JP2007520569A - Continuous surface treatment apparatus and continuous surface treatment method for steric polymer - Google Patents
Continuous surface treatment apparatus and continuous surface treatment method for steric polymer Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/12—Chemical modification
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
- C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32412—Plasma immersion ion implantation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
- B29C59/142—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment of profiled articles, e.g. hollow or tubular articles
Abstract
【課題】本発明の目的は、陰電圧パルスによるプラズマイオン注入によって立体の形状を有する重合体の表面の帯電防止及び伝導性などの向上のための連続表面処理装置及び方法を提供することにある。
【解決手段】本発明は陰電圧パルスによるプラズマイオン注入によって立体の形状を有する重合体の表面の帯電防止及び伝導性などの向上のための連続表面処理装置及び方法に関し、プラズマを発生させてイオン注入するために高周波電力供給装置とマッチングボックス及びアンテナを含む高周波供給部と、プラズマを構成するためのイオン化される工程ガスを供給するガス導入装置と、これに連結されるガス供給源と、真空ポンプなどが具備される処理室を含む表面処理装置において、上記処理室の前後に互いに隣接して取り付けられる、脱気可能な引入室と脱気可能な引出室と、上記引入室、処理室及び引出室を順次に経由するように取り付けられる移送装置と、上記移送装置を駆動する移送手段を含んでなり、上記引入室と、上記引出室と、上記引入室と処理室の間の隔壁及び上記処理室と引出室の間の隔壁に上記移送装置が通過することができる自動開閉が可能なドアを含んでなることを特徴とする。
【選択図】図1An object of the present invention is to provide a continuous surface treatment apparatus and method for improving the antistatic property and conductivity of a polymer surface having a three-dimensional shape by plasma ion implantation using negative voltage pulses. .
The present invention relates to a continuous surface treatment apparatus and method for improving the antistatic property and conductivity of a polymer having a three-dimensional shape by plasma ion implantation using negative voltage pulses, and to generate ions by generating plasma. A high-frequency power supply unit for injecting, a high-frequency supply unit including a matching box and an antenna, a gas introduction device for supplying an ionized process gas for forming plasma, a gas supply source connected thereto, and a vacuum In a surface treatment apparatus including a treatment chamber equipped with a pump or the like, a degassable inlet chamber and a degassable drawer chamber attached adjacent to each other before and after the treatment chamber, the inlet chamber, the treatment chamber, and A transfer device attached so as to sequentially pass through the drawer chamber; and a transfer means for driving the transfer device; the inlet chamber; and the drawer When, characterized in that it comprises an automatic opening and closing is possible doors which can be a partition wall between the partition wall and the processing chamber and the extraction chamber during the pulling-chamber and the processing chamber above the transport device passes.
[Selection] Figure 1
Description
本発明は立体状重合体の連続表面処理に関する。より詳細には、本発明は陰電圧パルスによるプラズマイオン注入によって立体の形状を有する重合体の表面の帯電防止及び伝導性などの向上のための連続表面処理装置及び連続表面処理方法に関する。 The present invention relates to a continuous surface treatment of a steric polymer. More particularly, the present invention relates to a continuous surface treatment apparatus and a continuous surface treatment method for improving the antistatic property and conductivity of a polymer surface having a three-dimensional shape by plasma ion implantation using a negative voltage pulse.
高分子素材は軽量性、成形性及び加工性、透明性、電気絶縁性などの特徴によってその用途が非常に多様で広範囲な素材である。高分子素材は使用目的によって高分子素材全体の性質は変化させずに表面特性のみを改善させる必要性があるが、特に表面の親水または疎水特性は高分子素材の濡れ性(wettability)、印刷性(printability)、着色性(colorability)、生体適合性、静電気防止性、接着性、防水性、防湿性などに決定的な影響を及ぼすので、これを向上させるための様々な方法が利用されている。 Polymer materials are a wide range of materials that can be used in a wide variety of applications depending on characteristics such as lightness, moldability and processability, transparency, and electrical insulation. Depending on the purpose of use, it is necessary to improve only the surface properties of the polymer material without changing the overall properties of the polymer material.In particular, the hydrophilic or hydrophobic properties of the surface are the wettability and printability of the polymer material. Since it has a decisive influence on (printability), colorability, biocompatibility, antistatic properties, adhesiveness, waterproofness, moisture resistance, etc., various methods are used to improve it. .
このような高分子素材の表面改質方法では化学的処理、コロナ処理、プラズマ処理などを挙げることができる。化学的処理方法の代表的な例では Na/NH3を用いるフッ素系高分子表面処理法(アメリカ合衆国特許第2,789,063号、イギリス特許第793,731号参照) などがある。この方法は一般的な化学反応によって表面に形成される作用基を予測することができるという長所はあるが、処理工程が煩わしく汚染物質である廃棄液の問題を引き起こすという短所がある。 Examples of such a surface modification method for polymer materials include chemical treatment, corona treatment, and plasma treatment. Typical examples of the chemical treatment method include a fluorine-based polymer surface treatment method using Na / NH 3 (see US Pat. No. 2,789,063, British Patent 793,731). This method has the advantage that it can predict the functional group formed on the surface by a general chemical reaction, but it has the disadvantage that the treatment process is cumbersome and causes the problem of waste liquid which is a contaminant.
一方、大気圧で行われるコロナ放電処理は包装用材であるポリオレフィンやポリエチレンテレフタルレートフィルムなどの表面処理(J．Pochan、L．Gerenser、and J．Elman、Polymer、第27巻、1058頁、1986年発行参照) などに使われているが、改質層が非常に薄いので、処理後時間によって容易に劣化(aging)するという問題があり、大気中の湿度など処理工程変数の最適化が難しいという短所がある。 On the other hand, corona discharge treatment performed at atmospheric pressure is a surface treatment for polyolefin and polyethylene terephthalate films as packaging materials (J. Pochan, L. Gerenser, and J. Elman, Polymer, 27, 1058, 1986). However, it is difficult to optimize process variables such as humidity in the atmosphere. There are disadvantages.
低い圧力でのプラズマを用いた高分子表面処理方法には酸素プラズマを用いてポリプロピレン、ポリエチレン、ポリスチレンなどの新水性を向上させること(M．Morra、E．Occhiello、and F．Garbassi、Journal of Applied Polymer Science、第39巻、249頁、1990年発行参照) などがある。 Polymer surface treatment using low-pressure plasma uses oxygen plasma to improve new aqueous properties such as polypropylene, polyethylene, polystyrene, etc. (M. Morra, E. Occhiello, and F. Garbassi, Journal of Applied Polymer Science, Vol. 39, p. 249, published in 1990).
プラズマは物質の第4状態と見なされ、部分的にイオン化した気体を意味する。その構成成分は電子、陽イオンそして中性原子及び中性分子などである。気体粒子にエネルギーが加えられると、最外角電子が軌道を離脱して自由電子になるため、気体粒子は陽電荷を有するようになる。 Plasma is considered the fourth state of matter, meaning a partially ionized gas. Its constituents are electrons, cations and neutral atoms and neutral molecules. When energy is applied to the gas particles, the outermost angle electrons leave the orbit and become free electrons, so that the gas particles have a positive charge.
このように形成された電子とイオン化した気体が多数集まり全体的に電気的中性を維持し、その構成粒子間の相互作用によって独特の光を放出し、粒子が活性化して高い反応性を有するようになる。このようなプラズマ処理はコロナ処理に比べて反応ガスを選択することができ、処理圧力など工程変数を調節することができるという長所はあるが、同様に改質した表面層が薄いので、処理後時間による劣化が問題として知られている。 Many of the electrons and ionized gas formed in this way gather and maintain the overall electrical neutrality, emit unique light by the interaction between the constituent particles, and the particles are activated and highly reactive It becomes like this. Compared to corona treatment, such plasma treatment has the advantage of being able to select reactive gases and adjusting process variables such as treatment pressure, but the modified surface layer is also thin, so Time degradation is known as a problem.
また、最近では酸素雰囲気内で不活性元素(Ar)のイオンビームを高分子試料に入射させて新水性を改善した方法が報告されているが(S．Koh、S．Song、W．Choi、and H．Jung、Journal of Materials Research、第10巻、2390頁、1995年発行参照)、この方法も同様に時間による親水特性の急激な低下が問題とされており、イオンビームを使わなければならないので装置が複雑で大面的の均一処理が難しいという短所がある。 Recently, a method has been reported in which an ion beam of an inert element (Ar) is incident on a polymer sample in an oxygen atmosphere to improve new aqueous properties (S. Koh, S. Song, W. Choi, and H. Jung, Journal of Materials Research, Vol. 10, p. 2390, published in 1995), this method also has a problem of rapid degradation of hydrophilic properties with time, and an ion beam must be used. Therefore, there is a disadvantage that the apparatus is complicated and large-scale uniform processing is difficult.
一方、3次元物体のイオン注入に相応しい技術として、アメリカ合衆国特許第4,764,394号に記載したプラズマ源イオン注入方法及び装置が知られている。 On the other hand, as a technique suitable for ion implantation of a three-dimensional object, a plasma source ion implantation method and apparatus described in US Pat. No. 4,764,394 are known.
韓国特許公開公報公開番号第1987-7562号には半導体、金属または絶縁物の表面のエッチング、表面の改質(modification)、表面清浄化、表面への不純物注入、表面への薄膜堆積などの各種処理を行う表面処理方法及びそれに使われる表面処理装置が開示されており、ここでは少なくとも1種類の元素を含むイオンビームを固体ターゲットの表面に入射させて粒子を前方に散乱させ、上記少なくとも1種類の元素を含む前方散乱粒子ビームを生成した後、前方散乱粒子ビームを被加工物の表面に向けて入射させ、上記被加工物の表面をエッチングまたは改質したり、上記被加工物の表面上に膜を堆積する工程を含む表面処理方法を記述している。 Korean Patent Publication No. 1987-7562 includes various methods such as surface etching of semiconductors, metals or insulators, surface modification, surface cleaning, impurity implantation on the surface, thin film deposition on the surface, etc. Disclosed is a surface treatment method for performing treatment and a surface treatment apparatus used therefor, in which an ion beam containing at least one element is incident on the surface of a solid target to scatter particles forward, and the at least one kind described above After generating a forward scattered particle beam containing the above elements, the forward scattered particle beam is incident on the surface of the workpiece, and the surface of the workpiece is etched or modified, or on the surface of the workpiece. A surface treatment method including a step of depositing a film is described.
韓国公開特許公報公開番号第1997-73239号にはプラズマイオン注入によって高分子素材表面の親水特性または疎水特性を向上させる表面改質方法及びそれに使われる装置が開示されており、ここでは真空槽内に位置する試料台上に板状の高分子素材を位置させる段階、真空槽内にプラズマ源ガスを導入する段階、導入したプラズマ源ガスからイオンプラズマを発生させる段階、パルス電圧が-1kVないし-20kVで、パルス-オフ時の電圧が0Vないし-1kVで、パルス幅が1μsないし50μsで、パルス周波数が10Hzないし500kHzである負(-)の高電圧パルスを上記高分子素材試料に加え、プラズマから抽出されたイオンが高エネルギーを保有したまま上記試料の表面に注入されるようにする段階からなることを特徴とする高分子素材の表面改質方法が記述されている。 Korean Published Patent Publication No. 1997-73239 discloses a surface modification method for improving the hydrophilic property or hydrophobic property of a polymer material surface by plasma ion implantation, and an apparatus used therefor. The step of positioning a plate-like polymer material on the sample stage located at the step of introducing a plasma source gas into the vacuum chamber, the step of generating ion plasma from the introduced plasma source gas, and a pulse voltage of -1 kV to- A negative (-) high voltage pulse of 20 kV, pulse-off voltage of 0 V to -1 kV, pulse width of 1 μs to 50 μs, and pulse frequency of 10 Hz to 500 kHz is added to the polymer material sample, and plasma is added. A method for modifying the surface of a polymer material is described, which comprises the step of allowing ions extracted from the sample to be implanted into the surface of the sample while retaining high energy.
しかし、上記方法は全て高分子素材の新水性または疎水性を増減させるためのものであって、帯電防止及び伝導性などの向上のためのものではない。
帯電防止及び伝導性重合体の場合、重合体に伝導性炭素(conductive carbon)及び炭素纎維(carbon fiber)を混練して使っているが、これらの帯電防止用重合体及び伝導性重合体の場合、成形後に炭素及び炭素纎維の粒子が剥離して製品に大きな損傷を引き起こすだけでなく、電子製品、半導体及び液晶表示装置(LCD(liquid crystal display)基板)に粒子が付着してパターンやチップに大きな損傷を引き起こしている。このような帯電防止のための帯電防止剤の使用は、その自らの帯電防止効果が一定時間経つと消滅する現象を引き起こしており、帯電防止効果を期待することができなくなる場合がある。
However, all of the above methods are for increasing or decreasing the fresh water or hydrophobicity of the polymer material, not for improving the antistatic property or conductivity.
In the case of an antistatic and conductive polymer, conductive carbon and carbon fiber are kneaded and used in the polymer, but these antistatic polymer and conductive polymer are used. In this case, not only carbon and carbon fiber particles may peel off after molding to cause major damage to the product, but also particles may adhere to electronic products, semiconductors, and liquid crystal display (LCD) substrates. This is causing major damage to the chip. The use of such an antistatic agent for antistatic causes a phenomenon in which the antistatic effect of the antistatic agent disappears after a certain period of time, and the antistatic effect may not be expected.
ポリピロール及びポリアニリンの伝導性重合体を溶解した水溶液や芳香族重合体及びアタクチック重合体溶液を使い、このような溶液に含浸させてから取り出して乾燥させた製品の場合、キズ(scratch)や水分などに敏感で帯電防止効果及び伝導性が損失する現象を引き起こす問題点がある。 In the case of a product that uses an aqueous solution, aromatic polymer or atactic polymer solution in which a conductive polymer of polypyrrole and polyaniline is dissolved, impregnated in such a solution, and then taken out and dried, scratches, moisture, etc. There is a problem in that it is sensitive to the phenomenon that the antistatic effect and conductivity are lost.
また、イオンビームを用いた重合体の表面改質の場合、ビームを加速させ、ビームを散乱して中性子が存在する領域を離隔させて製品を処理しなければならず、器具上に立体的なプラズマイオンを注入することができず、製品を回転させる治具を使って製品の収率上において量産化の連続工程を行うにはかなりの困難を抱えている。 In addition, in the case of polymer surface modification using an ion beam, the product must be processed by accelerating the beam and scattering the beam to separate the neutron-existing region, so Plasma ions cannot be implanted, and it is quite difficult to perform a mass production continuous process in terms of product yield using a jig for rotating the product.
また、韓国公開特許公報公開番号第2002-20010号には3次元立体高分子素材及び製品の表面特性及び表面の電気伝導度を向上させるためにプラズマイオン注入技術を用いる表面改質方法及びその装置が開示されており、ここでは(a)真空槽内のグリッド内に立体高分子材料を位置させる段階;(b)真空槽内の上記材料表面から一定距離離れた所にグリッドを位置させる段階;(c)真空槽内の上記材料表面に抵抗度を低める黒鉛層形成のために気体プラズマイオンを形成する段階、(d)上記グリッドに陰電圧パルスを加えて気体プラズマイオンを上記材料の表面に注入させる段階を含むグリッドを用いた立体高分子のプラズマイオン注入による立体高分子材料の表面処理方法が記述されている。しかし上記の方法は大量生産に適合しないという問題点がある。 Also, Korean Patent Publication No. 2002-20010 discloses a surface modification method and apparatus using a plasma ion implantation technique to improve the surface characteristics and surface electrical conductivity of three-dimensional solid polymer materials and products. Wherein (a) the step of positioning the three-dimensional polymer material in the grid in the vacuum chamber; (b) the step of positioning the grid at a distance from the surface of the material in the vacuum chamber; (c) a step of forming gas plasma ions for forming a graphite layer that reduces the resistance on the surface of the material in the vacuum chamber; (d) applying a negative voltage pulse to the grid to cause the gas plasma ions to be applied to the surface of the material. A surface treatment method of a three-dimensional polymer material by plasma ion implantation of a three-dimensional polymer using a grid including a step of implanting is described. However, there is a problem that the above method is not suitable for mass production.
本発明の目的は、本発明は陰電圧パルスによるプラズマイオン注入によって立体の形状を有する重合体の表面の帯電防止及び伝導性などの向上のための連続表面処理方法を提供することにある。 It is an object of the present invention to provide a continuous surface treatment method for improving the antistatic property and conductivity of the surface of a polymer having a three-dimensional shape by plasma ion implantation with a negative voltage pulse.
本発明による立体状重合体の連続表面処理装置は、プラズマを発生させてイオン注入するために高周波電力供給装置とマッチングボックス及びアンテナを含む高周波供給部と、プラズマを構成するためのイオン化される工程ガスを供給するガス導入装置と、これに連結されるガス供給源と、真空ポンプなどが具備される処理室を含む表面処理装置において、上記処理室の前後に互いに隣接して取り付けられる、脱気可能な引入室と脱気可能な引出室と、上記引入室、処理室及び引出室を順次に経由するように取り付けられる移送装置と上記移送装置を駆動する移送手段を含んでなり、上記引入室と、上記引出室と、上記引入室と処理室の間の隔壁及び上記処理室と引出室の間の隔壁に上記移送装置が通過することができる自動開閉が可能なドアを含んでなる。 The continuous surface treatment apparatus for a steric polymer according to the present invention includes a high frequency power supply device, a high frequency supply unit including a matching box and an antenna for generating plasma and ion implantation, and an ionization process for forming the plasma. In a surface treatment apparatus including a treatment chamber equipped with a gas introduction device for supplying a gas, a gas supply source connected to the gas supply device, and a vacuum pump, the deaeration is attached adjacent to each other before and after the treatment chamber. And a degassing drawer chamber, a transfer device attached so as to sequentially pass through the draw-in chamber, the processing chamber and the draw-out chamber, and a transfer means for driving the transfer device. And an automatic open / close door that allows the transfer device to pass through the drawer chamber, the partition wall between the inlet chamber and the processing chamber, and the partition wall between the processing chamber and the drawer chamber. Comprising a.
上記移送手段としては、回転可能に取り付けられる移送ローラがある。
上記移送装置は移送板と、上記移送板の上端に一体に固定され、移送手段としての移送ローラと接触して可変する移送羽根と, 上記移送板の下端に一体に固定され、立体状重合体を懸架或いは固定させることができる固定具を含んでなる。
As the transfer means, there is a transfer roller attached rotatably.
The transfer device is integrally fixed to the transfer plate, the transfer plate fixed to the upper end of the transfer plate and brought into contact with a transfer roller as transfer means, and fixed to the lower end of the transfer plate, and is a three-dimensional polymer. It comprises a fixture that can be suspended or fixed.
上記引入室に隣接して表面処理される立体状重合体に70ないし85℃の温度の乾燥熱風を噴射させて前処理するための前処理室がさらに含まれ、上記前処理室には熱風を前処理室内に吹き入れるための送風機と、上記送風機へ供給される熱風の流れを断続するための第1断続弁と、上記前処理室から空気を排出させて真空化させるための排気空気の流れを断続するための第2断続弁、及び上記第2断続弁を経由して上記前処理室から空気を排出させるための真空ポンプが連結される。 A pretreatment chamber is further included for pretreatment by spraying dry hot air having a temperature of 70 to 85 ° C. to the three-dimensional polymer surface-treated adjacent to the inlet chamber. A blower for blowing into the pretreatment chamber, a first intermittent valve for interrupting the flow of hot air supplied to the blower, and a flow of exhaust air for exhausting air from the pretreatment chamber and making it vacuum And a vacuum pump for discharging air from the pretreatment chamber via the second intermittent valve.
上記第1断続弁には熱風を発生させるためのエアコンプレッサをさらに連結することができる。 An air compressor for generating hot air can be further connected to the first intermittent valve.
上記前処理室は2つ並列に形成することができ、このためには上記前処理室に加えて第2前処理室を併設することができ、上記第2前処理室には熱風を前処理室内に吹き入れるための第2送風機と、上記第2送風機へ供給される熱風の流れを断続するための第3断続弁と、上記第2前処理室から空気を排出させて真空化させるための排気空気の流れを断続するための第4断続弁、及び上記第4断続弁を経由して上記前処理室から空気を排出させるための真空ポンプが連結される。ここで真空ポンプは一つの真空ポンプを上記第2断続弁と第4断続弁を経由して共用化することができる。また、熱風を発生させるためのエアコンプレッサを上記第3断続弁を経由して共用化することができる。 Two pretreatment chambers can be formed in parallel, and for this purpose, a second pretreatment chamber can be provided in addition to the pretreatment chamber, and hot air is pretreated in the second pretreatment chamber. A second blower for blowing into the room, a third intermittent valve for interrupting the flow of hot air supplied to the second blower, and a vacuum for exhausting air from the second pretreatment chamber A fourth intermittent valve for interrupting the flow of exhaust air and a vacuum pump for exhausting air from the pretreatment chamber via the fourth intermittent valve are connected. Here, the vacuum pump can share one vacuum pump via the second intermittent valve and the fourth intermittent valve. In addition, an air compressor for generating hot air can be shared via the third intermittent valve.
また本発明による立体状重合体の連続表面処理方法は、プラズマイオン注入技術を用いる表面改質において、(1)脱気可能な引入室内に処理しようとする立体状重合体物品を引入させる引入段階;(2)上記立体状重合体が引入された引入室内部を減圧、脱気させる第1真空化段階;(3)上記引入室内の立体状重合体を上記処理室に移送させる第1移送段階;(4)上記処理室内に移送された立体状重合体にプラズマを用いて表面処理する表面処理段階;(5)脱気可能な引出室内部を減圧、脱気させる第2真空化段階;(6)表面処理が完了した立体状重合体を真空化された上記引出室内に移送させる第2移送段階;及び(7)上記引出室内の立体状重合体を外部に引き出す引出段階;を含んでなる。 Further, the method for continuous surface treatment of a three-dimensional polymer according to the present invention is a surface modification using a plasma ion implantation technique. (2) a first evacuation step for depressurizing and degassing the inside of the inlet chamber into which the steric polymer has been introduced; (3) a first transfer step for transferring the steric polymer in the inlet chamber to the processing chamber; (4) a surface treatment step of performing surface treatment using plasma on the three-dimensional polymer transferred into the treatment chamber; (5) a second evacuation step of depressurizing and degassing the inside of the drawable extraction chamber; 6) a second transfer step of transferring the surface-treated steric polymer into the evacuated drawing chamber; and (7) a drawing step of drawing out the steric polymer in the drawing chamber to the outside. .
上記(2)の第1真空化段階の前後で上記引入室内の立体状重合体に熱風を加えて立体状重合体から水分を除去する前処理段階;をさらに行うことができる。 Before and after the first evacuation step (2), a pretreatment step of removing water from the steric polymer by applying hot air to the steric polymer in the inlet chamber can be further performed.
上記(4)の表面処理段階はアルゴン、窒素またはこれらの混合物でなる工程ガスを15ないし100sccmの量で連続的に上記処理室に供給しながらパルス幅20ないし30ms、プラズマ発生のための高周波の周波数500ないし1500Hz及び高電圧パルス21ないし25KVの工程条件で表面処理を行うことでなる。 In the surface treatment step (4), a process gas consisting of argon, nitrogen or a mixture thereof is continuously supplied to the treatment chamber in an amount of 15 to 100 sccm, while a pulse width of 20 to 30 ms and a high frequency for plasma generation. The surface treatment is performed under process conditions of a frequency of 500 to 1500 Hz and a high voltage pulse of 21 to 25 KV.
以下、本発明の具体的な実施例を添付した図面を参照して詳しく説明する。 Hereinafter, specific embodiments of the present invention will be described in detail with reference to the accompanying drawings.
図1に図示したように、本発明による立体状重合体の連続表面処理装置は、プラズマを発生させてイオン注入するために高周波電力供給装置(27)と、マッチングボックス(26)、及びアンテナ(25)を含む高周波供給部と、プラズマを構成するためのイオン化される工程ガスを供給するガス導入装置(71)と、これに連結されるガス供給源(72)と、真空ポンプなどが具備される処理室(21)を含む表面処理装置において、上記処理室(21)前後に互いに隣接して取り付けられる、脱気可能な引入室(11)と脱気可能な引出室(31)と、上記引入室(11)、処理室(21) 及び引出室(31)を順次に経由するように取り付けられる移送装置(51)と,上記移送装置(51)を駆動する移送手段を含んでなり、上記引入室(11)と、上記引出室(31)と、上記引入室(11)と処理室(21) の間の隔壁及び上記処理室(21)と引出室(31) の間の隔壁に上記移送装置(51)が通過することができる自動開閉が可能なドアを含んでなることを特徴とする。 As shown in FIG. 1, the continuous surface treatment apparatus for a steric polymer according to the present invention includes a high frequency power supply device (27), a matching box (26), an antenna ( 25), a gas introduction device (71) for supplying an ionized process gas for forming plasma, a gas supply source (72) connected thereto, a vacuum pump, and the like. In the surface treatment apparatus including the treatment chamber (21), the degassing inlet chamber (11) and the degassing drawer chamber (31), which are attached adjacent to each other before and after the treatment chamber (21), A transfer device (51) attached so as to sequentially pass through the inlet chamber (11), the processing chamber (21) and the drawer chamber (31), and a transfer means for driving the transfer device (51), Inlet chamber (11), drawer chamber (31), partition wall between inlet chamber (11) and treatment chamber (21), and treatment chamber The partition between (21) and the drawer chamber (31) includes a door capable of automatic opening and closing through which the transfer device (51) can pass.
上記でプラズマを発生させてイオン注入するために高周波電力供給装置(27)とマッチングボックス(26)及びアンテナ(25)を含む高周波供給部と、プラズマを構成するためのイオン化される工程ガスを供給するガス導入装置(71)と、これに連結されるガス供給源(72)と、真空ポンプなどが具備される処理室(21)を含む表面処理装置は、当業者が常用的に購入して使うことができる程度に公知されたものと理解される。 A high-frequency power supply device (27), a high-frequency supply unit including a matching box (26) and an antenna (25), and a process gas to be ionized for forming the plasma are supplied to generate plasma and perform ion implantation. A surface treatment device including a gas introduction device (71), a gas supply source (72) connected to the gas introduction device (71), and a treatment chamber (21) equipped with a vacuum pump or the like is regularly purchased by those skilled in the art. It is understood that it is known to the extent that it can be used.
このようなプラズマを用いる表面処理装置は、真空化した処理室(21)内にイオン化される工程ガスを供給し、強い磁場の中で高周波電力を印加して工程ガスを部分的にイオン化させて第4の物質状態と称されるプラズマを形成させ、これを高電圧で帯電された試料台などに被加工物を載せたりまたはグリッド(24)内に被加工物を位置させ、プラズマを構成するイオンの中で上記試料台またはグリッド(24)に印加された電流の極性に対向するイオンが主にグリッド(24)などに高電圧パルスを印加することによって静電気的に誘導されて被加工物の表面に適用されることで被加工物の表面にイオン注入がなされるようにする。 A surface treatment apparatus using such plasma supplies a process gas to be ionized into a vacuumized processing chamber (21), and applies a high frequency power in a strong magnetic field to partially ionize the process gas. A plasma called a fourth material state is formed, and the workpiece is placed on a sample stage charged with a high voltage, or the workpiece is placed in the grid (24) to form the plasma. Among the ions, ions facing the polarity of the current applied to the sample stage or the grid (24) are induced electrostatically by applying a high voltage pulse mainly to the grid (24) etc. By being applied to the surface, the surface of the workpiece is ion-implanted.
すなわち、本発明ではこのような公知の表面処理装置で被加工物を連続的に処理するようにするために、上記処理室(21)前後に引入室(11)と引出室(31)を設置し、上記引入室(11)と引出室(31)はそれぞれ脱気可能になるように真空ポンプなどを具備してなり、上記引入室(11)、処理室(21) 及び引出室(31)にはこれらを順次に経由するように取り付けられる移送装置(51)と上記移送装置(51)を駆動する移送手段を含んでなる。 That is, in the present invention, in order to continuously process the workpiece with such a known surface treatment apparatus, an inlet chamber (11) and a drawer chamber (31) are installed before and after the processing chamber (21). The drawing chamber (11) and the drawing chamber (31) are each equipped with a vacuum pump or the like so that they can be deaerated, and the drawing chamber (11), the processing chamber (21), and the drawing chamber (31). Includes a transfer device (51) attached so as to pass through them sequentially and a transfer means for driving the transfer device (51).
また、上記移送装置(51)は移送手段によって移送され、望ましくは上記移送手段としては上記引入室(11)、処理室(21) 及び引出室(31)に回転可能に取り付けられる移送ローラ(61)がある。 In addition, the transfer device (51) is transferred by transfer means, and preferably as the transfer means, a transfer roller (61) rotatably attached to the inlet chamber (11), the processing chamber (21) and the drawer chamber (31). )
上記移送ローラ(61)によって移送される移送装置(51)は、図2に示されたように、移送板(52)と、上記移送板(52)の上端に一体に固定され、ローラと接触して可変する移送羽根(53)と, 上記移送板(52)の下端に一体に固定され、立体状重合体(41)を懸架或いは固定させることができる固定具(54)を含んでなる。上記では移送ローラ(61)とこれらの移送ローラ(61)によって移送される移送装置(51)に特定して説明しているが、立体状重合体(41)を移送させることができる他の手段も可能であり、単に、これらの移送装置(51)と移送ローラ(61)を構成する材質は上記処理室(21)を構成するステンレススチールと同一または類似する材質から構成することができ、プラズマや高周波電力及び高電圧パルスなどに影響を与えない材質から構成することで充分に達成される。 As shown in FIG. 2, the transfer device (51) transferred by the transfer roller (61) is integrally fixed to the transfer plate (52) and the upper end of the transfer plate (52), and is in contact with the roller. The transfer blade (53) which is variable, and a fixture (54) which is integrally fixed to the lower end of the transfer plate (52) and can suspend or fix the three-dimensional polymer (41). In the above description, the transfer roller (61) and the transfer device (51) transferred by these transfer rollers (61) are specifically described, but other means capable of transferring the three-dimensional polymer (41) are described. The material constituting the transfer device (51) and the transfer roller (61) can be made of the same or similar material as the stainless steel constituting the processing chamber (21), and the plasma It can be sufficiently achieved by making it from a material that does not affect the high frequency power and high voltage pulse.
上記移送装置(51)による立体状重合体(41)の移送のためには、上記引入室(11)と、上記引出室(31)と上記引入室(11)と処理室(21)の間の隔壁及び上記処理室(21)と引出室(31)の間の隔壁に上記移送装置(51)が通過することができる自動開閉の可能なドアが含まれる。これらドアはソレノイド、空圧シリンダまたは油圧シリンダなど公知の動作手段によって開閉動作が可能であり、開放によって立体状重合体(41)が固定された移送装置(51)の通過が可能になり、閉鎖によって気体の通過が不可能になり一定の真空度を維持することができるドアの構成によって達成される。 For the transfer of the three-dimensional polymer (41) by the transfer device (51), the inlet chamber (11), the drawer chamber (31), between the inlet chamber (11) and the processing chamber (21). And a door between the processing chamber (21) and the extraction chamber (31) that can be automatically opened and closed through which the transfer device (51) can pass. These doors can be opened and closed by known operating means such as solenoids, pneumatic cylinders or hydraulic cylinders, and when opened, the three-dimensional polymer (41) can be passed through the transfer device (51) fixed and closed. This is achieved by a door structure that prevents the passage of gas and maintains a constant vacuum.
特に望ましくは、上記ドアは短時間内に開閉可能にさせて立体状重合体(41)の通過後は速やかに密閉することができるように立体状重合体(41)の一番狭い幅を基準に開閉し、立体状重合体(41)が通過することができる程度に開閉されるスライド式のドア構造が可能であり、このような構造は当業者が容易に理解することができる程度に公知されたものと理解される。 Particularly preferably, the door can be opened and closed within a short period of time, and the narrowest width of the steric polymer (41) is used as a reference so that the door can be quickly sealed after passing the steric polymer (41). The sliding door structure can be opened and closed to such an extent that the three-dimensional polymer (41) can pass through, and such a structure is well known to those skilled in the art. It is understood that
図3に示したように、上記引入室(11)に隣接して表面処理される立体状重合体(41)に70ないし85℃の温度の乾燥熱風を噴射させて前処理するための前処理室(81)がさらに含まれ、上記前処理室(81)には熱風を前処理室(81)内に吹き入れるための送風機(82)と、上記送風機(82)へ供給される熱風の流れを断続するための第1断続弁(83)と、上記前処理室(81)から空気を排出させて真空化させるための排気空気の流れを断続するための第2断続弁(85)、及び上記第2断続弁(85)を経由して上記前処理室(81)から空気を排出させるための真空ポンプが連結される。 As shown in FIG. 3, pretreatment for pretreatment by spraying dry hot air at a temperature of 70 to 85 ° C. to the three-dimensional polymer (41) surface-treated adjacent to the inlet chamber (11). A chamber (81), and the pretreatment chamber (81) includes a blower (82) for blowing hot air into the pretreatment chamber (81), and a flow of hot air supplied to the blower (82). A first intermittent valve (83) for intermittently disconnecting the air, a second intermittent valve (85) for intermittently flowing the exhaust air for exhausting the vacuum from the pretreatment chamber (81), and A vacuum pump is connected to exhaust air from the pretreatment chamber (81) via the second intermittent valve (85).
上記第1断続弁(83)には熱風を発生させるためのエアコンプレッサ(84)をさらに連結することができる。 An air compressor (84) for generating hot air can be further connected to the first intermittent valve (83).
上記前処理室(81)は2つ並列に形成することができ、このためには上記前処理室(81)に加えて第2前処理室(87)を併設することができ、上記第2前処理室(87)には熱風を前処理室(81)内に吹き入れるための第2送風機(88)と、上記第2送風機(88)へ供給される熱風の流れを断続するための第3断続弁(89)と、上記第2前処理室(87)から空気を排出させて真空化させるための排気空気の流れを断続するための第4断続弁(90)、及び上記第4断続弁(90)を経由して上記前処理室(81)から空気を排出させるための真空ポンプが連結される。 The two pretreatment chambers (81) can be formed in parallel.To this end, in addition to the pretreatment chamber (81), a second pretreatment chamber (87) can be provided side by side. The pretreatment chamber (87) has a second blower (88) for blowing hot air into the pretreatment chamber (81) and a second blower for intermittently flowing the hot air supplied to the second blower (88). 3 intermittent valve (89), a fourth intermittent valve (90) for interrupting the flow of exhaust air for exhausting and evacuating air from the second pretreatment chamber (87), and the fourth intermittent A vacuum pump is connected to discharge air from the pretreatment chamber (81) via the valve (90).
ここで真空ポンプは一つの真空ポンプを上記第2断続弁(85)と第4断続弁(90)を経由して共用化することができる。また、熱風を発生させるためのエアコンプレッサ(84)を上記第3断続弁(89)を経由して共用化することができる。 Here, the vacuum pump can share one vacuum pump via the second intermittent valve (85) and the fourth intermittent valve (90). Further, the air compressor (84) for generating hot air can be shared through the third intermittent valve (89).
また、上記前処理室(81)を別途に具備しなくても、上記引入室(11)上に上記前処理室(81)で具備される送風機(82)と熱風の断続のための断続弁及びこれを経由して連結されるエアコンプレッサ(84)などを具備させることによって引入室(11)で熱風の適用による前処理ができるようにすることもできる。 Further, even if the pretreatment chamber (81) is not separately provided, the blower (82) provided in the pretreatment chamber (81) and the intermittent valve for hot air interruption on the inlet chamber (11). In addition, by providing an air compressor (84) or the like connected via this, it is possible to perform pretreatment by applying hot air in the inlet chamber (11).
図1を基準に説明すると、上記構成によって立体状重合体(41)を移送させるための移送装置(51)は立体状重合体(41)を固定したまま、まずは上記第1ドア(13)を開放させて第1ドア(13)を通じて引入室(11)内に引入された後、上記第1ドア(13)を閉鎖させ、真空ポンプを動作させて引入室(11)内を充分に真空化させた後、引入室(11)と処理室(21)の間の第2ドア(28)を開放させ、移送ローラ(61)を駆動させて上記移送装置(51)を処理室(21)に移送させて上記移送装置(51)に固定された立体状重合体(41)が上記処理室(21)内のグリッド(24)内に位置されるようにして上記第2ドア(28)を閉鎖させた後、プラズマ処理を行う。 Referring to FIG. 1, the transfer device (51) for transferring the three-dimensional polymer (41) with the above-described configuration first fixes the first door (13) while fixing the three-dimensional polymer (41). After opening and entering the entrance chamber (11) through the first door (13), the first door (13) is closed and the vacuum pump is operated to sufficiently evacuate the interior of the entrance chamber (11). After that, the second door (28) between the inlet chamber (11) and the processing chamber (21) is opened, and the transfer roller (61) is driven to move the transfer device (51) to the processing chamber (21). The second door (28) is closed so that the three-dimensional polymer (41) that is transferred and fixed to the transfer device (51) is positioned in the grid (24) in the processing chamber (21). Then, plasma treatment is performed.
プラズマ処理は従来のプラズマ処理と同一または類似のものであって、内部を真空化させた後、処理ガスを流入させ、高周波電力供給装置(27)とマッチングボックス(26) 及び高電圧パルス発生装置(23)などを駆動させてアンテナ(25)を経由して高周波電力が供給されるものであって、プラズマを発生させて高電圧パルスが印加されるグリッド(24)側に陽イオンを静電気的に引き入れてグリッド(24)内に位置する立体状重合体(41)の表面に注入されるようにする。 The plasma processing is the same as or similar to the conventional plasma processing, and after the inside is evacuated, the processing gas is introduced, and the high frequency power supply device (27), the matching box (26), and the high voltage pulse generator High frequency power is supplied via the antenna (25) by driving the (23) etc., and positive ions are electrostatically applied to the grid (24) side where high voltage pulses are applied by generating plasma. So as to be injected into the surface of the three-dimensional polymer (41) located in the grid (24).
以後、表面処理が完了すると、上記処理室(21)と引出室(31)の間の第3ドア(33)を開放させ、同様に移送ローラ(61)を駆動させて上記移送装置(51)を引出室(31)に移送させる。移送室に移送された上記移送装置(51)は以後も上記移送ローラ(61)の駆動によって第4ドア(34)を通じて完全に外部に引出されるようになる。 Thereafter, when the surface treatment is completed, the third door (33) between the processing chamber (21) and the drawer chamber (31) is opened, and similarly, the transfer roller (61) is driven to move the transfer device (51). Is transferred to the drawer chamber (31). After that, the transfer device (51) transferred to the transfer chamber is completely pulled out through the fourth door (34) by driving the transfer roller (61).
第4ドア(34)の開放によって移送装置(51)が引出され、第4ドア(34)を閉鎖した後、引出室(31)の内部は真空化される。このような引出室(31)の真空化は後続の第3ドア(33)の開放時に上記処理室(21)内に外部空気が流入しないようにする機能を果し、処理室(21) 内での連続処理のための工程条件を早い時間内に復旧し、表面処理を行う準備ができるようにする。 The transfer device (51) is pulled out by opening the fourth door (34), and after closing the fourth door (34), the inside of the drawer chamber (31) is evacuated. Such evacuation of the drawer chamber (31) serves to prevent external air from flowing into the processing chamber (21) when the subsequent third door (33) is opened. The process conditions for continuous processing in the process are restored in an early time so that preparations for surface treatment can be made.
上記のような方法で立体の形状を有する重合体(41)を連続的に表面処理することができるようになる。上記移送装置(51)は処理される立体状重合体(41)を固定させて引入室(11)に引入させ、処理されて引出された立体状重合体(41)は引き離す方法で循環によって繰り返し使うことができる。 The polymer (41) having a three-dimensional shape can be continuously surface treated by the method as described above. The transfer device (51) fixes the three-dimensional polymer (41) to be treated and draws it into the inlet chamber (11), and the treated and drawn three-dimensional polymer (41) is repeatedly separated by circulation. Can be used.
また、本発明による立体状重合体の連続表面処理方法は、プラズマイオン注入技術を用いる表面改質において、(1)脱気可能な引入室内で処理しようとする立体状重合体物品を引入させる引入段階;(2)上記立体状重合体が引入された引入室内部を減圧、脱気させる第1真空化段階;(3)上記引入室内の立体状重合体を上記処理室に移送させる第1移送段階;(4)上記処理室内に移送された立体状重合体にプラズマを用いて表面処理する表面処理段階;(5)脱気可能な引出室内部を減圧、脱気させる第2真空化段階;(6)表面処理が完了した立体状重合体を真空化された上記引出室内に移送させる第2移送段階;及び(7)上記引出室内の立体状重合体を外部に引き出す引出段階;を含んでなることを特徴とする。 Further, the method for continuous surface treatment of a three-dimensional polymer according to the present invention is a surface modification using a plasma ion implantation technique. (1) Introducing a three-dimensional polymer article to be treated in a degassable introduction chamber Stage; (2) a first evacuation step of depressurizing and degassing the inside of the inlet chamber into which the steric polymer has been introduced; (3) a first transfer for transferring the steric polymer in the inlet chamber to the processing chamber; (4) a surface treatment step of performing surface treatment using plasma on the three-dimensional polymer transferred into the treatment chamber; (5) a second evacuation step of depressurizing and degassing the inside of the drawable extraction chamber; (6) a second transfer step of transferring the surface-treated steric polymer into the evacuated drawing chamber; and (7) a drawing step of drawing out the steric polymer in the drawing chamber to the outside. It is characterized by becoming.
上記(1)の引入段階は、上記処理室(21)の真空度には影響を与えずに立体状重合体(41)物品を上記処理室(21)内に連続的に供給するようにするための前段階として機能するようにするために、脱気可能な引入室(11)内に処理しようとする立体状重合体(41)物品を引入させる段階である。 In the introduction step (1), the three-dimensional polymer (41) article is continuously supplied into the processing chamber (21) without affecting the degree of vacuum in the processing chamber (21). In order to function as a pre-stage for the purpose, a three-dimensional polymer (41) article to be treated is introduced into the degassable inlet chamber (11).
以後、(2)は第1真空化段階で上記立体状重合体(41)物品が引入された引入室(11)内部を減圧、脱気させる段階である。上記(2)の第1真空化段階で上記引入室(11)内部を真空化させることで、上記移送機によって上記引入室(11)内の被加工物としての立体状重合体(41) 物品を上記処理室(21)に移送させる時、処理室(21)の真空度など内部工程条件を大きく変化させずに上記立体状重合体(41)物品を上記処理室(21)内に移送させることができる条件が整うようになる。 Thereafter, (2) is a step of depressurizing and degassing the inside of the inlet chamber (11) into which the article of the three-dimensional polymer (41) is drawn in the first vacuuming step. The interior of the inlet chamber (11) is evacuated in the first evacuation stage of (2), so that the three-dimensional polymer (41) article as a workpiece in the inlet chamber (11) is transferred by the transfer device. Is transferred to the processing chamber (21), the steric polymer (41) article is transferred into the processing chamber (21) without greatly changing internal process conditions such as the degree of vacuum of the processing chamber (21). The conditions that can be met.
続いて、上記(3)の第1移送段階では、上記引入室(11)内の立体状重合体(41)物品を上記処理室(21)に移送させる段階であり、以後上記(4)の表面処理段階で上記処理室(21)内に移送された立体状重合体(41)物品にプラズマを用いて表面処理を行うようになる。続いて、上記(5)の第2真空化段階では、逆に上記脱気可能な引出室(31)内部を減圧、脱気させ、これは上記引出室(31)内部を真空化させ、同様に上記処理室(21)の真空度には影響を与えずに表面処理が完了した立体状重合体(41)物品を上記引出室(31)に移送させることができるように真空化する段階である。 Subsequently, in the first transfer step (3), the three-dimensional polymer (41) article in the inlet chamber (11) is transferred to the treatment chamber (21). Surface treatment is performed using plasma on the three-dimensional polymer (41) article transferred into the treatment chamber (21) in the surface treatment stage. Subsequently, in the second evacuation stage of (5) above, the inside of the extraction chamber (31) that can be degassed is depressurized and degassed. In the stage of evacuation so that the three-dimensional polymer (41) article whose surface treatment has been completed without affecting the degree of vacuum of the treatment chamber (21) can be transferred to the extraction chamber (31). is there.
以後、上記(6)の第2移送段階で、上記表面処理が完了した重合体(41)物品を真空化された上記引出室(31)内に移送させた後、上記(7)の排出段階では上記引出室(31)内に移送された後、上記引出室(31)から表面処理が完了した重合体(41)を排出することで立体状重合体(41)物品を連続的に表面処理するようにする。 Thereafter, in the second transfer step (6), after the polymer (41) article having been subjected to the surface treatment is transferred into the vacuumed extraction chamber (31), the discharge step (7) Then, after being transferred into the drawer chamber (31), the polymer (41) whose surface treatment has been completed is discharged from the drawer chamber (31) to continuously treat the three-dimensional polymer (41) article. To do.
上記(2)の第1真空化段階の前後で、上記引入室(11)内の立体状重合体(41)物品に熱風を加えて水分などを除去する前処理段階をさらに行うことができる。上記前処理段階は上記引入室(11) 内の立体状重合体(41)物品を予め加熱して立体状重合体(41)物品の表面へのイオンの注入をより深い所まで可能にさせる。上記前処理段階では70ないし85℃の温度の熱風を適用させて水分を除去し、部分的に立体状重合体(41)を加熱させ、加熱温度は重合体(41)物品を構成する重合体(41)の種類と物性及び大きさなどによって変えることができ、当業者は適切な加熱温度を理論的かつ経験によって実験的に決めることができる。 Before and after the first evacuation step (2), a pretreatment step of removing moisture and the like by applying hot air to the three-dimensional polymer (41) article in the inlet chamber (11) can be further performed. In the pretreatment step, the steric polymer (41) article in the inlet chamber (11) is preheated to allow ions to be implanted into the surface of the steric polymer (41) article to a deeper position. In the pretreatment stage, hot air at a temperature of 70 to 85 ° C. is applied to remove moisture, and the steric polymer (41) is partially heated, and the heating temperature is a polymer constituting the polymer (41) article. It can be changed according to the type, physical properties, size, etc. of (41), and those skilled in the art can determine an appropriate heating temperature experimentally and theoretically based on experience.
上記(4)の表面処理段階は、アルゴン、窒素またはこれらの混合物でなる工程ガスを15ないし100sccmの量で連続的に上記処理室(21)に供給しながらパルス幅20ないし30ms、プラズマ発生のための高周波の周波数500ないし1500Hz及び高電圧パルスとして21ないし25KVの高電圧を印加する工程条件で表面処理を行うことでなる。このような工程条件は、立体状重合体(41)の種類、大きさ及び形状などによって変えることができ、当業者は理論的かつ経験的に適切な工程条件を決めて表面処理によるイオン注入を行うことができることは当然である。 In the surface treatment step (4), a process gas consisting of argon, nitrogen or a mixture thereof is continuously supplied to the treatment chamber (21) in an amount of 15 to 100 sccm, and a pulse width of 20 to 30 ms is generated. Therefore, the surface treatment is performed under a process condition of applying a high frequency of 500 to 1500 Hz and a high voltage of 21 to 25 KV as a high voltage pulse. Such process conditions can be changed depending on the type, size and shape of the steric polymer (41), and those skilled in the art will determine the appropriate process conditions theoretically and empirically to perform ion implantation by surface treatment. Of course, it can be done.
上記本発明による表面処理装置及び表面処理方法によって加工される被加工物としての立体状重合体(41)としては、公知された全ての種類の重合体が可能であり、望ましくは低密度ポリエチレン(LDPE)、直鎖状低密度ポリエチレン(LLDPE)、高密度ポリエチレン(HDPE)、ポリプロピレン(PP)、ポリスチレン(PS)などのビニール重合体(41)類、ナイロン6、ナイロン11、ナイロン12、ナイロン66などのナイロン類、その他ポリカーボネート(PC)、ポリエチレンテレフタルレート(PET)、アクリロニトリル-ブタジエン-スチレン共重合体(ABS)、スチレン-アクリロニトリル共重合体(SAN)、ポリフェニレンスルフィド(PPS)、ポリエーテルイミド樹脂(PEI)、ポリイミド(PI)、変性ポリフェニレンオキサイド(MPPO)、変性ポリスルフォン(MPSU ; Modified polysulfone)、変性ポリエーテル(MPES ; Modified polyether)及びポリエーテルエーテルケトン(PEEK)などが挙げられる。 As the three-dimensional polymer (41) as a workpiece to be processed by the surface treatment apparatus and the surface treatment method according to the present invention, all known types of polymers are possible, preferably low-density polyethylene ( LDPE), linear low density polyethylene (LLDPE), high density polyethylene (HDPE), polypropylene (PP), polystyrene (PS) and other vinyl polymers (41), nylon 6, nylon 11, nylon 12, nylon 66 Other nylons, other polycarbonate (PC), polyethylene terephthalate (PET), acrylonitrile-butadiene-styrene copolymer (ABS), styrene-acrylonitrile copolymer (SAN), polyphenylene sulfide (PPS), polyetherimide resin (PEI), polyimide (PI), modified polyphenylene oxide (MPPO), modified polysulfone (MPSU; Modified polysulfone), modified polyether (MPES; Modified polyether) and polyetheretherketone (PEEK).
以下で本発明の望ましい実施例及び比較例について説明する。
以下の実施例は、本発明を例証するためのものであって、本発明の範囲を局限させるものではない。
Hereinafter, preferred examples and comparative examples of the present invention will be described.
The following examples are intended to illustrate the invention and do not limit the scope of the invention.
（実施例1及び2）
図1に図示したような装置を用いて引入室(11)内に処理しようとする被加工物としてポリエチレン製の立体状重合体(41)物品を引入させた後、引入室(11)内を減圧、脱気させて真空化し、真空化が完了した後、続いて引入室(11)内の立体状重合体(41)物品を移送させながらプラズマ表面処理を行い、表面処理の工程条件を下記表1のように行った後、引出室(31)内部を減圧、脱気させて真空化した後、表面処理が完了した立体状重合体(41)物品を真空化された上記引出室(31)内に移送させた後、最終的に引出室(31)外に引出させる方法で連続表面処理を行い、その結果として、工程時のイオン密度及び処理後の被加工物としての立体状重合体の表面抵抗を測定して同様に表1に現わした。
Using the apparatus shown in FIG. 1, after introducing a three-dimensional polymer (41) article made of polyethylene as a workpiece to be processed into the inlet chamber (11), the inside of the inlet chamber (11) is After vacuuming by depressurization and deaeration, the plasma surface treatment is performed while transferring the steric polymer (41) article in the inlet chamber (11), and the surface treatment process conditions are as follows: After carrying out as shown in Table 1, the inside of the drawer chamber (31) was depressurized, degassed and evacuated, and then the three-dimensional polymer (41) article whose surface treatment was completed was evacuated to the above-described drawer chamber (31 ), And finally, the surface is subjected to a surface treatment by a method of drawing out of the drawing chamber (31). As a result, the ion density during the process and the three-dimensional polymer as the workpiece after the treatment are processed. The surface resistance was measured and the results were similarly shown in Table 1.
したがって、本発明によると107ないし108Ω/cm2の低い表面抵抗を達成して立体状重合体(41)の表面の帯電防止及び伝導性などを向上させることができ、特に立体状重合体(41)を連続的に表面処理することができるようにすることで大量生産を容易にする効果がある。 Therefore, according to the present invention, it is possible to achieve a low surface resistance of 10 7 to 10 8 Ω / cm 2 and improve the antistatic property and conductivity of the surface of the steric polymer (41), and particularly the steric weight. By allowing the combined body (41) to be surface-treated continuously, there is an effect of facilitating mass production.
以上で本発明は記載した具体例についてのみ詳しく説明したが、本発明の技術思想範囲内で多様な変形及び修正が可能であることは当業者にとって明白であり、このような変形及び修正が添付の特許請求の範囲に属することは当然である。 Although the present invention has been described in detail only with the specific examples described above, it is obvious to those skilled in the art that various changes and modifications can be made within the scope of the technical idea of the present invention. Naturally, it belongs to the scope of claims.
11 引入室
21 処理室
24 グリッド
25 アンテナ
26 マッチングボックス
27 高周波電力供給装置
31 引出室
41 立体状重合体
51 移送装置
52 移送板
52 移送羽根
54 固定具
61 移送ローラ
71 ガス導入装置
72 ガス供給源
81 前処理室
82 送風機
83 第1断続弁
84 エアコンプレッサ
85 第2断続弁
87 第2前処理室
88 第2送風機
89 第3断続弁
90 第4断続弁
11 Entrance room
21 treatment room
24 grid
25 Antenna
26 Matching box
27 High frequency power supply equipment
31 drawer room
41 Stereopolymer
51 Transfer device
52 Transfer plate
52 Transfer blade
54 Fixture
61 Transfer roller
71 Gas introduction device
72 Gas supply source
81 Pretreatment room
82 Blower
83 First intermittent valve
84 Air compressor
85 Second intermittent valve
87 Second pretreatment chamber
88 Second blower
89 3rd intermittent valve
90 4th intermittent valve
Claims (9)
上記処理室の前後に互いに隣接して取り付けられる、脱気可能な引入室と脱気可能な引出室と、上記引入室、処理室及び引出室を順次に経由するように取り付けられる移送装置と、上記移送装置を駆動する移送手段を含んでなり、上記引入室と、上記引出室と、上記引入室と処理室の間の隔壁及び上記処理室と引出室の間の隔壁に上記移送装置が通過することができる自動開閉が可能なドアを含んでなることを特徴とする立体状重合体の連続表面処理装置。 A high-frequency power supply device, a high-frequency supply unit including a matching box and an antenna for generating plasma and ion implantation, and a gas introduction device for supplying a process gas to be ionized for forming the plasma are connected to the high-frequency power supply device. In a surface treatment apparatus including a gas supply source and a treatment chamber equipped with a vacuum pump,
A degassable inlet chamber and a degassable drawer chamber attached adjacent to each other before and after the treatment chamber, and a transfer device attached so as to sequentially pass through the inlet chamber, the treatment chamber, and the drawer chamber; And a transfer means for driving the transfer device, wherein the transfer device passes through the inlet chamber, the drawer chamber, a partition wall between the inlet chamber and the processing chamber, and a partition wall between the processing chamber and the extraction chamber. A continuous surface treatment apparatus for a three-dimensional polymer comprising a door that can be automatically opened and closed.
(1) 脱気可能な引入室内に処理しようとする立体状重合体物品を引入させる引入段階;
(2) 上記立体状重合体が引入された引入室内部を減圧、脱気させる第1真空化段階;
(3) 上記引入室内の立体状重合体を上記処理室に移送させる第1移送段階;
(4) 上記処理室内に移送された立体状重合体にプラズマを用いて表面処理する表面処理段階;
(5) 脱気可能な引出室内部を減圧、脱気させる第2真空化段階;
(6) 表面処理が完了した立体状重合体を真空化された上記引出室内に移送させる第2移送段階; 及び
(7) 上記引出室内の立体状重合体を外部に引き出す引出段階;
を含んでなることを特徴とする立体状重合体の連続表面処理方法。 In surface modification using plasma ion implantation technology,
(1) An introductory step of introducing a three-dimensional polymer article to be treated into a degassable inlet chamber;
(2) a first vacuum stage for depressurizing and degassing the inside of the inlet chamber into which the steric polymer has been introduced;
(3) a first transfer stage for transferring the three-dimensional polymer in the inlet chamber to the treatment chamber;
(4) a surface treatment step of surface-treating the three-dimensional polymer transferred into the treatment chamber using plasma;
(5) a second evacuation stage in which the inside of the drawable drawer chamber is depressurized and deaerated;
(6) a second transfer stage in which the surface-treated steric polymer is transferred into the evacuated drawer chamber; and
(7) A drawing step for drawing out the three-dimensional polymer in the drawing chamber to the outside;
A method for continuous surface treatment of a steric polymer, comprising:
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| KR10-2003-0050170A KR100439942B1 (en) | 2003-07-22 | 2003-07-22 | Continuous surface-treating apparatus for three-dimensional shape of polymer and continuous surface-treating method thereof |
| PCT/KR2003/002110 WO2005007728A1 (en) | 2003-07-22 | 2003-10-13 | Continuous surface-treating apparatus for three-dimensional shape of polymer and continuous surface-treating method thereof |
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| JP2008534731A (en) * | 2005-03-31 | 2008-08-28 | ク リム，ドク | Surface treatment equipment for multi-molecule molded products |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100593808B1 (en) * | 2004-02-18 | 2006-06-26 | 주식회사 에폰 | Continuous surface-treating apparatus for three-dimensional shape polymer and continuous surface-treating method thereof |
| KR100622037B1 (en) * | 2004-08-13 | 2006-09-13 | 김정자 | Continuous surface-treating apparatus for three-dimensional shape of polymer and continuous surface-treating method thereof |
| KR100672248B1 (en) * | 2005-01-03 | 2007-01-22 | 테스콤 주식회사 | Continuous metal thin layer depositing apparatus for three-dimensional shape of polymer and continuous metal thin layer depositing method thereof |
| KR101291877B1 (en) * | 2006-11-24 | 2013-07-31 | 엘지디스플레이 주식회사 | Surface processing apparatus |
| DE102014016380A1 (en) * | 2014-11-06 | 2016-05-12 | Brückner Maschinenbau GmbH & Co. KG | Plasma exhaust gas purification |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2811820B2 (en) * | 1989-10-30 | 1998-10-15 | 株式会社ブリヂストン | Continuous surface treatment method and apparatus for sheet material |
| KR0137704B1 (en) * | 1994-11-25 | 1998-06-01 | 김은영 | Dual mode plasma source ion implantation apparatus and surface modification |
| KR100217538B1 (en) * | 1996-04-10 | 1999-09-01 | 박호군 | Method for modifying a surface of polymeric material using plasma source ion implantation and apparatus therefor |
| AU742051B2 (en) * | 1997-07-14 | 2001-12-13 | University Of Tennessee Research Corporation, The | Plasma treater systems and treatment methods |
| KR100351516B1 (en) * | 2000-09-06 | 2002-09-05 | 한국과학기술연구원 | Method for Surface Modification of 3-Dimensional Bulk Polymers |
-
2003
- 2003-07-22 KR KR10-2003-0050170A patent/KR100439942B1/en not_active IP Right Cessation
- 2003-10-13 WO PCT/KR2003/002110 patent/WO2005007728A1/en active Application Filing
- 2003-10-13 AU AU2003269528A patent/AU2003269528A1/en not_active Abandoned
- 2003-10-13 JP JP2005504417A patent/JP2007520569A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008534731A (en) * | 2005-03-31 | 2008-08-28 | ク リム，ドク | Surface treatment equipment for multi-molecule molded products |
| JP4837028B2 (en) * | 2005-03-31 | 2011-12-14 | ク リム，ドク | Surface treatment equipment for multi-molecule molded products |
Also Published As
| Publication number | Publication date |
|---|---|
| AU2003269528A1 (en) | 2005-02-04 |
| KR20030066557A (en) | 2003-08-09 |
| WO2005007728A1 (en) | 2005-01-27 |
| KR100439942B1 (en) | 2004-07-12 |
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