JP2007250781A - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 93
- 238000004519 manufacturing process Methods 0.000 title claims description 25
- 229910021332 silicide Inorganic materials 0.000 claims abstract description 86
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims abstract description 86
- 238000009792 diffusion process Methods 0.000 claims abstract description 63
- 229910052751 metal Inorganic materials 0.000 claims abstract description 54
- 239000002184 metal Substances 0.000 claims abstract description 53
- 239000000758 substrate Substances 0.000 claims abstract description 47
- 238000005204 segregation Methods 0.000 claims abstract description 30
- 229910052747 lanthanoid Inorganic materials 0.000 claims abstract description 12
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical group [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 claims abstract description 12
- 150000002602 lanthanoids Chemical class 0.000 claims abstract description 11
- 239000012535 impurity Substances 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 11
- 229910052763 palladium Inorganic materials 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 description 38
- 239000010703 silicon Substances 0.000 description 35
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 34
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 24
- 229910052581 Si3N4 Inorganic materials 0.000 description 15
- 239000000463 material Substances 0.000 description 15
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 15
- 230000000694 effects Effects 0.000 description 12
- 230000004888 barrier function Effects 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 11
- 238000005755 formation reaction Methods 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 229910052814 silicon oxide Inorganic materials 0.000 description 9
- 238000005468 ion implantation Methods 0.000 description 7
- 238000002955 isolation Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 6
- 229910005883 NiSi Inorganic materials 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 230000000295 complement effect Effects 0.000 description 4
- 230000003071 parasitic effect Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000006722 reduction reaction Methods 0.000 description 4
- 229910052785 arsenic Inorganic materials 0.000 description 3
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- -1 lanthanoid ions Chemical class 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910006137 NiGe Inorganic materials 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 229910002367 SrTiO Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- SCCCLDWUZODEKG-UHFFFAOYSA-N germanide Chemical compound [GeH3-] SCCCLDWUZODEKG-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003746 solid phase reaction Methods 0.000 description 1
- 238000009271 trench method Methods 0.000 description 1
- 238000004402 ultra-violet photoelectron spectroscopy Methods 0.000 description 1
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Abstract
【解決手段】p型半導体基板1,3と、半導体基板上に設けられたゲート絶縁膜5と、ゲート絶縁膜上に設けられたゲート電極6と、第1ゲート電極の両側の半導体基板に設けられたn型拡散層10と、このn型拡散層上に形成され真空仕事関数が4.6eV以上である第1金属元素を主成分とするシリサイド層182と、n型拡散層とシリサイド層との界面に形成された、スカンジウム族元素及びランタノイドの群から選択された少なくとも一種類の第2金属元素を含む層202とを有するソース・ドレイン領域と、を備え、前記第2金属元素を含む層は、最大面密度が1x1014cm−2以上である偏析層を含み、前記偏析層は1x1014cm−2以上の面密度を有する領域の厚さが1nmより薄い。
【選択図】図1
Description
H.Kanaya et al., JJAP 28(1989) L544-L546.
本発明の第1実施形態による半導体装置の断面を図1に示す。本実施形態の半導体装置はCMISFETであって、n型MISFET30と、p型MISFET40とを備えている。n型MISFET30およびp型MISFET40は、p型シリコン基板1に形成されたp型不純物領域(p型ウェル)3およびn型不純物領域(n型ウェル)4にそれぞれ設けられている。p型ウェル3およびn型ウェル4はSiO2からなる素子分離領域2によって素子分離されている。
次に、本発明の第2実施形態による半導体装置の断面を図3に示す。本実施形態の半導体装置は、ショットキーn型MISFET30Aであって、図1に示す第1実施形態に係るn型MISFET30のn+型拡散層10を除去した構成となっている。また、本実施形態のn型MISFETはp型シリコン基板1に形成されている。すなわち、Ni3Siからなるシリサイド層182が直接p型シリコン基板1と接触している。本実施形態においては、このNi3Siからなるシリサイド層182がソース・ドレインとなる。シリサイド層182とp型シリコン基板1との界面には、Erが面密度2x1014cm−2以上偏析したEr偏析層202が形成されており、その厚さは1nmより薄い。また、ゲート側壁14aの厚さも図1に示すn型MISFET30のゲート側壁14に比べ薄く、10nm以下である。
次に、本発明の第3実施形態による半導体装置の断面を図4に示す。本実施形態の半導体装置はn型MISFET30Bであって、図1に示す第1実施形態に係るn型MISFET30の、n+型拡散層10と、Ni3Siからなるシリサイド層182との間に0.5nmのシリコン窒化膜22を設けた構成となっている。さらに、本実施形態のn型MISFET30Bはp型ウェルではなくp型シリコン基板1に形成されている。なお、p型シリコン基板1ではなくp型ウェルに形成してもよい。Er偏析層202はシリコン窒化膜22に対してシリサイド層182の側に存在する。
次に、本発明の第4実施形態による半導体装置の断面を図5に示す。本実施形態の半導体装置はCMISFETであって、n型MISFET30Cと、p型MISFET40Bとを備えている。n型MISFET30Cは、p型シリコン基板1のp型ウェル3に形成され、図1に示す第1実施形態に係るn型MISFET30のゲート電極6をゲート電極6Aに置き換えた構成となっている。このゲート電極6Aは、膜厚が2nm以下の酸化シリコンからなるゲート絶縁膜5上に形成されたNi3Si層181と、このNi3Si層181とゲート絶縁膜との間にErが偏析したEr偏析層201とを備えている。Er偏析層201にはErが面密度2x1014cm−2以上偏析しており、Er偏析層201の厚さは1nm以下である。
次に、本発明の第5実施形態による半導体装置の断面を図6に示す。本実施形態の半導体装置はCMISFETであって、n型MISFET30Dと、p型MISFET40Cとを備えている。n型MISFET30Dはp型シリコン基板1のp型ウェル3に形成され、図1に示す第1実施形態に係るn型MISFET30のSiO2からなるゲート絶縁膜5を、Hfを主成分とする高誘電率材料からなるゲート絶縁膜5Aに置き換えた構成となっている。また、p型MISFET40Cはp型シリコン基板1のn型ウェル4に形成され、図5に示す第4実施形態に係るp型MISFET40Bのゲート絶縁膜5を、Hfを主成分とする高誘電率材料からなるゲート絶縁膜5Aに置き換えた構成となっている。
次に、本発明の第6実施形態の半導体装置の断面を図7に示す。本実施形態の半導体装置はCMISFETであって、n型MISFET30Eと、p型MISFET40Dとを備えている。n型MISFET30Eはp型シリコン基板1のp型ウェル3に形成され、図6に示す第5実施形態に係るn型MISFET30Dにおいて、シリサイド層182とn+型拡散層10との界面に界面層として膜厚が0.5nmのシリコン窒化膜22を設けた構成となっている。なお、Er偏析層202はシリコン窒化膜22に対してNi3Si層182側に存在する。また、p型MISFET40Cはp型シリコン基板1のn型ウェル4に形成され、図6に示す第5実施形態に係るp型MISFET40Cにおいて、シリサイド層184とp+型拡散層12との界面に界面層として膜厚が0.5nmのシリコン窒化膜22を設けた構成となっている。本実施形態のように、ソース・ドレインの拡散層とNi3Si層との界面にシリコン窒化膜22を設ける構成は、図4に示す第3実施形態の場合と同じ構成であり、その効果も第3実施形態と同様に、電極の真空仕事関数に応じてSBHを自由に変化することが可能となる。その結果、コンタクト抵抗(界面抵抗)が低減でき、相補型MISFETの高速動作を実現することができる。
次に、本発明の第7実施形態による半導体装置の製造方法を、図8乃至図10を参照して説明する。図8乃至図10は、本実施形態による半導体装置の製造方法の製造工程を示す断面図である。本実施形態の製造方法によって製造される半導体装置は、図1に示す第1実施形態の半導体装置である。
次に、本発明の第8実施形態による半導体装置の製造方法を図12乃至図14を参照して説明する。図12乃至図14は本実施形態の製造方法を示す工程断面図である。本実施形態の製造方法によって製造される半導体装置は、図5に示す第4実施形態の半導体装置である。
2 素子分離領域
3 p型ウェル
4 n型ウェル
5 ゲート絶縁膜
5A ゲート絶縁膜
6 ゲート電極
7 ゲート電極
8 多結晶シリコン層
9 多結晶シリコン層
10 n+型拡散層
12 p+型拡散層
14 ゲート側壁
18 Ni膜
181 Ni3Si層
182 Ni3Si層
183 Ni3Si層
184 Ni3Si層
201 Er偏析層
202 Er偏析層
22 シリコン窒化膜
24 レジストパターン
30 n型MISFET
40 p型MISFET
Claims (9)
- p型半導体基板と、
前記半導体基板上に設けられた第1ゲート絶縁膜と、
前記ゲート絶縁膜上に設けられた第1ゲート電極と、
前記第1ゲート電極の両側の前記半導体基板に設けられたn型拡散層と、このn型拡散層上に形成され真空仕事関数が4.6eV以上である第1金属元素を主成分とするシリサイド層と、前記n型拡散層と前記シリサイド層との界面に形成された、スカンジウム族元素及びランタノイドの群から選択された少なくとも一種類の第2金属元素を含む層と有する第1ソース・ドレイン領域と、
を備え、前記第2金属元素を含む層は、最大面密度が1x1014cm−2以上である偏析層を含み、前記偏析層は1x1014cm−2以上の面密度を有する領域の厚さが1nmより薄いことを特徴とする半導体装置。 - p型半導体領域およびn型半導体領域がそれぞれ設けられた半導体基板と、
前記p型半導体領域上に設けられた第1ゲート絶縁膜と、
前記第1ゲート絶縁膜上に設けられた第1ゲート電極と、
前記第1ゲート電極の両側の前記p型半導体領域に設けられたn型拡散層と、この n型拡散層上に形成され真空仕事関数が4.6eV以上である第1金属元素を主成分とする第1シリサイド層と、前記n型拡散層と前記第1シリサイド層との界面に形成された、スカンジウム族元素及びランタノイドの群から選択された少なくとも一種類の第2金属元素を含む層とを有する第1ソース・ドレイン領域と、
を備えたn型MISFETと、
前記n型半導体領域上に設けられた第2ゲート絶縁膜と、
前記第2ゲート絶縁膜上に設けられた第2ゲート電極と、
前記第2ゲート電極の両側の前記n型半導体領域に設けられたp型拡散層と、このp型拡散層上に形成され前記第1金属元素を主成分とする第2シリサイド層とを有する第2ソース・ドレイン領域と、
を備えたp型MISFETと、
を備え、
前記第2金属元素を含む層は最大面密度が1x1014cm−2以上である偏析層を含み、前記偏析層は1x1014cm−2以上の面密度を有する領域の厚さが1nmより薄いことを特徴とする半導体装置。 - p型半導体基板と、
前記半導体基板上に設けられた第1ゲート絶縁膜と、
前記第1ゲート絶縁膜上に設けられた第1ゲート電極と、
前記第1ゲート電極の両側の前記半導体基板に設けられ真空仕事関数が4.6eV以上である第1金属元素を主成分とするシリサイド層と、前記シリサイド層と前記半導体基板とのの界面に形成された、スカンジウム族元素及びランタノイドの群から選択された少なくとも一種類の第2金属元素を含む層とを有する第1ソース・ドレイン領域と、
を備え、
前記第2金属元素を含む層は最大面密度が1x1014cm−2以上である偏析層を含み、前記偏析層は1x1014cm−2以上の面密度の厚さを有する領域が1nmより薄いことを特徴とする半導体装置。 - 前記シリサイド層は前記第1金属元素としてNi、Co、Pt、およびPdのいずれか1つを含んでいることを特徴とする請求項1乃至3のいずれかに記載の半導体装置。
- 前記シリサイド層の組成は、最も金属組成の大きなシリサイドであることを特徴とする請求項4記載の半導体装置。
- 前記第1ゲート電極は、前記第1金属元素を主成分とするシリサイド層と、前記第2金属元素を含む層とを備えていることを特徴とする請求項1乃至5のいずれかに記載の半導体装置。
- 前記第2ゲート電極は前記第1金属元素を主成分とするシリサイド層からなっていることを特徴とする請求項2記載の半導体装置。
- 前記n型拡散層と前記第2金属元素を含む層との間に設けられた絶縁膜を備えていることを特徴とする請求項1または2記載の半導体装置。
- 半導体基板上に形成されたソース・ドレインとなる不純物拡散領域に、スカンジウム族元素及びランタノイドの群から選択された1つの元素をイオン注入する工程と、
前記不純物拡散領域を真空仕事関数が4.6eV以上である金属で覆い、熱処理することにより前記不純物拡散領域に前記金属のシリサイド層を形成するとともに前記シリサイド層と前記不純物拡散領域との界面または前記シリサイド層と前記半導体基板との界面に前記選択された1つの元素を偏析させる工程と、
を備えたことを特徴とする半導体装置の製造方法。
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JP2008235618A (ja) * | 2007-03-22 | 2008-10-02 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2009135227A (ja) * | 2007-11-29 | 2009-06-18 | Toshiba Corp | 半導体装置の製造方法および半導体装置 |
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US9054194B2 (en) * | 2009-04-29 | 2015-06-09 | Taiwan Semiconductor Manufactruing Company, Ltd. | Non-planar transistors and methods of fabrication thereof |
TWI397154B (zh) * | 2010-01-21 | 2013-05-21 | Great Power Semiconductor Corp | 具有蕭特基二極體之溝槽式功率半導體結構及其製造方法 |
US8871617B2 (en) * | 2011-04-22 | 2014-10-28 | Asm Ip Holding B.V. | Deposition and reduction of mixed metal oxide thin films |
CN103972089B (zh) * | 2013-01-28 | 2018-09-18 | 中国科学院微电子研究所 | 半导体器件及其制造方法 |
KR20140121617A (ko) * | 2013-04-08 | 2014-10-16 | 삼성전자주식회사 | 반도체 장치 및 그 제조 방법 |
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