JP2008038829A - Piezoelectric pump and piezoelectric vibrator - Google Patents

Piezoelectric pump and piezoelectric vibrator Download PDF

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JP2008038829A
JP2008038829A JP2006216772A JP2006216772A JP2008038829A JP 2008038829 A JP2008038829 A JP 2008038829A JP 2006216772 A JP2006216772 A JP 2006216772A JP 2006216772 A JP2006216772 A JP 2006216772A JP 2008038829 A JP2008038829 A JP 2008038829A
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piezoelectric
piezoelectric vibrator
pump
shim
liquid
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Hitoshi Onishi
人司 大西
Eiichi Komai
栄一 駒井
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Alps Alpine Co Ltd
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Alps Electric Co Ltd
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Priority to JP2006216772A priority Critical patent/JP2008038829A/en
Priority to TW096123115A priority patent/TW200819631A/en
Priority to US11/880,737 priority patent/US20080038125A1/en
Publication of JP2008038829A publication Critical patent/JP2008038829A/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/023—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms double acting plate-like flexible member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a piezoelectric pump having highly reliable liquid-tight construction around a piezoelectric vibrator, comprising the piezoelectric vibrator having a piezoelectric body laminated on at least one of the surface and the reverse of a shim consisting of a conductive metal thin plate, and a housing for keeping the peripheral edge of the piezoelectric vibrator liquid-tight to form a pump chamber, wherein an alternating current is applied between the piezoelectric vibrator and the shim for vibrating the piezoelectric vibrator to produce pumping operation. <P>SOLUTION: In the piezoelectric pump, a cylindrical bent part is formed at the peripheral edge of the shim of the piezoelectric vibrator and a liquid-tight seal member is laid between the cylindrical bent part and the housing. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、圧電振動子を用いた圧電ポンプ及び圧電振動子に関する。   The present invention relates to a piezoelectric pump using a piezoelectric vibrator and a piezoelectric vibrator.

薄板状の圧電振動子を振動させることによりポンプ作用を得る圧電ポンプは、圧電振動子とハウジングとによってポンプ室を形成し、このポンプ室に連なる一対の流路に、流れ方向の異なる一対の逆止弁（ポンプ室への流体流を許す逆止弁とポンプ室からの流体流を許す逆止弁）を設けている。圧電振動子を振動させると、ポンプ室の容積が変化し、この容積変化に伴い一対の逆止弁の一方が閉じて他方が開く動作を繰り返すことから、ポンプ作用が得られる。このような圧電ポンプは、薄型にでき、例えば水冷ノート型パソコンの冷却水循環ポンプとして用いられている。   A piezoelectric pump that obtains a pump action by vibrating a thin plate-like piezoelectric vibrator forms a pump chamber with the piezoelectric vibrator and a housing, and a pair of opposite flowers having different flow directions are formed in a pair of flow paths connected to the pump chamber. Stop valves (a check valve that allows fluid flow to the pump chamber and a check valve that allows fluid flow from the pump chamber) are provided. When the piezoelectric vibrator is vibrated, the volume of the pump chamber changes, and as the volume changes, one of the pair of check valves closes and the other opens repeatedly, thereby obtaining a pump action. Such a piezoelectric pump can be made thin, and is used, for example, as a cooling water circulation pump of a water-cooled notebook personal computer.

圧電振動子は、圧電体を、シム（導電性金属薄板）の表裏の少なくとも一方に積層してなっている。圧電体はその表裏方向に分極特性が与えられていて、表裏間に、この分極方向と同一方向または逆方向の正負極性を与えると、一方の表面積が拡大し他方の表面積が縮小する性質がある。このため、圧電体の表裏に与える正負極性を交互に反転させると、表裏の一方が延びて他方が縮むサイクルが繰り返され、シムが振動する。   The piezoelectric vibrator is formed by laminating a piezoelectric body on at least one of the front and back surfaces of a shim (conductive metal thin plate). The piezoelectric body has a polarization characteristic in the front and back directions, and when the positive and negative polarities in the same direction or in the opposite direction to the polarization direction are given between the front and back surfaces, the surface area of one side is enlarged and the surface area of the other side is reduced. . For this reason, when the positive and negative polarities applied to the front and back sides of the piezoelectric body are alternately reversed, a cycle in which one of the front and back sides extends and the other shrinks is repeated, and the shim vibrates.

登録実用新案第２５１０５９０公報Registered Utility Model No. 2510590 実開平３-８６７９号公報Japanese Utility Model Publication No. 3-8679 特開２００４-２５７３３７号公報JP 2004-257337 A

このような圧電ポンプに用いられる圧電振動子は従来、平板状（円板状）をなしており、その周縁部に当接させたＯリング（液密シール部材）をハウジングとの間で圧縮することで、液密構造としている。圧縮されたＯリングは、圧電振動子とハウジングとの間に離間させる方向の力を与える。この力は、短期的に液密構造に影響を与えることはないが、長期のスパンで考えると、液密構造に悪影響を与えるおそれがある。上述の水冷ノート型パソコンの冷却水循環ポンプのような用途では、液密構造を万全にしておくことが望ましい。   Conventionally, a piezoelectric vibrator used in such a piezoelectric pump has a flat plate shape (disk shape), and compresses an O-ring (liquid tight seal member) brought into contact with a peripheral portion thereof with a housing. Therefore, it has a liquid-tight structure. The compressed O-ring gives a force in a direction of separating between the piezoelectric vibrator and the housing. This force does not affect the liquid-tight structure in the short term, but there is a possibility of adversely affecting the liquid-tight structure when considered over a long span. In applications such as the cooling water circulation pump of the above-mentioned water-cooled notebook personal computer, it is desirable that the liquid-tight structure is made perfect.

本発明は、以上の問題意識に基づき、圧電振動子回りの液密構造の信頼性が高い圧電ポンプを得ることを目的とする。
また、本発明は、信頼性の高い液密構造が容易に得られる圧電振動子を得ることを目的とする。 An object of the present invention is to obtain a piezoelectric pump with high reliability of a liquid-tight structure around a piezoelectric vibrator based on the above problem awareness.
It is another object of the present invention to obtain a piezoelectric vibrator that can easily obtain a highly reliable liquid-tight structure.

本発明は、従来の平板状（円板状）の圧電振動子では、液密シール部材を該振動子の平面方向と直交する方向に圧縮せざるを得ず、この圧縮構造が長期に渡る液密構造についての不安要因であるとの認識に基づき、圧縮方向を該振動子の径方向とすれば、信頼性が向上するとの着眼に基づいてなされたものである。   According to the present invention, in a conventional plate-shaped (disc-shaped) piezoelectric vibrator, the liquid-tight seal member must be compressed in a direction orthogonal to the plane direction of the vibrator, and this compression structure is a long-term liquid. Based on the recognition that this is an anxiety factor for the dense structure, the improvement was made based on the viewpoint that the reliability would be improved if the compression direction was the radial direction of the vibrator.

すなわち、本発明による圧電ポンプは、導電性金属薄板からなるシムの表裏の少なくとも一方に圧電体を積層してなる圧電振動子と、この圧電振動子の周縁を液密にしてポンプ室を形成するハウジングとを有し、この圧電振動子のシムと圧電体との間に交番電流を印加し該圧電振動子を振動させてポンプ作用を得る圧電ポンプにおいて、圧電振動子のシムの周縁部に、円筒状曲折部を形成し、この円筒状曲折部とハウジングとの間に、液密シール部材を介在させたことを特徴としている。   That is, the piezoelectric pump according to the present invention forms a pump chamber with a piezoelectric vibrator formed by laminating a piezoelectric body on at least one of the front and back sides of a shim made of a conductive metal thin plate, and the periphery of the piezoelectric vibrator being liquid-tight. In a piezoelectric pump that has a housing and applies an alternating current between the shim of the piezoelectric vibrator and the piezoelectric body to vibrate the piezoelectric vibrator to obtain a pump action, in the peripheral portion of the shim of the piezoelectric vibrator, A cylindrical bent portion is formed, and a liquid-tight seal member is interposed between the cylindrical bent portion and the housing.

ポンプ室は圧電振動子の表裏の一方に形成するタイプと、表裏の双方に形成するタイプが可能である。表裏の一方に形成するタイプでは、液密シール部材は、該圧電振動子のシムの円筒状曲折部の内周面または外周面の一方に位置させればよい。   The pump chamber can be of a type formed on one of the front and back sides of the piezoelectric vibrator and a type formed on both the front and back sides. In the type formed on one of the front and back surfaces, the liquid-tight seal member may be positioned on one of the inner peripheral surface or the outer peripheral surface of the cylindrical bent portion of the shim of the piezoelectric vibrator.

一方、表裏の双方に形成するタイプでは、該圧電振動子のシムの円筒状曲折部の内周面と外周面にそれぞれ液密シール部材を位置させることが望ましい。   On the other hand, in the type formed on both the front and back sides, it is desirable to place liquid-tight seal members on the inner and outer peripheral surfaces of the cylindrical bent portion of the shim of the piezoelectric vibrator.

また、シムには、その円筒状曲折部の端部に外方に曲折された外方フランジ部を形成することが好ましい。   Moreover, it is preferable to form the outward flange part bent outward at the edge part of the cylindrical bending part in the shim.

本発明は、導電性金属薄板からなるシムの表裏の少なくとも一方に圧電体を積層してなる圧電振動子の態様では、シムの周縁部に、円筒状曲折部を形成したことを特徴としている。   The present invention is characterized in that a cylindrical bent portion is formed at the periphery of the shim in the aspect of the piezoelectric vibrator in which a piezoelectric body is laminated on at least one of the front and back sides of the shim made of a conductive metal thin plate.

本発明によれば、圧電振動子の周縁部に位置させて液密構造とする液密シール部材を、シムに形成した曲折円筒状部とハウジングとの間で圧縮するため、液密シール部材の反発力がハウジングと圧電振動子を離間させる方向の力として作用することがない。このため、長期に渡り高い液密信頼性を得ることができる。   According to the present invention, a liquid-tight seal member having a liquid-tight structure positioned at the peripheral portion of the piezoelectric vibrator is compressed between the bent cylindrical portion formed in the shim and the housing. The repulsive force does not act as a force in the direction separating the housing and the piezoelectric vibrator. For this reason, high liquid-tight reliability can be obtained over a long period of time.

図７は、２バルブ型圧電ポンプの概念構成の一例を模式的に示している。圧電振動子１０は、ハウジング２０を構成するアッパハウジング２０Ｕとロアハウジング２０Ｌの間に挟着支持されていて、アッパハウジング２０Ｕとの間にポンプ室Ａを構成している。   FIG. 7 schematically shows an example of a conceptual configuration of a two-valve piezoelectric pump. The piezoelectric vibrator 10 is sandwiched and supported between an upper housing 20U and a lower housing 20L constituting the housing 20, and constitutes a pump chamber A between the upper housing 20U.

ハウジング２０（アッパハウジング２０Ｕ）には、冷却水（液体）の入口ポート２１と出口ポート２２が開口しており、入口ポート２１とポンプ室Ａとの間、及びポンプ室Ａと出口ポート２２との間にそれぞれ、逆止弁１１、１２が設けられている。逆止弁１１は、入口ポート２１からポンプ室Ａへの流体流を許してその逆の流体流を許さない吸入側逆止弁であり、逆止弁１２は、ポンプ室Ａから出口ポート２２への流体流を許してその逆の流体流を許さない吐出側逆止弁である。   In the housing 20 (upper housing 20U), an inlet port 21 and an outlet port 22 for cooling water (liquid) are opened, and between the inlet port 21 and the pump chamber A and between the pump chamber A and the outlet port 22. Check valves 11 and 12 are provided in between. The check valve 11 is a suction-side check valve that allows a fluid flow from the inlet port 21 to the pump chamber A and does not allow the reverse fluid flow. The check valve 12 passes from the pump chamber A to the outlet port 22. This is a discharge-side check valve that allows the fluid flow of the fluid but does not permit the reverse fluid flow.

以上の圧電ポンプは、圧電振動子１０が正逆に弾性変形すると、ポンプ室Ａの容積が拡大する行程では、吸入側逆止弁１１が開いて吐出側逆止弁１２が閉じるため、入口ポート２１からポンプ室Ａ内に液体が流入する（図７（Ｂ））。一方、ポンプ室Ａの容積が縮小する行程では、吐出側逆止弁１２が開いて吸入側逆止弁１１が閉じるため、ポンプ室Ａから出口ポート２２に液体が流出する（同（Ａ））。したがって、圧電振動子１０を正逆に連続させて弾性変形させる（振動させる）ことで、ポンプ作用が得られる。   In the above piezoelectric pump, when the piezoelectric vibrator 10 is elastically deformed in the forward and reverse directions, the suction-side check valve 11 is opened and the discharge-side check valve 12 is closed in the stroke in which the volume of the pump chamber A is expanded. The liquid flows into the pump chamber A from 21 (FIG. 7B). On the other hand, in the process of reducing the volume of the pump chamber A, the discharge side check valve 12 is opened and the suction side check valve 11 is closed, so that the liquid flows out from the pump chamber A to the outlet port 22 ((A)). . Accordingly, the pump action can be obtained by elastically deforming (vibrating) the piezoelectric vibrator 10 continuously in the forward and reverse directions.

図１ないし図３は、例えば以上のような基本構成を有する圧電ポンプに本発明を適用した第一の実施形態を示している。圧電振動子１０は、この実施形態では、中心部のシム１０１と、シム１０１の表裏の一面（図の下面）に積層形成した圧電体１０２とを有するユニモルフタイプを図示している。シム１０１は、導電性の金属薄板材料、例えば厚さ０．２ｍｍ程度のステンレス薄板からプレス成型など周知な方法により一体に構成されており、中心円形部１０１ａの周縁に図の上方に曲折形成された円筒状曲折部１０１ｂを有し、この円筒状曲折部１０１ｂの上端部にはさらに外方に曲折形成されたフランジ部１０１ｃが形成されている。圧電体１０２は、例えば厚さ０．３ｍｍ程度のＰＺＴ（Ｐｂ（Ｚｒ、Ｔｉ）Ｏ3）から構成されるもので、その表裏方向に分極処理が施されている。圧電体１０２は、シム１０１の中心円形部１０１ａに対応する円形をなしており、該中心円形部１０１ａの裏面に導電性接着剤を介して接着され、圧電体１０２の表面は、透明電極で覆われる。 1 to 3 show, for example, a first embodiment in which the present invention is applied to a piezoelectric pump having the above basic configuration. In this embodiment, the piezoelectric vibrator 10 is shown as a unimorph type having a shim 101 at the center and a piezoelectric body 102 formed on one surface of the front and back of the shim 101 (the lower surface in the figure). The shim 101 is integrally formed from a conductive metal thin plate material, for example, a stainless thin plate having a thickness of about 0.2 mm, by a known method such as press molding, and is bent at the periphery of the central circular portion 101a upward in the drawing. A cylindrical bent portion 101b is formed, and a flange portion 101c that is further bent outward is formed at the upper end of the cylindrical bent portion 101b. The piezoelectric body 102 is made of, for example, PZT (Pb (Zr, Ti) O 3 ) having a thickness of about 0.3 mm, and is polarized in the front and back directions. The piezoelectric body 102 has a circular shape corresponding to the central circular portion 101a of the shim 101, and is adhered to the back surface of the central circular portion 101a via a conductive adhesive. The surface of the piezoelectric body 102 is covered with a transparent electrode. Is called.

アッパハウジング２０Ｕには、圧電振動子１０（シム１０１）の円筒状曲折部１０１ｂとフランジ部１０１ｃとＯリング（液密シール部材）２４を挿入する環状溝２５が形成されており、ロアハウジング２０Ｌには、シム１０１のフランジ部１０１ｃを挿入する段凹部２６が形成されている。この段凹部２６により、圧電振動子１０の軸方向の位置が定まる。Ｏリング２４は、円筒状曲折部１０１ｂの内周面と環状溝２５との間において、圧電振動子１０の平面方向と平行な方向に圧縮され液密が保持されている。図２、図３では、逆止弁１１、１２としてアンブレラを図示しているが、基本構成は図１と同様である。シム１０１のフランジ部１０１ｃは、省略することが可能であるが、存在することで、圧電振動子１０の位置精度を高めることができる。また、シム１０１が中心円形部１０１a、円筒状曲折部１０１ｂとフランジ部１０１ｃとを含め、ステンレス薄板により一体に構成されているために、高い液密性を確保することができる。さらに、Ｏリング２４の圧縮方向が平面方向であることから、アッパハウジング２０Ｕ及びロアハウジング２０Ｌは、薄くても剛性を確保できるため、圧電ポンプの薄型化にも対応が容易である。   The upper housing 20U is formed with an annular groove 25 into which the cylindrical bent portion 101b, flange portion 101c and O-ring (liquid-tight seal member) 24 of the piezoelectric vibrator 10 (shim 101) are inserted. Is formed with a step recess 26 into which the flange 101c of the shim 101 is inserted. The step recess 26 determines the axial position of the piezoelectric vibrator 10. The O-ring 24 is compressed in a direction parallel to the planar direction of the piezoelectric vibrator 10 between the inner peripheral surface of the cylindrical bent portion 101b and the annular groove 25, and liquid tightness is maintained. 2 and 3, umbrellas are illustrated as the check valves 11 and 12, but the basic configuration is the same as that in FIG. The flange portion 101c of the shim 101 can be omitted, but the presence of the flange portion 101c can increase the positional accuracy of the piezoelectric vibrator 10. Moreover, since the shim 101 is integrally formed of a stainless steel thin plate including the central circular portion 101a, the cylindrical bent portion 101b, and the flange portion 101c, high liquid tightness can be ensured. Furthermore, since the compression direction of the O-ring 24 is a planar direction, the upper housing 20U and the lower housing 20L can ensure rigidity even if they are thin, and thus it is easy to cope with the thinning of the piezoelectric pump.

上記構成の本圧電ポンプは、シム１０１と圧電体１０２の間に交番電流を印加することで、圧電振動子１０が振動し、図７で説明したのと同様のポンプ作用が得られる。そして、Ｏリング２４は圧電振動子１０の平面方向と平行な方向に圧縮され平面方向と直交する力を受けることがない。つまり、Ｏリング２４がアッパハウジング２０Ｕとロアハウジング２０Ｌに、両者を離間させる方向の力を及ぼすことがないため、長期に渡る液密性を保証することができる。   In the piezoelectric pump configured as described above, when an alternating current is applied between the shim 101 and the piezoelectric body 102, the piezoelectric vibrator 10 vibrates, and the same pumping action as described in FIG. 7 is obtained. The O-ring 24 is compressed in a direction parallel to the plane direction of the piezoelectric vibrator 10 and does not receive a force orthogonal to the plane direction. That is, since the O-ring 24 does not exert a force in the direction in which the upper housing 20U and the lower housing 20L are separated from each other, liquid-tightness over a long period of time can be ensured.

図４は、シム１０１の円筒状曲折部１０１ｂの外周側にＯリング２４を位置させた本発明の別の実施形態を示している。この実施形態では、アッパハウジング２０Ｕの環状溝２５だけで、シム１０１（圧電振動子１０）を支持しており、アッパハウジング２０Ｕのみを示してロアハウジング２０Ｌの図示を省略している。   FIG. 4 shows another embodiment of the present invention in which an O-ring 24 is positioned on the outer peripheral side of the cylindrical bent portion 101 b of the shim 101. In this embodiment, the shim 101 (piezoelectric vibrator 10) is supported only by the annular groove 25 of the upper housing 20U, and only the upper housing 20U is shown, and the lower housing 20L is not shown.

以上の実施形態のユニモルフ型の圧電振動子１０は、ポンプ室Ａとは反対の面に圧電体１０２を積層しているが、原理的にはポンプ室Ａ側に圧電体１０２を積層してもよい。しかし、ポンプ室Ａとは反対の面に圧電体１０２を積層すると、圧電体１０２に液体が触れるおそれがないため、例えば腐食性液体や水溶液等の液送用に好ましい。また、ポンプ室Ａ側に圧電体１０２を積層する場合、保護フィルム等で圧電体１０２を覆い、液体と圧電体１０２が直接接するのを防止することはできるが、長期間の使用により保護フィルムを液体が透湿する場合があり、この観点からもポンプ室Ａと反対側に圧電体１０２を積層するのが好ましい。   The unimorph type piezoelectric vibrator 10 of the above embodiment has the piezoelectric body 102 laminated on the surface opposite to the pump chamber A. However, in principle, the piezoelectric body 102 may be laminated on the pump chamber A side. Good. However, if the piezoelectric body 102 is laminated on the surface opposite to the pump chamber A, there is no risk of the liquid touching the piezoelectric body 102, which is preferable for feeding liquid such as corrosive liquid or aqueous solution. When the piezoelectric body 102 is laminated on the pump chamber A side, the piezoelectric body 102 can be covered with a protective film or the like to prevent the liquid and the piezoelectric body 102 from coming into direct contact with each other. The liquid may be permeable to moisture. From this viewpoint, it is preferable to stack the piezoelectric body 102 on the side opposite to the pump chamber A.

図８は、本発明を適用する４バルブ型圧電ポンプの動作原理を示している。この４バルブ圧電ポンプは、圧電振動子１０とアッパハウジング２０Ｕの間、及び圧電振動子１０とロアハウジング２０Ｌの間にそれぞれポンプ室Ａ及びＢを形成する一方、ハウジング２０に単一の入口ポート２１と単一の出口ポート２２を設け、一対のポンプ室Ａ、Ｂと入口ポート２１との間にそれぞれ該入口ポート２１から該一対のポンプ室Ａ、Ｂへの流体流を許容しその逆方向の流体流を許さない第一、第二の吸入側逆止弁１１Ｕ、１１Ｌを設け、一対のポンプ室Ａ、Ｂと出口ポート２２との間にそれぞれ該一対のポンプ室Ａ、Ｂから出口ポート２２への流体流を許容しその逆方向の流体流を許さない第一、第二の吐出側逆止弁１２Ｕ、１２Ｌを設けている。   FIG. 8 shows the operating principle of a four-valve piezoelectric pump to which the present invention is applied. This four-valve piezoelectric pump forms pump chambers A and B between the piezoelectric vibrator 10 and the upper housing 20U, and between the piezoelectric vibrator 10 and the lower housing 20L, respectively, while the housing 20 has a single inlet port 21. And a single outlet port 22 between the pair of pump chambers A and B and the inlet port 21 to allow fluid flow from the inlet port 21 to the pair of pump chambers A and B, respectively, in the opposite direction. First and second suction-side check valves 11U, 11L that do not allow fluid flow are provided, and a pair of pump chambers A, B and an outlet port 22 are respectively provided between the pair of pump chambers A, B and the outlet port 22. The first and second discharge-side check valves 12U and 12L are provided, which allow fluid flow to and not allow fluid flow in the opposite direction.

この４バルブ型圧電ポンプでは、圧電振動子１０を正逆に弾性変形（振動）させると、ポンプ室ＡとＢのいずれか一方の容積が増大し他方の容積が減少する行程が繰り返される。ポンプ室Ａの容積が増大する（ポンプ室Ｂの容積が減少する）行程では、逆止弁１１Ｕが開いて入口ポート２１からポンプ室Ａ内に流体が流入し、ポンプ室Ｂ内の流体が逆止弁１２Ｕを開いて出口ポート２２に流出する（図８（Ｂ））。逆にポンプ室Ａの容積が減少する（ポンプ室Ｂの容積が増大する）行程では、吸入側逆止弁２８Ｌが開いて入口ポート２１からポンプ室Ｂ内に流体が流入し、ポンプ室Ａ内の流体が吐出側逆止弁２９Ｕを開いて出口ポート２２に流出する（同（Ａ））。従って、出口ポート２２における脈動の周期を短くする（圧電振動子１０の上下の一方のみにポンプ室が形成される場合に比して半分にする）ことができる。   In this four-valve piezoelectric pump, when the piezoelectric vibrator 10 is elastically deformed (vibrated) in the forward and reverse directions, the process of increasing the volume of one of the pump chambers A and B and decreasing the volume of the other is repeated. In the process of increasing the volume of the pump chamber A (decreasing the volume of the pump chamber B), the check valve 11U opens, the fluid flows into the pump chamber A from the inlet port 21, and the fluid in the pump chamber B is reversed. The stop valve 12U is opened and flows out to the outlet port 22 (FIG. 8B). On the other hand, in the stroke in which the volume of the pump chamber A decreases (the volume of the pump chamber B increases), the suction side check valve 28L opens, and the fluid flows into the pump chamber B from the inlet port 21. Opens the discharge-side check valve 29U and flows out to the outlet port 22 ((A)). Therefore, the pulsation cycle at the outlet port 22 can be shortened (halved compared to the case where the pump chamber is formed only on one of the upper and lower sides of the piezoelectric vibrator 10).

図５、図６は、以上の動作原理の４バルブ型圧電ポンプに本発明を適用した実施形態を示している。この実施形態では、圧電振動子１０は、中心円形部１０１ａの両面に圧電体１０２を積層したバイモルフタイプとして構成されており、アッパハウジング２０Ｕとロアハウジング２０Ｌとの間には、シム１０１の円筒状曲折部１０１ｂとＯリング２４を挿入する環状溝２７が形成されている。すなわち、アッパハウジング２０Ｕの円柱状凸部２７ａと、ロアハウジング２０Ｌの円筒状凹部２７ｂとによって環状溝２７が形成されている。この環状溝２７には、円筒状曲折部１０１ｂと、その内周面と外周面にそれぞれ位置するＯリング２４が挿入され、圧電振動子１０の平面方向と平行な方向に圧縮されて液密が保持されている。図５、図６では、逆止弁１１Ｕ、１１Ｌ、１２Ｕ、１２Ｌとしてアンブレラを図示しているが、基本構成は図８と同様である。   5 and 6 show an embodiment in which the present invention is applied to a four-valve piezoelectric pump having the above operation principle. In this embodiment, the piezoelectric vibrator 10 is configured as a bimorph type in which the piezoelectric bodies 102 are laminated on both surfaces of the central circular portion 101a, and the cylindrical shape of the shim 101 is provided between the upper housing 20U and the lower housing 20L. An annular groove 27 for inserting the bent portion 101b and the O-ring 24 is formed. That is, the annular groove 27 is formed by the columnar convex portion 27a of the upper housing 20U and the cylindrical concave portion 27b of the lower housing 20L. The annular groove 27 is inserted with a cylindrical bent portion 101b and O-rings 24 positioned on the inner and outer peripheral surfaces thereof, and is compressed in a direction parallel to the plane direction of the piezoelectric vibrator 10 to be liquid-tight. Is retained. 5 and 6, umbrellas are illustrated as check valves 11U, 11L, 12U, and 12L, but the basic configuration is the same as that in FIG.

この４バルブ型の実施形態においても、同電位とした表裏の圧電体１０２とシム１０１との間に交番電流を与えることで圧電振動子１０を振動させ、ポンプ作用を得ることができる。バイモルフタイプの圧電振動子１０によれば、ユニモルフ型に比べ振動の振幅を大きくすることができ、ポンプ効率を高めることができる。そして、シム１０１の円筒状曲折部１０１ｂの内周面と外周面にそれぞれ位置するＯリング２４は圧電振動子１０の平面方向と平行な方向に圧縮され、平面方向と直交する方向には圧縮されることがない。よって、アッパハウジング２０Ｕとロアハウジング２０Ｌに離間する方向の力は加わらず、長期に渡る液密構造を保証することができる。   Also in this four-valve type embodiment, by applying an alternating current between the front and back piezoelectric bodies 102 and shims 101 having the same potential, the piezoelectric vibrator 10 can be vibrated to obtain a pump action. According to the bimorph type piezoelectric vibrator 10, the amplitude of vibration can be increased as compared with the unimorph type, and the pump efficiency can be increased. The O-rings 24 positioned on the inner and outer peripheral surfaces of the cylindrical bent portion 101b of the shim 101 are compressed in a direction parallel to the plane direction of the piezoelectric vibrator 10 and compressed in a direction orthogonal to the plane direction. There is nothing to do. Therefore, a force in the direction of separating the upper housing 20U and the lower housing 20L is not applied, and a liquid-tight structure over a long period can be ensured.

本発明による圧電振動子の一実施形態を示す模式分解図である。FIG. 3 is a schematic exploded view showing an embodiment of a piezoelectric vibrator according to the present invention. 図１の圧電振動子を用いた圧電ポンプの一実施形態を示す、要部の半断面斜視図である。FIG. 2 is a half sectional perspective view of a main part showing an embodiment of a piezoelectric pump using the piezoelectric vibrator of FIG. 1. 同断面図である。FIG. 図１の圧電振動子を用いた圧電ポンプの別の実施形態を示す断面図である。It is sectional drawing which shows another embodiment of the piezoelectric pump using the piezoelectric vibrator of FIG. 本発明による圧電振動子の他の実施形態を示す模式分解図である。FIG. 6 is a schematic exploded view showing another embodiment of a piezoelectric vibrator according to the present invention. 図５の圧電振動子を用いた圧電ポンプの一実施形態を示す断面図である。It is sectional drawing which shows one Embodiment of the piezoelectric pump using the piezoelectric vibrator of FIG. （Ａ）、（Ｂ）は、本発明の適用対象とする２バルブ型圧電ポンプの概念構成の一例を示す模式図である。(A), (B) is a schematic diagram which shows an example of a conceptual structure of the 2 valve type piezoelectric pump made into the application object of this invention. （Ａ）、（Ｂ）は、本発明の適用対象とする４バルブ型圧電ポンプの概念構成の一例を示す模式図である。(A), (B) is a schematic diagram which shows an example of a conceptual structure of the 4-valve type piezoelectric pump made into the application object of this invention.

符号の説明Explanation of symbols

１０ 圧電振動子
１０１ シム
１０１ａ 中心円形部
１０１ｂ 円筒状曲折部
１０１ｃ フランジ部
１０２ 圧電体
１１ １１Ｕ １１Ｌ 吸入側逆止弁
１２ １２Ｕ １２Ｌ 吐出側逆止弁
２０ ハウジング
２０Ｕ アッパハウジング
２０Ｌ ロアハウジング
２１ 入口ポート
２２ 出口ポート
２４ Ｏリング
２５ ２７ 環状溝
２６ 段凹部
Ａ Ｂ ポンプ室

DESCRIPTION OF SYMBOLS 10 Piezoelectric vibrator | oscillator 101 Shim 101a Center circular part 101b Cylindrical bent part 101c Flange part 102 Piezoelectric body 11 11U 11L Suction side check valve 12 12U 12L Discharge side check valve 20 Housing 20U Upper housing 20L Lower housing 21 Inlet port 22 Outlet Port 24 O-ring 25 27 Annular groove 26 Step recess A B Pump chamber

Claims (7)

導電性金属薄板からなるシムの表裏の少なくとも一方に圧電体を積層してなる圧電振動子と、この圧電振動子の周縁を液密にしてポンプ室を形成するハウジングとを有し、この圧電振動子のシムと圧電体との間に交番電流を印加し該圧電振動子を振動させてポンプ作用を得る圧電ポンプにおいて、
上記圧電振動子のシムの周縁部に、円筒状曲折部を形成し、この円筒状曲折部とハウジングとの間に、液密シール部材を介在させたことを特徴とする圧電ポンプ。 A piezoelectric vibrator in which a piezoelectric body is laminated on at least one of the front and back sides of a shim made of a conductive metal thin plate, and a housing that forms a pump chamber by making the periphery of the piezoelectric vibrator liquid-tight. In a piezoelectric pump that obtains a pump action by applying an alternating current between a child shim and a piezoelectric body to vibrate the piezoelectric vibrator,
A piezoelectric pump characterized in that a cylindrical bent portion is formed in a peripheral portion of a shim of the piezoelectric vibrator, and a liquid-tight seal member is interposed between the cylindrical bent portion and the housing. 請求項１記載の圧電ポンプにおいて、上記ポンプ室は上記圧電振動子の表裏の一方に形成され、上記液密シール部材は、該圧電振動子のシムの円筒状曲折部の内周面に位置している圧電ポンプ。 2. The piezoelectric pump according to claim 1, wherein the pump chamber is formed on one of front and back sides of the piezoelectric vibrator, and the liquid-tight seal member is located on an inner peripheral surface of a cylindrical bent portion of a shim of the piezoelectric vibrator. Piezoelectric pump. 請求項１記載の圧電ポンプにおいて、上記ポンプ室は上記圧電振動子の表裏の一方に形成され、上記液密シール部材は、該圧電振動子のシムの円筒状曲折部の外周面に位置している圧電ポンプ。 2. The piezoelectric pump according to claim 1, wherein the pump chamber is formed on one of the front and back sides of the piezoelectric vibrator, and the liquid-tight seal member is located on an outer peripheral surface of a cylindrical bent portion of the shim of the piezoelectric vibrator. Piezoelectric pump. 請求項１記載の圧電ポンプにおいて、上記ポンプ室は上記圧電振動子の表裏にそれぞれ形成され、上記液密シール部材は、該圧電振動子のシムの円筒状曲折部の内周面と外周面にそれぞれ位置している圧電ポンプ。 2. The piezoelectric pump according to claim 1, wherein the pump chambers are respectively formed on the front and back sides of the piezoelectric vibrator, and the liquid-tight seal members are provided on an inner peripheral surface and an outer peripheral surface of a cylindrical bent portion of the shim of the piezoelectric vibrator. Each piezoelectric pump is located. 請求項１ないし４のいずれか１項記載の圧電ポンプにおいて、圧電振動子の上記シムは、その円筒状曲折部の端部に外方に曲折された外方フランジ部を有する圧電ポンプ。 5. The piezoelectric pump according to claim 1, wherein the shim of the piezoelectric vibrator has an outer flange portion bent outward at an end portion of the cylindrical bent portion. 6. 導電性金属薄板からなるシムの表裏の少なくとも一方に圧電体を積層してなる圧電振動子において、上記シムの周縁部に、円筒状曲折部を形成したことを特徴とする圧電振動子。 A piezoelectric vibrator in which a piezoelectric body is laminated on at least one of the front and back sides of a shim made of a conductive metal thin plate, wherein a cylindrical bent portion is formed at the peripheral edge of the shim. 請求項６記載の圧電振動子において、圧電振動子の上記シムは、その円筒状曲折部の端部に外方に曲折された外方フランジ部を有する圧電振動子。


7. The piezoelectric vibrator according to claim 6, wherein the shim of the piezoelectric vibrator has an outer flange portion bent outward at an end portion of the cylindrical bent portion.


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