JP2007165167A - Organic el display panel and its manufacturing method - Google Patents

Organic el display panel and its manufacturing method Download PDF

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JP2007165167A
JP2007165167A JP2005361550A JP2005361550A JP2007165167A JP 2007165167 A JP2007165167 A JP 2007165167A JP 2005361550 A JP2005361550 A JP 2005361550A JP 2005361550 A JP2005361550 A JP 2005361550A JP 2007165167 A JP2007165167 A JP 2007165167A
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organic
light emitting
display panel
emitting layer
organic light
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Satoshi Takato
聡 高藤
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Kyocera Display Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an organic EL display panel without impairing a light-emitting characteristic of each pixel and a service life thereof by preventing moisture from permeating organic luminescent layers; and to provide its manufacturing method. <P>SOLUTION: Negative electrodes 8 covering organic luminescent layers 7 are formed by diffusing a formation material 33 of the negative electrodes by deposition by using a mask material 31. Since barrier ribs 9 are slantly formed in response to an expansion angle by the diffusion of the formation material 33 of the negative electrodes in the formation of the negative electrodes 8 by the deposition method, the negative electrodes 8 can be formed up to roots of the barrier ribs 9 without space even in such a lamination form unique to deposition that the formation material 33 of the negative electrodes diffuses with an angle to expand from the center. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、有機ＥＬ表示パネルおよびその製造方法に関するものである。   The present invention relates to an organic EL display panel and a manufacturing method thereof.

有機ＥＬ（エレクトロルミネッセンス）表示パネルとは、陽極電極と陰極電極の間に有機発光層を挟持してなる有機ＥＬ素子基板と、この有機ＥＬ素子基板に対向する封止基板とを、封止基板の外周部に配設した紫外線硬化型樹脂などのシール材により封止したものである。   An organic EL (electroluminescence) display panel includes an organic EL element substrate having an organic light emitting layer sandwiched between an anode electrode and a cathode electrode, and a sealing substrate facing the organic EL element substrate. It is sealed with a sealing material such as an ultraviolet curable resin disposed on the outer periphery of the resin.

この有機ＥＬ表示パネルを構成する有機ＥＬ素子基板は、陽極電極の一面に、例えば画素に相当する矩形領域が複数配列された格子状に区画する絶縁層を形成し、さらにこの絶縁層から立ち上がる隔壁を形成して、この隔壁どうしの間で陽極電極の一面と絶縁層の一部とを覆う有機発光層と陰極電極とを順次積層することによって形成されている。   The organic EL element substrate constituting the organic EL display panel is formed with an insulating layer that is partitioned in a lattice shape in which a plurality of rectangular regions corresponding to pixels, for example, are arranged on one surface of an anode electrode, and further, a partition that rises from the insulating layer And an organic light emitting layer covering the one surface of the anode electrode and a part of the insulating layer and a cathode electrode are sequentially laminated between the partition walls.

ところで、この有機発光層は、水分が僅かに浸透しただけでも特性劣化を起こし、ダークフレームと称される非発光部分の拡大による輝度低下や画素の縮小、あるいは有機ＥＬ表示パネルの寿命低下などを生じさせる原因となる。このため、有機発光層に水分を浸透させないような構造にすることが求められている。
特開２００１−２９６８１９号公報 By the way, this organic light emitting layer causes deterioration of characteristics even when water penetrates slightly, and causes a decrease in luminance, a reduction in pixels due to enlargement of a non-light emitting portion called a dark frame, or a decrease in the life of an organic EL display panel. Cause it to occur. For this reason, it is required to have a structure that does not allow moisture to penetrate into the organic light emitting layer.
JP 2001-296819 A

従来の有機ＥＬ素子基板では、絶縁層によって区画された陽極電極上のそれぞれの矩形領域に、蒸着などによって有機発光層を積層した後、水の浸透しない材質からなる陰極電極を積層して有機発光層を覆うことによって、有機発光層に水分が浸透することを防止する構造であった。   In a conventional organic EL element substrate, an organic light emitting layer is laminated on each rectangular area on an anode electrode partitioned by an insulating layer by vapor deposition or the like, and then a cathode electrode made of a material that does not penetrate water is laminated to produce organic light emission. By covering the layer, the organic light emitting layer was prevented from penetrating moisture.

しかしながら、従来の有機ＥＬ素子基板では、絶縁層上に形成される隔壁が、絶縁層から遠ざかるほど幅が広がる逆三角形状に形成されていたため、蒸着によって陰極電極を形成する際に、隔壁の根元部分に陰極電極の端部が完全に接続させることが難しかった。このため、陰極電極の端部と隔壁との間に隙間ができてしまい、この隙間に露出した有機発光層の端部から、水分が有機発光層の内部まで浸透してしまうという不具合が生じることがあった。   However, in the conventional organic EL element substrate, the partition formed on the insulating layer is formed in an inverted triangle shape whose width increases as the distance from the insulating layer increases. Therefore, when forming the cathode electrode by vapor deposition, It was difficult to completely connect the end portion of the cathode electrode to the portion. For this reason, a gap is formed between the end portion of the cathode electrode and the partition wall, and there is a problem that moisture penetrates from the end portion of the organic light emitting layer exposed in the gap to the inside of the organic light emitting layer. was there.

本発明は上記事情に鑑みてなされたもので、有機発光層に水分が浸透することを防止して、画素の発光特性や寿命などを損なうことがない有機ＥＬ表示パネルおよびその製造方法を提供することを目的とする。   The present invention has been made in view of the above circumstances, and provides an organic EL display panel that prevents moisture from penetrating into the organic light emitting layer and does not impair the light emission characteristics and life of the pixel, and a method for manufacturing the same. For the purpose.

上記の目的を達成するために、本発明によれば、基板に形成された陽極電極を複数の矩形領域が配列された格子状に区画する絶縁層を形成する工程と、前記絶縁層から立ち上がる隔壁を形成する工程と、前記陽極電極と前記絶縁層とを覆う有機発光層を形成する工程と、端部が前記隔壁に接し、前記有機発光層を覆う陰極電極を形成する工程とを有する有機ＥＬ表示パネルの製造方法であって、前記隔壁を形成する工程は、放射光光源から一定の広がり角で放射状に広がる露光光で露光させたフォトレジストを現像して前記隔壁とし、前記陰極電極を形成する工程は、前記陰極電極の形成材料を前記放射光光源と略同一の広がり角で前記有機発光層に向けて放射状に拡散、積層させる蒸着法によって行うことを特徴とする有機ＥＬ表示パネルの製造方法が提供される。また、前記広がり角は１０°〜３０°の範囲に設定されればよい。   In order to achieve the above object, according to the present invention, a step of forming an insulating layer that partitions an anode electrode formed on a substrate in a lattice shape in which a plurality of rectangular regions are arranged, and a partition that rises from the insulating layer Forming an organic light-emitting layer that covers the anode electrode and the insulating layer, and forming a cathode electrode that is in contact with the partition and covers the organic light-emitting layer. In the method of manufacturing a display panel, the step of forming the partition includes developing a photoresist exposed to exposure light that spreads radially from a radiant light source at a certain spread angle to form the partition, and forming the cathode electrode The organic EL display panel is characterized in that the step of performing is performed by a vapor deposition method in which the material for forming the cathode electrode is radially diffused and laminated toward the organic light emitting layer at substantially the same spread angle as that of the synchrotron radiation source. Manufacturing method is provided. The spread angle may be set in a range of 10 ° to 30 °.

また、本発明によれば、基板に形成された陽極電極を複数の矩形領域が配列された格子状に区画する絶縁層と、前記絶縁層から立ち上がる隔壁と、前記陽極電極と前記絶縁層とを覆う有機発光層と、端部が前記隔壁に接し、前記有機発光層を覆う陰極電極とを有する有機ＥＬ表示パネルであって、前記隔壁を構成する側壁は、前記基板の中心方向に向けて傾斜するように形成され、前記側壁の傾斜角度を、前記基板の中心から周縁方向に遠ざかる位置に形成される隔壁ほど大きくすることを特徴とする有機ＥＬ表示パネルが提供される。   Further, according to the present invention, the insulating layer that partitions the anode electrode formed on the substrate in a lattice shape in which a plurality of rectangular regions are arranged, the partition wall rising from the insulating layer, the anode electrode, and the insulating layer are provided. An organic EL display panel having an organic light emitting layer to be covered and a cathode electrode having an end portion in contact with the partition and covering the organic light emitting layer, wherein a side wall constituting the partition is inclined toward a center direction of the substrate Thus, an organic EL display panel is provided, wherein the partition wall formed at a position away from the center of the substrate in the peripheral direction is increased in inclination angle of the side wall.

本発明の有機ＥＬ表示パネルの製造方法によれば、陰極電極形成時の形成材料の拡散による広がり角に対応して、隔壁が傾斜して形成されているため、陰極電極の形成材料が中心から広がるように角度をもって拡散していくような蒸着特有の積層形態であっても、陰極電極を隔壁の根元まで隙間無く形成することが可能になる。   According to the method for manufacturing an organic EL display panel of the present invention, since the partition walls are inclined corresponding to the spread angle due to diffusion of the forming material at the time of forming the cathode electrode, the cathode electrode forming material starts from the center. Even in a laminated form unique to vapor deposition that diffuses at an angle so as to spread, the cathode electrode can be formed to the base of the partition wall without a gap.

従来のような、逆三角形の隔壁では、蒸着特有の形成材料の広がりによって隔壁の根元が陰になって陰極電極が形成されずに有機発光層の端部が露出してしまうことがあった。しかし、本発明のように隔壁を中心に向かって傾斜するように形成することで、隔壁の根元部分まで透水性の無い陰極電極が形成されて有機発光層を端部まで完全に覆うことができるので、有機発光層の端面を露出させずに、有機発光層への水分の浸透を完全に防止することが可能になる。   In the conventional inverted triangular barrier rib, the base of the barrier rib is shaded by the spread of the formation material peculiar to vapor deposition, and the end portion of the organic light emitting layer may be exposed without forming the cathode electrode. However, by forming the partition so as to be inclined toward the center as in the present invention, a cathode electrode having no water permeability is formed up to the base of the partition, and the organic light emitting layer can be completely covered to the end. Therefore, it is possible to completely prevent the penetration of moisture into the organic light emitting layer without exposing the end face of the organic light emitting layer.

これにより、捕水材などで完全に捕捉しきれずに残留している水分があったとしても、有機発光層に浸透することが無く、有機発光層が水分の浸透によって特性劣化を起こし、ダークフレームなどの非発光部分の拡大による輝度低下や画素の縮小、あるいは有機ＥＬ表示パネルの寿命低下などの不具合の発生を効果的に防止することが可能になる。   As a result, even if there is moisture remaining that cannot be completely captured by the water catching material, the organic light emitting layer will not penetrate into the organic light emitting layer, causing the organic light emitting layer to deteriorate in characteristics due to moisture penetration, and the dark frame It is possible to effectively prevent the occurrence of problems such as a decrease in luminance, a reduction in pixels, or a decrease in the lifetime of the organic EL display panel due to the enlargement of the non-light emitting part.

以下、本発明に係る有機ＥＬ表示パネルについて、図面を参照して説明する。図１は、本実施形態に係る有機ＥＬ表示パネルの一例を示す概略断面図である。有機ＥＬ表示パネル１は、有機ＥＬ素子基板（基板）２と、有機ＥＬ素子基板２に対向する封止基板３と、これら基板を接合して有機ＥＬ素子を封止するシール材４と、有機ＥＬ素子基板２と封止基板３とシール材４とから形成される密封空間に設けた捕水材５とから概略構成されている。   Hereinafter, an organic EL display panel according to the present invention will be described with reference to the drawings. FIG. 1 is a schematic cross-sectional view showing an example of an organic EL display panel according to this embodiment. The organic EL display panel 1 includes an organic EL element substrate (substrate) 2, a sealing substrate 3 facing the organic EL element substrate 2, a sealing material 4 that seals the organic EL element by bonding these substrates, and organic A water collecting material 5 provided in a sealed space formed by the EL element substrate 2, the sealing substrate 3, and the sealing material 4 is schematically configured.

有機ＥＬ素子基板２は、例えば厚さ０．４〜１．１ｍｍの透明なガラス基板からなり、その上には、ＩＴＯ等の透明な陽極電極１１が形成されている。有機ＥＬ素子基板２の下部側１０は、いわゆる視認側に当たる。   The organic EL element substrate 2 is made of, for example, a transparent glass substrate having a thickness of 0.4 to 1.1 mm, and a transparent anode electrode 11 such as ITO is formed thereon. The lower side 10 of the organic EL element substrate 2 corresponds to a so-called viewing side.

そして、陽極電極１１上には、光源となる有機発光層７，７・・・、アルミニウム等の金属材料からなる陰極電極８，８・・・、ポリイミド樹脂等からなる絶縁層６，６・・・が形成され、陽極電極１１と陰極電極８とで有機発光層７を挟み込んで電流を印加できるようになっている。また、絶縁層６，６・・・上には、ノボラック樹脂等からなる隔壁９，９・・・が立ち上がるように形成されている。   On the anode electrode 11, organic light emitting layers 7, 7... Serving as a light source, cathode electrodes 8, 8... Made of a metal material such as aluminum, insulating layers 6, 6. The organic light emitting layer 7 is sandwiched between the anode electrode 11 and the cathode electrode 8 so that a current can be applied. Further, on the insulating layers 6, 6,..., Partition walls 9, 9,.

封止基板３は、例えばガラス、アクリル系樹脂などからなり、有機ＥＬ素子基板２を覆うように設けられている。また、封止基板３の形状は、平板上の基板の外周部に凸部が設けられたものとなっており、この凸部が、シール材４を介して有機ＥＬ素子基板２と接合されることにより、有機ＥＬ素子が封止されている。   The sealing substrate 3 is made of, for example, glass or acrylic resin, and is provided so as to cover the organic EL element substrate 2. Further, the shape of the sealing substrate 3 is such that a convex portion is provided on the outer peripheral portion of the substrate on the flat plate, and this convex portion is joined to the organic EL element substrate 2 via the sealing material 4. As a result, the organic EL element is sealed.

シール材４は、例えばエポキシ系、アクリル系等の紫外線硬化型樹脂からなるものである。これらのなかでも、外部からの水分の浸入を防止する点から、透水性の低い樹脂であることが好ましい。   The sealing material 4 is made of, for example, an epoxy-based or acrylic-based ultraviolet curable resin. Among these, a resin having low water permeability is preferable from the viewpoint of preventing moisture from entering from the outside.

凸部で囲まれた封止基板３の表面上には、全面に渡って捕水材５が設けられている。捕水材５は、凸部で囲まれた封止基板３の表面全面ではなく、一部に設けても良いが、パネル内における捕水効率を上げるために、全面に渡って設けることが好ましい。なお、捕水材とは、捕水機能を有する物質を粘性のある溶媒に混合したものであり、捕水機能を有する物質としては、例えば、ゼオライト、アルミナ、シリカゲル、モレキュラーシーブなどの物理吸着型のものや、酸化カルシウム、酸化バリウム、酸化マグネシウム、硫酸ナトリウム、硫酸カルシウム、硫酸チタンなどの化学吸着型のものを挙げることができる。   A water catching material 5 is provided over the entire surface of the sealing substrate 3 surrounded by the convex portions. The water catching material 5 may be provided not on the entire surface of the sealing substrate 3 surrounded by the convex portions but on a part thereof. However, in order to increase the water catching efficiency in the panel, it is preferably provided over the entire surface. . The water catching material is obtained by mixing a substance having a water catching function in a viscous solvent. Examples of the substance having a water catching function include a physical adsorption type such as zeolite, alumina, silica gel, and molecular sieve. And chemisorption types such as calcium oxide, barium oxide, magnesium oxide, sodium sulfate, calcium sulfate, and titanium sulfate.

図２は、有機ＥＬ素子基板の部分拡大断面図である。有機ＥＬ表示パネル１は、互いに隣接する絶縁層６，６・・・どうしの間が、例えば１つの画素領域Ｐとされる。この画素領域Ｐにおいて、陽極電極１１と陰極電極８に挟まれた有機発光層７に電流を印加することで、有機発光層７を発光させる。   FIG. 2 is a partial enlarged cross-sectional view of the organic EL element substrate. In the organic EL display panel 1, for example, one pixel region P is formed between the insulating layers 6, 6. In the pixel region P, the organic light emitting layer 7 is caused to emit light by applying a current to the organic light emitting layer 7 sandwiched between the anode electrode 11 and the cathode electrode 8.

絶縁層６，６・・・の上に形成される隔壁９，９・・・は、図１に示すように、有機ＥＬ素子基板（基板）２の中心Ｒに向けて傾斜するように形成されている。そして、隔壁９，９・・・の傾斜角度は、有機ＥＬ素子基板２の中心Ｒから周縁方向Ｅに向けて遠ざかる位置に形成される隔壁ほど大きくなっている。こうした隔壁９，９・・・の傾斜は、後ほど詳述する有機ＥＬ表示パネルの製造方法における、陰極電極を蒸着法によって形成する際の陰極電極材料の広がり（拡散）Ｓに対応している（図２参照）。なお、隔壁９，９・・・の傾斜の作用は後述する。   The partition walls 9, 9... Formed on the insulating layers 6, 6... Are formed so as to be inclined toward the center R of the organic EL element substrate (substrate) 2 as shown in FIG. ing. Further, the inclination angle of the partition walls 9, 9... Is larger as the partition wall is formed at a position away from the center R of the organic EL element substrate 2 in the peripheral direction E. The inclination of the partition walls 9, 9... Corresponds to the spread (diffusion) S of the cathode electrode material when the cathode electrode is formed by vapor deposition in the method of manufacturing the organic EL display panel described in detail later ( (See FIG. 2). In addition, the effect | action of the inclination of the partition 9, 9 ... is mentioned later.

画素領域Ｐの外側で、それぞれの有機発光層７や陰極電極８は、絶縁層６の端部に乗り上げるように形成される。そして、有機発光層７や陰極電極８は、端部が隔壁９の側面に接する。すなわち、有機発光層７は金属材料などで形成された透水性の無い陰極電極８によって端部まで完全に覆われ、端面などが露出することがない。   Outside the pixel region P, the respective organic light emitting layers 7 and cathode electrodes 8 are formed so as to run over the end portions of the insulating layer 6. The organic light emitting layer 7 and the cathode electrode 8 are in contact with the side surfaces of the partition walls 9 at the ends. That is, the organic light emitting layer 7 is completely covered to the end by the non-water-permeable cathode electrode 8 formed of a metal material or the like, and the end face or the like is not exposed.

このように、金属膜など透水性の無い材料で形成された陰極電極８によって有機発光層７を端部まで完全に覆うことによって、従来課題であった、有機発光層の端面から絶縁層６との界面に沿って水分が有機発光層の奥まで浸透してしまうといったことを確実に防止することが可能になる。   In this way, the organic light emitting layer 7 is completely covered to the end portion by the cathode electrode 8 formed of a material having no water permeability such as a metal film, so that the insulating layer 6 and the end surface of the organic light emitting layer, which has been a conventional problem, are formed. It is possible to reliably prevent moisture from penetrating into the organic light emitting layer along the interface.

これにより、捕水材５で完全に捕捉しきれずに残留している水分があったとしても有機発光層７に浸透することが無く、有機発光層７が水分の浸透によって特性劣化を起こし、ダークフレームなどの非発光部分の拡大による輝度低下や画素の縮小、あるいは有機ＥＬ表示パネルの寿命低下などの不具合の発生を効果的に防止することが可能になる。   As a result, even if there is moisture that cannot be completely captured by the water catching material 5, it does not permeate the organic light emitting layer 7, and the organic light emitting layer 7 is deteriorated in characteristics due to the permeation of moisture. It is possible to effectively prevent the occurrence of problems such as a reduction in luminance, a reduction in pixels, or a reduction in the lifetime of the organic EL display panel due to an enlargement of a non-light emitting portion such as a frame.

次に、本発明の有機ＥＬ表示パネルの製造方法について説明する。図３は、本発明の有機ＥＬ表示パネルを製造するにあたって、有機ＥＬ素子基板に有機発光層や隔壁などを形成する工程を示した説明図である。まず、図３（ａ）に示すように、例えば透明なガラスからなる有機ＥＬ素子基板２の一面２ａ上に、ＩＴＯからなる透明な陽極電極１１を形成する。   Next, the manufacturing method of the organic EL display panel of the present invention will be described. FIG. 3 is an explanatory view showing a process of forming an organic light emitting layer, a partition wall and the like on the organic EL element substrate in manufacturing the organic EL display panel of the present invention. First, as shown in FIG. 3A, a transparent anode electrode 11 made of ITO is formed on one surface 2a of an organic EL element substrate 2 made of, for example, transparent glass.

そして、この陽極電極１１の一面１１ａ上に、例えばポリイミド樹脂等からなる絶縁層６を格子状に形成し、陽極電極１１を画素に相当する矩形領域ごと区画する。こうした絶縁層６を格子状に形成するには、例えば、絶縁材料を陽極電極１１の一面１１ａ全体に形成した後、フォトレジスト等によって絶縁材料のエッチングを行うことで形成すればよい。あるいは、格子状のマスクを用いて蒸着する方法で形成されればよい。   Then, an insulating layer 6 made of, for example, polyimide resin or the like is formed in a lattice shape on one surface 11a of the anode electrode 11, and the anode electrode 11 is partitioned for each rectangular region corresponding to a pixel. In order to form the insulating layer 6 in a lattice shape, for example, an insulating material may be formed on the entire surface 11a of the anode electrode 11 and then etched by using a photoresist or the like. Or what is necessary is just to form by the method of vapor-depositing using a lattice-like mask.

次に、図３（ｂ）に示すように、絶縁層６を覆うように、陽極電極１１の一面１１ａに隔壁形成材料（フォトレジスト）２１を積層する。隔壁形成材料２１としては、例えばノボラック樹脂などのフォトレジストが好ましく挙げられる。そして、図３（ｃ）に示すように、開口２２ａを備えたマスク材２２を隔壁形成材料２１の上面に載置して、光源２３から露光光Ｌを照射することにより、開口２２ａに対応した部分だけ露光部分２１ａとして硬化し、マスク材２２で覆われた部分は露光光Ｌに当たらずに未露光部分２１ｂとして残る。   Next, as shown in FIG. 3B, a partition wall forming material (photoresist) 21 is laminated on the one surface 11 a of the anode electrode 11 so as to cover the insulating layer 6. As the partition wall forming material 21, for example, a photoresist such as a novolac resin is preferably exemplified. And as shown in FIG.3 (c), the mask material 22 provided with the opening 22a was mounted on the upper surface of the partition wall formation material 21, and the exposure light L was irradiated from the light source 23, and it corresponded to the opening 22a. Only the portion is cured as the exposed portion 21a, and the portion covered with the mask material 22 is not exposed to the exposure light L but remains as the unexposed portion 21b.

こうした隔壁形成材料（フォトレジスト）２１の露光にあたって、光源２３として放射光を照射する放射光光源が用いられる。光源２３から照射される放射光は、光軸Ｑを中心にして一定の広がり角（照射角）で放射状に広がる。この後、図４（ａ）に示すように、弱アルカリ液などの現像液を用いて、露光済みの隔壁形成材料（フォトレジスト）２１を現像する。これにより、図４（ｂ）に示すように、絶縁層６の上にフォトレジストからなる隔壁９，９・・・が形成される。この隔壁９，９・・・は、放射光によって露光したために、有機ＥＬ素子基板（基板）２の中心に向かって斜めに傾斜している。こうした隔壁９，９・・・の傾斜は、後述する蒸着法による陰極電極の形成時における陰極電極の形成材料の拡散角度に略等しくなっている。   In the exposure of the partition wall forming material (photoresist) 21, a radiant light source that emits radiant light is used as the light source 23. The emitted light emitted from the light source 23 spreads radially around the optical axis Q at a constant spread angle (irradiation angle). Thereafter, as shown in FIG. 4A, the exposed partition wall forming material (photoresist) 21 is developed using a developing solution such as a weak alkaline solution. As a result, as shown in FIG. 4B, partition walls 9, 9... Made of photoresist are formed on the insulating layer 6. The partition walls 9, 9... Are inclined obliquely toward the center of the organic EL element substrate (substrate) 2 because they are exposed by the emitted light. These inclinations of the barrier ribs 9, 9... Are substantially equal to the diffusion angle of the cathode electrode forming material when the cathode electrode is formed by a vapor deposition method to be described later.

次に、図５（ａ）に示すように、蒸着マスク材３１を用いて、有機発光層の形成材料３２を蒸着によって拡散させ、陽極電極１１の一面１１ａから絶縁層６の端部までを覆う有機発光層７を形成する。つづいて、図５（ｂ）に示すように、蒸着マスク材３１を用いて陰極電極の形成材料３３を蒸着によって拡散させ、有機発光層７を覆う陰極電極８を形成する。なお、蒸着マスク材３１を使用しないで各種材料を蒸着しても、隔壁９，９・・・によって隣接する陰極電極８，８・・・を分離することができる。しかし、陰極電極８，８・・・を確実に分離する観点から蒸着マスク材３１を使用して蒸着することが好ましい。   Next, as shown in FIG. 5A, the formation material 32 of the organic light emitting layer is diffused by vapor deposition using the vapor deposition mask material 31 to cover from one surface 11 a of the anode electrode 11 to the end of the insulating layer 6. The organic light emitting layer 7 is formed. Subsequently, as shown in FIG. 5B, the cathode electrode forming material 33 is diffused by vapor deposition using the vapor deposition mask material 31 to form the cathode electrode 8 covering the organic light emitting layer 7. In addition, even if various materials are vapor-deposited without using the vapor deposition mask material 31, the adjacent cathode electrodes 8, 8,. However, it is preferable to perform vapor deposition using the vapor deposition mask material 31 from the viewpoint of reliably separating the cathode electrodes 8, 8.

この蒸着法による陰極電極８の形成では、陰極電極の形成材料３３の拡散による広がり角に対応して、隔壁９，９・・・が傾斜して形成されているため、陰極電極の形成材料３３が中心から広がるように角度をもって拡散していくような蒸着特有の積層形態であっても、陰極電極８を隔壁９，９・・・の根元まで隙間無く形成することが可能になる。   In the formation of the cathode electrode 8 by this vapor deposition method, since the partition walls 9, 9... Are inclined corresponding to the spread angle due to the diffusion of the cathode electrode forming material 33, the cathode electrode forming material 33 is formed. Even in a laminated form peculiar to vapor deposition that diffuses at an angle so that the gap spreads from the center, the cathode electrode 8 can be formed to the base of the barrier ribs 9, 9.

従来のような、逆三角形の隔壁では、蒸着特有の形成材料の広がりによって隔壁の根元が陰になって陰極電極が形成されずに有機発光層の端部が露出してしまうことがあった。しかし、本発明のように隔壁９，９・・・を中心に向かって傾斜するように形成することで、隔壁９の根元部分まで透水性の無い陰極電極８が形成されて有機発光層７を端部まで完全に覆うことができるので、有機発光層７の端面を露出させずに、有機発光層７への水分の浸透を完全に防止することが可能になる。   In the conventional inverted triangular barrier rib, the base of the barrier rib is shaded by the spread of the formation material peculiar to vapor deposition, and the end portion of the organic light emitting layer may be exposed without forming the cathode electrode. However, by forming the barrier ribs 9, 9... So as to be inclined toward the center as in the present invention, the cathode electrode 8 having no water permeability is formed up to the root portion of the barrier rib 9, and the organic light emitting layer 7 is formed. Since the end portion can be completely covered, it is possible to completely prevent the penetration of moisture into the organic light emitting layer 7 without exposing the end face of the organic light emitting layer 7.

本発明の有機ＥＬ表示パネルの一例を示す断面図である。It is sectional drawing which shows an example of the organic electroluminescent display panel of this invention. 図１の部分拡大図である。It is the elements on larger scale of FIG. 本発明の有機ＥＬ表示パネルの製造方法を示す説明図である。It is explanatory drawing which shows the manufacturing method of the organic electroluminescence display panel of this invention. 本発明の有機ＥＬ表示パネルの製造方法を示す説明図である。It is explanatory drawing which shows the manufacturing method of the organic electroluminescence display panel of this invention. 本発明の有機ＥＬ表示パネルの製造方法を示す説明図である。It is explanatory drawing which shows the manufacturing method of the organic electroluminescence display panel of this invention.

符号の説明Explanation of symbols

１…有機ＥＬ表示パネル、２…有機ＥＬ素子基板（基板）、３…封止基板、６…絶縁層、７…有機発光層、８…陰極電極、９…隔壁、２３…光源（放射光光源）。


DESCRIPTION OF SYMBOLS 1 ... Organic EL display panel, 2 ... Organic EL element substrate (substrate), 3 ... Sealing substrate, 6 ... Insulating layer, 7 ... Organic light emitting layer, 8 ... Cathode electrode, 9 ... Partition, 23 ... Light source (radiant light source) ).


Claims (3)

基板に形成された陽極電極を複数の矩形領域が配列された格子状に区画する絶縁層を形成する工程と、前記絶縁層から立ち上がる隔壁を形成する工程と、前記陽極電極と前記絶縁層とを覆う有機発光層を形成する工程と、端部が前記隔壁に接し、前記有機発光層を覆う陰極電極を形成する工程とを有する有機ＥＬ表示パネルの製造方法であって、
前記隔壁を形成する工程は、放射光光源から一定の広がり角で放射状に広がる露光光で露光させたフォトレジストを現像して前記隔壁とし、前記陰極電極を形成する工程は、前記陰極電極の形成材料を前記放射光光源と略同一の広がり角で前記有機発光層に向けて放射状に拡散、積層させる蒸着法によって行うことを特徴とする有機ＥＬ表示パネルの製造方法。 A step of forming an insulating layer that partitions the anode electrode formed on the substrate into a grid in which a plurality of rectangular regions are arranged, a step of forming a partition rising from the insulating layer, and the anode electrode and the insulating layer. A method of manufacturing an organic EL display panel, comprising: forming an organic light emitting layer to cover; and forming a cathode electrode whose end is in contact with the partition and covers the organic light emitting layer.
The step of forming the barrier rib is a step of developing a photoresist exposed to exposure light that radiates radially from a synchrotron radiation source at a certain spread angle to form the barrier rib, and the step of forming the cathode electrode includes forming the cathode electrode. A method for producing an organic EL display panel, characterized by performing a vapor deposition method in which a material is diffused and laminated radially toward the organic light emitting layer at substantially the same spread angle as that of the synchrotron radiation source. 前記広がり角は１０°〜３０°の範囲に設定されることを特徴とする請求項１に記載の有機ＥＬ表示パネルの製造方法。   The method of manufacturing an organic EL display panel according to claim 1, wherein the spread angle is set in a range of 10 ° to 30 °. 基板に形成された陽極電極を複数の矩形領域が配列された格子状に区画する絶縁層と、前記絶縁層から立ち上がる隔壁と、前記陽極電極と前記絶縁層とを覆う有機発光層と、端部が前記隔壁に接し、前記有機発光層を覆う陰極電極とを有する有機ＥＬ表示パネルであって、
前記隔壁を構成する側壁は、前記基板の中心方向に向けて傾斜するように形成され、前記側壁の傾斜角度を、前記基板の中心から周縁方向に遠ざかる位置に形成される隔壁ほど大きくすることを特徴とする有機ＥＬ表示パネル。

An insulating layer that divides the anode electrode formed on the substrate into a grid in which a plurality of rectangular regions are arranged, a partition rising from the insulating layer, an organic light emitting layer that covers the anode electrode and the insulating layer, and an end portion An organic EL display panel having a cathode electrode in contact with the partition and covering the organic light emitting layer,
Side walls constituting the partition walls are formed so as to be inclined toward the center direction of the substrate, and the inclination angle of the side walls is increased as the partition wall is formed at a position away from the center of the substrate in the peripheral direction. A characteristic organic EL display panel.

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