JP2008057985A - Static electricity measuring instrument with distance correction - Google Patents

Static electricity measuring instrument with distance correction Download PDF

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JP2008057985A
JP2008057985A JP2006231635A JP2006231635A JP2008057985A JP 2008057985 A JP2008057985 A JP 2008057985A JP 2006231635 A JP2006231635 A JP 2006231635A JP 2006231635 A JP2006231635 A JP 2006231635A JP 2008057985 A JP2008057985 A JP 2008057985A
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distance
ultrasonic
charged body
surface potential
signal
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Katsuyuki Uehashi
勝行 上橋
Katsuki Fukuda
勝喜 福田
Yoshinari Miyabayashi
善也 宮林
Teppei Hodohara
鉄平 保土原
Takayuki Kamimura
隆之 上村
Takeyuki Inagawa
剛幸 稲川
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Kasuga Denki Inc
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Kasuga Denki Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a static electricity measuring instrument with distance correction capable of performing accurate potential measurement by correcting a detected potential by a surface potential sensor corresponding to a measured distance. <P>SOLUTION: When measuring a distance to a charged body by applying an ultrasonic wave to the charged body 1 and by receiving its reflected wave, an ultrasonic driving pulse is applied to an ultrasonic transmitter 8 as long as a prescribed time T1, and a distance signal corresponding to the distance to the charged body is output from an output signal from an ultrasonic receiver 9 acquired in the range of a prescribed time T3 after delay as long as a prescribed time T2 from a point of ultrasonic driving pulse generation time. Hereby, the measured distance by the ultrasonic wave is restricted into some range, and the detected potential by the surface potential sensor 2 is corrected corresponding to the measured distance, relative to only the measured distance in the range. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、帯電体の電位を表面電位センサにて検出して表示部に表示する静電気測定器に関する。   The present invention relates to a static electricity measuring device that detects the potential of a charged body with a surface potential sensor and displays it on a display unit.

表面電位センサの検出電位は、帯電体の帯電電位ばかりでなく、帯電体までの距離に依存するため、距離を決めないと正確な電位を測定できないので、この種の静電気測定器のなかには測距手段を備えたものも提供されている。   The detection potential of the surface potential sensor depends not only on the charging potential of the charged body, but also on the distance to the charged body. Therefore, an accurate potential cannot be measured unless the distance is determined. There is also provided a means.

例えば、特許文献１（特開平５−１７２８８６号公報）には、表面電位センサと帯電体との距離が所定距離Ｄであるときに、表示器に表面電位を正しく表示させるとともに、表面電位センサに対向する帯電体の測定箇所に光を照射する照光手段を備え、帯電体の表面電位の測定箇所に、表面電位センサと帯電体との距離に応じた光の像を生じさせ、その像が目視判別できるときに、表面電位センサと帯電体との距離が所定距離Ｄであると推定するようにした表面電位測定器が開示されている。   For example, in Patent Document 1 (Japanese Patent Application Laid-Open No. 5-172886), when the distance between the surface potential sensor and the charged body is a predetermined distance D, the surface potential is correctly displayed on the display and the surface potential sensor is displayed. An illuminating means for irradiating light to the measurement point of the opposite charged body is provided, and an image of light corresponding to the distance between the surface potential sensor and the charged body is generated at the measurement point of the surface potential of the charged body. A surface potential measuring device is disclosed in which it is estimated that the distance between the surface potential sensor and the charged body is a predetermined distance D when it can be determined.

しかし、これでは、帯電体の表面に投影される光の像を目視判別することで、表面電位センサと帯電体との距離を推定するため、正確な距離測定ができないばかりでなく、帯電体の表面の状況によっては、光の像そのものが形成されないことがあり、測距手段を備えているとはいえ、正確な電位測定は望めない。
特開平５−１７２８８６号公報 However, in this case, the distance between the surface potential sensor and the charged body is estimated by visually discriminating the image of the light projected on the surface of the charged body. Depending on the surface condition, an image of the light itself may not be formed, and although it is equipped with a distance measuring means, accurate potential measurement cannot be expected.
JP-A-5-172886

本発明の第１の目的は、距離測定を行うばかりでなく、表面電位センサの検出電位を、測定した距離に応じて補正することで、正確な電位測定ができる距離補正付き静電気測定器を提供することにある。   The first object of the present invention is to provide a static electricity meter with distance correction that can perform accurate potential measurement by correcting not only the distance measurement but also the detection potential of the surface potential sensor according to the measured distance. There is to do.

第２の目的は、表面電位センサの故障の有無を距離測定動作に同期して行うことで、測定の信頼性の向上を図ることにある。   The second object is to improve the measurement reliability by performing the presence or absence of failure of the surface potential sensor in synchronization with the distance measurement operation.

第１の目的を達成するため、本発明は、帯電体の電位を表面電位センサにて検出して表示部に表示する静電気測定器において、帯電体に向けて超音波を発信する超音波発信手段と、帯電体を反射した超音波を受信する超音波受信手段と、超音波発信手段に所定時間Ｔ１だけ超音波駆動パルスを加える超音波駆動パルス発生手段と、その超音波駆動パルス発生時点から所定時間Ｔ２だけ遅延後に所定時間Ｔ３の距離補正範囲信号を発生する距離補正範囲信号発生手段と、この距離補正範囲信号による所定時間Ｔ３内に得られる超音波受信手段の出力信号から帯電体までの距離に応じた距離信号を出力する距離測定手段と、表面電位センサの検出電位を、距離測定手段から得られる距離信号の大小に応じて補正する電位補正手段とを備えたことを特徴とする。   In order to achieve the first object, the present invention provides an ultrasonic transmission means for transmitting an ultrasonic wave toward a charged body in an electrostatic measurement device that detects the potential of the charged body with a surface potential sensor and displays it on a display unit. Ultrasonic receiving means for receiving ultrasonic waves reflected by the charged body, ultrasonic driving pulse generating means for applying ultrasonic driving pulses to the ultrasonic transmitting means for a predetermined time T1, and predetermined time from the time when the ultrasonic driving pulses are generated Distance correction range signal generating means for generating a distance correction range signal for a predetermined time T3 after a delay of time T2, and the distance from the output signal of the ultrasonic wave receiving means obtained within a predetermined time T3 based on the distance correction range signal to the charged body Distance measuring means for outputting a distance signal according to the distance, and potential correcting means for correcting the detection potential of the surface potential sensor according to the magnitude of the distance signal obtained from the distance measuring means. And butterflies.

また、第２の目的も達成するため、超音波駆動パルスを超音波発信手段に所定時間Ｔ１だけ加えるのに同期して、表面電位センサの振動子駆動回路からの信号の有無を判別することにより、表面電位センサの故障を診断する表面電位センサ故障診断手段を備えたことを特徴とする。   In order to achieve the second object, the presence or absence of a signal from the transducer drive circuit of the surface potential sensor is determined in synchronization with applying the ultrasonic drive pulse to the ultrasonic transmission means for a predetermined time T1. The surface potential sensor failure diagnosis means for diagnosing a failure of the surface potential sensor is provided.

本発明によれば、帯電体に超音波を当て、その反射波を受信して帯電体までの距離を測定するに当たり、超音波発信手段に所定時間Ｔ１だけ超音波駆動パルスを加え、その超音波駆動パルス発生時点から所定時間Ｔ２だけ遅延後で、しかも所定時間Ｔ３の範囲内に得られる超音波受信手段の出力信号から帯電体までの距離に応じた距離信号を出力することにより、超音波による測定距離をある範囲内に制限し、その範囲内の測定距離についてだけ、表面電位センサの検出電位を測定距離に応じて補正するので、正確な電位測定ができる。   According to the present invention, when an ultrasonic wave is applied to a charged body, the reflected wave is received and the distance to the charged body is measured, an ultrasonic drive pulse is applied to the ultrasonic wave transmitting means for a predetermined time T1, and the ultrasonic wave is applied. By outputting a distance signal corresponding to the distance from the output signal of the ultrasonic wave receiving means obtained in the range of the predetermined time T3 after a delay of the predetermined time T2 from the driving pulse generation time to the charged body, Since the measurement distance is limited within a certain range and the detection potential of the surface potential sensor is corrected according to the measurement distance only for the measurement distance within that range, accurate potential measurement can be performed.

請求項２に係る発明によれば、表面電位センサの振動子駆動回路からの信号の有無を、超音波駆動パルスの印加時間Ｔ１に同期して判別して表面電位センサの故障を診断するので、表面電位センサの故障を効率的に自己診断できる。   According to the invention of claim 2, since the presence or absence of a signal from the transducer drive circuit of the surface potential sensor is determined in synchronization with the application time T1 of the ultrasonic drive pulse, the failure of the surface potential sensor is diagnosed. Efficient self-diagnosis can be performed for surface potential sensor failures.

次に、本発明の実施例を図面に基づいて詳細に説明する。   Next, embodiments of the present invention will be described in detail with reference to the drawings.

本発明による距離補正付き静電気測定器は、図１に示すように、帯電体１の表面電位を表面電位センサ２にて測定する電位測定部Ａと、帯電体１までの距離を超音波で測定する距離測定部Ｂと、これらを制御するとともに、電位測定部Ａで測定された電位を距離測定部Ｂで測定された距離に応じて補正する演算制御部Ｃと、距離補正された電位及び表面電位センサ２の故障の有無を表示する表示部Ｄとからなる。   As shown in FIG. 1, a static electricity measuring device with distance correction according to the present invention measures the surface potential of a charged body 1 with a surface potential sensor 2 and measures the distance to the charged body 1 with ultrasonic waves. A distance measuring unit B that controls the above, and an arithmetic control unit C that controls these and corrects the potential measured by the potential measuring unit A according to the distance measured by the distance measuring unit B, and the distance-corrected potential and surface The display unit D displays whether or not the potential sensor 2 has failed.

表面電位センサ２は、検出電極と被測定物との間の電界を振動子でチョッピングして、検出電極から生ずる交流電圧から被測定物の表面電位を検出する公知の音叉型である。その振動子は、振動子駆動回路３により駆動され、また、検出電極からの交流電圧は、増幅回路４で増幅してから平滑回路５で平滑され、さらにＡ／Ｄ変換器６でＡ／Ｄ変換してから演算制御部Ｃ内のＣＰＵに入力される。すなわち、被測定物である帯電体１の表面電位は、電位測定部Ａにてデジタル量として測定される。   The surface potential sensor 2 is a known tuning fork type that detects the surface potential of the object to be measured from an alternating voltage generated from the detection electrode by chopping the electric field between the detection electrode and the object to be measured with a vibrator. The vibrator is driven by the vibrator driving circuit 3, and the AC voltage from the detection electrode is amplified by the amplifier circuit 4, smoothed by the smoothing circuit 5, and further A / D converted by the A / D converter 6. After conversion, it is input to the CPU in the arithmetic control unit C. That is, the surface potential of the charged body 1 that is the object to be measured is measured as a digital quantity by the potential measuring unit A.

振動子駆動回路３から、振動子駆動信号に同期した信号が取り出されて故障診断回路７に入力され、その信号の有無又は個数により、表面電位センサ２の故障の有無を自己診断できるようになっている。   A signal synchronized with the vibrator drive signal is taken out from the vibrator drive circuit 3 and inputted to the failure diagnosis circuit 7, and the presence or absence or the number of the signals can self-diagnose the presence or absence of the surface potential sensor 2. ing.

距離測定部Ｂは、超音波発信器８から帯電体１に向かって超音波を発信し、これを反射してきた超音波を超音波受信器９で受信することにより、その発信と受信の時間差から帯電体１までの距離を測定するもので、超音波発発信器８の発信動作、及び超音波受信器９の受信信号の処理を、図２のタイミングチャートを参照して説明する。   The distance measuring unit B transmits an ultrasonic wave from the ultrasonic transmitter 8 toward the charged body 1 and receives the ultrasonic wave reflected by the ultrasonic receiver 9, thereby obtaining a time difference between the transmission and the reception. Measuring the distance to the charged body 1, the transmission operation of the ultrasonic generator 8 and the processing of the received signal of the ultrasonic receiver 9 will be described with reference to the timing chart of FIG.

演算制御部Ｃに対して測定開始を指示すると、これより図２（１）に示すように、所定時間Ｔ１の幅の発信駆動信号が距離測定部Ｂへ入力され、距離測定部Ｂ内の超音波駆動パルス発生回路１０が、図２（２）に示すように所定時間Ｔ１だけ超音波駆動パルスを発生し、超音波発信器８がこの時間Ｔ１だけ超音波を発信する。   When the calculation control unit C is instructed to start measurement, a transmission drive signal having a width of a predetermined time T1 is input to the distance measuring unit B as shown in FIG. As shown in FIG. 2B, the sonic drive pulse generation circuit 10 generates an ultrasonic drive pulse for a predetermined time T1, and the ultrasonic transmitter 8 transmits an ultrasonic wave for this time T1.

また、この時間Ｔ１の幅の発信駆動信号は、電位測定部Ａの故障診断回路７にも入力され、故障診断回路７は、振動子駆動回路３からの振動子駆動信号に同期した信号の有無をこの時間Ｔ１だけ判断、又はその個数をこの時間Ｔ１だけ計数することにより、表面電位センサ２の故障の有無を診断する。   The transmission drive signal having the width of time T1 is also input to the failure diagnosis circuit 7 of the potential measurement unit A. The failure diagnosis circuit 7 checks whether or not there is a signal synchronized with the transducer drive signal from the transducer drive circuit 3. Whether or not there is a failure in the surface potential sensor 2 is diagnosed by determining only the time T1 or counting the number of times for the time T1.

一方、この時間Ｔ１の幅の発信駆動信号によりタイマ１１が動作し、図２（３）に示すように、このタイマ１１による所定時間Ｔ２だけ遅延後に、距離補正範囲信号発生回路１２から、図２（４）に示すような所定時間Ｔ３の幅の距離補正範囲信号を発生する。そして、この所定時間Ｔ３の時間範囲内についてだけ、距超音波受信器９からの受信信号、詳しくは、距超音波受信器９の交流信号を増幅器１３で増幅し、波形整形回路１４で波形整形した信号により帯電体１までの距離を測定する。そして、電位測定部Ａで上記のように測定された測定電位を、この所定時間Ｔ３の時間範囲内に得られる測定距離に応じて補正する。   On the other hand, the timer 11 is operated by the transmission drive signal having the width of the time T1, and as shown in FIG. 2 (3), after the delay of the predetermined time T2 by the timer 11, the distance correction range signal generating circuit 12 A distance correction range signal having a width of a predetermined time T3 as shown in (4) is generated. Then, only within the time range of the predetermined time T3, the received signal from the distance ultrasonic receiver 9, specifically, the AC signal of the distance ultrasonic receiver 9 is amplified by the amplifier 13, and the waveform shaping circuit 14 shapes the waveform. The distance to the charged body 1 is measured by the signal. Then, the measurement potential measured as described above by the potential measurement unit A is corrected according to the measurement distance obtained within the time range of the predetermined time T3.

すなわち、本静電気測定器を帯電体１に対してある決まった距離（以下、規定距離という）Ｌだけ離した状態で測定する仕様とした場合、タイマ１１の設定値である所定時間Ｔ２を規定距離Ｌに応じた値とし、また、規定距離Ｌよりある範囲内は距離補正範囲Δｌとして、距離補正範囲信号の時間幅Ｔ３をこの距離補正範囲Δｌに応じた値とする。そして、距離測定部Ｂによる測定距離が、この距離補正範囲Δｌ内に入っているときに、その測定距離に応じた値だけ電位測定部Ａの測定電位を補正する。規定距離Ｌを変更したいときは、タイマ１１の設定値Ｔ２を変更する。   That is, when the static electricity measuring device is set to be measured with a predetermined distance (hereinafter referred to as a specified distance) L away from the charged body 1, the predetermined time T2 that is a set value of the timer 11 is set to the specified distance. A value corresponding to L is set, a range within a specified distance L is set as a distance correction range Δl, and a time width T3 of the distance correction range signal is set as a value corresponding to the distance correction range Δl. When the measurement distance by the distance measurement unit B is within the distance correction range Δl, the measurement potential of the potential measurement unit A is corrected by a value corresponding to the measurement distance. When it is desired to change the specified distance L, the set value T2 of the timer 11 is changed.

図２（５）は、電位測定部Ａによる電位測定が、距離補正範囲Δｌ内で最も近い距離の場合に行われた状態、図２（６）は、距離補正範囲Δｌ内で最も遠い距離の場合に行われた状態を示している。そして、演算制御部Ｃでは、距離補正範囲Δｌ内での測定距離の大小に応じて、測定距離が大きい場合には、図２（７）に示すように電位測定部Ａの測定電位の補正量を多くし、測定距離が小さい場合には、図２（８）に示すように電位測定部Ａの測定電位の補正量を少なくすることで、電位測定部Ａの測定電位に対して、距離補正範囲Δｌ内だけ距離補正（距離補償）を行うようになっている。   2 (5) shows a state in which the potential measurement by the potential measuring unit A is performed when the distance is the closest within the distance correction range Δl, and FIG. 2 (6) shows the farthest distance within the distance correction range Δl. Shows the state made in the case. Then, in the calculation control unit C, when the measurement distance is large according to the magnitude of the measurement distance within the distance correction range Δl, the correction amount of the measurement potential of the potential measurement unit A as shown in FIG. When the measurement distance is small, the distance correction is made for the measurement potential of the potential measurement unit A by reducing the correction amount of the measurement potential of the potential measurement unit A as shown in FIG. Distance correction (distance compensation) is performed only within the range Δl.

本静電気測定器は、バッテリ１５を電源とする携帯型となっており、その電源電圧は電源安定化・スタンバイ回路１６から演算制御部Ｃに印加される。   This static electricity measuring device is a portable type that uses a battery 15 as a power source, and the power source voltage is applied from the power source stabilization / standby circuit 16 to the arithmetic control unit C.

表示部Ｄは、距離補正された測定電位をデジタル表示するとともに、表面電位センサ２の故障の有無、及びバッテリ１５の状況も表示する。   The display unit D digitally displays the distance-corrected measurement potential, and also displays the presence / absence of a failure of the surface potential sensor 2 and the status of the battery 15.

本発明の一実施例のブロック図である。It is a block diagram of one Example of this invention. その動作のタイミングチャートである。It is a timing chart of the operation.

符号の説明Explanation of symbols

Ａ 電位測定部
Ｂ 距離測定部
Ｃ 演算制御部
Ｄ 表示部
１ 帯電体
２ 表面電位センサ
３ 振動子駆動回路
４ 増幅回路
５ 平滑回路
６ Ａ／Ｄ変換器
７ 故障診断回路
８ 超音波発信器
９ 超音波受信器
１０ 超音波駆動パルス発生回路
１１ タイマ
１２ 距離補正範囲信号発生回路
１３ 増幅器
１４ 波形整形回路
１５ バッテリ
１６ 電源安定化・スタンバイ回路 A Potential measurement unit B Distance measurement unit C Calculation control unit D Display unit 1 Charged body 2 Surface potential sensor 3 Transducer drive circuit 4 Amplification circuit 5 Smoothing circuit 6 A / D converter 7 Fault diagnosis circuit 8 Ultrasonic transmitter 9 Super Sound wave receiver 10 Ultrasonic drive pulse generation circuit 11 Timer 12 Distance correction range signal generation circuit 13 Amplifier 14 Waveform shaping circuit 15 Battery 16 Power supply stabilization / standby circuit

Claims (2)

帯電体の電位を表面電位センサにて検出して表示部に表示する静電気測定器において、帯電体に向けて超音波を発信する超音波発信手段と、帯電体を反射した超音波を受信する超音波受信手段と、超音波発信手段に所定時間Ｔ１だけ超音波駆動パルスを加える超音波駆動パルス発生手段と、その超音波駆動パルス発生時点から所定時間Ｔ２だけ遅延後に所定時間Ｔ３の距離補正範囲信号を発生する距離補正範囲信号発生手段と、この距離補正範囲信号による所定時間Ｔ３内に得られる前記超音波受信手段の出力信号から帯電体までの距離に応じた距離信号を出力する距離測定手段と、前記表面電位センサの検出電位を、距離測定手段から得られる距離信号の大小に応じて補正する電位補正手段とを備えたことを特徴とする距離補正付き静電気測定器。   In an electrostatic measurement device that detects the potential of a charged body with a surface potential sensor and displays it on a display unit, an ultrasonic transmission means for transmitting ultrasonic waves toward the charged body and an ultrasonic wave for receiving ultrasonic waves reflected by the charged body A sound wave receiving means, an ultrasonic wave driving pulse generating means for applying an ultrasonic driving pulse to the ultrasonic wave transmitting means for a predetermined time T1, and a distance correction range signal for a predetermined time T3 after a delay of a predetermined time T2 from the time when the ultrasonic driving pulse is generated. A distance correction range signal generating means for generating a distance measurement means for outputting a distance signal corresponding to the distance from the output signal of the ultrasonic wave reception means obtained by the distance correction range signal within a predetermined time T3 to the charged body; And a potential correcting means for correcting the detected potential of the surface potential sensor according to the magnitude of the distance signal obtained from the distance measuring means. Joki. 超音波駆動パルスを超音波発信手段に所定時間Ｔ１だけ加えるのに同期して、表面電位センサの振動子駆動回路からの信号の有無を判別することにより、表面電位センサの故障を診断する表面電位センサ故障診断手段を備えたことを特徴とする請求項１に記載の距離補正付き静電気測定器。   A surface potential for diagnosing a failure of the surface potential sensor by determining the presence or absence of a signal from the transducer drive circuit of the surface potential sensor in synchronization with the application of the ultrasonic drive pulse to the ultrasonic transmission means for a predetermined time T1. The static electricity measuring device with distance correction according to claim 1, further comprising sensor failure diagnosis means.
JP2006231635A 2006-08-29 2006-08-29 Static electricity measuring instrument with distance correction Pending JP2008057985A (en)

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