤に溶解させて、被洗浄物Ａ外面から水分を分離・除去する。その水分がアルコール系溶剤に溶解した水分溶解液Ｂｂは洗浄液Ｂよりも比重が軽くなるため、浸漬槽４に貯液された洗浄液Ｂの液面部分に浮上する。洗浄液Ｂの液面部分に浮上した水分溶解液Ｂｂは、浸漬槽４の出入口４ａ周縁部から全方向へ向けてオーバーフローして、処理槽３と浸漬槽４の対向壁面間に設けた貯液槽１０に貯液される。   That is, when the entire object to be cleaned A is immersed in the cleaning liquid B of the immersion tank 4, the water adhering to the object to be cleaned A is dissolved in the alcohol solvent mixed in the fluorinated solvent of the cleaning liquid B, and the object to be cleaned A Water is separated and removed from the outer surface. The water-dissolved liquid Bb in which the water is dissolved in the alcohol solvent has a specific gravity lighter than that of the cleaning liquid B, and thus floats on the liquid surface portion of the cleaning liquid B stored in the dipping tank 4. The water solution Bb floating on the liquid surface portion of the cleaning liquid B overflows in all directions from the peripheral edge of the inlet / outlet 4a of the immersion tank 4 and is stored between the opposing walls of the treatment tank 3 and the immersion tank 4. 10 is stored.

浸漬槽４内の底部内壁面に配置した溶剤加熱手段である管状の加熱ヒータ１１は、ポンプ１２、バルブ１３、循環路１４を介して媒体加熱装置１５に接続されており、ポンプ１２の移送力により、媒体加熱装置１５により加熱された液状の加熱媒体を加熱ヒータ１１に循環供給して、浸漬槽４に貯液された洗浄液Ｂを蒸発気化する温度に加熱及び保温する。加熱媒体としては、例えば浸漬槽４に貯液されたフッ素系溶剤よりも沸点が高いフッ素系溶剤が使用されるので、他の溶剤を加熱媒体として用いるよりも、洗浄液Ｂの温度制御が容易に行える。   A tubular heater 11, which is a solvent heating means disposed on the inner wall surface of the bottom of the immersion tank 4, is connected to the medium heating device 15 via a pump 12, a valve 13, and a circulation path 14. Thus, the liquid heating medium heated by the medium heating device 15 is circulated and supplied to the heater 11, and heated and kept at a temperature at which the cleaning liquid B stored in the immersion tank 4 is evaporated and evaporated. As the heating medium, for example, a fluorinated solvent having a boiling point higher than that of the fluorinated solvent stored in the immersion tank 4 is used. Therefore, it is easier to control the temperature of the cleaning liquid B than when using another solvent as the heating medium. Yes.

加熱ヒータ１１により蒸発気化された洗浄液Ｂの蒸気Ｂａは、浸漬槽４に貯液された洗浄液Ｂの液面上に供給され、被洗浄物Ａ全体を残着する洗浄液Ｂの蒸発気化が促進される温度に加熱するための蒸気層５を、浸漬槽４に貯液された洗浄液Ｂの液面と、その上方に配置された後述する冷却ジャケット１６の間に形成している。   The vapor Ba of the cleaning liquid B evaporated by the heater 11 is supplied onto the surface of the cleaning liquid B stored in the immersion tank 4 and the evaporation of the cleaning liquid B that leaves the entire object A to be cleaned is promoted. A vapor layer 5 for heating to a certain temperature is formed between the liquid surface of the cleaning liquid B stored in the immersion tank 4 and a cooling jacket 16 (described later) disposed thereabove.

処理槽３内の蒸気層５上方に配置した冷却ジャケット１６は、出入口３ａと蒸気層５との間の内壁面に沿ってループ状に配置され、冷却ジャケット１６側部に配置した凝縮コイル１７は、浸漬槽４の上方側部に連設した水分離槽１８上方に配置されている。また、被洗浄物Ａの搬入及び搬出、移動が妨げられないように配設している。   The cooling jacket 16 disposed above the vapor layer 5 in the treatment tank 3 is disposed in a loop shape along the inner wall surface between the inlet / outlet 3a and the vapor layer 5, and the condensation coil 17 disposed on the side of the cooling jacket 16 is The water separation tank 18 is provided above the immersion tank 4 and is disposed above the water separation tank 18. Moreover, it arrange | positions so that carrying in, carrying out, and a movement of the to-be-cleaned object A may not be prevented.

冷却ジャケット１６及び凝縮コイル１７は、例えばチラーやブラインチラー等の図示しない冷凍装置に接続され、冷凍装置から循環供給される冷却媒体により、蒸気層５に供給される洗浄液Ｂの蒸気Ｂａ及び槽内部に侵入する大気中の水分が凝縮液化される温度に冷却されている。   The cooling jacket 16 and the condensing coil 17 are connected to a refrigeration apparatus (not shown) such as a chiller or a branchler, for example. It is cooled to a temperature at which moisture in the air that enters the condensate is condensed and liquefied.

つまり、冷却ジャケット１６により凝縮液化された洗浄液Ｂを浸漬槽４及び水分離槽１８に滴下し、蒸発気化した洗浄液Ｂの蒸気Ｂａが機外へ放出されるのを防止している。また、凝縮コイル１７により凝縮液化した洗浄液Ｂを水分離槽１８に滴下して、凝縮液化された水分が浸漬槽４の洗浄液Ｂに混入するのを防止している。   That is, the cleaning liquid B condensed and liquefied by the cooling jacket 16 is dropped onto the dipping tank 4 and the water separation tank 18 to prevent the vaporized vapor B of the cleaning liquid B from being released outside the apparatus. Further, the cleaning liquid B condensed and liquefied by the condensing coil 17 is dropped into the water separation tank 18 to prevent the condensed liquid from being mixed into the cleaning liquid B of the immersion tank 4.

水分離槽１８は、２枚の仕切り板１８ａ，１８ｂにより、凝縮コイル１７により凝縮液化された水及び洗浄液Ｂを貯液するための貯液槽１８ｃと、比重差により水分が分離された洗浄液Ｂを貯液するための貯液槽１８ｄに分割されている。   The water separation tank 18 includes a liquid storage tank 18c for storing the water condensed by the condensing coil 17 and the cleaning liquid B by the two partition plates 18a and 18b, and a cleaning liquid B from which water is separated due to a difference in specific gravity. Is divided into a liquid storage tank 18d for storing the liquid.

貯液槽１８ｃの上部貯液領域は、バルブ１９、回収路２０を介して、液面部分に浮上した水を廃棄処理するための図示しない廃棄処理部に接続している。   The upper liquid storage area of the liquid storage tank 18c is connected via a valve 19 and a recovery path 20 to a waste treatment unit (not shown) for waste treatment of water floating on the liquid surface portion.

貯液槽１８ｄの下部貯液領域は、返還路２４を介して、浸漬槽４の上部貯液領域に接続されており、浸漬槽４と貯液槽１８ｄの高低差により、水分が比重差により分離され、所定の洗浄力に回復した洗浄液Ｂを貯液槽１８ｄから浸漬槽４へ返還して再利用する。   The lower liquid storage area of the liquid storage tank 18d is connected to the upper liquid storage area of the immersion tank 4 via the return path 24. Due to the difference in height between the immersion tank 4 and the liquid storage tank 18d, the moisture is caused by the difference in specific gravity. The separated cleaning liquid B that has been recovered to a predetermined cleaning power is returned from the liquid storage tank 18d to the immersion tank 4 and reused.

また、貯液槽１０は、２枚の仕切り板１０ａ，１０ｂにより、水分が溶解した水分溶解液Ｂｂを貯液するための槽部１０ｃと、比重差により水分が分離された洗浄液Ｂを貯液するための槽部１０ｄに分割されている。   The liquid storage tank 10 stores the tank part 10c for storing the water-dissolved liquid Bb in which the water is dissolved by the two partition plates 10a and 10b, and the cleaning liquid B from which the water is separated due to the difference in specific gravity. It is divided | segmented into the tank part 10d for doing.

槽部１０ｄの下部貯液領域は、ポンプ２５、バルブ２６、回収路２７を介して濾過装置２８の回収ポートに接続されており、ポンプ２５の移送力により、槽部１０ｄに貯液された比重分離後の洗浄液Ｂを濾過装置２８に供給して、例えばゴミや塵埃等の異物を洗浄液Ｂから分離・除去する。   The lower liquid storage area of the tank part 10d is connected to the recovery port of the filtration device 28 via the pump 25, the valve 26, and the recovery path 27, and the specific gravity stored in the tank part 10d by the transfer force of the pump 25. The separated cleaning liquid B is supplied to the filtering device 28 to separate and remove foreign matters such as dust and dust from the cleaning liquid B.

濾過装置２８の返還ポートは、ポンプ２９、バルブ３０、返還路３１を介して浸漬槽４の下部貯液領域に接続されており、ポンプ２９の移送力により、水分が分離されて所定の洗浄力に回復した洗浄液Ｂを浸漬槽４へ返還する。   The return port of the filtration device 28 is connected to the lower liquid storage region of the immersion tank 4 via the pump 29, the valve 30, and the return path 31, and the water is separated by the transfer force of the pump 29 to obtain a predetermined cleaning power. The cleaning liquid B recovered in step (1) is returned to the immersion tank 4.

槽部１０ｃの上部貯液領域は、バルブ３２、排出路３３を介して、液面部分に浮上した水を廃棄処理するための図示しない廃棄処理部に接続している。   The upper liquid storage area of the tank part 10c is connected via a valve 32 and a discharge path 33 to a waste treatment part (not shown) for waste treatment of water floating on the liquid surface part.

処理槽３右側部に配置した遠赤外線加熱手段であるプレート状の遠赤外線ヒータ６，６は、図５、図６にも示すように、右側運搬体９ｂに保持された被洗浄物Ａの前後両面と対向して２枚配置され、被洗浄物Ａが保持された右側運搬体９ｂの昇降移動が許容される前後間隔に隔てて略同一高さに配置している。   As shown in FIGS. 5 and 6, plate-like far-infrared heaters 6 and 6 which are far-infrared heating means disposed on the right side of the treatment tank 3 are arranged before and after the object A to be cleaned held by the right-side transport body 9b. Two sheets are arranged facing both surfaces, and are arranged at substantially the same height with a back-and-forth interval in which the right and left transport body 9b holding the object A to be cleaned is allowed to move up and down.

つまり、蒸気層５上方に取り出された被洗浄物Ａに、アルコール系溶剤が含まれる洗浄液Ｂが残着していると、被洗浄物Ａを蒸気層５から取り出した直後において、処理槽３の出入口３ａと冷却ジャケット１６の間に形成されたフリーボード空間に存在するガスや空気等の雰囲気中に含まれる水分が、被洗浄物Ａに残着する洗浄液Ｂのアルコール系溶剤に吸着されるため、水切り効果が損なわれてしまう。   That is, if the cleaning liquid B containing the alcohol-based solvent remains on the cleaning object A taken out above the vapor layer 5, immediately after the cleaning object A is extracted from the vapor layer 5, Moisture contained in an atmosphere such as gas or air existing in the free board space formed between the entrance / exit 3a and the cooling jacket 16 is adsorbed by the alcohol-based solvent of the cleaning liquid B remaining on the object A to be cleaned. The draining effect will be impaired.

しかし、降下途中の右側運搬体９ｂに保持された被洗浄物Ａの前後両面に、前後一対の遠赤外線ヒータ６，６から放射される遠赤外線を照射して、被洗浄物Ａ全体を洗浄液Ｂが蒸発気化する温度、すなわち、少なくともアルコール系溶剤が蒸発気化する温度（約８０℃〜約８５℃の範囲に含まれる温度）に均一に加熱すれば、被洗浄物Ａに残着する水分を含んだ薄膜状のアルコール系溶剤が蒸発気化されるため、蒸気層５から取り出した際に、雰囲気中の水分が被洗浄物Ａに再付着することがなく、水切り乾燥した状態を保つことができる。   However, the front and rear surfaces of the object to be cleaned A held by the right side carrier 9b in the middle of lowering are irradiated with far infrared rays emitted from the pair of front and rear far infrared heaters 6 and 6, and the entire object to be cleaned A is cleaned with the cleaning liquid B. If the water is uniformly heated to a temperature at which the alcohol solvent evaporates, that is, at least a temperature at which the alcohol solvent evaporates (a temperature included in a range of about 80 ° C. to about 85 ° C.), moisture remaining on the object A to be cleaned is contained. Since the thin-film alcohol solvent evaporates, when it is taken out from the vapor layer 5, the moisture in the atmosphere does not reattach to the object A to be washed and can be kept dry and dried.

処理室２後部に配置した排気装置３４は、処理室２の下部内壁面に開口した吸気口３５，３５と、処理室２の上部外壁面に配置した濾過ユニット３６の吸気ポートを排気路３７で連通接続し、有機排気を処理するための図示しない有機排気処理装置と、濾過ユニット３６の排気ポートを図示しない排気路で接続している。濾過ユニット３６に内蔵された図示しないファンの移送力により、処理室２内に放出されたフッ素系溶剤やアルコール系溶剤等の気化溶剤が含まれる雰囲気を吸気口３５，３５から吸気し、濾過ユニット３６により濾過処理された雰囲気を有機排気処理装置へ供給して排気処理する。   The exhaust device 34 disposed at the rear of the processing chamber 2 includes an intake port 35, 35 opened on the lower inner wall surface of the processing chamber 2 and an intake port of the filtration unit 36 disposed on the upper outer wall surface of the processing chamber 2 through an exhaust passage 37. An organic exhaust treatment device (not shown) for communicating and connecting organic exhaust and an exhaust port of the filtration unit 36 are connected by an exhaust passage (not shown). Due to the transfer force of a fan (not shown) built in the filtration unit 36, an atmosphere containing a vaporized solvent such as a fluorine-based solvent or an alcohol-based solvent discharged into the processing chamber 2 is sucked from the intake ports 35, 35, and the filtration unit The atmosphere filtered by 36 is supplied to an organic exhaust treatment apparatus for exhaust treatment.

また、処理室２の天井部内壁面に配置した濾過ユニット３８は、上記ファンの移送力により処理室２内の雰囲気を排気する際に、処理室２内に吸気される雰囲気をクリーンな状態に清浄濾過する。   The filtration unit 38 disposed on the inner wall surface of the ceiling of the processing chamber 2 cleans the atmosphere sucked into the processing chamber 2 when the atmosphere in the processing chamber 2 is exhausted by the transfer force of the fan. Filter.

図示実施例は上記の如く構成するものにして、以下、水切り乾燥装置１により水分が付着した被洗浄物Ａを水切り乾燥する方法を説明する。   The illustrated embodiment is configured as described above, and hereinafter, a method for draining and drying the article A to be cleaned with the moisture draining apparatus 1 attached thereto will be described.

先ず、図１に示すように、純水等による水洗い処理後の被洗浄物Ａを搬入コンベヤ７に載置して、処理室２左側内部に搬入口２ａから搬入する。   First, as shown in FIG. 1, the object A to be cleaned after being washed with pure water or the like is placed on the carry-in conveyor 7 and carried into the left side of the processing chamber 2 from the carry-in port 2a.

処理室２左側内部に搬入された被洗浄物Ａを、処理槽３左側部に待機する運搬装置９の左側運搬体９ａにより保持した後、左右一対の運搬体９ａ，９ｂを一括して垂直上昇させ、左側運搬体９ａで保持した被洗浄物Ａを処理槽３左側上方へ移動する。   After the workpiece A carried into the left side of the processing chamber 2 is held by the left side transport body 9a of the transport device 9 waiting on the left side of the processing tank 3, the pair of left and right transport bodies 9a and 9b are vertically raised together. The to-be-cleaned object A held by the left side carrier 9a is moved upward to the left side of the processing tank 3.

運搬体９ａ，９ｂを処理槽３の左側上方から右側上方へ水平移動させ、左側運搬体９ａで保持した被洗浄物Ａを処理槽３上方へ移動した後、運搬体９ａ，９ｂを垂直降下させ、図２、図４にも示すように、左側運搬体９ａで保持した被洗浄物Ａ全体を浸漬槽４に貯液された洗浄液Ｂに所定時間浸漬する。浸漬直後において、左側運搬体９ａによる被洗浄物Ａの保持を解除した後、運搬体９ａ，９ｂを上昇させ、処理槽３左側上方へ復帰移動させる。   The transport bodies 9a and 9b are horizontally moved from the upper left side to the upper right side of the processing tank 3, and the object A to be cleaned held by the left transport body 9a is moved to the upper side of the processing tank 3, and then the transport bodies 9a and 9b are vertically lowered. As shown in FIGS. 2 and 4, the entire object A to be cleaned held by the left side carrier 9 a is immersed in the cleaning liquid B stored in the immersion tank 4 for a predetermined time. Immediately after the immersion, holding the object A to be cleaned by the left carrier 9a is released, and then the carriers 9a and 9b are raised and returned to the upper left side of the processing tank 3.

被洗浄物Ａ全体を洗浄液Ｂに浸漬した際に、被洗浄物Ａに付着する水分は、洗浄液Ｂに混入したアルコール系溶剤に溶解され、被洗浄物Ａから分離・除去される。水分がアルコール系溶剤に溶解した水分溶解液Ｂｂは、洗浄液Ｂの主成分であるフッ素系溶剤よりも比重が軽くなり、浸漬槽４に貯液された洗浄液Ｂの液面部分に浮上する。   When the entire object to be cleaned A is immersed in the cleaning liquid B, the water adhering to the object to be cleaned A is dissolved in the alcohol solvent mixed in the cleaning liquid B, and separated and removed from the object to be cleaned A. The water-dissolved liquid Bb in which the water is dissolved in the alcohol solvent has a specific gravity lighter than that of the fluorine-based solvent that is the main component of the cleaning liquid B, and floats on the liquid surface portion of the cleaning liquid B stored in the dipping tank 4.

洗浄液Ｂの液面部分に浮上した水分溶解液Ｂｂは、図３にも示すように、浸漬槽４の出入口４ａ周縁部から全方向へ向けてオーバーフローされ、処理槽３と浸漬槽４の対向壁面間に設けた貯液槽１０に貯液される。   As shown in FIG. 3, the water solution Bb floating on the liquid surface portion of the cleaning liquid B is overflowed in all directions from the peripheral edge of the entrance / exit 4 a of the immersion tank 4, and the opposite wall surfaces of the treatment tank 3 and the immersion tank 4. The liquid is stored in a liquid storage tank 10 provided therebetween.

浸漬槽４内部の角隅部付近や周縁部付近に水分が溶解した水分溶解液Ｂｂが残留することがなく、被洗浄物Ａを浸漬槽４の洗浄液Ｂから取り出した際に、洗浄液Ｂの液面部分に浮上した水分溶解液Ｂｂが被洗浄物Ａ外面に再付着するのを防止することができる。   The water solution Bb in which water is dissolved does not remain in the vicinity of the corners and the periphery of the immersion tank 4, and the liquid of the cleaning liquid B is removed when the object A is taken out of the cleaning liquid B of the immersion tank 4. It is possible to prevent the water solution Bb floating on the surface portion from reattaching to the outer surface of the object A to be cleaned.

浸漬洗浄中において、処理槽３左側上方へ移動した運搬体９ａ，９ｂを降下させ、左側運搬体９ａにより処理室２左側内部に搬入された次の被洗浄物Ａを保持する動作と、右側運搬体９ｂにより浸漬槽４の洗浄液Ｂに浸漬された被洗浄物Ａを保持する動作を同時に行う。   During immersion cleaning, the transport bodies 9a and 9b moved to the upper left side of the processing tank 3 are lowered, and the left transport body 9a holds the next object to be cleaned A carried into the left side of the processing chamber 2 and the right transport. The operation | movement which hold | maintains the to-be-cleaned object A immersed in the cleaning liquid B of the immersion tank 4 with the body 9b is performed simultaneously.

次に、運搬体９ａ，９ｂを上昇させ、左側運搬体９ａで保持した被洗浄物Ａを処理槽３左側上方へ移動するとともに、右側運搬体９ｂで保持した被洗浄物Ａを浸漬槽４の洗浄液Ｂから取り出して処理槽３上方へ移動する。   Next, the transporters 9a and 9b are raised, the object A held by the left carrier 9a is moved to the upper left side of the treatment tank 3, and the object A held by the right carrier 9b is moved into the dipping tank 4. The liquid is taken out from the cleaning liquid B and moved upward in the processing tank 3.

右側運搬体９ｂで保持した被洗浄物Ａを浸漬槽４の洗浄液Ｂから取り出した際に、浸漬洗浄後（水切り後）の被洗浄物Ａを洗浄液Ｂの蒸気Ｂａからなる蒸気層５中に移動させ、その洗浄液Ｂの蒸気Ｂａにより被洗浄物Ａの少なくとも接液面全体を、洗浄液Ｂの蒸発気化が促進される温度に加熱して蒸気洗浄する。   When the object to be cleaned A held by the right side carrier 9b is taken out from the cleaning liquid B in the immersion tank 4, the object to be cleaned A after immersion cleaning (after draining) is moved into the vapor layer 5 composed of the vapor Ba of the cleaning liquid B. Then, at least the entire liquid contact surface of the object to be cleaned A is heated to a temperature at which evaporation of the cleaning liquid B is promoted by the vapor Ba of the cleaning liquid B to perform the steam cleaning.

蒸気洗浄後において、運搬体９ａ，９ｂを処理槽３よりも上方へ上昇した後、処理槽３の左側上方から右側上方へ水平移動させ、左側運搬体９ａで保持した被洗浄物Ａを処理槽３上方へ移動するとともに、右側運搬体９ｂで保持した被洗浄物Ａを処理槽３左側上方へ移動する。   After the steam cleaning, the transport bodies 9a and 9b are moved upward from the processing tank 3, and then horizontally moved from the upper left side to the upper right side of the processing tank 3, and the object A to be cleaned held by the left transport body 9a is processed into the processing tank. 3 and the object A to be cleaned held by the right transporter 9b is moved to the upper left side of the processing tank 3.

処理槽３右側上方に水平移動した左右一対の運搬体９ａを降下させ、左側運搬体９ａで保持した被洗浄物Ａを浸漬槽４の洗浄液Ｂに浸漬する動作と、右側運搬体９ｂで保持した被洗浄物Ａを、処理槽３右側部の搬出コンベヤ８に載置する動作を同時に行う。   The pair of left and right transport bodies 9a horizontally moved upward on the right side of the processing tank 3 is lowered, and the object A held by the left transport body 9a is immersed in the cleaning liquid B of the immersion tank 4, and held by the right transport body 9b. The operation of placing the article to be cleaned A on the carry-out conveyor 8 on the right side of the processing tank 3 is simultaneously performed.

左側運搬体９ａで保持した蒸気洗浄後の被洗浄物Ａを一定速度でゆっくりと降下させながら、図５、図６にも示すように、処理槽３右側部に配置した前後一対の遠赤外線ヒータ６，６から放射される遠赤外線を被洗浄物Ａの前後両面に対して略同時に照射し、被洗浄物Ａ全体を洗浄液Ｂが蒸発気化する温度に均一に加熱する。   A pair of front and rear far-infrared heaters disposed on the right side of the treatment tank 3 as shown in FIGS. 5 and 6 while slowly lowering the object A after the steam cleaning held by the left side carrier 9a at a constant speed. The far-infrared rays radiated from 6 and 6 are irradiated substantially simultaneously on the front and rear surfaces of the object to be cleaned A, and the entire object to be cleaned A is uniformly heated to a temperature at which the cleaning liquid B evaporates.

すなわち、少なくともアルコール系溶剤が薄膜蒸留される温度（約８０℃）に加熱すれば、被洗浄物Ａ外面からアルコール系溶剤が分離・除去されるので、大きさや形状に影響されることなく、小型・大型の被洗浄物Ａを水分が分離・除去された状態に水切り乾燥することができる。水切り乾燥後の被洗浄物Ａを蒸気層５から取り出した際に、雰囲気中の水分が被洗浄物Ａに再付着することがなく、水切り乾燥した状態を保つことができる。   That is, if the alcoholic solvent is heated to at least the temperature at which the alcoholic solvent is thin-film distilled (about 80 ° C.), the alcoholic solvent is separated and removed from the outer surface of the object A to be cleaned. -The large-scale object A can be drained and dried in a state where moisture is separated and removed. When the object to be cleaned A after draining and drying is taken out from the vapor layer 5, moisture in the atmosphere does not reattach to the object to be cleaned A, and the drained and dried state can be maintained.

また、加熱乾燥時において、温風や熱風等の乾燥した気流を被洗浄物Ａに吹き付けてベーキング処理する場合、被洗浄物Ａを高温に加熱するため、被洗浄物Ａの熱による変質が懸念されるとともに、気流が吹き付けられる部分が早期に乾燥し、他の部分の乾燥が遅くなるため、乾燥ムラが発生しやすい。   In addition, when drying is performed by spraying a dry air current such as warm air or hot air on the object to be cleaned A at the time of heat drying, the object A to be cleaned is heated to a high temperature. At the same time, the portion to which the airflow is blown dries early, and the drying of other portions slows down, so that drying unevenness is likely to occur.

しかし、被洗浄物Ａ全体を遠赤外線ヒータ６，６から放射される遠赤外線により均一に加熱して、被洗浄物Ａに残着する薄膜状の洗浄液Ｂやアルコール系溶剤を薄膜蒸留するため、沸点温度に加熱しなくても、少なくともアルコール系溶剤の沸点よりも低い温度で加熱するだけで、被洗浄物Ａに残着するアルコール系溶剤を蒸発気化することができる。また、乾燥速度に差が生じたり、乾燥ムラが発生することがなく、シミや跡等が被洗浄物Ａ表面に残るのを防止することができる。且つ、熱風等の気流を送気・排気する必要がないため、微細なゴミ、塵埃等が洗浄済みのワークに付着するのを防止することができ、清浄度が要求されるクリーンルームでの使用が可能である。   However, the entire object to be cleaned A is uniformly heated by far infrared rays emitted from the far infrared heaters 6 and 6, and the thin film-like cleaning liquid B and alcohol solvent remaining on the object to be cleaned A are thin-film distilled. Even if it is not heated to the boiling point temperature, the alcohol solvent remaining on the article to be cleaned A can be evaporated and evaporated only by heating at a temperature lower than the boiling point of the alcohol solvent. Further, there is no difference in drying speed or unevenness in drying, and it is possible to prevent stains and marks from remaining on the surface of the object to be cleaned A. In addition, since there is no need to send or exhaust an air current such as hot air, it can prevent fine dust, dust, etc. from adhering to the cleaned workpiece, and it can be used in clean rooms where cleanliness is required. Is possible.

また、洗浄液Ｂの蒸発潜熱は、水分の蒸発潜熱よりも低く、被洗浄物Ａ表面に対して薄膜状に残着しているため、洗浄液Ｂの沸点よりも低い温度に遠赤外線ヒータ６，６で加熱すれば、熱による変質を生じさせることなく、被洗浄物Ａを、洗浄液Ｂ（水分が溶解したアルコール系溶剤も含む）が分離・除去された状態に乾燥処理することができる。   Further, the latent heat of vaporization of the cleaning liquid B is lower than the latent heat of vaporization of moisture and remains in a thin film on the surface of the object A to be cleaned. If the heating is performed, the object to be cleaned A can be dried in a state in which the cleaning liquid B (including the alcohol-based solvent in which moisture is dissolved) is separated and removed without causing alteration due to heat.

右側運搬体９ｂで保持した水切り乾燥後の被洗浄物Ａを搬出コンベヤ８に載置し、右側運搬体９ｂによる被洗浄物Ａの保持を解除した後、運搬体９ａ，９ｂを上昇させ、処理槽３左側上方へ復帰移動させる。一方、水切り乾燥後の被洗浄物Ａを、搬出コンベヤ８により処理室２右側外部へ搬出口２ｂから搬出すれば、水切り乾燥装置１による被洗浄物Ａの水切り乾燥が完了する。上述と同様に、運搬体９ａ，９ｂを処理槽３の左側上方と右側上方へ往復移動させて、被洗浄物Ａの水切り乾燥を継続する。   After the drained and dried object A held by the right-side carrier 9b is placed on the carry-out conveyor 8, the holding of the object A to be cleaned by the right-side carrier 9b is released, and then the carriers 9a and 9b are raised and processed. The tank 3 is returned to the upper left side. On the other hand, when the object to be cleaned A after draining and drying is carried out from the outlet 2b to the outside of the right side of the processing chamber 2 by the carry-out conveyor 8, the draining and drying of the object to be cleaned A by the draining and drying apparatus 1 is completed. In the same manner as described above, the transporters 9a and 9b are reciprocated to the upper left side and the upper right side of the processing tank 3 to continue draining and drying the article A to be cleaned.

図７は、２枚の遠赤外線ヒータ６，６を、被洗浄物Ａの前後両面が片面ずつ順に加熱されるように上下に位置をずらせて配置した他の例を示し、上方の遠赤外線ヒータ６により被洗浄物Ａの後面側を加熱した後、下方の遠赤外線ヒータ６により被洗浄物Ａの前面側を加熱する。つまり、被洗浄物Ａの前後両面を片面ずつ順に加熱するので、アルコール系溶剤が蒸発気化する温度以上に、被洗浄物Ａを加熱し過ぎるのを防止することができる。   FIG. 7 shows another example in which two far-infrared heaters 6 and 6 are arranged so that the front and rear surfaces of the object to be cleaned A are shifted up and down so that the front and rear surfaces are sequentially heated one by one. 6, the rear side of the object to be cleaned A is heated, and then the front side of the object to be cleaned A is heated by the lower far-infrared heater 6. That is, since the front and rear surfaces of the object to be cleaned A are sequentially heated one by one, it is possible to prevent the object to be cleaned A from being heated too much above the temperature at which the alcohol solvent evaporates.

また、複数枚の遠赤外線ヒータ６…を、被洗浄物Ａの前後両面及び左右両面が略同時に加熱されるか、前後及び左右の各面が順に加熱されるように配置してもよい。   Moreover, you may arrange | position the several far-infrared heater 6 ... so that the front and back both surfaces and right and left both surfaces of the to-be-cleaned object A may be heated substantially simultaneously, or each front and back and left and right surfaces may be heated in order.

また、遠赤外線ヒータ６を、大型の被洗浄物Ａを加熱するのに最適な大きさ及び形状に形成してもよく、被洗浄物Ａ全体を遠赤外線ヒータ６から放射される遠赤外線により均一に加熱することができる。   Further, the far-infrared heater 6 may be formed in an optimal size and shape for heating a large object to be cleaned A, and the entire object to be cleaned A is uniform by far infrared rays radiated from the far-infrared heater 6. Can be heated.

図８は、蒸気層５から取り出された被洗浄物Ａを、処理槽３の出入口３ａ側内壁面に配置した前後一対の遠赤外線ヒータ６，６により加熱する他の例を示し、遠赤外線ヒータ６，６は、処理槽３内に形成したフリーボード空間の前後内壁面に配置されている。つまり、蒸気層５上方に取り出された被洗浄物Ａを処理槽３上方に一定速度で移動させながら、被洗浄物Ａの前後両面を、前後一対の遠赤外線ヒータ６，６から放射される遠赤外線により均一に加熱して水切り乾燥するので、蒸気層５から取り出された直後の被洗浄物Ａに、処理槽３のフリーボード空間に存在する雰囲気中の水分が再付着するのを防止することができ、上記実施例と略同等の作用及び効果を奏することができる。また、遠赤外線ヒータ６を、処理槽３の左右内壁面にも配置してもよい。   FIG. 8 shows another example in which the object to be cleaned A taken out from the vapor layer 5 is heated by a pair of front and rear far-infrared heaters 6 and 6 arranged on the inner wall surface on the entrance / exit 3a side of the treatment tank 3, 6 and 6 are disposed on the front and rear inner wall surfaces of the free board space formed in the processing tank 3. That is, while moving the object A to be cleaned taken out above the vapor layer 5 above the processing tank 3 at a constant speed, the front and rear surfaces of the object A to be cleaned are radiated from the pair of front and rear far infrared heaters 6 and 6. Since it is uniformly heated by infrared rays and drained and dried, it prevents the moisture in the atmosphere present in the free board space of the treatment tank 3 from reattaching to the object A to be cleaned immediately after being taken out from the vapor layer 5. Thus, operations and effects substantially equivalent to those of the above embodiment can be achieved. Further, the far-infrared heater 6 may be disposed on the left and right inner wall surfaces of the processing tank 3.

この発明の構成と、上述の実施例との対応において、
この発明の遠赤外線加熱手段は、実施例の遠赤外線ヒータ６に対応し、
以下同様に、
溶剤加熱手段は、加熱ヒータ１１に対応するも、
この発明は、上述の実施例の構成のみに限定されるものではなく、請求項に示される技術思想に基づいて応用することができ、多くの実施の形態を得ることができる。 In the correspondence between the configuration of the present invention and the above-described embodiment,
The far infrared heating means of the present invention corresponds to the far infrared heater 6 of the embodiment,
Similarly,
The solvent heating means corresponds to the heater 11,
The present invention is not limited to the configuration of the above-described embodiment, but can be applied based on the technical idea shown in the claims, and many embodiments can be obtained.

例えば運搬装置９により保持した被洗浄物Ａを、処理槽３上方に配置した図示しない昇降装置に受け渡して、昇降装置により保持した被洗浄物Ａを浸漬槽４の洗浄液Ｂに浸漬してもよい。また、被洗浄物Ａの浸漬時において、処理槽３の出入口３ａを蓋や扉等で閉塞してもよい。   For example, the cleaning object A held by the transport device 9 may be transferred to a lifting device (not shown) disposed above the treatment tank 3 and the cleaning target A held by the lifting device may be immersed in the cleaning liquid B of the immersion tank 4. . Moreover, when the article to be cleaned A is immersed, the entrance / exit 3a of the treatment tank 3 may be closed with a lid, a door, or the like.

水切り乾燥装置による被洗浄物の処理工程を示す縦断正面図。The longitudinal cross-sectional front view which shows the process of the to-be-cleaned object by a drainer drying apparatus. 被洗浄物を浸漬槽の洗浄液に浸漬した状態を示す中央縦断側面図。The center vertical side view which shows the state which immersed the to-be-cleaned object in the washing | cleaning liquid of the immersion tank. 洗浄液を浸漬槽の全方向へオーバーフローする状態を示す斜視図。The perspective view which shows the state which overflows a washing | cleaning liquid to all the directions of an immersion tank. 被洗浄物を浸漬槽の洗浄液に浸漬する動作を示す説明図。Explanatory drawing which shows the operation | movement which immerses a to-be-cleaned object in the washing | cleaning liquid of an immersion tank. 被洗浄物を遠赤外線により加熱する動作を示す説明図。Explanatory drawing which shows the operation | movement which heats to-be-cleaned object by a far infrared ray. 遠赤外線ヒータを同一高さに配置した例を示す斜視図。The perspective view which shows the example which has arrange | positioned the far-infrared heater at the same height. 遠赤外線ヒータを上下に配置した他の例を示す斜視図。The perspective view which shows the other example which has arrange | positioned the far-infrared heater up and down. 遠赤外線ヒータを処理槽内に配置した他の例を示す縦断正面図。The longitudinal section front view which shows the other example which has arrange | positioned the far-infrared heater in the processing tank.

符号の説明Explanation of symbols

Ａ…被洗浄物
Ｂ…洗浄液
Ｂａ…蒸気
Ｂｂ…水分溶解液
１…水切り乾燥装置
２…処理室
３…処理槽
４…浸漬槽
５…蒸気層
６…遠赤外線ヒータ
９…運搬装置
１０…貯液槽
１１…加熱ヒータ A ... object to be cleaned B ... cleaning liquid Ba ... vapor Bb ... water solution 1 ... draining and drying device 2 ... treatment chamber 3 ... treatment tank 4 ... immersion tank 5 ... vapor layer 6 ... far infrared heater 9 ... transport device 10 ... liquid storage Tank 11 ... Heater

Claims (5)

水分が付着した被洗浄物を、浸漬槽に貯液されたフッ素系溶剤とアルコール系溶剤を混合してなる洗浄液中に浸漬し、被洗浄物に付着する水分を洗浄液のアルコール系溶剤に溶解させて、該被洗浄物から水分を分離・除去する水切り乾燥装置であって、
上記浸漬槽に貯液された洗浄液の液面上に、該被洗浄物に付着する洗浄液の蒸発気化が促進される温度に加熱された洗浄液の蒸気からなる蒸気層を備え、
上記蒸気層から取り出された被洗浄物に遠赤外線を照射して、該被洗浄物に残着するアルコール系溶剤が蒸発気化する温度に加熱する遠赤外線加熱手段を設けた
水切り乾燥装置。 The object to be cleaned is immersed in a cleaning liquid that is a mixture of a fluorine-based solvent and an alcohol solvent stored in the immersion tank, and the water adhering to the object to be cleaned is dissolved in the alcohol solvent of the cleaning liquid. A draining and drying apparatus for separating and removing moisture from the object to be cleaned,
On the liquid level of the cleaning liquid stored in the immersion tank, a vapor layer made of the cleaning liquid vapor heated to a temperature that promotes evaporation and evaporation of the cleaning liquid attached to the object to be cleaned is provided.
A draining and drying apparatus provided with far-infrared heating means for irradiating an object to be cleaned taken out from the vapor layer with a far infrared ray and heating it to a temperature at which an alcoholic solvent remaining on the object to be cleaned evaporates. 上記浸漬槽に貯液された洗浄液の液面部分に浮上する水分が含まれる液を、該浸漬槽の全方向へオーバーフロー可能に構成した
請求項１に記載の水切り乾燥装置。 The draining and drying apparatus according to claim 1, wherein a liquid containing water floating on a liquid surface portion of the cleaning liquid stored in the immersion tank is configured to be overflowable in all directions of the immersion tank. 上記浸漬槽に、上記洗浄液のフッ素系溶剤よりも沸点温度が高いフッ素系溶剤を加熱媒体とする溶剤加熱手段を設けた
請求項１に記載の水切り乾燥装置。 The draining and drying apparatus according to claim 1, wherein the immersion tank is provided with a solvent heating means using a fluorine-based solvent having a boiling point higher than that of the cleaning solution as a heating medium. 上記遠赤外線加熱手段を、プレート状の遠赤外線ヒータで構成した
請求項１に記載の水切り乾燥装置。 The draining and drying apparatus according to claim 1, wherein the far infrared heating means is constituted by a plate-shaped far infrared heater. 水分が付着した被洗浄物を、浸漬槽に貯液されたフッ素系溶剤とアルコール系溶剤を混合してなる洗浄液中に浸漬して、該被洗浄物に付着する水分をアルコール系溶剤に溶解させ、
上記洗浄液から取り出された被洗浄物を、該洗浄液の液面上に形成された洗浄液の蒸気からなる蒸気層中に移動して、該被洗浄物に残着する洗浄液の蒸発気化が促進される温度に洗浄液の蒸気で加熱し、
上記蒸気層から取り出された被洗浄物を、遠赤外線加熱手段から放射される遠赤外線により加熱して、該被洗浄物に残着するアルコール系溶剤を蒸発気化させて水切り乾燥する
水切り乾燥方法。 The object to be cleaned is immersed in a cleaning solution that is a mixture of a fluorinated solvent and an alcohol solvent stored in the immersion tank, and the water adhering to the object to be cleaned is dissolved in the alcohol solvent. ,
The object to be cleaned taken out from the cleaning liquid is moved into a vapor layer made of the cleaning liquid vapor formed on the surface of the cleaning liquid, and evaporation of the cleaning liquid remaining on the object to be cleaned is promoted. Heated to temperature with cleaning liquid vapor,
A draining drying method in which an object to be cleaned taken out from the vapor layer is heated by far infrared rays emitted from a far infrared heating means, and an alcohol solvent remaining on the object to be cleaned is evaporated and dried.
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