JP2007178300A - Tuning-fork type vibrator - Google Patents

Tuning-fork type vibrator Download PDF

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JP2007178300A
JP2007178300A JP2005377941A JP2005377941A JP2007178300A JP 2007178300 A JP2007178300 A JP 2007178300A JP 2005377941 A JP2005377941 A JP 2005377941A JP 2005377941 A JP2005377941 A JP 2005377941A JP 2007178300 A JP2007178300 A JP 2007178300A
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acceleration
tuning fork
vibrator
angular velocity
base
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Hiroyuki Aizawa
宏幸 相澤
Satoshi Ouchi
智 大内
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a tuning-fork type vibrator used for an angular velocity/acceleration sensor used for a vehicle attitude control or the like, capable of preventing decline of detection accuracy of angular velocity and acceleration. <P>SOLUTION: Each detection part of the angular velocity and the acceleration is provided individually by forming angular velocity detection parts 23, 24 on arms 2, 3 of the vibrator 1 and forming an acceleration detection part 25 on a base part 4, and thereby each interference between an angular velocity output and an acceleration output is reduced, to thereby enable highly accurate detection. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、１つの素子で角速度と加速度を検出する音叉型振動子に関する。   The present invention relates to a tuning fork vibrator that detects angular velocity and acceleration with a single element.

従来、音叉型振動子を用いた角速度／加速度センサにおいては、図１１に示すような構成を有していた。図１１において、２つの平行なアーム３３、アーム３４とからなる音叉型振動子を構成する水晶板３５を両側から２枚の水晶板３６、水晶板３７とにより僅かの間隙を保持して挟み込み、アーム３３、アーム３４の両面に設けられた検出電極３８，３９，４０，４１と両側の２枚の水晶板３６、水晶板３７に設けられた検出電極４２，４３，４４，４５との間の静電容量変化にて角速度および加速度を検出する構成となっていた。   Conventionally, an angular velocity / acceleration sensor using a tuning fork vibrator has a configuration as shown in FIG. In FIG. 11, a quartz plate 35 constituting a tuning fork vibrator composed of two parallel arms 33 and arms 34 is sandwiched between two quartz plates 36 and a quartz plate 37 from both sides while holding a slight gap, Between the detection electrodes 38, 39, 40, and 41 provided on both surfaces of the arm 33 and the arm 34, and the detection electrodes 42, 43, 44, and 45 provided on the two crystal plates 36 and the crystal plate 37 on both sides. The angular velocity and acceleration are detected by changing the capacitance.

なお、この出願の発明に関連する先行技術文献情報としては、例えば、特許文献１が知られている。
特開平７−１２８３５５号公報 As prior art document information related to the invention of this application, for example, Patent Document 1 is known.
JP-A-7-128355

しかしながら、図１１に示す構成では、同一の検出電極の静電容量変化により角速度、加速度を検出する構成になっているため、角速度と加速度を検出する際の切り分けが複雑化し、高精度な検出が難しいという問題点を有していた。   However, in the configuration shown in FIG. 11, since the angular velocity and acceleration are detected by the capacitance change of the same detection electrode, the separation when detecting the angular velocity and acceleration is complicated, and high-precision detection is possible. It had the problem of being difficult.

本発明は上記従来の問題点を解決するもので、角速度と加速度の検出時の切り分けを容易にし角速度、加速度を高精度で検出可能な音叉型振動子を提供することを目的とするものである。   The present invention solves the above-described conventional problems, and an object of the present invention is to provide a tuning fork vibrator that can easily detect angular velocities and accelerations while easily detecting angular velocities and accelerations. .

上記目的を達成するために本発明の音叉型振動子は、２つの平行なアームと、これらのアームを連結する少なくとも１つの基部と、この基部と連結した支持部を有し、前記アームに角速度検出部を設け、前記基部に加速度検出部を設けたものである。   In order to achieve the above object, a tuning fork vibrator according to the present invention has two parallel arms, at least one base connecting these arms, and a support connected to the base, and the angular velocity of the arms. A detection unit is provided, and an acceleration detection unit is provided at the base.

本発明の音叉型振動子は、角速度および加速度の検出部を個別に設けたことにより、各出力の干渉を抑制することができ、角速度と加速度を高精度に検出することができるという効果を奏する。   The tuning fork vibrator according to the present invention has an effect that interference between outputs can be suppressed and angular velocity and acceleration can be detected with high accuracy by providing an angular velocity and acceleration detection unit individually. .

（実施の形態１）
以下、本発明の実施の形態１における音叉型振動子について図１〜図６を参照しながら説明する。 (Embodiment 1)
Hereinafter, the tuning fork vibrator according to the first embodiment of the present invention will be described with reference to FIGS.

図１は本発明の実施の形態１における音叉型振動子の斜視図、図２は同振動子のアームのＡ−Ａ断面図、図３は同振動子のアームのＢ−Ｂ断面図、図４は同実施の形態における駆動モードの斜視図、図５は同実施の形態における角速度検出モードの斜視図、図６は同実施の形態における加速度検出モードの斜視図である。   1 is a perspective view of a tuning fork vibrator according to Embodiment 1 of the present invention, FIG. 2 is a cross-sectional view taken along the line AA of the arm of the vibrator, and FIG. 3 is a cross-sectional view taken along the line BB of the arm of the vibrator. 4 is a perspective view of a drive mode in the same embodiment, FIG. 5 is a perspective view of an angular velocity detection mode in the same embodiment, and FIG. 6 is a perspective view of an acceleration detection mode in the same embodiment.

図１〜図６において、１は音叉型振動子（以下、振動子と呼ぶ）、２，３は振動子１のアームであり、平行に配置されている。４は振動子１の基部であり、前記アーム２，３を連結している。５は振動子１の支持部であり、前記基部４に連結されている。６は振動子１の主面、７，８はアーム２の主面６上に設けられた第１、第２の電極、９，１０はアーム３の主面６上に設けられた第１、第２の電極、１１，１３は第１の電極７，９上にそれぞれ設けられた第１の圧電薄膜、１２，１４は第２の電極８，１０上にそれぞれ設けられた第２の圧電薄膜、１５，１７は第１の圧電薄膜１１，１３上にそれぞれ設けられた第３の電極、１６，１８は第２の圧電薄膜１２，１４上にそれぞれ設けられた第４の電極、１９，２０はアーム２およびアーム３の主面６上で、かつ、第１と第２の電極７，８および９，１０の間にそれぞれ設けられた第５の電極、２１，２２は第５の電極１９，２０上にそれぞれ設けられた第３の圧電薄膜、２３，２４は第３の圧電薄膜２１，２２上にそれぞれ設けられた第６の電極、２５は基部４の主面６上に設けられた歪抵抗である。   1 to 6, reference numeral 1 denotes a tuning fork vibrator (hereinafter referred to as a vibrator), and reference numerals 2 and 3 denote arms of the vibrator 1, which are arranged in parallel. Reference numeral 4 denotes a base portion of the vibrator 1, which connects the arms 2 and 3. Reference numeral 5 denotes a support portion of the vibrator 1 and is connected to the base portion 4. 6 is a main surface of the vibrator 1, 7 and 8 are first and second electrodes provided on the main surface 6 of the arm 2, and 9 and 10 are first and second electrodes provided on the main surface 6 of the arm 3. The second electrodes, 11 and 13 are first piezoelectric thin films provided on the first electrodes 7 and 9, respectively, and 12 and 14 are second piezoelectric thin films provided on the second electrodes 8 and 10, respectively. , 15 and 17 are third electrodes provided on the first piezoelectric thin films 11 and 13, respectively, and 16 and 18 are fourth electrodes provided on the second piezoelectric thin films 12 and 14, respectively. Are the fifth electrodes 19 and 22 provided on the main surface 6 of the arm 2 and arm 3 and between the first and second electrodes 7, 8 and 9, 10, respectively. , 20 is a third piezoelectric thin film provided on the third piezoelectric thin film 23, and 24 is a sixth piezoelectric thin film provided on the third piezoelectric thin film 21, 22. Electrode, 25 is a strain resistor provided on the main surface 6 of the base 4.

振動子１は２つのアーム２，３と、アーム２，３を連結する基部４と、基部４と連結する支持部５とを有したシリコン（Ｓｉ）から構成されている。   The vibrator 1 is made of silicon (Si) having two arms 2 and 3, a base portion 4 that connects the arms 2 and 3, and a support portion 5 that connects the base portion 4.

また、第１の圧電薄膜１１，１３、第２の圧電薄膜１２，１４、第３の圧電薄膜２１，２２は、いずれもチタン酸ジルコン酸鉛（ＰＺＴ）である。   Further, the first piezoelectric thin films 11 and 13, the second piezoelectric thin films 12 and 14, and the third piezoelectric thin films 21 and 22 are all lead zirconate titanate (PZT).

以下に、振動子１の動作原理について説明する。   Hereinafter, the operation principle of the vibrator 1 will be described.

図４は振動子１の駆動モード、図５は振動子１の角速度検出モードの斜視図である。   FIG. 4 is a perspective view of the driving mode of the vibrator 1 and FIG. 5 is an angular velocity detection mode of the vibrator 1.

予め、図２の第１の圧電薄膜１１，１３、第２の圧電薄膜１２，１４、第３の圧電薄膜２１，２２をそれぞれの上下に設けた第１の電極７，９と第３の電極１５，１７の間、第２の電極８，１０と第４の電極１６，１８の間、第５の電極１９，２０と第６の電極２３，２４との間それぞれにＤＣ電圧を印加し、分極ベクトルの方向が揃うようにしておく。   First and third electrodes 7 and 9 and a third electrode in which the first piezoelectric thin films 11 and 13, the second piezoelectric thin films 12 and 14, and the third piezoelectric thin films 21 and 22 in FIG. 15, 17, DC voltage is applied between the second electrode 8, 10 and the fourth electrode 16, 18, between the fifth electrode 19, 20 and the sixth electrode 23, 24, respectively. The direction of the polarization vector is aligned.

この状態で、第１の電極７，９と第２の電極８，１０をＧＮＤ電極又は仮想ＧＮＤ電極とし、第３の電極１５，１７と第４の電極１６，１８に互いに位相が１８０°異なる交流電圧を印加することで、第１の圧電薄膜１１，１３が延びる場合は、第２の圧電薄膜１２，１４は縮む。逆に、第１の圧電薄膜１１，１３が縮む場合は、第２の圧電薄膜１２，１４は伸びる。   In this state, the first electrodes 7 and 9 and the second electrodes 8 and 10 are used as GND electrodes or virtual GND electrodes, and the third electrodes 15 and 17 and the fourth electrodes 16 and 18 are 180 degrees out of phase with each other. When the first piezoelectric thin films 11 and 13 are extended by applying an AC voltage, the second piezoelectric thin films 12 and 14 are contracted. On the contrary, when the first piezoelectric thin films 11 and 13 contract, the second piezoelectric thin films 12 and 14 expand.

以上の原理に基づき、振動子１のアーム２，３は互いに逆方向（Ｘ方向）に音叉共振し図４に示した駆動モードで発振する。   Based on the above principle, the arms 2 and 3 of the vibrator 1 resonate in the opposite directions (X direction) and oscillate in the drive mode shown in FIG.

上記で説明したようにアーム２，３がＸ方向に共振している状態でＹ軸回りに角速度が印加されると、アーム２，３はコリオリ力によりＺ方向に互に逆向きに撓み図５に示した角速度検出モードが励振される。この撓みによりアーム２，３上にそれぞれ設けられている第３の圧電薄膜２１，２２には、それぞれ逆向きの電荷が発生する。この逆向きの電荷を第６の電極２３，２４より検出することにより、印加された角速度に対応した出力が得られる。   As described above, when an angular velocity is applied around the Y axis while the arms 2 and 3 are resonating in the X direction, the arms 2 and 3 are bent in opposite directions in the Z direction due to Coriolis force. The angular velocity detection mode shown in FIG. Due to this bending, reverse charges are generated in the third piezoelectric thin films 21 and 22 respectively provided on the arms 2 and 3. By detecting this reverse charge from the sixth electrodes 23 and 24, an output corresponding to the applied angular velocity can be obtained.

また、Ｚ方向に加速度が印加されると、この加速度により振動子１の基部４は図６に示すようＺ方向に歪む。この歪により基部４に設けられている歪抵抗２５の抵抗値が変化する。この抵抗変化を検出することにより、印加された加速度に応じた出力が得られる。   When acceleration is applied in the Z direction, the base 4 of the vibrator 1 is distorted in the Z direction as shown in FIG. 6 due to the acceleration. Due to this strain, the resistance value of the strain resistor 25 provided in the base 4 changes. By detecting this resistance change, an output corresponding to the applied acceleration can be obtained.

ここでは、振動子１の基部４に歪抵抗を用いた構成について説明してきたが、歪抵抗の代わりに圧電薄膜を設け、この圧電薄膜の上下電極間の静電容量の変化にて加速度を検出することも可能である。この場合、上記、圧電薄膜を第１、第２、第３の圧電薄膜１１，１３，１２，１４，２１，２２と同一のプロセスにて形成できるため、プロセスの簡素化が可能となる。   Here, the configuration using the strain resistance in the base 4 of the vibrator 1 has been described, but a piezoelectric thin film is provided in place of the strain resistance, and acceleration is detected by a change in capacitance between the upper and lower electrodes of the piezoelectric thin film. It is also possible to do. In this case, the piezoelectric thin film can be formed by the same process as the first, second, and third piezoelectric thin films 11, 13, 12, 14, 21, and 22. Therefore, the process can be simplified.

また、ここではＺ方向の検出に限定して説明してきたが、Ｘ方向の加速度が加わった場合、歪抵抗２５が面内で撓むことにより、上記構成にてＸ方向の加速度検出も可能である。   Although the description has been limited to the detection in the Z direction here, when the acceleration in the X direction is applied, the strain resistance 25 bends in the plane so that the acceleration in the X direction can be detected with the above configuration. is there.

（実施の形態２）
以下、本実施の形態２における音叉型振動子について図７、図８（ａ）を用いて説明する。 (Embodiment 2)
Hereinafter, the tuning fork vibrator according to the second embodiment will be described with reference to FIGS. 7 and 8A.

本実施の形態は実施の形態１で述べた音叉の形状と同一であり、駆動原理は同じであるため、それらに関する詳細な説明は省略し、実施の形態１と異なる部分についてのみ説明する。   Since the present embodiment is the same as the tuning fork described in the first embodiment and the driving principle is the same, detailed description thereof will be omitted, and only the parts different from the first embodiment will be described.

なお図７、図８（ａ）における各部品の番号は実施の形態１と同一機能の部品には同じ番号を付与し説明を省略している。   In FIG. 7 and FIG. 8 (a), the same numbers are assigned to components having the same functions as those in the first embodiment, and the description thereof is omitted.

図７は本発明の実施の形態における音叉型振動子の斜視図、図８（ａ）は同振動子のＣ−Ｃ断面図を表している。   FIG. 7 is a perspective view of a tuning fork vibrator according to an embodiment of the present invention, and FIG. 8A is a cross-sectional view taken along the line CC of the vibrator.

図７、図８（ａ）において、２６は基部４に設けられた棒状振動子、２７は棒状振動子２６の主面６上に設けられた第７の電極、２８は第７の電極２７上に設けられた第４の圧電薄膜、２９は第４の圧電薄膜２８上に設けられた第８の電極である。   7 and FIG. 8A, 26 is a rod-like vibrator provided on the base 4, 27 is a seventh electrode provided on the main surface 6 of the rod-like vibrator 26, and 28 is on the seventh electrode 27. Reference numeral 29 denotes a fourth piezoelectric thin film, and reference numeral 29 denotes an eighth electrode provided on the fourth piezoelectric thin film 28.

実施の形態１で説明した原理と同様に、圧電薄膜２８をＺ方向に伸び縮みさせ棒状振動子２６を共振させておく。   Similar to the principle described in the first embodiment, the piezoelectric thin film 28 is expanded and contracted in the Z direction to resonate the rod-shaped vibrator 26.

この状態で、Ｚ方向に加速度が印加されると、棒状振動子２６は共振周波数が変化する。この周波数の変化を検出することにより、印加された加速度に応じた出力が得られる。   In this state, when acceleration is applied in the Z direction, the resonance frequency of the rod-shaped vibrator 26 changes. By detecting this change in frequency, an output corresponding to the applied acceleration can be obtained.

同様に、Ｚ方向の加速度検出のみならず、棒状振動子２６をＸ方向に共振させ加速度を検出することも可能である。   Similarly, it is possible not only to detect acceleration in the Z direction but also to detect acceleration by resonating the rod-shaped vibrator 26 in the X direction.

この場合、棒状振動子２６上には図８（ｂ）に示すように左右に第１、第２の電極４１，４２を設け、この第１、第２の電極４１，４２上に第１、第２の圧電薄膜４３，４４を設け、この第１、第２の圧電薄膜４３，４４上に第３、第４の電極４５，４６を設ける。そして、第１電極４１、第２電極４２をＧＮＤとして、第３電極４５と第４電極４６に１８０度異なる交流電圧を印加することにより棒状振動子２６をＸ方向に共振させ、Ｘ方向の加速度が加わった場合の棒状振動子２６の共振周波数の変化を検出することによりＸ方向の加速度を検出する。   In this case, first and second electrodes 41 and 42 are provided on the left and right sides on the rod-shaped vibrator 26 as shown in FIG. 8B, and the first and second electrodes 41 and 42 are provided with the first and second electrodes 41 and 42, respectively. Second piezoelectric thin films 43 and 44 are provided, and third and fourth electrodes 45 and 46 are provided on the first and second piezoelectric thin films 43 and 44. Then, the first electrode 41 and the second electrode 42 are set to GND, and an AC voltage different by 180 degrees is applied to the third electrode 45 and the fourth electrode 46 to resonate the rod-shaped vibrator 26 in the X direction. The acceleration in the X direction is detected by detecting the change in the resonance frequency of the rod-shaped vibrator 26 when.

（実施の形態３）
以下、本実施の形態３における音叉型振動子について図９を用いて説明する。 (Embodiment 3)
Hereinafter, the tuning fork vibrator according to the third embodiment will be described with reference to FIG.

本実施の形態は実施の形態１もしくは実施の形態２で述べた音叉の形状と同一であり、駆動原理は同じであるため、それらに関する詳細な説明は省略し、実施の形態１もしくは実施の形態２と異なる部分についてのみ説明する。   Since the present embodiment is the same as the tuning fork shape described in the first embodiment or the second embodiment and the driving principle is the same, detailed description thereof will be omitted, and the first embodiment or the first embodiment will be omitted. Only the parts different from 2 will be described.

なお、図９における各部品の番号は実施の形態１もしくは実施の形態２と同一機能の部品には同じ番号を付与し説明を省略している。   In FIG. 9, the same reference numerals are assigned to parts having the same functions as those in the first or second embodiment, and the description thereof is omitted.

図９は本発明の実施の形態における薄膜微小機械式共振子ジャイロの斜視図である。   FIG. 9 is a perspective view of a thin film micromechanical resonator gyro according to an embodiment of the present invention.

図９において、３０は基部４に設けられた錘であり、アーム２，３を囲むように配置されている。   In FIG. 9, reference numeral 30 denotes a weight provided on the base 4, and is arranged so as to surround the arms 2 and 3.

加速度検出原理に関しては実施の形態１もしくは実施の形態２と同様であるが、基部４に付加された錘３０により加速度が印加されたときの基部４の歪量が大きくなり、検出感度の向上が可能となる。また、錘３０の質量を調整することにより検出感度の調整が可能である。   The acceleration detection principle is the same as in the first embodiment or the second embodiment, but the amount of distortion of the base 4 when the acceleration is applied by the weight 30 added to the base 4 is increased, and the detection sensitivity is improved. It becomes possible. Further, the detection sensitivity can be adjusted by adjusting the mass of the weight 30.

なお、付加する錘の位置、形状については任意に設計可能である。   The position and shape of the weight to be added can be arbitrarily designed.

（実施の形態４）
以下、本実施の形態４における音叉型振動子について図１０を用いて説明する。 (Embodiment 4)
Hereinafter, the tuning fork vibrator according to the fourth embodiment will be described with reference to FIG.

本実施の形態は実施の形態１もしくは実施の形態２で述べた音叉の形状と同一であり、駆動原理は同じであるため、それらに関する詳細な説明は省略し、実施の形態１もしくは実施の形態２と異なる部分についてのみ説明する。   Since the present embodiment is the same as the tuning fork shape described in the first embodiment or the second embodiment and the driving principle is the same, detailed description thereof will be omitted, and the first embodiment or the first embodiment will be omitted. Only the parts different from 2 will be described.

なお、図１０における各部品の番号は実施の形態１もしくは実施の形態２と同一機能の部品には同じ番号を付与し説明を省略している。   10, the same numbers are assigned to components having the same functions as those in the first or second embodiment, and the description thereof is omitted.

図１０は本発明の実施の形態における音叉型振動子の斜視図である。   FIG. 10 is a perspective view of a tuning fork vibrator according to an embodiment of the present invention.

図１０において、３１，３２はアーム２，３の先端に設けられた錘である。   In FIG. 10, 31 and 32 are weights provided at the tips of the arms 2 and 3.

アーム先端に錘３１，３２を付加することにより、実施の形態３と同様の効果を得ることが可能である。   By adding the weights 31 and 32 to the tip of the arm, it is possible to obtain the same effect as in the third embodiment.

なお、付加する錘の位置、形状については任意に設計可能である。   The position and shape of the weight to be added can be arbitrarily designed.

本発明の音叉型振動子は、角速度および加速度の検出精度を高めることができるという効果を有し、車両用の姿勢制御等に用いられるセンサとして有用である。   The tuning fork vibrator according to the present invention has an effect that the detection accuracy of angular velocity and acceleration can be improved, and is useful as a sensor used for vehicle attitude control and the like.

本発明の実施の形態１における音叉型振動子の斜視図The perspective view of the tuning fork type vibrator in Embodiment 1 of the present invention 同実施の形態におけるアームの断面図Sectional view of the arm in the same embodiment 同実施の形態における基部の断面図Sectional drawing of the base in the same embodiment 同実施の形態における駆動モード斜視図Drive mode perspective view in the same embodiment 同実施の形態における角速度検出モードの斜視図Perspective view of angular velocity detection mode in the same embodiment 同実施の形態における加速度検出モードの斜視図Perspective view of acceleration detection mode in the same embodiment 本発明の実施の形態２における音叉型振動子の斜視図The perspective view of the tuning fork type vibrator in Embodiment 2 of the present invention （ａ）同実施の形態における基部の断面図、（ｂ）同実施の形態における変形例の基部の断面図(A) Cross-sectional view of the base in the same embodiment, (b) Cross-sectional view of the base of a modification in the same embodiment 本発明の実施の形態３における音叉型振動子の斜視図The perspective view of the tuning fork type vibrator in Embodiment 3 of the present invention 本発明の実施の形態４における音叉型振動子の斜視図The perspective view of the tuning fork type vibrator in Embodiment 4 of the present invention 従来の角速度／加速度センサ用の音叉型振動子の斜視図A perspective view of a conventional tuning fork vibrator for an angular velocity / acceleration sensor

符号の説明Explanation of symbols

１ 音叉型振動子（振動子）
２，３ アーム
４ 基部
５ 支持部
６ 主面
７，８，９，１０，１９，２０，２７ 下部電極
１１，１２，１３，１４，２１，２２，２８ 圧電薄膜
１５，１６，１７，１８，２３，２４，２９ 上部電極
２５ 歪抵抗
２６ 棒状振動子
３０，３１，３２ 錘 1 Tuning fork type vibrator (vibrator)
2, 3 Arm 4 Base 5 Support 6 Main surface 7, 8, 9, 10, 19, 20, 27 Lower electrode 11, 12, 13, 14, 21, 22, 28 Piezoelectric thin film 15, 16, 17, 18, 23, 24, 29 Upper electrode 25 Strain resistance 26 Bar-shaped vibrator 30, 31, 32 Weight

Claims (7)

２つの平行なアームとこれらのアームを連結する少なくとも１つの基部と、この基部に連結した支持部を有し、前記アームに角速度検出部を設け、前記基部に加速度検出部を設けた音叉型振動子。 A tuning-fork type vibration having two parallel arms, at least one base for connecting these arms, and a support part connected to the base, the arm having an angular velocity detection unit, and the base having an acceleration detection unit Child. 基部に少なくとも１つの歪抵抗を備え、この歪抵抗の抵抗変化にて加速度を検出する請求項１に記載の音叉型振動子。 The tuning fork vibrator according to claim 1, wherein at least one strain resistance is provided at a base portion, and acceleration is detected by a resistance change of the strain resistance. 基部に少なくとも１つの圧電薄膜を備え、この圧電薄膜の静電容量変化（誘電率の変化）にて加速度を検出する請求項１に記載の音叉型振動子。 The tuning fork vibrator according to claim 1, wherein at least one piezoelectric thin film is provided at the base, and acceleration is detected by a change in capacitance (change in dielectric constant) of the piezoelectric thin film. 基部に少なくとも１本の棒状振動体を備え、この振動体の共振周波数変化にて加速度を検出する請求項１に記載の音叉型振動子。 The tuning fork vibrator according to claim 1, wherein at least one rod-like vibrating body is provided at the base, and acceleration is detected by a change in resonance frequency of the vibrating body. 検出感度の向上のため、基部に錘を付加した請求項１に記載の音叉型振動子。 The tuning fork vibrator according to claim 1, wherein a weight is added to a base for improving detection sensitivity. 検出感度の向上のため、音叉アームに錘を付加した請求項１に記載の音叉型振動子。 The tuning fork vibrator according to claim 1, wherein a weight is added to the tuning fork arm in order to improve detection sensitivity. 角速度検出部は圧電薄膜から構成される請求項１に記載の音叉型振動子。 The tuning fork vibrator according to claim 1, wherein the angular velocity detection unit is constituted by a piezoelectric thin film.
JP2005377941A 2005-12-28 2005-12-28 Tuning-fork type vibrator Pending JP2007178300A (en)

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Application Number Priority Date Filing Date Title
JP2005377941A JP2007178300A (en) 2005-12-28 2005-12-28 Tuning-fork type vibrator

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010043870A (en) * 2008-08-08 2010-02-25 Sony Corp Angular velocity sensor element, angular velocity sensor, and electronic apparatus
JP2018084480A (en) * 2016-11-24 2018-05-31 セイコーエプソン株式会社 Physical quantity sensor, electronic apparatus, and mobile body

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010043870A (en) * 2008-08-08 2010-02-25 Sony Corp Angular velocity sensor element, angular velocity sensor, and electronic apparatus
JP2018084480A (en) * 2016-11-24 2018-05-31 セイコーエプソン株式会社 Physical quantity sensor, electronic apparatus, and mobile body

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