JP2007178166A - Method of detecting heater disconnection - Google Patents
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- JP2007178166A JP2007178166A JP2005374281A JP2005374281A JP2007178166A JP 2007178166 A JP2007178166 A JP 2007178166A JP 2005374281 A JP2005374281 A JP 2005374281A JP 2005374281 A JP2005374281 A JP 2005374281A JP 2007178166 A JP2007178166 A JP 2007178166A
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本発明はヒータ断線検知方法に係り、特に、温度による抵抗値変化が大きなヒータの断線検出が容易なヒータ断線検知方法の改良に関する。 The present invention relates to a heater disconnection detection method, and more particularly, to an improvement in a heater disconnection detection method in which it is easy to detect a disconnection of a heater having a large resistance change due to temperature.
例えば半導体製造装置等には、並列接続された複数の加熱用ヒータを有する加熱装置とともに、これら複数のヒータの断線を検出するヒータ断線検知装置が搭載される場合が多い。 For example, in many cases, a semiconductor manufacturing apparatus or the like is equipped with a heater disconnection detection device that detects disconnection of a plurality of heaters, in addition to a heating apparatus having a plurality of heaters connected in parallel.
このヒータ断線検知装置では、図８Ａに示すように、並列接続された複数のヒータを常温の加熱開始操作量Ｌ１から最大加熱操作量Ｌ２まで加熱制御し、加熱開始操作量Ｌ１および最大加熱操作量Ｌ２のヒータ電流値を直線的に結んで仮想特性Ｃを形成し、この仮想特性Ｃの上下に許容範囲である不感帯Ｄを設け、実際のヒータ電流値がその不感帯Ｄを超えて低下した場合、何れかのヒータが断線していると判断している。 In this heater disconnection detecting device, as shown in FIG. 8A, heating control is performed on a plurality of heaters connected in parallel from the normal heating start operation amount L1 to the maximum heating operation amount L2, and the heating start operation amount L1 and the maximum heating operation amount. When a virtual characteristic C is formed by linearly connecting the heater current values of L2, and a dead zone D that is an allowable range is provided above and below the virtual characteristic C, and the actual heater current value decreases beyond the dead zone D, It is determined that one of the heaters is disconnected.
さらに、図８Ｂに示すように、並列接続された複数のヒータを常温の加熱開始操作量Ｌ１から最大加熱操作量Ｌ２まで加熱制御し、常温のヒータ抵抗値又は最小操作量Ｌ１のヒータ抵抗値と最大加熱操作量Ｌ２のヒータ抵抗値の中間値を仮想特性Ｃとし、値が一定で直線的な仮想特性Ｃの上下に許容範囲である不感帯Ｄを設け、実際のヒータ抵抗値がその不感帯Ｄを超えて上昇した場合、何れかのヒータが断線していると判断している。 Further, as shown in FIG. 8B, heating control is performed on the plurality of heaters connected in parallel from the normal heating start operation amount L1 to the maximum heating operation amount L2, and the normal temperature heater resistance value or the minimum resistance value L1 heater resistance value is obtained. An intermediate value of the heater resistance value of the maximum heating operation amount L2 is assumed to be a virtual characteristic C, and a dead zone D that is an allowable range is provided above and below the linear virtual characteristic C with a constant value, and the actual heater resistance value represents the dead zone D. When it rises exceeding, it is judged that one of the heaters is disconnected.
しかも、実際のヒータ電流値又はヒータ抵抗値は、図８Ａ、Ｂ中の破線のように直線的にはならないので、不感帯Ｄを例えば仮想特性Ｃに対して上下２０％ずつ計４０％といったように広く設定し、誤検知しないようにしている。
なお、ヒータ電流値又はヒータ抵抗値がその不感帯Ｄを超えて低下した場合、何れかのヒ一夕に短絡状態が生じていると判断される。
Moreover, since the actual heater current value or heater resistance value does not become linear as shown by the broken lines in FIGS. 8A and 8B, the dead zone D is, for example, 40% in total 20% above and below the virtual characteristic C. Widely set to prevent false detection.
When the heater current value or the heater resistance value decreases beyond the dead zone D, it is determined that a short circuit condition has occurred in any one of the evenings.
特開平１１−２６８１０３号公報（特許文献１）はこの分野のものである。
しかしながら、加熱装置を構成するヒータには、貴金属系ヒータやランプヒータなどに代表されるように、温度による抵抗値変化が大きく、常温時（加熱開始操作量Ｌ１）と定格電力を印加して十分に温まった時（最大加熱操作量Ｌ２）との間で２倍以上抵抗値が違うものが使用される場合がある。 However, as represented by noble metal heaters and lamp heaters, the heater constituting the heating device has a large resistance change due to temperature, and it is sufficient to apply the rated power at normal temperature (heating start operation amount L1). In some cases, a resistor whose resistance value is twice or more different from that when it is warmed up (maximum heating operation amount L2) is used.
このようなヒータでは、図９に示すように、例えば交流電圧を印加して加熱制御する場合、点弧する位相角が大きい状態、すなわち通電位相角Ｐ１からＬ１までの操作量が低い状態から、通電位相角Ｐ５やＬ２からＬ１までのように操作量が高い状態までを測定すると、図１０に示すように、抵抗値が低い状態から高い状態へ曲線状に変化するとともに、温度が低い状態での抵抗値上昇率が大きい。 In such a heater, as shown in FIG. 9, for example, in the case where heating control is performed by applying an AC voltage, from a state where the ignition phase angle is large, that is, from a state where the operation amount from the energization phase angle P1 to L1 is low, As shown in FIG. 10, when the energized phase angle P5 and L2 to L1 are measured up to a high manipulated variable state, the resistance value changes from a low state to a high state in a curved shape, and the temperature is low. The resistance value increase rate is large.
そして、そのような温度による抵抗値変化の大きなヒータが複数個並列接続されている状態において、何れかのヒータが断線したことを検知することは非常に難しい。 And in the state where a plurality of heaters having a large resistance change due to temperature are connected in parallel, it is very difficult to detect that any of the heaters is disconnected.
なぜならば、温度変化に伴ってヒータの抵抗値は、図１０に示すように曲線状に変化するので、そのような実際のヒータ電流値又はヒータ抵抗値が図８Ａ、Ｂの仮想特性Ｃのように直線的にならないうえ、不感帯Ｄを広く設定して誤検知を防止する関係から、何れかのヒータに断線が生じて図８Ａ中の一点鎖線のように電流値が低下しても、下側の不感帯Ｄを超えない可能性又はなかなか超えない可能性があり、断線を検知できない心配がある。 This is because the resistance value of the heater changes in a curve as shown in FIG. 10 as the temperature changes, and such an actual heater current value or heater resistance value is like the virtual characteristic C in FIGS. 8A and 8B. In addition, since the dead zone D is set wide to prevent false detection, even if a break occurs in any of the heaters and the current value decreases as shown by the alternate long and short dash line in FIG. There is a possibility that the dead zone D is not exceeded or may not be easily exceeded, and there is a concern that the disconnection cannot be detected.
ヒータ抵抗値についても、図８Ｂ中の一点鎖線のようにその値が上昇しても、上側の不感帯Ｄを超えない可能性又はなかなか超えない可能性があり、同様に断線を検知できない心配がある。 As for the heater resistance value, even if the value rises like the one-dot chain line in FIG. 8B, there is a possibility that the upper dead zone D may not be exceeded or may not be exceeded easily, and there is a concern that the disconnection cannot be detected similarly. .
特に、並列接続されるヒータの本数が増加すると、これに応じて不惑帯Ｄを広く設定せざるを得ないから、何れかのヒータに断線が生じても下側の不感帯Ｄを超えない事態が生じ易く、断線を的確に検知できない場合がある。 In particular, if the number of heaters connected in parallel increases, the dead zone D must be set accordingly, so that even if any heater breaks, the lower dead zone D is not exceeded. It is easy to occur and the disconnection may not be detected accurately.
逆に、不感帯Ｄを狭く設定すると、並列接続されるヒータに断線が生じていないのに電流値又はヒータの抵抗値が不感帯Ｄを超え易くなり、断腺したと誤検知が生じ易い。 On the contrary, if the dead zone D is set narrow, the current value or the resistance value of the heater tends to exceed the dead zone D even though the heaters connected in parallel are not disconnected, and erroneous detection is likely to occur when the line is disconnected.
特に、一般のユーザは、点弧する位相角が大きい状態、すなわち操作量をあまり高くしない状態で加熱装置を使用し易いので、その領域で不感帯を広く設定すると確実な断線検知が困難となるから、改善が望まれている。 In particular, since a general user can easily use the heating device in a state where the ignition phase angle is large, that is, in a state where the operation amount is not so high, it is difficult to reliably detect disconnection if a wide dead zone is set in that region. Improvement is desired.
本発明はそのような課題を解決するためになされたもので、温度変化に応じて抵抗値が大きく変化するヒータが並列接続されていても、ヒータの断線を確実に検知可能なヒータ断線検知方法の提供を目的とする。 The present invention has been made to solve such a problem, and a heater disconnection detection method capable of reliably detecting disconnection of a heater even when heaters whose resistance values greatly change according to temperature changes are connected in parallel. The purpose is to provide.
このような課題を解決するために本発明のヒータ断線検知方法は、温度上昇によって抵抗値が大きく変化するヒータを複数並列的に接続した当該ヒータの断線を検知するヒータ断線検知方法おいて、そのヒータを事前加熱制御したときの電流値の変化に基づき少なくとも１個の変曲点を通る検知基準特性を取得し、それらヒータを実際に加熱制御したときの電流値がその検知基準特性に設けた許容範囲を超えるとき、それらヒータの何れかが断線したと検知することを特徴としている。 In order to solve such a problem, the heater disconnection detection method of the present invention is a heater disconnection detection method for detecting disconnection of the heater in which a plurality of heaters whose resistance values greatly change due to temperature rise are connected in parallel. Based on the change in the current value when the heater is preheated, a detection reference characteristic passing through at least one inflection point is acquired, and the current value when the heater is actually heated is provided in the detection reference characteristic. When the allowable range is exceeded, it is detected that any one of the heaters is disconnected.
そして、本発明は、上記検知基準特性として、そのヒー夕の加熱開始点から最大加熱点までを結んだ直線的基準特性に対するその事前加熱制御時の電流値の最大偏差点をその変曲点として求め、それら加熱開始点から変曲点を経て最大加熱点へ至るものを用いることが可能である。 In the present invention, as the detection reference characteristic, the maximum deviation point of the current value at the time of the preliminary heating control with respect to the linear reference characteristic connecting the heating start point to the maximum heating point is used as the inflection point. It is possible to use those obtained from the heating start point to the maximum heating point through the inflection point.
さらに、本発明は、上記検知基準特性として、上記変曲点を第１変曲点とし、加熱開始点から第１変曲点間の直線に対する事前加熱制御時の電流値の最大偏差点を第２変曲点とし、それら第１変曲点と最大加熱点間の直線に対する事前加熱制御時の電流値の最大偏差点を第３変曲点として求め、加熱開始点から第２変曲点、第１変曲点、第３変曲点を経て最大加熱点へ至るものを用いることも可能である。 Further, according to the present invention, as the detection reference characteristic, the inflection point is the first inflection point, and the maximum deviation point of the current value during the preheating control with respect to the straight line between the heating start point and the first inflection point is the first inflection point. As the second inflection point, the maximum deviation point of the current value during the preheating control with respect to the straight line between the first inflection point and the maximum heating point is obtained as the third inflection point, and the second inflection point from the heating start point, It is also possible to use the one that reaches the maximum heating point through the first inflection point and the third inflection point.
また、本発明は、上記検知基準特性として、その事前加熱制御時に得られた電流値の間を順次直線的に補間し、各電流値をそれら変曲点として得た特性を用いることも可能である。 In the present invention, as the detection reference characteristic, it is also possible to use a characteristic obtained by sequentially linearly interpolating between current values obtained at the time of the preheating control and obtaining each current value as an inflection point. is there.
さらに、本発明は、上記検知基準特性として、その事前加熱制御時に得られたそれら電流値を多項式で補間してそれら変曲点を複数有する曲線とすることも可能である。 Further, in the present invention, as the detection reference characteristic, a curve having a plurality of inflection points can be obtained by interpolating the current values obtained during the preheating control with a polynomial expression.
しかも、本発明のヒータ断線検知方法は、温度上昇によって抵抗値が大きく変化するヒータを複数並列的に接続した当該ヒータの断線を検知するヒータ断線検知方法おいて、そのヒータを事前加熱制御したときのヒータの抵抗値変化に基づき少なくとも１個の変曲点を通る検知基準特性を取得し、それらヒータを実際に加熱制御したときのヒータの抵抗値がその検知基準特性に設けた許容範囲を超えるとき、それらヒータの何れかが断線したと検知することを特徴としている。 In addition, the heater disconnection detection method of the present invention is a heater disconnection detection method for detecting disconnection of the heater in which a plurality of heaters whose resistance value changes greatly in response to a temperature rise is connected in parallel. A detection reference characteristic that passes through at least one inflection point is acquired based on a change in the resistance value of the heater, and when the heater is actually heated, the resistance value of the heater exceeds an allowable range provided for the detection reference characteristic. At this time, it is characterized in that any one of the heaters is detected to be disconnected.
そして、本発明は、上記検知基準特性として、そのヒー夕の加熱開始点から最大加熱点までを結んだ直線的基準特性に対するその事前加熱制御時のヒータの抵抗値の最大偏差点をその変曲点として求め、それら加熱開始点から変曲点を経て最大加熱点へ至るものを用いることが可能である。 In the present invention, as the detection reference characteristic, the maximum deviation point of the resistance value of the heater at the time of the preliminary heating control with respect to the linear reference characteristic connecting the heating start point to the maximum heating point is inflectioned. It is possible to use a point obtained from the heating start point through the inflection point to the maximum heating point.
さらに、本発明は、上記検知基準特性として、上記変曲点を第１変曲点とし、加熱開始点から第１変曲点間の直線に対する事前加熱制御時のヒータの抵抗値の最大偏差点を第２変曲点とし、それら第１変曲点と最大加熱点間の直線に対する事前加熱制御時のヒータの抵抗値の最大偏差点を第３変曲点として求め、加熱開始点から第２変曲点、第１変曲点、第３変曲点を経て最大加熱点へ至るものを用いることも可能である。 Further, according to the present invention, as the detection reference characteristic, the inflection point is the first inflection point, and the maximum deviation point of the resistance value of the heater at the time of preheating control with respect to a straight line between the heating start point and the first inflection point. Is determined as the second inflection point, the maximum deviation point of the resistance value of the heater during the preheating control with respect to the straight line between the first inflection point and the maximum heating point is obtained as the third inflection point, and the second inflection point is obtained from the heating start point. It is also possible to use the one that reaches the maximum heating point through the inflection point, the first inflection point, and the third inflection point.
また、本発明は、上記検知基準特性として、その事前加熱制御時に得られたヒータの抵抗値の間を直線的に補間し、各ヒータの抵抗値をそれら変曲点として得たものを用いることも可能である。 Further, the present invention uses, as the detection reference characteristic, a linear interpolation between the resistance values of the heaters obtained during the preheating control, and the resistance values of the heaters obtained as the inflection points. Is also possible.
さらに、本発明は、上記検知基準特性として、その事前加熱制御時に得られたそれらヒータの抵抗値を多項式で補間してそれら変曲点を複数有する曲線とすることも可能である。 Furthermore, in the present invention, as the detection reference characteristic, it is possible to obtain a curve having a plurality of inflection points by interpolating the resistance values of the heaters obtained during the preheating control with a polynomial expression.
そのような手段を備えた本発明では、ヒータを事前加熱制御したときのヒータ電流値又はヒータ抵抗値の変化に基づき少なくとも１個の変曲点を通る検知基準特性を取得し、その検知基準特性に設けた許容範囲をそれらヒータの実加熱制御時の電流値又は抵抗値が超えるときヒータ断線を検知するから、ヒータの抵抗値変化に沿った検知基準特性が得られ易く、温度変化に応じて抵抗値が大きく変化するヒータが並列接続されていても、ヒータの断擦を確実に検知可能となる。 In the present invention having such means, a detection reference characteristic passing through at least one inflection point is acquired based on a change in the heater current value or the heater resistance value when the heater is preheated, and the detection reference characteristic is obtained. Since the heater disconnection is detected when the current value or resistance value during the actual heating control of those heaters exceeds the allowable range provided for the heater, it is easy to obtain the detection reference characteristic along the resistance value change of the heater, and according to the temperature change Even when the heaters whose resistance value changes greatly are connected in parallel, the heater can be reliably detected.
そして、上記検知基準特性として、そのヒータの加熱開始点から最大加熱点までの直線的基準特性に対する実加熱制御時のヒータ電流値又はヒータ抵抗値の最大偏差点をその変曲点として求め、それら加熱開始点から変曲点を経て最大加熱点へ至る特性を用いる構成では、検知基準特性を求める演算が簡単で検知が早い利点がある。 Then, as the detection reference characteristic, the maximum deviation point of the heater current value or the heater resistance value in the actual heating control with respect to the linear reference characteristic from the heating start point to the maximum heating point of the heater is obtained as the inflection point. In the configuration using the characteristic from the heating start point to the maximum heating point through the inflection point, there is an advantage that the calculation for obtaining the detection reference characteristic is simple and the detection is quick.
さらに、上記変曲点を第１変曲点として、加熱開始点から第１変曲点間の直線に対する事前加熱制御時のヒータ電流値又はヒータ抵抗値の最大偏差点を第２変曲点とし、第１変曲点と最大加熱点間の直線に対する事前加熱制御時の電流値又はヒータの抵抗値の最大偏差点を第３変曲点として求め、加熱開始点から第２変曲点、第１変曲点、第３変曲点を経て最大加熱点へ至る特性を上記検知基準特性として用いる構成では、ヒータの抵抗特性に近い特性の検知基準特性を簡単に演算可能で検知が早い利点がある。 Further, the inflection point is the first inflection point, and the maximum deviation point of the heater current value or the heater resistance value during the preheating control with respect to the straight line between the heating start point and the first inflection point is the second inflection point. The maximum deviation point of the current value or the heater resistance value during the preheating control with respect to the straight line between the first inflection point and the maximum heating point is obtained as the third inflection point, and the second inflection point, the second inflection point from the heating start point are obtained. In the configuration in which the characteristic from the first inflection point and the third inflection point to the maximum heating point is used as the detection reference characteristic, the detection reference characteristic close to the resistance characteristic of the heater can be easily calculated and the detection is quick. is there.
また、上記検知基準特性として、その事前加熱制御時に得られた各電流値の間を直線的に補間し、各ヒータ電流値又はヒータ抵抗値をそれら変曲点として得た特性を用いる構成では、ヒータの抵抗特性により近い特性の検知基準特性を簡単に演算可能で検知が早い利点がある。 In addition, in the configuration using the characteristic obtained by linearly interpolating between each current value obtained at the time of the preheating control as the detection reference characteristic and obtaining each heater current value or heater resistance value as the inflection point, There is an advantage that the detection reference characteristic closer to the resistance characteristic of the heater can be easily calculated and detection is quick.
さらに、上記検知基準特性として、その事前加熱制御時に得られた各ヒータ電流値又はヒータ抵抗値を多項式で補間して変曲点が複数ある曲線とする構成では、より一層ヒータの抵抗値特性に近い特性の検知基準特性を演算可能である。 Furthermore, as the detection reference characteristic, in the configuration in which each heater current value or heater resistance value obtained during the preheating control is interpolated with a polynomial to form a curve having a plurality of inflection points, the resistance value characteristic of the heater is further increased. It is possible to calculate a detection reference characteristic having a close characteristic.
以下、本発明の実施の形態を図面を参照して説明する。まず、ヒータを加熱する加熱装置の概略から説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. First, the outline of the heating device for heating the heater will be described.
図１は、本発明に係るヒータ断線検知方法を搭載した加熱装置を示すブロック図である。 FIG. 1 is a block diagram showing a heating apparatus equipped with a heater break detection method according to the present invention.
ヒータＨ１、Ｈ２、Ｈ３は各々同じ抵抗体からなり、並列接続されるとともに、交流電源１、電流値検出部３およびスイッチＳＷを介してループ状に直列接続されており、ヒータＨ１〜Ｈ３の並列回路には更に電圧値検出部５が並列接続されている。
The heaters H1, H2, and H3 are each made of the same resistor and are connected in parallel, and are connected in series in a loop through the
各ヒータＨ１〜Ｈ３は、例えば貴金属系ヒータやランプヒータ等のように温度による抵抗値変化が大きく、例えば常温時（加熱開始操作量Ｌ１）と定格電力を印加して十分に温まった時（最大加熱操作量Ｌ２）と間で２倍以上抵抗値が違う抵抗体である。 Each of the heaters H1 to H3 has a large resistance change due to temperature, such as a noble metal heater or a lamp heater, for example, at normal temperature (heating start operation amount L1) and when it is sufficiently warmed by applying rated power (maximum) It is a resistor having a resistance value that is twice or more different from the heating operation amount L2).
交流電源１は、従来公知の例えば１００Ｖや２００Ｖの商用交流電源であり、通電によって各ヒータＨ１〜Ｈ３を加熱するものである。
The
電流値検出部３は、交流電源１とヒータＨ１〜Ｈ３間の閉ループ途中に挿入するように接続されており、ヒータＨ１〜Ｈ３に通電される交流電流値を測定する従来公知の電流センサＣＴであり、後述する制御演算部７に接続されている。
The current value detection unit 3 is connected so as to be inserted in the middle of a closed loop between the
電圧値検出部５は、並列接続されたヒータＨ１〜Ｈ３両端の交流電圧値を測定する回路であり、制御演算部７に接続されている。
The voltage
スイッチＳＷは、交流電源１とヒータＨ１〜Ｈ３間の途中に直列接続されており、制御演算部７からの操作量ＭＶによってヒータＨ１〜Ｈ３に印加する交流電源をオンオフする半導体無接点スイッチや機械的な有接点スイッチである。
The switch SW is connected in series between the
制御演算部７は、ヒータＨ１〜Ｈ３の近傍に配置された温度センサ（図示省略）からの測定値ＰＶと設定値ＳＶとからその偏差が小きくなるような操作量ＭＶを例えばＰＩＤ演算して出力するものであり、駆動部９に接続されている。 The control calculation unit 7 performs, for example, PID calculation on an operation amount MV such that the deviation is small from the measured value PV and the set value SV from a temperature sensor (not shown) arranged in the vicinity of the heaters H1 to H3. This is output and is connected to the drive unit 9.
制御演算部７は、測定値ＰＶが所定の許容範囲を超えたとき、警報信号を出力するようになっている。 The control calculation unit 7 outputs an alarm signal when the measured value PV exceeds a predetermined allowable range.
さらに、制御演算部７は、電流値検出部３からの交流電流値に基づき、ヒータＨ１〜Ｈ３の断線の有無を検知して断線検知信号を出力するようになっている。なお、電圧値検出部５からの交流電圧値および電流検出部３からの交流電流値から求めたヒータの抵抗値に基づくヒータＨ１〜Ｈ３の断線有無の検知については後述する。
Further, the control calculation unit 7 detects the presence or absence of disconnection of the heaters H1 to H3 based on the alternating current value from the current value detection unit 3, and outputs a disconnection detection signal. The detection of the presence or absence of disconnection of the heaters H1 to H3 based on the resistance value of the heater obtained from the AC voltage value from the voltage
これらヒータＨ１〜Ｈ３の断線検知方法が本発明の要部であり、詳細は後述する。 The disconnection detection method of these heaters H1 to H3 is the main part of the present invention, and details will be described later.
駆動部９は、制御演算部７からの操作量ＭＶに応じて交流電源１からの交流電圧をオンオフ駆動するものである。
The drive unit 9 drives the AC voltage from the
すなわち、駆動部９は、上述した図９に示すように、操作量ＭＶが小さい場合、交流電圧の各半周期において位相点Ｌ２からＰ１までスイッチＳＷをオフ制御するとともに、残りのＰ１からＬ１の操作量ＭＶ分だけの短い間だけスイッチＳＷをオン制御して駆動するものであり、操作量ＭＶに応じてスイッチＳＷのオン開始タイミングがＰ１〜Ｐ５、Ｌ２へと早くなる。 That is, as shown in FIG. 9 described above, when the operation amount MV is small, the drive unit 9 controls the switch SW to be turned off from the phase point L2 to P1 in each half cycle of the AC voltage, and the remaining P1 to L1. The switch SW is turned on and driven for a short period of time corresponding to the operation amount MV, and the ON start timing of the switch SW is advanced to P1 to P5 and L2 in accordance with the operation amount MV.
そのため、操作量ＭＶが小さい場合、交流電圧の各半周期において長い位相分でスイッチＳＷがオフ制御されるとともに残りの短い位相分がオン制御されてヒー夕Ｈ１〜Ｈ３が加熱制御され、操作量ＭＶが大きい場合、交流電圧の各半周期において短い位相分でスイッチＳＷがオフ制御されるとともに残りの長い位相分がオン制御されてヒータＨ１〜Ｈ３が加熱制御される。 Therefore, when the manipulated variable MV is small, the switch SW is controlled to be off by a long phase in each half cycle of the AC voltage, and the remaining short phase is controlled to be on to control the heating H1 to H3. When the MV is large, the switch SW is turned off by a short phase in each half cycle of the AC voltage, and the remaining long phase is turned on and the heaters H1 to H3 are heated.
次に、本発明に係るヒータ断線検知方法を説明する。まず、電流値から検知する方法を説明する。 Next, the heater disconnection detection method according to the present invention will be described. First, a method for detecting from a current value will be described.
ヒータＨ１〜Ｈ３が断線していない状況の下において、常温時の加熱開始操作量Ｌ１から定格電力を印加して最大加熱操作量Ｌ２までの間で、制御演算部７から検査用の事前操作量ＭＶを順次出力し、事前に電流値検出部３にて所定のタイミング、例えば上述した図９中Ｌ１、Ｐ１〜Ｐ５、Ｌ２の制御点でヒータ電流値を測定して制御演算部７へ入力する（図２Ａ）。 Under the condition that the heaters H1 to H3 are not disconnected, the control operation unit 7 applies a pre-operation amount for inspection from the heating start operation amount L1 at normal temperature to the maximum heating operation amount L2 after applying the rated power. The MV is sequentially output, the heater current value is measured in advance at a predetermined timing, for example, at the control points L1, P1 to P5, and L2 in FIG. (FIG. 2A).
制御演算部７では、電流値検出部３からの測定電流値に基づき図３Ａの点ｉ１、ｉ２、ｉ３、ｉ４、ｉ５、ｉ６で示すような特性を得るとともに、加熱開始操作量Ｌ１から最大加熱操作量ｉ６までの間を直線的に結んだ直線的基準特性ｓを求める（図２Ｂ）。 The control calculation unit 7 obtains characteristics as indicated by points i1, i2, i3, i4, i5, and i6 in FIG. 3A based on the measured current value from the current value detection unit 3, and maximum heating from the heating start operation amount L1. A linear reference characteristic s that linearly connects the operation amount i6 is obtained (FIG. 2B).
制御演算部７では、電流値検出部３から各電流値ｉ１〜ｉ６と直線的基準特性ｓとの偏差を求めるとともに最も大きな最大偏差点ｉ３を求める（図２Ｃ）。 The control calculation unit 7 obtains a deviation between each of the current values i1 to i6 and the linear reference characteristic s from the current value detection unit 3 and obtains the largest maximum deviation point i3 (FIG. 2C).
さらに、その加熱開始点Ｌ１と最大偏差点ｉ３を直線的に結ぶとともに最大偏差点ｉ３と最大加熱点ｉ６を直線的に結んで「く」字状の検知基準特性Ｓを求め、図３Ｂに示すように、その検知基準特性Ｓの上下に所定の許容範囲を不感帯Ｄとして設定する（図２Ｄ）。 Furthermore, the heating start point L1 and the maximum deviation point i3 are linearly connected, and the maximum deviation point i3 and the maximum heating point i6 are linearly connected to obtain the “<”-shaped detection reference characteristic S, which is shown in FIG. 3B. Thus, a predetermined allowable range is set as a dead zone D above and below the detection reference characteristic S (FIG. 2D).
制御演算部７では、ヒータＨ１〜Ｈ３を実際に加熱制御した際、電流値検出部３からの測定電流値が検知基準特性Ｓの不感帯Ｄを超えて低下したとき、ヒータＨ１〜Ｈ３の何れかが断線したと検知して検知信号を出力する（図２Ｅ）。 When the control calculation unit 7 actually controls the heating of the heaters H1 to H3, when the measured current value from the current value detection unit 3 falls below the dead zone D of the detection reference characteristic S, any one of the heaters H1 to H3 is used. Is detected to output a detection signal (FIG. 2E).
このように、本発明のヒータ断線検知方法によれば、事前にヒータＨ１〜Ｈ３を加熱制御したときの電流値を所定のタイミングで取得し、加熱開始点Ｌ１と最大加熱点ｉ６を直線的に結ぶ直線的基準特性ｓに対するヒータ電流値の最大偏差点ｉ３を求め、その加熱開始点Ｌ１から最大偏差点ｉ３を経て最大加熱点ｉ６へ至る「く」字状の特性を検知基準特性Ｓとして求め、この検知基準特性Ｓに設けた不感帯ＤをヒータＨ１〜Ｈ３の実加熱制御時の電流値が超えるとき、ヒータＨ１〜Ｈ３の断線を検知する。 Thus, according to the heater disconnection detection method of the present invention, the current value when the heaters H1 to H3 are controlled in advance is acquired at a predetermined timing, and the heating start point L1 and the maximum heating point i6 are linearly obtained. The maximum deviation point i3 of the heater current value with respect to the linear reference characteristic s to be connected is obtained, and the “く” -like characteristic from the heating start point L1 through the maximum deviation point i3 to the maximum heating point i6 is obtained as the detection reference characteristic S. When the current value during the actual heating control of the heaters H1 to H3 exceeds the dead zone D provided in the detection reference characteristic S, the disconnection of the heaters H1 to H3 is detected.
そのため、温度による抵抗値変化の大きな複数のヒータが並列接続されていても、最大偏差点ｉ３が変曲点となり、検知基準特性ＳがヒータＨ１〜Ｈ３の測定電流値の変化に近い「く」字状になるから、断線を確実に検知することが可能となる。 Therefore, even if a plurality of heaters having a large resistance change due to temperature are connected in parallel, the maximum deviation point i3 becomes an inflection point, and the detection reference characteristic S is close to the change in the measured current value of the heaters H1 to H3. Since it becomes a letter shape, it becomes possible to detect a disconnection reliably.
しかも、取得したヒータＨ１〜Ｈ３の電流値と直線的基準特性ｓとの最大偏差点ｉ３を求め、その加熱開始点Ｌ１から最大偏差点Ｐ３を経て最大加熱点Ｌ２へ至る直線的特性を検知基準特性Ｓとして求めるから、検知基準特性Ｓを求める手法が簡単で、演算も速い利点がある。 In addition, the maximum deviation point i3 between the acquired current values of the heaters H1 to H3 and the linear reference characteristic s is obtained, and the linear characteristic from the heating start point L1 to the maximum heating point L2 via the maximum deviation point P3 is detected as a reference. Since the characteristic S is obtained, there is an advantage that the method for obtaining the detection reference characteristic S is simple and the calculation is quick.
さらに、検知基準特性ＳがヒータＨ１〜Ｈ３の測定電流値の変化に近い「く」字状になっているから、不感帯Ｄを広げなくても実際のヒータＨ１〜Ｈ３の電流値の変化に近くなって誤動作が少ない一方で、断線の検出が可能である。 Further, since the detection reference characteristic S has a “<” shape close to the change in the measured current value of the heaters H1 to H3, it is close to the actual change in the current value of the heaters H1 to H3 without widening the dead zone D. Thus, disconnection can be detected while there are few malfunctions.
なお、図示はしないが、検知基準特性Ｓは、最大偏差点ｉ３である変曲点を第１変曲点として、加熱開始点Ｌ１からその第１変曲点間の直線に対する事前加熱制御時の電流値の最大偏差点を第２変曲点とし、第１変曲点と最大加熱点Ｌ２間の直線に対する事前加熱制御時の電流値の最大偏差点を第３変曲点として求め、加熱開始点Ｌ１から第２変曲点、第１変曲点、第３変曲点を経て最大加熱点へ至る特性とすることも可能である。 Although not shown in the drawings, the detection reference characteristic S is the value at the time of preheating control for the straight line between the heating start point L1 and the first inflection point, with the inflection point being the maximum deviation point i3 as the first inflection point. The maximum deviation point of the current value is set as the second inflection point, the maximum deviation point of the current value at the time of preheating control with respect to the straight line between the first inflection point and the maximum heating point L2 is obtained as the third inflection point, and heating is started. It is also possible to have a characteristic from the point L1 to the maximum heating point through the second inflection point, the first inflection point, and the third inflection point.
すなわち、加熱開始点Ｌ１から第２変曲点を経た第１変曲点までを「く」字状に、これに続く第１変曲点から第３変曲点を経て最大加熱点Ｌ２までを「く」字状にして、複数に折れた折れ線状にすることも可能である。 That is, from the heating start point L1 to the first inflection point via the second inflection point, a "<" shape, and from the first inflection point to the maximum heating point L2 via the third inflection point. It is also possible to use a “<” shape to form a plurality of broken lines.
このように、複数に折れた折れ線状の検知基準特性Ｓを用いることにより、検知基準特性Ｓが実際のヒータＨ１〜Ｈ３の電流値の変化により近くなり、断線の検出精度が向上する利点がある。 As described above, by using a plurality of broken line-shaped detection reference characteristics S, the detection reference characteristic S becomes closer to the actual change in the current value of the heaters H1 to H3, and there is an advantage that the detection accuracy of disconnection is improved. .
本発明に係るヒータ断線検知方法は上述した構成に限定されず、検知基準特性Ｓを求める手法には種々のものが考えられる。 The heater disconnection detection method according to the present invention is not limited to the above-described configuration, and various methods for obtaining the detection reference characteristic S are conceivable.
例えば、図４に示すように、事前に所定のタイミングで電流値検出部３から電流値ｉｌ〜ｉ６を制御演算部７に入力する（図４Ａ）。電流値ｉ６は最大加熱点Ｌ２に対応する。 For example, as shown in FIG. 4, the current values il to i6 are input from the current value detection unit 3 to the control calculation unit 7 at a predetermined timing in advance (FIG. 4A). The current value i6 corresponds to the maximum heating point L2.
制御演算部７では、図４Ｂに示すように、その事前加熱制御時に得られた隣合う各電流値ｉｌ〜ｉ６間を順次直線的に補間して得た特性を上記検知基準特性Ｓとし、この検知基準特性Ｓに設けた不感帯ＤをヒータＨ１〜Ｈ３の実際加熱制御時の電流値が超えて低下したとき、ヒータＨ１〜Ｈ３の断線を検知する方法である。この方法における検知基準特性Ｓでは各電流値ｉ１〜ｉ５が各々変曲点となる。 In the control calculation unit 7, as shown in FIG. 4B, a characteristic obtained by sequentially linearly interpolating between adjacent current values il to i6 obtained at the time of the preheating control is set as the detection reference characteristic S, This is a method for detecting disconnection of the heaters H1 to H3 when the current value during actual heating control of the heaters H1 to H3 falls below the dead zone D provided in the detection reference characteristic S. In the detection reference characteristic S in this method, the current values i1 to i5 are inflection points.
このようなヒータ断線検知方法では、変曲点ｉｌ〜ｉ５が複数ある曲線近時の特性となり、さらにヒータの抵抗値特性に近い特性の検知基準特性ｓを演算可能であるから、ヒータＨ１〜Ｈ３の断線を確実に検知することが可能となる。 In such a heater breakage detection method, the characteristics near the curve having a plurality of inflection points il to i5 can be obtained, and the detection reference characteristic s close to the resistance value characteristic of the heater can be calculated. It is possible to reliably detect disconnection.
しかも、取得した個々のヒータＨ１〜Ｈ３の電流値ｉ１〜ｉ６を直線的に結んで検知基準特性として求めるから、検知基準特性Ｓを求める手法が簡単で、演算も速い利点があるし、不感帯Ｄを広くする必要もない。 In addition, since the obtained current values i1 to i6 of the individual heaters H1 to H3 are linearly connected to obtain the detection reference characteristic, the method for obtaining the detection reference characteristic S is simple, and there is an advantage that the calculation is fast, and the dead zone D There is no need to widen.
さらに、別の手法として図５に示すような方法もある。 Furthermore, there is a method as shown in FIG. 5 as another method.
すなわち、事前に所定のタイミングで電流値検出蔀３から各電流値ｉ１〜ｉ６を制御演算部７に入力する（図５Ａ）。 That is, the current values i1 to i6 are input to the control calculation unit 7 from the current value detection rod 3 at a predetermined timing in advance (FIG. 5A).
制御演算部７では、図５Ｂに示すように、その事前加熱制御時に得られた各電流値ｉ１〜ｉ６の間を補間多項式、例えば最小二乗法、ラグランジェの補間多項式、ニュートンの近似式等で補間して得た曲線特性を上記検知基準特性Ｓとし、この検知基準特性Ｓに設けた不感帯ＤをヒータＨ１〜Ｈ３の実際の加熱制御時の電流値が超えて低下したとき、ヒータＨ１〜Ｈ３の断線を検知する方法である。 As shown in FIG. 5B, the control calculation unit 7 uses an interpolation polynomial such as a least square method, a Lagrange interpolation polynomial, a Newton approximation, etc. between the current values i1 to i6 obtained during the preheating control. The curve characteristic obtained by interpolation is defined as the detection reference characteristic S. When the current value during actual heating control of the heaters H1 to H3 falls below the dead zone D provided in the detection reference characteristic S, the heaters H1 to H3 are reduced. This is a method of detecting disconnection of the wire.
この方法における検知基準特性Ｓは、複数の変曲点を有する比較的滑らかなカーブを描く特性となり、必ずしも各電流値ｉ１〜ｉ６を通るとは限らず、各電流値ｉ１〜ｉ６が変曲点となるものではない。 The detection reference characteristic S in this method is a characteristic that draws a relatively smooth curve having a plurality of inflection points, and does not necessarily pass through the current values i1 to i6, and the current values i1 to i6 are not inflection points. It will not be.
このようなヒータ断線検知方法では、多数の変曲点を有し滑らかなカーブ状の検知基準特性Ｓを設定するから、ヒータＨ１〜Ｈ３の電流値変化により一層近似した検知基準特性Ｓを求めることが可能で、より正確にヒータＨ１〜Ｈ３の断線を検知することが可能である。 In such a heater disconnection detection method, a smooth curved detection reference characteristic S having a large number of inflection points is set, so that a detection reference characteristic S that is more approximate to the current value change of the heaters H1 to H3 is obtained. It is possible to detect the disconnection of the heaters H1 to H3 more accurately.
次に、本発明に係るヒータ断線検知方法に関し、ヒータＨ１〜Ｈ３の抵抗値変化から検知する方法を説明する。 Next, regarding the heater disconnection detection method according to the present invention, a method of detecting from resistance value changes of the heaters H1 to H3 will be described.
この方法を実施するために、上述した制御演算部７は、電圧値検出部５からの交流電圧値と電流値検出部３からの交流電流値とからオームの法則によって求めたヒータ抵抗値に基づき、ヒータＨ１〜Ｈ３の断線有無を検知して断線検知信号を出力するようになっている。
In order to implement this method, the control calculation unit 7 described above is based on the heater resistance value obtained by the Ohm's law from the AC voltage value from the voltage
まず、ヒータＨ１〜Ｈ３が断線していない状況の下において、常温時の加熱開始操作量Ｌ１から定格電力を印加して最大加熱操作量Ｌ２までの間で、制御演算部７から検査用の事前操作量ＭＶを順次出力し、事前に電流値検出部３にて所定のタイミング、例えば上述した図９中Ｌ１、Ｐ１〜Ｐ５、Ｌ２の制御点で電流値ｉ１、ｉ２、ｉ３、ｉ４、ｉ５、ｉ６を測定して制御演算部７に入力し（図３参照）、更に、電圧値検出部５から同様のタイミングの制御点でヒータ電圧値を測定して制御演算部７に入力し、制御演算部７ではそれら電流値および電圧値からオームの法則によって図７Ａのようなヒータ抵抗値ｒ１、ｒ２、ｒ３、ｒ４、ｒ５、ｒ６を求める（図６Ａ）。
First, in a situation where the heaters H1 to H3 are not disconnected, the control calculation unit 7 applies a pre-inspection in advance from the heating start operation amount L1 at normal temperature to the maximum heating operation amount L2 by applying the rated power. The operation amount MV is sequentially output, and the current values i1, i2, i3, i4, i5, at the control points of L1, P1 to P5, L2 in FIG. i6 is measured and input to the control calculation unit 7 (see FIG. 3), and further, the heater voltage value is measured from the voltage
制御演算部７では、ヒータ電流値とヒータ電圧値に基づきヒータ抵抗値を計算し、図７Ａの点ｒ１〜ｒ６で示すような特性を得る一方、ヒータ抵抗値ｒとｒ６間を直線的に結んだ直線的基準特性ｓを求める（図６Ｂ）。 The control calculation unit 7 calculates the heater resistance value based on the heater current value and the heater voltage value, and obtains characteristics as indicated by points r1 to r6 in FIG. 7A, while linearly connecting the heater resistance values r and r6. A linear reference characteristic s is obtained (FIG. 6B).
制御演算部７では、ヒータ抵抗値ｒ１〜ｒ６と直線的基準特性ｓとの偏差を求めるとともに最も大きな最大偏差点ｒ３を求める（図６Ｃ）。 The control calculation unit 7 obtains the deviation between the heater resistance values r1 to r6 and the linear reference characteristic s and obtains the largest maximum deviation point r3 (FIG. 6C).
さらに、その最小操作量点ｒ１を通り最大偏差点ｉ３に至る直線的基準特性ｓと、最大偏差点ｒ３と最大加熱点ｒ６を直線的に結んた直線を最大偏差点ｒ３で結んだ「く」字状の検知基準特性Ｓを求め、図７Ｂに示すように、その検知基準特性Ｓの上下に所定の許容範囲を不感帯Ｄとして設定する（図６Ｄ）。 Furthermore, a linear reference characteristic s that passes through the minimum manipulated variable point r1 and reaches the maximum deviation point i3 and a straight line that connects the maximum deviation point r3 and the maximum heating point r6 linearly at the maximum deviation point r3. A character-shaped detection reference characteristic S is obtained, and a predetermined allowable range is set as a dead zone D above and below the detection reference characteristic S as shown in FIG. 7B (FIG. 6D).
制御演算部７では、ヒータＨ１〜Ｈ３を実際に加熱制御した際、電流値検出部３からのヒータ電流値および電圧値検出部５から求められたヒータ抵抗値が検知基準特性Ｓの不感帯Ｄを超えて上昇したとき、ヒータＨ１〜Ｈ３の何れかが断線したと検知して検知信号を出力する（図６Ｅ）。
In the control calculation unit 7, when the heaters H <b> 1 to H <b> 3 are actually heated and controlled, the heater current value from the current value detection unit 3 and the heater resistance value obtained from the voltage
このように、本発明のヒータ断線検知方法によれば、事前にヒータＨ１〜Ｈ３を加熱制御したときの電流値ｉ１〜ｉ６および電圧値を所定のタイミングで取得し、これら電流値ｉ１〜ｉ６および電圧値から熱制御したときのヒータ抵抗値ｒ１〜ｒ６をそのタイミングで求め、最小操作量点ｒ１を通り最大加熱点ｒ６に至る直線的基準特性ｓに対するヒータ抵抗値ｒ１〜ｒ６の最大偏差点ｒ３を求め、その最小操作量点ｒ１から最大偏差点ｒ３を経て最大加熱点ｒ６へ至る「く」字状の特性を検知基準特性Ｓとして求め、この検知基準特性Ｓに設けた不感帯ＤをヒータＨ１〜Ｈ３の実加熱制御時のヒータ抵抗値が超えるときヒータＨ１〜Ｈ３の断線を検知する。 Thus, according to the heater disconnection detection method of the present invention, the current values i1 to i6 and the voltage values when the heaters H1 to H3 are controlled in advance are acquired at predetermined timing, and the current values i1 to i6 and The heater resistance values r1 to r6 when thermal control is performed from the voltage value are obtained at that timing, and the maximum deviation point r3 of the heater resistance values r1 to r6 with respect to the linear reference characteristic s that passes through the minimum manipulated variable point r1 and reaches the maximum heating point r6. Is obtained as the detection reference characteristic S from the minimum manipulated variable point r1 through the maximum deviation point r3 to the maximum heating point r6, and the dead zone D provided in the detection reference characteristic S is defined as the heater H1. When the heater resistance value during the actual heating control of .about.H3 exceeds, the disconnection of the heaters H1 to H3 is detected.
そのため、温度による抵抗値変化が大きな複数のヒータが並列接続されていても、最大偏差点ｒ３が変曲点となり、検知基準特性ＳがヒータＨ１〜Ｈ３の実加熱制御時の抵抗値の変化に近い「く」字状になるから、断線を確実に検知することが可能となる。 Therefore, even if a plurality of heaters having a large resistance change due to temperature are connected in parallel, the maximum deviation point r3 becomes an inflection point, and the detection reference characteristic S changes to the resistance value change during actual heating control of the heaters H1 to H3. Since it becomes a near “<” shape, it is possible to reliably detect disconnection.
しかも、求めたヒータＨ１〜Ｈ３の抵抗値と直線的基準特性ｓとの最大偏差点ｒ３を求め、その加熱開始点ｒ１から最大偏差点ｒ３を経て最大加熱点ｒ６へ至る直線的特性を検知基準特性Ｓとして求めるから、検知基準特性Ｓを求める手法が簡単で、演算も速い利点がある。 In addition, the maximum deviation point r3 between the obtained resistance values of the heaters H1 to H3 and the linear reference characteristic s is obtained, and the linear characteristic from the heating start point r1 through the maximum deviation point r3 to the maximum heating point r6 is detected as a reference. Since the characteristic S is obtained, there is an advantage that the method for obtaining the detection reference characteristic S is simple and the calculation is quick.
さらに、検知基準特性ＳがヒータＨ１〜Ｈ３の演算抵抗値の変化に近い「く」字状になっているから、不感帯Ｄを広げなくても実際のヒータＨ１〜Ｈ３の抵抗値の変化に近くなって誤動作が少ない一方で、断線の検出が可能である。 Furthermore, since the detection reference characteristic S has a “<” shape close to the change in the calculated resistance value of the heaters H1 to H3, it is close to the actual change in the resistance value of the heaters H1 to H3 without widening the dead zone D. Thus, disconnection can be detected while there are few malfunctions.
本発明に係るヒータ断線検知方法、すなわちヒータＨ１〜Ｈ３の演算抵抗値の変化から検知基準特性Ｓを求める手法においても種々のものが考えられる。 Various methods are also conceivable for the heater disconnection detection method according to the present invention, that is, a method for obtaining the detection reference characteristic S from changes in the calculated resistance values of the heaters H1 to H3.
例えば、図示はしないが、上述したように、最大偏差点ｒ３である変曲点を第１変曲点として、加熱開始点ｒ１からその第１変曲点間の直線に対する事前加熱制御時の抵抗値の最大偏差点を第２変曲点とし、第１変曲点と最大加熱点ｉ６間の直線に対する事前加熱制御時の電流値の最大偏差点を第３変曲点として求め、加熱開始点ｒ１から第２変曲点、第１変曲点、第３変曲点を経て最大加熱点ｉ６へ至るように、複数に折れた折れ線状の検知基準特性Ｓも可能であり、同様の効果を得ることができる。 For example, although not illustrated, as described above, the inflection point that is the maximum deviation point r3 is set as the first inflection point, and the resistance during the preheating control with respect to the straight line between the heating start point r1 and the first inflection point. The maximum deviation point of the value is set as the second inflection point, the maximum deviation point of the current value during the preheating control with respect to the straight line between the first inflection point and the maximum heating point i6 is obtained as the third inflection point, and the heating start point A plurality of broken line detection reference characteristics S are possible from r1 to the maximum heating point i6 through the second inflection point, the first inflection point, the third inflection point, and the same effect. Obtainable.
さらに、上述した図４に類似した構成、すなわち、事前加熱制御時に得られた各抵抗値ｒｌ〜ｒ６の間を順次直線的に補間して得た特性を上記検知基準特性Ｓとしたり、図５Ｂに類似した構成、すなわち、その事前加熱制御時に得られた各抵抗値ｒ１〜ｒ６の間を補間多項式、例えば最小二乗法、ラグランジェの補間多項式、ニュートンの近似式等で補間して得た曲線特性を上記検知基準特性Ｓとする構成である。 Furthermore, a configuration similar to the above-described FIG. 4, that is, a characteristic obtained by sequentially linearly interpolating between the resistance values rl to r6 obtained during the preheating control is set as the detection reference characteristic S, or FIG. That is, a curve obtained by interpolating between the resistance values r1 to r6 obtained at the time of the preheating control with an interpolation polynomial, for example, a least square method, a Lagrange interpolation polynomial, a Newton approximation, etc. The characteristic is the detection reference characteristic S.
このような検知基準特性Ｓを用いてヒータＨ１〜Ｈ３の断線有無を検知する構成でも、上述したような効果が得られる利点がある。 Even in the configuration in which the presence / absence of disconnection of the heaters H1 to H3 is detected using such a detection reference characteristic S, there is an advantage that the above-described effects can be obtained.
なお、上述した本発明のヒータ断線検知方法では、ヒータＨ１〜Ｈ３の実際の加熱制御時の電流値が検知基準特性Ｓに設けた不感帯Ｄを超えて上昇したとき又はヒータ抵抗値が不感帯Ｄを超えて低下したとき、ヒータＨ１〜Ｈ３の短絡を検知可能である。 In the heater breakage detection method of the present invention described above, when the current value during the actual heating control of the heaters H1 to H3 increases beyond the dead zone D provided in the detection reference characteristic S, or the heater resistance value becomes the dead zone D. When it falls over, it can detect the short circuit of heaters H1-H3.
１ 交流電源
３ 電流値検出部
５ 電圧値検出部
７ 制御演算部
９ 駆動部
Ｈ１、Ｈ２、Ｈ３ ヒータ
ＳＷ スイッチ
DESCRIPTION OF
Claims (10)
前記ヒータを事前加熱制御したときの電流値の変化に基づき少なくとも１個の変曲点を通る検知基準特性を取得し、
前記ヒータを実際に加熱制御した時の電流値が前記検知基準特性に設けた許容範囲を超えるとき、前記ヒータの断線を検知することを特徴とするヒータ断線検知方法。 In the heater disconnection detection method for detecting disconnection of the heaters connected in parallel with a plurality of heaters whose resistance value greatly changes due to temperature rise,
Obtaining a detection reference characteristic passing through at least one inflection point based on a change in current value when the heater is pre-heat controlled;
A heater disconnection detection method, comprising: detecting a disconnection of the heater when a current value when the heater is actually heated exceeds an allowable range provided in the detection reference characteristic.
前記ヒータを事前加熱制御したときのヒータの抵抗値の変化に基づき少なくとも１個の変曲点を通る検知基準特性を取得し、
前記ヒータを実際に加熱制御した時のヒータの抵抗値が前記検知基準特性に設けた許容範囲を超えるとき、前記ヒータの断線を検知することを特徴とするヒータ断線検知方法。 In the heater disconnection detection method for detecting disconnection of the heaters connected in parallel with a plurality of heaters whose resistance value greatly changes due to temperature rise,
Obtaining a detection reference characteristic that passes through at least one inflection point based on a change in the resistance value of the heater when the heater is pre-heat controlled;
A heater break detection method, comprising: detecting a break in the heater when a resistance value of the heater when the heater is actually heated exceeds a tolerance set in the detection reference characteristic.
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