JP2007301567A - Method of manufacturing cooling plate, and cooling plate - Google Patents
Method of manufacturing cooling plate, and cooling plate Download PDFInfo
- Publication number
- JP2007301567A JP2007301567A JP2006129205A JP2006129205A JP2007301567A JP 2007301567 A JP2007301567 A JP 2007301567A JP 2006129205 A JP2006129205 A JP 2006129205A JP 2006129205 A JP2006129205 A JP 2006129205A JP 2007301567 A JP2007301567 A JP 2007301567A
- Authority
- JP
- Japan
- Prior art keywords
- cooling plate
- substrate
- groove
- tool
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Pressure Welding/Diffusion-Bonding (AREA)
Abstract
Description
本発明は、半導体製造装置やスパッタリング装置など各種装置の温度調節に用いられる冷却板の製造方法およびこの製造方法により得られる冷却板に関する。 The present invention relates to a manufacturing method of a cooling plate used for temperature control of various apparatuses such as a semiconductor manufacturing apparatus and a sputtering apparatus, and a cooling plate obtained by this manufacturing method.
例えば、半導体製造用のスパッタリング装置には、ターゲットを取り付けるバッキングプレートが用いられている。このようなバッキングプレートは、ターゲットを冷却するために、その内部に例えば全体として蛇行状或いは分岐・合流状に形成され、互いに平行して配置された冷媒の流路を形成した冷却板からなる。 For example, a backing plate for attaching a target is used in a sputtering apparatus for manufacturing a semiconductor. In order to cool the target, such a backing plate is formed of a cooling plate, for example, formed in a meandering shape or in a branched / merged shape as a whole inside thereof and formed with coolant flow paths arranged parallel to each other.
この種の冷却板として、下記の特許文献１には、アルミニウムまたはその合金等からなる金属板の表面に凹溝を設けその上に同様な凹溝を設けた金属板を重ね合わせ、金属板の周縁部および隣り合う各凹溝に挟まれた中央部に沿って摩擦撹拌接合することにより、上記両方の金属板に形成された一対の凹溝を冷媒の流路とする冷却板およびその製造方法が開示されている。 As this type of cooling plate, in Patent Document 1 below, a metal plate made of aluminum or an alloy thereof or the like is provided with a concave groove on the surface, and a metal plate provided with a similar concave groove thereon is overlaid. A cooling plate using a pair of concave grooves formed in both the metal plates as a refrigerant flow path by friction stir welding along a peripheral portion and a central portion sandwiched between adjacent concave grooves, and a method for manufacturing the same Is disclosed.
摩擦撹拌接合は、重ね合わせ部に高速回転するツールのプローブを強い力で挿入し、このツールを高速回転させながら凹溝の周辺に沿って移動させ、その時に発生する摩擦熱により重ね合わせ部の板材を可塑化して、ツールのショルダ部によって圧力を負荷しながら固相状態で接合するので、アーク溶接などの溶融溶接に比べて、接合部における接合強度が強いという利点がある。 In friction stir welding, a probe of a tool that rotates at high speed is inserted into the overlapping part with a strong force, and the tool is moved along the periphery of the groove while rotating at high speed. Since the plate material is plasticized and bonded in a solid phase state while applying pressure by the shoulder portion of the tool, there is an advantage that the bonding strength at the bonded portion is stronger than fusion welding such as arc welding.
ところが、上記従来の冷却板およびその製造方法にあっては、冷媒の流路は全面に蛇行状或いは分岐・合流状に形成され、平行に配置された隣り合う凹溝に挟まれた中央部に沿って摩擦撹拌接合が行われるため、凹溝から接合部に至る上下の金属板との間にはかなりの隙間が生じており、冷却板の使用中にこの隙間に冷媒が滲み込んで滞留し、その結果として腐蝕の進み具合が早くなるという欠点がある。 However, in the conventional cooling plate and the manufacturing method thereof, the flow path of the refrigerant is formed in a meandering shape, a branching / merging shape on the entire surface, and in the central portion sandwiched between adjacent concave grooves arranged in parallel. Therefore, there is a considerable gap between the upper and lower metal plates from the groove to the joint, and the refrigerant permeates and stays in this gap during use of the cooling plate. As a result, there is a drawback that the progress of corrosion is accelerated.
このような欠点を改善するために、特許文献１には、金属板の凹溝および重ね合わせ面に陽極酸化皮膜を形成し、さらに凹溝から接合部に至る上下の金属板の隙間を、金属素材からなる封止材（メタルフィッテイング）またはエポキシ樹脂などの耐水性接着剤からなる封止材により液密状態に封止する方法が提案されている。 In order to improve such a defect, Patent Document 1 discloses that an anodized film is formed on the groove and the overlapping surface of the metal plate, and a gap between the upper and lower metal plates extending from the groove to the joint is formed in the metal. A method of sealing in a liquid-tight state with a sealing material made of a material (metal fitting) or a sealing material made of a water-resistant adhesive such as an epoxy resin has been proposed.
しかしながら、このような封止材などを用いる方法は、その作業に手間がかかり冷却板の製造効率が低下するという問題がある。また、上下両方の金属板の表面に冷媒の流路となる一対の凹溝を設けるので、両方の金属板が厚肉となるうえに切削による凹溝の形成作業に手間がかかり、そのため冷却板がコスト高になり、また製造効率が低下するという問題がある。
本発明は、上記のような従来の問題に鑑みてなされたものであり、その目的とするところは、封止材などを用いることなく、単に摩擦撹拌接合するだけで、接合部の隙間に冷媒が滲み込んで滞留することがなく、且つ接合部は十分な強度を有し信頼性の高い冷却板を低コストで効率よく製造する方法および冷却板を提供することにある。 The present invention has been made in view of the above-described conventional problems, and an object of the present invention is to provide a refrigerant in the gap between the joints simply by friction stir welding without using a sealing material or the like. It is an object of the present invention to provide a method and a cooling plate for efficiently manufacturing a reliable cooling plate at a low cost, in which a bonding portion has sufficient strength and does not stagnate.
上記の目的は、次のような特徴を有する冷却板の製造方法により達成される。
すなわち、請求項１に係る発明は、金属基板の表面に凹溝を設けその上を平たい金属蓋板で覆い、凹溝周辺の基板と蓋板との重ね合わせ部を摩擦撹拌接合することにより、上記凹溝を冷媒の流路とする冷却板の製造方法であって、摩擦撹拌接合装置のツールのプローブを、上記凹溝の側壁上端からプローブの外周に至る水平距離が４ｍｍ以内となるように設定して摩擦撹拌接合することを特徴とする冷却板の製造方法である。
The above object is achieved by a method for manufacturing a cooling plate having the following characteristics.
That is, the invention according to claim 1 is provided by forming a groove on the surface of the metal substrate, covering it with a flat metal cover plate, and friction stir welding the overlapping portion of the substrate and the cover plate around the groove, A method of manufacturing a cooling plate using the concave groove as a refrigerant flow path, wherein the horizontal distance from the upper end of the side wall of the concave groove to the outer periphery of the probe is within 4 mm. It is a manufacturing method of the cooling plate characterized by setting and carrying out friction stir welding.
また、請求項２に係る発明は、請求項１に係る発明において、摩擦撹拌接合装置のツールのプローブを、上記凹溝の側壁上端からプローブの外周に至る水平距離が１ｍｍ以内となるように設定して摩擦撹拌接合することを特徴とする冷却板の製造方法である。 The invention according to claim 2 is the invention according to claim 1, wherein the probe of the tool of the friction stir welding apparatus is set so that the horizontal distance from the upper end of the side wall of the groove to the outer periphery of the probe is within 1 mm. Then, the manufacturing method of the cooling plate is characterized by performing friction stir welding.
請求項３に係る発明は、請求項１および２に係る発明において、金属基板および金属蓋板が、アルミニウムまたはその合金からなることを特徴とする冷却板の製造方法である。 A third aspect of the invention is a method of manufacturing a cooling plate according to the first and second aspects of the invention, wherein the metal substrate and the metal cover plate are made of aluminum or an alloy thereof.
さらに、請求項４に係る発明は、金属基板の表面に凹溝が設けられ、その上に平たい金属蓋板が覆われており、凹溝周辺の基板と蓋板との重ね合わせ部が摩擦撹拌接合されることにより上記凹溝を冷媒の流路とされた冷却板であって、摩擦撹拌接合による接合部が凹溝の側壁上端に達していることを特徴する冷却板である。 Further, in the invention according to claim 4, a groove is provided on the surface of the metal substrate, and a flat metal cover plate is covered thereon, and the overlapping portion of the substrate and the cover plate around the groove is friction stir. It is a cooling plate in which the groove is used as a coolant flow path by being joined, and a joining portion formed by friction stir welding reaches the upper end of the side wall of the groove.
以下、図面を参照しながら本発明を詳細に説明する。
図１は本発明の冷却板の製造方法の一例を示す一部切欠斜視図、図２は図１のツール部における断面図である。図１および図２において、１０は金属基板であって、この基板１０の材質としては、摩擦撹拌接合が可能な金属、例えばアルミニウムおよびその合金をはじめ、マグネシウム合金、銅合金、チタン合金、ステンレス鋼などが使用される。また、基板１０の厚みは、通常、１０〜３０ｍｍとされるが、これに限定されない。
Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1 is a partially cutaway perspective view showing an example of a method for manufacturing a cooling plate according to the present invention, and FIG. 2 is a cross-sectional view of the tool portion of FIG. 1 and 2, reference numeral 10 denotes a metal substrate. The material of the substrate 10 is a metal capable of friction stir welding, such as aluminum and its alloys, magnesium alloys, copper alloys, titanium alloys, and stainless steels. Etc. are used. Moreover, although the thickness of the board | substrate 10 shall be 10-30 mm normally, it is not limited to this.
そして、上記基板１０の表面に、エンドミルやフライスなどの切削加工により凹溝１１が設けられる。この凹溝１１の断面形状は、通常、図示のような角型やＵ字型とされるが、これ等に限定されない。また、凹溝１１の平面形状は、通常、基板１０の全面に広がった蛇行形状や分岐・合流形状（１本の一端の凹溝から多数の凹溝が分岐し、これ等の凹溝が互いに平行に全面に延ばされたあと、１本の他端の凹溝に合流する）とされるが、これ等に限定されない。なお、凹溝１１を含む基板１０の表面には、陽極酸化皮膜処理や金属めっき処理を施して、強度向上や、耐冷媒腐蝕性を向上させてもよい。 And the groove 11 is provided in the surface of the said board | substrate 10 by cutting processes, such as an end mill and a mill. The cross-sectional shape of the concave groove 11 is usually a square shape or a U shape as shown in the figure, but is not limited thereto. In addition, the planar shape of the concave groove 11 is usually a meandering shape or a branching / merging shape spreading over the entire surface of the substrate 10 (a number of concave grooves branch from one concave groove at one end, and these concave grooves are mutually connected. After extending over the entire surface in parallel, it is merged into the concave groove at one other end), but is not limited thereto. Note that the surface of the substrate 10 including the concave grooves 11 may be subjected to an anodic oxide film treatment or metal plating treatment to improve the strength and the coolant corrosion resistance.
次に、上記凹溝１１が設けられた基板１０の上が平たい金属蓋板２０で覆われる。この蓋板２０の材質としては、基板１０と同様に摩擦撹拌接合が可能な金属、例えばアルミニウムおよびその合金をはじめ、マグネシウム合金、銅合金、チタン合金、鉄鋼などが使用される。また、蓋板２０の厚みは、通常、２〜６ｍｍとされるが、これ等に限定されない。なお、金属蓋板２０の表面（基板１０と対抗する面）には、上記基板１０と同様に陽極酸化皮膜処理や金属めっき処理を施しておいてもよい。 Next, the top of the substrate 10 provided with the concave groove 11 is covered with a flat metal lid plate 20. As the material of the cover plate 20, metals capable of friction stir welding similar to the substrate 10, for example, aluminum and its alloys, magnesium alloys, copper alloys, titanium alloys, steels and the like are used. Moreover, although the thickness of the cover plate 20 shall be 2-6 mm normally, it is not limited to these. The surface of the metal lid plate 20 (the surface facing the substrate 10) may be subjected to an anodic oxide film treatment or metal plating treatment in the same manner as the substrate 10.
その後、凹溝１１の周辺の基板１０と蓋板２０との重ね合わせ部が摩擦撹拌接合される。摩擦撹拌接合は、蓋板２０の表面の一端に、高速回転するツール４０のプローブ４１を強い力で挿入し、上記ツール４０（ショルダ部４２とプローブ４１）を高速回転させながら凹溝１１の周辺の基板１０と蓋板２０との重ね合わせ部に沿って他端に移動させ、その時に発生する摩擦熱により重ね合わせ部３０を可塑化し、ツール４０のショルダ部４２によって圧力を負荷しながら固相状態で接合される。なお、２１はツール４０の回転と移動により形成された加工痕、３０は重ね合わせ部に沿って接合された接合部である。 Thereafter, the overlapping portion of the substrate 10 and the cover plate 20 around the groove 11 is friction stir welded. In the friction stir welding, the probe 41 of the tool 40 that rotates at a high speed is inserted into one end of the surface of the lid plate 20 with a strong force, and the tool 40 (the shoulder portion 42 and the probe 41) is rotated at a high speed to surround the groove 11. Is moved to the other end along the overlapping portion of the substrate 10 and the cover plate 20, the overlapping portion 30 is plasticized by the frictional heat generated at that time, and a solid phase is applied while applying pressure by the shoulder portion 42 of the tool 40. Joined in state. Reference numeral 21 denotes a processing mark formed by the rotation and movement of the tool 40, and reference numeral 30 denotes a joining portion joined along the overlapping portion.
上記ツール４０は、径の大きいショルダ部４２とその先端にプローブ４１とを有し、基板１０および蓋板２０の材質よりも硬いＳＫＤ６１等のＳＫ或いはＳＫＤ工具鋼やＰＣＢＮ(ｐｏｌｙｃｒｙｓｔａｌｌｉｎｅ ｃｕｂｉｃ ｂｏｒｏｎ ｎｉｔｒｉｄｅ)などからなる。そして、通常、プローブ４１にはねじが切ってあるが、ねじが切ってないものも使用できる。また、厚みが３〜６ｍｍ程度の蓋板２０を使用する場合は、上記ツール４０のショルダ部４２の直径は１２〜１５ｍｍ程度で、プローブ４１の直径は４〜６ｍｍ程度のものが好適に使用される。また、上記プローブ４１の長さは、基板１０の中へ到達できるように蓋板２０の厚みよりも０．５〜３ｍｍ程度長くされる。 The tool 40 has a shoulder portion 42 having a large diameter and a probe 41 at its tip, and is SK or SKD tool steel, such as SKD61, which is harder than the material of the substrate 10 and the cover plate 20, PCBN (polycrystalline cubic boron), etc. Consists of. Usually, the probe 41 is threaded, but a probe that is not threaded can also be used. Moreover, when using the cover plate 20 having a thickness of about 3 to 6 mm, the diameter of the shoulder portion 42 of the tool 40 is about 12 to 15 mm, and the diameter of the probe 41 is about 4 to 6 mm. The In addition, the length of the probe 41 is about 0.5 to 3 mm longer than the thickness of the cover plate 20 so that it can reach into the substrate 10.
また、ショルダ部４２の面は、重ね合わせ部に沿った基板１０と蓋板２０とを押圧する必要があり、通常は蓋板２０と当接する面が平面であるもの或いはプローブ４１を中心としてやや円弧状または円錐状に凹んだものが使用されるが、場合によっては、プローブ４１を中心としてやや円弧状または円錐状に突起したもの或いは凹んだものも使用できる。さらに、これ等のショルダ部４２の面に渦巻き状の凹溝を形成したものも使用できる。 Further, the surface of the shoulder portion 42 needs to press the substrate 10 and the lid plate 20 along the overlapping portion. Usually, the surface abutting against the lid plate 20 is a plane or is slightly centered around the probe 41. An arcuate or conical recess is used, but depending on the case, a slightly arcuate or conical projection or a concavity with the probe 41 as the center can also be used. Further, those in which a spiral groove is formed on the surface of the shoulder portion 42 can also be used.
ツール４０の回転速度は、基板１０および蓋板２０の材質や蓋板２０の厚みなどにより異なるが、一般に数百〜数千回転／分、接合速度は一般に数十〜数百ｍｍ／分であるが、条件によっては１〜２ｍ／分も可能である。特に、本発明においては、基板１０および蓋板２０の材質がアルミニウムまたはその合金で、且つ蓋板２０の厚みが２〜６ｍｍの場合は、ツール４０の回転速度は６００〜１８００回転／分、接合速度は１００〜６００ｍｍ／分が、十分な接合強度を得るうえで好ましい。 The rotation speed of the tool 40 varies depending on the material of the substrate 10 and the cover plate 20, the thickness of the cover plate 20, and the like, but is generally several hundred to several thousand rotations / minute, and the joining speed is generally several tens to several hundreds mm / minute. However, depending on conditions, 1 to 2 m / min is possible. In particular, in the present invention, when the material of the substrate 10 and the cover plate 20 is aluminum or an alloy thereof and the thickness of the cover plate 20 is 2 to 6 mm, the rotation speed of the tool 40 is 600 to 1800 rotations / minute, The speed is preferably 100 to 600 mm / min for obtaining sufficient bonding strength.
しかして、本発明においては、図２に示すように、摩擦撹拌接合装置のツール４０のプローブ４１を、上記基板１０の凹溝１１の側壁上端からプローブ４１の外周に至る水平距離Ｄが常に４ｍｍ以内、好ましくは１ｍｍ以内となるように設定して摩擦撹拌接合を行う。この水平距離Ｄが４ｍｍを越えると、凹溝１１から接合部３０に至る上下の金属板との間の隙間の幅（非接合部の幅）が大きくなり過ぎて、冷却板の使用中にこの隙間に冷媒が滲み込んで滞留しやすくなり、その結果として腐蝕の進み具合が早くなる。 Accordingly, in the present invention, as shown in FIG. 2, the horizontal distance D from the upper end of the side wall of the groove 11 of the substrate 10 to the outer periphery of the probe 41 is always 4 mm. And preferably within 1 mm, friction stir welding is performed. If this horizontal distance D exceeds 4 mm, the width of the gap between the upper and lower metal plates from the groove 11 to the joint 30 (the width of the non-joint) becomes too large, and this is not possible during use of the cooling plate. The refrigerant soaks into the gap and tends to stay, and as a result, the progress of corrosion is accelerated.
また、上記隙間は亀裂と同様に振舞うので、この隙間の幅が４ｍｍを越えて大きくなり過ぎると隙間の奥の接合境界部に応力が集中して接合強度の低下を招き、冷却板の長期使用中や耐圧試験の際に破断しやすくなる。冷却板の長期使用中や耐圧試験の際に破断に至らないときでも、上記隙間の幅が４ｍｍを越えて大きくなると、冷媒の圧力により凹溝１１により形成された冷媒の流路上の蓋板２０が膨らんで平面性が損なわれ、その結果この種の冷却板として重要な面接触により被冷却体を冷却放熱する性能が損なわれる。 In addition, since the gap behaves like a crack, if the width of the gap exceeds 4 mm and becomes too large, stress concentrates on the junction boundary at the back of the gap, leading to a decrease in bonding strength, and long-term use of the cooling plate. It tends to break during medium and pressure tests. Even when the cooling plate does not break during long-term use or during a pressure test, when the width of the gap increases beyond 4 mm, the cover plate 20 on the refrigerant flow path formed by the groove 11 is formed by the pressure of the refrigerant. Swells and the flatness is impaired, and as a result, the ability to cool and dissipate the object to be cooled by surface contact important as this type of cooling plate is impaired.
上述のように、隙間への冷媒の滲み込み滞留、接合強度の低下および平面性の低下を総合的に検討した結果、上記水平距離Ｄの限界を４ｍｍ以内とすれば、確実に本発明の目的が達成され信頼性の高い冷却板を得ることができることを見出した。特に、上記水平距離Ｄを１〜２ｍｍに設定するのが望ましい。なお、上記水平距離Ｄを０ｍｍに設定すると凹溝１１の側壁が崩れることがあり、この条件は採用できない。一方、上記水平距離Ｄの上限は、ツール４０のショルダ部４２の外周が凹溝１１の側壁と同じ垂直位置となるようにするのが望ましい。 As described above, as a result of comprehensively examining the penetration and retention of the refrigerant in the gap, the decrease in bonding strength, and the decrease in flatness, the object of the present invention is ensured if the limit of the horizontal distance D is within 4 mm. It was found that a highly reliable cooling plate can be obtained. In particular, it is desirable to set the horizontal distance D to 1 to 2 mm. If the horizontal distance D is set to 0 mm, the side wall of the concave groove 11 may collapse, and this condition cannot be adopted. On the other hand, it is desirable that the upper limit of the horizontal distance D is such that the outer periphery of the shoulder portion 42 of the tool 40 is at the same vertical position as the side wall of the groove 11.
上記ツール４０は、通常、定盤軸（Ｘ）と横行軸（Ｙ）と昇降軸（Ｚ）の機械３軸および揺動軸（Ａ）と旋回軸（Ｃ）のツール２軸とからなる公知の５軸枠型の摩擦撹拌接合装置に取り付けられ、コンピュータ制御により所定の方向に回転および移動するように使用される。また、三つの関節軸と二つの回転軸を具備した公知のロボットアームの先端に搭載されたマシンヘッドに取り付けて使用されるが、これ等に限定されない。 The above-mentioned tool 40 is generally composed of a machine axis of a platen axis (X), a transverse axis (Y), a lifting axis (Z), and a tool axis of two swing axes (A) and a pivot axis (C). And is used so as to rotate and move in a predetermined direction by computer control. Moreover, although it attaches and uses for the machine head mounted in the front-end | tip of the well-known robot arm provided with three joint axes and two rotating shafts, it is not limited to these.
なお、ツール４０は一方向に回転しながら一端から他端に移動していくので、左右非対称の接合面となる。したがって、本発明においては、できるだけ左右対称の接合面が得られるように、ツール４０を往復の２パスで行うのが均一な接合強度を得るうえで好ましい。ツール４０を片道の１パスで行う場合はツール４０の回転方向は、凹溝１１のある側において、ツール４０の回転方向と移動方向とが同じ方向、すなわち、図１に示すようにツール４０をＡ方向に回転させながらＢ方向に移動させるのが接合強度の点で好ましい。 Since the tool 40 moves from one end to the other while rotating in one direction, it becomes a left-right asymmetric joint surface. Therefore, in the present invention, in order to obtain a uniform joining strength, it is preferable to perform the tool 40 in two reciprocating passes so that a joining surface as symmetrical as possible is obtained as much as possible. When the tool 40 is performed in one way in one way, the rotation direction of the tool 40 is the same direction as the rotation direction and the movement direction of the tool 40 on the side where the concave groove 11 is present, that is, as shown in FIG. It is preferable in terms of bonding strength to move in the B direction while rotating in the A direction.
こうして、基板１０と蓋板２０とで囲まれた凹溝１１を冷媒の流路とする本発明の冷却板が得られる。本発明方法で得られる冷却板は、金属基板の表面に凹溝が設けられ、その上に平たい金属蓋板が覆われており、凹溝周辺の基板と蓋板との重ね合わせ部が摩擦撹拌接合されることにより上記凹溝を冷媒の流路とされた冷却板であって、特に摩擦撹拌接合による接合部が凹溝の側壁上端に達しているものが、本発明の目的を達成するうえで好ましい。そして、本発明で得られる冷却板は、薄型とすることが可能で、半導体製造装置やスパッタリング装置など各種装置の温度調節に好適に用いられる。 Thus, the cooling plate of the present invention is obtained in which the concave groove 11 surrounded by the substrate 10 and the cover plate 20 is used as the coolant flow path. The cooling plate obtained by the method of the present invention is provided with a groove on the surface of the metal substrate, covered with a flat metal lid plate, and the overlapping portion of the substrate and the lid plate around the groove is friction stir. In order to achieve the object of the present invention, a cooling plate in which the concave groove is used as a refrigerant flow path by being joined, and in particular, a joint portion by friction stir welding reaches the upper end of the side wall of the concave groove. Is preferable. And the cooling plate obtained by this invention can be made thin, and it is used suitably for temperature control of various apparatuses, such as a semiconductor manufacturing apparatus and a sputtering apparatus.
本発明によれば、アルミニウム合金等の金属基板の表面に凹溝を設けその上をアルミニウム合金等の平たい金属蓋板で覆い、凹溝周辺の基板と蓋板との重ね合わせ部を摩擦撹拌接合するという簡単な操作で冷却板が得られるので、従来のように両方の金属板に凹溝を形成する必要がなく、そのうえ冷却板の厚さを薄くすることが可能で、接合強度に優れ信頼性が高く、低コストで非常に効率よく冷却板を製造することができる。 According to the present invention, a groove is provided on the surface of a metal substrate such as an aluminum alloy, and the groove is covered with a flat metal lid plate such as an aluminum alloy, and the overlapping portion of the substrate and the lid plate around the groove is friction stir welded. Since the cooling plate can be obtained by a simple operation, there is no need to form concave grooves on both metal plates as in the past, and the thickness of the cooling plate can be reduced and the joint strength is excellent and reliable. The cooling plate can be manufactured very efficiently at a low cost.
しかも、本発明によれば、摩擦撹拌接合装置のツールのプローブを、上記凹溝の側壁上端からプローブの外周に至る水平距離が４ｍｍ以内、好ましくは１ｍｍ以内となるように設定することにより、凹溝から接合部に至る基板と蓋板との間の隙間の幅（非接合部の幅）がゼロとなるか或いは著しく小さくなる。したがって、従来のように封止材を用いなくても、冷却板の使用中にこの隙間に冷媒が滲み込んで滞留することが抑制され、その結果として腐食の進行が抑制される。 In addition, according to the present invention, the probe of the tool of the friction stir welding apparatus is set so that the horizontal distance from the upper end of the side wall of the groove to the outer periphery of the probe is within 4 mm, preferably within 1 mm. The width of the gap between the substrate extending from the groove to the joint and the cover plate (the width of the non-joint) becomes zero or significantly smaller. Therefore, even if a sealing material is not used as in the prior art, it is possible to suppress the refrigerant from seeping into and staying in the gap during use of the cooling plate, and as a result, the progress of corrosion is suppressed.
また、凹溝から接合部に至る基板と蓋板との間の隙間の幅（非接合部の幅）がゼロとなるか或いは著しく小さくなること、摩擦撹拌接合による接合部の接合強度の改善とが相俟って、冷却板の使用中に強い液圧がかかっても隙間と接合部との境界からの亀裂や破断が防止できる。また、冷却板の使用中に通常よりも強い液圧がかかっても、凹溝により形成された冷媒の流路上の蓋板が膨らんで平面性が損なわれることがなく、その結果冷却板として重要な冷却体を冷却放熱する性能の低下が防止される。 In addition, the width of the gap between the substrate and the cover plate from the concave groove to the bonded portion (the width of the non-bonded portion) becomes zero or significantly reduced, and the bonding strength of the bonded portion is improved by friction stir welding. In combination, even if a strong hydraulic pressure is applied during use of the cooling plate, cracks and breaks from the boundary between the gap and the joint can be prevented. In addition, even when a hydraulic pressure higher than usual is applied during use of the cooling plate, the cover plate on the refrigerant flow path formed by the concave groove does not swell and the flatness is not impaired, and as a result, it is important as a cooling plate. Deterioration of the performance of cooling and dissipating heat from a cooling body is prevented.
以下、本発明の具体的な実施例を挙げる。なお、本発明はこれ等の実施例に限定されるものではない。 Specific examples of the present invention will be given below. The present invention is not limited to these examples.
(試験用の冷却板の製造)
図１に示すように、アルミニウム合金（Ａ５０５２−Ｈ１１２）からなる基板１０（長さ３００ｍｍ、幅１５０ｍｍ、厚さ３０ｍｍ）の表面の中央部の長さ方向に沿って、フライス切削加工により凹溝１１（長さ３００ｍｍ、幅１５ｍｍ、高さ１５ｍｍ）を設けた。次に、上記凹溝１１を設けた基板１０の上に全面にわたって、アルミニウム合金（Ａ５０５２−Ｈ３）からなる平たい蓋板２０（長さ３００ｍｍ、幅１５０ｍｍ、厚さ２ｍｍ）を重ね合わせ、基板１０と蓋板２０とがずれないように周縁の数箇所をビス止めして、基板１０と蓋板２０との重ね合わせ体を得た。
(Manufacture of test cooling plates)
As shown in FIG. 1, the groove 11 is formed by milling along the length direction of the center portion of the surface of the substrate 10 (length 300 mm, width 150 mm, thickness 30 mm) made of an aluminum alloy (A5052-H112). (Length 300 mm, width 15 mm, height 15 mm). Next, a flat lid plate 20 (length 300 mm, width 150 mm, thickness 2 mm) made of an aluminum alloy (A5052-H3) is overlaid on the entire surface of the substrate 10 provided with the concave groove 11 to form the substrate 10 and Several places on the periphery were screwed so that the cover plate 20 was not displaced, and an overlapped body of the substrate 10 and the cover plate 20 was obtained.
その後、定盤軸（Ｘ）と横行軸（Ｙ）と昇降軸（Ｚ）の機械３軸および揺動軸（Ａ）と旋回軸（Ｃ）のツール２軸とからなる公知の５軸枠型の摩擦撹拌接合装置に取り付けられたツール４０を、上記基板１０の凹溝１１の側壁上端からプローブ４１の外周に至る水平距離Ｄが常に１ｍｍとなるように設定し、このプローブ４１を１２００ｒｐｍで回転させながら上記重ね合わせ体接合線３３の一端部に挿入し、４００ｍｍ／分の送り速度で他端部にコンピュータ制御により移動させて摩擦撹拌接合を行った。 Thereafter, a known 5-axis frame type comprising a machine axis of a platen axis (X), a transverse axis (Y), a lifting axis (Z), and a tool axis of a swing axis (A) and a pivot axis (C). The tool 40 attached to the friction stir welding apparatus is set so that the horizontal distance D from the upper end of the side wall of the groove 11 of the substrate 10 to the outer periphery of the probe 41 is always 1 mm, and the probe 41 is rotated at 1200 rpm. Then, it was inserted into one end portion of the superposed body joining line 33 and moved to the other end portion by computer control at a feed rate of 400 mm / min to perform friction stir welding.
上記ツール４０は、プローブ４１の直径が４．０ｍｍ、長さが２．９ｍｍであり、ねじが切ってあり、ショルダ部４２の直径は１２ｍｍで、上記重ね合わせ体を押圧するためのショルダ面は平面であった。また、ツール４０への負荷は９８００Ｎであった。ここで、ツール４０は片道の１パスとし、ツール４０の回転方向は、図１に示すようにツール４０をＡ方向に回転させながらＢ方向に移動させた。 The tool 40 has a probe 41 having a diameter of 4.0 mm, a length of 2.9 mm, a threaded portion, a shoulder portion 42 having a diameter of 12 mm, and a shoulder surface for pressing the overlapped body. It was a plane. The load on the tool 40 was 9800N. Here, the tool 40 is a one-way path, and the rotation direction of the tool 40 is moved in the B direction while rotating the tool 40 in the A direction as shown in FIG.
なお、摩擦撹拌接合の終了位置に残るプローブ穴が、後述の耐圧試験の際の耐圧性に影響を及ぼさないように、摩擦撹拌接合の終了位置は凹溝の側壁から２０ｍｍ程度離した。また、摩擦撹拌接合の開始位置も開始直後の状態が安定しない領域による悪影響を避けるために、凹溝の側壁から２０ｍｍ程度離した(図２参照)。 The end position of the friction stir welding was separated from the side wall of the concave groove by about 20 mm so that the probe hole remaining at the end position of the friction stir welding did not affect the pressure resistance in the pressure resistance test described later. Further, the start position of the friction stir welding was separated from the side wall of the concave groove by about 20 mm in order to avoid the adverse effect due to the region where the state immediately after the start is not stable (see FIG. 2).
こうして、基板１０と蓋板２０とで囲まれた凹溝１１を冷媒の流路とする試験用の冷却板を製造した。この試験用の冷却板を蓋板２０の側から撮影した写真を図３に示す。この写真から明らかなように、表面にはツール４０による細長い加工痕２１が存在するが、変形やバリ等の欠陥はなく接合部の外観は極めて良好であった。 In this way, a test cooling plate having the groove 11 surrounded by the substrate 10 and the cover plate 20 as the coolant flow path was manufactured. FIG. 3 shows a photograph of the test cooling plate taken from the lid plate 20 side. As is apparent from this photograph, a long and narrow processing mark 21 due to the tool 40 exists on the surface, but there was no defect such as deformation or burrs, and the appearance of the joint was extremely good.
(試験用の冷却板の耐圧試験)
先ず、予備試験として、試験用の冷却板の気密性を調べるために、図４に写真で示すように、冷却板の凹溝の一端に栓をして塞ぎ他端に導管を気密に連結し、凹溝からなる冷媒の流路に０．４９ＭＰａの空気圧を加えて水中に５分間放置し、空気の漏れを調べたところ、連続した気泡の発生は認められず、気密性に問題はなかった。
(Pressure test of cooling plate for testing)
First, as a preliminary test, in order to investigate the airtightness of the test cooling plate, as shown in the photograph in FIG. 4, one end of the groove of the cooling plate is plugged and closed, and a conduit is connected to the other end in an airtight manner. Then, when 0.49 MPa air pressure was applied to the refrigerant flow path composed of the concave grooves and left in the water for 5 minutes and the air leakage was examined, no occurrence of continuous bubbles was observed, and there was no problem with airtightness. .
次に、本試験として、「給水装置の構造及び材質の基準に関する省令」（厚生労働省令）の第１条に記載された耐圧性能試験に基づいて、水圧試験機（山本水圧社製ＰＨ１０）を用いて、上記省令で規定されている「１．７５ＭＰａの静水圧を１分間加えて、水漏れ、変形、破損、その他の異常が生じないこと」という条件を満たすかどうかを調べたところ、異常は全く認められなかった。また、この水圧試験後の冷却板を切断して、接合端部（凹溝上端と蓋板との境界部）を観察した結果、この接合端部は完全に接合されていて隙間がなく、隙間への水の浸入は認められなかった。 Next, based on the pressure resistance test described in Article 1 of the "Ministerial Ordinance on Water Supply System Structure and Material Standards" (Ministry of Health, Labor and Welfare), the water pressure tester (PH10 manufactured by Yamamoto Water Pressure Co., Ltd.) Using this, it was examined whether or not the condition specified by the above-mentioned ministerial ordinance was met by “applying a hydrostatic pressure of 1.75 MPa for 1 minute to prevent water leakage, deformation, breakage, and other abnormalities”. Was not recognized at all. Moreover, as a result of cutting the cooling plate after the water pressure test and observing the joining end portion (boundary portion between the upper end of the groove and the cover plate), the joining end portion is completely joined and there is no gap. No water intrusion was observed.
さらに、上記水圧試験機による加圧力を上げて破壊圧力を測定したが、水圧試験機の加圧力の限界である２５ＭＰａの静水圧でも直線中央が少し盛り上がり、曲線部も変形するが破壊には至らず、２５ＭＰａの静水圧が実用上の水圧にくらべて遥かに高いことを勘案すると、優れた耐圧性を有することが証明された。 Further, the breaking pressure was measured by increasing the pressure applied by the hydraulic pressure tester, but even at the hydrostatic pressure of 25 MPa, which is the limit of the pressure applied by the hydraulic pressure tester, the center of the straight line swells slightly and the curved portion is deformed, but the failure is not reached. In view of the fact that the hydrostatic pressure of 25 MPa is much higher than the practical water pressure, it was proved to have excellent pressure resistance.
ツール４０を、上記基板１０の凹溝１１の側壁上端からプローブ４１の外周に至る水平距離Ｄが常に２ｍｍとなるように設定したこと以外は実施例１と同様に行って、試験用の冷却板を製造した。 The test plate was tested in the same manner as in Example 1 except that the horizontal distance D from the upper end of the side wall of the groove 11 of the substrate 10 to the outer periphery of the probe 41 was always 2 mm. Manufactured.
得られた試験用の冷却板について、１．７５ＭＰａの静水圧を１分間加える耐圧試験では、異常は全く認められなかった。この水圧試験後の冷却板を切断して、接合端部（凹溝上端と蓋板との境界部）を観察した結果、この接合端部は完全に接合されていて隙間がなく、隙間への水の浸入は認められなかった。また、２３ＭＰａの静水圧で直線中央が盛り上がり、曲線部が変形した後、直線部で破壊するが、２３ＭＰａの静水圧が実用上の水圧にくらべて遥かに高いことを勘案すると、優れた耐圧性を有することが証明された。 No abnormality was observed in the pressure-resistant test in which a hydrostatic pressure of 1.75 MPa was applied for 1 minute with respect to the obtained cooling plate for testing. As a result of cutting the cooling plate after the water pressure test and observing the joining end portion (boundary portion between the upper end of the groove and the lid plate), the joining end portion is completely joined and there is no gap. No water intrusion was observed. In addition, the center of the straight line swells at a hydrostatic pressure of 23 MPa, and after the curved portion is deformed, it breaks at the straight portion, but considering that the hydrostatic pressure of 23 MPa is much higher than the practical water pressure, it has excellent pressure resistance. Proved to have
ツール４０を、上記基板１０の凹溝１１の側壁上端からプローブ４１の外周に至る水平距離Ｄが常に４ｍｍとなるように設定したこと以外は実施例１と同様に行って、試験用の冷却板を製造した。 The test plate was tested in the same manner as in Example 1 except that the horizontal distance D from the upper end of the side wall of the groove 11 of the substrate 10 to the outer periphery of the probe 41 was always set to 4 mm. Manufactured.
得られた試験用の冷却板について、１．７５ＭＰａの静水圧を１分間加える耐圧試験では、異常は認められなかった。この水圧試験後の冷却板を切断して、接合端部（凹溝上端と蓋板との境界部）を観察した結果、この接合端部は完全に接合されていて隙間がなく、隙間への水の浸入は認められなかった。また、１６ＭＰａの静水圧で直線中央が大きく盛り上がり、曲線部が変形した後、直線部で破壊するが、１６ＭＰａの静水圧が実用上の水圧にくらべて遥かに高いことを勘案すると、優れた耐圧性を有することが証明された。 No abnormality was observed in the pressure-resistant test in which a hydrostatic pressure of 1.75 MPa was applied for 1 minute with respect to the obtained cooling plate for testing. As a result of cutting the cooling plate after the water pressure test and observing the joining end portion (boundary portion between the upper end of the groove and the lid plate), the joining end portion is completely joined and there is no gap. No water intrusion was observed. In addition, the center of the straight line swells greatly at a hydrostatic pressure of 16 MPa, and after the curved portion is deformed, it breaks at the straight portion, but considering the fact that the hydrostatic pressure of 16 MPa is far higher than the practical water pressure, Proven to have sex.
１０ 金属基板
１１ 凹溝
２０ 金属蓋板
２１ 加工痕
３０ 接合部
４０ ツール
４１ ツールのプローブ
４２ ツールのショルダ部
DESCRIPTION OF SYMBOLS 10 Metal substrate 11 Concave groove 20 Metal lid plate 21 Process mark 30 Joint part 40 Tool 41 Tool probe 42 Tool shoulder part
Claims (4)
A concave groove is provided on the surface of the metal substrate, and a flat metal lid plate is covered thereon, and the overlapping portion of the substrate and the lid plate around the concave groove is joined by friction stir welding so that the concave groove is made into a coolant. A cooling plate, characterized in that a joint portion by friction stir welding reaches the upper end of the side wall of the concave groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006129205A JP2007301567A (en) | 2006-05-08 | 2006-05-08 | Method of manufacturing cooling plate, and cooling plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006129205A JP2007301567A (en) | 2006-05-08 | 2006-05-08 | Method of manufacturing cooling plate, and cooling plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2007301567A true JP2007301567A (en) | 2007-11-22 |
Family
ID=38835959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006129205A Pending JP2007301567A (en) | 2006-05-08 | 2006-05-08 | Method of manufacturing cooling plate, and cooling plate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2007301567A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010240671A (en) * | 2009-04-02 | 2010-10-28 | Nippon Light Metal Co Ltd | Method of manufacturing heat transfer plate |
| JP2015196180A (en) * | 2014-04-01 | 2015-11-09 | 日本軽金属株式会社 | Manufacturing method for heat transfer plate and friction agitation joint method |
| CN106271023A (en) * | 2015-05-27 | 2017-01-04 | 上海航天设备制造总厂 | A kind of method using agitating friction weldering that cold drawing is sealed |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006095532A (en) * | 2004-09-28 | 2006-04-13 | Mitsubishi Heavy Ind Ltd | Friction stir welding method |
-
2006
- 2006-05-08 JP JP2006129205A patent/JP2007301567A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006095532A (en) * | 2004-09-28 | 2006-04-13 | Mitsubishi Heavy Ind Ltd | Friction stir welding method |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010240671A (en) * | 2009-04-02 | 2010-10-28 | Nippon Light Metal Co Ltd | Method of manufacturing heat transfer plate |
| JP2015196180A (en) * | 2014-04-01 | 2015-11-09 | 日本軽金属株式会社 | Manufacturing method for heat transfer plate and friction agitation joint method |
| CN106271023A (en) * | 2015-05-27 | 2017-01-04 | 上海航天设备制造总厂 | A kind of method using agitating friction weldering that cold drawing is sealed |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4072558B2 (en) | Joined body of steel and aluminum, and spot welding method thereof | |
| US11185945B2 (en) | Method for manufacturing liquid cooling jacket | |
| Xu et al. | Temperature evolution, microstructure and mechanical properties of friction stir welded thick 2219-O aluminum alloy joints | |
| Liu et al. | Mechanical properties of underwater friction stir welded 2219 aluminum alloy | |
| Zhao et al. | Effects of tool geometry on friction stir welding of AA6061 to TRIP steel | |
| US8888069B2 (en) | Valves having high wear-resistance and high corrosion-resistance | |
| US20200353558A1 (en) | Method for manufacturing liquid cooling jacket | |
| Buffa et al. | Micro and macro mechanical characterization of friction stir welded Ti–6Al–4V lap joints through experiments and numerical simulation | |
| JP4475239B2 (en) | Manufacturing method of heat sink plate | |
| Hsieh et al. | Friction stir spot fusion welding of low-carbon steel to aluminum alloy | |
| Soni et al. | Defects formation during friction stir welding: a review | |
| JP6950569B2 (en) | How to manufacture a liquid-cooled jacket | |
| JP2000301364A (en) | Rotation friction agitation joining method of dissimiliar metal material | |
| Beygi et al. | Friction stir butt welding of Al-Cu bilayer laminated composites: analysis of force, torque, and temperature | |
| Lee et al. | Effect of nickel coating on the shear strength of FSW lap joint between Ni–Cu alloy and steel | |
| CN109623132A (en) | A kind of device and method improving 7 line aluminium alloy friction stir welding performances | |
| JP2007301567A (en) | Method of manufacturing cooling plate, and cooling plate | |
| Ciliberto et al. | FSW of T joints in overlap configuration: process optimization in joining dissimilar aluminium alloys for the aeronautic application | |
| Ji et al. | Microstructure and mechanical properties of friction stir repaired Al–cu casting alloy | |
| Fratini et al. | Experimental characterization of FSW T-joints of light alloys | |
| Horton | Microhardness, strength and strain field characterization of self-reacting friction stir and plug welds of dissimilar aluminum alloys | |
| Ahmed et al. | On increasing productivity of micro-friction stir welding with aid of tool shoulder micro-features | |
| Mahto et al. | Friction stir lap welding of thin AA6061-T6 and AISI304 sheets at different values of pin penetrations | |
| JP7347235B2 (en) | Liquid cooling jacket manufacturing method and friction stir welding method | |
| Nordal | Design, development and analysis of tools for hybrid friction stir channeling |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080215 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080311 |
|
| A521 | Written amendment |
Effective date: 20080215 Free format text: JAPANESE INTERMEDIATE CODE: A821 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20080311 |
|
| A977 | Report on retrieval |
Effective date: 20100614 Free format text: JAPANESE INTERMEDIATE CODE: A971007 |
|
| A131 | Notification of reasons for refusal |
Effective date: 20100706 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
| A02 | Decision of refusal |
Effective date: 20101214 Free format text: JAPANESE INTERMEDIATE CODE: A02 |