JP2007506019A - 電磁ベアリング装置および真空ポンプ - Google Patents
電磁ベアリング装置および真空ポンプ Download PDFInfo
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- JP2007506019A JP2007506019A JP2006526501A JP2006526501A JP2007506019A JP 2007506019 A JP2007506019 A JP 2007506019A JP 2006526501 A JP2006526501 A JP 2006526501A JP 2006526501 A JP2006526501 A JP 2006526501A JP 2007506019 A JP2007506019 A JP 2007506019A
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- Prior art keywords
- bearing
- radial
- bearing device
- electromagnetic
- axial
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C39/00—Relieving load on bearings
- F16C39/06—Relieving load on bearings using magnetic means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0444—Details of devices to control the actuation of the electromagnets
- F16C32/0446—Determination of the actual position of the moving member, e.g. details of sensors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/0693—Details or arrangements of the wiring
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0459—Details of the magnetic circuit
- F16C32/0468—Details of the magnetic circuit of moving parts of the magnetic circuit, e.g. of the rotor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/047—Details of housings; Mounting of active magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0474—Active magnetic bearings for rotary movement
- F16C32/0489—Active magnetic bearings for rotary movement with active support of five degrees of freedom, e.g. two radial magnetic bearings combined with an axial bearing
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C39/00—Relieving load on bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Description
a.上部ラジアルセンサ
b.上部ラジアルベアリング
c.駆動モータ
d.下部ラジアルベアリング
e.下部ラジアルセンサ
f.軸方向ベアリング
g.軸方向センサ
軸方向センサは、通常はシャフト下部端縁部の下側に設置される。さらに、例えばセンサを追加設置して、回転周波数のモニタリングを行なう。これらの配置は、マエジマらの米国特許第6,465,924号明細書に開示される(例えば、同書面の図5を参照)。
Claims (11)
- 回転軸(101)の周りを回転するロータ(19)を回転自在に支持するための電磁ベアリング装置で、電磁ベアリング装置(1)は、第一作動ラジアルベアリング(5)、一つまたは複数の第一ラジアル変位センサ(81)、並びに軸方向ベアリング(6、7)からなり、軸方向ベアリング(6)の少なくとも一部分が、回転軸(101)の正射影で見たときに、第一作動ラジアルベアリング(5)と第一ラジアル変位センサ(81)との間に配置されることを特徴とするベアリング装置。
- 電磁ベアリング装置は、第二作動ラジアルベアリング(2)を含み、第一作動ラジアルベアリング(5)は、回転軸(101)の正射影で見たときに、軸方向ベアリング(6,7)と第二作動ラジアルベアリング(2)との間に配置されることを特徴とする請求項1に記載の電磁ベアリング装置。
- 電磁ベアリング装置は、駆動モータ(4)と第二ラジアル変位センサ(31)を含み、駆動モータは、回転軸(101)の正射影で見たときに、第一作動ラジアルベアリングと第二作動ラジアルベアリングとの間に配置され、第二ラジアル変位センサ(31)は、回転軸(101)の正射影で見たときに、第二作動ラジアルベアリング(2)と駆動モータ(4)との間に配置されることを特徴とする請求項2に記載の電磁ベアリング装置。
- 回転軸ベアリング(6,7)は空隙部を設け、第一ラジアル変位センサ(81)は軸方向ベアリング(7)の空隙部内に延在することを特徴とする請求項1乃至3のいずれかに記載の電磁ベアリング装置。
- 電磁ベアリング装置は、さらに一つまたは複数の軸方向変位センサ(82)を含み、第一ラジアル変位センサ(81)と軸方向変位センサ(82)は単一の複合センサユニット(8)に統合されることを特徴とする請求項1乃至4のいずれかに記載の電磁ベアリング装置。
- 電磁ベアリング装置は、さらに一つまたは複数の角速度センサ(83)を含み、角速度センサ(83)は複合センサユニット(8)に統合されることを特徴とする請求項5に記載の電磁ベアリング装置。
- 電磁ベアリング装置(1)と電磁ベアリング装置(1)内で回転自在に支持されたロータ(19)からなる真空ポンプ、特にターボ分子真空ポンプであり、電磁ベアリング装置(1)は請求項1乃至6のいずれかに記載の電磁ベアリング装置である真空ポンプ。
- ポンプのロータ(19)の特性を規定するために用いられ、複合センサユニット(8)は、保持部材(809)と保持部材に取り付けられた複数のセンサ(81,82,83,84)からなり、センサ(81,82,83,84)の少なくとも一つはラジアル変位センサ(81)であり、センサ(81,82,83,84)の少なくとも一つは軸方向変位センサ(82)であることを特徴とする請求項1乃至6のいずれかに記載の電磁ベアリング装置用複合センサユニット。
- 保持部材(809)は電磁ベアリング装置内に配置するよう改良されることにより、軸方向ベアリング(6)の少なくとも一部が回転軸(101)の正射影で見たときに、第一作動ラジアルベアリング(5)と複合センサユニット(8)との間に配置されることを特徴とする請求項8に記載の複合センサユニット。
- 保持部材(809)は電磁ベアリング装置内に配置するよう改良されることにより、少なくとも部分的に電磁ベアリング装置の軸方向ベアリング(6、7)内に設けられた空隙部へ延在することを特徴とする請求項8または9に記載の複合センサユニット。
- 複合センサユニットからなるセンサ(81,82,83,84)の少なくとも一つが角速度センサ(83)であることを特徴とする請求項8乃至10に記載の複合センサユニット。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03405681.2 | 2003-09-17 | ||
EP03405681A EP1517042A1 (en) | 2003-09-17 | 2003-09-17 | Magnetic bearing device and vacuum pump |
PCT/CH2004/000553 WO2005026557A1 (en) | 2003-09-17 | 2004-09-02 | Magnetic bearing device and vacuum pump |
Publications (2)
Publication Number | Publication Date |
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JP2007506019A true JP2007506019A (ja) | 2007-03-15 |
JP4767853B2 JP4767853B2 (ja) | 2011-09-07 |
Family
ID=34178683
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006526501A Expired - Fee Related JP4767853B2 (ja) | 2003-09-17 | 2004-09-02 | 電磁ベアリング装置および真空ポンプ |
Country Status (6)
Country | Link |
---|---|
US (1) | US7633201B2 (ja) |
EP (2) | EP1517042A1 (ja) |
JP (1) | JP4767853B2 (ja) |
KR (1) | KR101074319B1 (ja) |
CN (1) | CN100580255C (ja) |
WO (1) | WO2005026557A1 (ja) |
Cited By (2)
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JP2010096098A (ja) * | 2008-10-16 | 2010-04-30 | Shimadzu Corp | 真空ポンプ |
JP2011033027A (ja) * | 2009-08-01 | 2011-02-17 | Pfeiffer Vacuum Gmbh | ターボ分子ポンプ・ロータ |
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JP3169892B2 (ja) * | 1998-04-28 | 2001-05-28 | セイコー精機株式会社 | ターボ分子ポンプ装置 |
JP3130890B2 (ja) * | 1999-02-25 | 2001-01-31 | セイコー精機株式会社 | 磁気軸受装置及び磁気軸受制御装置 |
JP3349679B2 (ja) | 1999-03-31 | 2002-11-25 | ビーオーシーエドワーズテクノロジーズ株式会社 | 磁気軸受装置及びこれを備えた真空ポンプ |
JP2002013532A (ja) * | 2000-06-28 | 2002-01-18 | Koyo Seiko Co Ltd | 磁気軸受制御装置 |
DE10151988A1 (de) * | 2000-11-09 | 2002-05-23 | Heidelberger Druckmasch Ag | Verfahren und Vorrichtung zur Ausrichtung flächiger Exemplare in bogenverarbeitenden Maschinen |
JP2004286045A (ja) * | 2003-03-19 | 2004-10-14 | Boc Edwards Kk | 磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置 |
JP4476694B2 (ja) * | 2003-06-25 | 2010-06-09 | 株式会社荏原製作所 | 磁気軸受装置および磁気軸受装置を備えた流体機械 |
-
2003
- 2003-09-17 EP EP03405681A patent/EP1517042A1/en not_active Withdrawn
-
2004
- 2004-09-02 US US10/572,358 patent/US7633201B2/en not_active Expired - Fee Related
- 2004-09-02 WO PCT/CH2004/000553 patent/WO2005026557A1/en active Application Filing
- 2004-09-02 EP EP04761893.9A patent/EP1668252B1/en not_active Not-in-force
- 2004-09-02 CN CN200480024664A patent/CN100580255C/zh not_active Expired - Fee Related
- 2004-09-02 JP JP2006526501A patent/JP4767853B2/ja not_active Expired - Fee Related
-
2006
- 2006-03-16 KR KR1020067005335A patent/KR101074319B1/ko active IP Right Grant
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JPH1018991A (ja) * | 1996-05-02 | 1998-01-20 | Ebara Corp | ターボ分子ポンプ |
JP2000274391A (ja) * | 1999-03-23 | 2000-10-03 | Seiko Seiki Co Ltd | オーバーハング型ターボ分子ポンプ |
US20030155829A1 (en) * | 2002-02-20 | 2003-08-21 | Calnetix | Method and apparatus for providing three axis magnetic bearing having permanent magnets mounted on radial pole stack |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010096098A (ja) * | 2008-10-16 | 2010-04-30 | Shimadzu Corp | 真空ポンプ |
JP2011033027A (ja) * | 2009-08-01 | 2011-02-17 | Pfeiffer Vacuum Gmbh | ターボ分子ポンプ・ロータ |
Also Published As
Publication number | Publication date |
---|---|
EP1517042A1 (en) | 2005-03-23 |
US7633201B2 (en) | 2009-12-15 |
CN1842655A (zh) | 2006-10-04 |
KR20060076776A (ko) | 2006-07-04 |
WO2005026557A1 (en) | 2005-03-24 |
US20070024138A1 (en) | 2007-02-01 |
JP4767853B2 (ja) | 2011-09-07 |
CN100580255C (zh) | 2010-01-13 |
EP1668252B1 (en) | 2013-12-11 |
EP1668252A1 (en) | 2006-06-14 |
KR101074319B1 (ko) | 2011-10-17 |
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