JP2007325915A - 吸汗性シートおよび使い捨ておむつ - Google Patents
吸汗性シートおよび使い捨ておむつ Download PDFInfo
- Publication number
- JP2007325915A JP2007325915A JP2007107531A JP2007107531A JP2007325915A JP 2007325915 A JP2007325915 A JP 2007325915A JP 2007107531 A JP2007107531 A JP 2007107531A JP 2007107531 A JP2007107531 A JP 2007107531A JP 2007325915 A JP2007325915 A JP 2007325915A
- Authority
- JP
- Japan
- Prior art keywords
- sweat
- sheet
- quaternary ammonium
- ammonium salt
- absorbent sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002250 absorbent Substances 0.000 title claims abstract description 42
- 210000004243 sweat Anatomy 0.000 title abstract description 24
- 230000002745 absorbent Effects 0.000 title abstract description 10
- 150000003242 quaternary ammonium salts Chemical group 0.000 claims abstract description 28
- 229920003043 Cellulose fiber Polymers 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims abstract description 9
- 239000000835 fiber Substances 0.000 claims description 28
- 229940079593 drug Drugs 0.000 claims description 17
- 239000003814 drug Substances 0.000 claims description 17
- YMKDRGPMQRFJGP-UHFFFAOYSA-M cetylpyridinium chloride Chemical compound [Cl-].CCCCCCCCCCCCCCCC[N+]1=CC=CC=C1 YMKDRGPMQRFJGP-UHFFFAOYSA-M 0.000 claims description 5
- 229960000686 benzalkonium chloride Drugs 0.000 claims description 4
- UREZNYTWGJKWBI-UHFFFAOYSA-M benzethonium chloride Chemical compound [Cl-].C1=CC(C(C)(C)CC(C)(C)C)=CC=C1OCCOCC[N+](C)(C)CC1=CC=CC=C1 UREZNYTWGJKWBI-UHFFFAOYSA-M 0.000 claims description 4
- 229960001950 benzethonium chloride Drugs 0.000 claims description 4
- 229960001927 cetylpyridinium chloride Drugs 0.000 claims description 4
- XIWFQDBQMCDYJT-UHFFFAOYSA-M benzyl-dimethyl-tridecylazanium;chloride Chemical compound [Cl-].CCCCCCCCCCCCC[N+](C)(C)CC1=CC=CC=C1 XIWFQDBQMCDYJT-UHFFFAOYSA-M 0.000 claims 1
- 239000003242 anti bacterial agent Substances 0.000 abstract description 5
- 239000003795 chemical substances by application Substances 0.000 abstract description 4
- 239000004615 ingredient Substances 0.000 abstract 2
- 210000003491 skin Anatomy 0.000 description 19
- 239000000306 component Substances 0.000 description 18
- 238000012360 testing method Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 239000004745 nonwoven fabric Substances 0.000 description 7
- 230000003014 reinforcing effect Effects 0.000 description 7
- 210000001519 tissue Anatomy 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 208000010201 Exanthema Diseases 0.000 description 5
- 239000012153 distilled water Substances 0.000 description 5
- 201000005884 exanthem Diseases 0.000 description 5
- 206010037844 rash Diseases 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 241000191963 Staphylococcus epidermidis Species 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 3
- 208000008454 Hyperhidrosis Diseases 0.000 description 3
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- CADWTSSKOVRVJC-UHFFFAOYSA-N benzyl(dimethyl)azanium;chloride Chemical compound [Cl-].C[NH+](C)CC1=CC=CC=C1 CADWTSSKOVRVJC-UHFFFAOYSA-N 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 238000010828 elution Methods 0.000 description 3
- 239000011780 sodium chloride Substances 0.000 description 3
- 239000012209 synthetic fiber Substances 0.000 description 3
- 229920002994 synthetic fiber Polymers 0.000 description 3
- 229920001169 thermoplastic Polymers 0.000 description 3
- 239000004416 thermosoftening plastic Substances 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- -1 polypropylene Polymers 0.000 description 2
- 239000012266 salt solution Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 208000013460 sweaty Diseases 0.000 description 2
- 238000012549 training Methods 0.000 description 2
- OQXBPCPZNLQMTK-UHFFFAOYSA-N 1-decylpyridin-1-ium-4-carboxamide;bromide Chemical compound [Br-].CCCCCCCCCC[N+]1=CC=C(C(N)=O)C=C1 OQXBPCPZNLQMTK-UHFFFAOYSA-N 0.000 description 1
- SPFVNQBOHYXSMM-UHFFFAOYSA-M 1-decylpyridin-1-ium;bromide Chemical compound [Br-].CCCCCCCCCC[N+]1=CC=CC=C1 SPFVNQBOHYXSMM-UHFFFAOYSA-M 0.000 description 1
- 241000894006 Bacteria Species 0.000 description 1
- LZZYPRNAOMGNLH-UHFFFAOYSA-M Cetrimonium bromide Chemical compound [Br-].CCCCCCCCCCCCCCCC[N+](C)(C)C LZZYPRNAOMGNLH-UHFFFAOYSA-M 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 208000033830 Hot Flashes Diseases 0.000 description 1
- 206010060800 Hot flush Diseases 0.000 description 1
- 206010021639 Incontinence Diseases 0.000 description 1
- 206010061218 Inflammation Diseases 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 108010039918 Polylysine Proteins 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 208000006981 Skin Abnormalities Diseases 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 125000005211 alkyl trimethyl ammonium group Chemical group 0.000 description 1
- 229940069521 aloe extract Drugs 0.000 description 1
- 229940124350 antibacterial drug Drugs 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- ICMYIQTVBRLNEE-UHFFFAOYSA-N decyl(dimethyl)azanium;chloride Chemical compound Cl.CCCCCCCCCCN(C)C ICMYIQTVBRLNEE-UHFFFAOYSA-N 0.000 description 1
- UDYQCQBHIJDJST-UHFFFAOYSA-M decyl-dimethyl-(7-methyloctyl)azanium fluoride Chemical compound [F-].CCCCCCCCCC[N+](C)(C)CCCCCCC(C)C UDYQCQBHIJDJST-UHFFFAOYSA-M 0.000 description 1
- 210000004207 dermis Anatomy 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 150000005690 diesters Chemical class 0.000 description 1
- 230000000857 drug effect Effects 0.000 description 1
- 210000002615 epidermis Anatomy 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000004128 high performance liquid chromatography Methods 0.000 description 1
- 230000004054 inflammatory process Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000656 polylysine Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 102220288073 rs151218932 Human genes 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000035900 sweating Effects 0.000 description 1
Images
Classifications
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F13/00—Bandages or dressings; Absorbent pads
- A61F13/15—Absorbent pads, e.g. sanitary towels, swabs or tampons for external or internal application to the body; Supporting or fastening means therefor; Tampon applicators
- A61F13/84—Accessories, not otherwise provided for, for absorbent pads
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L15/00—Chemical aspects of, or use of materials for, bandages, dressings or absorbent pads
- A61L15/16—Bandages, dressings or absorbent pads for physiological fluids such as urine or blood, e.g. sanitary towels, tampons
- A61L15/42—Use of materials characterised by their function or physical properties
- A61L15/46—Deodorants or malodour counteractants, e.g. to inhibit the formation of ammonia or bacteria
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2300/00—Biologically active materials used in bandages, wound dressings, absorbent pads or medical devices
- A61L2300/20—Biologically active materials used in bandages, wound dressings, absorbent pads or medical devices containing or releasing organic materials
- A61L2300/204—Biologically active materials used in bandages, wound dressings, absorbent pads or medical devices containing or releasing organic materials with nitrogen-containing functional groups, e.g. aminoxides, nitriles, guanidines
- A61L2300/208—Quaternary ammonium compounds
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2300/00—Biologically active materials used in bandages, wound dressings, absorbent pads or medical devices
- A61L2300/40—Biologically active materials used in bandages, wound dressings, absorbent pads or medical devices characterised by a specific therapeutic activity or mode of action
- A61L2300/404—Biocides, antimicrobial agents, antiseptic agents
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Veterinary Medicine (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Animal Behavior & Ethology (AREA)
- Chemical & Material Sciences (AREA)
- Hematology (AREA)
- Materials Engineering (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Vascular Medicine (AREA)
- Absorbent Articles And Supports Therefor (AREA)
Abstract
【解決手段】吸汗性シート21が、基材シート21aと、基材シート21aに含まれる薬剤成分とからなる。薬剤成分は、第4級アンモニウム塩であって、セルロース繊維を含む基材シート21aは、それに第4級アンモニウム塩の溶液を浸漬させた後に乾燥させて、第4級アンモニウム塩と一体になっている。吸汗性シート21は、使い捨ておむつに取り付けて使用することができる。
【選択図】図2
Description
この発明は、肌に当てて使用しているときに、汗をかいた肌に対して清涼感を与えると同時に、あせもの発症に関係すると考えられる菌の増殖を抑制することが可能な吸汗性シートの提供を課題にしている。
2 内面(内面シート)
3 外面(外面シート)
6 前胴周り域
7 後胴周り域
8 股下域
21 吸汗性シート
21a 基材シート
23 吸水性繊維(パルプ繊維)
Claims (6)
- 吸水性繊維を含む繊維集合体で形成された基材シートと、前記基材シートに含まれる薬剤成分とからなる吸汗性シートであって、
前記吸水性繊維が少なくともセルロース繊維を含み、前記薬剤成分が第4級アンモニウム塩であり、前記基材シートが、それに前記第4級アンモニウム塩の溶液を浸漬させた後に乾燥させて、前記第4級アンモニウム塩と一体になっていることを特徴とする前記吸汗性シート。 - 前記第4級アンモニウム塩が、塩化セチルピリジニウム、塩化ベンザルコニウム、塩化ベンゼトニウムのいずれかである請求項1記載の吸汗性シート。
- 前記基材シートと一体の前記第4級アンモニウム塩の量が0.012〜0.176重量%である請求項1または2記載の吸汗性シート。
- 前記基材シートと一体の前記第4級アンモニウム塩の量が0.029〜0.088重量%である請求項1または2記載の吸汗性シート。
- 前記基材シートが前記セルロース繊維としてパルプ繊維を使用して形成されたティシューペーパである請求項1〜4のいずれかに記載の吸汗性シート。
- 前胴周り域と後胴周り域とこれら両域間に介在する股下域とを有し、内面が肌当接側となり外面が着衣当接側となる使い捨てのおむつであって、
前記前胴周り域と前記後胴周り域と前記股下域とのうちの少なくとも前記後胴周り域における前記内面に請求項1〜5のいずれかに記載の吸汗性シートが取り付けられていることを特徴とする前記おむつ。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007107531A JP5047674B2 (ja) | 2006-05-12 | 2007-04-16 | 使い捨ておむつ |
US11/746,159 US8093447B2 (en) | 2006-05-12 | 2007-05-09 | Sweat-absorbent sheet and disposable diaper having the same |
EP07743068.4A EP2018836B1 (en) | 2006-05-12 | 2007-05-10 | DISPOSABLE DIAPER comprising a SWEAT-ABSORBABLE SHEET |
KR1020087024919A KR20090019771A (ko) | 2006-05-12 | 2007-05-10 | 땀 흡수성 시트 및 일회용 기저귀 |
CN200780017226.0A CN101453972B (zh) | 2006-05-12 | 2007-05-10 | 吸汗性片材及一次性尿布 |
PCT/JP2007/059633 WO2007132719A1 (ja) | 2006-05-12 | 2007-05-10 | 吸汗性シートおよび使い捨ておむつ |
MYPI20084451A MY147825A (en) | 2006-05-12 | 2007-05-10 | Sweat-absorbent sheet and disposable diaper having the same |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006134522 | 2006-05-12 | ||
JP2006134522 | 2006-05-12 | ||
JP2007107531A JP5047674B2 (ja) | 2006-05-12 | 2007-04-16 | 使い捨ておむつ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007325915A true JP2007325915A (ja) | 2007-12-20 |
JP5047674B2 JP5047674B2 (ja) | 2012-10-10 |
Family
ID=38686060
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007107531A Active JP5047674B2 (ja) | 2006-05-12 | 2007-04-16 | 使い捨ておむつ |
Country Status (6)
Country | Link |
---|---|
US (1) | US8093447B2 (ja) |
EP (1) | EP2018836B1 (ja) |
JP (1) | JP5047674B2 (ja) |
KR (1) | KR20090019771A (ja) |
MY (1) | MY147825A (ja) |
WO (1) | WO2007132719A1 (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013128677A (ja) * | 2011-12-21 | 2013-07-04 | Unicharm Corp | 使い捨て着用物品 |
WO2014069245A1 (ja) | 2012-10-31 | 2014-05-08 | 富士フイルム株式会社 | 化学増幅型レジスト膜のパターニング用有機系処理液、及び、化学増幅型レジスト膜のパターニング用有機系処理液の収容容器、並びに、これらを使用したパターン形成方法、電子デバイスの製造方法、及び、電子デバイス |
JP2016168133A (ja) * | 2015-03-11 | 2016-09-23 | 花王株式会社 | 薄葉紙 |
KR20170048505A (ko) | 2014-09-30 | 2017-05-08 | 후지필름 가부시키가이샤 | 레지스트막의 패터닝용 유기계 처리액, 레지스트막의 패터닝용 유기계 처리액의 제조 방법, 및 레지스트막의 패터닝용 유기계 처리액의 수용 용기와, 이들을 사용한 패턴 형성 방법, 및 전자 디바이스의 제조 방법 |
JP3217273U (ja) * | 2018-05-18 | 2018-07-26 | ユニ・チャーム株式会社 | 吸収性物品 |
US10088752B2 (en) | 2013-04-02 | 2018-10-02 | Fujifilm Corporation | Method for manufacturing organic processing fluid for patterning of chemical amplification type resist film, organic processing fluid for patterning of chemical amplification type resist film, pattern forming method, method for manufacturing electronic device, and electronic device |
KR20180115786A (ko) | 2016-03-31 | 2018-10-23 | 후지필름 가부시키가이샤 | 전자 재료 제조용 약액의 제조 방법, 패턴 형성 방법, 반도체 디바이스의 제조 방법, 전자 재료 제조용 약액, 용기, 및 품질 검사 방법 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5150159B2 (ja) * | 2007-08-03 | 2013-02-20 | ユニ・チャーム株式会社 | 使い捨ておむつ |
US9533479B2 (en) | 2008-09-18 | 2017-01-03 | Medline Industries, Inc. | Absorbent articles having antimicrobial properties and methods of manufacturing the same |
US9717818B2 (en) | 2009-05-08 | 2017-08-01 | Medline Industries, Inc. | Absorbent articles having antimicrobial properties and methods of manufacturing the same |
US20130165880A1 (en) | 2010-09-17 | 2013-06-27 | David T. Amos | Antimicrobial disposable absorbent articles |
US20150216741A1 (en) * | 2014-01-27 | 2015-08-06 | The One Services, LLC | Method of Using Absorbent Sheets to Collect Sweat from Body Creases |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0358A (ja) * | 1989-03-20 | 1991-01-07 | Procter & Gamble Co:The | 制臭材料を有する吸収性構造物 |
JPH11200245A (ja) * | 1998-01-08 | 1999-07-27 | Kobayashi Pharmaceut Co Ltd | 抗菌シート及び衛生用品 |
JP2004358099A (ja) * | 2003-06-06 | 2004-12-24 | Kao Corp | 吸収性物品 |
Family Cites Families (13)
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GB958259A (en) | 1961-06-30 | 1964-05-21 | Sigbritt Wettergren | A baby's diaper of cellulosic material and a method of preparing the same |
US4615937A (en) | 1985-09-05 | 1986-10-07 | The James River Corporation | Antimicrobially active, non-woven web used in a wet wiper |
GB8830266D0 (en) * | 1988-12-24 | 1989-02-22 | Laporte Industries Ltd | Absorbent material |
IT1295974B1 (it) | 1996-11-04 | 1999-05-28 | Claudio Risicato | Composizione disinfettante in particolare per la prevenzione di dermatiti da pannolino |
MXPA01003998A (es) | 1998-10-23 | 2003-03-10 | Dexter Corp | Compuesto no tejido para aplicaciones de moldeo de polimeros. |
JP3820043B2 (ja) | 1998-12-28 | 2006-09-13 | ユニ・チャーム株式会社 | 使い捨ておむつ |
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WO2004041312A2 (en) | 2002-10-31 | 2004-05-21 | Polymer Group Inc. | Anti-microbial nonwoven wipe |
US7834233B2 (en) * | 2004-08-02 | 2010-11-16 | First Quality Product, Inc. | Reduction of odors in absorbent articles |
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-
2007
- 2007-04-16 JP JP2007107531A patent/JP5047674B2/ja active Active
- 2007-05-09 US US11/746,159 patent/US8093447B2/en not_active Expired - Fee Related
- 2007-05-10 KR KR1020087024919A patent/KR20090019771A/ko not_active Application Discontinuation
- 2007-05-10 EP EP07743068.4A patent/EP2018836B1/en not_active Not-in-force
- 2007-05-10 MY MYPI20084451A patent/MY147825A/en unknown
- 2007-05-10 WO PCT/JP2007/059633 patent/WO2007132719A1/ja active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0358A (ja) * | 1989-03-20 | 1991-01-07 | Procter & Gamble Co:The | 制臭材料を有する吸収性構造物 |
JPH11200245A (ja) * | 1998-01-08 | 1999-07-27 | Kobayashi Pharmaceut Co Ltd | 抗菌シート及び衛生用品 |
JP2004358099A (ja) * | 2003-06-06 | 2004-12-24 | Kao Corp | 吸収性物品 |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013128677A (ja) * | 2011-12-21 | 2013-07-04 | Unicharm Corp | 使い捨て着用物品 |
WO2014069245A1 (ja) | 2012-10-31 | 2014-05-08 | 富士フイルム株式会社 | 化学増幅型レジスト膜のパターニング用有機系処理液、及び、化学増幅型レジスト膜のパターニング用有機系処理液の収容容器、並びに、これらを使用したパターン形成方法、電子デバイスの製造方法、及び、電子デバイス |
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US10705428B2 (en) | 2012-10-31 | 2020-07-07 | Fujifilm Corporation | Organic processing liquid for patterning chemical amplification resist film, container for organic processing liquid for patterning chemical amplification resist film, and pattern forming method, method of manufacturing electronic device, and electronic device using the same |
US10088752B2 (en) | 2013-04-02 | 2018-10-02 | Fujifilm Corporation | Method for manufacturing organic processing fluid for patterning of chemical amplification type resist film, organic processing fluid for patterning of chemical amplification type resist film, pattern forming method, method for manufacturing electronic device, and electronic device |
KR20170048505A (ko) | 2014-09-30 | 2017-05-08 | 후지필름 가부시키가이샤 | 레지스트막의 패터닝용 유기계 처리액, 레지스트막의 패터닝용 유기계 처리액의 제조 방법, 및 레지스트막의 패터닝용 유기계 처리액의 수용 용기와, 이들을 사용한 패턴 형성 방법, 및 전자 디바이스의 제조 방법 |
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US11429018B2 (en) | 2016-03-31 | 2022-08-30 | Fujifilm Corporation | Method of manufacturing chemical fluid for manufacturing electronic material, pattern forming method, method of manufacturing semiconductor device, chemical fluid for manufacturing electronic material, container, and quality inspection method |
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EP2018836A1 (en) | 2009-01-28 |
KR20090019771A (ko) | 2009-02-25 |
US20070265590A1 (en) | 2007-11-15 |
EP2018836A4 (en) | 2011-06-29 |
MY147825A (en) | 2013-01-31 |
JP5047674B2 (ja) | 2012-10-10 |
WO2007132719A1 (ja) | 2007-11-22 |
US8093447B2 (en) | 2012-01-10 |
EP2018836B1 (en) | 2013-05-01 |
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