JP2007213103A - Microscope zoom objective lens - Google Patents

Microscope zoom objective lens Download PDF

Info

Publication number
JP2007213103A
JP2007213103A JP2007138932A JP2007138932A JP2007213103A JP 2007213103 A JP2007213103 A JP 2007213103A JP 2007138932 A JP2007138932 A JP 2007138932A JP 2007138932 A JP2007138932 A JP 2007138932A JP 2007213103 A JP2007213103 A JP 2007213103A
Authority
JP
Japan
Prior art keywords
lens
lens group
group
cemented
zoom objective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007138932A
Other languages
Japanese (ja)
Other versions
JP4576402B2 (en
Inventor
Kenji Kawasaki
健司 川崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2007138932A priority Critical patent/JP4576402B2/en
Publication of JP2007213103A publication Critical patent/JP2007213103A/en
Application granted granted Critical
Publication of JP4576402B2 publication Critical patent/JP4576402B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Lenses (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microscope zoom objective lens having improved optical performance, and comprising a compact optical system with a zoom ratio of at least 3. <P>SOLUTION: The microscope zoom objective lens comprises a first lens group G1 having positive power, a second lens group G2 having negative power and a third lens group G3 having positive power. For zooming from a low to a high magnification side, the second and the third lens groups G2 and G3 move along an optical axis while the separation between the first lens group G1 and the second lens group G2 becomes wide and the separation between the second lens group G2 and the third lens group G3 becomes narrow. The second lens group G2 has at least two lens groups, which are constituted so that their concave surfaces face each other. When the focal distance of the first lens group G1 is defined as F1, and while the focal distance of the second lens group G2 is defined as F2 and the focal distance of the third lens group G3 is defined as F3, the microscope zoom objective lens satisfies conditions (6) and (7). <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、顕微鏡ズーム対物レンズに関し、特に、３倍以上の変倍比を持つ顕微鏡ズーム対物レンズに関するものである。   The present invention relates to a microscope zoom objective lens, and more particularly to a microscope zoom objective lens having a zoom ratio of 3 times or more.

顕微鏡用の対物レンズは、主に１倍付近から１００倍前後の倍率範囲で、作動距離や開口数（ＮＡ）等が設定されている。そして、観察方法に応じて位相差や蛍光観察に能力を発揮するもの等、様々な種類の対物レンズが用意されている。また、例えば、高い開口数を持つ１００倍前後の対物レンズには、油浸対物レンズや補正環付き対物レンズ等がある。この中、補正環付き対物レンズは、カバーグラスの厚みに対応して対物レンズ内のレンズ（あるいはレンズ群）を移動することによって、収差を補正する対物レンズである。   The objective lens for a microscope is set with a working distance, a numerical aperture (NA), and the like mainly in a magnification range from around 1 to around 100 times. Various types of objective lenses are prepared depending on the observation method, such as those exhibiting ability for phase difference and fluorescence observation. Further, for example, an objective lens having a high numerical aperture of about 100 times includes an oil immersion objective lens and an objective lens with a correction ring. Among them, the objective lens with a correction ring is an objective lens that corrects aberration by moving a lens (or a lens group) in the objective lens in accordance with the thickness of the cover glass.

補正環付き対物レンズの一例として、特許文献１に開示された構成がある。補正環付き対物レンズは、高倍、高開口数の対物レンズに多くみられる。このような高倍、高開口数の対物レンズでは、カバーグラスの厚さのばらつきによって収差が悪化する。そこで、対物レンズ内の所定のレンズ群を光軸に沿って移動させることで、主に球面収差の補正が行えるようにしている。   As an example of an objective lens with a correction ring, there is a configuration disclosed in Patent Document 1. Objective lenses with a correction ring are often found in objective lenses with a high magnification and a high numerical aperture. In such an objective lens having a high magnification and a high numerical aperture, aberrations are deteriorated due to variations in the thickness of the cover glass. Therefore, the spherical aberration is mainly corrected by moving a predetermined lens group in the objective lens along the optical axis.

ところで、顕微鏡の観察倍率を変化させる方法としては、対物レンズの後方に中間変倍光学系を配置して、観察光軸に対して中間変倍光学系を挿脱する方法がある。この方法では、２つの異なる観察倍率を得ることができる。また、別の方法としては、結像レンズとズームレンズを組み合わせた方法があり、例えば特許文献２に開示されている。この公報には、対物レンズの後方にズーム式の結像レンズを配置した構成が開示されている。   By the way, as a method for changing the observation magnification of the microscope, there is a method in which an intermediate variable magnification optical system is arranged behind the objective lens and the intermediate variable magnification optical system is inserted into and removed from the observation optical axis. In this method, two different observation magnifications can be obtained. In addition, as another method, there is a method in which an imaging lens and a zoom lens are combined. This publication discloses a configuration in which a zoom-type imaging lens is arranged behind the objective lens.

また、特許文献３や特許文献４や特許文献５では、対物レンズの後方にズームレンズを組み合わせたものが提案されている。   Further, Patent Document 3, Patent Document 4, and Patent Document 5 propose a combination of a zoom lens behind the objective lens.

また、実体顕微鏡では、顕微鏡に比べて倍率は低く開口数は劣るが、作動距離の長い対物レンズとズーム変倍を組み合わせることで操作性や立体感に優れたものがある。
特開平１−３０７７１７号公報 特開平６−１８７８４号公報 米国特許第３，６７１，０９９号明細書 米国特許第３，４５６，９９８号明細書 米国特許第３，４２１，８０７号明細書 A stereomicroscope has a lower magnification and a lower numerical aperture than a microscope, but has excellent operability and stereoscopic effect by combining a zoom lens with an objective lens having a long working distance.
JP-A-1-307717 JP-A-6-18784 US Pat. No. 3,671,099 U.S. Pat. No. 3,456,998 US Pat. No. 3,421,807

顕微鏡の対物レンズは、複数の対物レンズを倍率に応じて適宜切り換えて観察を行っている。それぞれの対物レンズで光軸のずれがある場合には、低倍率の観察から高倍率の切り換えに伴い、観察中心のずれを調整するためにステージを操作しなければならない。また、それぞれの対物レンズで同焦距離に違いがあると、作動距離を調整するために準焦ハンドルを操作する必要がある。また、それぞれの倍率に応じて対物レンズを揃える必要があり、コスト的にも高くなってしまう。   The objective lens of the microscope performs observation by switching a plurality of objective lenses as appropriate according to the magnification. If there is a deviation of the optical axis in each objective lens, the stage must be operated in order to adjust the deviation of the observation center in accordance with switching from low magnification observation to high magnification. Further, if there is a difference in the focal distance between the respective objective lenses, it is necessary to operate the semi-focus handle in order to adjust the working distance. In addition, it is necessary to align objective lenses according to the respective magnifications, which increases the cost.

また、補正環付き対物レンズにおけるレンズ群の移動は、主に球面収差の補正を行うためのものである。したがって、レンズ群の移動量もわずかであるので、観察倍率はほとんど変化しない。   The movement of the lens group in the objective lens with a correction ring is mainly for correcting spherical aberration. Accordingly, since the movement amount of the lens group is also small, the observation magnification hardly changes.

また、対物レンズの後方に中間変倍ユニットを配置した場合には、変倍によって観察倍率が高くなったとしても、開口数が変わらないために、解像力が向上しない問題点がある。また、対物レンズと結像レンズ間に変倍部を設けるために、光学系の全長が長くなるという問題がある。そのため、顕微鏡システムをコンパクトに構成することができない。また、射出瞳の位置が、変倍に伴って大きく変化するという問題がある。   Further, when the intermediate magnification unit is arranged behind the objective lens, there is a problem that the resolution is not improved because the numerical aperture does not change even if the observation magnification is increased by the magnification. In addition, since the zoom unit is provided between the objective lens and the imaging lens, there is a problem that the entire length of the optical system becomes long. Therefore, the microscope system cannot be configured compactly. In addition, there is a problem that the position of the exit pupil changes greatly with zooming.

また、特許文献２に提案の対物レンズのように、対物レンズの後方にズーム式の結像レンズを配置する場合には、視野数が小さく通常の対物レンズに比べて収差性能で劣る。また、ズームレンズ部の全長が長く、コンパクトさやシステム性に欠ける面がある。   Further, as in the objective lens proposed in Patent Document 2, when a zoom-type imaging lens is arranged behind the objective lens, the number of fields is small and the aberration performance is inferior to that of a normal objective lens. In addition, the zoom lens unit has a long overall length and lacks compactness and system performance.

また、特許文献３〜５では、対物レンズの後方にズームレンズを組み合わせたものが提案されている。しかしながら、現在の対物レンズと光学性能を比較すると、色収差性能や球面収差や像面平坦性等の収差性能、及び、開口数や視野数といった仕様の点で劣っている。このため、現在の市場のニーズを満足するような光学性能とは言えない。   Patent Documents 3 to 5 propose a combination of a zoom lens behind the objective lens. However, when the optical performance is compared with the current objective lens, it is inferior in terms of chromatic aberration performance, aberration performance such as spherical aberration and image surface flatness, and specifications such as numerical aperture and field number. For this reason, it cannot be said that the optical performance satisfies the current market needs.

一方、実体顕微鏡は、顕微鏡に比べて倍率が低く、さらに、開口数がかなり小さい。例えば倍率が１０倍では、顕微鏡では開口数が０．２５から０．４と高いのに対して、実体顕微鏡では約０．１と低い。したがって、細胞等の観察では見えの差は明らかである。つまり、実体顕微鏡は、見えの点において顕微鏡の対物レンズにはかなわない。しかも、実体顕微鏡等のアフォーカルズームは、射出瞳位置の変動が大きく、照明光学系ユニットや撮影光学系ユニットを組み込む場合には、システム上の制限事項がある。   On the other hand, the stereoscopic microscope has a lower magnification and a considerably smaller numerical aperture than the microscope. For example, at a magnification of 10 times, the numerical aperture is as high as 0.25 to 0.4 in a microscope, whereas it is as low as about 0.1 in a stereomicroscope. Therefore, the difference in appearance is obvious when observing cells and the like. In other words, the stereomicroscope is not suitable for the objective lens of the microscope in terms of visibility. In addition, afocal zoom such as a stereomicroscope has a large variation in the exit pupil position, and there are restrictions on the system when an illumination optical system unit or a photographing optical system unit is incorporated.

さらに、従来の方法による倍率の変倍では、射出瞳位置の変動が大きいので、ケラレや周辺減光等の性能の劣化や、同軸落射照明光学系等のケラレ、あるいは、撮影光学系側のシステム上の制限事項があった。   Furthermore, in the magnification change by the conventional method, the variation of the exit pupil position is large, so the performance such as vignetting and peripheral dimming deteriorates, the vignetting of the coaxial incident illumination optical system, etc., or the system on the photographing optical system side There were the above restrictions.

このように、これまで提案された光学系は、顕微鏡の対物レンズと同等の開口数と光学性能を備え、対物レンズを切り換えることなく倍率変換に応じて開口数が大きくなる光学系で、かつ、コンパクトな構成であるとは言えなかった。   Thus, the optical system that has been proposed so far is an optical system that has a numerical aperture and optical performance equivalent to those of an objective lens of a microscope, the numerical aperture increases in accordance with magnification conversion without switching the objective lens, and It could not be said that it was a compact configuration.

本発明は従来技術のこのような問題点に鑑みてなされたものであり、その目的は、光学性能が良好で光学系がコンパクトに構成され、ズーム変倍比が３倍以上の顕微鏡ズーム対物レンズを提供することである。また、倍率の変化に応じて開口数が変化する顕微鏡ズーム対物レンズを提供することである。また、射出瞳位置が略一定に保たれた（射出瞳位置の変動が抑えられた）顕微鏡ズーム対物レンズを提供することである。   The present invention has been made in view of such problems of the prior art, and an object thereof is a microscope zoom objective lens having good optical performance, a compact optical system, and a zoom magnification ratio of 3 times or more. Is to provide. Another object of the present invention is to provide a microscope zoom objective lens whose numerical aperture changes in accordance with a change in magnification. Another object of the present invention is to provide a microscope zoom objective lens in which the exit pupil position is kept substantially constant (the fluctuation of the exit pupil position is suppressed).

一般的に、顕微鏡の対物レンズは細かい構造を観察することを目的とする。そのため、本発明の顕微鏡ズーム対物レンズにおいても、高倍側での光学性能を良好に補正する必要がある。特に、高倍側での球面収差と色収差を良好に補正することが必須である。また、ズーム変倍時の射出瞳位置の変動を抑える必要がある。   In general, an objective lens of a microscope is intended to observe a fine structure. Therefore, also in the microscope zoom objective lens of the present invention, it is necessary to satisfactorily correct the optical performance on the high magnification side. In particular, it is essential to satisfactorily correct spherical aberration and chromatic aberration on the high magnification side. In addition, it is necessary to suppress fluctuations in the exit pupil position during zoom magnification.

そこで、第１の発明の顕微鏡ズーム対物レンズは、物体から順に、正のパワーを持つ第１レンズ群、負のパワーを持つ第２レンズ群、正のパワーを持つ第３レンズ群の少なくとも３つのレンズ群で構成され、低倍側から高倍側へ変倍する際に、前記第１レンズ群と前記第２レンズ群の間隔が大きくなり、前記第２レンズ群と前記第３レンズ群の間隔が小さくなるように、前記第２レンズ群と前記第３レンズ群が光軸上を移動し、第１レンズ群中に正レンズと負レンズで構成された正のパワーを持つ接合レンズを少なくとも１つ備え、前記正レンズのアッベ数をνとしたとき、前記正レンズが以下の条件（１）を満足することを特徴とする。   Therefore, the microscope zoom objective lens according to the first aspect of the invention includes at least three of a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power in order from the object. When the lens unit is configured to change the magnification from the low magnification side to the high magnification side, the distance between the first lens group and the second lens group increases, and the distance between the second lens group and the third lens group increases. The second lens group and the third lens group move on the optical axis so as to be smaller, and at least one cemented lens having a positive power composed of a positive lens and a negative lens is included in the first lens group. And the positive lens satisfies the following condition (1) when the Abbe number of the positive lens is ν.

ν＞８０ ・・・（１）
第１の発明の構成における各レンズ群の作用を説明する。なお、ここでの各レンズ群についての説明は、本発明の顕微鏡ズーム対物レンズにおけるレンズ系の基本構成に関わる説明である。したがって、各レンズ群の作用については、後述の第２乃至第５の発明、及び第２３の発明においても同様である。また、本発明の顕微鏡ズーム対物レンズにおけるレンズ系は、少なくとも３つのレンズ群で構成されるものであるが、３つのレンズ群、あるいは４つのレンズ群で構成するのが好ましい。 ν> 80 (1)
The operation of each lens group in the configuration of the first invention will be described. Here, the description of each lens group is a description related to the basic configuration of the lens system in the microscope zoom objective lens of the present invention. Therefore, the operation of each lens group is the same in the second to fifth inventions and the twenty-third invention described later. The lens system in the microscope zoom objective lens according to the present invention is composed of at least three lens groups, but is preferably composed of three lens groups or four lens groups.

第１の発明の構成において、正のパワーを持つ第１レンズ群は、物体からの光束を集光する。負のパワーを持つ第２レンズ群は、光軸上を移動することによって主に変倍を行う。レンズ系が３つのレンズ群で構成される場合（以下、３群構成とする。）、第３レンズ群は最終レンズ群になる。この第３レンズ群は正のパワーを持ち、光軸上を移動して各ズーム状態の像面の位置を所定の位置に一致させる作用をする。   In the configuration of the first invention, the first lens group having a positive power condenses the luminous flux from the object. The second lens group having negative power mainly performs zooming by moving on the optical axis. When the lens system is composed of three lens groups (hereinafter referred to as a three-group configuration), the third lens group is the final lens group. The third lens group has a positive power and moves on the optical axis so as to match the position of the image plane in each zoom state with a predetermined position.

なお、レンズ系が４つのレンズ群で構成される場合（以下、４群構成とする。）は、第４レンズ群が最終レンズ群になる。この第４レンズ群は負のパワーとするのがよい。そして、この第４レンズ群も光軸に沿って移動させれば、各ズーム状態における像面位置を所定の位置に一致させることができる。また、射出瞳位置についても、所定の位置に略一致させることができる。   When the lens system is configured with four lens groups (hereinafter referred to as a four-group configuration), the fourth lens group is the final lens group. The fourth lens group is preferably negative power. If the fourth lens group is also moved along the optical axis, the image plane position in each zoom state can be matched with a predetermined position. Further, the exit pupil position can also be made substantially coincident with a predetermined position.

最終レンズ群から射出された光束は、どのズーム状態においても無限遠光束となる。そして、最終レンズ群の後方に配置された結像レンズによって標本の像が形成され、接眼レンズによって像の観察が行われる。   The light beam emitted from the final lens group becomes an infinite light beam in any zoom state. Then, an image of the sample is formed by the imaging lens arranged behind the final lens group, and the image is observed by the eyepiece lens.

次に、各レンズ群の動きと光線の様子について、高倍側と低倍側で説明する。 高倍側では、第１レンズ群と第２レンズ群の間隔が大きくなり、第２レンズ群と第３レンズ群の間隔が小さくなるように、第２レンズ群と第３レンズ群が光軸に沿って移動する。そのため、軸上光線の光線高は、第１レンズ群中で最も高くなり、第１レンズ群の収斂作用によって第２レンズ群中で低くなる。そして、第２レンズ群の発散作用によって、軸上光線は光線高が上がって第３レンズ群に入射する。ここで、レンズ系が３群構成の場合は、この第３レンズ群の収斂作用によって無限遠光束に変換される。一方、レンズ系が４群構成の場合は、３群構成の第３レンズ群に比べて４群構成の第３レンズ群により強いパワーが与えられる。よって、その収斂作用によって軸上光線高が下げられて第４レンズ群に入射し、第４レンズ群の発散作用によって無限遠光束に変換される。   Next, the movement of each lens group and the state of light rays will be described on the high magnification side and the low magnification side. On the high magnification side, the second lens group and the third lens group are along the optical axis so that the distance between the first lens group and the second lens group is large and the distance between the second lens group and the third lens group is small. Move. Therefore, the height of the axial ray is highest in the first lens group, and is lowered in the second lens group due to the convergence action of the first lens group. Then, due to the diverging action of the second lens group, the axial ray rises and enters the third lens group. Here, when the lens system has a three-group configuration, it is converted into an infinite luminous flux by the convergence action of the third lens group. On the other hand, when the lens system has a four-group configuration, stronger power is given to the third lens group having the four-group configuration than the third lens group having the three-group configuration. Therefore, the axial ray height is lowered by the convergence action and is incident on the fourth lens group, and is converted into an infinite light flux by the divergence action of the fourth lens group.

軸外主光線は、第１レンズ群の後側焦点位置で光軸と交わり、第２レンズ群に入射する。そして、軸外主光線は、第２レンズ群で発散され、第３レンズ群で収斂作用を受けて射出する。レンズ系が３群構成の場合、軸外主光線の光線高は第３レンズ群で高くなる。なお、３つのレンズ群が全て球面レンズのみで構成される場合は、軸外主光線は第２、第３レンズ群で高く、第１レンズ群で低い。一方、非球面レンズを有する構成では、軸外主光線は第３レンズ群で高い。また、第３レンズ群を射出した軸外主光線を延長したときに、その延長した線が光軸と交わる位置に射出瞳が形成される。   The off-axis principal ray intersects the optical axis at the rear focal position of the first lens group and enters the second lens group. The off-axis principal ray is diverged by the second lens group, and is emitted after receiving a convergence action by the third lens group. When the lens system has a three-group configuration, the height of the off-axis principal ray is higher in the third lens group. When all three lens groups are composed of only spherical lenses, the off-axis chief rays are high in the second and third lens groups and low in the first lens group. On the other hand, in the configuration having an aspheric lens, the off-axis principal ray is high in the third lens group. Further, when the off-axis chief ray emitted from the third lens group is extended, an exit pupil is formed at a position where the extended line intersects the optical axis.

一方、レンズ系が４群構成の場合、第３レンズ群で収斂作用を受けて射出した軸外主光線は第４レンズ群に入射する。よって、軸外主光線の光線高は第４レンズ群で最も高くなる。また、第４レンズ群を射出した軸外主光線を延長したときに、その延長した線が光軸と交わる位置に射出瞳が形成される。   On the other hand, when the lens system has a four-group configuration, the off-axis chief rays that have been converged by the third lens group and emitted are incident on the fourth lens group. Accordingly, the height of the off-axis principal ray is highest in the fourth lens group. Further, when the off-axis chief ray emitted from the fourth lens group is extended, an exit pupil is formed at a position where the extended line intersects the optical axis.

高倍側では、３群構成の場合も４群構成の場合も、第１レンズ群の後側焦点位置で軸外主光線が光軸を横切る。そのため、３群構成の場合、軸外主光線の光線高の符号は、第１レンズ群と第２、第３レンズ群とで異なる。また、４群構成の場合、軸外主光線の光線高の符号は、第１レンズ群と第２レンズ群乃至第４レンズ群とで異なる。   On the high magnification side, the off-axis chief ray crosses the optical axis at the rear focal position of the first lens group in both the three-group configuration and the four-group configuration. Therefore, in the case of the three-group configuration, the sign of the off-axis principal ray is different between the first lens group and the second and third lens groups. In the case of a four-group configuration, the sign of the height of the off-axis principal ray is different between the first lens group and the second to fourth lens groups.

一方、低倍側では、第２レンズ群と第１レンズ群の間隔が小さくなり、第２レンズ群と第３レンズ群の間隔が大きくなるように、第２レンズ群と第３レンズ群が光軸に沿って移動する。そのため、軸上光線の光線高は、第２レンズ群の発散作用によって第３レンズ群中で最も高くなる。ここで、レンズ系が３群構成の場合は、第３レンズ群の収斂作用によって無限遠光束に変換される。一方、レンズ系が４群構成の場合は、３群構成の第３レンズ群に比べて、４群構成の第３レンズ群により強いパワーが与えられる。よって、その収斂作用によって軸上光線高が下げられて第４レンズ群に入射し、第４レンズ群の発散作用によって無限遠光束に変換される。   On the other hand, on the low magnification side, the second lens group and the third lens group are light so that the distance between the second lens group and the first lens group is small and the distance between the second lens group and the third lens group is large. Move along the axis. Therefore, the height of the axial ray is highest in the third lens group due to the diverging action of the second lens group. Here, when the lens system has a three-group configuration, it is converted into an infinite light beam by the converging action of the third lens group. On the other hand, when the lens system has a four-group configuration, stronger power is given to the third lens group having the four-group configuration than the third lens group having the three-group configuration. Therefore, the axial ray height is lowered by the convergence action and is incident on the fourth lens group, and is converted into an infinite light flux by the divergence action of the fourth lens group.

軸外主光線は、レンズ系が３群構成の場合では、次のようになる。３つのレンズ群が全て球面レンズのみで構成される場合は、軸外主光線は第３レンズ群中で最も高くなり、第２レンズ群中で最も低くなる。一方、非球面レンズを有する構成では、軸外主光線は第１、第３レンズ群で高く、第２レンズ群で低い。また、高倍側と同じように、軸外主光線は第１レンズ群の後側焦点位置で光軸と交わる。そのため、軸外主光線の光線高の符号は、第１レンズ群と第２、第３レンズ群とで異なる。   The off-axis chief rays are as follows when the lens system has a three-group configuration. When all three lens groups are composed of only spherical lenses, the off-axis principal ray is highest in the third lens group and lowest in the second lens group. On the other hand, in the configuration having an aspheric lens, the off-axis principal ray is high in the first and third lens groups and low in the second lens group. Similarly to the high magnification side, the off-axis principal ray intersects the optical axis at the rear focal position of the first lens group. Therefore, the sign of the height of the off-axis principal ray is different between the first lens group and the second and third lens groups.

また、レンズ系が４群構成の場合、軸外主光線は、正のパワーの第１レンズ群と負のパワーの第２レンズ群により、第１レンズ群の後側焦点位置よりも第３レンズ群側で光軸を横切り、第３レンズ群に入射する。第３レンズ群に入射した軸外主光線は、収斂作用を受けて第４レンズ群へ入射する。このとき、軸外主光線の光線高が最も高いのは、第１レンズ群である。   Further, when the lens system has a four-group configuration, the off-axis chief ray is transmitted from the first lens group having the positive power and the second lens group having the negative power to the third lens from the rear focal position of the first lens group. Crosses the optical axis on the group side and enters the third lens group. The off-axis chief ray incident on the third lens group is converged to enter the fourth lens group. At this time, the first lens unit has the highest ray height of the off-axis principal ray.

このように、レンズ系が４群構成の場合、第１レンズ群の後側焦点位置よりも第３レンズ群側で軸外主光線が光軸を横切る。そのため、軸外主光線の光線高の符号は、第１、第２レンズ群と第３、第４レンズ群とで異なる。   Thus, when the lens system has a four-group configuration, the off-axis principal ray crosses the optical axis on the third lens group side with respect to the rear focal position of the first lens group. Therefore, the sign of the height of the off-axis principal ray is different between the first and second lens groups and the third and fourth lens groups.

上記の構成において、条件式（１）を満足する場合には、高倍側での軸上色収差を良好に補正することが可能となる。本発明の顕微鏡ズーム対物レンズでは、倍率が高くなる程開口数が大きくなる。これは、高倍率になる程第１レンズ群を通過する軸上光線の光線高が高くなることを意味する。軸上光線の光線高が高いところでは、色収差が発生しやすい。そこで、第１のズーム対物レンズでは、高倍側で軸上光線高が最も高くなるレンズ群に、正パワーを持つ接合レンズを少なくとも１つ配置すると共に、条件式（１）を満足する正レンズを用いることにより、第１レンズ群で色の分散が大きく発生するのを防いでいる。このような構成により、後続する第２レンズや第３レンズ群に、色収差以外の収差を主に補正する役割を持たせることができる。   In the above configuration, when the conditional expression (1) is satisfied, it is possible to satisfactorily correct the axial chromatic aberration on the high magnification side. In the microscope zoom objective lens of the present invention, the numerical aperture increases as the magnification increases. This means that the higher the magnification, the higher the height of the axial ray passing through the first lens group. Chromatic aberration is likely to occur where the axial ray height is high. Therefore, in the first zoom objective lens, at least one cemented lens having positive power is disposed in the lens group having the highest axial ray height on the high magnification side, and a positive lens satisfying conditional expression (1) is provided. By using this, it is possible to prevent the color dispersion from occurring greatly in the first lens group. With such a configuration, the subsequent second lens and third lens group can have a role of mainly correcting aberrations other than chromatic aberration.

また、接合レンズの負レンズに異常分散性の硝材を用いることで、さらに色収差補正が良好となる。   Further, by using an anomalous dispersion glass material for the negative lens of the cemented lens, chromatic aberration correction is further improved.

条件（１）を満足しない場合には、高倍側の軸上色収差を良好に補正できないか、高倍側での開口数を高くできなくなる。そのため、実用性の高い顕微鏡ズーム対物レンズを実現することが困難になる。   If the condition (1) is not satisfied, the axial chromatic aberration on the high magnification side cannot be corrected well, or the numerical aperture on the high magnification side cannot be increased. Therefore, it becomes difficult to realize a microscope zoom objective lens having high practicality.

第２の発明の顕微鏡ズーム対物レンズは、物体から順に、正のパワーを持つ第１レンズ群、負のパワーを持つ第２レンズ群、正のパワーを持つ第３レンズ群の少なくとも３つのレンズ群で構成され、低倍側から高倍側へ変倍する際に、前記第１レンズ群と前記第２レンズ群の間隔が大きくなり、前記第２レンズ群と前記第３レンズ群の間隔が小さくなるように、前記第２レンズ群と前記第３レンズ群が光軸上を移動し、前記第２レンズ群は２つのレンズ群を少なくとも有し、該２つのレンズ群は互いに凹面を向けて構成されたことを特徴とする。   The microscope zoom objective lens according to the second aspect of the present invention includes, in order from the object, at least three lens groups including a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power. The distance between the first lens group and the second lens group increases and the distance between the second lens group and the third lens group decreases when zooming from the low magnification side to the high magnification side. As described above, the second lens group and the third lens group move on the optical axis, the second lens group has at least two lens groups, and the two lens groups are configured with their concave surfaces facing each other. It is characterized by that.

この第２の発明の顕微鏡ズーム対物レンズにおいては、第２レンズ群が２つのレンズ群を少なくとも有している。そして、その２つのレンズ群を互いに凹面を向けて配置することにより、ここで強い負のパワーが得られるようにしている。その結果、ペッツバール和を小さくすることができるが、特に、高倍側における像面の平坦性を良好にすることができる。   In the microscope zoom objective lens of the second invention, the second lens group has at least two lens groups. The two lens groups are arranged with their concave surfaces facing each other so that a strong negative power can be obtained here. As a result, the Petzval sum can be reduced, but in particular, the flatness of the image plane on the high magnification side can be improved.

なお、この２つのレンズ群が互いに凹面を向け合った構成になっていない揚合、一方のレンズ群が正のパワーを持つレンズを含むか、負のパワーのメニスカスレンズになる。正のパワーのレンズを含む場合、第２レンズ群全体の負のパワーが弱くなり、ペッツバール和を小さくすることが困難になる。また、負のパワーのメニスカスレンズの場合、互いに向き合った面の反対側の面の曲率半径が小さくなって、第２レンズ群での軸外収差が悪化してしまう。   It should be noted that the two lens groups do not have a configuration in which the concave surfaces face each other, and one lens group includes a lens having a positive power, or becomes a meniscus lens having a negative power. When a positive power lens is included, the negative power of the entire second lens group becomes weak, and it becomes difficult to reduce the Petzval sum. Further, in the case of a negative power meniscus lens, the radius of curvature of the surface opposite to the surfaces facing each other becomes small, and the off-axis aberration in the second lens group deteriorates.

第３の発明の顕微鏡ズーム対物レンズは、物体から順に、正のパワーを持つ第１レンズ群、負のパワーを持つ第２レンズ群、正のパワーを持つ第３レンズ群の少なくとも３つのレンズ群で構成され、低倍側から高倍側へ変倍する際に、前記第１レンズ群と前記第２レンズ群の間隔が大きくなり、前記第２レンズ群と前記第３レンズ群の間隔が小さくなるように、前記第２レンズ群と前記第３レンズ群が光軸上を移動し、前記第３レンズ群は２つの以上のレンズ群で構成され、正レンズと負レンズで構成された少なくとも１つの接合レンズを備えたことを特徴とする。   A microscope zoom objective lens according to a third aspect of the present invention includes, in order from an object, at least three lens groups including a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power. The distance between the first lens group and the second lens group increases and the distance between the second lens group and the third lens group decreases when zooming from the low magnification side to the high magnification side. As described above, the second lens group and the third lens group move on the optical axis, the third lens group is composed of two or more lens groups, and at least one composed of a positive lens and a negative lens. A cemented lens is provided.

第３の発明の顕微鏡ズーム対物レンズでは、低倍側において、第２レンズ群と第３レンズ群の間隔が大きくなり、第１レンズ群と第２レンズ群の間隔が小さくなる。そのため、第２レンズ群と比べると、第３レンズ群で軸上光線高と軸外主光線高が高くなる。そこで、第３レンズ群を２つ以上のレンズ群で構成し、この中の１つのレンズ群に配置した接合レンズで第１レンズ群と第２レンズ群によって発生した球面収差と色収差を主に補正している。そして、残りのレンズ群でコマ収差、非点収差、歪曲収差を良好に補正している。第３レンズ群の構成が、１つのレンズ群で構成された場合には、低倍側の球面収差、コマ収差、非点収差を良好に補正することが困難となってしまう。   In the microscope zoom objective lens of the third invention, on the low magnification side, the distance between the second lens group and the third lens group is increased, and the distance between the first lens group and the second lens group is decreased. Therefore, the axial ray height and off-axis principal ray height are higher in the third lens unit than in the second lens unit. Therefore, the third lens group is composed of two or more lens groups, and the spherical aberration and chromatic aberration generated by the first lens group and the second lens group are mainly corrected by the cemented lens arranged in one of these lens groups. is doing. The remaining lens group corrects coma, astigmatism and distortion well. When the configuration of the third lens group is a single lens group, it is difficult to satisfactorily correct low-magnification spherical aberration, coma aberration, and astigmatism.

第４の発明の顕微鏡ズーム対物レンズは、物体から順に、正のパワーを持つ第１レンズ群、負のパワーを持つ第２レンズ群、正のパワーを持つ第３レンズ群の少なくとも３つのレンズ群で構成され、低倍側から高倍側へ変倍する際に、前記第１レンズ群と前記第２レンズ群の間隔が大きくなり、前記第２レンズ群と前記第３レンズ群の間隔が小さくなるように、前記第２レンズ群と前記第３レンズ群が光軸上を移動し、前記第１レンズ群の最も物体側のレンズ群が物体側に凹面を向けた接合メニスカスレンズであって、前記接合レンズは、物体側から凹レンズ、凸レンズで構成されたことを特徴とする。   A microscope zoom objective lens according to a fourth aspect of the present invention includes, in order from an object, at least three lens groups including a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power. The distance between the first lens group and the second lens group increases and the distance between the second lens group and the third lens group decreases when zooming from the low magnification side to the high magnification side. As described above, the second lens group and the third lens group move on the optical axis, and the lens group closest to the object side of the first lens group is a cemented meniscus lens having a concave surface facing the object side, The cemented lens is constituted by a concave lens and a convex lens from the object side.

第１レンズ群の最も物体側に配置された接合メニスカスレンズは、物体側から凹レンズ、凸レンズで構成されている。ここで、この接合メニスカスレンズの接合面が負の屈折力を持つため、この接合面で軸上光線の光線高を上げる作用が生じる。そして、光束を後続のレンズ群によって収斂光束へ変換して、第２レンズ群に入射させる。つまり、第１レンズ群内にペッツバール和を抑える効果を持たせて像面平坦性を良好に補正することができる。また、その接合メニスカスレンズは物体側に凹面を向けているので、コマ収差や非点収差等の軸外収差の発生を抑えることができる。そのため、接合メニスカスレンズは、高倍側と低倍側での収差補正に効果的である。   The cemented meniscus lens arranged on the most object side of the first lens group is constituted by a concave lens and a convex lens from the object side. Here, since the cemented surface of the cemented meniscus lens has a negative refractive power, an effect of raising the ray height of the on-axis light beam occurs at the cemented surface. Then, the light beam is converted into a convergent light beam by the subsequent lens group and is incident on the second lens group. That is, the flatness of the image plane can be favorably corrected by giving the first lens group the effect of suppressing the Petzval sum. Further, since the cemented meniscus lens has a concave surface facing the object side, it is possible to suppress the occurrence of off-axis aberrations such as coma and astigmatism. Therefore, the cemented meniscus lens is effective for correcting aberrations on the high magnification side and the low magnification side.

本発明の第５の顕微鏡ズーム対物レンズは、物体から順に、正のパワーを持つ第１レンズ群、負のパワーを持つ第２レンズ群、正のパワーを持つ第３レンズ群の少なくとも３つのレンズ群で構成され、前記第１レンズ群は複数のレンズ群で構成され、低倍側から高倍側へ変倍する際に、前記第１レンズ群と前記第２レンズ群の間隔が大きくなり、前記第２レンズ群と前記第３レンズ群の間隔が小さくなるように前記第２レンズ群と前記第３レンズ群が光軸上を移動し、以下の条件（２）、（３）を満足することを特徴とする。   The fifth microscope zoom objective lens according to the present invention includes, in order from an object, at least three lenses of a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power. The first lens group is composed of a plurality of lens groups, and when changing magnification from the low magnification side to the high magnification side, the interval between the first lens group and the second lens group is increased, The second lens group and the third lens group move on the optical axis so that the distance between the second lens group and the third lens group becomes small, and the following conditions (2) and (3) are satisfied. It is characterized by.

０．２５≦Ｄ１／Ｄ０≦０．７ ・・・（２）
０．０５≦Ｄ２／Ｄ０≦０．５ ・・・（３）
ただし、Ｄ１は、前記第１レンズ群の全長、
Ｄ２は、前記第２レンズ群の低倍側から高倍側への移動量、
Ｄ０は、高倍側の顕微鏡ズーム対物レンズの全長、
である。 0.25 ≦ D1 / D0 ≦ 0.7 (2)
0.05 ≦ D2 / D0 ≦ 0.5 (3)
Where D1 is the total length of the first lens group,
D2 is the amount of movement of the second lens group from the low magnification side to the high magnification side,
D0 is the total length of the microscope zoom objective lens on the high magnification side,
It is.

ここで、レンズ系が４群構成の場合は、第１レンズ群は接合レンズを含み、低倍側から高倍側へ変倍する際に第４レンズ群も光軸に沿って移動する。そして、条件（２）、（３）の代わりに、次の条件（２’），（３’）を満足する。   When the lens system has a four-group configuration, the first lens group includes a cemented lens, and the fourth lens group also moves along the optical axis when zooming from the low magnification side to the high magnification side. Then, the following conditions (2 ') and (3') are satisfied instead of the conditions (2) and (3).

０．２５≦Ｄ１／Ｄ０≦０．５ ・・・（２’）
０．１５≦Ｄ２／Ｄ０≦０．３ ・・・（３’）
上記の構成において、条件（２’）を満足すると、特に高倍側の光学性能を良好に補正するためのレンズ群を配置するスペースを設けることが可能となる。 0.25 ≦ D1 / D0 ≦ 0.5 (2 ′)
0.15 ≦ D2 / D0 ≦ 0.3 (3 ′)
In the above-described configuration, when the condition (2 ′) is satisfied, it is possible to provide a space for arranging a lens group for particularly favorably correcting the optical performance on the high magnification side.

また、条件（３’）を満足することで、変倍作用を持つ第２レンズ群が光軸上を移動するスペースを十分に設け、３倍以上の高い変倍比を得ることができる。 条件（２’）の上限の０．５を上回ると、高倍側の収差補正は容易になるが、変倍に伴う第２レンズ群の移動量が少なくなって高い変倍比を得ることができない。条件（２’）の下限の０．２５を下回ると、第１レンズ群の全長が短くなって高倍側の球面収差や軸上色収差を十分に補正することができなくなる。   Further, by satisfying the condition (3 ′), a sufficient space for moving the second lens group having a zooming action on the optical axis can be provided, and a high zooming ratio of 3 times or more can be obtained. If the upper limit of 0.5 of the condition (2 ′) is exceeded, aberration correction on the high magnification side becomes easy, but the amount of movement of the second lens group associated with zooming decreases, and a high zoom ratio cannot be obtained. . If the lower limit of 0.25 of the condition (2 ') is not reached, the total length of the first lens group will be shortened, and it will not be possible to sufficiently correct spherical aberration and axial chromatic aberration on the high magnification side.

また、条件（３’）の下限の０．１５を下回ると、第２レンズ群の変倍時の移動量が少なくなる。したがって、高い変倍比を得られない。あるいは、第２レンズ群の負のパワーが強くなって高倍側及び低倍側の収差性能が悪化してしまう。条件（３’）の上限の０．３を上回ると、第２レンズ群の変倍時の移動量が大きくなる。したがって、変倍に伴う像面を補正するための第３レンズ群と第４レンズ群の移動量が極端に少なくなるために、高い変倍比が得られない。   If the lower limit of 0.15 of the condition (3 ′) is not reached, the amount of movement of the second lens unit during zooming is reduced. Therefore, a high zoom ratio cannot be obtained. Alternatively, the negative power of the second lens group is increased, and the aberration performance on the high magnification side and the low magnification side is deteriorated. If the upper limit of 0.3 of the condition (3 ') is exceeded, the amount of movement of the second lens group during zooming will increase. Therefore, since the amount of movement of the third lens group and the fourth lens group for correcting the image plane accompanying zooming is extremely small, a high zoom ratio cannot be obtained.

また、第１レンズ群に少なくとも１つの非球面を設ける場合は、凸面を非球面にして、上記条件（２）、（３）の代わりに、次の条件（２），（３”）を満足することが望ましい。   When providing at least one aspherical surface in the first lens group, the convex surface is aspherical and the following conditions (2) and (3 ″) are satisfied instead of the above conditions (2) and (3). It is desirable to do.

０．２５≦Ｄ１／Ｄ０≦０．７ ・・・（２）
０．０５≦Ｄ２／Ｄ０≦０．３５ ・・・（３”）
第１レンズ群内の少なくとも１つの凸面を非球面にすることで、高倍側の球面収差を良好に補正することが可能となる。これは、高倍側では開口数の大きな光線を短い距離で収斂させるため、球面収差は第１レンズ群で最も大きく発生することによる。よって、第１レンズ群に非球面を設けることは、球面収差の補正に最も効果的である。これにより、顕微鏡ズーム対物レンズにおいて、高開口数化や長作動距離化を実現することができる。 0.25 ≦ D1 / D0 ≦ 0.7 (2)
0.05 ≦ D2 / D0 ≦ 0.35 (3 ″)
By making at least one convex surface in the first lens group an aspherical surface, it is possible to favorably correct spherical aberration on the high magnification side. This is because, on the high magnification side, light with a large numerical aperture is converged at a short distance, so that the spherical aberration occurs most in the first lens group. Therefore, providing an aspheric surface in the first lens group is most effective for correcting spherical aberration. Thereby, in the microscope zoom objective lens, a high numerical aperture and a long working distance can be realized.

上記の構成に加えて条件（２）を満足すると、特に高倍側の光学性能を良好に補正するためのレンズ群を配置するためのスペースを確保することが可能となる。また、条件（３”）を満足することで、変倍作用を持つ第２レンズ群が光軸上を移動するためのスペースを十分確保できる。この結果、４倍以上の高い変倍比を得ることができる。   When the condition (2) is satisfied in addition to the above-described configuration, it is possible to secure a space for arranging a lens group for satisfactorily correcting the optical performance particularly on the high magnification side. Further, by satisfying the condition (3 ″), a sufficient space for the second lens group having a zooming action to move on the optical axis can be secured. As a result, a high zooming ratio of 4 times or more is obtained. be able to.

なお、第１レンズ群に非球面がない場合、すなわち全て球面レンズで構成した場合は、球面収差の補正が難しくなる。そのため、同じレンズ枚数で高倍化、高開口数化あるいは長作動距離化を実現することは難しい。球面レンズだけで高倍側の球面収差を良好に補正しようとすると、非球面を含む場合に比べて第１レンズ群のレンズ枚数が多くなり、顕微鏡ズーム対物レンズの全長が長なる。また、レンズ枚数も増えてコストアップになるので好ましくない。   If the first lens group does not have an aspherical surface, that is, if it is composed entirely of spherical lenses, it is difficult to correct spherical aberration. Therefore, it is difficult to increase the magnification, increase the numerical aperture, or increase the working distance with the same number of lenses. If the spherical aberration on the high magnification side is to be corrected satisfactorily using only the spherical lens, the number of lenses in the first lens group increases and the total length of the microscope zoom objective lens becomes longer than when including an aspherical surface. In addition, the number of lenses increases and the cost increases, which is not preferable.

条件（２）の上限０．７を上回ると、高倍側の収差補正は容易になるが、変倍に伴う前記第２レンズ群の移動量が少なくなって高い変倍比を得ることができない。また、条件（２）の下限０．２５を下回ると、第１レンズ群の全長が短くなって高倍側の球面収差や軸上色収差を十分に補正することができなくなる。   If the upper limit of 0.7 of condition (2) is exceeded, aberration correction on the high magnification side becomes easy, but the amount of movement of the second lens group associated with zooming decreases, and a high zoom ratio cannot be obtained. If the lower limit of 0.25 of the condition (2) is not reached, the total length of the first lens group becomes short, and high-magnification spherical aberration and axial chromatic aberration cannot be corrected sufficiently.

一方、条件（３”）の上限０．３５を上回ると、第２レンズ群の変倍時の移動量が大きくなる。したがって、変倍に伴う像面を補正するための第３レンズ群の移動量が極端に少なくなるために、高い変倍比が得られない。また、条件（３”）の下限０．０５を下回ると、第２レンズ群の変倍時の移動量が少なくなる。したがって、高い変倍比を得られない。あるいは、第２レンズ群の負のパワーが強くなって、高倍側及び低倍側の収差性能が悪化する。   On the other hand, when the upper limit of 0.35 of the condition (3 ″) is exceeded, the amount of movement of the second lens group during zooming increases. Therefore, the movement of the third lens group for correcting the image plane accompanying zooming. Since the amount is extremely small, a high zoom ratio cannot be obtained. Also, if the lower limit of 0.05 of the condition (3 ″) is not reached, the amount of movement of the second lens unit during zooming is small. Therefore, a high zoom ratio cannot be obtained. Alternatively, the negative power of the second lens group becomes strong, and the aberration performance on the high magnification side and low magnification side deteriorates.

また、第１レンズ群内の非球面だけでなく、第２、第３レンズ群内に非球面を設けることで、低倍から高倍全域での収差補正を向上させることが可能となる。第３レンズ群では、ズーム全域で比較的光線高が高いので、第３レンズ群内に非球面を備えることは、レンズ枚数の低減や収差補正の点で効果的である。   Further, by providing not only the aspheric surface in the first lens group but also the aspheric surfaces in the second and third lens groups, it becomes possible to improve aberration correction in the entire low to high magnification range. Since the third lens group has a relatively high ray height throughout the entire zoom range, providing an aspheric surface in the third lens group is effective in reducing the number of lenses and correcting aberrations.

第６の発明の顕微鏡ズーム対物レンズは、第４の発明に加えて、前記第１レンズ群の物体側に凹面を向けた前記接合メニスカスレンズの最も物体側の曲率半径をＲＧ１、前記接合メニスカスレンズの最も第２レンズ群側の曲率半径をＲＧ２、凹レンズの屈折率をＧｎ１、凸レンズの屈折率をＧｎ２としたとき、以下の条件（４）、（５）を満足することを特徴とする。   In addition to the fourth invention, a microscope zoom objective lens according to a sixth aspect of the present invention has a radius of curvature closest to the object side of the cemented meniscus lens having a concave surface facing the object side of the first lens group, RG1, and the cemented meniscus lens. When the radius of curvature closest to the second lens group is RG2, the refractive index of the concave lens is Gn1, and the refractive index of the convex lens is Gn2, the following conditions (4) and (5) are satisfied.

Ｇｎ１−Ｇｎ２≧０．１５ ・・・（４）
０．３≦ＲＧ２／ＲＧ１≦２. ０ ・・・（５）
条件（４）、条件（５）の何れかを満足した場合、その接合メニスカスレンズによって、ペッツバール和を小さくしながら、かつ、高倍側で球面収差とコマ収差を良好に補正することが可能となる。 Gn1-Gn2 ≧ 0.15 (4)
0.3 ≦ RG2 / RG1 ≦ 2.0 (5)
When either condition (4) or condition (5) is satisfied, the cemented meniscus lens can satisfactorily correct spherical aberration and coma aberration on the high magnification side while reducing the Petzval sum. .

条件（４）の下限の０．１５を下回ると、その接合メニスカスレンズの負屈折力が弱くなって、ペッツバール和が大きくなるので、像面の平坦性が悪化するので好ましくない。   If the lower limit of 0.15 of the condition (4) is not reached, the negative refractive power of the cemented meniscus lens becomes weak and the Petzval sum increases, which is not preferable because the flatness of the image surface deteriorates.

また条件（５）の上限の２．０を上回ると、その接合メニスカスレンズの負屈折力が強くなってペッツバール和は小さくなるが、高倍側での軸上光線高が高くなりすぎて球面収差、コマ収差が悪化して好ましくない。   If the upper limit of 2.0 of the condition (5) is exceeded, the negative refractive power of the cemented meniscus lens becomes strong and the Petzval sum becomes small, but the axial ray height on the high magnification side becomes too high and spherical aberration, The coma aberration is deteriorated, which is not preferable.

条件（５）の下限の０．３下回ると、そのメニスカスレンズの接合面の負屈折力が弱くなって、ペッツバール和が大きくなる。   If the lower limit of 0.3 of the condition (5) is not reached, the negative refractive power of the cemented surface of the meniscus lens becomes weak and the Petzval sum increases.

条件（４）、（５）を共に満足する場合には、より一層の収差補正が可能となる。   When both the conditions (4) and (5) are satisfied, further aberration correction can be performed.

第７の発明の顕微鏡ズーム対物レンズは、第１〜４の発明において、前記顕微鏡ズーム対物レンズは３群構成であって、前記第１レンズ群の物体から軸上光線高が最も高くなるレンズ群までを前側第１レンズ群、軸上光線高が最も高いレンズ群から最も第２レンズ群側までのレンズ群を後側第１レンズ群とし、前側第１レンズ群は、物体側から順に、物体側に凹面を向けた接合メニスカスレンズ、正のパワーを持つ単レンズ、凹レンズと凸レンズで構成された接合レンズ、正のパワーを持つ凸レンズの少なくとも４つのレンズ群で構成され、後側第１レンズ群中に、物体側から凹レンズと凸レンズで接合された正のパワーの接合レンズと、第２レンズ群側に凹面を向けたメニスカスレンズとを少なくとも１つ備えたことを特徴とする。   A microscope zoom objective lens according to a seventh invention is the lens group according to any one of the first to fourth inventions, wherein the microscope zoom objective lens has a three-group configuration, and an axial ray height is highest from an object of the first lens group. Are the front first lens group, the lens group from the lens group with the highest axial ray height to the second lens group side is the rear first lens group, and the front first lens group is an object in order from the object side. Consists of at least four lens groups: a cemented meniscus lens with a concave surface facing the side, a single lens with positive power, a cemented lens composed of a concave lens and a convex lens, and a convex lens with positive power. It is characterized in that at least one positive power cemented lens cemented by a concave lens and a convex lens from the object side and a meniscus lens having a concave surface facing the second lens group side are provided.

この構成によるレンズ群の作用について説明する。物体からの光束は、前側第１レンズ群では、接合メニスカスレンズの接合面による負の屈折力によって光線高が上げられた（発散する方向に屈折された）後、正のパワーを持つ単レンズによって収束する方向に（発散の度合いが小さくなるように）に屈折される。そして、凹レンズと凸レンズで構成された接合レンズと正のパワーを持つ凸レンズよって収斂光束に変換される。なお、軸上光線高は正のパワーを持つ凸レンズの位置で最も高くなる。   The operation of the lens group having this configuration will be described. In the first lens group on the front side, the light flux from the object is raised by the negative refractive power of the cemented surface of the cemented meniscus lens (refracted in the direction of divergence) and then by a single lens having a positive power. It is refracted in the direction of convergence (so that the degree of divergence decreases). Then, it is converted into a convergent light beam by a cemented lens composed of a concave lens and a convex lens and a convex lens having a positive power. The axial ray height is highest at the position of the convex lens having positive power.

次に、後側第１レンズ群では、光線高が下がりながらレンズ群に光線が入射してくる。凹レンズ、凸レンズの順に接合された接合レンズに入射した光線は、接合レンズの接合面の負のパワーで屈折作用を受けた後、第２レンズ群側に凹面を向けたメニスカスレンズを通過して第２レンズ群へ入射する。   Next, in the rear first lens group, the light beam enters the lens group while the light beam height decreases. The light beam incident on the cemented lens that is cemented in the order of the concave lens and the convex lens is refracted by the negative power of the cemented surface of the cemented lens, and then passes through the meniscus lens with the concave surface facing the second lens group. The light enters the two lens group.

さて、高倍から低倍までの収差を良好に補正するためには、第１レンズ群から第３レンズ群の各群単独で収差の発生を少なくしておくことが必要である。そして、各群で補正しきれなかった収差を、第１レンズ群から第３レンズ群全体によって、最終的に補正することが好ましい。   In order to satisfactorily correct aberrations from high magnification to low magnification, it is necessary to reduce the occurrence of aberration in each of the first to third lens groups. It is preferable that aberrations that cannot be corrected in each group are finally corrected by the entire first to third lens groups.

そこで、第１レンズ群での収差、特に球面収差を抑えるために、第７の発明では、接合レンズの接合を利用している。すなわち、前側第１レンズ群の接合メニスカスレンズと接合レンズの接合面に負のパワーを持たせて正の球面収差を発生させ、前側第１レンズ群中の残りのレンズ群で発生する負の球面収差を略キャンセルしている。さらに、後側第１レンズ群の接合レンズにおける接合面の負のパワーでも正の球面収差を発生させて、前側第１レンズ群で補正しきれなかった球面収差を補正して、第１レンズ群全体で発生する球面収差の量を小さく抑えるようにしている。   Therefore, in order to suppress the aberration in the first lens group, particularly the spherical aberration, the seventh invention uses the cemented lens. That is, a negative spherical surface is generated in the remaining lens groups in the front first lens group by causing the cemented meniscus lens of the front first lens group and the cemented surface of the cemented lens to have negative power to generate positive spherical aberration. Aberrations are almost cancelled. Further, positive spherical aberration is generated even with the negative power of the cemented surface in the cemented lens of the rear first lens group, and spherical aberration that could not be corrected by the front first lens group is corrected, and the first lens group is corrected. The amount of spherical aberration that occurs as a whole is kept small.

また、前側第１レンズ群で発生するコマ収差を、後側第１レンズ群のメニスカスレンズによって補正することができる。したがって、第１レンズ群内の前側第１レンズ群と後側第１レンズ群で、逆方向の収差を与えることで、高倍側での球面収差とコマ収差を良好に補正することが可能となる。しかも、第１レンズ群中に３つの接合レンズを備えることにより、高倍側の軸上色収差についても良好に補正することが可能となった。   Further, coma generated in the front first lens group can be corrected by the meniscus lens in the rear first lens group. Therefore, it is possible to satisfactorily correct the spherical aberration and the coma aberration on the high magnification side by giving aberrations in the reverse direction between the front first lens group and the rear first lens group in the first lens group. . In addition, by providing three cemented lenses in the first lens group, it is possible to satisfactorily correct the axial chromatic aberration on the high magnification side.

さらに、上記負のパワーを持つ面はペッツバール和を小さくする働きも併せて有するので、像面の平坦性を良好にすることができる。   Furthermore, since the surface having the negative power also has a function of reducing the Petzval sum, the flatness of the image surface can be improved.

さらに、第８の発明の顕微鏡ズーム対物レンズは、第１〜４の発明において、前記第１レンズ群の焦点距離をＦ１、前記第２レンズ群の焦点距離をＦ２としたとき、以下の条件（６）を満足することを特徴とする。   Furthermore, the microscope zoom objective lens according to an eighth aspect of the present invention is the first to fourth aspects of the invention when the focal length of the first lens group is F1 and the focal length of the second lens group is F2. 6) is satisfied.

−２．５≦Ｆ１／Ｆ２≦―０．２ ・・・（６）
条件（６）は、ズーム対物レンズをコンパクトかつ低倍側から高倍側までの収差性能を良好に保つための条件である。この条件は、第１レンズ群と第２レンズ群の焦点距離の比率を表しており、そして、この条件を満足することで、高い変倍比を持ち、全長を５５ｍｍから１１０ｍｍ前後と、従来の対物レンズに比べてやや長い程度の長さでズーム対物レンズを構成することが可能になる。また、低倍側から高倍側までの範囲の収差性能を、良好に維持することが可能となる。 −2.5 ≦ F1 / F2 ≦ −0.2 (6)
Condition (6) is a condition for keeping the zoom objective lens compact and maintaining good aberration performance from the low magnification side to the high magnification side. This condition represents the ratio of the focal lengths of the first lens group and the second lens group. By satisfying this condition, the zoom lens has a high zoom ratio and a total length of around 55 mm to 110 mm. The zoom objective lens can be configured with a length that is slightly longer than that of the objective lens. In addition, aberration performance in the range from the low magnification side to the high magnification side can be maintained satisfactorily.

条件（６）の下限の−２．５を下回ると、負のパワーを持つ第２レンズ群のパワーが強くなって、高倍側の軸上性能と低倍側の軸外性能が悪化する。これは、第２レンズ群の負のパワーが強いと、第２レンズ群で光線が強く曲げられるために低倍側のコマ収差や高倍側の球面収差が発生し、この結果、高倍側と低倍側の性能を良好に維持することができなくなってしまうことによる。この状態で収差性能を改善しようとすると、レンズ枚数が増えてしまい、ズーム対物レンズの全長が長くなる。また、高倍側の収差性能が犠牲になって低倍側と高倍側両方の収差性能の良好にすることができない。しかも、レンズ枚数が増えてコスト高にもなる。逆に、第２レンズ群のレンズ枚数の増加を抑えようとすると、第３レンズ群の枚数が増えてしまう。このため、第２レンズ群の光軸上を移動する空間が少なくなってしまい、ズーム変倍比を高くとることができない。   If the lower limit of -2.5 of condition (6) is not reached, the power of the second lens group having negative power becomes strong, and the on-axis performance on the high magnification side and the off-axis performance on the low magnification side deteriorate. This is because, when the negative power of the second lens group is strong, light rays are strongly bent in the second lens group, so that coma aberration on the low magnification side and spherical aberration on the high magnification side are generated. This is because the performance on the double side cannot be maintained well. If an attempt is made to improve the aberration performance in this state, the number of lenses increases and the overall length of the zoom objective lens becomes longer. Further, the aberration performance on both the low magnification side and the high magnification side cannot be improved at the expense of aberration performance on the high magnification side. In addition, the number of lenses increases and the cost increases. Conversely, if the increase in the number of lenses in the second lens group is to be suppressed, the number of third lens groups will increase. For this reason, the space that moves on the optical axis of the second lens group is reduced, and the zoom magnification ratio cannot be increased.

条件（６）の上限の−０．２を上回ると、負のパワーを持つ第２レンズ群のパワーが弱くなって、大きな変倍比をとることができなくなる。また、無理に変倍比を大きくしようとするとズーム対物レンズの全長が長くなる問題がある。また、第２レンズ群の負のパワーが小さくなるために、高倍側の像面湾曲を補正不足となって像面の平坦性が悪化するので好ましくない。   If the upper limit of -0.2 of the condition (6) is exceeded, the power of the second lens group having negative power becomes weak, and a large zoom ratio cannot be obtained. In addition, if the zoom ratio is forcibly increased, the entire length of the zoom objective lens becomes longer. In addition, since the negative power of the second lens group becomes small, the field curvature on the high magnification side is insufficiently corrected and the flatness of the image plane deteriorates, which is not preferable.

第９の発明の顕微鏡ズーム対物レンズは、第８の発明において、前記第２レンズ群の焦点距離をＦ２、前記第３レンズ群の焦点距離をＦ３としたとき、以下の条件（７）を満足することを特徴とする。   The microscope zoom objective lens of the ninth invention satisfies the following condition (7) when the focal length of the second lens group is F2 and the focal length of the third lens group is F3 in the eighth invention. It is characterized by doing.

−７．５≦Ｆ３／Ｆ２≦−１．５ ・・・（７）
この条件は、第２レンズ群と第３レンズ群の焦点距離の比を表しており、高いズーム変倍比を保ちながらズーム対物レンズの全長を５５ｍｍから１１０ｍｍ前後とコンパクトにする条件である。この条件（７）を満足すると、低倍側から高倍側にわたっての収差を良好に補正して、ズーム変倍比を高くすることができる。 −7.5 ≦ F3 / F2 ≦ −1.5 (7)
This condition represents the ratio of the focal lengths of the second lens group and the third lens group, and is a condition for reducing the overall length of the zoom objective lens from 55 mm to around 110 mm while maintaining a high zoom magnification ratio. When this condition (7) is satisfied, aberrations from the low magnification side to the high magnification side can be corrected well, and the zoom magnification ratio can be increased.

条件（７）の下限の−７．５を下回ると、負のパワーを持つ第２レンズ群のパワーが強くなる。そのため、条件（６）のときと同様に、高倍側の軸上性能と低倍側の軸外性能が悪化する。これは、第２レンズ群で光線が強く曲げられるために、低倍側のコマ収差や高倍側の球面収差が発生して高倍側と低倍側の性能を良好に維持することができなくなってしまうことによる。また、第３レンズ群での低倍側での光線高が高くなり、レンズ外径が大きくなるので好ましくない。   If the lower limit of -7.5 of condition (7) is not reached, the power of the second lens group having negative power becomes strong. Therefore, as in the condition (6), the on-axis performance on the high magnification side and the off-axis performance on the low magnification side are deteriorated. This is because the light beam is strongly bent in the second lens group, so that coma aberration on the low magnification side and spherical aberration on the high magnification side occur, and the performance on the high magnification side and the low magnification side cannot be maintained well. Because it ends up. Further, the height of the light beam on the low magnification side in the third lens group is increased, and the outer diameter of the lens is increased.

条件（７）の上限の−１．５を上回ると、負のパワーを持つ第２レンズ群のパワーが弱くなる。そのため、条件（６）のときと同様に、大きな変倍比をとることができなくなる。また、変倍比を大きくしようとすると、ズーム対物レンズの全長が長くなる問題がある。また、第２レンズ群の負のパワーが小さくなるために、高倍側の像面湾曲を補正不足となって像面の平坦性が悪化するので好ましくない。   When the upper limit of -1.5 of condition (7) is exceeded, the power of the second lens group having negative power becomes weak. Therefore, as in the case of condition (6), a large zoom ratio cannot be obtained. Further, if the zoom ratio is increased, there is a problem that the entire length of the zoom objective lens becomes long. In addition, since the negative power of the second lens group becomes small, the field curvature on the high magnification side is insufficiently corrected and the flatness of the image plane deteriorates, which is not preferable.

なお、レンズ系が３群構成の場合は、条件（７）の代わりに、以下の条件（７’）を満足することがより好ましい。   When the lens system has a three-group configuration, it is more preferable to satisfy the following condition (7 ′) instead of the condition (7).

−６．５≦Ｆ３／Ｆ２≦−２．０ ・・・（７’）
また、条件（６）と条件（７）、あるいは、条件（６）と条件（７’）を同時に満足すれば、ズーム比を高くしながら、全長をコンパクトに構成したズーム対物レンズを実現できる。しかも、低倍側から高倍側にわたって収差を良好に補正することができるので、より好ましい。 −6.5 ≦ F3 / F2 ≦ −2.0 (7 ′)
Further, if the condition (6) and the condition (7) or the condition (6) and the condition (7 ′) are satisfied at the same time, it is possible to realize a zoom objective lens having a compact overall length while increasing the zoom ratio. In addition, aberration can be favorably corrected from the low magnification side to the high magnification side, which is more preferable.

第１０の発明の顕微鏡ズーム対物レンズは、第１〜４の発明において、前記顕微鏡ズーム対物レンズは３群構成であって、低倍から高倍へと変倍する際に、作動距離が短くなるように、前記第１レンズ群は前記第２レンズ群とは反対方向へ光軸に沿って移動することを特徴とする。   The microscope zoom objective lens according to a tenth aspect of the present invention is the microscope zoom objective lens according to any of the first to fourth aspects, wherein the microscope zoom objective lens has a three-group configuration, and the working distance is shortened when zooming from low magnification to high magnification. In addition, the first lens group moves along the optical axis in the opposite direction to the second lens group.

高倍側へ変倍の際に作動距離が短くなることで、第１レンズ群内を通過する軸上光線高を抑える作用が生じる。そのため、特に球面収差と軸上色収差を良好に補正することが可能である。この構成においても、第２レンズ群が主に変倍を行ない、第３レンズ群が変倍に伴う像面位置の変化を一定にし、低倍側から高倍側での収差補正の作用は、前述したズーム対物レンズの場合と同様である。   When the working distance is shortened at the time of zooming to the high magnification side, an effect of suppressing the height of the on-axis light beam passing through the first lens group occurs. Therefore, it is possible to satisfactorily correct especially spherical aberration and axial chromatic aberration. Also in this configuration, the second lens group mainly performs zooming, the third lens group makes the change of the image plane position accompanying zooming constant, and the aberration correction operation from the low-magnification side to the high-magnification side is described above. This is the same as the case of the zoom objective lens.

第１１の発明の顕微鏡ズーム対物レンズは、第５の発明において、以下の条件（８）を満足することを特徴とする。   A microscope zoom objective lens according to an eleventh aspect of the invention is characterized in that, in the fifth aspect of the invention, the following condition (8) is satisfied.

０＜ＦＢ1 ／Ｄ1 ≦０．４ ・・・（８）
ただし、ＦＢ1 は、前記第１レンズ群の前記第２レンズ群側に最も近いレンズ面から、前記第１レンズ群の後側焦点位置までの距離である。 0 <FB1 / D1 ≦ 0.4 (8)
Where FB1 is the distance from the lens surface closest to the second lens group side of the first lens group to the rear focal position of the first lens group.

条件式（８）を満足することで、ズーム対物レンズの射出瞳位置を、低倍側で第１レンズ群側に近く位置することなく、高倍側に近づけることが可能となる。つまり、低倍側では、第１レンズ群と第２レンズ群の間隔が小さくなるので、第１レンズ群の後側焦点位置よりも物体側に第２レンズ群が移動する。そのため、第１レンズ群と第２レンズ群による２つのレンズ群の後側焦点位置は、第１レンズ群の後側焦点位置よりも第３レンズ群側へ移動する。第２レンズ群は負のパワーを持つので、第２レンズ群に入射した主光線の射出角度が緩くなる。その主光線は、第３レンズ群（構成によっては、第３レンズ群に続くレンズ群）を経て像側へ射出するために、低倍側での射出瞳位置が第１レンズ群から離れる方向に位置することになり、高倍側の射出瞳位置に近づけることが可能となる。   By satisfying conditional expression (8), the exit pupil position of the zoom objective lens can be brought closer to the high magnification side without being located closer to the first lens group side on the low magnification side. In other words, on the low magnification side, the distance between the first lens group and the second lens group becomes small, so that the second lens group moves closer to the object side than the rear focal position of the first lens group. Therefore, the rear focal position of the two lens groups of the first lens group and the second lens group moves to the third lens group side from the rear focal position of the first lens group. Since the second lens group has a negative power, the emission angle of the principal ray incident on the second lens group becomes gentle. Since the chief ray is emitted to the image side through the third lens group (the lens group that follows the third lens group depending on the configuration), the exit pupil position on the low magnification side is away from the first lens group. Therefore, it is possible to approach the exit pupil position on the high magnification side.

しかも、第２レンズ群から射出する主光線角度が緩くなることにより、第３レンズ群（構成によっては、第３レンズ群に続くレンズ群）での軸外光束の光線高を下げることができ、低倍側の軸外収差を良好に補正できる。また、第３レンズ群（構成によっては、第３レンズ群に続くレンズ群）の有効径が小さくなり、移動レンズ群の構成をコンパクトに構成できるので好ましい構成である。   In addition, since the chief ray angle emitted from the second lens group becomes loose, the ray height of the off-axis light beam in the third lens group (the lens group following the third lens group depending on the configuration) can be lowered, The off-axis aberration on the low magnification side can be corrected satisfactorily. In addition, the effective diameter of the third lens group (the lens group following the third lens group depending on the configuration) is reduced, and the configuration of the moving lens group can be made compact, which is a preferable configuration.

条件（８）の下限の０を下回ると、第１レンズ群の後側焦点位置は、第１レンズ群中にあるので、低倍側では第２レンズ群に入射する主光線高が高くなる。第２レンズ群は負のパワーを持つので、第２レンズ群の射出光束は光線高が高く主光線角度がきつくなる。そのため、低倍側での収差性能を補正することが困難になる。しかも、射出瞳位置は低倍側では第１レンズ群側に近く位置することになるので、射出瞳位置の変動が大きくなり好ましくない。条件（８）の上限の０．４を上回ると、第１レンズ群の正のパワーが小さくなるので、高倍側での収差補正を良好に補正することができなくなったり、高倍への変倍や高開口数を維持するのが困難になってしまう。   If the lower limit of 0 of the condition (8) is not reached, the back focal position of the first lens group is in the first lens group, so that the principal ray height incident on the second lens group becomes higher on the low magnification side. Since the second lens group has a negative power, the luminous flux emitted from the second lens group has a high ray height and the chief ray angle becomes tight. Therefore, it becomes difficult to correct aberration performance on the low magnification side. Moreover, since the exit pupil position is located closer to the first lens group side on the low magnification side, the variation of the exit pupil position becomes large, which is not preferable. If the upper limit of 0.4 of the condition (8) is exceeded, the positive power of the first lens group becomes small, so that aberration correction on the high magnification side cannot be corrected satisfactorily, It becomes difficult to maintain a high numerical aperture.

第１２の発明の顕微鏡ズーム対物レンズは、第５、第１１の発明において、前記顕微鏡ズーム対物レンズは４群構成であって、第２レンズ群の焦点距離をＦ２、第３レンズ群の焦点距離をＦ３、第４レンズ群の焦点距離をＦ４としたときに、以下の条件（９）、（１０）を満足することを特徴とする。   The microscope zoom objective lens according to a twelfth aspect of the present invention is the microscope zoom objective lens according to the fifth and eleventh aspects, wherein the microscope zoom objective lens has a four-group configuration, the focal length of the second lens group is F2, and the focal length of the third lens group. When F3 is F3 and the focal length of the fourth lens group is F4, the following conditions (9) and (10) are satisfied.

−３≦Ｆ３／Ｆ２≦−１．５ ・・・（９）
３≦Ｆ４／Ｆ２≦６ ・・・（１０）
条件式（９）と条件（１０）を満足すると、第３レンズ群と第４レンズ群の変倍時の移動量を抑えて、高い変倍比を維持しながらズーム全域の光学性能を良好にできる。しかも、本発明の顕微鏡ズーム対物レンズの全長を６０ｍｍから９０ｍｍ前後とコンパクトに構成でき、低倍側と高倍側での射出瞳位置を略一定の所定の位置に設定することが可能となる。本発明の顕微鏡ズーム対物レンズの全長を、従来の変倍の手段に比べて短く構成できることは、顕微鏡のシステムや操作性からも好ましいのは言うまでもない。 −3 ≦ F3 / F2 ≦ −1.5 (9)
3 ≦ F4 / F2 ≦ 6 (10)
If conditional expression (9) and condition (10) are satisfied, the amount of movement of the third lens group and the fourth lens group during zooming is suppressed, and the optical performance in the entire zoom range is improved while maintaining a high zoom ratio. it can. In addition, the entire length of the microscope zoom objective lens of the present invention can be made compact, from about 60 mm to about 90 mm, and the exit pupil positions on the low magnification side and the high magnification side can be set at substantially constant predetermined positions. Needless to say, it is preferable from the viewpoint of the microscope system and operability that the entire length of the microscope zoom objective lens of the present invention can be made shorter than that of the conventional zooming means.

条件（９）の上限の−１．５を上回ると、第２レンズ群の負のパワーが弱くなるので、高い変倍比にできない。また、変倍比を大きくとった場合には、顕微鏡ズーム対物レンズの全長が長くなる問題がある。また、第２レンズ群の負のパワーが弱くなるために、高倍側の像面湾曲が補正不足となって像面の平坦性が悪化するので好ましくない。あるいは、第３レンズ群の正のパワーがきつくなった場合には、低倍側での収差性能の悪化及び射出瞳位置が第１レンズ群に近く位置するので好ましくない。   If the upper limit of -1.5 of the condition (9) is exceeded, the negative power of the second lens group becomes weak, so a high zoom ratio cannot be achieved. In addition, when the zoom ratio is large, there is a problem that the total length of the microscope zoom objective lens becomes long. Further, since the negative power of the second lens group becomes weak, the field curvature on the high magnification side is insufficiently corrected and the flatness of the image surface is deteriorated, which is not preferable. Alternatively, when the positive power of the third lens group becomes tight, it is not preferable because the aberration performance is deteriorated on the low magnification side and the exit pupil position is located close to the first lens group.

条件式（９）の下限の−３を下回ると、負のパワーを持つ第２レンズ群のパワーが強くなるので、高倍側の軸上性能と低倍側の軸外性能が悪化する。これは、第２レンズ群で光線が強く曲げられることによるもので、低倍側のコマ収差や高倍側の球面収差が発生して高倍側と低倍側の性能を良好に維持することができなくなってしまう。また、第３レンズ群での低倍側での光線高が高くなり、レンズ外径が大きくなるので好ましくない。あるいは、第３レンズ群の正のパワーが緩くなるので、高い変倍比を維持しようとすると、全長が長くなってしまうのでやはり好ましくない。   If the lower limit −3 of conditional expression (9) is not reached, the power of the second lens group having negative power becomes strong, so that the on-axis performance on the high magnification side and the off-axis performance on the low magnification side deteriorate. This is because the light beam is strongly bent by the second lens group, and coma aberration on the low magnification side and spherical aberration on the high magnification side occur, and the performance on the high magnification side and the low magnification side can be maintained well. It will disappear. Further, the height of the light beam on the low magnification side in the third lens group is increased, and the outer diameter of the lens is increased. Alternatively, since the positive power of the third lens group becomes loose, it is not preferable to maintain a high zoom ratio because the total length becomes long.

条件式（１０）の下限の３を下回ると、第２レンズ群の負のパワーが弱くなるので、条件式（４）と同様に、高い変倍比にできない。また、変倍比を大きくとった場合には、顕微鏡ズーム対物レンズの全長が長くなる問題がある。また、第２レンズ群の負のパワーが弱くなるために、高倍側の像面湾曲が補正不足となって像面の平坦性が悪化する。また、低倍側の射出瞳位置が第１レンズ群に近く位置するので好ましくない。あるいは、第４レンズ群の負のパワーがきつくなった場合には、低倍側での軸外収差性能が悪化する。   If the lower limit of 3 of the conditional expression (10) is not reached, the negative power of the second lens group becomes weak, so that a high zoom ratio cannot be achieved as in the conditional expression (4). In addition, when the zoom ratio is large, there is a problem that the total length of the microscope zoom objective lens becomes long. In addition, since the negative power of the second lens group becomes weak, the curvature of field on the high magnification side is insufficiently corrected, and the flatness of the image surface deteriorates. Further, the exit pupil position on the low magnification side is located close to the first lens group, which is not preferable. Alternatively, when the negative power of the fourth lens group becomes tight, the off-axis aberration performance on the low magnification side deteriorates.

条件（１０）の上限の６を上回ると、負のパワーを持つ第２レンズ群のパワーが強くなるので、条件（４）のときと同様に、高倍側の軸上性能と低倍側の軸外性能が悪化する。これは、第２レンズ群で光線が強く曲げられることによるもので、低倍側のコマ収差や高倍側の球面収差が発生して高倍側と低倍側の性能を良好に維持することができなくなってしまう。また、第３レンズ群での低倍側での光線高が高くなり、レンズ外径が大きくなるので好ましくない。   If the upper limit of 6 of the condition (10) is exceeded, the power of the second lens group having negative power becomes strong. Therefore, as in the case of the condition (4), the on-axis performance on the high magnification side and the axis on the low magnification side External performance deteriorates. This is because the light beam is strongly bent by the second lens group, and coma aberration on the low magnification side and spherical aberration on the high magnification side occur, and the performance on the high magnification side and the low magnification side can be maintained well. It will disappear. Further, the height of the light beam on the low magnification side in the third lens group is increased, and the outer diameter of the lens is increased.

第１３の発明の顕微鏡ズーム対物レンズは、第１２の発明において、前記第１レンズ群の最も物体側のレンズ群は、物体側に凹面を向けた負レンズと正レンズの接合メニスカスレンズで構成されたことを特徴とする。   The microscope zoom objective lens according to a thirteenth aspect of the present invention is the microscope zoom objective lens according to the twelfth aspect of the present invention, wherein the lens unit closest to the object side in the first lens unit is composed of a cemented meniscus lens having a negative lens and a positive lens with a concave surface facing the object side. It is characterized by that.

最も物体側に配置された接合レンズ群は、物体側に凹面を向けた負レンズと正レンズで構成され、接合メニスカスレンズの接合面が負の屈折力を持っている。そして、この面で軸上光線高を上げた後に第２レンズ群へと光束を導く後続の第１レンズ群部分によって収斂光束へ変換して、第２レンズ群に入射させる。つまり、第１レンズ群内にペッツバール和を抑える効果を持たせて、像面平坦性を良好に補正するようにしている。また、この接合メニスカスレンズは物体側に凹面を向けているので、コマ収差や非点収差等の軸外収差の発生を抑えることができる。この接合メニスカスレンズは、高倍側と低倍側での収差補正に効果的である。   The cemented lens group arranged closest to the object side is composed of a negative lens and a positive lens having a concave surface facing the object side, and the cemented meniscus lens has a negative refractive power. Then, after increasing the axial ray height on this surface, it is converted into a convergent light beam by the subsequent first lens group part that guides the light beam to the second lens group, and is incident on the second lens group. In other words, the first lens group has an effect of suppressing the Petzval sum so that the image plane flatness is corrected well. Moreover, since this cemented meniscus lens has a concave surface facing the object side, it is possible to suppress the occurrence of off-axis aberrations such as coma and astigmatism. This cemented meniscus lens is effective in correcting aberrations on the high magnification side and the low magnification side.

第１４の発明の顕微鏡ズーム対物レンズは、第１３の発明において、前記第１レンズ群は複数の接合レンズ群を備えており、その接合レンズ群の正レンズのアッベ数をνＰ、接合レンズ群の負レンズのアッベ数をνＮとするとき、第１レンズ群中の何れかの接合レンズ群が以下の条件（１１）を満足することを特徴とする。   According to a fourteenth aspect of the present invention, in the thirteenth aspect, the first lens group includes a plurality of cemented lens groups, and the positive lens Abbe number of the cemented lens group is νP, When the Abbe number of the negative lens is νN, any one of the cemented lens groups in the first lens group satisfies the following condition (11).

νＰ−νＮ≧３５ ・・・（１１）
第１レンズ群は高倍時の軸上光線高が最も高くなるので、条件（１１）を満足する複数の接合レンズ群により、球面収差と軸上色収差を良好に補正することができる。また、低倍側での軸外主光線が最も高くなるので、倍率色収差も良好に補正することが可能となる。 νP−νN ≧ 35 (11)
Since the first lens group has the highest axial ray height at the time of high magnification, the spherical aberration and the axial chromatic aberration can be favorably corrected by the plurality of cemented lens groups satisfying the condition (11). In addition, since the off-axis principal ray on the low magnification side becomes the highest, it is possible to satisfactorily correct lateral chromatic aberration.

また、第１レンズ群内の接合レンズに異常分散性の硝材を用いることで、さらに色収差補正が良好となる。   Further, by using an anomalous dispersion glass material for the cemented lens in the first lens group, chromatic aberration correction is further improved.

条件（１１）を満足しない場合には、高倍側の球面収差と軸上色収差及び低倍側の倍率色収差を補正するのが困難となる。   When the condition (11) is not satisfied, it is difficult to correct the spherical aberration on the high magnification side, the longitudinal chromatic aberration, and the lateral chromatic aberration on the low magnification side.

第１５の発明の顕微鏡ズーム対物レンズは、第１２の発明において、前記第２レンズ群は、互いに凹面を向けた少なくとも２つのレンズ群で構成されたことを特徴とする。   The microscope zoom objective lens according to a fifteenth aspect of the present invention is the microscope zoom objective lens according to the twelfth aspect of the present invention, wherein the second lens group includes at least two lens groups having concave surfaces facing each other.

第２レンズ群を互いに凹面を向けた２つのレンズ群を少なくとも備えた構成にすることにより、強い負のパワーを持たせてぺッツバール和を小さくすることができる。これにより、特に高倍側での像面平坦性を良好に補正することが可能となる。第２レンズ群が互いに凹面が向き合っていないレンズ群で構成されている場合には、第２レンズ群の負のパワーが弱くなってペッツバール和を小さくすることができない。あるいは、互いに向き合った面と反対側の面の曲率半径が小さくなって、第２レンズ群での軸外収差が悪化してしまう。   By configuring the second lens group to include at least two lens groups having concave surfaces facing each other, a strong negative power can be imparted and the Petzval sum can be reduced. Thereby, it is possible to satisfactorily correct the image plane flatness particularly on the high magnification side. When the second lens group is composed of lens groups whose concave surfaces do not face each other, the negative power of the second lens group becomes weak and the Petzval sum cannot be reduced. Or the curvature radius of the surface on the opposite side to the mutually opposing surface becomes small, and the off-axis aberration in a 2nd lens group will deteriorate.

第１６の発明の顕微鏡ズーム対物レンズは、第１２の発明において、前記第４レンズ群は、少なくとも第３レンズ群側に凸面を向けた正レンズと負レンズの接合メニスカスレンズと、第３レンズ群側に凹面を向けた負のパワーを持つレンズ群とで構成されたことを特徴とする。   A microscope zoom objective lens according to a sixteenth aspect of the present invention is the microscope zoom objective lens according to the twelfth aspect, wherein the fourth lens group includes a cemented meniscus lens of a positive lens and a negative lens with a convex surface facing at least the third lens group side, and a third lens group. And a lens group having a negative power with a concave surface facing the side.

第３レンズ群側に配置された接合メニスカスレンズは、ガウスレンズと略似たような作用をするので、軸外光束の光線高を下げてコマ収差の補正に効果的である。しかも、その接合メニスカスレンズによって光線高を下げた光束は、像側に配置され第３レンズ群側に凹面を向けた負のパワーを持つレンズ群によって、無限遠光束へと変換される。また、その接合メニスカスレンズは、軸外主光線の光線高を入射時と射出時でほとんど変化させない作用ををする。すなわち、第３レンズ群側に凹面を向けた負のパワーを持つレンズ群に入射する光線高と角度は変倍にかかわらず略一定になる。この結果、第３レンズ群側に凹面を向けた負のパワーを持つレンズ群によって形成される射出瞳の位置は、低倍側と高倍側ほとんど変化しないことになる。   Since the cemented meniscus lens disposed on the third lens group side operates substantially similar to a Gauss lens, it is effective in correcting coma aberration by lowering the ray height of the off-axis light beam. In addition, the light beam whose beam height has been lowered by the cemented meniscus lens is converted into an infinite light beam by a lens group that is disposed on the image side and has a negative power with the concave surface facing the third lens group side. In addition, the cemented meniscus lens acts to hardly change the height of the off-axis chief ray between the incidence and emission. That is, the height and angle of light incident on the lens unit having a negative power with the concave surface facing the third lens unit side are substantially constant regardless of the magnification. As a result, the position of the exit pupil formed by the lens group having a negative power with the concave surface facing the third lens group side hardly changes from the low magnification side to the high magnification side.

第１７の発明の顕微鏡ズーム対物レンズは、第１６の発明において、前記第４レンズ群は、第３レンズ群側から、正レンズと負レンズで構成された接合メニスカスレンズと、両凹レンズと正メニスカスレンズで構成された接合負レンズとを備え、以下の条件（１２）、（１３）、（１４）を満足することを特徴とする。   According to a seventeenth aspect of the present invention, the fourth zoom lens group includes, from the third lens group side, a cemented meniscus lens including a positive lens and a negative lens, a biconcave lens, and a positive meniscus. And a cemented negative lens composed of a lens, and satisfying the following conditions (12), (13), and (14).

０．５≦｜Ｆ４ｂ／Ｆ４｜≦２ ・・・（１２）
ν４ｎ−ν４ｐ≧２５ ・・・（１３）
Ｎ４ｐ≧１．６８ ・・・（１４）
ただし、Ｆ４は、前記第４レンズ群の焦点距離、
Ｆ４ｂは、前記接合負レンズの焦点距離、
ν４ｎは、前記接合負レンズの両凹レンズのアッベ数、
ν４ｐは、前記接合負レンズの正メニスカスレンズのアッベ数、
Ｎ４ｐは、前記接合負レンズの正メニスカスレンズの屈折率、
である。 0.5 ≦ | F4b / F4 | ≦ 2 (12)
ν4n−ν4p ≧ 25 (13)
N4p ≧ 1.68 (14)
Where F4 is the focal length of the fourth lens group,
F4b is the focal length of the cemented negative lens,
ν4n is the Abbe number of the biconcave lens of the cemented negative lens,
ν4p is the Abbe number of the positive meniscus lens of the cemented negative lens,
N4p is the refractive index of the positive meniscus lens of the cemented negative lens,
It is.

条件（１２）を満足すると、低倍側での第４レンズ群での非点収差の発生を抑えることができる。また、球面収差とコマ収差を第３レンズ群で発生する方向と逆向きに発生させることができる。すなわち、第３レンズ群で発生する収差を打ち消す方向に収差を発生させることができるので収差補正が効果的に行える。   When the condition (12) is satisfied, the generation of astigmatism in the fourth lens group on the low magnification side can be suppressed. Further, spherical aberration and coma aberration can be generated in a direction opposite to the direction in which the third lens group generates. That is, since aberration can be generated in a direction that cancels out the aberration generated in the third lens group, aberration correction can be performed effectively.

条件（１３）を満足すると、高倍側での主光線高は、前述の通り、第４レンズ群が最も高いので、特に高倍側の倍率色収差を補正することが可能となる。   When the condition (13) is satisfied, the principal ray height on the high magnification side is the highest in the fourth lens group as described above, and therefore, it is possible to correct the lateral chromatic aberration particularly on the high magnification side.

条件（１４）を満足すると、像側の曲率半径を比較的緩い面で構成されるので、低倍側のコマ収差や非点収差の補正と高倍側の球面収差の補正に効果的である。   If the condition (14) is satisfied, the image side radius of curvature is constituted by a relatively loose surface, which is effective for correcting coma and astigmatism on the low magnification side and spherical aberration on the high magnification side.

条件（１２）を満足しない場合には、低倍側のコマ収差と球面収差の補正が悪化してしまうので、好ましくない。   If the condition (12) is not satisfied, the correction of coma aberration and spherical aberration on the low magnification side is deteriorated, which is not preferable.

条件（１３）を満足しない場合には、高倍側の倍率色収差が補正できなくなる。   If the condition (13) is not satisfied, the lateral chromatic aberration on the high magnification side cannot be corrected.

条件（１４）を満足しない場合には、正メニスカスレンズの曲率半径がきつくなって低倍側の球面収差やコマ収差が悪化してしまうので、好ましくない。   If the condition (14) is not satisfied, the radius of curvature of the positive meniscus lens is so tight that the low-magnification spherical aberration and coma aberration deteriorate, which is not preferable.

第１８の発明の顕微鏡ズーム対物レンズは、第１〜５、第１１の発明において、前記第１レンズ群の後側焦点位置近傍に、開口絞りを備えていることを特徴とする。   A microscope zoom objective lens according to an eighteenth aspect of the invention is characterized in that, in the first to fifth and eleventh aspects, an aperture stop is provided in the vicinity of the rear focal position of the first lens group.

一般的な顕微鏡対物レンズは、入射瞳位置が無限遠に設定されるテレセントリック光学系であるため、開口絞りを第１レンズ群の後側焦点位置近傍に配置している。本発明の顕微鏡ズーム対物レンズにおいても、開口絞りを第１レンズ群の後側焦点位置近傍に配置することで、テレセントリック光学系に構成することが可能である。また、開口絞りは第２レンズ群よりも物体側に配置されるので、ズーム変倍の際に光軸上に沿って移動させる必要がない。そのため、入射瞳位置の変動が生じないので好ましい構成と言える。   Since a general microscope objective lens is a telecentric optical system in which the entrance pupil position is set to infinity, the aperture stop is disposed in the vicinity of the rear focal position of the first lens group. The microscope zoom objective lens of the present invention can also be configured as a telecentric optical system by arranging the aperture stop in the vicinity of the rear focal position of the first lens group. Further, since the aperture stop is disposed on the object side with respect to the second lens group, it is not necessary to move along the optical axis during zooming. Therefore, it can be said that this is a preferable configuration because the entrance pupil position does not vary.

変倍に伴って、高倍側では径を広げて開口数を高く、低倍側では径を小さくして開口数を低くなるように開口絞りの径を変化させることで、従来の対物レンズと同様の開口数と周辺光量を確保できるので好適である。   Along with zooming, the diameter of the aperture stop is changed to widen the diameter on the high magnification side to increase the numerical aperture, and on the low magnification side to decrease the diameter and reduce the numerical aperture, so that it is the same as a conventional objective lens. The numerical aperture and the peripheral light amount can be secured.

なお、レンズ系が３群構成の場合、第２レンズ群の位置は常に第１レンズ群の後側焦点位置より像側になる。よって、上記のように変倍に応じて開口絞りの径を変化させることができる。これに対して、レンズ系が４群構成の場合は、低倍側で第２レンズ群が第１レンズ群の後側焦点位置よりも第１レンズ群側に位置する。そのため、開口絞りと第２レンズ群が接触しないようにするためにも、絞り径を可変にしておくことは有効である。   When the lens system has a three-group configuration, the position of the second lens group is always on the image side with respect to the rear focal position of the first lens group. Therefore, the diameter of the aperture stop can be changed according to the zooming as described above. On the other hand, when the lens system has a four-group configuration, the second lens group is positioned closer to the first lens group than the rear focal position of the first lens group on the low magnification side. Therefore, it is effective to make the aperture diameter variable in order to prevent the aperture stop and the second lens group from contacting each other.

第１９の発明の顕微鏡ズーム対物レンズは、第１〜５、第１１、第１２の発明において、前記第１レンズ群と物体の間隔をＷＤ、前記第１レンズ群の焦点距離をＦ1 としたとき、以下の条件（１５）を満足することを特徴とする。   A microscope zoom objective lens according to a nineteenth aspect of the present invention is the first to fifth, eleventh and twelfth aspects of the present invention, wherein the distance between the first lens group and the object is WD, and the focal length of the first lens group is F1. The following condition (15) is satisfied.

ＷＤ≦０．２５Ｆ1 ・・・（１５）
第１９の発明において、ＷＤをより正確に述べると、第１レンズ群の最も物体側のレンズ面と物体の間の軸上間隔である。ただし、実質的には作動距離と同じである。よって、条件（１５）は作動距離の条件式とみなすことができる。 WD ≦ 0.25F1 (15)
In the nineteenth aspect of the invention, WD is more accurately described as an on-axis distance between the object side lens surface of the first lens group and the object. However, it is substantially the same as the working distance. Therefore, the condition (15) can be regarded as a conditional expression of the working distance.

特に、第１１、第１２の発明において、条件（１５）を満足すると、比較的長い作動距離ＷＤと高倍側での球面収差の補正をバランス良く実現できる。しかも、第１１の顕微鏡ズーム対物レンズに関して述べたように、条件（８）を満足するので、変倍時の射出瞳位置の変動を抑えながら高変倍化を実現することができる。   In particular, in the eleventh and twelfth inventions, when the condition (15) is satisfied, the relatively long working distance WD and the correction of spherical aberration on the high magnification side can be realized in a balanced manner. In addition, as described with reference to the eleventh microscope zoom objective lens, since the condition (8) is satisfied, high zooming can be realized while suppressing fluctuations in the exit pupil position during zooming.

条件（１５）の上限の０．２５Ｆ1 を上回ると、作動距離が長くなりすぎて、第１レンズ群に入射する光線高が高くなり、高倍側の球面収差の補正が困難になるか、高い変倍比を実現することができなくなってしまうので、好ましくない。 なお、第１〜４の発明においては、以下の条件（１５’）を満足することが好ましい。   If the upper limit of 0.25F1 of the condition (15) is exceeded, the working distance becomes too long, and the height of the light incident on the first lens group becomes high, so that it becomes difficult to correct spherical aberration on the high magnification side or a high change. This is not preferable because the multiplication ratio cannot be realized. In the first to fourth inventions, it is preferable that the following condition (15 ′) is satisfied.

ＷＤ≦０．２Ｆ１ ・・・（１５’）
第１〜第４の発明において条件（１５’）を満足する場合は、高倍側での第１レンズ群での軸上光線高を極端に高くせずに抑えることができるので、第１レンズ群のレンズ枚数を抑えて全長を短くでき、球面収差や軸上色収差を良好に補正することが可能となる。 WD ≦ 0.2F1 (15 ′)
In the first to fourth inventions, when the condition (15 ′) is satisfied, the axial ray height in the first lens unit on the high magnification side can be suppressed without being extremely increased, and therefore the first lens unit Therefore, the total length can be shortened by suppressing the number of lenses, and spherical aberration and axial chromatic aberration can be corrected well.

条件（１５’）の上限の０．２Ｆ１を上回ると、高倍側での球面収差や軸上色収差が悪化する。また、悪化した球面収差を補正するためにレンズ枚数を増やさなければならなくなる。また、第２レンズ群や第３レンズ群の収差補正の寄与が非常に大きくなるので、低倍から高倍までの性能を良好に維持するには問題がある。   When the upper limit of 0.2F1 of the condition (15 ') is exceeded, spherical aberration and axial chromatic aberration on the high magnification side deteriorate. In addition, the number of lenses must be increased to correct the deteriorated spherical aberration. In addition, since the aberration correction contribution of the second lens group and the third lens group becomes very large, there is a problem in maintaining good performance from low magnification to high magnification.

第２０の発明の顕微鏡ズーム対物レンズは、第１〜４、第１５の発明において、前記第２レンズ群は、少なくとも１つの正レンズと負レンズで構成された接合メニスカスレンズを備え、前記正レンズの屈折率をＮ２Ｐ、アッベ数をν２Ｐ、前記負レンズのアッベ数をν２Ｎとしたとき、以下の条件（１６）、（１７）を満足することを特徴とする。   A microscope zoom objective lens according to a twentieth aspect of the present invention is the first to fourth or fifteenth aspect, wherein the second lens group includes a cemented meniscus lens including at least one positive lens and a negative lens, and the positive lens. When the refractive index is N2P, the Abbe number is ν2P, and the Abbe number of the negative lens is ν2N, the following conditions (16) and (17) are satisfied.

Ｎ２Ｐ≧１．６５ ・・・（１６）
ν２Ｎ−ν２Ｐ≧２０ ・・・（１７）
第１〜４の発明においては、以下の条件（１６）、（１７’）を満足するのが好ましい。 N2P ≧ 1.65 (16)
ν2N−ν2P ≧ 20 (17)
In the first to fourth inventions, it is preferable that the following conditions (16) and (17 ′) are satisfied.

Ｎ２Ｐ≧１．６５ ・・・（１６）
ν２Ｎ−ν２Ｐ≧２５ ・・・（１７’）
条件（１６）を満足すると、その接合レンズの正レンズの屈折率が高いので、第３レンズ群側のレンズ面の曲率半径を大きくすること、すなわち、比較的緩い面で構成することができる。そのため、コマ収差や非点収差の発生を抑えることができる。また、その接合レンズの負レンズの屈折率は比較的小さい方が、ペッツバール和を小さくできる。 N2P ≧ 1.65 (16)
ν2N−ν2P ≧ 25 (17 ′)
If the condition (16) is satisfied, since the refractive index of the positive lens of the cemented lens is high, the radius of curvature of the lens surface on the third lens group side can be increased, that is, it can be configured with a relatively loose surface. Therefore, the occurrence of coma and astigmatism can be suppressed. Further, the Petzval sum can be reduced when the refractive index of the negative lens of the cemented lens is relatively small.

条件（１６）の下限の１．６５を下回ると、その接合レンズの正レンズの屈折率が低いので、第３レンズ群側のレンズ面の曲率半径が比較的小さくなって、コマ収差や非点収差が悪化する。また、高倍での軸上色収差や球面収差の曲がりが大きくなってしまう。   If the lower limit of 1.65 of the condition (16) is not reached, the refractive index of the positive lens of the cemented lens is low, so that the radius of curvature of the lens surface on the third lens group side becomes relatively small, and coma aberration and astigmatism. Aberrations get worse. In addition, the bending of axial chromatic aberration and spherical aberration at high magnification becomes large.

条件（１７’）を満足すると、倍率色収差を良好に補正できる。レンズ系が３群構成の場合、高倍では、軸外主光線高が第２レンズ群と第３レンズ群において高くなり、低倍側では、第３レンズ群での軸外主光線高が高く、第２レンズ群での軸外主光線高が低くなる。条件（１７’）は、高倍側での倍率色収差を良好に補正する。   When the condition (17 ′) is satisfied, the lateral chromatic aberration can be corrected satisfactorily. When the lens system has a three-group configuration, at high magnification, the off-axis principal ray height is high in the second lens group and the third lens group, and on the low magnification side, the off-axis principal ray height in the third lens group is high, The off-axis chief ray height in the second lens group is lowered. Condition (17 ') corrects the lateral chromatic aberration well on the high magnification side.

条件（１７’）の下限の２５を下回ると、倍率色収差が悪化する。また、第３レンズ群の倍率色収差の補正効果を高めると、低倍側の軸上色収差軸外収差が悪化して、低倍から高倍までをバランス良く補正することが難しい。   If the lower limit of 25 of the condition (17 ') is not reached, the chromatic aberration of magnification deteriorates. Further, when the effect of correcting the lateral chromatic aberration of the third lens group is enhanced, the axial chromatic aberration off-axis aberration on the low magnification side is deteriorated, and it is difficult to correct from low magnification to high magnification in a balanced manner.

一方、第１５の発明においては、条件（１６’）、（１７）を満足するのが好ましい。   On the other hand, in the fifteenth aspect, it is preferable that the conditions (16 ′) and (17) are satisfied.

Ｎ２Ｐ≧１．６８ ・・・（１６’）
ν２Ｎ−ν２Ｐ≧２０ ・・・（１７）
条件（１６’）を満足すると、接合レンズの正レンズの屈折率が高いので、第３レンズ群側のレンズ面の曲率半径を比較的大きくすることができる。この結果、コマ収差や非点収差の補正に大きな効果が得られる。また、その接合レンズの負レンズの屈折率は比較的小さい方が、ペッツバール和を小さくできる。条件（１６’）の下限の１．６８を下回ると、接合レンズの正レンズの屈折率が低いので、第３レンズ群側のレンズ面の曲率半径が小さくなって、コマ収差や非点収差が悪化する。また、高倍での軸上色収差や球面収差の曲がりが大きくなってしまう。 N2P ≧ 1.68 (16 ′)
ν2N−ν2P ≧ 20 (17)
When the condition (16 ′) is satisfied, the refractive index of the positive lens of the cemented lens is high, so that the radius of curvature of the lens surface on the third lens group side can be made relatively large. As a result, a great effect can be obtained in correcting coma and astigmatism. Further, the Petzval sum can be reduced when the refractive index of the negative lens of the cemented lens is relatively small. If the lower limit of 1.68 of the condition (16 ′) is not reached, the refractive index of the positive lens of the cemented lens is low. Getting worse. In addition, the bending of axial chromatic aberration and spherical aberration at high magnification becomes large.

条件（１７）を満足すると、倍率色収差を良好に補正できる。これは、レンズ系が４群構成の場合、第２レンズ群での主光線高は高倍と低倍では光軸に対して符号が異なるので、低倍側と高倍側の倍率色収差をバランス良く補正するのに効果的である。条件（１７）の下限の２０を下回ると、高倍側と低倍側の倍率色収差の何れかが悪化してしまい、ズーム全域での倍率色収差を補正するのが困難となってしまう。   When the condition (17) is satisfied, the lateral chromatic aberration can be satisfactorily corrected. This is because, when the lens system has a four-group configuration, the chief ray height in the second lens group is different in sign from the optical axis at high magnification and low magnification, so the lateral chromatic aberration on the low magnification side and high magnification side is corrected in a well-balanced manner. It is effective to do. If the lower limit of 20 to condition (17) is not reached, either the magnification chromatic aberration on the high magnification side or the low magnification side will deteriorate, making it difficult to correct the chromatic aberration of magnification over the entire zoom range.

第２１の発明の顕微鏡ズーム対物レンズは、第１〜４、第１２の発明において、前記第３レンズ群のアッベ数が最も高い正レンズのアッベ数をν３ｐ、アッベ数が最も低い負レンズのアッベ数をν３ｎとしたとき、以下の条件（１８）を満足することを特徴とする。   The microscope zoom objective lens according to a twenty-first aspect of the present invention is the first to fourth and twelfth aspects of the present invention, wherein the positive lens having the highest Abbe number in the third lens group has an Abbe number of ν3p and the Abbe number of the negative lens having the lowest Abbe number. When the number is ν3n, the following condition (18) is satisfied.

ν３ｐ−ν３ｎ≧３５ ・・・（１８）
第１〜第４の発明においては、このレンズ構成により、低倍側での球面収差と軸外収差を効果的に補正でき、さらに、条件（１８）を満足すると、低倍側の軸上色収差及び低倍から高倍に至る倍率色収差を良好に補正することが可能となる。また、異状分散性の硝材を用いることで、一層の色収差補正が可能である。 ν3p−ν3n ≧ 35 (18)
In the first to fourth aspects of the invention, this lens configuration can effectively correct spherical aberration and off-axis aberrations on the low magnification side. Further, if the condition (18) is satisfied, the axial chromatic aberration on the low magnification side is satisfied. In addition, it is possible to satisfactorily correct lateral chromatic aberration from low to high magnification. Further, by using a dispersive glass material, further chromatic aberration correction is possible.

条件（１８）の下限の３５を下回ると、低倍側での軸上色収差や低倍から高倍に至る倍率色収差補正が困難になってくる。また、高倍側での倍率色収差も悪化し、他のレンズ群によって色収差補正を行なうと、低倍側、高倍側での性能をバランス良く補正することができなくなる。   If the lower limit of 35 of the condition (18) is not reached, it becomes difficult to correct longitudinal chromatic aberration on the low magnification side and magnification chromatic aberration from low magnification to high magnification. Further, the lateral chromatic aberration on the high magnification side also deteriorates, and if chromatic aberration correction is performed by another lens group, the performance on the low magnification side and the high magnification side cannot be corrected in a balanced manner.

また、第１２の発明においては、次のようになる。第３レンズ群は、変倍作用を持つ第２レンズ群からの光束を受けるレンズ群である。第３レンズ群は、像面を一定にする作用を持つ移動群であるので、ズーム全域で第３レンズ群に入射する光束の光線高は大きく変化しない。したがって、第１２の顕微鏡ズーム対物レンズの構成により、低倍側での球面収差と軸外収差を効果的に補正できる。   In the twelfth aspect, the following is obtained. The third lens group is a lens group that receives a light beam from the second lens group having a zooming action. Since the third lens group is a moving group having an effect of making the image plane constant, the light beam height of the light beam incident on the third lens group does not change greatly over the entire zoom range. Therefore, the configuration of the twelfth microscope zoom objective lens can effectively correct spherical aberration and off-axis aberration on the low magnification side.

そして、第１２の発明においても、上述のように、さらに、条件（１８）を満足すると、低倍側の軸上色収差及び低倍から高倍に至る倍率色収差を良好に補正することが可能となる。また、異常分散性の硝材を用いることで、一層の色収差補正が可能である。条件（１８）の下限の３５を下回ると、低倍側での軸上色収差や低倍から高倍に至る倍率色収差補正が困難になってくる。また、高倍側での倍率色収差も悪化し、他のレンズ群によって色収差補正を行うと、低倍側、高倍側での性能をバランス良く補正することができなくなる。   Also in the twelfth aspect, as described above, when the condition (18) is further satisfied, it is possible to satisfactorily correct the low-side axial chromatic aberration and the low-to-high magnification chromatic aberration. . Further, by using an anomalous dispersion glass material, it is possible to further correct chromatic aberration. If the lower limit of 35 of the condition (18) is not reached, it becomes difficult to correct longitudinal chromatic aberration on the low magnification side and magnification chromatic aberration from low magnification to high magnification. Further, the chromatic aberration of magnification on the high magnification side also deteriorates, and if chromatic aberration correction is performed by another lens group, the performance on the low magnification side and the high magnification side cannot be corrected in a balanced manner.

第２２の発明の顕微鏡ズーム対物レンズは、第１〜第５、第１１、第１２の発明において、変倍比が３以上であることを特徴とする。なお、第５、第１１、第１２の発明においては、変倍比が４以上である。   A microscope zoom objective lens according to a twenty-second invention is characterized in that in the first to fifth, eleventh and twelfth inventions, the zoom ratio is 3 or more. In the fifth, eleventh and twelfth inventions, the zoom ratio is 4 or more.

第２３の発明の顕微鏡ズーム対物レンズは、物体から順に、正のパワーを持つ第１レンズ群、負のパワーを持つ第２レンズ群、正のパワーを持つ第３レンズ群の少なくとも３つのレンズ群で構成され、少なくとも１つの非球面を備え、以下の条件（１９）を満足することを特徴とする。   According to a twenty-third aspect of the present invention, the microscope zoom objective lens includes, in order from the object, at least three lens groups including a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power. Comprising at least one aspherical surface and satisfying the following condition (19).

ＮＡ≧０．５ ・・・（１９）
ただし、ＮＡは高倍側の顕微鏡ズーム対物レンズの開口数である。 NA ≧ 0.5 (19)
Here, NA is the numerical aperture of the high-magnification side microscope zoom objective lens.

第１レンズ群中に少なくとも１つの非球面を備えることにより、高倍側の収差性能を良好に補正した顕微鏡ズーム対物レンズの高変倍化あるいは高開口数化が達成できる。さらに、第１レンズ群中に非球面を用いることで、第１レンズ群の全長を抑えることが可能となる。また、変倍作用の第２レンズ群の移動量を確保して、高変倍化と、変倍時の射出瞳位置の変動を抑えることが可能となる。   By providing at least one aspheric surface in the first lens group, it is possible to achieve a high zoom ratio or a high numerical aperture of the microscope zoom objective lens that favorably corrects the aberration performance on the high magnification side. Further, by using an aspheric surface in the first lens group, it is possible to suppress the total length of the first lens group. In addition, it is possible to secure the amount of movement of the second lens unit for zooming and to suppress high zooming and fluctuations in the exit pupil position during zooming.

なお、第１レンズ群を全て球面レンズで構成すると、以下のようになる。高変倍化あるいは高開口数化を実現しようとすると、第１レンズ群の正のパワーが非常に大きくなり、そのために球面収差及び軸上色収差がより大きく発生する。この補正のために第１レンズ群のレンズ枚数を非常に多くしなければならない。しかも、変倍作用の第２レンズ群のパワーも強くなり、変倍のための移動量もより大きく必要となってくる。   In addition, when all the 1st lens groups are comprised with a spherical lens, it is as follows. If an attempt is made to achieve a high zoom ratio or a high numerical aperture, the positive power of the first lens group becomes very large, which causes more spherical aberration and axial chromatic aberration. For this correction, the number of lenses in the first lens group must be very large. In addition, the power of the second lens unit for zooming becomes stronger, and the amount of movement for zooming becomes larger.

しかしながら、第１レンズ群の全長が長くなり、かつ、第２レンズ群の移動量が大きくなると、特にレンズ系が４群構成の場合は、第３レンズ群と第４レンズ群の配置から、どうしても顕微鏡ズーム対物レンズの全長をコンパクトにすることができない。さらに、第１レンズ群の全長が長くなると、第１レンズ群の後側焦点位置が第１レンズ群中に入り込んでしまうので、変倍時の射出瞳位置の変動を抑えることができなくなり、顕微鏡のシステム性が損なわれてしまう。しかも、第１レンズ群のレンズ枚数の増加に伴ってコストアップも招いてしまう。   However, when the total length of the first lens group is increased and the amount of movement of the second lens group is increased, the arrangement of the third lens group and the fourth lens group is inevitably caused particularly when the lens system has a four-group configuration. The total length of the microscope zoom objective lens cannot be made compact. Further, if the total length of the first lens group becomes long, the rear focal position of the first lens group enters the first lens group, and thus it becomes impossible to suppress the fluctuation of the exit pupil position at the time of zooming. The system nature of will be impaired. In addition, the cost increases as the number of lenses in the first lens group increases.

第２４の発明の顕微鏡ズーム対物レンズは、第５、第１１発明において、前記第１レンズ群又は第３レンズ群中に、少なくとも１つの非球面を備えたことを特徴とする。   A microscope zoom objective lens according to a twenty-fourth invention is characterized in that, in the fifth and eleventh inventions, at least one aspheric surface is provided in the first lens group or the third lens group.

第１レンズ群中に少なくとも１つの非球面を備えることにより、高倍側の収差性能を良好に補正した顕微鏡ズーム対物レンズにおいて、高変倍化あるいは高開口数化が達成できる。さらに、第１レンズ群中に非球面を用いることで、第１レンズ群の全長を抑えることが可能となる。また、変倍作用をする第２レンズ群の移動量を確保して、高変倍化と、変倍時の射出瞳位置の変動を抑えることが可能となる。   By providing at least one aspheric surface in the first lens group, it is possible to achieve a high zoom ratio or a high numerical aperture in the microscope zoom objective lens in which the aberration performance on the high magnification side is well corrected. Further, by using an aspheric surface in the first lens group, it is possible to suppress the total length of the first lens group. In addition, it is possible to secure the amount of movement of the second lens group that performs the zooming operation, and to suppress the zooming and the variation of the exit pupil position during zooming.

また、第３レンズ群中に少なくとも１つの非球面を備えることにより、低倍側から高倍側に至る球面収差及び軸外収差を全般的に良好に補正した顕微鏡ズーム対物レンズが達成できる。低倍側から高倍側にかけて第３レンズ群に入射する光束径は極端に変化しないので、非球面を第３レンズ群に設けることで、低倍側の球面収差とコマ収差、及び高倍側の非点収差とコマ収差の補正が可能である。   In addition, by providing at least one aspheric surface in the third lens group, it is possible to achieve a microscope zoom objective lens in which spherical aberrations and off-axis aberrations from the low magnification side to the high magnification side are generally well corrected. Since the diameter of the light beam incident on the third lens group from the low-magnification side to the high-magnification side does not change drastically, by providing an aspheric surface in the third lens group, spherical aberration and coma aberration on the low magnification side, and non-magnification on the high magnification side are provided. Correction of point aberration and coma is possible.

なお、第３レンズ群に非球面を設けると、以下のようになる。高変倍化あるいは高開口数化を実現しようとすると、第１レンズ群の正のパワーが強くなり、しかも変倍作用の第２レンズ群のパワーも強くなる。この結果、第３レンズ群に入射する光束径が大きくなり、しかも、軸上光線高及び軸外主光線の入射角度もきつくなる。そのため、第３レンズ群のレンズ枚数が増えてしまい、結果として顕微鏡ズーム対物レンズの全長をコンパクトに抑えることができなくなってしまう。     When an aspheric surface is provided in the third lens group, the following is obtained. In order to achieve a high zoom ratio or a high numerical aperture, the positive power of the first lens group becomes strong, and the power of the second lens group having a zooming action also becomes strong. As a result, the diameter of the light beam incident on the third lens group is increased, and the incident angle of the on-axis ray height and off-axis principal ray is also severe. For this reason, the number of lenses in the third lens group increases, and as a result, the total length of the microscope zoom objective lens cannot be kept compact.

第２５の発明の顕微鏡ズーム対物レンズは、第１〜第５、第１１、第１２、第２３、第２４の発明において、前記顕微鏡ズーム対物レンズの作動距離をＷＤとしたとき、以下の条件（２０）を満足することを特徴とする。   The microscope zoom objective lens according to a twenty-fifth aspect of the present invention is the first to fifth, eleventh, twelfth, twenty-third, and twenty-fourth aspects of the invention when the working distance of the microscope zoom objective lens is WD. 20) is satisfied.

０．５≦ＷＤ≦１．５ （ｍｍ） ・・・（２０）
一般の顕微鏡対物レンズでは、４０倍で作動距離が０．５ｍｍ程度であり、１０倍では開口数によって異なるが３〜１０ｍｍ程度である。作動距離が長い程標本と対物レンズの先端の接触が回避でき、また、操作性の向上にもつながる。しかしながら、作動距離が余りに長いと球面収差の補正が困難になる。したがって、本発明の顕微鏡ズーム対物レンズにおいて、条件（２０）を満足すると、高倍側の球面収差を補正しながら、高い変倍比を実現し、かつ、作動距離を比較的長くしながら、標本の操作性や対物レンズ先端と標本との接触の回避をバランス良く実現させることが可能となる。 0.5 ≦ WD ≦ 1.5 (mm) (20)
In a general microscope objective lens, the working distance is about 0.5 mm at 40 times, and about 3 to 10 mm at 10 times depending on the numerical aperture. The longer the working distance, the more the contact between the specimen and the tip of the objective lens can be avoided, and the operability is improved. However, if the working distance is too long, it is difficult to correct spherical aberration. Therefore, in the microscope zoom objective lens according to the present invention, when the condition (20) is satisfied, a high zoom ratio is achieved while correcting the spherical aberration on the high magnification side, and the working distance is relatively long. It becomes possible to realize operability and avoidance of contact between the objective lens tip and the specimen in a well-balanced manner.

条件（２０）の下限の０．５ｍｍを下回ると、作動距離が短くなって、合焦の際に対物レンズの先端と標本が接触して標本の破損のおそれがある。また、標本の位置出しや操作性が悪化するので、好ましくない。   If the lower limit of 0.5 mm of the condition (20) is not reached, the working distance becomes short, and the tip of the objective lens and the sample may come into contact with each other during focusing and the sample may be damaged. Moreover, it is not preferable because the positioning and operability of the specimen deteriorate.

条件（２０）の上限の１．５ｍｍを上回ると、作動距離が長くなって操作性は向上するが、高倍側での球面収差の補正が困雌となる。あるいは、高い変倍比を実現することが困難になってしまう。   If the upper limit of 1.5 mm of the condition (20) is exceeded, the working distance becomes long and the operability is improved, but correction of spherical aberration on the high magnification side becomes difficult. Or, it becomes difficult to realize a high zoom ratio.

第２６の発明の顕微鏡ズーム対物レンズは、第１〜第５、第１１、第１２、第２３、第２４の発明において、前記顕微鏡ズーム対物レンズの最も像側にあるレンズ群の像側に最も近い面から物体までの距離をＬとするとき、以下の条件（２１）を満足することを特徴とする。   A microscope zoom objective lens according to a twenty-sixth aspect of the invention is the first to fifth, eleventh, twelfth, twenty-third, and twenty-fourth aspects of the invention, wherein the microscope zoom objective lens is closest to the image side of the lens group closest to the image side of the microscope zoom objective lens. When the distance from the near surface to the object is L, the following condition (21) is satisfied.

５５≦Ｌ≦１１０ （ｍｍ） ・・・（２１）
ここで、レンズ系が３群構成の場合、最終レンズ群は第３レンズ群になる。また、レンズ系が４群構成の場合、最終レンズ群は第４レンズ群になる。 55 ≦ L ≦ 110 (mm) (21)
Here, when the lens system has a three-group configuration, the final lens group is the third lens group. Further, when the lens system has a four-group configuration, the final lens group is the fourth lens group.

条件（２１）を満足すると、高い変倍比でありながら、本発明の顕微鏡ズーム対物レンズ及び顕微鏡システムを従来の手法に比べて非常にコンパクトに構成することができる。   If the condition (21) is satisfied, the microscope zoom objective lens and the microscope system of the present invention can be configured to be very compact as compared with the conventional method, while maintaining a high zoom ratio.

条件（２１）の下限の５５ｍｍを下回ると、移動群である第２レンズ群、第３レンズ群、第４レンズ群の移動するスペースが少なくなって、高い変倍比を実現できなくなる。また、高い変倍比を実現するために移動群の第２、第３、第４レンズ群の移動量を確保すると、第１レンズ群の全長が短くなって高倍側の球面収差の補正が困難となる。   If the lower limit of 55 mm of the condition (21) is not reached, the moving space of the second lens group, the third lens group, and the fourth lens group as the moving group is reduced, and a high zoom ratio cannot be realized. Further, if the movement amounts of the second, third, and fourth lens groups of the moving group are secured in order to realize a high zoom ratio, the total length of the first lens group is shortened and it is difficult to correct spherical aberration on the high magnification side. It becomes.

条件（２１）の上限の１１０ｍｍを上回ると、高倍化や高変倍化には有利となるが、全長が長くなって顕微鏡システムをコンパクトに構成できなくなるので好ましくない。   Exceeding the upper limit of 110 mm in condition (21) is advantageous for higher magnification and higher magnification, but is not preferable because the total length becomes longer and the microscope system cannot be configured compactly.

第２７の発明の顕微鏡ズーム対物レンズは、第１〜第５、第１１、第１２、第２３、第２４の発明において、前記顕微鏡ズーム対物レンズは４群構成であって、最も低倍側での射出瞳位置をＥ１、最も高倍側での射出瞳位置をＥ２としたとき、以下の条件（２２）を満足することを特徴とする。   The microscope zoom objective lens according to a twenty-seventh aspect of the present invention is the first to fifth, eleventh, twelfth, twenty-third, and twenty-fourth invention, wherein the microscope zoom objective lens has a four-group configuration and is at the lowest magnification side. When the exit pupil position of E1 is E1, and the exit pupil position on the highest magnification side is E2, the following condition (22) is satisfied.

｜Ｅ１−Ｅ２｜≦１５ （ｍｍ） ・・・（２２）
条件（２２）を満足すると、顕微鏡ズーム対物レンズの瞳位置と照明光学系の瞳位置との共役関係を、低倍側から高倍側まで略一致させることができる。また、軸外光線のケラレ等による周辺光量の低下を防止することが可能となる。よって、取り付け可能な中間鏡筒ユニット（付属ユニット）の種類が増えるので、顕微鏡のシステム性が大きく向上する。なお、射出瞳位置とは、顕微鏡ズーム対物レンズの射出瞳位置のことである。 | E1-E2 | ≦ 15 (mm) (22)
When the condition (22) is satisfied, the conjugate relationship between the pupil position of the microscope zoom objective lens and the pupil position of the illumination optical system can be substantially matched from the low magnification side to the high magnification side. Further, it is possible to prevent a decrease in the amount of peripheral light due to vignetting of off-axis rays or the like. Therefore, the number of types of intermediate lens barrel units (attached units) that can be attached increases, and the system performance of the microscope is greatly improved. The exit pupil position is an exit pupil position of the microscope zoom objective lens.

条件（２２）の上限の１５ｍｍを上回ると、低倍側と高倍側の射出瞳位置の変動が大きくなるので、顕微鏡照明光学系による光線のケラレやが生じる。また、中間鏡筒ユニットを組み合せた場合に周辺光量が低下するので、顕微鏡のシステム性を低下させてしまう。   If the upper limit of 15 mm of the condition (22) is exceeded, fluctuations in the exit pupil positions on the low magnification side and the high magnification side become large, resulting in vignetting of the light by the microscope illumination optical system. In addition, when the intermediate lens barrel unit is combined, the peripheral light amount is reduced, and the system performance of the microscope is reduced.

第２８の発明の顕微鏡ズーム対物レンズは、第５、第１１の発明において、非球面が設けられたレンズ面の面形状が、光軸から離れるに従って曲率半径が大きくなるような面形状であることを特徴とする。   A microscope zoom objective lens according to a twenty-eighth aspect of the present invention is the fifth or eleventh aspect, wherein the surface shape of the lens surface provided with the aspherical surface is such that the radius of curvature increases as the distance from the optical axis increases. It is characterized by.

球面レンズ系の場合、高倍側の開口数が大きい場合に、第１レンズ群で発生する球面収差が非常に大きくなる。これは、入射する光線に対して面の傾きが大きい（屈折力が大きい）からである。そこで、非球面の形状を光軸から離れるに従って曲率半径が緩くなる形状にすると、面の屈折力が弱くなる。したがって、第２８の発明のように、軸上光線の開口比が大きくなるにつれて非球面の屈折力が弱くなる面形状にすることで、効果的に球面収差の補正を行うことができる。   In the case of a spherical lens system, when the numerical aperture on the high magnification side is large, the spherical aberration generated in the first lens group becomes very large. This is because the surface has a large inclination (high refractive power) with respect to the incident light beam. Therefore, if the aspherical shape is made such that the radius of curvature becomes gentler as it goes away from the optical axis, the refractive power of the surface becomes weaker. Therefore, as in the twenty-eighth aspect of the invention, spherical aberration can be corrected effectively by using a surface shape in which the refractive power of the aspheric surface becomes weaker as the aperture ratio of axial rays increases.

そして、非球面の効果により第１レンズ群内での球面収差の発生量を少なくできれば、全体の球面収差を補正のために、その他のレンズ群で発生させている逆向きの球面収差を少なくさせることができる。これは、その他のレンズ群が持っている収差補正能力を、球面収差以外の収差補正のために使うことができることを意味する。よって、球面収差以外の収差も良好に補正することができる。また、各レンズ群での収差発生量を小さくできるので、製作上の公差を緩くすることが可能となる。   If the amount of spherical aberration generated in the first lens group can be reduced due to the effect of the aspherical surface, the reverse spherical aberration generated in the other lens groups can be reduced to correct the entire spherical aberration. be able to. This means that the aberration correction capability of other lens groups can be used for correcting aberrations other than spherical aberration. Therefore, aberrations other than spherical aberration can be corrected well. In addition, since the amount of aberration generated in each lens group can be reduced, manufacturing tolerances can be relaxed.

なお、第２８の発明の顕微鏡ズーム対物レンズにおいて、第２レンズ群の構成を第２の発明と同じようにしてもよい。また、第２０の発明の条件（１６）、（１７）を満足するようにしてもよい。   In the microscope zoom objective lens according to the twenty-eighth aspect of the invention, the configuration of the second lens group may be the same as in the second aspect of the invention. Further, the conditions (16) and (17) of the twentieth invention may be satisfied.

第２９の発明の顕微鏡ズーム対物レンズは、第２８の発明において、前記第４レンズ群を備え、該第４レンズ群は、第３レンズ群側に凸面を向けた正レンズと負レンズの接合メニスカスレンズと、第３レンズ群側に凹面を向けたレンズ群で少なくとも構成され、条件（１２）、（１３）を満足することを特徴とする。   A microscope zoom objective lens according to a twenty-ninth aspect of the invention is the twenty-eighth aspect of the invention, comprising the fourth lens group, and the fourth lens group is a cemented meniscus of a positive lens and a negative lens having a convex surface facing the third lens group side. It comprises at least a lens and a lens group having a concave surface facing the third lens group, and satisfies the conditions (12) and (13).

第４レンズ群は全体として負のパワーを備える。そして、第３レンズ群側に凸面を向けた正レンズと負レンズの接合メニスカスレンズと、第３レンズ群側に凹面を向けた負のパワーを持つレンズ群で構成されている。第３レンズ群側に配置された接合メニスカスレンズは、ガウスレンズの作用を生じる。そのため、ここで軸外光束の光線高を下げられて、コマ収差が効果的に補正される。しかも、像側に配置され第３レンズ群側に凹面を向けたレンズ群に負のパワーが与えられているので、接合メニスカスレンズによって光線高を下げた光束はこの負のパワーを持つレンズ群によって無限遠光束へと変換される。   The fourth lens group has a negative power as a whole. The lens unit includes a cemented meniscus lens of a positive lens and a negative lens having a convex surface facing the third lens group, and a lens group having a negative power with a concave surface facing the third lens group. The cemented meniscus lens disposed on the third lens group side produces a Gaussian lens action. For this reason, the ray height of the off-axis light beam is lowered here, and the coma aberration is effectively corrected. In addition, since negative power is given to the lens group disposed on the image side and having the concave surface facing the third lens group, the light beam whose beam height is lowered by the cemented meniscus lens is caused by the lens group having this negative power. It is converted into an infinite light beam.

また、接合メニスカスレンズは、変倍時に軸外主光線の角度と光線高をほとんど変化させない。そのため、負のパワーを持つレンズ群に入射する軸外主光線の角度と光線高は、低倍側と高倍側で略一定になるので、低倍側と高倍側の射出瞳位置の変動を抑える作用をする。   In addition, the cemented meniscus lens hardly changes the angle and the ray height of the off-axis principal ray at the time of zooming. For this reason, the angle and ray height of the off-axis chief ray incident on the lens group having negative power are substantially constant on the low magnification side and the high magnification side, so that fluctuations in the exit pupil positions on the low magnification side and the high magnification side are suppressed. Works.

本発明によると、５５ｍｍから１１０ｍｍ程度の長さで、３つのレンズ群で、低倍から高倍にわたって収差性能に優れた１０倍から４０倍、開口数が０．６の顕微鏡ズーム対物レンズを提供することができる。   According to the present invention, there is provided a microscope zoom objective lens having a length of about 55 mm to 110 mm and three lens groups having excellent aberration performance from low magnification to high magnification from 10 times to 40 times and a numerical aperture of 0.6. be able to.

また、本発明によると、物体側から、正、負、正、負のパワーを持つ４つのレンズ群で、全長が８０ｍｍ程度とコンパクトでありながら、従来にない変倍比が４〜5 倍と高変倍で高開口数を備え、低倍から高倍にわたって収差性能に優れた顕微鏡ズーム対物レンズを提供することができる。しかも、射出瞳が略一定の位置に設定されているので、瞳の変動による周辺減光やシステム性の欠点がなく、システム性に優れた顕微鏡ズーム対物レンズが提供できる。   Further, according to the present invention, from the object side, the four lens groups having positive, negative, positive, and negative powers are compact with an overall length of about 80 mm, and an unillustrated zoom ratio is 4 to 5 times. A microscope zoom objective lens having a high zoom ratio, a high numerical aperture, and excellent aberration performance from low to high magnification can be provided. In addition, since the exit pupil is set at a substantially constant position, there can be provided a microscope zoom objective lens that is free from peripheral dimming and system defects due to pupil fluctuations and has excellent system characteristics.

以下に、本発明の顕微鏡ズーム対物レンズの実施例について説明する。   Examples of the microscope zoom objective lens according to the present invention will be described below.

まず、３群構成の実施例１〜１０について説明する。以下に述べる実施例１〜１０の顕微鏡ズーム対物レンズは、無限遠設計であって、単独では結像しない。そのため、図１６に示すように、両凸レンズと物体側に凹面を向けた負メニスカスレンズとの接合レンズと、両凸レンズと両凹レンズとの接合レンズとからなり、後記するレンズデータを有する結像レンズを各実施例の顕微鏡ズーム対物レンズの像側に配置して使用する。なお、この結像レンズの焦点距離は１７９．９９４ｍｍである。   First, Examples 1 to 10 having a three-group configuration will be described. The microscope zoom objective lenses of Examples 1 to 10 described below are designed at infinity and do not form an image alone. Therefore, as shown in FIG. 16, an imaging lens having a cemented lens of a biconvex lens and a negative meniscus lens having a concave surface facing the object side, and a cemented lens of a biconvex lens and a biconcave lens, and having lens data to be described later. Are used on the image side of the microscope zoom objective lens of each example. The focal length of this imaging lens is 179.994 mm.

また、後記する実施例１〜８の収差図は、顕微鏡ズーム対物レンズの後方に、物体から結像レンズの物体側のレンズ面までの距離を１５０ｍｍの位置に配置したときの収差図であり、実施例９〜１０の収差図は、顕微鏡ズーム対物レンズの後方に、物体から結像レンズの物体側のレンズ面までの距離を１００ｍｍの位置に配置したときの収差図である。なお、物体から結像レンズの物体側のレンズ面までの間隔が、１００〜２００ｍｍ程度の間では収差はほとんど変化しない。   The aberration diagrams of Examples 1 to 8 described later are aberration diagrams when the distance from the object to the object-side lens surface of the imaging lens is arranged at a position of 150 mm behind the microscope zoom objective lens. The aberration diagrams of Examples 9 to 10 are aberration diagrams when the distance from the object to the object-side lens surface of the imaging lens is arranged at a position of 100 mm behind the microscope zoom objective lens. The aberration hardly changes when the distance from the object to the lens surface on the object side of the imaging lens is about 100 to 200 mm.

以下、図面と後記の各実施例のレンズデータ表を参照にして、本発明のズーム対物レンズの実施例１〜１０について説明する。なお、後記の各実施例のレンズデータ表中には、上記の結像レンズも含めて示してある。   Embodiments 1 to 10 of the zoom objective lens according to the present invention will be described below with reference to the drawings and the lens data table of each embodiment described later. In the lens data table of each example described later, the imaging lens is also included.

実施例１の構成を図１に示す。図１（ａ）は倍率１０Ｘ、ＮＡ０．２５、図１（ｂ）は倍率２０Ｘ、ＮＡ０．４、図１（ｃ）は倍率４０Ｘ、ＮＡ０．６の場合のレンズ断面と光路を示す。物体側から順に、正のパワーを持つ第１レンズ群Ｇ１、負のパワーを持つ第２レンズ群Ｇ２、正のパワーを持つ第３レンズ群Ｇ３で構成され、低倍側から高倍側へ変倍する際に、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間隔が大きくなり、第２レンズ群Ｇ２と第３レンズ群Ｇ３の間隔が小さくなるように、第２レンズ群Ｇ２と第３レンズ群Ｇ３が光軸上を移動する。   The configuration of Example 1 is shown in FIG. 1A shows the lens cross section and optical path when the magnification is 10X and NA 0.25, FIG. 1B shows the magnification 20X and NA 0.4, and FIG. 1C shows the magnification 40X and NA 0.6. In order from the object side, the first lens group G1 having a positive power, the second lens group G2 having a negative power, and the third lens group G3 having a positive power are configured to change magnification from the low magnification side to the high magnification side. In doing so, the distance between the first lens group G1 and the second lens group G2 is increased, and the distance between the second lens group G2 and the third lens group G3 is decreased. G3 moves on the optical axis.

第１レンズ群Ｇ１の構成は、物体側に凹面を向け、物体側から両凹レンズと両凸レンズの接合負メニスカスレンズ、両凸レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズ、両凸レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合負レンズ、両凸レンズで構成される。第２レンズ群Ｇ２は、両凹レンズと負メニスカスレンズの接合負レンズ、両凹レンズと両凸レンズのパワーのほとんどない接合負メニスカスレンズで構成されている。第３レンズ群Ｇ３は、両凸レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズで構成されている。   The configuration of the first lens group G1 includes a cemented negative meniscus lens having a concave surface facing the object side, a biconcave lens and a biconvex lens from the object side, a biconvex lens, and a cemented positive lens having a negative meniscus lens and a biconvex lens having a convex surface facing the object side. A biconvex lens, a negative meniscus lens having a convex surface facing the object side, a biconvex lens cemented negative lens, and a biconvex lens. The second lens group G2 includes a cemented negative lens composed of a biconcave lens and a negative meniscus lens, and a cemented negative meniscus lens having almost no power of the biconcave lens and the biconvex lens. The third lens group G3 includes a biconvex lens, a negative meniscus lens having a convex surface directed toward the object side, and a cemented positive lens of the biconvex lens.

実施例１のズーム対物レンズは、視野数２２、１０倍から４０倍まで変倍し、開口数が０．２５から０．６である。開口絞りＳは、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間にあり、第１レンズ群Ｇ１の後側焦点位置近傍に配置され、変倍と共に所定の開口数になるように絞り径が変化する機構を備えている。   The zoom objective lens of Example 1 has a field of view of 22 and a variable magnification from 10 to 40 times, and a numerical aperture of 0.25 to 0.6. The aperture stop S is located between the first lens group G1 and the second lens group G2, is disposed in the vicinity of the rear focal position of the first lens group G1, and has a stop diameter so as to have a predetermined numerical aperture together with zooming. It has a changing mechanism.

実施例２の構成を図２に示す。図２（ａ）は倍率１０Ｘ、ＮＡ０．２５、図２（ｂ）は倍率２０Ｘ、ＮＡ０．４、図２（ｃ）は倍率３０Ｘ、ＮＡ０．５５の場合のレンズ断面と光路を示す。物体側から順に、正のパワーを持つ第１レンズ群Ｇ１、負のパワーを持つ第２レンズ群Ｇ２、正のパワーを持つ第３レンズ群Ｇ３で構成され、低倍側から高倍側へ変倍する際に、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間隔が大きくなり、第２レンズ群Ｇ２と第３レンズ群Ｇ３の間隔が小さくなるように、第２レンズ群Ｇ２と第３レンズ群Ｇ３が光軸上を移動する。   The configuration of Example 2 is shown in FIG. 2A shows the lens cross section and the optical path when the magnification is 10X and NA 0.25, FIG. 2B shows the magnification 20X and NA 0.4, and FIG. 2C shows the magnification 30X and NA 0.55. In order from the object side, the first lens group G1 having a positive power, the second lens group G2 having a negative power, and the third lens group G3 having a positive power are configured to change magnification from the low magnification side to the high magnification side. In doing so, the distance between the first lens group G1 and the second lens group G2 is increased, and the distance between the second lens group G2 and the third lens group G3 is decreased. G3 moves on the optical axis.

第１レンズ群Ｇ１の構成は、物体側に凹面を向け、物体側から両凹レンズと両凸レンズの接合負メニスカスレンズ、両凸レンズ、両凹レンズと両凸レンズのパワーのほとんどない接合正メニスカスレンズ、両凸レンズ、両凸レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合負レンズ、物体側に凸面を向けた正メニスカスレンズで構成される。第２レンズ群Ｇ２は、物体側に凹面を向けた正メニスカスレンズと両凹レンズとパワーのほとんどない正メニスカスレンズの３枚で構成された接合負レンズ、両凹レンズと正メニスカスレンズの接合負レンズで構成されている。第３レンズ群Ｇ３は、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズで構成されている。   The first lens group G1 has a concave surface facing the object side, a cemented negative meniscus lens composed of a biconcave lens and a biconvex lens from the object side, a biconvex lens, a cemented positive meniscus lens having almost no power of the biconcave lens and the biconvex lens, and a biconvex lens. A biconvex lens, a negative meniscus lens having a convex surface facing the object side, a cemented negative lens of the biconvex lens, and a positive meniscus lens having a convex surface facing the object side. The second lens group G2 is a cemented negative lens composed of a positive meniscus lens having a concave surface facing the object side, a biconcave lens, and a positive meniscus lens having little power, and a cemented negative lens of a biconcave lens and a positive meniscus lens. It is configured. The third lens group G3 includes a negative meniscus lens having a convex surface directed toward the object side and a cemented positive lens having a biconvex lens, and a negative meniscus lens having a convex surface directed toward the object side and a cemented positive lens having a biconvex lens.

実施例２のズーム対物レンズは、視野数２２、１０倍から３０倍まで変倍し、開口数が０．２５から０．５５である。開口絞りＳは、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間にあり、第１レンズ群Ｇ１の後側焦点位置近傍に配置され、変倍と共に所定の開口数になるように、絞り径が変化する機構を備えている。   The zoom objective lens of Example 2 has a field of view of 22 and a variable magnification from 10 to 30 times, and a numerical aperture of 0.25 to 0.55. The aperture stop S is located between the first lens group G1 and the second lens group G2, is disposed in the vicinity of the rear focal position of the first lens group G1, and has a diaphragm diameter so as to have a predetermined numerical aperture together with zooming. It has a mechanism that changes.

実施例３の構成を図３に示す。図３（ａ）は倍率１０Ｘ、ＮＡ０．２５、図３（ｂ）は倍率２０Ｘ、ＮＡ０．４、図３（ｃ）は倍率４０Ｘ、ＮＡ０．６の場合のレンズ断面と光路を示す。物体側から順に、正のパワーを持つ第１レンズ群Ｇ１、負のパワーを持つ第２レンズ群Ｇ２、正のパワーを持つ第３レンズ群Ｇ３で構成され、低倍側から高倍側へ変倍する際に、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間隔が大きくなり、第２レンズ群Ｇ２と第３レンズ群Ｇ３の間隔が小さくなるように、第２レンズ群Ｇ２と第３レンズ群Ｇ３が光軸上を移動する。   The configuration of Example 3 is shown in FIG. 3A shows the lens cross section and optical path when the magnification is 10X and NA 0.25, FIG. 3B is the magnification 20X and NA 0.4, and FIG. 3C is the magnification 40X and NA 0.6. In order from the object side, the first lens group G1 having a positive power, the second lens group G2 having a negative power, and the third lens group G3 having a positive power are configured to change magnification from the low magnification side to the high magnification side. In doing so, the distance between the first lens group G1 and the second lens group G2 is increased, and the distance between the second lens group G2 and the third lens group G3 is decreased. G3 moves on the optical axis.

第１レンズ群Ｇ１の構成は、物体側に凹面を向け、物体側から両凹レンズと両凸レンズの接合負メニスカスレンズ、物体側に凹面を向けた正メニスカスレンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズのパワーのゆるい接合正レンズ、物体側に凸面を向けたパワーのゆるい正メニスカスレンズで構成される。第２レンズ群Ｇ２は、両凹レンズと正メニスカスレンズの接合負レンズ、両凹レンズと両凸レンズの接合正メニスカスレンズで構成されている。第３レンズ群Ｇ３は、物体側に凹面を向けた正メニスカスレンズ、両凸レンズと両凹レンズのパワーの弱い接合負メニスカスレンズで構成されている。   The first lens group G1 includes a negative meniscus lens having a concave surface directed toward the object side, a cemented negative meniscus lens having a biconcave lens and a biconvex lens from the object side, a negative meniscus lens having a concave surface directed toward the object side, and a negative meniscus having a convex surface directed toward the object side. A cemented positive lens of a lens and a biconvex lens, a cemented positive lens of a negative meniscus lens having a convex surface facing the object side and a biconvex lens, a negative meniscus lens having a convex surface facing the object side, and a cemented positive lens having a loose power of the biconvex lens, object side Consists of a positive meniscus lens with a gentle power with its convex surface facing to. The second lens group G2 includes a cemented negative lens composed of a biconcave lens and a positive meniscus lens, and a cemented positive meniscus lens composed of a biconcave lens and a biconvex lens. The third lens group G3 includes a positive meniscus lens having a concave surface directed toward the object side, and a cemented negative meniscus lens having a weak power between the biconvex lens and the biconcave lens.

実施例３のズーム対物レンズは、視野数２２、１０倍から４０倍まで変倍し、開口数が０．２５から０．６である。開口絞りＳは、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間にあり、第１レンズ群Ｇ１の後側焦点位置近傍に配置され、変倍と共に所定の開口数になるように、絞り径が変化する機構を備えている。   The zoom objective lens according to the third exemplary embodiment has a field of view of 22 and a variable magnification from 10 to 40 times, and a numerical aperture of 0.25 to 0.6. The aperture stop S is located between the first lens group G1 and the second lens group G2, is disposed in the vicinity of the rear focal position of the first lens group G1, and has a diaphragm diameter so as to have a predetermined numerical aperture together with zooming. It has a mechanism that changes.

実施例４の構成を図４に示す。図４（ａ）は倍率１０Ｘ、ＮＡ０．２５、図４（ｂ）は倍率２０Ｘ、ＮＡ０．４、図４（ｃ）は倍率３０Ｘ、ＮＡ０．５５の場合のレンズ断面と光路を示す。物体側から順に、正のパワーを持つ第１レンズ群Ｇ１、負のパワーを持つ第２レンズ群Ｇ２、正のパワーを持つ第３レンズ群Ｇ３で構成され、低倍側から高倍側へ変倍する際に、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間隔が大きくなり、第２レンズ群Ｇ２と第３レンズ群Ｇ３の間隔が小さくなるように、第２レンズ群Ｇ２と第３レンズ群Ｇ３が光軸上を移動する。   The configuration of Example 4 is shown in FIG. 4A shows the lens cross section and optical path when the magnification is 10X and NA 0.25, FIG. 4B is the magnification 20X and NA 0.4, and FIG. 4C is the magnification 30X and NA 0.55. In order from the object side, the first lens group G1 having a positive power, the second lens group G2 having a negative power, and the third lens group G3 having a positive power are configured to change magnification from the low magnification side to the high magnification side. In doing so, the distance between the first lens group G1 and the second lens group G2 is increased, and the distance between the second lens group G2 and the third lens group G3 is decreased. G3 moves on the optical axis.

第１レンズ群Ｇ１の構成は、物体側に凹面を向け、物体側から両凹レンズと両凸レンズの弱いパワーを持つ接合正メニスカスレンズ、両凸レンズ、両凹レンズと両凸レンズの接合負メニスカスレンズ、物体側にゆるい凹面を向けた正メニスカスレンズ、両凸レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズ、物体側に凸面を向けた負メニスカスレンズで構成される。第２レンズ群Ｇ２は、両凹レンズと正メニスカスレンズの接合負レンズ、物体側に凹面を向けた負メニスカスレンズと正メニスカスレンズの接合正メニスカスレンズで構成されている。第３レンズ群Ｇ３は、像側にゆるい凸面を持つ両凸レンズ、物体側にゆるい凸面を向けた負メニスカスレンズと両凸レンズのパワーの弱い接合正レンズで構成されている。   The first lens group G1 has a concave surface facing the object side, a cemented positive meniscus lens having a weak power of a biconcave lens and a biconvex lens from the object side, a biconvex lens, a cemented negative meniscus lens of a biconcave lens and a biconvex lens, object side A positive meniscus lens having a gentle concave surface, a biconvex lens, a negative meniscus lens having a convex surface facing the object side, a cemented positive lens of the biconvex lens, and a negative meniscus lens having a convex surface facing the object side. The second lens group G2 includes a cemented negative lens composed of a biconcave lens and a positive meniscus lens, and a cemented positive meniscus lens composed of a negative meniscus lens having a concave surface facing the object side and a positive meniscus lens. The third lens group G3 includes a biconvex lens having a loose convex surface on the image side, a negative meniscus lens having a loose convex surface on the object side, and a cemented positive lens having a weak power of the biconvex lens.

実施例１と同様に、開口絞りＳは、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間にあり、第１レンズ群Ｇ１の後側焦点位置近傍に配置され、変倍と共に所定の開口数になるように、絞り径が変化する機構を備えている。   Similar to the first embodiment, the aperture stop S is located between the first lens group G1 and the second lens group G2, is disposed in the vicinity of the rear focal position of the first lens group G1, and has a predetermined numerical aperture together with zooming. A mechanism for changing the aperture diameter is provided.

実施例４のズーム対物レンズは、視野数２２、１０倍から３０倍まで変倍し、開口数が０．２５から０．５５である。   The zoom objective lens according to the fourth exemplary embodiment has a field of view of 22 and a variable magnification from 10 to 30 times, and a numerical aperture of 0.25 to 0.55.

実施例５の構成を図５に示す。図５（ａ）は倍率１０Ｘ、ＮＡ０．２５、図５（ｂ）は倍率２０Ｘ、ＮＡ０．４、図５（ｃ）は倍率３０Ｘ、ＮＡ０．５５の場合のレンズ断面と光路を示す。物体側から順に、正のパワーを持つ第１レンズ群Ｇ１、負のパワーを持つ第２レンズ群Ｇ２、正のパワーを持つ第３レンズ群Ｇ３で構成され、低倍側から高倍側へ変倍する際に、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間隔が大きくなり、第２レンズ群Ｇ２と第３レンズ群Ｇ３の間隔が小さくなるように、第２レンズ群Ｇ２と第３レンズ群Ｇ３が光軸上を移動する。   The configuration of the fifth embodiment is shown in FIG. 5A shows the lens cross section and optical path when the magnification is 10X and NA 0.25, FIG. 5B is the magnification 20X and NA 0.4, and FIG. 5C is the magnification 30X and NA 0.55. In order from the object side, the first lens group G1 having a positive power, the second lens group G2 having a negative power, and the third lens group G3 having a positive power are configured to change magnification from the low magnification side to the high magnification side. In doing so, the distance between the first lens group G1 and the second lens group G2 is increased, and the distance between the second lens group G2 and the third lens group G3 is decreased. G3 moves on the optical axis.

第１レンズ群Ｇ１の構成は、物体側に凹面を向け、物体側から両凹レンズと両凸レンズの接合負メニスカスレンズ、両凸レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズ、物体側にゆるい凸面を持つ両凸レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズのパワーのゆるい接合正レンズ、両凸レンズで構成される。第２レンズ群Ｇ２は、物体側にゆるい凹面を向けた正メニスカスレンズと両凹レンズと正メニスカスレンズの接合負レンズ、両凹レンズと正メニスカスレンズの接合負レンズで構成されている。第３レンズ群Ｇ３は、両凹レンズと両凸レンズの接合正メニスカスレンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズで構成されている。   The configuration of the first lens group G1 includes a cemented negative meniscus lens having a concave surface facing the object side, a biconcave lens and a biconvex lens from the object side, a biconvex lens, and a cemented positive lens having a negative meniscus lens and a biconvex lens having a convex surface facing the object side. A biconvex lens having a loose convex surface on the object side, a negative meniscus lens having a convex surface on the object side, a cemented positive lens with a weak power of the biconvex lens, and a biconvex lens. The second lens group G2 includes a positive meniscus lens having a loose concave surface facing the object side, a cemented negative lens of a biconcave lens and a positive meniscus lens, and a cemented negative lens of a biconcave lens and a positive meniscus lens. The third lens group G3 includes a cemented positive meniscus lens having a biconcave lens and a biconvex lens, and a cemented positive lens having a negative meniscus lens having a convex surface directed toward the object side and a biconvex lens.

実施例５のズーム対物レンズは、視野数２２、１０倍から３０倍まで変倍し、開口数が０．２５から０．５５である。開口絞りＳは、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間にあり、第１レンズ群Ｇ１の後側焦点位置近傍に配置され、変倍と共に所定の開口数になるように、絞り径が変化する機構を備えている。   The zoom objective lens according to the fifth exemplary embodiment has a field of view of 22 and a variable magnification from 10 to 30 times, and a numerical aperture of 0.25 to 0.55. The aperture stop S is located between the first lens group G1 and the second lens group G2, is disposed in the vicinity of the rear focal position of the first lens group G1, and has a diaphragm diameter so as to have a predetermined numerical aperture together with zooming. It has a mechanism that changes.

実施例６の構成を図６に示す。図６（ａ）は倍率１０Ｘ、ＮＡ０．２５、図６（ｂ）は倍率２０Ｘ、ＮＡ０．４、図６（ｃ）は倍率４０Ｘ、ＮＡ０．６の場合のレンズ断面と光路を示す。物体側から順に、正のパワーを持つ第１レンズ群Ｇ１、負のパワーを持つ第２レンズ群Ｇ２、正のパワーを持つ第３レンズ群Ｇ３で構成され、低倍側から高倍側へ変倍する際に、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間隔が大きくなり、第２レンズ群Ｇ２と第３レンズ群Ｇ３の間隔が小さくなるように、第２レンズ群Ｇ２と第３レンズ群Ｇ３が光軸上を移動する。   The configuration of Example 6 is shown in FIG. 6A shows the lens cross section and optical path when the magnification is 10X and NA 0.25, FIG. 6B is the magnification 20X and NA 0.4, and FIG. 6C is the magnification 40X and NA 0.6. In order from the object side, the first lens group G1 having a positive power, the second lens group G2 having a negative power, and the third lens group G3 having a positive power are configured to change magnification from the low magnification side to the high magnification side. In doing so, the distance between the first lens group G1 and the second lens group G2 is increased, and the distance between the second lens group G2 and the third lens group G3 is decreased. G3 moves on the optical axis.

第１レンズ群Ｇ１の構成は、物体側に凹面を向け、物体側から両凹レンズと両凸レンズの接合負メニスカスレンズ、物体側に凹面を向けた正メニスカスレンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズ、両凹レンズと両凸レンズの接合正メニスカスレンズ、物体側にゆるい凸面を向けた負メニスカスレンズと両凸レンズのパワーのほとんどない接合負レンズ、両凸レンズで構成される。第２レンズ群Ｇ２は、両凹レンズと正メニスカスレンズの接合負レンズ、両凹レンズと両凸レンズの接合正メニスカスレンズで構成されている。第３レンズ群Ｇ３は、物体側にゆるい凸面を持つ両凸レンズ、両凸レンズと両凹レンズの接合負メニスカスレンズで構成されている。   The first lens group G1 includes a negative meniscus lens having a concave surface directed toward the object side, a cemented negative meniscus lens having a biconcave lens and a biconvex lens from the object side, a negative meniscus lens having a concave surface directed toward the object side, and a negative meniscus having a convex surface directed toward the object side. It is composed of a cemented positive lens composed of a lens and a biconvex lens, a cemented positive meniscus lens composed of a biconcave lens and a biconvex lens, a negative meniscus lens having a loose convex surface facing the object side, a cemented negative lens with little power of the biconvex lens, and a biconvex lens. The second lens group G2 includes a cemented negative lens composed of a biconcave lens and a positive meniscus lens, and a cemented positive meniscus lens composed of a biconcave lens and a biconvex lens. The third lens group G3 includes a biconvex lens having a gentle convex surface on the object side, and a cemented negative meniscus lens composed of a biconvex lens and a biconcave lens.

実施例６のズーム対物レンズは、視野数２２、１０倍から４０倍まで変倍し、開口数が０．２５から０．６である。開口絞りＳは、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間にあり、第１レンズ群Ｇ１の後側焦点位置近傍に配置され、変倍と共に所定の開口数になるように、絞り径が変化する機構を備えている。   The zoom objective lens of Example 6 has a field of view of 22 and a variable magnification from 10 to 40 times, and a numerical aperture of 0.25 to 0.6. The aperture stop S is located between the first lens group G1 and the second lens group G2, is disposed in the vicinity of the rear focal position of the first lens group G1, and has a diaphragm diameter so as to have a predetermined numerical aperture together with zooming. It has a mechanism that changes.

実施例７の構成を図７に示す。図７（ａ）は倍率１０Ｘ、ＮＡ０．２５、図７（ｂ）は倍率２０Ｘ、ＮＡ０．４、図７（ｃ）は倍率４０Ｘ、ＮＡ０．６の場合のレンズ断面と光路を示す。物体側から順に、正のパワーを持つ第１レンズ群Ｇ１、負のパワーを持つ第２レンズ群Ｇ２、正のパワーを持つ第３レンズ群Ｇ３で構成され、低倍側から高倍側へ変倍する際に、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間隔が大きくなり、第２レンズ群Ｇ２と第３レンズ群Ｇ３の間隔が小さく、また、第１レンズ群Ｇ１は第２レンズ群Ｇ２とは光軸上を逆方向に移動するように、第１レンズ群Ｇ１、第２レンズ群Ｇ２と第３レンズ群Ｇ３が光軸上を移動する。   The configuration of the seventh embodiment is shown in FIG. 7A shows the lens cross section and optical path when the magnification is 10X and NA 0.25, FIG. 7B shows the magnification 20X and NA 0.4, and FIG. 7C shows the magnification 40X and NA 0.6. In order from the object side, the first lens group G1 having a positive power, the second lens group G2 having a negative power, and the third lens group G3 having a positive power are configured to change magnification from the low magnification side to the high magnification side. In this case, the distance between the first lens group G1 and the second lens group G2 is increased, the distance between the second lens group G2 and the third lens group G3 is decreased, and the first lens group G1 is the second lens group G2. The first lens group G1, the second lens group G2, and the third lens group G3 move on the optical axis so as to move in the opposite direction on the optical axis.

第１レンズ群Ｇ１の構成は、物体側に凹面を向け、物体側から両凹レンズと両凸レンズの接合負メニスカスレンズ、両凸レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズ、物体側に凹面を向けた正メニスカスレンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズのパワーのゆるい接合負レンズ、両凸レンズで構成される。第２レンズ群Ｇ２は、両凹レンズと負メニスカスレンズの接合負レンズ、両凹レンズと両凸レンズのほとんどパワーのない接合負メニスカスレンズで構成されている。第３レンズ群Ｇ３は、両凸レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズで構成されている。   The configuration of the first lens group G1 includes a cemented negative meniscus lens having a concave surface facing the object side, a biconcave lens and a biconvex lens from the object side, a biconvex lens, and a cemented positive lens having a negative meniscus lens and a biconvex lens having a convex surface facing the object side. A positive meniscus lens having a concave surface facing the object side, a negative meniscus lens having a convex surface facing the object side, a cemented negative lens with a weak power of the biconvex lens, and a biconvex lens. The second lens group G2 includes a cemented negative lens of a biconcave lens and a negative meniscus lens, and a cemented negative meniscus lens having almost no power of the biconcave lens and the biconvex lens. The third lens group G3 includes a biconvex lens, a negative meniscus lens having a convex surface directed toward the object side, and a cemented positive lens of the biconvex lens.

実施例７のズーム対物レンズは、視野数２２、１０倍から４０倍まで変倍し、開口数が０．２５から０．６である。開口絞りＳは、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間にあり、第１レンズ群Ｇ１の後側焦点位置近傍に配置され、変倍と共に所定の開口数になるように、絞り径が変化する機構を備えている。   The zoom objective lens according to the seventh exemplary embodiment has a field of view of 22 and a variable magnification from 10 to 40 times, and a numerical aperture of 0.25 to 0.6. The aperture stop S is located between the first lens group G1 and the second lens group G2, is disposed in the vicinity of the rear focal position of the first lens group G1, and has a diaphragm diameter so as to have a predetermined numerical aperture together with zooming. It has a mechanism that changes.

実施例８の構成を図８に示す。図８（ａ）は倍率１０Ｘ、ＮＡ０．２５、図８（ｂ）は倍率２０Ｘ、ＮＡ０．４、図８（ｃ）は倍率４０Ｘ、ＮＡ０．６の場合のレンズ断面と光路を示す。物体側から順に、正のパワーを持つ第１レンズ群Ｇ１、負のパワーを持つ第２レンズ群Ｇ２、正のパワーを持つ第３レンズ群Ｇ３で構成され、低倍側から高倍側へ変倍する際に、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間隔が大きくなり、第２レンズ群Ｇ２と第３レンズ群Ｇ３の間隔が小さくなるように、第２レンズ群Ｇ２と第３レンズ群Ｇ３が光軸上を移動する。   The configuration of the eighth embodiment is shown in FIG. FIG. 8A shows the lens cross section and optical path when the magnification is 10X and NA 0.25, FIG. 8B is the magnification 20X and NA 0.4, and FIG. 8C is the magnification 40X and NA 0.6. In order from the object side, the first lens group G1 having a positive power, the second lens group G2 having a negative power, and the third lens group G3 having a positive power are configured to change magnification from the low magnification side to the high magnification side. In doing so, the distance between the first lens group G1 and the second lens group G2 is increased, and the distance between the second lens group G2 and the third lens group G3 is decreased. G3 moves on the optical axis.

第１レンズ群Ｇ１の構成は、物体側に凹面を向け、物体側から両凹レンズと両凸レンズの接合負メニスカスレンズ、両凸レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズ、物体側に非常にゆるい凸面を持つ両凸レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズのほとんどパワーのない接合負レンズ、両凸レンズで構成される。第２レンズ群Ｇ２は、両凹レンズと負メニスカスレンズの接合負レンズ、両凹レンズと両凸レンズの接合負メニスカスレンズで構成されている。第３レンズ群Ｇ３は、両凸レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズで構成されている。   The configuration of the first lens group G1 includes a cemented negative meniscus lens having a concave surface facing the object side, a biconcave lens and a biconvex lens from the object side, a biconvex lens, and a cemented positive lens having a negative meniscus lens and a biconvex lens having a convex surface facing the object side. The lens is composed of a biconvex lens having a very gentle convex surface on the object side, a negative meniscus lens having a convex surface facing the object side, a cemented negative lens having almost no power of the biconvex lens, and a biconvex lens. The second lens group G2 includes a cemented negative lens composed of a biconcave lens and a negative meniscus lens, and a cemented negative meniscus lens composed of a biconcave lens and a biconvex lens. The third lens group G3 includes a biconvex lens, a negative meniscus lens having a convex surface directed toward the object side, and a cemented positive lens of the biconvex lens.

実施例８のズーム対物レンズは、視野数２２、１０倍から４０倍まで変倍し、開口数が０．２５から０．６である。開口絞りＳは、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間にあり、第１レンズ群Ｇ１の後側焦点位置近傍に配置され、変倍と共に所定の開口数になるように、絞り径が変化する機構を備えている。   The zoom objective lens of Example 8 has a field of view of 22 and a variable magnification from 10 to 40 times, and a numerical aperture of 0.25 to 0.6. The aperture stop S is located between the first lens group G1 and the second lens group G2, is disposed in the vicinity of the rear focal position of the first lens group G1, and has a diaphragm diameter so as to have a predetermined numerical aperture together with zooming. It has a mechanism that changes.

実施例９の構成を図９に示す。図９（ａ）は倍率１０Ｘ、ＮＡ０．２５、図９（ｂ）は倍率２０Ｘ、ＮＡ０．４、図９（ｃ）は倍率４０Ｘ、ＮＡ０．７の場合のレンズ断面と光路を示す。物体側から順に、正のパワーを持つ第１レンズ群Ｇ１、負のパワーを持つ第２レンズ群Ｇ２、正のパワーを持つ第３レンズ群Ｇ３の３つのレンズ群で構成され、低倍側から高倍側へ変倍する際に、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間隔が大きくなり、第２レンズ群Ｇ２と第３レンズ群Ｇ３の間隔が小さくなるように、第２レンズ群と第３レンズ群が光軸上を移動する。   The configuration of Example 9 is shown in FIG. 9A shows the lens cross section and optical path when the magnification is 10X and NA 0.25, FIG. 9B shows the magnification 20X and NA 0.4, and FIG. 9C shows the magnification 40X and NA 0.7. In order from the object side, the first lens group G1 has a positive power, the second lens group G2 has a negative power, and the third lens group G3 has a positive power. When changing the magnification to the high magnification side, the distance between the first lens group G1 and the second lens group G2 is increased, and the distance between the second lens group G2 and the third lens group G3 is decreased. The third lens group moves on the optical axis.

第１レンズ群Ｇ１の構成は、物体側に凹面を向け、物体側から両凹レンズと両凸レンズの接合負メニスカスレンズ、物体側に平面を向けた平凸レンズ、物体側に大きな曲率半径の凸面を向けた両凸レンズ、両凸レンズと両凹レンズと両凸レンズの３枚で構成された正の接合レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズからなる。第２レンズ群Ｇ２は、物体側に凹面を向けた正メニスカスレンズと両凹レンズの接合レンズ、両凹レンズと物体側に凸面を向けた正メニスカスレンズの接合レンズで構成されている。第３レンズ群Ｇ３は、物体側に凹面を向けた正メニスカスレンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合レンズで構成されている。   The configuration of the first lens group G1 has a concave surface facing the object side, a cemented negative meniscus lens composed of a biconcave lens and a biconvex lens from the object side, a plano-convex lens having a plane facing the object side, and a convex surface having a large radius of curvature facing the object side. A biconvex lens, a positive cemented lens composed of a biconvex lens, a biconcave lens, and a biconvex lens, and a cemented positive lens composed of a negative meniscus lens having a convex surface facing the object side and a biconvex lens. The second lens group G2 includes a cemented lens of a positive meniscus lens having a concave surface facing the object side and a biconcave lens, and a cemented lens of a biconcave lens and a positive meniscus lens having a convex surface facing the object side. The third lens group G3 includes a positive meniscus lens having a concave surface directed toward the object side, and a cemented lens of a negative meniscus lens having a convex surface directed toward the object side and a biconvex lens.

非球面は、第１レンズ群Ｇ１中の平凸レンズの凸面と、３枚で構成された接合正レンズの物体側の凸面と第２レンズ群Ｇ２側の凸面に配置されている。   The aspheric surfaces are arranged on the convex surface of the plano-convex lens in the first lens group G1, the object-side convex surface of the cemented positive lens composed of three lenses, and the convex surface on the second lens group G2.

第１レンズ群Ｇ１中に配置された非球面は、高倍側の軸上マージナル光線高が高い３枚の接合正レンズと軸外主光線と従属光線の光線高が比較的高い平凸レンズ群の凸面に配置され、高倍側での球面収差とコマ収差の補正に効果的である。また、第１レンズ群Ｇ１中の３枚の接合正レンズは軸上色収差等に効果的である。また、第１レンズ群Ｇ１の物体側に配置された接合負メニスカスレンズは、ペッツバール和を抑える作用を持ち、その接合負メニスカスレンズは物体側に凹面を向けているので、コマ収差や非点収差等の軸外収差の発生を抑えるので、高倍側と低倍側での収差補正に効果的である。   The aspherical surface disposed in the first lens group G1 is a convex surface of the three convex positive lenses having a high on-axis marginal ray height on the high magnification side, and a plano-convex lens group having relatively high ray heights of off-axis principal rays and dependent rays. It is effective for correcting spherical aberration and coma on the high magnification side. The three cemented positive lenses in the first lens group G1 are effective for axial chromatic aberration and the like. Further, the cemented negative meniscus lens disposed on the object side of the first lens group G1 has an action of suppressing the Petzval sum, and the cemented negative meniscus lens has a concave surface facing the object side, so coma and astigmatism. Therefore, it is effective for correcting aberrations on the high magnification side and the low magnification side.

実施例９のズーム対物レンズは、視野数２２、１０倍から４０倍まで変倍し、開口数が０．２５から０．７である。開口絞りＳは、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間にあり、第１レンズ群Ｇ１の後側焦点位置近傍に配置され、変倍と共に所定の開口数になるように、絞り径が変化する機構を備えている。   The zoom objective lens according to the ninth exemplary embodiment has a field of view of 22 and a variable magnification from 10 to 40 times, and a numerical aperture of 0.25 to 0.7. The aperture stop S is located between the first lens group G1 and the second lens group G2, is disposed in the vicinity of the rear focal position of the first lens group G1, and has a diaphragm diameter so as to have a predetermined numerical aperture together with zooming. It has a mechanism that changes.

実施例１０の構成を図１０に示す。図１０（ａ）は倍率１０Ｘ、ＮＡ０．２５、図１０（ｂ）は倍率２０Ｘ、ＮＡ０．４、図１０（ｃ）は倍率４０Ｘ、ＮＡ０．６５の場合のレンズ断面と光路を示す。物体側から順に、正のパワーを持つ第１レンズ群Ｇ１、負のパワーを持つ第２レンズ群Ｇ２、正のパワーを持つ第３レンズ群Ｇ３の３つのレンズ群で構成され、低倍側から高倍側へ変倍する際に、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間隔が大きくなり、第２レンズ群Ｇ２と第３レンズ群Ｇ３の間隔が小さくなるように、第２レンズ群と第３レンズ群が光軸上を移動する。   The configuration of Example 10 is shown in FIG. 10A shows the lens cross section and optical path when the magnification is 10X and NA 0.25, FIG. 10B is the magnification 20X and NA 0.4, and FIG. 10C is the magnification 40X and NA 0.65. In order from the object side, the first lens group G1 has a positive power, the second lens group G2 has a negative power, and the third lens group G3 has a positive power. When changing the magnification to the high magnification side, the distance between the first lens group G1 and the second lens group G2 is increased, and the distance between the second lens group G2 and the third lens group G3 is decreased. The third lens group moves on the optical axis.

第１レンズ群Ｇ１の構成は、物体側から両凹レンズと凸レンズの接合負メニスカスレンズ、両凸レンズと両凹レンズと両凸レンズの３枚で接合された接合正レンズ、第２レンズ群側に非球面を備える両凸レンズ、両凸レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズで構成される。第２レンズ群Ｇ２は、第１レンズ群側に凹面をむけた正メニスカスレンズと両凹レンズの接合負レンズ、両凹レンズと物体側に凸面を向けた凸平レンズの接合負レンズで構成され、互いに凹面を向けた構成である。第３レンズ群Ｇ３は、物体側に凹面を向けた正メニスカスレンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズで構成されている。   The configuration of the first lens group G1 includes a cemented negative meniscus lens composed of a biconcave lens and a convex lens from the object side, a cemented positive lens cemented with a biconvex lens, a biconcave lens, and a biconvex lens, and an aspheric surface on the second lens group side. It comprises a biconvex lens, a biconvex lens, a negative meniscus lens having a convex surface facing the object side, and a cemented positive lens of the biconvex lens. The second lens group G2 is composed of a cemented negative lens of a positive meniscus lens having a concave surface facing the first lens group and a biconcave lens, and a cemented negative lens of a biconcave lens and a convex flat lens having a convex surface facing the object side. It is the structure which turned the concave surface. The third lens group G3 includes a positive meniscus lens having a concave surface directed toward the object side, and a cemented positive lens composed of a negative meniscus lens having a convex surface directed toward the object side and a biconvex lens.

第１レンズ群Ｇ１中の非球面は、高倍側の軸上マージナル光線高が高いところに配置され、球面収差の補正に効果的である。また、第１レンズ群Ｇ１の物体側に配置された接合負メニスカスレンズは、実施例９と同様に、ペッツバール和を抑えている。３枚で構成された接合正レンズについても、その接合正レンズの接合面の負屈折力により光線高を上げているので、ペッツバール和を抑え、コマ収差の補正にも効果的である。   The aspherical surface in the first lens group G1 is arranged at a position where the axial marginal ray height on the high magnification side is high, and is effective in correcting spherical aberration. In addition, the cemented negative meniscus lens disposed on the object side of the first lens group G1 suppresses the Petzval sum as in the ninth embodiment. Even in the case of a cemented positive lens composed of three lenses, the beam height is increased by the negative refractive power of the cemented surface of the cemented positive lens, so that Petzval sum is suppressed and it is effective for correcting coma aberration.

実施例１０のズーム対物レンズは、視野数２２、１０倍から４０倍まで変倍し、開口数が０．２５から０．６５である。開口絞りＳは、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間にあり、第１レンズ群Ｇ１の後側焦点位置近傍に配置され、変倍と共に所定の開口数になるように、絞り径が変化する機構を備えている。   The zoom objective lens of Example 10 has a field of view of 22 and a variable magnification from 10 to 40 times, and a numerical aperture of 0.25 to 0.65. The aperture stop S is located between the first lens group G1 and the second lens group G2, is disposed in the vicinity of the rear focal position of the first lens group G1, and has a diaphragm diameter so as to have a predetermined numerical aperture together with zooming. It has a mechanism that changes.

以上の実施例１〜１０の顕微鏡ズーム対物レンズの収差図をそれぞれ図１７〜図２６に示す。これらの収差図において、（ａ）、（ｂ）、（ｃ）はぞれぞれ図１〜図１０の（ａ）、（ｂ）、（ｃ）の状態に対応する倍率のときの収差図であり、各状態において、“ＳＡ”は球面収差、“ＡＳ”は非点収差、“ＤＺ”は軸外縦収差、“ＤＴ”は歪曲収差を示す。これら収差図中、“ＩＨ”は像高を示す。   Aberration diagrams of the microscope zoom objective lenses of Examples 1 to 10 are shown in FIGS. 17 to 26, respectively. In these aberration diagrams, (a), (b), and (c) are aberration diagrams at magnifications corresponding to the states of FIGS. 1 to 10 (a), (b), and (c), respectively. In each state, “SA” indicates spherical aberration, “AS” indicates astigmatism, “DZ” indicates off-axis longitudinal aberration, and “DT” indicates distortion. In these aberration diagrams, “IH” indicates the image height.

次に、本発明の４群構成の顕微鏡ズーム対物レンズの実施例１１〜１５について説明する。各実施例のレンズデータは後記するが、図１１〜図１５はそれぞれ実施例１１〜１５のレンズ構成を示す断面図であり、図１１（ａ）、（ｂ）、（ｃ）は実施例１１の１０倍、２０倍、４０倍での光路を示す断面図、図１２（ａ）、（ｂ）、（ｃ）は実施例１２の１０倍、２０倍、４０倍での光路を示す断面図、図１３（ａ）、（ｂ）、（ｃ）は実施例１３の２０倍、４０倍、８０倍での光路を示す断面図、図１４（ａ）、（ｂ）、（ｃ）は実施例１４の１０倍、２０倍、５０倍での光路を示す断面図、図１５（ａ）、（ｂ）、（ｃ）は実施例１５の１０倍、２０倍、４０倍での光路を示す断面図である。   Next, Examples 11 to 15 of the four-group microscope zoom objective lens according to the present invention will be described. Although lens data of each example will be described later, FIGS. 11 to 15 are cross-sectional views showing lens configurations of Examples 11 to 15, respectively. FIGS. 11 (a), 11 (b), and 11 (c) are examples 11 of the present invention. Sectional views showing optical paths at 10 times, 20 times, and 40 times, and FIGS. 12A, 12B, and 12C are sectional views showing optical paths at 10 times, 20 times, and 40 times of Example 12. FIGS. 13A, 13B, and 13C are cross-sectional views showing optical paths at 20 times, 40 times, and 80 times that of Example 13, and FIGS. 14A, 14B, and 14C are performed. Sectional views showing optical paths at 10 times, 20 times, and 50 times of Example 14, and FIGS. 15A, 15B, and 15C show optical paths at 10 times, 20 times, and 40 times of Example 15. It is sectional drawing.

以下に述べる各実施例の顕微鏡ズーム対物レンズは、無限遠設計であって、単独では結像しない。そのため、図１６の構成で、後記するレンズデータを有する結像レンズを各実施例での顕微鏡ズーム対物レンズの像側に配置して使用する。なお、後記の各実施例のレンズデータ中にはこの結像レンズのレンズデータも含めて示してある。   The microscope zoom objective lens of each embodiment described below is designed at infinity and does not form an image alone. Therefore, in the configuration of FIG. 16, an imaging lens having lens data to be described later is arranged and used on the image side of the microscope zoom objective lens in each embodiment. In addition, the lens data of each example described later includes the lens data of the imaging lens.

また、後記する各実施例の収差図は、顕微鏡ズーム対物レンズの後方に、物体から結像レンズの物体側のレンズ面までの距離を１００ｍｍの位置に配置したときの収差図である。なお、物体から結像レンズの物体側のレンズ面までの間隔が１００〜２００ｍｍ程度の間では、収差はほとんど変化しない。   In addition, the aberration diagrams of the respective examples described later are aberration diagrams when the distance from the object to the lens surface on the object side of the imaging lens is arranged at a position of 100 mm behind the microscope zoom objective lens. The aberration hardly changes when the distance from the object to the lens surface on the object side of the imaging lens is about 100 to 200 mm.

以下、図面と後記のレンズデータを参照にして、本発明の顕微鏡ズーム対物レンズの実施例１１〜１５について説明する。   Examples 11 to 15 of the microscope zoom objective lens according to the present invention will be described below with reference to the drawings and lens data described later.

図１１に実施例１１の構成を示す。本実施例のズーム対物レンズは、物体側から順に、正のパワーを持つ第１レンズ群Ｇ１、負のパワーを持つ第２レンズ群Ｇ２、正のパワーを持つ第３レンズ群Ｇ３、負のパワーを持つ第４レンズ群Ｇ４で構成されている。そして、低倍側から高倍側へ変倍する際に、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間隔が大きくなり、第２レンズ群Ｇ２と第３レンズ群Ｇ３の間隔が小さくなり、第３レンズ群Ｇ３と第４レンズ群Ｇ４の間隔が一旦大きくなり再度小さくなるように、第２レンズ群Ｇ２と第３レンズ群Ｇ３と第４レンズ群Ｇ３が光軸上を移動する。   FIG. 11 shows the configuration of the eleventh embodiment. The zoom objective lens according to this embodiment includes, in order from the object side, a first lens group G1 having a positive power, a second lens group G2 having a negative power, a third lens group G3 having a positive power, and a negative power. And a fourth lens group G4. When zooming from the low magnification side to the high magnification side, the distance between the first lens group G1 and the second lens group G2 increases, the distance between the second lens group G2 and the third lens group G3 decreases, The second lens group G2, the third lens group G3, and the fourth lens group G3 move on the optical axis so that the distance between the third lens group G3 and the fourth lens group G4 increases once and then decreases again.

第１レンズ群Ｇ１の構成は、物体側に凹面を向け、物体側から両凹レンズと両凸レンズの接合負メニスカスレンズ、物体側に凹面を向けた負メニスカスレンズと正メニスカスレンズの接合正メニスカスレンズ、物体側に緩い凸面を向けた負メニスカスレンズと第２レンズ群Ｇ２側に強い凸面を向けた両凸レンズの接合正レンズ、両凸の単レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合負レンズで構成される。   The first lens group G1 has a concave surface facing the object side, a cemented negative meniscus lens composed of a biconcave lens and a biconvex lens from the object side, a cemented positive meniscus lens composed of a negative meniscus lens and a positive meniscus lens facing the concave surface toward the object side, A cemented positive lens of a negative meniscus lens having a gentle convex surface facing the object side and a biconvex lens having a strong convex surface facing the second lens group G2, a biconvex single lens, a negative meniscus lens and a biconvex lens having a convex surface facing the object side It is composed of a cemented negative lens.

第２レンズ群Ｇ２は、両凹レンズと負メニスカスレンズの接合負レンズ、両凹レンズと両凸レンズの接合負メニスカスレンズで構成され、互いに凹面を向けた構成である。   The second lens group G2 is composed of a cemented negative lens made up of a biconcave lens and a negative meniscus lens, and a cemented negative meniscus lens made up of a biconcave lens and a biconvex lens, with the concave surfaces facing each other.

第３レンズ群Ｇ３は、両凹レンズと両凸レンズの接合正レンズ、両凸レンズで構成されている。   The third lens group G3 includes a cemented positive lens composed of a biconcave lens and a biconvex lens, and a biconvex lens.

第４レンズ群Ｇ４は、第３レンズ群Ｇ３側に凸面を向けた正メニスカスレンズと像側に凹面を向けた負メニスカスレンズのパワーの緩い正の接合メニスカスレンズ、両凹レンズと正メニスカスレンズの接合負レンズで構成されている。   The fourth lens group G4 includes a positive meniscus lens having a slow power and a positive meniscus lens having a convex surface facing the third lens group G3 and a negative meniscus lens having a concave surface facing the image side. It consists of a negative lens.

実施例１１のズーム対物レンズは、視野数２２、１０倍から４０倍まで変倍し、開口数が０．２５から０．６５である。開口絞りＳは、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間にあり、第１レンズ群Ｇ１の後側焦点位置近傍に配置され、変倍と共に所定の開口数になるように、絞り径が変化する機構を備えている。各倍率での収差図を図２７（ａ）、（ｂ）、（ｃ）に示す。各収差図中、球面収差は“ＳＡ”、非点収差は“ＡＳ”、像高比１．０における軸外収差は“ＤＺ１”、像高比０．５における軸外収差は“ＤＺ２”、歪曲収差は“ＤＴ”で示す。また、“ＦＩＹ”は像高で、実施例１乃至実施例１０の収差図における“ＩＨ”と同じである。以下の収差図においても同じ。   The zoom objective lens according to the eleventh embodiment has a field of view of 22 and a variable magnification from 10 to 40 times, and a numerical aperture of 0.25 to 0.65. The aperture stop S is located between the first lens group G1 and the second lens group G2, is disposed in the vicinity of the rear focal position of the first lens group G1, and has a diaphragm diameter so as to have a predetermined numerical aperture together with zooming. It has a mechanism that changes. Aberration diagrams at each magnification are shown in FIGS. 27 (a), (b), and (c). In each aberration diagram, spherical aberration is “SA”, astigmatism is “AS”, off-axis aberration at an image height ratio of 1.0 is “DZ1”, off-axis aberration at an image height ratio of 0.5 is “DZ2”, Distortion is indicated by “DT”. “FIY” is the image height, which is the same as “IH” in the aberration diagrams of Examples 1 to 10. The same applies to the following aberration diagrams.

図１２に実施例１２の構成を示す。本実施例のズーム対物レンズは、物体側から順に、正のパワーを持つ第１レンズ群Ｇ１、負のパワーを持つ第２レンズ群Ｇ２、正のパワーを持つ第３レンズ群Ｇ３、負のパワーを持つ第４レンズ群Ｇ４で構成されている。そして、低倍側から高倍側へ変倍する際に、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間隔が大きくなり、第２レンズ群Ｇ２と第３レンズ群Ｇ３の間隔が小さくなり、第３レンズ群Ｇ３と第４レンズ群Ｇ４の間隔が一旦大きくなり再度小さくなるように、第２レンズ群Ｇ２と第３レンズ群Ｇ３と第４レンズ群Ｇ４が光軸上を移動する。   FIG. 12 shows the configuration of the twelfth embodiment. The zoom objective lens according to this embodiment includes, in order from the object side, a first lens group G1 having a positive power, a second lens group G2 having a negative power, a third lens group G3 having a positive power, and a negative power. And a fourth lens group G4. When zooming from the low magnification side to the high magnification side, the distance between the first lens group G1 and the second lens group G2 increases, the distance between the second lens group G2 and the third lens group G3 decreases, The second lens group G2, the third lens group G3, and the fourth lens group G4 move on the optical axis so that the distance between the third lens group G3 and the fourth lens group G4 increases once and then decreases again.

第１レンズ群Ｇ１の構成は、物体側に凹面を向け、物体側から両凹レンズと両凸レンズの接合負メニスカスレンズ、物体側に凹面を向けた正メニスカスレンズ、両凸レンズと両凹レンズと両凸レンズの３枚で接合された接合正レンズ、両凸レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズで構成される。   The configuration of the first lens group G1 includes a negative negative meniscus lens having a concave surface facing the object side, a biconcave lens and a biconvex lens from the object side, a positive meniscus lens having a concave surface facing the object side, a biconvex lens, a biconcave lens, and a biconvex lens. It consists of a cemented positive lens, a biconvex lens, a negative meniscus lens having a convex surface facing the object side, and a biconvex positive lens.

第２レンズ群Ｇ２は、第１レンズ群Ｇ１側に凹面を向けた負メニスカスレンズと緩い曲率半径を持つ両凹レンズの接合負レンズ、両凹レンズと両凸レンズの接合負メニスカスレンズで構成され、互いに凹面を向けた構成である。   The second lens group G2 includes a negative meniscus lens having a concave surface directed toward the first lens group G1, a cemented negative lens of a biconcave lens having a loose radius of curvature, and a cemented negative meniscus lens of a biconcave lens and a biconvex lens. It is the structure which aimed.

第３レンズ群Ｇ３は、両凹レンズと両凸レンズの接合正レンズ、両凸レンズで構成されている。   The third lens group G3 includes a cemented positive lens composed of a biconcave lens and a biconvex lens, and a biconvex lens.

第４レンズ群Ｇ４は、第３レンズ群Ｇ３側に凸面を向けた正メニスカスレンズと像側に凹面を向けた負メニスカスレンズのパワーの緩い接合正メニスカスレンズ、両凹レンズと正メニスカスレンズの接合負レンズで構成されている。   The fourth lens group G4 includes a positive meniscus lens having a convex surface facing the third lens group G3 and a negative meniscus lens having a concave surface facing the image side. It consists of a lens.

実施例１２のズーム対物レンズは、視野数２２、１０倍から４０倍まで変倍し、開口数が０．２５から０．６５である。開口絞りＳは、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間にあり、第１レンズ群Ｇ１の後側焦点位置近傍に配置され、変倍と共に所定の開口数になるように、絞り径が変化する機構を備えている。各倍率での収差図を図２８（ａ）、（ｂ）、（ｃ）に示す。   The zoom objective lens according to the twelfth embodiment has a field of view of 22, a magnification of 10 to 40 times, and a numerical aperture of 0.25 to 0.65. The aperture stop S is located between the first lens group G1 and the second lens group G2, is disposed in the vicinity of the rear focal position of the first lens group G1, and has a diaphragm diameter so as to have a predetermined numerical aperture together with zooming. It has a mechanism that changes. Aberration diagrams at each magnification are shown in FIGS. 28 (a), 28 (b), and 28 (c).

図１３に実施例１３の構成を示す。本実施例のズーム対物レンズは、物体側から順に、正のパワーを持つ第１レンズ群Ｇ１、負のパワーを持つ第２レンズ群Ｇ２、正のパワーを持つ第３レンズ群Ｇ３、負のパワーを持つ第４レンズ群Ｇ４で構成されている。そして、低倍側から高倍側へ変倍する際に、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間隔が大きくなり、第２レンズ群Ｇ２と第３レンズ群Ｇ３の間隔が小さくなり、第３レンズ群Ｇ３と第４レンズ群Ｇ４の間隔が小さくなるように、第２レンズ群Ｇ２と第３レンズ群Ｇ３と第４レンズ群Ｇ４が光軸上を移動する。   FIG. 13 shows the configuration of the thirteenth embodiment. The zoom objective lens according to this embodiment includes, in order from the object side, a first lens group G1 having a positive power, a second lens group G2 having a negative power, a third lens group G3 having a positive power, and a negative power. And a fourth lens group G4. When zooming from the low magnification side to the high magnification side, the distance between the first lens group G1 and the second lens group G2 increases, the distance between the second lens group G2 and the third lens group G3 decreases, The second lens group G2, the third lens group G3, and the fourth lens group G4 move on the optical axis so that the distance between the third lens group G3 and the fourth lens group G4 is reduced.

第１レンズ群Ｇ１の構成は、物体側に凹面を向け、物体側から両凹レンズと両凸レンズの接合負メニスカスレンズ、物体側に凹面を向けた正メニスカスレンズ、両凸レンズと両凹レンズと両凸レンズからなる接合正レンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズで構成されている。   The first lens group G1 is composed of a negative negative meniscus lens having a concave surface facing the object side, a biconcave lens and a biconvex lens from the object side, a positive meniscus lens having a concave surface facing the object side, a biconvex lens, a biconcave lens, and a biconvex lens. A cemented positive lens, a negative meniscus lens having a convex surface facing the object side, and a cemented positive lens of a biconvex lens.

ここで、第１レンズ群Ｇ１中の、両凸レンズ、両凹レンズ、両凸レンズの３枚からなる接合正レンズの物体側と第２レンズ群Ｇ２側の空気接触面は、非球面で構成されている。   Here, in the first lens group G1, the air contact surfaces on the object side and the second lens group G2 side of the cemented positive lens including the biconvex lens, the biconcave lens, and the biconvex lens in the first lens group G1 are aspherical. .

第２レンズ群Ｇ２は、第１レンズ群Ｇ１側に緩い凸面を持つ負メニスカスレンズ、両凹レンズと両凸レンズの接合正レンズで構成され、互いに凹面を向けた構成となっている。   The second lens group G2 includes a negative meniscus lens having a loose convex surface on the first lens group G1 side, a cemented positive lens of a biconcave lens and a biconvex lens, and has a configuration in which concave surfaces are directed to each other.

第３レンズ群Ｇ３は、第２レンズ群Ｇ２側に凹面を向けた正メニスカスレンズ、両凸レンズと負メニスカスレンズの接合正レンズで構成されている。   The third lens group G3 includes a positive meniscus lens having a concave surface facing the second lens group G2, and a cemented positive lens composed of a biconvex lens and a negative meniscus lens.

第４レンズ群Ｇ４は、第３レンズ群Ｇ３側に強い凸面を向けた正メニスカスレンズと像側に強い凹面を向けた負メニスカスレンズの接合負メニスカスレンズ，両凹レンズと正メニスカスレンズの接合負レンズで構成されている。第４レンズ群Ｇ４の２つのレンズ群は互いに凹面を向けた構成となっている。   The fourth lens group G4 includes a cemented negative meniscus lens having a positive meniscus lens having a strong convex surface facing the third lens group G3 and a negative meniscus lens having a strong concave surface facing the image side, and a cemented negative lens having a biconcave lens and a positive meniscus lens. It consists of The two lens groups of the fourth lens group G4 are configured with their concave surfaces facing each other.

ここで、第４レンズ群Ｇ４の第３レンズ群Ｇ３側に最も近い凸面形状のレンズ面は、非球面で構成されている。   Here, the convex lens surface closest to the third lens group G3 side of the fourth lens group G4 is an aspherical surface.

実施例１３のズーム対物レンズは、視野数２２、２０倍から８０倍まで変倍し、開口数が０．４から０．７７である。開口絞りＳは、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間にあり、第１レンズ群Ｇ１の後側焦点位置近傍に配置され、変倍と共に所定の開口数になるように、絞り径が変化する機構を備えている。各倍率での収差図を図２９（ａ）、（ｂ）、（ｃ）に示す。   The zoom objective lens according to the thirteenth embodiment has a field of view of 22, a variable magnification from 20 times to 80 times, and a numerical aperture of 0.4 to 0.77. The aperture stop S is located between the first lens group G1 and the second lens group G2, is disposed in the vicinity of the rear focal position of the first lens group G1, and has a diaphragm diameter so as to have a predetermined numerical aperture together with zooming. It has a mechanism that changes. Aberration diagrams at each magnification are shown in FIGS. 29 (a), (b), and (c).

実施例１３では、第１レンズ群Ｇ１中に非球面を２面、第４レンズ群Ｇ４中に非球面を１面設けることで、高開口数化と高倍率化と、全長がコンパクトでありながら射出瞳の変動を５ｍｍ以内に抑えることを実現している。   In Example 13, two aspheric surfaces are provided in the first lens group G1, and one aspheric surface is provided in the fourth lens group G4, so that the numerical aperture and magnification can be increased and the overall length is compact. The variation of the exit pupil is suppressed to within 5 mm.

図１４に実施例１４の構成を示す。本実施例のズーム対物レンズは、物体側から順に、正のパワーを持つ第１レンズ群Ｇ１、負のパワーを持つ第２レンズ群Ｇ２、正のパワーを持つ第３レンズ群Ｇ３、負のパワーを持つ第４レンズ群Ｇ４で構成されている。そして、低倍側から高倍側へ変倍する際に、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間隔が大きくなり、第２レンズ群Ｇ２と第３レンズ群Ｇ３の間隔が小さくなり、第３レンズ群Ｇ３と第４レンズ群Ｇ４の間隔が一旦大きくなり再度小さくなるように、第２レンズ群Ｇ２と第３レンズ群Ｇ３と第４レンズ群Ｇ４が光軸上を移動する。   FIG. 14 shows the configuration of the fourteenth embodiment. The zoom objective lens according to this embodiment includes, in order from the object side, a first lens group G1 having a positive power, a second lens group G2 having a negative power, a third lens group G3 having a positive power, and a negative power. And a fourth lens group G4. When zooming from the low magnification side to the high magnification side, the distance between the first lens group G1 and the second lens group G2 increases, the distance between the second lens group G2 and the third lens group G3 decreases, The second lens group G2, the third lens group G3, and the fourth lens group G4 move on the optical axis so that the distance between the third lens group G3 and the fourth lens group G4 increases once and then decreases again.

第１レンズ群Ｇ１の構成は、物体側に凹面を向け、物体側から両凹レンズと両凸レンズの接合負メニスカスレンズ、物体側に緩い凹面を向けた正メニスカスレンズ、両凸レンズと負メニスカスレンズと正メニスカスレンズからなる接合正レンズ、物体側に凹面を向けた正メニスカスレンズ、物体側に凸面を向けた負メニスカスレンズと両凸レンズの接合正レンズで構成される。   The configuration of the first lens group G1 is a positive meniscus lens with a concave surface facing the object side, a cemented negative meniscus lens with a biconcave lens and a biconvex lens from the object side, a positive meniscus lens with a gentle concave surface facing the object side, a biconvex lens and a negative meniscus lens, and a positive It is composed of a cemented positive lens composed of a meniscus lens, a positive meniscus lens having a concave surface facing the object side, a negative meniscus lens having a convex surface facing the object side, and a biconvex lens.

ここで、物体側から４つめのレンズ群である正メニスカスレンズの第２レンズ群Ｇ２側のレンズ面は、非球面で構成されている。   Here, the lens surface on the second lens group G2 side of the positive meniscus lens which is the fourth lens group from the object side is formed of an aspherical surface.

第２レンズ群Ｇ２は、第１レンズ群Ｇ１側に凹面を向けた正メニスカスレンズと両凹レンズの接合負レンズ、両凹レンズと両凸レンズの接合負メニスカスレンズで構成され、互いに凹面を向けた構成である。   The second lens group G2 includes a positive meniscus lens having a concave surface facing the first lens group G1 and a cemented negative lens of a biconcave lens, a cemented negative meniscus lens of a biconcave lens and a biconvex lens, and has a configuration in which the concave surfaces are directed to each other. is there.

第３レンズ群Ｇ３は、物体側に緩い凸面を持つ負メニスカスレンズと両凸レンズの接合正レンズ、両凸レンズで構成されている。   The third lens group G3 includes a negative meniscus lens having a gentle convex surface on the object side, a cemented positive lens made up of a biconvex lens, and a biconvex lens.

第４レンズ群Ｇ４は、第３レンズ群Ｇ３側に凸面を向けた正メニスカスレンズと像側に凹面を向けた負メニスカスレンズのパワーの緩い接合正メニスカスレンズ、両凹レンズと正メニスカスレンズの接合負レンズで構成されている。   The fourth lens group G4 includes a positive meniscus lens having a convex surface facing the third lens group G3 and a negative meniscus lens having a concave surface facing the image side. It consists of a lens.

この実施例は、実施例１１と同様に、開口絞りＳは、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間にあり、第１レンズ群Ｇ１の後側焦点位置近傍に配置され、変倍と共に所定の開口数になるように、絞り径が変化する機構を備えている。   In this example, similarly to Example 11, the aperture stop S is located between the first lens group G1 and the second lens group G2, and is disposed in the vicinity of the rear focal position of the first lens group G1. In addition, a mechanism for changing the aperture diameter so as to have a predetermined numerical aperture is provided.

実施例１４のズーム対物レンズは、視野数２２、１０倍から５０倍まで変倍し、開口数が０．２５から０．７である。各倍率での収差図を図３０（ａ）、（ｂ）、（ｃ）に示す。   The zoom objective lens according to the fourteenth example has a field of view of 22 and a variable magnification from 10 to 50 times, and a numerical aperture of 0.25 to 0.7. Aberration diagrams at each magnification are shown in FIGS. 30 (a), 30 (b), and 30 (c).

実施例１４では、第１レンズ群Ｇ１内の非球面により、高開口数化と高い収差性能を実現し、しかも、射出瞳位置の変動が１０ｍｍ以内とズーム低倍から高倍の範囲で略一定の値に構成されている。   In Example 14, the aspherical surface in the first lens group G1 realizes a high numerical aperture and high aberration performance, and the variation of the exit pupil position is within 10 mm, which is substantially constant in the zoom low to high magnification range. Configured to value.

図１５に実施例１５の構成を示す。本実施例のズーム対物レンズは、物体側から順に、正のパワーを持つ第１レンズ群Ｇ１、負のパワーを持つ第２レンズ群Ｇ２、正のパワーを持つ第３レンズ群Ｇ３、負のパワーを持つ第４レンズ群Ｇ４で構成されている。そして、低倍側から高倍側へ変倍する際に、第１レンズ群Ｇ１と第２レンズ群Ｇ２の間隔が大きくなり、第２レンズ群Ｇ２と第３レンズ群Ｇ３の間隔が小さくなり、第３レンズ群Ｇ３と第４レンズ群Ｇ４の間隔が一旦大きくなり再度小さくなるように、第２レンズ群Ｇ２と第３レンズ群Ｇ３と第４レンズ群Ｇ４が光軸上を移動する。   FIG. 15 shows the configuration of the fifteenth embodiment. The zoom objective lens according to this embodiment includes, in order from the object side, a first lens group G1 having a positive power, a second lens group G2 having a negative power, a third lens group G3 having a positive power, and a negative power. And a fourth lens group G4. When zooming from the low magnification side to the high magnification side, the distance between the first lens group G1 and the second lens group G2 increases, the distance between the second lens group G2 and the third lens group G3 decreases, The second lens group G2, the third lens group G3, and the fourth lens group G4 move on the optical axis so that the distance between the third lens group G3 and the fourth lens group G4 increases once and then decreases again.

第１レンズ群Ｇ１の構成は、物体側に凹面を向け、物体側から両凹レンズと両凸レンズの接合負メニスカスレンズ、物体側に凹面を向けた正メニスカスレンズ、両凸レンズと両凹レンズと両凸レンズからなる接合正レンズ、物体側に非球面を持つ両凸レンズ、両凹レンズと両凸レンズの接合正メニスカスレンズで構成されている。   The first lens group G1 is composed of a negative negative meniscus lens having a concave surface facing the object side, a biconcave lens and a biconvex lens from the object side, a positive meniscus lens having a concave surface facing the object side, a biconvex lens, a biconcave lens, and a biconvex lens. A cemented positive lens, a biconvex lens having an aspheric surface on the object side, and a cemented positive meniscus lens composed of a biconcave lens and a biconvex lens.

第２レンズ群Ｇ２は、物体側に凹面を向けた負メニスカスレンズと両凹レンズの接合負レンズ、両凹レンズと両凸レンズの接合負メニスカスレンズで構成され、互いに凹面を向けた構成となっている。   The second lens group G2 includes a negative meniscus lens having a concave surface facing the object side and a cemented negative lens of a biconcave lens, and a cemented negative meniscus lens of a biconcave lens and a biconvex lens, and has a configuration in which the concave surfaces are directed to each other.

第３レンズ群Ｇ３は、両凹レンズと両凸レンズの接合正メニスカスレンズ、両凸レンズで構成されている。   The third lens group G3 includes a cemented positive meniscus lens composed of a biconcave lens and a biconvex lens, and a biconvex lens.

第４レンズ群Ｇ４は、物体側に凸面を向けた正メニスカスレンズと物体側に凸面を向けた負メニスカスレンズの接合正メニスカスレンズ、両凹レンズと正メニスカスレンズの接合負レンズで構成されている。第４レンズ群Ｇ４の２つのレンズ群は、互いに凹面を向けた構成となっている。   The fourth lens group G4 includes a cemented positive meniscus lens having a positive meniscus lens having a convex surface directed toward the object side, a negative meniscus lens having a convex surface directed toward the object side, and a cemented negative lens having a biconcave lens and a positive meniscus lens. The two lens groups of the fourth lens group G4 are configured with their concave surfaces facing each other.

第１レンズ群Ｇ１の物体側に配置された接合負メニスカスレンズは、実施例９と同様に、ペッツバール和を抑えている。３枚で構成された接合正レンズについても、その接合正レンズの接合面の負屈折力により光線高を上げているので、ペッツバール和を抑え、コマ収差や軸上色収差補正にも効果的である。高倍側の軸上マージナル光線が高い部分に非球面を配置することで、高倍側の球面収差を効果的に補正することが可能となる。   The cemented negative meniscus lens disposed on the object side of the first lens group G1 suppresses the Petzval sum as in the ninth embodiment. Even in the case of a cemented positive lens composed of three lenses, the height of the light beam is raised by the negative refractive power of the cemented surface of the cemented positive lens, so that Petzval sum is suppressed and it is effective for correcting coma aberration and axial chromatic aberration. . By arranging an aspherical surface in a portion where the axial marginal ray on the high magnification side is high, spherical aberration on the high magnification side can be effectively corrected.

実施例１５のズーム対物レンズは、視野数２２、１０倍から４０倍まで変倍し、開口数が０．２５から０．８である。開口絞りＳは、第１レンズ群Ｇ１の後側焦点位置近傍に配置され、低倍側では第２レンズ群Ｇ２が第１レンズ群Ｇ１の後側焦点位置よりも物体側に移動する。このとき、低倍側の射出瞳位置を潜らせることなく高倍側の射出瞳位置に近づける作用をする。また、開口絞りＳは所定の開口数になるように、絞り径が変化する機構を備える。各倍率での収差図を図３１（ａ）、（ｂ）、（ｃ）に示す。   The zoom objective lens according to the fifteenth embodiment has a field of view of 22, a magnification of 10 to 40 times, and a numerical aperture of 0.25 to 0.8. The aperture stop S is disposed in the vicinity of the rear focal position of the first lens group G1, and the second lens group G2 moves closer to the object side than the rear focal position of the first lens group G1 on the low magnification side. At this time, the exit pupil position on the low magnification side is brought close to the exit pupil position on the high magnification side without being hidden. The aperture stop S is provided with a mechanism for changing the aperture diameter so as to have a predetermined numerical aperture. Aberration diagrams at each magnification are shown in FIGS. 31 (a), (b), and (c).

この実施例１５では、第１レンズ群Ｇ１中の両凸レンズの物体側に非球面を１つ配置することで、開口数が０．８で４倍の変倍比を備えながら、全長をコンパクトに構成し、４つのレンズ群の構成により射出瞳の変動を５ｍｍ以内に抑えることを実現している。   In Example 15, by arranging one aspherical surface on the object side of the biconvex lens in the first lens group G1, the numerical aperture is 0.8 and the zoom ratio is four times, while the total length is compact. And the variation of the exit pupil is suppressed to within 5 mm by the configuration of the four lens groups.

以下に、上記各実施例の顕微鏡ズーム対物レンズとそれらにおいて共通に用いられている結像レンズのレンズデータを示す。記号は、上記の外、Ｍは倍率、φは開口絞り径、ＮＡは開口数、ＩＨは像高、ｒ1 、ｒ2 …は物体側から順に示した各レンズ面の曲率半径、ｄ1 、ｄ2 …は物体側から順に示した各レンズ面間の間隔、ｎd1、ｎd2…は物体側から順に示した各レンズのｄ線の屈折率、νd1、νd2…は物体側から順に示した各レンズのアッべ数である。非球面形状は、ｘを光の進行方向を正とした光軸とし、ｙを光軸と直交する方向にとると、下記の式にて表される。 The lens data of the microscope zoom objective lens of each of the above embodiments and the imaging lens commonly used in them are shown below. Symbols are the above, M is the magnification, φ is the aperture stop diameter, NA is the numerical aperture, IH is the image height, r 1 , r 2 ... Are the curvature radii of the lens surfaces in order from the object side, d 1 , d 2 ... is the distance between the lens surfaces shown in order from the object side, n d1 , n d2 ... is the refractive index of the d-line of each lens shown in order from the object side, and ν d1 , ν d2 . The Abbe number of each lens shown. The aspherical shape is expressed by the following equation, where x is an optical axis with the traveling direction of light as positive and y is in a direction orthogonal to the optical axis.

ｘ＝（ｙ2 ／ｒ）／［１＋｛１−（Ｋ＋１）（ｙ／ｒ）2 ｝1/2 ］
＋A4ｙ4 ＋A6ｙ6 ＋A8ｙ8 ＋ A10ｙ10
ただし、ｒは近軸曲率半径、Ｋは円錐係数、A4、A6、A8、A10 はそれぞれ４次、６次、８次、１０次の非球面係数である。 x = (y 2 / r) / [1+ {1- (K + 1) (y / r) 2 } 1/2 ]
+ A 4 y 4 + A 6 y 6 + A 8 y 8 + A 10 y 10
Here, r is a paraxial radius of curvature, K is a conical coefficient, and A 4 , A 6 , A 8 , and A 10 are fourth-order, sixth-order, eighth-order, and tenth-order aspherical coefficients, respectively.

ただし、上記実施例１〜１０の顕微鏡ズーム対物レンズにおいて、ｒ1 、ｒ2 は物体面とその上に配置されるカバーグラスの面の曲率半径であり、ｒ3 以下が各レンズ面の曲率半径を示し、ｄ1 はカバーグラスの厚さであり、ｄ2 はカバーグラスと顕微鏡ズーム対物レンズの第１面の間の距離である。また、上記実施例１１〜１５の顕微鏡ズーム対物レンズにおいては、ｒ0 は物体面の曲率半径、ｒ0 、ｒ1 はカバーガラスの両面の曲率半径、ｄ0 はカバーガラスの両面間の間隔、ｄ1 は作動距離、ｎd0はカバーガラスのｄ線の屈折率、νd0はカバーガラスのアッベ数である。

（実施例１）
ｒ1 = ∞（物体面） ｄ1 = 0.17 ｎd1 =1.521 νd1 =56.02
ｒ2 = ∞ ｄ2 = 1.2514
ｒ3 = -6.7337 ｄ3 = 1.2783 ｎd2 =1.834 νd2 =37.16
ｒ4 = 5.9444 ｄ4 = 4.789 ｎd3 =1.651 νd3 =56.16
ｒ5 = -8.7211 ｄ5 = 0.1
ｒ6 = 42.787 ｄ6 = 2.9416 ｎd4 =1.56907 νd4 =71.3
ｒ7 = -12.5242 ｄ7 = 0.1
ｒ8 = 46.2811 ｄ8 = 2.2857 ｎd5 =1.788 νd5 =47.37
ｒ9 = 13.3863 ｄ9 = 5.7435 ｎd6 =1.497 νd6 =81.54
ｒ10= -14.6612 ｄ10= 0.15
ｒ11= 101.2916 ｄ11= 2.5665 ｎd7 =1.497 νd7 =81.54
ｒ12= -21.4783 ｄ12= 0.1
ｒ13= 51.9492 ｄ13= 3.3424 ｎd8 =1.804 νd8 =46.57
ｒ14= 9.1121 ｄ14= 3.9815 ｎd9 =1.43875 νd9 =94.99
ｒ15= -37.5765 ｄ15= 0.1
ｒ16= 50.6501 ｄ16= 2.0367 ｎd10=1.51823 νd10=58.9
ｒ17= -136.7298 ｄ17= 3.3779
ｒ18= ∞（絞り） ｄ18= d1(可変)
ｒ19= -32.4034 ｄ19= 2.2472 ｎd11=1.741 νd11=52.64
ｒ20= 24.5965 ｄ20= 1.5 ｎd12=1.7552 νd12=27.51
ｒ21= 13.0278 ｄ21= 1.4452
ｒ22= -16.7672 ｄ22= 1.0203 ｎd13=1.51823 νd13=58.9
ｒ23= 14.2484 ｄ23= 2.1115 ｎd14=1.80518 νd14=25.42
ｒ24= -84.0355 ｄ24= d2(可変)
ｒ25= 90.7258 ｄ25= 2.4841 ｎd15=1.48749 νd15=70.23
ｒ26= -44.9254 ｄ26= 0.1
ｒ27= 200.2317 ｄ27= 2.5 ｎd16=1.7185 νd16=33.52
ｒ28= 27.3412 ｄ28= 3.7906 ｎd17=1.48749 νd17=70.23
ｒ29= -29.2453 ｄ29= d3(可変)
ｒ30= 68.7541 ｄ30= 7.7321 ｎd18=1.48749 νd18=70.21
ｒ31= -37.5679 ｄ31= 3.4742 ｎd19=1.8061 νd19=40.95
ｒ32= -102.8477 ｄ32= 0.6973
ｒ33= 84.3099 ｄ33= 6.0238 ｎd20=1.834 νd20=37.17
ｒ34= -50.71 ｄ34= 3.0298 ｎd21=1.6445 νd21=40.82
ｒ35= 40.6619 ｄ35=157.0375
ｒ36= ∞（像面）
ズームデータ
Ｍ １０Ｘ ２０Ｘ ４０Ｘ
d1 1.50356 20.3202 29.72845
d2 12.6587 8.6095 0.5111
d3 84.32435 69.55691 68.24706
φ 4.2088 6.7442 10.1344
ＮＡ 0.25 0.4 0.6
ＩＨ 11 11 11 。 However, in the microscope zoom objective lenses of Examples 1 to 10, r 1 and r 2 are the curvature radii of the object surface and the surface of the cover glass disposed thereon, and r 3 or less is the curvature radius of each lens surface. D 1 is the thickness of the cover glass, and d 2 is the distance between the cover glass and the first surface of the microscope zoom objective lens. In the microscope zoom objectives of Examples 11 to 15, r 0 is the radius of curvature of the object plane, r 0 and r 1 are the radius of curvature of both sides of the cover glass, d 0 is the distance between both sides of the cover glass, d 1 is the working distance, n d0 is the refractive index of the d-line of the cover glass, and ν d0 is the Abbe number of the cover glass.

Example 1
r 1 = ∞ (object surface) d 1 = 0.17 n d1 = 1.521 ν d1 = 56.02
r 2 = ∞ d 2 = 1.2514
r 3 = -6.7337 d 3 = 1.2783 n d2 = 1.834 ν d2 = 37.16
r 4 = 5.9444 d 4 = 4.789 n d3 = 1.651 ν d3 = 56.16
r 5 = -8.7211 d 5 = 0.1
r 6 = 42.787 d 6 = 2.9416 n d4 = 1.56907 ν d4 = 71.3
r 7 = -12.5242 d 7 = 0.1
r 8 = 46.2811 d 8 = 2.2857 n d5 = 1.788 ν d5 = 47.37
r 9 = 13.3863 d 9 = 5.7435 n d6 = 1.497 ν d6 = 81.54
r 10 = -14.6612 d 10 = 0.15
r 11 = 101.2916 d 11 = 2.5665 n d7 = 1.497 ν d7 = 81.54
r 12 = -21.4783 d 12 = 0.1
r 13 = 51.9492 d 13 = 3.3424 n d8 = 1.804 ν d8 = 46.57
r 14 = 9.1121 d 14 = 3.9815 n d9 = 1.43875 ν d9 = 94.99
r 15 = -37.5765 d 15 = 0.1
r 16 = 50.6501 d 16 = 2.0367 n d10 = 1.51823 ν d10 = 58.9
r 17 = -136.7298 d 17 = 3.3779
r 18 = ∞ (aperture) d 18 = d1 (variable)
r 19 = -32.4034 d 19 = 2.2472 n d11 = 1.741 ν d11 = 52.64
r 20 = 24.5965 d 20 = 1.5 n d12 = 1.7552 ν d12 = 27.51
r 21 = 13.0278 d 21 = 1.4452
r 22 = -16.7672 d 22 = 1.0203 n d13 = 1.51823 ν d13 = 58.9
r 23 = 14.2484 d 23 = 2.1115 n d14 = 1.80518 ν d14 = 25.42
r 24 = -84.0355 d 24 = d2 (variable)
r 25 = 90.7258 d 25 = 2.4841 n d15 = 1.48749 ν d15 = 70.23
r 26 = -44.9254 d 26 = 0.1
r 27 = 200.2317 d 27 = 2.5 n d16 = 1.7185 ν d16 = 33.52
r 28 = 27.3412 d 28 = 3.7906 n d17 = 1.48749 ν d17 = 70.23
r 29 = -29.2453 d 29 = d3 (variable)
r 30 = 68.7541 d 30 = 7.7321 n d18 = 1.48749 ν d18 = 70.21
r 31 = -37.5679 d 31 = 3.4742 n d19 = 1.8061 ν d19 = 40.95
r 32 = -102.8477 d 32 = 0.6973
r 33 = 84.3099 d 33 = 6.0238 n d20 = 1.834 ν d20 = 37.17
r 34 = -50.71 d 34 = 3.0298 n d21 = 1.6445 ν d21 = 40.82
r 35 = 40.6619 d 35 = 157.0375
r 36 = ∞ (image plane)
Zoom data M 10X 20X 40X
d1 1.50356 20.3202 29.72845
d2 12.6587 8.6095 0.5111
d3 84.32435 69.55691 68.24706
φ 4.2088 6.7442 10.1344
NA 0.25 0.4 0.6
IH 11 11 11.


（実施例２）
ｒ1 = ∞（物体面） ｄ1 = 0.1700 ｎd1 =1.521 νd1 =56.02
ｒ2 = ∞ ｄ2 = 1.2558
ｒ3 = -29.0283 ｄ3 = 2.7211 ｎd2 =1.834 νd2 =37.16
ｒ4 = 8.8314 ｄ4 = 4.1924 ｎd3 =1.48749 νd3 =70.23
ｒ5 = -10.6379 ｄ5 = 0.1438
ｒ6 = 40.7184 ｄ6 = 2.9333 ｎd4 =1.497 νd4 =81.54
ｒ7 = -11.9302 ｄ7 = 0.3039
ｒ8 = -117.4806 ｄ8 = 1.5119 ｎd5 =1.755 νd5 =52.32
ｒ9 = 15.1444 ｄ9 = 5.6036 ｎd6 =1.43875 νd6 =94.99
ｒ10= -17.3463 ｄ10= 0.2288
ｒ11= 37.5871 ｄ11= 2.6003 ｎd7 =1.497 νd7 =81.54
ｒ12= -45.9781 ｄ12= 0.1886
ｒ13= 403.3639 ｄ13= 2.6142 ｎd8 =1.755 νd8 =52.32
ｒ14= -22.6293 ｄ14= 0.1
ｒ15= 78.429 ｄ15= 1.5 ｎd9 =1.834 νd9 =37.16
ｒ16= 10.6152 ｄ16= 4.4291 ｎd10=1.43875 νd10=94.99
ｒ17= -39.0207 ｄ17= 3.1111
ｒ18= 21.9 ｄ18= 2.4089 ｎd11=1.755 νd11=52.32
ｒ19= 156.282 ｄ19= 0.7027
ｒ20= ∞（絞り） ｄ20= d1(可変)
ｒ21= -174.9921 ｄ21= 2.4556 ｎd12=1.76182 νd12=26.52
ｒ22= -17.643 ｄ22= 1.3688 ｎd13=1.741 νd13=52.64
ｒ23= 8.7892 ｄ23= 3.6611 ｎd14=1.78472 νd14=25.68
ｒ24= 7.4509 ｄ24= 1.5433
ｒ25= -7.5666 ｄ25= 1 ｎd15=1.51823 νd15=58.9
ｒ26= 9.9751 ｄ26= 2 ｎd16=1.80518 νd16=25.42
ｒ27= 41.1135 ｄ27= d2(可変)
ｒ28= 109.4189 ｄ28= 2 ｎd17=1.762 νd17=40.1
ｒ29= 41.8065 ｄ29= 4.1948 ｎd18=1.497 νd18=81.54
ｒ30= -21.6991 ｄ30= 0.1
ｒ31= 93.0066 ｄ31= 2.4973 ｎd19=1.7185 νd19=33.52
ｒ32= 31.9759 ｄ32= 4.63 ｎd20=1.497 νd20=81.54
ｒ33= -30.4422 ｄ33= d3(可変)
ｒ34= 68.7541 ｄ34= 7.7321 ｎd21=1.48749 νd21=70.21
ｒ35= -37.5679 ｄ35= 3.4742 ｎd22=1.8061 νd22=40.95
ｒ36= -102.8477 ｄ36= 0.6973
ｒ37= 84.3099 ｄ37= 6.0238 ｎd23=1.834 νd23=37.17
ｒ38= -50.71 ｄ38= 3.0298 ｎd24=1.6445 νd24=40.82
ｒ39= 40.6619 ｄ39=157.0375
ｒ40= ∞（像面）
ズームデータ
Ｍ １０Ｘ ２０Ｘ ３０Ｘ
d1 3.69938 8.15942 9.64603
d2 8.4951 4.8404 1.1858
d3 75.63512 74.82978 76.99777
φ 5.1554 8.2924 11.48
ＮＡ 0.25 0.4 0.55
ＩＨ 11 11 11 。
(Example 2)
r 1 = ∞ (object surface) d 1 = 0.1700 n d1 = 1.521 ν d1 = 56.02
r 2 = ∞ d 2 = 1.2558
r 3 = -29.0283 d 3 = 2.7211 n d2 = 1.834 ν d2 = 37.16
r 4 = 8.8314 d 4 = 4.1924 n d3 = 1.48749 ν d3 = 70.23
r 5 = -10.6379 d 5 = 0.1438
r 6 = 40.7184 d 6 = 2.9333 n d4 = 1.497 ν d4 = 81.54
r 7 = -11.9302 d 7 = 0.3039
r 8 = -117.4806 d 8 = 1.5119 n d5 = 1.755 ν d5 = 52.32
r 9 = 15.1444 d 9 = 5.6036 n d6 = 1.43875 ν d6 = 94.99
r 10 = -17.3463 d 10 = 0.2288
r 11 = 37.5871 d 11 = 2.6003 n d7 = 1.497 ν d7 = 81.54
r 12 = -45.9781 d 12 = 0.1886
r 13 = 403.3639 d 13 = 2.6142 n d8 = 1.755 ν d8 = 52.32
r 14 = -22.6293 d 14 = 0.1
r 15 = 78.429 d 15 = 1.5 n d9 = 1.834 ν d9 = 37.16
r 16 = 10.6152 d 16 = 4.4291 n d10 = 1.43875 ν d10 = 94.99
r 17 = -39.0207 d 17 = 3.1111
r 18 = 21.9 d 18 = 2.4089 n d11 = 1.755 ν d11 = 52.32
r 19 = 156.282 d 19 = 0.7027
r 20 = ∞ (aperture) d 20 = d1 (variable)
r 21 = -174.9921 d 21 = 2.4556 n d12 = 1.76182 ν d12 = 26.52
r 22 = -17.643 d 22 = 1.3688 n d13 = 1.741 ν d13 = 52.64
r 23 = 8.7892 d 23 = 3.6611 n d14 = 1.78472 ν d14 = 25.68
r 24 = 7.4509 d 24 = 1.5433
r 25 = -7.5666 d 25 = 1 n d15 = 1.51823 ν d15 = 58.9
r 26 = 9.9751 d 26 = 2 n d16 = 1.80518 ν d16 = 25.42
r 27 = 41.1135 d 27 = d2 (variable)
r 28 = 109.4189 d 28 = 2 n d17 = 1.762 ν d17 = 40.1
r 29 = 41.8065 d 29 = 4.1948 n d18 = 1.497 ν d18 = 81.54
r 30 = -21.6991 d 30 = 0.1
r 31 = 93.0066 d 31 = 2.4973 n d19 = 1.7185 ν d19 = 33.52
r 32 = 31.9759 d 32 = 4.63 n d20 = 1.497 ν d20 = 81.54
r 33 = -30.4422 d 33 = d3 (variable)
r 34 = 68.7541 d 34 = 7.7321 n d21 = 1.48749 ν d21 = 70.21
r 35 = -37.5679 d 35 = 3.4742 n d22 = 1.8061 ν d22 = 40.95
r 36 = -102.8477 d 36 = 0.6973
r 37 = 84.3099 d 37 = 6.0238 n d23 = 1.834 ν d23 = 37.17
r 38 = -50.71 d 38 = 3.0298 n d24 = 1.6445 ν d24 = 40.82
r 39 = 40.6619 d 39 = 157.0375
r 40 = ∞ (image plane)
Zoom data M 10X 20X 30X
d1 3.69938 8.15942 9.64603
d2 8.4951 4.8404 1.1858
d3 75.63512 74.82978 76.99777
φ 5.1554 8.2924 11.48
NA 0.25 0.4 0.55
IH 11 11 11.


（実施例３）
ｒ1 = ∞（物体面） ｄ1 = 0.17 ｎd1 =1.521 νd1 =56.02
ｒ2 = ∞ ｄ2 = 1.2122
ｒ3 = -9.0363 ｄ3 = 1.0066 ｎd2 =1.8061 νd2 =40.92
ｒ4 = 7.9051 ｄ4 = 2.6665 ｎd3 =1.48749 νd3 =70.23
ｒ5 = -15.8132 ｄ5 = 0.1
ｒ6 = -35.8191 ｄ6 = 2.7258 ｎd4 =1.755 νd4 =52.32
ｒ7 = -7.6127 ｄ7 = 0.1
ｒ8 = 19.8866 ｄ8 = 3.9235 ｎd5 =1.8061 νd5 =40.92
ｒ9 = 12.361 ｄ9 = 4.5515 ｎd6 =1.497 νd6 =81.54
ｒ10= -12.6055 ｄ10= 0.191
ｒ11= 77.8705 ｄ11= 1.5 ｎd7 =1.6445 νd7 =40.82
ｒ12= 16.3541 ｄ12= 3.4674 ｎd8 =1.497 νd8 =81.54
ｒ13= -17.8218 ｄ13= 0.1
ｒ14= 36.3563 ｄ14= 1.499 ｎd9 =1.755 νd9 =52.32
ｒ15= 8.1097 ｄ15= 3.9374 ｎd10=1.497 νd10=81.54
ｒ16= -34.0757 ｄ16= 0.1
ｒ17= 38.4458 ｄ17= 1.6471 ｎd11=1.48749 νd11=70.23
ｒ18= 49.5166 ｄ18= 1.5
ｒ19= ∞（絞り） ｄ19= d1(可変)
ｒ20= -40.313 ｄ20= 1.5 ｎd12=1.68893 νd12=31.07
ｒ21= 5.5556 ｄ21= 2.3961 ｎd13=1.741 νd13=52.64
ｒ22= 9.6596 ｄ22= 2.1489
ｒ23= -8.8235 ｄ23= 1.4 ｎd14=1.51633 νd14=64.14
ｒ24= 18.9069 ｄ24= 3.0602 ｎd15=1.80518 νd15=25.42
ｒ25= -18.4418 ｄ25= d2(可変)
ｒ26= -190.2618 ｄ26= 3.121 ｎd16=1.6516 νd16=58.55
ｒ27= -24.309 ｄ27= 0.1
ｒ28= 53.8545 ｄ28= 4.253 ｎd17=1.48749 νd17=70.23
ｒ29= -24.4619 ｄ29= 2 ｎd18=1.7185 νd18=33.52
ｒ30= 351.2811 ｄ30= d3(可変)
ｒ31= 68.7541 ｄ31= 7.7321 ｎd19=1.48749 νd19=70.21
ｒ32= -37.5679 ｄ32= 3.4742 ｎd20=1.8061 νd20=40.95
ｒ33= -102.8477 ｄ33= 0.6973
ｒ34= 84.3099 ｄ34= 6.0238 ｎd21=1.834 νd21=37.17
ｒ35= -50.71 ｄ35= 3.0298 ｎd22=1.6445 νd22=40.82
ｒ36= 40.6619 ｄ36=157.0375
ｒ37= ∞（像面）
ズームデータ
Ｍ １０Ｘ ２０Ｘ ４０Ｘ
d1 1.04004 22.99388 33.97095
d2 15.6774 10.6185 0.5006
d3 82.90536 66.01042 65.15125
φ 4.0526 6.4906 9.746
ＮＡ 0.25 0.4 0.6
ＩＨ 11 11 11 。
(Example 3)
r 1 = ∞ (object surface) d 1 = 0.17 n d1 = 1.521 ν d1 = 56.02
r 2 = ∞ d 2 = 1.2122
r 3 = -9.0363 d 3 = 1.0066 n d2 = 1.8061 ν d2 = 40.92
r 4 = 7.9051 d 4 = 2.6665 n d3 = 1.48749 ν d3 = 70.23
r 5 = -15.8132 d 5 = 0.1
r 6 = -35.8191 d 6 = 2.7258 n d4 = 1.755 ν d4 = 52.32
r 7 = -7.6127 d 7 = 0.1
r 8 = 19.8866 d 8 = 3.9235 n d5 = 1.8061 ν d5 = 40.92
r 9 = 12.361 d 9 = 4.5515 n d6 = 1.497 ν d6 = 81.54
r 10 = -12.6055 d 10 = 0.191
r 11 = 77.8705 d 11 = 1.5 n d7 = 1.6445 ν d7 = 40.82
r 12 = 16.3541 d 12 = 3.4674 n d8 = 1.497 ν d8 = 81.54
r 13 = -17.8218 d 13 = 0.1
r 14 = 36.3563 d 14 = 1.499 n d9 = 1.755 ν d9 = 52.32
r 15 = 8.1097 d 15 = 3.9374 n d10 = 1.497 ν d10 = 81.54
r 16 = -34.0757 d 16 = 0.1
r 17 = 38.4458 d 17 = 1.6471 n d11 = 1.48749 ν d11 = 70.23
r 18 = 49.5166 d 18 = 1.5
r 19 = ∞ (aperture) d 19 = d1 (variable)
r 20 = -40.313 d 20 = 1.5 n d12 = 1.68893 ν d12 = 31.07
r 21 = 5.5556 d 21 = 2.3961 n d13 = 1.741 ν d13 = 52.64
r 22 = 9.6596 d 22 = 2.1489
r 23 = -8.8235 d 23 = 1.4 n d14 = 1.51633 ν d14 = 64.14
r 24 = 18.9069 d 24 = 3.0602 n d15 = 1.80518 ν d15 = 25.42
r 25 = -18.4418 d 25 = d2 (variable)
r 26 = -190.2618 d 26 = 3.121 n d16 = 1.6516 ν d16 = 58.55
r 27 = -24.309 d 27 = 0.1
r 28 = 53.8545 d 28 = 4.253 n d17 = 1.48749 ν d17 = 70.23
r 29 = -24.4619 d 29 = 2 n d18 = 1.7185 ν d18 = 33.52
r 30 = 351.2811 d 30 = d3 (variable)
r 31 = 68.7541 d 31 = 7.7321 n d19 = 1.48749 ν d19 = 70.21
r 32 = -37.5679 d 32 = 3.4742 n d20 = 1.8061 ν d20 = 40.95
r 33 = -102.8477 d 33 = 0.6973
r 34 = 84.3099 d 34 = 6.0238 n d21 = 1.834 ν d21 = 37.17
r 35 = -50.71 d 35 = 3.0298 n d22 = 1.6445 ν d22 = 40.82
r 36 = 40.6619 d 36 = 157.0375
r 37 = ∞ (image plane)
Zoom data M 10X 20X 40X
d1 1.04004 22.99388 33.97095
d2 15.6774 10.6185 0.5006
d3 82.90536 66.01042 65.15125
φ 4.0526 6.4906 9.746
NA 0.25 0.4 0.6
IH 11 11 11.


（実施例４）
ｒ1 = ∞（物体面） ｄ1 = 0.1700 ｎd1 =1.521 νd1 =56.02
ｒ2 = ∞ ｄ2 = 0.9086
ｒ3 = -8.3465 ｄ3 = 3.0098 ｎd2 =1.7859 νd2 =44.2
ｒ4 = 35.9059 ｄ4 = 3.8833 ｎd3 =1.48749 νd3 =70.23
ｒ5 = -6.4314 ｄ5 = 0.1
ｒ6 = 31.3516 ｄ6 = 3.0596 ｎd4 =1.56907 νd4 =71.3
ｒ7 = -10.848 ｄ7 = 0.454
ｒ8 = -25.0084 ｄ8 = 1.5 ｎd5 =1.755 νd5 =52.32
ｒ9 = 13.8246 ｄ9 = 4.6417 ｎd6 =1.43875 νd6 =94.99
ｒ10= -13.1386 ｄ10= 0.1
ｒ11= -420.0332 ｄ11= 1.6676 ｎd7 =1.497 νd7 =81.54
ｒ12= -28.9782 ｄ12= 0.1
ｒ13= 66.4302 ｄ13= 1.6718 ｎd8 =1.497 νd8 =81.54
ｒ14= -58.2051 ｄ14= 0.1
ｒ15= 13.5075 ｄ15= 1.5 ｎd9 =1.8061 νd9 =40.92
ｒ16= 10.0499 ｄ16= 3.7492 ｎd10=1.43875 νd10=94.99
ｒ17= -34.9543 ｄ17= 0.1
ｒ18= 20.4652 ｄ18= 2.2473 ｎd11=1.51742 νd11=52.43
ｒ19= 8.0383 ｄ19= 1.6504
ｒ20= ∞（絞り） ｄ20= d1(可変)
ｒ21= -37.9426 ｄ21= 1 ｎd12=1.80518 νd12=25.42
ｒ22= 10.7939 ｄ22= 1.6234 ｎd13=1.755 νd13=52.32
ｒ23= 30.3865 ｄ23= 1.882
ｒ24= -7.1914 ｄ24= 1.3844 ｎd14=1.52249 νd14=59.84
ｒ25= -33.8899 ｄ25= 3.973 ｎd15=1.80518 νd15=25.42
ｒ26= -11.1597 ｄ26= d2(可変)
ｒ27= 74.2462 ｄ27= 2 ｎd16=1.48749 νd16=70.23
ｒ28= -2533.9503 ｄ28= 0.1
ｒ29= 306.9444 ｄ29= 2.6671 ｎd17=1.8061 νd17=40.92
ｒ30= 51.5972 ｄ30= 3.2803 ｎd18=1.497 νd18=81.54
ｒ31= -107.3929 ｄ31= d3(可変)
ｒ32= 68.7541 ｄ32= 7.7321 ｎd19=1.48749 νd19=70.23
ｒ33= -37.5679 ｄ33= 3.4742 ｎd20=1.8061 νd20=40.95
ｒ34= -102.8477 ｄ34= 0.6973
ｒ35= 84.3099 ｄ35= 6.0238 ｎd21=1.834 νd21=37.17
ｒ36= -50.71 ｄ36= 3.0298 ｎd22=1.6445 νd22=40.82
ｒ37= 40.6619 ｄ37=157.0375
ｒ38= ∞（像面）
ズームデータ
Ｍ １０Ｘ ２０Ｘ ３０Ｘ
d1 0.596 22.1568 29.3437
d2 48.8858 24.7095 0.5332
d3 51.9947 54.6102 71.5996
φ 3.7168 5.9484 8.179
ＮＡ 0.25 0.4 0.55
ＩＨ 11 11 11 。
Example 4
r 1 = ∞ (object surface) d 1 = 0.1700 n d1 = 1.521 ν d1 = 56.02
r 2 = ∞ d 2 = 0.9086
r 3 = -8.3465 d 3 = 3.0098 n d2 = 1.7859 ν d2 = 44.2
r 4 = 35.9059 d 4 = 3.8833 n d3 = 1.48749 ν d3 = 70.23
r 5 = -6.4314 d 5 = 0.1
r 6 = 31.3516 d 6 = 3.0596 n d4 = 1.56907 ν d4 = 71.3
r 7 = -10.848 d 7 = 0.454
r 8 = -25.0084 d 8 = 1.5 n d5 = 1.755 ν d5 = 52.32
r 9 = 13.8246 d 9 = 4.6417 n d6 = 1.43875 ν d6 = 94.99
r 10 = -13.1386 d 10 = 0.1
r 11 = -420.0332 d 11 = 1.6676 n d7 = 1.497 ν d7 = 81.54
r 12 = -28.9782 d 12 = 0.1
r 13 = 66.4302 d 13 = 1.6718 n d8 = 1.497 ν d8 = 81.54
r 14 = -58.2051 d 14 = 0.1
r 15 = 13.5075 d 15 = 1.5 n d9 = 1.8061 ν d9 = 40.92
r 16 = 10.0499 d 16 = 3.7492 n d10 = 1.43875 ν d10 = 94.99
r 17 = -34.9543 d 17 = 0.1
r 18 = 20.4652 d 18 = 2.2473 n d11 = 1.51742 ν d11 = 52.43
r 19 = 8.0383 d 19 = 1.6504
r 20 = ∞ (aperture) d 20 = d1 (variable)
r 21 = -37.9426 d 21 = 1 n d12 = 1.80518 ν d12 = 25.42
r 22 = 10.7939 d 22 = 1.6234 n d13 = 1.755 ν d13 = 52.32
r 23 = 30.3865 d 23 = 1.882
r 24 = -7.1914 d 24 = 1.3844 n d14 = 1.52249 ν d14 = 59.84
r 25 = -33.8899 d 25 = 3.973 n d15 = 1.80518 ν d15 = 25.42
r 26 = -11.1597 d 26 = d2 (variable)
r 27 = 74.2462 d 27 = 2 n d16 = 1.48749 ν d16 = 70.23
r 28 = -2533.9503 d 28 = 0.1
r 29 = 306.9444 d 29 = 2.6671 n d17 = 1.8061 ν d17 = 40.92
r 30 = 51.5972 d 30 = 3.2803 n d18 = 1.497 ν d18 = 81.54
r 31 = -107.3929 d 31 = d3 (variable)
r 32 = 68.7541 d 32 = 7.7321 n d19 = 1.48749 ν d19 = 70.23
r 33 = -37.5679 d 33 = 3.4742 n d20 = 1.8061 ν d20 = 40.95
r 34 = -102.8477 d 34 = 0.6973
r 35 = 84.3099 d 35 = 6.0238 n d21 = 1.834 ν d21 = 37.17
r 36 = -50.71 d 36 = 3.0298 n d22 = 1.6445 ν d22 = 40.82
r 37 = 40.6619 d 37 = 157.0375
r 38 = ∞ (image plane)
Zoom data M 10X 20X 30X
d1 0.596 22.1568 29.3437
d2 48.8858 24.7095 0.5332
d3 51.9947 54.6102 71.5996
φ 3.7168 5.9484 8.179
NA 0.25 0.4 0.55
IH 11 11 11.


（実施例５）
ｒ1 = ∞（物体面） ｄ1 = 0.17 ｎd1 =1.521 νd1 =56.02
ｒ2 = ∞ ｄ2 = 0.8945
ｒ3 = -9.5638 ｄ3 = 3.3657 ｎd2 =1.8061 νd2 =40.92
ｒ4 = 10.3506 ｄ4 = 4.2101 ｎd3 =1.48749 νd3 =70.23
ｒ5 = -9.6255 ｄ5 = 0.2273
ｒ6 = 75.6687 ｄ6 = 3.6239 ｎd4 =1.755 νd4 =52.32
ｒ7 = -13.6112 ｄ7 = 0.5615
ｒ8 = 150.294 ｄ8 = 1.5205 ｎd5 =1.8061 νd5 =40.92
ｒ9 = 16.2558 ｄ9 = 5.7034 ｎd6 =1.43875 νd6 =94.99
ｒ10= -15.8587 ｄ10= 0.2931
ｒ11= 492.756 ｄ11= 6.5164 ｎd7 =1.497 νd7 =81.54
ｒ12= -18.8068 ｄ12= 0.1
ｒ13= 29.8741 ｄ13= 1.5 ｎd8 =1.834 νd8 =37.16
ｒ14= 11.2851 ｄ14= 6.9642 ｎd9 =1.43875 νd9 =94.99
ｒ15= -48.793 ｄ15= 1.9346
ｒ16= 25.1987 ｄ16= 2.7489 ｎd10=1.56907 νd10=71.3
ｒ17= -331.8308 ｄ17= 0.7
ｒ18= ∞（絞り） ｄ18= d1(可変)
ｒ19= -50.6542 ｄ19= 6.3045 ｎd11=1.80518 νd11=25.42
ｒ20= -12.715 ｄ20= 1.4188 ｎd12=1.6968 νd12=55.53
ｒ21= 8.6825 ｄ21= 3.1734 ｎd13=1.80518 νd13=25.42
ｒ22= 10.4294 ｄ22= 1.2264
ｒ23= -13.2878 ｄ23= 1.7953 ｎd14=1.5725 νd14=57.74
ｒ24= 11.3351 ｄ24= 2.0037 ｎd15=1.834 νd15=37.16
ｒ25= 25.9848 ｄ25= d2(可変)
ｒ26= -73.3038 ｄ26= 2 ｎd16=1.59551 νd16=39.24
ｒ27= 55.8408 ｄ27= 6.968 ｎd17=1.51633 νd17=64.14
ｒ28= -35.8407 ｄ28= 0.96
ｒ29= 83.1011 ｄ29= 2.5213 ｎd18=1.7185 νd18=33.52
ｒ30= 43.1902 ｄ30= 5.9392 ｎd19=1.497 νd19=81.54
ｒ31= -35.3886 ｄ31= d3(可変)
ｒ32= 68.7541 ｄ32= 7.7321 ｎd20=1.48749 νd20=70.21
ｒ33= -37.5679 ｄ33= 3.4742 ｎd21=1.8061 νd21=40.95
ｒ34= -102.8477 ｄ34= 0.6973
ｒ35= 84.3099 ｄ35= 6.0238 ｎd22=1.834 νd22=37.17
ｒ36= -50.71 ｄ36= 3.0298 ｎd23=1.6445 νd23=40.82
ｒ37= 40.6619 ｄ37=157.0375
ｒ38= ∞（像面）
ズームデータ
Ｍ １０Ｘ ２０Ｘ ３０Ｘ
d1 3.0614 8.0932 6.83529
d2 14.7575 1.0034 7.8804
d3 56.8364 65.5587 59.93961
φ 4.7882 7.6802 10.596
ＮＡ 0.25 0.4 0.55
ＩＨ 11 11 11 。
(Example 5)
r 1 = ∞ (object surface) d 1 = 0.17 n d1 = 1.521 ν d1 = 56.02
r 2 = ∞ d 2 = 0.8945
r 3 = -9.5638 d 3 = 3.3657 n d2 = 1.8061 ν d2 = 40.92
r 4 = 10.3506 d 4 = 4.2101 n d3 = 1.48749 ν d3 = 70.23
r 5 = -9.6255 d 5 = 0.2273
r 6 = 75.6687 d 6 = 3.6239 n d4 = 1.755 ν d4 = 52.32
r 7 = -13.6112 d 7 = 0.5615
r 8 = 150.294 d 8 = 1.5205 n d5 = 1.8061 ν d5 = 40.92
r 9 = 16.2558 d 9 = 5.7034 n d6 = 1.43875 ν d6 = 94.99
r 10 = -15.8587 d 10 = 0.2931
r 11 = 492.756 d 11 = 6.5164 n d7 = 1.497 ν d7 = 81.54
r 12 = -18.8068 d 12 = 0.1
r 13 = 29.8741 d 13 = 1.5 n d8 = 1.834 ν d8 = 37.16
r 14 = 11.2851 d 14 = 6.9642 n d9 = 1.43875 ν d9 = 94.99
r 15 = -48.793 d 15 = 1.9346
r 16 = 25.1987 d 16 = 2.7489 n d10 = 1.56907 ν d10 = 71.3
r 17 = -331.8308 d 17 = 0.7
r 18 = ∞ (aperture) d 18 = d1 (variable)
r 19 = -50.6542 d 19 = 6.3045 n d11 = 1.80518 ν d11 = 25.42
r 20 = -12.715 d 20 = 1.4188 n d12 = 1.6968 ν d12 = 55.53
r 21 = 8.6825 d 21 = 3.1734 n d13 = 1.80518 ν d13 = 25.42
r 22 = 10.4294 d 22 = 1.2264
r 23 = -13.2878 d 23 = 1.7953 n d14 = 1.5725 ν d14 = 57.74
r 24 = 11.3351 d 24 = 2.0037 n d15 = 1.834 ν d15 = 37.16
r 25 = 25.9848 d 25 = d2 (variable)
r 26 = -73.3038 d 26 = 2 n d16 = 1.59551 ν d16 = 39.24
r 27 = 55.8408 d 27 = 6.968 n d17 = 1.51633 ν d17 = 64.14
r 28 = -35.8407 d 28 = 0.96
r 29 = 83.1011 d 29 = 2.5213 n d18 = 1.7185 ν d18 = 33.52
r 30 = 43.1902 d 30 = 5.9392 n d19 = 1.497 ν d19 = 81.54
r 31 = -35.3886 d 31 = d3 (variable)
r 32 = 68.7541 d 32 = 7.7321 n d20 = 1.48749 ν d20 = 70.21
r 33 = -37.5679 d 33 = 3.4742 n d21 = 1.8061 ν d21 = 40.95
r 34 = -102.8477 d 34 = 0.6973
r 35 = 84.3099 d 35 = 6.0238 n d22 = 1.834 ν d22 = 37.17
r 36 = -50.71 d 36 = 3.0298 n d23 = 1.6445 ν d23 = 40.82
r 37 = 40.6619 d 37 = 157.0375
r 38 = ∞ (image plane)
Zoom data M 10X 20X 30X
d1 3.0614 8.0932 6.83529
d2 14.7575 1.0034 7.8804
d3 56.8364 65.5587 59.93961
φ 4.7882 7.6802 10.596
NA 0.25 0.4 0.55
IH 11 11 11.


（実施例６）
ｒ1 = ∞（物体面） ｄ1 = 0.17 ｎd1 =1.521 νd1 =56.02
ｒ2 = ∞ ｄ2 = 1.2393
ｒ3 = -7.2882 ｄ3 = 1 ｎd2 =1.8061 νd2 =40.92
ｒ4 = 9.3364 ｄ4 = 2.8008 ｎd3 =1.48749 νd3 =70.23
ｒ5 = -9.2642 ｄ5 = 0.1
ｒ6 = -36.1528 ｄ6 = 2.3508 ｎd4 =1.755 νd4 =52.32
ｒ7 = -8.2813 ｄ7 = 0.1
ｒ8 = 19.1898 ｄ8 = 3.6946 ｎd5 =1.8061 νd5 =40.92
ｒ9 = 11.7194 ｄ9 = 4.6385 ｎd6 =1.497 νd6 =81.54
ｒ10= -12.4231 ｄ10= 0.4885
ｒ11= -148.9692 ｄ11= 1.5 ｎd7 =1.6445 νd7 =40.82
ｒ12= 26.49 ｄ12= 3.0422 ｎd8 =1.497 νd8 =81.54
ｒ13= -17.2294 ｄ13= 0.1914
ｒ14= 128.1662 ｄ14= 1.5 ｎd9 =1.755 νd9 =52.32
ｒ15= 9.2471 ｄ15= 3.9865 ｎd10=1.497 νd10=81.54
ｒ16= -27.9432 ｄ16= 0.5113
ｒ17= 50.4649 ｄ17= 2.0653 ｎd11=1.48749 νd11=70.23
ｒ18= -93.4836 ｄ18= 1.5
ｒ19= ∞（絞り） ｄ19= d1(可変)
ｒ20= -27.3478 ｄ20= 1 ｎd12=1.68893 νd12=31.07
ｒ21= 6.5094 ｄ21= 3.2235 ｎd13=1.741 νd13=52.64
ｒ22= 11.4964 ｄ22= 2.2337
ｒ23= -10.8896 ｄ23= 1.0014 ｎd14=1.51633 νd14=64.14
ｒ24= 18.5149 ｄ24= 3.3224 ｎd15=1.80518 νd15=25.42
ｒ25= -20.2064 ｄ25= d2(可変)
ｒ26= 1064.6111 ｄ26= 3.2007 ｎd16=1.755 νd16=52.32
ｒ27= -29.0219 ｄ27= 0.1
ｒ28= 33.9989 ｄ28= 4.7111 ｎd17=1.48749 νd17=70.23
ｒ29= -27.5562 ｄ29= 2 ｎd18=1.7185 νd18=33.52
ｒ30= 54.4101 ｄ30= d3(可変)
ｒ31= 68.7541 ｄ31= 7.7321 ｎd19=1.48749 νd19=70.21
ｒ32= -37.5679 ｄ32= 3.4742 ｎd20=1.8061 νd20=40.95
ｒ33= -102.8477 ｄ33= 0.6973
ｒ34= 84.3099 ｄ34= 6.0238 ｎd21=1.834 νd21=37.17
ｒ35= -50.71 ｄ35= 3.0298 ｎd22=1.6445 νd22=40.82
ｒ36= 40.6619 ｄ36=157.0375
ｒ37= ∞（像面）
ズームデータ
Ｍ １０Ｘ ２０Ｘ ４０Ｘ
d1 0.99814 42.9967 28.9972
d2 15.19042 0.5 10.29361
d3 82.13944 54.8313 59.03719
φ 4.429 7.0904 10.6488
ＮＡ 0.25 0.4 0.6
ＩＨ 11 11 11 。
(Example 6)
r 1 = ∞ (object surface) d 1 = 0.17 n d1 = 1.521 ν d1 = 56.02
r 2 = ∞ d 2 = 1.2393
r 3 = -7.2882 d 3 = 1 n d2 = 1.8061 ν d2 = 40.92
r 4 = 9.3364 d 4 = 2.8008 n d3 = 1.48749 ν d3 = 70.23
r 5 = -9.2642 d 5 = 0.1
r 6 = -36.1528 d 6 = 2.3508 n d4 = 1.755 ν d4 = 52.32
r 7 = -8.2813 d 7 = 0.1
r 8 = 19.1898 d 8 = 3.6946 n d5 = 1.8061 ν d5 = 40.92
r 9 = 11.7194 d 9 = 4.6385 n d6 = 1.497 ν d6 = 81.54
r 10 = -12.4231 d 10 = 0.4885
r 11 = -148.9692 d 11 = 1.5 n d7 = 1.6445 ν d7 = 40.82
r 12 = 26.49 d 12 = 3.0422 n d8 = 1.497 ν d8 = 81.54
r 13 = -17.2294 d 13 = 0.1914
r 14 = 128.1662 d 14 = 1.5 n d9 = 1.755 ν d9 = 52.32
r 15 = 9.2471 d 15 = 3.9865 n d10 = 1.497 ν d10 = 81.54
r 16 = -27.9432 d 16 = 0.5113
r 17 = 50.4649 d 17 = 2.0653 n d11 = 1.48749 ν d11 = 70.23
r 18 = -93.4836 d 18 = 1.5
r 19 = ∞ (aperture) d 19 = d1 (variable)
r 20 = -27.3478 d 20 = 1 n d12 = 1.68893 ν d12 = 31.07
r 21 = 6.5094 d 21 = 3.2235 n d13 = 1.741 ν d13 = 52.64
r 22 = 11.4964 d 22 = 2.2337
r 23 = -10.8896 d 23 = 1.0014 n d14 = 1.51633 ν d14 = 64.14
r 24 = 18.5149 d 24 = 3.3224 n d15 = 1.80518 ν d15 = 25.42
r 25 = -20.2064 d 25 = d2 (variable)
r 26 = 1064.6111 d 26 = 3.2007 n d16 = 1.755 ν d16 = 52.32
r 27 = -29.0219 d 27 = 0.1
r 28 = 33.9989 d 28 = 4.7111 n d17 = 1.48749 ν d17 = 70.23
r 29 = -27.5562 d 29 = 2 n d18 = 1.7185 ν d18 = 33.52
r 30 = 54.4101 d 30 = d3 (variable)
r 31 = 68.7541 d 31 = 7.7321 n d19 = 1.48749 ν d19 = 70.21
r 32 = -37.5679 d 32 = 3.4742 n d20 = 1.8061 ν d20 = 40.95
r 33 = -102.8477 d 33 = 0.6973
r 34 = 84.3099 d 34 = 6.0238 n d21 = 1.834 ν d21 = 37.17
r 35 = -50.71 d 35 = 3.0298 n d22 = 1.6445 ν d22 = 40.82
r 36 = 40.6619 d 36 = 157.0375
r 37 = ∞ (image plane)
Zoom data M 10X 20X 40X
d1 0.99814 42.9967 28.9972
d2 15.19042 0.5 10.29361
d3 82.13944 54.8313 59.03719
φ 4.429 7.0904 10.6488
NA 0.25 0.4 0.6
IH 11 11 11.


（実施例７）
ｒ1 = ∞（物体面） ｄ1 = 0.17 ｎd1 =1.521 νd1 =56.02
ｒ2 = ∞ ｄ2 = d1(可変)
ｒ3 = -8.3019 ｄ3 = 1 ｎd2 =1.834 νd2 =37.16
ｒ4 = 6.4507 ｄ4 = 4.2918 ｎd3 =1.48749 νd3 =70.23
ｒ5 = -7.8311 ｄ5 = 0.1
ｒ6 = 68.897 ｄ6 = 2.8784 ｎd4 =1.56907 νd4 =71.3
ｒ7 = -11.319 ｄ7 = 0.1
ｒ8 = 45.2412 ｄ8 = 2.5681 ｎd5 =1.788 νd5 =47.37
ｒ9 = 13.5882 ｄ9 = 5.8351 ｎd6 =1.497 νd6 =81.54
ｒ10= -12.5255 ｄ10= 0.2679
ｒ11= -149.1941 ｄ11= 2.4538 ｎd7 =1.497 νd7 =81.54
ｒ12= -18.0412 ｄ12= 0.1737
ｒ13= 53.2667 ｄ13= 1.5 ｎd8 =1.804 νd8 =46.57
ｒ14= 10.1594 ｄ14= 4.3817 ｎd9 =1.43875 νd9 =94.99
ｒ15= -32.9683 ｄ15= 0.1
ｒ16= 46.3599 ｄ16= 3.5337 ｎd10=1.497 νd10=81.54
ｒ17= -120.4005 ｄ17= 5.2827
ｒ18= ∞（絞り） ｄ18= d2(可変)
ｒ19= -26.6871 ｄ19= 1.6491 ｎd11=1.741 νd11=52.64
ｒ20= 17.3743 ｄ20= 1.5 ｎd12=1.7552 νd12=27.51
ｒ21= 13.3797 ｄ21= 1.2996
ｒ22= -20.2202 ｄ22= 1 ｎd13=1.51823 νd13=58.9
ｒ23= 13.0468 ｄ23= 2 ｎd14=1.80518 νd14=25.42
ｒ24= -262.3134 ｄ24= d3(可変)
ｒ25= 83.2607 ｄ25= 2.5 ｎd15=1.497 νd15=81.54
ｒ26= -43.6491 ｄ26= 0.1
ｒ27= 178.5261 ｄ27= 2.5 ｎd16=1.7185 νd16=33.52
ｒ28= 26.3141 ｄ28= 3.6857 ｎd17=1.48749 νd17=70.23
ｒ29= -31.12 ｄ29= d4(可変)
ｒ30= 68.7541 ｄ30= 7.7321 ｎd18=1.48749 νd18=70.21
ｒ31= -37.5679 ｄ31= 3.4742 ｎd19=1.8061 νd19=40.95
ｒ32= -102.8477 ｄ32= 0.6973
ｒ33= 84.3099 ｄ33= 6.0238 ｎd20=1.834 νd20=37.17
ｒ34= -50.71 ｄ34= 3.0298 ｎd21=1.6445 νd21=40.82
ｒ35= 40.6619 ｄ35=157.0375
ｒ36= ∞（像面）
ズームデータ
Ｍ １０Ｘ ２０Ｘ ４０Ｘ
d1 1.3286 1.12623 1.12623
d2 2.21194 20.44934 28.60706
d3 12.8003 9.0681 0.4949
d4 82.78786 68.48503 68.90051
φ 4.4154 7.0784 10.6458
ＮＡ 0.25 0.4 0.6
ＩＨ 11 11 11 。
(Example 7)
r 1 = ∞ (object surface) d 1 = 0.17 n d1 = 1.521 ν d1 = 56.02
r 2 = ∞ d 2 = d1 (variable)
r 3 = -8.3019 d 3 = 1 n d2 = 1.834 ν d2 = 37.16
r 4 = 6.4507 d 4 = 4.2918 n d3 = 1.48749 ν d3 = 70.23
r 5 = -7.8311 d 5 = 0.1
r 6 = 68.897 d 6 = 2.8784 n d4 = 1.56907 ν d4 = 71.3
r 7 = -11.319 d 7 = 0.1
r 8 = 45.2412 d 8 = 2.5681 n d5 = 1.788 ν d5 = 47.37
r 9 = 13.5882 d 9 = 5.8351 n d6 = 1.497 ν d6 = 81.54
r 10 = -12.5255 d 10 = 0.2679
r 11 = -149.1941 d 11 = 2.4538 n d7 = 1.497 ν d7 = 81.54
r 12 = -18.0412 d 12 = 0.1737
r 13 = 53.2667 d 13 = 1.5 n d8 = 1.804 ν d8 = 46.57
r 14 = 10.1594 d 14 = 4.3817 n d9 = 1.43875 ν d9 = 94.99
r 15 = -32.9683 d 15 = 0.1
r 16 = 46.3599 d 16 = 3.5337 n d10 = 1.497 ν d10 = 81.54
r 17 = -120.4005 d 17 = 5.2827
r 18 = ∞ (aperture) d 18 = d2 (variable)
r 19 = -26.6871 d 19 = 1.6491 n d11 = 1.741 ν d11 = 52.64
r 20 = 17.3743 d 20 = 1.5 n d12 = 1.7552 ν d12 = 27.51
r 21 = 13.3797 d 21 = 1.2996
r 22 = -20.2202 d 22 = 1 n d13 = 1.51823 ν d13 = 58.9
r 23 = 13.0468 d 23 = 2 n d14 = 1.80518 ν d14 = 25.42
r 24 = -262.3134 d 24 = d3 (variable)
r 25 = 83.2607 d 25 = 2.5 n d15 = 1.497 ν d15 = 81.54
r 26 = -43.6491 d 26 = 0.1
r 27 = 178.5261 d 27 = 2.5 n d16 = 1.7185 ν d16 = 33.52
r 28 = 26.3141 d 28 = 3.6857 n d17 = 1.48749 ν d17 = 70.23
r 29 = -31.12 d 29 = d4 (variable)
r 30 = 68.7541 d 30 = 7.7321 n d18 = 1.48749 ν d18 = 70.21
r 31 = -37.5679 d 31 = 3.4742 n d19 = 1.8061 ν d19 = 40.95
r 32 = -102.8477 d 32 = 0.6973
r 33 = 84.3099 d 33 = 6.0238 n d20 = 1.834 ν d20 = 37.17
r 34 = -50.71 d 34 = 3.0298 n d21 = 1.6445 ν d21 = 40.82
r 35 = 40.6619 d 35 = 157.0375
r 36 = ∞ (image plane)
Zoom data M 10X 20X 40X
d1 1.3286 1.12623 1.12623
d2 2.21194 20.44934 28.60706
d3 12.8003 9.0681 0.4949
d4 82.78786 68.48503 68.90051
φ 4.4154 7.0784 10.6458
NA 0.25 0.4 0.6
IH 11 11 11.


（実施例８）
ｒ1 = ∞（物体面） ｄ1 = 0.17 ｎd1 =1.521 νd1 =56.02
ｒ2 = ∞ ｄ2 = 1.0793
ｒ3 = -12.2497 ｄ3 = 1 ｎd2 =1.834 νd2 =37.16
ｒ4 = 6.0798 ｄ4 = 4.2136 ｎd3 =1.48749 νd3 =70.23
ｒ5 = -6.9892 ｄ5 = 0.1
ｒ6 = 38.8113 ｄ6 = 2.9273 ｎd4 =1.56907 νd4 =71.3
ｒ7 = -11.095 ｄ7 = 0.1163
ｒ8 = 148.971 ｄ8 = 1.6507 ｎd5 =1.788 νd5 =47.37
ｒ9 = 12.6434 ｄ9 = 5.655 ｎd6 =1.497 νd6 =81.54
ｒ10= -11.1689 ｄ10= 0.1
ｒ11= 746.8201 ｄ11= 2.3452 ｎd7 =1.497 νd7 =81.54
ｒ12= -18.2582 ｄ12= 0.1
ｒ13= 23.1461 ｄ13= 1.5 ｎd8 =1.83481 νd8 =42.72
ｒ14= 8.6252 ｄ14= 3.6657 ｎd9 =1.43875 νd9 =94.99
ｒ15= -80.5901 ｄ15= 1.481
ｒ16= 33.2709 ｄ16= 2.019 ｎd10=1.497 νd10=81.54
ｒ17= -925.4498 ｄ17= 1.9017
ｒ18= ∞（絞り） ｄ18= d1(可変)
ｒ19= -27.4001 ｄ19= 1 ｎd11=1.741 νd11=52.64
ｒ20= 11.6867 ｄ20= 1.5 ｎd12=1.7552 νd12=27.51
ｒ21= 9.636 ｄ21= 1.3273
ｒ22= -13.2227 ｄ22= 1 ｎd13=1.51823 νd13=58.9
ｒ23= 10.7098 ｄ23= 2 ｎd14=1.80518 νd14=25.42
ｒ24= -448.6151 ｄ24= d2(可変)
ｒ25= 78.0384 ｄ25= 2.5 ｎd15=1.497 νd15=81.54
ｒ26= -28.0274 ｄ26= 0.1
ｒ27= 129.6035 ｄ27= 2.5 ｎd16=1.7185 νd16=33.52
ｒ28= 21.5549 ｄ28= 3.7885 ｎd17=1.48749 νd17=70.23
ｒ29= -26.524 ｄ29= d3(可変)
ｒ30= 68.7541 ｄ30= 7.7321 ｎd18=1.48749 νd18=70.21
ｒ31= -37.5679 ｄ31= 3.4742 ｎd19=1.8061 νd19=40.95
ｒ32= -102.8477 ｄ32= 0.6973
ｒ33= 84.3099 ｄ33= 6.0238 ｎd20=1.834 νd20=37.17
ｒ34= -50.71 ｄ34= 3.0298 ｎd21=1.6445 νd21=40.82
ｒ35= 40.6619 ｄ35=157.0375
ｒ36= ∞（像面）
ズームデータ
Ｍ １０Ｘ ２０Ｘ ４０Ｘ
d1 0.49981 18.48428 12.48916
d2 9.71567 0.5 6.64372
d3 94.04392 85.27516 85.12652
φ 3.925 6.2938 9.4746
ＮＡ 0.25 0.4 0.6
ＩＨ 11 11 11 。
(Example 8)
r 1 = ∞ (object surface) d 1 = 0.17 n d1 = 1.521 ν d1 = 56.02
r 2 = ∞ d 2 = 1.0793
r 3 = -12.2497 d 3 = 1 n d2 = 1.834 ν d2 = 37.16
r 4 = 6.0798 d 4 = 4.2136 n d3 = 1.48749 ν d3 = 70.23
r 5 = -6.9892 d 5 = 0.1
r 6 = 38.8113 d 6 = 2.9273 n d4 = 1.56907 ν d4 = 71.3
r 7 = -11.095 d 7 = 0.1163
r 8 = 148.971 d 8 = 1.6507 n d5 = 1.788 ν d5 = 47.37
r 9 = 12.6434 d 9 = 5.655 n d6 = 1.497 ν d6 = 81.54
r 10 = -11.1689 d 10 = 0.1
r 11 = 746.8201 d 11 = 2.3452 n d7 = 1.497 ν d7 = 81.54
r 12 = -18.2582 d 12 = 0.1
r 13 = 23.1461 d 13 = 1.5 n d8 = 1.83481 ν d8 = 42.72
r 14 = 8.6252 d 14 = 3.6657 n d9 = 1.43875 ν d9 = 94.99
r 15 = -80.5901 d 15 = 1.481
r 16 = 33.2709 d 16 = 2.019 n d10 = 1.497 ν d10 = 81.54
r 17 = -925.4498 d 17 = 1.9017
r 18 = ∞ (aperture) d 18 = d1 (variable)
r 19 = -27.4001 d 19 = 1 n d11 = 1.741 ν d11 = 52.64
r 20 = 11.6867 d 20 = 1.5 n d12 = 1.7552 ν d12 = 27.51
r 21 = 9.636 d 21 = 1.3273
r 22 = -13.2227 d 22 = 1 n d13 = 1.51823 ν d13 = 58.9
r 23 = 10.7098 d 23 = 2 n d14 = 1.80518 ν d14 = 25.42
r 24 = -448.6151 d 24 = d2 (variable)
r 25 = 78.0384 d 25 = 2.5 n d15 = 1.497 ν d15 = 81.54
r 26 = -28.0274 d 26 = 0.1
r 27 = 129.6035 d 27 = 2.5 n d16 = 1.7185 ν d16 = 33.52
r 28 = 21.5549 d 28 = 3.7885 n d17 = 1.48749 ν d17 = 70.23
r 29 = -26.524 d 29 = d3 (variable)
r 30 = 68.7541 d 30 = 7.7321 n d18 = 1.48749 ν d18 = 70.21
r 31 = -37.5679 d 31 = 3.4742 n d19 = 1.8061 ν d19 = 40.95
r 32 = -102.8477 d 32 = 0.6973
r 33 = 84.3099 d 33 = 6.0238 n d20 = 1.834 ν d20 = 37.17
r 34 = -50.71 d 34 = 3.0298 n d21 = 1.6445 ν d21 = 40.82
r 35 = 40.6619 d 35 = 157.0375
r 36 = ∞ (image plane)
Zoom data M 10X 20X 40X
d1 0.49981 18.48428 12.48916
d2 9.71567 0.5 6.64372
d3 94.04392 85.27516 85.12652
φ 3.925 6.2938 9.4746
NA 0.25 0.4 0.6
IH 11 11 11.


（実施例９）
ｒ1 = ∞（物体面） ｄ1 = 0.17 ｎd1 =1.521 νd1 =56.02
ｒ2 = ∞ ｄ2 = 1.0976
ｒ3 = -9.4339 ｄ3 = 3.077 ｎd2 =1.834 νd2 =37.16
ｒ4 = 9.0446 ｄ4 = 6.616 ｎd3 =1.58913 νd3 =61.14
ｒ5 = -9.9879 ｄ5 = 0.1
ｒ6 = ∞ ｄ6 = 3.833 ｎd4 =1.56907 νd4 =71.3
ｒ7 = -15.3749（非球面） ｄ7 = 0.1
ｒ8 = 583.6711 ｄ8 = 3.414 ｎd5 =1.43875 νd5 =94.99
ｒ9 = -22.1172 ｄ9 = 0.1
ｒ10= 35.9588（非球面） ｄ10= 3.828 ｎd6 =1.43875 νd6 =94.99
ｒ11= -95.4689 ｄ11= 1.5 ｎd7 =1.834 νd7 =37.16
ｒ12= 37.0658 ｄ12= 6.716 ｎd8 =1.43875 νd8 =94.99
ｒ13= -13.1119（非球面） ｄ13= 0.1
ｒ14= 16.7009 ｄ14= 1.8 ｎd9 =1.804 νd9 =46.57
ｒ15= 8.6521 ｄ15= 7.834 ｎd10=1.43875 νd10=94.99
ｒ16= -27.3134 ｄ16= 1.5
ｒ17= ∞（絞り） ｄ17= d1(可変)
ｒ18= -343.869 ｄ18= 5 ｎd11=1.80518 νd11=25.42
ｒ19= -9.8807 ｄ19= 1 ｎd12=1.67003 νd12=47.23
ｒ20= 10.0314 ｄ20= 1.2366
ｒ21= -11.1509 ｄ21= 1 ｎd13=1.755 νd13=52.32
ｒ22= 10.8034 ｄ22= 1.9 ｎd14=1.74 νd14=28.3
ｒ23= 90.7682 ｄ23= d2(可変)
ｒ24= -531.983 ｄ24= 3.644 ｎd15=1.56907 νd15=71.3
ｒ25= -42.3948 ｄ15= 0.1
ｒ26= 132.2199 ｄ16= 2 ｎd16=1.76182 νd16=26.52
ｒ27= 54.4167 ｄ17= 4.585 ｎd17=1.497 νd17=81.54
ｒ28= -79.3145 ｄ18= d3(可変)
ｒ29= 68.7541 ｄ19= 7.7321 ｎd18=1.48749 νd18=70.21
ｒ30= -37.5679 ｄ20= 3.4742 ｎd19=1.8061 νd19=40.95
ｒ31= -102.848 ｄ21= 0.6973
ｒ32= 84.3099 ｄ22= 6.0238 ｎd20=1.834 νd20=37.17
ｒ33= -50.71 ｄ23= 3.0298 ｎd21=1.6445 νd21=40.82
ｒ34= 40.6619 ｄ24=157.0436
ｒ35= ∞（像面）
非球面係数
第７面
Ｋ = 0
A4 = 6.7137 ×10-6
A6 =-1.2296 ×10-7
A8 = 0
A10= 0
第１０面
Ｋ = 0
A4 = 7.5356 ×10-7
A6 = 1.9643 ×10-8
A8 = 0
A10= 0
第１３面
Ｋ =-0.8448
A4 = 3.0742 ×10-5
A6 = 1.4891 ×10-9
A8 = 0
A10= 0
ズームデータ
Ｍ １０Ｘ ２０Ｘ ４０Ｘ
d1 0.99158 3.64313 4.96891
d2 29.48771 19.82495 0.49977
d3 7.26951 14.28073 32.28012
φ 4.125 6.823 19.295
ＮＡ 0.25 0.4 0.7
ＩＨ 11 11 11 。
Example 9
r 1 = ∞ (object surface) d 1 = 0.17 n d1 = 1.521 ν d1 = 56.02
r 2 = ∞ d 2 = 1.0976
r 3 = -9.4339 d 3 = 3.077 n d2 = 1.834 ν d2 = 37.16
r 4 = 9.0446 d 4 = 6.616 n d3 = 1.58913 ν d3 = 61.14
r 5 = -9.9879 d 5 = 0.1
r 6 = ∞ d 6 = 3.833 n d4 = 1.56907 ν d4 = 71.3
r 7 = -15.3749 (aspherical surface) d 7 = 0.1
r 8 = 583.6711 d 8 = 3.414 n d5 = 1.43875 ν d5 = 94.99
r 9 = -22.1172 d 9 = 0.1
r 10 = 35.9588 (aspherical surface) d 10 = 3.828 n d6 = 1.43875 ν d6 = 94.99
r 11 = -95.4689 d 11 = 1.5 n d7 = 1.834 ν d7 = 37.16
r 12 = 37.0658 d 12 = 6.716 n d8 = 1.43875 ν d8 = 94.99
r 13 = -13.1119 (aspherical surface) d 13 = 0.1
r 14 = 16.7009 d 14 = 1.8 n d9 = 1.804 ν d9 = 46.57
r 15 = 8.6521 d 15 = 7.834 n d10 = 1.43875 ν d10 = 94.99
r 16 = -27.3134 d 16 = 1.5
r 17 = ∞ (aperture) d 17 = d1 (variable)
r 18 = -343.869 d 18 = 5 n d11 = 1.80518 ν d11 = 25.42
r 19 = -9.8807 d 19 = 1 n d12 = 1.67003 ν d12 = 47.23
r 20 = 10.0314 d 20 = 1.2366
r 21 = -11.1509 d 21 = 1 n d13 = 1.755 ν d13 = 52.32
r 22 = 10.8034 d 22 = 1.9 n d14 = 1.74 ν d14 = 28.3
r 23 = 90.7682 d 23 = d2 (variable)
r 24 = -531.983 d 24 = 3.644 n d15 = 1.56907 ν d15 = 71.3
r 25 = -42.3948 d 15 = 0.1
r 26 = 132.2199 d 16 = 2 n d16 = 1.76182 ν d16 = 26.52
r 27 = 54.4167 d 17 = 4.585 n d17 = 1.497 ν d17 = 81.54
r 28 = -79.3145 d 18 = d3 (variable)
r 29 = 68.7541 d 19 = 7.7321 n d18 = 1.48749 ν d18 = 70.21
r 30 = -37.5679 d 20 = 3.4742 n d19 = 1.8061 ν d19 = 40.95
r 31 = -102.848 d 21 = 0.6973
r 32 = 84.3099 d 22 = 6.0238 n d20 = 1.834 ν d20 = 37.17
r 33 = -50.71 d 23 = 3.0298 n d21 = 1.6445 ν d21 = 40.82
r 34 = 40.6619 d 24 = 157.0436
r 35 = ∞ (image plane)
Aspheric coefficient 7th surface K = 0
A 4 = 6.7137 × 10 -6
A 6 = -1.2296 × 10 -7
A 8 = 0
A 10 = 0
10th surface K = 0
A 4 = 7.5356 × 10 -7
A 6 = 1.9643 × 10 -8
A 8 = 0
A 10 = 0
Surface 13 K = -0.8448
A 4 = 3.0742 × 10 -5
A 6 = 1.4891 × 10 -9
A 8 = 0
A 10 = 0
Zoom data M 10X 20X 40X
d1 0.99158 3.64313 4.96891
d2 29.48771 19.82495 0.49977
d3 7.26951 14.28073 32.28012
φ 4.125 6.823 19.295
NA 0.25 0.4 0.7
IH 11 11 11.


（実施例１０）
ｒ1 = ∞（物体面） ｄ1 = 0.17 ｎd1 =1.521 νd1 =56.02
ｒ2 = ∞ ｄ2 = 1.2112 1
ｒ3 = -4.9361 ｄ3 = 1.02 ｎd2 =1.7847 νd2 =26.29
ｒ4 = 253.4277 ｄ4 = 2.3777 ｎd3 =1.48749 νd3 =70.23
ｒ5 = -4.9396 ｄ5 = 0.4471 1
ｒ6 = 12.8957 ｄ6 = 5.093 ｎd4 =1.497 νd4 =81.54
ｒ7 = -7.0306 ｄ7 = 1.642 ｎd5 =1.741 νd5 =52.64
ｒ8 = 19.9591 ｄ8 = 4.62 ｎd6 =1.43875 νd6 =94.99
ｒ9 = -13.8083 ｄ9 = 0.1 1
ｒ10= 31.338 ｄ10= 4.94 ｎd7 =1.497 νd7 =81.54
ｒ11= -16.0632（非球面） ｄ11= 0.1 1
ｒ12= 26.2537 ｄ12= 5.3 ｎd8 =1.43875 νd8 =94.99
ｒ13= -22.8474 ｄ13= 0.1 1
ｒ14= 17.5164 ｄ14= 1.66 ｎd9 =1.804 νd9 =46.57
ｒ15= 8.0689 ｄ15= 5.985 ｎd10=1.43875 νd10=94.99
ｒ16= -56.7416 ｄ16= 2.7635 1
ｒ17= ∞（絞り） ｄ17= d1(可変) 1
ｒ18= -39.6951 ｄ18= 1.56 ｎd11=1.80518 νd11=25.42
ｒ19= -7.829 ｄ19= 0.937 ｎd12=1.67003 νd12=47.23
ｒ20= 8.7512 ｄ20= 1.0237 1
ｒ21= -9.3583 ｄ21= 0.99 ｎd13=1.72916 νd13=54.68
ｒ22= 14.0731 ｄ22= 1.9816 ｎd14=1.74 νd14=28.3
ｒ23= ∞ ｄ23= d2(可変) 1
ｒ24= -578.072 ｄ24= 2.965 ｎd15=1.497 νd15=81.54
ｒ25= -22.7327 ｄ15= 0.1 1
ｒ26= 109.3114 ｄ16= 1.95 ｎd16=1.76182 νd16=26.52
ｒ27= 37.3998 ｄ17= 3.765 ｎd17=1.497 νd17=81.54
ｒ28= -36.9985 ｄ18= d3(可変) 1
ｒ29= 68.7541 ｄ19= 7.7321 ｎd18=1.48749 νd18=70.21
ｒ30= -37.5679 ｄ20= 3.4742 ｎd19=1.8061 νd19=40.95
ｒ31= -102.848 ｄ21= 0.6973 1
ｒ32= 84.3099 ｄ22= 6.0238 ｎd20=1.834 νd20=37.17
ｒ33= -50.71 ｄ23= 3.0298 ｎd21=1.6445 νd21=40.82
ｒ34= 40.6619 ｄ24=157.0436
ｒ35= ∞（像面）
非球面係数
第１１面
Ｋ =-0.0639
A4 = 6.3528 ×10-5
A6 = 2.5357 ×10-7
A8 = 1.0715 ×10-9
A10= 0
ズームデータ
Ｍ １０Ｘ ２０Ｘ ４０Ｘ
d1 2.90471 7.02218 9.08107
d2 13.81621 9.39132 0.54182
d3 30.47728 30.7847 37.57531
φ 4.18 6.73 11.03
ＮＡ 0.25 0.4 0.65
ＩＨ 11 11 11 。
(Example 10)
r 1 = ∞ (object surface) d 1 = 0.17 n d1 = 1.521 ν d1 = 56.02
r 2 = ∞ d 2 = 1.2112 1
r 3 = -4.9361 d 3 = 1.02 n d2 = 1.7847 ν d2 = 26.29
r 4 = 253.4277 d 4 = 2.3777 n d3 = 1.48749 ν d3 = 70.23
r 5 = -4.9396 d 5 = 0.4471 1
r 6 = 12.8957 d 6 = 5.093 n d4 = 1.497 ν d4 = 81.54
r 7 = -7.0306 d 7 = 1.642 n d5 = 1.741 ν d5 = 52.64
r 8 = 19.9591 d 8 = 4.62 n d6 = 1.43875 ν d6 = 94.99
r 9 = -13.8083 d 9 = 0.1 1
r 10 = 31.338 d 10 = 4.94 n d7 = 1.497 ν d7 = 81.54
r 11 = -16.0632 (aspherical surface) d 11 = 0.1 1
r 12 = 26.2537 d 12 = 5.3 n d8 = 1.43875 ν d8 = 94.99
r 13 = -22.8474 d 13 = 0.1 1
r 14 = 17.5164 d 14 = 1.66 n d9 = 1.804 ν d9 = 46.57
r 15 = 8.0689 d 15 = 5.985 n d10 = 1.43875 ν d10 = 94.99
r 16 = -56.7416 d 16 = 2.7635 1
r 17 = ∞ (aperture) d 17 = d1 (variable) 1
r 18 = -39.6951 d 18 = 1.56 n d11 = 1.80518 ν d11 = 25.42
r 19 = -7.829 d 19 = 0.937 n d12 = 1.67003 ν d12 = 47.23
r 20 = 8.7512 d 20 = 1.0237 1
r 21 = -9.3583 d 21 = 0.99 n d13 = 1.72916 ν d13 = 54.68
r 22 = 14.0731 d 22 = 1.9816 n d14 = 1.74 ν d14 = 28.3
r 23 = ∞ d 23 = d2 (variable) 1
r 24 = -578.072 d 24 = 2.965 n d15 = 1.497 ν d15 = 81.54
r 25 = -22.7327 d 15 = 0.1 1
r 26 = 109.3114 d 16 = 1.95 n d16 = 1.76182 ν d16 = 26.52
r 27 = 37.3998 d 17 = 3.765 n d17 = 1.497 ν d17 = 81.54
r 28 = -36.9985 d 18 = d3 (variable) 1
r 29 = 68.7541 d 19 = 7.7321 n d18 = 1.48749 ν d18 = 70.21
r 30 = -37.5679 d 20 = 3.4742 n d19 = 1.8061 ν d19 = 40.95
r 31 = -102.848 d 21 = 0.6973 1
r 32 = 84.3099 d 22 = 6.0238 n d20 = 1.834 ν d20 = 37.17
r 33 = -50.71 d 23 = 3.0298 n d21 = 1.6445 ν d21 = 40.82
r 34 = 40.6619 d 24 = 157.0436
r 35 = ∞ (image plane)
Aspheric coefficient 11th surface K = -0.0639
A 4 = 6.3528 × 10 -5
A 6 = 2.5357 × 10 -7
A 8 = 1.0715 × 10 -9
A 10 = 0
Zoom data M 10X 20X 40X
d1 2.90471 7.02218 9.08107
d2 13.81621 9.39132 0.54182
d3 30.47728 30.7847 37.57531
φ 4.18 6.73 11.03
NA 0.25 0.4 0.65
IH 11 11 11.


（実施例１１）
ｒ0 = ∞（物体面） ｄ0 = 0.1700 ｎd0 =1.521 νd0 =56.02
ｒ1 = ∞ ｄ1 = 1.2356
ｒ2 = -6.1723 ｄ2 = 1.0726 ｎd1 =1.834 νd1 =37.16
ｒ3 = 10.8292 ｄ3 = 4.0318 ｎd2 =1.48749 νd2 =70.23
ｒ4 = -5.0915 ｄ4 = 0.13
ｒ5 = -25.5833 ｄ5 = 1.6331 ｎd3 =1.58144 νd3 =40.75
ｒ6 = -46.648 ｄ6 = 3.7009 ｎd4 =1.755 νd4 =52.32
ｒ7 = -11.7579 ｄ7 = 0.1
ｒ8 = 205.695 ｄ8 = 1.7 ｎd5 =1.8061 νd5 =40.92
ｒ9 = 26.4027 ｄ9 = 7.0346 ｎd6 =1.43875 νd6 =94.99
ｒ10= -11.9025 ｄ10= 0.1
ｒ11= 43.7949 ｄ11= 3.0837 ｎd7 =1.43875 νd7 =94.99
ｒ12= -34.6252 ｄ12= 0.13
ｒ13= 20.6705 ｄ13= 1.8 ｎd8 =1.834 νd8 =37.16
ｒ14= 9.3595 ｄ14= 4.8933 ｎd9 =1.43875 νd9 =94.99
ｒ15= -47.5505 ｄ15= （可変）
ｒ16= -22.9975 ｄ16= 1 ｎd10=1.74077 νd10=27.79
ｒ17= 244.4197 ｄ17= 1 ｎd11=1.755 νd11=52.32
ｒ18= 13.5521 ｄ18= 1.1141
ｒ19= -15.2756 ｄ19= 1.0451 ｎd12=1.755 νd12=52.32
ｒ20= 11.9507 ｄ20= 2.4994 ｎd13=1.80518 νd13=25.42
ｒ21= -33.2919 ｄ21= （可変）
ｒ22= -88.3292 ｄ22= 1.7 ｎd14=1.76182 νd14=26.52
ｒ23= 32.7918 ｄ23= 3.4191 ｎd15=1.497 νd15=81.54
ｒ24= -18.596 ｄ24= 0.1
ｒ25= 52.2958 ｄ25= 3.1779 ｎd16=1.56907 νd16=71.3
ｒ26= -20.5559 ｄ26= （可変）
ｒ27= 23.96 ｄ27= 2.4303 ｎd17=1.755 νd17=52.32
ｒ28= 144.8645 ｄ28= 1.5653 ｎd18=1.64769 νd18=33.79
ｒ29= 24.0201 ｄ29= 1.8706
ｒ30= -20.4538 ｄ30= 2.0686 ｎd19=1.48749 νd19=70.23
ｒ31= 13.5988 ｄ31= 2.3819 ｎd20=1.76182 νd20=26.52
ｒ32= 22.3222 ｄ32= （可変）
ｒ33= 68.7541 ｄ33= 7.7321 ｎd21=1.48749 νd21=70.21
ｒ34= -37.5679 ｄ34= 3.4742 ｎd22=1.8061 νd22=40.95
ｒ35= -102.848 ｄ35= 0.6973
ｒ36= 84.3099 ｄ36= 6.0238 ｎd23=1.834 νd23=37.17
ｒ37= -50.71 ｄ37= 3.0298 ｎd24=1.6445 νd24=40.82
ｒ38= 40.6619 ｄ38=157.044
ｒ39= ∞（像面）
ズームデータ
Ｍ １０× ２０× ４０×
ｄ15 0.38352 6.83303 16.30202
ｄ21 12.96662 6.74751 0.6
ｄ26 0.41479 10.40162 0.72419
ｄ32 30.04721 19.83 26.18594
φ 3.8504 6.1938 10.2078
ＮＡ 0.25 0.4 0.65
ＩＨ 11 11 11 。
(Example 11)
r 0 = ∞ (object surface) d 0 = 0.1700 n d0 = 1.521 ν d0 = 56.02
r 1 = ∞ d 1 = 1.2356
r 2 = -6.1723 d 2 = 1.0726 n d1 = 1.834 ν d1 = 37.16
r 3 = 10.8292 d 3 = 4.0318 n d2 = 1.48749 ν d2 = 70.23
r 4 = -5.0915 d 4 = 0.13
r 5 = -25.5833 d 5 = 1.6331 n d3 = 1.58144 ν d3 = 40.75
r 6 = -46.648 d 6 = 3.7009 n d4 = 1.755 ν d4 = 52.32
r 7 = -11.7579 d 7 = 0.1
r 8 = 205.695 d 8 = 1.7 n d5 = 1.8061 ν d5 = 40.92
r 9 = 26.4027 d 9 = 7.0346 n d6 = 1.43875 ν d6 = 94.99
r 10 = -11.9025 d 10 = 0.1
r 11 = 43.7949 d 11 = 3.0837 n d7 = 1.43875 ν d7 = 94.99
r 12 = -34.6252 d 12 = 0.13
r 13 = 20.6705 d 13 = 1.8 n d8 = 1.834 ν d8 = 37.16
r 14 = 9.3595 d 14 = 4.8933 n d9 = 1.43875 ν d9 = 94.99
r 15 = -47.5505 d 15 = (variable)
r 16 = -22.9975 d 16 = 1 n d10 = 1.74077 ν d10 = 27.79
r 17 = 244.4197 d 17 = 1 n d11 = 1.755 ν d11 = 52.32
r 18 = 13.5521 d 18 = 1.1141
r 19 = -15.2756 d 19 = 1.0451 n d12 = 1.755 ν d12 = 52.32
r 20 = 11.9507 d 20 = 2.4994 n d13 = 1.80518 ν d13 = 25.42
r 21 = -33.2919 d 21 = (variable)
r 22 = -88.3292 d 22 = 1.7 n d14 = 1.76182 ν d14 = 26.52
r 23 = 32.7918 d 23 = 3.4191 n d15 = 1.497 ν d15 = 81.54
r 24 = -18.596 d 24 = 0.1
r 25 = 52.2958 d 25 = 3.1779 n d16 = 1.56907 ν d16 = 71.3
r 26 = -20.5559 d 26 = (variable)
r 27 = 23.96 d 27 = 2.4303 n d17 = 1.755 ν d17 = 52.32
r 28 = 144.8645 d 28 = 1.5653 n d18 = 1.64769 ν d18 = 33.79
r 29 = 24.0201 d 29 = 1.8706
r 30 = -20.4538 d 30 = 2.0686 n d19 = 1.48749 ν d19 = 70.23
r 31 = 13.5988 d 31 = 2.3819 n d20 = 1.76182 ν d20 = 26.52
r 32 = 22.3222 d 32 = (variable)
r 33 = 68.7541 d 33 = 7.7321 n d21 = 1.48749 ν d21 = 70.21
r 34 = -37.5679 d 34 = 3.4742 n d22 = 1.8061 ν d22 = 40.95
r 35 = -102.848 d 35 = 0.6973
r 36 = 84.3099 d 36 = 6.0238 n d23 = 1.834 ν d23 = 37.17
r 37 = -50.71 d 37 = 3.0298 n d24 = 1.6445 ν d24 = 40.82
r 38 = 40.6619 d 38 = 157.044
r 39 = ∞ (image plane)
Zoom data M 10 × 20 × 40 ×
d 15 0.38352 6.83303 16.30202
d 21 12.96662 6.74751 0.6
d 26 0.41479 10.40162 0.72419
d 32 30.04721 19.83 26.18594
φ 3.8504 6.1938 10.2078
NA 0.25 0.4 0.65
IH 11 11 11.


（実施例１２）
ｒ0 = ∞（物体面） ｄ0 = 0.17 ｎd0 =1.521 νd0 =56.02
ｒ1 = ∞ ｄ1 = 1.1908
ｒ2 = -5.2082 ｄ2 = 1.075 ｎd1 =1.834 νd1 =37.16
ｒ3 = 13.6112 ｄ3 = 4.1376 ｎd2 =1.48749 νd2 =70.23
ｒ4 = -6.0079 ｄ4 = 0.1201
ｒ5 = -21.8606 ｄ5 = 3.5287 ｎd3 =1.56907 νd3 =71.3
ｒ6 = -7.6931 ｄ6 = 0.0982
ｒ7 = 57.6991 ｄ7 = 4.0315 ｎd4 =1.43875 νd4 =94.99
ｒ8 = -26.9214 ｄ8 = 1.8339 ｎd5 =1.804 νd5 =46.57
ｒ9 = 75.9201 ｄ9 = 3.7667 ｎd6 =1.497 νd6 =81.54
ｒ10= -14.2079 ｄ10= 0.1145
ｒ11= 70.5171 ｄ11= 3.2432 ｎd7 =1.43875 νd7 =94.99
ｒ12= -22.3737 ｄ12= 0.12
ｒ13= 17.6178 ｄ13= 1.8 ｎd8 =1.834 νd8 =37.16
ｒ14= 9.011 ｄ14= 4.7951 ｎd9 =1.43875 νd9 =94.99
ｒ15= -66.6761 ｄ15= （可変）
ｒ16= -21.8288 ｄ16= 1 ｎd10=1.80518 νd10=25.42
ｒ17= -74.8722 ｄ17= 1 ｎd11=1.755 νd11=52.32
ｒ18= 14.2521 ｄ18= 1.1384
ｒ19= -16.2484 ｄ19= 1.0965 ｎd12=1.755 νd12=52.32
ｒ20= 12.2275 ｄ20= 2.5339 ｎd13=1.80518 νd13=25.42
ｒ21= -32.7966 ｄ21= （可変）
ｒ22= -114.5855 ｄ22= 1.8024 ｎd14=1.76182 νd14=26.52
ｒ23= 32.6428 ｄ23= 3.3707 ｎd15=1.497 νd15=81.54
ｒ24= -19.6972 ｄ24= 0.1
ｒ25= 67.3471 ｄ25= 3.1855 ｎd16=1.56907 νd16=71.3
ｒ26= -19.7906 ｄ26= （可変）
ｒ27= 19.8944 ｄ27= 2.3054 ｎd17=1.48749 νd17=70.23
ｒ28= 93.7002 ｄ28= 1.5318 ｎd18=1.72151 νd18=29.23
ｒ29= 37.2242 ｄ29= 1.5207
ｒ30= -23.6932 ｄ30= 2.2122 ｎd19=1.48749 νd19=70.23
ｒ31= 12.6106 ｄ31= 2.3881 ｎd20=1.76182 νd20=26.52
ｒ32= 18.8143 ｄ32= （可変）
ｒ33= 68.7541 ｄ33= 7.7321 ｎd21=1.48749 νd21=70.21
ｒ34= -37.5679 ｄ34= 3.4742 ｎd22=1.8061 νd22=40.95
ｒ35= -102.848 ｄ35= 0.6973
ｒ36= 84.3099 ｄ36= 6.0238 ｎd23=1.834 νd23=37.17
ｒ37= -50.71 ｄ37= 3.0298 ｎd24=1.6445 νd24=40.82
ｒ38= 40.6619 ｄ38=157.0424
ｒ39= ∞（像面）
ズームデータ
Ｍ １０× ２０× ４０×
ｄ15 0.5 7.49119 16.44147
ｄ21 12.98785 6.8839 0.7617
ｄ26 0.23856 10.28993 4.10423
ｄ32 31.06254 20.12393 23.48155
φ 3.7602 6.0472 9.9794
ＮＡ 0.25 0.4 0.65
ＩＨ 11 11 11 。
(Example 12)
r 0 = ∞ (object surface) d 0 = 0.17 n d0 = 1.521 ν d0 = 56.02
r 1 = ∞ d 1 = 1.1908
r 2 = -5.2082 d 2 = 1.075 n d1 = 1.834 ν d1 = 37.16
r 3 = 13.6112 d 3 = 4.1376 n d2 = 1.48749 ν d2 = 70.23
r 4 = -6.0079 d 4 = 0.1201
r 5 = -21.8606 d 5 = 3.5287 n d3 = 1.56907 ν d3 = 71.3
r 6 = -7.6931 d 6 = 0.0982
r 7 = 57.6991 d 7 = 4.0315 n d4 = 1.43875 ν d4 = 94.99
r 8 = -26.9214 d 8 = 1.8339 n d5 = 1.804 ν d5 = 46.57
r 9 = 75.9201 d 9 = 3.7667 n d6 = 1.497 ν d6 = 81.54
r 10 = -14.2079 d 10 = 0.1145
r 11 = 70.5171 d 11 = 3.2432 n d7 = 1.43875 ν d7 = 94.99
r 12 = -22.3737 d 12 = 0.12
r 13 = 17.6178 d 13 = 1.8 n d8 = 1.834 ν d8 = 37.16
r 14 = 9.011 d 14 = 4.7951 n d9 = 1.43875 ν d9 = 94.99
r 15 = -66.6761 d 15 = (variable)
r 16 = -21.8288 d 16 = 1 n d10 = 1.80518 ν d10 = 25.42
r 17 = -74.8722 d 17 = 1 n d11 = 1.755 ν d11 = 52.32
r 18 = 14.2521 d 18 = 1.1384
r 19 = -16.2484 d 19 = 1.0965 n d12 = 1.755 ν d12 = 52.32
r 20 = 12.2275 d 20 = 2.5339 n d13 = 1.80518 ν d13 = 25.42
r 21 = -32.7966 d 21 = (variable)
r 22 = -114.5855 d 22 = 1.8024 n d14 = 1.76182 ν d14 = 26.52
r 23 = 32.6428 d 23 = 3.3707 n d15 = 1.497 ν d15 = 81.54
r 24 = -19.6972 d 24 = 0.1
r 25 = 67.3471 d 25 = 3.1855 n d16 = 1.56907 ν d16 = 71.3
r 26 = -19.7906 d 26 = (variable)
r 27 = 19.8944 d 27 = 2.3054 n d17 = 1.48749 ν d17 = 70.23
r 28 = 93.7002 d 28 = 1.5318 n d18 = 1.72151 ν d18 = 29.23
r 29 = 37.2242 d 29 = 1.5207
r 30 = -23.6932 d 30 = 2.2122 n d19 = 1.48749 ν d19 = 70.23
r 31 = 12.6106 d 31 = 2.3881 n d20 = 1.76182 ν d20 = 26.52
r 32 = 18.8143 d 32 = (variable)
r 33 = 68.7541 d 33 = 7.7321 n d21 = 1.48749 ν d21 = 70.21
r 34 = -37.5679 d 34 = 3.4742 n d22 = 1.8061 ν d22 = 40.95
r 35 = -102.848 d 35 = 0.6973
r 36 = 84.3099 d 36 = 6.0238 n d23 = 1.834 ν d23 = 37.17
r 37 = -50.71 d 37 = 3.0298 n d24 = 1.6445 ν d24 = 40.82
r 38 = 40.6619 d 38 = 157.0424
r 39 = ∞ (image plane)
Zoom data M 10 × 20 × 40 ×
d 15 0.5 7.49119 16.44147
d 21 12.98785 6.8839 0.7617
d 26 0.23856 10.28993 4.10423
d 32 31.06254 20.12393 23.48155
φ 3.7602 6.0472 9.9794
NA 0.25 0.4 0.65
IH 11 11 11.


（実施例１３）
ｒ0 = ∞（物体面） ｄ0 = 0.17 ｎd0 =1.521 νd0 =56.02
ｒ1 = ∞ ｄ1 = 0.8165
ｒ2 = -5.3778 ｄ2 = 1.4437 ｎd1 =1.834 νd1 =37.16
ｒ3 = 11.1876 ｄ3 = 3.7347 ｎd2 =1.618 νd2 =63.33
ｒ4 = -6.6576 ｄ4 = 0.1
ｒ5 = -72.121 ｄ5 = 3.9419 ｎd3 =1.56907 νd3 =71.3
ｒ6 = -8.6944 ｄ6 = 0.1
ｒ7 = 17.302 （非球面） ｄ7 = 3.8931 ｎd4 =1.497 νd4 =81.54
ｒ8 = -55.3616 ｄ8 = 1.8 ｎd5 =1.755 νd5 =52.32
ｒ9 = 28.3148 ｄ9 = 4.6226 ｎd6 =1.497 νd6 =81.54
ｒ10= -10.9826（非球面） ｄ10= 0.1
ｒ11= 26.2489 ｄ11= 1.8 ｎd7 =1.834 νd7 =37.16
ｒ12= 9.1408 ｄ12= 7.0227 ｎd8 =1.43875 νd8 =94.99
ｒ13= -12.2202 ｄ13= （可変）
ｒ14= 300.7783 ｄ14= 1 ｎd9 =1.7725 νd9 =49.6
ｒ15= 11.1272 ｄ15= 1.3752
ｒ16= -12.1308 ｄ16= 1 ｎd10=1.755 νd10=52.32
ｒ17= 10.3434 ｄ17= 2.0633 ｎd11=1.80518 νd11=25.42
ｒ18= -204.8764 ｄ18= （可変）
ｒ19= -141.788 ｄ19= 2.8978 ｎd12=1.56907 νd12=71.3
ｒ20= -18.9119 ｄ20= 0.1
ｒ21= 37.1991 ｄ21= 4.8003 ｎd13=1.43875 νd13=94.99
ｒ22= -15.948 ｄ22= 2 ｎd14=1.7847 νd14=26.29
ｒ23= -28.1402 ｄ23= （可変）
ｒ24= 11.0963（非球面） ｄ24= 6.6402 ｎd15=1.804 νd15=46.57
ｒ25= 257.9154 ｄ25= 2.7756 ｎd16=1.7552 νd16=27.51
ｒ26= 5.4561 ｄ26= 3.7145
ｒ27= -14.6275 ｄ27= 1.5 ｎd17=1.51633 νd17=64.14
ｒ28= 8.9353 ｄ28= 2.5581 ｎd18=1.80518 νd18=25.42
ｒ29= 71.2871 ｄ29= （可変）
ｒ30= 68.7541 ｄ30= 7.7321 ｎd19=1.48749 νd19=70.21
ｒ31= -37.5679 ｄ31= 3.4742 ｎd20=1.8061 νd20=40.95
ｒ32= -102.848 ｄ32= 0.6973
ｒ33= 84.3099 ｄ33= 6.0238 ｎd21=1.834 νd21=37.17
ｒ34= -50.71 ｄ34= 3.0298 ｎd22=1.6445 νd22=40.82
ｒ35= 40.6619 ｄ35=157.037
ｒ36= ∞（像面）
非球面係数
第７面
Ｋ =-0.0009
A4 =-3.8520 ×10-5
A6 = 2.2226 ×10-6
A8 =-1.9103 ×10-8
A10= 8.8322 ×10-11
第１０面
Ｋ = 0.1287
A4 = 2.0670 ×10-4
A6 = 1.2544 ×10-6
A8 = 9.4915 ×10-9
A10= 1.8356 ×10-11
第２４面
Ｋ =-0.0047
A4 =-9.7014 ×10-7
A6 =-2.9352 ×10-9
A8 =-1.0273 ×10-13
A10=-6.5452 ×10-13
ズームデータ
Ｍ ２０× ４０× ８０×
ｄ13 0.3 8.99223 12.8866
ｄ18 13.14247 9.1427 0.5094
ｄ23 5.38548 1.06496 0.1
ｄ29 19.20194 18.83 24.53389
φ 5.8654 9.5918 11.4132
ＮＡ 0.4 0.65 0.77
ＩＨ 11 11 11 。
(Example 13)
r 0 = ∞ (object surface) d 0 = 0.17 n d0 = 1.521 ν d0 = 56.02
r 1 = ∞ d 1 = 0.8165
r 2 = -5.3778 d 2 = 1.4437 n d1 = 1.834 ν d1 = 37.16
r 3 = 11.1876 d 3 = 3.7347 n d2 = 1.618 ν d2 = 63.33
r 4 = -6.6576 d 4 = 0.1
r 5 = -72.121 d 5 = 3.9419 n d3 = 1.56907 ν d3 = 71.3
r 6 = -8.6944 d 6 = 0.1
r 7 = 17.302 (aspherical surface) d 7 = 3.8931 n d4 = 1.497 ν d4 = 81.54
r 8 = -55.3616 d 8 = 1.8 n d5 = 1.755 ν d5 = 52.32
r 9 = 28.3148 d 9 = 4.6226 n d6 = 1.497 ν d6 = 81.54
r 10 = -10.9826 (aspherical surface) d 10 = 0.1
r 11 = 26.2489 d 11 = 1.8 n d7 = 1.834 ν d7 = 37.16
r 12 = 9.1408 d 12 = 7.0227 n d8 = 1.43875 ν d8 = 94.99
r 13 = -12.2202 d 13 = (variable)
r 14 = 300.7783 d 14 = 1 n d9 = 1.7725 ν d9 = 49.6
r 15 = 11.1272 d 15 = 1.3752
r 16 = -12.1308 d 16 = 1 n d10 = 1.755 ν d10 = 52.32
r 17 = 10.3434 d 17 = 2.0633 n d11 = 1.80518 ν d11 = 25.42
r 18 = -204.8764 d 18 = (variable)
r 19 = -141.788 d 19 = 2.8978 n d12 = 1.56907 ν d12 = 71.3
r 20 = -18.9119 d 20 = 0.1
r 21 = 37.1991 d 21 = 4.8003 n d13 = 1.43875 ν d13 = 94.99
r 22 = -15.948 d 22 = 2 n d14 = 1.7847 ν d14 = 26.29
r 23 = -28.1402 d 23 = (variable)
r 24 = 11.0963 (aspherical surface) d 24 = 6.6402 n d15 = 1.804 ν d15 = 46.57
r 25 = 257.9154 d 25 = 2.7756 n d16 = 1.7552 ν d16 = 27.51
r 26 = 5.4561 d 26 = 3.7145
r 27 = -14.6275 d 27 = 1.5 n d17 = 1.51633 ν d17 = 64.14
r 28 = 8.9353 d 28 = 2.5581 n d18 = 1.80518 ν d18 = 25.42
r 29 = 71.2871 d 29 = (variable)
r 30 = 68.7541 d 30 = 7.7321 n d19 = 1.48749 ν d19 = 70.21
r 31 = -37.5679 d 31 = 3.4742 n d20 = 1.8061 ν d20 = 40.95
r 32 = -102.848 d 32 = 0.6973
r 33 = 84.3099 d 33 = 6.0238 n d21 = 1.834 ν d21 = 37.17
r 34 = -50.71 d 34 = 3.0298 n d22 = 1.6445 ν d22 = 40.82
r 35 = 40.6619 d 35 = 157.037
r 36 = ∞ (image plane)
Aspheric coefficient 7th surface K = -0.0009
A 4 = -3.8520 × 10 -5
A 6 = 2.2226 × 10 -6
A 8 = -1.9103 × 10 -8
A 10 = 8.8322 × 10 -11
10th surface K = 0.1287
A 4 = 2.0670 × 10 -4
A 6 = 1.2544 × 10 -6
A 8 = 9.4915 × 10 -9
A 10 = 1.8356 × 10 -11
24th surface K = -0.0047
A 4 = -9.7014 × 10 -7
A 6 = -2.9352 × 10 -9
A 8 = -1.0273 × 10 -13
A 10 = -6.5452 × 10 -13
Zoom data M 20 × 40 × 80 ×
d 13 0.3 8.99223 12.8866
d 18 13.14247 9.1427 0.5094
d 23 5.38548 1.06496 0.1
d 29 19.20194 18.83 24.53389
φ 5.8654 9.5918 11.4132
NA 0.4 0.65 0.77
IH 11 11 11.


（実施例１４）
ｒ0 = ∞（物体面） ｄ0 = 0.1700 ｎd0 =1.521 νd0 =56.02
ｒ1 = ∞ ｄ1 = 1.0467
ｒ2 = -4.6838 ｄ2 = 0.95 ｎd1 =1.834 νd1 =37.16
ｒ3 = 15.3023 ｄ3 = 4.0296 ｎd2 =1.48749 νd2 =70.23
ｒ4 = -5.936 ｄ4 = 0.12
ｒ5 = -96.3863 ｄ5 = 3.3714 ｎd3 =1.497 νd3 =81.54
ｒ6 = -9.8668 ｄ6 = 0.1
ｒ7 = 27.6788 ｄ7 = 4.03 ｎd4 =1.43875 νd4 =94.99
ｒ8 = -13.0279 ｄ8 = 1.6487 ｎd5 =1.804 νd5 =46.57
ｒ9 = -39.2791 ｄ9 = 3.5349 ｎd6 =1.43875 νd6 =94.99
ｒ10= -13.5942 ｄ10= 0.1
ｒ11= -37.2729 ｄ11= 3.6487 ｎd7 =1.43875 νd7 =94.99
ｒ12= -11.6431（非球面） ｄ12= 0.12
ｒ13= 15.2985 ｄ13= 1.8 ｎd8 =1.834 νd8 =37.16
ｒ14= 8.9276 ｄ14= 5.7099 ｎd9 =1.43875 νd9 =94.99
ｒ15= -90.2351 ｄ15= （可変）
ｒ16= -46.7467 ｄ16= 1.0769 ｎd10=1.6516 νd10=58.55
ｒ17= -10.3482 ｄ17= 0.8814 ｎd11=1.755 νd11=52.32
ｒ18= 14.1417 ｄ18= 1.063
ｒ19= -21.4981 ｄ19= 0.9987 ｎd12=1.755 νd12=52.32
ｒ20= 9.5433 ｄ20= 2.1265 ｎd13=1.80518 νd13=25.42
ｒ21= 425.3494 ｄ21= （可変）
ｒ22= 636.6315 ｄ22= 1.7 ｎd14=1.76182 νd14=26.52
ｒ23= 23.9718 ｄ23= 3.6636 ｎd15=1.497 νd15=81.54
ｒ24= -20.9516 ｄ24= 0.1
ｒ25= 43.2308 ｄ25= 3.3464 ｎd16=1.56907 νd16=71.3
ｒ26= -21.9993 ｄ26= （可変）
ｒ27= 17.5744 ｄ27= 2.2306 ｎd17=1.48749 νd17=70.23
ｒ28= 48.9683 ｄ28= 1.5245 ｎd18=1.72151 νd18=29.23
ｒ29= 26.8697 ｄ29= 1.5488
ｒ30= -27.9057 ｄ30= 1.5616 ｎd19=1.48749 νd19=70.23
ｒ31= 11.0269 ｄ31= 2.4369 ｎd20=1.76182 νd20=26.52
ｒ32= 15.4453 ｄ32= （可変）
ｒ33= 68.7541 ｄ33= 7.7321 ｎd21=1.48749 νd21=70.21
ｒ34= -37.5679 ｄ34= 3.4742 ｎd22=1.8061 νd22=40.95
ｒ35= -102.848 ｄ35= 0.6973
ｒ36= 84.3099 ｄ36= 6.0238 ｎd23=1.834 νd23=37.17
ｒ37= -50.71 ｄ37= 3.0298 ｎd24=1.6445 νd24=40.82
ｒ38= 40.6619 ｄ38=157.0442
ｒ39= ∞（像面）
非球面係数
第１２面
Ｋ =-0.0787
A4 = 6.9409 ×10-5
A6 = 4.4095 ×10-7
A8 =-3.1306 ×10-10
A10= 2.5936 ×10-11
ズームデータ
Ｍ １０× ２０× ５０×
ｄ15 0.09132 6.20702 17.25153
ｄ21 13.379 7.64936 0.35
ｄ26 0.1 11.87463 6.19564
ｄ32 31.79069 19.63 21.56384
φ 3.7736 6.0648 10.7856
ＮＡ 0.25 0.4 0.7
ＩＨ 11 11 11 。
(Example 14)
r 0 = ∞ (object surface) d 0 = 0.1700 n d0 = 1.521 ν d0 = 56.02
r 1 = ∞ d 1 = 1.0467
r 2 = -4.6838 d 2 = 0.95 n d1 = 1.834 ν d1 = 37.16
r 3 = 15.3023 d 3 = 4.0296 n d2 = 1.48749 ν d2 = 70.23
r 4 = -5.936 d 4 = 0.12
r 5 = -96.3863 d 5 = 3.3714 n d3 = 1.497 ν d3 = 81.54
r 6 = -9.8668 d 6 = 0.1
r 7 = 27.6788 d 7 = 4.03 n d4 = 1.43875 ν d4 = 94.99
r 8 = -13.0279 d 8 = 1.6487 n d5 = 1.804 ν d5 = 46.57
r 9 = -39.2791 d 9 = 3.5349 n d6 = 1.43875 ν d6 = 94.99
r 10 = -13.5942 d 10 = 0.1
r 11 = -37.2729 d 11 = 3.6487 n d7 = 1.43875 ν d7 = 94.99
r 12 = -11.6431 (aspherical surface) d 12 = 0.12
r 13 = 15.2985 d 13 = 1.8 n d8 = 1.834 ν d8 = 37.16
r 14 = 8.9276 d 14 = 5.7099 n d9 = 1.43875 ν d9 = 94.99
r 15 = -90.2351 d 15 = (variable)
r 16 = -46.7467 d 16 = 1.0769 n d10 = 1.6516 ν d10 = 58.55
r 17 = -10.3482 d 17 = 0.8814 n d11 = 1.755 ν d11 = 52.32
r 18 = 14.1417 d 18 = 1.063
r 19 = -21.4981 d 19 = 0.9987 n d12 = 1.755 ν d12 = 52.32
r 20 = 9.5433 d 20 = 2.1265 n d13 = 1.80518 ν d13 = 25.42
r 21 = 425.3494 d 21 = (variable)
r 22 = 636.6315 d 22 = 1.7 n d14 = 1.76182 ν d14 = 26.52
r 23 = 23.9718 d 23 = 3.6636 n d15 = 1.497 ν d15 = 81.54
r 24 = -20.9516 d 24 = 0.1
r 25 = 43.2308 d 25 = 3.3464 n d16 = 1.56907 ν d16 = 71.3
r 26 = -21.9993 d 26 = (variable)
r 27 = 17.5744 d 27 = 2.2306 n d17 = 1.48749 ν d17 = 70.23
r 28 = 48.9683 d 28 = 1.5245 n d18 = 1.72151 ν d18 = 29.23
r 29 = 26.8697 d 29 = 1.5488
r 30 = -27.9057 d 30 = 1.5616 n d19 = 1.48749 ν d19 = 70.23
r 31 = 11.0269 d 31 = 2.4369 n d20 = 1.76182 ν d20 = 26.52
r 32 = 15.4453 d 32 = (variable)
r 33 = 68.7541 d 33 = 7.7321 n d21 = 1.48749 ν d21 = 70.21
r 34 = -37.5679 d 34 = 3.4742 n d22 = 1.8061 ν d22 = 40.95
r 35 = -102.848 d 35 = 0.6973
r 36 = 84.3099 d 36 = 6.0238 n d23 = 1.834 ν d23 = 37.17
r 37 = -50.71 d 37 = 3.0298 n d24 = 1.6445 ν d24 = 40.82
r 38 = 40.6619 d 38 = 157.0442
r 39 = ∞ (image plane)
Aspheric coefficient 12th surface K = -0.0787
A 4 = 6.9409 × 10 -5
A 6 = 4.4095 × 10 -7
A 8 = -3.1306 × 10 -10
A 10 = 2.5936 × 10 -11
Zoom data M 10 × 20 × 50 ×
d 15 0.09132 6.20702 17.25153
d 21 13.379 7.64936 0.35
d 26 0.1 11.87463 6.19564
d 32 31.79069 19.63 21.56384
φ 3.7736 6.0648 10.7856
NA 0.25 0.4 0.7
IH 11 11 11.


（実施例１５）
ｒ0 = ∞（物体面） ｄ0 = 0.17 ｎd0 =1.521 νd0 =56.02
ｒ1 = ∞ ｄ1 = 0.8747
ｒ2 = -5.2346 ｄ2 = 1 ｎd1 =1.8061 νd1 =40.92
ｒ3 = 24.4918 ｄ3 = 5.659 ｎd2 =1.58913 νd2 =61.14
ｒ4 = -6.0829 ｄ4 = 0.12
ｒ5 = -21.7561 ｄ5 = 4.169 ｎd3 =1.56907 νd3 =71.3
ｒ6 = -8.8997 ｄ6 = 0.08
ｒ7 = 873.3181 ｄ7 = 2.902 ｎd4 =1.43875 νd4 =94.99
ｒ8 = -21.0051 ｄ8 = 1.7 ｎd5 =1.79952 νd5 =42.22
ｒ9 = 120.262 ｄ9 = 5.133 ｎd6 =1.43875 νd6 =94.99
ｒ10= -14.7095 ｄ10= 0.1
ｒ11= 35.5168（非球面） ｄ11= 3.702 ｎd7 =1.43875 νd7 =94.99
ｒ12= -32.3425 ｄ12= 0.12
ｒ13= -215.137 ｄ13= 1.8 ｎd8 =1.834 νd8 =37.16
ｒ14= 32.5105 ｄ14= 6 ｎd9 =1.43875 νd9 =94.99
ｒ15= -17.613 ｄ15= （可変）
ｒ16= -19.7607 ｄ16= 1.123 ｎd10=1.7847 νd10=26.29
ｒ17= -74.928 ｄ17= 0.9 ｎd11=1.741 νd11=52.64
ｒ18= 18.4364 ｄ18= 1.0552
ｒ19= -37.0731 ｄ19= 1 ｎd12=1.755 νd12=52.32
ｒ20= 11.0737 ｄ20= 2.616 ｎd13=1.80518 νd13=25.42
ｒ21= -73.7195 ｄ21= （可変）
ｒ22= -93.7329 ｄ22= 1.662 ｎd14=1.76182 νd14=26.52
ｒ23= 23.2485 ｄ23= 3.853 ｎd15=1.497 νd15=81.54
ｒ24= -18.9264 ｄ24= 0.1
ｒ25= 41.5479 ｄ25= 3.554 ｎd16=1.56907 νd16=71.3
ｒ26= -19.4396 ｄ26= （可変）
ｒ27= 14.341 ｄ27= 1.734 ｎd17=1.6516 νd17=58.55
ｒ28= 18.4908 ｄ28= 1.16 ｎd18=1.7495 νd18=35.28
ｒ29= 15.6445 ｄ29= 2.1785
ｒ30= -19.7504 ｄ30= 1.555 ｎd19=1.48749 νd19=70.23
ｒ31= 10.0325 ｄ31= 2 ｎd20=1.76182 νd20=26.52
ｒ32= 14.7362 ｄ32= （可変）
ｒ33= 68.7541 ｄ33= 7.7321 ｎd21=1.48749 νd21=70.21
ｒ34= -37.5679 ｄ34= 3.4742 ｎd22=1.8061 νd22=40.95
ｒ35= -102.848 ｄ35= 0.6973
ｒ36= 84.3099 ｄ36= 6.0238 ｎd23=1.834 νd23=37.17
ｒ37= -50.71 ｄ37= 3.0298 ｎd24=1.6445 νd24=40.82
ｒ38= 40.6619 ｄ38=157.0429
ｒ39= ∞（像面）
非球面係数
第１１面
Ｋ =-0.3472
A4 =-5.7751 ×10-5
A6 =-6.8382 ×10-8
A8 = 7.4416 ×10-11
A10= 0
ズームデータ
Ｍ １０× ２０× ４０×
ｄ15 0.11998 6.42908 22.58975
ｄ21 14.4233 5.29924 0.29994
ｄ26 0.30176 10.23431 0.29994
ｄ32 27.13454 20.01694 18.79004
φ 4.39788 7.08146 14.62196
ＮＡ 0.25 0.4 0.8
ＩＨ 11 11 11 。
(Example 15)
r 0 = ∞ (object surface) d 0 = 0.17 n d0 = 1.521 ν d0 = 56.02
r 1 = ∞ d 1 = 0.8747
r 2 = -5.2346 d 2 = 1 n d1 = 1.8061 ν d1 = 40.92
r 3 = 24.4918 d 3 = 5.659 n d2 = 1.58913 ν d2 = 61.14
r 4 = -6.0829 d 4 = 0.12
r 5 = -21.7561 d 5 = 4.169 n d3 = 1.56907 ν d3 = 71.3
r 6 = -8.8997 d 6 = 0.08
r 7 = 873.3181 d 7 = 2.902 n d4 = 1.43875 ν d4 = 94.99
r 8 = -21.0051 d 8 = 1.7 n d5 = 1.79952 ν d5 = 42.22
r 9 = 120.262 d 9 = 5.133 n d6 = 1.43875 ν d6 = 94.99
r 10 = -14.7095 d 10 = 0.1
r 11 = 35.5168 (aspherical surface) d 11 = 3.702 n d7 = 1.43875 ν d7 = 94.99
r 12 = -32.3425 d 12 = 0.12
r 13 = -215.137 d 13 = 1.8 n d8 = 1.834 ν d8 = 37.16
r 14 = 32.5105 d 14 = 6 n d9 = 1.43875 ν d9 = 94.99
r 15 = -17.613 d 15 = (variable)
r 16 = -19.7607 d 16 = 1.123 n d10 = 1.7847 ν d10 = 26.29
r 17 = -74.928 d 17 = 0.9 n d11 = 1.741 ν d11 = 52.64
r 18 = 18.4364 d 18 = 1.0552
r 19 = -37.0731 d 19 = 1 n d12 = 1.755 ν d12 = 52.32
r 20 = 11.0737 d 20 = 2.616 n d13 = 1.80518 ν d13 = 25.42
r 21 = -73.7195 d 21 = (variable)
r 22 = -93.7329 d 22 = 1.662 n d14 = 1.76182 ν d14 = 26.52
r 23 = 23.2485 d 23 = 3.853 n d15 = 1.497 ν d15 = 81.54
r 24 = -18.9264 d 24 = 0.1
r 25 = 41.5479 d 25 = 3.554 n d16 = 1.56907 ν d16 = 71.3
r 26 = -19.4396 d 26 = (variable)
r 27 = 14.341 d 27 = 1.734 n d17 = 1.6516 ν d17 = 58.55
r 28 = 18.4908 d 28 = 1.16 n d18 = 1.7495 ν d18 = 35.28
r 29 = 15.6445 d 29 = 2.1785
r 30 = -19.7504 d 30 = 1.555 n d19 = 1.48749 ν d19 = 70.23
r 31 = 10.0325 d 31 = 2 n d20 = 1.76182 ν d20 = 26.52
r 32 = 14.7362 d 32 = (variable)
r 33 = 68.7541 d 33 = 7.7321 n d21 = 1.48749 ν d21 = 70.21
r 34 = -37.5679 d 34 = 3.4742 n d22 = 1.8061 ν d22 = 40.95
r 35 = -102.848 d 35 = 0.6973
r 36 = 84.3099 d 36 = 6.0238 n d23 = 1.834 ν d23 = 37.17
r 37 = -50.71 d 37 = 3.0298 n d24 = 1.6445 ν d24 = 40.82
r 38 = 40.6619 d 38 = 157.0429
r 39 = ∞ (image plane)
Aspheric coefficient 11th surface K = -0.3472
A 4 = -5.7751 × 10 -5
A 6 = -6.8382 × 10 -8
A 8 = 7.4416 × 10 -11
A 10 = 0
Zoom data M 10 × 20 × 40 ×
d 15 0.11998 6.42908 22.58975
d 21 14.4233 5.29924 0.29994
d 26 0.30176 10.23431 0.29994
d 32 27.13454 20.01694 18.79004
φ 4.39788 7.08146 14.62196
NA 0.25 0.4 0.8
IH 11 11 11.


（結像レンズ）
ｒ1 = 68.7541 ｄ1 = 7.7321 ｎd1 =1.48749 νd1 =70.21
ｒ2 = -37.5679 ｄ2 = 3.4742 ｎd2 =1.8061 νd2 =40.95
ｒ3 = -102.8477 ｄ3 = 0.6973
ｒ4 = 84.3099 ｄ4 = 6.0238 ｎd3 =1.834 νd3 =37.17
ｒ5 = -50.71 ｄ5 = 3.0298 ｎd4 =1.6445 νd4 =40.82
ｒ6 = 40.6619 。
(Imaging lens)
r 1 = 68.7541 d 1 = 7.7321 n d1 = 1.48749 ν d1 = 70.21
r 2 = -37.5679 d 2 = 3.4742 n d2 = 1.8061 ν d2 = 40.95
r 3 = -102.8477 d 3 = 0.6973
r 4 = 84.3099 d 4 = 6.0238 n d3 = 1.834 ν d3 = 37.17
r 5 = -50.71 d 5 = 3.0298 n d4 = 1.6445 ν d4 = 40.82
r 6 = 40.6619.

次に、本発明の条件（１）〜（２２）に関するパラメータの値を以下に示す。   Next, parameter values relating to the conditions (1) to (22) of the present invention are shown below.

ν Ｄ０ Ｄ１ Ｄ２ Ｄ１／Ｄ０ Ｄ２／Ｄ０
実施例１ 81.54 80.3315 29.515 28.225 0.3674 0.351357
実施例２ 94.99 71.576 34.591 5.947 0.4833 0.083087
実施例３ 81.54 83.466 27.5157 32.93 0.3297 0.394532
実施例４ 94.99 77.321 27.884 28.7476 0.3606 0.317796
実施例５ 94.99 83.376 39.27 5.032 0.471 0.060353
実施例６ 81.54 93.759 27.97 41.999 0.2983 0.447946
実施例７ 81.54 79.803 29.1842 26.39512 0.3657 0.330753
実施例８ 81.54 63.4755 26.8738 17.9844 0.4234 0.283328
実施例９ 94.99 66.452 39.018 3.977 0.5872 0.059852
実施例10 94.99 61.04348 33.3848 6.17636 0.5469 0.101179
81.54
実施例11 94.99 73.764 29.409 15.919 0.3987 0.2158
実施例12 94.99 75.158 28.665 15.941 0.3814 0.2121
81.54
実施例13 94.99 75.2961 28.5586 12.5866 0.3793 0.1672
81.54
実施例14 94.99 77.2194 29.1632 17.1602 0.3777 0.2222
実施例15 94.99 80.16533 32.48499 22.46977 0.4052 0.280292
。 ν D0 D1 D2 D1 / D0 D2 / D0
Example 1 81.54 80.3315 29.515 28.225 0.3674 0.351357
Example 2 94.99 71.576 34.591 5.947 0.4833 0.083087
Example 3 81.54 83.466 27.5157 32.93 0.3297 0.394532
Example 4 94.99 77.321 27.884 28.7476 0.3606 0.317796
Example 5 94.99 83.376 39.27 5.032 0.471 0.060353
Example 6 81.54 93.759 27.97 41.999 0.2983 0.447946
Example 7 81.54 79.803 29.1842 26.39512 0.3657 0.330753
Example 8 81.54 63.4755 26.8738 17.9844 0.4234 0.283328
Example 9 94.99 66.452 39.018 3.977 0.5872 0.059852
Example 10 94.99 61.04348 33.3848 6.17636 0.5469 0.101179
81.54
Example 11 94.99 73.764 29.409 15.919 0.3987 0.2158
Example 12 94.99 75.158 28.665 15.941 0.3814 0.2121
81.54
Example 13 94.99 75.2961 28.5586 12.5866 0.3793 0.1672
81.54
Example 14 94.99 77.2194 29.1632 17.1602 0.3777 0.2222
Example 15 94.99 80.16533 32.48499 22.46977 0.4052 0.280292
.

Ｇｎ１ Ｇｎ２ Ｇｎ１−Ｇｎ２ ＲＧ１ ＲＧ２ ＲＧ２／ＲＧ１
実施例１ 1.834 1.651 0.18 -6.7337 -8.7211 1.30
実施例２ 1.834 1.48749 0.34651 -29.0283 -10.6379 0.366466517
実施例３ 1.8061 1.48749 0.31861 -9.0363 -15.8132 1.749964034
実施例４ 1.7859 1.48749 0.29841 -8.3465 -6.4314 0.77055053
実施例５ 1.8061 1.48749 0.31861 -9.5638 -9.6255 1.006451411
実施例６ 1.8061 1.48749 0.31861 -7.2882 -9.2642 1.271123185
実施例７ 1.834 1.48749 0.34651 -8.3019 -7.8311 0.94329009
実施例８ 1.834 1.48749 0.34651 -12.2497 -6.9892 0.570560912
実施例９ 1.834 1.58913 0.24487 -9.4339 -9.9879 1.058724388
実施例10 1.7847 1.48749 0.29721 -4.9361 -4.9396 1.000709062
実施例11 1.834 1.48749 0.34651 -6.1723 -5.0915 0.824895096
実施例12 1.834 1.48749 0.34651 -5.2082 -6.0079 1.153546331
実施例13 1.834 1.618 0.216 -5.3778 -6.6576 1.237978355
実施例14 1.834 1.48749 0.34651 -4.6838 -5.936 1.267347026
実施例15 1.8061 1.58913 0.21697 -5.2346 -6.0829 1.162056318
。 Gn1 Gn2 Gn1-Gn2 RG1 RG2 RG2 / RG1
Example 1 1.834 1.651 0.18 -6.7337 -8.7211 1.30
Example 2 1.834 1.48749 0.34651 -29.0283 -10.6379 0.366466517
Example 3 1.8061 1.48749 0.31861 -9.0363 -15.8132 1.749964034
Example 4 1.7859 1.48749 0.29841 -8.3465 -6.4314 0.77055053
Example 5 1.8061 1.48749 0.31861 -9.5638 -9.6255 1.006451411
Example 6 1.8061 1.48749 0.31861 -7.2882 -9.2642 1.271123185
Example 7 1.834 1.48749 0.34651 -8.3019 -7.8311 0.94329009
Example 8 1.834 1.48749 0.34651 -12.2497 -6.9892 0.570560912
Example 9 1.834 1.58913 0.24487 -9.4339 -9.9879 1.058724388
Example 10 1.7847 1.48749 0.29721 -4.9361 -4.9396 1.000709062
Example 11 1.834 1.48749 0.34651 -6.1723 -5.0915 0.824895096
Example 12 1.834 1.48749 0.34651 -5.2082 -6.0079 1.153546331
Example 13 1.834 1.618 0.216 -5.3778 -6.6576 1.237978355
Example 14 1.834 1.48749 0.34651 -4.6838 -5.936 1.267347026
Example 15 1.8061 1.58913 0.21697 -5.2346 -6.0829 1.162056318
.

Ｆ１ Ｆ２ Ｆ３ Ｆ４
実施例１ 8.4106 -12.34432 36.92251 −
実施例２ 10.27707 -5.70948 25.89777 −
実施例３ 8.09895 -14.90398 44.97245 −
実施例４ 7.42656 -32.28803 125.13694 −
実施例５ 9.56192 -7.20438 42.86603 −
実施例６ 8.85362 -16.55933 43.88213 −
実施例７ 8.82291 -11.82088 36.6101 −
実施例８ 7.83829 -8.58263 27.99788 −
実施例９ 8.4167 -7.1584 51.8905 −
実施例10 8.3359 -6.0365 29.9000 −
実施例11 7.674 -9.377 19.897 -34.485
実施例12 7.483 -9.583 20.448 -36.545
実施例13 7.3117 -8.0783 23.2622 -44.7475
実施例14 7.5280 -8.7998 18.9541 -32.9122
実施例15 8.7524 -11.8772 19.1899 -26.4805
。 F1 F2 F3 F4
Example 1 8.4106 -12.34432 36.92251 −
Example 2 10.27707 -5.70948 25.89777 −
Example 3 8.09895 -14.90398 44.97245 −
Example 4 7.42656 -32.28803 125.13694-
Example 5 9.56192 -7.20438 42.86603-
Example 6 8.85362 -16.55933 43.88213 −
Example 7 8.82291 -11.82088 36.6101 −
Example 8 7.83829 -8.58263 27.99788-
Example 9 8.4167 -7.1584 51.8905-
Example 10 8.3359 -6.0365 29.9000 −
Example 11 7.674 -9.377 19.897 -34.485
Example 12 7.483 -9.583 20.448 -36.545
Example 13 7.3117 -8.0783 23.2622 -44.7475
Example 14 7.5280 -8.7998 18.9541 -32.9122
Example 15 8.7524 -11.8772 19.1899 -26.4805
.

Ｆ１／Ｆ２ Ｆ３／Ｆ２ Ｆ４／Ｆ２
実施例１ -0.68 -2.99 −
実施例２ -1.800001051 -4.535924462 −
実施例３ -0.543408539 -3.017479224 −
実施例４ -0.230009697 -3.875644937 −
実施例５ -1.327237042 -5.949995697 −
実施例６ -0.534660521 -2.649994293 −
実施例７ -0.746383518 -3.097070607 −
実施例８ -0.91327367 -3.262156239 −
実施例９ -1.175779504 -7.24889651 −
実施例10 -1.380916094 -4.953201358 −
実施例11 -0.818385411 -2.1220 3.6777
実施例12 -0.780861943 -2.1338 3.8136
実施例13 -0.905103797 -2.8796 5.5392
実施例14 -0.855473988 -2.1539 3.7401
実施例15 -0.736907689 -1.6157 2.2295
。 F1 / F2 F3 / F2 F4 / F2
Example 1 -0.68 -2.99-
Example 2 -1.800001051 -4.535924462-
Example 3 -0.543408539 -3.017479224-
Example 4 -0.230009697 -3.875644937-
Example 5 -1.327237042 -5.949995697-
Example 6 -0.534660521 -2.649994293-
Example 7 -0.746383518 -3.097070607-
Example 8 -0.91327367 -3.262156239-
Example 9 -1.175779504 -7.24889651-
Example 10 -1.380916094 -4.953201358-
Example 11 -0.818385411 -2.1220 3.6777
Example 12 -0.780861943 -2.1338 3.8136
Example 13 -0.905103797 -2.8796 5.5392
Example 14 -0.855473988 -2.1539 3.7401
Example 15 -0.736907689 -1.6157 2.2295
.

ＦＢ１ ＦＢ１／Ｄ１ νＰ νＮ νＰ−νＮ
実施例１ 3.3779 0.1144 94.99 46.57 48.42
実施例２ 0.6984 0.0202 94.99 52.32 42.67
実施例３ 1.499 0.0545 81.54 40.82 40.72
実施例４ 1.6504 0.0592 94.99 52.32 42.67
実施例５ 0.6986 0.0178 94.99 40.92 54.07
実施例６ 1.5012 0.0537 81.54 40.54 41.00
実施例７ 5.2815 0.1810 94.99 46.57 48.42
実施例８ 1.9017 0.0708 94.99 42.72 52.27
実施例９ 1.123 0.0288 94.99 46.57 48.42
実施例10 2.792 0.0836 94.99 46.57 48.42
実施例11 5.297 0.1801 94.99 37.16 57.83
実施例12 5.886 0.2053 94.99 37.16 57.83
実施例13 1.1925 0.0418 94.99 37.16 57.83
実施例14 6.293 0.2158 94.99 37.16 57.83
実施例15 5.9917 0.1844 94.99 37.16 57.83
。 FB1 FB1 / D1 νP νN νP-νN
Example 1 3.3779 0.1144 94.99 46.57 48.42
Example 2 0.6984 0.0202 94.99 52.32 42.67
Example 3 1.499 0.0545 81.54 40.82 40.72
Example 4 1.6504 0.0592 94.99 52.32 42.67
Example 5 0.6986 0.0178 94.99 40.92 54.07
Example 6 1.5012 0.0537 81.54 40.54 41.00
Example 7 5.2815 0.1810 94.99 46.57 48.42
Example 8 1.9017 0.0708 94.99 42.72 52.27
Example 9 1.123 0.0288 94.99 46.57 48.42
Example 10 2.792 0.0836 94.99 46.57 48.42
Example 11 5.297 0.1801 94.99 37.16 57.83
Example 12 5.886 0.2053 94.99 37.16 57.83
Example 13 1.1925 0.0418 94.99 37.16 57.83
Example 14 6.293 0.2158 94.99 37.16 57.83
Example 15 5.9917 0.1844 94.99 37.16 57.83
.

Ｆ４ Ｆ４ｂ ｜Ｆ４ｂ／Ｆ４｜
実施例１ − − −
実施例２ − − −
実施例３ − − −
実施例４ − − −
実施例５ − − −
実施例６ − − −
実施例７ − − −
実施例８ − − −
実施例９ − − −
実施例10 − − −
実施例11 -34.485 -26.0487 0.7554
実施例12 -36.545 -25.135 0.6878
実施例13 -44.7475 -73.7363 1.6478
実施例14 -32.9122 -23.9084 0.7264
実施例15 -26.4805 -20.2158 0.7634
。 F4 F4b | F4b / F4 |
Example 1---
Example 2---
Example 3---
Example 4---
Example 5---
Example 6---
Example 7---
Example 8---
Example 9---
Example 10---
Example 11 -34.485 -26.0487 0.7554
Example 12 -36.545 -25.135 0.6878
Example 13 -44.7475 -73.7363 1.6478
Example 14 -32.9122 -23.9084 0.7264
Example 15 -26.4805 -20.2158 0.7634
.

ν４ｎ ν４ｐ ν４ｎ−ν４ｐ Ｎ４ｐ
実施例１ − − − −
実施例２ − − − −
実施例３ − − − −
実施例４ − − − −
実施例５ − − − −
実施例６ − − − −
実施例７ − − − −
実施例８ − − − −
実施例９ − − − −
実施例10 − − − −
実施例11 70.23 26.52 43.71 1.7618
実施例12 70.23 26.52 43.71 1.7618
実施例13 64.14 25.42 38.72 1.8052
実施例14 70.23 26.52 43.71 1.7618
実施例15 70.23 26.52 43.71 1.76182
。 ν4n ν4p ν4n-ν4p N4p
Example 1----
Example 2----
Example 3----
Example 4----
Example 5----
Example 6----
Example 7----
Example 8----
Example 9----
Example 10----
Example 11 70.23 26.52 43.71 1.7618
Example 12 70.23 26.52 43.71 1.7618
Example 13 64.14 25.42 38.72 1.8052
Example 14 70.23 26.52 43.71 1.7618
Example 15 70.23 26.52 43.71 1.76182
.

ＷＤ ＷＤ／Ｆ１ Ｎ２Ｐ ν２Ｐ ν２Ｎ ν２Ｎ−ν２Ｐ
実施例１ 1.2514 0.15 1.81 25.42 58.9 33.48
実施例２ 1.2558 0.122194361 1.80518 − − −
実施例３ 1.2122 0.149673723 1.80518 25.42 64.14 38.72
実施例４ 0.9086 0.122344666 1.80518 25.42 59.84 34.42
実施例５ 0.8945 0.093548158 1.834 − − −
実施例６ 1.2393 0.139976642 1.80518 25.42 64.14 38.72
実施例７ 1.3286 0.150585238 1.80518 25.42 58.9 33.48
実施例８ 1.0793 0.137695849 1.80518 25.42 58.9 33.48
実施例９ 1.0976 0.130407404 − − − −
実施例10 1.2112 0.145299248 − − − −
実施例11 1.236 0.161063331 1.8052 25.42 52.32 26.9
実施例12 1.191 0.159160764 1.8052 25.42 52.32 26.9
実施例13 0.8165 0.111670337 1.8052 25.42 52.32 26.9
実施例14 1.0467 0.139040914 1.8052 25.42 52.32 26.9
実施例15 0.8747 0.099938303 1.80518 25.42 52.32 26.9
。 WD WD / F1 N2P ν2P ν2N ν2N-ν2P
Example 1 1.2514 0.15 1.81 25.42 58.9 33.48
Example 2 1.2558 0.122194361 1.80518 − − −
Example 3 1.2122 0.149673723 1.80518 25.42 64.14 38.72
Example 4 0.9086 0.122344666 1.80518 25.42 59.84 34.42
Example 5 0.8945 0.093548158 1.834 − − −
Example 6 1.2393 0.139976642 1.80518 25.42 64.14 38.72
Example 7 1.3286 0.150585238 1.80518 25.42 58.9 33.48
Example 8 1.0793 0.137695849 1.80518 25.42 58.9 33.48
Example 9 1.0976 0.130407404 − − − −
Example 10 1.2112 0.145299248 − − − −
Example 11 1.236 0.161063331 1.8052 25.42 52.32 26.9
Example 12 1.191 0.159160764 1.8052 25.42 52.32 26.9
Example 13 0.8165 0.111670337 1.8052 25.42 52.32 26.9
Example 14 1.0467 0.139040914 1.8052 25.42 52.32 26.9
Example 15 0.8747 0.099938303 1.80518 25.42 52.32 26.9
.

ν３ｐ ν３ｎ ν３ｐ−ν３ｎ ＮＡ ＮＡ ＮＡ
（最小） （中間） （最大）
実施例１ 70.23 33.52 36.71 0.25 0.4 0.6
実施例２ 81.54 33.52 48.02 0.25 0.4 0.55
実施例３ 70.23 33.52 36.71 0.25 0.4 0.6
実施例４ 81.54 40.92 40.62 0.25 0.4 0.55
実施例５ 81.54 33.52 48.02 0.25 0.4 0.55
実施例６ 70.23 33.52 36.71 0.25 0.4 0.6
実施例７ 81.54 33.52 48.02 0.25 0.4 0.6
実施例８ 81.54 33.52 48.02 0.25 0.4 0.6
実施例９ 81.54 26.52 55.02 0.25 0.4 0.7
実施例10 81.54 26.52 55.02 0.25 0.4 0.65
実施例11 81.54 26.52 55.02 0.25 0.4 0.65
実施例12 81.54 26.52 55.02 0.25 0.4 0.65
実施例13 94.99 26.29 68.7 0.4 0.65 0.77
実施例14 81.54 26.52 55.02 0.25 0.4 0.7
実施例15 81.54 26.52 55.02 0.25 0.4 0.8
。 ν3p ν3n ν3p-ν3n NA NA NA
(Minimum) (Medium) (Maximum)
Example 1 70.23 33.52 36.71 0.25 0.4 0.6
Example 2 81.54 33.52 48.02 0.25 0.4 0.55
Example 3 70.23 33.52 36.71 0.25 0.4 0.6
Example 4 81.54 40.92 40.62 0.25 0.4 0.55
Example 5 81.54 33.52 48.02 0.25 0.4 0.55
Example 6 70.23 33.52 36.71 0.25 0.4 0.6
Example 7 81.54 33.52 48.02 0.25 0.4 0.6
Example 8 81.54 33.52 48.02 0.25 0.4 0.6
Example 9 81.54 26.52 55.02 0.25 0.4 0.7
Example 10 81.54 26.52 55.02 0.25 0.4 0.65
Example 11 81.54 26.52 55.02 0.25 0.4 0.65
Example 12 81.54 26.52 55.02 0.25 0.4 0.65
Example 13 94.99 26.29 68.7 0.4 0.65 0.77
Example 14 81.54 26.52 55.02 0.25 0.4 0.7
Example 15 81.54 26.52 55.02 0.25 0.4 0.8
.

Ｌ（低倍） Ｌ（中間） Ｌ（高倍）
実施例１ 65.67566 80.4431 81.752938
実施例２ 74.39488 75.172 73.00223
実施例３ 67.09464 83.98958 84.8487
実施例４ 98.0052 95.3898 78.4004
実施例５ 93.1636 84.4413 90.06039
実施例６ 67.86056 95.1687 90.96281
実施例７ 67.21214 81.515 81.09949
実施例８ 55.95608 64.72488 64.87348
実施例９ 92.7305 85.71928 67.71988
実施例10 69.5227 69.2153 62.42469
実施例11 69.95 80.17 73.81
実施例12 68.94 79.88 76.52
実施例13 80.80 81.17 75.47
実施例14 68.21 80.37 78.44
実施例15 72.86544 81.24903 81.21003
。 L (low magnification) L (intermediate) L (high magnification)
Example 1 65.67566 80.4431 81.752938
Example 2 74.39488 75.172 73.00223
Example 3 67.09464 83.98958 84.8487
Example 4 98.0052 95.3898 78.4004
Example 5 93.1636 84.4413 90.06039
Example 6 67.86056 95.1687 90.96281
Example 7 67.21214 81.515 81.09949
Example 8 55.95608 64.72488 64.87348
Example 9 92.7305 85.71928 67.71988
Example 10 69.5227 69.2153 62.42469
Example 11 69.95 80.17 73.81
Example 12 68.94 79.88 76.52
Example 13 80.80 81.17 75.47
Example 14 68.21 80.37 78.44
Example 15 72.86544 81.24903 81.21003
.

Ｅ１ Ｅ（中間） Ｅ２ ｜Ｅ１−Ｅ２｜
実施例１ -543.049 − -206.882 −
実施例２ -1081.3 − -227.92 −
実施例３ -588.491 − -224.093 −
実施例４ -1584.8 − -300.8 −
実施例５ 6536.87 − -206.198 −
実施例６ -436.29 − -187.604 −
実施例７ -511.019 − -196.398 −
実施例８ -525.469 − -251.932 −
実施例９ -717.54 -143.78 -68.03 −
実施例10 -257.33 -138.604 -79.8085 −
実施例11 -69.7609 -65.3209 -66.6227 3.1382
実施例12 -66.7221 -66.7159 -63.6663 3.0558
実施例13 -58.5603 -57.8142 -54.8354 3.7249
実施例14 -62.8275 -63.3531 -52.9404 9.8871
実施例15 -60.4175 -54.4781 -54.7254 5.6921
。 E1 E (intermediate) E2 | E1-E2 |
Example 1 -543.049--206.882-
Example 2 -1081.3--227.92-
Example 3 -588.491 --224.093-
Example 4 -1584.8--300.8-
Example 5 6536.87 − −206.198 −
Example 6 -436.29--187.604-
Example 7 -511.019--196.398-
Example 8 -525.469--251.932-
Example 9 -717.54 -143.78 -68.03-
Example 10 -257.33 -138.604 -79.8085-
Example 11 -69.7609 -65.3209 -66.6227 3.1382
Example 12 -66.7221 -66.7159 -63.6663 3.0558
Example 13 -58.5603 -57.8142 -54.8354 3.7249
Example 14 -62.8275 -63.3531 -52.9404 9.8871
Example 15 -60.4175 -54.4781 -54.7254 5.6921
.

以上の本発明の顕微鏡ズーム対物レンズは、例えば次のように構成することができる。   The above-described microscope zoom objective lens of the present invention can be configured as follows, for example.

〔１〕 物体から順に、正のパワーを持つ第１レンズ群、負のパワーを持つ第２レンズ群、正のパワーを持つ第３レンズ群の少なくとも３つのレンズ群で構成され、低倍側から高倍側へ変倍する際に、前記第１レンズ群と前記第２レンズ群の間隔が大きくなり、前記第２レンズ群と前記第３レンズ群の間隔が小さくなるように、前記第２レンズ群と前記第３レンズ群が光軸上を移動し、第１レンズ群中に正レンズと負レンズで構成された正のパワーを持つ接合レンズを少なくとも１つ備え、前記正レンズのアッベ数をνとしたとき、前記正レンズが以下の条件（１）を満足することを特徴とする顕微鏡ズーム対物レンズ。     [1] In order from the object, the lens unit includes at least three lens groups including a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power. The second lens group so that the distance between the first lens group and the second lens group is large and the distance between the second lens group and the third lens group is small when zooming to the high magnification side. And the third lens group moves on the optical axis, and the first lens group includes at least one cemented lens having a positive power composed of a positive lens and a negative lens, and the Abbe number of the positive lens is ν The microscope zoom objective lens according to claim 1, wherein the positive lens satisfies the following condition (1).

ν＞８０ ・・・（１）
〔２〕 物体から順に、正のパワーを持つ第１レンズ群、負のパワーを持つ第２レンズ群、正のパワーを持つ第３レンズ群の少なくとも３つのレンズ群で構成され、低倍側から高倍側へ変倍する際に、前記第１レンズ群と前記第２レンズ群の間隔が大きくなり、前記第２レンズ群と前記第３レンズ群の間隔が小さくなるように、前記第２レンズ群と前記第３レンズ群が光軸上を移動し、前記第２レンズ群は２つのレンズ群を少なくとも有し、該２つのレンズ群は互いに凹面を向けて構成されたことを特徴とする顕微鏡ズーム対物レンズ。 ν> 80 (1)
[2] In order from the object, the lens unit includes at least three lens groups, a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power. The second lens group so that the distance between the first lens group and the second lens group is large and the distance between the second lens group and the third lens group is small when zooming to the high magnification side. And the third lens group moves on the optical axis, the second lens group has at least two lens groups, and the two lens groups are configured with their concave surfaces facing each other. Objective lens.

〔３〕 物体から順に、正のパワーを持つ第１レンズ群、負のパワーを持つ第２レンズ群、正のパワーを持つ第３レンズ群の少なくとも３つのレンズ群で構成され、低倍側から高倍側へ変倍する際に、前記第１レンズ群と前記第２レンズ群の間隔が大きくなり、前記第２レンズ群と前記第３レンズ群の間隔が小さくなるように、前記第２レンズ群と前記第３レンズ群が光軸上を移動し、前記第３レンズ群は２つの以上のレンズ群で構成され、正レンズと負レンズで構成された少なくとも１つの接合レンズを備えたことを特徴とする顕微鏡ズーム対物レンズ。     [3] In order from the object, the lens unit includes at least three lens groups, a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power. The second lens group so that the distance between the first lens group and the second lens group is large and the distance between the second lens group and the third lens group is small when zooming to the high magnification side. And the third lens group moves on the optical axis, and the third lens group includes two or more lens groups, and includes at least one cemented lens including a positive lens and a negative lens. Microscope zoom objective lens.

〔４〕 物体から順に、正のパワーを持つ第１レンズ群、負のパワーを持つ第２レンズ群、正のパワーを持つ第３レンズ群の少なくとも３つのレンズ群で構成され、低倍側から高倍側へ変倍する際に、前記第１レンズ群と前記第２レンズ群の間隔が大きくなり、前記第２レンズ群と前記第３レンズ群の間隔が小さくなるように、前記第２レンズ群と前記第３レンズ群が光軸上を移動し、前記第１レンズ群の最も物体側のレンズ群が物体側に凹面を向けた接合メニスカスレンズであって、前記接合レンズは、物体側から凹レンズ、凸レンズで構成されたことを特徴とする顕微鏡ズーム対物レンズ。     [4] In order from the object, the lens unit includes at least three lens groups, a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power. The second lens group so that the distance between the first lens group and the second lens group is large and the distance between the second lens group and the third lens group is small when zooming to the high magnification side. And the third lens group moves on the optical axis, and the lens group closest to the object side of the first lens group is a cemented meniscus lens having a concave surface facing the object side, and the cemented lens is a concave lens from the object side. A microscope zoom objective lens comprising a convex lens.

〔５〕 物体から順に、正のパワーを持つ第１レンズ群、負のパワーを持つ第２レンズ群、正のパワーを持つ第３レンズ群の少なくとも３つのレンズ群で構成され、前記第１レンズ群は複数のレンズ群で構成され、低倍側から高倍側へ変倍する際に、前記第１レンズ群と前記第２レンズ群の間隔が大きくなり、前記第２レンズ群と前記第３レンズ群の間隔が小さくなるように前記第２レンズ群と前記第３レンズ群が光軸上を移動し、以下の条件（２）、（３）を満足することを特徴とする顕微鏡ズーム対物レンズ。     [5] In order from the object, the first lens unit includes at least three lens units including a first lens unit having positive power, a second lens unit having negative power, and a third lens unit having positive power. The group is composed of a plurality of lens groups, and when changing the magnification from the low magnification side to the high magnification side, the distance between the first lens group and the second lens group becomes large, and the second lens group and the third lens 2. The microscope zoom objective lens according to claim 1, wherein the second lens group and the third lens group move on the optical axis so as to reduce the distance between the groups, and satisfy the following conditions (2) and (3).

０．２５≦Ｄ１／Ｄ０≦０．７ ・・・（２）
０．０５≦Ｄ２／Ｄ０≦０．５ ・・・（３）
ただし、Ｄ１は、前記第１レンズ群の全長、
Ｄ２は、前記第２レンズ群の低倍側から高倍側への移動量、
Ｄ０は、高倍側の顕微鏡ズーム対物レンズの全長、
である。 0.25 ≦ D1 / D0 ≦ 0.7 (2)
0.05 ≦ D2 / D0 ≦ 0.5 (3)
Where D1 is the total length of the first lens group,
D2 is the amount of movement of the second lens group from the low magnification side to the high magnification side,
D0 is the total length of the microscope zoom objective lens on the high magnification side,
It is.

〔６〕 第４レンズ群をさらに備え、前記第１レンズ群は接合レンズを含み、低倍側から高倍側へ変倍する際に、前記第４レンズ群も光軸に沿って移動し、次の条件（２’），（３’）を満足することを特徴とする上記５記載の顕微鏡ズーム対物レンズ。     [6] A fourth lens group is further provided, and the first lens group includes a cemented lens, and when the magnification is changed from the low magnification side to the high magnification side, the fourth lens group also moves along the optical axis. 6. The microscope zoom objective lens according to 5 above, wherein the following conditions (2 ′) and (3 ′) are satisfied.

０．２５≦Ｄ１／Ｄ０≦０．５ ・・・（２’）
０．１５≦Ｄ２／Ｄ０≦０．３ ・・・（３’）
〔７〕 前記第１レンズ群に少なくとも１つの非球面を設け、該非球面は凸面に設けられ、次の条件（２），（３" ）を満足することを特徴とする上記５記載の顕微鏡ズーム対物レンズ。 0.25 ≦ D1 / D0 ≦ 0.5 (2 ′)
0.15 ≦ D2 / D0 ≦ 0.3 (3 ′)
[7] The microscope zoom as described in 5 above, wherein the first lens group is provided with at least one aspheric surface, and the aspheric surface is provided on a convex surface, and satisfies the following conditions (2) and (3 ”): Objective lens.

０．２５≦Ｄ１／Ｄ０≦０．７ ・・・（２）
０．０５≦Ｄ２／Ｄ０≦０．３５ ・・・（３”）
〔８〕 前記第１レンズ群の物体側に凹面を向けた前記接合メニスカスレンズの最も物体側の曲率半径をＲＧ１、前記接合メニスカスレンズの最も第２レンズ群側の曲率半径をＲＧ２、凹レンズの屈折率をＧｎ１、凸レンズの屈折率をＧｎ２としたとき、以下の条件（４）、（５）を満足することを特徴とする上記４記載の顕微鏡ズーム対物レンズ。 0.25 ≦ D1 / D0 ≦ 0.7 (2)
0.05 ≦ D2 / D0 ≦ 0.35 (3 ″)
[8] The radius of curvature of the cemented meniscus lens having the concave surface facing the object side of the first lens group is RG1, the radius of curvature of the cemented meniscus lens is RG2, and the radius of curvature of the cemented meniscus lens is refracted by the concave lens. 5. The microscope zoom objective lens according to 4 above, wherein the following conditions (4) and (5) are satisfied, where Gn1 is the refractive index and Gn2 is the refractive index of the convex lens.

Ｇｎ１−Ｇｎ２≧０．１５ ・・・（４）
０．３≦ＲＧ２／ＲＧ１≦２. ０ ・・・（５）
〔９〕 前記顕微鏡ズーム対物レンズは３群構成であって、前記第１レンズ群の物体から軸上光線高が最も高くなるレンズ群までを前側第１レンズ群、軸上光線高が最も高いレンズ群から最も第２レンズ群側までのレンズ群を後側第１レンズ群とし、前側第１レンズ群は、物体側から順に、物体側に凹面を向けた接合メニスカスレンズ、正のパワーを持つ単レンズ、凹レンズと凸レンズで構成された接合レンズ、正のパワーを持つ凸レンズの少なくとも４つのレンズ群で構成され、後側第１レンズ群中に、物体側から凹レンズと凸レンズで接合された正のパワーの接合レンズと、第２レンズ群側に凹面を向けたメニスカスレンズとを少なくとも１つ備えたことを特徴とする上記１から４の何れか１項記載の顕微鏡ズーム対物レンズ。 Gn1-Gn2 ≧ 0.15 (4)
0.3 ≦ RG2 / RG1 ≦ 2.0 (5)
[9] The microscope zoom objective lens has a three-group configuration, and the first lens group from the object of the first lens group to the lens group with the highest axial ray height, the lens with the highest axial ray height. The lens group from the first lens group to the second lens group side is the rear first lens group, and the front first lens group is a cemented meniscus lens having a concave surface facing the object side in order from the object side, and a single lens having positive power. Positive power composed of at least four lens groups: a lens, a cemented lens composed of a concave lens and a convex lens, and a convex lens having a positive power, and cemented by a concave lens and a convex lens from the object side in the first rear lens group. 5. The microscope zoom objective lens according to claim 1, comprising at least one cemented lens and a meniscus lens having a concave surface facing the second lens group.

〔１０〕 前記第１レンズ群の焦点距離をＦ１、前記第２レンズ群の焦点距離をＦ２としたとき、以下の条件（６）を満足することを特徴とする上記１から４の何れか１項記載の顕微鏡ズーム対物レンズ。     [10] Any one of 1 to 4 above, wherein the following condition (6) is satisfied, where F1 is a focal length of the first lens group and F2 is a focal length of the second lens group: The microscope zoom objective lens according to the item.

−２．５≦Ｆ１／Ｆ２≦―０．２ ・・・（６）
〔１１〕 前記第２レンズ群の焦点距離をＦ２、前記第３レンズ群の焦点距離をＦ３としたとき、以下の条件（７）を満足することを特徴とする上記１０記載の顕微鏡ズーム対物レンズ。 −2.5 ≦ F1 / F2 ≦ −0.2 (6)
[11] The microscope zoom objective lens as described in 10 above, wherein the following condition (7) is satisfied, where F2 is a focal length of the second lens group and F3 is a focal length of the third lens group. .

−７．５≦Ｆ３／Ｆ２≦−１．５ ・・・（７）
〔１２〕 前記顕微鏡ズーム対物レンズは３群構成であって、以下の条件（７' ）を満足することを特徴とする上記１１記載の顕微鏡ズーム対物レンズ。 −7.5 ≦ F3 / F2 ≦ −1.5 (7)
[12] The microscope zoom objective lens according to [11], wherein the microscope zoom objective lens has a three-group configuration and satisfies the following condition (7 ′).

−６．５≦Ｆ３／Ｆ２≦−２．０ ・・・（７’）
〔１３〕 前記顕微鏡ズーム対物レンズは３群構成であって、低倍から高倍へと変倍する際に、作動距離が短くなるように、前記第１レンズ群は前記第２レンズ群とは反対方向へ光軸に沿って移動することを特徴とする上記１から４の何れか１項記載の顕微鏡ズーム対物レンズ。 −6.5 ≦ F3 / F2 ≦ −2.0 (7 ′)
[13] The microscope zoom objective lens has a three-group configuration, and the first lens group is opposite to the second lens group so that the working distance is shortened when zooming from low magnification to high magnification. 5. The microscope zoom objective lens according to claim 1, wherein the microscope zoom objective lens moves in the direction along the optical axis.

〔１４〕 以下の条件（８）を満足することを特徴とする上記５記載の顕微鏡ズーム対物レンズ。     [14] The microscope zoom objective lens as described in 5 above, wherein the following condition (8) is satisfied.

０＜ＦＢ1 ／Ｄ1 ≦０．４ ・・・（８）
ただし、ＦＢ1 は、前記第１レンズ群の前記第２レンズ群側に最も近いレンズ面から、前記第１レンズ群の後側焦点位置までの距離である。 0 <FB1 / D1 ≦ 0.4 (8)
Where FB1 is the distance from the lens surface closest to the second lens group side of the first lens group to the rear focal position of the first lens group.

〔１５〕 前記顕微鏡ズーム対物レンズは４群構成であって、第２レンズ群の焦点距離をＦ２、第３レンズ群の焦点距離をＦ３、第４レンズ群の焦点距離をＦ４としたときに、以下の条件（９）、（１０）を満足することを特徴とする上記５又は１４記載の顕微鏡ズーム対物レンズ。     [15] The microscope zoom objective lens has a four-group configuration, where the focal length of the second lens group is F2, the focal length of the third lens group is F3, and the focal length of the fourth lens group is F4. 15. The microscope zoom objective lens as described in 5 or 14 above, wherein the following conditions (9) and (10) are satisfied.

−３≦Ｆ３／Ｆ２≦−１．５ ・・・（９）
３≦Ｆ４／Ｆ２≦６ ・・・（１０）
〔１６〕 前記第１レンズ群の最も物体側のレンズ群は、物体側に凹面を向けた負レンズと正レンズの接合メニスカスレンズで構成されたことを特徴とする上記１５記載の顕微鏡ズーム対物レンズ。 −3 ≦ F3 / F2 ≦ −1.5 (9)
3 ≦ F4 / F2 ≦ 6 (10)
[16] The microscope zoom objective lens according to [15], wherein the lens unit closest to the object side of the first lens unit is composed of a cemented meniscus lens composed of a negative lens having a concave surface facing the object side and a positive lens. .

〔１７〕 前記第１レンズ群は複数の接合レンズ群を備えており、その接合レンズ群の正レンズのアッベ数をνＰ、接合レンズ群の負レンズのアッベ数をνＮとするとき、第１レンズ群中の何れかの接合レンズ群が以下の条件（１１）を満足することを特徴とする上記１６記載の顕微鏡ズーム対物レンズ。     [17] The first lens group includes a plurality of cemented lens groups, and when the Abbe number of the positive lens of the cemented lens group is νP and the Abbe number of the negative lens of the cemented lens group is νN, the first lens 17. The microscope zoom objective lens according to 16, wherein any cemented lens group in the group satisfies the following condition (11).

νＰ−νＮ≧３５ ・・・（１１）
〔１８〕 前記第２レンズ群は、互いに凹面を向けた少なくとも２つのレンズ群で構成されたことを特徴とする上記１５記載の顕微鏡ズーム対物レンズ。 νP−νN ≧ 35 (11)
[18] The microscope zoom objective lens described in [15], wherein the second lens group includes at least two lens groups having concave surfaces facing each other.

〔１９〕 前記第４レンズ群は、少なくとも第３レンズ群側に凸面を向けた正レンズと負レンズの接合メニスカスレンズと、第３レンズ群側に凹面を向けた負のパワーを持つレンズ群とで構成されたことを特徴とする上記１５記載の顕微鏡ズーム対物レンズ。     [19] The fourth lens group includes a cemented meniscus lens of at least a positive lens having a convex surface facing the third lens group and a negative lens, and a lens group having negative power having a concave surface facing the third lens group. 16. The microscope zoom objective lens according to the above 15, characterized by comprising:

〔２０〕 前記第４レンズ群は、第３レンズ群側から、正レンズと負レンズで構成された接合メニスカスレンズと、両凹レンズと正メニスカスレンズで構成された接合負レンズとを備え、以下の条件（１２）、（１３）、（１４）を満足することを特徴とする上記１９記載の顕微鏡ズーム対物レンズ。     [20] The fourth lens group includes, from the third lens group side, a cemented meniscus lens composed of a positive lens and a negative lens, and a cemented negative lens composed of a biconcave lens and a positive meniscus lens. 20. The microscope zoom objective lens as described in 19 above, wherein the conditions (12), (13) and (14) are satisfied.

０．５≦｜Ｆ４ｂ／Ｆ４｜≦２ ・・・（１２）
ν４ｎ−ν４ｐ≧２５ ・・・（１３）
Ｎ４ｐ≧１．６８ ・・・（１４）
ただし、Ｆ４は、前記第４レンズ群の焦点距離、
Ｆ４ｂは、前記接合負レンズの焦点距離、
ν４ｎは、前記接合負レンズの両凹レンズのアッベ数、
ν４ｐは、前記接合負レンズの正メニスカスレンズのアッベ数、
Ｎ４ｐは、前記接合負レンズの正メニスカスレンズの屈折率、
である。 0.5 ≦ | F4b / F4 | ≦ 2 (12)
ν4n−ν4p ≧ 25 (13)
N4p ≧ 1.68 (14)
Where F4 is the focal length of the fourth lens group,
F4b is the focal length of the cemented negative lens,
ν4n is the Abbe number of the biconcave lens of the cemented negative lens,
ν4p is the Abbe number of the positive meniscus lens of the cemented negative lens,
N4p is the refractive index of the positive meniscus lens of the cemented negative lens,
It is.

〔２１〕 前記第１レンズ群の後側焦点位置近傍に、開口絞りを備えていることを特徴とする上記１から５、１４の何れか１項記載の顕微鏡ズーム対物レンズ。     [21] The microscope zoom objective lens according to any one of [1] to [5], wherein an aperture stop is provided in the vicinity of a rear focal position of the first lens group.

〔２２〕 前記第１レンズ群と物体の間隔をＷＤ、前記第１レンズ群の焦点距離をＦ1 としたとき、以下の条件（１５）を満足することを特徴とする上記１から５、１４、１５の何れか１項記載の顕微鏡ズーム対物レンズ。     [22] The above 1 to 5, 14, wherein the following condition (15) is satisfied, where WD is the distance between the first lens group and the object, and F1 is the focal length of the first lens group: The microscope zoom objective lens according to any one of 15.

ＷＤ≦０．２５Ｆ1 ・・・（１５）
〔２３〕 以下の条件（１５' ）を満足することを特徴とする上記１から４の何れか１項記載の顕微鏡ズーム対物レンズ。 WD ≦ 0.25F1 (15)
[23] The microscope zoom objective lens as described in any one of 1 to 4 above, wherein the following condition (15 ′) is satisfied.

ＷＤ≦０．２Ｆ１ ・・・（１５' ）
〔２４〕 前記第２レンズ群は、少なくとも１つの正レンズと負レンズで構成された接合メニスカスレンズを備え、前記正レンズの屈折率をＮ２Ｐ、アッベ数をν２Ｐ、前記負レンズのアッベ数をν２Ｎとしたとき、以下の条件（１６）、（１７）を満足することを特徴とする上記１から４、１８の何れか１項記載の顕微鏡ズーム対物レンズ。 WD ≦ 0.2F1 (15 ′)
[24] The second lens group includes a cemented meniscus lens including at least one positive lens and a negative lens, the refractive index of the positive lens is N2P, the Abbe number is ν2P, and the Abbe number of the negative lens is ν2N. The microscope zoom objective lens according to any one of 1 to 4 and 18, wherein the following conditions (16) and (17) are satisfied:

Ｎ２Ｐ≧１．６５ ・・・（１６）
ν２Ｎ−ν２Ｐ≧２０ ・・・（１７）
〔２５〕 以下の条件（１６）、（１７' ）を満足する上記１から４の何れか１項記載の顕微鏡ズーム対物レンズ。 N2P ≧ 1.65 (16)
ν2N−ν2P ≧ 20 (17)
[25] The microscope zoom objective lens according to any one of 1 to 4, which satisfies the following conditions (16) and (17 ′):

Ｎ２Ｐ≧１．６５ ・・・（１６）
ν２Ｎ−ν２Ｐ≧２５ ・・・（１７’）
〔２６〕 以下の条件（１６' ）、（１７）を満足する上記１８記載の顕微鏡ズーム対物レンズ。 N2P ≧ 1.65 (16)
ν2N−ν2P ≧ 25 (17 ′)
[26] The microscope zoom objective lens as described in 18 above, which satisfies the following conditions (16 ′) and (17):

Ｎ２Ｐ≧１．６８ ・・・（１６’）
ν２Ｎ−ν２Ｐ≧２０ ・・・（１７）
〔２６〕 前記第３レンズ群のアッベ数が最も高い正レンズのアッベ数をν３ｐ、アッベ数が最も低い負レンズのアッベ数をν３ｎとしたとき、以下の条件（１８）を満足することを特徴とする上記１から４、１５の何れか１項記載の顕微鏡ズーム対物レンズ。 N2P ≧ 1.68 (16 ′)
ν2N−ν2P ≧ 20 (17)
[26] The following condition (18) is satisfied when the Abbe number of the positive lens having the highest Abbe number in the third lens group is ν3p and the Abbe number of the negative lens having the lowest Abbe number is ν3n. The microscope zoom objective lens according to any one of 1 to 4, 15 above.

ν３ｐ−ν３ｎ≧３５ ・・・（１８）
〔２７〕 変倍比が３以上であることを特徴とする上記１から５、１４、１５の何れか１項記載の顕微鏡ズーム対物レンズ。 ν3p−ν3n ≧ 35 (18)
[27] The microscope zoom objective lens described in any one of 1 to 5, 14, 15 above, wherein the zoom ratio is 3 or more.

〔２８〕 物体から順に、正のパワーを持つ第１レンズ群、負のパワーを持つ第２レンズ群、正のパワーを持つ第３レンズ群の少なくとも３つのレンズ群で構成され、少なくとも１つの非球面を備え、以下の条件（１９）を満足することを特徴とする顕微鏡ズーム対物レンズ。     [28] In order from the object, the lens unit includes at least three lens groups including a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power. A microscope zoom objective lens comprising a spherical surface and satisfying the following condition (19):

ＮＡ≧０．５ ・・・（１９）
ただし、ＮＡは高倍側の顕微鏡ズーム対物レンズの開口数である。 NA ≧ 0.5 (19)
Here, NA is the numerical aperture of the high-magnification side microscope zoom objective lens.

〔２９〕 前記第１レンズ群又は第３レンズ群中に、少なくとも１つの非球面を備えたことを特徴とする上記５又は１４記載の顕微鏡ズーム対物レンズ。     [29] The microscope zoom objective lens as described in 5 or 14 above, wherein at least one aspheric surface is provided in the first lens group or the third lens group.

〔３０〕 前記顕微鏡ズーム対物レンズの作動距離をＷＤとしたとき、以下の条件（２０）を満足することを特徴とする上記１〜５、１４、１５、２８、２９の何れか１項記載の顕微鏡ズーム対物レンズ。     [30] The method according to any one of 1 to 5, 14, 15, 28, and 29, wherein the following condition (20) is satisfied when a working distance of the microscope zoom objective lens is WD: Microscope zoom objective lens.

０．５≦ＷＤ≦１．５ （ｍｍ） ・・・（２０）
〔３１〕 前記顕微鏡ズーム対物レンズの最も像側にあるレンズ群の像側に最も近い面から物体までの距離をＬとするとき、以下の条件（２１）を満足することを特徴とする上記１〜５、１４、１５、２８、２９の何れか１項記載の顕微鏡ズーム対物レンズ。 0.5 ≦ WD ≦ 1.5 (mm) (20)
[31] The above-mentioned condition (21) is satisfied, where L is a distance from the surface closest to the image side of the lens group closest to the image side of the microscope zoom objective lens to the object. The microscope zoom objective lens according to any one of -5, 14, 15, 28, and 29.

５５≦Ｌ≦１１０ （ｍｍ） ・・・（２１）
〔３２〕 前記顕微鏡ズーム対物レンズは４群構成であって、最も低倍側での射出瞳位置をＥ１、最も高倍側での射出瞳位置をＥ２としたとき、以下の条件（２２）を満足することを特徴とする上記１〜５、１４、１５、２８、２９の何れか１項記載の顕微鏡ズーム対物レンズ。 55 ≦ L ≦ 110 (mm) (21)
[32] The microscope zoom objective lens has a four-group configuration, and satisfies the following condition (22) when the exit pupil position on the lowest magnification side is E1 and the exit pupil position on the highest magnification side is E2. 30. The microscope zoom objective lens according to any one of 1 to 5, 14, 15, 28, and 29 described above.

｜Ｅ１−Ｅ２｜≦１５ （ｍｍ） ・・・（２２）
〔３３〕 非球面が設けられたレンズ面の面形状が、光軸から離れるに従って曲率半径が大きくなるような面形状であることを特徴とする上記５又は１４記載の顕微鏡ズーム対物レンズ。 | E1-E2 | ≦ 15 (mm) (22)
[33] The microscope zoom objective lens as described in 5 or 14 above, wherein the surface shape of the lens surface provided with the aspherical surface is such that the radius of curvature increases with distance from the optical axis.

〔３４〕 前記第２レンズ群は２つのレンズ群を少なくとも有し、該２つのレンズ群は互いに凹面を向けて構成されていることを特徴とする上記３３記載の顕微鏡ズーム対物レンズ。     [34] The microscope zoom objective lens as set forth in [33], wherein the second lens group has at least two lens groups, and the two lens groups are configured with their concave surfaces facing each other.

〔３５〕 条件（１６）、（１７）を満足することを特徴とする上記３３記載の顕微鏡ズーム対物レンズ。     [35] The microscope zoom objective lens as described in 33 above, wherein the conditions (16) and (17) are satisfied.

〔３６〕 前記第４レンズ群を備え、該第４レンズ群は、第３レンズ群側に凸面を向けた正レンズと負レンズの接合メニスカスレンズと、第３レンズ群側に凹面を向けたレンズ群で少なくとも構成され、条件（１２）、（１３）を満足することを特徴とする上記３３記載の顕微鏡ズーム対物レンズ。     [36] The fourth lens group includes: a cemented meniscus lens of a positive lens and a negative lens having a convex surface facing the third lens group, and a lens having a concave surface facing the third lens group. 34. The microscope zoom objective lens according to 33, wherein the microscope zoom objective lens includes at least a group and satisfies the conditions (12) and (13).

以上の説明から明らかなように、本発明によると、５５ｍｍから１１０ｍｍ程度の長さで、３つのレンズ群で、低倍から高倍にわたって収差性能に優れた１０倍から４０倍、開口数が０．６の顕微鏡ズーム対物レンズを提供することができる。   As is apparent from the above description, according to the present invention, the length is about 55 mm to 110 mm, and the three lens groups have excellent aberration performance from low magnification to high magnification. Six microscope zoom objectives can be provided.

また、本発明によると、物体側から、正、負、正、負のパワーを持つ４つのレンズ群で、全長が８０ｍｍ程度とコンパクトでありながら、従来にない変倍比が４〜5 倍と高変倍で高開口数を備え、低倍から高倍にわたって収差性能に優れた顕微鏡ズーム対物レンズを提供することができる。しかも、射出瞳が略一定の位置に設定されているので、瞳の変動による周辺減光やシステム性の欠点がなく、システム性に優れた顕微鏡ズーム対物レンズが提供できる。   Further, according to the present invention, from the object side, the four lens groups having positive, negative, positive, and negative powers are compact with an overall length of about 80 mm, and an unillustrated zoom ratio is 4 to 5 times. A microscope zoom objective lens having a high zoom ratio, a high numerical aperture, and excellent aberration performance from low to high magnification can be provided. In addition, since the exit pupil is set at a substantially constant position, there can be provided a microscope zoom objective lens that is free from peripheral dimming and system defects due to pupil fluctuations and has excellent system characteristics.

本発明の顕微鏡ズーム対物レンズの実施例１の構成と光路を示す断面図である。It is sectional drawing which shows the structure and optical path of Example 1 of the microscope zoom objective lens of this invention. 本発明の顕微鏡ズーム対物レンズの実施例２の図１と同様の断面図である。It is sectional drawing similar to FIG. 1 of Example 2 of the microscope zoom objective lens of this invention. 本発明の顕微鏡ズーム対物レンズの実施例３の図１と同様の断面図である。It is sectional drawing similar to FIG. 1 of Example 3 of the microscope zoom objective lens of this invention. 本発明の顕微鏡ズーム対物レンズの実施例４の図１と同様の断面図である。It is sectional drawing similar to FIG. 1 of Example 4 of the microscope zoom objective lens of this invention. 本発明の顕微鏡ズーム対物レンズの実施例５の図１と同様の断面図である。It is sectional drawing similar to FIG. 1 of Example 5 of the microscope zoom objective lens of this invention. 本発明の顕微鏡ズーム対物レンズの実施例６の図１と同様の断面図である。It is sectional drawing similar to FIG. 1 of Example 6 of the microscope zoom objective lens of this invention. 本発明の顕微鏡ズーム対物レンズの実施例７の図１と同様の断面図である。It is sectional drawing similar to FIG. 1 of Example 7 of the microscope zoom objective lens of this invention. 本発明の顕微鏡ズーム対物レンズの実施例８の図１と同様の断面図である。It is sectional drawing similar to FIG. 1 of Example 8 of the microscope zoom objective lens of this invention. 本発明の顕微鏡ズーム対物レンズの実施例９の図１と同様の断面図である。It is sectional drawing similar to FIG. 1 of Example 9 of the microscope zoom objective lens of this invention. 本発明の顕微鏡ズーム対物レンズの実施例１０の図１と同様の断面図である。It is sectional drawing similar to FIG. 1 of Example 10 of the microscope zoom objective lens of this invention. 本発明の顕微鏡ズーム対物レンズの実施例１１の図１と同様の断面図である。It is sectional drawing similar to FIG. 1 of Example 11 of the microscope zoom objective lens of this invention. 本発明の顕微鏡ズーム対物レンズの実施例１２の図１と同様の断面図である。It is sectional drawing similar to FIG. 1 of Example 12 of the microscope zoom objective lens of this invention. 本発明の顕微鏡ズーム対物レンズの実施例１３の図１と同様の断面図である。It is sectional drawing similar to FIG. 1 of Example 13 of the microscope zoom objective lens of this invention. 本発明の顕微鏡ズーム対物レンズの実施例１４の図１と同様の断面図である。It is sectional drawing similar to FIG. 1 of Example 14 of the microscope zoom objective lens of this invention. 本発明の顕微鏡ズーム対物レンズの実施例１５の図１と同様の断面図である。It is sectional drawing similar to FIG. 1 of Example 15 of the microscope zoom objective lens of this invention. 本発明の実施例１〜１５の顕微鏡ズーム対物レンズの後方に配置する結像レンズの構成と光路を示す断面図である。It is sectional drawing which shows the structure and optical path of the imaging lens arrange | positioned behind the microscope zoom objective lens of Examples 1-15 of this invention. 実施例１の収差図である。FIG. 6 is an aberration diagram of Example 1. 実施例２の収差図である。FIG. 6 is an aberration diagram of Example 2. 実施例３の収差図である。FIG. 6 is an aberration diagram of Example 3. 実施例４の収差図である。FIG. 6 is an aberration diagram of Example 4. 実施例５の収差図である。FIG. 6 is an aberration diagram of Example 5. 実施例６の収差図である。FIG. 6 is an aberration diagram of Example 6. 実施例７の収差図である。FIG. 10 is an aberration diagram of Example 7. 実施例８の収差図である。FIG. 10 is an aberration diagram of Example 8. 実施例９の収差図である。FIG. 10 is an aberration diagram of Example 9. 実施例１０の収差図である。FIG. 10 is an aberration diagram of Example 10. 実施例１１の収差図である。FIG. 10 is an aberration diagram of Example 11. 実施例１２の収差図である。FIG. 10 is an aberration diagram of Example 12. 実施例１３の収差図である。FIG. 14 is an aberration diagram of Example 13. 実施例１４の収差図である。FIG. 16 is an aberration diagram of Example 14; 実施例１５の収差図である。FIG. 18 is an aberration diagram of Example 15.

符号の説明Explanation of symbols

Ｇ１…第１レンズ群
Ｇ２…第２レンズ群
Ｇ３…第３レンズ群
Ｇ５…第３レンズ群
Ｓ …開口絞り G1 ... 1st lens group G2 ... 2nd lens group G3 ... 3rd lens group G5 ... 3rd lens group S ... Aperture stop

Claims (13)

物体から順に、正のパワーを持つ第１レンズ群、負のパワーを持つ第２レンズ群、正のパワーを持つ第３レンズ群の少なくとも３つのレンズ群で構成され、低倍側から高倍側へ変倍する際に、前記第１レンズ群と前記第２レンズ群の間隔が大きくなり、前記第２レンズ群と前記第３レンズ群の間隔が小さくなるように、前記第２レンズ群と前記第３レンズ群が光軸上を移動し、前記第２レンズ群は２つのレンズ群を少なくとも有し、該２つのレンズ群は互いに凹面を向けて構成され、前記第１レンズ群の焦点距離をＦ１、前記第２レンズ群の焦点距離をＦ２、前記第３レンズ群の焦点距離をＦ３としたとき、以下の条件（６）、（７）を満足することを特徴とする顕微鏡ズーム対物レンズ。
−２．５≦Ｆ１／Ｆ２≦―０．２ ・・・（６）
−７．５≦Ｆ３／Ｆ２≦−１．５ ・・・（７） In order from the object, it is composed of at least three lens groups, a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power, from the low magnification side to the high magnification side. When zooming, the distance between the first lens group and the second lens group is increased, and the distance between the second lens group and the third lens group is decreased. Three lens groups move on the optical axis, the second lens group has at least two lens groups, and the two lens groups are configured with their concave surfaces facing each other, and the focal length of the first lens group is F1. A microscope zoom objective lens satisfying the following conditions (6) and (7), where F2 is the focal length of the second lens group and F3 is the focal length of the third lens group:
−2.5 ≦ F1 / F2 ≦ −0.2 (6)
−7.5 ≦ F3 / F2 ≦ −1.5 (7) 物体から順に、正のパワーを持つ第１レンズ群、負のパワーを持つ第２レンズ群、正のパワーを持つ第３レンズ群の少なくとも３つのレンズ群で構成され、低倍側から高倍側へ変倍する際に、前記第１レンズ群と前記第２レンズ群の間隔が大きくなり、前記第２レンズ群と前記第３レンズ群の間隔が小さくなるように、前記第２レンズ群と前記第３レンズ群が光軸上を移動し、前記第１レンズ群の最も物体側のレンズ群が物体側に凹面を向けた接合メニスカスレンズであって、前記接合レンズは、物体側から凹レンズ、凸レンズで構成され、前記第１レンズ群の焦点距離をＦ１、前記第２レンズ群の焦点距離をＦ２、前記第３レンズ群の焦点距離をＦ３としたとき、以下の条件（６）、（７）を満足することを特徴とする顕微鏡ズーム対物レンズ。
−２．５≦Ｆ１／Ｆ２≦―０．２ ・・・（６）
−７．５≦Ｆ３／Ｆ２≦−１．５ ・・・（７） In order from the object, it is composed of at least three lens groups, a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power, from the low magnification side to the high magnification side. When zooming, the distance between the first lens group and the second lens group is increased, and the distance between the second lens group and the third lens group is decreased. Three lens groups move on the optical axis, and the lens group closest to the object side of the first lens group is a cemented meniscus lens having a concave surface facing the object side. The cemented lens is a concave lens and a convex lens from the object side. When the focal length of the first lens group is F1, the focal length of the second lens group is F2, and the focal length of the third lens group is F3, the following conditions (6) and (7) are satisfied. Satisfactory microscope zoom objective 'S.
−2.5 ≦ F1 / F2 ≦ −0.2 (6)
−7.5 ≦ F3 / F2 ≦ −1.5 (7) 物体から順に、正のパワーを持つ第１レンズ群、負のパワーを持つ第２レンズ群、正のパワーを持つ第３レンズ群の少なくとも３つのレンズ群で構成され、低倍側から高倍側へ変倍する際に、前記第１レンズ群と前記第２レンズ群の間隔が大きくなり、前記第２レンズ群と前記第３レンズ群の間隔が小さくなるように前記第２レンズ群と前記第３レンズ群が光軸上を移動し、以下の条件（２）、（３）を満足することを特徴とする請求項１又は２記載の顕微鏡ズーム対物レンズ。
０．２５≦Ｄ１／Ｄ０≦０．７ ・・・（２）
０．０５≦Ｄ２／Ｄ０≦０．５ ・・・（３）
ただし、Ｄ１は、前記第１レンズ群の全長、
Ｄ２は、前記第２レンズ群の低倍側から高倍側への移動量、
Ｄ０は、高倍側の顕微鏡ズーム対物レンズの全長、
である。 In order from the object, it is composed of at least three lens groups, a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power, from the low magnification side to the high magnification side. When zooming, the distance between the first lens group and the second lens group is increased, and the distance between the second lens group and the third lens group is decreased. 3. The microscope zoom objective lens according to claim 1, wherein the lens group moves on the optical axis and satisfies the following conditions (2) and (3).
0.25 ≦ D1 / D0 ≦ 0.7 (2)
0.05 ≦ D2 / D0 ≦ 0.5 (3)
Where D1 is the total length of the first lens group,
D2 is the amount of movement of the second lens group from the low magnification side to the high magnification side,
D0 is the total length of the microscope zoom objective lens on the high magnification side,
It is. 前記顕微鏡ズーム対物レンズは３群構成であって、低倍から高倍へと変倍する際に、作動距離が短くなるように、前記第１レンズ群は前記第２レンズ群とは反対方向へ光軸に沿って移動することを特徴とする請求項１から３の何れか１項記載の顕微鏡ズーム対物レンズ。 The microscope zoom objective lens has a three-group configuration, and the first lens group emits light in a direction opposite to the second lens group so that the working distance is shortened when zooming from low magnification to high magnification. The microscope zoom objective lens according to any one of claims 1 to 3, wherein the microscope zoom objective lens moves along an axis. 前記第１レンズ群と物体の間隔をＷＤ、前記第１レンズ群の焦点距離をＦ1 としたとき、以下の条件（１５）を満足することを特徴とする請求項１から４の何れか１項記載の顕微鏡ズーム対物レンズ。
ＷＤ≦０．２５Ｆ1 ・・・（１５） 5. The following condition (15) is satisfied, where WD is the distance between the first lens group and the object, and F1 is the focal length of the first lens group: The microscope zoom objective lens described.
WD ≦ 0.25F1 (15) 前記第２レンズ群は、少なくとも１つの正レンズと負レンズで構成された接合メニスカスレンズを備え、前記正レンズの屈折率をＮ２Ｐ、アッベ数をν２Ｐ、前記負レンズのアッベ数をν２Ｎとしたとき、以下の条件（１６）、（１７）を満足することを特徴とする請求項５記載の顕微鏡ズーム対物レンズ。
Ｎ２Ｐ≧１．６５ ・・・（１６）
ν２Ｎ−ν２Ｐ≧２０ ・・・（１７） The second lens group includes a cemented meniscus lens including at least one positive lens and a negative lens, and the refractive index of the positive lens is N2P, the Abbe number is ν2P, and the Abbe number of the negative lens is ν2N. The microscope zoom objective lens according to claim 5, wherein the following conditions (16) and (17) are satisfied.
N2P ≧ 1.65 (16)
ν2N−ν2P ≧ 20 (17) 前記顕微鏡ズーム対物レンズの最も像側にあるレンズ群の像側に最も近い面から物体までの距離をＬとするとき、以下の条件（２１）を満足することを特徴とする請求項６記載の顕微鏡ズーム対物レンズ。
５５≦Ｌ≦１１０ （ｍｍ） ・・・（２１） The following condition (21) is satisfied, where L is a distance from the surface closest to the image side of the lens group on the most image side of the microscope zoom objective lens to the object. Microscope zoom objective lens.
55 ≦ L ≦ 110 (mm) (21) 以下の条件（８）を満足することを特徴とする請求項１から３の何れか１項記載の顕微鏡ズーム対物レンズ。
０＜ＦＢ1 ／Ｄ1 ≦０．４ ・・・（８）
ただし、ＦＢ1 は、前記第１レンズ群の前記第２レンズ群側に最も近いレンズ面から、前記第１レンズ群の後側焦点位置までの距離である。 The microscope zoom objective lens according to any one of claims 1 to 3, wherein the following condition (8) is satisfied.
0 <FB1 / D1 ≦ 0.4 (8)
Where FB1 is the distance from the lens surface closest to the second lens group side of the first lens group to the rear focal position of the first lens group. 前記第１レンズ群の後側焦点位置近傍に、開口絞りを備えていることを特徴とする請求項８記載の顕微鏡ズーム対物レンズ。 9. The microscope zoom objective lens according to claim 8, further comprising an aperture stop in the vicinity of a rear focal position of the first lens group. 物体から順に、正のパワーを持つ第１レンズ群、負のパワーを持つ第２レンズ群、正のパワーを持つ第３レンズ群、及び、負のパワーを持つ第４レンズ群で構成され、低倍側から高倍側へ変倍する際に、前記第１レンズ群と前記第２レンズ群の間隔が大きくなり、前記第２レンズ群と前記第３レンズ群の間隔が小さくなるように、前記第２レンズ群と前記第３レンズ群と前記第４レンズ群が光軸上を移動し、
前記第２レンズ群の焦点距離をＦ２、前記第３レンズ群の焦点距離をＦ３、前記第４レンズ群の焦点距離をＦ４としたときに、以下の条件（９）、（１０）を満足し、
前記第１レンズ群の最も物体側のレンズ群は、物体側に凹面を向けた負レンズと正レンズの接合メニスカスレンズで構成され、
前記第１レンズ群は複数の接合レンズ群を備えており、その接合レンズ群の正レンズのアッベ数をνＰ、接合レンズ群の負レンズのアッベ数をνＮとするとき、第１レンズ群中の何れかの接合レンズ群が以下の条件（１１）を満足することを特徴とする顕微鏡ズーム対物レンズ。
−３≦Ｆ３／Ｆ２≦−１．５ ・・・（９）
３≦Ｆ４／Ｆ２≦６ ・・・（１０）
νＰ−νＮ≧３５ ・・・（１１） In order from the object, a first lens group having a positive power, a second lens group having a negative power, a third lens group having a positive power, and a fourth lens group having a negative power, When changing magnification from the magnification side to the high magnification side, the distance between the first lens group and the second lens group is increased, and the distance between the second lens group and the third lens group is decreased. Two lens groups, the third lens group, and the fourth lens group move on the optical axis;
When the focal length of the second lens group is F2, the focal length of the third lens group is F3, and the focal length of the fourth lens group is F4, the following conditions (9) and (10) are satisfied. ,
The lens group closest to the object side of the first lens group is constituted by a cemented meniscus lens of a negative lens and a positive lens having a concave surface facing the object side,
The first lens group includes a plurality of cemented lens groups, and when the Abbe number of the positive lens of the cemented lens group is νP and the Abbe number of the negative lens of the cemented lens group is νN, Any of the cemented lens groups satisfies the following condition (11).
−3 ≦ F3 / F2 ≦ −1.5 (9)
3 ≦ F4 / F2 ≦ 6 (10)
νP−νN ≧ 35 (11) 前記第２レンズ群は、互いに凹面を向けた少なくとも２つのレンズ群で構成され、前記第２レンズ群は、少なくとも１つの正レンズと負レンズで構成された接合メニスカスレンズを備え、前記正レンズの屈折率をＮ２Ｐ、アッベ数をν２Ｐ、前記負レンズのアッベ数をν２Ｎとしたとき、以下の条件（１６）、（１７）を満足することを特徴とする請求項１０記載の顕微鏡ズーム対物レンズ。
Ｎ２Ｐ≧１．６５ ・・・（１６）
ν２Ｎ−ν２Ｐ≧２０ ・・・（１７） The second lens group includes at least two lens groups having concave surfaces facing each other, and the second lens group includes a cemented meniscus lens including at least one positive lens and a negative lens. 11. The microscope zoom objective lens according to claim 10, wherein the following conditions (16) and (17) are satisfied when the refractive index is N2P, the Abbe number is ν2P, and the Abbe number of the negative lens is ν2N.
N2P ≧ 1.65 (16)
ν2N−ν2P ≧ 20 (17) 前記第２レンズ群は、互いに凹面を向けた少なくとも２つのレンズ群で構成されたことを特徴とする請求項１０又は１１記載の顕微鏡ズーム対物レンズ。 The microscope zoom objective lens according to claim 10 or 11, wherein the second lens group includes at least two lens groups having concave surfaces facing each other. 前記顕微鏡ズーム対物レンズの最も像側にあるレンズ群の像側に最も近い面から物体までの距離をＬとするとき、以下の条件（２１）を満足することを特徴とする請求項１２記載の顕微鏡ズーム対物レンズ。
５５≦Ｌ≦１１０ （ｍｍ） ・・・（２１） 13. The following condition (21) is satisfied, where L is the distance from the surface closest to the image side of the lens group closest to the image side of the microscope zoom objective lens to the object. Microscope zoom objective lens.
55 ≦ L ≦ 110 (mm) (21)
JP2007138932A 2000-11-08 2007-05-25 Microscope zoom objective lens Expired - Fee Related JP4576402B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007138932A JP4576402B2 (en) 2000-11-08 2007-05-25 Microscope zoom objective lens

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000340666 2000-11-08
JP2001175204 2001-06-11
JP2007138932A JP4576402B2 (en) 2000-11-08 2007-05-25 Microscope zoom objective lens

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2001271868A Division JP3990126B2 (en) 2000-11-08 2001-09-07 Microscope zoom objective lens

Publications (2)

Publication Number Publication Date
JP2007213103A true JP2007213103A (en) 2007-08-23
JP4576402B2 JP4576402B2 (en) 2010-11-10

Family

ID=38491512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007138932A Expired - Fee Related JP4576402B2 (en) 2000-11-08 2007-05-25 Microscope zoom objective lens

Country Status (1)

Country Link
JP (1) JP4576402B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009012707A1 (en) 2009-03-11 2010-09-16 Carl Zeiss Microlmaging Gmbh Microscope with several optical systems in the imaging beam path
EP2362260A4 (en) * 2008-12-22 2017-07-26 Nikon Corporation Variable power optical system for stereo microscope
CN110045492A (en) * 2019-04-26 2019-07-23 中国科学院长春光学精密机械与物理研究所 The microcobjective optical system of wide spectrum large-numerical aperture ultra-high throughput
US10897580B2 (en) 2017-06-07 2021-01-19 Olympus Corporation Observation device that controls numerical aperture in accordance with specified observation scope
US11029507B2 (en) 2017-06-12 2021-06-08 Olympus Corporation Observation device
CN117270185A (en) * 2023-11-17 2023-12-22 长春长光智欧科技有限公司 Micro-optical system with large numerical aperture and wide spectrum

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015087619A1 (en) 2013-12-11 2015-06-18 オリンパス株式会社 Variable magnification optical system, and image capture device and image capture system provided with same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09318882A (en) * 1996-05-29 1997-12-12 Olympus Optical Co Ltd Stereomicroscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09318882A (en) * 1996-05-29 1997-12-12 Olympus Optical Co Ltd Stereomicroscope

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2362260A4 (en) * 2008-12-22 2017-07-26 Nikon Corporation Variable power optical system for stereo microscope
EP3623858A1 (en) * 2008-12-22 2020-03-18 Nikon Corporation Variable power optical system for stereomicroscope
DE102009012707A1 (en) 2009-03-11 2010-09-16 Carl Zeiss Microlmaging Gmbh Microscope with several optical systems in the imaging beam path
WO2010102766A1 (en) 2009-03-11 2010-09-16 Carl Zeiss Microimaging Gmbh Microscope comprising multiple optical systems in the imaging beam path
US9063342B2 (en) 2009-03-11 2015-06-23 Carl Zeiss Microscopy Gmbh Microscope comprising multiple optical systems in the imaging beam path
US10897580B2 (en) 2017-06-07 2021-01-19 Olympus Corporation Observation device that controls numerical aperture in accordance with specified observation scope
US11029507B2 (en) 2017-06-12 2021-06-08 Olympus Corporation Observation device
CN110045492A (en) * 2019-04-26 2019-07-23 中国科学院长春光学精密机械与物理研究所 The microcobjective optical system of wide spectrum large-numerical aperture ultra-high throughput
CN110045492B (en) * 2019-04-26 2024-03-15 中国科学院长春光学精密机械与物理研究所 Wide-spectrum large-numerical aperture ultrahigh-flux micro-objective optical system
CN117270185A (en) * 2023-11-17 2023-12-22 长春长光智欧科技有限公司 Micro-optical system with large numerical aperture and wide spectrum
CN117270185B (en) * 2023-11-17 2024-02-20 长春长光智欧科技有限公司 Micro-optical system with large numerical aperture and wide spectrum

Also Published As

Publication number Publication date
JP4576402B2 (en) 2010-11-10

Similar Documents

Publication Publication Date Title
JP3990126B2 (en) Microscope zoom objective lens
JP3280402B2 (en) Microscope objective lens
JP4576402B2 (en) Microscope zoom objective lens
US5416639A (en) Zoom lens system
JP2002031760A (en) Objective lens for microscope
JPH06160720A (en) Liquid immersion system microscope objective lens
JP2000352665A (en) Wide-angle lens
JP3365835B2 (en) Compact 3-group zoom lens
US5583701A (en) Zoom lens system
JPH07281097A (en) Liquid immersion system microscope objective lens
JP3313163B2 (en) Microscope objective lens
JP4061152B2 (en) Zoom photography optics
US5701196A (en) Stereomicroscope
JP3454935B2 (en) Microscope objective lens
JPH05241073A (en) Zoom lens
JP3365837B2 (en) Focusing method of 3-group zoom lens
JP4488283B2 (en) Afocal zoom lens for microscope
JP4098492B2 (en) Immersion microscope objective lens
EP2362260B1 (en) Variable power optical system for stereo microscope
US4690513A (en) Wide angle high range zoom lens
JP2000275522A (en) Zoom lens
JPH1048523A (en) Zoom lens
JPH11142737A (en) Variable power lens system
JPH10288740A (en) Long operating distance microscope objective lens
JPH10197793A (en) Zoom lens

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070525

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100602

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100723

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100811

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100823

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130827

Year of fee payment: 3

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees