JP2007184590A - 高密度集積回路の製造方法 - Google Patents
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Abstract
【解決手段】回路パターン(100)を半導体基板(300)のデバイス層(320)に形成する方法は、回路パターン(100)を2つの直交するサブパターン(200,210)に分解することと、第1サブパターンのパターンを、デバイス層(320)の上に横たわるハードマスク層(330,500)に転写することと、他方のサブパターンのパターンを、パターン化したハードマスク層(330,500)の上に横たわる感光層(350)に転写することと、パターン化したハードマスク層(330,500)およびパターン化した感光層(350)をマスクとして用いてデバイス層(320)のパターニングを行うことと、パターン化したハードマスク層(330,500)およびパターン化した感光層(350)を除去することを含む。
【選択図】図3d
Description
110 パッド
120 フィン
130 ゲート電極
200,210 サブパターン
300 基板
310 誘電体層
320 半導体層
340,350 レジスト層
330,400,500 ハードマスク層
Claims (14)
- 少なくとも第1方向に沿って配向した要素と、第2方向に沿って配向した要素とを有するパターン(100)を、基板(300)に形成する方法であって、
前記第1方向は、前記第2方向に対して実質的に直交しており、
ハードマスク層(330,500)を基板(300)上に形成するステップと、
ハードマスク層(330,500)に、前記第1方向に沿って配向した要素のパターンを形成するステップと、
第2方向に沿って配向した要素のパターンを用いて、基板(300)にリソグラフプロセスを行うステップと、
基板(300)のエッチングを行うステップとを含み、
パターン(100)を形成するステップは、集積回路の2つの要素間の局所相互接続を形成することを含むようにした方法。 - ハードマスク層にパターンを形成するのに先だって、前記第1方向に配向したパターン(100)の要素(120)を含む第1マスクを生成するステップと、
基板にリソグラフプロセスを行うのに先だって、前記第2方向に配向したパターン(100)の要素(110)を含む第2マスクを生成するステップとを含む請求項1記載の方法。 - ハードマスク層(330)に、前記第1方向に沿って配向した要素のパターンを形成するステップは、
中間パターンに従ってハードマスク層をパターン化するステップと、
中間パターンに従ってパターン化したハードマスク層(400)の上に横たわる他のハードマスク層を形成するステップと、
中間パターンに従ってパターン化したハードマスク層(400)に寄せて側壁スペーサ(500)を形成するステップと、
中間パターンに従ってパターン化したハードマスク層(400)を除去するステップとを含む請求項1または2記載の方法。 - ハードマスク層(330)に、前記第1方向に沿って配向した要素のパターンを形成するステップは、
感光層(340)を、ハードマスク層(330)の上に形成するステップと、
感光層(340)を、前記第1方向に沿って配向した要素のパターン(200)で露光するステップと、
ハードマスク層(330)をエッチングするステップとを含む請求項1または2記載の方法。 - 基板(300)にリソグラフプロセスを行うステップは、
感光層(350)を、パターン化したハードマスク層(330,500)の上に形成するステップと、
感光層(350)を、第2方向に沿って配向した要素のパターン(210)で露光するステップとを含む請求項1〜4のいずれかに記載の方法。 - 集積回路の2つの要素は、同じデバイス層からなる2つの要素であり、前記局所相互接続は、前記同じデバイス層の中に製作されるようにした請求項1〜5のいずれかに記載の方法。
- 集積回路は、フィンベースのトランジスタ要素を備え、集積回路は、フィン領域(120)を含み、前記フィン領域(120)は、半導体層(320)中に形成された前記局所相互接続によって接続されるようにした請求項1〜6のいずれかに記載の方法。
- 基板(300)は、SOI基板であり、半導体層(320)は、SOI基板の半導体層である請求項1〜7のいずれかに記載の方法。
- 少なくとも1つのデバイス層と、回路の異なる要素を配線するための少なくとも1つの金属層とを備えるメモリまたはロジック回路であって、
前記少なくとも1つのデバイス層に製作された複数の要素を備え、
前記複数の要素のうちの少なくとも2つの要素を接続する局所相互接続をさらに備え、
前記局所相互接続は、前記少なくとも1つのデバイス層の1つの中に形成され、
該回路は、フィン領域と制御電極を含むフィンベースのトランジスタを複数備え、
前記局所相互接続によって接続された前記少なくとも2つの要素は、少なくとも2つの制御電極であるようにしたメモリまたはロジック回路。 - 前記フィンベースのトランジスタは、FinFET素子であり、前記制御電極は、ゲート電極である請求項9記載のメモリまたはロジック回路。
- 前記少なくとも2つの要素は、同じデバイス層の中に製作され、前記局所相互接続は、前記少なくとも2つの要素と同じデバイス層の中に製作されている請求項9または10記載のメモリまたはロジック回路。
- スタティックランダムアクセスメモリセルからなる請求項9〜11のいずれかに記載のメモリまたはロジック回路。
- スタティックランダムアクセスメモリセルは、
双安定要素を形成し、該双安定要素にアクセスするための2つの選択トランジスタ(T2,T5)を形成するように構成された複数のFinFET素子を備え、
2つの選択トランジスタ(T2,T5)のゲート電極は、SRAMメモリセル上を走行する第1金属接続を用いて、第1金属レベル(600)で接続され、
双安定要素(T4〜T6,T1〜T3)の個々のフィン(120)間の接続(110)は、前記フィンが形成されたのと同じ材料(320)内に形成されるようにした請求項12記載のメモリまたはロジック回路。 - スタティックランダムアクセスメモリセルは、
トランジスタ(T1,T3,T4,T6)を含む2つのインバータ(T4〜T6,T1〜T3)と、
2つのインバータと接触するための2つのパストランジスタ(T5,T2)とを備え、
トランジスタ(T4,T5,T6)は共通パッドを共有するとともに、トランジスタ(T4,T6)は共通のゲート電極を有し、
トランジスタ(T1,T2,T3)は共通パッドを共有するとともに、トランジスタ(T1,T3)は共通のゲート電極を有し、
トランジスタ(T1,T3)のゲート電極は、トランジスタ(T4,T5,T6)の共通パッドと接続され、トランジスタT4,T6のゲート電極は、トランジスタT1,T2,T3の共通パッドと接続され、
nMOSトランジスタ(T5,T2)の他方のパッドは、ビットライン(BL)に接続され、
両方のトランジスタ(T5,T2)のゲート電極は、共通のワードライン(WL)に接続され、
nMOSトランジスタ(T6,T3)の間で共有されるパッドは、グランドライン(Vss)に接続され、
pMOSトランジスタ(T4,T1)の間で共有されるパッドは、電源ライン(Vdd)に接続されており、
トランジスタ(T1,T3)のゲート電極とトランジスタ(T4,T5,T6)の共通パッドとの間の接続、ならびにトランジスタ(T4,T6)のゲート電極とトランジスタ(T1,T2,T3)の共通パッドとの間の接続がデバイス層(320)の中に形成され、
両方のトランジスタ(T5,T2)のゲート電極と共通のワードライン(WL)との間の接続が、第1金属レベルで形成されることを特徴とする請求項12記載のメモリまたはロジック回路。
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JP2015228530A (ja) * | 2015-09-17 | 2015-12-17 | ユニサンティス エレクトロニクス シンガポール プライベート リミテッドUnisantis Electronics Singapore Pte Ltd. | 半導体装置の製造方法と半導体装置 |
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KR20150123761A (ko) * | 2014-02-27 | 2015-11-04 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | Finfet sram을 위한 구조물 및 방법 |
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JP2015228530A (ja) * | 2015-09-17 | 2015-12-17 | ユニサンティス エレクトロニクス シンガポール プライベート リミテッドUnisantis Electronics Singapore Pte Ltd. | 半導体装置の製造方法と半導体装置 |
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US20110084313A1 (en) | 2011-04-14 |
EP1804282A1 (en) | 2007-07-04 |
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