JP2007227761A - 固体撮像装置用素子 - Google Patents
固体撮像装置用素子 Download PDFInfo
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- JP2007227761A JP2007227761A JP2006048483A JP2006048483A JP2007227761A JP 2007227761 A JP2007227761 A JP 2007227761A JP 2006048483 A JP2006048483 A JP 2006048483A JP 2006048483 A JP2006048483 A JP 2006048483A JP 2007227761 A JP2007227761 A JP 2007227761A
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- 238000003384 imaging method Methods 0.000 title claims abstract description 34
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 239000004065 semiconductor Substances 0.000 claims abstract description 8
- 238000006243 chemical reaction Methods 0.000 claims abstract description 5
- 238000002955 isolation Methods 0.000 claims description 55
- 238000003860 storage Methods 0.000 claims description 31
- 239000012535 impurity Substances 0.000 claims description 4
- 238000000926 separation method Methods 0.000 abstract description 5
- 238000009825 accumulation Methods 0.000 abstract description 3
- 230000007547 defect Effects 0.000 description 26
- 230000001629 suppression Effects 0.000 description 22
- 238000000034 method Methods 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 229910052814 silicon oxide Inorganic materials 0.000 description 8
- 238000009792 diffusion process Methods 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 230000006870 function Effects 0.000 description 5
- 238000005468 ion implantation Methods 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000003702 image correction Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1463—Pixel isolation structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14623—Optical shielding
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Element Separation (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Abstract
【解決手段】第1導電型の半導体基板またはウェル内部に設けられ光電変換して得られた信号電荷を蓄積する第2導電型の信号蓄積部と、上記基板またはウェル上に設けられたゲート電極と、上記基板またはウェルの上記ゲート電極側表面部に設けられた第2導電型のドレイン領域と、上記基板またはウェルの上記ゲート電極側表面部に設けられた素子分離部とを備える。素子分離部は、STI構造を有し、この素子分離部内には空洞部が形成されている。
【選択図】図2
Description
102 信号蓄積部(フォトダイオード)
103 ゲート酸化膜
104 ゲート電極
105 ドレイン領域
106 表面シールド層
107 素子分離部(STI)
108 シリコン酸化物
109 欠陥抑制層
201 素子分離部(STI)
202 空洞部(エアーギャップ)
203 信号蓄積部(フォトダイオード)
204 溝(トレンチ)
Claims (3)
- 第1導電型の半導体基板またはウェル内部に設けられ光電変換して得られた信号電荷を蓄積する第2導電型の信号蓄積部と、
前記基板またはウェル上に設けられたゲート電極と、
前記基板またはウェルの表面部に形成された第2導電型のドレイン領域と、
前記基板またはウェルの表面部に形成された素子分離部とを備え、
前記素子分離部は、STI(Shallow Trench Isolation)構造を有し、この素子分離部内に空洞部が形成されていることを特徴とする固体撮像装置用素子。 - 前記素子分離部の幅が深さよりも小さいことを特徴とする請求項1記載の固体撮像装置用素子。
- 前記基板またはウェルの表面部に、前記基板またはウェルを介して少なくとも一部が前記信号蓄積部に対向する表面シールド層が形成され、
この表面シールド層は、前記基板またはウェルよりも不純物濃度が高い第1導電型の不純物領域であり、前記ゲート電極は、その一部が前記基板またはウェルを介して前記信号蓄積部に対向していることを特徴とする請求項1記載の固体撮像装置用素子。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006048483A JP2007227761A (ja) | 2006-02-24 | 2006-02-24 | 固体撮像装置用素子 |
US11/653,919 US7518144B2 (en) | 2006-02-24 | 2007-01-17 | Element for solid-state imaging device |
KR1020070011965A KR20070088347A (ko) | 2006-02-24 | 2007-02-06 | 고체 촬상 장치용 소자 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006048483A JP2007227761A (ja) | 2006-02-24 | 2006-02-24 | 固体撮像装置用素子 |
Publications (1)
Publication Number | Publication Date |
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JP2007227761A true JP2007227761A (ja) | 2007-09-06 |
Family
ID=38443142
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006048483A Ceased JP2007227761A (ja) | 2006-02-24 | 2006-02-24 | 固体撮像装置用素子 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7518144B2 (ja) |
JP (1) | JP2007227761A (ja) |
KR (1) | KR20070088347A (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012501535A (ja) * | 2008-08-27 | 2012-01-19 | クロステック・キャピタル,リミテッド・ライアビリティ・カンパニー | 空隙を有する浅型トレンチ分離構造と、これを使用するcmos画像センサと、cmos画像センサの製造方法 |
JP2012015316A (ja) * | 2010-06-30 | 2012-01-19 | Canon Inc | 半導体装置およびその製造方法、ならびに固体撮像装置 |
JP2012178429A (ja) * | 2011-02-25 | 2012-09-13 | Renesas Electronics Corp | 半導体装置 |
JP2013175494A (ja) * | 2011-03-02 | 2013-09-05 | Sony Corp | 固体撮像装置、固体撮像装置の製造方法及び電子機器 |
US9508768B2 (en) | 2013-04-08 | 2016-11-29 | Canon Kabushiki Kaisha | Solid-state image sensor with element isolation regions comprising gaps having reduced variations |
KR20210105324A (ko) * | 2017-11-21 | 2021-08-26 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | 반도체 디바이스의 노이즈 격리를 위한 구조 및 방법 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5171158B2 (ja) * | 2007-08-22 | 2013-03-27 | 浜松ホトニクス株式会社 | 固体撮像装置及び距離画像測定装置 |
US7800192B2 (en) * | 2008-02-08 | 2010-09-21 | Omnivision Technologies, Inc. | Backside illuminated image sensor having deep light reflective trenches |
JP4977181B2 (ja) * | 2009-08-10 | 2012-07-18 | 株式会社東芝 | 固体撮像装置およびその製造方法 |
JP5682174B2 (ja) * | 2010-08-09 | 2015-03-11 | ソニー株式会社 | 固体撮像装置とその製造方法、並びに電子機器 |
FR2969384A1 (fr) | 2010-12-21 | 2012-06-22 | St Microelectronics Sa | Capteur d'image a intermodulation reduite |
FR2969385A1 (fr) * | 2010-12-21 | 2012-06-22 | St Microelectronics Crolles 2 | Capteur d'images a taux d'intermodulation réduit |
CN107710414B (zh) * | 2016-04-25 | 2023-06-20 | 索尼公司 | 固态成像元件及其制造方法和电子设备 |
CN108231814A (zh) * | 2018-01-31 | 2018-06-29 | 德淮半导体有限公司 | 图像传感器及其形成方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH08213382A (ja) * | 1995-02-02 | 1996-08-20 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
JP2000150847A (ja) * | 1998-11-17 | 2000-05-30 | Toshiba Corp | 固体撮像装置 |
JP2004253729A (ja) * | 2003-02-21 | 2004-09-09 | Matsushita Electric Ind Co Ltd | 固体撮像装置およびその製造方法 |
WO2005013370A1 (en) * | 2003-07-30 | 2005-02-10 | Micron Technology, Inc. | Angled pinned photodiode for high quantum efficiency and method of formation |
JP2005123449A (ja) * | 2003-10-17 | 2005-05-12 | Matsushita Electric Ind Co Ltd | 固体撮像装置およびその製造方法 |
JP2005251947A (ja) * | 2004-03-03 | 2005-09-15 | Matsushita Electric Ind Co Ltd | 固体撮像装置とその製造方法および固体撮像装置を用いたカメラ |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6406975B1 (en) * | 2000-11-27 | 2002-06-18 | Chartered Semiconductor Manufacturing Inc. | Method for fabricating an air gap shallow trench isolation (STI) structure |
-
2006
- 2006-02-24 JP JP2006048483A patent/JP2007227761A/ja not_active Ceased
-
2007
- 2007-01-17 US US11/653,919 patent/US7518144B2/en not_active Expired - Fee Related
- 2007-02-06 KR KR1020070011965A patent/KR20070088347A/ko not_active Application Discontinuation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08213382A (ja) * | 1995-02-02 | 1996-08-20 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
JP2000150847A (ja) * | 1998-11-17 | 2000-05-30 | Toshiba Corp | 固体撮像装置 |
JP2004253729A (ja) * | 2003-02-21 | 2004-09-09 | Matsushita Electric Ind Co Ltd | 固体撮像装置およびその製造方法 |
WO2005013370A1 (en) * | 2003-07-30 | 2005-02-10 | Micron Technology, Inc. | Angled pinned photodiode for high quantum efficiency and method of formation |
JP2005123449A (ja) * | 2003-10-17 | 2005-05-12 | Matsushita Electric Ind Co Ltd | 固体撮像装置およびその製造方法 |
JP2005251947A (ja) * | 2004-03-03 | 2005-09-15 | Matsushita Electric Ind Co Ltd | 固体撮像装置とその製造方法および固体撮像装置を用いたカメラ |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9240345B2 (en) | 2008-08-27 | 2016-01-19 | Intellectual Ventures Ii Llc | Shallow trench isolation structure having air gap, CMOS image sensor using the same and method of manufacturing CMOS image sensor |
JP2012501535A (ja) * | 2008-08-27 | 2012-01-19 | クロステック・キャピタル,リミテッド・ライアビリティ・カンパニー | 空隙を有する浅型トレンチ分離構造と、これを使用するcmos画像センサと、cmos画像センサの製造方法 |
JP2012015316A (ja) * | 2010-06-30 | 2012-01-19 | Canon Inc | 半導体装置およびその製造方法、ならびに固体撮像装置 |
US8778771B2 (en) | 2010-06-30 | 2014-07-15 | Canon Kabushiki Kaisha | Semiconductor device, method of manufacturing the same, and solid-state image sensor |
JP2012178429A (ja) * | 2011-02-25 | 2012-09-13 | Renesas Electronics Corp | 半導体装置 |
US8884319B2 (en) | 2011-02-25 | 2014-11-11 | Renesas Electronics Corporation | Semiconductor device with isolation insulating layer containing air gap |
US9048158B2 (en) | 2011-02-25 | 2015-06-02 | Renesas Electronics Corporation | Semiconductor device with isolation insulating layer containing air gap |
JP2013175494A (ja) * | 2011-03-02 | 2013-09-05 | Sony Corp | 固体撮像装置、固体撮像装置の製造方法及び電子機器 |
US9508768B2 (en) | 2013-04-08 | 2016-11-29 | Canon Kabushiki Kaisha | Solid-state image sensor with element isolation regions comprising gaps having reduced variations |
US11664402B2 (en) | 2013-04-08 | 2023-05-30 | Canon Kabushiki Kaisha | Semiconductor device having a trench and camera with semiconductor device |
KR20210105324A (ko) * | 2017-11-21 | 2021-08-26 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | 반도체 디바이스의 노이즈 격리를 위한 구조 및 방법 |
US11183570B2 (en) | 2017-11-21 | 2021-11-23 | Taiwan Semiconductor Manufacturing Co., Ltd. | Structures and methods for noise isolation in semiconductor devices |
KR102499935B1 (ko) * | 2017-11-21 | 2023-02-16 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | 반도체 디바이스의 노이즈 격리를 위한 구조 및 방법 |
Also Published As
Publication number | Publication date |
---|---|
US20070200148A1 (en) | 2007-08-30 |
US7518144B2 (en) | 2009-04-14 |
KR20070088347A (ko) | 2007-08-29 |
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