JP2007182368A - 強誘電体酸化物人工格子とその製造方法、及び超高密度情報保存媒体 - Google Patents
強誘電体酸化物人工格子とその製造方法、及び超高密度情報保存媒体 Download PDFInfo
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Abstract
【解決手段】相異なる分極特性を有する酸化物の単位原子層を積層して、積層(垂直)方向への特定イオンの規則的な配列を通して人工格子の単位構造(スーパーセル)の結晶構造及び対称性を調節することによって異方性(anisotropic)の大きなスーパーセルを形成する。スーパーセル自体が単一分極を有する一つのブロックとして垂直方向に上下2方向にのみ電気分極が発現されるようにし、かかる特徴を有するスーパーセルブロックからなる酸化物人工格子を製造する。酸化物人工格子が180°ドメイン構造のみを有するようにすることで、異方性の大きな単一の分域(ドメイン)をナノスケールに形成することができ、情報保存容量の超高密度化及び長期的な情報保存が可能となる。
【選択図】図2c
Description
図1は、本発明の強誘電体薄膜として、多層酸化物人工格子を形成するために使用したPLD(Pulsed laser deposition)装備を示した概略図である。図1を参照すると、PLD装備は、エキシマーレーザー10、減衰器20、フォーカシングレンズ30、下部電極が形成されたターゲット基板40、及びヒーター50から構成されている。レーザーソース(source)としては、KrFガスを用いて248nmの波長の長さを有し30nsのパルスを発生させる、ラムダフィジックス(Lambda Physics)社のCOMPEX205エキシマーレーザーを使用した。ターゲット60としては、純度99.9%のPbZrO3とPbTiO3ターゲットを使用した。上記減衰器20には、レーザーエネルギーを調節するためにシリカガラス(silica glass)を用いた。真空チェンバーに入射されたレーザーに対してターゲット基板40で6mm×1mmのサイズを有するようにフォーカシングレンズ30を調節し、レーザーのパワー強度(power density)は2J/cm2に設定した。
図2a〜図2cは、図1のPLD装備を用いて本発明の人工格子を形成するための製造工程を段階別に示した断面図である。図2aに示すように、MgO基板100をアセトン、メタノール、TCEでそれぞれ5分間超音波洗浄した後、窒素で乾燥させる。次に、乾燥された上記基板100を銀ペースト(silver paste)でヒーター40に付着させ乾燥させた後、パルスレーザー蒸着装備(PLD-248nm KrF excimer laser)を用いてMgO(100)単結晶基板100上に下部電極La(Sr,Co)O3(LSCO)層110を形成する。以後、図2b及び図2cに示すように、入射されたレーザーを回転するターゲットに加えて薄膜の蒸着がなされるが、二つのターゲットを同時に装着してそれぞれ任意の厚さを有するPTO(PbTiO3)層120とPZO(PbZrO3)層130を蒸着する。この時、回転するターゲット60の速度は11rpmである。また、蒸着時の蒸着温度は500℃にし、1分当りに10℃昇温させ、酸素分圧は100mTorrを維持する。PZO層とPTO層の蒸着速度は各々8pulse/1単位格子と7pulse/1単位格子であり、レーザーは1秒当り1パルスでターゲットに入射される。
30:フォーカシングレンズ 40:基板
50:ヒーター 60:ターゲット
100:単結晶基板 110:酸化物電極
120:PTO層 130:PZO層
Claims (13)
- 相異なる分極特性を有する少なくとも2個以上の誘電体物質を単位格子単位で積層して、構成物質とは異なる異方性を有する単位構造を形成し、上記単位構造を繰り返し積層して形成されて、ドメインのナノスケール化及び長期安定性を成し遂げるように構成された強誘電体酸化物人工格子。
- 上記単位構造は基板に垂直で、基板の上下2方向にのみ電気分極を有し、これによる電気分極特性を有することを特徴とする請求項1に記載の強誘電体酸化物人工格子。
- 上記電気分極特性を有する単位構造からなり、基板に垂直な180°ドメイン構造のみを有することを特徴とする請求項2に記載の強誘電体酸化物人工格子。
- 上記単位構造内の格子は、2個以上の誘電体物質構成原子が規則的に配列された構造を有することを特徴とする請求項1に記載の強誘電体酸化物人工格子。
- 上記単位構造内の各誘電体物質の単位格子のサイズは、1単位格子乃至5単位格子の範囲を有し、上記単位構造のサイズは、積層垂直方向に10単位格子以内の範囲を有することを特徴とする請求項1に記載の強誘電体酸化物人工格子。
- 上記誘電体物質は、PbTiO3、PbZrO3、BaTiO3、BaZrO3、SrTiO3、SrZrO3、KNbO3、KTaO3、CaTiO3、CaZrO3、BaSnO3、BaFeO3の中から選択された何れか一つであることを特徴とする請求項1に記載の強誘電体酸化物人工格子。
- 単結晶基板;
上記基板上に形成された電極;
上記電極上に形成される請求項1乃至6のうち何れか一項による強誘電体酸化物人工格子;を含み、
ドメインのナノスケール化及び長期安定性を成し遂げる超高密度情報保存媒体。 - 相異なる分極特性を有する少なくとも2個以上の誘電体物質を単位格子単位で積層して、構成物質とは異なる異方性を有する単位構造を形成し、上記単位構造を繰り返し積層して、ドメインのナノスケール化及び長期安定性を成し遂げるように構成された強誘電体酸化物人工格子の製造方法。
- 上記単位構造は基板に垂直で、基板の上下2方向にのみ電気分極を有し、これによる電気分極特性を有するように形成されることを特徴とする請求項8に記載の強誘電体酸化物人工格子の製造方法。
- 上記電気分極特性を有する単位構造からなり、基板に垂直な180°ドメイン構造のみを有することを特徴とする請求項9に記載の強誘電体酸化物人工格子の製造方法。
- 上記単位構造内の格子には、2個以上の誘電体物質構成原子が規則的に配列されるようにすることを特徴とする請求項8に記載の強誘電体酸化物人工格子の製造方法。
- 上記単位構造内の各誘電体物質の単位格子のサイズは、1単位格子乃至5単位格子の範囲を有し、上記単位構造のサイズは、積層垂直方向に10単位格子以内の範囲を有することを特徴とする請求項8に記載の強誘電体酸化物人工格子の製造方法。
- 上記誘電体物質は、PbTiO3、PbZrO3、BaTiO3、BaZrO3、SrTiO3、SrZrO3、KNbO3、KTaO3、CaTiO3、CaZrO3、BaSnO3、BaFeO3の中から選択された何れか一つであることを特徴とする請求項8に記載の強誘電体酸化物人工格子の製造方法。
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CN103882508A (zh) * | 2014-02-19 | 2014-06-25 | 浙江大学 | 一种一维结构钛酸铅/锆酸铅复合纳米纤维的制备方法 |
US9721751B2 (en) * | 2014-08-22 | 2017-08-01 | The Board Of Trustees Of The Leland Stanford Junior University | Electron microscopy specimen and method of fabrication |
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